Pressure reducing valve

Abstract

The present invention provides a pressure reducing valve that allows for relatively easy modification of the secondary pressure. [Solution] The pressure reducing valve 1 comprises a pressure reducing valve body 11 having a primary side opening 111d, a secondary side opening 111e, and gas passages GC1 and GC2; a valve seat member 24 formed continuously and integrally with the pressure reducing valve body 11, provided with a nozzle 24a that penetrates from the primary side opening 111d to the secondary side opening 111e and a valve seat 24b with one end of the nozzle 24a open; a valve body 21 arranged in the gas passage GC2 so as to be able to move toward and away from the valve seat 24b; a first biasing member 31 that biases the valve body 21 in a direction that moves it away from the valve seat 24b; a second biasing member 32 that biases the valve body 21 in a direction that moves it toward the valve seat 24b, thereby offsetting a portion of the biasing force by the first biasing member 31; and a biasing force adjusting member 22 for adjusting the biasing force of the second biasing member 32.

Description

Technical Field

[0001] The present invention relates to a pressure reducing valve.

Background Art

[0002] A pressure reducing valve has been proposed that includes a body having a gas flow path communicating with a primary port and a secondary port, a valve seat disposed in the gas flow path, a valve body disposed on the downstream side of the valve seat in the gas flow path and approaching and separating from the valve seat, and a biasing member that biases the valve body in a direction away from the valve seat, and maintains the secondary pressure of the secondary port at a preset pressure lower than the primary pressure of the primary port (see, for example, Patent Document 1). Here, the position of the valve body is determined according to the pressure difference between the primary pressure and the secondary pressure and the biasing force of the biasing member, and the opening degree of the valve body changes according to the position of the valve body, thereby adjusting the secondary pressure.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in the pressure reducing valve as described in Patent Document 1, there are cases where it is required to change the pressure on the secondary side by changing the biasing force of the biasing member. In this case, in the pressure reducing valve described in Patent Document 1, it is necessary to replace the biasing member itself with one having a large biasing force, or to change the length of the biasing member during compression by interposing a spacer between the biasing member and the body or the valve body because the biasing force of the biasing member is determined by the length of the biasing member during compression. In this case, since it is necessary to disassemble the pressure reducing valve to replace the biasing member or newly incorporate a spacer, there is a risk that it will take a long time to adjust the pressure on the secondary side. Alternatively, there is also a risk that it may be necessary to provide another pressure reducing valve on the downstream side of the pressure reducing valve to enable pressure adjustment.

[0005] This invention has been made in view of the above reasons, and aims to provide a pressure reducing valve that allows for relatively easy modification of the secondary pressure. [Means for solving the problem]

[0006] To achieve the above objective, the pressure reducing valve according to the present invention is A pressure reducing valve body having a primary opening, a secondary opening, and a flow path communicating from the primary opening to the secondary opening, A nozzle is provided which is arranged to block a portion of the flow path and penetrates from the primary side opening to the secondary side opening, and a valve seat is provided which has an opening at one end of the nozzle, and a valve seat member is formed in a continuous and integral manner with the pressure reducing valve body, or is a separate valve seat member from the pressure reducing valve body. A valve body is arranged in the flow path such that at least a portion of the valve seat is able to move toward and away from the portion of the valve seat into which the nozzle opens, on the primary side opening side or the secondary side opening side of the valve seat, A first biasing member that biases the valve body in a direction that separates it from the valve seat, A second biasing member that biases the valve body toward the valve seat, thereby offsetting a portion of the biasing force of the first biasing member, The system includes a biasing force adjustment mechanism for adjusting the biasing force of the first biasing member or the second biasing member. [Effects of the Invention]

[0007] According to the present invention, by adjusting the biasing force of the first biasing member or the second biasing member with the biasing force adjustment mechanism, the force applied to the valve body in the direction that moves the valve body away from the valve seat can be adjusted, thus making it relatively easy to change the secondary pressure of the pressure reducing valve. [Brief explanation of the drawing]

[0008] [Figure 1] This is a cross-sectional view of a pressure reducing valve according to Embodiment 1 of the present invention. [Figure 2] This is a cross-sectional view of the pressure reducing valve according to Embodiment 1. [Figure 3] This is a cross-sectional view of a pressure reducing valve according to Embodiment 2 of the present invention. [Figure 4] This is an explanatory diagram of the operation of the pressure reducing valve according to Embodiment 2. [Figure 5] This is a cross-sectional view of a pressure reducing valve according to Embodiment 3 of the present invention. [Figure 6] This is a cross-sectional view of a pressure reducing valve according to Embodiment 4 of the present invention. [Figure 7] This is a cross-sectional view of a pressure reducing valve according to Embodiment 4. [Figure 8] This is a cross-sectional view of a pressure reducing valve according to Embodiment 4. [Figure 9] This is a cross-sectional view of a pressure reducing valve according to Embodiment 5 of the present invention. [Figure 10] This is an explanatory diagram of the operation of the pressure reducing valve according to Embodiment 5. [Figure 11] This is a cross-sectional view of a pressure reducing valve according to Embodiment 6 of the present invention. [Figure 12] This is a cross-sectional view of a pressure reducing valve according to Embodiment 7 of the present invention. [Figure 13] This is a cross-sectional view of a pressure reducing valve according to Embodiment 8 of the present invention. [Figure 14] This is an explanatory diagram of the operation of a pressure reducing valve according to Embodiment 9 of the present invention. [Figure 15] This is a cross-sectional view of a pressure reducing valve according to Embodiment 10 of the present invention. [Figure 16] This shows a pressure reducing valve according to Embodiment 11 of the present invention, where (A) is a cross-sectional view showing the transmission member in a raised state and (B) is a cross-sectional view showing the transmission member in a lowered state. [Figure 17] This is a cross-sectional view of a pressure reducing valve according to Embodiment 12 of the present invention. [Figure 18] This shows a pressure reducing valve according to Embodiment 13 of the present invention, where (A) is a cross-sectional view showing the transmission member in an elevated state and (B) is a cross-sectional view showing the transmission member in a lowered state. [Figure 19] This diagram shows a pressure reducing valve according to Embodiment 14 of the present invention, where (A) is a cross-sectional view showing the transmission member in an elevated state and (B) is a cross-sectional view showing the transmission member in a lowered state. [Figure 20] This is a schematic configuration diagram of a remote control system according to Embodiment 15 of the present invention.

Embodiments for Carrying Out the Invention

[0009] (Embodiment 1) Hereinafter, a pressure reducing valve according to an embodiment of the present invention will be described with reference to the drawings. The pressure reducing valve according to the present embodiment includes a pressure reducing valve body, a valve seat member, a valve body, a first biasing member, a second biasing member, and a biasing force adjusting mechanism. The pressure reducing valve body is formed with a primary side opening, a secondary side opening, and a flow path communicating from the primary side opening to the secondary side opening. The valve seat member is disposed so as to block a part of the gas flow path, and is provided with a nozzle penetrating from the primary side opening side to the secondary side opening side and a valve seat having an end of the nozzle opened, and is continuous and integral with the pressure reducing valve body or is a separate body from the pressure reducing valve body. The valve body is disposed so as to be able to contact and separate from the valve seat on the secondary side opening side of the valve seat member in the gas flow path. The first biasing member biases the valve body in a direction away from the valve seat. The second biasing member biases the valve body in a direction approaching the valve seat, thereby canceling a part of the biasing force by the first biasing member. The biasing force adjusting mechanism adjusts the biasing force of the second biasing member.

[0010] As shown in Figures 1 and 2, the pressure reducing valve 1 according to this embodiment comprises a pressure reducing valve body 11, a valve seat member 24 formed integrally with the pressure reducing valve body 11, a valve element 21, a guide member 23, a first biasing member 31, a second biasing member 32, an on-off valve 5, and a pressure sensor 4. The pressure reducing valve body 11 has a main body portion 111, a cover 112, and a screw 113 for fixing the cover 112 to the +Z direction side of the main body portion 111. The main body portion 111 has a primary side opening 111d that opens to the -Z direction side, and gas flow paths GC1 and GC2. Furthermore, inside the main body 111, there is a cavity 111a with a circular cross-section that extends in the Z-axis direction from the +Z-side end of the main body 111 on the +Z-direction side of the gas flow path GC2, a cavity 111h with a smaller diameter cross-section than cavity 111a and communicating with cavity 111a on the +Z-direction side, and a cavity 111b with a smaller diameter cross-section than cavity 111h, communicating with cavity 111h on the +Z-direction side and communicating with the gas flow path GC2 on the -Z-direction side. In addition, the main body 111 has a cavity 111f with a circular cross-section that extends in the Y-axis direction from the -Y-side end of the main body 111 on the -Y-direction side of the gas flow path GC2, and a cavity 111j with a smaller diameter cross-section than cavity 111f, communicating with cavity 111f on the -Y-direction side and communicating with the gas flow path GC2 on the +Y-direction side. Furthermore, a secondary opening 111e opening to the -X direction is formed near the tip of cavity 111f on the +Y direction side. Also, a female screw portion 111g for fixing the valve body retaining portion 514 (described later) is formed near the -Y direction end on the inside of cavity 111f. Furthermore, a valve seat 111k is formed between cavities 111f and 111j, which decreases in diameter towards the +Y direction, allowing the tip of the valve body 512 (described later) to move toward and away from it. Furthermore, a recess 111n for fixing the pressure sensor 4 and a gas flow path GC4 communicating with the gas flow path GC2 are formed on the +Y direction side of the main body portion 111. Also, a female screw portion 111p is formed at the +Y direction end of the recess 111n, which screws into the male screw portion 42b of the sensor fixing portion 42 (described later) of the pressure sensor 4.

[0011] The lid 112 is cylindrical in shape and has an outer diameter approximately equal to the inner diameter of the cavity 111a of the main body 111, with a projection 1121 that protrudes in the -Z direction. An annular sealing member 1122 is fitted into the side wall of the projection 1121. A recess 112a is formed on the -Z side of the lid 112, opening towards the -Z side of the projection 1121, and a screw hole 112b is formed at the bottom of the recess 112a. The lid 112 is fixed to the main body 111 by a screw 113 with the projection 1121 fitted into the +Z end of the cavity 111a. Here, the space between the side wall of the projection 1121 of the lid 112 and the inner wall of the +Z end of the cavity 111a of the main body 111 is sealed by the sealing member 1122.

[0012] The on / off valve 5 comprises a valve body 512 and a valve body holder 514 that movably holds the valve body 512 relative to the main body 111. The valve body holder 514 has a cylindrical holder body 5141, with a male threaded portion 514a formed on its outer wall that screws into the female threaded portion 111g of the cavity 111f, and a female threaded portion (not shown) formed on its inner wall that screws into the male threaded portion 512b of the valve body 512 (described later), and an outer flange portion 5142 that protrudes outward from the -Y direction end of the holder body 5141 in a direction perpendicular to the Y axis direction. The valve body holder 514 is screwed to the main body 111 with the +Y direction side of the outer flange portion 5142 in contact with the -Y direction end of the cavity 111f of the main body 111. The valve body 512 is cylindrical, with a cone portion 512c formed at its tip that decreases in diameter towards the +Y direction. A groove 512a is formed in the portion facing the cavity 111f of the main body 111 on the -Y direction side, rather than the cone portion 512c in the Y direction, surrounding the central axis along the Y direction. An annular sealing member 122 is fitted into the groove 512a. An operating portion 52 is continuously and integrally provided at the -Y direction end of the valve body 512, and a male threaded portion 512b is formed in the portion facing the valve body holding portion 514 near the -Y direction end, which screws into the female threaded portion of the valve body holding portion 514. The valve body 512 moves along the Y direction as the operating portion 52 rotates around the central axis along the Y direction. Then, when the valve body 512 moves in the +Y direction and the side wall of the cone portion 512c of the valve body 512 comes into contact with the valve seat 111k of the main body 111, the gas flow path GC2 and the secondary opening 111e are blocked, resulting in a closed state. On the other hand, when the valve body 512 moves in the -Y direction and the side wall of the cone portion 512c of the valve body 512 separates from the valve seat 111k of the main body 111, the gas flow path GC2 and the secondary opening 111e are connected, resulting in an open state.

[0013] The pressure sensor 4 comprises a sensor body 41 and a sensor fixing part 42 for fixing the sensor body 41 to the main body 111, and measures the pressure of the gas filled in the gas flow path GC2. The sensor fixing part 42 is cylindrical and has a male screw part 42b formed on its outer wall that screws into a female screw part 111p formed on the inner wall of a recess 111n of the main body 111. The pressure sensor 4 is fixed to the main body 111 with the male screw part 42b screwed into the female screw part 111p.

[0014] The valve seat member 24 is positioned to close the portion between the gas passages GC1 and GC2, and is provided with a nozzle 24a that penetrates from the primary opening 111d to the secondary opening 111e, and a valve seat 24b into which one end of the nozzle 24a is open. The valve seat 24b protrudes in the +Z direction on the gas passage GC2 side of the valve seat member 24, and the +Z direction end of the nozzle 24a is open at its tip.

[0015] The guide member 23 has a long cylindrical shape, a guide member body 231a whose outer diameter is approximately the same as the inner diameter of the cavity 111b of the main body 111, and an outer flange portion 231b that protrudes radially from approximately the center of the guide member body 231a in the longitudinal direction, and guides the valve body 21 inserted inside to move along the Z-axis direction. Furthermore, an annular seal member 232 is fitted into a groove 231c formed on the -Z direction side of the outer flange portion 231b in the longitudinal direction of the guide member 23. The guide member 23 is positioned such that the portion of the guide member 23 on the -Z direction side of the outer flange portion 231b in the longitudinal direction is fitted into the cavity 111b of the main body 111, and the -Z direction side of the outer flange portion 231b is in contact with the stepped portion 111c formed between the cavities 111h and 111b of the main body 111. Here, the space between the outer wall of the guide member 23 and the inner wall of the cavity 111b is sealed by the sealing member 232.

[0016] The valve body 21 is a long, bottomed cylindrical shape and has a valve body main body 211a positioned within the cavities 111a, 111h, and 111b with its cylindrical axis aligned along the Z-axis direction and its bottom portion 211e facing the -Z direction, and an outer flange portion 211b extending from the +Z-direction end of the valve body main body 211a in a direction perpendicular to the Z-axis direction. The valve body 21 is positioned so that the bottom portion 211e of the valve body main body 211a can move toward and away from the valve seat 24b of the valve seat member 24 within the gas flow path GC2 of the main body portion 111 on the secondary opening 111e side of the valve seat member 24. The -Z-direction end of the valve body main body 211a is inserted inside the guide member main body 231a of the guide member 23 and is guided by the guide member 23 to move in the Z-axis direction. An annular recess 211c is formed on the -Z side of the outer flange portion 211b, surrounding the valve body 211a. A circular recess 211d is formed on the +Z side of the outer flange portion 211b in plan view. Furthermore, a groove 211g is formed near the -Z end of the valve body 211a, surrounding the central axis along the Z-axis direction of the valve body 211a, and an annular sealing member 213 is fitted inside this groove 211g. Additionally, a groove 211f is formed on the side wall of the outer flange portion 211b, surrounding the central axis along the Z-axis direction of the valve body 211a, and an annular sealing member 212 is fitted inside this groove 211f. As a result, the space between the outer wall of the valve body 211a and the inner wall of the guide member 23 is sealed by the sealing member 213, and the space between the side wall of the outer flange portion 211b and the inner wall of the cavity 111a is sealed by the sealing member 212.

[0017] The first biasing member 31 is, for example, a coil spring, which is compressed to a length shorter than its natural length, with one end in contact with the pressure reducing valve body 11 via the guide member 23 and the other end in contact with the valve body 21, thereby biasing the valve body 21 in a direction that separates it from the valve seat member 24. More specifically, the first biasing member 31 is positioned with one end on its -Z side in contact with the outer flange portion 231b of the guide member 23 and the other end fitted inside the recess 211c of the valve body 21.

[0018] The second biasing member 32 is, for example, a coil spring, which is compressed to a length shorter than its natural length, and one end abuts against the valve body 21, biasing the valve body 21 toward the valve seat member 24, thereby offsetting a portion of the biasing force of the first biasing member 31. More specifically, the second biasing member 32 is positioned such that one end on the -Z direction side is fitted inside the recess 211d of the valve body 21, and the other end is fitted inside the recess 112a of the cover 112 of the pressure reducing valve body 11.

[0019] The biasing force adjustment member 22 has a main portion 221a with a circular cross-section and an annular sealing member 222 fitted into its side wall, and a male threaded portion 221b that protrudes from the +Z direction side of the main portion 221a in the +Z direction and has a screw formed on its side wall. The main portion 221a is positioned inside the recess 112a of the cover 112, and the male threaded portion 221b is fixed to the cover 112 with the screwed portion 221b screwed into the screw hole 112b of the cover 112. The +Z direction end of the second biasing member 32 abuts against the -Z direction side of the main portion 221a. In other words, this biasing force adjustment member 22 is provided on the pressure reducing valve body 11 so as to be movable relative to the pressure reducing valve body 11 by rotating the male threaded portion 221b relative to the pressure reducing valve body 11. Furthermore, by changing the relative position of the biasing force adjustment member 22 with respect to the pressure reducing valve body 11, the length of the compressed second biasing member 32 can be changed, thereby adjusting the biasing force of the second biasing member 32.

[0020] Here, the operation of the pressure reducing valve 1 according to this embodiment will be described. In the pressure reducing valve 1 according to this embodiment, as shown in Figure 2, the valve body 21 receives a biasing force F1 from the first biasing member 31 and a biasing force F2 from the second biasing member 32 that is in the opposite direction to the biasing force F1. As a result, a portion of the biasing force F1 from the first biasing member 31 is offset by the biasing force F2 from the second biasing member 32. The balance equation for the pressure reducing valve 1 according to this embodiment is expressed by the following equation (1).

[0021]

number

[0022] Here, P1 is the primary pressure, i.e., the pressure on the gas flow path GC1 side, and P2 is the secondary pressure, i.e., the pressure on the gas flow path GC2 side. S1 is the pressure-receiving area of ​​the valve body 21 that receives the primary pressure, i.e., the cross-sectional area perpendicular to the Z-axis direction, which is the direction of movement of the valve body 21. This pressure-receiving area corresponds to the sum of the area in which the valve body 21 and the valve seat member 24 can come into contact and the area of ​​the opening portion of the nozzle 24a of the valve seat member 24. Furthermore, S2 is the pressure-receiving area of ​​the portion where the area of ​​the cross-section perpendicular to the direction of movement of the valve body 21, i.e., the Z-axis direction, is maximum, F1 is the biasing force by the first biasing member 31, and F2 is the biasing force by the second biasing member 32.

[0023] From the relationship expressed in equation (1), it can be seen that by increasing the biasing force F2 provided by the second biasing member 32, the secondary pressure P2 can be reduced accordingly.

[0024] As described above, with the pressure reducing valve 1 according to this embodiment, the biasing force of the second biasing member 32 can be adjusted by adjusting the biasing force of the second biasing member 32 with the biasing force adjustment member 22, thereby adjusting the force applied to the valve body 21 in the direction that causes the valve body 21 to move away from the valve seat member 24. This makes it possible to change the secondary pressure of the pressure reducing valve 1 relatively easily.

[0025] (Embodiment 2) The pressure reducing valve according to this embodiment differs from Embodiment 1 in that it includes a magnetic member formed from a magnetic material and in contact with the aforementioned biasing force adjusting member, and a magnetic member driving unit that changes the relative position of the biasing force adjusting member with respect to the pressure reducing valve body by moving the magnetic member toward or toward the valve body.

[0026] As shown in Figure 3, the pressure reducing valve 2001 according to this embodiment comprises a pressure reducing valve body 2011, a valve seat member 24, a valve element 21, a guide member 23, a first biasing member 31, a second biasing member 32, a biasing force adjustment member 2222, and a solenoid actuator 2221. In Figure 3, components similar to those in Embodiment 1 are denoted by the same reference numerals as in Figure 2. The pressure reducing valve body 2011 comprises a main body portion 111, a cover 2112, and a screw 113 for fixing the cover 2112 to the +Z direction side of the main body portion 111. The main body portion 111 has a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2, as described in Embodiment 1. The lid 2112 is cylindrical in shape and has a projection 21121 that protrudes in the -Z direction, with an outer diameter approximately equal to the inner diameter of the cavity 111a of the main body 111. An annular sealing member 1122 is fitted into the side wall of the projection 21121. A through hole 2112a is formed on the -Z direction side of the lid 2112, extending from the -Z direction side of the projection 21121 to the +Z direction side of the lid 2112. An inner flange 21121a is provided at the -Z direction end of the through hole 2112a, protruding inward from its entire circumferential direction.

[0027] The second biasing member 32 is positioned such that one end on the -Z direction side is fitted inside the recess 211d of the valve body 21, and the other end is fitted inside the through hole 2112a of the cover 2112 of the pressure reducing valve body 2011.

[0028] The biasing force adjustment member 2222 has a circular cross-section, and a groove 2222a is formed on its side wall so as to surround the central axis along the Z-axis direction of the biasing force adjustment member 2222, with an annular sealing member 222 fitted inside the groove 2222a. The biasing force adjustment member 2222 is positioned inside the through hole 2112a of the lid 2112. Here, the outer diameter of the biasing force adjustment member 2222 is larger than the inner diameter of the inner flange portion 21121a of the lid 2112, and the inner flange portion 21121a prevents it from entering the cavity 111a of the main body portion 111.

[0029] The solenoid actuator 2221 is a biasing force adjustment member drive unit comprising a magnetic member 22213 formed from a magnetic material in the shape of a long cylinder with its -Z end contacting the +Z side of the biasing force adjustment member 2222, and a magnetic member drive unit 22214 having a bottomed cylindrical housing 22211 into which the magnetic member 22213 is inserted, and a solenoid coil 22212 embedded in the side wall of the housing 22211. The magnetic member drive unit 22214 moves the magnetic member 22213 toward the valve body 21 by supplying current to the solenoid coil 22212. On the other hand, the magnetic member drive unit 22214 moves the magnetic member 22213 toward the valve body 21 by interrupting the supply of current to the solenoid coil 22212 and utilizing the restoring force of the second biasing member 32. In this way, the magnetic member drive unit 22214 changes the relative position of the biasing force adjustment member 2222 with respect to the pressure reducing valve body 2011.

[0030] In the case of the pressure reducing valve 2001 according to this embodiment, for example, as shown in Figure 4, the solenoid actuator 2221 repeatedly switches between a state in which it supplies current to the solenoid coil 22212 (on state) and a state in which it stops supplying current to the solenoid coil 22212 (off state) over time. In this case, the secondary pressure Ps intermittently changes to pressure Ps0 or pressure Ps1 depending on whether it switches to the on state or the off state.

[0031] As described above, according to the pressure reducing valve 2001 of this embodiment, the position of the biasing force adjustment member 2222 can be changed by the solenoid actuator 2221. Therefore, for example, by remotely controlling the solenoid actuator 2221, the secondary pressure of the pressure reducing valve 2001 can be adjusted remotely.

[0032] (Embodiment 3) The pressure reducing valve according to this embodiment differs from Embodiment 1 in that it includes a biasing force adjustment member drive unit which comprises a cylinder having a gas reservoir located on the opposite side of the biasing force adjustment member from the second biasing member side and forming a region filled with gas together with the biasing force adjustment member, and a gas supply unit that changes the relative position of the biasing force adjustment member with respect to the pressure reducing valve body by supplying gas to the gas reservoir and thereby changing the pressure of the gas stored in the gas reservoir.

[0033] As shown in Figure 5, the pressure reducing valve 3001 according to this embodiment comprises a pressure reducing valve body 3011, a valve seat member 24, a valve body 21, a guide member 23, a first biasing member 31, a second biasing member 32, a biasing force adjusting member 3222, and a gas actuator 3224. In Figure 5, components similar to those in Embodiment 1 are denoted by the same reference numerals as in Figure 2. The pressure reducing valve body 3011 comprises a main body portion 111, a cover 3112, and a screw 113 for fixing the cover 3112 to the +Z direction side of the main body portion 111. The main body portion 111 has a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2, as described in Embodiment 1. The lid 3112 is cylindrical in shape and has a projection 31121 that protrudes in the -Z direction, with an outer diameter approximately equal to the inner diameter of the cavity 111a of the main body 111. An annular sealing member 1122 is fitted into the side wall of the projection 31121. A through hole 3112a is formed on the -Z direction side of the lid 3112, which communicates with the inside of the recess 3221c of the cylinder 3221, described later, from the -Z direction side of the projection 31121. An annular stopper 3114 is embedded near the -Z direction end of the inner wall of the through hole 3112a so as to protrude inward from its entire circumferential direction.

[0034] The second biasing member 32 is positioned such that one end on the -Z direction side is fitted inside the recess 211d of the valve body 21, and the other end is fitted inside the through hole 3112a of the cover 3112 of the pressure reducing valve body 3011.

[0035] The biasing force adjustment member 3222 has a circular cross-section, and a groove 3222a is formed on its side wall so as to surround the central axis along the Z-axis direction of the biasing force adjustment member 3222. An annular sealing member 222 is fitted inside the groove 3222a and is positioned inside the through hole 3112a of the lid 3112. Here, the outer diameter of the biasing force adjustment member 3222 is larger than the inner diameter of the stopper 3114 embedded in the lid 3112, and the stopper 3114 prevents it from entering the cavity 111a of the main body 111.

[0036] The gas actuator 3224 includes a cylinder 3221 with a gas storage section 3221a formed inside for storing gas, and a gas supply section 3223 for supplying gas to the gas storage section 3221a. The cylinder 3221 has a recess 3221c on the -Z side with a circular cross-section perpendicular to the Z-axis direction, and a gas storage section 3221a is formed at the bottom of the recess 3221c with a circular cross-section perpendicular to the Z-axis direction and smaller than the inner diameter of the recess 3221c. The outer circumference of the recess 3221c on the +Z side of the cylinder 3221 is continuous with the outer circumference of the through hole 3112a of the lid 3112. This gas storage section 3221a is located on the +Z side of the biasing force adjustment member 3222 and forms a region filled with gas together with the biasing force adjustment member 3222. A gas introduction passage 3221b is provided through the side wall of the cylinder 3221 to introduce gas into the gas storage section 3221a. Here, the inner diameter of the gas storage section 3221a is smaller than the outer diameter of the biasing force adjustment member 3222, restricting the biasing force adjustment member 3222 from entering the gas storage section 3221a. The gas supply section 3223 includes a gas supply source 3223a, a supply pipe L30 connecting the gas supply source 3223a and the gas introduction passage 3221b, and an on / off valve 3223b inserted in the supply pipe L30. By changing the pressure of the gas stored in the gas storage section 3221a, the relative position of the biasing force adjustment member 3222 with respect to the pressure reducing valve body 3011 is changed.

[0037] In the pressure reducing valve 3001 according to this embodiment, when the supply of gas from the gas supply unit 3223 to the gas storage unit 3221a is stopped, and the atmospheric pressure in the gas storage unit 3221a is zero or less than or equal to the biasing force of the second biasing member 32, the biasing force of the second biasing member 32 causes the biasing force adjustment member 3222 to move in the +Z direction and come into contact with the stepped portion between the gas storage unit 3221a and the recess 3221c. The gas actuator 3224 then changes the position of the biasing force adjustment member 3222 by supplying gas from the gas supply unit to the gas storage unit 3221a, thereby changing the pressure of the gas stored in the gas storage unit 3221a. In this way, the biasing force of the second biasing member 32 is adjusted by changing the length of the compressed second biasing member 32.

[0038] As described above, with the pressure reducing valve 3001 according to this embodiment, the position of the biasing force adjustment member 3222 can be changed by the gas actuator 3224. For example, by remotely controlling the gas actuator 3224, the secondary pressure of the pressure reducing valve 3001 can be adjusted remotely.

[0039] (Embodiment 4) The pressure reducing valve according to this embodiment differs from Embodiment 3 in that the gas supply unit supplies the gas flowing out from the secondary opening of the pressure reducing valve body 3011 to the gas storage unit of the cylinder.

[0040] As shown in Figure 6, the pressure reducing valve 4001 according to this embodiment comprises a pressure reducing valve body 4011, a valve seat member 24, a valve body 21, a guide member 23, a first biasing member 31, a second biasing member 32, a biasing force adjusting member 4222, and a gas actuator 4224. In Figure 6, components similar to those in Embodiment 1 are denoted by the same reference numerals as in Figure 2. The pressure reducing valve body 4011 comprises a main body portion 111, a cover 4112, and a screw 113 for fixing the cover 4112 to the +Z direction side of the main body portion 111. As described in Embodiment 1, the main body portion 111 has a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2. The lid 4112 is cylindrical in shape and has a projection 41121 that protrudes in the -Z direction, with an outer diameter approximately equal to the inner diameter of the cavity 111a of the main body 111. An annular sealing member 1122 is fitted into the side wall of the projection 41121. The lid 4112 also has a through hole 4112a that communicates from the projection 41121 to the inside of the gas storage portion 4221a of the cylinder 4221, which will be described later.

[0041] The second biasing member 32 is positioned such that one end on the -Z direction side is fitted inside the recess 211d of the valve body 21, and the other end is fitted inside the through hole 4112a of the cover 4112 of the pressure reducing valve body 4011.

[0042] The biasing force adjustment member 4222 has a cylindrical first portion 42221 and a disc-shaped second portion 42222 which is continuous with the first portion 42221 on the +Z direction side and has a larger outer diameter in the cross-section perpendicular to the Z-axis direction than the first portion 42221. A groove 42221a is formed on the side wall of the first portion 42221 so as to surround the central axis of the biasing force adjustment member 4222 along the Z-axis direction, and an annular sealing member 222 is fitted inside the groove 42221a. The first portion 42221 is positioned inside the through hole 4112a of the cover 4112. Similarly, a groove 42222a is formed on the side wall of the second portion 42222 so as to surround the central axis of the biasing force adjustment member 4222 along the Z-axis direction, and an annular sealing member 42223 is fitted inside the groove 42222a. The second part 42222 is positioned inside the cylinder 4221, which will be described later. Here, the outer diameter of the second part 42222 is larger than the inner diameter of the through hole 4112a of the lid 4112, which prevents the first part 42221 of the biasing force adjustment member 4222 from entering the cavity 111a of the main body 111.

[0043] The gas actuator 4224 includes a cylinder 4221 with a gas storage section 4221a formed inside for storing gas, and a gas supply section 4223 for supplying gas to the gas storage section 4221a. The cylinder 4221 has a bottomed cylindrical cylinder body 42211 and an outer flange 42212 that protrudes outward from the -Z side end of the cylinder body 42211, with the inside of the cylinder body 42211 forming the gas storage section 4221a. The cylinder 4221 is fastened together with the cover 4112 to the +Z side of the main body 111 by screws 113, with the -Z side of the outer flange 42212 in close contact with the +Z side of the cover 4112. Furthermore, a gas introduction passage 4221b is provided through the bottom wall of the cylinder body 42211, penetrating the side wall and introducing gas into the inside of the gas storage section 4221a. The gas supply section 4223 includes a supply pipe L31 connecting the secondary opening of the pressure reducing valve body 4011 to the gas introduction passage 4221b, an on / off valve 4223a interposed in the supply pipe L31, and an on / off valve 4223b interposed in the exhaust pipe L32 connected between the on / off valve 4223a in the supply pipe L31 and the cylinder 4221. By opening and closing the on / off valves 4223a and 4223b, the pressure of the gas stored in the gas storage section 4221a is changed.

[0044] Here, the operation of the pressure reducing valve 4001 according to this embodiment will be described. When the on / off valve 4223a is in the open state and the on / off valve 4223b is in the closed state, as shown in Figure 7, gas is supplied from the secondary side opening to the gas storage section 4221a of the cylinder 4221 via the supply pipe L31. In this case, the secondary side pressure P2 is applied to both the +Z direction side and the -Z direction side of the biasing force adjustment member 4222. As a result, the pressure receiving area on the +Z direction side of the biasing force adjustment member 4222 becomes larger than the pressure receiving area on the -Z direction side of the biasing force adjustment member 4222, so the biasing force adjustment member 4222 moves to the -Z direction side. Here, if the pressure receiving area on the through hole 4112a side of the biasing force adjustment member 4222 is Sc, the pressure receiving area on the gas storage section 4221a side of the biasing force adjustment member 4222 is Sd, and the biasing force of the second biasing member 32 is F2, then the following relationship equation (2) holds.

[0045] P2×Sc+F2 <P2×Sd ...Equation (2)

[0046] In this case, the biasing force adjustment member 4222 moves in the -Z direction, and a biasing force F2 is generated from the second biasing member 32 that cancels out a portion of the biasing force F1 applied to the valve body 21 from the first biasing member 31. At this time, the relationship equation (1) described in Embodiment 1 holds true for the valve body 21.

[0047] On the other hand, when the on / off valve 4223a is closed and the on / off valve 4223b is open, as shown in Figure 8, the pressure applied to the +Z side of the biasing force adjustment member 4222 is released, and the pressure P2 in the gas storage section 4221a becomes 0. In this case, the following relationship (3) holds true.

[0048] P2 × Sc + F2 > 0 ...Equation (3)

[0049] In this case, the biasing force adjustment member 4222 moves in the +Z direction as shown by arrow AR41, and as a result, the biasing force F2 applied from the second biasing member 32 to the valve body 21 becomes 0 or a force smaller than the biasing force F2 in the case of Figure 7, and the magnitude of the pressure P2 is switched.

[0050] As described above, with the pressure reducing valve 4001 according to this embodiment, the position of the biasing force adjustment member 4222 can be changed simply by switching the open / closed state of the on / off valves 4223a and 4223b, thus eliminating the need for the gas supply source 3223a as described in Embodiment 3. Therefore, the pressure reducing valve 4001 can be made smaller.

[0051] (Embodiment 5) The pressure reducing valve according to this embodiment differs from Embodiment 1 in that it includes a biasing force adjustment member drive unit which has a cam whose circumferential surface abuts against the biasing force adjustment member, and a cam drive unit which changes the relative position of the biasing force adjustment member with respect to the pressure reducing valve body by rotating the cam to change the contact position with the biasing force adjustment member on the circumferential surface.

[0052] As shown in Figure 9, the pressure reducing valve 5001 according to this embodiment comprises a pressure reducing valve body 5011, a valve seat member 24, a valve body 21, a guide member 23, a first biasing member 31, a second biasing member 32, a biasing force adjustment member 5222, and a biasing force adjustment member drive unit 5224. In Figure 9, components similar to those in Embodiment 1 are denoted by the same reference numerals as in Figure 2. The pressure reducing valve body 5011 comprises a main body portion 111, a cover 5112, and a screw 113 for fixing the cover 5112 to the +Z direction side of the main body portion 111. As described in Embodiment 1, the main body portion 111 has a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2. The lid 5112 is cylindrical in shape and has a projection 51121 that protrudes in the -Z direction, with an outer diameter approximately equal to the inner diameter of the cavity 111a of the main body 111. An annular sealing member 1122 is fitted into the side wall of the projection 51121. The lid 5112 also has a through hole 5112a that penetrates from the -Z direction side of the projection 51121 to the +Z direction side of the lid 5112.

[0053] The second biasing member 32 is positioned such that one end on the -Z direction side is fitted inside the recess 211d of the valve body 21, and the other end is fitted inside the through hole 5112a of the cover 5112 of the pressure reducing valve body 5011.

[0054] The biasing force adjustment member 5222 has a circular cross-section, and a groove 5222b is formed on its side wall so as to surround the central axis along the Z-axis direction of the biasing force adjustment member 5222, with an annular sealing member 222 fitted inside the groove 5222b. The biasing force adjustment member 5222 is positioned inside the through hole 5112a of the cover 5112, and its +Z direction end protrudes from the cover 5112 in the +Z direction. Furthermore, the +Z direction side of the biasing force adjustment member 5222 has a dome-shaped curved surface 5222a.

[0055] The biasing force adjustment member drive unit 5224 includes a cam 5221 whose circumferential surface abuts against the biasing force adjustment member 5222, and a cam drive unit 5223 that rotates the cam 5221 around a rotation axis along the X-axis direction to change the contact position between the circumferential surface and the curved surface 5222a of the biasing force adjustment member 5222. By changing the contact position between the circumferential surface of the cam 5221 and the curved surface 5222a of the biasing force adjustment member 5222, the biasing force adjustment member drive unit 5224 changes the relative position of the biasing force adjustment member 5222 with respect to the pressure reducing valve body 5011.

[0056] In the case of the pressure reducing valve 5001 according to this embodiment, for example, as shown in Figure 10, the position of the cam 5221 is intermittently changed. In this case, the secondary pressure Ps intermittently changes to one of five types of pressures Ps0, Ps1, Ps2, Ps3, and Ps4 according to the change in the position of the cam 5221, that is, the contact position with the biasing force adjustment member 5222 on the circumferential surface of the cam 5221.

[0057] As described above, with the pressure reducing valve 5001 according to this embodiment, the position of the biasing force adjustment member 5222 can be changed to two or more positions by the biasing force adjustment member drive unit 5224, so that the secondary pressure of the pressure reducing valve 5001 can be adjusted more precisely.

[0058] (Embodiment 6) The pressure reducing valve according to this embodiment differs from Embodiment 1 in that the valve seat is provided separately from the pressure reducing valve body, and a part of the valve body is arranged to be able to move toward and away from the portion of the valve seat into which the nozzle opens, on the primary side opening side of the valve seat within the gas flow path.

[0059] As shown in Figure 11, the pressure reducing valve 6001 according to this embodiment comprises a pressure reducing valve body 6011, a valve seat member 6024 provided separately from the pressure reducing valve body 6011, a valve element 6021, a first biasing member 6031, and a second biasing member 6032. As described in Embodiment 1, the pressure reducing valve body 6011 has a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2 communicating with these. Inside the pressure reducing valve body 6011, there is a cavity 6011a with a circular cross-section that extends in the Z-axis direction from the +Z-direction end of the pressure reducing valve body 6011; a cavity 6011h with a smaller diameter cross-section than cavity 6011a, communicating with cavity 6011a on the +Z-direction side and having a female screw portion 6011m formed on its inner wall; and a cavity 6011b with a smaller diameter cross-section than cavity 6011h, communicating with cavity 6011h on the +Z-direction side and communicating with the gas flow path GC2 on the -Z-direction side. Furthermore, a notch 6011j is formed at the boundary between cavity 6011h and cavity 6011b of the pressure reducing valve body 6011, into which the -Z-direction end of the valve seat member 6024 is fitted. Furthermore, a recess 6011i is formed on the outer circumference of cavity 6011h at the bottom of cavity 6011a on the -Z direction side of the pressure reducing valve body 6011, communicating with the gas flow path GC2. In addition, a female screw portion 6011k is formed at the end of cavity 6011a on the +Z direction side.

[0060] The valve seat member 6024 comprises a valve seat member body 6241 and a fixing member 6242 that is continuous with the valve seat member body 6241 on the +Z direction side and fixes the valve seat member body 6241 to the pressure reducing valve body 6011, and is arranged to close the portion between the gas passages GC1 and GC2. The valve seat member body 6241 is disc-shaped and has a nozzle 6241a formed in the center that penetrates from the primary opening side to the secondary opening side along the Z axis direction, and the peripheral portion on the -Z direction side is fitted into the notch 6111j of the pressure reducing valve body 6011. The fixing member 6242 is cylindrical and is fixed to the pressure reducing valve body 6011 with a male threaded portion formed on its outer wall screwed into the female threaded portion 6011m of the cavity 6011h of the pressure reducing valve body 6011. Furthermore, on the gas flow path GC1 side of the valve seat member body 6241, a tapered valve seat 6024b is formed, which widens in diameter towards the -Z direction, and a portion of the valve body 6021 makes surface contact with the inner wall.

[0061] The valve body 6021 has a valve body 6212 which is frustoconical in shape and has tapered side walls 6212b that can surface contact the valve seat 6024b of the valve seat member body 6241, a long shaft 6211, and a long bottomed cylindrical tubular portion 6213. The valve body 6212 has a communication hole 6212a formed at its -Z direction end that communicates with the tip of a recess 6212c formed on its inside. The shaft 6211 has its -Z direction end continuous with the valve body 6212 and is inserted inside the nozzle 6241a of the valve seat member 6024. The tubular portion 6213 has its +Z direction end continuous with the outer circumference of the recess 6212c of the valve body 6212 and its inside communicates with the inside of the recess 6212c through an opening 6213a formed in the bottom wall on the +Z direction. The outer diameter of the cylindrical portion 6213 in a cross-section perpendicular to the Z-axis direction is approximately the same as the inner diameter of the cavity 6011b of the pressure reducing valve body 6011, and it is fitted inside the cavity 6011b. The outer diameter of the valve body 6212 in a cross-section perpendicular to the Z-axis direction is smaller than the inner diameter of the cavity 6011b. Therefore, the gas that flows into the inside of the cylindrical portion 6213 from the gas flow path GC1 flows out through the opening 6213a, the recess 6212c of the valve body 6212, and the communication hole 6212a into the region enclosed by the cavity 6011b and the outer wall of the valve body 6212.

[0062] The transmission member 6025 is a bottomed cylindrical shape, with the +Z-direction end of the shaft 6211 of the valve body 6021 continuous with the center of its bottom wall, and is positioned within the cavity 6011a of the pressure reducing valve body 6011 so as to be movable in the Z-axis direction. Furthermore, a groove 6025a is formed on the side wall of the transmission member 6025 so as to surround the central axis of the transmission member 6025 along the Z-axis direction, and an annular sealing member 6252 is fitted inside the groove 6025a. As a result, the space between the cavity 6011a of the pressure reducing valve body 6011 and the side wall of the transmission member 6025 is sealed by the sealing member 6252.

[0063] The first biasing member 6031 is, for example, a coil spring, which is compressed to a length shorter than its natural length, and is positioned with one end on the -Z direction side in contact with the bottom wall of the transmission member 6025. The first biasing member 6031 biases the valve body 6212 of the valve body 6021 in a direction that separates it from the valve seat 6024b.

[0064] The second biasing member 6032 is, for example, a coil spring, compressed to a length shorter than its natural length, with one end on the +Z side abutting against the bottom wall of the cylindrical portion 6213 of the valve body 6021 and the other end on the -Z side abutting against the outer circumference of the portion of the cavity 6011b of the pressure reducing valve body 6011 where the gas flow path GC2 opens on the +Z side. The second biasing member 6032 then biases the valve body 6212 of the valve body 6021 toward the valve seat 6024b, thereby offsetting a portion of the biasing force of the first biasing member 6031.

[0065] The biasing force adjustment member 6022 is disc-shaped, with a male threaded portion 6022b formed on its side wall and a recess 6022a formed on the -Z direction side. The male threaded portion on the side wall is screwed into the female threaded portion 6011k of the cavity 6011a of the pressure reducing valve body 6011, and the biasing force of the first biasing member 6031 is fixed to the pressure reducing valve body 6011. The other end of the first biasing member 6031 on the +Z direction side is fitted inside the recess 6022a. As a result, the biasing force adjustment member 6022 is movable in the Z-axis direction relative to the pressure reducing valve body 6011 by rotating it relative to the pressure reducing valve body 6011. By changing the relative position of the biasing force adjustment member 6022 with respect to the pressure reducing valve body 6011, the length of the compressed first biasing member 6031 can be changed, thereby adjusting the biasing force of the first biasing member 6031.

[0066] As described above, with the pressure reducing valve 6001 according to this embodiment, the biasing force of the first biasing member 6031 can be adjusted by adjusting the biasing force of the valve body 6021 relative to the valve body body 6212, thereby adjusting the force applied in the direction away from the valve seat 6024b. This makes it relatively easy to change the secondary pressure of the pressure reducing valve 6001.

[0067] (Embodiment 7) The pressure reducing valve according to this embodiment differs from Embodiment 6 in that it includes a magnetic member formed from a magnetic material and in contact with the aforementioned biasing force adjusting member, and a magnetic member driving unit that changes the relative position of the biasing force adjusting member with respect to the pressure reducing valve body by moving the magnetic member toward the valve body or toward the valve body.

[0068] As shown in Figure 12, the pressure reducing valve 7001 according to this embodiment comprises a pressure reducing valve body 7011, a valve seat member 6024, a valve element 6021, a first biasing member 6031, a second biasing member 6032, a biasing force adjusting member 7222, and a solenoid actuator 7221. In Figure 12, components similar to those in Embodiment 6 are denoted by the same reference numerals as in Figure 11. The pressure reducing valve body 7011 comprises a main body portion 7111 and a cover portion 7112. Here, the main body portion 7111 has the same structure as the pressure reducing valve body 6011 described in Embodiment 6, and as described in Embodiment 6, a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2 are formed therein. The lid 7112 comprises a cylindrical lid body 71121, an outer flange portion 71122 protruding from the +Z direction end of the lid body 71121, and an inner flange portion 71123 protruding inward from the -Z direction end of the lid body 71121. A male threaded portion 71121a is formed on the outer wall of the lid body 71121 and is screwed into the female threaded portion 6011k of the body portion 7111. At this time, the -Z direction side of the outer flange portion 71122 is in contact with the +Z direction end of the body portion 7111.

[0069] The first biasing member 6031 is positioned such that one end on the +Z direction side is fitted inside the cover 7112, and the other end abuts against the inside bottom of the transmission member 6025.

[0070] The biasing force adjustment member 7222 is disc-shaped and positioned inside the lid body 71121 of the lid 7112. Here, the outer diameter of the biasing force adjustment member 7222 is larger than the inner diameter of the inner flange portion 71123 of the lid 7112, and the intrusion of the main body portion 7111 into the cavity 6011a is restricted by the inner flange portion 71123.

[0071] The solenoid actuator 7221 is a biasing force adjustment member drive unit comprising a magnetic member 72213 formed from a magnetic material in the shape of a long cylinder with its -Z end contacting the +Z side of the biasing force adjustment member 7222, and a magnetic member drive unit 72214 having a bottomed cylindrical housing 72211 into which the magnetic member 72213 is inserted, and a solenoid coil 72212 embedded in the side wall of the housing 72211. The magnetic member drive unit 72214 moves the magnetic member 72213 toward the transmission member 6025 by supplying current to the solenoid coil 72212. On the other hand, the magnetic member drive unit 72214 moves the magnetic member 72213 toward the transmission member 6025 by interrupting the supply of current to the solenoid coil 72212 and utilizing the restoring force of the first biasing member 6031. In this way, the magnetic member drive unit 72214 changes the relative position of the biasing force adjustment member 7222 with respect to the pressure reducing valve body 7011.

[0072] As described above, with the pressure reducing valve 7001 according to this embodiment, the position of the biasing force adjustment member 7222 can be changed by the solenoid actuator 7221. For example, by remotely controlling the solenoid actuator 7221, the secondary pressure of the pressure reducing valve 7001 can be adjusted remotely.

[0073] (Embodiment 8) The pressure reducing valve according to this embodiment differs from Embodiment 6 in that it includes a biasing force adjustment member drive unit which comprises a cylinder having a gas reservoir located on the opposite side of the biasing force adjustment member from the first biasing member side and forming a region filled with gas together with the biasing force adjustment member, and a gas supply unit that changes the relative position of the biasing force adjustment member with respect to the pressure reducing valve body by supplying gas to the gas reservoir and thereby changing the pressure of the gas stored in the gas reservoir.

[0074] As shown in Figure 13, the pressure reducing valve 8001 according to this embodiment comprises a pressure reducing valve body 8011, a valve seat member 6024, a valve element 6021, a transmission member 6025, a first biasing member 6031, a second biasing member 6032, a biasing force adjustment member 8222, and a gas actuator 8224. In Figure 13, components similar to those in Embodiment 6 are denoted by the same reference numerals as in Figure 11. The pressure reducing valve body 8011 comprises a main body portion 8111 and a cover 8112. Here, the main body portion 8111 has the same structure as the pressure reducing valve body 6011 described in Embodiment 6, and as described in Embodiment 6, a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2 are formed therein. The lid 8112 has a cylindrical lid body 81121 and an outer flange portion 81122 that protrudes from the +Z direction end of the lid body 81121. A male threaded portion 81121a is formed on the outer wall of the lid body 81121 and is screwed into the female threaded portion 6011k of the body portion 8111. At this time, the -Z direction side of the outer flange portion 81122 is in contact with the +Z direction end of the body portion 8111. In addition, near the -Z direction end of the inner wall of the lid body 81121, there is a portion that protrudes inward from its entire circumferential direction.

[0075] The first biasing member 6031 is positioned such that one end on its -Z direction side abuts against the inner bottom of the transmission member 6025, and the other end is fitted inside the lid body 81121 of the lid 8112.

[0076] The biasing force adjustment member 8222 has a circular cross-section, and a groove 8222a is formed on its side wall so as to surround the central axis along the Z-axis direction of the biasing force adjustment member 8222, with an annular sealing member 8226 fitted inside the groove 8222a. The biasing force adjustment member 8222 is positioned inside the lid body 81121. Here, the outer diameter of the biasing force adjustment member 8222 is larger than the inner diameter of the stopper 8114 embedded in the inner wall of the lid body 81121, and the stopper 8114 prevents the biasing force adjustment member 8222 from entering the cavity 6011a of the main body portion 8111.

[0077] The gas actuator 8224 includes a cylinder 8221 formed integrally with the lid 8112, and a gas supply unit 8223 that supplies gas to the gas storage unit 8221a. The cylinder 8221 has a gas storage unit 8221a formed on its inside, in which gas with a circular cross-section perpendicular to the Z-axis direction is stored. The outer circumference of the gas storage unit 8221a on the -Z side of the cylinder 8221 is continuous with the +Z end of the lid 8112. This gas storage unit 8221a is located on the +Z side of the biasing force adjustment member 8222 and forms a region filled with gas together with the biasing force adjustment member 8222. A gas introduction passage 8221b is provided through the side wall of the cylinder 8221 to introduce gas into the inside of the gas storage unit 8221a. Here, the inner diameter of the gas storage section 8221a is smaller than the outer diameter of the biasing force adjustment member 8222, restricting the biasing force adjustment member 8222 from entering the inside of the gas storage section 8221a. The gas supply section 8223 includes a gas supply source 8223a, a supply pipe L80 connecting the gas supply source 8223a and the gas introduction passage 8221b, and an on / off valve 8223b inserted in the supply pipe L80. By changing the pressure of the gas stored in the gas storage section 8221a, the relative position of the biasing force adjustment member 8222 with respect to the pressure reducing valve body 8011 is changed.

[0078] In the pressure reducing valve 8001 according to this embodiment, when the supply of gas from the gas supply unit 8223 to the gas storage unit 8221a is stopped, and the atmospheric pressure in the gas storage unit 8221a is zero or less than the biasing force of the first biasing member 6031, the biasing force of the first biasing member 6031 causes the biasing force adjustment member 8222 to move in the +Z direction and come into contact with the outer circumference of the gas storage unit 8221a on the -Z direction side of the cylinder 8221. Then, the gas actuator 8224 changes the position of the biasing force adjustment member 8222 by supplying gas from the gas supply unit 8223 to the gas storage unit 8221a, thereby changing the pressure of the gas stored in the gas storage unit 8221a. In this way, the biasing force of the first biasing member 6031 is adjusted by changing the length of the compressed first biasing member 6031.

[0079] As described above, with the pressure reducing valve 8001 according to this embodiment, the position of the biasing force adjustment member 8222 can be changed by the gas actuator 8224. For example, by remotely controlling the gas actuator 8224, the secondary pressure of the pressure reducing valve 8001 can be adjusted remotely.

[0080] (Embodiment 9) The pressure reducing valve according to this embodiment differs from Embodiment 6 in that it includes a biasing force adjusting member drive unit which comprises a cam whose circumferential surface abuts against the biasing force adjusting member, and a cam drive unit which changes the relative position of the biasing force adjusting member with respect to the pressure reducing valve body by rotating the cam to change the contact position with the biasing force adjusting member on the circumferential surface.

[0081] As shown in Figure 14, the pressure reducing valve 9001 according to this embodiment comprises a pressure reducing valve body 9011, a valve seat member 6024, a valve body 6021, a transmission member 6025, a first biasing member 6031, a second biasing member 6032, a biasing force adjustment member 9222, and a biasing force adjustment member drive unit 9224. In Figure 14, components similar to those in Embodiment 6 are denoted by the same reference numerals as in Figure 11. The pressure reducing valve body 9011 comprises a main body portion 9111 and a cover 9112. Here, the main body portion 9111 has the same structure as the pressure reducing valve body 6011 described in Embodiment 6, and as described in Embodiment 6, a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2 are formed therein. The lid 9112 has a cylindrical lid body 91121 with a male threaded portion 91121a formed on its outer wall that screws into the female threaded portion 6011k of the main body 9111, and an outer flange portion 91122 that protrudes from the +Z direction side of the lid body 91121.

[0082] The first biasing member 6031 is positioned such that one end on its -Z direction side abuts against the inner bottom of the transmission member 6025, and the other end is fitted inside the lid body 91121 of the lid 9112.

[0083] The biasing force adjustment member 9222 has a circular cross-section and is positioned inside the lid 9112, with its +Z-direction end protruding from the lid 9112 in the +Z direction. Furthermore, the +Z-direction side of the biasing force adjustment member 9222 has a dome-shaped curved surface 9222a.

[0084] The biasing force adjustment member drive unit 9224 includes a cam 9221 whose circumferential surface abuts against the biasing force adjustment member 9222, and a cam drive unit 9223 that rotates the cam 9221 around a rotation axis along the X-axis direction to change the contact position between the circumferential surface and the curved surface 9222a of the biasing force adjustment member 9222. By changing the contact position between the circumferential surface of the cam 9221 and the curved surface 9222a of the biasing force adjustment member 9222, the biasing force adjustment member drive unit 9224 changes the relative position of the biasing force adjustment member 9222 with respect to the pressure reducing valve body 9011.

[0085] As described above, with the pressure reducing valve 9001 according to this embodiment, the position of the biasing force adjustment member 9222 can be changed to two or more positions by the biasing force adjustment member drive unit 9224, so that the secondary pressure of the pressure reducing valve 9001 can be adjusted more precisely.

[0086] (Embodiment 10) The pressure reducing valve according to this embodiment differs from Embodiment 1 in that the biasing force adjustment member has a main part and a male threaded part protruding from the main part, the pressure reducing valve body has a cavity in which the main part is movably positioned relative to the pressure reducing valve body, a female threaded part is formed in the portion of the peripheral wall facing the cavity into which the male threaded part is screwed, and a fastening member is provided which is screwed into the portion of the male threaded part that protrudes outward from the pressure reducing valve body and prevents the aforementioned male threaded part from rotating relative to the pressure reducing valve body.

[0087] As shown in Figure 15, the pressure reducing valve 10001 according to this embodiment comprises a pressure reducing valve body 10011, a valve seat member 24, a valve element 10021, a guide member 23, a first biasing member 31, and a second biasing member 32. In Figure 15, components similar to those in Embodiment 1 are denoted by the same reference numerals as in Figure 2. The pressure reducing valve body 10011 comprises a main body portion 10111 and a cover 10112. The main body portion 111 has a primary side opening (not shown), a secondary side opening (not shown), and gas passages GC1 and GC2, as described in Embodiment 1. Inside the main body 10111, there is a cavity 10111a with a circular cross-section that extends in the Z-axis direction from the +Z-direction end of the main body 111 on the +Z-direction side of the gas flow path GC2, and a cavity 10111b with a smaller diameter cross-section than cavity 111a that communicates with cavity 10111a on the +Z-direction side and with the gas flow path GC2 on the -Z-direction side. Furthermore, a female screw portion 10111e is formed near the +Z-direction end of the inner wall of cavity 10111a of the main body 10111. In addition, the lid 10112 is cylindrical and has a projection 11121 that protrudes in the -Z-direction side with an outer diameter approximately equal to the inner diameter of cavity 10111a of the main body 10111, and an annular sealing member 1122 is fitted into the side wall of projection 11121. Furthermore, a recess 10112a is formed on the -Z direction side of the lid 10112, opening to the -Z direction side of the projection 11121, and a screw hole 10112b is formed at the bottom of the recess 10112a, penetrating in the Z-axis direction. Here, the space between the side wall of the projection 11121 of the lid 10112 and the inner wall of the +Z direction end of the cavity 10111a of the main body 10111 is sealed by the sealing member 1122. Moreover, a male screw portion 11121e is formed on the side wall of the projection 11121 of the lid 10112, which screws into a female screw portion 10111e formed on the inner wall of the cavity 10111a of the main body 10111.

[0088] The guide member 23 has a long cylindrical guide member body 231a whose outer diameter is approximately the same as the inner diameter of the cavity 10111b of the main body 10111, and an outer flange portion 231b that protrudes radially from approximately the center of the guide member body 231a in the longitudinal direction. Furthermore, an annular sealing member 232 is fitted into a groove 231c formed on the -Z direction side of the outer flange portion 231b in the longitudinal direction of the guide member 23. The guide member 23 is positioned such that the portion of the guide member 23 on the -Z direction side of the outer flange portion 231b in the longitudinal direction is fitted into the cavity 10111b of the main body 10111, and the -Z direction side of the outer flange portion 231b is in contact with the stepped portion 10111c formed between the cavities 10111a and 10111b of the main body 10111. Here, the space between the outer wall of the guide member 23 and the inner wall of the cavity 10111b is sealed by the sealing member 232.

[0089] The valve body 10021 is a long, bottomed cylindrical shape, and has a valve body main body 10211a positioned within the cavities 10111a and 10111b with its cylindrical axis aligned along the Z-axis direction and its bottom portion 10211e facing the -Z direction, and an outer flange portion 10211b extending from the +Z-direction end of the valve body main body 10211a in a direction perpendicular to the Z-axis direction, with the bottom portion 10211e of the valve body main body 10211a being positioned to move toward and away from the valve seat 24b of the valve seat member 24. The -Z-direction end of the valve body main body 10211a is inserted inside the guide member body 231a of the guide member 23. An annular recess 10211c is formed on the -Z-direction side of the outer flange portion 10211b so as to surround the valve body main body 211a. Furthermore, a circular recess 10211d is formed on the +Z direction side of the outer flange portion 10211b in plan view. In addition, a groove 10211g is formed near the -Z direction end of the valve body 10211a so as to surround the central axis along the Z-axis direction of the valve body 10211a, and an annular sealing member 10213 is fitted inside the groove 10211g. Also, a groove 10211f is formed on the side wall of the outer flange portion 10211b so as to surround the central axis along the Z-axis direction of the valve body 10211a, and an annular sealing member 10212 is fitted inside the groove 10211f. As a result, the space between the outer wall of the valve body 10211a and the inner wall of the guide member 23 is sealed by the sealing member 10213, and the space between the side wall of the outer flange portion 10211b and the inner wall of the cavity 10111a is sealed by the sealing member 10212.

[0090] The first biasing member 31 is positioned such that one end on its -Z side abuts against the outer flange portion 231b of the guide member 23, and the other end is fitted inside the recess 10211c of the valve body 10021. The second biasing member 32 is positioned such that one end on its -Z side is fitted inside the recess 10211d of the valve body 10021, and the other end is fitted inside the recess 10112a of the cover 10112 of the pressure reducing valve body 10011.

[0091] The biasing force adjustment member 10022 has a main portion 10221a with a circular cross-section and an annular sealing member 10222 fitted into its side wall, a male threaded portion 10221b that protrudes from the +Z direction side of the main portion 10221a in the +Z direction and has a screw formed on its side wall, and a nut member 10221c which is a fastening member that screws into the male threaded portion 10221b and suppresses the rotation of the male threaded portion 10221b around a rotation axis along the Z-axis direction relative to the pressure reducing valve body 10011. A recess 10221d is formed on the -Z direction side of the main portion 10221a, and the +Z direction end of the second biasing member 32 is fitted inside it. The main part 10221a is positioned inside the recess 10112a of the lid 10112, and the male threaded part 10221b is screwed into the threaded hole 10112b of the lid 10112, with its tip protruding outwards from the lid 10112, thus fixing it to the lid 10112. The nut member 10221c is screwed onto the tip of the male threaded part 10221b that protrudes outwards from the lid 10112. As a result, after positioning the biasing force adjustment member 10022 by rotating the male threaded portion 10221b of the biasing force adjustment member 10022 relative to the pressure reducing valve body 10011, the nut member 10221c is moved to the base end of the portion of the male threaded portion 10221b that protrudes outward from the cover 10112, thereby preventing the male threaded portion 10221b from rotating relative to the pressure reducing valve body 10011.

[0092] As described above, according to the pressure reducing valve 10001 of this embodiment, by moving the nut member 10221c to the base end of the portion of the male screw portion 10221b that protrudes outward from the cover 10112, the rotation of the male screw portion 10221b relative to the pressure reducing valve body 10011 can be suppressed, thereby suppressing fluctuations in the secondary pressure of the pressure reducing valve 10001 caused by the movement of the biasing force adjustment member 10022.

[0093] (Embodiment 11) The pressure reducing valve according to this embodiment includes a biasing force adjustment member drive unit having a feed screw and a feed screw drive unit that rotates the feed screw, and differs from embodiment 10 in that the biasing force adjustment member has a screw hole drilled on the side opposite to the second biasing member side and which screws into the tip of the feed screw.

[0094] As shown in Figures 16(A) and (B), the pressure reducing valve 11001 according to this embodiment comprises a pressure reducing valve body 11011, a valve seat member 24, a valve element 10021, a guide member 23, a first biasing member 31, a second biasing member 32, a biasing force adjustment member 11221, and a biasing force adjustment member drive unit 11223. In Figures 16(A) and (B), components similar to those in Embodiment 10 are denoted by the same reference numerals as in Figure 15. The pressure reducing valve body 11011 comprises a main body portion 10111 and a cover 11112. The cover 11112 is cylindrical and has an outer diameter approximately equal to the inner diameter of the cavity 10111a of the main body portion 10111, with a projection 111121 protruding in the -Z direction, and an annular sealing member 1122 fitted into the side wall of the projection 111121. Furthermore, a through hole 11112a is formed on the -Z direction side of the lid 11112, extending from the -Z direction side of the projection 11121 to the +Z direction side of the lid 11112. In addition, a screw hole 11112d is drilled in the side wall of the lid 11112, penetrating in the thickness direction, into which a rotation restricting screw 11224 is screwed to restrict the rotation of the biasing force adjustment member 11221 around its central axis along the Z-axis direction. Moreover, a male screw portion 111121e is formed on the side wall of the projection 111121 of the lid 11112, which screws into a female screw portion 10111e formed on the inner wall of the cavity 10111a of the main body portion 10111.

[0095] The second biasing member 32 is positioned such that one end on its -Z direction side is fitted inside the recess 10211d of the valve body 10021, and the other end is fitted inside the through hole 11112a of the cover 11112 of the pressure reducing valve body 11011.

[0096] The biasing force adjustment member 11221 has a circular cross-section, with an annular sealing member 10222 fitted into its side wall, and is positioned inside the through hole 11112a of the cover 11112. The biasing force adjustment member 11221 also has a screw hole 11221a drilled on the opposite side from the second biasing member 32, i.e., on the +Z direction side, which engages with the tip of the feed screw 112232 described later, and a recess 11221b into which the tip of the rotation restricting screw 11224, which is screwed into the screw hole 11112d of the side wall of the cover 11112, fits.

[0097] The biasing force adjustment member drive unit 11223 includes a feed screw 112232 and a feed screw drive unit 112231 that rotates the feed screw 112232 around a central axis along the Z-axis direction. By rotating the feed screw 112232, the feed screw drive unit 112231 moves the biasing force adjustment member 11221, which has a screw hole 11221a screwed into the tip of the feed screw 112232, in the longitudinal direction of the feed screw 112232, i.e., in the Z-axis direction. For example, in the state shown in Figure 16(A), when the feed screw drive unit 112231 rotates the feed screw 112232 as indicated by arrow AR111, the biasing force adjustment member 11221 moves in the -Z direction as shown in Figure 16(B).

[0098] As described above, according to the pressure reducing valve 11001 of this embodiment, the position of the biasing force adjusting member 11221 can be changed by the biasing force adjusting member drive unit 11223 having a feed screw 112232. Therefore, for example, by remotely controlling the biasing force adjusting member drive unit 11223, the secondary pressure of the pressure reducing valve 11001 can be adjusted remotely.

[0099] (Embodiment 12) The pressure reducing valve according to this embodiment differs from Embodiment 11 in that the valve seat is provided separately from the pressure reducing valve body, and a part of the valve body is arranged to be able to move toward and away from the portion of the valve seat through which the nozzle opens, on the primary side opening side of the valve seat within the gas flow path.

[0100] As shown in Figure 17, the pressure reducing valve 12001 according to this embodiment comprises a pressure reducing valve body 12011, a valve seat member 12024 provided separately from the pressure reducing valve body 12011, a valve element 6021, a first biasing member 6031, a second biasing member 6032, a transmission member 12025, a biasing force adjustment member 12221, and a biasing force adjustment member drive unit 11223. In Figure 17, components similar to those of Embodiment 6 or Embodiment 11 are denoted by the same reference numerals as in Figures 11, 16(A), and (B). The pressure reducing valve body 12011 has a main body portion 12111 and a cover portion 12112. Inside the main body 12111, there are three cavities: cavity 12111a, which has a circular cross-section and extends in the Z-axis direction from the +Z-direction end of the main body 12111; cavity 12111h, which has a smaller diameter cross-section than cavity 12111a, communicates with cavity 12111a on the +Z-direction side, and has a female screw portion 12111m formed on its inner wall; and cavity 12111b, which has a smaller diameter cross-section than cavity 12111h, communicates with cavity 12111h on the +Z-direction side, and communicates with the gas flow path GC2 on the -Z-direction side. Furthermore, a notch 12111j is formed at the boundary between cavity 12111h and cavity 12111b of the main body 12111, into which the -Z-direction end of valve seat member 12024 is fitted. Furthermore, a gas flow path GC2 is formed in the side wall covering the cavity 12111a of the main body 12111.

[0101] The valve seat member 12024 comprises a valve seat member body 12241 and a fixing member 12242 that is continuous with the valve seat member body 12241 on the +Z direction side and fixes the valve seat member body 12241 to the main body portion 12111 of the pressure reducing valve body 12011, and is arranged to close the portion between the gas passages GC1 and GC2. The valve seat member body 12241 is disc-shaped with a nozzle 12241a formed in the center that penetrates along the Z-axis direction, and the peripheral portion on the -Z direction side is fitted into the notch 12111j of the main body portion 12111. The fixing member 12242 is cylindrical and is fixed to the main body portion 12111 with a male threaded portion formed on its outer wall screwed into the female threaded portion 12111m of the main body portion 12111. Furthermore, on the gas flow path GC1 side of the valve seat member body 12241, a tapered valve seat 12241b is formed, which widens in diameter towards the -Z direction, and a portion of the valve body 6021 makes surface contact with the inner wall.

[0102] The valve body 6021 comprises a valve body main body 6212, a shaft 6211, and a cylindrical portion 6213. The shaft 6211 is inserted inside the nozzle 12241a of the valve seat member 12024. The outer diameter of the cross-section of the cylindrical portion 6213 perpendicular to the Z-axis direction is approximately the same as the inner diameter of the cavity 12111b of the main body portion 12111, and the cylindrical portion 6213 is fitted inside the cavity 12111b.

[0103] The transmission member 12025 is a bottomed cylindrical shape, with the +Z-direction end of the shaft 6211 of the valve body 6021 continuous with the center of its bottom wall, and is positioned within the cavity 12111a of the main body 12111 in a state where it can move freely in the Z-axis direction. Furthermore, a groove 12025a is formed in the side wall of the transmission member 12025 so as to surround the central axis of the transmission member 12025 along the Z-axis direction, and an annular sealing member 12252 is fitted inside the groove 12025a. As a result, the space between the cavity 12111a of the main body 12111 and the side wall of the transmission member 12025 is sealed by the sealing member 12252. The first biasing member 6031 is positioned so that one end on the -Z-direction side abuts against the inner bottom of the transmission member 12025.

[0104] The biasing force adjustment member 12221 has a circular cross-section and is positioned inside the through hole 12112a of the cover 12112. The biasing force adjustment member 12221 also has a screw hole 12221a drilled on the opposite side from the first biasing member 6031, i.e., on the +Z direction side, which engages with the tip of the feed screw 112232, and a recess 12221b into which the tip of the rotation restricting screw 11224, which is screwed into the screw hole 12112d of the side wall of the cover 12112, fits.

[0105] The biasing force adjustment member drive unit 11223, similar to Embodiment 11, includes a feed screw 112232 and a feed screw drive unit 112231 that rotates the feed screw 112232 around a central axis along the Z-axis direction. The feed screw drive unit 112231 rotates the feed screw 112232, thereby moving the biasing force adjustment member 12221, which has a screw hole 12221a screwed into the tip of the feed screw 112232, in the longitudinal direction of the feed screw 112232, i.e., in the Z-axis direction.

[0106] As described above, according to the pressure reducing valve 12001 of this embodiment, similar to embodiment 11, the position of the biasing force adjusting member 12221 can be changed by the biasing force adjusting member drive unit 11223 having a feed screw 112232. Therefore, for example, by remotely controlling the biasing force adjusting member drive unit 11223, the secondary pressure of the pressure reducing valve 12001 can be adjusted remotely.

[0107] (Embodiment 13) The pressure reducing valve according to this embodiment differs from Embodiment 11 in that it includes a magnetic member formed from a magnetic material and in contact with the aforementioned biasing force adjusting member, and a magnetic member driving unit that changes the relative position of the biasing force adjusting member with respect to the pressure reducing valve body by moving the magnetic member toward the valve body or toward the valve body.

[0108] As shown in Figures 18(A) and (B), the pressure reducing valve 13001 according to this embodiment comprises a pressure reducing valve body 13011, a valve seat member 24, a valve body 10021, a guide member 23, a first biasing member 31, a second biasing member 32, a biasing force adjusting member 13222, a solenoid actuator 13221, and a third biasing member 13225. In Figures 18(A) and (B), components similar to those in Embodiment 11 are denoted by the same reference numerals as in Figures 16(A) and (B). The pressure reducing valve body 13011 has a main body portion 10111 and a cover 13112. The lid 13112 is cylindrical in shape and has a projection 131121 that protrudes in the -Z direction, with an outer diameter approximately equal to the inner diameter of the cavity 10111a of the main body 10111. An annular sealing member 1122 is fitted into the side wall of the projection 131121. On the -Z direction side of the lid 13112, there is a recess 13112a provided on the -Z direction side of the projection 131121, and a through hole 13112f that penetrates from approximately the center of the bottom of the recess 13112a to the +Z direction side of the lid 13112. Furthermore, a male screw portion 13112e is formed on the side wall of the projection 131121 of the lid 13112, which screws into a female screw portion 10111e formed on the inner wall of the cavity 10111a of the main body 10111.

[0109] The second biasing member 32 is positioned such that one end on the -Z direction side is fitted inside the recess 211d of the valve body 21, and the other end is fitted inside the through hole 2112a of the cover 13112 of the pressure reducing valve body 13011.

[0110] The biasing force adjustment member 13222 has a circular cross-section, with an annular sealing member 10222 fitted into its side wall, and is positioned inside the recess 13112a of the lid 13112.

[0111] The solenoid actuator 13221 is a biasing force adjustment member drive unit comprising a magnetic member 132213 formed from a magnetic material, with its -Z direction end in contact with the +Z direction side of the biasing force adjustment member 13222, a bottomed cylindrical housing 132211 into which the magnetic member 132213 is inserted, and a magnetic member drive unit 132214 having a solenoid coil 132212 embedded in the side wall of the housing 132211. The magnetic member 132213 has a long cylindrical magnetic member body 132213a and an outer flange portion 132213b protruding outward from the -Z direction end of the magnetic member body 132213a. Here, the outer diameter of the outer flange portion 132213b is approximately equal to the inner diameter of the through hole 13112f of the lid 13112. The outer flange portion 132213b of the magnetic material member 132213 is inserted inside the through hole 13112f of the lid 13112, and the -Z side is able to contact the biasing force adjustment member 13222. Here, the -Z end of the housing 132211 is fixed to the outer circumference of the portion of the lid 13112 where the through hole 13112f opens on the +Z side. The inner diameter of the housing 132211 is smaller than the inner diameter of the through hole 13112f, and a third biasing member 13225, which is made of a coil spring with an outer diameter larger than the inner diameter of the housing 132211, is arranged inside the through hole 13112f. The -Z end of this third biasing member 13225 contacts the outer flange portion 132213b, and the +Z end is fixed to the -Z end of the housing 132211. Furthermore, when the magnetic member 132213 moves towards the +Z direction, the third biasing member 13225 biases the magnetic member 132213 back towards the -Z direction due to its restoring force.

[0112] Here, in the state shown in Figure 18(B), the magnetic member drive unit 132214 supplies current to the solenoid coil 132212, causing the magnetic member 132213 to move away from the valve body 10021, as shown in Figure 18(A). On the other hand, when the magnetic member drive unit 132214 cuts off the current supply to the solenoid coil 132212, the restoring force of the third biasing member 13225 causes the magnetic member 132213 to move towards the valve body 10021. At this time, with its -Z side end contacting the +Z side of the biasing force adjustment member 13222, the magnetic member 132213 pushes the biasing force adjustment member 13222 downward in the -Z direction. In this way, the magnetic member drive unit 132214 changes the relative position of the biasing force adjustment member 13222 with respect to the pressure reducing valve body 13011.

[0113] As described above, with the pressure reducing valve 13001 according to this embodiment, the position of the biasing force adjustment member 13222 can be changed by the solenoid actuator 13221. For example, by remotely controlling the solenoid actuator 13221, the secondary pressure of the pressure reducing valve 13001 can be adjusted remotely.

[0114] (Embodiment 14) The pressure reducing valve according to this embodiment differs from Embodiment 11 in that it includes a biasing force adjusting member drive unit which has a cam whose circumferential surface contacts the biasing force adjusting member, and a cam drive unit which changes the relative position of the biasing force adjusting member with respect to the pressure reducing valve body by rotating the cam to change the contact position with the biasing force adjusting member on the circumferential surface.

[0115] As shown in Figure 19, the pressure reducing valve 14001 according to this embodiment comprises a pressure reducing valve body 14011, a valve seat member 24, a valve body 10021, a guide member 23, a first biasing member 31, a second biasing member 32, a biasing force adjustment member 14222, and a biasing force adjustment member drive unit 14224. In Figures 18(A) and (B), components similar to those in Embodiment 11 are denoted by the same reference numerals as in Figures 16(A) and (B). The pressure reducing valve body 14011 comprises a main body portion 10111 and a cover 14112. The cover 14112 is cylindrical and has an outer diameter approximately equal to the inner diameter of the cavity 10111a of the main body portion 10111, with a protruding portion 141121 projecting in the -Z direction, and an annular sealing member 1122 fitted into the side wall of the protruding portion 141121. Furthermore, a through hole 14112a is formed on the -Z direction side of the lid 14112, extending from the -Z direction side of the projection 141121 to the +Z direction side of the lid 14112. Additionally, a male threaded portion 14111e is formed on the side wall of the projection 141121 of the lid 14112, which screws into a female threaded portion 10111e formed on the inner wall of the cavity 10111a of the main body 10111.

[0116] The second biasing member 32 is positioned such that one end on the -Z direction side is fitted inside the recess 10211d of the valve body 10021, and the other end is fitted inside the through hole 14112a of the cover 14112 of the pressure reducing valve body 14011.

[0117] The biasing force adjustment member 14222 has a circular cross-section, with an annular sealing member 10222 fitted into its side wall. It has a main portion 142221 positioned inside the through hole 14112a of the lid 14112, and a protruding portion 142222 that projects in the +Z direction from approximately the center of the main portion 142221. The +Z direction end of the protruding portion 142222 has a dome-shaped curved surface 142222a that protrudes toward the +Z direction of the lid 14112.

[0118] The biasing force adjustment member drive unit 14224 includes a cam 14221 whose circumferential surface abuts against the tip of the protruding portion 142222 of the biasing force adjustment member 14222, and a cam drive unit 14223 that rotates the cam 14221 around a rotation axis along the X-axis direction to change the contact position between the circumferential surface and the curved surface 142222a of the biasing force adjustment member 14222. By changing the contact position between the circumferential surface of the cam 14221 and the curved surface 142222a of the biasing force adjustment member 14222, the biasing force adjustment member drive unit 14224 changes the relative position of the biasing force adjustment member 14222 with respect to the pressure reducing valve body 14011.

[0119] The biasing force adjustment member drive unit 14224 rotates the cam 14221 in the state shown in Figure 19(A) to change the contact position between the biasing force adjustment member 14222 and the curved surface 142222a on the circumferential surface as shown in Figure 19(B). As a result, the biasing force adjustment member 14222 is pushed down in the -Z direction.

[0120] As described above, with the pressure reducing valve 14001 according to this embodiment, the position of the biasing force adjustment member 14222 can be changed to two or more positions by the biasing force adjustment member drive unit 14224, so that the secondary pressure of the pressure reducing valve 14001 can be adjusted more precisely.

[0121] (Embodiment 15) As shown in Figure 20, the remote control system according to this embodiment comprises a mobile body 100 and a remote control device 200 for remotely controlling the mobile body 100. The remote control device 200 comprises an operation unit 210 operated by a user, an instruction information generation unit 220 that generates instruction information indicating instructions for the operation of the mobile body 100 based on the operation performed by the user on the operation unit 210, and a wireless module 230 for wireless communication with the mobile body 100. Here, the wireless module 230 generates a wireless signal corresponding to the instruction information generated by the instruction information generation unit 220 and transmits it to the mobile body 100.

[0122] The mobile body 100 is, for example, an unmanned aerial vehicle, an unmanned submersible, etc., and includes at least one of the pressure reducing valves 2001, 3001, 4001, 5001, 7001, 8001, 9001, 11001, 12001, 13001, and 14001 described in Embodiments 2 to 5, 7 to 9, and 11 to 14. The mobile body 100 also includes a wireless module 120 that receives a wireless signal transmitted from the remote control device 200, converts the received wireless signal into corresponding instruction information and outputs it, and a control unit 110 that controls the operation of the pressure reducing valves 2001, 3001, 4001, 5001, 7001, 8001, 9001, 11001, 12001, 13001, and 14001 based on the instruction information input from the wireless module 120. Here, the control unit 110 controls the operation of the biasing force adjustment member drive units 5224, 9224, 11223, 14224, solenoid actuators 2221, 7221, 13221, or gas actuators 3224, 4224, 8224, which are provided in the pressure reducing valves 2001, 3001, 4001, 5001, 7001, 8001, 9001, 11001, 12001, 13001, and 14001.

[0123] According to the remote system of this embodiment, the operation of the pressure reducing valves 2001, 3001, 4001, 5001, 7001, 8001, 9001, 11001, 12001, 13001, and 14001 provided on the mobile body 100 can be controlled remotely.

[0124] Although embodiments of the present invention have been described above, the present invention is not limited to the configurations of the embodiments described above. For example, in Embodiment 4, the gas supply unit may supply a portion of the gas flowing into the primary side opening of the pressure reducing valve body 4011 to the gas storage unit 4221a of the cylinder 4221.

[0125] In each embodiment, examples were described in which gas flow paths GC1 and GC2 are formed in pressure reducing valves 1, 2001, 3001, 4001, 5001, 6001, 7001, 8001, 9001, 10001, 11001, 12001, 13001, and 14001, and the gas flowing in from the primary side is depressurized and discharged to the secondary side. However, the invention is not limited to this, and a flow path for liquid is also formed in the pressure reducing valve, and the liquid flowing in from the primary side is discharged to the secondary side.

[0126] Although embodiments and variations of the present invention have been described above, the present invention is not limited thereto. The present invention includes embodiments and variations that are appropriately combined, and those that are appropriately modified thereto. [Industrial applicability]

[0127] The present invention is suitable as a pressure reducing valve mounted on a small mobile device. [Explanation of Symbols]

[0128] 1,2001,3001,4001,5001,6001,7001,8001,9001,10001,11001,12001,13001,14001: Pressure reducing valve, 11,2011,3011,4011,5011,6011,7011,8011,9011,10011,11011,12011,13011,14011: Pressure reducing valve body, 4: Pressure sensor, 5: On / off valve, 21,512,6021,10021: Valve body, 22,2222,3222,4222,5222,6022,7222,8222,9222,11221,12221,13 222,14222: Biasing force adjustment member, 23: Guide member, 24,6024,12024: Valve seat member, 24a,6241a,12241a: Nozzle, 24b,111k,6024b,12241b: Valve seat, 31,6031: First biasing member, 32,6032: Second biasing member, 52,210: Operating part, 111,7111,8111,9111,10111,12111: Main body, 111a,111b,111f,111h,111j,6011a,6011b,6011h,10111a,10111b,12111a,12111b,12111h: Key Cavity, 111c, 10111c: Stepped section, 111d: Primary opening, 111e: Secondary opening, 111g, 111p, 6011k, ​​6011m, 10111e, 12111m: Female screw section, 111n, 112a, 211c, 211d, 3221c, 6011i, 6022a, 6212c, 10112a, 10211c, 10211d, 10221d, 11221b, 12221b, 13112a: Recess, 112b, 10112b, 11112d, 11221a, 12112d, 12221a: Screw hole, 112, 2112, 3112, 4112, 511 2,7112,8112,9112,10112,11112,12112,13112,14112: Cover, 113: Screw, 120,230: Wireless module, 122,212,213,222,232,1122,6252,8226,10212,10213,10222,12252,42223: Seal member, 131,221b,512b,514a,6022b,10221b,11121e,13112e,14111e,71121a,81121a,91121a,111121e: Male screw part, 200: Remote control device, 211a,10211a: Valve body, 211b, 231b, 5142, 10211b, 42212, 71122, 81122, 91122, 132213b: Outer flange, 211e, 10211e: Bottom, 211f, 211g, 231c, 512a, 2222a, 3222a, 5222b, 6025a, 8222a, 10211f, 10211g, 12025a, 42221a, 42222a: Groove, 220: Instruction information generation unit, 221a, 10221a, 142221: Main unit, 231a: Guide member body, 512c: Cone unit, 514: Valve body holding unit, 1121, 211 21,31121,41121,51121,111121,131121,141121,142222: Protrusions, 2112a,3112a,4112a,5112a,11112a,12111a,13112f,14112a: Through holes, 2221,7211,13221: Solenoid actuators, 3114,8114: Stoppers, 3221,4221,8221: Cylinders, 3221a,4221a,8221a: Gas storage sections, 3221b,4221b,8221b: Gas introduction passages, 3223,4223: Gas supply sections, 3223a,8223a :Gas supply source, 3223b,4223a,4223b,8223b:On / off valve, 3224,4224,8224:Gas actuator, 5141:Holding body, 5221,9221,14221:Cam, 5222a,9222a,142222a:Curved surface, 5223,9223,14223:Cam drive unit, 5224,9224,11223,14224:Biasing force adjustment member drive unit, 6011j,12111j:Notch, 6025,12025:Transmission member, 6211:Shaft, 6212:Valve body, 6212a:Communication hole, 6212b:Side wall, 6213 :Cylindrical part, 6213a:Opening, 6241,12241:Valve seat member body, 6242,12242:Fixing member, 10221c:Nut member, 11224:Rotation restricting screw, 13225:Third biasing member, 21121a,71123:Inner flange part, 22211,72211,132211:Housing, 22212,72212:Solenoid coil, 22213,72213,132213:Magnetic member, 22214,72214,132214:Magnetic member drive part, 42211:Cylinder body, 42221:First part, 42222:Second part, 71121,81121,91121: Cover body, 112131: Feed screw drive unit, 112232: Feed screw, 132213a: Magnetic material member body, F1, F2: Biasing force, GC1, GC2: Gas flow path, L30, L31, L80: Supply pipe, L32: Exhaust pipe,

Claims

1. A pressure reducing valve body having a primary opening, a secondary opening, and a flow path communicating from the primary opening to the secondary opening, A nozzle is provided which is arranged to block a portion of the flow path and penetrates from the primary side opening to the secondary side opening, and a valve seat is provided which has an opening at one end of the nozzle, and the valve seat member is formed in a continuous and integral manner with the pressure reducing valve body, or is a separate valve seat member from the pressure reducing valve body. A valve body is arranged in the flow path so as to be able to move toward and away from the portion of the valve seat through which the nozzle opens, at least a portion of which is arranged toward and away from the portion of the valve seat through which the nozzle opens, A first biasing member that biases the valve body in a direction that separates it from the valve seat, A second biasing member that biases the valve body toward the valve seat, thereby offsetting a portion of the biasing force of the first biasing member, The system includes a biasing force adjustment mechanism for adjusting the biasing force of the first biasing member or the second biasing member, Pressure reducing valve.

2. The second biasing member has one end that abuts against the valve body, The biasing force adjustment mechanism includes a biasing force adjustment member that is movably mounted on the pressure reducing valve body and contacts the other end of the second biasing member, thereby adjusting the biasing force of the second biasing member by changing its relative position to the pressure reducing valve body. The pressure reducing valve according to claim 1.

3. The first biasing member is positioned such that one end is directly or indirectly connected to the valve body. The biasing force adjustment mechanism includes a biasing force adjustment member that is movably mounted on the pressure reducing valve body and contacts the other end of the first biasing member, thereby adjusting the biasing force of the first biasing member by changing its relative position to the pressure reducing valve body. The pressure reducing valve according to claim 1.

4. The biasing force adjustment member drive unit further comprises a magnetic member formed from a magnetic material and in contact with the biasing force adjustment member, and a magnetic member drive unit that changes the relative position of the biasing force adjustment member with respect to the pressure reducing valve body by moving the magnetic member toward the valve body or toward the valve body. A pressure reducing valve according to claim 2 or 3.

5. The biasing force adjustment member drive unit further comprises a cylinder having a gas reservoir located on the opposite side of the biasing force adjustment member from the second biasing member side and forming a region filled with gas together with the biasing force adjustment member, and a gas supply unit that changes the relative position of the biasing force adjustment member with respect to the pressure reducing valve body by supplying gas to the gas reservoir and thereby changing the pressure of the gas stored in the gas reservoir. The pressure reducing valve according to claim 2.

6. The biasing force adjustment member drive unit further comprises a cylinder having a gas reservoir located on the opposite side of the biasing force adjustment member from the first biasing member side and forming a region filled with gas together with the biasing force adjustment member, and a gas supply unit that changes the relative position of the biasing force adjustment member with respect to the pressure reducing valve body by supplying gas to the gas reservoir and thereby changing the pressure of the gas stored in the gas reservoir. The pressure reducing valve according to claim 3.

7. The gas supply unit supplies the gas flowing out from the secondary opening to the gas storage unit. The pressure reducing valve according to claim 5 or 6.

8. The biasing force adjustment member drive unit further includes a cam whose circumferential surface abuts against the biasing force adjustment member, and a cam drive unit that rotates the cam to change the contact position between the circumferential surface and the biasing force adjustment member, thereby changing the relative position of the biasing force adjustment member with respect to the pressure reducing valve body. A pressure reducing valve according to claim 2 or 3.

9. The system further comprises a biasing force adjustment member drive unit having a feed screw and a feed screw drive unit that rotates the feed screw, The biasing force adjustment member has a female threaded portion drilled on the side of the biasing force adjustment member opposite to the second biasing member side, which screws into the tip of the feed screw. The pressure reducing valve according to claim 2.

10. The system further comprises a biasing force adjustment member drive unit having a feed screw and a feed screw drive unit that rotates the feed screw, The biasing force adjustment member has a female threaded portion drilled on the side of the biasing force adjustment member opposite to the first biasing member side, which screws into the tip of the feed screw. The pressure reducing valve according to claim 3.

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