Management device, communication system, management method, and program

Abstract

The present invention provides a management device that can suppress interference between radio waves of nearby wireless communication and radio waves of other wireless communication. [Solution] The AMHS control management server 10 (management device) includes a determination unit 12 that determines whether or not another wireless communication, different from the proximity wireless communication, has created a radio wave condition that affects the proximity wireless communication, based on the results of monitoring the radio wave condition on the channel used for the proximity wireless communication, and a change unit 13 that, if it is determined that the other wireless communication has created a radio wave condition that affects the proximity wireless communication, changes the channel used for the proximity wireless communication to a channel different from the channel currently used for the proximity wireless communication. The other wireless communication is for the management of the operation of equipment equipped with communication devices and has a higher radio wave output value than the proximity wireless communication.

Description

Technical Field

[0001] The present invention relates to a management device, a communication system, a management method, and a program.

Background Art

[0002] Patent Document 1 describes that the usage situation of radio frequencies in the installation environment is investigated in advance, and an available frequency is set as a communication channel.

[0003] Further, Patent Document 2 describes that when it is detected that a wireless slave device such as a smartphone or a tablet approaches, without requiring the user's operation, the wireless slave device is forcibly set to a state where it does not belong to any other access point, and the operation of making the wireless slave device belong to its own access point is automatically performed, and an access point with an automatic connection function that can automatically transfer the wireless slave device to a state where communication with its own access point is possible is described. Patent Document 2 describes a technique that can generally automatically transfer to a state where a wireless slave device can communicate with an access point.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] In a communication system where a mobile device and equipment perform proximity wireless communication, and the equipment also performs wireless communication other than proximity wireless communication, if, for example, an access point like the one in Patent Document 2 exists for other wireless communication, the transmission signal strength of the frequency range (channel) used may be dynamically changed, or the channel itself may be changed. In this case, if the radio waves of the channel used for the pre-set proximity wireless communication overlap with the radio waves of the frequency range (channel) used for the other wireless communication, and furthermore, if the signal strength of the other wireless communication is greater than the signal strength of the proximity wireless communication, there is a problem that interference will occur in the proximity wireless communication.

[0006] The present invention was made to solve the above problems and aims to provide a management device, etc., that can suppress interference between radio waves of nearby wireless communication and radio waves of other wireless communication. [Means for solving the problem]

[0007] To solve the above problems, a management device according to one aspect of the present invention is a management device for managing a mobile body and a communication device that performs proximity wireless communication with the mobile body, comprising: a determination unit that determines, based on the results of monitoring the radio wave conditions on the channel used for the proximity wireless communication, whether or not another wireless communication different from the proximity wireless communication has created radio wave conditions that affect the proximity wireless communication; and a modification unit that, if it is determined that the other wireless communication has created radio wave conditions that affect the proximity wireless communication, changes the channel used for the proximity wireless communication to a channel different from the channel currently used for the proximity wireless communication, wherein the other wireless communication is for the management of the operation of the equipment equipped with the communication device and has a higher radio wave output value than the proximity wireless communication.

[0008] While pre-use radio wave condition checks (so-called site surveys) are performed on the channels to be used, ensuring that the channels used for nearby wireless communication are set to be different from those used by other wireless communication services, the radio wave output strength or the channels themselves used by other wireless communication services may dynamically change thereafter, potentially causing interference between the radio waves used for nearby wireless communication and those of other wireless communication services. In contrast, the present invention continuously monitors the radio wave conditions on the channels used for nearby wireless communication, allowing for constant confirmation of whether other wireless communication services are using those channels. Therefore, if other wireless communication services cause interference to those channels, it can be determined that the channels used by other wireless communication services have changed from the conditions confirmed by site surveys, and the channels used for nearby wireless communication can be changed to channels different from those currently in use. Thus, interference between the radio waves used for nearby wireless communication and those of other wireless communication services can be suppressed.

[0009] Furthermore, the determination unit may determine that the radio wave conditions have become such that other wireless communications are affecting the nearby wireless communications if the monitoring result indicates that the received radio wave intensity on the channel used for the nearby wireless communications is equal to or greater than a predetermined value.

[0010] According to this, if the received signal strength of a radio wave on a channel used for nearby wireless communication exceeds a predetermined value, it can be presumed that another wireless communication is using that channel, and therefore it can be determined that the channel of the other wireless communication is affecting the nearby wireless communication.

[0011] Furthermore, if the modified unit determines that the radio wave conditions of the other wireless communication are affecting the proximity wireless communication, it may change the channel used for the proximity wireless communication to a channel different from the channel currently used for the proximity wireless communication, and also different from the channel used for the proximity wireless communication conducted by communication devices provided by equipment surrounding the equipment.

[0012] According to this method, interference can be suppressed not only with radio waves from other wireless communications, but also with radio waves from nearby wireless communications conducted by communication devices in surrounding equipment.

[0013] Furthermore, the modification unit may change the channel used for the proximity wireless communication by notifying the mobile device of the modified channel used for the proximity wireless communication, and the mobile device notifying the communication device of the modified channel used for the proximity wireless communication.

[0014] According to this, the management device notifies the mobile unit of the changed channel used for proximity wireless communication, and the mobile unit then notifies the equipment, enabling the mobile unit and communication device to communicate via proximity wireless communication using the changed channel.

[0015] To solve the above problems, a management method according to one aspect of the present invention is a management method performed by a management device that manages a mobile body and a communication device that performs proximity wireless communication with the mobile body, and includes a determination step of determining whether another wireless communication different from the proximity wireless communication has created a radio wave condition that affects the proximity wireless communication, based on the results of monitoring the radio wave condition on the channel used for the proximity wireless communication, and a change step of changing the channel used for the proximity wireless communication to a channel different from the channel currently used for the proximity wireless communication, wherein the other wireless communication is for the management of the operation of equipment equipped with the communication device and has a radio wave output value greater than that of the proximity wireless communication.

[0016] This provides a management method that can suppress interference between radio waves of nearby wireless communication and radio waves of other wireless communication.

[0017] To solve the above problems, a program according to one aspect of the present invention is a program that causes a computer to execute the above-described management method.

[0018] According to this, it is possible to provide a program that can suppress interference between radio waves of nearby wireless communication and radio waves of other wireless communication.

[0019] To solve the above problems, a communication system according to one aspect of the present invention comprises a mobile body, equipment equipped with a communication device that performs proximity wireless communication with the mobile body, and a management device that manages the mobile body and the communication device, wherein the communication device monitors the radio wave conditions on the channel used for the proximity wireless communication, and the management device determines, based on the results of the monitoring, whether another wireless communication different from the proximity wireless communication has created radio wave conditions that affect the proximity wireless communication, and if it determines that the other wireless communication has created radio wave conditions that affect the proximity wireless communication, it changes the channel used for the proximity wireless communication to a channel different from the channel currently used for the proximity wireless communication, wherein the other wireless communication is for management related to the operation of the equipment equipped with the communication device and has a higher radio wave output value than the proximity wireless communication.

[0020] According to this, it is possible to provide a communication system that can suppress interference between radio waves of nearby wireless communication and radio waves of other wireless communication.

[0021] Furthermore, the communication device may monitor whether the received signal strength of the radio waves in the channel used for the proximity wireless communication is above a predetermined value.

[0022] According to this, if the received signal strength of a radio wave on a channel used for nearby wireless communication exceeds a predetermined value, it can be presumed that another wireless communication is using that channel, and therefore it can be determined that the channel of the other wireless communication is affecting the nearby wireless communication.

[0023] Furthermore, the communication device may monitor the radio wave conditions on the channel used for the proximity wireless communication when the proximity wireless communication is not being performed.

[0024] According to this, when monitoring is performed when the proximity wireless communication is not being performed, it becomes easier to check the usage status of other wireless communications on the channels used in the proximity wireless communication.

[0025] Further, the proximity wireless communication is communication using a frequency hopping method, and the communication device may monitor the radio wave status in one of a plurality of channels switched by frequency hopping included in a channel group.

[0026] In communication using a frequency hopping method, since the channels used for communication are switched in a short time, when focusing on one of the plurality of switched channels, usually, the reception intensity of radio waves only increases at the timing when the channel is selected, and the reception intensity of radio waves decreases at the timing when the channel is not selected. However, when radio waves with a reception intensity of a certain level or more are always received in the channel being focused on, it can be estimated that other wireless communication is being used. For this reason, even when monitoring is performed when the proximity wireless communication is being performed, it can be determined that the channel of other wireless communication has been changed.

[0027] In order to solve the above problems, a management method according to an aspect of the present invention is a management method executed by a communication system including a mobile body, a facility including a communication device that performs proximity wireless communication with the mobile body, and a management device that manages the mobile body and the communication device, including a monitoring step of monitoring the radio wave state in the channel used in the proximity wireless communication, a determination step of determining, based on the result of the monitoring, whether or not other wireless communication different from the proximity wireless communication has reached a radio wave state that affects the proximity wireless communication, and a change step of changing the channel used in the proximity wireless communication to a channel different from the channel currently used in the proximity wireless communication when it is determined that the other wireless communication has reached a radio wave state that affects the proximity wireless communication, wherein the other wireless communication is for management related to the operation of the facility including the communication device and has a larger radio wave output value than the proximity wireless communication.

[0028] This provides a management method that can suppress interference between radio waves of nearby wireless communication and radio waves of other wireless communication. [Effects of the Invention]

[0029] The present invention makes it possible to suppress interference between radio waves of nearby wireless communication and radio waves of other wireless communication. [Brief explanation of the drawing]

[0030] [Figure 1] This figure shows an overview of an example communication system according to an embodiment. [Figure 2A] This diagram shows the relationship between wireless LAN communication channels and proximity wireless communication channel groups. [Figure 2B] This diagram shows the relationship between wireless LAN communication channels and proximity wireless communication channel groups. [Figure 2C] This diagram shows the relationship between wireless LAN communication channels and proximity wireless communication channel groups. [Figure 3] This is a diagram illustrating the results of the pre-site survey. [Figure 4] This is a block diagram showing an example of the configuration of an AMHS control management server according to an embodiment. [Figure 5] This figure shows an example of a wireless LAN signal status management file. [Figure 6] This figure shows an example of transport cart MAP information. [Figure 7] This is a sequence diagram showing an example of wireless LAN signal strength monitoring and data transfer processing. [Figure 8] This is a sequence diagram showing an example of the process for transferring information indicating changes in the Wi-Fi signal strength. [Figure 9] This diagram shows information indicating changes in the wireless LAN radio wave status transmitted from the transport cart to the AMHS control management server. [Figure 10] This figure shows an example of a wireless LAN signal strength management file with updated site survey results. [Figure 11]This figure shows an example of a management cell targeted for channel group changes in proximity wireless communication, and surrounding management cells that are subject to verification. [Figure 12] This figure shows an example of a wireless LAN signal status management file with updated channel groups scheduled for change. [Figure 13] This sequence diagram shows an example of the process for changing channel groups in transport trolley MAP information. [Figure 14] This figure shows an example of transport cart MAP information with updated channel groups scheduled for change. [Figure 15] This sequence diagram shows an example of channel group modification and configuration processes in a communication device of a piece of equipment. [Figure 16] This figure shows an example of the progress in which a portion of the channel group of the transport cart MAP information is updated. [Figure 17] This is a sequence diagram showing an example of the process for updating a wireless LAN signal status management file. [Figure 18] This figure shows an example of a wireless LAN signal status management file in which part of the channel group has been updated. [Figure 19] This flowchart shows an example of a management method executed by a management device according to another embodiment. [Figure 20] This flowchart shows an example of a management method performed by a communication system according to another embodiment. [Modes for carrying out the invention]

[0031] The embodiments will be described in detail below with reference to the drawings.

[0032] The embodiments described below are all preferred examples of the present invention. The numerical values, shapes, materials, components, arrangement and connection configurations of components, steps, and the order of steps shown in the following embodiments are examples only and are not intended to limit the present invention. Furthermore, components in the following embodiments that are not described in an independent claim are described as any component that constitutes a more preferred form. Note that the same reference numerals are used for the same components, and their descriptions may be omitted.

[0033] (Embodiment) The embodiments will be described below with reference to Figures 1 to 18.

[0034] Figure 1 is a diagram showing an overview of an example of a communication system according to an embodiment.

[0035] Communication system 1 is a system comprising a mobile body, equipment equipped with a communication device for communicating wirelessly with the mobile body, and a management device for managing the mobile body and the communication device. For example, communication system 1 is a system for transferring transported materials, and Figure 1 shows a transport cart 20 as the mobile body, a semiconductor manufacturing apparatus 30 as the equipment, and an AMHS (Automated Material Handling System) control management server 10 as the management device. For example, communication system 1 comprises multiple transport carts 20 and multiple semiconductor manufacturing apparatuses 30, and uses multiple transport carts 20 to transfer transported materials to multiple semiconductor manufacturing apparatuses 30.

[0036] For example, semiconductor manufacturing equipment 30 is equipment for processing semiconductor wafers and is equipped with a mounting port 32 on which a FOUP (Front Opening Unified Pod) containing a semiconductor wafer is placed. A FOUP is an example of a transported object.

[0037] The mounting port 32 transfers the FOUP to and from the transport trolley 20. Here, for example, four mounting ports 32 and four communication devices 31 are provided for one semiconductor manufacturing apparatus 30, and each mounting port 32 is connected one-to-one with one communication device 31.

[0038] The transport trolley 20 is a trolley that transfers the FOUP between the loading port 32 and the transport trolley track, and is equipped with a gripping part (not shown) inside for gripping the FOUP. The gripping part is, for example, provided to be able to move up and down, and is lowered to the vicinity of the loading port 32 when transferring the FOUP between the loading port 32 and the transport port 32.

[0039] The communication device 31 is provided in the semiconductor manufacturing apparatus 30 and is a communication device that mediates the transmission and reception of signals, specifically signals (e.g., packets) related to interlock processing, which are transmitted and received by proximity wireless communication for the purpose of transferring transported objects between the mounting port 32 and the transport cart 20. Proximity wireless communication is, for example, SEMI standard E84 interlock communication. Interlock processing is a process that prevents other operations from being performed unless certain conditions are met. By performing interlock processing in the communication system 1, when transferring a FOUP from the transport cart 20 to the mounting port 32, the process will not proceed to the next step unless certain conditions are met. The specific conditions are, for example, that a specific transport cart 20 sends a signal containing an instruction (interlock processing execution command) to confirm whether it is currently in a state to transfer the FOUP to a specific mounting port 32, and receives a signal from the specific mounting port 32 containing a response (response to the interlock processing execution command) indicating that it is currently in a state to transfer the FOUP. This allows for the safe and reliable transfer of the FOUP from a specific transport trolley 20 to a specific mounting port 32.

[0040] For example, the communication device 31 transmits and receives signals related to interlock processing with the corresponding mounting port 32 via a wired cable. Alternatively, the communication device 31 and the mounting port 32 may transmit and receive these signals wirelessly. Furthermore, the communication device 31 transmits and receives signals related to interlock processing with the transport cart 20 via proximity wireless communication. For example, a 2.4GHz band channel is used for proximity wireless communication. The semiconductor manufacturing equipment 30 also uses other wireless communication methods different from proximity wireless communication to perform tasks such as monitoring and maintenance of the semiconductor manufacturing equipment 30.

[0041] For example, a network in a semiconductor factory consists of two systems: a Host LAN for semiconductor manufacturing equipment 30 and an AMHS LAN for controlling transport carts 20. The Host LAN is used for communication in the Manufacturing Execution System (MES), an integrated production information system that plays a central role in managing various information on the semiconductor factory floor, and is connected to the semiconductor manufacturing equipment 30. Furthermore, a Host wireless LAN AP50, which is an access point (AP) for monitoring and maintenance of the semiconductor manufacturing equipment 30, is installed on the Host LAN. For example, the Host wireless LAN AP50 uses 2.4GHz band wireless LAN communication (e.g., a bandwidth of 20MHz). In the present invention, 2.4GHz band wireless LAN communication for the Host LAN is an example of "other wireless communication different from proximity wireless communication." On the other hand, the AMHS LAN is equipped with an AMHS wireless LAN AP40, which is an AP for the AMHS LAN, to perform 5GHz band wireless LAN communication (e.g., a bandwidth of 20MHz) between the AMHS control management server 10 for controlling the transport carts 20 and the transport carts 20.

[0042] The transport trolley 20 is equipped with an AMHS communication unit 21 and a proximity wireless communication unit 22.

[0043] The AMHS communication unit 21 is a communication interface that performs wireless communication with the AMHS control management server 10 via the AMHS wireless LAN AP 40. Alternatively, the AMHS communication unit 21 may perform wireless communication directly with the AMHS control management server 10 without going through the AMHS wireless LAN AP 40. To avoid wireless interference with the 2.4GHz band wireless LAN used for the Host LAN, a 5GHz band wireless LAN is used for wireless communication between the AMHS communication unit 21 and the AMHS control management server 10.

[0044] The proximity wireless communication unit 22 is a communication interface that performs proximity wireless communication with the communication device 31. The transport cart 20 transmits an interlock signal to the communication device 31 via the proximity wireless communication unit 22, which is used to transfer transported objects between the transport cart 20 and the mounting port 32, which is connected to the communication device 31 on a one-to-one basis. The transport cart 20 also receives a response signal from the communication device 31 to the above signal via the proximity wireless communication unit 22.

[0045] As described above, 2.4GHz band proximity wireless communication (e.g., 1MHz bandwidth) is performed between the transport cart 20 and the semiconductor manufacturing equipment 30 (communication device 31) for interlock communication during FOUP transfer. For example, proximity wireless communication is a frequency-hopping type of communication, where multiple channels within a channel group consisting of multiple channels are switched and used. Here, let's assume that three channels are switched. The following explanation will proceed on the premise of a frequency-hopping type of communication, but proximity wireless communication does not have to be a frequency-hopping type of communication, and in this case, the channel group described below may be a single channel.

[0046] When the proximity wireless communication between the transport cart 20 and the semiconductor manufacturing equipment 30, and the wireless LAN communication for the Host LAN, i.e., for the maintenance of the semiconductor manufacturing equipment 30 (hereinafter also simply referred to as "wireless LAN communication"), both use the same 2.4GHz frequency band, it is necessary to configure them so that the channels used by each communication do not overlap. This will be explained using Figures 2A to 2C.

[0047] Figures 2A to 2C show the relationship between the channel 2.4GHz for wireless LAN communication and the channel group for proximity wireless communication. Figure 2A shows channel 1, Figure 2B shows channel 6, and Figure 2C shows channel 11 for wireless LAN communication.

[0048] Generally, wireless LAN communication using the 2.4GHz band utilizes channels 1, 6, or 11. As shown in Figures 2A to 2C, the frequency range for channel 1 is 2401 to 2423 MHz, the frequency range for channel 6 is 2426 to 2448 MHz, and the frequency range for channel 11 is 2451 to 2473 MHz.

[0049] On the other hand, for example, in 2.4GHz band proximity wireless communication, channel groups 1 to 21 are used. As mentioned above, in proximity wireless communication employing frequency hopping, for example, three channels are switched between and used, so each channel group contains three channels. Figure 2A shows an example of using channel 1 in wireless LAN communication. As shown in this figure, channel group 2 includes channels 4, 11, and 18, and these channels are switched between and used.

[0050] Note that even if the channel number for 2.4GHz band wireless LAN communication and the channel number for 2.4GHz band proximity wireless communication are the same, the frequency ranges they represent are different. For example, channel 11 in 2.4GHz band wireless LAN communication means 2451-2473MHz, but channel 11 in 2.4GHz band proximity wireless communication means 2411MHz.

[0051] For example, in an area where channel 1 (2401-2423MHz) of the 2.4GHz band is used for wireless LAN communication for the Host LAN, one of the 14 channel groups from channel group 8 to channel group 21, which do not overlap with channel 1 used for wireless LAN communication, will be set for proximity wireless communication between the semiconductor manufacturing equipment 30 and the transport cart 20. For example, a pre-site survey is conducted at multiple locations in the semiconductor factory using a site survey device and site survey software to confirm the channel usage status of the Host LAN's wireless LAN communication, and the optimal setting of such channel groups is performed according to the results.

[0052] Figure 3 is a diagram illustrating the results of a pre-site survey. Figure 3 shows a top view of an area in a semiconductor factory where multiple semiconductor manufacturing equipment 30 are installed. In Figure 3, "1" to "16" and "51" to "60" indicate the numbers of the semiconductor manufacturing equipment 30, and "1-1" to "8-N" indicate the numbers of the control cells. Each control cell covers two semiconductor manufacturing equipment 30; for example, control cell "1-1" contains semiconductor manufacturing equipment 30 "1" and "2". The site survey is conducted for each control cell (e.g., a 4m x 4m cell) to monitor the radio wave conditions of the Host LAN.

[0053] By conducting a site survey to determine which channel of the Host LAN's wireless LAN communication is received in each management cell, the radio wave areas for channel 1, channel 6, and channel 11 can be identified, as shown by the solid lines in Figure 3. Based on these results, for the proximity wireless communication in the area of ​​channel 1 of the Host LAN's wireless LAN communication, one of the 14 channel groups (Figures 2B and 2C) from channel group 8 to channel group 21, which do not overlap with channel 1 of the wireless LAN communication, is set, avoiding the channel group shown in Figure 2A. Similarly, for the proximity wireless communication in the area of ​​channel 6 of the Host LAN's wireless LAN communication, one of the 14 channel groups (Figures 2A) from channel group 1 to channel group 7 and from channel group 15 to channel group 21 (Figure 2C), which do not overlap with channel 6 of the wireless LAN communication, is set, avoiding the channel group shown in Figure 2B. Similarly, for proximity wireless communication in the area of ​​channel 11 of the Host LAN's wireless LAN communication, one of the 14 channel groups (Figures 2A and 2B), from channel group 1 to channel group 14, which do not overlap with channel 11 of the wireless LAN communication, is set, avoiding the channel group shown in Figure 2C.

[0054] Furthermore, for nearby wireless communication in areas where the areas of wireless LAN communication channels 1 and 6 of the Host LAN overlap, one of the seven channel groups from channel group 15 to channel group 21, which do not overlap with either wireless LAN communication channels 1 or 6, will be set. Similarly, for nearby wireless communication in areas where the areas of wireless LAN communication channels 1 and 11 of the Host LAN overlap, one of the seven channel groups from channel group 8 to channel group 14, which do not overlap with either wireless LAN communication channels 1 or 11, will be set. Although not shown in the diagram, for nearby wireless communication in areas where the areas of wireless LAN communication channels 6 and 11 of the Host LAN overlap, one of the seven channel groups from channel group 1 to channel group 7, which do not overlap with either wireless LAN communication channels 6 or 11, will be set.

[0055] However, the Host wireless LAN AP50 has a function that dynamically changes the wireless communication signal strength. When this function is activated, the area size of each channel fluctuates, resulting in a state of wireless radio waves that differs from that observed during the pre-site survey. This can cause interference between the Host LAN's wireless LAN communication signals and the signals of the pre-configured proximity wireless communication.

[0056] Therefore, the following describes an embodiment of the present invention: an AMHS control management server 10 and a communication system 1 that can suppress interference between radio waves of proximity wireless communication and radio waves of other wireless communication (e.g., wireless LAN communication).

[0057] Figure 4 is a block diagram showing an example of the configuration of the AMHS control management server 10 according to the embodiment.

[0058] The AMHS control management server 10 comprises a control unit 11, a communication unit 14, and a storage unit 15. The AMHS control management server 10 is a computer equipped with hardware such as a processor, memory, and a communication interface. The memory is such as ROM (Read Only Memory) and RAM (Random Access Memory) and can store programs executed by the processor. The control unit 11 is implemented by a processor that executes programs stored in memory. The communication unit 14 is implemented by a communication interface and is controlled by the control unit 11 to send and receive information. Here, the communication interface of the communication unit 14 is, for example, a wired LAN communication interface compliant with the IEEE 802.3 communication standard. The storage unit 15 is implemented by memory, but it may be separate from the memory in which programs are stored.

[0059] The control unit 11 includes a determination unit 12 and a modification unit 13 as functional components.

[0060] The determination unit 12 determines, based on the monitoring results of the radio wave conditions on the channel used for proximity wireless communication, whether a change in the radio wave output strength of the Host wireless LAN AP 50 for another wireless communication different from proximity wireless communication (specifically, the Host LAN's wireless LAN communication) has resulted in a radio wave condition that affects proximity wireless communication (i.e., a condition in which the radio waves used for the Host LAN's wireless LAN communication interfere with the channel used for proximity wireless communication). Through this monitoring result of the radio wave conditions on the channel used for proximity wireless communication, the determination unit 12 can make this determination and determine whether or not a problem occurs in proximity wireless communication. For example, the communication device 31 of the semiconductor manufacturing equipment 30 monitors the radio wave conditions on the channel used for proximity wireless communication, and the monitoring results are transmitted to the AMHS control management server 10. Each channel that was confirmed to be used for 2.4GHz band wireless LAN communication during the pre-site survey is stored in the wireless LAN radio wave condition management file, described later, for each management cell, and the determination unit 12 determines whether or not the Host LAN's wireless LAN communication has changed from the channel conditions stored in the wireless LAN radio wave condition management file to a condition that affects proximity wireless communication. Details regarding the operation of the determination unit 12 and the monitoring of radio wave conditions by the communication device 31 will be described later.

[0061] If the determination unit 12 determines that a channel from another wireless communication (specifically, a 2.4GHz band wireless LAN communication) is affecting the proximity wireless communication, the modification unit 13 changes the channel group used for proximity wireless communication to a different channel group from the previous channel group (specifically, the channel group currently used for proximity wireless communication). Details of the operation of the modification unit 13 will be described later.

[0062] The communication unit 14 communicates with the transport cart 20 via the AMHS wireless LAN AP 40 using a 5GHz band wireless LAN. Alternatively, the communication unit 14 may be a wireless communication interface compliant with the IEEE 802.11 communication standard, for example, and may communicate directly with the transport cart 20 using a 5GHz band wireless LAN without going through the AMHS wireless LAN AP 40.

[0063] The memory unit 15 stores the wireless LAN radio wave status management file. The details of the wireless LAN radio wave status management file will be explained using Figure 5.

[0064] Figure 5 shows an example of a wireless LAN signal status management file.

[0065] As shown in Figure 5, the wireless LAN radio wave status management file associates, for example, the number of the Host LAN radio wave status management cell (CELL), the number of the semiconductor manufacturing equipment 30, the number of the loading port 32, the results of the pre-site survey, and the channel group for proximity wireless communication. For example, the wireless LAN radio wave status management file stores that, as a result of the pre-site survey in management cell "1-1", the radio waves of channel 1 of the 2.4GHz band wireless LAN communication were received at a reception strength of -60dbm. The wireless LAN radio wave status management file also stores that, of the four loading ports 32 of semiconductor manufacturing equipment "1" installed in management cell "1-1", the communication devices 31 corresponding to loading ports "1" and "2" are set to use proximity wireless communication channel group 8, and the communication devices 31 corresponding to loading ports "3" and "4" are set to use channel group 10.

[0066] Furthermore, the transport cart 20 stores transport cart MAP information in order to determine which communication device 31 of the semiconductor manufacturing equipment 30 and which channel group should be used for proximity wireless communication.

[0067] Figure 6 shows an example of transport cart MAP information.

[0068] As shown in Figure 6, the transport cart MAP information associates, for example, the management cell number, the semiconductor manufacturing equipment 30 number, the mounting port 32 number, the proximity wireless communication channel group, and the channel group to be changed. For example, the transport cart MAP information stores that, of the four mounting ports 32 of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number "1" installed in management cell "1-1", the communication devices 31 corresponding to mounting ports "1" and "2" are set to use proximity wireless communication channel group 8, and the communication devices 31 corresponding to mounting ports "3" and "4" are set to use channel group 10. Although two of the four mounting ports 32 of one semiconductor manufacturing equipment 30 (communication devices 31) are set to the same channel group, the same channel group is set because FOUPs are never transferred to these two mounting ports 32 simultaneously (i.e., E84 interlock communication via proximity wireless communication is never performed simultaneously). Based on the transport cart MAP information, the transport cart 20 uses channel group 8 to perform proximity wireless communication when transferring a FOUP to, for example, the mounting port 32 of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number "1". If there are no plans to change the channel group, for example, "0" is stored as the channel group to be changed.

[0069] Here, the monitoring of radio wave conditions by the communication device 31 will be explained using Figure 7.

[0070] Figure 7 is a sequence diagram showing an example of wireless LAN signal strength monitoring and transfer processing.

[0071] The proximity wireless communication unit 22 of the transport trolley 20 and the communication device 31 of the semiconductor manufacturing equipment 30 perform communication synchronization and execute SEMI standard E84 interlock communication in the sequence shown in Figure 7. Specifically, the communication device 31 executes a series of E84 interlock communications upon receiving an open command from the proximity wireless communication unit 22. In this embodiment of the present invention, the close response notified to the proximity wireless communication unit 22 includes the received radio wave strength (RSSI value) stored during the previous monitor (monitoring performed after the previous E84 interlock communication (S701)). The proximity wireless communication unit 22 stores the maximum value of the RSSI value included in the close response (S702).

[0072] The communication device 31 monitors the radio wave conditions on the channel used for proximity wireless communication when proximity wireless communication with the transport trolley 20 (specifically, the proximity wireless communication unit 22) is not being performed. Specifically, as shown in Figure 7, after the E84 interlock communication is completed, the communication device 31 performs monitoring processing for a predetermined period (e.g., 240 ms) using the channel used for proximity wireless communication set on the communication device 31, and stores the result (S703). For example, the communication device 31 monitors the radio wave conditions on one of the multiple channels included in the channel group (e.g., the channel with the lowest frequency, but not limited to that) and stores the result.

[0073] For example, as shown in Figure 5, a pre-site survey reveals that semiconductor manufacturing equipment 30, semiconductor manufacturing equipment number "9" located in management cell "5-1", uses channel 1 for wireless LAN communication of the Host LAN. To avoid this frequency range, the channel group used for proximity wireless communication is set to channel group 12. In this case, the communication device 31 monitors the radio wave conditions on one of the multiple channels included in channel group 12 (specifically channels 32, 39, and 46 as shown in Figure 2B) (for example, the lowest frequency channel 32: 2432MHz).

[0074] At this time, if the output strength of channel 6 (2426~2448MHz) used by the Host wireless LAN AP50 increases for any reason, the radio wave area of ​​Ch.6 shown in Figure 3 will expand, and the received radio wave strength on channel 32 (2432MHz) monitored by the communication device 31 of semiconductor manufacturing equipment 30 of semiconductor manufacturing equipment number "9" will become greater than the maximum received radio wave strength when proximity wireless communication is performed. (The radio wave strength of the Host LAN's wireless LAN communication is originally greater than the radio wave strength of proximity wireless communication (specifically, E84 interlock communication).) This shows that channel 6 used for the Host LAN's wireless LAN communication is now affecting proximity wireless communication. Conversely, if the degree of change in the output strength of channel 6 used for the Host LAN's wireless LAN communication is not large, the radio wave area of ​​Ch.6 shown in Figure 3 will not change so much, and the received radio wave strength on channel 32 (2432MHz) monitored by the communication device 31 will not become greater than the maximum received radio wave strength when proximity wireless communication is performed.

[0075] Monitoring radio wave conditions when no proximity wireless communication is being used for transferring goods allows for checking radio wave conditions without being affected by proximity wireless communication, making it easier to check the usage of channels used by proximity wireless communication by wireless LAN communication. Monitoring may also be performed when proximity wireless communication is in progress. In frequency hopping communication, the channels used for communication are switched in short intervals. When focusing on one of the multiple channels being switched, the received radio wave strength is usually high only when that channel is selected, and low when that channel is not selected. However, if a radio wave with a received strength of a certain level or higher is consistently received on the channel of interest, it can be presumed that the channel of interest is being used by wireless LAN communication. Therefore, even if monitoring is performed when proximity wireless communication is in progress, it can be determined that the radio wave conditions have become such that they are affecting proximity wireless communication due to the wireless LAN communication channel.

[0076] For example, the communication device 31 monitors whether the received signal strength on the channel used for proximity wireless communication when proximity wireless communication for transferring goods is equal to or greater than a predetermined value (for example, the maximum received signal strength when proximity wireless communication is performed) to determine whether wireless LAN communication is being performed on the channel used for proximity wireless communication. If it is determined that wireless LAN communication is being performed on the channel used for proximity wireless communication, the received signal strength on the channel used for proximity wireless communication is stored in the memory area of ​​the communication device 31 (for example, if the received signal strength is -65 dBm, an RSSI value such as 65 is stored). If it is not determined that wireless LAN communication is being performed on the channel used for proximity wireless communication, a value such as 255 is stored.

[0077] When the communication device 31 next performs proximity wireless communication with the proximity wireless communication unit 22, it includes the stored received signal strength on the channel used for proximity wireless communication in the close response signal and transmits it to the proximity wireless communication unit 22, and the transport cart 20 stores the received signal strength. Furthermore, as explained in Figures 8 and 9, the transport cart 20 (AMHS communication unit 21) transfers information indicating changes in the wireless LAN radio wave status to the AMHS control management server 10 via the AMHS communication unit 21.

[0078] Figure 8 is a sequence diagram showing an example of the information transfer process indicating changes in the wireless LAN radio wave conditions.

[0079] Figure 9 is a diagram showing information indicating changes in the wireless LAN radio wave status that are transmitted from the transport cart 20 to the AMHS control management server 10.

[0080] As shown in Figure 8, the AMHS control management server 10 sends a control communication command to the transport cart 20, and the transport cart 20 replies with a control communication response to the control communication command to the AMHS control management server 10. If the transport cart 20 receives information from the communication device 31 that there is a change in the received strength of radio waves on the channel used for proximity wireless communication, specifically that the received strength of radio waves on the channel used for proximity wireless communication when proximity wireless communication for the transfer of goods is not being performed is above a predetermined value (for example, the maximum value of the received radio wave strength when proximity wireless communication is performed), the AMHS communication unit 21 of the transport cart 20 will also send information indicating the change in the wireless LAN radio wave state, as shown in the last field (received radio wave strength during monitoring) in Figure 9, to the AMHS control management server 10 when replying with a control communication response. This allows the AMHS control management server 10 to check which channel (channel group) of proximity wireless communication has received what signal strength in which mounting port 32 of which semiconductor manufacturing equipment 30 in which management cell.

[0081] For example, suppose a pre-site survey confirmed that channel 1 is being used for wireless LAN communication on the Host LAN. In a communication device 31 corresponding to mounting port 32 of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number 9 in management cell "5-1", information indicating a change in the wireless LAN radio wave state is transmitted to the AMHS control management server 10 via the transport cart 20, indicating that the received strength in proximity wireless communication channel group 12 has exceeded a predetermined value. The AMHS control management server 10 updates the wireless LAN radio wave state management file based on the information indicating the change in the wireless LAN radio wave state.

[0082] Figure 10 shows an example of a wireless LAN radio wave status management file with updated site survey results.

[0083] The AMHS control management server 10 (determination unit 12) determines that the wireless LAN radio waves are affecting the nearby wireless communication when the monitoring results indicate that the received strength of the radio waves on the channel used for nearby wireless communication is above a predetermined value (i.e., the wireless LAN radio wave state has changed). For example, the AMHS control management server 10 determines in management cell 5-1 that the channel of the Host LAN's wireless LAN communication is affecting communication by channel group 12 in nearby wireless communication. As a result, the AMHS control management server 10 updates the channel of the Host LAN's wireless LAN communication in the wireless LAN radio wave state management file from channel 1 to "channel 1 and channel 6," as shown in Figure 10. Note that since channel 1 may also be used for the Host LAN's wireless LAN communication, channel 1 is not excluded from the channel of the Host LAN's wireless LAN communication in the wireless LAN radio wave state management file, and is updated from channel 1 to "channel 1 and channel 6."

[0084] In the above wireless LAN signal status management file, the reason the wireless LAN communication channels of the Host LAN in management cell 5-1 are updated to channels 1 and 6 is that the signal strength of the Host wireless LAN AP50 on channel 6 has increased, indicating that in addition to the signal from the Host wireless LAN AP50 on channel 1 reaching management cell 5-1, the signal from the Host wireless LAN AP50 on channel 6 is now also reaching management cell 5-1.

[0085] The AMHS control management server 10 (modification unit 13) will change the channel group used for proximity wireless communication to a different channel group if it determines that wireless LAN radio waves are affecting proximity wireless communication. Furthermore, if the AMHS control management server 10 (modification unit 13) determines that wireless LAN radio waves, which are monitored by a management cell to which a communication device 31 of a certain semiconductor manufacturing apparatus 30 belongs, are affecting proximity wireless communication, it may change the channel group used by the communication device 31 for proximity wireless communication to a different channel group than the one used previously, and also to a channel group different from the channel group used for proximity wireless communication by communication devices 31 of semiconductor manufacturing apparatus 30 surrounding the semiconductor manufacturing apparatus 30 to which the communication device 31 is equipped. This will be explained using Figure 11.

[0086] Figure 11 shows an example of a management cell whose proximity wireless communication channel group is to be changed and the surrounding management cells that are to be checked. For example, when the AMHS control management server 10 determines the changed channel used in proximity wireless communication performed by the communication device 31 of the semiconductor manufacturing equipment 30 in management cell "5-1", it considers the channel groups used in proximity wireless communication performed by the communication devices 31 of the semiconductor manufacturing equipment 30 in the surrounding management cells "3-1", "4-1", "6-1", "7-1", "4-2", "5-2", "6-2", and "5-3" of management cell "5-1". This is because there is a risk of interference with the radio waves of proximity wireless communication performed by the surrounding management cells of management cell "5-1". The AMHS control management server 10 checks the channel groups set for the surrounding management cells of management cell "5-1" in the wireless LAN radio wave state management file, and determines the changed proximity wireless communication channel to be a channel group from channel groups 15 to 21 (see Figure 21C) of a different channel from the affected wireless LAN communication channels (channels 1 and 6), which does not match the channel group set for the surrounding management cells. Furthermore, if the AMHS control management server 10 finds that all channel groups that do not overlap with the affected wireless LAN communication channel match the channel groups set for the surrounding management cells, it will determine the channel group with the fewest matches to be the new channel group.

[0087] This makes it possible to suppress not only interference with radio waves from wireless LAN communication, but also interference with radio waves from proximity wireless communication performed by communication devices 31 of the surrounding semiconductor manufacturing equipment 30.

[0088] The AMHS control management server 10 updates the channel group scheduled for change in the wireless LAN radio wave status management file to the determined channel group.

[0089] Figure 12 shows an example of a wireless LAN radio wave status management file with updated channel groups scheduled for change.

[0090] As shown in Figure 12, the AMHS control management server 10 updates the channel groups scheduled for change corresponding to the management cell "5-1" to channel groups 15, 17, 19, and 21 from channel groups 15 to 21, which are in different frequency bands (see Figure 2C) than the affected wireless LAN communication channels (channels 1 and 6).

[0091] Specifically, the following will be updated: mounting port 32 "1" and mounting port 32 "2" of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number "9" in management cell "5-1" to proximity wireless communication channel group 15; mounting port 32 "3" and mounting port 4 "4" of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number "9" to proximity wireless communication channel group 17; mounting port 32 "1" and mounting port 2 "2" of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number "10" to proximity wireless communication channel group 19; and mounting port 32 "3" and mounting port 4 "4" of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number "10" to proximity wireless communication channel group 21.

[0092] The AMHS control management server 10 generates change difference data for the transport cart MAP information based on the updated wireless LAN radio wave status management file and transmits it to each transport cart 20 via the AMHS wireless LAN AP 40.

[0093] Figure 13 is a sequence diagram showing an example of the process for changing channel groups in transport trolley MAP information.

[0094] As shown in Figure 13, the AMHS control management server 10 stores change difference data based on the planned change channel group in the control communication command and transmits it to the transport cart 20. The transport cart 20 controls the movement of the transport cart according to the contents of the received control communication command and updates the planned change channel group in the transport cart MAP information based on the change difference data stored in the control command.

[0095] Figure 14 shows an example of transport cart MAP information with updated channel groups scheduled for change.

[0096] As shown in Figure 14, the transport trolley 20 updates the channel groups scheduled for change corresponding to the management cell "5-1" in the transport trolley MAP information to channel groups 15, 17, 19, and 21 based on the change difference data.

[0097] Based on the updated transport cart MAP information, the transport cart 20 transmits the changed channel group information to the communication device 31 during the close-out process of the proximity wireless communication.

[0098] Figure 15 is a sequence diagram showing an example of channel group modification and setting processes in the communication device 31 of the semiconductor manufacturing equipment 30.

[0099] The communication device 31 stores the channel group information scheduled for change, which is transmitted from the transport cart 20 (proximity wireless communication unit 22) along with the E84 wireless communication close command, and sends a response to the proximity wireless communication close process to the proximity wireless communication unit 22 of the transport cart 20. The communication device 31 also updates the originally set channel group to the received channel group scheduled for change and restarts. As a result, the communication device 31 uses the updated channel group to communicate with the transport cart 20 via proximity wireless communication.

[0100] The transport trolley 20 receives a response from the communication device 31 regarding the close-out process of the proximity wireless communication, confirms that the communication device 31 has updated the channel group, and updates the channel group in the transport trolley MAP information.

[0101] Figure 16 shows an example of the process in which a portion of the channel group of the transport cart MAP information is updated.

[0102] For example, if the transport cart 20 receives a close-processing response for proximity wireless communication from a communication device 31 corresponding to mounting port 32 of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number 9 in management cell "5-1", the transport cart MAP information stores that the channel group of the target communication device 31 has been updated by changing the proximity wireless communication channel group for mounting port 32 of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number 9 in management cell "5-1" from 12 to 15 and changing the channel group to be changed from 15 to 0. Thereafter, the proximity wireless communication channel group for the mounting ports 32 of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment numbers "9" and "10" belonging to management cell "5-1" will be sequentially changed when proximity wireless communication is performed with the target communication device 31 (each communication device 31 corresponding to mounting ports 32 "2", "3", and "4" of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number "9", and mounting ports 32 "1", "2", "3", and "4" of semiconductor manufacturing equipment 30 with semiconductor manufacturing equipment number "10").

[0103] The transport trolley 20 generates change difference data for the transport trolley MAP information based on the updated transport trolley MAP information and transmits it to the AMHS control management server 10 via the AMHS wireless LAN AP 40.

[0104] Figure 17 is a sequence diagram showing an example of the process for updating the wireless LAN radio wave status management file.

[0105] As shown in Figure 17, the transport trolley 20 stores the change difference data based on the changes in the control communication response and sends it to the AMHS control management server 10. The AMHS control management server 10 updates the channel group in the wireless LAN radio wave status management file based on the change difference data.

[0106] Figure 18 shows an example of a wireless LAN radio wave status management file in which part of the channel group has been updated.

[0107] For example, when the AMHS control management server 10 receives change differential data for the communication device 31 corresponding to mounting port 32 of semiconductor manufacturing equipment 30 in management cell 9 of 5-1, the planned change channel group for mounting port 32 of semiconductor manufacturing equipment 30 in management cell 9 of 5-1 is changed from 15 to 0, and the channel group is changed from 12 to 15. This allows the AMHS control management server 10 to manage that the communication device 31 corresponding to mounting port 32 of semiconductor manufacturing equipment 30 in management cell 9 of 5-1 and the transport cart 20 are in a state of proximity wireless communication using channel group 15.

[0108] In this manner, the AMHS control management server 10 (change unit 13) notifies the transport cart 20 of the changed channel group to be used for proximity wireless communication, and subsequent proximity wireless communication between the transport cart 20 and the communication device 31 is performed using the changed proximity wireless communication channel group. Specifically, the AMHS control management server 10 transmits information on the channel group to be changed as change difference data to each wireless transport cart 20 via the AMHS wireless LAN AP 40. The transport cart 20 stores the received channel group to be changed, and when it performs proximity wireless communication with the target communication device 31, it notifies the communication device 31 of the stored channel group to be changed as proximity wireless communication change channel group information during the proximity wireless communication close process. The communication device 31 updates and restarts the channel group to be used for proximity wireless communication using the received proximity wireless communication change channel group information.

[0109] As explained above, when site surveys are conducted, the channel used for proximity wireless communication is pre-configured to be different from the channel used for wireless LAN communication. However, if the wireless output on the channel used for wireless LAN communication is dynamically changed thereafter, interference may occur between the radio waves used for proximity wireless communication and the radio waves used for wireless LAN communication. In contrast, the present invention allows for the confirmation of the usage status of the channel used for wireless LAN communication by monitoring the radio wave conditions on the channel used for proximity wireless communication. Therefore, it is possible to determine that the influence of wireless LAN communication using the channel has changed from the situation confirmed by site surveys, and the channel used for proximity wireless communication can be changed to a different channel from the previous channel (specifically, the channel currently used for proximity wireless communication). Thus, interference between the radio waves used for proximity wireless communication and the radio waves used for wireless LAN communication can be suppressed.

[0110] (Other embodiments) As described above, embodiments have been explained as examples of the technology according to the present invention. However, the technology according to the present invention is not limited thereto and can be applied to embodiments that are modified, replaced, added, or omitted as appropriate. For example, the following modified examples are also included in one embodiment of the present invention.

[0111] For example, the present invention can be implemented not only as an AMHS control management server 10 (management device) or a communication system 1, but also as a management method that includes steps (processes) performed by the components constituting the AMHS control management server 10 or the communication system 1.

[0112] Figure 19 is a flowchart showing an example of a management method performed by a management device (AMHS control management server 10) according to another embodiment.

[0113] The management method is performed by a management device that manages mobile units and communication devices that perform proximity wireless communication with the mobile units, and as shown in Figure 19, it includes a determination step (step S11) that determines whether another wireless communication different from proximity wireless communication (Wireless LAN communication of the Host LAN) has created radio wave conditions that affect proximity wireless communication, based on the results of monitoring the radio wave conditions on the channel used for proximity wireless communication, and a change step (step S12) that, if it is determined that the other wireless communication has created radio wave conditions that affect proximity wireless communication (Yes in step S11), changes the channel used for proximity wireless communication to a channel different from the channel currently used for proximity wireless communication, wherein the other wireless communication is for management related to the operation of equipment equipped with communication devices and is characterized by having a higher radio wave output value than proximity wireless communication.

[0114] Figure 20 is a flowchart showing an example of a management method performed by the communication system 1 according to another embodiment.

[0115] The management method is performed by a communication system 1 comprising a mobile unit, equipment equipped with a communication device for performing proximity wireless communication with the mobile unit, and a management device for managing the mobile unit and equipment. As shown in Figure 20, the method includes a monitoring step (step S21) for monitoring the radio wave conditions on the channel used for proximity wireless communication, a determination step (step S22) for determining whether another wireless communication different from proximity wireless communication has created radio wave conditions that affect proximity wireless communication based on the monitoring results, and a change step (step S23) for changing the channel used for proximity wireless communication to a channel different from the channel currently used for proximity wireless communication if it is determined that the other wireless communication has created radio wave conditions that affect proximity wireless communication (Yes in step S22). The other wireless communication is for management related to the operation of the equipment equipped with the communication device and is characterized by having a higher radio wave output value than proximity wireless communication.

[0116] Furthermore, Host wireless LAN AP50 used for other wireless communications may have a function to dynamically change not only its radio wave output but also the channel itself. If the channel changed by this function matches the channel of a nearby wireless communication, it is easy to imagine that other wireless communications may affect the nearby wireless communication, in other words, cause interference. In that case as well, the present invention makes it possible to immediately change the nearby wireless channel through monitoring of the radio wave environment by the nearby wireless communication channel by the communication device 31, thereby preventing interference.

[0117] Furthermore, in the embodiment described above, the process was described as a series of steps: (i) channel monitoring by the communication device 31, (ii) transmission of the channel monitoring results to the AMHS control management server 10 via the transport cart 20, (iii) channel group change based on the determination of the AMHS control management server 10, (iv) transmission of the planned change data to the AMHS communication unit 21 of the transport cart 20, and (v) transmission of the change data from the proximity wireless communication unit 22 to the communication device 31. However, the present invention is not limited thereto. For example, the result of process (ii) may be notified directly from the communication device 31 to the AMHS control management server 10, and the notification of the planned change channel group in process (iv) may be made simultaneously from the AMHS control management server 10 to the communication device 31 and the AMHS communication unit 21 of the transport cart 20.

[0118] Furthermore, the management function server that receives channel monitoring results from the communication device 31, makes channel group changes based on the judgment, and notifies the group scheduled for change is not limited to the AMHS control management server 10, but may be a dedicated server connected to the AMHS LAN.

[0119] For example, the present invention can be implemented as a program that causes a computer (processor) to execute the steps included in the management method. Furthermore, the present invention can be implemented as a non-temporary computer-readable recording medium, such as a CD-ROM, on which the program is recorded.

[0120] For example, if the present invention is implemented in a program (software), each step is executed by the program using hardware resources such as the CPU, memory, and input / output circuits of a computer. In other words, each step is executed by the CPU acquiring data from memory or input / output circuits, performing calculations, and outputting the calculation results to memory or input / output circuits.

[0121] In the above embodiment, each component included in the AMHS control management server 10 and the communication system 1 may be implemented by dedicated hardware or by executing a software program suitable for each component. Each component may also be implemented by a program execution unit such as a CPU or processor reading and executing a software program recorded on a recording medium such as a hard disk or semiconductor memory.

[0122] Some or all of the functions of the AMHS control management server 10 and communication system 1 according to the above embodiment are typically implemented as an integrated circuit (LSI). These may be individually integrated on a single chip, or some or all of them may be integrated on a single chip. Furthermore, the implementation is not limited to an LSI, but may also be implemented using a dedicated circuit or a general-purpose processor. An FPGA (Field Programmable Gate Array) that can be programmed after the LSI is manufactured, or a reconfigurable processor that can reconfigure the connections and settings of the circuit cells inside the LSI may also be used.

[0123] Furthermore, if advances in semiconductor technology or other derived technologies lead to the emergence of integrated circuit technologies that replace LSIs, then naturally, those technologies may be used to integrate each component included in the AMHS control management server 10 and the communication system 1.

[0124] Furthermore, the present invention also includes forms obtained by applying various modifications to the embodiments that a person skilled in the art could conceive, and forms realized by arbitrarily combining the components and functions of each embodiment without departing from the spirit of the present invention. [Industrial applicability]

[0125] This invention can be used in transport systems that perform interlocking processing, and the like. [Explanation of Symbols]

[0126] 1. Communication System 10 AMHS Control Management Server 11 Control Unit 12 Judgment section 13 Changes 14 Communications Department 15 Storage section 20 Transport carts 21 AMHS Communications Department 22 Proximity Wireless Communication Unit 30 Semiconductor manufacturing equipment 31 Communication devices 32 mounting ports 40 AMHS Wireless LAN AP 50 Host Wireless LAN AP

Claims

1. A management device for managing a mobile body and a communication device that performs proximity wireless communication with the mobile body, A determination unit that determines, based on the results of monitoring the radio wave conditions on the channel used for the proximity wireless communication, whether or not another wireless communication different from the proximity wireless communication has created radio wave conditions that affect the proximity wireless communication. If it is determined that the radio wave conditions of the other wireless communication are affecting the proximity wireless communication, the device includes a modification unit that changes the channel used for the proximity wireless communication to a channel different from the channel currently used for the proximity wireless communication. The aforementioned other wireless communication is for the management of the operation of equipment equipped with the communication device, and has a higher radio wave output value than the aforementioned proximity wireless communication. Management device.

2. The determination unit determines, when the monitoring result indicates that the received radio wave intensity on the channel used for the proximity wireless communication is above a predetermined value, that the radio wave conditions have become such that the other wireless communication is affecting the proximity wireless communication. The control device according to claim 1.

3. The modification unit, when it is determined that the radio wave conditions of the other wireless communication are affecting the proximity wireless communication, changes the channel used for the proximity wireless communication to a channel different from the channel currently used for the proximity wireless communication, and also different from the channel used for the proximity wireless communication conducted by communication devices provided by the surrounding equipment. The control device according to claim 1 or 2.

4. The modification unit changes the channel used for the proximity wireless communication by notifying the mobile device of the modified channel used for the proximity wireless communication, and by having the mobile device notify the communication device. The control device according to claim 1 or 2.

5. A management method performed by a management device that manages a mobile body and a communication device that performs proximity wireless communication with the mobile body, A determination step, based on the results of monitoring the radio wave conditions on the channel used for the proximity wireless communication, to determine whether or not another wireless communication different from the proximity wireless communication has created radio wave conditions that affect the proximity wireless communication. If it is determined that the radio wave conditions of the other wireless communication are affecting the proximity wireless communication, the modifier step includes changing the channel used for the proximity wireless communication to a different channel from the channel currently used for the proximity wireless communication. The aforementioned other wireless communication is for the management of the operation of equipment equipped with the communication device, and has a higher radio wave output value than the aforementioned proximity wireless communication. Management method.

6. A program for causing a computer to execute the management method described in claim 5.

7. Mobile and Equipment comprising a communication device that performs proximity wireless communication with the aforementioned mobile body, The system comprises a management device for managing the mobile body and the communication device, The communication device monitors the radio wave conditions in the channel used for the proximity wireless communication, The aforementioned control device is Based on the results of the monitoring, it is determined whether or not another wireless communication different from the nearby wireless communication has created radio wave conditions that affect the nearby wireless communication. If it is determined that the radio wave conditions of the other wireless communication are affecting the proximity wireless communication, the channel used for the proximity wireless communication is changed to a different channel from the channel currently used for the proximity wireless communication. The aforementioned other wireless communication is for the management of the operation of equipment equipped with the communication device, and has a higher radio wave output value than the aforementioned proximity wireless communication. Communication system.

8. The communication device monitors whether the received radio wave intensity in the channel used for the proximity wireless communication is above a predetermined value. The communication system according to claim 7.

9. The communication device monitors the radio wave conditions on the channel used for the proximity wireless communication when the proximity wireless communication is not being performed. The communication system according to claim 7 or 8.

10. The aforementioned proximity wireless communication is a frequency hopping type communication, The communication device monitors the radio wave conditions on one of the multiple channels that are switched by frequency hopping included in the channel group. The communication system according to claim 7 or 8.

11. A management method performed by a communication system comprising a mobile body, equipment equipped with a communication device for performing proximity wireless communication with the mobile body, and a management device for managing the mobile body and the communication device, A monitoring step of monitoring the radio wave conditions in the channel used for the aforementioned proximity wireless communication, A determination step based on the results of the monitoring, to determine whether or not another wireless communication different from the proximity wireless communication has created radio wave conditions that affect the proximity wireless communication, If it is determined that the radio wave conditions of the other wireless communication are affecting the proximity wireless communication, the modifier step includes changing the channel used for the proximity wireless communication to a different channel from the channel currently used for the proximity wireless communication. The aforementioned other wireless communication is for the management of the operation of equipment equipped with the communication device, and has a higher radio wave output value than the aforementioned proximity wireless communication. Management method.

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