Load lock door for grid transfer to ensure position repeatability

Abstract

Embodiments described herein relate to systems and / or methods that provide positional repeatability in closing an aperture of a scientific instrument and / or positional repeatability of alignment of a sample with respect to a coordinate system of the scientific instrument.SOLUTION: The system includes a holding member for receiving a sample support cartridge, a first portion of a kinematic coupling for receiving a second portion of the kinematic coupling, and a second portion of the kinematic coupling disposed on the holding member, wherein at least the first portion or the second portion of the kinematic coupling is disposed for conjoint movement with the sample support cartridge when coupled to the holding member. The system may include a vacuum chamber body, a vacuum chamber door, and a kinematic coupling that enables adjustable alignment of a sample support cartridge in the vacuum chamber door relative to the vacuum chamber body.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present application relates to a grid transport load lock door for ensuring position repeatability. [Background technology]

[0002] Scientific imaging devices utilize focused energy beams or charged particles, careful sample preparation, controlled environmental conditions, and / or specialized computer systems to enable high-magnification observations to obtain high-resolution images of a sample. To properly provide each of these elements, and thus to produce accurate, information-rich images of the sample, it is important that the sample be accurately and reproducibly delivered, including positioning and / or alignment, to one or more moving and / or imaging elements of the scientific imaging device. [Brief explanation of the drawings]

[0003]

[0013] Embodiments of the present invention will be readily understood through the following detailed description, taken in conjunction with the accompanying drawings, in which:

[0014] To facilitate this description, like reference numerals will refer to like elements;

[0015] Embodiments of the present invention are illustrated by way of example, and not by way of limitation, in the accompanying drawings, in which: [Figure 1] FIG. 1 is a block diagram of an exemplary scientific instrument for performing one or more operations in combination with a non-limiting sample positioning system according to one or more embodiments described herein. [Figure 2] FIG. 1 illustrates a graphical user interface (GUI) that can be used to perform one or more of the methods described herein, according to one or more embodiments described herein. [Figure 3] FIG. 1 is a block diagram of an example computing device capable of performing one or more of the methods disclosed herein, in accordance with one or more embodiments described herein. [Figure 4] FIG. 2 is a schematic top view illustrating a portion of a chamber door assembly for use with the exemplary scientific instrument of FIG. 1, in accordance with one or more embodiments described herein. [Figure 5] FIG. 5 is a schematic chamber side view of a portion of the chamber door assembly of FIG. 4 according to one or more embodiments described herein. [Figure 6] 5 is a schematic top view of a portion of a sample positioning system including the chamber door assembly of FIG. 4 used with the exemplary scientific instrument of FIG. 1 in accordance with one or more embodiments described herein. [Figure 7] 7 illustrates a partial top view, from the chamber side, of the sample positioning system of FIG. 6 for use with the exemplary scientific instrument of FIG. 1 , including the chamber door assembly and sample support assembly of FIG. 4 , in accordance with one or more embodiments described herein. [Figure 8] 2 is an orthogonal view of a grid holder for use in carrying a flake for positioning within the scientific instrument of FIG. 1 in accordance with one or more embodiments described herein. [Figure 9] 8 is an orthogonal view from the chamber side of the sample support assembly of FIG. 7 used to hold and position multiple grid holders of FIG. 8 outside and inside the scientific instrument of FIG. 1 in accordance with one or more embodiments described herein. [Figure 10] 10 is an orthogonal view looking outward from the door of the sample support assembly of FIG. 9 used to hold and position one or more grid holders of FIG. 8 outside and inside the scientific instrument of FIG. 1 in accordance with one or more embodiments described herein. [Figure 11] FIG. 10 illustrates a top, front, orthogonal view of the sample support assembly of FIG. 9 with components spaced apart from one another, according to one or more embodiments described herein. [Figure 12] 10A and 10B are top, front, and bottom orthogonal views of the sample support cartridge of the sample support assembly of FIG. 9 according to one or more embodiments described herein. [Figure 13]10 is a top, front, orthogonal view of the positioning portion of the sample support assembly of FIG. 9 according to one or more embodiments described herein. [Figure 14] FIG. 10 is a front orthogonal view of a flex adjustment portion of the sample support assembly of FIG. 9 according to one or more embodiments described herein. [Figure 15] FIG. 10 shows a flow diagram of a method of using the sample positioning system described herein, in accordance with one or more embodiments described herein. [Figure 16] FIG. 10 shows a flowchart of another method of using the sample positioning system described herein, in accordance with one or more embodiments described herein. [Figure 17] FIG. 17 shows a continuation of FIG. 16 of a flowchart of a method of using the sample positioning system described herein, in accordance with one or more embodiments described herein. [Figure 18] FIG. 1 is a block diagram of an exemplary scientific instrument system into which the apparatus described herein may be incorporated, according to one or more embodiments described herein. [Figure 19] FIG. 1 is a block diagram of an exemplary operating environment in which embodiments of the subject matter described herein may be incorporated. [Figure 20] FIG. 1 is a schematic block diagram of an exemplary computing environment in which the subject matter described herein may interact and / or be implemented, at least in part. DETAILED DESCRIPTION OF THE INVENTION

[0004] Summary of the Invention The following presents a summary of the invention to provide a basic understanding of one or more embodiments described herein. It is not intended to identify key or core elements and / or to limit the scope of particular embodiments or claims. The summary's sole purpose is to present concepts in a simplified form prior to the more detailed description that is presented later. In one or more embodiments, one or more devices, instruments, and / or methods described herein may provide accurate, precise, and / or repeatable sample positioning for scientific instruments, such as scientific imaging devices.

[0005] According to one embodiment, a scientific instrument comprises a holding member for receiving a sample support cartridge, a first part of a kinematic coupling for receiving a second part of the kinematic coupling, and a second part of the kinematic coupling arranged on the holding member, wherein at least one of the first part or the second part of the kinematic coupling is arranged to move in conjunction with the sample support cartridge while coupled to the holding member.

[0006] According to another embodiment, a scientific instrument may include a vacuum chamber body, a vacuum chamber door, and a kinematic coupling that enables adjustable alignment of a sample support cartridge in the vacuum chamber door relative to the vacuum chamber body.

[0007] According to yet another embodiment, the method may include coupling the sample support cartridge to a holding member using a kinematic coupling, and kinematically aligning the holding member relative to the basic unit using the kinematic coupling having a shape that allows the holding member to be adjustably aligned relative to the basic unit while the kinematic coupling is engaged.

[0008] One or more embodiments described herein may be implemented in, connected to, and / or coupled to a scientific imaging device.

[0009] One or more embodiments described herein may enable adjustment of a grid holder (e.g., grid holder 114 of FIGS. 7 and / or 8) or other grid-receiving element with at least four degrees of freedom relative to the coordinate system of the chamber body (e.g., chamber structure) of the scientific instrument and / or the robotic elements of the scientific instrument. These degrees of freedom may be addressed, at least in part, independently by using different elements of the systems and / or assemblies described herein, such that each set, individual, and / or individual degree of freedom can be adjusted without affecting one or more other degrees of freedom.

[0010] In one or more cases, the adjustment may be performed after coupling the grid holder to one or more embodiments described herein. In one or more cases, at least a portion of the adjustment may be performed before coupling the sample support cartridge to one or more embodiments described herein. In one or more cases, at least a portion of the adjustment may be performed after coupling the sample support cartridge to one or more embodiments described herein.

[0011] In one or more cases, this adjustment may enable low-micrometer (e.g., about 1 micrometer or about 2 micrometer) alignment without the use of shims, thereby providing low-micrometer repeatability of positioning. This may enable experiments and / or imaging to be performed based on reproducible setups, adherence to scientific standards, and / or reduction of subjective positioning errors by the user. Existing configurations may not even be able to provide position repeatability at the 1 or 2 micrometer level.

[0012] Indeed, in one or more instances, one or more embodiments described herein can be used to reduce or completely eliminate the use of shims in positioning grid holders or grid holder receiving members, thereby significantly reducing the setup time for use of scientific equipment, such as reducing setup time by 50% or more compared to existing sample preparation frameworks, devices, instruments, systems, and / or methods.

[0013] One or more embodiments described herein may provide repeatable adjustability of the devices and / or assemblies and may further enable sealing and / or alignment with flexible seal members disposed between the one or more embodiments and a chamber body of a scientific instrument, such as by allowing a chamber door assembly in a sample positioning system to move to accommodate variations in the shape of a seal member due to compression by the seal member without affecting the vacuum seal of each chamber enclosed by the chamber door assembly.

[0014] One or more embodiments described herein can be assembled in a compact form, minimizing the use of packaging space within a chamber of a scientific instrument.

[0015] Detailed Description The following detailed description is merely exemplary and is not intended to limit the embodiments of the present invention and / or its application or uses. Furthermore, there is no intention to be bound by any express or implied information set forth in the foregoing Summary or Detailed Description. One or more embodiments are described below with reference to the drawings, wherein like reference numerals are used to refer to like elements throughout. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a more thorough understanding of one or more embodiments. However, it will be apparent that in various instances, one or more embodiments may be practiced without these specific details.

[0016] Various operations may be described sequentially as multiple discrete processes or operations that are most helpful in understanding the disclosed subject matter. However, the order of description should not be construed to imply that these operations are necessarily order dependent. In particular, these operations may be performed in an order different from that described. The described operations may be performed in an order different from that shown in the embodiments. In other embodiments, various additional operations may be performed and / or described operations may be omitted.

[0017] Now, on the subject of sample positioning in scientific instruments, such positioning can be important for, but not limited to, instrument preparation, compliance, position repeatability, positional accuracy and / or precision, robotic sample handling, increased sample processing throughput, and / or vacuum sealing of instrument openings.

[0018] In vacuum chamber applications, especially when moving parts need to be sealed, elastic elements such as O-ring seals or other elastic materials can be used to provide seals. In existing configurations, in kinematic coupling applications requiring high repeatability, using elastic sealing elements (e.g., O-ring seals) can cause positioning issues, such as position repeatability problems. This can be due to friction caused by the elastic sealing elements, variations in the size of different elastic sealing elements, or changes in compression state over time, which can prevent a pair of mating surfaces from easily sliding against one another. As a result, the repeatability of the alignment of the mating surfaces relative to each other can be reduced. This can affect the alignment of the sample or sample holder relative to the coordinate system, moving points, and / or fixed points within the sealed chamber.

[0019] Additionally or alternatively, existing systems may use shims to precisely align a sample relative to a coordinate system or other reference point within a scientific instrument chamber, which can affect sample alignment because shimming can be subjective and can simultaneously move an element in multiple degrees of freedom. Thus, one shim can cancel or change the alignment provided by another existing shim, leading to a repetitive cycle.

[0020] Additionally and / or alternatively, in existing configurations, sample transfer between the environmental / air side (outside the chamber of the scientific instrument) and the vacuum side (inside the chamber of the scientific instrument) of a scientific instrument is subject to significant throughput limitations due, at least in part, to stringent positional accuracy specifications for precisely aligning a sample with elements such as the chamber door assembly on the air side before inserting the sample into the vacuum side. In one or more cases, such stringent positional accuracy specifications may be due, at least in part, to the use of sample handling robots or other automated sample handling elements within the scientific instrument (e.g., on the vacuum side).

[0021] For example, a workflow performed by a scientific instrument may include the transfer of a grid from a loading station (e.g., a chamber door assembly and / or a sample support assembly in a sample positioning system). The transfer may be performed by a sample handling robot or other automated sample handling element located within a vacuum environment (e.g., on the vacuum side), with transport occurring bidirectionally between the loading station and, for example, a wafer holder located on a stage of the scientific instrument. The sample handling robot or other automated sample handling element may have limited adjustability. Thus, although sample adjustment relative to the adjustment system of the sample handling robot or other automated sample handling element may result in successful sample transfer, incorrect positioning relative to the adjustment system may result in sample transfer failure. Failures may include inability to retrieve and / or misalignment of the sample, sample grid, or grid holder, which may result in the sample, sample grid, or grid holder falling, or misalignment with the wafer holder.

[0022] Additionally and / or alternatively, sample throughput may be limited by the number of samples that can be loaded onto the sample support assembly, such as when samples are loaded onto a sample positioning system. In such cases, existing configurations may experience long times between sample analysis cycles due to the steps of removing samples from the sample positioning system and / or chamber, reconditioning one or more sample holders used in a previous cycle, and then reloading those one or more sample holders. This problem may be exacerbated by the time required to ventilate / pump the vacuum side of the instrument so that the sample positioning system can be used to open the vacuum chamber. This pumping process typically requires a certain amount of time. For example, in one or more cases, each pumping cycle may take more than about 200 minutes, such as about 3.5 hours.

[0023] In view of one or more shortcomings of such conventional configurations, one or more embodiments disclosed herein may provide for improved accuracy and / or efficiency in aligning sample grids used in conjunction with scientific instruments, as well as improved sample throughput. Additionally and / or alternatively, one or more embodiments disclosed herein may provide for increased flexibility in adjusting the relative position of a scientific instrument door and a seal member, and / or for allowing each degree of freedom in the relative position of a sample cartridge (and sample grids carried by the sample cartridge) to be individually adjustable, independent of one another, relative to other components of the scientific instrument and / or one or more embodiments disclosed herein.

[0024] That is, generally, one or more embodiments disclosed herein may couple a sample support cartridge to a holding member using a kinematic coupling, and enable the holding member to be kinematically aligned with the base unit using a kinematic coupling that has a shape that allows the holding member to be adjustable with respect to the base unit even when the kinematic coupling is engaged. It will be understood that both the positioning portion of the sample support assembly and the door of the chamber door assembly, as described below, may be described as a holding member having these characteristics.

[0025] In one or more alternative embodiments, the sample positioning system may include both a chamber door assembly and a sample support assembly coupled to the chamber door assembly and operable in conjunction with the chamber door assembly.

[0026] The chamber door assembly may include one or more pairs of components, at least one of which may have degrees of adjustment, e.g., three or four degrees of freedom, relative to the other component, and at least one or more of these degrees of freedom may be adjusted independently of the other degrees of freedom.

[0027] At least one of the components may include a kinematic coupling, and another mating kinematic coupling may be provided in a chamber body of a scientific instrument, such as an imaging device. In one or more cases, the kinematic coupling may provide one or more degrees of freedom. In one or more embodiments, a first kinematic coupling may be used between the first and second components, and a second kinematic coupling may be used between the third and fourth components.

[0028] This degree of freedom may allow adjustment of the chamber door assembly relative to the resilient sealing element when aligning the chamber door assembly relative to the chamber body. Additionally and / or alternatively, these degrees of freedom may allow the sample support assembly, while coupled to the chamber door assembly, to be adjustable relative to the chamber body.

[0029] The sample support assembly may include a pair of conditioning components and a sample support cartridge that can be assembled into a compact body that can occupy a limited footprint (e.g., space) on the vacuum side of the scientific instrument. The three components of the sample support assembly can be combined to provide at least five different degrees of freedom.

[0030] The sample support cartridge may be replaceable, allowing a sample support cartridge removed from the vacuum environment to be replaced with another sample support cartridge. In this manner, a new sample support cartridge may be pre-loaded with samples (e.g., lamellae), which are then mounted on the lamella carriers of the grid holder coupled to the sample support cartridge. This allows for a significant increase in sample throughput in scientific instruments using the sample support assembly; that is, it is no longer necessary to wait to remove used samples from individual grid holders or to re-prime recently used lamella carriers. Rather, these processes can be performed separately from the sample support assembly and separately from the reuse of the scientific instrument (e.g., running another cycle).

[0031] The pair of adjustment components can be configured to provide independent and different degrees of freedom. In this way, one or more degrees of freedom can be adjusted independently without affecting the positioning of one or more other degrees of freedom. This advantage is not available in existing configurations.

[0032] One or more embodiments disclosed herein, as described above, may provide improved performance compared to existing approaches. For example, one or more advantages of the systems and / or assemblies described above may include the ability to allow one or more adjustments of the sample support cartridge, e.g., adjustments in one or more degrees of freedom in the sample support assembly or the chamber door assembly, while the sample positioning system is assembled but not fully rigidly coupled. Similarly, at least one of the components of the chamber door assembly may be adjusted in a similar manner relative to the other components when coupled together. Similarly, at least one of the three components of the sample support assembly may be adjusted in a similar manner relative to the other components when coupled together.

[0033] Various embodiments disclosed herein can improve upon conventional approaches to achieve technical advantages such as high adjustability and / or high-precision positional repeatability. For example, using the above-described adjustment configuration, the sample support assembly, chamber door assembly, and sample positioning system can each independently adjust their respective degrees of freedom, enabling low-precision adjustments on the order of microns that were previously unachievable with conventional frameworks. In practice, this allows for repeatable placement of the sample in the same position relative to the coordinate system of the chamber body (e.g., a robotic element within the chamber body). Furthermore, one or more of these elements can reduce and / or eliminate the use of shims for alignment, addressing subjective alignment issues with increased flexibility, and shortening the setup time of an instrument system (e.g., from the start of evacuation of a vacuum chamber included in the instrument system). These processes can be useful for a variety of industries, including materials analysis, sample imaging, product manufacturing, and quality control.

[0034] The technical features of the embodiments disclosed herein (e.g., high adjustability and / or high precision position repeatability) are highly unprecedented in the manner described herein in the fields of materials analysis, as well as in fields such as, but not limited to, optics, signal processing, spectroscopy and / or nuclear magnetic resonance (NMR), and various combinations of the features of the disclosed embodiments are likewise unprecedented.

[0035] One or more embodiments described herein can be used with a number of different scientific instruments operable for sample analysis and / or evaluation, imaging, sample preparation, sample modification, etc., including, but not limited to, sample support assemblies, chamber door assemblies, and / or sample positioning systems described herein. While use in conjunction with vacuum chamber bodies and / or load lock chamber bodies is described below, the chambers need not be capable of being evacuated. Rather, one or more embodiments described herein can be used with other types of chambers, such as non-vacuum chambers. That is, the positioning and / or position repeatability provided by one or more embodiments described herein can be applied to, but is not limited to, any one or more types of scientific instruments described herein.

[0036] Accordingly, embodiments disclosed herein may provide improvements in scientific instrument technology (e.g., including but not limited to, improvements in the scientific instrument itself) that may be used in sample analysis in a variety of fields, including but not limited to, optics, signal processing, spectroscopy, and / or nuclear magnetic resonance (NMR).

[0037] Indeed, based on the above general description of one or more embodiments described herein, the present disclosure introduces functionality that could not be performed by machines or humans alone based on existing configurations. Rather, these existing configurations are not effective for repeatable adjustment at sub-micrometer resolution relative to the coordinate system of an elastomeric seal member or scientific instrument, are not capable of adjusting individual degrees of freedom without affecting one or more other degrees of freedom, and are not capable of providing the sample throughput achievable by one or more embodiments described herein. Therefore, existing configurations are impractical to operate in light of the significant setup time and / or reduced sample positional accuracy, precision, and repeatability associated with these approaches.

[0038] Thus, embodiments of the present disclosure may be used with scientific instruments having any technical purpose, such as controlling a particular technical system or process, determining how to control a machine from measurements, enhancing or analyzing digital audio, image or video, separating material sources in mixed signals, generating data for reliable and / or efficient transport or recording, providing estimates and confidence intervals for material samples, and rapid processing of sensor data.

[0039] Accordingly, the embodiments disclosed herein provide improvements to materials analysis techniques (including, for example, improvements relating to sample preparation, placement, delivery and / or positioning to scientific equipment for materials analysis, among other improvements).

[0040] As used herein, the phrase "based on" should be understood to mean "based at least in part on," unless otherwise specified.

[0041] As used herein, the term "data" may include metadata.

[0042] As used herein, the terms "subject," "requesting subject," and "user subject" may refer to a machine, apparatus, component, hardware, software, smart device, institution, organization, individual, and / or human being.

[0043] As used herein, the term "sample" can refer to a single substance, multiple substances, a compound, a composition, a lamella, a solution, a product, and the like.

[0044] One or more embodiments will now be described with reference to the drawings, wherein like reference numerals are used throughout the drawings to refer to like elements. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a more thorough understanding of one or more embodiments. It will be apparent, however, that in various instances one or more embodiments may be practiced without these specific details.

[0045] Furthermore, it should be understood that the embodiments shown in one or more of the figures described herein are merely exemplary, and therefore the configuration of the embodiments is not limited to the systems, devices, and / or components, and their ordering, connections, and / or couplings, shown in the figures.

[0046] The scientific instrument methods disclosed herein can be used in conjunction with or configured by one or more scientific instruments capable of user-subject interactions (e.g., via a user local computing device 1820 described herein in connection with FIG. 18 ). These interactions can include providing information to a user subject (e.g., information about the operation of the scientific instrument 1810 of FIG. 18 , information about the sample being analyzed or other tests or measurements performed by the scientific instrument, information obtained from a local or remote database, or other information) or providing options for inputting commands (e.g., to control the operation of the scientific instrument 1810 of FIG. 18 or to control the analysis of data generated by the scientific instrument), queries (e.g., to a local or remote database), or other information) to a user subject. In some embodiments, these interactions can be performed through a graphical user interface (GUI) including a visual display on a display device (e.g., display device 310 described in connection with FIG. 3 ). The display provides output to the subject or prompts the subject to provide input (e.g., via one or more input devices such as a keyboard, mouse, trackpad, touchscreen, etc. included in other I / O devices 312 described in connection with FIG. 3 ). The scientific instrument system 1800 disclosed herein may include any suitable GUI for interaction with the subject.

[0047] Accordingly, the following provides a general description of one or more scientific instrument systems that may include and / or be used in conjunction with one or more embodiments described herein, and, where appropriate, related methods, computing devices, and / or computer-readable media.

[0048] For example, referring first to FIG. 2 , an example GUI 300 that may be used in performing one or more methods with the scientific instrument is shown, and may be in accordance with one or more various embodiments described herein. As described above, the GUI 200 may be provided on a display device (e.g., the display device 310 described herein in connection with FIG. 3 ) of a computing device (e.g., the computing device 300 described herein in connection with FIG. 3 ) of a scientific instrument system (e.g., the scientific instrument system 1800 described herein in connection with FIG. 18 ). A user subject may interact with the GUI 200 using any suitable input device (e.g., any input device included in the other I / O devices 312 described herein in connection with FIG. 3 ) and input technique (e.g., cursor movement, motion capture, facial recognition, gesture detection, voice recognition, button activation, etc.).

[0049] GUI 200 may include a data display area 202, a data analysis area 204, a scientific instrument control area 206, and a settings area 208. The specific number and arrangement of areas shown in Figure 2 is merely an example, and GUI 200 may include any number and arrangement of areas and their desired functionality.

[0050] The data display area 202 may display data generated by a scientific instrument (e.g., scientific instrument 1810 described herein in connection with FIG. 18). For example, but not limited to, the data display area 202 may comprise one or more spectra, one or more matched images, one or more digital images, etc.

[0051] The data analysis area 204 can display the results of a data analysis (e.g., the results of an analysis of the data displayed in the data display area 202 and / or other data). For example, the data analysis area 204 can display one or more results of an analysis of a sample positioned for analysis using one or more embodiments described herein. In one or more cases, the data analysis area 204 can display a list, flow chart, or other schematic of the acquisition actions performed and / or recommended in connection with an experiment. In one or more embodiments, the data display area 202 and the data analysis area 204 can be integrated within the GUI 200 (e.g., when configured to include data output from a scientific instrument and the results of an analysis of that data in a common graph or area).

[0052] The scientific instrument control area 206 may include options that allow the subject to control a scientific instrument (e.g., the scientific instrument 1810 described herein in connection with FIG. 18 ). For example, the scientific instrument control area 206 may include one or more control elements for visualizing and / or moving a sample positioned by one or more embodiments described herein.

[0053] The settings area 208 may include options for the user subject to control the functionality and operation of the GUI 200 (and / or other GUIs), as well as options for performing general computing operations with respect to the data display area 202 and the data analysis area 204 (e.g., saving data to a storage device such as the storage device 304 described herein in connection with FIG. 3 , sending data to other user subjects, labeling data, etc.).

[0054] We now turn to a discussion of Figure 3, which illustrates a block diagram of a computing device 300 capable of performing some or all of the scientific instrument methods disclosed herein, according to various embodiments. In one or more embodiments, a scientific instrument capable of employing one or more embodiments described herein may be controlled by a single computing device 300 or may include multiple computing devices 300. Furthermore, as described below, the computing device 300 (or multiple computing devices 300) may form part of one or more of the scientific instrument 1810, user-based local computing device 1820, service local computing device 1830, and / or remote computing device 1840 shown in Figure 18.

[0055] 3 is illustrated with multiple components, one or more of which may be omitted or duplicated depending on the application and configuration. As shown, these components may include one or more of a processor 302, a storage device 304, an interface device 306, a battery / power circuitry 308, a display device 310, and other input / output (I / O) devices 312, as described below.

[0056] In one or more embodiments, one or more of the components included in computing device 300 may be mounted on one or more motherboards and housed in a housing (e.g., comprising plastic, metal, and / or other materials). In one or more embodiments, some of these components may be implemented on a single system-on-chip (SoC) (e.g., an SoC may include one or more processors 302 and one or more storage devices 304). Additionally, in one or more embodiments, computing device 300 may omit one or more of the components shown in FIG. 3 . In one or more embodiments, computing device 300 may include interface circuitry (not shown) for connecting to one or more of these components using any suitable interface (e.g., a universal serial bus (USB) interface, a high-definition multimedia interface (HDMI®), a controller area network (CAN) interface, a serial peripheral interface (SPI), an Ethernet interface, a wireless interface, or other suitable interface). For example, computing device 300 may omit display device 310 but may include display interface circuitry (e.g., connectors and driver circuitry) to which display device 310 can be connected.

[0057] Computing device 300 may include a processor 302 (e.g., one or more processing devices). As used herein, the term “processing device” may refer to any device or portion thereof that processes electronic data from registers and / or memory and transforms the electronic data into other electronic data that can be stored in registers and / or memory. Processor 302 may include one or more digital signal processors (DSPs), application-specific integrated circuits (ASICs), central processing units (CPUs), graphics processing units (GPUs), cryptographic processors (specialized processors that execute cryptographic algorithms in hardware), server processors, or other suitable processing devices.

[0058] The computing device 300 may include a storage device 304 (e.g., one or more storage devices). The storage device 304 may include one or more memory devices, such as random access memory (RAM) (such as static RAM (SRAM) devices, magnetic RAM (MRAM) devices, dynamic RAM (DRAM) devices, resistive RAM (RRAM) devices, or conductive bridge RAM (CBRAM) devices), hard disk-based memory devices, solid-state memory devices, network drives, cloud drives, or any combination of these memory devices. In one or more embodiments, the storage device 304 may include memory located on the same die as the processor 302. In such embodiments, the memory may be used as cache memory and may include, for example, embedded dynamic random access memory (eDRAM) or spin-transfer torque magnetic random access memory (STT-MRAM). In one or more embodiments, storage device 304 may include a non-transitory computer-readable medium having instructions recorded thereon that, when executed by one or more processing units (e.g., processor 302), cause computing device 300 to perform appropriate methods, or portions thereof, of the methods disclosed herein.

[0059] The computing device 300 may include an interface device 306 (e.g., one or more interface devices 306). The interface device 306 may include one or more communication chips, connectors, and / or other hardware and software for managing communications between the computing device 300 and other computing devices. For example, the interface device 306 may include circuitry for managing wireless communications for transmitting data to and receiving data from the computing device 300. The term "wireless" and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communication channels, etc., that can communicate data using modulated electromagnetic waves over a non-solid medium. This term does not imply that the associated devices do not include any wiring, although in one or more embodiments, the associated devices may not include wiring. The circuitry for managing wireless communications included in the interface device 306 may implement numerous wireless standards or protocols, including, but not limited to, IEEE (Institute of Electrical and Electronics Engineers) standards. For example, Wi-Fi (IEEE 802.11 family), IEEE 802.16 standards (e.g., IEEE 802.16-2005 Amendment), the Long Term Evolution (LTE) project and any amendments, updates, and / or revisions thereof (e.g., the Advanced LTE project, the Ultra Mobile Broadband (UMB) project (also known as "3GPP®2"), etc.). In one or more embodiments, the circuitry managing wireless communications included in the interfacing device 306 can operate in accordance with a Global System for Mobile Communications (GSM), a General Packet Radio Service (GPRS), a Universal Mobile Telecommunications System (UMTS), a High Speed ​​Packet Access (HSPA), an Enhanced HSPA (E-HSPA), or an LTE network. In one or more embodiments, the circuitry managing wireless communications included in the interfacing device 306 can operate in accordance with Enhanced Data Rates for GSM Evolution (EDGE), a GSM EDGE Radio Access Network (GERAN), a Universal Terrestrial Radio Access Network (UTRAN), or an Evolved UTRAN (E-UTRAN). In one or more embodiments, the circuitry included in the interface device 306 for managing wireless communications may operate in accordance with any of Code Division Multiple Access (CDMA), Time Division Multiple Access (TDMA), Digital Enhanced Cordless Communications (DECT), Evolutionary Data Optimized (EV-DO) and derivatives, as well as third-generation (3G), fourth-generation (4G), fifth-generation (5G), and later wireless protocols. In one or more embodiments, the interface device 306 may include one or more antennas (e.g., one or more antenna arrays) for receiving and / or transmitting wireless communications.

[0060] One or more communications between one or more components of computing device 300 and one or more components external to computing device 300 may be provided by wired and / or wireless means, including, but not limited to, utilization of a cellular network, a wide area network (WAN) (e.g., the Internet), and / or a local area network (LAN). Suitable wired or wireless technologies for supporting communications include, but are not limited to, Wireless Fidelity (Wi-Fi), Global System for Mobile Communications (GSM), Universal Mobile Telecommunications System (UMTS), Worldwide Interoperable Microwave Access (WiMAX), Enhanced High-Speed ​​General Packet Radio Service (Enhanced GPRS), Third Generation Partnership Project (3GPP) Long Term Evolution (LTE), Third Generation Partnership Project 2 (3GPP2) Ultra Mobile Broadband (UMB), High-Speed ​​Packet Access (HSPA), Zigbee and other 802.XX wireless technologies and / or legacy communication technologies, BLUETOOTH®, Session Initiation Protocol (SIP), ZIGBEE®, RF4CE protocol, WirelessHART protocol, 6LoWPAN (IPv6 over Low Power Wireless Area Network), Z-Wave, Advanced and / or Adaptive Networking Technology (ANT), Ultra Wideband (UWB) standard protocols and / or other proprietary or non-proprietary communication protocols.

[0061] In one or more embodiments, the interface device 306 may include circuitry for managing wired communications, which may be electrical, optical, or other suitable communications protocols. For example, the interface device 306 may include circuitry for supporting communications according to Ethernet technology. In one or more embodiments, the interface device 306 may support both wireless and wired communications, or may support multiple wired and / or wireless communications protocols. For example, first circuits of the interface device 306 may be dedicated to short-range wireless communications, such as Wi-Fi or Bluetooth, and second circuits of the interface device 306 may be dedicated to long-range wireless communications, such as Global Positioning System (GPS), EDGE, GPRS, CDMA, WiMAX, LTE, EV-DO, etc. In one or more embodiments, the first circuits of the interface device 306 may be dedicated to wireless communications, and the second circuits of the interface device 306 may be dedicated to wired communications.

[0062] Computing device 300 may include battery / power circuitry 308. Battery / power circuitry 308 may include one or more energy storage devices (e.g., batteries or capacitors) and / or circuitry for connecting computing device 300 computing components to an energy source separate from computing device 300 (e.g., an AC power source).

[0063] Computing device 300 may include display device 310 (e.g., multiple display devices). Display device 310 may include any visual display device, such as a heads-up display, a computer monitor, a projector, a touchscreen display, a liquid crystal display (LCD), a light-emitting diode display, or a flat panel display.

[0064] Computing device 300 may include other input / output (I / O) devices 312. Other input / output (I / O) devices 312 may include one or more audio output devices (e.g., speakers, headsets, earphones, alarms, etc.), one or more audio input devices (e.g., microphones or microphone arrays), a location determination device (e.g., a GPS device that communicates with well-known satellite-based systems to obtain the location of computing device 300), an audio codec, a video codec, a printer, sensors (e.g., thermocouples or other temperature sensors, humidity sensors, pressure sensors, vibration sensors, accelerometers, gyroscopes, etc.), an image capture device (e.g., a camera), a keyboard, a cursor control device (e.g., a mouse, stylus, trackball, touchpad), a barcode reader, a QR code reader, or a radio frequency identification (RFID) reader, etc.

[0065] Computing device 300 may have any form factor suitable for its application and installation environment, and may be a portable or mobile computing device (e.g., a mobile phone, a smartphone, a mobile Internet device, a tablet computer, a laptop, a netbook, an ultrabook computer, a personal digital assistant (PDA), an ultra-mobile personal computer, etc.), a desktop computing device, or a server computing device or other network-connected computing component.

[0066] Referring to FIG. 1 , a schematic diagram of a non-limiting system 100 is shown, including a scientific instrument 102 that includes one or more systems and / or assemblies described herein, such as a sample positioning system 104, a chamber door assembly 106, and / or a sample support assembly 108 (e.g., where the sample positioning system 104 includes the chamber door assembly 106 and / or the sample support assembly 108), all of which are described in detail in FIGS. 4-14 . That is, the sample positioning system 104 may be considered to be included in the scientific instrument 102, or may be considered to be a separate component from the scientific instrument 102. In either view, the functionality and / or the body structure of the sample positioning system 104 relative to the scientific instrument 102 may be the same.

[0067] In one or more embodiments, a scientific instrument including and / or using one or more embodiments described herein may be part of or use a computing environment, such as computing environment 2000 shown in Figure 20. In one or more described embodiments, the computer and / or computing-based elements may be used to implement one or more of the systems, devices, assemblies, components, and / or methods shown and / or described in connection with Figure 1 and / or Figures 5-14, as well as other figures described herein.

[0068] 1, the sample positioning system 104 may include a chamber door assembly 106 and a sample support assembly 108 coupleable to the chamber door assembly 106. The chamber door assembly 106 is described in more detail below with respect to Figures 4-7, the grid holder is described in more detail below with respect to Figure 8, and the sample support assembly 108 is described in more detail below with respect to Figures 9-14.

[0069] Continuing with reference to the non-limiting system 100 shown in FIG. 1 , the scientific instrument 100 can provide analysis (e.g., imaging) of one or more samples 110. The samples 110, such as lamellae, can be disposed on grids, also referred to herein as lamella carriers 112. At least one pair of lamella carriers 112 can be fixedly or removably coupled to grid holders 114. The grid holders 114 are particularly shown in FIG. 8 and described in detail below. At least one grid holder 114, and possibly four or more, for example, up to ten grid holders 114, can be held by the sample positioning system 104, and more specifically, by each receptacle of the sample positioning system 104. For example, one receptacle can accept one grid holder 114.

[0070] As shown, the grid holder 114 may be received in a load lock hold, for example, a loading station of the sample positioning system 104 (e.g., the grid holder 114 mounted on a sample support cartridge) may be received within a vacuum chamber 122 of the scientific instrument 102. It should be noted that in one or more embodiments, the scientific instrument may include an optional load lock pre-chamber 120 (also referred to herein as a load lock or load lock chamber) into which the grid holder 114 may initially be received, or the vacuum chamber 122 may be a chamber that is not vacuum-sealed. In either case, the sample positioning system 104 is sealed and / or closed to a chamber body 124 of the scientific instrument 102. The chamber body 124 may include the body of the vacuum chamber 122 and / or the load lock pre-chamber 120.

[0071] The air within the vacuum chamber 122 (and / or the load lock pre-chamber 120) may be evacuated. The vacuum chamber 122 may include a grid handling robot 128 or other automated transfer element that can remove the grid holder 114 and / or lamella carrier 112 from the sample positioning system 104 and transfer them to the wafer holder 130 within the vacuum chamber 122.

[0072] It is notable that in one or more cases, one or more wafers may be loaded via a wafer load lock system 140 that includes an EFEM 142, a wafer load lock 144, and / or an in-vacuum robot (IVR) 146, which are used to load one or more wafers into the vacuum chamber 122, and in particular, the wafer holder 130.

[0073] After analysis, characterization, imaging, pre-processing, and / or other processing has been performed on the sample 110 within the vacuum chamber 122, the grid handling robot 128 can re-transfer the grid holder 114 and / or lamella carrier 112 from the wafer holder 130 to the sample positioning system 104. The vacuum chamber 122 and / or load lock chamber can be re-pressurized (restored) with, for example, air, and the sample positioning system 104 can be opened by disengaging (e.g., uncoupling) it from the chamber body 124. The grid holder 114 can be removed from the sample positioning system 104 separately from the sample support cartridge, or by removing and replacing (e.g., exchanging) the sample support cartridge on the sample positioning system 104, as described in more detail below (see, e.g., FIG. 12 ). In this manner, rapid exchange and high sample throughput can be achieved in the scientific instrument 102 using embodiments of the sample positioning system 104 described herein.

[0074] 4-7, the scientific instrument 102 may include a loader lock chamber 120 that communicates with, is connected to, or is integrated with a vacuum chamber 122. The scientific instrument 102 may further include a vacuum element 424 that is used to evacuate the atmosphere from the loader lock chamber 120 and / or the vacuum chamber 122. Alternatively, in another embodiment, a separate vacuum element 424 may be used for each of the loader lock chamber 120 and the vacuum chamber 122.

[0075] The sample positioning system 104, and in particular the chamber door assembly 106, will now be further described, including a discussion of the advantages of the sample positioning system 104, namely, rapid sample throughput, separation of degrees of freedom for position repeatability relative to the chamber body 124, and independent degrees of freedom for position repeatability of the grid holder 114 relative to the coordinate system 126 of the scientific instrument 102 (e.g., the coordinate system 126 within the vacuum chamber, e.g., the coordinate system of the grid handling robot 128).

[0076] As shown, the sample positioning system 104 may include at least a basic unit, such as a chamber door assembly 106 for coupling with the chamber body 124 and / or the loadlock body 424 of the loadlock 120. In one or more cases, the loadlock body 424 may be included in the chamber body 124.

[0077] The chamber door assembly 106 may include at least a retaining member, such as a door plate 432, and a retaining member holder, such as a door carriage 434. The door plate 432 may be coupleable to the door carriage 434 for coupling with the door carriage 434 to both engage and disengage with the scientific instrument 102 or the chamber body 124.

[0078] The door calibration 434 can be comprised of and coupled to at least one of a rail system 438, e.g., a set of rails 440. In one or more embodiments, the rail system 438 can be considered part of the scientific instrument 102. The rail system 438 can couple the chamber door assembly 106, and thus the instrument door system 104, to the scientific instrument 102. In one or more embodiments, the rail system 438 can be coupled to a base unit (e.g., the chamber body 124) and / or a retention member holder (e.g., the door carriage 434) via fasteners, a key slot system, a rail slot system, or other suitable coupling interface, which allows movement of at least the door carriage 434 into and out of engagement with the chamber body 124. This movement can occur, for example, along an axis extending along the longitudinal extension of the rails 440. This axis can be parallel and / or collinear with the illustrated Z direction (442), which is the direction of movement of the chamber door assembly 106 relative to the scientific instrument.

[0079] Illustrated in FIG. 4 is a resilient member symbol 436. This symbol 436 is provided solely to represent the flexible deformation characteristics of the interface between the door carriage 434 and the door plate 432. As used herein, the term "flexible deformation characteristics" may include the elasticity of an element of the interface, the flexibility of an element of the interface, or the adjustability of at least one element relative to the other. For example, as shown in FIG. 5, the fastener through-hole 502 of the door plate 432 is oversized so that the door plate 432 can be coupled to the door carriage 434 (e.g., by a bolt and / or fastener 602 shown in FIG. 6). For example, the fastener 602 threads into a threaded bolt hole (not specifically shown) provided in the door carriage 434.

[0080] In one or more embodiments, the door plate 432 may additionally or alternatively be constructed of a material that is resiliently deformable relative to the door carriage 434, such that the door plate 432 can resiliently move relative to the door carriage 434 while coupled to the door carriage 434. Such resilient movement may occur in at least the three degrees of freedom discussed above.

[0081] Thus, even when the door plate 432 is coupled to the door carriage 434, one or more degrees of freedom may be maintained at the interface between the door plate 432 and the door carriage 434. The one or more degrees of freedom may include at least three degrees of freedom. As shown in FIG. 5, this may include movement in the illustrated X direction, movement in a Y direction orthogonal to the illustrated X direction, and rotation about the X direction (RX) or rotation about the Y direction (RY). In one or more cases, this may also or alternatively include rotation about a Z direction 442 (RZ), although not explicitly shown in FIG. 5. This Z direction 442 is orthogonal to both the X and Y directions. As noted above, the Z direction 442 may be parallel to and / or coincide with the direction of movement of the door carriage 434 along or provided by the rail 440.

[0082] Further with respect to the chamber door assembly 106, by way of example and not limitation, the translation in each of the X and Y directions may be approximately 3 micrometers in each of the positive and negative directions in the X and Y directions, respectively. Alternatively, the rotation of RX and / or RY may be on the order of ±2 degrees, or, for example, on the order of ±1 degree, but is not limited thereto.

[0083] As shown in Figure 6, the one or more degrees of freedom provided by the interface between the door plate 432 and the door carriage 434 may further include a rotation about the X direction of Figure 5 (referred to as RX) and / or a rotation about the Y direction of Figure 5 (referred to as RY). Each of the RX and RY rotations may be, for example, but not limited to, about ±2 degrees, or about ±1 degree.

[0084] It should be noted that each of these five different degrees of freedom may be maintained after movement in the Z direction to couple the chamber door assembly 106 to the chamber body 124 via a kinematic coupling. For example, the chamber body 124 (e.g., the body 424 of the load lock 120) and the door plate 432 may each comprise part of a kinematic coupling. For example, the door plate 432 may include one or more first kinematic coupling elements 430, and the body 424 of the load lock 120 may include one or more corresponding second kinematic coupling elements 428.

[0085] As used herein, "kinematic coupling" refers to a connection that provides limited adjustability between components of the kinematic coupling. For example, the kinematic coupling elements may interlock (e.g., couple) without being fixed to one another. For example, in the embodiment of FIGS. 4 and 5, first kinematic coupling element 430 and second kinematic coupling element 432 may be arranged to provide at least a rotational degree of freedom about Z direction 442.

[0086] In one or more embodiments, first kinematic coupling element 430 or second kinematic coupling element 428 may include a concave block, a V-shaped block, or other suitable shaped element for receiving the other first kinematic coupling element 430 or second kinematic coupling element 428. Thus, the other of first kinematic coupling element 430 or second kinematic coupling element 428 may be configured with a convex block, a dome-shaped block, a spherical block, a convex V-shape, and / or other suitable element to form the corresponding kinematic coupling. As shown, first kinematic coupling element 430 (e.g., provided on door plate 432) is configured with a concave V-shaped block, and second kinematic coupling element 428 (e.g., provided on vacuum chamber body 124) is configured with a corresponding convex V-shape for receiving the concave V-shaped block.

[0087] In the illustrated example, the first kinematic coupling elements 430 are positioned on the side of the door plate 432 facing the vacuum chamber (e.g., chamber side 702). As shown in Figure 5, the first kinematic coupling elements 430 may be arranged in a circular and / or triangular pattern to allow rotational adjustment about the Z axis / Z direction 442 (see Figure 4).

[0088] Second kinematic coupling element 428 is disposed on air-facing side 680 (see FIG. 6 ) of body 424. As mentioned above, in one or more embodiments, vacuum load lock 120 (and therefore body 424) can be omitted, in which case second kinematic coupling element can instead be disposed on the air-facing side of body 122. In one or more additional and / or alternative embodiments, body 424 can be considered part of body 122, e.g., an extension thereof.

[0089] After the door plate 432 is aligned with the door carriage 434, the coupling elements 428 and 430 can also be properly aligned in the various degrees of freedom described above. This allows the door plate 432 to be easily moved with respect to the elastic member 426, while simultaneously aligning the sample held by the chamber door assembly 106 with respect to the basic unit (e.g., the chamber body 124). That is, based on the use of the kinematic coupling elements 428 and 430 and the deformation characteristics at the interface between the door plate 432 and the door carriage 434, the chamber door assembly 106 can counteract the generation of friction caused by the engagement of the door plate 432 with the elastic member 426.

[0090] The resilient member 426 may be any suitable resilient member or may include any suitable resilient material for facilitating a seal, e.g., a vacuum seal, between the vacuum load lock body 424 and the chamber door assembly 106 (e.g., the door plate 432). In one or more embodiments, the resilient element 426 may be an O-ring, such as an elastomeric or fluoroelastomer O-ring. While the resilient element 426 is illustrated as being disposed in a recess in the vacuum load lock body 424, in one or more other embodiments, the resilient element 426 may alternatively or additionally be disposed on the chamber-facing side 702 of the door plate 432.

[0091] The aforementioned fastener connection can be tightened (e.g., by tightening fastener 602 shown in FIG. 6) to provide a more rigid, e.g., fixed, connection between door plate 432 and door carriage 434.

[0092] The fixed engagement of the door plate 432 and the resilient member 426 enables sealing of the vacuum load lock 120 and / or the vacuum chamber 122. In one or more embodiments, the scientific instrument may include a vacuum seal sensor 431 coupled to the processor 406 to determine proper sealing of the load lock chamber 122 and / or the vacuum chamber 122.

[0093] Additionally, in one or more embodiments, the vacuum chamber body 124 and / or the load lock chamber body 424 may include a retaining element 604 for engagement by a suitable retaining element 606 of the chamber door assembly 106. This interface may be, for example, a latch, to provide a secure connection between the chamber door assembly 106 and the vacuum chamber body 124.

[0094] As a brief summary of the chamber door assembly 106, a coupling between the door plate 432 and the door carriage 434 may be provided before the door plate 432 and the door carriage 434 are fixedly and / or more rigidly coupled to one another. This coupling may, differently, be adjustable, such that in addition to maintaining a degree of adjustability between the door plate 432 and the load lock chamber body 424, a degree of adjustability may also be maintained between the door plate 432 and the door carriage 434. Thus, shimming between components, such as the door and door holder (as used in existing configurations), may be reduced or entirely eliminated, thereby significantly reducing the time to prepare the scientific instrument 102 for use compared to the time provided by existing configurations.

[0095] 8, an orthogonal view of an exemplary grid holder 114 is shown, which may be held by the specimen positioning system 104 and / or wafer holder 130. As shown, the grid holder 144 may include at least a pair of lamella carriers (112) or grids, each capable of supporting (e.g., holding) at least one specimen 110. In one or more cases, the lamella carriers 112 may be removed for, but not limited to, processing, preparation, decontamination, replacement, etc.

[0096] The grid holder 114 may include a mating element 802 that is matable with a receiver 1202 (FIGS. 11 and 12) of the sample positioning system 104. More specifically, the receiver 1202 may be an integral and / or removable component of the sample support cartridge 1104 (FIG. 11) of the sample support assembly 108. The illustrated mating element 802 may be a key, such as a post (e.g., a cylindrical post), and an aligner 804 may be spaced apart from the mating element 802 to enable two-point alignment of the grid holder 114 with the receiver 1202 of the sample support cartridge 1104. In one or more embodiments, the aligner 804 may be or include a nylon material or other similar material. The mating element 802 (eg, a post) may be inserted into a receiving slot 1217 in the receiver 1202 , while the aligner 804 may be inserted into a corresponding notch 1218 in the sample support cartridge 1104 .

[0097] In some other embodiments, the shapes of the receiving slot 1217 and mating element 802, and the shapes of the notch 1218 and aligner 804 may be reversed, or differently shaped mating elements 1217, 1218, 802 and / or 804 may be used.

[0098] Referring now briefly back to Figure 7 and further to Figure 9, the chamber side 702 (e.g., vacuum side) of the sample positioning system 104 is illustrated. As shown, the sample support assembly 108 is coupled to the chamber door assembly 106 and can move integrally therewith.

[0099] The sample support assembly 108 may comprise a compact assembly including the sample support cartridge 1104, the position adjuster 1106, and the deformation adjuster 1108. It should be appreciated that the chamber door assembly 106 and the use of the kinematic coupling elements 428 and 430, as well as the use of deformation properties at the interface between the door plate 432 and the door carriage 434 (and / or the door plate 432 and / or the door carriage 434), may also provide for repeatable positioning or positioning of the grid holder 114 and / or the sample support cartridge 104 relative to the vacuum chamber 122 / load lock chamber 120. That is, adjustment and / or alignment of one or more elements of the chamber door assembly 106 may allow adjustment and / or alignment of the sample support cartridge 1104 to be performed independently of adjustment and / or alignment of one or more other elements of the sample support assembly 108.

[0100] In one or more embodiments, positional repeatability of the grid holder 114 and / or sample support cartridge 104 can be provided at the low micrometer level (e.g., about 1 micrometer, about 2 micrometers, or about 3σ=0.7 μm) by the chamber door assembly 106, the sample support assembly 108, and / or a combination thereof.

[0101] 9-12, and with continued reference to FIG. 7, the sample positioning system 104, and in particular the sample support assembly 108, will now be further described. This description includes a discussion of the advantages associated with the sample positioning system 104, namely, rapid sample throughput, repeatable and highly accurate sample alignment, isolated degrees of freedom for repeatable positioning relative to the chamber body 124, and isolated degrees of freedom for repeatable positioning of the grid holder 114 relative to the coordinate system 126 of the scientific instrument 102 (e.g., the coordinate system 126 within the vacuum chamber, e.g., the coordinate system 126 of the grid handling robot 128).

[0102] 11 , an exploded view of the sample support assembly 108 is shown. As shown, a sample support cartridge 1104 is configured to be received by a holder, such as a positioning adjuster 1106. Indeed, as described above, the sample support cartridge 1104 can be easily removed due to magnetic and / or kinematic coupling between the positioning adjuster 1106 and the sample support cartridge 1104, thereby enabling replacement with another sample support cartridge 1104. This allows for rapid increase in sample throughput to the vacuum side of the corresponding scientific instrument 102 compared to conventional configurations.

[0103] As shown in Figure 11, the sample support cartridge 1104 is movable generally along the Z direction as shown to couple to and disengage from the position adjuster 1105. When the sample support assembly 108 is coupled to the chamber door assembly 106, the Z direction 1102 as shown in Figure 11 can be parallel to or collinear with the Z direction 424 as shown in Figure 4. As shown in Figures 12 and 13, the sample support cartridge 1104 and the position adjuster 1106 can be coupled by a kinematic coupling, which allows the sample support cartridge 1104 to be easily aligned with the position adjuster 1106 (which may also be referred to as a holding member).

[0104] Turning now to FIG. 12 , the sample support cartridge 1104 will be described first. This component may be of unitary construction or may be comprised of multiple components coupled together. In one or more embodiments (e.g., as shown in FIG. 12 ), the sample support cartridge 1104 may include a base component 1210 coupled to an upper component 1212 by one or more fasteners 1214 (e.g., bolts). Retention posts 1204 may extend from the upper component 1212 to enable the sample support cartridge 1104 to be grasped by an air-side robotic and / or automated gripping system (not shown). A set of one or more receivers 1202 may be coupled between the upper component 1212 and the base component 1210, e.g., to the base component 1210, by one or more fasteners 1216 (e.g., bolts). For example, at least one fastener 1216 may be used for each receiver 1202.

[0105] The use of individual receivers 1202 and their corresponding oversized fastener holes 1215 allows for adjustment of the individual receivers 1202 independently and relative to the base component 1210 by approximately 1 micrometer or approximately 2 micrometers.

[0106] In one or more other embodiments, a set of two or more receivers 1202 may be integral with one another.

[0107] As shown, the receiver 1202 may include a recess 1217, such as a key or slot, for receiving the mating element 802 of the grid holder 114. Similarly, the receiver may include a notch 1218 for receiving the aligner 804 of the same grid holder 114.

[0108] The following describes the kinematic coupling in the sample support assembly 108. Similar to the kinematic coupling in the chamber door assembly 106, the sample support cartridge 1104 and the position adjuster 1106 in the kinematic coupling of the sample support assembly 108 can each comprise part of the kinematic coupling. For example, the sample support cartridge 1104 can include one or more first kinematic coupling elements 1206, and the position adjuster 1106 can include one or more corresponding second kinematic coupling elements 1306. In one or more embodiments, the first kinematic coupling element 1206 or the second kinematic coupling element 1306 can include a concave block, a V-shaped block, or another appropriately shaped element, allowing one of the first kinematic coupling element 1206 and the second kinematic coupling element 1306 to receive the other. Accordingly, the other of the first kinematic coupling element 1206 and the second kinematic coupling element 1306 may include a convex block, a dome-shaped block, a spherical block, a convex V-shape, and / or other suitable element to provide the corresponding kinematic coupling.

[0109] For example, in the example embodiments illustrated in Figures 9 through 13, the first kinematic coupling element 1206 and the second kinematic coupling element 1306 can be configured to provide at least two degrees of freedom along the X and Y directions, respectively, as illustrated in Figures 11 and 12. When the sample support assembly 108 is coupled to the chamber door assembly 106, these X and Y directions can be parallel or collinear with the X and Y directions of the chamber door assembly 106 (e.g., as shown in Figure 5).

[0110] With respect to the sample support cartridge 1104, the first kinematic coupling elements 1206 can be arranged to intersect with each other in surfaces that are transverse to each other (e.g., perpendicular to each other), such as within corresponding recesses 1207. Turning to the sample support cartridge 1106, the second kinematic coupling elements 1306 can be arranged to intersect with each other in surfaces that are also perpendicular to each other (e.g., perpendicular to each other), such as within corresponding recesses 1307. In this way, the kinematic arrangement between the sample support cartridge 1104 and the positioning portion 1106 allows the sample support cartridge 1104 to be adjusted / aligned with respect to the positioning portion 1106 when the kinematic coupling elements 1206 and 1306 are coupled (e.g., engaged) with each other.

[0111] In one or more embodiments, this adjustment / alignment may occur in the illustrated X and Y directions. For example, but not limited to, this alignment may be approximately 1.2 mm in each of the positive and negative directions along each of the X and Y directions.

[0112] This adjustment / alignment may be minimal, but may allow for slight adjustment of the sample support cartridge 1104 relative to the grid handling robot 128 when the sample positioning system 104 is engaged / closed with the vacuum chamber body 124 of the scientific instrument 102, resulting in the sample support cartridge 1104 being positioned on the vacuum side of the scientific instrument 1104 (e.g., within chambers 122 and / or 120).

[0113] Notably, the orthogonal arrangement of kinematic coupling elements 1206 and 1306 may also provide for limiting the movement of sample support cartridge 1104. This limiting of movement may occur in at least four degrees of freedom, or at least all six degrees of freedom, allowing sample support cartridge 1104 to be supported relative to positioning mechanism 1106, including, for example, when grid handling robot 128 engages one or more grid holders 114 coupled to receiver 1202 (see FIG. 12 ) of sample support cartridge 1104.

[0114] 11 , in one or more embodiments, the second kinematic coupling element 1306 can be positioned at a second distance from the second coupling surface 1380, which can be the same as the first distance between the first kinematic coupling element 1206 and the corresponding first coupling surface 1280. In this manner, when the support cartridge 1104 is inserted into the position adjuster 1106, the second kinematic coupling element 1306 can engage with the corresponding first kinematic coupling element 1206, thereby limiting or preventing tilting of the support cartridge 1104 relative to the position adjuster 1106. That is, the engagement of the first and second kinematic coupling elements 1206, 1306 can provide resistance to rotation of the support cartridge 1104 relative to the position adjuster 1106.

[0115] As described above, the sample support cartridge 1104 and the position adjuster 1106 can be magnetically coupled to one another. For example, the position adjuster 1106 can include a first magnetic element 1304, and the sample support cartridge 1104 can include a second magnetic element 1220 on a back surface 1222 of the sample support cartridge 1104 (e.g., the side facing the position adjuster 1106). In one or more embodiments, either the first magnetic element 1304 or the second magnetic element 1220 can be disposed within a raised key 1305, and the other first magnetic element 1304 and second magnetic element 1220 can be disposed within a corresponding slot 1221. In one or more embodiments, one of the slot 1221 and the key 1305 can be configured larger than the other, allowing for spacing between them when coupled. This spacing allows for easy mating and adjustment of the corresponding key / slot interfaces while still allowing for the slight adjustability provided by kinematic coupling elements 1206 and 1306.

[0116] 13 and further description of the position adjuster 1106, which may be of unitary construction or comprised of multiple interconnected components. In one or more embodiments, as shown in FIG. 13, the position adjuster 1106 can include a base component 1320 and a main body component 1322, which may be interconnected by fasteners 1324, such as bolts.

[0117] The position adjuster 1106 may include one or more through-holes 1308 (e.g., at least a pair of through-holes 1308) to enable coupling of the position adjuster 1106 to the flex adjuster 1108. Correspondingly, the flex adjuster 1108 may include at least a pair of corresponding fastener holes 1412 (see FIG. 14 ), e.g., screw holes. The through-holes 1308 may be oversized relative to the corresponding fasteners 1310 (e.g., bolts), thereby enabling adjustment / alignment of the position adjuster 1106 relative to the flex adjuster 1108 when coupled to the flex adjuster 1108. Such adjustment / alignment may occur along the X and / or Y directions (which are orthogonal to each other) shown in FIGS. 11 and 13 or within a plane containing the axes represented by the X and Y directions in FIGS. 11 and 13 .

[0118] 14, further description of the flex adjuster 1108 will be provided. The flex adjuster 1108 can have a unitary structure or can be comprised of multiple elements coupled together. In one or more embodiments, as shown in FIG. 14, the flex adjuster 1108 can include a first face element 1402A (e.g., a face plate) and a second face element 1402B (e.g., another face plate).

[0119] 11, the second face plate 1402B is positioned opposite the position adjuster 1106 and may include fastener holes 1412. As shown in FIG. 10, the first face plate 1402A may be positioned opposite the door plate 432 of the chamber door assembly 106.

[0120] 14, the face plates 1402A and 1402B may be configured to be positioned generally parallel to one another, but may be configured such that the distance (e.g., spacing) between these face plates 1402A and 1402B is controllable. That is, the first face plate 1402A may be configured to be spaced apart from or positioned relative to the second face plate 1402B. This may be achieved by a linkage 1404 extending across the bottom of each of the first face plate 1402A and the second face plate 1402B. A cavity 1405 may extend within the linkage 1404 between opposing distal sides 1411 of the flex adjuster 1108. Thus, the connector 1404 may be configured to connect the first face plate 1402A and the second face plate 1402B, such that the first face plate 1402A, the second face plate 1402B, and the connector 1404 are integral. That is, via the connector 1404, the connector 1404 is thinner than the first face plate 1402A and the second face plate 1402B and is elastically deformable, thereby allowing the first face plate 1402A and the second face plate 1402B to be adjusted / aligned with respect to each other. In other words, the thin structure of the cavity 1405 and / or the connector 1414 relative to the first face plate 1402A / second face plate 1402B may allow limited adjustability in the RX degree of freedom (rotation about the X direction shown in FIG. 14 ) between the first face plate 1402A and the second face plate 1402B. By way of example, and not limitation, the RX adjustment in both the positive and negative directions may be approximately 2 degrees.

[0121] It will be appreciated that the first and / or second face plates 1402A and 1402B may have other configurations and / or shapes, such as non-planar plates, in one or more other embodiments.

[0122] The above adjustment / alignment may be facilitated by first adjustment element 1406 and / or second adjustment element 1408.

[0123] The first adjustment element 1406 may include a fastener (e.g., a bolt) that may be fastened through through holes 1407 in the first and second face plates 1402A and 1402B to a fastener hole, such as threaded hole 506 ( FIG. 5 ), in the door plate 432. In one or more cases, the first adjustment element 1406 may further include a spring element (e.g., a Belleville spring) that may enable high-force engagement and also permit rotation about the Z direction 442 (e.g., RZ).

[0124] In one or more cases, the set of through-holes 1407 may not be oversized to limit the degrees of freedom provided by the flex adjuster 1108 for adjustment / alignment of the overall sample support assembly 108. In one or more examples, a washer or other element may be used between the first face plate 1402A and the second face plate 1402B.

[0125] Rotation of each of the flex adjusters 1108 about the Z direction 1102 (e.g., RZ), and thus rotation of the sample support assembly 108 relative to the chamber door assembly 106, may be permitted by the first adjustment element 1406 being non-rigidly coupled to the door plate 432. In one or more examples, the positive and / or negative RZ adjustment may be, but is not limited to, about 2 degrees or about 1 degree. This rotation may be limited by tightening the first adjustment element 1406 relative to the door plate 432, for example, based on a spring element of the first adjustment element.

[0126] Additionally and / or alternatively, in another embodiment, one through hole 1407 in the set of through holes 1407 may be a threaded hole and the other through holes 1407 in the set may be untreaded. For example, the through holes 1407 in the first face plate 1402A may be threaded holes, allowing spacing to be created between the first face plate 1402A and the second face plate 1402B by rotating the fastener 1406 (e.g., the first adjustment element 1406).

[0127] The second adjustment element 1408 may include a support element 1409, such as a plate, that may be configured to engage one of the opposing ends 1411 of the first and second face plates 1402A and 1402B. As shown, a pair of support elements 1409 may be used, which may extend from the end 1411 of the first face plate 1402A. In one or more examples, the thickness of the support element (e.g., in the Z direction 1102) may be the same as or less than the thickness of the first face plate 1402A, also in the Z direction 1102. This non-impact locking mechanism does not affect the adjusted position when the fasteners 1410 and / or first adjustment element 1406 are tightened, but may have slight flexibility for rotation in the X direction (e.g., RX) due to its thinness in the Z direction 1102.

[0128] A group of fasteners 1410, such as bolts, may extend through holes in the support element 1409 and into fastening holes, such as threaded holes, in the distal sides 1411 of the first and second face plates 1402A and 1402B. In one or more embodiments, the holes in the support element 1409 may be oversized for the fasteners 1410, or may instead be slotted, oval, or the like. This allows for adjustable alignment of the first and second face plates 1402A and 1402B relative to one another while still allowing the fasteners 1410 to fit within their respective holes in the distal sides 1411. Tightening the fasteners 1410 to the support element 1409 relative to the distal sides 1411 limits and secures alignment between the pair of face plates 1402A and 1402B.

[0129] 14 (RZ), i.e., rotation of the sample support assembly 108 relative to the flex adjuster 1108 and therefore the chamber door assembly 106, can be permitted by the second adjustment element 1408 being non-rigidly coupled to the door plate 432. This rotation can be restricted by tightening the second adjustment element 1408 relative to the pair of first and second face plates 1402A and 1402B and the door plate 432.

[0130] As further shown in FIGS. 10 and 14 , the first face plate 1402A may include one or more support extensions 1414 used to support the flex adjuster 1108 relative to the door plate 432 and / or limit movement of the flex adjuster 1108 relative to the door plate 432 in the RX direction.

[0131] 7 and 14, the second face plate 1402B may include an upper support 1416 extending outward (e.g., in the Z direction 1102) from a main body portion of the second face plate 1402B. The upper body portion 1322 of the position adjuster 1106, e.g., the upper surface 1302 ( FIG. 13 ), of the position adjuster 1106 may be received by (e.g., abut) the upper support 1416. Additionally or alternatively, the upper support 1416 may limit upward adjustment of the position adjuster 1106 in the Y direction shown in FIGS. 13 and 14.

[0132] As a summary of the above-described components and / or their functionality, reference is now made to FIG. 15 , which illustrates a flowchart of an exemplary, non-limiting method 1500 that can facilitate processing a sample support cartridge with position repeatability relative to a scientific instrument 102 according to one or more embodiments described herein, such as, for example, the non-limiting system 100 shown in FIG. 1 . Although the non-limiting method 1500 is described in connection with the non-limiting system 100 of FIG. 1 , the non-limiting method 1500 is also applicable to other systems and / or assemblies described herein, such as the instrument door assembly 106 and / or the sample support assembly 108. Repetitive descriptions of similar elements and / or processes used in each embodiment have been omitted for the sake of brevity.

[0133] At 1502, the non-limiting method 1500 may include coupling a sample support cartridge to a holding member using a kinematic coupling.

[0134] For example, the sample support cartridge 1104 may be coupled to a holding member (e.g., door plate 432 via the sample support assembly 108) using a kinematic coupling. See, for example, FIG.

[0135] As another example, the sample support cartridge 1104 may be coupled to a holding member (e.g., position adjuster 1106) using a kinematic coupling. See, for example, FIG.

[0136] At 1504, the non-limiting method 1500 may include kinematically aligning the retaining member with respect to the base unit using a kinematic coupling having a shape that allows the retaining member to be adjusted relative to the base unit while the kinematic coupling is engaged.

[0137] For example, the retaining member (e.g., door plate 432) can be kinematically aligned relative to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) such that the retaining member (e.g., door plate 432) is adjustable relative to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) while the kinematic couplings (e.g., first kinematic coupling element 430 and second kinematic coupling element 428) are engaged. See, e.g., FIG. 4 .

[0138] For example, the retaining member (e.g., position adjuster 1106) can be kinematically aligned to allow the retaining member (e.g., position adjuster 1106) to be adjustable relative to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424 via flex adjuster 1108) while the kinematic coupling (e.g., first kinematic coupling element 1206 and second kinematic coupling element 1306) is engaged with the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424 via flex adjuster 1108). See, for example, FIG. 11 .

[0139] At 1506, non-limiting method 1500 may include determining whether coupling was successfully achieved, for example, by a sensor associated with a processor of the scientific instrument (e.g., scientific instrument 102). If yes, non-limiting method 1500 may proceed to end. If no, step 1504 may be repeated.

[0140] For example, the vacuum seal may be determined by a vacuum seal sensor (e.g., vacuum seal sensor 431) coupled to a processor (e.g., processor 406) of the scientific instrument (e.g., scientific instrument 102). See, e.g., FIG. 4.

[0141] 16 and 17 , a flowchart of an exemplary, non-limiting method 1600 is shown that can facilitate the process of sample support cartridge position repeatability relative to a scientific instrument 102 in accordance with one or more embodiments described herein, such as the non-limiting system 100 of FIG. 1 . Although the non-limiting method 1600 is described in connection with the non-limiting system 100 of FIG. 1 , the non-limiting method 1600 may also be applicable to other systems and / or assemblies described herein, such as the instrument door assembly 106 and / or the sample support assembly 108. Repeated descriptions of similar elements and / or steps used in each embodiment are omitted for the sake of brevity.

[0142] At 1602, the non-limiting method 1600 can include coupling a sample support cartridge to a holding member using a kinematic coupling.

[0143] For example, the sample support cartridge 1104 may be coupled to a holding member (e.g., door plate 432 via the sample support assembly 108) using a kinematic coupling. See, for example, FIG.

[0144] As another example, the sample support cartridge 1104 may be coupled to a holding member (e.g., position adjuster 1106) using a kinematic coupling. See, for example, FIG.

[0145] At 1604, the non-limiting method 1600 may include kinematically aligning the retaining member with respect to the base unit using a kinematic coupling having a shape that allows the retaining member to be adjusted relative to the base unit while the kinematic coupling is performed.

[0146] For example, the retaining member (e.g., door plate 432) can be kinematically aligned relative to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) such that the retaining member (e.g., door plate 432) is adjustable relative to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) while the kinematic couplings (e.g., first kinematic coupling element 430 and second kinematic coupling element 428) are engaged. See, e.g., FIG. 4 .

[0147] For example, the retaining member (e.g., position adjuster 1106) can be kinematically aligned to allow the retaining member (e.g., position adjuster 1106) to be adjustable relative to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424 via flex adjuster 1108) while the kinematic coupling (e.g., first kinematic coupling element 1206 and second kinematic coupling element 1306) is engaged with the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424 via flex adjuster 1108). See, for example, FIG. 11 .

[0148] At 1606, non-limiting method 1600 may include determining whether coupling was successfully achieved, for example, by a sensor coupled to a processor of the scientific instrument (e.g., scientific instrument 102). If yes, non-limiting method 1600 may proceed to step 1608. If no, step 1604 may be repeated.

[0149] For example, the vacuum seal may be determined by a vacuum seal sensor (e.g., vacuum seal sensor 431) coupled to a processor (e.g., processor 406) of the scientific instrument (e.g., scientific instrument 102). See, e.g., FIG. 4.

[0150] At 1608, the non-limiting method 1600 may cause adjustability of the retention member relative to the base unit based on deformation characteristics of the retention member holder or retention member.

[0151] For example, the interface between the retaining member holder (e.g., door carriage 434) and the retaining member (e.g., door plate 432) can be made larger, for example by enlarging the fastener through-holes 502 in the door plate 432, allowing the retaining member (e.g., door plate 432) to be connectable to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) with deformation characteristics.

[0152] At 1610, the non-limiting method 1600 may include maintaining the retaining member in an adjustable state relative to the base unit based on a deformation characteristic of the retaining member after kinematic coupling of the retaining member to the base unit.

[0153] For example, after the retaining member (e.g., door plate 432) is kinetically coupled to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424), the retaining member (e.g., door plate 432) can be maintained in an adjustable state relative to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) based on the use of kinematic couplings (e.g., first kinematic coupling element 430 and second kinematic coupling element 428). The deformation characteristics as described above can be due to the kinematic couplings and / or the use of a flexible material, such as an elastic material, for the door plate 432. It should be noted that this adjustability can also be maintained prior to the fixed coupling of the chamber door assembly 106 to the chamber body 124 and / or load lock chamber body 424, for example, using the retaining element 606. See, for example, FIG. 7 .

[0154] In 1612, non-limiting method 1600 may include maintaining relative adjustability between the holding member and the basic unit both before and after the sample support cartridge is dynamically coupled to the holding member based on flexible deformation characteristics of a holding member holder coupled between the holding member and the basic unit.

[0155] For example, before and / or after the sample support cartridge (e.g., sample support cartridge 1104) is coupled to the holding member (e.g., position adjuster 1106) by a kinematic coupling (e.g., first kinematic coupling element 1206 and second kinematic coupling element 1306), adjustability of the holding member (e.g., position adjuster 1106) relative to the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) can be maintained based on oversized through-holes 1308 relative to fasteners 1310. That is, the position adjuster 1106 can be adjustably coupled to the flex adjuster 1108 (until later fixed). The flex adjuster 1108 can be coupled to the chamber door assembly 106, which can further be coupled to the base unit via at least a rail system 438. See, for example, FIG. 11 .

[0156] At 1614, the non-limiting method 1600 can include causing adjustment of the sample support cartridge in at least two different degrees of freedom relative to a robotic element disposed within the base unit, the two different degrees of freedom being enabled by the use of a kinematic coupling or a second kinematic coupling.

[0157] For example, adjustment of a sample support cartridge (e.g., sample support cartridge 1104) can occur in at least two different degrees of freedom (e.g., about at least two of the X and Y directions shown in FIG. 5, or about the X, Y, and / or Z directions shown schematically in FIG. 5) based on kinematic couplings (e.g., first kinematic coupling element 430 and second kinematic coupling element 428). This allows adjustments to a robotic element (e.g., grid handling robot 128 or other automated moving element). See, e.g., FIGS. 5-7.

[0158] For example, adjustment of a sample support cartridge (e.g., sample support cartridge 1104) can occur in at least two different degrees of freedom (e.g., at least two along the X and Y directions shown in FIG. 13 ). The adjustment is made to a robotic element (e.g., grid handling robot 128 or other automated moving element) based on a kinematic coupling (e.g., first kinematic coupling element 1206 and second kinematic coupling element 1306). See, e.g., FIG. 13 .

[0159] At 1616, the non-limiting method 1600 may include causing adjustment of the retaining member relative to a resilient member disposed between the retaining member and the base unit based on a kinematic coupling.

[0160] For example, the retaining member (e.g., door plate 432) may be adjusted relative to a resilient member (e.g., resilient member 426) disposed between the retaining member (e.g., door plate 432) and the base unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) based on a kinematic coupling (e.g., first kinematic coupling element 428 and second kinematic coupling element 430). See, for example, FIG. 6 .

[0161] Additional Overview For simplicity of explanation, computer-implemented and non-computer-implemented techniques illustrated herein are illustrated and / or described as a series of acts. It should be understood that the present invention is not limited to the acts illustrated and / or described or their order. For example, acts may be performed in other orders, or may be performed simultaneously, or may be performed in conjunction with other acts not described herein. Furthermore, not all acts illustrated need be used to implement the computer- and non-computer-embodied methods according to the described subject matter. In addition, computer- and non-computer-embodied methods may alternatively be represented as a series of interrelated states via state diagrams or events. Additionally, the computer-embodied methods described herein and below may be stored on an article of manufacture and used for transport and transfer to a computer. As used herein, the term "article of manufacture" is intended to encompass a computer program accessible from any computer-readable device or storage medium.

[0162] The systems and / or devices are described (and / or will be further described hereinafter) with respect to interactions between one or more components. Such systems and / or components may include the components or subcomponents identified herein, one or more of the identified components and / or subcomponents, and additional components. A subcomponent may be implemented as a component communicatively coupled to other components rather than being included in a parent component. One or more components and / or subcomponents may be integrated into a single component that provides aggregate functionality. These components may interact with one or more other components not specifically described herein for brevity, but known to those skilled in the art.

[0163] In summary, the embodiments described herein relate to systems and / or methods for providing positional repeatability of the closure of an aperture of a scientific instrument (e.g., the scientific instrument 102) or positional repeatability of the alignment of a sample (e.g., the sample 110) with respect to a coordinate system (e.g., the coordinate system 126) of the scientific instrument (e.g., the scientific instrument 102).The system (e.g., system 104) includes a holding member (e.g., door plate 432, position adjuster 1106) that receives a sample support cartridge (e.g., sample support cartridge 1104), a first kinematic coupling portion (e.g., first kinematic coupling element 430 or second kinematic coupling element 428, or first kinematic coupling element 1206 or second kinematic coupling element 1306) configured to receive a second kinematic coupling portion (e.g., the other of first kinematic coupling element 430 and second kinematic coupling element 428, or the other of first kinematic coupling element 1206 and second kinematic coupling element 1306), and a second kinematic coupling portion (e.g., first kinematic coupling element 430) disposed on the holding member (e.g., door plate 432, position adjuster 1106). and the other of the second kinematic coupling element 428, or the other of the first kinematic coupling element 1206 and the second kinematic coupling element 1306), and at least one of the first kinematic coupling portion (e.g., the first kinematic coupling element 430 or the second kinematic coupling element 428, or the first kinematic coupling element 1206 or the second kinematic coupling element 1306) or the second kinematic coupling portion (e.g., the other of the first kinematic coupling element 430 and the second kinematic coupling element 428, or the other of the first kinematic coupling element 1206 and the second kinematic coupling element 1306) may be configured to move together with the sample support cartridge (e.g., the sample support cartridge 1104) while being coupled to a holding member (e.g., the door plate 432, the position adjuster 1106).The system (e.g., system 104) may include a vacuum chamber body (e.g., vacuum chamber body 124), a vacuum chamber door (e.g., chamber door assembly 106), and a kinematic coupling portion (e.g., first kinematic coupling element 430 or second kinematic coupling element 428, or first kinematic coupling element 1206 or second kinematic coupling element 1306), which may enable adjustable alignment of a sample support cartridge (e.g., sample support cartridge 1104) at the vacuum chamber door (e.g., chamber door assembly 106) with respect to the vacuum chamber body (e.g., vacuum chamber body 124).

[0164] One or more embodiments described herein may employ novel systems that provide positional repeatability of a closure, such as a door or door system, relative to the body of an instrument device, positional repeatability of a grid (e.g., a lamellar grid or a sample grid) relative to a scientific instrument, more specifically positional repeatability of the grid relative to the coordinate system of the scientific instrument, separation of degrees of freedom to provide these positional repeatabilities, and / or increased sample throughput when compared to existing configurations.

[0165] Indeed, in view of one or more embodiments described herein, practical applications of one or more of the systems, computer-implemented methods, and / or computer program products described herein include enabling consistent engagement of an instrument door assembly with a scientific instrument, consistent positioning of one or more grids with a grid handling robot of a scientific instrument, and / or reduced preparation time prior to analysis of a series of samples on a scientific instrument.

[0166] These are useful and practical applications that provide enhanced (e.g., improved and / or optimized) sample analysis compared to existing systems. Overall, such tools may constitute concrete and tangible technological improvements in the field of materials analysis, and more specifically in the field of materials analysis involving the transfer of samples between the air and vacuum sides of scientific instruments using grids (e.g., lamella carriers).

[0167] The systems and / or devices are described (and / or will be further described hereinafter) with respect to interactions between one or more components. Such systems and / or components may include the components or subcomponents identified herein, one or more of the identified components and / or subcomponents, and additional components. A subcomponent may be implemented as a component communicatively coupled to other components rather than being included in a parent component. One or more components and / or subcomponents may be integrated into a single component that provides aggregate functionality. These components may interact with one or more other components not specifically described herein for brevity, but known to those skilled in the art.

[0168] In one or more embodiments, one or more of the processes described herein may be executed by one or more specialized computers (e.g., specialized processing units, specialized classical computers, and / or other types of specialized computers) to perform defined tasks associated with one or more of the technologies described above. One or more of the embodiments and / or components thereof described herein may be used to solve problems emerging due to advances in the technologies described above, the use of cloud computing systems, computer architectures, and / or other technologies.

[0169] One or more embodiments described herein may be fully usable to perform one or more other functions (e.g., fully powered on, fully running, and / or another function) while performing one or more of the operations described herein.

[0170] To provide additional summary, the following embodiments and their features are listed below.

[0171] The system includes a holding member (e.g., door plate 432, flex adjuster 1106) that receives a sample support cartridge (e.g., sample support cartridge 1104); The kinematic coupling includes a first part of the kinematic coupling (e.g., first kinematic coupling element 430 or second kinematic coupling element 428, first kinematic coupling element 1206 or second kinematic coupling element 1306) that receives a second part of the kinematic coupling (e.g., the other of first kinematic coupling element 430 and second kinematic coupling element 428, or the other of first kinematic coupling element 1206 and second kinematic coupling element 1306), and a second part of the kinematic coupling that is disposed on the holding member, and at least the first part or second part of the kinematic coupling is disposed to move in unison with the sample support cartridge when coupled to the holding member.

[0172] In the system described in the preceding paragraph, after engagement of a first part of the kinematic coupling (e.g., first kinematic coupling element 430) with a second part of the kinematic coupling (e.g., second kinematic coupling element 428), the adjustability of the second part relative to the first part is maintained based on the flexible deformation characteristics of the retaining member (e.g., door plate 432) (e.g., the material of door plate 432 and / or the oversized through hole 1308).

[0173] In any of the systems described in the preceding paragraphs, the interface between the retaining member (e.g., door plate 432, position adjuster 1106) and the retaining member holder (e.g., door carriage 434, flex adjuster 1108) is configured to allow the retaining member to be adjusted relative to the retaining member holder after engagement of the first part (e.g., first kinematic coupling element 430, 1206) and the second part (e.g., second kinematic coupling element 428, 1306) of the kinematic coupling.

[0174] In a system described in any of the preceding paragraphs, a holding member holder (e.g., door carriage 434, flex adjuster 1108) is connectable to each of the holding members (e.g., door plate 432, position adjuster 1106) and the basic units that receive the holding members (e.g., vacuum chamber body 124 and / or load lock chamber body 424).

[0175] A system described in any of the preceding paragraphs, wherein after engagement of the first and second parts of the kinematic coupling (e.g., the first kinematic coupling element 430 or the second kinematic coupling element 428), the retaining member (e.g., the door plate 432) is configured to be able to at least either tilt or rotate relative to an elastic sealing body (e.g., the elastic element 426) disposed in the basic unit (e.g., the vacuum chamber body 124 and / or the load lock chamber body 424) that receives the retaining member.

[0176] The system described in any of the preceding paragraphs further includes a resilient member (e.g., resilient element 426) held on the retaining member (e.g., door plate 432) or the basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) that receives the retaining member, configured to maintain a vacuum seal between the retaining member and the basic unit after the retaining member holder (e.g., door carriage 434) is fixedly coupled to the basic unit.

[0177] The system described in any of the preceding paragraphs further comprises a mechanism whereby the adjustability of the alignment between the sample support cartridge (e.g., sample support cartridge 1104) and the basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) that receives the holding member (e.g., door plate 432 or position adjuster 1106) is maintained even after the first component (e.g., kinematic coupling element 430 or 1206) and the second component (e.g., kinematic coupling element 428 or 1306) of the kinematic coupling are coupled together.

[0178] The system described in any of the preceding paragraphs further includes a magnetic element set (e.g., first magnetic element 1304 and second magnetic element 1220) provided on the sample support cartridge (e.g., sample support cartridge 1104) and the holding member (e.g., position adjuster 1106), which enables the sample support cartridge to be movable in two degrees of freedom relative to the holding member (e.g., along the X and Y directions shown in FIG. 11).

[0179] The system described in any of the preceding paragraphs is a system in which the holding member (e.g., door plate 432, position adjuster 1106) and holding member holder (e.g., door carriage 434, flex adjuster 1108) combine to provide the position of the sample support cartridge (e.g., sample support cartridge 1104) in at least four degrees of freedom (e.g., X and Y directions and RX and RY directions shown in Figures 5 and 6, X, Y and Z directions and RX and RZ rotations in Figure 11) relative to the coordinate system of a robot element (e.g., robot element 128) arranged within a basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) that accepts the holding member (e.g., door plate 432, position adjuster 1106).

[0180] The system described in any of the preceding paragraphs is a system in which a first interface between the holding member holder (e.g., door carriage 434, flex adjuster 1108) and the holding member (e.g., door plate 432, position adjuster 1106) allows three of at least four degrees of freedom (e.g., X and Y directions and RX or RY rotation as shown in FIG. 5, Z direction and RX and RZ rotation as shown in FIG. 11), and a second interface between the holding member (e.g., door plate 432, position adjuster 1106) and the sample support cartridge (e.g., sample support cartridge 1104) allows two of at least four degrees of freedom.

[0181] A system including a vacuum chamber body (e.g., vacuum chamber body 124 and / or load lock chamber body 424), a vacuum chamber door (e.g., chamber door assembly 106), and a kinematic coupling (e.g., first kinematic coupling element 430 and second kinematic element 428, or first kinematic coupling element 1206 and second kinematic element 1306), wherein the kinematic coupling enables adjustable alignment of a sample support cartridge (e.g., sample support cartridge 1104) at the vacuum chamber door relative to the vacuum chamber body.

[0182] The system described in the preceding paragraphs is a system in which a kinematic coupling (e.g., first kinematic coupling element 430 and second kinematic element 428) enables alignment of a vacuum chamber door (e.g., door plate 432 of chamber door assembly 106) with respect to a vacuum chamber body (e.g., vacuum chamber body 124 and / or load lock chamber body 424) and with respect to a resilient member (e.g., resilient member 426) that provides a seal between the vacuum chamber door and the vacuum chamber body.

[0183] The system described in any of the preceding paragraphs is a system in which a kinematic coupling enables a sample support cartridge (e.g., sample support cartridge 1104) to be aligned with a vacuum chamber door (e.g., door plate 432).

[0184] The system of any of the preceding paragraphs may further comprise a kinematic coupling (e.g., first kinematic coupling element 430 and second kinematic coupling element 428, first kinematic coupling element 1206 and second kinematic coupling element 1306) that couples the sample support cartridge (e.g., sample support cartridge 1104) to a vacuum chamber body (e.g., vacuum chamber body 124 and / or load lock chamber body 424) by at least two free ends of the sample support cartridge (e.g., sample support cartridge 1104). 11), and a holding member (e.g., position adjuster 1106, or position adjuster 1106 and flex adjuster 1108) coupled between the sample support cartridge (e.g., sample support cartridge 1104) and the vacuum chamber door (e.g., door plate 432) provides three additional degrees of freedom (e.g., Z direction and RX and RZ rotation shown in FIG. 11) for aligning the sample support cartridge relative to the vacuum chamber door, rather than at least two degrees of freedom.

[0185] The method includes coupling a sample support cartridge (e.g., sample support cartridge 1104) to a holding member (e.g., door plate 432, position adjuster 1106) using a kinematic coupling, and kinematically aligning the holding member with respect to a basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) using the kinematic coupling (e.g., first kinematic coupling element 430 and second kinematic coupling element 428, first kinematic coupling element 1206 and second kinematic coupling element 1306), wherein the kinematic coupling has a shape that allows the holding member to be adjusted with respect to the basic unit when coupled.

[0186] The methods described in the preceding paragraphs further include a process for making the holding member (e.g., door plate 432, position adjuster 1106) adjustable relative to the basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) based on the flexible compliance of the holding member holder (e.g., door carriage 432, flex position adjuster 1108) or the holding member (e.g., door plate 434, adjuster 1106).

[0187] The method described in any of the preceding paragraphs further includes a process of maintaining adjustability of the holding member (e.g., door plate 432, position adjuster 1106) relative to the basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) based on flexible tracking of the holding member (e.g., door plate 432, position adjuster 1106) after kinematic coupling between the holding member (e.g., door plate 432, position adjuster 1106) and the basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424).

[0188] The method described in any of the preceding paragraphs further includes a process for maintaining the adjustability of the holding member (e.g., door plate 432, position adjuster 1106) relative to the basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) before and after the sample support cartridge (e.g., sample support cartridge 1104) is dynamically coupled to the holding member (e.g., door plate 432, position adjuster 1106) based on the flexible compliance of the holding member holder (e.g., door carriage 434, flex adjuster 1108) coupled between the holding member (e.g., door plate 432, position adjuster 1106) and the basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424).

[0189] The method according to any of the preceding paragraphs further includes a process of adjusting the sample support cartridge (e.g., the sample support cartridge 1104) in at least two different degrees of freedom (e.g., the X and Y directions and RX shown in FIG. 5, the X and Y directions shown in FIG. 11) relative to a robot element (e.g., the robot element 128) arranged in the basic unit (e.g., the vacuum chamber body 124 and / or the load lock chamber body 424), wherein the two different degrees of freedom are realized by using a kinematic coupling (e.g., the first kinematic coupling element 430 and the second kinematic coupling element 428, or the first kinematic coupling element 1206 and the second kinematic coupling element 1306) or a second kinematic coupling (e.g., the other of the first kinematic coupling element 430 and the second kinematic coupling element 428, and the first kinematic coupling element 1206 and the second kinematic coupling element 1306).

[0190] The method of any of the preceding paragraphs may further include adjusting the holding member (e.g., door plate 432) relative to an elastic member (e.g., elastic member 426) disposed between the holding member (e.g., door plate 432) and the basic unit (e.g., vacuum chamber body 124 and / or load lock chamber body 424) based on a kinematic coupling (e.g., first kinematic coupling element 430 and second kinematic coupling element 428, or first kinematic coupling element 1206 and second kinematic coupling element 1306).

[0191] Scientific Instrument System Description Referring now to Figure 18, a detailed description of further context regarding one or more embodiments described in Figures 1-17 is provided below. Figure 18 illustrates a block diagram of an example scientific instrument system 1800 that may be identical to, include, use, or be used by the scientific instrument 102 described herein, according to various embodiments. For example, the scientific instrument system 102 may be implemented by one or more of the scientific instrument 1810, the user local computing device 1820, the service local computing device 1830, and / or the remote computing device 1840 of the scientific instrument system 1800.

[0192] Any of the scientific instruments 1810, the user local computing devices 1820, the service local computing devices 1830, and / or the remote computing devices 1840 may include any embodiment of the computing devices 300 described herein in connection with Figure 3. Also, any of the scientific instruments 1810, the user local computing devices 1820, the service local computing devices 1830, and / or the remote computing devices 1840 may take the form of one or more of any suitable embodiment of the computing devices 300 described herein in connection with Figure 3.

[0193] One or more of the scientific instrument 1810, the user local computing device 1820, the service local computing device 1830, and / or the remote computing device 1840 may include a processing unit 1802, a storage device 1804, and / or an interface device 1806. The processing unit 1802 may take any suitable form, including any form of the processor 302 described herein in connection with FIG. 3. The processing units 1802 included in each of the scientific instrument 1810, the user local computing device 1820, the service local computing device 1830, and / or the remote computing device 1840 may take the same form or different forms. The storage device 1804 may take any suitable form, and may include, for example, any form of the storage device 304 described herein in connection with FIG. 3. The storage device 1804 included in each of the scientific instrument 1810, the user local computing device 1820, the service local computing device 1830, and / or the remote computing device 1840 may take the same form or different forms. The interface device 1806 may take any suitable form, such as any of the interface devices 306 described herein in connection with Figure 3. The interface devices 306 included in each of the scientific instrument 1810, the user local computing device 1820, the service local computing device 1830, and / or the remote computing device 1840 may take the same form or different forms.

[0194] The scientific instruments 1810, the user local computing device 1820, the service local computing device 1830, and / or the remote computing device 1840 can communicate with other elements of the scientific instrument system 1800 via communication paths 1808. The communication paths 1808 can communicatively couple the interface devices 1806 in each element of the scientific instrument system 1800, as shown, and can be wired or wireless communication paths (e.g., conforming to any of the communication technologies described herein in connection with the interface device 306 of the computing device 300 of FIG. 3). While the particular scientific instrument system 1800 shown in FIG. 18 illustrates an “all connected” configuration that includes communication paths between each combination of the scientific instruments 1810, the user local computing device 1820, the service local computing device 1830, and the remote computing device 1840, this is merely an example, and in various embodiments, some of the communication paths 1808 can be omitted. For example, in one or more embodiments, the servicing local computing device 1830 may omit the direct communication path 1808 between its interface device 1806 and the interface device 1806 of the scientific instrument 1810. Instead, the servicing local computing device 1830 may communicate with the scientific instrument 1810 via the communication path 1808 between it and the user's local computing device 1820 or the communication path 1808 between the user's local computing device 1820 and the scientific instrument 1810.

[0195] Scientific instrument 1810 may include any suitable scientific instrument, such as a separation instrument, MS instrument, or other instrument that allows for material analysis.

[0196] The user local computing device 1820 may be a computing device local to the user of the scientific instrument 1810 (e.g., conforming to any of the embodiments of the computing device 300 described herein). In one or more embodiments, the user local computing device 1820 may be located near the scientific instrument 1810, but is not required to be. For example, a user local computing device 1820 located in a residence, office, or other building associated with a user subject may be remote from the scientific instrument 1810 and still be able to communicate with the scientific instrument 1810, allowing the user subject to control or access data from the scientific instrument 1810 using the user local computing device 1820. In one or more embodiments, the user local computing device 1820 may be, for example, a laptop, smartphone, or tablet device. In one or more embodiments, the user local computing device 1820 may be a portable computing device. In one or more embodiments, the user local computing device 1820 may be deployed in the field.

[0197] The service local computing device 1830 may be a computing device (e.g., conforming to any of the embodiments of computing device 300 described herein) local to an entity that provides services to the scientific instrument 1810. For example, the service local computing device 1830 may be local to the manufacturer of the scientific instrument 1810 or a third-party service company. In one or more embodiments, the service local computing device 1830 may communicate with the scientific instrument 1810, the user local computing device 1820, and / or the remote computing device 1840 (e.g., via a direct communication path 1808 or multiple “indirect” communication paths 1808 as described above). This may enable the service local computing device 1830 to receive data regarding the operation of the scientific instrument 1810, the user local computing device 1820, and / or the remote computing device 1840 (e.g., results of self-tests by the scientific instrument 1810, calibration coefficients used by the scientific instrument 1810, measurements of sensors associated with the scientific instrument 1810, etc.). In one or more embodiments, the service local computing device 1830 can communicate with the scientific instrument 1810, the user local computing device 1820, and / or the remote computing device 1840 (e.g., via a direct communication path 1808 or multiple “indirect” communication paths 1808 as described above) to transmit data to the scientific instrument 1810, the user local computing device 1820 (e.g., to update program instructions such as firmware of the scientific instrument 1810, to initiate the execution of a test or calibration sequence on the scientific instrument 1810, or to update program instructions such as software on the user local computing device 1820 or the remote computing device 1840). A user entity of the scientific instrument 1810 can utilize the scientific instrument 1810 or the user local computing device 1820 to communicate with the service local computing device 1830.This may be used to report problems with the scientific instrument 1810 or the user local computing device 1820, request a technician visit to improve the operation of the scientific instrument 1810, order consumables or replacement parts related to the scientific instrument 1810, and for other purposes.

[0198] The remote computing device 1840 may be a computing device (e.g., conforming to any of the embodiments of computing device 300 described herein) located remotely from the scientific instrument 1810 and / or the user local computing device 1820. In one or more embodiments, the remote computing device 1840 may be included in a data center or other large-scale server environment. In one or more embodiments, the remote computing device 1840 may include network-attached storage (e.g., as part of the storage device 1804). The remote computing device 1840 may store data generated by the scientific instrument 1810, perform analysis (e.g., according to programmed instructions) of the data generated by the scientific instrument 1810, facilitate communications between the user local computing device 1820 and the scientific instrument 1810, and / or facilitate communications between the service local computing device 1830 and the scientific instrument 1810.

[0199] In one or more embodiments, one or more of the components of the scientific instrument system 1800 shown in FIG. 18 may be omitted. Furthermore, in one or more embodiments, more than one of the various components of the scientific instrument system 1800 of FIG. 18 may be present. For example, the scientific instrument system 1800 may include multiple user local computing devices 1820 (e.g., multiple user local computing devices 1820 associated with different user entities or located in different locations). As another example, the scientific instrument system 1800 may include multiple scientific instruments 1810, all of which communicate with a service local computing device 1830 and / or a remote computing device 1840. In such an embodiment, the service local computing device 1830 may monitor the multiple scientific instruments 1810, and the service local computing device 1830 may "send" updates or other information to the multiple scientific instruments 1810 simultaneously. The scientific instruments 1810 in the scientific instrument system 1800 may be located near each other (e.g., in the same room) or far apart (e.g., on different floors, in different buildings, in different cities, etc.). In one or more embodiments, the scientific instruments 1810 may be connected to an Internet of Things (IoT) stack that enables command and control of the scientific instruments 1810 via web-based applications, virtual or augmented reality applications, mobile applications, and / or desktop applications. Any of these applications may be accessed via an intervening remote computing device 1840 by a user entity operating a user local computing device 1820 that communicates with the scientific instruments 1810. In one or more embodiments, the scientific instruments 1810 may be sold by a manufacturer as part of a local scientific instrument computing unit 1812, along with one or more associated user local computing devices 1820.

[0200] In one or more embodiments, the scientific instruments 1810 included in the scientific instrument system 1800 may each be a different type of scientific instrument 1810. For example, one scientific instrument 1810 may be an EDS instrument, and another scientific instrument 1810 may be an analytical instrument that analyzes the results of the EDS instrument. In some such embodiments, the remote computing device 1840 and / or the user local computing device 1820 may integrate data from the different types of scientific instruments 1810 included in the scientific instrument system 1800.

[0201] Example of an operational environment 19 is a schematic block diagram of an operating environment 1900 with which the described subject matter can interact. The operating environment 1900 includes one or more remote components 1910. The remote components 1910 may be hardware and / or software (e.g., threads, processes, computing devices). In one or more embodiments, the remote components 1910 may be a distributed computer system and may be connected via a communications framework 1940 to local autoscaling components and / or programs that use resources of the distributed computer system. The communications framework 1940 may include wired network devices, wireless network devices, mobile devices, wearable devices, wireless access network devices, gateway devices, femtocell devices, servers, etc.

[0202] The operating environment 1900 also includes one or more local components 1920. The local components 1920 may be hardware and / or software (e.g., threads, processes, computing devices, etc.). In one or more embodiments, the local components 1920 may include autoscaling components and / or programs that communicate with or use remote resources, such as 1910 and 1920, which may be connected via a communications framework 1940 to a remotely located distributed computing system.

[0203] An example of communication between the remote component 1910 and the local component 1920 includes data packets adapted to be transmitted between two or more computer processes. Another example of communication between the remote component 1910 and the local component 1920 includes circuit-switched data adapted to be transmitted within radio time slots between two or more computer processes. The operating environment 1900 includes a communications framework 1940 that can be used to facilitate communications between the remote component 1910 and the local component 1920, and the communications framework 1940 can include an air interface, such as an interface over a UMTS network or an interface over an LTE network. The remote component 1910 can be operatively connected to one or more remote data stores 1950 (e.g., hard drives, solid-state drives, subscriber identity module (SIM) cards, electronic SIMs (eSIMs), device memory, etc.) that can be used to store information at the remote component 1910 side of the communications framework 1940. Similarly, the local component 1920 can be operatively connected to one or more local data stores 1930 that can be used to store information on the local component 1920 side of the communication framework 1940 .

[0204] Example of a computing environment To provide additional context for various embodiments, Figure 20 and the following discussion are intended to provide a brief, general description of a suitable computing environment 2000 in which embodiments described herein may be implemented. While the above embodiments are described in the general context of computer-executable instructions executable on one or more computers, those skilled in the art will appreciate that these embodiments may also be implemented in combination with other program modules, or as a combination of hardware and software.

[0205] Generally, program modules include routines, programs, components, data structures, etc., that perform tasks or implement abstract data types. Additionally, the methods described herein may also be practiced on other computer system configurations, including, for example, single-processor or multi-processor computer systems, minicomputers, mainframe computers, Internet of Things (IoT) devices, distributed computing systems, as well as personal computers, handheld computing devices, microprocessor-based or programmable consumer electronics devices, and the like, each of which may be operatively coupled with one or more associated devices.

[0206] The embodiments described herein may also be practiced in distributed computing environments where certain tasks are performed by remote processing devices that are linked through a communications network, and in such environments, program modules may be located in both local and remote memory storage devices.

[0207] A computing device typically includes a variety of media, including computer-readable storage media, machine-readable storage media, and / or communication media. These two terms are used differently herein as follows: A computer-readable storage medium or machine-readable storage medium refers to any available storage medium that can be accessed by a computer, including both volatile and nonvolatile media, removable and non-removable media. By way of example, and not intended to be limiting, a computer-readable storage medium or machine-readable storage medium may be implemented in connection with any method or technology for storing information, such as computer-readable or machine-readable instructions, program modules, structured data, or unstructured data.

[0208] Examples of computer-readable storage media include, but are not limited to, random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disc read-only memory (CD-ROM), digital versatile disc (DVD), Blu-ray disc (BD) or other optical disc storage media, magnetic cassettes, magnetic tape, magnetic disk storage devices or other magnetic storage devices, solid-state drives or other solid-state storage devices, or other tangible and / or non-transitory media usable to store desired information. In this regard, the terms "tangible" or "non-transitory," when applied to storage, memory, or computer-readable media, are used as modifiers to exclude propagating transitory signals per se, and do not waive any right to other standard storage devices, memories, or computer-readable media that are not propagating transitory signals per se.

[0209] The computer-readable storage medium can be accessed by one or more local or remote computing devices to perform various operations on the information stored thereon, for example, via access requests, queries, or other data retrieval protocols.

[0210] Communication media typically embodies computer-readable instructions, data structures, program modules, or other structured or unstructured data in a data signal, such as a carrier wave or other transport mechanism, modulated data signal, and includes any media for transmitting or carrying information. The term "modulated data signal" or signal refers to a signal that has one or more of its characteristics set or changed in such a manner as to encode information in one or more signals. By way of example, and not limitation, communication media includes wired media such as a wired network or direct-wired connection, and wireless media such as acoustic, radio frequency (RF), infrared and other wireless media.

[0211] 20, an exemplary computing environment 2000 in which one or more embodiments described herein can be implemented includes a computer 2002, which includes a processing unit 2004, a system memory 2006, and a system bus 2008. The system bus 2008 connects the system memory 2006 to the processing unit 2004, including, but not limited to, a processor. The processing unit 2004 can be any of a variety of commercially available processors. Dual microprocessors and other multi-processor architectures can also be used as the processing unit 2004.

[0212] The system bus 2008 may be any of several bus structures using various commercially available bus architectures, which may be further connected to a memory bus (with or without a memory controller), a peripheral bus, a local bus, etc. The system memory 2006 includes ROM 2010 and RAM 2012. The basic input / output system (BIOS) may be stored in non-volatile memory such as ROM, erasable programmable read-only memory (EPROM), or electrically erasable programmable read-only memory (EEPROM), and contains the basic routines that help to transfer information between elements within the computer 2002, such as during start-up. The RAM 2012 may also include high-speed RAM, such as static RAM used for caching data.

[0213] The computer 2002 further includes an internal hard disk drive (HDD) 2014 (e.g., EIDE, SATA) and may also include one or more external storage devices 2016 (e.g., a magnetic floppy disk drive (FDD) 2016, a memory stick or flash drive reader, a memory card reader, etc.). The internal HDD 2014 is illustratively located within the computer 2002, but may also be configured for external use in a suitable enclosure (not shown). Additionally, although not shown in the computing environment 2000, a solid state drive (SSD) may also be used in addition to or in place of the HDD 2014.

[0214] Other internal or external storage can include at least one other storage device 2020 and storage medium 2022 (e.g., a solid-state storage device, a non-volatile memory device, and / or an optical disk drive capable of reading or writing to removable media such as CD-ROM disks, DVDs, BDs, etc.). External storage 2016 may be provided by a networked virtual machine. HDD 2014, external storage device 2016, and storage device (e.g., drive) 2020 can be connected to system bus 2008 by HDD interface 2024, external storage interface 2026, and drive interface 2028, respectively.

[0215] These drives and their associated computer-readable storage media provide non-volatile storage of data, data structures, computer-executable instructions, and the like. In computer 2002, these drives and storage media allow any data to be stored in a suitable digital format. While the above description of computer-readable storage media is directed to each type of storage device, other types of computer-readable storage media, whether existing now or developed in the future, may be used in the example operating environment and may include computer-executable instructions for performing the methods described herein.

[0216] A number of program modules may be stored in the drives and RAM 2012, such as an operating system 2030, one or more application programs 2032, other program modules 2034, and program data 2036. All or portions of the operating system, applications, modules, and / or data may also be cached in RAM 2012. The systems and methods described herein can be implemented with various commercially available operating systems or combinations of operating systems.

[0217] Computer 2002 may optionally include emulation technology. For example, a hypervisor (not shown) or other intermediary device may emulate a hardware environment for operating system 2030, and the emulated hardware may differ from the hardware depicted in FIG. 20 . In such an embodiment, operating system 2030 may constitute one of multiple virtual machines (VMs) hosted on computer 2002. Additionally, operating system 2030 may provide a runtime environment, such as the Java Runtime Environment or the .NET Framework, for application 2032. The runtime environment is a consistent execution environment, allowing application 2032 to run on any operating system that includes the runtime environment. Similarly, operating system 2030 may support containers, and application 2032 may be provided in the form of a container, which is a lightweight, standalone executable software package that includes, for example, code, runtime, system tools, system libraries, and settings for the application.

[0218] Additionally, computer 2002 may include a security module such as a Trusted Processing Module (TPM). For example, a TPM may be used to enable a startup component to hash the next component to be launched and verify that the result matches a secure value before loading the next startup component. This process may be performed at any layer of the code execution stack of computer 2002, such as the application execution level or the operating system (OS) kernel level, thereby enabling security at any level of code execution.

[0219] A user entity can enter commands and information into the computer 2002 through one or more wired / wireless input devices, such as a keyboard 2038, a touchscreen 2040, or a mouse 2042. Other input devices (not shown) may include a microphone, an infrared (IR) remote, a radio frequency (RF) remote or other remote control, a joystick, a virtual reality controller and / or headset, a gamepad, a stylus pen, an image input device (e.g., a camera), a gesture sensor input device, an eye movement sensor input device, an emotion or facial recognition device, a biometric input device (e.g., a fingerprint or iris scanner), etc. These and other input devices are often connected to the processing unit 2004 through an input device interface 2044, which may be coupled to the system bus 2008, but may also be connected through other interfaces, such as a parallel port, an IEEE 1394 serial port, a game port, a USB port, an infrared (IR) interface, a BLUETOOTH interface, etc.

[0220] A monitor 2046 or other type of display device may also be connected to the system bus 2008 via an interface, such as a video adapter 2048. In addition to the monitor 2046, a computer typically also includes other peripheral output devices (not shown), such as speakers, printers, etc.

[0221] The computer 2002 can operate in a networked environment by being logically connected via wired and / or wireless communications to one or more remote computers, such as a remote computer 2050. The remote computer 2050 may be a workstation, a server computer, a router, a personal computer, a portable computer, a microprocessor-based entertainment device, a peer device, or other common network node, and typically includes many or all of the elements described relative to the computer 2002, although for simplicity, only the memory / storage device 2052 is illustrated here. The logical connections depicted include wired and / or wireless connections to a local area network (LAN) 2054 and / or larger networks (e.g., a wide area network (WAN) 2056). Such LAN and WAN networking environments are commonplace within offices and companies and facilitate enterprise-wide computer networks, such as intranets, any of which may connect to a global communications network (e.g., the Internet).

[0222] When used in a LAN networking environment, the computer 2002 can be connected to the local network 2054 through a wired and / or wireless communication network interface or adapter 2058. The adapter 2058 can be connected to the LAN 2054 by a wired or wireless communication network, and the LAN 2054 can also include a wireless access point (AP) installed to communicate with the adapter 2058 in a wireless mode.

[0223] When used in a WAN networking environment, the computer 2002 may include a modem 2060 or may be connected using other means to a communications server on the WAN 2056 for establishing communications over the WAN 2056, such as via the Internet. The modem 2060 may be an internal or external device, a wired or wireless device, and may be connected to the system bus 2008 via the input device interface 2044. In a networked environment, program modules depicted relative to the computer 2002, or portions thereof, may be stored in the remote memory / storage device 2052. The network connections shown are exemplary and other means of establishing a communications link between computers may be used.

[0224] When used in a LAN or WAN networking environment, computer 2002 can access a cloud storage system or other network-based storage system in addition to or instead of the above-mentioned external storage device 2016. Generally, the connection between computer 2002 and the cloud storage system can be established via LAN 2054 or WAN 2056, for example, by adapter 2058 or modem 2060, respectively. Once computer 2002 is connected to an associated cloud storage system, external storage interface 2026, with the aid of adapter 2058 and / or modem 2060, can manage the storage provided by the cloud storage system in the same way as other types of external storage. For example, external storage interface 2026 can be configured to provide access to cloud storage sources as if they were physically connected to computer 2002.

[0225] The computer 2002 may be operable to communicate with any wireless device or entity operatively arranged for wireless communication, such as a printer, a scanner, a desktop computer and / or a portable computer, a portable data assistant, a communications satellite, an apparatus or location associated with a radio-detectable tag (e.g., a kiosk, a newspaper stand, a store shelf, etc.), and a telephone. This may include Wireless Fidelity (Wi-Fi) and BLUETOOTH® wireless technologies. Thus, communication may be in a defined structure, such as an existing network, or may simply be ad hoc communication between at least two devices.

[0226] Additional Information The embodiments described herein may be directed to one or more of a system, a method, an apparatus, and / or a computer program product, at any level of technical detail of integration. A computer program product may include a computer-readable storage medium (or media) that stores computer-readable program instructions for causing a processor to execute aspects of one or more embodiments described herein. A computer-readable storage medium may be a tangible device capable of holding and storing instructions used by an instruction execution device. A computer-readable storage medium may include, for example, but is not limited to, an electronic storage device, a magnetic storage device, an optical storage device, an electromagnetic storage device, a superconducting storage device, and / or a suitable combination thereof. A non-exhaustive list of more specific examples of computer-readable storage media may include portable computer floppy disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), static random access memory (SRAM), portable compact disk read-only memory (CD-ROM), digital versatile disk (DVD), memory stick, floppy disk, mechanically encoded devices such as punch cards or ridge-in-groove structures having instructions recorded thereon, and / or suitable combinations thereof. As used herein, computer-readable storage media should not be construed as non-transitory signals per se, such as radio waves and / or other freely propagating electromagnetic waves, electromagnetic waves propagating through waveguides and / or other transmission media (e.g., light pulses passing through fiber optic cables), and / or electrical signals transmitted over wires.

[0227] The computer-readable program instructions described herein may be downloaded to each computing / processing device from a computer-readable storage medium, or may be downloaded to an external computer or external storage device via a network (e.g., the Internet, a local area network, a wide area network, and / or a wireless network). The network may include copper transmission cables, optical fiber transmissions, wireless transmissions, routers, firewalls, switches, gateway computers, and / or edge servers. A network adapter card or network interface within each computing / processing device may receive the computer-readable program instructions from the network and forward the instructions for storage on a computer-readable storage medium within the computing / processing device. The computer-readable program instructions for carrying out the operations of one or more embodiments described herein may be source code and / or object code written in one or more combinations of assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state setting data, configuration data for integrated circuits, and / or other procedural programming languages, such as Smalltalk, C++, or other object-oriented programming languages, and the “C” programming language and / or similar programming languages. The computer-readable program instructions may be executed entirely on the computer, as a stand-alone software package that executes partly on the computer, partly on the computer and / or partly on a remote computer, or entirely on a remote computer and / or server. In the latter scenario, the remote computer may be connected to the computer via any type of network, including a local area network (LAN) and / or a wide area network (WAN), or the connection may be to an external computer (e.g., via the Internet using an Internet Service Provider).In one or more embodiments, electronic circuitry, including programmable logic circuitry, field programmable gate arrays (FPGAs) and / or programmable logic arrays (PLAs), may perform aspects of one or more of the embodiments described herein by utilizing state information in computer-readable program instructions to personalize the electronic circuitry.

[0228] Aspects of one or more embodiments described herein are described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to one or more embodiments described herein. It will be understood that each block of the flowchart illustrations and / or block diagrams, and each combination of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer-readable program instructions. These computer-readable program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, and / or other programmable data processing apparatus to produce a machine, and the instructions, when executed by the processor of the computer or other programmable data processing apparatus, can produce means for implementing the functions / operations specified in the flowchart and / or block diagram blocks. These computer-readable program instructions can be stored on a computer-readable storage medium that can direct a computer, programmable data processing apparatus, and / or other device to operate in a particular manner, and the computer-readable storage medium having such instructions stored thereon can constitute an article of manufacture containing instructions that can implement each aspect of the functions / operations specified in the flowchart and / or block diagram blocks. The computer-readable program instructions may be loaded into a computer, other programmable data processing apparatus, and / or other device to cause the computer, other programmable apparatus, and / or other device to perform a series of operations to generate a computer-implemented process, and the instructions may be executed on the computer, other programmable apparatus, and / or other device to implement the functions / operations specified in the flowchart and / or block diagram blocks.

[0229] The flowcharts and block diagrams in the figures illustrate the architecture, functionality, and / or operation of an example embodiment of a system, computer-implementable method, and / or computer program product according to one or more embodiments described herein. In this regard, each block in the flowcharts or block diagrams may represent a module, segment, and / or portion of an instruction set, including one or more executable instructions for implementing the specified logical function(s). In one or more alternative embodiments, the functions of the blocks depicted in the figures may be performed out of the order depicted. For example, two blocks shown in succession may be executed substantially concurrently, or the blocks may be executed in the reverse order, depending on the functionality involved. It should also be noted that each block in the block and / or flowchart diagrams, and combinations of blocks therein, may be implemented by special-purpose hardware-based systems that perform the specified functions and / or operations and / or execute one or more combinations of computer instructions.

[0230] While the subject matter herein has been described above in the general context of computer-executable instructions for a computer program product executed on a computer, those skilled in the art will appreciate that one or more embodiments described herein can be implemented, at least in part, in parallel with one or more other program modules. Generally, program modules include routines, programs, components, and / or data structures that perform particular tasks and / or implement particular abstract data types. Furthermore, the computer-implemented methods described above may be practiced with single-processor and / or multiprocessor computer systems, minicomputing devices, mainframe computers, and other computer system configurations, including computers, handheld computing devices (e.g., PDAs, phones), and / or microprocessor-based or programmable consumer and / or industrial electronic devices. Aspects illustrated may also be practiced in distributed computing environments where tasks are performed by remote processing devices linked through a communications network. However, one or more aspects (if not all) of one or more embodiments described herein may be practiced on a stand-alone computer. In a distributed computing environment, program modules may be located in both local and remote memory storage devices.

[0231] As used in this application, the terms “component,” “system,” “platform,” and / or “interface” may refer to and / or include a computer-related entity or an entity associated with an operating machine having one or more specific functions. An entity described herein may be hardware, a combination of hardware and software, software, or software in execution. For example, a component may be, but is not limited to, a process running on a processor, a processor, an object, an executable, a thread of execution, a program, and / or a computer. As an example, both an application running on a server and the server itself may be a component. One or more components may reside within a single process and / or thread of execution, and a component may be localized on one computer or distributed between two or more computers. As another example, each component may execute from various computer-readable media having various data structures stored thereon. Components may communicate via local and / or remote processes, for example, pursuant to signals comprising one or more data packets (e.g., data communication between one component and another in a local system, in a distributed system, or to and from other systems over a network (e.g., the Internet)). As another example, a component may be a device that provides a particular function through mechanical parts operated by electrical or electronic circuitry that is operated by a software and / or firmware application executed by a processor, in which case the processor may be internal or external to the device and may execute at least a portion of the software and / or firmware application.As yet another example, a component may be a device that provides a particular function through electronic components without mechanical components, and the electronic components may include a processor and / or other means to execute software and / or firmware to provide at least a portion of the functionality of the electronic component. In one aspect, a component may emulate an electronic component via a virtual machine, for example, within a cloud computing system.

[0232] Furthermore, the term "or" is intended to mean an inclusive "or," not an exclusive "or." That is, unless expressly stated otherwise or apparent from the context, the phrase "X uses A or B" is intended to mean all natural and inclusive interpretations. That is, the phrase "X uses A or B" applies whether X uses A, X uses B, or X uses both A and B. Furthermore, the articles "a" and "an," as used in this specification and the accompanying drawings, should generally be construed to mean "one or more," unless expressly stated otherwise or where the context clearly indicates that a singular form is intended. As used herein, the terms "example" and / or "exemplary" mean to serve as an example, example, or illustration. For the avoidance of doubt, the subject matter described herein is not limited by such examples. Furthermore, any aspect or design described herein as "example" and / or "exemplary" should not be construed as preferred or advantageous over other aspects or designs, nor is it intended to exclude equivalent exemplary structures and techniques known to those skilled in the art.

[0233] As used herein, the term "processor" refers to substantially any computing processing unit and / or device, including, but not limited to, a single-core processor, a single processor with software-defined multithreaded execution, a multi-core processor, a multi-core processor with software-defined multithreaded execution, a multi-core processor with hardware-defined multithreading, a parallel platform, and / or a parallel platform with distributed shared memory. Furthermore, a processor may refer to an integrated circuit, an application-specific integrated circuit (ASIC), a digital signal processor (DSP), a field-programmable gate array (FPGA), a programmable logic controller (PLC), a complex programmable logic device (CPLD), discrete gate or transistor logic, discrete hardware components, and / or any combination thereof designed to perform the functions described herein. Furthermore, a processor may utilize nanoscale architectures, such as molecular-based transistors, switches, and / or gates, to optimize space utilization and / or improve performance of associated equipment. A processor may be implemented as a combination of multiple computing processing units.

[0234] As used herein, terms such as "store," "storage," "data store," "data storage," "database," and substantially any information storage component related to the operation and functionality of the component are used to refer to a "memory component," "a memory-embodied entity," or "a memory-containing component." The memory and / or memory components described herein may be either volatile or nonvolatile memory, or may include both volatile and nonvolatile memory. By way of example and not limitation, nonvolatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable ROM (EEPROM), flash memory, and / or nonvolatile random access memory (RAM) (e.g., ferroelectric RAM (FeRAM)). Volatile memory may include RAM, which may function, for example, as external cache memory. By way of example and not limitation, RAM may include synchronous RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), and enhanced SDRAM. (ESDRAM), SyncLink DRAM (SLDRAM), Direct Rambus RAM (DRRAM), Direct Rambus Dynamic RAM (DRDRAM) and / or Rambus Dynamic RAM (RDRAM). Additionally, memory components of the systems and / or computer-implemented methods described herein are intended to comprise, without being limited to, these and / or any other suitable types of memory.

[0235] The above description is merely an example of a system and computer-implemented method. Of course, it is not possible to describe every conceivable combination of components and / or computer-implemented methods for purposes of describing one or more embodiments, but one of ordinary skill in the art will recognize that many more combinations and / or combinations of one or more embodiments are possible. Furthermore, when terms such as "includes," "has," "possesses," and the like are used in the description, claims, appendices, and / or drawings, these terms are intended to be interpreted in an inclusive sense, similar to the way "comprising" is interpreted when used as a transitional term in a claim.

[0236] In describing various embodiments, the terms "one embodiment," "various embodiments," "one or more embodiments," and / or "some embodiments" may be used, all of which may refer to one or more of the same or different embodiments.

[0237] The descriptions of various embodiments are presented for illustrative purposes and are not intended to be limiting or exhaustive of the embodiments described herein. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the embodiments described herein. The terms used herein have been selected to best explain the principles, practical applications, and / or technical improvements to commercially available technology of the embodiments, and to enable those skilled in the art to understand the embodiments described herein.

Claims

1. a retaining member for receiving the sample support cartridge; a first part of the kinematic coupling that receives a second part of the kinematic coupling; the kinematic coupling of the second part disposed on the holding member, A system characterized in that at least the first part or the second part of the kinematic coupling is arranged to move together with the sample support cartridge when coupled to the holding member.

2. 2. The system of claim 1, wherein the flexible deformation characteristics of the retaining member maintain adjustability of the kinematic coupling of the first part relative to the kinematic coupling of the second part even after the kinematic coupling of the first part and the kinematic coupling of the second part are engaged with each other.

3. 2. The system of claim 1, wherein an interface between the retention member and retention member holder is configured to provide adjustability of the retention member relative to the retention member holder after engagement of the kinematic coupling of the first portion with the kinematic coupling of the second portion.

4. The system of claim 3 , wherein the holding member holder is connectable to each of the holding members and the base units that receive the holding members.

5. 2. The system of claim 1, wherein the retaining member is configured to allow at least one of tilting and rotation of the retaining member relative to an elastic sealing portion in a base unit that receives the retaining member after engagement of the kinematic coupling of the first part with the kinematic coupling of the second part.

6. Further comprising an elastic member held by the holding member or a basic unit that receives the holding member; The system of claim 1 , wherein the elastic member maintains a vacuum seal between the holding member and the basic unit after the holding member holder and the basic unit are fixedly coupled.

7. The system of claim 1, further characterized in that the adjustability of the alignment of the sample support cartridge relative to the basic unit that receives the holding member is maintained after the kinematic coupling of the first part and the kinematic coupling of the second part are combined.

8. further comprising a magnetic element set provided on the sample support cartridge and the holding member; 2. The system of claim 1, wherein the magnetic element set allows movement of the sample support cartridge relative to the holding member in two degrees of freedom.

9. The system of claim 1, characterized in that the holding member and holding member holder combine to enable movement of the sample support cartridge with at least four degrees of freedom relative to the coordinate system of a robot element arranged within a basic unit that receives the holding member.

10. a first interface between the retention member holder and the retention member allows three of the at least four degrees of freedom; 10. The system of claim 9, wherein a second interface between the retaining member and the sample support cartridge allows two of the at least four degrees of freedom.

11. A vacuum chamber body; a vacuum chamber door; a kinematic coupling that allows adjustable alignment of a sample support cartridge at the vacuum chamber door relative to the vacuum chamber body.

12. 12. The system of claim 11, wherein the kinematic coupling allows alignment of the vacuum chamber door with respect to the vacuum chamber body and with respect to a resilient member sealing between the vacuum chamber door and the vacuum chamber body.

13. 12. The system of claim 11, wherein the kinematic coupling allows alignment of the sample support cartridge with respect to the vacuum chamber door.

14. the kinematic coupling allows movement of the sample support cartridge relative to the vacuum chamber body in at least two degrees of freedom; The system of claim 11, characterized in that a retaining member coupled between the sample support cartridge and the vacuum chamber door enables an additional three degrees of freedom of the sample support cartridge relative to the vacuum chamber door in addition to the at least two degrees of freedom.

15. coupling the sample support cartridge to a holding member using a kinematic coupling; and kinematically aligning the retaining member relative to the basic unit using a kinematic coupling having a shape that allows adjustability of the retaining member relative to the basic unit while the kinematic coupling is engaged.

16. 16. The method of claim 15, further comprising: generating adjustability of the holding member relative to the basic unit based on soft compliance of a holding member holder or the holding member.

17. 16. The method of claim 15, further comprising maintaining adjustability of the holding member relative to the basic unit based on soft compliance of the holding member after kinematic coupling to the holding member.

18. The method of claim 15, further comprising maintaining adjustability of the holding member relative to the basic unit based on the flexible compliance of a holding member holder coupled between the holding member and the basic unit before and after the kinematic coupling of the sample support cartridge to the holding member.

19. The method of claim 15, further comprising causing adjustment of the sample support cartridge in at least two different degrees of freedom relative to a robot element arranged within the basic unit, when two different degrees of freedom are made possible by the use of the kinematic coupling or a second kinematic coupling.

20. 16. The method of claim 15, further comprising: causing an adjustment of the holding member relative to an elastic member disposed between the holding member and the basic unit based on the kinematic coupling.

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