Coating equipment

Abstract

To realize a coating apparatus capable of uniformizing the film thickness of the coating film in the width direction of the coating apparatus. [Solution] A coating apparatus (1) according to one embodiment of the present disclosure is a coating apparatus for forming a coating film on a substrate, comprising: a slit die (2) having a manifold (5a) for storing paint (P), a slit (1a) for discharging paint (P), and a land (5b) disposed between the manifold (5a) and the slit (1a) to make the paint (P) that has flowed out from the manifold (5a) into a laminar flow; and a diffusion section disposed in the manifold (5a). The diffusion section has a plurality of holes through which the paint (P) passes, and the plurality of holes equalize the flow rate of paint (P) flowing from the manifold (5a) to the land (5b) in the width direction of the coating apparatus (1).

Description

Technical Field

[0001] The present disclosure relates to a coating apparatus, for example, a coating apparatus for forming a coating film on a substrate.

Background Art

[0002] A general coating apparatus is configured to discharge the paint stored in the manifold of a slit die from the slit of the slit die to form a coating film on a substrate. At this time, it is preferable that the film thickness of the coating film can be made uniform in the width direction of the coating apparatus.

[0003] For example, the coating apparatus of Patent Document 1 supplies paint to the manifold through a branch portion having two branch flow paths with equal flow path distances. Thereby, the coating apparatus of Patent Document 1 suppresses the variation in the flow rate distribution of the paint flowing into the manifold in the width direction of the coating apparatus by making the pressure loss distribution in the branch portion uniform.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The applicant of the present application has found the following problems. The coating apparatus of Patent Document 1 cannot make the flow rate of the paint uniform in the width direction of the coating apparatus in the path from the manifold to the slit. Therefore, it is difficult for the coating apparatus of Patent Document 1 to make the film thickness of the coating film uniform in the width direction of the coating apparatus.

[0006] The present disclosure realizes a coating apparatus capable of making the film thickness of the coating film uniform in the width direction of the coating apparatus.

Means for Solving the Problems

[0007] A coating apparatus according to one aspect of the present disclosure is a coating apparatus for forming a coating film on a substrate, A slit die having a manifold for storing paint, a slit for discharging the paint, and a land positioned between the manifold and the slit to make the paint flowing out of the manifold laminar, A diffusion section arranged in the manifold, Equipped with, The diffusion section has a plurality of holes through which the paint passes, The plurality of holes equalize the flow rate of paint flowing from the manifold to the land in the width direction of the coating apparatus.

[0008] In the coating apparatus described above, the manifold is provided with an inlet into which the paint flows. It is preferable that the plurality of holes are arranged such that the opening ratio increases as they move away from the inlet.

[0009] In the coating apparatus described above, the diffusion section is a plate member in which the plurality of holes are formed, Preferably, the diffusion section is arranged so as it moves from the inlet towards the slit, it slopes toward the bottom of the manifold.

[0010] In the coating apparatus described above, the plurality of diffusion units are arranged at intervals from the inlet toward the slit, When viewed from the inlet toward the slit, it is preferable that the multiple pores in the diffusion section are arranged so as not to overlap. [Effects of the Invention]

[0011] According to this disclosure, a coating apparatus capable of making the film thickness uniform in the width direction of the coating apparatus can be realized. [Brief explanation of the drawing]

[0012] [Figure 1] This is a cross-sectional view showing a coating apparatus according to an embodiment. [Figure 2] It is a perspective view showing the first die of the coating apparatus of the embodiment. [Figure 3] It is a perspective view showing the shim of the coating apparatus of the embodiment. [Figure 4] It is a perspective view showing the second die of the coating apparatus of the embodiment. [Figure 5] It is a perspective view showing the first diffusion part and the second diffusion part of the coating apparatus of the embodiment.

Embodiments for Carrying Out the Invention

[0013] Hereinafter, specific embodiments to which the present disclosure is applied will be described in detail with reference to the drawings. However, the present disclosure is not limited to the following embodiments. Also, for clarity of explanation, the following description and drawings are simplified as appropriate.

[0014] First, the configuration of the coating apparatus 1 of the present embodiment will be described. FIG. 1 is a cross-sectional view showing the coating apparatus of the present embodiment. In the following description, for clarity of explanation, a three-dimensional (XYZ) coordinate system will be used.

[0015] Here, for example, the + side of the X-axis is the right side of the coating apparatus, the - side of the X-axis is the left side of the coating apparatus, the + side of the Y-axis is the front side of the coating apparatus, the - side of the Y-axis is the rear side of the coating apparatus, the + side of the Z-axis is the upper side of the coating apparatus, and the - side of the Z-axis is the lower side of the coating apparatus.

[0016] The coating apparatus 1 is suitable for forming a coating film of a slurry used for an electrode of a storage cell, which is a representative example of a paint P, on an electrode foil made of, for example, aluminum, which is a representative example of a base material. As shown in FIG. 1, the coating apparatus 1 includes a slit die 2, a first diffusion part 3, and a second diffusion part 4, and a slit 1a for discharging the paint P is disposed at the + side end of the coating apparatus 1 in the Y-axis direction. The slit 1a extends in the X-axis direction.

[0017] As shown in FIG. 1, the slit die 2 includes a first die 5, a shim 6, and a second die 7. FIG. 2 is a perspective view showing the first die of the coating apparatus of the present embodiment. As shown in FIGS. 1 and 2, the first die 5 is a block member extending in the X-axis direction and includes a manifold 5a and a land 5b.

[0018] The manifold 5a is a recessed portion for storing the paint P, and as shown in FIGS. 1 and 2, it is disposed on the + side surface of the first die 5 in the Z-axis direction. The manifold 5a is, for example, substantially semi-tear-drop shaped when viewed from the X-axis direction and extends in the X-axis direction.

[0019] That is, the - side surface in the Z-axis direction, which is the bottom surface of the manifold 5a, warps upward in the + side direction of the Z-axis as it goes toward the + side of the Y-axis as shown in FIG. 1. An inlet 5c through which the paint P flows in is disposed at the - side end of the manifold 5a in the Z-axis direction and also at the - side end in the Y-axis direction. The inlets 5c are, for example, arranged at intervals in the X-axis direction.

[0020] The land 5b is a recessed portion for making the paint P flowing in from the manifold 5a into a laminar flow, and as shown in FIG. 1, it is disposed between the manifold 5a and the slit 1a of the coating apparatus 1 in the Y-axis direction. The land 5b is disposed on the + side surface of the first die 5 in the Z-axis direction as shown in FIG. 2, and extends in the X-axis direction with a width dimension substantially equal to the width dimension of the manifold 5a in the X-axis direction.

[0021] The land 5b includes, for example, a rectifying portion 5d and a throttling portion 5e as shown in FIGS. 1 and 2. The - side end in the Y-axis direction on the - side surface of the rectifying portion 5d is continuous with the + side end in the Y-axis direction on the - side surface of the manifold 5a.

[0022] The rectifying portion 5d is, for example, substantially rectangular in shape and long in the Y-axis direction when viewed from the X-axis direction. The throttling portion 5e is, for example, substantially right-angled triangular in shape having a hypotenuse that slopes upward in the + side direction of the Z-axis as it goes toward the + side of the Y-axis at the + side end when viewed from the X-axis direction.

[0023] As shown in Figures 1 and 2, the Y-axis-side end of the constriction section 5e on the Z-axis-side surface is continuous with the Y-axis-+side end of the rectifier section 5d on the Z-axis-side surface, and the Y-axis-+side end of the constriction section 5e on the Z-axis-side surface is continuous with the Y-axis-side end of the slit 1a of the coating apparatus 1 on the Z-axis-side surface. The land 5b only needs to have a shape that can guide the paint P flowing in from the manifold 5a into the slit 1a of the coating apparatus 1 in a laminar flow.

[0024] Figure 3 is a perspective view showing the shim of the coating apparatus in this embodiment. As shown in Figure 3, the shim 6 is a substantially C-shaped plate member with the Y-axis+ side open when viewed from the Z-axis direction, and the Y-axis+ side open portion of the shim 6 constitutes the slit 1a of the coating apparatus 1. As shown in Figure 1, the shim 6 is placed on the Z-axis+ end of the first die 5 so as to surround the manifold 5a and land 5b of the first die 5 when viewed from the Z-axis direction.

[0025] Figure 4 is a perspective view showing the second die of the coating apparatus of this embodiment. As shown in Figure 4, the second die 7 is a block member extending in the X-axis direction, and for example, the Z-axis-side surface of the second die 7 is substantially flat. As shown in Figure 1, the second die 7 is positioned on the Z-axis+ side relative to the first die 5.

[0026] As shown in Figure 1, the second die 7 sandwiches the shim 6 between itself and the first die 5. In other words, the second die 7 covers the manifold 5a and land 5b of the first die 5, and the slit 1a of the coating apparatus 1 from the Z-axis + side.

[0027] The first diffusion section 3 and the second diffusion section 4 are arranged over substantially the entire area in the X-axis direction of the manifold 5a of the first die 5, as shown in Figure 1, in order to make the flow rate of the paint P flowing from the manifold 5a of the slit die 2 to the land 5b substantially uniform in the X-axis direction.

[0028] Figure 5 is a perspective view showing the first and second diffusion sections of the coating apparatus according to this embodiment. Note that in Figure 5, the shapes of the first and second diffusion sections are shown in a simplified manner, and the external shapes, pore shapes, arrangements, and sizes of the first and second diffusion sections are not accurately shown.

[0029] The first diffusion section 3 is, for example, a substantially rectangular plate member that is long in the X-axis direction, as shown in Figure 5, and is provided with a plurality of holes 3a. The holes 3a are arranged so that the flow rate of the paint P that flows into the manifold 5a from the inlet 5c of the first die 5 passes through the holes 3a and is made substantially uniform in the X-axis direction. The holes 3a are preferably arranged such that the opening ratio increases as they move away from the inlet 5c of the first die 5.

[0030] As shown in Figure 1, the second diffusion section 4 is positioned on the Y-axis+ side relative to the first diffusion section 3, and is positioned approximately parallel to the first diffusion section 3 with a gap between them when viewed from the X-axis direction. The second diffusion section 4 is, for example, a roughly rectangular plate member that is long in the X-axis direction, as shown in Figure 5, and is equipped with a plurality of holes 4a. The holes 4a are arranged so that when the paint P that has passed through the holes 3a of the first diffusion section 3 passes through the holes 4a, the flow rate of the paint P is made approximately uniform in the X-axis direction.

[0031] The holes 4a are preferably arranged such that the opening ratio increases as they move away from the inlet 5c of the first die 5. Also, the holes 4a are preferably arranged such that they do not substantially overlap with the holes 3a of the first diffusion section 3 when viewed from the thickness direction of the second diffusion section 4.

[0032] Furthermore, the holes 3a of the first diffusion section 3 and the holes 4a of the second diffusion section 4 should have a shape, size, and arrangement that can equalize the flow rate of the paint P flowing from the manifold 5a of the slit die 2 to the land 5b in the X-axis direction.

[0033] The first diffusion section 3 and the second diffusion section 4, whose detailed functions will be described later, are preferably arranged as shown in Figure 1 so as they move toward the Y-axis+ side, they are inclined toward the Z-axis- side, and toward the Y-axis+ side, so that the paint P that flows from the inlet 5c of the first die 5 into the manifold 5a flows toward the slit 1a of the coating apparatus 1. Here, the first diffusion section 3 and the second diffusion section 4 are preferably fixed to the manifold 5a of the first die 5 by welding means or mechanical fastening means such as bolts.

[0034] Next, the flow of paint P inside the slit die 2 in the coating apparatus 1 of this embodiment will be described. As the paint P flows from the inlet 5c of the first die 5 into the manifold 5a and passes through the holes 3a of the first diffusion section 3, the flow rate of the paint P is made substantially uniform in the X-axis direction.

[0035] Then, the paint P that has passed through the holes 3a of the first diffusion section 3 passes through the holes 4a of the second diffusion section 4, further homogenizing the flow rate of the paint P in the X-axis direction. At this time, the holes 4a of the second diffusion section 4 are arranged such that they do not substantially overlap with the holes 3a of the first diffusion section 3 when viewed from the thickness direction of the second diffusion section 4, so that the flow rate of the paint P can be subdivided and homogenized in the X-axis direction.

[0036] Furthermore, since the first diffusion section 3 and the second diffusion section 4 are arranged to be inclined toward the Z-axis side as they move toward the Y-axis+ side, a flow is generated toward the Z-axis+ side as it moves toward the Y-axis+ side, i.e., a flow guided to the slit 1a of the coating apparatus 1, which suppresses the accumulation of air bubbles in the Z-axis- side portion of the manifold 5a. As a result, it is possible to suppress the discharge of air bubbles together with the paint P and improve coating accuracy.

[0037] The paint P that has passed through the first diffusion section 3 and the second diffusion section 4 becomes turbulent and flows into the flow straightening section 5d of the land 5b in the first die 5. The paint P that has flowed into the flow straightening section 5d of the land 5b in the first die 5 becomes laminar and is discharged from the slit 1a of the coating apparatus 1 via the constricted section 5e of the land 5b and coated onto the substrate.

[0038] At this time, the flow rate of the paint P is made substantially uniform in the X-axis direction by the first diffusion section 3 and the second diffusion section 4, so that the film thickness of the coating can be made substantially uniform in the X-axis direction. In addition, the paint P is made into a laminar flow by the rectifier section 5d of the land 5b in the first die 5, so that the paint P is not discharged in a turbulent state, and thus the turbulence of the film thickness of the coating can be suppressed.

[0039] As described above, in this embodiment, the coating apparatus 1 has the flow rate of the paint P made substantially uniform in the X-axis direction by the first diffusion section 3 and the second diffusion section 4, so that the thickness of the coating film can be made substantially uniform in the X-axis direction.

[0040] Furthermore, in this embodiment, the coating apparatus 1 makes the paint P flow laminarly at the flow straightening section 5d of the land 5b in the first die 5, so that the discharge of the paint P in a turbulent state can be suppressed, and thus the turbulence of the film thickness of the coating can be suppressed.

[0041] Furthermore, in the coating apparatus 1 of this embodiment, if multiple diffusion units are provided, the flow rate of the paint P can be made substantially uniform in the X-axis direction.

[0042] Furthermore, in the coating apparatus 1 of this embodiment, if the first diffusion section 3 and the second diffusion section 4 are arranged to be inclined toward the Z-axis side as they move toward the Y-axis+ side, a flow toward the Z-axis+ side as it moves toward the Y-axis+ side is generated, i.e., a flow guided to the slit 1a of the coating apparatus 1 is generated, which can suppress the accumulation of air bubbles in the Z-axis- side portion of the manifold 5a. As a result, it is possible to suppress the discharge of air bubbles together with the paint P and improve coating accuracy.

[0043] Furthermore, in the coating apparatus 1 of this embodiment, if the holes 4a of the second diffusion section 4 are arranged so as not to substantially overlap with the holes 3a of the first diffusion section 3 when viewed from the thickness direction of the second diffusion section 4, the flow rate of the paint P can be subdivided in the X-axis direction and made substantially uniform.

[0044] Furthermore, the flow of paint P that has passed through the first diffusion section 3 can be prevented from being blocked by the second diffusion section 4, and the increase in the internal pressure of the manifold 5a of the first die 5 can be suppressed. Therefore, for example, when paint P is applied intermittently, the discharge of paint P due to the internal pressure of the manifold 5a of the first die 5 can be suppressed while the application of paint P is stopped.

[0045] In this embodiment, the coating apparatus 1 includes a first diffusion unit 3 and a second diffusion unit 4, but it is preferable to have at least one diffusion unit.

[0046] This disclosure is not limited to the embodiments described above, and may be modified as appropriate without departing from the spirit of the invention. [Explanation of Symbols]

[0047] 1 coating apparatus, 1a slit 2 Slit Dies 3 First diffusion section, 3a pore 4. Second diffusion section, 4a pores 5 First die, 5a Manifold, 5b Land, 5c Inlet, 5d Rectifier, 5e Restriction 6 Sims 7 The second die P paint

Claims

1. A coating apparatus for forming a coating film on a substrate, A slit die having a manifold for storing paint, a slit for discharging the paint, and a land positioned between the manifold and the slit to make the paint flowing out of the manifold laminar, A diffusion section arranged in the manifold, Equipped with, The diffusion section has a plurality of holes through which the paint passes, The plurality of holes in the coating apparatus equalize the flow rate of paint flowing from the manifold to the land in the width direction of the coating apparatus.

2. The manifold is provided with an inlet through which the paint flows in. The coating apparatus according to claim 1, wherein the plurality of holes are arranged such that the opening ratio increases as they move away from the inlet.

3. The diffusion portion is a plate member in which the plurality of holes are formed, The coating apparatus according to claim 2, wherein the diffusion section is arranged to be inclined toward the bottom of the manifold as it moves from the inlet toward the slit.

4. Multiple diffusion sections are arranged at intervals from the inlet toward the slit, The coating apparatus according to claim 3, wherein, when viewed from the inlet toward the slit, the multiple pores of the diffusion section are arranged so as not to overlap.

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