Method and apparatus for adjusting flow balance

Abstract

Provide a container. [Solution] Various embodiments of this technology may provide a vessel coupled to a first reaction chamber and a second reaction chamber via a first gas line and a second gas line. Each gas line may include a variable feature, each variable feature configured to change the flow state of the gas flowing through the gas line.

Description

Technical Field

[0001] The present disclosure generally relates to methods and apparatus for adjusting flow balance. More specifically, the present disclosure relates to adjusting the balance of gas flow from a container to a first reaction chamber and a second reaction chamber.

Background Art

[0002] Some semiconductor manufacturing systems have multiple reaction chambers coupled to a single chemical source via multiple gas lines. The flow conditions within each gas line can vary, which leads to process discrepancies between the various reaction chambers.

Summary of the Invention

Means for Solving the Problems

[0003] Various embodiments of the present technology may each provide a container coupled to a first reaction chamber and a second reaction chamber via a first gas line and a second gas line. Each gas line may have a variable feature, and each variable feature is configured to change the flow conditions of the gas flowing through the gas line.

[0004] According to one aspect, the apparatus includes a container, a first reaction chamber fluidly coupled to the container via a first gas line, the first gas line including a first feature formed from a material that allows it to have a varying size, a second reaction chamber fluidly coupled to the container via a second gas line, the second gas line including a second feature formed from a material that allows it to have a varying size.

[0005] In one embodiment, each of the first and second features includes a restrictor having an aperture with a diameter formed from a metallic material, and the diameter of the aperture varies according to temperature.

[0006] In one embodiment, the device further comprises a first heating element arranged adjacent to a first characteristic part and a second heating element arranged adjacent to a second characteristic part.

[0007] In one embodiment, the device further includes a controller that communicates with the first and second heating elements, and the controller is configured to operate the first heating element independently of the second heating element.

[0008] In one embodiment, each of the first and second feature portions comprises a pipe portion having at least one of a compressible and expandable length and a compressible and expandable diameter.

[0009] In another embodiment, the apparatus comprises a container, a first reaction chamber fluidly coupled to the container via a first gas line, the first reaction chamber having a first flexible membrane coupled to a first end of a tube, and a second reaction chamber fluidly coupled to the container via a second gas line, the second reaction chamber having a second flexible membrane coupled to a second end of a tube.

[0010] In one embodiment, the tube contains an incompressible fluid within its internal volume.

[0011] In one embodiment, the first flexible membrane is located within the side wall of the first gas line, and the second flexible membrane is located within the side wall of the second gas line.

[0012] In one embodiment, the device further comprises a first valve along a first gas line and a second valve along a second gas line.

[0013] In one embodiment, the first and second valves are located upstream of the first and second flexible membranes.

[0014] In yet another embodiment, the apparatus comprises a container, a first reaction chamber fluidly coupled to the container via a first gas line, a second reaction chamber fluidly coupled to the container via a second gas line, a first variable feature unit located in the first gas line, and a second variable feature unit located in the second gas line, each of the first and second variable feature units configured to alter the flow state of the gas flowing through their respective gas lines.

[0015] In one embodiment, the apparatus further comprises a first pressure sensor disposed between a first variable feature unit and a first reaction chamber, and a second pressure sensor disposed between a second variable feature unit and a second reaction chamber.

[0016] In one embodiment, the first variable feature portion has a first flexible membrane disposed within the side wall of the first gas line, and the second variable feature portion has a second flexible membrane disposed within the side wall of the second gas line.

[0017] In one embodiment, the apparatus further comprises a tube having a first end bonded to a first flexible membrane and a second end bonded to a second flexible membrane.

[0018] In one embodiment, the tube contains an incompressible fluid within its internal volume.

[0019] In one embodiment, the device further comprises a first valve along a first gas line and a second valve along a second gas line, wherein the first and second valves are located upstream of the first and second flexible membranes.

[0020] In one embodiment, each of the first and second variable feature portions comprises a pipe portion having at least one of a compressible and expandable length and a compressible and expandable diameter.

[0021] In one embodiment, each of the first and second variable feature sections includes a limiter having an opening with a diameter formed from a metallic material, the diameter of which changes with temperature.

[0022] In one embodiment, the apparatus further includes a first heating element disposed adjacent to the first variable feature and a second heating element disposed adjacent to the second variable feature.

[0023] In one embodiment, the apparatus further includes a controller that communicates with the first and second heating elements, and the controller is configured to operate the first heating element independently of the second heating element.

[0024] The present technology can be more fully understood by reference to the detailed description in connection with the following exemplary drawings. In the following figures, like reference numerals are assigned to like elements and processes throughout the figures.

Brief Description of the Drawings

[0025] [Figure 1] It is a schematic diagram of a system according to an embodiment of the present technology. [Figure 2] It is a partial schematic diagram of a system according to an embodiment of the present technology. [Figure 3] It is a partial schematic diagram of a system according to an embodiment of the present technology. [Figure 4] It is a partial schematic diagram of a system according to an embodiment of the present technology. [Figure 5] It is a partial schematic diagram of a system according to an embodiment of the present technology.

Modes for Carrying Out the Invention

[0026] The present technology can be described from the perspective of the components of functional blocks and various processing steps. Such functional blocks can be realized by any number of components configured to perform a specific function and achieve various results. For example, in the present technology, various gas lines, valves, controllers, reaction chambers, containers, and susceptors can be used.

[0027] Referring to Figure 1, the exemplary system 100 may comprise a first reaction chamber 110(a) and a second reaction chamber 110(b), each reaction chamber configured to perform a process on an object to be processed, such as a substrate (e.g., a wafer). For example, each reaction chamber 110(a), 110(b) may be configured to perform heating, deposition, etching, polishing, ion implantation, and / or other processes on the object to be processed. In some embodiments, the reaction chambers 110(a), 110(b) may be configured to perform a transfer function, a vacuum sealing function, and an evacuation function. In some embodiments, the reaction chambers 110(a), 110(b) may perform various semiconductor manufacturing processes, such as atomic layer deposition (ALD) or chemical vapor deposition (CVD).

[0028] In various embodiments, system 100 may further comprise a substrate mounting unit (not shown) located in the reaction chamber. The substrate mounting unit may comprise a susceptor for supporting a substrate and a heater for heating the substrate supported by the susceptor. The heater may be embedded within the susceptor. The substrate mounting unit may further comprise a pedestal for supporting the susceptor. For loading / unloading substrates, the substrate mounting unit may be configured to be vertically (up and down) movable by being connected to a drive unit (not shown).

[0029] In various embodiments, system 100 may further comprise a gas distribution system for delivering vapor to reaction chambers 110(a) and 110(b). In exemplary embodiments, the gas distribution system may comprise a plurality of gas lines, such as a first gas line 135(a) and a second gas line 135(b). The first gas line 135(a) and the second gas line 135(b) may be coupled to a main gas line 160. Furthermore, the first gas line 135(a) may be directly coupled to the first reaction chamber 110(a), and the second gas line 135(b) may be coupled to the second reaction chamber 110(b).

[0030] In various embodiments, system 100 may further comprise a container 105 configured to contain a chemical substance (i.e., a precursor). Container 105 may be configured to hold a solid or liquid chemical substance, and may be further configured to convert a solid or liquid into vapor. Container 105 may be coupled to a gas distribution system to allow vapor to flow from container 105 to reaction chambers 110(a) and 110(b). In exemplary embodiments, the gas distribution system may be configured to flow vapor equally to the first reaction chamber 110(a) and the second reaction chamber 110(b). For example, a main gas line 160 may be directly coupled to container 105 to supply vapor to reaction chambers 110(a) and 110(b) via a first gas line 135(a) and a second gas line 135(b), respectively.

[0031] In various embodiments, the system 100 may further comprise a plurality of variable feature units, such as a first variable feature unit 115(a) and a second variable feature unit 115(b). The variable feature units may be configured to alter the flow state of the vapor / gas flowing through the gas distribution system. For example, in various embodiments, the first variable feature unit 115(a) and the second variable feature unit 115(b) may be located within a first gas line 135(a) and a second gas line 135(b), respectively.

[0032] In one embodiment, referring to Figure 2, the first variable feature portion 115(a) may comprise a first flexible membrane 205(a) located within the side wall of the first gas line 135(a), and the second variable feature portion 115(b) may comprise a second flexible membrane 205(b) located within the side wall of the second gas line 135(b). In this embodiment, the system 100 may further comprise a pipe 200 having a first end 210 coupled to the first flexible membrane 205(a) and a second end 215 coupled to the second flexible membrane 205(b). The pipe 200 may contain, within its internal volume, an incompressible fluid (i.e., a fluid whose volume or density does not change with pressure), water, oil, hydraulic fluid, or similar.

[0033] In another embodiment, referring to Figure 3, the first variable feature section 115(a) may include a first limiter 300(a), and the second variable feature section 115(b) may include a second limiter 300(b). The first limiter 300(a) and the second limiter 300(b) may be formed from a thermally expandable metallic material, such as stainless steel or a metal alloy (e.g., Hastelloy). Each limiter 300(a), 300(b) may have its own opening, such as a first opening 310(a) and a second opening 310(b), each opening having a diameter. This embodiment may further include heating elements, such as a second heating element 305(a) positioned on and / or adjacent to the first limiter 300(a), and a second heating element 305(b) positioned on and / or adjacent to the second limiter 300(b). The first heating element 305(a) and the second heating element 305(b) may comprise any suitable heating device, such as a resistance heating element, a heating coil, or similar. When heated, the first limiter 300(a) and the second limiter 300(b) expand, and thus the diameters of their respective openings 310(a) and 310(b) can be expanded.

[0034] In another embodiment, and referring to Figure 4, each variable feature section 115(a), 115(b) may comprise a pipe portion having a compressible and / or expandable length. The pipe portion may also have a compressible and / or expandable diameter. For example, the first variable feature section 115(a) may comprise a first pipe portion 400(a) formed from an elastic material or other material that allows expansion and contraction. For example, the first pipe portion 400(a) may include plastic (e.g., polyethylene), metal mesh, or the like. The first pipe portion 400(a) may further comprise a first coil spring 415(a) embedded within the first pipe portion 400(a) or positioned on the inner surface of the first pipe portion 400(a). Similarly, the second variable feature portion 115(b) may comprise a second pipe portion 400(b) formed from an elastic material or other material that allows expansion and contraction. For example, the second pipe portion 400(b) may include plastic (e.g., polyethylene), metal mesh, or the like. The second pipe portion 400(b) may further comprise a second coil spring 415(b) embedded within the second pipe portion 400(b) or positioned on the inner surface of the second pipe portion 400(b).

[0035] In this embodiment, system 100 may further include clamping devices for providing compressive force to the coil spring. For example, system 100 may include a first clamping device 405(a) positioned on or adjacent to the end of the first pipe portion 400(a) to reduce the length of the first pipe portion 400(a). System 100 may further include a second clamping device 405(b) positioned on or adjacent to the end of the second pipe portion 400(b) to reduce the length of the second pipe portion 400(b).

[0036] Similarly, referring to Figure 5, the first variable feature section 115(a) may comprise a first bladder 500(a) that can be retracted and expanded by a mounted first actuator 505(a). The second variable feature section 115(b) may comprise a second bladder 500(b) that can be retracted and expanded by a mounted second actuator 505(b). The first and second bladders may be formed from a plastic material. The actuator may comprise any preferred type of actuator that can compress the bladder.

[0037] In various embodiments, and again referring to Figure 1, the system 100 may further comprise a plurality of valves, such as a first valve 120(a) and a second valve 120(b). The first valve 120(a) may be located along the first gas line 135(a) and upstream of the first variable feature 115(a). The second valve 120(b) may be located along the second gas line 135(b) and upstream of the second variable feature 115(b).

[0038] In various embodiments, system 100 may further comprise a plurality of sensors for measuring the pressure and / or gas flow parameters (e.g., conductance) of a gas flowing through a gas line. For example, the plurality of sensors may include pressure sensors, flow meters, or similar. In an exemplary embodiment, system 100 may comprise a first sensor 125(a) positioned between a first variable feature unit 115(a) and a first reaction chamber 110(a) for measuring the pressure and / or conductance of a gas in a first gas line 135(a). System 100 may further comprise a second sensor 125(b) positioned between a second variable feature unit 115(b) and a second reaction chamber 110(b) for measuring the pressure and / or conductance of a gas in a second gas line 135(b). Furthermore, the system 100 may include a third sensor 150 positioned between the container 105 and the first variable feature section 115(a) and the second variable feature section 115(b) to measure the pressure and / or conductance of the gas / vapor in the main gas line 160 before it enters the first gas line 135(a) and the second gas line 135(b).

[0039] In various embodiments, the system 100 may further include a controller 155 configured to receive and transmit signals. For example, the controller 155 may receive output signals from a first sensor 125(a), a second sensor 125(b), and / or a third sensor 150, the output signals indicating the measured pressure or conductance of each sensor. In various embodiments, the controller 155 may transmit control signals to a first variable feature unit 115(a) and a second variable feature unit 115(b). For example, the controller 155 may transmit control signals to a first heating element 305(a) and a second heating element 305(b) to cause the heating elements to operate independently of each other. In another embodiment, the controller 155 can transmit control signals to each of the first clamping device 405(a) and the second clamping device 405(b) to contract the respective coil springs 415(a) and 415(b), and thus reduce the length of the first pipe section 400(a) and the second pipe section 400(b).

[0040] During operation, and with reference to Figures 1 to 4, the first variable feature section 115(a) and the second variable feature section 115(b) can alter the flow state of the gas flowing through the first gas line 135(a) and the second gas line 135(b) in order to maintain the same flow / pressure downstream of the first variable feature section 115(a) and the second variable feature section 115(b), in particular, the same flow / pressure to the reaction chambers 110(a) and 110(b). For example, in the embodiment of Figure 2, as the flow and / or pressure in the first gas line 135(a) and the second gas line 135(b), downstream of the first variable feature section 115(a) and the second variable feature section 115(b), changes, the pressure on the flexible membrane changes, and therefore they are pushed out, resulting in a change in flow resistance. The change in flow resistance eventually leads to equilibrium where both the first gas line 135(a) and the second gas line 135(b) have the same static pressure and therefore the same flow rate.

[0041] In the embodiment shown in Figure 3, the controller 155 may transmit signals to the first heating element 305(a) and the second heating element 305(b) to increase the temperatures of the first limiter 300(a) and the second limiter 300(b). As the limiters are heated, the diameters of the openings 310(a) and 310(b) increase, and therefore the flow through the limiters increases. The controller 155 may operate the heating elements independently of each other so that the opening of one limiter is larger than the opening of the other limiter. The first sensor 125(a) and the second sensor 125(b) may provide the controller 155 with continuous or periodic pressure data feedback, and the controller 155 may respond dynamically to the pressure data to ensure that the pressure / flow rate downstream from the first limiter 300(a) and the second limiter 300(b) into the reaction chambers 110(a) and 110(b) is substantially equal. For example, if the pressure is high in one gas line, the controller 155 may activate a heating element to raise the temperature of one limiter. Alternatively, the controller 155 may raise the temperature of one heating element and lower the temperature of the other heating element to equalize the pressure in both gas lines.

[0042] In the embodiment shown in Figure 4, the controller 155 can transmit signals to the first clamping device 405(a) and the second clamping device 405(b) to act on and apply force to the respective coil springs 415(a) and 415(b), thereby shortening the lengths of the first pipe section 400(a) and the second pipe section 400(b). As the first and second pipe sections 400(a) and 400(b) are shortened (or lengthened), the pressure and flow conditions change, and as a result, the first and second pipe sections 400(a) and 400(b) may each have different flow or pressure readings. The controller 155 can operate the first clamping device 405(a) and the second clamping device 405(b) independently of each other so that one pipe section may be shorter than the other pipe section. The first and second sensors 125(a) and 125(b) may provide the controller 155 with continuous or periodic pressure data feedback, which the controller 155 can dynamically respond to the pressure data to ensure that the pressure / flow rates downstream from the first pipe section 400(a) and the second pipe section 400(b) into the reaction chambers 110(a) and 110(b) are substantially equal. For example, if the pressure is high in one gas line, the controller 155 may reduce the pressure in that particular gas line by operating a clamping device to lengthen its pipe section and equalize the pressure / flow in both gas lines. Alternatively, the controller 155 may increase the pressure / flow in one gas line and decrease the pressure / flow in the other gas line to equalize the pressure in both.

[0043] In the foregoing description, the technology is explained with reference to specific exemplary embodiments. Specific embodiments illustrated and described are illustrative of the technology and its best form, and are not intended to limit the scope of the technology. Furthermore, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the method and system may not be described in detail. Additionally, connection lines shown in various figures are intended to represent exemplary functional relationships and / or processes between various elements. Many alternative or additional functional relationships or physical connections may exist in actual systems.

[0044] This technology is described with reference to specific exemplary embodiments. However, various modifications and variations can be made without departing from the scope of this technology. This description and drawings are not restrictive but are considered illustrative, and any such modifications are intended to be included within the scope of this technology. Accordingly, the scope of this technology should be determined not merely by the specific embodiments described above, but by the general embodiments described and their legal equivalents. For example, the steps described in one embodiment of a method or process may be performed in any order unless otherwise expressly specified, and are not limited to the express order presented in a particular embodiment. Furthermore, components and / or elements described in one embodiment of any apparatus may be assembled or configured to operate in various ways to produce substantially the same results as in this technology, and are not limited to the specific configurations described in a particular embodiment.

[0045] Benefits, other advantages, and solutions to challenges are described above with reference to specific embodiments. Any element that may produce or enhance any benefit, advantage, solution to a challenge, or any particular benefit, advantage, or solution is not construed as an important, required, or essential feature or component.

[0046] The terms “comprises,” “comprising,” or any variation thereof, are intended to mean non-exclusive inclusion, and that a process, method, article, composition, or apparatus comprising the listed elements may include not only those elements listed, but also other elements not expressly listed or specific to such process, method, article, composition, or apparatus. In addition to those not specifically listed, other combinations and / or modifications of the above-mentioned structures, arrangements, uses, proportions, elements, materials, or components used in the practice of this art may be modified or otherwise specifically adapted to specific environments, manufacturing specifications, design parameters, or other operating requirements without deviation from their general principles.

[0047] The technology described above is based on exemplary embodiments. However, the exemplary embodiments may be modified and altered without departing from the scope of the technology. These and other modifications are intended to be within the scope of the technology as described in the claims set forth below.

Claims

1. Container and A first reaction chamber fluidly coupled to the container via a first gas line, wherein the first gas line comprises a first feature portion formed from a material that allows for a changing size, An apparatus comprising: a second reaction chamber fluidly coupled to the container via a second gas line, wherein the second gas line comprises a second feature portion formed of a material that allows it to have a variable size;

2. The apparatus according to claim 1, wherein each of the first and second feature parts comprises a limiter having an opening of a certain diameter formed from a metal material, the diameter of the opening changes with temperature.

3. The apparatus according to claim 1, further comprising a first heating element disposed adjacent to the first characteristic portion and a second heating element disposed adjacent to the second characteristic portion.

4. The apparatus according to claim 3, further comprising a controller communicating with the first heating element and the second heating element, wherein the controller is configured to operate the first heating element independently of the second heating element.

5. The apparatus according to claim 1, wherein each of the first and second feature portions comprises a pipe portion having at least one of a compressible and expandable length and a compressible and expandable diameter.

6. Container and A first reaction chamber fluidly coupled to the container via a first gas line, wherein the first gas line has a first flexible membrane coupled to a first end of a tube, and the first reaction chamber An apparatus comprising: a second reaction chamber fluidly coupled to the container via a second gas line, wherein the second gas line has a second flexible membrane coupled to the second end of the pipe;

7. The apparatus according to claim 6, wherein the pipe has an incompressible fluid within its internal volume.

8. The apparatus according to claim 6, wherein the first flexible membrane is disposed within the side wall of the first gas line, and the second flexible membrane is disposed within the side wall of the second gas line.

9. A first valve along the first gas line, The apparatus according to claim 6, further comprising a second valve along the second gas line.

10. The apparatus according to claim 9, wherein the first valve and the second valve are located upstream of the first flexible membrane and the second flexible membrane.

11. Container and A first reaction chamber fluidly coupled to the container via a first gas line, A second reaction chamber is fluidly coupled to the container via a second gas line, A first variable feature unit is disposed within the first gas line, The system comprises a second variable feature section located within the second gas line, An apparatus wherein each of the first variable feature unit and the second variable feature unit is configured to change the flow state of the gas flowing through each of the gas lines.

12. A first pressure sensor is disposed between the first variable feature unit and the first reaction chamber, The apparatus according to claim 11, further comprising a second pressure sensor disposed between the second variable feature unit and the second reaction chamber.

13. The apparatus according to claim 11, wherein the first variable feature portion has a first flexible membrane disposed within the side wall of the first gas line, and the second variable feature portion has a second flexible membrane disposed within the side wall of the second gas line.

14. The apparatus according to claim 13, further comprising a tube having a first end bonded to the first flexible membrane and a second end bonded to the second flexible membrane.

15. The apparatus according to claim 14, wherein the pipe contains an incompressible fluid within the internal volume of the pipe.

16. A first valve along the first gas line, The present invention further comprises a second valve along the second gas line, The apparatus according to claim 14, wherein the first valve and the second valve are located upstream of the first and second flexible membranes.

17. The apparatus according to claim 11, wherein each of the first variable feature portion and the second variable feature portion further comprises a pipe portion having at least one of a compressible and expandable length and a compressible and expandable diameter.

18. The apparatus according to claim 11, wherein each of the first variable feature portion and the second variable feature portion comprises a limiter having an opening having a diameter formed from a metallic material, the diameter of the opening changes according to temperature.

19. The apparatus according to claim 18, further comprising a first heating element disposed adjacent to the first variable feature portion and a second heating element disposed adjacent to the second variable feature portion.

20. The apparatus according to claim 19, further comprising a controller communicating with the first heating element and the second heating element, wherein the controller is configured to operate the first heating element independently of the second heating element.

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