Contact intermediate products

Abstract

The objective is to provide a contact intermediate product that can absorb the amount of deformation of the base material due to temperature changes during the manufacturing of the contact intermediate product, thereby avoiding damage such as cracks that may occur due to thermal stress. [Solution] In order to solve the above problem, the contact intermediate product according to the present invention comprises a contact and a tab of a plate-shaped substrate having a connecting portion that connects to one end of the contact, wherein the tab has a buffer portion that separates a part of the plate-shaped substrate from each other and absorbs deformation of the plate-shaped substrate.

Description

Technical Field

[0001] The present invention relates to a contact intermediate product and is applicable to a contact intermediate product having probes attached to a probe card or the like.

Background Art

[0002] There is a contact intermediate product in which a tab and a contact connected to the tab are integrally formed on a substrate by MEMS (Micro Electro Mechanical System) technology. When setting the contact on a probe card or the like, the contact is peeled off from the substrate and attached to the probe card or the like.

[0003] Patent Document 1 discloses a probe attachment body in which a vertical probe and a tab are integrally formed on a substrate. In the operation of peeling the vertical probe from the substrate, the probe is peeled off by manually or mechanically pulling the vertical probe from the substrate by a dedicated gripping device.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, one of the manufacturing processes of the contact intermediate product is a heat treatment process of heating or cooling. Due to the temperature change in this heat treatment process, the base material of the contact intermediate product expands or contracts to generate strain, and stress is generated due to this strain. At this time, near the connection part between the contact and the tab, damage such as cracks may occur under the influence of stress.

[0006] Therefore, the present invention aims to provide a contact intermediate product that can absorb the amount of deformation of the substrate due to temperature changes and avoid damage such as cracks that may occur due to thermal stress. [Means for solving the problem]

[0007] To solve these problems, the contact intermediate product according to the present invention comprises a contact and a tab of a plate-shaped substrate having a connecting portion that connects to one end of the contact, wherein the tab has a buffer portion that separates a part of the plate-shaped substrate from each other and absorbs deformation of the plate-shaped substrate. [Effects of the Invention]

[0008] According to the present invention, the amount of deformation of the substrate due to temperature changes can be absorbed, thereby preventing damage such as cracks that may occur due to thermal stress. [Brief explanation of the drawing]

[0009] [Figure 1] This is a configuration diagram (part 1) showing the configuration of the contact intermediate product according to the embodiment. [Figure 2] This is a diagram (part 2) showing the configuration of the contact intermediate product according to the embodiment. [Figure 3] This is a configuration diagram (part 3) showing the configuration of the contact intermediate product according to the embodiment. [Figure 4] This is a diagram (part 4) showing the configuration of the contact intermediate product according to the embodiment. [Figure 5] This is a diagram (part 5) showing the configuration of the contact intermediate product according to the embodiment. [Modes for carrying out the invention]

[0010] (A) Embodiment Hereinafter, embodiments of the contact intermediate product according to the present invention will be described in detail with reference to the drawings.

[0011] (A-1) Configuration of the embodiment Figure 1 is a configuration diagram showing the configuration of a contact intermediate product according to an embodiment.

[0012] In Figure 1, the contact intermediate product 1 according to the embodiment has a contact 11, a tab 12, and a fixing tab 13.

[0013] For example, the contact intermediate product 1 can be manufactured by integrally forming the contact 11, tab 12, and fixing tab 13 on a substrate using semiconductor integrated circuit manufacturing technology or MEMS technology such as deep etching. Multiple contact intermediate products 1 may be formed on the substrate.

[0014] The contactor 11 is a contactor that is used to make contact with the electrode terminals of a semiconductor device (object under inspection), such as a semiconductor integrated circuit, during electrical inspection of the object under inspection. For example, the contactor 11 can be a vertical probe that extends in a straight line. However, the contactor 11 is not limited to a vertical probe.

[0015] For example, the contactor 11 is attached to an electrical connection device, such as a probe card or test socket, which can be connected to a semiconductor testing device. During electrical testing of the object under test, the electrical connection device brings the electrode terminals of the object under test into contact with the contactor 11, and the electrical connection device enables the exchange of electrical signals between the semiconductor testing device and the object under test via the contactor 11.

[0016] The fixing tab 13 is a portion fixed to the substrate. The fixing tab 13 has a connecting portion 5 that is detachably connected to the tab 12. When detaching the tab 12 and the contact 11 while they are connected, the fixing tab 13 becomes the fixed end, and for example, by moving the tab 12 and the contact 11 relative to each other on the substrate surface, the tab 12 and the contact 11 are detached from the fixing tab 13. By cutting the connecting portion 5 in this way, the tab 12 and the contact 11 can be detached from the substrate while they are connected.

[0017] In this embodiment, the case where the fixed tab 13 has a substantially cylindrical shape is illustrated, but the fixed tab 13 may have a substantially prismatic shape. Further, in this embodiment, the shape of the tab 12 is L-shaped in plan view. However, when the tab 12 is peeled off from the fixed tab 13 at the connecting portion 5, the shape is not limited to the L-shape as long as the fixed tab 13 and the tab 12 do not interfere with each other.

[0018] The tab 12 is a plate-like member having a connecting portion 4 that is detachably connected to the contact 11 and a connecting portion 5 that is also detachably connected to the fixed tab 13.

[0019] For example, when peeling the contact 11 from the substrate, the connecting portion 5 is cut with the fixed tab 13 as a fixed end, and the tab 12 in the state of being connected to the contact 11 is separated from the substrate. Next, when using the contact 11, the connecting portion 4 is cut, the contact 11 is peeled off from the tab 12, and the tab 12 and the contact 11 are separated.

[0020] The connecting portion 4 is a portion that connects the contact 11 and the tab 12. The connecting portion 4 may be a single-point connection that connects the contact 11 and the tab 12 at one location, or a two-point connection that connects them at two locations. Of course, it may be connected at three or more locations.

[0021] The connecting portion 5 is a portion that connects the tab 12 and the fixed tab 13. The connecting portion 5 is also a single-point connection that connects the tab 12 and the fixed tab 13 at one location, but is not limited to this, and may be a two-point connection or three or more locations.

[0022] In this embodiment, the case where the tab 12 is an L-shaped plate-like member having a main body portion and a tongue piece portion in plan view is illustrated. In other words, the tab 12 has a substantially rectangular cutout portion including one corner portion in order to provide the fixed tab 13 in a substantially rectangular member in plan view. The shape of the tab 12 is not limited to this. For example, the cutout portion is not limited to a substantially rectangular shape, and may be a substantially fan-shaped, substantially triangular shape, etc., as long as the fixed tab 13 can be arranged, or there may be no cutout portion.

[0023] Tab 12 has a buffer portion 3 that absorbs the amount of deformation of the substrate when the substrate expands and contracts due to temperature changes during the heat treatment process.

[0024] One of the manufacturing processes for the contact intermediate product 1 is a heat treatment process. Conventionally, contact intermediate products are formed on a substrate using MEMS technology, but the contact 11 and fixing tab 13 are sometimes heat-treated while fixed to the substrate. In this case, thermal stress due to temperature changes can act on the contact intermediate product, causing cracks, etc., and cracks are particularly likely to occur in areas with weak strength, such as near the connection part 4 between the contact and the tab. Therefore, in this embodiment, the tab 12 is designed to separate parts of the substrate from each other, providing a buffer part 3 that absorbs deformation of the substrate.

[0025] In this way, the buffer portion 3 absorbs the amount of deformation caused by the expansion and contraction of the base material, thereby releasing the stress generated throughout the contact intermediate product 1. In particular, the stress generated in the connection portion 4 between the contact 11 and the tab 12, which is a weak point, can be distributed, thus preventing the occurrence of cracks near the connection portion 4.

[0026] The buffer portion 3 can be broadly applied as long as it has a structure that can absorb the deformation of the base material and release stress. For example, the buffer portion 3 can be a notched portion in a plate-shaped tab 12. The shape of the buffer portion 3 as a notch can be various. The shape of the buffer portion 3 will be described later with reference to the drawings. The width of the slit in the notch is not particularly limited, but it is desirable that the width be such that the notched tabs 12 do not interfere with each other.

[0027] Here, we will explain an example of the structure of the buffer section 3 using the drawings.

[0028] In the example shown in Figure 1, the buffer portion 3 is a roughly T-shaped notch. Generally, if we consider the rectangular tab 12 as having a first end 121, a second end 122, a third end 123, and a fourth end 124, the buffer portion 3 has a first slit portion 31 extending from the second end 122 towards the fourth end 124 (X-axis direction) near the center of the tab 12, and a second slit portion 32 extending in the vertical direction (Y-axis direction) towards the first end 121 side and the third end 123 side.

[0029] In other words, on the substrate of the plate-shaped contact intermediate product 1, a first slit portion 31 extends in an axial direction perpendicular to the axial direction of the contact 11 (also called the "first direction"), and a second slit portion 32 extends in the same axial direction as the axial direction in which the contact 11 extends (also called the "second direction"). In this example, the first slit portion 31 extends in an axial direction perpendicular to the axial direction of the contact 11, but it is not limited to this, and may intersect at a predetermined angle that is not perpendicular to the axial direction of the contact 11. In addition, although the first slit portion 31 and the second slit portion 32 are perpendicular to each other, they may intersect at an angle other than a right angle.

[0030] Furthermore, the second slit portion 32 branches out in two directions from the intersection with the first slit portion 31, with a first branch portion 321 extending in a first direction toward the first end portion 121 from the intersection, and a second branch portion 322 extending in a second direction toward the third end portion 123. That is, the first branch portion 321 extends in the direction toward the first end portion 121 on the Y axis, and the second branch portion 322 extends in the direction toward the third end portion 123 on the Y axis.

[0031] When the heat treatment process was performed using the contactor intermediate product 1 shown in Figure 1, the deformation of the tab 12 was kept to a minimum, and damage such as cracks was avoided.

[0032] In the example shown in Figure 1, the length of the first branch portion 321 is longer than the length of the second branch portion 322, and the end of the first branch portion 321 extends close to the contact 11. The relationship between the length of the first branch portion 321 and the length of the second branch portion 322 is not particularly limited, but it is desirable that the length of the first branch portion 321 be about twice as long as that of the second branch portion. The lengths of the first branch portion 321 and the second branch portion 322 may be approximately the same.

[0033] In the example shown in Figure 2, the buffer portion 3A is a roughly T-shaped notch, and although its left-right symmetry is reversed (line symmetry) compared to the structure of buffer portion 3 in Figure 1, it is basically the same structure. In other words, the buffer portion 3A has a slit portion 31A extending in the width direction (X-axis direction) from the fourth end 124 to the second end 122 near the center of the tab 12, and a slit portion 32A extending in the vertical direction (Y-axis direction) toward the first end 121 side and the third end 123 side.

[0034] In the contact intermediate product 1A illustrated in Figure 2, the buffer portion 3 was able to absorb the amount of deformation due to expansion and contraction caused by temperature changes during the heat treatment process, thereby minimizing the deformation of the tab 12 and avoiding damage such as cracks.

[0035] In the example shown in Figure 3(A), the buffer portion 3B has a slit portion 31B extending from the second end 122 towards the fourth end 124 (X-axis direction) near the center of the tab 12. The buffer portion 3C in Figure 3(B) has basically the same structure and has a slit portion 31C extending from the fourth end 124 towards the second end 122 in the width direction (X-axis direction) near the center of the tab 12.

[0036] In the example shown in Figure 3(A), the slit portion 31B is provided near the center of the tab 12, but the slit portion 31B may also be provided closer to the connecting portion 4. In other words, the slit portion 31B is not limited to the area near the center of the tab 12. The same applies to the case shown in Figure 3(B).

[0037] In the example shown in Figure 4, the buffer portion 3D has a roughly S-shaped slit portion extending from near the connecting portion 4 of the first end 121 of the tab 12 toward the third end 123. For example, the buffer portion 3D has a slit portion 31D extending in the Y-axis direction from the first end 121, a slit portion 32D extending in the X-axis direction continuous with the slit portion 31D, and a slit portion 33D extending in the Y-axis direction continuous with the slit portion 33D.

[0038] Note that the shape of the buffer portion 3D is not limited to Figure 4. For example, the lengths of the three slit portions 31D, 32D, and 33D may be different, or they may be the same length.

[0039] Furthermore, a buffer portion 3D is provided near the connection portion 4 with the contact element 11, so that it can absorb the amount of deformation that occurs near the connection portion 4 and release the stress. For example, the buffer portion 3D is shown as being bent twice to form an S shape, but it is not limited to an S shape; it may be bent once or three or more times.

[0040] In the examples shown in Figures 5(A) and 5(B), the buffer sections 3E and 3F have an elastic structure in the Y-axis direction. In these examples, the buffer sections 3E and 3F each have a bellows-like structure with multiple bends. The structures shown in Figure 5(A) and Figure 5(B) are basically the same structure, although the bending direction is different. In other words, the buffer sections 3E and 3F have a spring-like structure.

[0041] For example, the buffer section 3E and the buffer section 3F are each provided with a connection part 4 for the contact element 11 on the first end 121 side of the tab 12, and a connection part 5 for the fixed tab 13 on the third end 123 side of the tab 12. The base material of a predetermined width W is bent in a bellows-like manner multiple times (for example, 6 times) from the first end 121 to the third end 123.

[0042] The number of folds can be designed according to the amount of deformation due to the expansion and contraction of the base material. While the example shows the base material width W being uniform, it may vary depending on the location of the fold.

[0043] The structure of the buffer portion 3 is not limited to those illustrated in Figures 1 to 5. For example, the slit portion of the buffer portion 3 may be curved. It may be a curve with one inflection point, an S-shaped curve with two inflection points, or a curve with three or more inflection points.

[0044] If the buffer portion 3 has multiple slits, one of the slits may be straight in the X-axis or Y-axis direction, while another slit may be curved. In other words, a mixture of straight and curved slits is acceptable.

[0045] (A-2) Effects of the embodiment As described above, according to this embodiment, since the contact intermediate product is equipped with a buffer portion, the buffer portion can absorb the amount of deformation of the base material due to thermal stress, thereby preventing damage such as cracks that may occur near the connection portion with the contact.

[0046] (B) Other embodiments Although various modified embodiments have been mentioned in the embodiments described above, the present invention can also be applied to the following modified embodiments.

[0047] (B-1) In the embodiments described above, the contact element 11 and the fixing tab 13 are shown to be located on different axes, but in the contact intermediate product according to the present invention, the contact element 11 and the fixing tab 13 may be located on the same axis. In other words, the central axis of the contact element 11 and the axis parallel to the Y-axis passing through the centroid (center) of the fixing tab 13 may be on the same axis.

[0048] (B-2) In the above-described embodiment, the example shown was that the fixing tab 13 is cylindrical (circular in plan view), but the fixing tab 13 may also be rectangular prism-shaped (square or rectangular in plan view).

[0049] (B-3) In the embodiments described above, the example is that the method is applied to a contact intermediate product having a fixing tab, but it can also be applied to contact intermediate products that do not have a fixing tab, as long as they are equipped with a buffer.

[0050] (B-4) In the embodiments described above, the buffer portion as a notch was shown as having a structure in which it is notched in a first direction (a direction perpendicular to the central axis of the contactor 11) and a second direction (a direction perpendicular to the first direction), but a structure in which it is notched in an oblique direction is also acceptable.

[0051] (B-5) In the embodiments described above, Figures 1 and 2 illustrate a substantially T-shaped buffer portion 3, but an L-shaped buffer portion is also possible. That is, a buffer portion having a slit portion formed in a first direction and a slit portion formed in a second direction continuous with the slit portion may be formed in an L-shape. [Explanation of Symbols]

[0052] 1, 1A, 1B, 1C, 1D, 1E, 1F... Contact intermediate products, 3, 3A, 3B, 3C, 3D, 3E, 3F...buffer section, 4...Connecting part, 5...Connecting part, 11...Contact, 12...Tab, 13...Fixing tab, 31...First slit section, 31A, 31B, 31C, 31D...Slit sections, 32...Second slit section, 32A, 32B, 32D, 32D...Slit section, 33D...Slit section, 121...First end, 122...Second end, 123...Third end, 124...Fourth end, 321...First branching point, 322...Second branching point.

Claims

1. Contactor and, A tab of a plate-shaped substrate having a connecting portion that connects to one end of the aforementioned contactor and Equipped with, The aforementioned tab is a contact intermediate product characterized by having a buffer portion that absorbs deformation of the plate-shaped substrate by separating a portion of the plate-shaped substrate from each other.

2. The aforementioned buffer portion is formed by cutting out a plate-shaped base material. The buffer portion has a first notch formed in the tab in a first direction intersecting the central axis of the contactor. The contact intermediate product according to feature 1.

3. The buffer portion has a second notch in the tab that is continuous with the first notch and is formed in a second direction intersecting the first direction. The contact intermediate product according to feature 2.

4. The buffer portion is formed by cutting out a plate-shaped base material and has a curved cutout portion. The contact intermediate product according to feature 1.

5. The contact intermediate product according to claim 1, characterized in that the buffer portion is provided near the connecting portion.

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