mixing device

Abstract

This allows for prevention of a decrease in Cv value and reduction of installation space, while also enabling sufficient mixing of the main fluid and secondary fluid. [Solution] The stirring members are arranged in order from the upstream side, the stirring member 51A and the stirring member 51B are provided in order from the upstream side, the stirring member 51A is provided with stirring protrusions 516a and 516b that protrude opposite each other toward the radially inward side of the main flow path 2, the stirring member 51B is provided with stirring protrusions 516a and 516b that protrude opposite each other toward the radially inward side of the main flow path 2, and the centerlines CL11 of the stirring protrusions 516a and 516b of the stirring member 51A and the centerlines CL12 of the stirring protrusions 516a and 516b of the stirring member 51B are positioned at an angle A11 in a cross-sectional view perpendicular to the axial direction of the main flow path 2.

Description

Technical Field

[0001] The present invention relates to a mixing device including a main flow path for flowing a main fluid, a sub-flow path for merging a sub-fluid into the main fluid flowing through the main flow path, and the main flow path includes a stirring member for stirring the main fluid and the sub-fluid on the downstream side of the sub-flow path.

Background Art

[0002] Conventionally, in the cleaning process of wafers, which are semiconductor materials, a batch-type cleaning device that processes a plurality of wafers collectively is used. In the batch-type cleaning device, the wafers are cleaned by immersing a plurality of wafers in a processing tank filled with a cleaning solution. As the cleaning solution, for example, a mixture of pure water and a chemical solution is used, and a mixing device for mixing pure water and the chemical solution and supplying it to the processing tank is used.

[0003] As the mixing device, for example, an in-line type mixing device disclosed in Patent Document 1 is known. In this mixing device, after a regulator is merged into the main fluid, both fluids of the main fluid and the regulator are mixed by flowing them into a static mixer.

[0004] More specifically, the static mixer is loaded with a plurality of alternately arranged right-twisted blade-shaped elements and left-twisted blade-shaped elements. For this reason, every time both fluids pass through each element, they are divided on both sides of the twisted part of the element. Furthermore, every time both fluids pass through each element, the flow directions of both fluids are switched between the right-twisted direction and the left-twisted direction. In this way, mixing is performed by dividing both fluids and switching the flow directions.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

[0006] The conventional mixing apparatus had the following problems:

[0007] The static mixer described above has a twisted vane-shaped element, and therefore there is no through-section between the fluid inlet and outlet. As a result, pressure loss occurs when the fluid flows through the static mixer, leading to a problem of a low Cv value (capacity coefficient indicating the ease of fluid flow). The inventors of this application measured the Cv value at 4 based on JIS B2005-2-3:2004, with an inner diameter of φ22.2 mm. Furthermore, the static mixer mixes the fluid flowing through it by dividing it or switching its flow direction. Therefore, multiple elements are necessary for sufficient mixing, and the static mixer needs to be of a certain length. As a result, there is a problem in that it is difficult to use when there are space constraints for installing the mixing device.

[0008] The present invention has been made in view of the above problems, and aims to provide a mixing device that can prevent a decrease in the Cv value and reduce the installation space, while also being able to sufficiently mix the main fluid and the auxiliary fluid (e.g., a chemical solution). [Means for solving the problem]

[0009] To solve the above problems, a mixing apparatus in one aspect of the present invention has the following configuration.

[0010] (1) A mixing device comprising a main channel for flowing a main body and a sub-channel for merging a secondary fluid with the main fluid flowing in the main channel, wherein the main channel is provided with a stirring member downstream of the sub-channel for stirring the main fluid and the secondary fluid, characterized in that the stirring member comprises a first stirring member and a second stirring member arranged in order from the upstream side, the first stirring member comprises a first pair of protrusions projecting opposite to each other toward the radially inward direction of the main channel, the second stirring member comprises a second pair of protrusions projecting opposite to each other toward the radially inward direction of the main channel, and the centerlines of the first pair of protrusions and the centerlines of the second pair of protrusions are positioned at an angle in a cross-sectional view perpendicular to the axial direction of the main channel.

[0011] (2) In the mixing apparatus described in (1), it is preferable that the centerlines of the first pair of protrusions and the centerlines of the second pair of protrusions are positioned at an angle of 90 degrees ± 20 degrees in a cross-sectional view perpendicular to the axial direction of the main flow path.

[0012] (3) In the mixing apparatus described in (1) or (2), it is preferable that the first stirring member and the second stirring member are positioned at an interval between them that is greater than or equal to the diameter of the main flow path and less than or equal to three times the diameter of the main flow path.

[0013] (4) In the mixing apparatus described in any one of (1) to (3), it is preferable that the centerlines of the first pair of protrusions are parallel to the direction in which the auxiliary fluid flows into the main flow path in the cross-sectional view.

[0014] (5) In the mixing apparatus described in any one of (1) to (4), it is preferable that the opening area of ​​the openings of the first stirring member and the second stirring member for flowing the main fluid and the secondary fluid is 30% or more and 70% or less of the flow area of ​​the main flow path.

[0015] (6) In the mixing apparatus described in any one of (1) to (5), it is preferable that each of the first pair of protrusions has a length dimension in the radial direction of the main flow path of 25% or more and 45% or less of the diameter of the main flow path, and a width dimension in the direction perpendicular to the radial direction of the main flow path of 20% or more and 45% or less of the diameter of the main flow path, and that each of the second pair of protrusions has a length dimension in the radial direction of the main flow path of 25% or more and 45% or less of the diameter of the main flow path, and a width dimension in the direction perpendicular to the radial direction of the main flow path of 20% or more and 45% or less of the diameter of the main flow path.

[0016] (7) In the mixing apparatus described in any one of (1) to (6), it is preferable that the stirring member is provided with a positioning part that defines the angle between the centerlines of the first pair of protrusions and the centerlines of the second pair of protrusions in a cross-sectional view perpendicular to the axial direction of the main flow path.

[0017] (8) In the mixing apparatus described in any one of (1) to (7), it is preferable that the stirring member is provided with markings that allow the direction of the centerlines of the first pair of protrusions and the direction of the centerlines of the second pair of protrusions to be confirmed from outside the stirring member. [Effects of the Invention]

[0018] According to the mixing apparatus of the present invention, it is possible to prevent a decrease in the Cv value and reduce the installation space, while also being able to thoroughly mix the main fluid and the secondary fluid. [Brief explanation of the drawing]

[0019] [Figure 1] This is a perspective view of the mixing apparatus according to this embodiment. [Figure 2] This is a cross-sectional view AA in Figure 1. [Figure 3] This is a magnified view of part B in Figure 2. [Figure 4] This is a perspective view of the stirring member. [Figure 5] This is a front view of the stirring member as seen from the axial direction. [Figure 6] It is a cross-sectional view taken along the line C-C of FIG. 2. [Figure 7] It is an exploded view of the stirring part. [Figure 8] It is a diagram showing a state where a vortex flow is generated by the stirring member. [Figure 9] It is a diagram showing a modified example of the stirring member. [Figure 10] It is an exploded view of the stirring part according to the modified example. [Figure 11] It is a diagram showing other examples of the stirring member. [Figure 12] It is a diagram showing other examples of the stirring member. [Figure 13] It is a diagram showing other examples of the stirring member.

Mode for Carrying Out the Invention

[0020] An embodiment of the mixing device according to the present invention will be described in detail with reference to FIGS. 1 to 7. FIG. 1 is a perspective view of the mixing device 1 according to the present embodiment. FIG. 2 is a cross-sectional view taken along the line A-A of FIG. 1. FIG. 3 is a partial enlarged view of part B of FIG. 2. FIG. 4 is a perspective view of the stirring members 51A and 51B. FIG. 5 is a front view of the stirring members 51A and 51B viewed from the axial direction. FIG. 6 is a cross-sectional view taken along the line C-C of FIG. 2. FIG. 7 is an exploded view of the stirring part 5. Note that the drawings used in the description are simplified for the purpose of explanation and do not accurately represent shapes, dimensions, etc.

[0021] (Regarding the configuration of the mixing device) The mixing device 1 according to the present embodiment is used, for example, in a batch-type cleaning device that processes a plurality of wafers collectively. As shown in FIGS. 1 and 2, the mixing device 1 mainly includes a main flow path 2, sub-flow paths 3A, 3B, 3C, and 3D, a manifold valve 4 provided on the main flow path 2, and a stirring part 5.

[0022] (Regarding the configuration of the main flow path) Main channel 2 is a pipeline primarily for carrying pure water (an example of the main fluid), and a pure water supply source 6 is connected to its upstream side (right side in Figure 1). The downstream side of main channel 2 (left side in Figure 1) is connected to the processing tank 7 of a batch-type washing device.

[0023] The main flow path 2 is not a flow path consisting of a single component, but rather a flow path formed by the connection of, for example, the first connecting pipe 8, the internal flow path 421 within the manifold valve 4 (see Figure 2), the second connecting pipe 9, and the third connecting pipe 10. Note that the components constituting the main flow path 2 described here are merely examples, and the number of components constituting the main flow path 2 may increase or decrease depending on the piping space and length.

[0024] (Regarding the configuration of the secondary channel) Each of the sub-channels 3A, 3B, 3C, and 3D is a pipeline for flowing a chemical solution (an example of a sub-fluid). Each of the sub-channels 3A, 3B, 3C, and 3D has a chemical solution supply source (not shown) connected to its upstream side (lower left side in Figure 1). Furthermore, each of the sub-channels 3A, 3B, 3C, and 3D merges with the main channel 2 downstream by a manifold valve 4. Therefore, the chemical solutions supplied from supply sources 8A, 8B, 8C, and 8D flow through the sub-channels 3A, 3B, 3C, and 3D before merging with the pure water flowing through the main channel 2. In the following description, when sub-channels 3A, 3B, 3C, and 3D are not specifically distinguished, they will simply be referred to as "sub-channel 3". The reason why there are four sub-channels 3 in this embodiment is because four types of chemical solutions are used, and the number of sub-channels will increase or decrease depending on the number of chemical solutions used.

[0025] (Regarding the configuration of the manifold valve) The manifold valve 4 mainly consists of air-operated flow control valves 41A, 41B, 41C, and 41D, and a manifold base 42.

[0026] The manifold base 42 is a block formed in the shape of a rectangular parallelepiped. The manifold base 42 is equipped with an input-side fitting 423 (see Figure 2) on its upstream end face (the side facing the first connecting pipe 8), and the input-side fitting 423 is connected to the first connecting pipe 8 by a connecting device 52A and a gasket 53. This allows pure water to flow into the manifold base 42.

[0027] The manifold base 42 is equipped with an internal flow path 421 that penetrates the manifold base 42 from the upstream side to the downstream side (towards the stirring section 5). This allows the pure water flowing into the manifold base 42 to flow downstream.

[0028] The manifold base 42 is equipped with internal sub-channels 422A, 422B, 422C, and 422D that merge into the internal channel 421. Specifically, the internal sub-channels 422A, 422B, 422C, and 422D are aligned along the axial direction of the internal channel 421 (left-right direction in Figure 2) and merge into the internal channel 421 from a direction perpendicular to the axial direction of the internal channel 421. Internal sub-channel 422A communicates with sub-channel 3A, internal sub-channel 422B communicates with sub-channel 3B, internal sub-channel 422C communicates with sub-channel 3C, and internal sub-channel 422D communicates with sub-channel 3D. Therefore, the chemical solution flowing into the manifold base 42 from sub-channels 3A, 3B, 3C, and 3D is merged with the pure water flowing in the internal channel 421 (main channel 2) via internal sub-channels 422A, 422B, 422C, and 422D. The chemical solution supplied from the supply source is controlled to the required flow rate by a flow controller installed on sub-channel 3 before flowing into the manifold base 42.

[0029] The manifold base 42 is equipped with an output connector 424 (see Figure 2) on its downstream side (towards the stirring section 5), and the output connector 424 is connected to the stirring section 5 by a connecting device 52A. This allows the pure water or chemical solution flowing into the manifold base 42 to be output to the stirring section 5.

[0030] The flow control valves 41A, 41B, 41C, and 41D are valve devices for opening or closing the internal sub-channels 422A, 422B, 422C, and 422D. More specifically, they function as follows: When energized, the flow control valve 41A opens, opening the internal sub-channel 422A. This allows the chemical solution in sub-channel 3A to flow into the internal channel 421. In other words, the chemical solution in sub-channel 3A merges with the pure water in the internal channel 421. On the other hand, when de-energized, the flow control valve 41A closes the internal sub-channel 422A. This prevents the chemical solution in sub-channel 3A from flowing into the internal channel 421. In other words, it stops the chemical solution in sub-channel 3A from merging with the pure water. The operation of flow control valves 41B, 41C, and 41D is the same as that of flow control valve 41A. Flow control valve 41B controls the merging or stopping of the chemical solution in subchannel 3B with pure water, flow control valve 41C controls the merging or stopping of the chemical solution in subchannel 3C with pure water, and flow control valve 41D controls the merging or stopping of the chemical solution in subchannel 3D with pure water. Therefore, by energizing one of the flow control valves 41A, 41B, 41C, or 41D, it is possible to select which chemical solution to merge with the pure water.

[0031] (Regarding the configuration of the stirring section) The stirring section 5 mainly consists of a second connecting pipe 9, stirring members 51A and 51B (see Figure 2), and connecting devices 52A and 52B. Since stirring member 51A and stirring member 51B are the same component, in the following description, unless otherwise specified, they will simply be referred to as "stirring member 51".

[0032] The second connecting pipe 9 is a straight pipe having the same flow path area as the first connecting pipe 8, the internal flow path 421, and the third connecting pipe 10.

[0033] The stirring member 51 has the function of stirring and mixing the pure water and the chemical solution. In addition, stirring member 51A also functions as a gasket, sealing the space between the second connecting pipe 9 and the output side fitting 424, and stirring member 51B also functions as a gasket, sealing the space between the second connecting pipe 9 and the third connecting pipe 10.

[0034] As shown in Figures 3-5, the stirring member 51 comprises a main body portion 511, an overhang portion 512 that extends outward from the main body portion 511 in the radial direction, and a positioning portion 513 provided on the outer peripheral edge of the overhang portion 512.

[0035] Annular seal grooves 514a and 514b are formed on both axial sides of the main body 511. A press-fit portion 4242, which protrudes from the connection portion 4241 of the output side fitting 424 toward the stirring section 5, is press-fitted into the annular seal groove 514a of the stirring member 51A on the manifold valve 4 side. A press-fit portion 92, which protrudes from the connection portion 91 of the second connecting pipe 9 toward the manifold valve 4, is press-fitted into the annular seal groove 514b of the stirring member 51A on the second connecting pipe 9 side. By press-fitting the press-fit portions 5241 and 92 into the annular seal grooves 514a and 514b in this way, a seal is maintained between the output side fitting 424 and the second connecting pipe 9. The connection between the output side fitting 424 and the second connecting pipe 9 is maintained by attaching a cylindrical connecting device 52A to the outer circumference of the connection portion 4241 and the connection portion 91. The stirring member 51B maintains a seal between the second connecting pipe 9 and the third connecting pipe 10, similar to the stirring member 51A. Similarly, the connecting device 52B maintains the connection between the second connecting pipe 9 and the third connecting pipe 10, similar to the connecting device 52A. The stirring member 51 is detachable from the output side joint 424, the second connecting pipe 9, and the third connecting pipe 10. Therefore, if the stirring member 51 needs to be replaced due to deterioration over time, it can be replaced with a new stirring member 51.

[0036] Furthermore, the stirring member 51 is located coaxially with the main flow path 2, and the inner circumferential surface 515 of the stirring member 51 (the inner circumferential surface of the main body 511) forms a part of the inner circumferential surface of the main flow path 2. On the inner circumferential surface 515, stirring protrusions 516a and 516b (an example of a pair of protrusions) are provided facing each other toward the radially inward direction of the main flow path 2. That is, stirring protrusions 516a and 516b are provided on the inner circumferential surface 515 with a 180-degree interval in the circumferential direction.

[0037] The length dimension L11 of the stirring protrusions 516a and 516b is preferably 25% to 45% of the diameter D of the main flow path 2 (diameter of the inner circumferential surface 515), and more preferably 30% to 40%. In this embodiment, it is set to 35%. The width dimension W11 of the stirring protrusions 516a and 516b is preferably 20% to 45% of the diameter D of the main flow path 2, and more preferably 25% to 40%. In this embodiment, it is set to 30%. The tips of the stirring protrusions 516a and 516b are semicircular in shape with a diameter equal to the width dimension W11.

[0038] By configuring the stirring protrusions 516a and 516b as described above, the opening area of ​​the opening 517 through which pure water and chemical solution flow is equal to the flow area of ​​the main flow path 2 ((D / 2) 2 It is set at 60% of (xπ). However, the opening area of ​​the opening 517 is not limited to the above, and is preferably 30% or more and 70% or less of the flow area of ​​the main flow channel 2, and more preferably 50% or more and 70% or less.

[0039] The stirring members 51A and 51B, having the configurations described above, are positioned along the axial direction of the main flow path 2 with a spacing L12 (see Figure 2). The spacing L12 is preferably greater than or equal to the diameter D of the main flow path 2 and less than or equal to three times the diameter D of the main flow path 2, and more preferably between 1.5 times and 2.5 times the diameter D of the main flow path 2. In this embodiment, the spacing L12 is approximately twice the diameter D. The length of the second connecting pipe 9 is selected according to the size of the spacing L12.

[0040] Also, the stirring member 51A on the upstream side (the side of the manifold valve 4) is positioned such that the center line CL11 of the stirring protrusions 516a and 516b is parallel to the direction in which the chemical solution flows into the main flow path 2. That is, the stirring member 51A is positioned such that the center line CL11 of the stirring protrusions 516a and 516b is parallel to the axial direction of the internal sub-flow paths 422A, 422B, 422C, and 422D (the vertical direction in FIGS. 2 and 6). On the other hand, the stirring member 51B on the downstream side (the side of the third connecting pipe 10) is positioned such that the center line CL12 of the stirring member 51B has an angle A11 with respect to the center line CL11 of the stirring member 51A. The value of the angle A11 at this time is not particularly limited, but it is preferably 90 degrees as in the present embodiment.

[0041] The directions of the center lines CL11 and CL12 of the stirring protrusions 516a and 516b (the directions of the stirring protrusions 516a and 516b) as described above are determined by the positioning portion 513 and can also be confirmed from the outside of the mixing device 1 by the marks 513a (see FIG. 4). Specifically, it is as follows.

[0042] The stirring member 51 is provided with a positioning portion 513 at the outer peripheral edge of the overhanging portion 512. More specifically, the positioning portion 513 is provided at four locations every 90 degrees in the circumferential direction of the outer peripheral edge of the overhanging portion 512. On the outer peripheral surfaces of the two positioning portions 513 that are located on the center line CL11 (CL12) of the stirring protrusions 516a and 516b among the four positioning portions 513, marks 513a indicating the positions of the stirring protrusions 516a and 516b are provided. As an example of the mark 513a, it is in the form of the character "凸" that is recessed compared to the surroundings.

[0043] The positioning part 513 can be fitted into the notches 4243, 93 (see Figure 7) provided in the connecting parts 4241, 91. By attaching the stirring member 51A in alignment with the notches 4243, 93, the stirring member 51 can be positioned so that the centerlines CL11 of the stirring protrusions 516a, 516b are parallel to the direction in which the chemical solution flows, or parallel and perpendicular to the direction in which the chemical solution flows. Furthermore, by visually checking the marker 513a, the orientation of the stirring protrusions 516a, 516b can be confirmed even after the stirring member 51 has been assembled. Similarly, the stirring member 51B is attached by aligning the positioning part 513 with the notches 94, 101. At this time, by rotating the mark 513a of the stirring member 51B by 90 degrees in the circumferential direction relative to the mark 513a of the stirring member 51A, the center line CL12 of the stirring member 51B is positioned at a 90-degree angle with the center line CL11 of the stirring member 51A.

[0044] Furthermore, if windows are provided in the connecting devices 52A and 52B so that the marker 513a can be seen, the orientation of the stirring protrusions 516a and 516b can be confirmed even after the connecting devices 52A and 52B have been attached.

[0045] As a marker to confirm the orientation of the stirring protrusions 516a and 516b, a notch 541 may be provided on the outermost circumference of the stirring member 54, as shown in Figure 9. Since the notch 541 is located on the center line CL13 of the stirring protrusions 516a and 516b, the orientation of the stirring protrusions 516a and 516b can be confirmed by visually checking the position of the notch 541.

[0046] (Regarding the effects of the mixing device) The mixing apparatus 1, having the configuration described above, operates as follows.

[0047] When pure water is supplied from source 6, it flows downstream (towards treatment tank 7) through main channel 2. The fluid pressure of this pure water is approximately 0.1 to 0.5 MPa, and the flow rate is 60 liters / minute.

[0048] If it is necessary to supply pure water to the treatment tank 7, the pure water will flow directly through the main channel 2 and reach the treatment tank 7.

[0049] On the other hand, when it is necessary to supply a solution of pure water mixed with a chemical to the treatment tank 7, the manifold valve 4 combines the necessary chemical with the pure water flowing through the main channel 2. Specifically, if the chemical in the sub-channel 3A is needed, the flow rate adjustment valve 41A is opened, allowing the chemical to flow from the internal sub-channel 422A into the main channel 2. This combines the chemical with the pure water. The same applies to the chemicals in the sub-channels 3B, 3C, and 3D; by opening the corresponding flow rate adjustment valves 41B, 41C, and 41D, the chemicals can be combined with the pure water. At this time, the amount of chemical added is 30% or less of the pure water. The viscosity of the chemical added is within the range of 0.05 to 100 mPa·s.

[0050] After the chemical solution is added to the pure water, the pure water and the chemical solution are stirred and mixed in the stirring unit 5. The pure water and chemical solution stirred and mixed in the stirring unit 5 are then supplied to the processing tank 7 of the batch-type cleaning apparatus via the third connecting pipe 10 as a cleaning solution for cleaning wafers.

[0051] Here, we will explain in detail the stirring and mixing of pure water and chemical solution in the stirring section 5. When the pure water and chemical solution pass through the upstream stirring member 51A, a vortex V is generated on the back side (downstream side) of the stirring protrusions 516a and 516b (see Figure 8). This vortex V stirs and mixes the pure water and chemical solution. Furthermore, when the pure water and chemical solution pass through the downstream stirring member 51B, a vortex is also generated on the back side (downstream side) of the stirring protrusions 516a and 516b. This vortex also stirs and mixes the pure water and chemical solution. In other words, the pure water and chemical solution are stirred and mixed at two points: when passing through the upstream stirring member 51A and when passing through the downstream stirring member 51B.

[0052] Furthermore, the angle A between the center line CL12 of the stirring protrusions 516a and 516b of the stirring member 51B and the center line CL11 of the stirring protrusions 516a and 516b of the stirring member 51A is 90 degrees. Therefore, the position of the vortex generated by the stirring member 51B is shifted by 90 degrees in the circumferential direction of the inner surface of the main flow path 2 relative to the position of the vortex generated by the stirring member 51A. That is, when the pure water and chemical solution pass through the stirring member 51A, vortices are generated above and below the main flow path 2 in the cross-sectional view shown in Figure 6, and when the pure water and chemical solution pass through the stirring member 51B, vortices are generated on the left and right sides of the main flow path 2 in the cross-sectional view shown in Figure 6. Thus, the pure water and chemical solution can be stirred and mixed evenly throughout. Note that the angle A is not limited to 90 degrees, but is preferably 90 degrees ± 20 degrees, and more preferably 90 degrees ± 10 degrees. If the position of the vortex generated by the stirring member 51B can be shifted circumferentially relative to the position of the vortex generated by the stirring member 51A, stirring can be performed. The closer angle A is to 90 degrees, the wider the area of ​​the generated vortex becomes, and therefore the greater the stirring effect.

[0053] Furthermore, the center line CL11 of the stirring protrusions 516a and 516b of the stirring member 51A is parallel to the direction in which the chemical solution flows into the main channel 2 in the cross-sectional view shown in Figure 6. As a result, the chemical solution flowing into the main channel 2 does not pass through the opening 517 of the stirring member 51A, but collides with the stirring protrusions 516a, making it easier to disperse in the pure water.

[0054] Furthermore, the distance L12 between the first stirring member 51A and the second stirring member 51B is set to be greater than or equal to the diameter D of the main flow path 2 and less than or equal to three times the diameter D of the main flow path 2 (in this embodiment, approximately twice the diameter D), thus enabling space saving and even stirring and mixing of pure water and chemical solution throughout. In other words, if the value of the distance L12 is less than the diameter D, the generation of vortices by the stirring member 51A will be inhibited, and there is a risk that the pure water and chemical solution will not be able to be sufficiently stirred and mixed. Also, if the value of the distance L12 exceeds three times the diameter D, the length of the second connecting pipe 9 will become too long, making space saving impossible. The axial length of the stirring section 5 is limited to 25% of the axial length of a static mixer in the conventional technology. Furthermore, it is even more preferable that the spacing L12 is at least 1.0 times the diameter D of the main flow path 2 and at least 2.0 times the diameter D of the main flow path 2. This is because setting the spacing L12 within the above range makes it possible to achieve both agitation and mixing effects and a compact installation space for the mixing device 1.

[0055] Furthermore, the stirring section 5 has a length dimension L11 of stirring protrusions 516a and 516b that is 35% of the diameter D of the main flow path 2, and a width dimension W11 of stirring protrusions 516a and 516b that is 30% of the diameter D of the main flow path 2, and the opening area of ​​the opening 517 is the flow path area ((D / 2) of the main flow path 2. 2 Since it is set to 60% of (xπ), a decrease in the Cv value can be prevented. The fluid velocity of the fluid flowing through the main channel 2 is fastest near the axis of the main channel 2, and the openings 517 of the stirring members 51A and 51B allow the area near the axis of the main channel 2 in the stirring section 5 to penetrate from the upstream end to the downstream end of the stirring section 5. Therefore, it is possible to sufficiently stir and mix the pure water and the chemical solution while minimizing pressure loss, and thus preventing a decrease in the Cv value. The inventors of this application measured the Cv value based on JIS B2005-2-3:2004 with an inner diameter of φ22.2 mm, and the result was 11.

[0056] Furthermore, the length dimension L11 of the stirring protrusions 516a and 516b is not limited to 35% of the diameter D, but may be between 25% and 45% of the diameter D. Also, the width dimension W11 of the stirring protrusions 516a and 516b is not limited to 30% of the diameter D, but may be between 20% and 45% of the diameter D. If the dimension L11 is less than 25% of the diameter D, or the width dimension W11 is less than 20% of the diameter D, the size of the stirring protrusions 516a and 516b will not be large enough to perform stirring and mixing with two stirring members 51A and 51B, and it will be necessary to provide three or more stirring members 51. In other words, this will lead to an increase in the installation space of the mixing device 1. On the other hand, if the dimension L11 or the width dimension W11 exceeds 45% of the diameter D, the opening area of ​​the opening 517 becomes smaller, leading to a decrease in the Cv value, and a significant difference compared to the Cv value of a static mixer related to the conventional technology cannot be obtained. Furthermore, the length dimension L11 is more preferably 30% to 40% of the diameter D, and the width dimension W11 is more preferably 25% to 40% of the diameter D. By setting the length dimension L11 and the width dimension W11 within the above ranges, it is possible to achieve both stirring / mixing effect and flow rate.

[0057] Furthermore, the opening area of ​​the opening 517 is not limited to 60% of the flow area of ​​the main flow channel 2, but may be between 30% and 70% of the flow area of ​​the main flow channel 2. If the opening area of ​​the opening 517 is less than 30% of the flow area of ​​the main flow channel 2, it will lead to a decrease in the Cv value, and a significant difference compared to the Cv value of a static mixer in the conventional technology will not be obtained. If the opening area of ​​the opening 517 exceeds 70% of the flow area of ​​the main flow channel 2, the Cv value will increase, but three or more stirring members 51 will be required to perform sufficient stirring and mixing, which will lead to an increase in the installation space of the mixing device 1. Moreover, it is even more preferable that the opening area of ​​the opening 517 be between 50% and 70% of the flow area of ​​the main flow channel 2. By setting the opening area of ​​the opening 517 within the above range, it is possible to achieve both stirring and mixing effect and flow rate assurance.

[0058] Furthermore, the inventors of this application have invented and experimented with other stirring members for stirring, including stirring member 58 shown in Figure 11, stirring member 59A shown in Figure 12, and stirring member 59B shown in Figure 13, in addition to stirring member 51. They found that stirring member 51 exhibited the best effects in terms of preventing a decrease in Cv value, reducing installation space, and performing stirring and mixing functions.

[0059] The stirring member 58 stirs and mixes the pure water and chemical solution by generating a vortex downstream of the occluded section 881 as they pass through the semicircular opening 582. Experiments have shown that four stirring members 58 are required to sufficiently stir and mix the pure water and chemical solution, which has the problem of increasing the installation space.

[0060] The stirring members 59A and 59B stir and mix by generating vortices downstream of the cylindrical sections 592 and 593 as pure water and chemical solution pass through the circular opening 591. The stirring member 59A differs from the stirring member 59B in that the cylindrical section 592 is located at the center of the opening 591, while the cylindrical section 593 is offset from the center of the opening 591. While the stirring members 59A and 59B were able to obtain sufficient Cv values, their complex shapes make them difficult to manufacture and increase manufacturing costs.

[0061] As described above, the mixing apparatus 1 according to this embodiment is (1) A mixing device 1 comprising a main channel 2 for flowing a main fluid (e.g., pure water) and subchannels 3A, 3B, 3C, 3D for merging a secondary fluid (e.g., chemical solution) with the main fluid flowing through the main channel 2, wherein the main channel 2 is provided with stirring members 51A, 51B downstream of the subchannels 3A, 3B, 3C, 3D for stirring the main fluid and the secondary fluid, wherein the stirring members 51A, 51B consist of a first stirring member (stirring member 51A) and a second stirring member (stirring member 51B), arranged in order from the upstream side, and the first stirring member (stirring member 51A) is provided to protrude opposite each other toward the radially inward direction of the main channel 2. The stirring member (stirring member 51B) is characterized by having a first pair of protrusions (stirring protrusions 516a, 516b), having a second pair of protrusions (stirring protrusions 516a, 516b) projecting outwards toward the radially inward direction of the main flow path 2, and the centerlines CL11 of the first pair of protrusions (stirring protrusions 516a, 516b of stirring member 51A) and the centerlines CL12 of the second pair of protrusions (stirring protrusions 516a, 516b of stirring member 51B) being positioned at an angle (angle A11) in a cross-sectional view perpendicular to the axial direction of the main flow path 2 (see Figure 6).

[0062] (2) In the mixing apparatus 1 described in (1), it is preferable that the center line CL11 of the first pair of protrusions (stirring protrusions 516a, 516b of the stirring member 51A) and the center line CL12 of the second pair of protrusions (stirring protrusions 516a, 516b of the stirring member 51B) are positioned at an angle of 90 degrees ± 20 degrees (angle A11) in a cross-sectional view perpendicular to the axial direction of the main flow path 2 (see Figure 6).

[0063] (3) In the mixing apparatus 1 described in (1) or (2), it is preferable that the first stirring member (stirring member 51A) and the second stirring member (stirring member 51B) are positioned at an interval between them that is greater than or equal to the diameter D of the main flow path 2 and less than or equal to three times the diameter D of the main flow path 2.

[0064] (4) In the mixing apparatus 1 described in any one of (1) to (3), it is preferable that the center line CL11 of the first pair of protrusions (stirring protrusions 516a, 516b of the stirring member 51A) is parallel to the direction in which the auxiliary fluid flows into the main flow path 2 (up and down direction in Figure 6) in a cross-sectional view (see Figure 6).

[0065] (5) In the mixing apparatus 1 described in any one of (1) to (4), the opening area of ​​the opening 517 of the first stirring member (stirring member 51A) and the second stirring member (stirring member 51B) for flowing the main fluid (pure water) and the secondary fluid (chemical solution) is equal to the flow area of ​​the main flow path 2 ((D / 2) 2 It is preferable that the value of ×π) be between 30% and 70%.

[0066] (6) In the mixing apparatus 1 described in any one of (1) to (5), it is preferable that each of the first pair of protrusions (stirring protrusions 516a, 516b of the stirring member 51A) has a length dimension L11 in the radial direction of the main flow path 2 that is 25% or more and 45% or less of the diameter D of the main flow path 2, and a width dimension W11 in the direction perpendicular to the radial direction that is 20% or more and 45% or less of the diameter D of the main flow path 2, and that each of the second pair of protrusions (stirring protrusions 516a, 516b of the stirring member 51B) has a length dimension L11 in the radial direction of the main flow path 2 that is 25% or more and 45% or less of the diameter F of the main flow path 2, and a width dimension W11 in the direction perpendicular to the radial direction that is 20% or more and 45% or less of the diameter D of the main flow path 2.

[0067] (7) In the mixing apparatus 1 described in any one of (1) to (6), it is preferable that the stirring members 51A and 51B are provided with a positioning part (for example, a positioning part 513, or recesses 561a and 561b described later) that defines the angle (angle A11) in a cross-sectional view perpendicular to the axial direction of the main flow path 2 between the center line CL11 of the first pair of protrusions (stirring protrusions 516a and 516b of the stirring member 51A) and the center line CL12 of the second pair of protrusions (stirring protrusions 516a and 516b of the stirring member 51B).

[0068] (8) In the mixing apparatus 1 described in any one of (1) to (7), it is preferable that the stirring members 51A and 51B are provided with markings (for example, markings 513a or notches 541) that allow the direction of the centerline CL11 of the first pair of protrusions (stirring protrusions 516a and 516b of the stirring member 51A) and the direction of the centerline CL12 of the second pair of protrusions (stirring protrusions 516a and 516b of the stirring member 51B) to be confirmed from outside the stirring members 51A and 51B.

[0069] According to the above-described mixing device 1, it is possible to prevent a decrease in the Cv value and reduce the installation space, while also being able to thoroughly mix the main fluid and the secondary fluid.

[0070] The above embodiments are merely illustrative and do not limit the present invention in any way. Therefore, the present invention can naturally be improved and modified in various ways without departing from its essence. For example, the mixing device 1 according to this embodiment uses two stirring members 51A and 51B, but the number is not limited to this, and there may be three or more, as long as the installation space of the mixing device 1 allows.

[0071] Furthermore, the stirring member 51 in the stirring unit 5 has both the function of stirring and mixing pure water and chemical solution and the function of a gasket. However, as shown in the stirring unit 500 in Figure 10, the member that has the function of stirring and mixing (stirring members 56A, 56B) and the member that has the function of a gasket (gasket 55A, 55B) may be separate members. Figure 10 is an exploded view of the stirring unit according to a modified example.

[0072] The stirring section 500 mainly consists of a second connecting pipe 90, gaskets 55A and 55B, stirring members 56A and 56B, and a socket 57. The second connecting pipe 90 is a straight pipe similar to the second connecting pipe 9 described above.

[0073] Gaskets 55A and 55B have engaging portions 551 on the inner circumferential surface of the opening that can engage with the socket 57, but do not have stirring protrusions 516a and 516b like the stirring member 51. The other configurations of gaskets 55A and 55B are the same as those of the stirring member 51.

[0074] Gasket 55A is located at the upstream end (upper left end in Figure 10) of the axial ends of the second connecting pipe 90 and provides a seal between the second connecting pipe 90 and the output side fitting 424 of the manifold valve 4. Gasket 55B is located at the downstream end (lower right end in Figure 10) of the axial ends of the second connecting pipe 90 and provides a seal between the second connecting pipe 90 and the third connecting pipe 10.

[0075] The sockets 57A, 57B, and 57C are formed in a substantially cylindrical shape and are provided with insertion portions 571 for engaging with the gasket 55 or the stirring members 56A and 56B. More specifically, two insertion portions 571 are provided on each of the axial end faces of the sockets 57A, 57B, and 57C, projecting outward in the axial direction, and these two insertion portions 571 are positioned at a 180-degree interval in the circumferential direction of the sockets 57A, 57B, and 57C.

[0076] The stirring members 56A and 56B are formed in a substantially cylindrical shape, and stirring protrusions 516a and 516b are provided on their inner circumferential surfaces. In addition, the outer circumferential surfaces of the stirring members 56A and 56B are provided with recesses 561a and 561b (modified versions of the positioning portion 513) that can engage with the insertion portion 571 of the sockets 57A, 57B, and 57C.

[0077] The sockets 57A, 57B, 57C and stirring members 56A, 56B, configured as described above, are inserted into the second connecting pipe 90 in the order of socket 57A, stirring member 56A, socket 57B, stirring member 56B, and socket 57C from the upstream side. At this time, the insertion portion 571 of socket 57A on the stirring member 56A side is engaged with the recess 561b of stirring member 56A, and the insertion portion 571 of socket 57B on the stirring member 56A side is engaged with the recess 561b of stirring member 56A. Furthermore, the insertion portion 571 of socket 57B on the stirring member 56B side is engaged with the recess 561a of stirring member 56B, and the insertion portion 571 of socket 57C on the stirring member 56B side is engaged with the recess 561a of stirring member 56B. As described above, by engaging the insertion portion 571 with the recess 561a or recess 561b, the centerlines of the stirring protrusions 516a and 516b of the stirring member 56A and the centerlines of the stirring protrusions 516a and 516b of the stirring member 56B are positioned at a 90-degree angle.

[0078] Furthermore, by inserting the insertion portion 571 of socket 57A on the gasket 55A side into the engaging portion 551 of gasket 55A, and then inserting the insertion portion 571 of socket 57C on the gasket 55B side into the engaging portion 551 of gasket 55B, the sockets 57A, 57B, 57C and the stirring members 56A, 56B are positioned within the second connecting pipe 90.

[0079] With the stirring unit 500 configured as described above, pure water and chemical solution can be stirred and mixed in the same way as the stirring unit 5 described above.

[0080] In addition, to improve productivity in various manufacturing methods such as cutting or injection molding, the stirring member 51 has stepped portions 518 (see Figures 4 and 5) that protrude radially inward by about 1 mm around the entire circumference of the inner circumferential surface 515. However, this may be less than 1 mm, or the stepped portions 518 may not be provided at all. [Explanation of Symbols]

[0081] 1 Mixing device 2 Main channel 3A Subchannel 3B Subchannel 3C Subchannel 3D subchannel 51A Stirring member 51B Stirring member 516a, 516b Stirring protrusions (an example of a pair of protrusions)

Claims

1. It comprises a main channel for carrying the main fluid, and a secondary channel for merging a secondary fluid with the main fluid flowing through the main channel, In a mixing device, the main channel is provided with a stirring member downstream of the sub-channel for stirring the main fluid and the sub-fluid, The stirring members consist of a first stirring member and a second stirring member, arranged in order from the upstream side. The first stirring member comprises a first pair of protrusions projecting toward the radially inward direction of the main flow path, The second stirring member comprises a second pair of protrusions that are projected opposite each other toward the radially inward direction of the main flow path. The centerlines of the first pair of protrusions and the centerlines of the second pair of protrusions are positioned at an angle in a cross-sectional view perpendicular to the axial direction of the main flow path. A mixing apparatus characterized by the following.

2. In the mixing apparatus according to claim 1, The centerlines of the first pair of protrusions and the centerlines of the second pair of protrusions are positioned at an angle of 90 degrees ± 20 degrees in a cross-sectional view perpendicular to the axial direction of the main flow path. A mixing apparatus characterized by the following.

3. In the mixing apparatus according to claim 1 or 2, The first stirring member and the second stirring member are positioned at a distance from each other that is greater than or equal to the diameter of the main flow path and less than or equal to three times the diameter of the main flow path. A mixing apparatus characterized by the following.

4. In the mixing apparatus according to claim 1 or 2, The centerlines of the first pair of protrusions are parallel to the direction in which the secondary fluid flows into the main flow channel in the cross-sectional view. A mixing apparatus characterized by the following.

5. In the mixing apparatus according to claim 1 or 2, The opening area of ​​the openings for the main fluid and the secondary fluid of the first stirring member and the second stirring member shall be 30% or more and 70% or less of the flow area of ​​the main flow path. A mixing apparatus characterized by the following.

6. In the mixing apparatus according to claim 1 or 2, Each of the first pair of protrusions is, The radial length dimension of the main channel is 25% or more and 45% or less of the diameter of the main channel. The width dimension in the direction perpendicular to the radial direction is 20% or more and 45% or less of the diameter of the main flow path. Each of the second pair of protrusions is, The radial length dimension of the main channel is 25% or more and 45% or less of the diameter of the main channel. The width dimension in the direction perpendicular to the radial direction is 20% or more and 45% or less of the diameter of the main flow path. A mixing apparatus characterized by the following.

7. In the mixing apparatus according to claim 1 or 2, The stirring member includes a positioning portion that defines the angle between the centerlines of the first pair of protrusions and the centerlines of the second pair of protrusions in a cross-sectional view perpendicular to the axial direction of the main flow path. A mixing apparatus characterized by the following.

8. In the mixing apparatus according to claim 1 or 2, The stirring member is provided with markings that allow the direction of the centerlines of the first pair of protrusions and the direction of the centerlines of the second pair of protrusions to be confirmed from outside the stirring member. A mixing apparatus characterized by the following.

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