Manufacturing line management methods

Abstract

One embodiment aims to provide a method for managing a manufacturing line that can efficiently process lots. [Solution] According to one embodiment, a method for managing a manufacturing line is provided. The method for managing a manufacturing line includes determining the load factor fluctuation characteristics of a manufacturing line having multiple resources. The method for managing a manufacturing line includes determining the load factor fluctuation characteristics of each of the multiple resources. The method for managing a manufacturing line includes identifying a resource that should be improved among the multiple resources, in accordance with the load factor fluctuation characteristics of the manufacturing line and the load factor fluctuation characteristics of the resources.

Description

Technical Field

[0001] This embodiment relates to a method for managing a production line.

Background Art

[0002] In a production line, when a lot is input into a process area including a plurality of resources, the resources operate to process the lot. In a production line, it is desired to be able to process lots efficiently.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Patent Document 5

Patent Document 6

Patent Document 7

Patent Document 8

Patent Document 9

Summary of the Invention

Problems to be Solved by the Invention

[0004] One embodiment aims to provide a method for managing a production line that can process lots efficiently.

Means for Solving the Problems

[0005] According to one embodiment, a method for managing a manufacturing line is provided. The method for managing a manufacturing line includes determining the load factor fluctuation characteristics of a manufacturing line having multiple resources. The method for managing a manufacturing line includes determining the load factor fluctuation characteristics of each of the multiple resources. The method for managing a manufacturing line includes identifying a resource that should be improved among the multiple resources, in accordance with the load factor fluctuation characteristics of the manufacturing line and the load factor fluctuation characteristics of the resources. [Brief explanation of the drawing]

[0006] [Figure 1] A diagram showing the configuration of the manufacturing line in the first embodiment. [Figure 2] A diagram showing the lot inflow, resource capacity, and fluctuations in resource inventory levels in the first embodiment. [Figure 3] A figure showing the transient change of the norm in the first embodiment. [Figure 4] A diagram showing the functional configuration of the management system in the first embodiment. [Figure 5] A diagram illustrating the procedure for identifying resources to be improved in the first embodiment. [Figure 6] A diagram showing the hardware configuration of the management system in the first embodiment. [Figure 7] A flowchart illustrating the general operation of the management system in the first embodiment. [Figure 8] A flowchart showing the process for determining the load factor fluctuation characteristics of the manufacturing line in the first embodiment. [Figure 9] A flowchart illustrating the process for determining the fluctuation characteristics of resource load ratio in the first embodiment. [Figure 10] A flowchart illustrating the process of identifying resources to be improved in the first embodiment. [Figure 11] A diagram illustrating the adjustment between Q priority and U priority (Critical Ratio) in the second embodiment. [Figure 12]A diagram showing the functional configuration of the management system in the second embodiment. [Figure 13] A flowchart illustrating the general adjustment between Q priority and U priority in the second embodiment. [Figure 14] A flowchart illustrating the priority determination in the second embodiment. [Figure 15] A flowchart illustrating the process of determining which lots should be processed preferentially using resources in the second embodiment. [Figure 16] A diagram illustrating batch-type resources in the third embodiment. [Figure 17] A diagram showing the functional configuration of the management system in the third embodiment. [Figure 18] A diagram showing an example of the number of lots to be fed into a batch-type resource in the third embodiment. [Figure 19] A flowchart illustrating the processing of batch-type resources in the third embodiment. [Figure 20] A flowchart illustrating the process for determining the waiting time of a lot in the third embodiment. [Figure 21] A flowchart illustrating the process for improving lot retention in the third embodiment. [Modes for carrying out the invention]

[0007] The manufacturing line management system according to the embodiments will be described in detail below with reference to the attached drawings. However, the present invention is not limited to these embodiments.

[0008] (First embodiment) The manufacturing line management method according to the first embodiment manages a manufacturing line having multiple process areas. Each process area contains multiple resources. In the manufacturing line, when a job is submitted to a process area, the resources become active and process the job. The manufacturing line management method incorporates measures to ensure that jobs are processed efficiently on the manufacturing line. Here, a job refers to the object to be processed by the resources.

[0009] Figure 1 shows the configuration of a manufacturing line in the first embodiment. A manufacturing plant for producing the product has multiple manufacturing lines P1 and P2. Although Figure 1 shows two manufacturing lines P1 and P2 as an example, a manufacturing plant may have three or more manufacturing lines.

[0010] As shown in Figure 1, the manufacturing line P1 has multiple process areas S1, S2, ... S6. The multiple process areas S1, S2, ... S6 correspond to multiple processes in the manufacturing method of the product to be manufactured. Similarly, the manufacturing line P2 has multiple process areas S 11 ,S 12 ,···S 16 The process is as follows: When the product to be manufactured is a semiconductor device, the process includes steps such as coating, exposure, development, etching, cleaning, impurity introduction, film formation, and heat treatment of the semiconductor substrate. The number of process areas S included in each manufacturing line P can be arbitrarily changed depending on the product to be manufactured.

[0011] Each process area S is allocated one or more resources E from resource group M. Resource group M includes multiple resources E. When the product to be manufactured OB is a semiconductor device, each resource E is a semiconductor manufacturing device that performs the processing for that process. If the process is a coating process, resource E includes a coating device. If the process is an exposure process, resource E includes an exposure device. If the process is a developing process, resource E includes a developing device. If the process is an etching process, resource E includes an etching device. If the process is a cleaning process, resource E includes a cleaning device. If the process is an impurity introduction process, resource E includes an ion implanter. If the process is a film deposition process, resource E includes a film deposition device. If the process is a heat treatment process, resource E includes a heat treatment device.

[0012] The object to be processed by the resource E to manufacture the manufacturing target OB will be called a lot. A lot includes one or more substrates mounted on a hoop (not shown), and can be mounted on the hoop in the manufacturing line P and transported between resources E by a transport device (not shown) or the like. If the resource E is single-piece type, the substrates are processed one by one by the resource E. If the resource E is batch type, the substrates are processed in lots by the resource E. Hereinafter, for simplicity, it is assumed that the lot is processed by the resource E.

[0013] When the manufacturing target OB is a semiconductor device, the manufacturing line P may include a plurality of reentrant process areas S. For example, as shown by the dotted line in FIG. 1, the plurality of process areas S1 to S6 in the manufacturing line P1 may include a plurality of reentrant process areas S2 to S5. The plurality of process areas S in the manufacturing line P2 11 ~S 16 may include, as shown by the dotted line in FIG. 1, a plurality of reentrant process areas S 12 ~S 15 .

[0014] When the manufacturing target OB is a semiconductor device, the plurality of process areas S may include process areas S that are compatible between the plurality of manufacturing lines P. For example, the process area S2 of the manufacturing line P1 and the process area S of the manufacturing line P2 11 are similar processes and have similar processing contents, as shown by the dashed-dotted line in FIG. 1, and different lots corresponding to different manufacturing targets OB may be processed by a common recipe by the resource E.

[0015] An inventory B may be provided in the manufacturing line P. The inventory B, also called a buffer stock, functions as a buffer to absorb differences and fluctuations in the capabilities of the resources E in the manufacturing line P. In FIG. 1, in the manufacturing line P1, inventories B2, B4, and B5 are provided in the process areas S2, S4, and S5, and in the manufacturing line P2, in the process areas S 12 ,S 14 ,S 15 inventories B 12 ,B 14,B 15 An example of a configuration in which this is provided is given.

[0016] The number of lots that can be stored in inventory B is called the inventory capacity, and the number of lots actually stored in inventory B is called the inventory quantity. In Figure 1, inventory B2, B4, B5, B 12 ,B 14 ,B 15 Examples of configurations with capacities of 3 lots, 5 lots, 2 lots, 1 lot, 3 lots, and 1 lot are shown. In Figure 1, inventory B2, B4, B5, B 12 ,B 14 ,B 15 Examples of situations where the inventory levels are 1 lot, 2 lots, 1 lot, 0 lots, 1 lot, and 0 lots are given.

[0017] The following explanation will focus on one production line P, but the same principles apply to other production lines P.

[0018] Each process area S is allocated one or more resources E from resource group M. Resource group M includes multiple resources Ei, where i is an identifier for resource E and may be an integer of 1 or more. When the object to be manufactured is a semiconductor device, each resource E is a semiconductor manufacturing device that performs the processing for that process. If the process is a coating process, resource E includes a coating device. If the process is an exposure process, resource E includes an exposure device. If the process is a development process, resource E includes a development device. If the process is an etching process, resource E includes an etching device. If the process is a cleaning process, resource E includes a cleaning device. If the process is an impurity introduction process, resource E includes an ion implanter. If the process is a film deposition process, resource E includes a film deposition device. If the process is a heat treatment process, resource E includes a heat treatment device.

[0019] Manufacturing line P has a target t to be achieved. The target t indicates the number of products (e.g., number of circuit boards) that should be output from manufacturing line P per unit time. The unit time may be one day. Each process area S1~S QThe quotas may be evenly distributed across the quota t of the manufacturing line P. Multiple process areas S1~S Q The difference in processing time between each process area S1~S Q This can be absorbed by changing the number of resources.

[0020] In manufacturing line P, the throughput of manufacturing line P fluctuates over time because the capacity of resource E and the inflow of jobs into resource E vary. This can lead to bottlenecks and lower throughput in later processes compared to earlier processes. The capacity of resource E is the job processing rate of resource E, representing the number of jobs (e.g., number of circuit boards) that resource E can process per unit time. A job is an object (e.g., a circuit board) that resource E should process. The unit time may be one day. Job inflow refers to the number of jobs fed into resource E per unit time. The throughput of manufacturing line P represents the number of jobs that manufacturing line P outputs per unit time.

[0021] For example, in a manufacturing line P, the lot inflow in each process area S fluctuates over time as shown in Figure 2(a), and the capacity of resource E fluctuates over time as shown in Figure 2(b). Accordingly, the inventory level of resource E fluctuates over time as shown in Figure 2(c). Figure 2 is a diagram showing the fluctuations in lot inflow, resource capacity, and resource inventory. The way in which lot inflow, resource capacity, and resource inventory fluctuate may differ among multiple resources E in the manufacturing line P.

[0022] Here, not only does the variation from the quota t occur due to lot inflow, the capacity of resource E, and fluctuations in resource inventory levels, but the average value of the quota t itself, which forms the basis of the variation, can also fluctuate, as shown in Figure 3. Figure 3 is a diagram showing the non-stationary change in the quota.

[0023] In a manufacturing line P, the throughput of downstream processes may be lower than that of upstream processes, which can lead to the average value of the upstream process's quota t being lower than the average value of the downstream process's quota t. When considering the manufacturing line P as a whole, it is desirable to manage the quota t as a non-steady-state variable rather than one whose average value converges over time.

[0024] Each manufacturing line P, as shown in Figures 1 to 3, can be managed by the management system 1 shown in Figure 4. Figure 4 is a diagram showing the functional configuration of the management system 1.

[0025] Management system 1 determines the load factor fluctuation characteristics of manufacturing line P. Management system 1 determines the load factor fluctuation characteristics of each of the multiple resources E in manufacturing line P. Based on the load factor fluctuation characteristics of manufacturing line P and the load factor fluctuation characteristics of the resources E, management system 1 identifies the resource E in manufacturing line P that needs improvement.

[0026] In this case, the management system 1 may take into account the non-stationary changes in the norm t and perform management by applying the concept of a heterogeneous Poisson process.

[0027] The management system 1 functionally comprises a control unit 6, an acquisition unit 5, a storage unit 2, a calculation unit 3, a calculation unit 4, and a processing unit 7.

[0028] The memory unit 2 stores the management program PG. The management program PG includes a number of processes for performing predetermined management. The predetermined management includes identifying resources E that need improvement in each manufacturing line P.

[0029] The control unit 6 comprehensively controls each part of the management system 1 according to the management program PG. The control unit 6 can manage multiple periods T1 to Tn that are to be processed. The control unit 6 may control each part of the management system 1 to process multiple periods T1 to Tn. The length of each period T is predetermined as an appropriate length for managing each production line P. The length of each period T may be one day.

[0030] The acquisition unit 5 acquires parameters 2a under the control of the control unit 6. Parameters 2a include the number of lots fed into the manufacturing line P, the number of lots discharged from the manufacturing line P, the operating rate of each resource E in the manufacturing line P, the availability rate of each resource E in the manufacturing line P, and the period during which they were acquired. The acquisition unit 5 may acquire parameters 2a in response to input from the user. The acquisition unit 5 may acquire parameters 2a via a communication medium such as a wired communication line or a wireless communication line.

[0031] The storage unit 2 may receive the parameter 2a from the acquisition unit 5 and store it as a database under the control of the control unit 6. The database includes input quantity information, output quantity information, operating rate information, availability rate information, etc. Input quantity information is information that associates a period, input quantity, and manufacturing line P identifier for multiple manufacturing lines P. Input quantity information corresponds to the number of lots input to manufacturing line P. Output quantity information is information that associates a period, output quantity, and manufacturing line P identifier for multiple manufacturing lines P. Output quantity corresponds to the number of lots output from manufacturing line P. Operating rate information is information that associates a period, operating rate, manufacturing line P identifier, and resource E identifier for multiple manufacturing lines P and multiple resource E. Availability rate information is information that associates a period, availability rate, manufacturing line P identifier, and resource E identifier for multiple manufacturing lines P and multiple resource E.

[0032] Furthermore, the storage unit 2 may store the identification result 2b of the processing unit 7. The identification result 2b includes bottleneck information. The bottleneck information is information about resource E that is a bottleneck in the manufacturing line P. The bottleneck information may also be information in which the identifier of the manufacturing line P and the identifier of resource E are associated for multiple manufacturing lines P.

[0033] The calculation unit 3 may determine the load factor of the manufacturing line P by considering the non-uniform Poisson process.

[0034] For example, in the theory of heterogeneous Poisson processes, if Pn(t) is the probability that there are n lots in the system, λ(t) is the rate at which lots are added to the system, and μ(t) is the rate at which lots are removed from the system, then the temporal transient change of Pn(t) can be expressed by the following differential equations: Equation 1 is the differential equation for n≧1, and Equation 2 is the differential equation for n=0.

number

number

[0035] However, the initial conditions are given by the following equation 3.

number

[0036] Solving the differential equation in Equation 1 or Equation 2, the probability Pn(t) that there are n lots in the system is given by the following Equation 4.

number

[0037] In equation 4, In(z) is a modified Bessel function. From equation 4, it can be seen that the probability Pn(t) undergoes non-stationary changes over time, depending on the input rate λ(t) and the payout rate μ(t).

[0038] Referring to Equation 4, the system's loading factor P(t) can be expressed by the following Equation 5.

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[0039] In equation 5, Λ(t) represents the number of lots added to the system and is obtained by integrating the input rate λ(t) over time, as shown in equation 6 below.

number

[0040] In equation 5, M(t) represents the number of lots dispensed from the system and is obtained by integrating the dispensing rate μ(t) over time, as shown in equation 7 below.

number

[0041] By applying equations 5 to 7, the calculation unit 3 may determine the load factor ρi of the manufacturing line P during period Ti using the following equation 8. i is any integer between 1 and n, inclusive.

number

[0042] In equation 8, Ai represents the number of lots fed into manufacturing line P, and Mi represents the number of lots discharged from manufacturing line P.

[0043] The calculation unit 3 acquires input quantity information and output quantity information from the storage unit 2 via the control unit 6. Figure 5 is a schematic diagram of the procedure for determining the resource E that needs improvement. From the input quantity information, the calculation unit 3 extracts multiple sets of periods T1 to Tn and input quantities A1 to An corresponding to the identifier of the manufacturing line P of interest, as shown in Figure 5(a). From the output quantity information, the calculation unit 3 extracts multiple sets of periods T1 to Tn and output quantities M1 to Mn corresponding to the identifier of the manufacturing line P of interest, as shown in Figure 5(b). As shown in Figure 5(c), the calculation unit 3 may also determine the load factor ρi of the manufacturing line P according to the number of lots Ai input to the manufacturing line P and the number of lots Mi output from the manufacturing line P for each of multiple periods Ti (i=1,2,···,n). n is any integer greater than or equal to 3. The calculation unit 3 may determine the load factor ρi of the manufacturing line P for each period Ti by dividing the input quantity Ai by the discharge quantity Mi.

[0044] Furthermore, the load factor ρi of manufacturing line P is highly correlated with the production quota t of manufacturing line P. By capturing the transient changes in the load factor ρi of manufacturing line P, it is possible to capture the transient changes in the production quota t of manufacturing line P. The load factors ρ1, ρ2, ..., ρn of manufacturing line P in each of the multiple periods T1, T2, ..., Tn can be considered as parameters that indicate the transient changes in the load factor ρi of manufacturing line P.

[0045] The calculation unit 3 supplies the load factors ρ1, ρ2, ..., ρn of the manufacturing line P for each of the multiple periods T1, T2, ..., Tn to the processing unit 7.

[0046] The calculation unit 4 may determine the fluctuation characteristics of the load factor of each of the multiple resources E by considering a heterogeneous Poisson process.

[0047] For example, by applying equations 5 to 7, the calculation unit 4 may determine the load ratio ui of resource E during period Ti using the following equation 9.

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[0048] In equation 9, ri represents the utilization rate of resource E, and mi represents the availability rate of resource E.

[0049] The calculation unit 4 acquires the utilization rate information and the availability rate information from the storage unit 2 via the control unit 6. From the utilization rate information, the calculation unit 4 extracts multiple sets of periods T1 to Tn and utilization rates r1 to rn corresponding to the identifier of the resource E of interest. From the availability rate information, the calculation unit 3 extracts multiple sets of periods T1 to Tn and availability rates m1 to mn corresponding to the identifier of the resource E of interest. As shown in Figure 5(c), the calculation unit 4 may calculate the load rate ui of resource E for each of the multiple periods Ti (i=1 to n) according to the utilization rate ri and availability rate mi of resource E. For each period Ti, the calculation unit 4 may calculate the load rate ui of resource E by dividing the utilization rate ri by the availability rate mi.

[0050] The calculation unit 4 supplies the resource load rates u1, u2, ..., un for each of the multiple periods T1, T2, ..., Tn to the processing unit 7.

[0051] The processing unit 7 determines the variation characteristics of the difference between the load rate ui of resource E and the load rate ρi of manufacturing line P for each of the multiple resources E. The processing unit 7 may also determine the difference (ui-ρi) obtained by subtracting the load rate ρi of manufacturing line P from the load rate ui of resource E for each of the multiple resources E, for each of the multiple periods T1 to Tn.

[0052] The processing unit 7 performs statistical processing on the variation characteristics of the difference. The processing unit 7 may also sum the difference (ui-ρi) for each of the multiple resources E over multiple periods Ti (i=1~n).

[0053] For example, the processing unit 7 may calculate the sum of the differences (ui-ρi) obtained by subtracting the load rate of the manufacturing line P from the load rate of resource E during period Ti using the following formula 10.

number

[0054] The processing unit 7 identifies the bottleneck resource E among multiple resources E according to the results of statistical processing. The bottleneck resource E refers to the resource E where lots are stagnating. As shown in Figure 5(d), the processing unit 7 may also identify the resource E with the largest total difference Σ(ui-ρi) among multiple resources E as the bottleneck resource E. Figure 5(d) illustrates the case where resource Ep is identified as the bottleneck resource. The processing unit 7 stores the result 2b of identifying the bottleneck resource E in the storage unit 2.

[0055] As a result, the storage unit 2 stores the identification result 2b of the resource E that is a bottleneck in each manufacturing line P. The control unit 6 may notify the user of the identification result 2b of the resource E that is a bottleneck in each manufacturing line P by visual and / or auditory means, in response to the fact that the identification result 2b has been stored in the storage unit 2, or in response to a request from the user, etc.

[0056] As shown in Figure 6, the management system 1 has the following hardware configuration: a processor 17, ROM (Read Only Memory) 18, RAM (Random Access Memory) 13, a human interface 14, a communication interface 15, a storage device 16, and a bus 19.

[0057] The processor 17 includes a CPU (Central Processing Unit), etc. The processor 17 corresponds to the control unit 6, calculation unit 3, calculation unit 4, and processing unit 7. The control unit 6, calculation unit 3, calculation unit 4, and processing unit 7 are deployed and functionally configured on RAM 13 either all at once during compilation or sequentially as processing progresses, through the execution of a management program PG by the processor 17.

[0058] ROM18 stores static data. ROM18 corresponds to storage unit 2.

[0059] RAM13 can temporarily store information and provides a work area and other resources to the processor 17. RAM13 corresponds to the storage unit 2.

[0060] The human interface 14 acts as an intermediary between humans and computers. The human interface 14 has an input device 14a and an output device 14b.

[0061] The input device 14a includes devices capable of receiving requests from a human, such as a keyboard, mouse, or touch panel. The input device 14a corresponds to the acquisition unit 5.

[0062] Output device 14b is a device capable of outputting visual and / or auditory information to humans, such as a display, printer, indicator, or speaker.

[0063] The communication interface 15 can connect to an external device via a communication medium. When an external device is connected via a communication medium, the communication interface 15 can receive information from the external device or transmit information to the external device.

[0064] The storage device 16 is a device capable of storing information non-volatilely, such as an HDD (Hard Disk Drive) or an SSD (Solid State Drive). The storage device 16 stores programs and various data necessary to operate the processor 17. The storage device 16 may also store a management program PG. The storage device 16 corresponds to the storage unit 2.

[0065] The processor 17, ROM 18, RAM 13, human interface 14, communication interface 15, and storage device 16 are connected to each other via a bus 19 so that they can communicate with one another.

[0066] Next, the general operation of management system 1 will be explained using Figure 7. Figure 7 is a flowchart illustrating the general operation of management system 1.

[0067] In the management system 1, the acquisition unit 5 acquires parameters 2a (ST1). For example, the acquisition unit 5 acquires parameters 2a in response to user input or via a communication medium such as a wired communication line or a wireless communication line. Parameters 2a include the number of lots to be input into the manufacturing line P, the number of lots to be withdrawn from the manufacturing line P, the operating rate of each resource E in the manufacturing line P, the availability rate of each resource E in the manufacturing line P, and the period during which they were acquired. The storage unit 2 may receive parameters 2a from the acquisition unit 5 and store them as a database. The database includes input quantity information, withdrawal quantity information, operating rate information, availability rate information, etc.

[0068] Once parameter 2a is obtained, ST2 and ST3 are performed in parallel.

[0069] In ST2, the calculation unit 3 determines the fluctuation characteristics of the load factor of the manufacturing line P. The calculation unit 3 may also determine the load factor of the manufacturing line P by considering a non-uniform Poisson process.

[0070] For example, in ST2, ST11 to ST16 shown in Figure 8 may be performed. Figure 8 is a flowchart showing the process for determining the load factor fluctuation characteristics of the manufacturing line P.

[0071] The calculation unit 3 obtains input quantity information and payout quantity information from the storage unit 2 via the control unit 6, and selects the period T to be processed from among multiple periods T1, T2, ..., Tn (ST11). Once the period T to be processed is selected, the calculation unit 3 performs ST12 and ST13 in parallel.

[0072] In ST12, the calculation unit 3 obtains the number of lots to be input to the manufacturing line P. The calculation unit 3 may also obtain the number of lots to be input to the manufacturing line P by extracting the input number corresponding to the identifier of the manufacturing line P of interest and the processing period T from the input number information.

[0073] In ST13, the calculation unit 3 obtains the number of lots issued from the manufacturing line P. The calculation unit 3 may also obtain the number of lots issued from the manufacturing line P by extracting the number of lots corresponding to the identifier of the manufacturing line P of interest and the processing period T from the number of lots issued.

[0074] Once both ST12 and ST13 are completed, the calculation unit 3 calculates the load factor ρi of the manufacturing line P for the processing period T, based on the number of lots Ai input to the manufacturing line P and the number of lots Mi output from the manufacturing line P (ST14). The calculation unit 3 may also calculate the load factor ρi of the manufacturing line P for the processing period Ti by dividing the input number Ai by the output number Mi.

[0075] The calculation unit 3 stores the calculated load factor ρi in association with the processing period Ti (ST15).

[0076] If there are any unprocessed periods T among the multiple periods T1, T2, ..., Tn (Yes in ST16), the calculation unit 3 returns to processing S11.

[0077] If there are no unprocessed periods T (No in ST16), the calculation unit 3 supplies the load rates ρ1, ρ2, ..., ρn of the manufacturing line P for each of the multiple periods T1, T2, ..., Tn to the processing unit 7 and terminates the process.

[0078] In ST3, the calculation unit 4 determines the fluctuation characteristics of the load factor of each of the multiple resources E. The calculation unit 4 may also determine the load factor of each of the multiple resources E by considering a heterogeneous Poisson process.

[0079] For example, in ST3, ST21 to ST28 shown in Figure 9 may be performed. Figure 9 is a flowchart showing the process of determining the fluctuation characteristics of the load rate of each of the multiple resources E.

[0080] The calculation unit 4 acquires operating rate information and availability rate information from the storage unit 2 via the control unit 6, and selects the period T to be processed from among multiple periods T1, T2, ..., Tn (ST21).

[0081] The calculation unit 4 selects the resource E to be processed from among multiple resources E (ST22).

[0082] Once the processing period T and the resource E to be processed are selected, the calculation unit 4 performs ST23 and ST24 in parallel.

[0083] In ST23, the calculation unit 4 obtains the utilization rate ri of resource E. The calculation unit 4 may also obtain the utilization rate ri of resource E by extracting the identifier of the manufacturing line P of interest, the processing period T, and the utilization rate corresponding to the resource E being processed from the utilization rate information.

[0084] In ST24, the calculation unit 4 obtains the availability rate mi of resource E. The calculation unit 4 may also obtain the availability rate mi of resource E by extracting the identifier of the manufacturing line P of interest, the processing period T, and the availability rate corresponding to the resource E being processed from the availability rate information.

[0085] Once both ST23 and ST24 are completed, the calculation unit 4 calculates the load ratio ui of resource E for the processing period T and resource E, based on the utilization rate ri and availability rate mi of resource E (ST25). The calculation unit 4 may also calculate the load ratio ui of resource E for the processing period Ti and resource E by dividing the utilization rate ri by the availability rate mi.

[0086] The calculation unit 4 stores the calculated load ratio ui in association with the processing period Ti and the processing resource E (ST26).

[0087] If there are any unprocessed resources E among the multiple resources E, the calculation unit 4 returns the processing to ST22 (Yes in ST27).

[0088] If there are no unprocessed resources E (No in ST27) and there is an unprocessed period T among the multiple periods T1, T2, ..., Tn (Yes in ST28), the calculation unit 4 returns the process to ST21.

[0089] If there are no unprocessed resources E (No in ST27) and no unprocessed period T (No in ST28), the calculation unit 4 supplies the load rates u1, u2, ..., un of the multiple resources E in each of the multiple periods T1, T2, ..., Tn to the processing unit 7 and terminates processing.

[0090] Once both ST2 and ST3 are completed, the processing unit 7 identifies the resource E that should be improved among the multiple resources E in the manufacturing line P, according to the fluctuation characteristics of the load rate of the manufacturing line P determined in ST2 and the fluctuation characteristics of the load rate of resource E determined in ST3 (ST4).

[0091] For example, in ST4, ST31 to ST38 shown in Figure 10 may be performed. Figure 10 is a flowchart showing the process of identifying resource E that needs improvement.

[0092] The processing unit 7 obtains the load factors ρ1, ρ2, ..., ρn of the manufacturing line P for each of the multiple periods T1, T2, ..., Tn from the calculation unit 3. The processing unit 7 obtains the load factors u1, u2, ..., un of each of the multiple resources E for each of the multiple periods T1, T2, ..., Tn from the calculation unit 4.

[0093] The processing unit 7 selects the period T to be processed from among multiple periods T1, T2, ..., Tn (ST31).

[0094] The processing unit 7 selects the resource E to be processed from among multiple resources E (ST32).

[0095] Once the processing period T and the resource E to be processed are selected, the processing unit 7 calculates the difference between the load rate ui of resource E and the load rate ρi of manufacturing line P for the processing period Ti and the resource E to be processed (ST33). The processing unit 7 may also calculate the difference (ui-ρi) by subtracting the load rate ρi of manufacturing line P from the load rate ui of resource E.

[0096] The processing unit 7 stores the calculated difference (ui-ρi) in association with the processing period Ti and the processing resource E (ST34).

[0097] If there are any unprocessed resources E among the multiple resources E (Yes in ST35), the processing unit 7 returns the processing to ST32.

[0098] If there are no unprocessed resources E (No in ST35) and there is an unprocessed period T among the multiple periods T1, T2, ..., Tn (Yes in ST36), the processing unit 7 returns to ST31.

[0099] If there are no unprocessed resources E (No in ST35) and no unprocessed period T (No in ST36), the processing unit 7 performs statistical processing on the variation characteristics of the difference (ui-ρi) (ST37). The processing unit 7 may also sum the differences (ui-ρi) for each of the multiple resources E over multiple periods Ti (i=1 to n).

[0100] The processing unit 7 identifies the bottleneck resource E among the multiple resources E according to the results of the statistical processing (ST38). The processing unit 7 may also identify the resource E with the largest summed difference Σ(ui-ρi) among the multiple resources E as the bottleneck resource E. The processing unit 7 stores the result 2b of identifying the bottleneck resource E in the storage unit 2.

[0101] As described above, in the first embodiment, in the method for managing the manufacturing line P, a resource E that should be improved is identified from among multiple resources E in the manufacturing line P, according to the fluctuation characteristics of the load rate of the manufacturing line P and the fluctuation characteristics of the load rate of resource E. For example, the difference (ui-ρi) obtained by subtracting the load rate ρi of the manufacturing line P from the load rate ui of resource E is calculated for each of the multiple periods T1 to Tn, and the difference (ui-ρi) is summed up for the multiple periods Ti (i=1 to n), and the resource E with the largest summed difference Σ(ui-ρi) is identified as the bottleneck resource E. This makes it possible to identify a resource E that should be improved from among multiple resources E in the manufacturing line P, while considering the non-steady-state changes in the quota t of the manufacturing line P, and to inform the user of this. This makes it possible to encourage the user to improve the resource E that should be improved. Therefore, in each manufacturing line P, the operational loss of resource E in the process area S can be effectively suppressed, and lots can be processed efficiently.

[0102] (Second embodiment) Next, we will describe the manufacturing line management method according to the second embodiment. The following description will focus on the differences from the first embodiment.

[0103] In the first embodiment, a process for identifying resource E that needs improvement is illustrated, while in the second embodiment, a process for appropriately adjusting multiple priorities is illustrated.

[0104] Each resource E in manufacturing line P p-3 ~E p+2 Lot RT to be processed is in stock B p-3 ~B p+2 While it may remain in the same state, various priorities are associated with it. For example, the Q lot RTq shown without hatching in Figure 11 is associated with both Q priority and U priority (Critical Ratio). The U lot RTu shown with hatching in Figure 11 is associated with U priority but not Q priority. Figure 11 is a diagram illustrating the schematic of the adjustment between Q priority and U priority in the second embodiment.

[0105] U priority is a priority related to the urgency of the delivery date. The later a project is delayed compared to the time allocated to each process based on the delivery date, the higher the priority is set.

[0106] Q priority is a priority related to quality and is established to ensure compliance with Q-time constraints.

[0107] A Q-time constraint is a constraint imposed on the dwell time within a constraint interval to meet quality requirements. The Q-time constraint includes a constraint time Tq for the dwell time within the constraint interval. Lots RT that fail to comply with the Q-time constraint may be reworked or discarded. In the manufacturing line P shown in Figure 11, a constraint interval SCq is provided that includes the inventory Bp of resource Ep and the inventory Bp+1 of resource Ep+1, and the dwell time within constraint interval SCq must be less than or equal to the constraint time Tq.

[0108] For example, if the dwell time of lot Q RTq within the constraint interval SCq is insufficient relative to the constraint time Tq, it is appropriate to prioritize processing lot Q RTq with resource E over lot U RTu.

[0109] On the other hand, if the dwell time of Q lot RTq within the constraint interval SCq is sufficient relative to the constraint time Tq, it may not be appropriate to prioritize processing Q lot RTq with resource E over U lot RTu. It is desirable that the Q priority and U priority be appropriately adjusted in the manufacturing line P.

[0110] Each manufacturing line P, as shown in Figure 11, can be managed by a management system 101, as shown in Figure 12. Figure 12 is a diagram showing the functional configuration of the management system 101.

[0111] The management system 101 identifies lot RTs associated with Q priority and lot RTs associated with U priority from among multiple lot RTs that can be processed by resource E. Based on the identification results, the management system 101 determines which lot RTs should be processed preferentially by resource E from among the multiple lot RTs.

[0112] At this time, the management system 101 executes the "Urgent Q-TIME Policy," a priority determination algorithm that considers the urgency of delivery while adhering to the Q-time constraint. This allows for appropriate adjustment of Q priority and U priority in the manufacturing line P.

[0113] The management system 101 has calculation units 103, 104, and 107 instead of calculation unit 3, calculation unit 4, and processing unit 7 (see Figure 4).

[0114] The acquisition unit 5 acquires parameters 2a under the control of the control unit 6. Parameters 2a further include the work-in-progress of lot RT to each resource E of the manufacturing line P, the delivery date of each lot, and Q-time constraints.

[0115] The storage unit 2 may receive the parameter 2a from the acquisition unit 5 and store it as a database under the control of the control unit 6. The database further includes work-in-progress information, delivery date information, and Q-time constraint information. Work-in-progress information is information that associates the identifier of the lot in work-in-progress with the identifier of the manufacturing line P and the identifier of the resource E for multiple resources E. Delivery date information is information that associates the delivery date with the identifier of the lot for multiple lots RT. Q-time constraint information is information that associates the constraint time with the identifier of the manufacturing line P and the identifier of the resource E corresponding to the constraint interval SCq.

[0116] The calculation unit 103 obtains work-in-progress information, delivery date information, and Q-time constraint information from the storage unit 2. Based on the work-in-progress information and Q-time constraint information, the calculation unit 103 determines the Q priority for at least some of the multiple lot RTs that can be processed by resource E for each resource E of the manufacturing line P. At least some of the lot RTs include a Q lot RTq. The calculation unit 103 may determine the Q priority in a form associated with the identifier of the manufacturing line P, the identifier of resource E, and the identifier of lot RT.

[0117] The calculation unit 103 identifies the lot RT that is subject to a Q-time constraint among the multiple lot RTs that can be processed by resource E, based on the work-in-progress information and Q-time constraint information. The calculation unit 103 determines the Q priority i of lot RT according to the remaining time relative to the constraint time of the lot RT's construction period, based on the delivery date information and Q-time constraint information. The calculation unit 103 may also determine the Q priority i for each lot RT that is in progress on resource Ei using the following formula 11.

number

[0118] In equation 11, M represents the number of processes within the constraint interval SCq. ti represents the processing time in the i-th process. f(t i+1 +···+t M) represents the constraint time of the remaining steps in the constraint interval SCq, depending on the processing time of steps i+1 to M. f(t² + ... + t M ) represents the constraint time for all processes in the constraint interval SCq, based on the processing time in the 2nd to Mth processes. Ti is the dwell time within the constraint interval SCq.

[0119] The calculation unit 103 supplies the Q priority i of each lot RT to be processed by each resource E to the processing unit 107.

[0120] The calculation unit 104 obtains work-in-progress information and delivery date information from the storage unit 2. Based on the work-in-progress information and delivery date information, the calculation unit 104 determines the U priority for each of the multiple lots RT in progress at each resource E of the manufacturing line P. The multiple lots RT include at least U lot RTu and may further include Q lot RTq. The calculation unit 104 may determine the U priority in a form associated with the identifier of the manufacturing line P, the identifier of the resource E, and the identifier of the lot RT.

[0121] The calculation unit 104 may determine the U priority for each of the multiple lot RTs according to the progress toward the delivery date of lot RT. The calculation unit 104 may also determine the U priority using the following formula 12.

number

[0122] In formula 12, A represents the time corresponding to the average processing time per step, and may include buffer time in addition to the average processing time. x represents the number of remaining steps. t represents the remaining time.

[0123] The calculation unit 104 may consider that the entire process of the manufacturing line P is long and local variations can be approximated by the mean field, and may determine the progress of lot RT processing by approximating it by the mean field.

[0124] For example, regarding the change in U priority shown in equation 12, the mean-field equation shown in equation 13 holds true.

number

[0125] The calculation unit 104 may determine the progress of lot processing by mean-field approximation based on the time the source dwells in inventory B. If lot RT waits for time Δt in inventory B, the calculation unit 104 may update the U priority based on equation 13 using the following equation 14.

number

[0126] The calculation unit 104 may determine the processing progress of lot RT by mean-field approximation as lot RT completes processing at resource E and moves on to the next resource E. When lot RT advances one process, the calculation unit 104 may update the U priority based on formula 13 using the following formula 15.

number

[0127] The calculation unit 104 supplies the U priority of each lot RT to be processed by each resource E to the processing unit 107.

[0128] The processing unit 107 executes the "Urgent Q-TIME Policy," a priority determination algorithm that considers the urgency of the delivery date while adhering to the Q-time constraint.

[0129] The processing unit 107 obtains the Q priority of each Q lot RTq to be processed by each resource E from the calculation unit 103. The processing unit 107 obtains the U priority of each lot RT to be processed by each resource E from the calculation unit 104.

[0130] The processing unit 107 executes an "Urgent Q-TIME Policy" priority determination algorithm that considers the urgency of the delivery date while adhering to the Q-time constraint, based on the Q priority information and U priority information.

[0131] Based on the Q priority information, the processing unit 107 identifies, for each resource E, the lot RT associated with the Q priority from among the multiple lot RTs that can be processed by resource E. The processing unit 107 may also identify, from among the multiple lot RTs that can be processed by resource E, the lot RT associated with the highest Q priority.

[0132] Based on the U priority information, the processing unit 107 identifies, for each resource E, the lot RT associated with the U priority from among the multiple lot RTs that can be processed by resource E. The processing unit 107 may also identify, from among the multiple lot RTs that can be processed by resource E, the lot RT associated with the highest U priority.

[0133] Based on these identification results, the processing unit 107 determines which of the multiple lot RTs that can be processed by resource E should be processed preferentially by resource E.

[0134] The processing unit 107 determines that a lot RT associated with a Q priority should be processed preferentially if the Q priority is greater than or equal to the threshold Qth, or if there is no margin for the constraint time Tq, or if there is no lot RT associated with a U priority exceeding the threshold Uth. Qth can be determined experimentally in advance according to the value of the Q priority that can be considered to indicate a high level of urgency for the lot RT. For example, Qth is 1. The threshold Uth can be determined experimentally in advance according to the value of the U priority that can be considered to indicate a high level of urgency.

[0135] The processing unit 107 determines that if there are lots associated with a U priority that exceeds the threshold Uth, and the Q priority is less than the threshold Qth, and there is sufficient time relative to the constraint Tq, then the lots associated with the U priority should be processed preferentially.

[0136] The processing unit 107 stores the calculation result 2c, which includes the determination result of which lot RT should be processed preferentially by resource E, into the storage unit 2.

[0137] Furthermore, the operation of the management system 101 differs from that of the first embodiment in the following respects, as shown in Figure 13. Figure 13 is a flowchart illustrating the adjustment of Q priority and U priority in the second embodiment.

[0138] After ST1 to ST4 shown in Figure 7 have been performed, the management system 101 may perform ST41 to ST43 shown in Figure 13.

[0139] In the management system 101, the calculation unit 103 determines the Q priority and associates it with lot RT (ST41).

[0140] The calculation unit 103 obtains work-in-progress information, delivery date information, and Q-time constraint information from the storage unit 2. Based on the work-in-progress information and Q-time constraint information, the calculation unit 103 determines the Q priority for at least some of the multiple lot RTs that can be processed by resource E for each resource E of the manufacturing line P. At least some of the lot RTs include a Q lot RTq. The calculation unit 103 may determine the Q priority in a form associated with the identifier of the manufacturing line P, the identifier of resource E, and the identifier of lot RT.

[0141] The calculation unit 103 identifies the lot RT that is subject to a Q-time constraint from among the multiple lot RTs that can be processed by resource E, based on the work-in-progress information and Q-time constraint information. The calculation unit 103 determines the Q priority i of lot RT according to the remaining time relative to the constraint time of the lot RT's construction period, based on the delivery date information and Q-time constraint information. The calculation unit 103 may also determine the Q priority i for each lot RT that is in progress on resource Ei using formula 11.

[0142] The calculation unit 103 supplies the Q priority i of each lot RT to be processed by each resource E to the processing unit 107.

[0143] The calculation unit 104 determines the U priority and associates it with lot RT (ST42).

[0144] The calculation unit 104 obtains work-in-progress information and delivery date information from the storage unit 2. Based on the work-in-progress information and delivery date information, the calculation unit 104 determines the U priority for each of the multiple lots RT in progress at each resource E of the manufacturing line P. The multiple lots RT include at least U lot RTu and may further include Q lot RTq. The calculation unit 104 may determine the U priority in a form associated with the identifier of the manufacturing line P, the identifier of the resource E, and the identifier of the lot RT.

[0145] The calculation unit 104 may determine the U priority for each of the multiple lot RTs according to the progress toward the delivery date of lot RT. The calculation unit 104 may also determine the U priority using formula 12.

[0146] The calculation unit 104 may consider that the entire process of the manufacturing line P is long and local variations can be approximated by the mean field, and may determine the progress of lot RT processing by approximating it by the mean field.

[0147] The calculation unit 104 may determine the progress of lot processing by mean-field approximation based on the time the source dwells in inventory B. If lot RT waits for time Δt in inventory B, the calculation unit 103 may update the U priority based on equation 13 and equation 14.

[0148] The calculation unit 104 may determine the processing progress of lot RT by mean-field approximation as lot RT completes processing at resource E and moves on to the next resource E. When lot RT advances one process, the calculation unit 104 may update the U priority based on equation 13 and equation 15.

[0149] The calculation unit 104 supplies the U priority of each lot RT to be processed by each resource E to the processing unit 107.

[0150] The processing unit 107 executes the "Urgent Q-TIME Policy" priority determination algorithm, which takes into account the urgency of the delivery date while adhering to the Q-time constraint (ST43).

[0151] For example, in ST43, steps ST51 to ST54 shown in Figure 14 may be performed. Figure 14 is a flowchart showing the priority determination in the second embodiment.

[0152] The processing unit 107 obtains the Q priority of each Q lot RTq to be processed by each of the multiple resources E in the manufacturing line P from the calculation unit 103.

[0153] The processing unit 107 obtains the U priority of each lot RT to be processed by each of the multiple resources E in the manufacturing line P from the calculation unit 104.

[0154] The processing unit 107 selects the resource E to be processed from among multiple resources E (ST51).

[0155] The processing unit 107 identifies the lot associated with Q priority and the lot associated with U priority (ST52).

[0156] Based on the Q priority information, the processing unit 107 identifies the lot RT that is associated with the Q priority from among the multiple lot RTs that can be processed by the resource E to be processed.

[0157] Based on the U priority information, the processing unit 107 identifies the lot RT that is associated with the U priority from among the multiple lot RTs that can be processed by the resource E to be processed.

[0158] Based on these identification results, the processing unit 107 determines which lot RT should be processed preferentially by resource E from among multiple lot RT that can be processed by resource E (ST53).

[0159] In ST53, steps ST61 to ST69 shown in Figure 15 may be performed. Figure 15 is a flowchart showing the process of determining which lot RT should be processed preferentially by resource E in the second embodiment. ST61 and ST62 may be performed in parallel with each other.

[0160] In ST61, the processing unit 107 identifies the lot RT associated with the highest Q priority among multiple lot RTs that can be processed by the resource E to be processed. The lot RT associated with the highest Q priority will be called the maxQ lot.

[0161] In ST62, the processing unit 107 identifies the lot RT associated with the highest U priority among multiple lot RTs that can be processed by the resource E to be processed. The lot RT associated with the highest U priority will be called the maxU lot.

[0162] Once both ST61 and ST62 are completed, the processing unit 107 determines whether the U priority value of maxU lot RT is greater than the threshold Uth (ST63). The threshold Uth can be determined experimentally in advance, depending on the U priority value that can be considered to indicate a high level of urgency for lot RT.

[0163] The processing unit 107 determines whether the Q priority value of maxQ lot RT is less than the threshold Qth (ST64) if the U priority value of maxU lot RT is greater than the threshold Uth (Yes in ST63). Qth can be determined experimentally in advance, depending on the Q priority value that can be considered to indicate a high level of urgency for lot RT. Qth is, for example, 1.

[0164] If the Q priority value of maxQ lot RT is smaller than the threshold Qth (Yes in ST64), the processing unit 107 determines whether the time maxQ lot RT spends in the constraint interval SCq relative to the constraint time Tq of the Qtime constraint is sufficient if one lot is yielded (ST65).

[0165] The processing unit 107 may determine that there is sufficient leeway in the stay time relative to the constraint time Tq if the remaining time obtained by subtracting the stay time when one lot is given away from the constraint time Tq is equal to or greater than the threshold Tth, and may determine that there is insufficient leeway in the stay time relative to the constraint time Tq if the remaining time is less than the threshold Tth. The threshold Tth can be determined experimentally in advance as the time at which the stay time can be considered to have sufficient leeway relative to the constraint time Tq.

[0166] If the dwell time is sufficient relative to the constraint time Tq (Yes in ST65), the processing unit 107 determines whether it can be allocated to the resource E to be processed (ST66).

[0167] If the processing unit 107 cannot process the target resource E (No in ST66), it waits. When it can process the target resource E (Yes in ST66), it determines that the lot RT to be processed preferentially is maxU lot RT (ST67), and processes maxU lot RT into resource E.

[0168] On the other hand, the processing unit 107 determines whether the resource E to be processed can be allocated if the value of the U priority of maxU lot RT is less than or equal to the threshold Uth (No in ST63), or if the value of the Q priority of maxQ lot RT is greater than or equal to the threshold Qth (No in ST64), or if the dwell time does not have sufficient margin relative to the constraint time Tq (No in ST65) (ST68).

[0169] If the processing unit 107 cannot process the target resource E (No in ST68), it waits. When it can process the target resource E (Yes in ST68), it determines that the lot RT to be processed preferentially is maxQ lot RT (ST69), and processes maxQ lot RT into resource E.

[0170] Once the process (ST53) for determining which lot RT should be processed preferentially using resource E is completed, the processing unit 107, if there are any unprocessed resource E among the multiple resource E in the manufacturing line P (Yes in S54), returns the process to S51, selects a resource E to be processed from among the unprocessed resource E (S51), and repeats S52 and S53.

[0171] If there are no unprocessed resources E among the multiple resources E in the manufacturing line P, the processing unit 107 terminates processing (No in S54).

[0172] As described above, in the second embodiment, the manufacturing line P management method implements an "Urgent Q-TIME Policy" priority determination algorithm that considers the urgency of delivery while adhering to the Q-time constraint. For example, if there are multiple lot RTs that can be processed by resource E, and the Q priority is less than the threshold Qth, and there is sufficient time relative to the Q-time constraint Tq, and there is a lot RT associated with a U priority that exceeds the threshold Uth, then the lot RT associated with the U priority is determined to be processed preferentially. This allows for appropriate adjustment of the Q priority and U priority, and enables the appropriate determination and processing of the priority of each lot RT, thereby enabling efficient lot processing.

[0173] (Third embodiment) Next, a method for managing the manufacturing line according to the third embodiment will be described. The following description will focus on the differences from the first and second embodiments.

[0174] In the first embodiment, a process for identifying resource E that needs improvement is illustrated; in the second embodiment, a process for appropriately adjusting multiple priorities is illustrated; and in the third embodiment, a process for identifying lot waiting times in batch-type resources is illustrated.

[0175] In the manufacturing line P, there are multiple resources E, including a single-wafer resource E that processes one lot at a time, and a batch resource E that processes a certain number of lots RT at once once the number of lots in inventory B reaches the charge number.

[0176] In the manufacturing line P, batch-type resources E with different charge counts may be arranged serially, as shown in Figure 16. Figure 16 is a diagram showing batch-type resources in the third embodiment. Of the multiple batch-type resources Ep-1,Ep arranged serially, resource Ep-1 will be called the forward resource Ep-1, and resource Ep will be called the subsequent resource Ep.

[0177] In Figure 16, batch-type resources Ep with different charge counts are shown. -1 The resource Ep are arranged serially. The forward resource Ep -1 An example configuration is given where the charge count of resource 3 is given, and the charge count of the subsequent resource Ep is given is given as 5.

[0178] In manufacturing line P, batch-type resources E with different charge counts are arranged serially, which can cause lot RT to get stuck in subsequent resources E. Therefore, it is desirable to accurately identify the waiting time for lot RT in subsequent resources E and improve the flow of lot RT.

[0179] Each manufacturing line P, as shown in Figure 16, can be managed by the management system 201, as shown in Figure 17. Figure 17 is a diagram showing the functional configuration of the management system 201.

[0180] The management system 201 considers the number of charges in each of the multiple batch-type resources Ep-1 and Ep arranged serially in the manufacturing line P, and calculates the waiting time for the lot RT to be fed into the subsequent resource Ep.

[0181] In this case, the management system 201 may apply Little's Law to determine the waiting time of the lot RT to be fed into the subsequent resource Ep. Little's Law can be expressed by the following equation 16.

number

[0182] In equation 16, L represents the average number of lots that become pending in inventory B of resource E. λ represents the average arrival rate of lot RT to inventory B of resource E. W is the average waiting time for lot RT in inventory B.

[0183] The management system 201 has evaluation units 211, evaluation units 212, calculation units 213, and processing units 214 instead of calculation units 3, calculation units 4, and processing units 7 (see Figure 4).

[0184] The acquisition unit 5 acquires parameters 2a under the control of the control unit 6. Parameters 2a further include the work-in-progress of lot RT to each resource E of the manufacturing line P, the attributes of each resource E of the manufacturing line P, and Q-time constraints.

[0185] The storage unit 2 may receive the parameter 2a from the acquisition unit 5 and store it as a database under the control of the control unit 6. The database further includes work-in-progress information, attribute information, and Q-time constraint information. Work-in-progress information is information that associates the identifier of the lot in work-in-progress with the identifier of the manufacturing line P and the identifier of the resource E for multiple resources E. Attribute information is information that associates the location of the resource with the type of resource, the number of charges, the average processing time with the identifier of the manufacturing line P and the identifier of the resource E for multiple resources E. The resource type includes single-wafer and batch types. The number of charges is 1 for single-wafer types and 2 or more for batch types. Q-time constraint information is information that associates the constraint time with the identifier of the manufacturing line P and the identifier of the resource E corresponding to the constraint interval SCq.

[0186] The evaluation unit 211 acquires work-in-progress information and attribute information from the storage unit 2 via the control unit 6. Based on the location information of the resources included in the attribute information, the evaluation unit 211 identifies multiple batch-type resources Ep-1 and Ep arranged serially in the manufacturing line P.

[0187] The evaluation unit 211 identifies the number of charges for multiple batch-type resources Ep-1,Ep based on the charge count information included in the attribute information.

[0188] The evaluation unit 211 uses the number of charges of multiple batch-type resources Ep-1 and Ep to determine the number of subsequent resource Ep waiting to be charged a k The evaluation unit 211 calculates the number of subsequent resource Ep waiting to be charged a using the following formula 17. k You may also request this.

number

[0189] In equation 17, bp-1 represents the charge count of the preceding resource Ep-1. bp represents the charge count of the following resource Ep. k-1 This indicates the number of lots that were left over when a batch was not formed in the subsequent resource Ep after k-1 lots RT arrived from the preceding resource Ep-1. k is any integer between 2 and n+1. k This indicates the number of lots that were left over when a batch was not formed in the subsequent resource Ep after k lots RT arrived from the preceding resource Ep-1. k This corresponds to the future inventory quantity for a single batch processing in the subsequent resource Ep.

[0190] Note that in equation 17, a0 = a n = 0

[0191] Equation 17 gives the number of lots a waiting to be charged when k-1 lots RT have arrived. k-1 The number of lots a waiting for charge when k lots RT arrives can be calculated by taking the remainder when the sum of the charge count of the preceding resource Ep-1 is divided by the charge count of the following resource Ep. k This demonstrates that it is possible to find it.

[0192] For example, when bp-1=3 and bp=5, as shown in Figure 18, at k=1 (i.e., time t), the number of lots waiting to be charged a1=3. Figure 18 shows an example of the number of lots fed into the batch-type resource Ep in the third embodiment. At k=2 (i.e., time 2t), the number of lots waiting to be charged a2=(3+3)mod5=1. At k=3 (i.e., time 3t), the number of lots waiting to be charged a3=(1+3)mod5=4. At k=4 (i.e., time 4t), the number of lots waiting to be charged a4=(4+3)mod5=2. At k=5 (i.e., time 5t), the number of lots waiting to be charged a5=(2+3)mod5=0.

[0193] The evaluation unit 211 determines the number of lots a waiting for subsequent resource Ep to be charged.k This is supplied to the calculation unit 213.

[0194] The evaluation unit 212 acquires attribute information from the storage unit 2 via the control unit 6. Based on the charge count information included in the attribute information, the evaluation unit 212 identifies the charge counts of multiple batch-type resources Ep-1,Ep.

[0195] The evaluation unit 212 uses the number of charges of multiple batch-type resources Ep-1 and Ep to determine the number of charge waiting patterns n for subsequent resource Ep. The evaluation unit 212 may also determine the number of charge waiting patterns n for subsequent resource Ep using the following formula 18.

number

[0196] In equation 18, bp-1 represents the charge number of the preceding resource Ep-1. bp represents the charge number of the succeeding resource Ep. l represents the least common multiple of the charge number bp-1 of the preceding resource Ep-1 and the charge number bp of the succeeding resource Ep.

[0197] Equation 18 shows that the number of charge waiting patterns n for the subsequent resource Ep can be found by dividing the least common multiple of the charge number bp-1 of the preceding resource Ep-1 and the charge number bp of the subsequent resource Ep by the charge number bp-1 of the preceding resource Ep-1.

[0198] For example, when bp-1=3 and bp=5, the number of charge waiting patterns is n=15 / 3=5, as shown in Figure 18. Figure 18 shows five different charge waiting patterns.

[0199] The evaluation unit 212 supplies the number of charge waiting patterns n for the subsequent resource Ep to the calculation unit 213.

[0200] The calculation unit 213 calculates the number of lots a waiting for subsequent resource Ep to be charged. kThe evaluation unit 211 receives the value, and the evaluation unit 212 receives the number of charge waiting patterns n for the subsequent resource Ep.

[0201] The calculation unit 213 calculates the number of lots a of the subsequent resource Ep waiting to be charged when k lots arrive at the subsequent resource Ep from the preceding resource Ep-1. k The average number of lots L that will be in a waiting state in the inventory Bp of resource Ep is calculated by dividing by the number of possible patterns n of lot RT sets in the subsequent resource Ep. The calculation unit 213 may also calculate the average number of lots L that will be in a waiting state in the inventory Bp of resource Ep using the following formula 19.

number

[0202] In equation 19, Σa k This is the number of lots a waiting for subsequent resource Ep to charge. k This shows the sum of values ​​from 1 to n. n represents the number of charge waiting patterns for the subsequent resource Ep.

[0203] Equation 19 gives the number of lots a waiting for subsequent resource Ep to charge. k The sum of Σa from 1 to n k We will show that by dividing by the number of subsequent resource Ep charge waiting patterns n, we can find the average number of lots L that will be in a waiting state with resource Ep's inventory Bp.

[0204] The calculation unit 213 acquires operating rate information, operational rate information, and attribute information from the storage unit 2 via the control unit 6.

[0205] The calculation unit 213 extracts the utilization rate rp-1 corresponding to the identifier of the resource E of interest from the utilization rate information. The calculation unit 213 extracts the availability rate mp-1 corresponding to the identifier of the resource E of interest from the availability rate information. The calculation unit 213 may also obtain the load rate up-1 of the forward resource Ep-1 by dividing the utilization rate rp-1 by the availability rate mp-1.

[0206] The calculation unit 213 calculates the average processing time t corresponding to the identifier of the resource Ep-1 of interest from the attribute information. Mp―1 Extract it.

[0207] The calculation unit 213 identifies the number of devices sp-1 located in the same process area Sp-1 as the resource Ep-1 of interest, based on the location information of resource E included in the attribute information.

[0208] The calculation unit 213 calculates the load ratio up-1 of the forward resource Ep-1, the number of charges bp-1 of the forward resource Ep-1, the number of devices sp-1 in the same process area Sp-1 as the forward resource Ep-1, and the average processing time t of the forward resource Ep-1. Mp―1 The average arrival rate λ of lot RT arriving at resource Ep's inventory Bp may be calculated using the following formula 20.

number

[0209] In equation 20, up-1 represents the load factor of the forward resource Ep-1. bp-1 represents the number of charges of the forward resource Ep-1. sp-1 represents the number of devices located in the same process area Sp-1 as resource Ep-1. Mp―1 This shows the average processing time for resource Ep-1.

[0210] Formula 20 calculates the average processing time t of resource Ep-1 by multiplying the load rate up-1 of resource Ep-1, the number of charges bp-1 of the preceding resource Ep-1, and the number of devices sp-1 present in the same process area Sp-1 as resource Ep-1. Mp―1 By dividing by this, we can determine the average arrival rate λ of lot RT to resource Ep's inventory Bp.

[0211] The calculation unit 213 calculates the charge waiting time t per lot in the inventory Bp of resource Ep based on equations 16, 19, and 20. batchcan be obtained by the following mathematical formula 21. Charge waiting time t batch corresponds to W = L / λ in the mathematical formula 16.

Number

[0212] The calculation unit 213 supplies the charge waiting time t per lot in the inventory Bp of the resource Ep to the processing unit 214. batch

[0213] The processing unit 214 receives the charge waiting time t per lot in the inventory Bp of the resource Ep from the calculation unit 213. The processing unit 214 acquires Q-time constraint information from the storage unit 2. The processing unit 214 determines whether the resource Ep belongs to the constraint section SCq based on the Q-time constraint information. If the source Ep belongs to the constraint section SCq, the constraint time Tq of the constraint section SCq is specified based on the Q-time constraint information. The processing unit 214 may determine whether the charge waiting time t batch has a margin with respect to the constraint time Tq. If the charge waiting time t batch has no margin with respect to the constraint time Tq, the processing unit 214 may determine that the processing of the lot RT by the batch-type resource Ep should be started. batch

[0214] The processing unit 214 acquires work-in-progress information from the storage unit 2. The processing unit 214 specifies the inventory quantity of the subsequent resource E with respect to the resource Ep based on the work-in-progress information. The processing unit 214 may determine whether an operation loss occurs in the subsequent resource E with respect to the resource Ep according to the charge waiting time t batch and the inventory quantity of the subsequent resource E with respect to the resource Ep. If an operation loss occurs in the subsequent resource E with respect to the resource Ep, the processing unit 214 may determine that the processing of the lot RT by the batch-type resource Ep should be started.

[0215] The processing unit 214 stores the calculation result 2d including the determination result in the storage unit 2.

[0216] ​​ Furthermore, the operation of the management system 201 differs from that of the first embodiment in the following respects, as shown in Figure 19. Figure 19 is a flowchart illustrating the processing of batch-type resources in the third embodiment.

[0217] After ST1 to ST4 shown in Figure 7 have been performed, the management system 201 may perform ST71 to ST72 shown in Figure 19.

[0218] In management system 201, the waiting time for lots RT to be fed into batch-type resource Ep is required (ST71).

[0219] In ST71, the processes ST81 to ST88 shown in Figure 20 may be performed.

[0220] Evaluation units 211 and 212 each identify batch-type resources arranged serially (ST81).

[0221] The evaluation units 211 and 212 each acquire work-in-progress information and attribute information from the storage unit 2 via the control unit 6. Based on the location information of the resources included in the attribute information, the evaluation units 211 and 212 each identify multiple batch-type resources Ep-1 and Ep arranged serially in the manufacturing line P. The multiple batch-type resources Ep-1 and Ep include a preceding batch-type resource Ep-1 and a succeeding batch-type resource Ep.

[0222] Subsequently, ST82-ST85 and ST86-ST87 may occur in parallel with each other.

[0223] In ST82-ST85, the average number of lots L that would cause a waiting state based on the inventory Bp of resource Ep is determined.

[0224] In ST82, the evaluation unit 211 obtains the number of charges for the batch-type resource Ep-1 in front.

[0225] The evaluation unit 211 extracts the charge number corresponding to the identifier of the preceding batch-type resource Ep-1 from the attribute information. As a result, the evaluation unit 211 obtains the charge number bp-1 of the preceding batch-type resource Ep-1.

[0226] The evaluation unit 211 obtains the number of charges for the subsequent batch-type resource Ep.

[0227] The evaluation unit 211 extracts the number of charges corresponding to the identifier of the subsequent batch-type resource Ep from the attribute information. This allows the evaluation unit 211 to obtain the number of charges bp of the subsequent batch-type resource Ep.

[0228] Once ST82 is completed, ST83 and ST84 will proceed in parallel.

[0229] In ST83, the evaluation unit 211 determines the number of lots a of the subsequent resource Ep waiting to be charged. k The evaluation unit 211 uses the charge count bp-1 of the preceding batch-type resource Ep-1 and the charge count bp of the subsequent batch-type resource Ep to determine the number of lots a waiting for charge of the subsequent resource Ep. k The evaluation unit 211 calculates the number of subsequent resource Ep waiting to be charged a using formula 17. k You may also request this.

[0230] The evaluation unit 211 determines the number of lots a waiting for subsequent resource Ep to be charged. k This is supplied to the calculation unit 213.

[0231] ST84's evaluation unit 212 determines the number of charge waiting patterns n for the subsequent resource Ep. The evaluation unit 212 uses the charge number bp-1 of the preceding batch-type resource Ep-1 and the charge number bp of the subsequent batch-type resource Ep to determine the number of charge waiting patterns n for the subsequent resource Ep. The evaluation unit 212 may also determine the number of charge waiting patterns n for the subsequent resource Ep using formula 18.

[0232] The evaluation unit 212 supplies the number n of charge waiting patterns of the subsequent resource Ep to the calculation unit 213.

[0233] When both ST83 and ST84 are completed, the calculation unit 213 obtains the average lot number L that waits in the inventory Bp of the subsequent resource Ep.

[0234] The calculation unit 213 receives the charge waiting lot number a of the subsequent resource Ep k from the evaluation unit 211 and receives the number n of charge waiting patterns of the subsequent resource Ep from the evaluation unit 212.

[0235] The calculation unit 213 calculates the charge waiting lot number a of the subsequent resource Ep when k lots arrive from the previous resource Ep-1 to the subsequent resource Ep k and divides it by the number n of possible patterns of the set of lots RT in the subsequent resource Ep to obtain the average lot number L that waits in the inventory Bp of the resource Ep. The calculation unit 213 may obtain the average lot number L that waits in the inventory Bp of the resource Ep according to Equation 19.

[0236] In ST86~ST87, the average arrival rate λ at which the lot RT arrives at the inventory Bp of the subsequent resource Ep is obtained.

[0237] In ST86, the calculation unit 213 obtains the load factor of the previous resource, the number of charges of the previous resource, the number of devices existing in the same process area as the previous resource, and the average processing time of the previous resource.

[0238] The calculation unit 213 obtains the operating rate information, the availability information, and the attribute information from the storage unit 2 via the control unit 6.

[0239] The calculation unit 213 extracts the utilization rate rp-1 corresponding to the identifier of the resource Ep-1 of interest from the utilization rate information. The calculation unit 213 extracts the availability rate mp-1 corresponding to the identifier of the resource Ep-1 of interest from the availability rate information. The calculation unit 213 may also obtain the load rate up-1 of the forward resource Ep-1 by dividing the utilization rate rp-1 by the availability rate mp-1.

[0240] The calculation unit 213 calculates the average processing time t corresponding to the identifier of the resource Ep-1 of interest from the attribute information. Mp―1 Extract it.

[0241] The calculation unit 213 identifies the number of devices sp-1 located in the same process area Sp-1 as the resource Ep-1 of interest, based on the location information of resource E included in the attribute information.

[0242] In ST87, the calculation unit 213 calculates the load ratio up-1 of the forward resource Ep-1, the number of charges bp-1 of the forward resource Ep-1, the number of devices sp-1 in the same process area Sp-1 as the forward resource Ep-1, and the average processing time t of the forward resource Ep-1. Mp―1 The average arrival rate λ of lot RT arriving at resource Ep's inventory Bp may be calculated using the formula 20. The calculation unit 213 may calculate the average arrival rate λ of lot RT arriving at resource Ep's inventory Bp using formula 20.

[0243] Once ST82-ST85 and ST86-ST87 are both completed, the charging waiting time will be t batch This is required (ST88).

[0244] The calculation unit 213 divides the average number of lots L that are in a waiting state at the resource Ep's inventory Bp by the average arrival rate λ of lots RT arriving at the resource Ep's inventory Bp to obtain the charge waiting time t per lot. batch The calculation unit 213 calculates the charge waiting time t per lot in the inventory Bp of resource Ep based on equations 16, 19, and 20. batch This can be calculated using equation 21.

[0245] The calculation unit 213 calculates the charge waiting time t per lot in the inventory Bp of resource Ep. batch This is supplied to the processing unit 214.

[0246] Once the process of determining the waiting time for lot RT (ST71) is completed, the process of improving the congestion of lot RT (ST72) is performed.

[0247] In ST72, steps ST91 to ST96 shown in Figure 21 are performed. Figure 21 is a flowchart showing the process for improving the retention of lot RT in the third embodiment. Steps ST91, ST92, and ST93 can be performed in parallel with each other.

[0248] In ST91, the charging waiting time is t batch This is obtained.

[0249] The processing unit 214 calculates the charge waiting time t per lot in the inventory Bp of resource Ep. batch The calculation unit 213 receives the result.

[0250] In ST92, the time constraint Tq is obtained.

[0251] The processing unit 214 obtains Q-time constraint information from the storage unit 2. Based on the Q-time constraint information, the processing unit 214 determines whether the resource Ep belongs to the constraint interval SCq. If the source Ep belongs to the constraint interval SCq, the processing unit 214 identifies the constraint time Tq of the constraint interval SCq based on the Q-time constraint information.

[0252] In ST93, the inventory count of resource E located after the subsequent resource Ep is obtained.

[0253] The processing unit 214 obtains work-in-progress information and attribute information from the storage unit 2. Based on the work-in-progress information, the processing unit 214 identifies the inventory quantity of the subsequent resource E for resource Ep.

[0254] Once ST91, ST92, and ST93 are all completed, the processing unit 214 will determine the charge waiting time t batch We determine whether there is sufficient time relative to the time constraint Tq (ST94).

[0255] The processing unit 214 calculates the charge waiting time t from the constraint time Tq. batch The difference time is calculated by subtracting the difference time, and the difference time is compared with the threshold Tth. If the difference time is greater than or equal to the threshold Tth, the processing unit 214 will then process the charge waiting time t batch If it is determined that there is sufficient leeway with respect to the time constraint Tq, and the difference time is less than the threshold Tth, then the charge waiting time t batch It may be determined that there is insufficient time relative to the time constraint Tq.

[0256] The threshold Tth can be determined experimentally in advance as the time at which the dwell time can be considered to have sufficient margin relative to the constraint time Tq. The threshold Tth may be the same as or different from the threshold Tth used in the second embodiment.

[0257] The processing unit 214 determines the charge waiting time t batch If there is insufficient time relative to the time constraint Tq (Yes in ST94), it is determined that the processing of lot RT should begin in the subsequent batch-type resource Ep without waiting for the batch group to be formed (ST96).

[0258] The processing unit 214 determines the charge waiting time t batch If there is sufficient time relative to the time constraint Tq (No in ST94), then it is determined whether or not operational loss will occur in the subsequent resource E relative to the subsequent resource Ep (ST95).

[0259] The processing unit 214 obtains the average processing time corresponding to the identifier of the subsequent resource E from the attribute information. The processing unit 214 then calculates the estimated time of depletion based on the inventory quantity of the subsequent resource E and the average processing time of the subsequent resource E. The processing unit 214 then calculates the charge waiting time t batch This is compared with the expected time. The processing unit 214 checks the charge waiting time t. batchIf the waiting time is longer than expected, it is determined that further operational losses will occur in subsequent resources E, and the charge waiting time t batch If the time is less than or equal to the expected time, it is determined that no operational loss will occur in the subsequent resource E.

[0260] The processing unit 214 determines that if operational loss occurs in the subsequent resource E (Yes in ST95), it should start processing lot RT in the subsequent batch-type resource Ep without waiting for the batch to be completed (ST96).

[0261] If no operational loss occurs in the subsequent resource E (ST95 indicates No), the processing unit 214 stores the calculation result 2d, including the judgment result, in the storage unit 2 and terminates processing.

[0262] As described above, in the third embodiment, in the method for managing the manufacturing line P, the waiting time t for the charge of the subsequent resource Ep in a plurality of batch-type resources Ep-1,Ep arranged in a serial line is batch To find out the charging waiting time t batch This system uses a method to determine whether a lot RT (Return Time) is likely to accumulate, and if it is likely to accumulate, it is determined that the subsequent batch-type resource Ep should perform the lot RT without waiting for the batch to be completed. As a result, if the processing of the lot RT is started in the subsequent batch-type resource Ep according to the determination result, the occurrence of lot RT accumulation in the manufacturing line P can be suppressed. In other words, lots can be processed efficiently in the manufacturing line P.

[0263] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of Symbols]

[0264] 1,101,201 Management system, 2 Storage unit, 3,4,103,104,213 Calculation unit, 5 Acquisition unit, 6 Control unit, 7,107,214 Processing unit, 211,212 Evaluation unit.

Claims

1. To determine the fluctuation characteristics of the load factor of a manufacturing line with multiple resources, To determine the fluctuation characteristics of the load rate of each of the aforementioned multiple resources, In accordance with the fluctuation characteristics of the load factor of the manufacturing line and the fluctuation characteristics of the load factor of the resources, identify the resource that should be improved among the multiple resources, A method for managing a manufacturing line, including the production line itself.

2. The aforementioned determination means that For each of the aforementioned multiple resources, the variation characteristics of the difference between the load factor of the resource and the load factor of the manufacturing line are determined, For each of the aforementioned multiple resources, statistical processing is performed on the variation characteristics of the difference, Based on the results of the statistical processing, identify the resource that is a bottleneck where lots are stagnating among the multiple resources, including A method for managing a manufacturing line according to claim 1.

3. Determining the variation characteristics of the aforementioned difference is, This includes determining the difference obtained by subtracting the load rate of the manufacturing line from the load rate of the resource for each of the multiple resources, for each of the multiple periods. Applying the aforementioned statistical processing means This includes summing the differences for each of the aforementioned multiple resources over the aforementioned multiple periods. The method for managing a manufacturing line according to claim 2.

4. Identifying the aforementioned bottleneck resources is This includes designating the resource with the largest total difference among the aforementioned multiple resources as the bottleneck resource. The method for managing a manufacturing line according to claim 3.

5. Determining the load factor fluctuation characteristics of the aforementioned manufacturing line is: This includes determining the load factor of the manufacturing line by taking into account the non-uniform Poisson process, Determining the fluctuation characteristics of the load rate of each of the aforementioned multiple resources is: This includes determining the load factor of each of the aforementioned multiple resources by considering a heterogeneous Poisson process. A method for managing a manufacturing line according to claim 1.

6. Determining the load factor fluctuation characteristics of the aforementioned manufacturing line is: This includes determining the load factor of the manufacturing line for each of several periods, corresponding to the number of lots fed into the manufacturing line and the number of lots discharged from the manufacturing line. Determining the fluctuation characteristics of the load rate of each of the aforementioned multiple resources is: This includes determining the load factor of the resource for each of the plurality of periods, corresponding to the utilization rate and availability rate of the resource. The method for managing a manufacturing line according to claim 5.

7. Among the multiple lots that can be processed by the aforementioned resources, identify the lot that is linked to a first priority related to quality and the lot that is linked to a second priority related to delivery date, Based on the results, determine which of the multiple lots should be processed preferentially by the resource. Includes A method for managing a manufacturing line according to claim 1.

8. Identifying the lot associated with the first priority and the lot associated with the second priority is: Identifying the lot that is associated with the highest priority among the aforementioned multiple lots, Identifying the lot that is associated with the highest second priority among the aforementioned multiple lots, including The method for managing a manufacturing line according to claim 7.

9. The above decision is, If the first priority is equal to or greater than the first threshold, or there is insufficient time relative to the constraint, or if there are no lots associated with the second priority that exceed the second threshold, the lot associated with the first priority is determined to be the lot to be processed preferentially. The method for managing a manufacturing line according to claim 7.

10. The above decision is, If the first priority is less than the first threshold, and there is sufficient time relative to the constraint, and there are lots associated with the second priority that exceed the second threshold, the lot associated with the second priority is determined to be the lot to be processed preferentially. The method for managing a manufacturing line according to claim 9.

11. The aforementioned first priority is determined according to the remaining time relative to the time constraints of the lot's construction period. The second priority is determined according to the progress toward the lot's delivery date. The method for managing a manufacturing line according to claim 7.

12. The second priority mentioned above is obtained by approximating the progress of lot processing using a mean-field approach. The method for managing a manufacturing line according to claim 11.

13. The second priority is determined by approximating the progress of lot processing by mean field based on the elapsed time within the resource inventory. The method for managing a manufacturing line according to claim 12.

14. The second priority is determined by approximating the processing progress of a lot by mean field, as each lot finishes processing at one resource and moves on to the next. The method for managing a manufacturing line according to claim 12.

15. This further includes determining the waiting time for lots fed into the first resource by considering the number of charges in a batch-type first resource and applying Little's Law. A method for managing a manufacturing line according to claim 1.

16. To determine the aforementioned waiting time, When k lots arrive at the first resource from a batch-type second resource that processes lots before the first resource, the number of lots waiting to be charged at the first resource is divided by the number of possible patterns of lot sets at the first resource to determine the average number of lots that will be in a waiting state. To determine the average arrival rate to the first resource, The average number of lots that enter the waiting state is divided by the average arrival rate to determine the charge waiting time per lot in the inventory of the first resource, including The method for managing a manufacturing line according to claim 15.

17. The number of patterns is obtained by dividing the least common multiple of the number of charges of the second resource and the number of charges of the first resource by the number of charges of the second resource. The method for managing a manufacturing line according to claim 16.

18. If the required waiting time is insufficient relative to the time constraint, it is determined that processing of the batch-type resource should be started. Includes The method for managing a manufacturing line according to claim 15.

19. In a manufacturing line with multiple resources, among the multiple lots that can be processed by those resources, identify the lot that is linked to the first priority regarding quality and the lot that is linked to the second priority regarding delivery date. Based on the results of the selection, the lot that should be processed preferentially by the resource among the multiple lots is determined, A method for managing a manufacturing line, including the production line itself.

20. In a manufacturing line with multiple resources, the waiting time for a batch of a lot fed into the first resource is determined by applying Little's Law, taking into account the number of charges in the first batch of the resource. A method for managing a manufacturing line, including the production line itself.

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