Vapor chambers and electronic equipment

Abstract

This disclosure provides a vapor chamber and electronic equipment that can improve heat dissipation efficiency. [Solution] The vapor chamber 1 comprises a main sheet 30 and a first sheet 20 laminated on the main sheet 30. The main sheet 30 includes a steam passage section through which the vapor of the working fluid passes and a liquid passage section 60 communicating with the steam passage section and through which the liquid of the working fluid passes. The steam passage section includes a steam passage extending along a first direction. The first sheet 20 includes a first sheet inner surface facing the main sheet 30 and a first sheet groove 70 provided on the first sheet inner surface, which is located in a position that overlaps with the steam passage in a plan view and extends along a direction intersecting the first direction.

Description

Technical Field

[0001] The present disclosure relates to a vapor chamber and an electronic device.

Background Art

[0002] Devices that generate heat, such as a central processing unit (CPU), a light-emitting diode (LED), and a power semiconductor, which are used in mobile devices such as mobile phones and tablet terminals, are cooled by heat dissipation members such as heat pipes (see, for example, Patent Documents 1 and 2). In recent years, due to the thinning of mobile devices such as mobile phones, thinning of the heat dissipation member has also been required, and development of a vapor chamber that can be made thinner than a heat pipe has been underway. An operating fluid is enclosed in the vapor chamber, and the vapor chamber cools the device by the operating fluid absorbing the heat of the device and diffusing inside.

[0003] More specifically, the operating fluid in the vapor chamber receives heat from the device in a portion (evaporation portion) close to the device and evaporates into vapor (operating vapor). The operating vapor diffuses and cools in a direction away from the evaporation portion in the vapor flow path portion, and condenses into a liquid (operating liquid). In the vapor chamber, a liquid flow path portion as a capillary structure (wick) is provided, and the operating liquid enters from the vapor flow path portion into the liquid flow path portion, flows through the liquid flow path portion, and is transported toward the evaporation portion. Then, the operating liquid receives heat again at the evaporation portion and evaporates. In this way, the operating fluid refluxes in the vapor chamber while repeating phase changes, that is, evaporation and condensation, thereby transferring the heat of the device and enhancing the heat dissipation efficiency.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

[0005] This disclosure aims to provide a vapor chamber and electronic equipment that can improve heat dissipation efficiency. [Means for solving the problem]

[0006] The first form of this disclosure is, A vapor chamber in which a working fluid is sealed, The main sheet and The main body sheet comprises a first sheet laminated on the main body sheet, The main body sheet includes a steam passage section through which the vapor of the working fluid passes, and a liquid passage section communicating with the steam passage section and through which the liquid of the working fluid passes. The steam flow section includes a steam passage extending along the first direction, The first sheet is a vapor chamber comprising a first sheet inner surface facing the main sheet, and a first sheet groove provided on the first sheet inner surface, which is located in a position overlapping with the steam passage in a plan view and extends along a direction intersecting the first direction.

[0007] A second aspect of this disclosure relates to the vapor chamber according to the first aspect described above, The liquid flow channel portion may include a main liquid flow channel groove extending along the first direction. The cross-sectional area of ​​the flow path in the first sheet groove may be smaller than the cross-sectional area of ​​the flow path in the main channel groove of the liquid flow path.

[0008] A third aspect of this disclosure relates to the vapor chamber according to the first aspect described above, The liquid flow channel portion may include a main liquid flow channel groove extending along the first direction. The cross-sectional area of ​​the flow path of the first sheet groove may be larger than the cross-sectional area of ​​the flow path of the main fluid flow path groove.

[0009] A fourth aspect of this disclosure relates to a vapor chamber according to each of the first to third aspects described above, The first sheet groove may also be provided in a position that overlaps with the liquid flow channel in a plan view.

[0010] A fifth aspect of this disclosure relates to a vapor chamber according to the fourth aspect described above, The first sheet groove may be provided so as to traverse the steam passage in a direction intersecting the first direction.

[0011] A sixth aspect of this disclosure relates to a vapor chamber according to the fourth aspect described above, The first sheet groove may include a first end portion provided at a position overlapping with the steam passage in a plan view, and a second end portion provided at a position overlapping with the liquid flow path portion in a plan view.

[0012] A seventh aspect of this disclosure relates to a vapor chamber according to the fourth aspect described above, The first sheet may include a plurality of first sheet grooves. The plurality of first sheet grooves may include a first sheet groove provided so as to traverse the steam passage in a direction intersecting the first direction, and a first sheet groove including a first end provided at a position overlapping the steam passage in a plan view and a second end provided at a position overlapping the liquid flow section in a plan view.

[0013] An eighth aspect of this disclosure relates to a vapor chamber according to the sixth aspect and the seventh aspect described above, respectively. The first sheet groove may be formed such that the flow channel cross-sectional area decreases from the second end toward the first end.

[0014] A ninth aspect of this disclosure relates to a vapor chamber according to the sixth aspect and the seventh aspect described above, respectively. The first sheet groove may be formed such that the cross-sectional area of the flow path decreases from the first end portion toward the second end portion.

[0015] A tenth aspect of the present disclosure is in the vapor chamber according to each of the sixth aspect to the ninth aspect described above, the first sheet groove may be arranged so as to be inclined with respect to the first direction in a plan view.

[0016] An eleventh aspect of the present disclosure is in the vapor chamber according to each of the sixth aspect to the tenth aspect described above, the first sheet may include a plurality of the first sheet grooves, the plurality of the first sheet grooves may be arranged radially in a plan view.

[0017] A twelfth aspect of the present disclosure is in the vapor chamber according to each of the first aspect to the eleventh aspect described above, the first sheet may include a plurality of the first sheet grooves and a communication groove that communicates the adjacent first sheet grooves with each other.

[0018] A thirteenth aspect of the present disclosure is in the vapor chamber according to each of the first aspect to the twelfth aspect described above, the main body sheet may include a first main body surface facing the inner surface of the first sheet and a second main body surface located on the opposite side of the first main body surface, the liquid flow path portion may be provided on the first main body surface.

[0019] A fourteenth aspect of the present disclosure is in the vapor chamber according to the thirteenth aspect described above, it may include a second sheet laminated on the second main body surface of the main body sheet, the liquid flow path portion may also be provided on the second main body surface, The second sheet may include a second sheet inner surface facing the second main body surface, and a second sheet groove provided on the second sheet inner surface, which is located in a position that overlaps with the steam passage in a plan view and extends along a direction intersecting the first direction.

[0020] A fifteenth aspect of this disclosure relates to a vapor chamber according to each of the first to fourteenth aspects described above, The first sheet may have a recessed area that is recessed toward the steam passage. The first sheet groove may be located in the recessed area.

[0021] A sixteenth aspect of this disclosure relates to a vapor chamber according to each of the first to fifteenth aspects described above, The main body sheet may include a plurality of land portions extending along the first direction, on which the liquid flow channel portion is provided, a plurality of land portions arranged along a second direction perpendicular to the first direction, and connecting portions connecting adjacent land portions. The first sheet groove may be provided at a position opposite to the connecting portion.

[0022] A 17th aspect of this disclosure relates to a vapor chamber according to each of the first to 16 aspects described above, The main body sheet may include a plurality of land portions extending along the first direction, on which the liquid flow channel portion is provided, a plurality of land portions arranged along a second direction perpendicular to the first direction, and connecting portions connecting adjacent land portions. The first sheet groove may be provided in a region adjacent to the connecting portion in the first direction when viewed in plan.

[0023] An eighteenth aspect of this disclosure relates to a vapor chamber according to each of the first to seventeenth aspects described above, The vapor chamber may have a bent region that is bent along a curved line. The first sheet groove may be located in the bending region.

[0024] The 19th aspect of this disclosure is: A vapor chamber in which a working fluid is sealed, A main body sheet including a first main body surface and a second main body surface located on the opposite side from the first main body surface, The first sheet located on the first main body surface of the main body sheet, A second sheet located on the second main body surface of the main body sheet, A space provided in the main body sheet, comprising a space covered by the first sheet and the second sheet, The main body sheet includes a plurality of land portions located within the space, which extend in a first direction. The second sheet includes the outer surface of the second sheet located on the opposite side from the main sheet. The vapor chamber includes a bent region that is bent along a bend line extending in a direction intersecting the first direction in a plan view, This is a vapor chamber in which, in the bending region, a recess on the outer surface of the second sheet is located on the outer surface of the second sheet.

[0025] A 20th aspect of this disclosure relates to a vapor chamber according to the 19th aspect described above, The second sheet may be located on the inside of the curve compared to the main sheet.

[0026] A 21st aspect of this disclosure relates to a vapor chamber according to the 19th aspect and the 20th aspect described above, The second sheet outer surface recess may extend along the curve line and cross the space.

[0027] A 22nd aspect of this disclosure relates to a vapor chamber according to the 21st aspect described above, In the bending region, a plurality of recesses on the outer surface of the second sheet may be located on the outer surface of the second sheet. The multiple recesses on the outer surface of the second sheet may be aligned in the first direction.

[0028] A 23rd aspect of this disclosure relates to a vapor chamber according to the 19th aspect and the 20th aspect described above, In the bending region, a plurality of recesses on the outer surface of the second sheet may be located on the outer surface of the second sheet. The multiple recesses on the outer surface of the second sheet may be arranged along the curve line. At least some of the multiple recesses on the outer surface of the second sheet may overlap the space.

[0029] A 24th aspect of this disclosure relates to a vapor chamber according to each of the 19th to 23rd aspects described above, The aforementioned curved line may extend in a direction perpendicular to the first direction in a plan view.

[0030] A 25th aspect of this disclosure relates to a vapor chamber according to each of the 19th to 23rd aspects described above, The curved line may extend in a direction that is inclined in the first direction.

[0031] A 26th aspect of this disclosure relates to a vapor chamber according to each of the 19th to 25th aspects described above, The first sheet may include the outer surface of the first sheet located on the opposite side from the main sheet. In the bending region, the first sheet outer surface recess may be located on the outer surface of the first sheet.

[0032] A 27th aspect of this disclosure relates to a vapor chamber according to each of the 19th to 26th aspects described above, A land recess may be located on the first main body surface or the second main body surface of the land portion. The land recess does not necessarily have to be in communication with the space. The land recess may overlap the second sheet outer surface recess.

[0033] A 28th aspect of this disclosure relates to a vapor chamber according to the 27th aspect described above, The land recess may extend beyond the second sheet outer surface recess on both sides in the first direction.

[0034] The 29th aspect of this disclosure is: A vapor chamber in which a working fluid is sealed, A main body sheet including a first main body surface and a second main body surface located on the opposite side from the first main body surface, The first sheet located on the first main body surface of the main body sheet, A second sheet located on the second main body surface of the main body sheet, A space provided in the main body sheet, comprising a space covered by the first sheet and the second sheet, The main body sheet includes a plurality of land portions located within the space, which extend in a first direction. The second sheet includes the outer surface of the second sheet located on the opposite side from the main sheet. The vapor chamber is divided into a first region, a second region, and a third region located between the first region and the second region in the first direction. In the third region, the vapor chamber is such that the outer surface recess of the second sheet is located on the outer surface of the second sheet.

[0035] A 30th aspect of this disclosure relates to a vapor chamber according to the 29th aspect described above, The second sheet outer surface recess may extend in a direction intersecting the first direction in a plan view and may cross the space.

[0036] A 31st aspect of this disclosure relates to a vapor chamber according to the 29th aspect described above, In the third region, a plurality of recesses on the outer surface of the second sheet may be located on the outer surface of the second sheet. The plurality of second sheet outer surface recesses may be arranged in directions intersecting the first direction, and at least some of the plurality of second sheet outer surface recesses may overlap the space.

[0037] A third aspect of this disclosure is: Housing and The device housed within the aforementioned housing, The electronic device comprises a vapor chamber, which is in thermal contact with the device, according to any of the first to thirtieth embodiments described above. [Effects of the Invention]

[0038] According to this disclosure, heat dissipation efficiency can be improved. [Brief explanation of the drawing]

[0039] [Figure 1] Figure 1 is a schematic perspective view illustrating an electronic device according to the first embodiment. [Figure 2] Figure 2 is a top view showing a vapor chamber according to the first embodiment. [Figure 3] Figure 3 is a cross-sectional view along line AA in Figure 2. [Figure 4] Figure 4 is a top view of the lower sheet shown in Figure 3. [Figure 5] Figure 5 is a bottom view of the upper sheet shown in Figure 3. [Figure 6] Figure 6 is a top view of the wick sheet shown in Figure 3. [Figure 7] Figure 7 is a partially enlarged cross-sectional view of Figure 3. [Figure 8] Figure 8 is a top view of Figure 7. [Figure 9] Figure 9 is a partially enlarged bottom view of Figure 5 at the location corresponding to Figure 8. [Figure 10] Figure 10 is a partially enlarged top view of the vapor chamber in Figure 2, at the point where the wick sheet in Figure 8 and the upper sheet in Figure 9 overlap. [Figure 11]Figure 11 is a cross-sectional view along line BB in Figure 10. [Figure 12] Figure 12 is a modified example of Figure 7. [Figure 13] Figure 13 is a modified example of Figure 10. [Figure 14] Figure 14 is a modified example of Figure 9. [Figure 15] Figure 15 is another modification of Figure 9. [Figure 16] Figure 16 is another modified example of Figure 9. [Figure 17] Figure 17 is a modified example of Figure 11. [Figure 18] Figure 18 is another variation of Figure 11. [Figure 19] Figure 19 is another variation of Figure 11. [Figure 20] Figure 20 is another variation of Figure 11. [Figure 21] Figure 21 is a partially enlarged top view showing a vapor chamber according to the second embodiment. [Figure 22] Figure 22 is a modified example of Figure 21. [Figure 23] Figure 23 is a partially enlarged top view showing a vapor chamber according to a third embodiment. [Figure 24] Figure 24 is a partially enlarged top view showing a vapor chamber according to the fourth embodiment. [Figure 25] Figure 25 is a partially enlarged top view showing a vapor chamber according to the fifth embodiment. [Figure 26] Figure 26 is a partially enlarged top view showing a vapor chamber according to the sixth embodiment. [Figure 27] Figure 27 is a partially enlarged top view showing a vapor chamber according to the seventh embodiment. [Figure 28] Figure 28 is a modified example of Figure 27. [Figure 29] Figure 29 is another variation of Figure 27. [Figure 30] Figure 30 is a partially enlarged top view showing a vapor chamber according to the eighth embodiment. [Figure 31] Figure 31 is a modified example of Figure 30. [Figure 32] Figure 32 is a partially enlarged top view showing a vapor chamber according to the ninth embodiment. [Figure 33] Figure 33 is a modified example of Figure 32. [Figure 34] Figure 34 is another modified example of Figure 32. [Figure 35] Figure 35 is a partially enlarged cross-sectional view showing a vapor chamber according to the tenth embodiment. [Figure 36] Figure 36 is a partially enlarged cross-sectional view showing a vapor chamber according to the eleventh embodiment. [Figure 37] Figure 37 is a partially enlarged cross-sectional view showing a vapor chamber according to the twelfth embodiment. [Figure 38] Figure 38 is a partially enlarged top view showing a vapor chamber according to the 13th embodiment. [Figure 39] Figure 39 is a top view showing a vapor chamber according to the 14th embodiment. [Figure 40] Figure 40 is a side view showing a vapor chamber bent along the bend line in Figure 39. [Figure 41] Figure 41 is a modified example of Figure 3. [Figure 42] Figure 42 is a schematic diagram showing an example of a vapor chamber according to the 15th embodiment. [Figure 43] Figure 43 is a schematic diagram showing another example of a vapor chamber according to the 15th embodiment. [Figure 44] Figure 44 is an external perspective view showing a vapor chamber according to the 15th embodiment. [Figure 45] Figure 45 is a plan view of the vapor chamber shown in Figure 42 before bending. [Figure 46] Figure 46 is a cross-sectional view taken along the line AA-AA in Figure 45. [Figure 47] Figure 47 is a plan view showing the inner surface of the first sheet shown in Figure 46. [Figure 48]Figure 48 is a plan view showing the inner surface of the second sheet shown in Figure 46. [Figure 49] Figure 49 is a cross-sectional view taken along the line BB-BB in Figure 48. [Figure 50] Figure 50 is a partially enlarged plan view showing one modified example of the outer recess of the second sheet shown in Figure 45. [Figure 51] Figure 51 is a modified example of Figure 49. [Figure 52] Figure 52 is another modified example of Figure 49. [Figure 53] Figure 53 is another modified example of Figure 49. [Figure 54] Figure 54 is another modified example of Figure 49. [Figure 55] Figure 55 is a plan view showing the first main surface of the wick sheet shown in Figure 46. [Figure 56] Figure 56 is a plan view showing the second main surface of the wick sheet shown in Figure 46. [Figure 57] Figure 57 is a partially enlarged cross-sectional view of Figure 46. [Figure 58] Figure 58 is a partially enlarged view of the liquid flow channel shown in Figure 55. [Figure 59] Figure 59 is a schematic cross-sectional view showing the bent region of the vapor chamber shown in Figure 44. [Figure 60] Figure 60 is a partially enlarged plan view showing one modified example of the outer recess of the second sheet shown in Figure 45. [Figure 61] Figure 61 is a modified example of Figure 60. [Figure 62] Figure 62 is another variation of Figure 60. [Figure 63] Figure 63 is another modified example of Figure 60. [Figure 64] Figure 64 is a schematic cross-sectional view showing a modified example of the bent region of the vapor chamber shown in Figure 59. [Figure 65] Figure 65 is a partially enlarged plan view showing a modified example of the vapor chamber shown in Figure 45. [Figure 66] Figure 66 is a cross-sectional view taken along the CC-CC line in Figure 65. [Figure 67]Figure 67 is an external perspective view showing a vapor chamber according to the 16th embodiment. [Figure 68] Figure 68 is a plan view of the vapor chamber shown in Figure 67 before bending. [Figure 69] Figure 69 is a partially enlarged cross-sectional view showing a vapor chamber according to the 17th embodiment. [Figure 70] Figure 70 is a partially enlarged plan view showing the outer recess and land recess of the second sheet shown in Figure 69. [Modes for carrying out the invention]

[0040] Hereinafter, an embodiment of this disclosure will be described with reference to the drawings. Note that, for the sake of illustration and ease of understanding, the scale and aspect ratios of the drawings accompanying this specification have been appropriately altered and exaggerated from those of the actual objects. Furthermore, some configurations shown in some drawings may be omitted in others.

[0041] Furthermore, in this specification, terms such as "parallel," "orthogonal," and "identical," which specify shapes, geometric conditions, and physical properties, as well as their degrees, and values ​​of length, angle, and physical properties, are not limited to their strict meanings but are interpreted to include a range that allows for the expectation of similar functionality.

[0042] Furthermore, while the drawings regularly depict the shapes of multiple parts that can be expected to perform similar functions for clarity, they are not strictly limited to this, and the shapes of these parts may differ from one another as long as the function can be expected. Also, while the drawings show boundary lines indicating joint surfaces between members as simple straight lines for convenience, they are not limited to strictly straight lines, and the shape of these boundary lines is arbitrary as long as the desired joint performance can be expected.

[0043] (First Embodiment) A vapor chamber and electronic device according to the first embodiment of this disclosure will be described with reference to Figures 1 to 12. The vapor chamber 1 according to this embodiment is a device mounted on an electronic device E to cool a device D (a device to be cooled) which is a heat-generating element housed in the electronic device E. Examples of electronic devices E include mobile terminals such as handheld terminals and tablet terminals. Examples of devices D include electronic devices that generate heat, such as central processing units (CPUs), light-emitting diodes (LEDs), and power semiconductors used in mobile terminals.

[0044] Here, we will first describe the electronic device E equipped with the vapor chamber 1 according to this embodiment, using a tablet terminal as an example. As shown in Figure 1, the electronic device E (tablet terminal) comprises a housing H, a device D housed within the housing H, and the vapor chamber 1. In the electronic device E shown in Figure 1, a touch panel display TD is provided on the front of the housing H. The vapor chamber 1 is housed within the housing H and is positioned to be in thermal contact with the device D. This allows the vapor chamber 1 to receive the heat generated by the device D when the electronic device E is in use. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via the working fluids 2a and 2b, which will be described later. In this way, the device D is effectively cooled. When the electronic device E is a tablet terminal, the device D corresponds to a central processing unit, etc.

[0045] Next, the vapor chamber 1 according to this embodiment will be described. As shown in Figures 2 and 3, the vapor chamber 1 includes a sealed space 3 containing working fluids 2a and 2b. The vapor chamber 1 is configured to cool the device D of the electronic device E described above by the working fluids 2a and 2b flowing through the sealed space 3 while undergoing repeated phase changes. Examples of working fluids 2a and 2b include pure water, ethanol, methanol, acetone, and mixtures thereof.

[0046] As shown in Figures 2 and 3, the vapor chamber 1 comprises a lower sheet 10 (second sheet), an upper sheet 20 (first sheet), and a wick sheet 30 (main sheet) interposed between the lower sheet 10 and the upper sheet 20. In this embodiment, the vapor chamber 1 is composed of the lower sheet 10, the upper sheet 20, and the wick sheet 30. In the vapor chamber 1 according to this embodiment, the lower sheet 10, the wick sheet 30, and the upper sheet 20 are stacked in this order. In this embodiment, an example is shown in which the wick sheet 30 is composed of one sheet, but the wick sheet 30 may be composed of two or more sheets, and the number of sheets of the wick sheet 30 is arbitrary.

[0047] The vapor chamber 1 is generally formed in the shape of a thin, flat plate. The planar shape of the vapor chamber 1 is arbitrary, but it may be rectangular as shown in Figure 2. The planar shape of the vapor chamber 1 may be, for example, a rectangle with one side of 10 mm to 200 mm and the other side of 50 mm to 600 mm, or a square with one side of 40 mm to 300 mm, and its planar dimensions are arbitrary. In this embodiment, as an example, an example in which the planar shape of the vapor chamber 1 is a rectangle with the X direction (first direction) as the longitudinal direction and the Y direction (second direction) perpendicular to the X direction as the transverse direction will be described. In this case, as shown in Figures 4 to 6, the lower sheet 10, upper sheet 20 and wick sheet 30 may also have the same planar shape as the vapor chamber 1. Note that the planar shape of the vapor chamber 1 is not limited to a rectangular shape, and can be any shape such as a circle, ellipse, L-shape, T-shape, U-shape, etc.

[0048] As shown in Figure 2, the vapor chamber 1 includes an evaporation region SR where the working fluid 2b evaporates and a condensation region CR where the working vapor 2a condenses. Here, the working vapor 2a is the working fluid in a gaseous state, i.e., the vapor of the working fluid, and the working fluid 2b is the working fluid in a liquid state, i.e., the liquid of the working fluid.

[0049] The evaporation region SR is the region that overlaps with device D in a plan view, and is the region where device D is mounted. The evaporation region SR can be positioned at any location on the vapor chamber 1. In the illustrated example, the evaporation region SR is formed on the negative X-direction side (left side in Figure 2) of the vapor chamber 1. Heat from device D is transferred to the evaporation region SR, and this heat causes the working fluid 2b to evaporate, generating working vapor 2a. Heat from device D can be transferred not only to the region that overlaps with device D in a plan view, but also to the surrounding area. Therefore, the evaporation region SR includes the region that overlaps with device D and the surrounding area in a plan view.

[0050] Here, a plan view refers to the state in which the vapor chamber 1 is viewed from a direction perpendicular to the surface that receives heat from the device D and the surface that releases the received heat. In this embodiment, the surface that receives heat corresponds to the outer surface 20b of the upper sheet 20, which will be described later, and the surface that releases heat corresponds to the outer surface 10a of the lower sheet 10, which will be described later. Alternatively, the surface that receives heat may correspond to the outer surface 10a of the lower sheet, and the surface that releases heat may correspond to the outer surface 20b of the upper sheet. For example, as shown in Figure 2, a view of the vapor chamber 1 from above or from below corresponds to a plan view.

[0051] The condensation region CR is the area that does not overlap with the device D in a plan view, and is primarily the region where the working vapor 2a releases heat and condenses. The condensation region CR can also be described as the region surrounding the evaporation region SR. In the illustrated example, the condensation region CR is formed on the positive X-direction side (right side in Figure 2) of the vapor chamber 1. In the condensation region CR, heat from the working vapor 2a is released to the lower sheet 10, the working vapor 2a is cooled and condenses, and the working fluid 2b is generated.

[0052] Furthermore, when the vapor chamber 1 is installed inside a mobile terminal, the top-bottom relationship may be disrupted depending on the orientation of the mobile terminal. However, in this embodiment, for convenience, the sheet that receives heat from device D is referred to as the upper sheet 20, and the sheet that releases the received heat is referred to as the lower sheet 10. For this reason, the following explanation will be given with the lower sheet 10 positioned at the bottom and the upper sheet 20 positioned at the top.

[0053] As shown in Figure 3, the lower sheet 10 includes an outer lower sheet surface 10a (second sheet outer surface) provided on the opposite side from the wick sheet 30, and an inner lower sheet surface 10b (second sheet inner surface) facing the wick sheet 30. A housing member Ha, which constitutes part of the housing H of a mobile terminal or the like, is attached to this outer lower sheet surface 10a. The entire outer lower sheet surface 10a may be covered by the housing member Ha. The lower sheet 10 may be formed in a generally flat shape, and may have a generally constant thickness.

[0054] As shown in Figure 4, alignment holes 12 may be provided at the four corners of the lower sheet 10. In the example shown in Figure 4, the planar shape of the alignment holes 12 is circular, but it is not limited to this. The alignment holes 12 may penetrate the lower sheet 10.

[0055] As shown in Figure 3, the upper sheet 20 includes an upper sheet inner surface 20a (first sheet inner surface) facing the wick sheet 30, and an upper sheet outer surface 20b (first sheet outer surface) provided on the opposite side from the upper sheet inner surface 20a. The device D described above is attached to this upper sheet outer surface 20b. Furthermore, as shown in Figures 3 and 5, the upper sheet 20 includes an upper sheet groove 70 (first sheet groove) provided on the upper sheet inner surface 20a. Details of the upper sheet groove 70 will be described later.

[0056] As shown in Figure 5, alignment holes 22 may be provided at the four corners of the upper sheet 20. In the example shown in Figure 5, the planar shape of the alignment holes 22 is circular, but it is not limited to this. The alignment holes 22 may penetrate the upper sheet 20.

[0057] As shown in Figure 3, the wick sheet 30 includes a wick sheet lower surface 30a (second main surface) and a wick sheet upper surface 30b (first main surface) located on the opposite side from the wick sheet lower surface 30a. The wick sheet lower surface 30a faces the inner surface 10b of the lower sheet 10. The wick sheet upper surface 30b faces the inner surface 20a of the upper sheet 20.

[0058] The inner surface 10b of the lower sheet and the lower surface 30a of the wick sheet may be permanently joined to each other by thermocompression bonding. Similarly, the inner surface 20a of the upper sheet and the upper surface 30b of the wick sheet may be permanently joined to each other by thermocompression bonding. An example of joining by thermocompression bonding is diffusion bonding. However, the lower sheet 10, the upper sheet 20, and the wick sheet 30 may be joined by other methods such as brazing instead of diffusion bonding.

[0059] Furthermore, the term "permanently joined" is not limited to a strict meaning; it is used to mean that the joining is sufficient to maintain the airtightness of the sealed space 3 during the operation of the vapor chamber 1.

[0060] Furthermore, as shown in Figures 2 and 6, the wick sheet 30 includes a frame portion 32 and a plurality of land portions 33 provided within the frame portion 32. The frame portion 32 and the land portions 33 are parts of the wick sheet 30 where the material remains and is not etched in the etching process described later.

[0061] In the illustrated example, the frame portion 32 is formed in the shape of a rectangular frame in plan view. A steam flow path portion 50 is provided inside this frame portion 32. The steam flow path portion 50 contains the working fluids 2a and 2b. Each land portion 33 is provided inside the frame portion 32, and the steam flow path portion 50 is provided around each land portion 33. As a result, the working steam 2a flows around each land portion 33.

[0062] In the illustrated example, each land portion 33 extends along the X direction (left-right direction in Figure 6) in a plan view, and the planar shape of each land portion 33 is an elongated rectangle. Furthermore, each land portion 33 is arranged along the Y direction (up-down direction in Figure 6), which is perpendicular to the X direction. The land portions 33 may be arranged at a constant interval in the Y direction. The width w1 of each land portion 33 (see Figure 7) may be, for example, 100 μm to 3000 μm. Here, the width w1 of the land portion 33 is the dimension of the land portion 33 in the Y direction, and means the dimension at the position where the through portion 34, which will be described later, exists in the Z direction.

[0063] Here, the X direction is defined as the direction in which the second steam passage 52 of the steam flow channel section 50, which will be described later, extends. The Y direction is defined as the direction perpendicular to the X direction in a plan view. The Z direction is defined as the direction perpendicular to both the X and Y directions, and corresponds to the thickness direction of the wick sheet 30.

[0064] The frame portion 32 and each land portion 33 are diffusion-bonded to the lower sheet 10 and also to the upper sheet 20. This improves the mechanical strength of the vapor chamber 1. The wall surface 53a of the lower steam flow recess 53 and the wall surface 54a of the upper steam flow recess 54, which will be described later, constitute the side walls of the land portion 33. The lower surface 30a and upper surface 30b of the wick sheet may be formed flat over the frame portion 32 and each land portion 33.

[0065] As shown in Figure 6, alignment holes 35 may be provided at the four corners of the wick sheet 30. In the example shown in Figure 6, the planar shape of the alignment holes 35 is circular, but it is not limited to this. The alignment holes 35 may penetrate the wick sheet 30.

[0066] Furthermore, the wick sheet 30 includes a steam passage section 50 through which working steam 2a passes, and a liquid passage section 60 that communicates with the steam passage section 50 and through which working fluid 2b passes.

[0067] The steam passage section 50 is primarily a passage through which the working steam 2a passes. The working fluid 2b may also pass through the steam passage section 50. As shown in Figures 3 and 7, the steam passage section 50 may extend from the lower surface 30a of the wick sheet to the upper surface 30b of the wick sheet and penetrate the wick sheet 30. The steam passage section 50 may be covered by the lower sheet 10 on the lower surface 30a of the wick sheet, and may be covered by the upper sheet 20 on the upper surface 30b of the wick sheet.

[0068] As shown in Figure 6, the steam flow section 50 may include a first steam passage 51 and a plurality of second steam passages 52. The first steam passage 51 is formed between the frame section 32 and the land section 33. The first steam passage 51 is formed continuously inside the frame section 32 and outside the land section 33. The planar shape of the first steam passage 51 is rectangular. The second steam passages 52 are formed between adjacent land sections 33. The second steam passages 52 extend along the X direction. The planar shape of the second steam passages 52 is elongated rectangular. The steam flow section 50 is divided into the first steam passage 51 and the plurality of second steam passages 52 by the plurality of land sections 33.

[0069] In this embodiment, the steam flow path section 50 includes the first steam passage 51, but the steam flow path section 50 does not necessarily have to include the first steam passage 51. That is, the frame section 32 and the land section 33 are arranged adjacent to each other, and there does not need to be a steam passage between the frame section 32 and the land section 33.

[0070] As shown in Figures 3 and 7, the first steam passage 51 and the second steam passage 52 may extend from the lower surface 30a of the wick sheet to the upper surface 30b of the wick sheet and penetrate the wick sheet 30. The first steam passage 51 and the second steam passage 52 include a lower steam passage recess 53 provided in the lower surface 30a of the wick sheet and an upper steam passage recess 54 provided in the upper surface 30b of the wick sheet. The lower steam passage recess 53 and the upper steam passage recess 54 are in communication with each other, and the first steam passage 51 and the second steam passage 52 are formed to extend from the lower surface 30a of the wick sheet to the upper surface 30b of the wick sheet.

[0071] The lower steam passage recess 53 is formed in a concave shape on the wick sheet lower surface 30a by etching the wick sheet 30 from the wick sheet lower surface 30a during the etching process described later. Here, being formed in a concave shape on the wick sheet lower surface 30a means that it is formed to be recessed from the wick sheet lower surface 30a. As a result, the lower steam passage recess 53 has a curved wall surface 53a, as shown in Figure 7. This wall surface 53a defines the lower steam passage recess 53 and, in the cross-section shown in Figure 7, curves so as it proceeds toward the wick sheet upper surface 30b, it approaches the opposing wall surface 53a. As shown in Figures 3 and 7, the working fluid 2b can adhere to this wall surface 53a. This lower steam passage recess 53 constitutes a part (lower half) of the first steam passage 51 and a part (lower half) of the second steam passage 52.

[0072] The upper steam passage recess 54 is formed in a concave shape on the wick sheet upper surface 30b by etching the wick sheet 30 from the wick sheet upper surface 30b during the etching process described later. Here, being formed in a concave shape on the wick sheet upper surface 30b means that it is formed to be recessed from the wick sheet upper surface 30b. As a result, the upper steam passage recess 54 has a curved wall surface 54a, as shown in Figure 7. This wall surface 54a defines the upper steam passage recess 54 and, in the cross-section shown in Figure 7, curves so as it proceeds toward the wick sheet lower surface 30a, it approaches the opposing wall surface 54a. As shown in Figures 3 and 7, the working fluid 2b can adhere to this wall surface 54a. This upper steam passage recess 54 constitutes a part (upper half) of the first steam passage 51 and a part (upper half) of the second steam passage 52.

[0073] As shown in Figure 7, the wall surface 53a of the lower steam passage recess 53 and the wall surface 54a of the upper steam passage recess 54 are connected to form a penetration 34. In the illustrated example, the planar shape of the penetration 34 in the first steam passage 51 is a rectangular frame shape, similar to the first steam passage 51, and the planar shape of the penetration 34 in the second steam passage 52 is an elongated rectangular shape, similar to the second steam passage 52. The penetration 34 may be defined by a ridge formed by the confluence of the wall surface 53a of the lower steam passage recess 53 and the wall surface 54a of the upper steam passage recess 54, which protrude inward. The planar area of ​​the first steam passage 51 may be minimized in this penetration 34, and the planar area of ​​the second steam passage 52 may be minimized. The width w2 (see Figure 7) of the penetration 34 in each steam passage 51, 52 may be, for example, 400 μm to 1600 μm. Here, the width w2 of the penetration 34 of the first steam passage 51 corresponds to the gap between adjacent land portions 33 in the Y direction. Also, the width w2 of the penetration 34 of the second steam passage 52 corresponds to the gap between the frame portion 32 and the land portion 33 in the Y direction (or X direction).

[0074] The position of the through-hole 34 in the Z direction (vertical direction in Figure 7) may be at an intermediate position between the lower surface 30a and the upper surface 30b of the wick sheet. However, it is not limited to this position; it may also be closer to the lower sheet 10 than the intermediate position, or closer to the upper sheet 20 than the intermediate position. The position of the through-hole 34 in the Z direction is arbitrary.

[0075] Furthermore, in the illustrated example, as described above, the cross-sectional shapes of the first steam passage 51 and the second steam passage 52 are formed to include a through-port 34 defined by a ridge that protrudes inward, but this is not limited to this. For example, the cross-sectional shapes of the first steam passage 51 and the second steam passage 52 may be trapezoidal, rectangular, or barrel-shaped.

[0076] The steam passage section 50, including the first steam passage 51 and the second steam passage 52 configured in this way, constitutes a part of the sealed space 3 described above. As shown in Figure 3, the first steam passage 51 and the second steam passage 52 are mainly defined by the lower sheet 10, the upper sheet 20, and the frame portion 32 and land portion 33 of the wick sheet 30 described above. Each steam passage 51 and 52 has a relatively large flow path cross-sectional area to allow the working steam 2a to pass through.

[0077] Here, Figure 3 shows an enlarged view of the first steam passage 51 and the second steam passage 52, etc., to clarify the drawing, and the number and arrangement of these steam passages 51, 52, etc. differ from those in Figures 2, 6 to 10, etc.

[0078] Incidentally, although not shown in the figures, multiple support parts may be provided within the steam flow path section 50 to support the land sections 33 on the frame section 32. Also, multiple connecting parts 38 (see Figures 37 and 38) may be provided to connect adjacent land sections 33. The support parts and connecting parts 38 may be formed so as not to obstruct the flow of working steam 2a diffusing through the steam flow path section 50. For example, they may be positioned closer to one of the lower surface 30a and upper surface 30b of the wick sheet 30, with a space forming a steam flow recess closer to the other. This makes it possible to make the thickness of the support parts and connecting parts 38 thinner than the thickness of the wick sheet 30, and prevents the first steam passage 51 and the second steam passage 52 from being separated in the X and Y directions.

[0079] The liquid flow path section 60 is primarily a flow path through which the working fluid 2b passes. Working vapor 2a may also pass through the liquid flow path section 60. As shown in Figures 3, 6, and 7, the liquid flow path section 60 may be provided on the upper surface 30b of the wick sheet 30. In the illustrated example, the liquid flow path section 60 is provided on the upper surface 30b of the wick sheet in each land section 33. The liquid flow path section 60 constitutes part of the sealed space 3 described above and is in communication with the vapor flow path section 50. The liquid flow path section 60 is configured as a capillary structure (wick) for transporting the working fluid 2b to the evaporation region SR. The liquid flow path section 60 may be formed over the entire upper surface 30b of the wick sheet in each land section 33. In addition, the liquid flow path section 60 may be provided on the upper surface 30b of the wick sheet in the frame section 32.

[0080] As shown in Figure 8, the fluid flow channel section 60 may consist of a plurality of grooves provided on the upper surface 30b of the wick sheet. More specifically, the fluid flow channel section 60 may include a plurality of main fluid flow channel grooves 61 through which the working fluid 2b passes, and a plurality of fluid flow channel connecting grooves 65 that communicate with the main fluid flow channel grooves 61.

[0081] Each liquid channel main groove 61 extends along the X direction, as shown in Figure 8. The liquid channel main groove 61 has a small channel cross-sectional area, primarily to allow the working fluid 2b to flow by capillary action. The channel cross-sectional area of ​​the liquid channel main groove 61 is smaller than the channel cross-sectional area of ​​the steam passages 51 and 52. The liquid channel main groove 61 is configured to transport the working fluid 2b condensed from the working steam 2a to the evaporation region SR. Each liquid channel main groove 61 may be aligned along the Y direction. Each liquid channel main groove 61 may be aligned parallel to each other at a constant interval.

[0082] The liquid flow channel main channel groove 61 may be formed by etching the wick sheet 30 from the upper surface 30b of the wick sheet in an etching process described later. As a result, the liquid flow channel main channel groove 61 may have a curved wall surface 62, as shown in Figure 7. This wall surface 62 defines the liquid flow channel main channel groove 61 and may be concavely curved toward the lower surface 30a of the wick sheet.

[0083] The width w3 (dimension in the Y direction) of the liquid flow channel main groove 61 shown in Figures 7 and 8 is smaller than the width w2 of the penetration portion 34 of the steam passages 51 and 52, and smaller than the width w1 of the land portion 33. The width w3 of the liquid flow channel main groove 61 may be, for example, 5 μm to 150 μm. Here, the width w3 of the liquid flow channel main groove 61 refers to the dimension at the upper surface 30b of the wick sheet. Also, the depth h1 (dimension in the Z direction) of the liquid flow channel main groove 61 shown in Figure 7 may be, for example, 3 μm to 150 μm.

[0084] As shown in Figure 8, each liquid flow channel connecting groove 65 extends along a direction intersecting the X direction. In the illustrated example, each liquid flow channel connecting groove 65 extends along the Y direction and is formed perpendicular to the liquid flow channel main groove 61. Some liquid flow channel connecting grooves 65 connect adjacent liquid flow channel main grooves 61 to each other. Other liquid flow channel connecting grooves 65 connect the first steam passage 51 or the second steam passage 52 to the liquid flow channel main groove 61. That is, the liquid flow channel connecting groove 65 extends from the edge of the land portion 33 in the Y direction to the liquid flow channel main groove 61 adjacent to that edge. In this way, the first steam passage 51 and the liquid flow channel main groove 61 are connected, and the second steam passage 52 and the liquid flow channel main groove 61 are connected.

[0085] The liquid flow channel connecting grooves 65 have a small flow channel cross-sectional area, primarily to allow the working fluid 2b to flow by capillary action. The flow channel cross-sectional area of ​​the liquid flow channel connecting grooves 65 is smaller than the flow channel cross-sectional area of ​​the steam passages 51 and 52. Each liquid flow channel connecting groove 65 may be aligned along the X direction. Each liquid flow channel connecting groove 65 may be aligned parallel to each other at a constant interval.

[0086] The liquid flow channel connecting groove 65 may also be formed by etching, similar to the liquid flow channel main groove 61. As a result, the liquid flow channel connecting groove 65 may have a curved wall surface (not shown) similar to that of the liquid flow channel main groove 61. The width w4 (dimension in the X direction) of the liquid flow channel connecting groove 65 shown in Figure 8 is smaller than the width w2 of the penetration portion 34 of the steam passages 51 and 52, and smaller than the width w1 of the land portion 33. The width w4 of the liquid flow channel connecting groove 65 may be equal to the width w3 of the liquid flow channel main groove 61. However, it is not limited to this, and the width w4 of the liquid flow channel connecting groove 65 may be greater or smaller than the width w3 of the liquid flow channel main groove 61. The depth of the liquid flow channel connecting groove 65 may be equal to the depth h1 of the liquid flow channel main groove 61. However, it is not limited to this, and the depth of the liquid flow channel connecting groove 65 may be deeper or shallower than the depth h1 of the liquid flow channel main groove 61.

[0087] As shown in Figure 8, the liquid flow channel section 60 may have a row of liquid flow channel protrusions 63 provided on the upper surface 30b of the wick sheet. The row of liquid flow channel protrusions 63 is provided between adjacent liquid flow channel main grooves 61. Each row of liquid flow channel protrusions 63 includes a plurality of liquid flow channel protrusions 64 arranged in the X direction. The liquid flow channel protrusions 64 are in contact with the inner surface 20a of the upper sheet. Each liquid flow channel protrusion 64 is formed in a rectangular shape in a plan view, with the X direction being the longitudinal direction. A liquid flow channel main groove 61 is interposed between adjacent liquid flow channel protrusions 64 in the Y direction. A liquid flow channel connecting groove 65 is interposed between adjacent liquid flow channel protrusions 64 in the X direction.

[0088] The liquid channel protrusion 64 is the portion of the wick sheet 30 that remains unetched in the etching process described later. As shown in Figure 8, the planar shape of the liquid channel protrusion 64 (shape at the position of the upper surface 30b of the wick sheet) may be rectangular.

[0089] As shown in Figure 8, the liquid channel protrusions 64 may be arranged in a staggered pattern. More specifically, the liquid channel protrusions 64 of adjacent rows 63 in the Y direction may be offset from each other in the X direction. This offset may be half the arrangement pitch of the liquid channel protrusions 64 in the X direction. The width w5 (dimension in the Y direction) of the liquid channel protrusions 64 shown in Figure 8 may be, for example, 5 μm to 500 μm. Here, the width w5 of the liquid channel protrusions 64 refers to the dimension on the upper surface 30b of the wick sheet. The width w5 of the liquid channel protrusions 64 corresponds to the gap between adjacent main liquid channel grooves 61 in the Y direction. Note that the arrangement of the liquid channel protrusions 64 is not limited to a staggered pattern, and they may be arranged in parallel. In this case, the liquid channel protrusions 64 of adjacent rows 63 in the Y direction are aligned in the X direction as well.

[0090] Furthermore, as shown in Figure 2, the vapor chamber 1 may be provided with an injection section 4 for injecting the working fluid 2b into the sealed space 3. The position of the injection section 4 is arbitrary, but as shown in Figure 2, the injection section 4 may be provided at the negative X-side (left side in Figure 2) edge of the vapor chamber 1. The injection section 4 may have an injection channel 37 formed in the wick sheet 30. After the working fluid 2b is injected, the injection channel 37 may be sealed.

[0091] The materials constituting the lower sheet 10, upper sheet 20, and wick sheet 30 are not particularly limited as long as they have good thermal conductivity. The lower sheet 10, upper sheet 20, and wick sheet 30 may, for example, contain copper or a copper alloy. In this case, the thermal conductivity of each sheet 10, 20, and 30 can be increased, and the heat dissipation efficiency of the vapor chamber 1 can be increased. In addition, if pure water is used as the working fluid 2a and 2b, corrosion can be prevented. Furthermore, if the desired heat dissipation efficiency can be obtained and corrosion can be prevented, other metal materials such as aluminum or titanium, or other metal alloy materials such as stainless steel may be used for these sheets 10, 20, and 30.

[0092] The thickness t1 of the vapor chamber 1 shown in Figure 3 may be, for example, 100 μm to 1000 μm. By making the thickness t1 of the vapor chamber 1 100 μm or more, the vapor flow path 50 can be properly secured and the vapor chamber 1 can function properly. On the other hand, by making the thickness t1 1000 μm or less, it is possible to suppress the thickness of the vapor chamber 1.

[0093] The thickness t2 of the lower sheet 10 shown in Figure 3 may be, for example, 6 μm to 100 μm. By setting the thickness t2 of the lower sheet 10 to 6 μm or more, the mechanical strength of the lower sheet 10 can be ensured. On the other hand, by setting the thickness t2 of the lower sheet 10 to 100 μm or less, the thickness of the vapor chamber 1 can be suppressed. Similarly, the thickness t3 of the upper sheet 20 shown in Figure 3 may be set in the same way as the thickness t2 of the lower sheet 10. The thickness t3 of the upper sheet 20 and the thickness t2 of the lower sheet 10 may be different from each other.

[0094] The thickness t4 of the wick sheet 30 shown in Figure 3 may be, for example, 50 μm to 400 μm. By setting the thickness t4 of the wick sheet 30 to 50 μm or more, the vapor flow path 50 can be properly secured, and the vapor chamber 1 can function properly. On the other hand, by setting it to 400 μm or less, it is possible to suppress the thickness of the vapor chamber 1.

[0095] As described above, the upper sheet 20 of the vapor chamber 1 according to this embodiment includes an upper sheet groove 70 provided on the inner surface 20a of the upper sheet. As shown in Figures 5, 9, and 10, the upper sheet 20 may include a plurality of upper sheet grooves 70.

[0096] Figure 10 is a partially enlarged top view showing the wick sheet 30 and the upper sheet 20 overlapping. As shown in Figure 10, the upper sheet groove 70 is located in a position that overlaps with the steam passages 51 and 52 in a plan view. In the illustrated example, the upper sheet groove 70 is located in a position that overlaps with the second steam passage 52 in a plan view, and the entire upper sheet groove 70 overlaps with the second steam passage 52 in a plan view. It can also be said that the upper sheet groove 70 is located between adjacent land portions 33 in a plan view. The upper sheet groove 70 may also be located in a position that overlaps with the first steam passage 51 in a plan view. In this case, the upper sheet groove 70 may be located in a position that overlaps with the portion of the first steam passage 51 that extends in the X direction in a plan view.

[0097] As shown in Figures 9 and 10, the upper seat groove 70 extends along a direction intersecting the X direction. In the illustrated example, the upper seat groove 70 extends along the Y direction perpendicular to the X direction. The planar shape of the upper seat groove 70 is an elongated rectangle. The upper seat groove 70 includes a first end 71 and a second end 72 provided at both ends in the Y direction. The first end 71 constitutes the positive Y-side (upper side in Figures 9 and 10) end of the upper seat groove 70, and the second end 72 constitutes the negative Y-side (lower side in Figures 9 and 10) end of the upper seat groove 70. In the illustrated example, both the first end 71 and the second end 72 are provided in a position that overlaps with the second steam passage 52 in a plan view.

[0098] As shown in Figures 9 and 10, each upper sheet groove 70 may be aligned along the X direction. Each upper sheet groove 70 may be aligned parallel to one another with a certain interval between them.

[0099] The upper sheet groove 70 may be formed by etching the upper sheet 20 from the inner surface 20a of the upper sheet. As a result, the upper sheet groove 70 may have a curved wall surface 73, as shown in Figure 11. This wall surface 73 defines the upper sheet groove 70 and may be concavely curved from the inner surface 20a of the upper sheet toward the outer surface 20b of the upper sheet. In the example shown in Figure 11, the cross-sectional shape of the upper sheet groove 70 is semicircular.

[0100] The upper seat groove 70 has a small flow path cross-sectional area, primarily to allow the working fluid 2b to flow by capillary action. The upper seat groove 70 is a groove with a smaller flow path cross-sectional area than the steam passages 51 and 52. The upper seat groove 70 facilitates the movement of the working fluid 2b between the steam passages 51 and 52 and the liquid flow path section 60. The flow path cross-sectional area of ​​the upper seat groove 70 may be equal to the flow path cross-sectional area of ​​the main liquid flow path groove 61. However, it is not limited to this, and the flow path cross-sectional area of ​​the upper seat groove 70 may be smaller than the flow path cross-sectional area of ​​the main liquid flow path groove 61. In this case, the capillary action of the upper seat groove 70 imparts a propulsive force to the working fluid 2b from the liquid flow path section 60 towards the upper seat groove 70, allowing the working fluid 2b in the liquid flow path section 60 to move quickly through the upper seat groove 70 to the steam passages 51 and 52. Furthermore, the flow path cross-sectional area of ​​the upper seat groove 70 may be larger than the flow path cross-sectional area of ​​the main liquid flow path groove 61. In this case, the capillary action of the upper seat groove 70 provides a propulsive force to the working fluid 2b from the upper seat groove 70 toward the liquid flow path section 60, allowing the working fluid 2b in the steam passages 51 and 52 to move quickly through the upper seat groove 70 to the liquid flow path section 60.

[0101] The length L1 (dimension in the Y direction) of the upper sheet groove 70 shown in Figure 9 may be greater than the width w3 of the main fluid channel groove 61 (see Figure 7) and may also be greater than the width w5 of the fluid channel protrusion 64 (see Figure 8). If the upper sheet groove 70 has a flow channel cross-sectional area smaller than the flow channel cross-sectional area of ​​the steam passages 51 and 52, the length L1 of the upper sheet groove 70 may be greater than the width w6 of the upper sheet groove 70, which will be described later. The length L1 of the upper sheet groove 70 may be greater than, for example, 5 μm.

[0102] The width w6 (dimension in the X direction) of the upper sheet groove 70 shown in Figures 9 and 11 may be equal to the width w3 (see Figure 7) of the liquid flow channel main groove 61. However, it is not limited to this, and the width w6 of the upper sheet groove 70 may be smaller or larger than the width w3 of the liquid flow channel main groove 61. The width w6 (dimension in the X direction) of the upper sheet groove 70 may be, for example, 5 μm to 150 μm. Here, the width w6 of the upper sheet groove 70 refers to the dimension on the inner surface 20a of the upper sheet.

[0103] The depth h2 (dimension in the Z direction) of the upper seat groove 70 shown in Figure 11 may be equal to the depth h1 (see Figure 7) of the main fluid channel groove 61. However, it is not limited to this, and the depth h2 of the upper seat groove 70 may be deeper or shallower than the depth h1 of the main fluid channel groove 61. The depth h2 of the upper seat groove 70 may be, for example, 3 μm to 150 μm.

[0104] The gap w7 between adjacent upper seat grooves 70 in the X direction shown in Figure 11 may be equal to the gap between adjacent liquid flow channel main grooves 61 in the Y direction, i.e., the width w5 of the liquid flow channel protrusion 64 (see Figure 8), or it may be smaller than the width w5 of the liquid flow channel protrusion 64. In this case, more upper seat grooves 70 can be arranged, and a sufficient amount of working fluid 2b can be circulated between the steam passages 51, 52 and the liquid flow channel section 60. However, it is not limited to this, and the gap w7 between adjacent upper seat grooves 70 in the X direction may be larger than the width w5 of the liquid flow channel protrusion 64. The gap w7 between adjacent upper seat grooves 70 in the X direction may be, for example, 3 μm to 500 μm.

[0105] In this embodiment, the planar shape of the upper seat groove 70 is an elongated rectangular shape, and the cross-sectional shape of the upper seat groove 70 is a semicircular shape, but the shape of the upper seat groove 70 is not limited to this, and is arbitrary.

[0106] Furthermore, in this embodiment, the upper seat groove 70 is provided over the entire region that overlaps with the second steam passage 52 in a plan view, but it is not limited to this, and the upper seat groove 70 may be provided only in a part of the region that overlaps with the steam passages 51 and 52 in a plan view. For example, the upper seat groove 70 may be located only in the evaporation region SR. Or, for example, the upper seat groove 70 may be located only in the condensation region CR.

[0107] Next, a method for manufacturing the vapor chamber 1 having the above configuration will be described.

[0108] First, as part of the sheet preparation process, sheets 10, 20, and 30 are prepared. The sheet preparation process includes a lower sheet preparation process for preparing the lower sheet 10, an upper sheet preparation process for preparing the upper sheet 20, and a wick sheet preparation process for preparing the wick sheet 30.

[0109] In the lower sheet preparation process, first, a lower sheet base material having the desired thickness is prepared. The lower sheet base material may be a rolled material. Next, the lower sheet 10 having the desired planar shape is formed by etching the lower sheet base material. Alternatively, the lower sheet 10 having the desired planar shape may be formed by press working the lower sheet base material. In this way, a lower sheet 10 as shown in Figure 4 can be prepared.

[0110] In the upper sheet preparation process, similar to the lower sheet preparation process, first, an upper sheet base material having the desired thickness is prepared. The upper sheet base material may be a rolled material. Next, the upper sheet 20 having the desired planar shape is formed by etching the upper sheet base material. This etching creates the upper sheet groove 70 described above on the upper sheet 20. Alternatively, the upper sheet 20 having the desired planar shape may be formed by press working the upper sheet base material. Furthermore, the upper sheet groove 70 may be formed by cutting the upper sheet base material. In this way, an upper sheet 20 as shown in Figure 5 can be prepared.

[0111] The wick sheet preparation process may include a material sheet preparation process for preparing a metal material sheet and an etching process for etching the metal material sheet. First, in the material sheet preparation process, a flat metal material sheet having a desired thickness is prepared. The metal material sheet may be a rolled material. Subsequently, in the etching process, the metal material sheet is etched from a first material surface and a second material surface to form a wick sheet 30 having a desired planar shape and vapor channel sections 50 and liquid channel sections 60. In this way, a wick sheet 30 as shown in Figure 6 can be prepared.

[0112] In this etching process, the first material surface and the second material surface of the metal material sheet may be etched simultaneously. However, this is not the only option, and the etching of the first material surface and the second material surface may be performed as separate processes. Furthermore, the vapor channel section 50 and the liquid channel section 60 may be formed by etching simultaneously, or they may be formed by etching in separate processes. For the etching solution, for example, an iron chloride-based etching solution such as an aqueous solution of ferric chloride, or a copper chloride-based etching solution such as an aqueous solution of copper chloride may be used.

[0113] After the sheet preparation process, the lower sheet 10, upper sheet 20, and wick sheet 30 are joined together in a joining process. First, the lower sheet 10, wick sheet 30, and upper sheet 20 are stacked in this order. At this time, the alignment holes 12 of the lower sheet 10, the alignment holes 35 of the wick sheet 30, and the alignment holes 22 of the upper sheet 20 may be used to align each sheet 10, 20, and 30. Next, the lower sheet 10, wick sheet 30, and upper sheet 20 are temporarily fixed in place. For example, each sheet 10, 20, and 30 may be temporarily fixed in place by spot welding or laser welding. Then, the lower sheet 10, wick sheet 30, and upper sheet 20 are permanently joined by thermocompression bonding. For example, each sheet 10, 20, and 30 may be joined by diffusion bonding.

[0114] Following the joining process, the working fluid 2b is injected into the sealed space 3 from the injection channel 37 of the injection section 4 as an injection process.

[0115] Following the injection process, the injection channel 37 is sealed as a sealing process. This blocks communication between the sealed space 3 and the outside, thereby sealing the sealed space 3. As a result, a sealed space 3 containing the working fluid 2b can be obtained, and leakage of the working fluid 2b from the sealed space 3 to the outside can be prevented.

[0116] As described above, the vapor chamber 1 according to this embodiment can be obtained.

[0117] Next, we will explain how the vapor chamber 1 operates, that is, how device D is cooled.

[0118] The vapor chamber 1 obtained as described above is installed inside a housing H of a mobile terminal or the like. A device D, such as a CPU, which is the device to be cooled, is attached to the outer surface 20b of the upper sheet 20 (or the vapor chamber 1 is attached to the device D). The working fluid 2b in the sealed space 3 adheres to the walls of the sealed space 3 due to its surface tension, namely the wall surface 53a of the lower vapor flow recess 53, the wall surface 54a of the upper vapor flow recess 54, the wall surface 62 of the main liquid flow channel groove 61 of the liquid flow channel section 60, and the wall surface of the liquid flow channel connecting groove 65. The working fluid 2b may also adhere to the portion of the inner surface 10b of the lower sheet 10 that is exposed to the lower vapor flow recess 53. Furthermore, the working fluid 2b may also adhere to the portion of the inner surface 20a of the upper sheet 20 that is exposed to the upper vapor flow recess 54, the main liquid flow channel groove 61, and the liquid flow channel connecting groove 65.

[0119] When device D generates heat in this state, the working fluid 2b present in the evaporation region SR (see Figure 6) receives heat from device D. The received heat is absorbed as latent heat, causing the working fluid 2b to evaporate (vaporize) and generate working vapor 2a. The generated working vapor 2a diffuses within the first vapor passage 51 and the second vapor passage 52 that constitute the sealed space 3. More specifically, the working vapor 2a diffuses in the X direction mainly in the portion of the first vapor passage 51 that extends in the X direction and in the second vapor passage 52 (see the solid arrow in Figure 6).

[0120] Then, the working steam 2a in each steam passage 51 and 52 leaves the evaporation region SR and is transported to the relatively lower temperature condensation region CR (the right-hand portion in Figure 6). In the condensation region CR, the working steam 2a is cooled mainly by radiating heat to the lower sheet 10. The heat absorbed by the lower sheet 10 from the working steam 2a is transferred to the outside air via the housing member Ha (see Figure 3).

[0121] The working steam 2a loses the latent heat absorbed in the evaporation region SR by radiating heat to the lower sheet 10 in the condensation region CR. As a result, the working steam 2a condenses, and working fluid 2b is generated. The generated working fluid 2b adheres to the walls 53a, 54a of the steam flow channel recesses 53, 54, and to the inner surface 10b of the lower sheet 10 and the inner surface 20a of the upper sheet 20. Here, the working fluid 2b continues to evaporate in the evaporation region SR. Therefore, the working fluid 2b present in the region of the liquid flow channel 60 other than the evaporation region SR (i.e., the condensation region CR) is transported toward the evaporation region SR by the capillary action of the main liquid flow channel grooves 61 (see dashed arrows in Figure 6). As a result, the working fluid 2b adhering to the walls 53a, 54a, the inner surface 10b of the lower sheet, and the inner surface 20a of the upper sheet moves to the liquid flow channel 60, passes through the liquid flow channel connecting groove 65, and enters the main liquid flow channel groove 61. In this way, the working fluid 2b is filled into each main channel groove 61 and each connecting channel groove 65. The filled working fluid 2b gains a propulsive force toward the evaporation region SR through the capillary action of each main channel groove 61 and is smoothly transported toward the evaporation region SR.

[0122] In the liquid flow channel section 60, each liquid flow channel main channel groove 61 is connected to an adjacent liquid flow channel main channel groove 61 via a corresponding liquid flow channel connecting groove 65. As a result, the working fluid 2b moves between adjacent liquid flow channel main channel grooves 61, suppressing the occurrence of dryout in the liquid flow channel main channel groove 61. Therefore, capillary action is imparted to the working fluid 2b in each liquid flow channel main channel groove 61, and the working fluid 2b is smoothly transported toward the evaporation region SR.

[0123] The working fluid 2b, having reached the evaporation region SR, receives heat again from the device D and evaporates. The working vapor 2a evaporated from the working fluid 2b moves through the liquid flow channel connecting groove 65 in the evaporation region SR to the lower vapor flow channel recess 53 and the upper vapor flow channel recess 54, which have larger flow channel cross-sectional areas. The working vapor 2a then diffuses within each vapor flow channel recess 53 and 54. In this way, the working fluids 2a and 2b recirculate within the sealed space 3 while repeatedly undergoing phase changes, i.e., evaporation and condensation. As a result, the heat from the device D is diffused and released. Consequently, the device D is cooled.

[0124] In this embodiment, an upper sheet groove 70 is provided on the inner surface 20a of the upper sheet 20. The upper sheet groove 70 is located in a position that overlaps with the steam passages 51 and 52 in a plan view, and extends along a direction intersecting the X direction. As a result, in the condensation region CR, the working fluid 2b can smoothly move from the steam passages 51 and 52 to the liquid flow channel section 60 through the upper sheet groove 70, and can smoothly enter the main liquid flow channel groove 61. Also, in the evaporation region SR, the working fluid 2b can move from the liquid flow channel section 60 to the steam passages 51 and 52 through the upper sheet groove 70. Therefore, the working fluid 2b that has moved to the steam passages 51 and 52 can effectively absorb heat from the device D and effectively cool the device D.

[0125] As described above, according to this embodiment, the upper sheet 20 includes an upper sheet groove 70 provided on the inner surface 20a of the upper sheet, which is located in a position that overlaps with the steam passages 51 and 52 in a plan view, and extends along a direction intersecting the X direction. This facilitates the exchange of the working fluid 2b between the steam passages 51 and 52 and the liquid passage section 60. As a result, the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be promoted. Consequently, the heat dissipation efficiency of the vapor chamber 1 can be improved.

[0126] Furthermore, in this embodiment, the flow path cross-sectional area of ​​the upper seat groove 70 may be smaller than the flow path cross-sectional area of ​​the main fluid flow path groove 61. This allows the capillary action of the upper seat groove 70 to impart a propulsive force to the working fluid 2b from the fluid flow path section 60 towards the upper seat groove 70, enabling the working fluid 2b in the fluid flow path section 60 to move quickly through the upper seat groove 70 to the vapor passages 51 and 52. Therefore, when such an upper seat groove 70 is placed in the evaporation region SR, the movement of the working fluid 2b from the fluid flow path section 60 to the vapor passages 51 and 52 in the evaporation region SR can be effectively promoted. As a result, the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0127] Furthermore, in this embodiment, the flow path cross-sectional area of ​​the upper seat groove 70 may be larger than the flow path cross-sectional area of ​​the main fluid flow path groove 61. This allows the capillary action of the upper seat groove 70 to impart a propulsive force to the working fluid 2b from the upper seat groove 70 toward the fluid flow path section 60, thereby allowing the working fluid 2b in the vapor passages 51 and 52 to move quickly through the upper seat groove 70 to the fluid flow path section 60. For this reason, when such an upper seat groove 70 is placed in the condensation region CR, the movement of the working fluid 2b from the vapor passages 51 and 52 toward the fluid flow path section 60 in the condensation region CR can be effectively promoted. As a result, the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0128] Furthermore, according to this embodiment, the liquid flow channel 60 is provided on the upper surface 30b of the wick sheet. As described above, the upper sheet groove 70 is provided on the inner surface 20a of the upper sheet facing the upper surface 30b of the wick sheet. As a result, the working fluid 2b that has flowed through the upper sheet groove 70 can move smoothly to the vapor passages 51, 52 or the liquid flow channel 60. Therefore, the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0129] In the embodiment described above, an example was described in which the liquid flow channel 60 is provided on the upper surface 30b of the wick sheet. However, the invention is not limited to this, and as shown in Figure 12, the liquid flow channel 60 may be provided on the lower surface 30a of the wick sheet.

[0130] Even in such a case, the working fluid 2b can flow from the liquid flow channel section 60 along the wall surface 53a of the lower vapor flow channel recess 53 and the wall surface 54a of the upper vapor flow channel recess 54, through the upper seat groove 70, and move to the vapor passages 51 and 52. Alternatively, the working fluid 2b can flow from the vapor passages 51 and 52 through the upper seat groove 70, along the wall surface 53a of the lower vapor flow channel recess 53 and the wall surface 54a of the upper vapor flow channel recess 54, and move to the liquid flow channel section 60. This promotes the recirculation of the working fluids 2a and 2b within the vapor chamber 1.

[0131] Furthermore, in the embodiment described above, as shown in Figure 13, the upper seat groove 70 may be positioned in a location corresponding to the liquid flow channel connecting groove 65 located on the side of the steam passages 51 and 52 in the liquid flow channel section 60. That is, as shown in Figure 13, the upper seat groove 70 may be positioned in the same location as the liquid flow channel connecting groove 65 located on the side of the steam passages 51 and 52 in the liquid flow channel section 60 in the X direction, with the first end 71 or second end 72 facing the liquid flow channel connecting groove 65 in the Y direction. Also, as shown in Figure 13, the upper seat groove 70 does not have to be positioned in any other location in the X direction. In this case, by reducing the number of upper seat grooves 70, it is possible to effectively promote the flow of working fluid 2b between the steam passages 51 and 52 and the liquid flow channel section 60 while suppressing a decrease in the mechanical strength of the upper seat 20.

[0132] Furthermore, in the above-described embodiment, an example was given in which the planar shape of the upper seat groove 70 is an elongated rectangular shape (see Figure 9). However, it is not limited to this, and for example, as shown in Figure 14, the planar shape of the upper seat groove 70 may be an elongated shape that extends in the Y direction and has rounded ends (first end 71 and second end 72) in the Y direction. Also, for example, as shown in Figure 15, the planar shape of the upper seat groove 70 may be an elongated ellipse that extends in the Y direction. Also, for example, as shown in Figure 16, the planar shape of the upper seat groove 70 may be a bead-like shape in which multiple circles partially overlap and are connected in the Y direction. Thus, the planar shape of the upper seat groove 70 is arbitrary.

[0133] Furthermore, in the above-described embodiment, an example was given in which the cross-sectional shape of the upper seat groove 70 is semicircular (see Figure 11). However, it is not limited to this, and for example, as shown in Figure 17, the cross-sectional shape of the upper seat groove 70 may be triangular. Also, for example, as shown in Figure 18, the cross-sectional shape of the upper seat groove 70 may be rectangular. Also, for example, as shown in Figure 19, the cross-sectional shape of the upper seat groove 70 may be trapezoidal. Also, for example, as shown in Figure 20, the cross-sectional shape of the upper seat groove 70 may be a partial circle with a width wider on the inside than the opening. Thus, the cross-sectional shape of the upper seat groove 70 is arbitrary as long as it has a flow path cross-sectional area smaller than the flow path cross-sectional area of ​​the steam passages 51 and 52.

[0134] (Second Embodiment) Next, a vapor chamber and electronic equipment according to a second embodiment of the present disclosure will be described with reference to Figures 21 and 22.

[0135] In the second embodiment shown in Figures 21 and 22, the first sheet groove is provided extending to a position that overlaps with the liquid flow path in a plan view, and is provided so as to traverse the steam passage in a direction intersecting the first direction. The main difference is that the other configurations are substantially the same as those of the first embodiment shown in Figures 1 to 20. In Figures 21 and 22, the same reference numerals are used for parts that are the same as those of the first embodiment shown in Figures 1 to 20, and detailed descriptions are omitted.

[0136] In this embodiment, as shown in Figure 21, the upper seat groove 70 is provided in a position that overlaps with the liquid flow channel 60 in a plan view. That is, the upper seat groove 70 also overlaps with the land portion 33 in a plan view. As shown in Figure 21, the upper seat groove 70 may also overlap with the main liquid flow channel groove 61 in a plan view.

[0137] Furthermore, in this embodiment, the upper seat groove 70 is provided so as to traverse the steam passages 51 and 52 in a direction intersecting the X direction. In the example shown in Figure 21, the upper seat groove 70 is provided so as to traverse the second steam passage 52 in the Y direction. The first end 71 and the second end 72 of the upper seat groove 70 are provided in positions that overlap with the land portion 33 in a plan view. More specifically, the first end 71 is provided in a position that overlaps with one land portion 33 in a plan view, and the second end 72 is provided in a position that overlaps with another land portion 33 adjacent to the said land portion 33 in a plan view.

[0138] As described above, according to this embodiment, the upper seat groove 70 is provided in a position that overlaps with the liquid flow channel section 60 in a plan view. This effectively promotes the movement of the working fluid 2b between the steam passages 51 and 52 and the liquid flow channel section 60. Therefore, when such an upper seat groove 70 is placed in the evaporation region SR, the movement of the working fluid 2b from the liquid flow channel section 60 to the steam passages 51 and 52 in the evaporation region SR can be effectively promoted. Furthermore, in the event of a rapid temperature rise, the working steam 2a evaporated from the working fluid 2b in the liquid flow channel section 60 can be quickly moved to the steam passages 51 and 52 through the upper seat groove 70, effectively promoting the movement of the working steam 2a from the liquid flow channel section 60 to the steam passages 51 and 52 in the evaporation region SR. Moreover, if the flow channel cross-sectional area of ​​the upper seat groove 70 is larger than the flow channel cross-sectional area of ​​the main liquid flow channel groove 61, the movement of the working steam 2a from the liquid flow channel section 60 to the steam passages 51 and 52 in the evaporation region SR can be promoted even more effectively. As a result, the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0139] Furthermore, according to this embodiment, the upper seat groove 70 is provided so as to traverse the steam passages 51 and 52 in a direction intersecting the first direction. This makes it possible to equalize the amount of working fluid 2b moving to each liquid flow channel section 60 provided in adjacent land sections 33, for example. As a result, it is possible to suppress the uneven distribution of a large amount of working fluid 2b in a particular liquid flow channel section 60. This improves the transport efficiency of the working fluid 2b and further promotes the recirculation of working fluids 2a and 2b within the vapor chamber 1.

[0140] In the embodiment described above, an example was described in which the first end 71 and the second end 72 of the upper seat groove 70 are located in positions that overlap with the land portion 33 in a plan view. However, the invention is not limited to this, and for example, as shown in Figure 22, the upper seat groove 70 may be provided so as to traverse the land portion 33 in a direction intersecting the X direction. In the example shown in Figure 22, the upper seat groove 70 extends linearly along the Y direction so as to traverse the steam passages 51, 52 and the land portion 33 in a plan view.

[0141] Even in such cases, the movement of the working fluid 2b between the steam passages 51 and 52 and the liquid passage section 60 can be effectively promoted. Therefore, when such an upper seat groove 70 is placed in the evaporation region SR, the movement of the working fluid 2b from the liquid passage section 60 to the steam passages 51 and 52 in the evaporation region SR can be effectively promoted. Furthermore, in the event of a rapid temperature rise, the working vapor 2a evaporated from the working fluid 2b in the liquid passage section 60 can be quickly moved to the steam passages 51 and 52 through the upper seat groove 70, effectively promoting the movement of the working vapor 2a from the liquid passage section 60 to the steam passages 51 and 52 in the evaporation region SR. Moreover, if the cross-sectional area of ​​the flow path of the upper seat groove 70 is larger than the cross-sectional area of ​​the main flow path groove 61 of the liquid passage, the movement of the working vapor 2a from the liquid passage section 60 to the steam passages 51 and 52 in the evaporation region SR can be promoted even more effectively. As a result, the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted. Furthermore, the amount of working fluid 2b moving to each fluid channel section 60 can be made uniform, preventing a large amount of working fluid 2b from being concentrated in a particular fluid channel section 60. As a result, the transport efficiency of the working fluid 2b can be improved, and the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0142] (Third embodiment) Next, a vapor chamber and electronic equipment according to a third embodiment of this disclosure will be described with reference to Figure 23.

[0143] In the third embodiment shown in Figure 23, the main difference is that the first sheet groove includes a first end portion located in a position overlapping with the steam passage in a plan view, and a second end portion located in a position overlapping with the liquid flow path in a plan view. The other configurations are substantially the same as those of the second embodiment shown in Figures 21 and 22. In Figure 23, the same reference numerals are used for parts identical to those of the second embodiment shown in Figures 21 and 22, and detailed descriptions are omitted.

[0144] In this embodiment, as shown in Figure 23, the upper seat groove 70 includes a first end 71 located at a position overlapping with the steam passages 51 and 52 in a plan view, and a second end 72 located at a position overlapping with the liquid flow channel 60 in a plan view. Here, the first end 71 is defined as the end on the side that overlaps with the steam passages 51 and 52 in a plan view, out of the two ends in a direction intersecting the X direction, and the second end 72 is defined as the end on the side that overlaps with the liquid flow channel 60 in a plan view, out of the two ends in a direction intersecting the X direction. In the example shown in Figure 23, the first end 71 overlaps with the second steam passage 52 in a plan view, and the second end 72 overlaps with the main liquid flow channel groove 61 in a plan view.

[0145] Furthermore, as shown in Figure 23, the upper sheet grooves 70 may be provided at positions that overlap with the positive Y-side edge of the land portion 33 in a plan view, and at positions that overlap with the negative Y-side edge of the land portion 33 in a plan view. At the positions that overlap with the positive Y-side edge of the land portion 33 in a plan view, each upper sheet groove 70 may be aligned along the X-direction. Also, at the positions that overlap with the negative Y-side edge of the land portion 33 in a plan view, each upper sheet groove 70 may be aligned along the X-direction.

[0146] As described above, according to this embodiment, the upper seat groove 70 includes a first end portion 71 provided in a position that overlaps with the steam passages 51 and 52 in a plan view, and a second end portion 72 provided in a position that overlaps with the liquid passage portion 60 in a plan view. This effectively promotes the movement of the working fluid 2b between the steam passages 51 and 52 and the liquid passage portion 60. Therefore, when such an upper seat groove 70 is placed in the evaporation region SR, the movement of the working fluid 2b from the liquid passage portion 60 to the steam passages 51 and 52 in the evaporation region SR can be effectively promoted. Furthermore, in the event of a rapid temperature rise, the working steam 2a evaporated from the working fluid 2b in the liquid passage portion 60 can be quickly moved to the steam passages 51 and 52 through the upper seat groove 70, effectively promoting the movement of the working steam 2a from the liquid passage portion 60 to the steam passages 51 and 52 in the evaporation region SR. Furthermore, if the flow path cross-sectional area of ​​the upper seat groove 70 is larger than the flow path cross-sectional area of ​​the main liquid flow path groove 61, the movement of working vapor 2a from the liquid flow path section 60 to the vapor passages 51 and 52 in the evaporation region SR can be promoted even more effectively. As a result, the reflux of working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0147] (Fourth embodiment) Next, a vapor chamber and electronic equipment according to a fourth embodiment of this disclosure will be described with reference to Figure 24.

[0148] In the fourth embodiment shown in Figure 24, the main difference is that the plurality of first sheet grooves include first sheet grooves that traverse the steam passage in a direction intersecting the first direction, and first sheet grooves that include a first end located at a position overlapping the steam passage in a plan view and a second end located at a position overlapping the liquid flow section in a plan view. The other configurations are substantially the same as those of the second embodiment shown in Figure 21. In Figure 24, the same reference numerals are used for parts that are the same as those in the second embodiment shown in Figure 21, and detailed descriptions are omitted.

[0149] In this embodiment, as shown in Figure 24, the multiple upper seat grooves 70, 70' include an upper seat groove 70 provided so as to traverse the steam passages 51, 52 in a direction intersecting the X direction, and an upper seat groove 70' including a first end 71' provided at a position overlapping with the steam passages 51, 52 in a plan view, and a second end 72' provided at a position overlapping with the liquid flow channel 60 in a plan view.

[0150] In the example shown in Figure 24, the upper seat groove 70 is provided so as to traverse the second steam passage 52 in the Y direction. The first end 71 and the second end 72 of the upper seat groove 70 are provided in positions that overlap with the land portions 33 in a plan view. More specifically, the first end 71 is provided in a position that overlaps with one land portion 33 in a plan view, and the second end 72 is provided in a position that overlaps with another land portion 33 adjacent to the said land portion 33 in a plan view.

[0151] Furthermore, in the example shown in Figure 24, the first end 71' of the upper seat groove 70' overlaps with the second steam passage 52 in a plan view, and the second end 72' of the upper seat groove 70' overlaps with the main liquid flow channel groove 61 in a plan view.

[0152] As shown in Figure 24, the upper sheet groove 70' may be provided at a position that coincides with the positive Y-side edge of one land portion 33 (for example, a land portion 33 located in the central part of Figure 24) in a plan view, and at a position that coincides with the negative Y-side edge of the said land portion 33 in a plan view. At the position that coincides with the positive Y-side edge of the said land portion 33 in a plan view, the upper sheet groove 70 and the upper sheet groove 70' may be arranged alternately in the X direction. Furthermore, even in a plan view, at a position that overlaps with the negative edge of the land portion 33 in the Y direction, the upper sheet groove 70 and the upper sheet groove 70' may be arranged alternately in the X direction.

[0153] On the other hand, as shown in Figure 24, the upper sheet groove 70' does not have to be provided at positions where it overlaps with the positive Y-direction edge of other land portions 33 adjacent to the land portion 33 in a plan view (for example, the land portions 33 located on the lower and upper sides in Figure 24), or at positions where it overlaps with the negative Y-direction edge of the other land portion 33 in a plan view. At positions where it overlaps with the positive Y-direction edge of the other land portion 33 in a plan view, each upper sheet groove 70 may be aligned along the X-direction. Also, at positions where it overlaps with the negative Y-direction edge of the other land portion 33 in a plan view, each upper sheet groove 70 may be aligned alternately in the X-direction.

[0154] As described above, according to this embodiment, the multiple upper seat grooves 70, 70' include an upper seat groove 70 provided so as to traverse the steam passages 51, 52 in a direction intersecting the X direction, and an upper seat groove 70' including a first end 71' provided at a position overlapping with the steam passages 51, 52 in a plan view, and a second end 72' provided at a position overlapping with the liquid flow channel 60 in a plan view. This effectively facilitates the movement of the working fluid 2b between the steam passages 51, 52 and the liquid flow channel 60. Therefore, when such upper seat grooves 70 are arranged in the evaporation region SR, the movement of the working fluid 2b from the liquid flow channel 60 to the steam passages 51, 52 in the evaporation region SR can be effectively facilitated. Furthermore, in the event of a rapid temperature rise, the working vapor 2a evaporated from the working fluid 2b within the liquid flow channel 60 can be quickly moved through the upper seat groove 70 to the steam passages 51 and 52, effectively promoting the movement of the working vapor 2a from the liquid flow channel 60 to the steam passages 51 and 52 in the evaporation region SR. Moreover, if the flow channel cross-sectional area of ​​the upper seat groove 70 is larger than the flow channel cross-sectional area of ​​the main flow channel groove 61, the movement of the working vapor 2a from the liquid flow channel 60 to the steam passages 51 and 52 in the evaporation region SR can be promoted even more effectively. As a result, the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0155] In particular, according to this embodiment, the flow of working fluid 2b between the steam passages 51 and 52 and the liquid flow channel 60 provided in one land section 33 can be promoted. This allows the working fluid 2b to be unevenly distributed among the liquid flow channel sections 60. For example, a larger amount of working fluid 2b can be moved to a specific liquid flow channel section 60 that has a higher capacity to transport working fluid 2b than the other liquid flow channel sections 60. As a result, the transport efficiency of the working fluid 2b can be improved, and the recirculation of working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0156] (Fifth embodiment) Next, a vapor chamber and electronic equipment according to a fifth embodiment of this disclosure will be described with reference to Figure 25.

[0157] In the fifth embodiment shown in Figure 25, the main difference is that the first sheet groove is formed such that the flow path cross-sectional area decreases from the second end to the first end; the other configurations are substantially the same as those of the third embodiment shown in Figure 23. In Figure 25, the same reference numerals are used for parts identical to those in the third embodiment shown in Figure 23, and detailed descriptions are omitted.

[0158] In this embodiment, as shown in Figure 25, the upper seat groove 70 is formed such that the flow path cross-sectional area decreases from the second end 72 to the first end 71. That is, the upper seat groove 70 is formed to taper from the second end 72 to the first end 71. For example, the upper seat groove 70 may be formed such that the width w6 of the upper seat groove 70 decreases from the second end 72 to the first end 71. Alternatively, the upper seat groove 70 may be formed such that the depth h2 of the upper seat groove 70 becomes shallower from the second end 72 to the first end 71.

[0159] As described above, according to this embodiment, the upper seat groove 70 is formed such that the flow path cross-sectional area decreases from the second end 72 to the first end 71. As a result, the capillary action of the upper seat groove 70 imparts a propulsive force to the working fluid 2b from the liquid flow path section 60 toward the upper seat groove 70, allowing the working fluid 2b in the liquid flow path section 60 to move quickly through the upper seat groove 70 to the steam passages 51 and 52. Therefore, when such an upper seat groove 70 is placed in the evaporation region SR, the movement of the working fluid 2b from the liquid flow path section 60 toward the steam passages 51 and 52 in the evaporation region SR can be effectively promoted. Furthermore, in the event of a rapid temperature rise, the working vapor 2a evaporated from the working fluid 2b in the liquid flow path section 60 can be quickly moved through the upper seat groove 70 toward the steam passages 51 and 52, effectively promoting the movement of the working vapor 2a from the liquid flow path section 60 toward the steam passages 51 and 52 in the evaporation region SR. Furthermore, if the flow path cross-sectional area of ​​the upper seat groove 70 is larger than the flow path cross-sectional area of ​​the main liquid flow path groove 61, the movement of working vapor 2a from the liquid flow path section 60 to the vapor passages 51 and 52 in the evaporation region SR can be promoted even more effectively. As a result, the reflux of working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0160] (Sixth Embodiment) Next, a vapor chamber and electronic equipment according to a sixth embodiment of the present disclosure will be described with reference to Figure 26.

[0161] In the sixth embodiment shown in Figure 26, the main difference is that the first sheet groove is formed such that the flow path cross-sectional area decreases from the first end to the second end; the other configurations are substantially the same as those of the third embodiment shown in Figure 23. In Figure 26, the same reference numerals are used for parts that are the same as those in the third embodiment shown in Figure 23, and detailed descriptions are omitted.

[0162] In this embodiment, as shown in Figure 26, the upper seat groove 70 is formed such that the flow path cross-sectional area decreases from the first end 71 to the second end 72. That is, the upper seat groove 70 is formed to taper from the first end 71 to the second end 72. For example, the upper seat groove 70 may be formed such that the width w6 of the upper seat groove 70 decreases from the first end 71 to the second end 72. Alternatively, the upper seat groove 70 may be formed such that the depth h2 of the upper seat groove 70 becomes shallower from the first end 71 to the second end 72.

[0163] As described above, according to this embodiment, the upper seat groove 70 is formed such that the flow path cross-sectional area decreases from the first end 71 to the second end 72. As a result, the capillary action of the upper seat groove 70 imparts a propulsive force to the working fluid 2b from the upper seat groove 70 toward the liquid flow path section 60, allowing the working fluid 2b in the steam passages 51 and 52 to move quickly through the upper seat groove 70 to the liquid flow path section 60. Therefore, when such an upper seat groove 70 is placed in the condensing region CR, the movement of the working fluid 2b from the steam passages 51 and 52 toward the liquid flow path section 60 in the condensing region CR can be effectively promoted. Furthermore, when such an upper seat groove 70 is placed in the evaporation region SR, in the event of a rapid temperature rise, the working vapor 2a evaporated from the working fluid 2b in the liquid flow path section 60 can be quickly moved through the upper seat groove 70 toward the steam passages 51 and 52, effectively promoting the movement of the working vapor 2a from the liquid flow path section 60 toward the steam passages 51 and 52 in the evaporation region SR. Furthermore, if the flow path cross-sectional area of ​​the upper seat groove 70 is larger than the flow path cross-sectional area of ​​the main liquid flow path groove 61, the movement of working vapor 2a from the liquid flow path section 60 to the vapor passages 51 and 52 in the evaporation region SR can be promoted even more effectively. As a result, the reflux of working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0164] (Seventh Embodiment) Next, a vapor chamber and electronic equipment according to the seventh embodiment of this disclosure will be described with reference to Figures 27 to 29.

[0165] In the seventh embodiment shown in Figures 27 to 29, the main difference is that the first sheet groove is arranged so as to be inclined with respect to the first direction in a plan view; the other configurations are substantially the same as those of the third embodiment shown in Figure 23. In Figures 27 to 29, the same reference numerals are used for parts that are the same as those in the third embodiment shown in Figure 23, and detailed descriptions are omitted.

[0166] In this embodiment, as shown in Figure 27, the upper sheet groove 70 is positioned so as to be inclined with respect to the X direction in a plan view. The inclination angle of the upper sheet groove 70 can be any angle greater than 0 degrees and less than 90 degrees. It can also be said that the upper sheet groove 70 is inclined with respect to the Y direction in a plan view.

[0167] In the example shown in Figure 27, in a plan view, at a position that coincides with the positive Y-side edge of the land portion 33, each upper sheet groove 70 is inclined such that the first end 71 is located more towards the positive X-side and positive Y-side than the second end 72. Furthermore, in the same plan view, at a position that coincides with the positive Y-side edge of the land portion 33, each upper sheet groove 70 is arranged parallel to each other along the X-side. In the example shown in Figure 27, there are four upper sheet grooves 70 arranged in a row.

[0168] On the other hand, in a plan view, at the position where it coincides with the negative Y-side edge of the land portion 33, each upper sheet groove 70 is inclined such that the first end 71 is located on the positive X-side and negative Y-side of the second end 72. Also, in the position where it coincides with the negative Y-side edge of the land portion 33 in a plan view, each upper sheet groove 70 is arranged along the X-side so that it is parallel to each other. In the example shown in Figure 27, four upper sheet grooves 70 are arranged in a row.

[0169] Each upper seat groove 70 may be located near the end of the vapor chamber 1 (for example, the negative end in the X direction of the vapor chamber 1). However, it is not limited to this, and each upper seat groove 70 may be located at any position in the vapor chamber 1.

[0170] As described above, according to this embodiment, the upper seat groove 70 is arranged to be inclined with respect to the X direction in a plan view. This allows, for example, the working fluid 2b in the steam passages 51 and 52 to be moved to concentrate in the liquid flow channel section 60 in the condensation region CR. In particular, even if the liquid flow channel section 60 is located near the end of the vapor chamber 1, a sufficient amount of working fluid 2b can be moved to the liquid flow channel section 60. Furthermore, when such an upper seat groove 70 is located in the evaporation region SR, in the event of a sudden temperature rise, the working vapor 2a evaporated from the working fluid 2b in the liquid flow channel section 60 can be quickly moved through the upper seat groove 70 to the steam passages 51 and 52, effectively promoting the movement of working vapor 2a from the liquid flow channel section 60 to the steam passages 51 and 52 in the evaporation region SR. In particular, if the upper seat groove 70 is inclined such that its first end 71 faces the side of the condensation region CR, the flow of working vapor 2a can be directed towards the condensation region CR, and the working vapor 2a can be quickly transported to the condensation region CR. Therefore, the transport efficiency of the working fluid 2b can be improved, and the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be promoted.

[0171] In the embodiment described above, an example was described in which each upper sheet groove 70 is arranged parallel to each other along the X direction at a position that overlaps with the edge of the land portion 33 in a plan view. However, this is not the only example, and as shown in Figures 28 and 29, each upper sheet groove 70 does not have to be parallel to each other.

[0172] In the example shown in Figure 28, six upper sheet grooves 70 are arranged along the X direction at a position that coincides with the positive Y-direction edge of the land portion 33 in a plan view. Of these upper sheet grooves 70, three located on the negative X-direction side are inclined such that their first end 71 is located further negative in the X direction and further positive in the Y direction than their second end 72. Additionally, three upper sheet grooves 70 located on the positive X-direction side are inclined such that their first end 71 is located further positive in both the X direction and the Y direction than their second end 72.

[0173] On the other hand, in a plan view, six upper sheet grooves 70 are arranged along the X direction at a position that overlaps with the negative Y-direction edge of the land portion 33. Of these upper sheet grooves 70, the three located on the negative X-direction side are inclined such that their first end 71 is located further to the negative X-direction and negative Y-direction than their second end 72. The three upper sheet grooves 70 located on the positive X-direction side are also inclined such that their first end 71 is located further to the positive X-direction and negative Y-direction than their second end 72.

[0174] In this case, for example, the working fluid 2b in the steam passages 51 and 52 can be moved to concentrate in the liquid flow channel section 60 in the condensing region CR. This allows a sufficient amount of working fluid 2b to be moved to the liquid flow channel section 60. Furthermore, when such an upper seat groove 70 is located in the evaporation region SR, in the event of a sudden temperature rise, the working vapor 2a evaporated from the working fluid 2b in the liquid flow channel section 60 can be quickly moved through the upper seat groove 70 to the steam passages 51 and 52, effectively promoting the movement of working vapor 2a from the liquid flow channel section 60 to the steam passages 51 and 52 in the evaporation region SR. In particular, when multiple condensing regions CR are arranged, the flow of working vapor 2a can be directed to each condensing region CR, and the working vapor 2a can be quickly transported to each condensing region CR. As a result, the transport efficiency of the working fluid 2b can be improved, and the reflux of working fluids 2a and 2b within the vapor chamber 1 can be promoted.

[0175] Furthermore, in the example shown in Figure 29, six upper sheet grooves 70 are arranged along the X direction at a position that coincides with the positive Y-direction edge of the land portion 33 in a plan view. Of these upper sheet grooves 70, three located on the negative X-direction side are inclined such that their first end 71 is located more on the positive X-direction and positive Y-direction side than their second end 72. Additionally, three upper sheet grooves 70 located on the positive X-direction side are inclined such that their first end 71 is located more on the negative X-direction and positive Y-direction side than their second end 72.

[0176] On the other hand, in a plan view, six upper sheet grooves 70 are arranged along the X direction at a position that overlaps with the negative Y-direction edge of the land portion 33. Of these upper sheet grooves 70, three located on the negative X-direction side are inclined such that their first end 71 is located on the positive X-direction side and the negative Y-direction side than their second end 72. Also, three upper sheet grooves 70 located on the positive X-direction side are inclined such that their first end 71 is located on the negative X-direction side and the negative Y-direction side than their second end 72.

[0177] In this case, for example, the working fluid 2b in the liquid flow channel 60 can be moved to concentrate in the vapor passages 51 and 52 in the evaporation region SR. This allows the working fluid 2b to be efficiently evaporated in the evaporation region SR. Therefore, the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be promoted.

[0178] (Eighth embodiment) Next, a vapor chamber and electronic equipment according to an eighth embodiment of the present disclosure will be described with reference to Figures 30 and 31.

[0179] In the eighth embodiment shown in Figures 30 and 31, the main difference is that the multiple first sheet grooves are arranged radially in a plan view; the other configurations are substantially the same as those of the third embodiment shown in Figure 23. In Figures 30 and 31, the same reference numerals are used for parts identical to those in the third embodiment shown in Figure 23, and detailed descriptions are omitted.

[0180] In this embodiment, as shown in Figure 30, the multiple upper seat grooves 70 are arranged radially in a plan view. In the example shown in Figure 30, each upper seat groove 70 is arranged to be inclined with respect to the X direction. Furthermore, each upper seat groove 70 is arranged such that its second end 72 faces a specific position in the liquid flow channel 60. The upper seat grooves 70 are arranged radially such that the gap w7 (see Figure 11) between adjacent upper seat grooves 70 in the X direction becomes smaller as it moves from the steam passages 51 and 52 towards the liquid flow channel 60.

[0181] As described above, according to this embodiment, the upper seat grooves 70 are arranged radially in a plan view. This allows, for example, the working fluid 2b in the steam passages 51 and 52 to be moved so as to be concentrated in the liquid flow channel section 60 in the condensation region CR. As a result, a sufficient amount of working fluid 2b can be moved to the liquid flow channel section 60. Furthermore, when such upper seat grooves 70 are arranged in the evaporation region SR, in the event of a sudden temperature rise, the working vapor 2a evaporated from the working fluid 2b in the liquid flow channel section 60 can be quickly moved through the upper seat grooves 70 to the steam passages 51 and 52, effectively promoting the movement of working vapor 2a from the liquid flow channel section 60 to the steam passages 51 and 52 in the evaporation region SR. In particular, when multiple condensation regions CR are arranged, the flow of working vapor 2a can be directed to each condensation region CR, and the working vapor 2a can be quickly transported to each condensation region CR. As a result, the transport efficiency of the working fluid 2b can be improved, and the reflux of working fluids 2a and 2b within the vapor chamber 1 can be promoted.

[0182] In the embodiment described above, an example was described in which the upper seat grooves 70 are arranged radially such that the gap w7 between adjacent upper seat grooves 70 in the X direction decreases as you move from the steam passage 51, 52 side towards the liquid passage 60 side. However, the invention is not limited to this, and for example, as shown in Figure 31, the upper seat grooves 70 may be arranged radially such that the gap w7 between adjacent upper seat grooves 70 in the X direction decreases as you move from the liquid passage 60 side towards the steam passage 51, 52 side. The first end 71 of each upper seat groove 70 may be positioned to face a specific location in the steam passage 51, 52.

[0183] In this case, for example, the working fluid 2b in the liquid flow channel 60 can be moved to concentrate in the vapor passages 51 and 52 in the evaporation region SR. This allows the working fluid 2b to be efficiently evaporated in the evaporation region SR. Therefore, the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be promoted.

[0184] (Ninth Embodiment) Next, a vapor chamber and electronic equipment according to the ninth embodiment of this disclosure will be described with reference to Figures 32 to 34.

[0185] In the ninth embodiment shown in Figures 32 to 34, the main difference is that the first sheet includes connecting grooves that connect adjacent first sheet grooves; the other configurations are substantially the same as those of the second embodiment shown in Figures 21 and 22. In Figures 32 to 34, the same reference numerals are used for parts that are the same as those in the second embodiment shown in Figures 21 and 22, and detailed descriptions are omitted.

[0186] In this embodiment, as shown in Figure 32, the upper sheet 20 includes upper sheet connecting grooves 75 (connecting grooves) that connect adjacent upper sheet grooves 70. The upper sheet 20 may include a plurality of upper sheet connecting grooves 75. In the example shown in Figure 32, each upper sheet groove 70 extends along the Y direction. Each upper sheet groove 70 is provided so as to traverse the second steam passage 52 in the Y direction. Each upper sheet connecting groove 75 is positioned to overlap with the second steam passage 52 in a plan view. Each upper sheet connecting groove 75 extends along the X direction. Each upper sheet connecting groove 75 is connected to adjacent upper sheet grooves 70.

[0187] The upper seat connecting groove 75 has a small flow path cross-sectional area, primarily to allow the working fluid 2b to flow by capillary action. The flow path cross-sectional area of ​​the upper seat connecting groove 75 is smaller than the flow path cross-sectional area of ​​the steam passages 51 and 52. The flow path cross-sectional area of ​​the upper seat connecting groove 75 may be equal to the flow path cross-sectional area of ​​the upper seat groove 70. However, it is not limited to this, and the flow path cross-sectional area of ​​the upper seat connecting groove 75 may be smaller or larger than the flow path cross-sectional area of ​​the upper seat groove 70.

[0188] The upper sheet connecting groove 75 may be formed by etching the upper sheet 20 from the inner surface 20a of the upper sheet, similar to the upper sheet groove 70. As a result, the upper sheet connecting groove 75 may have a curved wall surface (not shown) similar to that of the upper sheet groove 70. Furthermore, the upper sheet connecting groove 75 may be formed integrally and continuously with the upper sheet groove 70.

[0189] Each upper sheet connecting groove 75 may be aligned along the X and Y directions. Alternatively, as shown in Figure 32, each upper sheet connecting groove 75 may be arranged in a staggered pattern. That is, upper sheet connecting grooves 75 adjacent to each other in the X direction may be offset from each other in the Y direction. This offset may be half the arrangement pitch of the upper sheet connecting grooves 75 in the X direction.

[0190] As described above, according to this embodiment, the upper seat 20 includes upper seat connecting grooves 75 that connect adjacent upper seat grooves 70. This allows the working fluid 2b to move between the upper seat grooves 70 by the capillary action of the upper seat connecting grooves 75. Therefore, it is possible to suppress the uneven distribution of the working fluid 2b between the upper seat grooves 70. As a result, the transport efficiency of the working fluid 2b can be improved, and the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0191] In the embodiment described above, an example was described in which each upper sheet groove 70 is provided so as to traverse the second steam passage 52 in the Y direction, and each upper sheet connecting groove 75 is arranged in a staggered pattern. However, the invention is not limited to this, and the arrangement of each upper sheet groove 70 and each upper sheet connecting groove 75 is arbitrary.

[0192] In the example shown in Figure 33, the upper sheet grooves 70 are arranged in a staggered pattern. That is, upper sheet grooves 70 adjacent to each other in the X direction are offset from each other in the Y direction. This amount of offset may be half the arrangement pitch of the upper sheet grooves 70 in the X direction.

[0193] Furthermore, in the example shown in Figure 33, each upper sheet connecting groove 75 extends linearly along the X direction. Each upper sheet connecting groove 75 is connected to the end (first end 71 or second end 72) of each upper sheet groove 70, connecting each upper sheet groove 70, 70'. Each upper sheet connecting groove 75 is positioned to overlap with the second steam passage 52 in a plan view. Each upper sheet connecting groove 75 is aligned along the Y direction. In the example shown in Figure 33, three upper sheet connecting grooves 75 are arranged parallel to each other.

[0194] Even in such cases, the capillary action of the upper seat connecting groove 75 allows the working fluid 2b to move between the upper seat grooves 70. This prevents the working fluid 2b from being unevenly distributed between the upper seat grooves 70. As a result, the transport efficiency of the working fluid 2b can be improved, and the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0195] Furthermore, in the embodiment described above, an example was described in which each upper sheet connecting groove 75 is arranged in a staggered pattern. However, the invention is not limited to this, and as shown in Figure 34, each upper sheet connecting groove 75 may be arranged in a grid pattern. That is, each upper sheet connecting groove 75 may be aligned in the X and Y directions.

[0196] Even in such cases, the capillary action of the upper seat connecting groove 75 allows the working fluid 2b to move between the upper seat grooves 70. This prevents the working fluid 2b from being unevenly distributed between the upper seat grooves 70. As a result, the transport efficiency of the working fluid 2b can be improved, and the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0197] (Tenth embodiment) Next, a vapor chamber and electronic equipment according to a tenth embodiment of the present disclosure will be described with reference to Figure 35.

[0198] In the tenth embodiment shown in Figure 35, the liquid flow path is also provided on the second main body surface, and the second sheet is mainly different in that it includes a second sheet groove provided on the inner surface of the second sheet, which is located in a position that overlaps with the steam passage in a plan view and extends along a direction intersecting the first direction. The other configurations are substantially the same as those of the first embodiment shown in Figures 1 to 20. In Figure 35, the same reference numerals are used for parts that are the same as those of the first embodiment shown in Figures 1 to 20, and detailed descriptions are omitted.

[0199] In this embodiment, as shown in Figure 35, the liquid flow channel 60 is also provided on the lower surface 30a of the wick sheet. That is, the liquid flow channel 60 is provided on both the upper surface 30b of the wick sheet and the lower surface 30a of the wick sheet.

[0200] Furthermore, in this embodiment, as shown in Figure 35, the lower sheet 10 includes a lower sheet groove 80 (second sheet groove) provided on the inner surface 10b of the lower sheet. The lower sheet 10 may include a plurality of lower sheet grooves 80. The lower sheet groove 80, like the upper sheet groove 70, is provided in a position that overlaps with the steam passages 51 and 52 in a plan view. The lower sheet groove 80 may be provided in a position opposite to the upper sheet groove 70. The lower sheet groove 80, like the upper sheet groove 70, extends along a direction intersecting the X direction. The lower sheet groove 80 may, for example, extend along the Y direction perpendicular to the X direction, like the upper sheet groove 70. The other configurations of the lower sheet groove 80 are the same as those of the upper sheet groove 70 described above.

[0201] As described above, according to this embodiment, the liquid flow channel 60 is also provided on the lower surface 30a of the wick sheet. This makes effective use of the space within the vapor chamber 1 and further promotes the recirculation of the working fluids 2a and 2b within the vapor chamber 1.

[0202] Furthermore, according to this embodiment, the lower sheet 10 includes a lower sheet groove 80 provided on the inner surface 10b of the lower sheet, which is located in a position that overlaps with the steam passages 51 and 52 in a plan view and extends along a direction intersecting the X direction. This makes it possible to further promote the exchange of working fluid 2b between the steam passages 51 and 52 and the working fluid groove 60 when the liquid flow channel 60 is also provided on the lower surface 30a of the wick sheet. As a result, it is possible to further promote the recirculation of working fluids 2a and 2b within the vapor chamber 1.

[0203] (Embodiment 11) Next, a vapor chamber and electronic equipment according to the eleventh embodiment of this disclosure will be described with reference to Figure 36.

[0204] In the eleventh embodiment shown in Figure 36, the main difference is that the first sheet has a recessed region that is indented toward the steam passage, and the first sheet groove is located in the recessed region. Other configurations are substantially the same as those of the first embodiment shown in Figures 1 to 20. In Figure 36, the same reference numerals are used for parts that are the same as those of the first embodiment shown in Figures 1 to 20, and detailed descriptions are omitted.

[0205] In this embodiment, as shown in Figure 36, the vapor chamber 1 comprises a flat region FR in which the upper sheet 20 is formed in a flat shape, and a recessed region DR in which the upper sheet 20 is recessed toward the steam passages 51 and 52 of the steam flow channel 50. In the flat region FR, the lower sheet 10 may also be formed in a flat shape. In the recessed region DR, the lower sheet 10 may also be recessed toward the steam passages 51 and 52 of the steam flow channel 50. The recessed region DR can be formed by partially pressing the flat vapor chamber 1 from the outside or by bending the flat vapor chamber 1.

[0206] Furthermore, in this embodiment, as shown in Figure 36, the upper sheet groove 70 is located in the recessed region DR. That is, the upper sheet groove 70 is provided in the portion of the upper sheet inner surface 20a located in the recessed region DR. On the other hand, the upper sheet groove 70 does not have to be provided in areas other than the recessed region DR, i.e., the flat region FR.

[0207] As described above, according to this embodiment, the upper seat groove 70 is located in the recessed region DR. In the recessed region DR, the flow path cross-sectional area of ​​the steam passages 51 and 52 is smaller than the flow path cross-sectional area of ​​the steam passages 51 and 52 in other regions. As a result, in the recessed region DR, the working steam 2a is more likely to condense, and the working fluid 2b is more likely to be generated. Therefore, there is a risk that the working fluid 2b may accumulate in the recessed region DR. However, by locating the upper seat groove 70 in the recessed region DR, the flow of the working fluid 2b between the steam passages 51 and 52 and the liquid flow path section 60 can be promoted in the recessed region DR. Therefore, the accumulation of the working fluid 2b in the recessed region DR can be suppressed. As a result, the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be effectively promoted.

[0208] (Twelfth Embodiment) Next, a vapor chamber and electronic equipment according to a twelfth embodiment of the present disclosure will be described with reference to Figure 37.

[0209] In the twelfth embodiment shown in Figure 37, the main difference is that the first sheet groove is located in a position that overlaps with the connecting portion in a plan view; the other configurations are substantially the same as those of the first embodiment shown in Figures 1 to 20. In Figure 37, the same reference numerals are used for parts that are the same as those of the first embodiment shown in Figures 1 to 20, and detailed descriptions are omitted.

[0210] In this embodiment, as shown in Figure 37, the upper sheet groove 70 is provided in a position that overlaps with the connecting portion 38 in a plan view. It can also be said that the upper sheet groove 70 is provided in a position opposite the connecting portion 38. Here, as described above, the connecting portion 38 is a member that connects adjacent land portions 33.

[0211] In the example shown in Figure 37, the connecting portion 38 is positioned close to the lower surface 30a of the wick sheet 30. More specifically, the connecting portion 38 is positioned within the space forming the lower steam passage recess 53 of the steam passages 51 and 52. The upper steam passage recess 54 of the steam passages 51 and 52 is secured near the upper surface 30b of the wick sheet 30. The upper sheet groove 70 does not need to be provided at any position other than the one facing the connecting portion 38.

[0212] As described above, according to this embodiment, the upper seat groove 70 is provided in a position that overlaps with the connecting portion 38 in a plan view. At the position where the connecting portion 38 is provided, the flow path cross-sectional area of ​​the steam passages 51 and 52 is smaller than the flow path cross-sectional area of ​​the steam passages 51 and 52 at other positions. As a result, at the position where the connecting portion 38 is provided, the working steam 2a is more likely to condense and the working fluid 2b is more likely to be generated. Therefore, there is a risk that the working fluid 2b will accumulate at that position. In contrast, because the upper seat groove 70 is provided in a position that overlaps with the connecting portion 38 in a plan view, the flow of the working fluid 2b between the steam passages 51 and 52 and the liquid flow path portion 60 can be promoted at that position, and the accumulation of the working fluid 2b can be suppressed. Therefore, the recirculation of the working fluids 2a and 2b in the vapor chamber 1 can be effectively promoted.

[0213] (13th Embodiment) Next, with reference to FIG. 38, the vapor chamber and the electronic device according to the 13th embodiment of the present disclosure will be described.

[0214] In the 13th embodiment shown in FIG. 38, the main difference is that the first sheet groove is provided in a region adjacent to the connecting portion along the first direction in a plan view, and the other configurations are substantially the same as those of the first embodiment shown in FIGS. 1 to 20. In FIG. 38, the same reference numerals are given to the same parts as those of the first embodiment shown in FIGS. 1 to 20, and detailed descriptions thereof are omitted.

[0215] In the present embodiment, as shown in FIG. 38, the upper sheet groove 70 is provided in a region adjacent to the connecting portion 38 along the X direction in a plan view. Here, the connecting portion 38 is a member that connects the adjacent land portions 33 as described above.

[0216] <{ The connecting portion 38 may be disposed at a position close to the lower surface 30a of the wick sheet 30 of the wick sheet 30. The connecting portion 38 is disposed in the space forming the lower vapor flow path recess 53 of the vapor passages 51 and 52, and upper vapor flow path recesses 54 of the vapor passages 51 and 52 may be secured at a position close to the upper surface 30b of the wick sheet 30 of the wick sheet 30. The upper sheet groove 70 may not be provided at a position other than the region adjacent to the connecting portion 38 along the X direction in a plan view, that is, at a position away from the connecting portion 38 in a plan view. Here, the region adjacent to the connecting portion 38 along the X direction in a plan view may be, for example, a region within 30!m from the connecting portion 38 in the X direction in a plan view, a region within 150!m, or a region within 50!m.

[0217] In the example shown in FIG. 38, the upper sheet grooves 70 are provided in the regions on both sides in the X direction among the regions adjacent to the connecting portion (38) along the X direction in a plan view, but the present invention is not limited to this, and the upper sheet groove 70 may be provided in the region on either one side in the X direction.

[0218] In addition, in the example shown in FIG. 38, the upper sheet groove 70 is not provided at a position overlapping the connecting portion 38 in a plan view, but this is not limited thereto, and the upper sheet groove 70 may also be provided at a position overlapping the connecting portion 38 in a plan view.

[0219] As described above, according to the present embodiment, the upper sheet groove 70 is provided in a region adjacent to the connecting portion 38 along the X direction in a plan view. At the position where the connecting portion 38 is provided, the flow path cross-sectional areas of the steam passages 51 and 52 are smaller than the flow path cross-sectional areas of the steam passages 51 and 52 at other positions. As a result, the working steam 2a is likely to condense and the working fluid 2b is likely to be generated even in the region adjacent to the connecting portion 38 along the X direction. Therefore, there is a risk that the working fluid 2b may stagnate in this region. On the other hand, since the upper sheet groove 70 is provided in a region adjacent to the connecting portion 38 along the X direction in a plan view, the reciprocation of the working fluid 2b between the steam passages 51 and 52 and the liquid flow path portion 60 can be promoted in this region, and the stagnation of the working fluid 2b can be suppressed. Therefore, the reflux of the working fluids 2a and 2b in the vapor chamber 1 can be effectively promoted.

[0220] (14th Embodiment) Next, a vapor chamber and an electronic device according to the 14th embodiment of the present disclosure will be described with reference to FIGS. 39 and 40.

[0221] [[ID=十三]] In the 14th embodiment shown in FIGS. 39 and 40, the vapor chamber has a bent region bent along a bent line, and the main difference is that the first sheet groove is disposed in the bent region, and the other configurations are substantially the same as those of the first embodiment shown in FIGS. 1 to 20. In FIGS. 39 and 40, the same parts as those of the first embodiment shown in FIGS. 1 to 20 are denoted by the same reference numerals, and detailed description thereof is omitted.

[0222] In this embodiment, the vapor chamber 1 is bent along the bending line BL shown in Figure 39. Figure 39 shows the flat vapor chamber 1 before bending. In the example shown in Figure 39, the bending line BL is located in the center of the vapor chamber 1 in the X direction and extends along the Y direction. By bending the vapor chamber 1 along the bending line BL, a bent vapor chamber 1 can be obtained, as shown in Figure 40, comprising a bent region BR where the vapor chamber 1 is bent along the bending line BL, and a first region RR1 and a second region RR2 separated from the vapor chamber 1 by the bending region BR. As shown in Figure 40, a device D may be attached to the first region RR1 and a housing member Ha may be attached to the second region RR2.

[0223] The vapor chamber 1 may be bent such that the lower sheet 10 is located on the inside and the upper sheet 20 is located on the outside. The bending angle may be any angle. In the example shown in Figure 40, the bending angle is 90 degrees (right angle). Therefore, the cross-sectional shape of the vapor chamber 1 is approximately L-shaped. However, it is not limited to this, and for example, the vapor chamber 1 may be bent in a curved manner so that the cross-sectional shape of the vapor chamber 1 is U-shaped. Alternatively, for example, the vapor chamber 1 may be bent multiple times so that the cross-sectional shape of the vapor chamber 1 is U-shaped or the like. By bending the vapor chamber 1 in this way, the degree of freedom in arranging the vapor chamber 1 within the housing H can be improved. Here, the bending angle refers to the angle between the outer surface 10a of the lower sheet or the outer surface 20b of the upper sheet in the first region RR1 of the vapor chamber 1 and the outer surface 10a of the lower sheet or the outer surface 20b of the upper sheet in the second region RR2 of the vapor chamber 1.

[0224] Such a bent vapor chamber 1 can be manufactured in the manufacturing process of the vapor chamber 1 by bending a flat vapor chamber 1 along a bending line BL as a bending step after the sealing step.

[0225] In this embodiment, the upper sheet groove 70 is located in the bending region BR. That is, the upper sheet groove 70 is provided on the inner surface 20a of the upper sheet 20 in the bending region BR. The upper sheet groove 70 does not need to be located in regions other than the bending region BR, i.e., the first region RR1 and the second region RR2.

[0226] As described above, according to this embodiment, the upper seat groove 70 is located in the bending region BR. When the vapor chamber 1 is bent, the lower seat 10 located on the inside may deform by receiving compressive stress in the bending region BR and concave toward the lower vapor passage recess 53. Also, the upper seat 20 located on the outside may deform by receiving tensile stress in the bending region BR and concave toward the upper vapor passage recess 54. As a result, a recessed region DR may be formed in the bending region BR of the bent vapor chamber 1, as described with reference to Figure 36 in the 11th embodiment described above. Therefore, the cross-sectional area of ​​the vapor passages 51 and 52 may become smaller in the bending region BR. As a result, in the bending region BR, the working vapor 2a may condense easily, and the working fluid 2b may be easily generated. Therefore, there is a risk that the working fluid 2b may accumulate in the bending region BR. In contrast, because the upper seat groove 70 is located in the bending region BR, the flow of working fluid 2b between the vapor passages 51 and 52 and the liquid passage section 60 can be promoted in the bending region BR. Therefore, the stagnation of the working fluid 2b in the bending region BR can be suppressed. As a result, the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be effectively promoted.

[0227] In particular, in the curved vapor chamber 1, the working vapor 2a easily condenses on the inner surface 20a of the upper sheet 20 located on the outside, and the working fluid 2b is easily generated. As described above, the upper sheet groove 70 is provided on the inner surface 20a of the upper sheet. This allows the working fluid 2b condensed on the inner surface 20a of the upper sheet to be quickly moved to the liquid flow channel 60 by the capillary action of the upper sheet groove 70. Therefore, when the vapor chamber 1 is curved such that the lower sheet 10 is located on the inside and the upper sheet 20 is located on the outside, the movement of the working fluid 2b from the vapor passages 51 and 52 to the liquid flow channel 60 in the condensation region CR can be effectively promoted. As a result, the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.

[0228] In the embodiments described above, examples were given in which the vapor chamber 1 is composed of a lower sheet 10, an upper sheet 20, and a wick sheet 30. However, the vapor chamber 1 is not limited to this configuration, and as shown in Figure 41, it may be composed of an upper sheet 20 and a wick sheet 30.

[0229] In the example shown in Figure 41, the vapor chamber 1 includes an upper sheet 20 and a wick sheet 30, but does not have a lower sheet 10. In this case, the housing member Ha may be attached to the lower surface 30a of the wick sheet 30. The heat of the working steam 2a is transferred from the wick sheet 30 to the housing member Ha.

[0230] Furthermore, in the example shown in Figure 41, the steam passage section 50 is provided on the upper surface 30b of the wick sheet, but it does not extend to the lower surface 30a of the wick sheet and does not penetrate the wick sheet 30. In other words, the first steam passage 51 and the second steam passage 52 of the steam passage section 50 are composed of an upper steam passage recess 54, and the wick sheet 30 does not have a lower steam passage recess 53.

[0231] Furthermore, in the example shown in Figure 41, an upper sheet groove 70 is provided at a position opposite the steam passage portion 50 of the upper sheet 20. That is, the upper sheet 20 includes an upper sheet groove 70 provided on the inner surface 20a of the upper sheet, which is provided at a position that overlaps with the steam passages 51 and 52 in a plan view.

[0232] The thickness t5 of the vapor chamber 1 shown in Figure 41 may be, for example, 100 μm to 1000 μm. The thickness t6 of the upper sheet 20 shown in Figure 41 may be, for example, 6 μm to 200 μm. The thickness t7 of the wick sheet 30 shown in Figure 41 may be, for example, 50 μm to 800 μm.

[0233] In the example shown in Figure 41, the liquid channel section 60 is not provided on the inner surface 20a of the upper sheet 20, but this is not the only option, and the liquid channel section 60 may be provided on the inner surface 20a of the upper sheet 20. In this case, the liquid channel section 60 of the upper sheet 20 may be located opposite the liquid channel section 60 of the wick sheet 30.

[0234] Thus, the vapor chamber 1 may be composed of an upper sheet 20 and a wick sheet 30. Even in this case, the upper sheet 20 includes an upper sheet groove 70, which facilitates the exchange of working fluid 2b between the vapor passages 51, 52 and the liquid passage section 60. This facilitates the recirculation of working fluids 2a and 2b within the vapor chamber 1. Furthermore, in this case, the vapor chamber 1 can be made even thinner.

[0235] (15th Embodiment) Next, a vapor chamber and electronic equipment according to the 15th embodiment of this disclosure will be described with reference to Figures 42 to 66.

[0236] Depending on the internal structure of the electronic device to be mounted, the vapor chamber may be bent. In this case, since the vapor flow path is bent, the vapor flow path tends to collapse. For this reason, there is a problem that the flow path resistance increases and the flow of the working vapor in the vapor flow path portion is inhibited.

[0237] An object of the present embodiment is to provide a vapor chamber and an electronic device that can improve the heat dissipation efficiency even when bent.

[0238] As shown in FIGS. 42 and 43, the vapor chamber 101 according to the present embodiment is bent. The vapor chamber 101 is bent according to the internal structure of the electronic device E. Depending on the positional relationship between the electronic device E that generates heat and the housing member Ha that releases heat, the vapor chamber 101 may be bent. The housing member Ha is a member that constitutes the housing H.

[0239] As an example, there is a case where the electronic device D and the housing member Ha are arranged as shown in FIG. 42. In this case, the vapor chamber 101 is bent at a right angle so as to contact the electronic device D and the housing member Ha. The electronic device D is mounted on the substrate S. The vapor chamber 101 may be joined to the substrate S using an adhesive AD. The adhesive AD may be joined to a bent region 107 described later, or may be joined to a first region 105 or a second region 106 described later. As another example, there is a case where the electronic device D and the housing member Ha are arranged as shown in FIG. 43. In this case, the vapor chamber 101 is bent 180° so as to contact the electronic device D and the housing member Ha. The vapor chamber 101 may be joined to the substrate S using an adhesive AD as in the example shown in FIG. 42. FIGS. 42 and 42 show an example of the vapor chamber 101 bent by one bending line 108 (see FIGS. 44 and 45), but the present invention is not limited to this. The vapor chamber 101 may be bent at different positions by two or more bending lines 108.

[0240] In this embodiment, as shown in Figure 44, a vapor chamber 101 that is bent at a right angle by a single bending line 108 will be described as an example. The vapor chamber 101 shown in Figure 44 is divided into a first region 105, a second region 106, and a bent region 107 located between the first region 105 and the second region 106. The bent region 107 is an example of a third region. In the bent region 107, the vapor chamber 101 is bent at a right angle. The first region 105 and the second region 106 are formed in a substantially flat manner. An electronic device D may be in contact with the first region 105, and a housing member Ha (see Figure 42) may be in contact with the second region 106. A detailed description of each region will be given later.

[0241] Here, we will first explain the configuration of the vapor chamber 101 using Figures 45 to 58, which show the vapor chamber 101 before bending. By bending the flat vapor chamber 101 shown in Figure 45, the vapor chamber 101 shown in Figure 44 is obtained.

[0242] As shown in Figures 45 and 46, the vapor chamber 101 has a sealed space 103 containing working fluids 102a and 102b. The electronic device D described above is cooled by the repeated phase changes of the working fluids 102a and 102b in the sealed space 103. Examples of working fluids 102a and 102b include pure water, ethanol, methanol, and acetone, as well as mixtures thereof.

[0243] As shown in Figures 45 and 46, the vapor chamber 101 comprises a first sheet 110, a second sheet 120, a wick sheet 130 for the vapor chamber, a vapor flow path section 150, and a liquid flow path section 160. The second sheet 120 is provided on the opposite side of the wick sheet 130 from the first sheet 110. The wick sheet 130 for the vapor chamber is an example of a main sheet and is interposed between the first sheet 110 and the second sheet 120. The wick sheet 130 for the vapor chamber will henceforth be simply referred to as the wick sheet 130. In this embodiment, the vapor chamber 101 has the first sheet 110, the wick sheet 130, and the second sheet 120 stacked in this order. In this embodiment, an example is shown where the wick sheet 130 is made up of one sheet, but the wick sheet 130 may be made up of two or more sheets, and the number of sheets in the wick sheet 130 is arbitrary.

[0244] The vapor chamber 101 shown in Figure 45 is generally formed in the shape of a thin flat plate. The planar shape of the vapor chamber 101 before bending is arbitrary, but it may be a rectangular shape as shown in Figure 45. The planar shape of the vapor chamber 101 may be, for example, a rectangle with one side of 1 cm and the other side of 3 cm, or a square with one side of 15 cm. The planar dimensions of the vapor chamber 101 before bending are arbitrary. In this embodiment, an example will be described in which the planar shape of the vapor chamber 101 before bending is a rectangular shape with the X direction as the longitudinal direction, as will be described later. In this case, as shown in Figures 47 to 55, the first sheet 110, the second sheet 120, and the wick sheet 130 may have a planar shape similar to that of the vapor chamber 101. The planar shape of the vapor chamber 101 before bending is not limited to a rectangular shape, but may be any shape such as a circular shape, an elliptical shape, an L-shape, or a T-shape.

[0245] As shown in Figures 44 and 45, the vapor chamber 101 has an evaporation region SR where the working fluid 102b evaporates and a condensation region CR where the working vapor 102a condenses. The working vapor 102a is a working fluid in a gaseous state, and the working fluid 102b is a working fluid in a liquid state.

[0246] The evaporation region SR is the region that overlaps with the electronic device D in a plan view and is in contact with the electronic device D. The evaporation region SR is located within the first region 105, but its position is arbitrary. In this embodiment, the evaporation region SR is formed on one side of the vapor chamber 101 in the X direction (the left side in Figure 45). Heat from the electronic device D is transferred to the evaporation region SR, and this heat causes the working fluid 102b to evaporate, generating working vapor 102a. Heat from the electronic device D can be transferred not only to the region that overlaps with the electronic device D in a plan view, but also to the area surrounding the region that overlaps with the electronic device D. Therefore, the evaporation region SR may include the region that overlaps with the electronic device D and the surrounding region in a plan view.

[0247] The condensation region CR is a region that does not overlap with the electronic device D in a plan view, and is primarily a region where the working vapor 102a releases heat and condenses. The condensation region CR may be located within the second region 106. The condensation region CR may also be the region surrounding the evaporation region SR, which includes the second region 106. Heat is released from the working vapor 102a in the condensation region CR. The working vapor 102a is cooled and condenses, generating the working fluid 102b.

[0248] Here, a plan view refers to the state in which the vapor chamber 101 is viewed from a direction perpendicular to the surface that receives heat from the electronic device D and the surface that releases the received heat. In this embodiment, the surface that receives heat corresponds to the second sheet outer surface 120b of the second sheet 120, which will be described later, and the surface that releases heat corresponds to the first sheet outer surface 110a of the first sheet 110, which will be described later. Alternatively, the surface that receives heat may correspond to the first sheet outer surface 110a, and the surface that releases heat may correspond to the second sheet outer surface 120b. For example, as shown in Figure 44, in the first region 105 of the bent vapor chamber 101, the state viewed in the direction indicated by arrow V1 corresponds to a plan view. In the second region 106, the state viewed in the direction indicated by arrow V2 corresponds to a plan view. As shown in Figure 45, in the vapor chamber 101 before bending, the state in which the vapor chamber 101 is viewed from above or from below corresponds to a plan view.

[0249] As shown in Figure 46, the first sheet 110 includes a first sheet outer surface 110a located on the opposite side from the wick sheet 130, and a first sheet inner surface 110b facing the wick sheet 130. In the second region 106 described above, the housing member Ha described above may be in contact with the first sheet outer surface 110a. The first main body surface 130a of the wick sheet 130, described later, is in contact with the first sheet inner surface 110b. As shown in Figures 46 and 47, the first sheet 110 may be formed in a substantially flat shape. The first sheet 110 may have a substantially constant thickness.

[0250] As shown in Figure 47, alignment holes 112 may be formed at the four corners of the first sheet 110. Figure 47 shows an example where the planar shape of the alignment holes 112 is circular, but it is not limited to this. The alignment holes 112 may penetrate the first sheet 110.

[0251] As shown in Figure 47, the second sheet 120 includes a second sheet inner surface 120a facing the wick sheet 130 and a second sheet outer surface 120b located on the opposite side of the wick sheet 130. In the first region 105 described above, the electronic device D described above may be in contact with the second sheet outer surface 120b. The second main body surface 130b of the wick sheet 130, described later, is in contact with the second sheet inner surface 120a. As shown in Figures 46 and 48, the second sheet 120 may be formed in a substantially flat shape. The second sheet 120 may have a substantially constant thickness.

[0252] As shown in Figure 48, alignment holes 122 may be formed at the four corners of the second sheet 120. Figure 48 shows an example in which the planar shape of the alignment holes 122 is circular, but it is not limited to this. The alignment holes 122 may penetrate the second sheet 120.

[0253] As shown in Figures 45, 48, and 49, the second sheet 120 includes a plurality of second sheet outer surface recesses 123 located on the second sheet outer surface 120b. The second sheet outer surface recesses 123 may be located in the bending region 107, as shown in Figure 45.

[0254] As shown in Figures 45 and 48, the outer recess 123 of the second sheet extends in a direction that intersects the X direction in a plan view. The outer recess 123 of the second sheet may also extend in the Y direction, or it may extend along the bend line 108. In a plan view, the outer recess 123 of the second sheet may cross the first steam passage 151 or the second steam passage 152. In this embodiment, the outer recess 123 of the second sheet is formed over the entire Y direction of the second sheet 120. In this case, the outer recess 123 of the second sheet extends in a plan view that intersects the frame portion 132, each land portion 133, and each steam passage 151, 152. However, it is not limited to this, and the outer recess 123 of the second sheet does not have to be formed over the entire Y direction of the second sheet 120, as long as it ensures the flexibility of the vapor chamber 101 and the flow path cross-sectional area of ​​each steam passage 151, 152 after bending. Furthermore, in the example shown in Figure 45, the recess 123 on the outer surface of the second sheet has a linear shape extending in the Y direction when viewed from above, but it is not limited to this. For example, as shown in Figure 50, the recess 123 on the outer surface of the second sheet may have a bead-like shape when viewed from above, in which multiple circles partially overlap and are connected in the Y direction. Thus, the planar shape of the recess 123 on the outer surface of the second sheet is arbitrary.

[0255] As shown in Figure 49, the second sheet outer surface recess 123 is formed in a concave shape on the second sheet outer surface 120b. The second sheet outer surface recess 123 may be formed in a groove shape extending in the Y direction. The second sheet outer surface recess 123 may be aligned in the X direction, or may be spaced equally apart in the X direction. Each of the second sheet outer surface recess 123 may be located parallel to each other.

[0256] The bending region 107 is the region in which the vapor chamber 101 is bent. As a result, after the vapor chamber 101 is bent, the second sheet outer surface recess 123 is located in the bending region 107. The second sheet outer surface recess 123 extends along the bending line 108.

[0257] The second sheet outer surface recess 123 is formed by etching from the second sheet outer surface 120b of the second sheet 120 in the second sheet etching process described later. As a result, the second sheet outer surface recess 123 may have a curved wall surface, as shown in Figure 49. This wall surface may define the second sheet outer surface recess 123 and be curved in a shape that bulges towards the second sheet inner surface 120a. Figure 49 shows an example in which the second sheet outer surface recess 123 has a semicircular cross-section. However, the cross-sectional shape of the second sheet outer surface recess 123 is arbitrary as long as it can absorb the stress acting on the second sheet 120 when the vapor chamber 101 is bent. For example, as shown in Figure 51, the cross-sectional shape of the second sheet outer surface recess 123 may be triangular. Also, for example, as shown in Figure 52, the cross-sectional shape of the second sheet outer surface recess 123 may be rectangular. Furthermore, as shown in Figure 53, for example, the cross-sectional shape of the recess 123 on the outer surface of the second sheet may be trapezoidal. Also, as shown in Figure 54, for example, the cross-sectional shape of the recess 123 on the outer surface of the second sheet may be a partial circular shape with a width wider on the inside than the opening. In addition, the recess 123 on the outer surface of the second sheet may be formed by methods other than etching, and the method of formation is arbitrary. For example, the recess 123 on the outer surface of the second sheet may be formed by press working or router working.

[0258] As shown in Figure 49, the width w18 of the recess 123 on the outer surface of the second sheet may be, for example, 10 μm to 60 μm. The width w18 represents the dimension of the recess 123 on the outer surface 120b of the second sheet. The width w18 corresponds to the X-direction dimension of the recess 123 on the outer surface of the second sheet. The X-direction pitch p11 of the recess 123 on the outer surface of the second sheet may be, for example, 20 μm to 100 μm. The depth h12 of the recess 123 on the outer surface of the second sheet may be, for example, 5 μm to 30 μm when the thickness t13 of the second sheet 120 is about 35 μm. The depth h12 corresponds to the Z-direction dimension of the recess 123 on the outer surface of the second sheet.

[0259] As shown in Figure 45, the wick sheet 130 has a first main surface 130a and a second main surface 130b located on the opposite side from the first main surface 130a. The first inner surface 110b of the first sheet 110 is in contact with the first main surface 130a. The second inner surface 120a of the second sheet 120 is in contact with the second main surface 130b.

[0260] The inner surface 110b of the first sheet 110 and the first main surface 130a of the wick sheet 130 may be diffusion-bonded. The inner surface 110b of the first sheet and the first main surface 130a may be permanently bonded to each other.

[0261] Similarly, the inner surface 120a of the second sheet 120 and the second main surface 130b of the wick sheet 130 may be diffusion-bonded. The inner surface 120a of the second sheet and the second main surface 130b may be permanently bonded to each other.

[0262] The term "permanently joined" is not strictly defined, but is used to mean that the joining is sufficient to maintain the airtightness of the sealed space 103 during the operation of the vapor chamber 101.

[0263] As shown in Figures 45, 55, and 56, the wick sheet 130 according to this embodiment includes a frame portion 132 and a plurality of land portions 133. The frame portion 132 defines the steam flow path portion 150 and is formed in a rectangular frame shape along the X and Y directions in a plan view. The land portions 133 are located inside the frame portion 132 in a plan view, and the steam flow path portion 150 is located around the land portions 133. Therefore, the working steam 102a flows around the land portions 133. The frame portion 132 and the land portions 133 are parts of the wick sheet 130 material that are not etched in the wick sheet etching process described later. A first steam passage 151, described later, through which the working steam 102a flows, is formed between the frame portion 132 and the adjacent land portion 133. A second steam passage 152, described later, through which the working steam 102a flows, is formed between the adjacent land portions 133.

[0264] The land portion 133 may extend in an elongated shape with the X direction as its longitudinal direction in a plan view. The planar shape of the land portion 133 may be an elongated rectangle. The X direction is an example of a first direction and corresponds to the left-right direction in Figures 55 and 56. In addition, each land portion 133 may be spaced equally apart in the Y direction. The Y direction is an example of a second direction and is perpendicular to the X direction in a plan view. The Y direction is the width direction of the land portion 133 and corresponds to the up-down direction in Figures 55 and 56. Each land portion 133 may be positioned parallel to each other. The direction perpendicular to the X direction and the Y direction is called the Z direction. The Z direction corresponds to the up-down direction in Figures 46 and 57 and corresponds to the thickness direction.

[0265] As shown in Figure 57, the width w11 of the land portion 133 may be, for example, 100 μm to 1500 μm. Here, the width w11 of the land portion 133 is the dimension of the land portion 133 in the Y direction. The width w11 means the dimension in the Z direction of the wick sheet 130 at the position where the through portion 134, which will be described later, exists.

[0266] Here, the X direction in the first region 105 and the second region 106 of the vapor chamber 101 shown in Figure 44 corresponds to the direction along the longitudinal direction of the land portion 133. The X direction in the first region 105 corresponds to the vertical direction in Figure 44. The Y direction in the first region 105 and the second region 106 of the vapor chamber 101 shown in Figure 44 corresponds to the direction in which the land portions 133 are aligned. The Z direction in the first region 105 and the second region 106 of the vapor chamber 101 shown in Figure 44 corresponds to the direction perpendicular to the vapor chamber 101. The Z direction in the second region 106 corresponds to the vertical direction in Figure 44.

[0267] The frame portion 132 and each land portion 133 are diffusion-bonded to the first sheet 110 and also to the second sheet 120. This improves the mechanical strength of the vapor chamber 101. The wall surface 153a of the first vapor flow recess 153 and the wall surface 154a of the second vapor flow recess 154, which will be described later, constitute the side walls of the land portion 133. The first main body surface 130a and the second main body surface 130b of the wick sheet 130 may be formed flat over the frame portion 132 and each land portion 133.

[0268] As shown in Figures 55 and 56, alignment holes 135 may be formed at the four corners of the wick sheet 130. Figures 55 and 56 show an example where the planar shape of the alignment holes 135 is circular, but this is not the only option. Furthermore, the alignment holes 135 may penetrate the wick sheet 130.

[0269] As shown in Figure 46, the steam passage section 150 may be provided on the first main body surface 130a of the wick sheet 130. The steam passage section 150 is an example of a space. The steam passage section 150 may mainly be a passage through which working steam 102a passes. Working fluid 102b may also pass through the steam passage section 150. In this embodiment, the steam passage section 150 may extend from the first main body surface 130a to the second main body surface 130b, and may penetrate the wick sheet 130. The steam passage section 150 may be covered by the first sheet 110 on the first main body surface 130a, and may be covered by the second sheet 120 on the second main body surface 130b.

[0270] As shown in Figures 55 and 56, the steam flow path section 150 according to this embodiment may include a first steam passage 151 and a plurality of second steam passages 152. The first steam passage 151 and the second steam passages 152 are each examples of working fluid passages. The first steam passage 151 is formed between the frame section 132 and the land section 133. The first steam passage 151 is formed continuously inside the frame section 132 and outside the land section 133. The planar shape of the first steam passage 151 may be a rectangular frame shape along the X and Y directions. The second steam passages 152 are formed between adjacent land sections 133. The planar shape of the second steam passages 152 may be an elongated rectangular shape. The steam flow path section 150 is divided into the first steam passage 151 and the plurality of second steam passages 152 by the plurality of land sections 133.

[0271] As shown in Figure 46, the first steam passage 151 and the second steam passage 152 may extend from the first main surface 130a to the second main surface 130b of the wick sheet 130. In this case, the first steam passage 151 and the second steam passage 152 penetrate from the first main surface 130a to the second main surface 130b. The first steam passage 151 and the second steam passage 152 include a first steam passage recess 153 provided on the first main surface 130a and a second steam passage recess 154 provided on the second main surface 130b. The first steam passage recess 153 and the second steam passage recess 154 are in communication with each other.

[0272] The first steam channel recess 153 may be formed by etching from the first main surface 130a of the wick sheet 130 in a wick sheet etching process described later. The first steam channel recess 153 is formed in a concave shape on the first main surface 130a. The first steam channel recess 153 may have a curved wall surface 153a, as shown in Figure 57. Figure 57 shows a cross-section perpendicular to the X direction. This wall surface 153a defines the first steam channel recess 153 and may be curved so as it approaches the second main surface 130b, it approaches the opposing wall surface 153a. The first steam channel recess 153 constitutes a portion of the first steam passage 151 that is relatively close to the first sheet 110 and a portion of the second steam passage 152 that is relatively close to the first sheet 110.

[0273] The width w12 of the first steam passage recess 153 in the first region 105 and the second region 106 may be, for example, 100 μm to 5000 μm. The width w12 of the first steam passage recess 153 is a dimension in the Y direction and is the dimension of the first steam passage recess 153 on the first main body surface 130a. The width w12 corresponds to the Y-direction dimension of the portion of the first steam passage 151 that extends in the X direction and the Y-direction dimension of the second steam passage 152. The width w12 also corresponds to the X-direction dimension of the portion of the first steam passage 151 that extends in the Y direction.

[0274] The second steam channel recess 154 may be formed by etching from the second main surface 130b of the wick sheet 130 in a wick sheet etching process described later. The second steam channel recess 154 is formed in a concave shape on the second main surface 130b. The second steam channel recess 154 may have a curved wall surface 154a, as shown in Figure 57. This wall surface 154a defines the second steam channel recess 154 and may be curved so as it approaches the first main surface 130a, it approaches the opposing wall surface 154a. The second steam channel recess 154 constitutes a portion of the first steam passage 151 that is relatively close to the second sheet 120 and a portion of the second steam passage 152 that is relatively close to the second sheet 120.

[0275] The width w13 of the second steam channel recess 154 in the first region 105 and the second region 106 may be, for example, 100 μm to 5000 μm, similar to the width w12 of the first steam channel recess 153 described above. The width w13 of the second steam channel recess 154 is a dimension in the Y direction and is the dimension of the second steam channel recess 154 on the second main body surface 130b. The width w13 corresponds to the Y-direction dimension of the portion of the first steam passage 151 that extends in the X direction and the Y-direction dimension of the second steam passage 152. The width w13 also corresponds to the X-direction dimension of the portion of the first steam passage 151 that extends in the Y direction. The width w13 of the second steam channel recess 154 may be equal to, or different from, the width w12 of the first steam channel recess 153.

[0276] As shown in Figure 57, the wall surface 153a of the first steam passage recess 153 and the wall surface 154a of the second steam passage recess 154 may be connected to form a penetration 134. In this embodiment, the planar shape of the penetration 134 in the first steam passage 151 may be a rectangular frame shape. The planar shape of the penetration 134 in the second steam passage 152 may be an elongated rectangular shape. The penetration 134 may be formed by the confluence of the wall surface 153a of the first steam passage recess 153 and the wall surface 154a of the second steam passage recess 154, and may be defined by a ridge. As shown in Figure 57, this ridge may be formed to protrude inward into the steam passages 151 and 152. The planar area of ​​the first steam passage 151 in this penetration 134 may be minimized, and the planar area of ​​the second steam passage 152 in this penetration 134 may be minimized. The width w14 of the penetration portion 134 of each steam passage 151, 152 may be, for example, 400 μm to 5000 μm. Here, the width w14 of the penetration portion 134 is the width of the penetration portion 134 in the first region 105 and the second region 106, and corresponds to the gap between adjacent land portions 133 in the Y direction. The width w14 may also be the gap between the parts of the land portions 133 that protrude furthest inward into the steam passages 151, 152, as shown in Figure 57.

[0277] The position of the through-hole 134 in the Z direction may be an intermediate position between the first main body surface 130a and the second main body surface 130b. Alternatively, the position of the through-hole 134 may be closer to the first sheet 110 than the intermediate position, or closer to the second sheet 120 than the intermediate position. The position of the through-hole 134 in the Z direction is arbitrary.

[0278] In this embodiment, as described above, the cross-sectional shapes of the first steam passage 151 and the second steam passage 152 are formed to include a through portion 134 defined by a ridge that protrudes inward, but the embodiment is not limited to this. For example, the cross-sectional shapes of the first steam passage 151 and the second steam passage 152 may be trapezoidal, parallelogram, or barrel-shaped.

[0279] The steam flow path section 150, including the first steam passage 151 and the second steam passage 152 configured in this way, constitutes a part of the sealed space 103 described above. Each steam passage 151 and 152 has a relatively large flow path cross-sectional area to allow the working steam 102a to pass through.

[0280] Here, Figure 57 shows the first steam passage 151 and the second steam passage 152 in enlargement for clarity. The number of main channel grooves 161, which will be described later, differs from that in Figure 46.

[0281] Although not shown in the figures, multiple support parts may be provided within each steam passage 151, 152 to support the land portion 133 on the frame portion 132. Support parts may also be provided to support adjacent land portions 133. These support parts may be provided on both sides of the land portion 133 in the X direction, or on both sides of the land portion 133 in the Y direction. The support parts may be formed so as not to obstruct the flow of working steam 102a diffusing through the steam passage portion 150. For example, the support parts may be located near one of the first main surface 130a and the second main surface 130b of the wick sheet 130, with a space forming the steam passage portion 150 located near the other. This allows the thickness of the support parts to be thinner than the thickness of the wick sheet 130, preventing the first steam passage 151 and the second steam passage 152 from being separated in the X and Y directions.

[0282] As shown in Figure 45, the vapor chamber 101 may be provided with an injection section 104 for injecting working fluid 102b into the sealed space 103. The injection section 104 includes an injection channel 136 that communicates with the first vapor passage 151. The position of the injection section 104 is arbitrary. As shown in Figures 55 and 56, the injection channel 136 may be formed in a concave shape on the second main body surface 130b. Alternatively, the injection channel 136 may be formed in a concave shape on the first main body surface 130a. Depending on the configuration of the liquid channel section 160, the injection channel 136 may communicate with the liquid channel section 160.

[0283] As shown in Figures 46, 55, and 57, the liquid flow path section 160 may be formed between the first sheet 110 and the wick sheet 130. In this embodiment, the liquid flow path section 160 is formed on the first main body surface 130a of each land section 133. The liquid flow path section 160 may be a flow path mainly through which the working fluid 102b passes. The working vapor 102a described above may also pass through the liquid flow path section 160. The liquid flow path section 160 constitutes a part of the sealed space 103 described above and is in communication with the vapor flow path section 150. The liquid flow path section 160 is configured as a capillary structure for transporting the working fluid 102b to the evaporation region SR. The liquid flow path section 160 may also be referred to as the wick. The liquid flow path section 160 may be formed over the entire first main body surface 130a of each land section 133. Although not shown in Figure 55, etc., a liquid flow channel 160 may be formed on the inner portion of the first main surface 130a of the frame portion 132. In this embodiment, no liquid flow channels are formed on the second main surface 130b of the land portion 133 and the second main surface 130b of the frame portion 132.

[0284] As shown in Figure 58, the fluid flow channel section 160 is an example of a first groove assembly containing multiple grooves. More specifically, the fluid flow channel section 160 includes multiple main channel grooves 161 and multiple connecting grooves 165. The main channel grooves 161 and connecting grooves 165 of the fluid flow channel section 160 are examples of the first groove. The main channel grooves 161 and connecting grooves 165 are grooves through which the working fluid 102b passes. The connecting grooves 165 are in communication with the main channel grooves 161.

[0285] Each main channel groove 161 extends in the X direction, as shown in Figure 58. The main channel grooves 161 have a small flow path cross-sectional area, primarily for the working fluid 102b to flow by capillary action. The flow path cross-sectional area of ​​the main channel grooves 161 is smaller than that of the steam passages 151 and 152. The main channel grooves 161 are configured to transport the working fluid 102b condensed from the working steam 102a to the evaporation region SR. Each main channel groove 161 may be spaced equally apart along the Y direction perpendicular to the X direction. Each main channel groove 161 may be located parallel to one another.

[0286] The main groove 161 is formed by etching from the first main surface 130a of the wick sheet 130 in the wick sheet etching process described later. As a result, the main groove 161 may have a curved wall surface 162, as shown in Figure 57. This wall surface 162 may define the main groove 161 and be curved in a shape that bulges out toward the second main surface 130b.

[0287] As shown in Figures 57 and 58, the width w15 of the main channel groove 161 may be smaller than the width w12 of the first steam flow channel recess 153. The width w15 of the main channel groove 161 may also be smaller than the width w11 of the land portion 133. The width w15 of the main channel groove 161 may be, for example, 5 μm to 400 μm. The width w15 represents the dimension of the main channel groove 161 on the first main body surface 130a. In Figures 57 and 58, the width w15 corresponds to the Y-direction dimension of the main channel groove 161. The depth h11 of the main channel groove 161 may be, for example, 3 μm to 300 μm. The depth h11 corresponds to the Z-direction dimension of the main channel groove 161.

[0288] As shown in Figure 58, each connecting groove 165 extends in a direction different from the X direction. In this embodiment, each connecting groove 165 extends in the Y direction and is formed perpendicular to the main channel groove 161. Some connecting grooves 165 connect adjacent main channel grooves 161 to each other. Other connecting grooves 165 connect the first steam passage 151 or the second steam passage 152 to the main channel groove 161. That is, the connecting groove 165 extends from the side edge 133e of the land portion 133 in the Y direction to the main channel groove 161 adjacent to the side edge 133e. In this way, the first steam passage 151 is in communication with the main channel groove 161, and the second steam passage 152 is in communication with the main channel groove 161.

[0289] The connecting grooves 165 have a small flow path cross-sectional area, primarily to allow the working fluid 102b to flow by capillary action. The flow path cross-sectional area of ​​the connecting grooves 165 is smaller than the flow path cross-sectional areas of the steam passages 151 and 152. The connecting grooves 165 are spaced apart at predetermined intervals along the X direction. Each connecting groove 165 may be located parallel to the others.

[0290] The connecting groove 165, like the main channel groove 161, is formed by etching, which will be described later. As a result, the connecting groove 165 may have a curved wall surface (not shown) similar to that of the main channel groove 161. The width w16 of the connecting groove 165 may be smaller than the width w12 of the first steam flow channel recess 153. The width w16 of the connecting groove 165 may be smaller than the width w11 of the land portion 133. As shown in Figure 58, the width w16 of the connecting groove 165 may be equal to the width w15 of the main channel groove 161. However, the width w16 may be larger or smaller than the width w15. The width w16 represents the dimension of the connecting groove 165 on the first main body surface 130a. In Figure 58, the width w16 corresponds to the X-direction dimension of the connecting groove 165. The depth of the connecting groove 165 may be equal to the depth h11 of the main channel groove 161. However, the depth of the connecting groove 165 may be greater than or less than the depth h11.

[0291] As shown in Figure 58, the liquid flow channel section 160 has a plurality of rows of protrusions 163. The rows of protrusions 163 are formed on the first main surface 130a of each land section 133. The rows of protrusions 163 are located between adjacent main channel grooves 161. Each row of protrusions 163 includes a plurality of protrusions 164 arranged in the X direction. The protrusions 164 are in contact with the first sheet 110. As shown in Figure 58, each protrusion 164 is formed in a rectangular shape such that the X direction is the longitudinal direction in a plan view. Main channel grooves 161 are interposed between adjacent protrusions 164 in the Y direction. Connecting grooves 165 are interposed between adjacent protrusions 164 in the X direction.

[0292] The protrusions 164 are the parts of the wick sheet 130 that are not etched in the wick sheet etching process described later, and the material remains. In this embodiment, as shown in Figure 58, the planar shape of the protrusions 164 is rectangular. More specifically, the planar shape of the protrusions 164 corresponds to the planar shape at the position of the first main body surface 130a.

[0293] In this embodiment, the protrusions 164 are arranged in a staggered pattern. More specifically, the protrusions 164 of adjacent rows 163 in the Y direction are positioned offset from each other in the X direction. This offset may be half the arrangement pitch of the protrusions 164 in the X direction. The width w17 of the protrusions 164 may be, for example, 5 μm to 500 μm. The width w17 represents the dimension of the protrusion 164 on the first main body surface 130a. In Figure 58, the width w17 corresponds to the Y-direction dimension of the protrusion 164. Note that the position of the protrusions 164 is not limited to a staggered pattern, and they may be arranged in parallel. In this case, each protrusion 164 of adjacent rows 163 in the Y direction is located at the same position in the X direction.

[0294] Incidentally, the materials constituting the first sheet 110, the second sheet 120, and the wick sheet 130 are not particularly limited, as long as they have good thermal conductivity to the extent that they can ensure the heat dissipation efficiency of the vapor chamber 101. For example, each sheet 110, 120, and 130 may be made of a metallic material. For example, each sheet 110, 120, and 130 may contain copper or a copper alloy. Copper and copper alloys have good thermal conductivity and corrosion resistance when pure water is used as the working fluid. Examples of copper include pure copper and oxygen-free copper (C1020). Examples of copper alloys include copper alloys containing tin, copper alloys containing titanium (C1990, etc.), and Corson-type copper alloys (C7025, etc.) which contain nickel, silicon, and magnesium. An example of a copper alloy containing tin is phosphor bronze (C5210, etc.).

[0295] The thickness t11 of the vapor chamber 101 shown in Figure 46 may be, for example, 100 μm to 500 μm. By making the thickness t11 of the vapor chamber 101 100 μm or more, the vapor flow path 150 can be adequately secured. Therefore, the vapor chamber 101 can function properly. On the other hand, by making the thickness t11 500 μm or less, it is possible to suppress the thickness t11 of the vapor chamber 101 from becoming too thick. Therefore, the vapor chamber 101 can be made thinner.

[0296] The thickness of the wick sheet 130 may be greater than the thickness of the first sheet 110. Similarly, the thickness of the wick sheet 130 may be greater than the thickness of the second sheet 120. In this embodiment, an example is shown where the thicknesses of the first sheet 110 and the second sheet 120 are equal. However, the embodiment is not limited to this, and the thicknesses of the first sheet 110 and the second sheet 120 may be different.

[0297] The thickness t12 of the first sheet 110 may be, for example, 6 μm to 100 μm. By setting the thickness t12 of the first sheet 110 to 6 μm or more, the mechanical strength and long-term reliability of the first sheet 110 can be ensured. On the other hand, by setting the thickness t12 of the first sheet 110 to 100 μm or less, it is possible to suppress an increase in the thickness t11 of the vapor chamber 101. The thickness t13 of the second sheet 120 may be set in the same way as the thickness t12 of the first sheet 110.

[0298] The thickness t14 of the wick sheet 130 may be, for example, 50 μm to 400 μm. By making the thickness t14 of the wick sheet 130 50 μm or more, the vapor flow path 150 can be properly secured. As a result, the vapor chamber 101 can function properly. On the other hand, by making it 400 μm or less, the thickness t11 of the vapor chamber 101 can be prevented from becoming thicker. As a result, the vapor chamber 101 can be made thinner. Note that the thickness t14 of the wick sheet 130 may also be the distance between the first main body surface 130a and the second main body surface 130b.

[0299] As shown in Figure 45, the vapor chamber 101 according to this embodiment includes a bent region 107. In the bent region 107, the vapor chamber 101 is bent along a bent line 108 that extends in a direction intersecting the X direction in a plan view. As shown in Figures 44 and 45, the bent line 108 according to this embodiment extends in the Y direction in a plan view. The Y direction is perpendicular to the X direction in a plan view. The bent line 108 crosses the frame portion 132, the land portion 133, the first steam passage 151, and the second steam passage 152. This prevents deformation that would cause the first sheet 110 to enter each steam passage 151 and 152, and also prevents deformation that would cause the second sheet 120 to enter each steam passage 151 and 152. This ensures that the flow path cross-sectional area of ​​the first steam passage 151 and the second steam passage 152 is maintained. The first region 105, the second region 106, and the bent region 107 may be separated by a boundary line along the bend line 108. In the examples shown in Figures 44 and 45, each region 105, 106, and 107 may be separated by a boundary line extending in the Y direction in a plan view.

[0300] As shown in Figures 45 and 59, the second sheet outer surface recess 123 described above is located in the bending region 107. The second sheet outer surface recess 123 overlaps the bending line 108 when the bending region 107 is viewed from the inside or outside of the bend.

[0301] The vapor chamber 101 is bent as shown in Figure 59. The first sheet 110 is located outside the bend compared to the wick sheet 130. In the bent region 107, the first sheet 110 is located outside the wick sheet 130 with respect to the center of the bend O. The second sheet 120 is located inside the bend compared to the wick sheet 130. The second sheet 120 is located inside the wick sheet 130 with respect to the center of the bend O.

[0302] Each steam passage 151, 152 may include a passage bend 157 located in the bending region 107, as shown in Figure 59. Figure 59 shows an example of a passage bend 157. In Figure 59, the shape of the passage bend 157 when viewed along the Y direction is a quarter-circle arc, but it is not limited to this. The passage bend 157 may include the first steam passage recess 153 and the second steam passage recess 154 described above.

[0303] Next, a method for manufacturing the vapor chamber 101 of this embodiment, which has the above configuration, will be described.

[0304] First, as a preparation step, the first sheet 110, the second sheet 120, and the wick sheet 130 are prepared. The preparation step may include a second sheet etching step, in which the second sheet 120 is formed by etching, and a wick sheet etching step, in which the wick sheet 130 is formed by etching. In each etching step, the second sheet 120 and the wick sheet 130 may be formed by etching using a patterned resist film (not shown) obtained by photolithography.

[0305] As a temporary fastening step, the first sheet 110, the wick sheet 130, and the second sheet 120 are temporarily fastened. For example, each sheet 110, 120, and 130 may be temporarily fastened by spot welding or laser welding. In this case, each sheet 110, 120, and 130 may be aligned using the alignment holes 112, 122, and 135 described above.

[0306] Next, as a joining process, the first sheet 110, the wick sheet 130, and the second sheet 120 are permanently joined together. Each of the sheets 110, 120, and 130 may be joined by diffusion bonding.

[0307] Following the joining process, as part of the injection process, the sealed space 103 is evacuated, and the working fluid 102b is injected into the sealed space 103 from the injection section 104 (see Figure 45).

[0308] Following the injection process, the injection channel 136 described above is sealed in a sealing process. This blocks communication between the sealed space 103 and the outside, thereby sealing the sealed space 103. A sealed space 103 containing the working fluid 102b is obtained, and leakage of the working fluid 102b from the sealed space 103 to the outside is prevented.

[0309] After the sealing process, the first sheet 110, the second sheet 120, and the wick sheet 130 may be bent in a bending process. For example, each sheet 110, 120, and 130 is bent along a bending line 108 extending in the Y direction as shown in Figure 45. At this time, a jig (not shown) is brought into contact with the outer surface 120b of the second sheet 120, which is on the inside of the bend. Both ends of each sheet 110, 120, and 130 in the X direction are gripped, and each sheet 110, 120, and 130 is bent at a desired angle. As a result, the bent vapor chamber 101 shown in Figure 44 is obtained, and the bent region 107 of the vapor chamber 101 is formed. Note that the bending process may be performed between the joining process and the injection process.

[0310] In this embodiment, a second sheet outer surface recess 123 is formed on the second sheet outer surface 120b of the second sheet 120 located on the inside of the bend. During the bending process, the vapor chamber 101 may be bent at the position where the second sheet outer surface recess 123 is formed. The vapor chamber 101 may be bent so that the bend line 108 is aligned with the direction in which the second sheet outer surface recess 123 extends. The second sheet outer surface recess 123 is easily visible and can serve as a marker for the bending position.

[0311] During bending, compressive stress acts on the second sheet cover portion 124 (see Figure 57) of the second sheet 120, which covers each of the steam passages 151 and 152. Since the second sheet 120 is located on the inside of the bend, a jig (not shown) comes into contact with the outer surface 120b of the second sheet 120. As a result, the displacement of the second sheet cover portion 124 toward the inside of the bend is restricted, and it tends to enter the second steam passage recess 154, which is located on the outside of the bend relative to the second sheet 120. However, according to this embodiment, a second sheet outer surface recess 123 is formed on the outer surface 120b of the second sheet in the bend region 107. This allows the compressive stress acting on the second sheet cover portion 124 during bending to be absorbed, and prevents the second sheet cover portion 124 from entering the second steam passage recess 154.

[0312] As described above, the vapor chamber 101 according to this embodiment is obtained.

[0313] The vapor chamber 101 obtained as described above may be bonded to the substrate S using an adhesive AD, as shown in Figure 59, when mounted on the substrate S. The adhesive AD may be bonded to the outer surface 120b of the second sheet in the bending region 107. In this case, the adhesive AD penetrates into the recess 123 on the outer surface of the second sheet. This improves the adhesion between the vapor chamber 101 and the adhesive AD.

[0314] Next, the operation method of the vapor chamber 101, that is, the cooling method of the electronic device D, will be described.

[0315] The vapor chamber 101 obtained as described above is installed inside a housing H of a mobile terminal or the like. In the second region 106, the outer surface 110a of the first sheet 110 is in contact with the housing member Ha. In the first region 105, the outer surface 120b of the second sheet 120 is in contact with the electronic device D. The working fluid 102b in the sealed space 103 adheres to the wall surface of the sealed space 103 due to its surface tension. More specifically, the working fluid 102b adheres to the wall surface 153a of the first vapor flow channel recess 153, the wall surface 154a of the second vapor flow channel recess 154, the wall surface 162 of the main channel groove 161 of the liquid flow channel section 160, and the wall surface of the connecting groove 165. The working fluid 102b may also adhere to the portion of the inner surface 110b of the first sheet 110 that is exposed to the first vapor flow channel recess 153. Furthermore, the working fluid 102b may also adhere to the portion of the second sheet 120a of the second sheet 120 that is exposed to the second vapor flow channel recess 154, the main channel groove 161, and the connecting groove 165.

[0316] When the electronic device D generates heat in this state, the working fluid 102b present in the evaporation region SR receives heat from the electronic device D. The received heat is absorbed as latent heat, causing the working fluid 102b to evaporate and generating working steam 102a. The generated working steam 102a diffuses within the first steam passage 151 and the second steam passage 152 that constitute the sealed space 103 (see the solid arrows in Figure 55). More specifically, in the portion of the first steam passage 151 extending in the X direction and in the second steam passage 152 of the steam flow path section 150, the working steam 102a diffuses mainly in the X direction. In this case, a portion of the working steam 102a diffuses through the passage bend 157. On the other hand, in the portion of the first steam passage 151 extending in the Y direction, the working steam 102a diffuses mainly in the Y direction.

[0317] Then, the working steam 102a in each steam passage 151, 152 leaves the evaporation region SR and is transported to the relatively lower temperature condensation region CR. In the condensation region CR, the working steam 102a is cooled mainly by radiating heat to the first sheet 110. The heat absorbed by the first sheet 110 from the working steam 102a is transferred to the outside air via the housing member Ha (see Figure 46).

[0318] The working steam 102a loses the latent heat absorbed in the evaporation region SR by radiating heat to the first sheet 110 in the condensation region CR. As a result, the working steam 102a condenses, and working fluid 102b is generated. The generated working fluid 102b adheres to the walls 153a and 154a of the steam flow channel recesses 153 and 154, and to the inner surface 110b of the first sheet 110 and the inner surface 120a of the second sheet 120. Here, the working fluid 102b continues to evaporate in the evaporation region SR. Therefore, the working fluid 102b in the condensation region CR of the liquid flow channel section 160 is transported toward the evaporation region SR by the capillary action of each main channel groove 161 (see dashed arrow in Figure 55). As a result, the working fluid 102b adhering to each wall surface 153a, 154a, the inner surface 110b of the first sheet, and the inner surface 120a of the second sheet moves to the fluid flow channel section 160 and enters the main channel 161 through the connecting groove 165. In this way, each main channel 161 and each connecting groove 165 are filled with working fluid 102b. The filled working fluid 102b gains a propulsive force toward the evaporation region SR due to the capillary action of each main channel 161 and is smoothly transported toward the evaporation region SR. As shown in Figure 44, even when the evaporation region SR is located at the top of the vapor chamber 101, the working fluid 102b is transported by capillary action.

[0319] In the fluid flow channel section 160, each main channel groove 161 is connected to an adjacent main channel groove 161 via a corresponding connecting groove 165. As a result, the working fluid 102b flows between adjacent main channel grooves 161, suppressing the occurrence of dryout in the main channel grooves 161. Therefore, capillary action is imparted to the working fluid 102b in each main channel groove 161, and the working fluid 102b is smoothly transported toward the evaporation region SR.

[0320] The working fluid 102b, having reached the evaporation region SR, receives heat again from the electronic device D and evaporates. The working vapor 102a evaporated from the working fluid 102b moves through the connecting groove 165 in the evaporation region SR to the first vapor channel recess 153 and the second vapor channel recess 154, which have larger flow channel cross-sectional areas. The working vapor 102a then diffuses within each vapor channel recess 153 and 154, and a portion of the working vapor 102a can diffuse through the passage bend 157. In this way, the working fluids 102a and 102b recirculate within the sealed space 103 while repeatedly undergoing phase changes, i.e., evaporation and condensation. As a result, the heat from the electronic device D is diffused and released. Consequently, the electronic device D is cooled.

[0321] As described above, according to this embodiment, in the bending region 107, the recess 123 on the outer surface 120b of the second sheet 120 is located. This allows the stress acting on the second sheet 120 when the vapor chamber 101 is bent to be absorbed, and prevents the second sheet 120 in the bending region 107 from entering the first steam passage 151 or the second steam passage 152. Therefore, the flow path cross-sectional area of ​​the first steam passage 151 and the second steam passage 152 can be secured, and the obstruction of the flow of working steam 102a in the bending region 107 can be suppressed. As a result, the heat dissipation efficiency of the vapor chamber 101 can be improved even when bent. In addition, since the recess 123 on the outer surface 123 of the second sheet is easily visible, it can be used as a marker for the bending position of the vapor chamber 101 before bending. Therefore, the workability of bending can be improved.

[0322] Furthermore, according to this embodiment, the second sheet 120 is located inside the bend compared to the wick sheet 130. This allows the compressive stress acting on the second sheet 120 when the vapor chamber 101 is bent to be absorbed by the recess 123 on the outer surface of the second sheet. As a result, it is possible to prevent the second sheet 120 in the bent region 107 from entering the first vapor passage 151 or the second vapor passage 152.

[0323] Furthermore, according to this embodiment, the outer recess 123 of the second sheet extends along the bending line 108 and crosses the first steam passage 151 or the second steam passage 152. This effectively absorbs the stress acting on the second sheet 120 when the vapor chamber 101 is bent, and further suppresses the second sheet 120 in the bending region 107 from entering the first steam passage 151 or the second steam passage 152. In addition, the vapor chamber 101 can be easily bent along the bending line 108.

[0324] Furthermore, according to this embodiment, in the bending region 107, a plurality of recesses 123 on the outer surface 120b of the second sheet are located. The plurality of recesses 123 on the outer surface 123 of the second sheet are aligned in the X direction. As a result, when the vapor chamber 101 is bent, the stress acting on the second sheet 120 can be effectively absorbed, and the second sheet 120 can be further suppressed from entering the first vapor passage 151 or the second vapor passage 152. In addition, the vapor chamber 101 can be easily bent along the bending line 108.

[0325] Furthermore, according to this embodiment, the bend line 108 extends in the Y direction perpendicular to the X direction. This makes it easy to bend the vapor chamber 101 along the direction perpendicular to the X direction to which the land portion 133 extends. As a result, deformation such that the first sheet 110 enters each steam passage 151, 152 in the bend region 107 can be suppressed, and deformation such that the second sheet 120 enters each steam passage 151, 152 can be suppressed. As a result, the flow path cross-sectional area of ​​the first steam passage 151 and the second steam passage 152 can be secured, and obstruction of the flow of working steam 102a in the bend region 107 can be suppressed.

[0326] In the embodiment described above, an example was described in which no liquid flow channels are formed on the second main surface 130b of the land portion 133 and the second main surface 130b of the frame portion 132. However, the embodiment is not limited to this. For example, a liquid flow channel (not shown) may be formed on the second main surface 130b of the land portion 133. The liquid flow channel may include a main channel groove 161 and a connecting groove 165, similar to the liquid flow channel 160 described above. The cross-sectional area of ​​the groove in the liquid flow channel formed on the second main surface 130b may be equal to the cross-sectional area of ​​the groove in the liquid flow channel 160, or it may be larger than the cross-sectional area of ​​the groove in the liquid flow channel 160. Also, if a liquid flow channel is formed on the second main surface 130b, the liquid flow channel 160 does not need to be formed on the first main surface 130a.

[0327] Furthermore, in the embodiment described above, an example was described in which the second sheet outer surface recess 123 extends in the Y direction. However, it is not limited to this. For example, as shown in Figure 60, the multiple second sheet outer surface recesses 123 may be arranged along the bending line 108 or in the Y direction. Adjacent second sheet outer surface recesses 123 are spaced apart. In the example shown in Figure 60, the second sheet outer surface recesses 123 are arranged in a staggered pattern, but they may also be arranged in a grid pattern (see Figure 63), and the arrangement of the second sheet outer surface recesses 123 is arbitrary.

[0328] Of the multiple recesses 123 on the outer surface of the second sheet, some of them may overlap the first steam passage 151 or the second steam passage 152 in a plan view. The remaining recesses 123 on the outer surface of the second sheet do not have to overlap the first steam passage 151 or the second steam passage 152 in a plan view. Alternatively, all of the recesses 123 on the outer surface of the second sheet may overlap the first steam passage 151 or the second steam passage 152 in a plan view. In the example shown in Figure 60, the recesses 123 on the outer surface of the second sheet overlap the land portion 133, the frame portion 132, and the steam passages 151 and 152.

[0329] In the example shown in Figure 60, the stress acting on the second sheet 120 during bending of the vapor chamber 101 can be absorbed, and the second sheet 120 in the bending region 107 can be prevented from entering the first vapor passage 151 or the second vapor passage 152. Furthermore, in the example shown in Figure 60, since the adjacent outer surface recesses 123 of the second sheet are spaced apart, the decrease in the mechanical strength of the vapor chamber 101 in a specific direction can be prevented.

[0330] In the example shown in Figure 60, the second sheet outer surface recess 123 has a circular planar shape, but the planar shape of the second sheet outer surface recess 123 is arbitrary. For example, as shown in Figure 61, the second sheet outer surface recess 123 may have an elliptical planar shape. Also, for example, as shown in Figure 62, the second sheet outer surface recess 123 may have a rectangular planar shape. Furthermore, as shown in Figure 63, when the second sheet outer surface recess 123 has a rectangular planar shape, the second sheet outer surface recess 123 may be arranged such that each side of the rectangle is inclined with respect to the X and Y directions, and the opposing corners of the rectangle are aligned with the bend line 108. In the example shown in Figure 63, the second sheet outer surface recess 123 is arranged in a grid pattern. Also, the second sheet outer surface recess 123 and the bend line 108 may extend in a direction inclined in the X direction when viewed from above.

[0331] Furthermore, in the above-described embodiment, an example was described in which the second sheet outer surface recess 123 is located on the second sheet outer surface 120b of the second sheet 120 in the bending region 107. However, it is not limited to this. For example, as shown in Figure 64, the first sheet outer surface recess 113 may be located on the first sheet outer surface 110a of the first sheet 110 in the bending region 107. In this case, when the vapor chamber 101 is bent, the tensile stress acting on the first sheet 110 can be absorbed, and the first sheet 110 in the bending region 107 can be prevented from entering the first vapor passage 151 or the second vapor passage 152.

[0332] The first sheet outer surface recess 113 can be formed in the same way as the second sheet outer surface recess 123. As shown in Figure 64, the first sheet outer surface recess 113 may be formed on the first sheet outer surface 110a, and the second sheet outer surface recess 123 may be formed on the second sheet outer surface 120b. Alternatively, although not shown, the first sheet outer surface recess 113 may be formed on the first sheet outer surface 110a, and the second sheet outer surface recess 123 may not be formed on the second sheet outer surface 120b. Furthermore, the second sheet 120, on which the second sheet outer surface recess 123 is formed, may be placed on the outside of the bend, and the first sheet 110, on which the first sheet outer surface recess 113 is not formed, may be placed on the inside of the bend.

[0333] Furthermore, in the above-described embodiment, as shown in Figures 65 and 66, sheet grooves 70 and 80, as described in the first to fourteenth embodiments described above, may be provided. In the example shown in Figures 65 and 66, a sheet groove 70 is provided on the inner surface 120a of the second sheet 120. As shown in Figures 65 and 66, the sheet groove 70 may be provided in a position that overlaps with the steam passages 151 and 152 and the outer surface recess 123 of the second sheet in a plan view. The sheet groove 70 does not have to be provided in a position that does not overlap with the steam passages 151 and 152 in a plan view, for example, in a position that overlaps with the land portion 133. In the example shown in Figure 65, the first end 71 of the sheet groove 70 overlaps with the negative Y-side edge (lower side in Figure 65) of the land portion 133 in a plan view, and the second end 72 of the sheet groove 70 overlaps with the positive Y-side edge (upper side in Figure 65) of the land portion 133 in a plan view. Also, as shown in Figure 65, the sheet groove 70 does not have to be provided in a position that does not overlap with the recess 123 on the outer surface of the second sheet in a plan view. With such a sheet groove 70, the stress acting on the second sheet 120 when the vapor chamber 101 is bent can be absorbed even more, and the second sheet 120 in the bending region 107 can be further suppressed from entering the first steam passage 151 or the second steam passage 152.

[0334] In the examples shown in Figures 65 and 66, the sheet groove 70 is not provided in a position that does not overlap with the second sheet outer surface recess 123 in a plan view. However, the sheet groove 70 may also be provided in a position that does not overlap with the second sheet outer surface recess 123 in a plan view. In this case, since the working vapor 102a is easily condensed and the working fluid 102b is easily generated in the bent region 107, the condensed working fluid 102b can be quickly moved to the liquid flow path section 160 by the capillary action of the sheet groove 70, and the increase in flow resistance can be further suppressed.

[0335] (16th Embodiment) Next, a vapor chamber and electronic equipment according to the 16th embodiment of the present disclosure will be described with reference to Figures 67 and 68.

[0336] In the sixteenth embodiment shown in Figures 67 and 68, the main difference is that the curved line extends in a direction that is inclined in the first direction. The other configurations are substantially the same as those of the fifteenth embodiment shown in Figures 42 to 66. In Figures 67 and 68, the same reference numerals are used for parts that are the same as those in the fifteenth embodiment shown in Figures 42 to 66, and detailed descriptions are omitted.

[0337] As shown in Figures 67 and 68, the vapor chamber 101 according to this embodiment is bent along a curved line 108 that is inclined in the X direction in a plan view. The curved line 108 shown in Figures 67 and 68 extends in a direction inclined in the X direction and also in a direction inclined in the Y direction. The curved line 108 according to this embodiment also extends in a direction that intersects the X direction in a plan view.

[0338] As shown in Figure 68, each of the second sheet outer surface recesses 123 extends in a direction that is inclined in the X direction when viewed from above. In this case as well, the second sheet outer surface recesses 123 intersect in the X direction. The second sheet outer surface recesses 123 may be aligned in the X direction, or they may be spaced equally apart in the X direction. Each of the second sheet outer surface recesses 123 may be located parallel to each other.

[0339] As described above, according to this embodiment, the bend line 108 extends in a direction inclined in the X direction. This prevents the second sheet 120 in the bend region 107 from entering the first steam passage 151 or the second steam passage 152, even when the vapor chamber 101 is bent along the bend line 108 extending in a direction inclined in the X direction. As a result, the flow path cross-sectional area of ​​the first steam passage 151 and the second steam passage 152 can be secured, and the obstruction of the flow of working steam 102a in the bend region 107 can be prevented. As a result, the heat dissipation efficiency of the vapor chamber 101 can be improved even when it is bent.

[0340] In the embodiment described above, an example was described in which the second sheet outer surface recess 123 extends in a direction inclined in the X direction in a plan view. However, it is not limited to this. For example, multiple second sheet outer surface recesses 123 may be arranged along the bending line 108, or they may be arranged in a direction inclined in the X direction. In this case, the second sheet outer surface recesses 123 may be formed in the same way as in the example shown in Figures 60 to 63.

[0341] (Embodiment 17) Next, a vapor chamber and electronic equipment according to the 17th embodiment of this disclosure will be described with reference to Figures 69 and 70.

[0342] In the 17th embodiment shown in Figures 69 and 70, the main difference is that the land recess is located on the first or second main body surface of the land portion. The other configurations are substantially the same as those of the 15th embodiment shown in Figures 42 to 66. In Figures 69 and 70, the same reference numerals are used for parts that are the same as those in the 15th embodiment shown in Figures 42 to 66, and detailed descriptions are omitted.

[0343] As shown in Figure 69, the vapor chamber 101 according to this embodiment has a land recess 137 formed on the second main body surface 130b of the land portion 133. The land recess 137 does not communicate with the steam passages 151 and 152. The land recess 137 also does not communicate with the main channel groove 161 and the connecting groove 165 of the liquid flow channel portion 160. As described above, the liquid flow channel portion 160 is located on the first main body surface 130a of the land portion 133, and the land recess 137 is formed on the second main body surface 130b, which is located on the opposite side of the liquid flow channel portion 160. The liquid flow channel portion 160 may be formed on one of the first main body surface 130a and the second main body surface 130b of the land portion 133, and the land recess 137 may be formed on the other. For example, if the liquid flow channel portion 160 is located on the second main body surface 130b of the land portion 133, the land recess 137 may be formed on the first main body surface 130a of the land portion 133.

[0344] As shown in Figure 70, the land recess 137 overlaps the second sheet outer surface recess 123 in a plan view. In other words, the land recess 137 overlaps the second sheet outer surface recess 123 when the bent region 107 is viewed from either the inside or outside of the bend.

[0345] The land recess 137 is located in the bending region 107. The land recess 137 is formed in a concave shape on the second main body surface 130b, and may also be formed in a groove shape.

[0346] The land recess 137 extends in the X direction. The land recess 137 intersects with the second sheet outer surface recess 123. The land recess 137 may extend beyond the second sheet outer surface recess 123 on both sides in the X direction.

[0347] Land recesses 137 may be formed in each land portion 133. Multiple land recesses 137 may be formed in a single land portion 133. The land recesses 137 may be aligned along the second sheet outer surface recess 123 and the bending line 108, or they may be aligned in the Y direction. The land recesses 137 may be located parallel to each other. The land recesses 137 may be formed in the frame portion 132.

[0348] The land recess 137 is formed by etching from the second main surface 130b of the wick sheet 130 in the wick sheet etching process described above. As a result, the land recess 137 may have a curved wall surface, as shown in Figure 69. This wall surface may define the land recess 137 and be curved in a shape that bulges out toward the first main surface 130a.

[0349] As shown in Figure 69, the width w19 of the land recess 137 may be, for example, 50 μm to 150 μm. The width w19 represents the dimension of the land recess 137 on the second main body surface 130b. The width w19 corresponds to the Y-direction dimension of the land recess 137. The depth h13 of the land recess 137 may be, for example, 20 μm to 120 μm. The depth h13 corresponds to the Z-direction dimension of the land recess 137.

[0350] As described above, according to this embodiment, a land recess 137 that does not communicate with the steam passages 151 and 152 is located on the second main surface 130b of the land portion 133, and the land recess 137 overlaps with the second sheet outer surface recess 123. This reduces the rigidity of the land portion 133 in the bending region 107. Therefore, the land portion 133 can be easily bent when the vapor chamber 101 is bent.

[0351] Furthermore, according to this embodiment, the land recess 137 extends to both sides in the X direction beyond the second sheet outer surface recess 123. This allows the rigidity of the land portion 133 to be reduced even in the vicinity of the second sheet outer surface recess 123. Therefore, when the vapor chamber 101 is bent, the land portion 133 can be bent more easily.

[0352] In the embodiment described above, an example was described in which the second sheet outer surface recess 123 and the bend line 108 extend in the Y direction in a plan view. However, it is not limited to this. For example, the second sheet outer surface recess 123 may extend in a direction that is inclined in the X direction in a plan view. As shown in Figures 67 and 68, the second sheet outer surface recess 123 and the bend line 108 may extend in a direction that is inclined in the X direction in a plan view. In this case as well, the land recesses 137 formed in each land portion 133 may overlap the second sheet outer surface recess 123 and be aligned along the second sheet outer surface recess 123 and the bend line 108.

[0353] The present invention is not limited to the embodiments and modifications described above, and the components can be modified and implemented in practice without departing from the spirit of the invention. Furthermore, various inventions can be formed by appropriate combinations of the multiple components disclosed in the embodiments and modifications described above. Some components may be deleted from all the components shown in the embodiments and modifications described above.

Claims

[Claim 1] A vapor chamber in which a working fluid is sealed, The main sheet and The main body sheet comprises a first sheet laminated on the main body sheet, The main body sheet includes a steam passage section through which the vapor of the working fluid passes, and a liquid passage section communicating with the steam passage section and through which the liquid of the working fluid passes. The steam flow section includes a plurality of steam passages extending along the first direction, The first sheet includes a first sheet inner surface facing the main sheet, a plurality of first sheet grooves provided on the first sheet inner surface, and a plurality of first sheet connecting grooves provided on the first sheet inner surface that connect adjacent first sheet grooves. A vapor chamber is provided in which the first sheet groove and the first sheet connecting groove are located in a position that overlaps with the steam passage in a plan view.

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