X-ray analysis system

Abstract

This system provides an X-ray analysis system with a simple and compact configuration that allows for easy movement of samples between the sample transport mechanism and the holder support. [Solution] An X-ray analysis system comprising: a holder receiver; a sample transport mechanism that transports the sample from a first position where the sample is placed to a second position close to the holder receiver; a sample movement mechanism that moves the sample between the second position and the sample holding position; a first inclined portion disposed between the second position and the holder receiver, provided at the end on the side of the first sample transport mechanism, and gradually rising toward the holder receiver side; and a sample bridge provided on the holder receiver side of the first inclined portion so as to be connected to the first inclined portion, and equipped with a support portion for supporting the sample. When the sample is pushed toward the holder receiver side, the end of the sample holder side comes into contact with the first inclined portion, then slides along the first inclined portion to reach the first support portion, and when the sample is pushed toward the second position from the position on the first support portion, the end of the sample rests directly on the first sample transport mechanism.

Description

Technical Field

[0001] The present invention relates to an X-ray analysis system.

Background Art

[0002] An X-ray analyzer is known as an apparatus for analyzing elements contained in a sample and the crystal structure of the sample. An X-ray analyzer may be provided with a sample transfer mechanism for transferring a sample located at a location remote from the X-ray analyzer to the X-ray analyzer. Further, by providing a sample loader for loading the sample transferred to the X-ray analyzer by the sample transfer mechanism into a sample holder, it is possible to transfer a sample located at a location remote from the X-ray analyzer to the X-ray analyzer without the user's hands and perform analysis.

[0003] A conventional sample loader is provided with a moving mechanism for pushing out a sample between the sample transfer mechanism and the sample loader. The sample transferred to the operating range of the moving mechanism by the sample transfer mechanism is pushed out by the moving mechanism toward the sample holding position of the sample holder, so that the sample can be loaded into the sample holder. Similarly, the sample at the sample holding position of the sample holder can be moved onto the sample transfer mechanism by the moving mechanism pushing it out toward the sample transfer mechanism.

[0004] Conventionally, there are also cases where two sample transfer mechanisms are used: a first sample transfer mechanism for transferring a sample before analysis located at a location remote from the fluorescent X-ray analyzer to the fluorescent X-ray analyzer, and a second sample transfer mechanism for transferring the sample after analysis from the fluorescent X-ray analyzer to the original location or another remote location. By arranging the sample transfer mechanism so that the position of the sample arranged on the first sample transfer mechanism is higher than the sample at the sample holding position of the sample holder, the sample can be loaded into the sample holder only by the operation of pushing it out from the side. Similarly, by arranging the sample transfer mechanism so that the position of the sample arranged on the second sample transfer mechanism is lower than the sample at the sample holding position of the sample holder, the sample can be moved onto the sample transfer mechanism only by the operation of pushing it out from the side.

Summary of the Invention

[0005] As described above, the configuration becomes complex when using different sample transport mechanisms to return the sample to its original position. To simplify the configuration, it is conceivable to use a sample transport mechanism that transports the sample to the X-ray fluorescence analyzer and then return the sample from the X-ray fluorescence analyzer to its original position. In this configuration, the sample transport mechanism must be positioned so that the sample placed in the mechanism and the sample in the sample holding position are at the same height. However, precisely adjusting the height of the sample transport mechanism is difficult, and since the sample transport mechanism includes movable parts, there is a risk that its height may change due to vibrations or other causes during operation.

[0006] This disclosure has been made in view of the above-mentioned problems, and its purpose is to provide an X-ray analysis system that has a simple and compact configuration and can easily move a sample between a sample transport mechanism and a holder receiver. [Means for solving the problem]

[0007] (1) An X-ray analysis system according to one aspect of the present disclosure includes: a holder receiver on which a sample holder for temporarily holding a sample is arranged; a first sample transport mechanism on which the sample is arranged and transports the sample from a first position to a second position closer to the holder receiver than the first position; a sample moving mechanism that pushes the sample at the second position to the sample holding position of the sample holder arranged in the holder receiver, and pushes the sample at the sample holding position to the second position; and a first sample bridge arranged between the second position of the first sample transport mechanism and the holder receiver, the first sample bridge being provided at the end on the first sample transport mechanism side and the holder receiver The first sample bridge comprises a first inclined portion formed to gradually rise toward the side, and a first support portion provided on the holder receiving side of the first inclined portion so as to be connected to the first inclined portion and supporting the sample, wherein when the sample is pushed from the second position toward the holder receiving side by the sample moving mechanism, the end of the sample on the sample holder side of the first sample bridge comes into contact with the first inclined portion, and then slides along the first inclined portion to reach the first support portion, and when the sample is pushed from the position on the first support portion toward the second position by the sample moving mechanism, the end of the sample on the first sample transport mechanism side rests directly on the first sample transport mechanism.

[0008] (2) In an X-ray analysis system according to one aspect of the present disclosure, the first sample bridge is provided at the end of the holder receiving side and is formed to gradually increase in height toward the first sample transport mechanism side, and further comprises a second inclined portion provided on the holder receiving side of the first support portion so as to be connected to the first support portion and forming an angle with respect to the first support portion.

[0009] (3) An X-ray analysis system according to one aspect of the present disclosure, characterized in that when the sample is pushed out from its position on the first support portion toward the sample holding position by the sample moving mechanism, the end of the sample on the holder receiving side rests directly on the sample holding position of the sample holder, and when the sample is pushed out from the sample holding position toward the sample moving mechanism by the sample moving mechanism, the end of the sample on the first sample transport mechanism side comes into contact with the second inclined portion of the first sample bridge, and then slides along the second inclined portion to reach the first support portion.

[0010] (4) An X-ray analysis system according to one aspect of the present disclosure, characterized in that when the sample is pushed out from the position on the first support portion toward the sample holding position by the sample moving mechanism, the end of the sample on the holder receiving side rests directly on the sample holding position of the sample holder, and when the sample is pushed out from the sample holding position toward the sample moving mechanism by the sample moving mechanism, the end of the sample on the first sample transport mechanism side rests directly on the first support portion without contacting the second inclined portion of the first sample bridge.

[0011] (5) An X-ray analysis system according to one aspect of the present disclosure, characterized in that the first inclined portion is a curved surface whose inclination gradually changes from the first sample transport mechanism side toward the holder receiving side.

[0012] (6) In an X-ray analysis system according to one aspect of the present disclosure, the second inclined portion is a curved surface whose inclination gradually changes from the holder receiving side toward the first sample transport mechanism side.

[0013] (7) An X-ray analysis system according to one aspect of the present disclosure further comprises: a second sample transport mechanism that transports the sample between a third position and a fourth position closer to the holder receiver than the third position, on which the sample is placed; and a second sample bridge disposed between the fourth position of the second sample transport mechanism and the holder receiver, the second sample bridge comprising: a third inclined portion provided at the end on the second sample transport mechanism side and formed to gradually rise toward the holder receiver side; and a second support portion provided on the holder receiver side of the third inclined portion so as to be connected to the third inclined portion and supporting the sample, wherein the sample moving mechanism further pushes the sample in the fourth position from the fourth position to the sample holding position of the sample holder disposed on the holder receiver, and pushes the sample in the sample holding position from the sample holding position to the fourth position.

[0014] (8) An X-ray analysis system according to one aspect of the present disclosure, wherein the first sample bridge further comprises a first support plate fixed to the back surface opposite to the surface on which the first support portion is formed, and the first sample transport mechanism is a belt conveyor comprising a belt having a first position and a second position on its surface, and a pulley that transports the sample from the first position to the second position by rotating the belt, wherein the first support plate is arranged such that the surface of the first support plate is in contact with the back surface of the belt.

[0015] (9) In an X-ray analysis system according to one aspect of the present disclosure, the second sample bridge further comprises a second support plate fixed to the back surface opposite to the surface on which the second support portion is formed, and the second sample transport mechanism is a belt conveyor comprising a belt having a third position and a fourth position on its surface, and a pulley that transports the sample between the third position and the fourth position by rotating the belt, wherein the second support plate is arranged such that the surface of the second support plate is in contact with the back surface of the belt. [Brief explanation of the drawing]

[0016] [Figure 1] It is a diagram showing an X-ray analysis system. [Figure 2] It is a diagram showing the inside of an X-ray analyzer. [Figure 3] It is a plan view overlooking the connection part between the first sample transport mechanism and the sample loader. [Figure 4] It is a top view of the connection part between the first sample transport mechanism and the sample loader. [Figure 5] It is a schematic cross-sectional view of the connection part between the first sample transport mechanism and the sample loader. [Figure 6] It is a diagram showing an example of a cross-sectional view of the first sample transport mechanism. [Figure 7] It is a schematic view showing the inside of the measurement chamber. [Figure 8] It is a diagram for explaining the movement of the sample between the second position and the sample holding position. [Figure 9] It is a diagram for explaining the movement of the sample between the second position and the sample holding position. [Figure 10] It is a diagram for explaining the movement of the sample between the second position and the sample holding position. [Figure 11] It is a diagram for explaining the movement of the sample between the second position and the sample holding position. [Figure 12] It is a diagram showing the cross-section of the first sample bridge according to a modified example. [Figure 13] It is a top view of the connection part between the first sample transport mechanism, the second sample transport mechanism, and the sample loader. [Figure 14] It is a schematic cross-sectional view of the connection part between the first sample transport mechanism, the second sample transport mechanism, and the sample loader. [Embodiments for Carrying Out the Invention]

[0017] [First Embodiment] Hereinafter, a preferred embodiment for implementing the present invention (hereinafter referred to as an embodiment) will be described while referring to the drawings. FIG. 1 is a top view of an X-ray analysis system 100 according to the first embodiment. FIG. 2 is a view showing the inside of the X-ray analysis system 100. As shown in FIGS. 1 and 2, the X-ray analysis system 100 includes an X-ray analyzer 102, a first sample transport mechanism 104, and a sample loader 106.

[0018] The X-ray analyzer 102 is a device that analyzes a sample using X-rays. Specifically, for example, the X-ray analyzer 102 is a fluorescent X-ray analyzer that irradiates a sample with primary X-rays and analyzes the elements contained in the sample based on the fluorescent X-rays emitted from the sample. Also, the X-ray analyzer 102 is an X-ray diffractometer that irradiates a sample with X-rays at a given angle and analyzes the crystal structure of the sample based on the diffracted X-rays. Hereinafter, the case where the X-ray analyzer 102 is a fluorescent X-ray analyzer will be described.

[0019] The X-ray analyzer 102 has a housing, and inside the housing, a holder tray 108, a holder transporter 110, a holder insertion space 202, a measurement chamber 204, and a preliminary evacuation chamber 206 are provided. The holder tray 108 is a tray on which a plurality of sample holders 312 (described later) are arranged. The holder tray 108 is used to temporarily arrange the sample holders 312 when analyzing a plurality of samples continuously. The holder insertion space 202 is a space arranged within the transport range of the holder transporter 110. The holder transporter 110 transports the sample holder 312 between the holder receiver 208 of the sample loader 106 and the holder insertion space 202. Note that the holder transporter 110 is arranged above the sample loader 106.

[0020] The pre-exhaust chamber 206 is a space where the sample holder 312 is temporarily placed and is equipped with a vacuum pump and a leak valve (not shown). Specifically, for example, the pre-exhaust chamber 206 is a chamber for loading and unloading samples and is also called a load lock. The pre-exhaust chamber 206 is located adjacent to the holder loading space 202, and a vacuum shutter is located between the pre-exhaust chamber 206 and the holder loading space 202. This vacuum shutter is normally closed and is opened when transporting the sample holder 312 between the pre-exhaust chamber 206 and the holder loading space 202. The pre-exhaust chamber 206 is also located adjacent to the measurement chamber 204, and a vacuum shutter is located between the pre-exhaust chamber 206 and the measurement chamber 204. This vacuum shutter is normally closed and is opened when transporting a sample between the pre-exhaust chamber 206 and the measurement chamber 204. The leak valve is a valve that introduces air into the pre-exhaust chamber 206. The sample holder 312 is transported between the holder input space 202 and the measurement chamber 204 via the pre-evacuation chamber 206. When the sample holder 312 is transported between the holder input space 202 and the pre-evacuation chamber 206, the inside of the pre-evacuation chamber 206 is at atmospheric pressure, and the pre-evacuation chamber 206 and the measurement chamber 204 are separated. When the sample holder 312 is transported between the measurement chamber 204 and the pre-evacuation chamber 206, the inside of the pre-evacuation chamber 206 is under vacuum, and the pre-evacuation chamber 206 and the holder input space 202 are separated.

[0021] The first sample transport mechanism 104 transports the sample from a predetermined position where the sample is placed to a position closer to the holder receiver 208 than the predetermined position. The first sample transport mechanism 104 is, for example, a belt conveyor. An embodiment in which the first sample transport mechanism 104 is a belt conveyor will be described with reference to Figures 3 to 6. Figure 3 is an overhead view of the connection between the first sample transport mechanism 104 and the sample loader 106, and Figure 4 is a top view of the said connection. Figure 5 is a schematic diagram showing the VV cross section of Figure 4, and Figure 6 is a schematic diagram showing the VI-VI cross section of Figure 4.

[0022] The first sample transport mechanism 104, which is a belt conveyor, includes a belt 302, a pulley 304, and a drive device (not shown). The belt 302 is made of resin and has a certain width and a predetermined length. The first sample transport mechanism 104 transports a sample from any position away from the X-ray analyzer 102 to within the operating range of the sample loader 106. For example, if the X-ray analyzer 102 is installed on a factory production line, the first sample transport mechanism 104 transports the sample from near the manufacturing equipment used in the process before X-ray analysis to within the range in which the sample can be loaded into the sample holder 312 by the sample transfer mechanism 300 included in the sample loader 106 (hereinafter referred to as the operating range of the sample transfer mechanism 300). Hereinafter, the source position of the sample transport (near the manufacturing equipment) will be referred to as the first position 318, and the destination position (within the operating range of the sample transfer mechanism 300) will be referred to as the second position 320. In other words, the surface of the belt 302 has a first position 318 and a second position 320. The belt 302 has a length corresponding to the distance from the first position 318 to the second position 320.

[0023] The pulley 304 transports the sample from the first position 318 to the second position 320 by rotating the belt 302. Specifically, as shown in Figures 3 to 6, the pulley 304 is cylindrical and multiple pulleys are provided between the first position 318 and the second position 320. The belt 302 is arranged to wrap around all of the pulleys 304, and the drive device rotates the pulleys 304 to transport the sample from the first position 318 to the second position 320.

[0024] The sample loading machine 106 includes a holder receiver 208, a sample transfer mechanism 300, and a first sample bridge 306. The holder receiver 208 is on which a sample holder 312 for temporarily holding the sample is placed. Specifically, for example, the holder receiver 208 is a pedestal-shaped member that is located within the transport range of the holder transporter 110 and within the operating range of the sample transfer mechanism 300. The sample holder 312 is placed on the holder receiver 208. The sample holder 312 is, for example, a roughly disc-shaped tray on which the sample is placed. Hereinafter, the position on the sample holder 312 where the sample is placed will be referred to as the sample holding position.

[0025] The sample moving mechanism 300 moves a sample from the second position 320 to the sample holding position of the sample holder 312 located on the holder receiver 208, and also moves a sample from the sample holding position to the second position 320. Specifically, for example, the sample moving mechanism 300 has a first extrusion section 314 and a second extrusion section 316. The first extrusion section 314 extrudes the sample in the direction from the first sample transport mechanism 104 side toward the holder receiver 208 side. The second extrusion section 316 extrudes the sample in the direction from the holder receiver 208 side toward the first sample transport mechanism 104 side. The first extrusion section 314 and the second extrusion section 316 have recesses formed in the parts that come into contact with the sample so that the sample can be extruded. Furthermore, the first extrusion section 314 and the second extrusion section 316 are positioned to match the height of the second position 320 and the sample holding position so that the sample can be extruded. When loading a sample into the sample holder 312, the sample transfer mechanism 300 moves the first extrusion section 314 from the second position 320 toward the sample holding position. Also, when returning the sample loaded in the sample holder 312 onto the first sample transport mechanism 104, the sample transfer mechanism 300 moves the second extrusion section 316 from the sample holding position toward the second position 320.

[0026] The first sample bridge 306 is positioned between the second position 320 of the first sample transport mechanism 104 and the holder receiver 208. Specifically, for example, the first sample bridge 306 includes a first bridge plate 308 and a first support plate 310. In this embodiment, the first bridge plate 308, in the cross-sectional view shown in Figure 5, is substantially trapezoidal and has a first inclined portion 402, a first support portion 404, and a second inclined portion 406 on the surface that contacts the sample.

[0027] The first inclined portion 402 is provided at the end on the side of the first sample transport mechanism 104 and is formed to gradually increase in height toward the holder receiver 208 side. Specifically, for example, the first inclined portion 402 is provided at the end on the side of the first sample transport mechanism 104 and is an inclined surface that forms an angle with respect to the back surface of the first bridge plate 308.

[0028] The first support portion 404 is provided on the holder receiver 208 side of the first inclined portion 402 so as to be connected to the first inclined portion 402, and supports the sample. Specifically, for example, the first support portion 404 is provided adjacent to the holder receiver 208 side of the first inclined portion 402 and is a flat surface that forms an angle with respect to the first inclined portion 402. The flat surface may be parallel to the horizontal plane or inclined relative to the horizontal plane, as long as it can stably support the sample on top of it. Also, the first support portion 404 shown in Figures 3 to 6 is composed of a single flat surface, but is not limited to this. For example, the first support portion 404 may be composed of multiple flat surfaces, may be a plane with irregularities, or may be a curved surface. In other words, the shape of the first support portion 404 is not limited as long as it can perform the function of stably supporting the sample on top of it.

[0029] The second inclined portion 406 is provided at the end on the holder receiver 208 side and is formed to gradually increase in height toward the first sample transport mechanism 104 side. Specifically, for example, the second inclined portion 406 is provided on the holder receiver 208 side of the first support portion 404 so as to be connected to the first support portion 404, and is an inclined surface that forms an angle with respect to the first support portion 404. In this embodiment, the angle between the back surface of the first bridge plate 308 and the inclined surface of the first inclined portion 402 is smaller than the angle between the back surface of the first bridge plate 308 and the inclined surface of the second inclined portion 406.

[0030] The first support plate 310 is fixed to the back surface opposite to the surface on which the first support portion 404 of the first sample bridge 306 is formed. Specifically, for example, the first support plate 310 is a flat plate-shaped member whose back surface is fixed to the sample loading machine 106. The first support plate 310 is positioned so that its surface contacts the back surface of the belt 302, allowing the belt 302 to slide. The back surface of the first bridge plate 308 is fixed to the area of ​​the surface of the first support plate 310 that does not contact the belt 302. The second position 320 exists on the surface of the belt 302 in the area where the first support plate 310 and the belt 302 are in contact. The first bridge plate 308 and the first support plate 310 may be formed integrally.

[0031] Because the belt 302 has an irregular shape, it may sag when wrapped around the pulley 304. On the other hand, the first support plate 310 is fixed to the sample loading machine 106, so its position is fixed. Therefore, even if the belt 302 sags, the height of the second position 320, which is directly above the first support plate 310, can be prevented from changing by providing the first support plate 310.

[0032] The measurement chamber in an embodiment where the X-ray analyzer 102 is a fluorescence X-ray analyzer will be described. Figure 7 is a schematic diagram showing the interior of the measurement chamber 204. The measurement chamber 204 is a chamber in which the sample is analyzed. Specifically, as shown in Figure 7, the measurement chamber 204 is equipped with a sample stage 702, an X-ray source 704, a spectroscopic element 706, and a detector 708.

[0033] The sample stage 702 is a stage on which the sample holder 312 is placed. The X-ray source 704 irradiates the sample placed on the sample holder 312 in the measurement chamber 204 with primary X-rays from above. The primary X-rays generated by the X-ray source 704 irradiate the surface of the sample. The spectrometer 706 spectrally analyzes fluorescent X-rays of a predetermined wavelength emitted from the sample. The detector 708 is positioned where the fluorescent X-rays spectrally analyzed by the spectrometer 706 are incident. The detector 708 measures the intensity of the fluorescent X-rays emitted from the sample. The detector 708 is, for example, a proportional counter. The intensity of the fluorescent X-rays is obtained by a counter (not shown) counting the pulse signals output from the detector 708. The spectrometer 706 and detector 708 may be provided for each element to be analyzed, or a single set of spectrometer 706 and detector 708 may be rotated and moved for measurement. When rotating a pair of spectroscopic elements 706 and detectors 708, a mechanism (goniometer) for rotating the spectroscopic elements 706 and detectors 708 is placed in the measurement chamber 204.

[0034] Next, the movement of the sample between the second position 320 on the first sample transport mechanism 104 and the sample holding position of the sample holder 312 will be described. The case in which the sample has a certain shape (in this case, a disc shape) will be described. Figures 8(a) to 9(c) show the movement of the sample when the sample is pushed out from the second position 320 towards the holder receiver 208 by the sample movement mechanism 300. Figures 8(a) to 9(c) are schematic diagrams for illustrative purposes, and the size of each component differs from the actual dimensions. In the state shown in Figure 8(a), the sample is positioned at the second position 320 on the first sample transport mechanism 104. First, the first extrusion unit 314 pushes the sample at the second position 320 toward the holder receiver 208. At this time, since the bottom surface of the first bridge plate 308 is lower than the surface of the belt 302 of the first sample transport mechanism 104, the end of the sample on the sample holder 312 side comes into contact with the first inclined portion 402 of the first sample bridge 306 (Figure 8(b)). Subsequently, when the first extrusion portion 314 pushes the sample toward the holder receiver 208 side, the sample slides up on the first inclined portion 402 (Figure 8(c)) and reaches the first support portion 404 (Figure 9(a)). In this embodiment, since the first support portion 404 is a horizontal plane, the sample located on the first support portion 404 is in a stable state.

[0035] Next, when the sample is pushed out from its position on the first support portion 404 towards the sample holding position by the sample moving mechanism 300, the end of the sample on the holder receiver 208 side rests directly on the sample holding position of the sample holder 312 (Figure 9(b)). In this embodiment, the horizontal plane of the first support portion 404 and the surface of the receiving tray on the holder receiver 208 are at the same height. Also, the distance AB between the end of the first support portion 404 on the holder receiver 208 side (position A in the figure) and the end of the receiving tray on the first sample transport mechanism 104 side (position B in the figure) is sufficiently small compared to the size of the sample. Therefore, when the center of gravity of the sample is above the first support portion 404, the end of the sample on the holder receiver 208 side can be placed on the sample holding position of the sample holder 312.

[0036] When the sample in the state shown in Figure 9(b) is pushed toward the sample holding position by the sample moving mechanism 300, the sample reaches the sample holding position (Figure 9(c)). Because the distance AB between the end of the first support part 404 on the holder receiver 208 side (position A in the figure) and the end of the receiving tray on the first sample transport mechanism 104 side (position B in the figure) is sufficiently small compared to the size of the sample, when the center of gravity of the sample reaches the receiving tray, the end of the sample on the first sample transport mechanism 104 side is above the first support part 404. Therefore, the sample can be moved to the sample holding position without the sample coming into contact with the second inclined part 406.

[0037] After the sample is placed in the sample holding position of the sample holder 312, the sample holder 312 is transported to the holder input space 202 by the holder transporter 110. Then, the sample holder 312 is transported to the measurement chamber 204 via the pre-exhaust chamber 206, and the sample is analyzed. After the analysis is completed, the sample holder 312 is transported back to the holder input space 202 via the pre-exhaust chamber 206. Furthermore, the sample holder 312 is transported to the holder receiver 208 by the holder transporter 110 (Figure 10(a)). Figures 10(a) to 11(b) show the movement of the sample when the sample is pushed out from the sample holding position towards the first sample transport mechanism 104 by the sample moving mechanism 300. Figures 10(a) to 11(b) are schematic diagrams for illustrative purposes, and the size of each component differs from the actual dimensions.

[0038] In this embodiment, the horizontal plane of the first support portion 404 and the surface of the tray in the holder receiver 208 are at the same height. Therefore, when the sample is pushed out from the sample holding position towards the first sample transport mechanism 104 by the sample moving mechanism 300 (second extrusion portion 316), the end of the sample on the first sample transport mechanism 104 side does not come into contact with the second inclined portion 406 of the first sample bridge 306, but rests directly on the first support portion 404 (Figure 10(b)). In other words, when the center of gravity of the sample is above the tray, the end of the sample on the first sample transport mechanism 104 side can be placed on the first support portion 404. Furthermore, as the sample is pushed out towards the first sample transport mechanism 104, the sample reaches a position on the first support portion 404 (Figure 10(c)).

[0039] Next, when the sample is pushed out from its position on the first support portion 404 towards the second position 320 by the sample moving mechanism 300 (second extrusion portion 316), the end of the sample on the first sample transport mechanism 104 side rests directly on the first sample transport mechanism 104 (Figure 11(a)). In this embodiment, the horizontal plane which is the first support portion 404 is higher than the second position 320 (the surface of the belt 302). Therefore, when the center of gravity of the sample reaches the first sample transport mechanism 104 side beyond the boundary between the first support portion 404 and the first inclined portion 402, the sample tilts. At this time, by making the distance CD between the end of the belt 302 on the holder receiver 208 side (position C in the figure) and the end of the first support portion 404 on the first sample transport mechanism 104 side (position D in the figure) sufficiently smaller than the sample, the end of the sample on the first sample transport mechanism 104 side can be placed on the first sample transport mechanism 104. This prevents the sample from coming into contact with the side of the belt 302. Furthermore, the sample moving mechanism 300 pushes the sample from its position on the first support portion 404 towards the second position 320, causing the sample to reach the second position 320 (Figure 11(b)).

[0040] As described above, by providing the first inclined portion 402 on the first sample bridge 306, the sample can be easily moved between the sample transport mechanism and the holder receiver 208 in a simple and compact configuration.

[0041] In the above embodiment, the height of the position where the first support portion 404 holds the sample (the horizontal plane position of the first support portion 404) and the height of the sample holding position (the surface position of the tray on the holder receiver 208) are the same, but this is not limited to this. The position where the first support portion 404 holds the sample may be lower than the second position 320, as long as it is higher than the lower end of the second inclined portion 406. In this case, when the sample is pushed out from the sample holding position towards the first sample transport mechanism 104 by the sample moving mechanism 300, the end of the sample on the first sample transport mechanism 104 side comes into contact with the second inclined portion 406 of the first sample bridge 306, and then slides along the second inclined portion 406 to reach the first support portion 404.

[0042] Furthermore, the shape of the first sample bridge 306 is not limited to the above. Specifically, for example, Figures 12(a) to 12(f) are schematic diagrams showing modified cross-sectional shapes of the first bridge plate 308. As described above, if the height of the position where the first support portion 404 holds the sample and the second position 320 are the same, the second inclined portion 406 does not need to be provided, as shown in Figures 12(a) to 12(c).

[0043] As shown in Figures 12(b) and 12(e), the lower end of the first inclined portion 402 does not need to coincide with the back surface of the first sample bridge 306 if the lower end of the first inclined portion 402 is lower than the second position 320. Similarly, as shown in Figure 12(e), the lower end of the second inclined portion 406 does not need to coincide with the back surface of the first sample bridge 306 if the sample holding position is higher than the lower end of the second inclined portion 406. As shown in Figure 12(d), the inclination of the first inclined portion 402 and the second inclined portion 406 may be the same. As shown in Figures 12(c) and 12(f), the first inclined portion 402 may be a curved surface whose inclination gradually changes from the first sample transport mechanism 104 side toward the holder receiver 208 side. In this case, it is desirable that the inclination of the first inclined portion 402 is greatest at the center of the first inclined portion 402 and decreases as it gets closer to the first sample transport mechanism 104 and the holder receiver 208. Similarly, as shown in Figure 12(f), the second inclined portion 406 may be a curved surface whose inclination gradually changes from the holder receiver 208 side toward the first sample transport mechanism 104 side.

[0044] Furthermore, the speed at which the sample moving mechanism 300 moves may be constant or vary. Specifically, for example, the first extrusion unit 314 may move the sample at a constant speed during the process of pushing the sample from the second position 320 to the sample holding position. Alternatively, the first extrusion unit 314 may move the sample from the second position 320 to the position on the first support unit 404 at a constant speed, then stop for a certain period of time, and then move the sample from the position on the first support unit 404 to the sample holding position at a constant speed. Similarly, the second extrusion unit 316 may move the sample at a constant speed during the process of pushing the sample from the sample holding position to the second position 320. Alternatively, the second extrusion unit 316 may move the sample from the sample holding position to the position on the first support unit 404 at a constant speed, then stop for a certain period of time, and then move the sample from the position on the first support unit 404 to the second position 320 at a constant speed.

[0045] Furthermore, the size and shape of each part of the first sample bridge 306, and the position in which the first sample bridge 306 is placed, are appropriately set according to the size of the sample. Specifically, it is desirable that the distance AB between the holder receiver 208 side end of the first support part 404 (position A in the figure) and the first sample transport mechanism 104 side end of the receiving tray (position B in the figure) be less than or equal to half the size of the sample. Here, the size of the sample represents the length from the first sample transport mechanism 104 side end of the sample to the holder receiver 208 side end. Similarly, it is desirable that the distance CD between the holder receiver 208 side end of the belt 302 (position C in the figure) and the first sample transport mechanism 104 side end of the first support part 404 (position D in the figure) be less than or equal to half the size of the sample. For example, in order to maintain sufficient analytical accuracy, samples are often disc-shaped with a diameter of 28 mm or more, so it is desirable that the distance AB be 14 mm or less. Similarly, it is desirable that the distance CD be 14 mm or less. Note that the disc-shaped sample is just one example; the sample does not need to be disc-shaped as long as it has a certain shape.

[0046] The sample holder may be configured to be selected according to the size of the sample. In this case, the size and shape of each part of the first sample bridge 306, and the position in which the first sample bridge 306 is placed, may be set according to the size of the sample holder.

[0047] [Second Embodiment] The X-ray analysis system 100 according to the second embodiment differs from the first embodiment in that it includes a second sample transport mechanism 1302 and a second sample bridge. Other aspects are the same as those of the first embodiment and will not be described. Figure 13 is a top view of the connection between the first sample transport mechanism 104, the second sample transport mechanism 1302, and the sample loader 106 of the X-ray analysis system 100 according to the second embodiment. Figure 14 is a schematic cross-sectional view of the said connection.

[0048] The second sample transport mechanism 1302 transports the sample between a predetermined position where the sample is placed and a position closer to the holder receiver 208 than the predetermined position. The second sample transport mechanism 1302 is, for example, a belt conveyor, and its configuration is the same as that of the first sample transport mechanism 104 except for the positions of the transport source and destination. For example, the second sample transport mechanism 1302 transports the sample from within the operating range of the sample moving mechanism 300 to the vicinity of the inspection device used in a process after X-ray analysis. Hereinafter, the destination position of the sample (near the inspection device) will be referred to as the third position 1316, and the source position (within the operating range of the sample moving mechanism 300) will be referred to as the fourth position 1318. That is, the surface of the belt 302 of the second sample transport mechanism 1302 has both the third position 1316 and the fourth position 1318. The belt 302 has a length corresponding to the distance from the third position 1316 to the fourth position 1318.

[0049] The second sample bridge is positioned between the fourth position 1318 of the second sample transport mechanism 1302 and the holder receiver 208. The second sample bridge 1304 has a second bridge plate 1306 and a second support plate 1314. In the second embodiment, the second bridge plate 1306 is substantially trapezoidal in cross-section and has a third inclined portion 1308, a second support portion 1310, and a fourth inclined portion 1312 on the surface that contacts the sample. Specifically, the second sample bridge 1304 has a third inclined portion 1308 provided at the end on the second sample transport mechanism 1302 side and formed to gradually rise toward the holder receiver 208 side, a second support portion 1310 provided on the holder receiver 208 side of the third inclined portion 1308 so as to be connected to the third inclined portion 1308 and supporting the sample, and a fourth inclined portion 1312 provided at the end on the holder receiver 208 side and formed to gradually rise toward the second sample transport mechanism 1302 side. The third inclined portion 1308 of the second sample bridge 1304 has the same shape and function as the first inclined portion 402 of the first sample bridge 306. The second support portion 1310 of the second sample bridge 1304 has the same shape and function as the first support portion 404 of the first sample bridge 306. The fourth inclined portion 1312 of the second sample bridge 1304 has the same shape and function as the second inclined portion 406 of the first sample bridge 306. The second support plate 1314 has the same shape and function as the first support plate 310.

[0050] Furthermore, the sample moving mechanism 300 in the second embodiment further pushes and moves the sample located at the fourth position 1318 from the fourth position 1318 to the sample holding position of the sample holder 312 located on the holder receiver 208, and also pushes and moves the sample located at the sample holding position from the sample holding position to the fourth position 1318.

[0051] As described above, the X-ray analysis system 100 according to the second embodiment includes a first sample transport mechanism 104 and a second sample transport mechanism 1302. For example, if both the first sample transport mechanism 104 and the second sample transport mechanism 1302 are belt conveyors, then two belts for transporting the sample are included. Therefore, according to the second embodiment, after analyzing a sample transported from the first position 318 to the X-ray analysis system 100, the analyzed sample can be transported to a third position different from the first position 318. In the second embodiment as well, by providing a third inclined portion 1308 on the second sample bridge 1304, the sample can be easily moved between the sample transport mechanism and the holder receiver 208 in a simple and compact configuration. [Explanation of Symbols]

[0052] 100 X-ray analysis systems, 102 X-ray analyzer, 104 First sample transport mechanism, 106 Sample Loader, 108 holder tray, 110 Holder transfer machine, 202 Space for inserting holders, 204 Measurement room, 206 Pre-exhaust chamber, 208 Holder receiver, 300 Sample transfer mechanism, 302 belt, 304 Pulley, 306 First sample bridge, 308 First bridge plate, 310 first support plate, 312 Sample holder, 314 First extrusion section, 316 Second extrusion section, 318 1st position, 320 2nd position, 402 1st slope, 404 first support part, 406 2nd slope, 702 Sample stage, 704 X-ray source, 706 Spectroscopic element, 708 detectors, 1302 Second sample transport mechanism, 1304 Second sample bridge, 1306 Second bridge plate, 1308 Third slope, 1310 Second support part, 1312 4th slope 1314 2nd support plate 1316 3rd position, 1318 4th position.

Claims

1. A holder holder is provided where a sample holder for temporarily holding the sample is placed, A first sample transport mechanism is provided, on which the sample is placed, and which transports the sample from a first position to a second position closer to the holder receiver than the first position. A sample moving mechanism that pushes the sample in the second position from the second position to the sample holding position of the sample holder arranged in the holder receiver, and pushes the sample in the sample holding position from the sample holding position to the second position, A first sample bridge is disposed between the second position of the first sample transport mechanism and the holder receiver, and comprises: a first inclined portion provided at the end on the side of the first sample transport mechanism and formed to gradually increase in height toward the holder receiver side; and a first support portion provided on the holder receiver side of the first inclined portion so as to be connected to the first inclined portion and supporting the sample; When the sample is pushed from the second position to the holder receiving side by the sample moving mechanism, the end of the sample on the sample holder side of the sample comes into contact with the first inclined portion of the first sample bridge, and then slides along the first inclined portion to reach the first support portion. When the sample is pushed from the position on the first support to the second position by the sample moving mechanism, the end of the sample on the first sample transport mechanism side rests directly on the first sample transport mechanism. An X-ray analysis system characterized by the following features.

2. The X-ray analysis system according to claim 1, characterized in that the first sample bridge is provided at the end of the holder receiving side and is formed to gradually increase in height toward the first sample transport mechanism side, and further comprises a second inclined portion provided on the holder receiving side of the first support portion so as to be connected to the first support portion and forming an angle with respect to the first support portion.

3. When the sample is pushed out from its position on the first support portion toward the sample holding position by the sample moving mechanism, the end of the sample on the holder receiving side rests directly on the sample holding position of the sample holder. When the sample is pushed out from the sample holding position toward the sample moving mechanism by the sample moving mechanism, the end of the sample on the first sample transport mechanism side comes into contact with the second inclined portion of the first sample bridge, and then slides along the second inclined portion to reach the first support portion. The X-ray analysis system according to feature 2.

4. When the sample is pushed out from its position on the first support portion toward the sample holding position by the sample moving mechanism, the end of the sample on the holder receiving side rests directly on the sample holding position of the sample holder. When the sample is pushed out from the sample holding position toward the sample moving mechanism by the sample moving mechanism, the end of the sample on the first sample transport mechanism side does not come into contact with the second inclined portion of the first sample bridge, but rests directly on the first support portion. The X-ray analysis system according to feature 2.

5. The X-ray analysis system according to any one of claims 1 to 4, characterized in that the first inclined portion is a curved surface whose inclination gradually changes from the first sample transport mechanism side toward the holder receiving side.

6. The X-ray analysis system according to any one of claims 2 to 4, characterized in that the second inclined portion is a curved surface whose inclination gradually changes from the holder receiving side toward the first sample transport mechanism side.

7. moreover, The sample is placed in a third position and a second sample transport mechanism transports the sample between the third position and a fourth position closer to the holder receiver than the third position. A second sample bridge disposed between the fourth position of the second sample transport mechanism and the holder receiver, comprising: a third inclined portion provided at the end on the second sample transport mechanism side and formed to gradually increase in height toward the holder receiver side; and a second support portion provided on the holder receiver side of the third inclined portion so as to be connected to the third inclined portion and supporting the sample; It has, The sample moving mechanism further pushes the sample in the fourth position from the fourth position to the sample holding position of the sample holder arranged in the holder receiver, and pushes the sample in the sample holding position from the sample holding position to the fourth position. The X-ray analysis system according to any one of features 1 to 4.

8. The first sample bridge further comprises a first support plate fixed to the back surface opposite to the surface on which the first support portion is formed, The first sample transport mechanism is a belt conveyor having a belt having a first position and a second position on its surface, and a pulley that transports the sample from the first position to the second position by rotating the belt, The first support plate is positioned such that its surface is in contact with the back surface of the belt. The X-ray analysis system according to feature 7.

9. The second sample bridge further comprises a second support plate fixed to the back surface opposite to the surface on which the second support portion is formed, The second sample transport mechanism is a belt conveyor having a belt on which the third position and the fourth position are located on its surface, and a pulley that transports the sample between the third position and the fourth position by rotating the belt, The second support plate is positioned such that its surface is in contact with the back surface of the belt. The X-ray analysis system according to feature 8.

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