Liquid dispensing device and liquid dispensing control method

Abstract

To provide a liquid dispensing device and a liquid dispensing control method that can open and close a nozzle at high speed using a piezoelectric element with low force generation and low capacitance. [Solution] The block rod 40 has a first block surface 41 that receives the force generated by the piezoelectric element 11, a second block surface 42 that is parallel to the second displacement direction Y and faces the first block surface 41, and a third block surface 43 that is not parallel to the second displacement direction Y and faces the first block surface 41. Multiple cylindrical rollers 51 are arranged on the first block surface 41, multiple first diaphragms 53 are arranged between the second block surface 42 and the housing 12, and multiple second diaphragms 54 are arranged between the third block surface 43 and the housing 12. The block rod 40 moves in the second displacement direction Y by the cylindrical rollers 51, and moves in the first displacement direction X and the second displacement direction Y by the first diaphragms 53 and the second diaphragms 54.

Description

Technical Field

[0001] The present invention relates to a liquid ejection device and a liquid ejection method capable of continuously ejecting a liquid agent in a droplet state at high speed and applying it even from a position distant from a workpiece.

Background Art

[0002] Patent Document 1 and Patent Document 2 disclose a droplet coating device that applies a predetermined amount of a liquid such as a resin or an adhesive to a coated object such as a substrate using a piezoelectric element and a displacement amplification mechanism.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] Patent Document 1 uses a displacement amplification mechanism driven by a piezoelectric element and an elastic hinge. The elastic hinge has large vibrations at high frequencies and is not suitable for high - speed driving. Also, a piezoelectric element with a large capacitance, which generates a large force, is required. Since a large instantaneous current flows for high - speed driving, the piezoelectric element and the controller are under a large load and are not suitable for high - speed driving. On the other hand, Patent Document 2 uses a displacement amplification mechanism with an arm and two piezoelectric elements to move a plunger up and down. Voltage signals are input to the piezoelectric elements in order, so it takes more time compared to the case of driving with one piezoelectric element and is not suitable for high - speed driving.

[0005] Therefore, an object of the present invention is to provide a liquid ejection device and a liquid ejection control method capable of quickly opening and closing a nozzle using a piezoelectric element with low driving force and low capacitance.

Means for Solving the Problems

[0006] The liquid dispensing device of the present invention as described in claim 1 comprises a nozzle 21 for dispensing liquid, a liquid supply passage 23 for supplying the liquid to the nozzle 21, a piston rod 24 for opening and closing the nozzle 21, a rod biasing means 16 for biasing the piston rod 24 in the direction Y for opening the nozzle 21, a block rod 40 for biasing the piston rod 24 in the direction Y for closing the nozzle 21, and a drive source 11 for operating the block rod 40, wherein a piezoelectric element is used as the drive source 11, and the piezoelectric element 11 is extended by applying a voltage Va, and as the piezoelectric element 11 is extended, a first displacement is applied to the block rod 40 from a first displacement direction X, and as a result of the applied first displacement, the block rod 40 moves in a second displacement direction Y different from the first displacement direction X by a second displacement amount greater than the first displacement, and the block rod 40 moves in the second displacement direction Y. A liquid dispensing device in which the piston rod 24 moves, having a housing 12 that houses the block rod 40, the block rod 40 having a first block surface 41 that receives a force generated by the piezoelectric element 11, a second block surface 42 that is parallel to the second displacement direction Y and faces the first block surface 41, and a third block surface 43 that is not parallel to the second displacement direction Y and faces the first block surface 41, a plurality of cylindrical rollers 51 arranged on the first block surface 41, a plurality of first diaphragms 53 arranged between the second block surface 42 and the housing 12, a plurality of second diaphragms 54 arranged between the third block surface 43 and the housing 12, the block rod 40 moves in the second displacement direction Y by the cylindrical rollers 51, and moves in the first displacement direction X and the second displacement direction Y by the first diaphragms 53 and the second diaphragms 54. The present invention as described in claim 2 is characterized in that, in the liquid dispensing device described in claim 1, the amount of movement of the block rod 40 by the first diaphragm 53 and the second diaphragm 54 is greater in the second displacement direction Y than in the first displacement direction X. The present invention as described in claim 3 is characterized in that, in the liquid dispensing device described in claim 1, slits 55 are formed in the second block surface 42, the third block surface 43, and the housing 12, and the first diaphragm 53 and the second diaphragm 54 are fixed by the slits 55. The present invention as described in claim 4 is a liquid dispensing device as described in claim 1, The first diaphragm 53 and the second diaphragm 54 It is characterized by being formed from stainless steel or titanium alloy. The present invention as described in claim 5 is characterized in that, in the liquid dispensing device described in claim 1, the block rod 40 is made of cemented carbide. The present invention as described in claim 6 is characterized in that, in the liquid dispensing device described in claim 1, a weight material can be added to the block rod 40. The present invention as described in claim 7 is characterized in that, in the liquid dispensing device described in claim 1, the block rod 40 is made of silicon nitride or alumina. The present invention as described in claim 8 is characterized in that, in the liquid dispensing device described in claim 1, a cavity 45 is formed in the block rod 40. The present invention as described in claim 9 is characterized in that, in the liquid dispensing device described in claim 1, the piezoelectric element 11 is surrounded by a heat-dissipating elastic resin 13, the outer surface of the heat-dissipating elastic resin 13 is covered by a stainless steel cylindrical housing 14, and a heat sink 15 is in contact with the stainless steel cylindrical housing 14. The present invention as described in claim 10 is a liquid dispensing device as described in claim 1, comprising a liquid supply housing 20 that forms the nozzle 21 and the liquid supply passage 23, and a frame housing 10 that houses the block rod 40, the drive source 11, and the housing 12, wherein the liquid supply housing 20 is detachable from the frame housing 10. The liquid dispensing control method of the present invention as described in claim 11 is a liquid dispensing control method using a liquid dispensing device as described in any one of claims 1 to 10, characterized in that the piezoelectric element 11 is extended by applying a first voltage V1 to it, the piezoelectric element 11 is retracted by applying a second voltage V2 to it, the nozzle 21 is closed by changing the first voltage V1, the nozzle 21 is opened by changing the second voltage V2, the pressing force of the piston rod 24 on the nozzle 21 is adjusted by changing the first voltage V1, and the coating diameter of the liquid droplets is adjusted by changing the second voltage V2. [Effects of the Invention]

[0007] According to the liquid dispensing device of the present invention, displacement from the piezoelectric element can be efficiently transmitted to the piston rod via a block rod connected by a first diaphragm and a second diaphragm, and the nozzle can be opened and closed at high speed using a piezoelectric element with low force generation and low capacitance. [Brief explanation of the drawing]

[0008] [Figure 1] Schematic diagram showing a liquid dispensing device according to one embodiment of the present invention. [Figure 2] Perspective view of the main part of the device showing the block rod. [Figure 3] Perspective view of a block rod that can be used in the device. [Figure 4] An explanatory diagram showing the relationship between the first displacement and the second displacement in the device. [Figure 5] This diagram shows the installation of the liquid supply housing that constitutes the device. [Figure 6] A perspective view of the main components showing how to attach the liquid supply enclosure to the frame enclosure. [Figure 7] Diagram illustrating the liquid dispensing control method using the device. [Modes for carrying out the invention]

[0009] The liquid ejection device according to the first embodiment of the present invention has a housing that houses a block rod. The block rod has a first block surface that receives the driving force generated by a piezoelectric element, a second block surface that is parallel to the second displacement direction and faces the first block surface, and a third block surface that is not parallel to the second displacement direction and faces the first block surface. A plurality of cylindrical rollers are arranged on the first block surface, a plurality of first diaphragm plates are arranged between the second block surface and the housing, and a plurality of second diaphragm plates are arranged between the third block surface and the housing. The block rod moves in the second displacement direction by the cylindrical rollers and moves in the first displacement direction and the second displacement direction by the first diaphragm plate and the second diaphragm plate. According to the present embodiment, the displacement from the piezoelectric element can be efficiently transmitted to the piston rod via the block rod connected by the first diaphragm plate and the second diaphragm plate, and the nozzle can be opened and closed at high speed using a piezoelectric element with low driving force and low capacitance.

[0010] The second embodiment of the present invention is the liquid ejection device according to the first embodiment, wherein the amount of movement of the block rod by the first diaphragm plate and the second diaphragm plate is greater in the second displacement direction than in the first displacement direction. According to the present embodiment, a second displacement amount larger than the first displacement amount can be obtained.

[0011] The third embodiment of the present invention is the liquid ejection device according to the first embodiment, wherein slits are formed in the second block surface, the third block surface, and the housing, and the first diaphragm plate and the second diaphragm plate are fixed by the slits. According to the present embodiment, excessive movement during the displacement of the block rod can be further suppressed.

[0012] The fourth embodiment of the present invention is the liquid ejection device according to the first embodiment, First diaphragm and second diaphragm which is formed of stainless steel or a titanium alloy. According to the present embodiment, due to the rigidity and spring characteristics of the material, the opening and closing operation of the nozzle with high wear resistance and long life can be performed.

[0013] In the fifth embodiment of the present invention, in the liquid ejecting device according to the first embodiment, the block rod is formed of cemented carbide. According to this embodiment, since it has high rigidity and can be made heavy, it becomes easier to close the nozzle, and liquid ejection can be performed at a low voltage, and even a high-viscosity liquid can be ejected.

[0014] In the sixth embodiment of the present invention, in the liquid ejecting device according to the first embodiment, a weight material can be added to the block rod. According to this embodiment, the weight can be adjusted to be heavier, and ejection can be performed at a lower voltage, so that it becomes easier to eject a high-viscosity liquid.

[0015] In the seventh embodiment of the present invention, in the liquid ejecting device according to the first embodiment, the block rod is formed of silicon nitride or alumina. According to this embodiment, the weight is reduced and it becomes easier to open the nozzle, and it can be driven at a higher frequency compared to cemented carbide or stainless steel.

[0016] In the eighth embodiment of the present invention, in the liquid ejecting device according to the first embodiment, a cavity is formed in the block rod. According to this embodiment, the weight is reduced and it becomes easier to open the nozzle, and it can be driven at a higher frequency compared to cemented carbide or stainless steel.

[0017] In the ninth embodiment of the present invention, in the liquid ejecting device according to the first embodiment, the periphery of the piezoelectric element is covered with a heat-radiating elastic resin, and the outer peripheral surface of the heat-radiating elastic resin is covered with a stainless steel cylindrical housing, and a heat sink is brought into contact with the stainless steel cylindrical housing. According to this embodiment, the heat generated by the piezoelectric element can be efficiently radiated, so that it can be driven at a higher drive frequency for a longer time.

[0018] A tenth embodiment of the present invention is a liquid dispensing device according to the first embodiment, comprising a liquid supply housing that forms a nozzle and a liquid supply passage, and a frame housing that houses a block rod, a drive source, and a housing, wherein the liquid supply housing is detachable from the frame housing. According to this embodiment, the liquid agent and nozzle diameter can be easily changed.

[0019] The liquid dispensing control method according to the 11th embodiment of the present invention is a liquid dispensing control method using a liquid dispensing device according to any of the first to tenth embodiments, wherein the piezoelectric element is extended by applying a first voltage, contracted by applying a second voltage, the nozzle is closed by changing the first voltage, the nozzle is open by changing the second voltage, the pressing force of the piston rod against the nozzle is adjusted by changing the first voltage, and the coating diameter of the liquid droplets is adjusted by changing the second voltage. According to this embodiment, the pressing force of the piston rod against the nozzle can be adjusted by adjusting the first and second voltages applied to the piezoelectric element, and the droplet diameter can be adjusted by changing the amount of liquid discharged with a single nozzle opening and closing. [Examples]

[0020] A liquid dispensing device according to one embodiment of the present invention will be described below. Figure 1 is a schematic diagram showing the liquid dispensing device according to this embodiment. Figure 1(a) is a schematic cross-sectional view of the device, and Figures 1(b) and 1(c) are enlarged views of A and B shown in Figure 1(a). Figure 1(b) shows the nozzle in the open state, and Figure 1(c) shows the nozzle in the closed state. Figure 2 is a perspective view of the main part of the device, showing the block rod. The liquid dispensing device according to this embodiment consists of a frame housing 10, a liquid supply housing 20, and a heater housing 30.

[0021] As shown in Figure 1(a), the frame housing 10 houses the drive source 11 and the housing 12. A piezoelectric element is used as the drive source 11. The housing 12 accommodates the block rod 40. The liquid supply housing 20 includes a nozzle 21 for discharging liquid, a liquid supply section 22 for supplying liquid, a liquid supply passage 23 for supplying liquid to the nozzle 21, and a rod hole 25 in which at least a portion of the piston rod 24 is positioned. The piston rod 24 opens and closes the nozzle 21. The heater housing 30 is positioned in contact with the liquid supply housing 20 and heats the liquid supply housing 20.

[0022] The piezoelectric element 11 is surrounded by a heat-dissipating elastic resin 13. The outer surface of the heat-dissipating elastic resin 13 is covered by a stainless steel cylindrical housing 14. A heat sink 15 is in contact with the stainless steel cylindrical housing 14. Therefore, the heat generated by the piezoelectric element 11 can be efficiently dissipated, enabling operation at higher operating frequencies for longer periods.

[0023] The rod biasing means 16 biases the piston rod 24 in the direction Y that opens the nozzle 21. In this embodiment, the rod biasing means 16 includes a first rod biasing means 16a that biases the block rod 40 relative to the housing 12, and a second rod biasing means 16b that biases the block rod 40 relative to the liquid supply housing 20. A piston 17 is positioned between the piezoelectric element 11 and the block rod 40. The piston 17 is biased in the direction X of the piezoelectric element 11 by a preload spring 18.

[0024] When a voltage is applied to the piezoelectric element 11, it extends, and as the piezoelectric element 11 extends, the piston 17 moves in the direction X of the block rod 40. The direction X of movement of the piston 17 is the first displacement direction X, and the amount of movement of the piston 17 is the first displacement amount. Therefore, the movement of the piston 17 imparts a first displacement amount to the block rod 40 in the first displacement direction X. When the block rod 40 is subjected to a first displacement, it moves in a second displacement direction Y, which is different from the first displacement direction X, with a second displacement that is greater than the first displacement. As the block rod 40 moves in the second displacement direction Y, the piston rod 24 moves. In this way, the piezoelectric element 11 operates the block rod 40, and the block rod 40 biases the piston rod 24 in the direction Y that closes the nozzle 21.

[0025] As shown in Figures 1(a) and 2, the block rod 40 has a first block surface 41 that receives the force generated by the piezoelectric element 11, a second block surface 42 that is parallel to the second displacement direction Y and faces the first block surface 41, and a third block surface 43 that is not parallel to the second displacement direction Y and faces the first block surface 41. In other words, the first block surface 41 faces one side of the housing 12, and the second block surface 42 and the third block surface 43 face the other side of the housing 12. Note that one side of the housing 12 faces the other side of the housing 12. Multiple cylindrical rollers 51 are arranged on the first block surface 41. A buffer plate 52 is positioned on one side of the housing 12, which moves in a first displacement direction X as the piston 17 moves. The cylindrical roller 51 is positioned between the first block surface 41 and the buffer plate 52. Multiple first diaphragms 53 are positioned between the second block surface 42 and the housing 12. Additionally, multiple second diaphragms 54 are positioned between the third block surface 43 and the housing 12. The block rod 40 moves in the second displacement direction Y by the cylindrical roller 51, and moves in the first displacement direction X and the second displacement direction Y by the first diaphragm 53 and the second diaphragm 54. Furthermore, the amount of movement of the block rod 40 by the first diaphragm 53 and the second diaphragm 54 is greater in the second displacement direction Y than in the first displacement direction X. Thus, the liquid dispensing device according to this embodiment can displace the block rod 40 with a second displacement amount greater than the first displacement amount by the piezoelectric element 11, thereby operating the piston rod 24.

[0026] As shown in Figures 1(b), 1(c), and 2, slits 55 are formed in the second block surface 42, the third block surface 43, and the housing 12, and the first diaphragm 53 and the second diaphragm 54 are fixed by the slits 55. In this embodiment, the first diaphragm 53 and the second diaphragm 54 are shown fitted into the slit 55, but the first diaphragm 53 and the second diaphragm 54 may be bonded to the slit 55, or they may be brazed to the slit 55 with a metal such as solder. By using the first diaphragm 53 and the second diaphragm 54 between the block rod 40 and the housing 12, excessive movement of the block rod 40 during displacement can be further suppressed. The first diaphragm 53 may be positioned parallel to the first displacement direction X, but it is preferable to position it at a small angle α of 1 to 2° with respect to the first displacement direction X, as shown in Figure 1(b).

[0027] The block rod 40 is made of cemented carbide. By making the block rod 40 of cemented carbide, it can be made highly rigid and heavy, which makes it easier to close the nozzle 21, enabling liquid dispensing at a low voltage and allowing dispensing of high-viscosity liquids. Furthermore, the block rod 40 can also be made of silicon nitride or alumina. By making the block rod 40 out of silicon nitride or alumina, it becomes lighter, making it easier to open the nozzle 21, and it can be driven at a higher frequency compared to cemented carbide or stainless steel. The first diaphragm 53 and the second diaphragm 54 are made of stainless steel or titanium alloy. By making the first diaphragm 53 and the second diaphragm 54 of stainless steel or titanium alloy, the rigidity and spring properties of the material enable wear-free and long-lasting opening and closing operations of the nozzle 21.

[0028] Figure 3 is a perspective view of a block rod that can be used in the device, with Figure 3(a) being a block rod according to another embodiment different from Figure 2, and Figure 3(b) being a perspective view of a block rod according to yet another embodiment. As shown in Figure 3(a), a cavity 45 can also be formed in the block rod 40. By forming a cavity 45 in the block rod 40 in this way, the block rod 40 becomes lighter, making it easier to open the nozzle 21 and allowing it to be driven at a higher frequency compared to cemented carbide or stainless steel. Furthermore, as shown in Figure 3(b), it is preferable to add a weight material 46 to the block rod 40. By adding a weight material 46 to the block rod 40 in this way, the weight can be adjusted to make it heavier, and the liquid can be discharged at a lower voltage, making it even easier to discharge high-viscosity liquids. The block rod 40 shown in Figures 2 and 3 may be formed by integrally molding the block body 40A and the rod 40B, or the block body 40A and the rod 40B may be formed separately, with the rod 40B attached to the block body 40A, for example, by screw connection. In this way, if the rod 40B is attached to the block body 40A by screw connection, the rod 40B can be replaced with a smaller diameter rod, or with a rod 40B to which a weight material 46 has been added. By making rod 40B a thin-diameter rod, its pressurized flexibility can be increased, improving its sealing performance, and by increasing the weight of rod 40B, the voltage can be reduced.

[0029] Figure 4 is an explanatory diagram showing the relationship between the first displacement and the second displacement in the device. Figure 4(a) is a diagram showing the movement of the first diaphragm, Figure 4(b) is a graph showing the relationship between the first displacement and the second displacement, and Figure 4(c) is a graph showing the relationship between the first displacement and the second displacement depending on the length of the first diaphragm. As shown in Figure 4(a), if the length of the first diaphragm 53 is L, the first displacement is L(1-cosθ) and the second displacement is Lsinθ. As the piezoelectric element 11 extends, the block rod 40 moves to the other side of the housing 12, the first diaphragm 53 and the second diaphragm 54 tilt, and the piston rod 24 moves in the direction Y that closes the nozzle 21. Figure 4(b) shows the first displacement on the horizontal axis and the second displacement on the vertical axis, with the calculated values ​​shown as solid lines and the experimental sites plotted. Figure 4(c) shows the calculated values ​​when the length L of the first diaphragm 53 is 0.7 mm, 1.4 mm, and 2.8 mm, with the horizontal axis representing the first displacement and the vertical axis representing the second displacement.

[0030] Figure 5 is a diagram showing the installation of the liquid supply housing that constitutes the device. Figure 5(a) is a side view showing the liquid supply housing attached to the frame housing, Figure 5(b) is a perspective view of the mounting fixture for the frame housing to which the liquid supply housing is attached, and Figure 5(c) is a perspective view of the liquid supply housing. A mounting fixture 60 is attached to the lower part of the frame housing 10. The mounting fixture 60 has a plurality of wedge-shaped claws 61 formed thereon. The mounting fixture 60 includes a spring member 62 and an operating part 63. The operating part 63 can be used to press the mounting fixture 60 toward the frame housing 10, and the spring member 62 biases the mounting fixture 60 toward the frame housing 10. The liquid supply housing 20 has a projection 26 that engages with the wedge-shaped claw 61. The liquid supply housing 20 also has an engaging recess 27 that holds the heater housing 30.

[0031] Figure 6 is a perspective view of the main parts showing how the liquid supply housing is attached to the frame housing. Figure 6(a) shows the liquid supply housing separated from the frame housing, Figure 6(b) shows the mounting fixture pressed in a direction approaching the frame housing, Figure 6(c) shows the liquid supply housing in contact with the frame housing, Figure 6(d) shows the liquid supply housing attached to the frame housing by engaging the projection with the wedge-shaped claw, and Figure 6(e) shows the heater housing attached to the liquid supply housing. Figure 6(f) is a cross-sectional view of the main parts showing the attachment of the heater housing and the liquid supply housing.

[0032] Figure 6(a) shows the liquid supply housing 20 separated from the frame housing 10 and the mounting fixture 60 attached to the frame housing 10. In the state shown in Figure 6(a), the mounting fixture 60 is biased in the direction away from the frame housing 10 (arrow A) by the biasing force of the spring member 62. From the state shown in Figure 6(a), pressing the operating part 63 in the direction of the frame housing 10 (arrow B), as shown in Figure 6(b), causes the wedge-shaped claw 61 formed on the mounting fixture 60 to slide in the direction of arrow C. With the operating section 63 pressed, the upper surface of the liquid supply housing 20 is brought into contact with the lower surface of the frame housing 10, as shown in Figure 6(c). Then, by releasing the pressure on the operating part 63, the mounting fixture 60 slides along the lower surface of the frame housing 10 in the direction of arrow A due to the biasing force of the spring member 62, as shown in Figure 6(d). As a result, the projection 26 engages with the wedge-shaped claw 61, and the liquid supply housing 20 can be attached to the frame housing 10. After attaching the liquid supply housing 20 to the frame housing 10, the heater housing 30 is attached to the liquid supply housing 20 as shown in Figure 6(e). The heater housing 30 is attached to the frame housing 10 by a pivot shaft 31. The heater housing 30 is attached to the liquid supply housing 20 by rotating the heater housing 30 around the pivot shaft 31 and engaging the protruding portion 32 provided on the heater housing 30 with the engaging recess 27. As shown in Figure 6(f), the tip of the projection 32 has a displaceable sphere 32a, which engages with the engagement recess 27. The reverse order is followed when removing the liquid supply housing 20 from the frame housing 10. In this way, by making the liquid supply housing 20 detachable from the frame housing 10, the liquid and the diameter of the nozzle 21 can be easily changed. As described above, according to this embodiment, the displacement from the piezoelectric element 11 can be efficiently transmitted to the piston rod 24 via the block rod 40 connected by the first diaphragm 53 and the second diaphragm 54, and the nozzle 21 can be opened and closed at high speed using the piezoelectric element 11 with low force generation and low capacitance.

[0033] Figure 7 is an explanatory diagram of the liquid dispensing control method using the same device. In Figure 7, the horizontal axis represents time, and the vertical axis represents the voltage applied to the piezoelectric element. When a first voltage V1 is applied to the piezoelectric element 11, the piezoelectric element 11 extends, and when a second voltage V2 is applied to the piezoelectric element 11, the piezoelectric element 11 contracts. In this embodiment, the liquid dispensing control method sets the position in which the nozzle 21 is closed by changing the first voltage V1, and sets the position in which the nozzle 21 is open by changing the second voltage V2. As shown in Figure 7, applying a voltage Va causes the piston rod 24 to contact the nozzle 21. However, by applying a second voltage V2, which is higher than the voltage Va, the piston rod 24 can press against the nozzle 21, thereby reliably closing the nozzle 21. Furthermore, the stroke of the piston rod 24 can be changed by the second voltage V2. The stroke of the piston rod 24 increases when the second voltage V2 is lowered and decreases when the second voltage V2 is increased. Thus, in the liquid dispensing control method according to this embodiment, the pressing force of the piston rod 24 against the nozzle 21 is adjusted by changing the first voltage V1, and the coating diameter of the liquid droplets is adjusted by changing the second voltage V2. Therefore, by adjusting the first voltage V1 and the second voltage V2 applied to the piezoelectric element 11, the pressing force of the piston rod 24 against the nozzle 21 can be adjusted, and the diameter of the liquid droplets can be adjusted by changing the amount of liquid discharged with a single opening and closing of the nozzle 21. [Industrial applicability]

[0034] The present invention allows for the use of, for example, underfill, moisture-proof coating agent, UV adhesive, grease, oil, silver paste, paint, ink, primer, and solvent as the liquid agent, and enables the intermittent discharge of these liquid agents at high speed. [Explanation of Symbols]

[0035] 10-frame cabinet 11. Driving source (piezoelectric element) 12 Housing 13 Heat-dissipating elastic resin 14 Stainless steel cylindrical housing 15 Heatsink 16 Rod biasing means 16a First rod biasing means 16b Second rod biasing means 17 Pistons 18. Preloading spring 20 Liquid supply housing 21 nozzles 22 Liquid supply unit 23 Liquid supply channel 24 Piston Rods 25 rod holes 26 Protrusion 27 Engaging recess 30 Heater enclosure 31. Rotating shaft 32 Protrusion 32a Sphere 40 Block Rods 40A Block 40B Rod 41 First block surface 42 Second block surface 43 Third Block Surface 45 Cavity 46 Heavy materials 51 Cylindrical roller 52 Buffer plate 53 1st diaphragm 54 Second diaphragm 55 slits 60 Mounting hardware 61 Wedge-shaped claws 62 Spring component 63 Operation section Va Voltage V1 First Voltage V2 Second voltage X direction (first displacement direction) Y direction (second displacement direction) α small angle

Claims

1. A nozzle for dispensing liquid, A liquid supply passage for supplying the liquid to the nozzle, A piston rod that opens and closes the nozzle and A rod biasing means for biasing the piston rod in the direction of opening the nozzle, and a block rod for biasing the piston rod in the direction of closing the nozzle, A drive source for operating the block rod and Equipped with, A piezoelectric element is used as the drive source, By applying a voltage, the piezoelectric element is extended. As the piezoelectric element reaches the extended state, a first displacement is applied to the block rod from the first displacement direction. The block rod, upon being subjected to the first displacement, moves in a second displacement direction different from the first displacement direction, with a second displacement greater than the first displacement. As the block rod moves in the second displacement direction, the piston rod moves. A liquid dispensing device, It has a housing that accommodates the block rod, The aforementioned block rod includes: A first block surface that receives the force generated by the piezoelectric element, A second block surface parallel to the second displacement direction and facing the first block surface, A third block surface that is not parallel to the second displacement direction and faces the first block surface and It has, Multiple cylindrical rollers are arranged on the first block surface. Multiple first diaphragms are arranged between the second block surface and the housing. A plurality of second diaphragms are arranged between the third block surface and the housing. The aforementioned block rod is The cylindrical roller moves in the second displacement direction, Movement in the first displacement direction and the second displacement direction by the first diaphragm and the second diaphragm A liquid dispensing device characterized by the following features.

2. The amount of movement of the block rod by the first and second diaphragms is greater in the second displacement direction than in the first displacement direction. The liquid dispensing device according to feature 1.

3. Slits are formed in the second block surface, the third block surface, and the housing, and the first diaphragm and the second diaphragm are fixed by the slits. The liquid dispensing device according to feature 1.

4. The diaphragm is made of stainless steel or titanium alloy. The liquid dispensing device according to feature 1.

5. The aforementioned block rod is formed from cemented carbide. The liquid dispensing device according to feature 1.

6. A weight can be added to the aforementioned block rod. The liquid dispensing device according to feature 1.

7. The block rod is formed of silicon nitride or alumina. The liquid dispensing device according to feature 1.

8. A cavity was formed in the aforementioned block rod. The liquid dispensing device according to feature 1.

9. The piezoelectric element is surrounded by a heat-dissipating elastic resin. The outer surface of the heat-dissipating elastic resin is covered with a stainless steel cylindrical housing. The heat sink is in contact with the aforementioned stainless steel cylindrical housing. The liquid dispensing device according to feature 1.

10. A liquid supply housing forming the nozzle and the liquid supply passage, The block rod, the drive source, and the frame housing that accommodates the housing Equipped with, The liquid supply housing is made detachable from the frame housing. The liquid dispensing device according to feature 1.

11. A liquid dispensing control method using a liquid dispensing device according to any one of claims 1 to 10, The piezoelectric element is extended by applying a first voltage to it. By applying a second voltage to the piezoelectric element, it is brought into a contracted state. By changing the first voltage, the position in which the nozzle is closed is set. By changing the second voltage, the position in which the nozzle is opened is set. The pressing force of the piston rod against the nozzle is adjusted by changing the first voltage. The diameter of the liquid droplets is adjusted by changing the second voltage. A method for controlling the dispensing of liquid, characterized by the features described above.

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