Micro-operation device

Abstract

To ensure a sufficient range of motion for fine work while minimizing changes in the position where the work is performed. [Solution] The control unit 70 of the micro-working device 1 receives a movement input for the tip position of the micro-working manipulator 10, which is the operating position for micro-working. Using the operating position as the target position, it calculates the amount of drive for the micro-working manipulator 10 and the robot unit 20 and controls the operation of the micro-working manipulator 10 and the robot unit 20 based on the amount of drive.

Description

Technical Field

[0001] The present invention relates to an apparatus for fine work.

Background Art

[0002] In so-called microsurgery, in which surgery is performed under a microscope on fine surgical targets such as anastomosis of thin blood vessels, nerves, and lymphatic vessels with a diameter of about 0.5 to 2 mm in surgeries related to orthopedic surgery, plastic surgery, and reconstruction surgery of defective parts, due to the small size of the surgical target, extremely precise and accurate work is required, and the surgery requires skill. In addition, due to the difficulty of the surgery, it tends to take a long time, and in the case of such long-term surgery, the burden on the surgeon also increases. From these points, in microsurgery, compared to the necessity, the number of surgeons who can perform surgery is limited, and it has not been possible to perform surgery frequently.

[0003] Here, considering the utilization of a manipulator (robot) that has made significant technological progress in recent years, a master-slave manipulator can not only reproduce human movements as they are, but also perform movements with reduced human movements. If a manipulator that operates precisely substitutes for operations related to surgery, it is expected to reduce the burden on the surgeon and improve the efficiency of surgery while eliminating the influence of hand tremors and ensuring accuracy.

[0004] Therefore, the present inventors have proposed a fine work support system that can appropriately perform operations related to work by remote operation and efficiently support work, and a fine work manipulator used therefor (see Patent Document 1).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] The manipulator for fine work disclosed in Patent Document 1 operates the forceps at its tip using a parallel link mechanism. However, the parallel link mechanism has a certain range of motion, and if this range is exceeded, the forceps at the tip cannot be moved as intended and eventually stops. Before this happens, if the robot unit supporting the parallel link mechanism is rotated to move the parallel link mechanism closer to its initial position, the range of motion of the forceps at the tip is secured, and fine work can be performed continuously without stopping.

[0007] In the technology disclosed in Patent Document 1, the parallel link section has 6 degrees of freedom, but the robot section has a configuration of 4 degrees of freedom in order to achieve miniaturization. The 4 degrees of freedom consist of 3 degrees of freedom in the rotational direction and 1 degree of freedom in the radial translation direction in polar coordinates, and the two translation directions perpendicular to the radial direction, which are necessary to have 6 degrees of freedom, do not move.

[0008] Therefore, even if the robot section is moved to return the parallel link mechanism to its initial position, the aforementioned two-directional translation cannot be performed, causing the tip position of the forceps to shift.

[0009] However, because this micro-working device is used for delicate tasks, the translational displacement in the two directions mentioned above is at most about ±15 mm, which is not very large.

[0010] If the forceps at the tip of the robot were to move due to the movement of the robot section, it would affect fine work. However, by correcting this relatively small two-directional translational movement with the operation of the parallel link mechanism, the forceps at the tip remain stationary due to this correction. Furthermore, the parallel link mechanism remains almost in its initial position, ensuring the range of motion of the forceps at the tip is maintained.

[0011] The present invention has been made in view of the above problems, and aims to provide a device for fine work that can secure the operating range of fine work without causing changes in the position in which the fine work is performed. [Means for solving the problem]

[0012] To solve the above problems, a micro-working device according to one aspect of the present invention is a micro-working device that performs predetermined operations related to micro-work on a work object on behalf of a person, comprising: a micro-working manipulator that performs micro-work and has a predetermined range of motion; a robot unit that supports the micro-working manipulator and has a range of motion wider than the range of motion; and a control device that controls the driving of the micro-working manipulator and the robot unit, wherein the control device receives a movement input of the tip position of the micro-working manipulator, which is the operating position of the micro-working, calculates the amount of drive of the micro-working manipulator and the robot unit with the operating position as the target position, and controls the operation of the micro-working manipulator and the robot unit based on the amount of drive. [Effects of the Invention]

[0013] According to the present invention, it is possible to realize a device for fine work that can secure the operating range of fine work without causing changes in the position in which the fine work is performed. [Brief explanation of the drawing]

[0014] [Figure 1] This is a perspective view showing the schematic configuration of a fine work apparatus according to an embodiment. [Figure 2] This is a perspective view showing the schematic configuration of a fine work apparatus according to an embodiment. [Figure 3] This is a side view showing the schematic configuration of a fine work apparatus according to an embodiment. [Figure 4] This is a perspective view showing the schematic configuration of the fine work manipulator and robot section of the fine work device according to the embodiment. [Figure 5] This is a perspective view showing a manipulator for fine work in a fine work apparatus according to an embodiment. [Figure 6] This is a perspective view showing the main parts of the fine work manipulator of the fine work device according to the embodiment. [Figure 7] This is a perspective view showing the main parts of the fine work manipulator of the fine work device according to the embodiment. [Figure 8] It is a block diagram showing a schematic configuration of a micro-operation device according to an embodiment. [Figure 9] It is a perspective view showing an example of the operation of a micro-operation device according to an embodiment. [Figure 10] It is a perspective view showing another example of the operation of a micro-operation device according to an embodiment. [Figure 11] It is a perspective view showing still another example of the operation of a micro-operation device according to an embodiment. [Figure 12] It is a side view showing an example of the operation of a micro-operation device according to an embodiment. [Figure 13] It is a perspective view showing an example of the operation of a micro-manipulator for micro-operations of a micro-operation device according to an embodiment. [Figure 14] It is a perspective view showing another example of the operation of a micro-manipulator for micro-operations of a micro-operation device according to an embodiment. [Figure 15] It is a flowchart showing an example of the operation of a micro-operation device according to an embodiment.

Mode for Carrying Out the Invention

[0015] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the embodiments described below do not limit the invention according to the claims, and not all of the elements and combinations thereof described in the embodiments are essential for the solution means of the invention.

[0016] In the drawings for explaining the embodiments, the same reference numerals are given to portions having the same function, and the repeated description thereof is omitted.

[0017] In the present embodiment, a micro-operation device to which a micro-manipulator for surgical support corresponding to microsurgery as a micro-operation is applied will be described.

[0018] As shown in Figures 1 to 4 and 8, the fine work apparatus 1 according to this embodiment comprises a fine work manipulator 10, a robot unit 20 to which the fine work manipulator 10 is attached as the tip, a base 30 that supports the robot unit 20 from below, an imaging unit 40 similarly attached to the base 30 for imaging the surgical target, a display unit 50 that enlarges the image of the surgical target acquired by the imaging unit 40 and displays it for the user to see, a master unit 60 that receives input instructions from the user, and a control unit 70 that controls the movement of the fine work manipulator 10 and the robot unit 20 in accordance with the master unit 60 moved by the user.

[0019] The master unit 60 includes an operation input unit (not shown) that receives user input, and a support mechanism unit 61 that movably supports the operation input unit and acquires information on the position and orientation of the operation input unit.

[0020] The robot unit 20 has three degrees of freedom for rotation and one degree of freedom for radial translation. The robot unit 20 has a motor 21 and an encoder unit 22 for detecting the rotation angle of the motor 21 (not shown in Figures 1 to 4, see Figure 8). In the illustrated example, a pair of robot units 20 and a fine work manipulator 10 are provided on the base 30, but there is no particular limit on the number of robot units 20 and fine work manipulators 10.

[0021] The imaging unit 40 is used to image the tip of the end effector of the fine work manipulator 10 (described later) and the surgical target. It is positioned, for example, above the robot unit 20, in a location that allows for an overhead view of at least the tip of the fine work manipulator 10 and the surgical target. This imaging unit 40 is a known video camera capable of acquiring high-resolution images that can be magnified to the same magnification as conventional microsurgery microscopes, ensuring reproducibility. Therefore, a detailed explanation is omitted here.

[0022] The display unit 50 displays the image of the surgical target acquired by the imaging unit 40, enlarged as needed, so that it can be viewed by the user. This display unit is a known display device such as a liquid crystal display capable of displaying images obtained by imaging at high resolution, and therefore a detailed explanation is omitted here.

[0023] The base 30 has a movable mechanism (not shown), and the fine work manipulator 10, robot unit 20, and imaging unit 40, all mounted on the base 30, are configured to be movable to a predetermined position on the floor of the operating room (not shown) based on movement support from the control unit 70. As a result, the fine work device 1 of this embodiment can approach and move away from the operating table 3 on which the patient 2, the subject of surgery shown in Figure 1, lies, and furthermore, at least the tip of the fine work manipulator 10 can be positioned at the surgical site of the patient 2.

[0024] Next, the fine work manipulator 10 will be described with reference to Figures 5 to 7.

[0025] The fine work manipulator 10 includes a base (not shown) supported by a robot unit 20, an end effector 12 for handling a surgical object or surgical instrument, six links 13 arranged in parallel, and six linear actuators 14 supported by the base for moving each link 13.

[0026] These base, end effector 12, link 13, and linear actuator 14 constitute a 6-degree-of-freedom parallel link mechanism, in which the linear actuator 14 moves one end of each link 13 in a straight line, thereby moving the end effector 12 connected to the other end of the link 13.

[0027] The parallel link mechanism allows the position and orientation of the end effector 12, which handles the surgical object or surgical instrument, to be varied within a predetermined range relative to the base. Having six degrees of freedom, it allows the end effector 12 at the tip to move in a manner equivalent to that of manual support.

[0028] The linear actuator 14 is a coil-movable linear motor in which the coil 15b is part of the movable element 15 and the permanent magnet 16a is part of the stator 16. The stator 16 is provided with a sensor unit 16c (not shown in Figures 5 to 7, see Figure 8) that detects the amount of movement of the movable element 15.

[0029] The movable element 15 includes a linear slider 15a that is arranged to move linearly relative to the base, a thin cylindrical coil 15b integrally attached to the linear slider 15a in a direction parallel to its direction of movement, and a connecting member 15c attached to the end of the coil 15b that connects the coil 15b to the linear slider 15a. One end of a link 13 is connected and fixed to the end of the linear slider 15a in the movable element 15 via the connecting member 15c, and this one end of the link 13 moves linearly together with the linear slider 15a and the other movable elements 15.

[0030] The stator 16 is formed in a cylindrical shape that is thicker and shorter than the coil 15b of the movable element 15, and has a permanent magnet 16a fixed to the base by fixing means not shown in the figure.

[0031] In the stator 16, a cylindrical permanent magnet 16a fixed to the base is positioned such that its cylindrical axis is aligned with that of the coil 15b of the movable element 15, and the coil 15b is movably penetrated through the internal space of the permanent magnet 16b.

[0032] By using a linear motor for the linear actuator 14 in this way, compared to other linear motion mechanisms such as ball screws, the number of mechanically moving parts can be reduced, contact parts involving sliding and rolling can be reduced, backlash can be eliminated, the reliability of the mechanism can be increased, and power consumption required for driving can be reduced by reducing frictional resistance.

[0033] The linear actuator 14, which is a linear motor consisting of a movable element 15 and a stator 16, is arranged such that the direction of movement of the movable elements 15 is parallel to each other, and the permanent magnets 16a of the stator 16 and the coils 15b of the movable element 15 are closest to a predetermined virtual centerline that is parallel to the direction of movement of the movable elements 15 and extends in the longitudinal direction of the linear actuator 14, and that the permanent magnets 16a and coils 15b are equally spaced around the virtual centerline.

[0034] Furthermore, the permanent magnets 16a forming the stator 16 are positioned to penetrate the internal space of the cylinder and be close to the other coils 15b that make up a set of linear motor coils 15b. However, unlike the coils 15b, the fixed permanent magnets 16a do not have fluctuations in their magnetic field and therefore do not have a magnetic effect on the movement of the other coils 15b.

[0035] Since the movable elements 15 and stator 16 of each linear motor constituting the linear actuator 14 are arranged around a virtual centerline, the linear actuator portion of the fine work manipulator 10 can be made into a compact structure. Furthermore, due to the mechanical structure, the ends of the coils 15b of the movable element 15 that fluctuate the fixed magnetic field do not come very close to the permanent magnets 16a of the stator 16. Therefore, fluctuations in the magnetic field that cause cogging in response to the movement of the movable element 15 can be suppressed, and smooth operation of the linear actuator 14 can be achieved.

[0036] Link 13 is a rod-shaped body formed by connecting two rigid, non-deformable, substantially rod-shaped members in the longitudinal direction. At both ends of this rod-shaped body are joints 13a and 13b with multiple degrees of freedom for connection to the linear actuator 14 and the rotation support part 17, respectively. In this link 13, the substantially rod-shaped members forming the rod-shaped body are rotatably connected to each other, and the structure provides a degree of freedom of rotation around an axis parallel to the longitudinal direction between the part of link 13 closer to one end and the part of link 13 closer to the other end.

[0037] The coupling 13a at one end of link 13 has a structure that allows for degrees of freedom of rotation around two mutually orthogonal axes, and is connected to the end of the linear slider 15a of the linear actuator 14. The coupling 13b at the other end of link 13 has a similar structure that allows for degrees of freedom of rotation around two mutually orthogonal axes, and is connected to the rotation support 17.

[0038] By providing a degree of rotational freedom between the end and other ends of the link 13, and by connecting the link 13 with joints 13a and 13b, each having two degrees of rotational freedom at both ends, each link 13 can freely change its orientation relative to the linear actuator 14 and the rotating support part 17, similar to when connected using a ball joint. Furthermore, by arranging the link mechanism between the linear actuator 14 and the rotating support part 17 as a parallel link mechanism with six links 13 in parallel, the mechanism allows for various movements related to changes in the position and orientation of the rotating support part 17 and the end effector 12 provided at the tip of the rotating support part 17 with respect to the base, with a total of six degrees of freedom: three degrees of freedom for movement in three mutually orthogonal axial directions and three degrees of freedom for rotation around each of the three axes, similar to when the end effector 12 is supported by a human hand.

[0039] Next, with reference to Figures 9 to 14, the operation of the micro-working device 1 of this embodiment, particularly the operation of the robot unit 20 and the micro-working manipulator 10, will be described.

[0040] As described above, the parallel link mechanism of the fine work manipulator 10 has 6 degrees of freedom. Therefore, when performing fine work with the end effector 12 after moving the base 30 to a predetermined position and fixing the three-dimensional position and rotational position of the fine work manipulator 10 to a predetermined position using the robot unit 20, this can be done mainly by the operation of the parallel link mechanism, which has 6 degrees of freedom. However, there are certain limitations to the range of motion of the parallel link mechanism, and when moving the tip of the end effector 12 beyond this range of motion, it is necessary to change the position of the fine work manipulator 10 itself using the robot unit 20, while returning the parallel link mechanism to its initial position, that is, a position symmetrical to the central axis of the fine work manipulator 10.

[0041] Figure 9 shows a fine-work manipulator 10 with the parallel link mechanism near its operational range. In the figure, the end effector 12 is near the operational range of the parallel link mechanism in the lower left direction. To move the end effector 12 further in the lower left direction, it is necessary to operate the robot unit 20 while returning the parallel link mechanism to its initial position, thereby compensating for the movement of the tip position of the end effector 12 caused by returning the parallel link mechanism to its initial position.

[0042] In the example shown in Figure 10, the robot unit 20 is operated from the position of the fine work manipulator 10 shown in Figure 9 (indicated as A in the figure), causing the fine work manipulator 10 to rotate counterclockwise (indicated as B in the figure), while the parallel link mechanism is returned to its initial position. This restores the operating range of the parallel link mechanism, as shown in Figure 11.

[0043] However, in the micro-working device 1 of this embodiment, the robot unit 20 only has three degrees of freedom for rotation and one degree of freedom for translation in the radial direction. Therefore, as shown in Figures 12 and 13, if the robot unit 20 rotates the micro-working manipulator 10 while returning the parallel link mechanism to its initial position, the position of the end effector 12 may be translated (translation is indicated by C in the figures).

[0044] Therefore, in the micro-working device 1 of this embodiment, the micro-working manipulator 10 and the robot unit 20 are linked so that the position of the end effector 12 does not shift in parallel. In the example shown in Figure 14, the robot unit 20 rotates the micro-working manipulator 10 while returning the parallel link mechanism to near its initial position, using the tip position of the end effector 12 as the control target position, so as not to move the tip position of the end effector 12.

[0045] This makes it possible to realize a fine work device 1 that can ensure the operating range of fine work by the fine work manipulator 10 while minimizing fluctuations in the position of the end effector 12 that performs fine work.

[0046] Figure 15 is a flowchart showing an example of the operation of the micro-working device 1 of this embodiment.

[0047] First, the user operates the master unit 60 to give an operation input instruction to the fine work device 1, and the control unit 70 accepts this operation input instruction (step S10).

[0048] Next, the control unit 70 calculates the target coordinate position and rotation angle of the tip of the end effector 12 based on the operation input instruction (step S11). Then, based on the coordinate position of the tip of the end effector 12 calculated in step S11, the control unit 70 determines the distribution of operations between the robot unit 20 and the fine work manipulator 10 (step S12).

[0049] In step S12, the control unit 70 distributes the movements of the robot unit 20 and the fine work manipulator 10 in order to position the end effector 12 at the target coordinate position and rotation angle of the tip of the end effector 12. The distribution method is arbitrary; for example, it may be achieved by the movement of the fine work manipulator 10 (i.e., the movement of the parallel link mechanism) alone, by the collaborative work of the fine work manipulator 10 and the robot unit 20, or by the movement of the robot unit 20 alone.

[0050] The details of the operation in step S12 will be explained with an example. The control unit 70 first distributes the operation of the robot unit 20 and the fine work manipulator 10 under the condition that only the parallel link mechanism of the fine work manipulator 10 moves, in order to position the end effector 12 at the target coordinate position and rotation angle of the tip of the end effector 12. Then, it determines whether the distributed coordinate position and rotation angle of the fine work manipulator 10 have approached a certain threshold with respect to the operation limit of the parallel link mechanism of the fine work manipulator 10. Examples of thresholds include being 5 degrees before the angle at which the joints 13a and 13b constituting the parallel link mechanism interfere with each other, or the distance between the links 13 of adjacent parallel link mechanisms being 3 mm or less.

[0051] Then, when it determines that it is approaching a threshold, the control unit 70 determines the coordinate position and rotation angle of the parallel link mechanism of the fine work manipulator 10 in order to return the parallel link mechanism of the fine work manipulator 10 to its initial position, while simultaneously determining the coordinate position and rotation angle of the robot unit 20 in order to operate the robot unit 20 and position the end effector 12 at the target coordinate position and rotation angle of the tip of the end effector 12.

[0052] In this case, if the operating speed of the robot unit 20 is set to 100% of the output of the motors constituting the robot unit 20, the tip of the end effector 12 may vibrate. On the other hand, if the operating speed of the robot unit 20 is set too slow, the operation by the master unit 60 will continue, and the parallel link mechanism of the fine work manipulator 10 may reach its operating limit prematurely. Therefore, it is preferable to set the operating speed of the robot unit 20 to be variable, for example, in the range of 10% to 60%, so that the operator can set it according to the operation performed by the fine work manipulator 10.

[0053] Subsequently, the control unit 70 calculates the coordinate position and rotation angle of the robot unit 20 (step S13), calculates the drive amount of the motor 21 of the robot unit 20 (step S14), drives the motor 21 of the robot unit 20 based on the calculated drive amount (step S15), and stores the drive amount of the robot unit 20 based on the output value from the encoder unit 22 (step S16). After this, in the distribution of the operation of the robot unit 20 and the fine work manipulator 10 in step S12, the control unit 70 performs feedback control based on the drive amount of the robot unit 20 stored in step S16.

[0054] Meanwhile, the control unit 70 calculates the coordinate position and rotation angle of the fine work manipulator 10 (step S17), calculates the drive amount of the linear actuator 14 of the fine work manipulator 10 (step S18), and drives the linear actuator 14 of the fine work manipulator 10 based on the calculated drive amount (step S19).

[0055] The above-described embodiments are provided to illustrate the present invention in detail for clarity, and are not necessarily limited to those comprising all the described components. Furthermore, some components of each embodiment can be added, deleted, or replaced with other components.

[0056] As an example, in the above embodiment, the fine work manipulator 10 was attached to the robot unit 20 and the base 30. However, rough adjustments to the position of the fine work manipulator 10 relative to the surgical target may be made by first attaching the fine work manipulator 10 to a support stand or arm and then manually moving the stand or arm so that the end effector 12 faces the surgical target and maintains an appropriate distance from the surgical target.

[0057] Furthermore, in the above-described embodiment, the operation of the fine work manipulator 10 and the robot unit 20 was distributed sequentially. However, for example, a foot switch for returning the fine work manipulator 10 to its initial position may be provided in the master unit 60. By operating the foot switch, the fine work manipulator 10 is returned to its initial position, and the coordinate position and rotation angle of the robot unit 20 are set so that the tip position of the end effector 12 is at the position instructed by the master unit 60.

[0058] In the above-described embodiment, the control lines and information lines shown are those deemed necessary for explanation and do not necessarily represent all control lines and information lines in the actual product. All components may be interconnected. [Explanation of Symbols]

[0059] 1...Micro-working device 10...Micro-working manipulator 12...End effector 13...Link 14...Linear actuator 15...Movement 15a...Linear slider 15b...Coil 16...Stator 16a...Permanent magnet 20...Robot unit 70...Control unit

Claims

1. In a device for performing delicate work on an object on behalf of a person, The aforementioned fine work apparatus comprises a fine work manipulator that performs the fine work and has a predetermined operating range, a robot section that supports the fine work manipulator and has a wider operating range than the aforementioned operating range, and a control device that controls the driving of the fine work manipulator and the robot section. The control device receives a movement input for the tip position of the fine work manipulator, which is the operating position for the fine work. Using the operating position as the target position, it calculates the drive amount for the fine work manipulator and the robot section and controls the operation of the fine work manipulator and the robot section based on the drive amount. A device for fine work characterized by the following features.

2. The control device calculates the drive amount of the fine work manipulator and the robot section so as not to exceed the operating range of the fine work manipulator, and controls the operation of the fine work manipulator and the robot section based on the drive amount. The fine work apparatus according to feature 1.

3. When the control device determines that the fine work manipulator has reached the tip position using only the fine work manipulator, and that the fine work manipulator has reached the operating range, it calculates the drive amount for the fine work manipulator and the robot section, using the operating position as the target position, and controls the operation of the fine work manipulator and the robot section based on the drive amount. The fine work apparatus according to feature 1.

4. When the control device determines that the fine work manipulator has reached the operating range after moving the fine work manipulator to its tip position using only the fine work manipulator, it calculates the drive amount for the fine work manipulator and the robot unit and controls the operation of the fine work manipulator and the robot unit based on the drive amount, so as to move the fine work manipulator within the operating range and move the fine work manipulator to the operating position using the robot unit. The fine work apparatus according to feature 3.

5. The control device has a threshold value for the operating range of the fine work manipulator, and determines that the operating range has been reached when it determines that the fine work manipulator has reached the threshold value. The fine work apparatus according to feature 3 or 4.

6. The aforementioned manipulator for fine work is The device comprises a base supported at a predetermined location in the space where the work object exists, an end effector for handling the work object or work tools, and a plurality of links arranged in parallel between the base and the end effector, wherein the position and orientation of the end effector are variable within a predetermined range relative to the base, and includes a parallel link mechanism with three or more degrees of freedom. The parallel link mechanism uses a plurality of linear actuators supported on the base to linearly move one end of each link, thereby moving the end effector connected to the other end of each link. A device for fine work according to any one of the features 1 to 5.

7. The parallel link mechanism has an initial position that is symmetrical to the central axis of the fine work manipulator, When the control device determines that the fine work manipulator has reached the operating range, it calculates the amount of drive for the fine work manipulator so as to move the parallel link mechanism to the initial position, and also calculates the amount of drive for the robot section so as not to move the tip position of the fine work manipulator at that point. The fine work apparatus according to feature 6.

8. The fine work device according to any one of claims 1 to 7, characterized in that the robot section has the fine work manipulator attached to its tip, and the fine work manipulator is supported with three degrees of freedom of rotation and one degree of freedom of translation in the radial direction.

9. The fine work apparatus according to claim 6, characterized in that the parallel link mechanism is a mechanism with six or more degrees of freedom, in which the linear actuator and the links are arranged in parallel.

10. The linear actuator is a coil-movable type linear motor in which the coil is part of the movable element and the permanent magnet is part of the stator. The movable element comprises a linear slider mounted to the base so as to be linearly movable, and a cylindrical coil integrally attached to the linear slider, wherein the coil is oriented such that its axial direction is parallel to the direction of movement of the linear slider. The fine work apparatus according to claim 6, 7, or 9, characterized in that the stator has a cylindrical permanent magnet shorter than the coil, the permanent magnet is aligned with the coil in the direction of the cylindrical axis, and the coil is arranged to movably penetrate the internal space of the permanent magnet.

11. The fine work apparatus according to claim 10, characterized in that the linear motors are arranged such that the direction of movement of each of the movable elements is parallel to each other, and the permanent magnets are arranged so that they are closest to the virtual center line, with each of the linear motors positioned around a predetermined virtual center line that is parallel to the direction of movement of the movable elements.

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