A variable-stroke microscale capacitance gauge

Abstract

The application discloses a stroke-variable micro-scale capacitive measuring instrument, and relates to the field of high-precision optical detection technology, which is used for detecting the relative position between two adjacent lenses in a telescope mirror array, and comprises a target plate used for mounting a measured target object, a sensor carrier provided with a sensor element used for detecting the position of the measured target object, a rooting block fixedly connected with the lenses through a gluing mode, two bases respectively used for mounting the target plate and the sensor carrier, and a height adjusting unit arranged on the bases and configured to adjust the relative height of the target plate and / or the sensor carrier relative to the rooting block.

Description

Technical Field

[0001] This invention relates to the field of high-precision optical inspection technology, specifically to a variable-stroke microscale capacitive measuring instrument. Background Technology

[0002] In the reflector systems of astronomical telescopes, a reflective array structure composed of multiple sub-mirrors is often used to obtain greater light throughput and higher angular resolution. This structure requires each sub-mirror to meet certain spatial positional requirements during assembly and operation to ensure the optical co-phase characteristics of the entire reflector. Therefore, high-precision displacement sensors need to be placed between adjacent sub-mirrors to detect their relative positions in real time, serving as the basis for subsequent active optics system calibration.

[0003] To achieve high-precision measurement of the relative position of adjacent mirrors, capacitive displacement sensors, which offer high measurement accuracy, high response speed, and non-contact measurement, are typically used. However, the measurement stroke of high-precision capacitive sensors is generally extremely small, only suitable for detecting position changes at the nanometer level. During the assembly of a telescope mirror array, factors such as machining accuracy, assembly tooling, and manual operation can cause initial installation errors between adjacent mirrors to reach 2-3 mm. This error is far greater than the effective measurement stroke of existing high-precision sensors, making it impossible to directly install them. If the sensors are forcibly placed according to the design position, the initial installation deviation of the mirrors will cause the initial distance between the sensor's detection end and the measured end to exceed its effective measurement range, preventing the sensor from outputting a valid detection signal and potentially causing physical damage to the sensor components due to mechanical interference. On the other hand, increasing the sensor's measurement stroke to accommodate the initial installation error would significantly sacrifice the sensor's measurement accuracy, failing to meet the nanometer-level position detection requirements of the telescope mirror array. Summary of the Invention

[0004] The purpose of this invention is to provide a variable-stroke microscale capacitive measuring instrument to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a variable-stroke microscale capacitance measuring instrument for detecting the relative position between two adjacent mirrors in a telescope reflector array, comprising:

[0006] The target plate is used to mount the object being tested.

[0007] The sensor carrier is equipped with sensor elements for detecting the position of the target object.

[0008] The rooting block is fixed to the lens by adhesive.

[0009] The base has two parts, one for mounting the target board and the other for mounting the sensor carrier.

[0010] A height adjustment unit is disposed on the base; the height adjustment unit is configured to adjust the relative height between the target plate and / or sensor carrier and the rooting block;

[0011] The fastening unit is configured to fix the target plate or sensor carrier relative to the base and rooting block.

[0012] As a further aspect of the present invention, the height adjustment unit includes an adjustment plate, a third contact, and a fourth contact.

[0013] The adjustment plate is disposed between the base and the target plate or sensor carrier, and is in contact with the target plate or sensor carrier;

[0014] The third contact point is set to at least three;

[0015] The fourth contact is provided in multiple groups, and each group of the fourth contact includes multiple fourth contacts corresponding to the number of the third contacts; the heights of the multiple groups of fourth contacts are different.

[0016] The third and fourth contacts are in contact with each other, with one of them located on the base and the other on the adjustment plate.

[0017] As a further embodiment of the present invention, the multiple sets of the fourth contacts are arranged in a circular array.

[0018] As a further embodiment of the present invention, the height adjustment unit includes an adjustment plate, a V-groove, and ball bearings;

[0019] The adjustment plate is disposed between the base and the target plate or sensor carrier, and is in contact with the target plate or sensor carrier;

[0020] The ball bearings are configured to be at least three;

[0021] The V-grooves are provided in multiple sets, and each set of V-grooves contains a plurality of V-grooves corresponding to the number of balls; the multiple sets of V-grooves are arranged in a circumferential array and have different depths.

[0022] The ball bearing can be engaged in the V-groove, with one of them located on the base and the other on the adjustment plate.

[0023] As a further embodiment of the present invention, the V-groove is arranged at an angle.

[0024] As a further embodiment of the present invention, the adjustment plate is rotatably connected to the base and can slide in a direction perpendicular to the lens.

[0025] As a further embodiment of the present invention, the height adjustment unit further includes a first contact; the first contact is configured to be at least three, the first contact is fixed to the top of the adjustment plate, and the top end abuts against the target plate or sensor carrier.

[0026] As a further embodiment of the present invention, the fastening unit includes a push rod, a pressure plate, a screw, and a nut; the push rod is fixedly installed on the base and is used to apply a horizontal pushing force to the target plate or sensor carrier, so that the target plate or sensor carrier is pressed tightly against the base; the pressure plate is disposed above the target plate or sensor carrier; the screw is fixed to the rooting block; the nut is threadedly connected to the screw and fits against the top surface of the pressure plate; by rotating the nut, the pressure plate can apply a downward pushing force to the target plate or sensor carrier.

[0027] As a further embodiment of the present invention, an elastic element is provided between the nut and the pressure plate; the top and bottom surfaces of the elastic element are respectively in contact with the nut and the pressure plate.

[0028] As a further embodiment of the present invention, a second contact is fixed on the base, and the second contact is arranged opposite to the push rod.

[0029] Compared with the prior art, the beneficial effects of the present invention are:

[0030] This invention uses an adhesive bonding method to fix the rooting block to the lens, avoiding the need to process mechanical attachment points on the vulnerable optical surface, effectively protecting the optical performance and structural integrity of the lens. Simultaneously, the height adjustment unit allows for flexible adjustment of the target plate or sensor carrier's height, adapting to the measurable travel requirements of sensor elements in different scenarios and improving the device's applicability. The target plate, sensor carrier, base, and rooting block are relatively fixed by a fastening unit, preventing drift of the capacitive sensor during operation and ensuring measurement accuracy. Furthermore, the measurement data is superimposed with the height adjustment amount, ensuring the accuracy and completeness of the results. Attached Figure Description

[0031] Figure 1 This is a three-dimensional schematic diagram of the measuring instrument of the present invention in use;

[0032] Figure 2 for Figure 1 Enlarged view of a portion of point A in the middle;

[0033] Figure 3 This is a frontal view of the measuring instrument of the present invention in use;

[0034] Figure 4 for Figure 3 Enlarged view of a section at point B in the middle;

[0035] Figure 5 This is a cross-sectional schematic diagram showing the connection and positional relationship between the target plate and the base of the present invention;

[0036] Figure 6 This is a schematic diagram showing the positional relationship between the second contact point and the push rod on the base of the present invention;

[0037] Figure 7 This is a schematic diagram of the installation state of the third contact of the present invention;

[0038] Figure 8 This is a schematic diagram of the fourth contact point of the present invention in its installation state;

[0039] Figure 9 This is a schematic diagram of the height difference of multiple sets of fourth contact points in this invention;

[0040] Figure 10 This is a schematic diagram showing the connection and positional relationship between the adjusting plate, V-groove, ball bearings, target plate, and base of the present invention;

[0041] Figure 11 This is a schematic diagram of the V-groove structure of the present invention;

[0042] Figure 12 This is a schematic diagram of the ball bearing structure of the present invention;

[0043] Figure 13 This is a schematic diagram of the depth difference of multiple V-grooves in this invention;

[0044] Figure 14 This is a schematic diagram of the V-groove tilting state of the present invention;

[0045] Figure 15 This is a schematic diagram illustrating the impact of V-groove machining depth error on measurement accuracy according to the present invention.

[0046] Figure 16 This is a schematic diagram illustrating the impact of ball bearing machining errors on measurement accuracy according to the present invention.

[0047] Figure 17 This is a schematic diagram illustrating the impact of V-groove machining angle error on measurement accuracy according to the present invention.

[0048] Figure 18 This is a schematic diagram illustrating the impact of the height error of the base or adjustment plate on the measurement accuracy of the present invention.

[0049] The attached figures are labeled as follows:

[0050] 1-Lens, 2-Target plate, 3-Sensor carrier, 4-Rooting block, 5-Base, 6-First contact, 7-Adjusting plate, 8-Second contact, 9-Third contact, 10-Fourth contact, 11-V-groove, 12-Ball bearing, 13-Push rod, 14-Pressure plate, 15-Elastic element, 16-Screw, 17-Nut. Detailed Implementation

[0051] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0052] Please see Figures 1-18 This invention provides a technical solution: a variable-stroke microscale capacitive measuring instrument for detecting the relative position between two adjacent mirrors 1 in a telescope reflector array, comprising a target plate 2, a sensor carrier 3, a rooting block 4, a base 5, a height adjustment unit, and a fastening unit; the target plate 2 is used to mount the target object; the sensor carrier 3 is provided with a sensor element for detecting the position of the target object; the rooting block 4 is fixed to the mirror 1 by adhesive; two bases 5 are provided, and are respectively used to mount the target plate 2 and the sensor carrier 3; the height adjustment unit is provided on the base 5; the height adjustment unit is configured to adjust the relative height between the target plate 2 and / or the sensor carrier 3 and the rooting block 4; the fastening unit is configured to fix the target plate 2 or the sensor carrier 3 relative to the base 5 and the rooting block 4.

[0053] refer to Figures 1-4 In this device, the target object can be a metal plate, and the corresponding sensor element is a capacitive sensor. First, the anchoring block 4 is fixed to the lens 1 by adhesive bonding to avoid setting mechanical attachment points on the vulnerable optical surface, thus protecting the optical performance of the lens 1. Then, according to the relative position of adjacent lenses 1, the height of the target plate 2 or sensor carrier 3 is adjusted by the height adjustment unit to adapt to the measurable stroke of the sensor element. Next, the fastening unit applies downward pressure to the target plate 2 or sensor carrier 3, so that the target plate 2 or sensor carrier 3 is pressed against the base 5, thereby fixing the target plate 2 or sensor carrier 3 relative to the base 5 and the anchoring block 4, ensuring the stability of the measurement reference. Finally, the sensor element and the target object are fixed to the sensor carrier 3 and the target plate 2 respectively, thus realizing high-precision measurement of the relative position of two adjacent lenses 1. The final measurement data needs to be superimposed with the height adjustment unit to ensure the completeness and accuracy of the results.

[0054] This invention uses an adhesive bonding method to fix the rooting block to the lens, avoiding the need to process mechanical attachment points on the vulnerable optical surface, effectively protecting the optical performance and structural integrity of the lens. Simultaneously, the height adjustment unit allows for flexible adjustment of the target plate or sensor carrier's height, adapting to the measurable travel requirements of sensor elements in different scenarios and improving the device's applicability. The target plate, sensor carrier, base, and rooting block are relatively fixed by a fastening unit, preventing drift of the capacitive sensor during operation and ensuring measurement accuracy. Furthermore, the measurement data is superimposed with the height adjustment amount, ensuring the accuracy and completeness of the results.

[0055] Example 1:

[0056] Specifically, such as Figures 5-9 As shown, the height adjustment unit includes an adjustment plate 7, a third contact 9, and a fourth contact 10; the adjustment plate 7 is disposed between the base 5 and the target plate 2 or sensor carrier 3, and is in contact with the target plate 2 or sensor carrier 3; the third contact 9 is provided in at least three sets; the fourth contact 10 is provided in multiple sets, each set of the fourth contact 10 containing multiple points corresponding to the number of the third contact 9; the heights of the multiple sets of the fourth contact 10 are different; the third contact 9 and the fourth contact 10 are in contact with each other, and one of them is disposed on the base 5, and the other is disposed on the adjustment plate 7.

[0057] refer to Figure 7 At least three third contact points 9 form a stable three-point support reference, ensuring the relative posture stability between the adjustment plate 7 and the base 5, avoiding tilting or wobbling, and providing a reliable positioning basis for height adjustment; Reference Figure 8 a1, a2, a3, a4, a5, and a6 represent fourth contact points 10 at different heights, and as shown... Figure 9 As shown, the heights of a1, a2, a3, a4, a5, and a6 increase sequentially. Multiple sets of fourth contacts 10 correspond to different height levels, and the number of contacts in each set corresponds one-to-one with the number of third contacts 9. When the height needs to be adjusted, the adjusting plate 7 is rotated or translated relative to the base 5, so that the fourth contacts 10 in different sets contact with the third contacts 9 one by one. The height difference of each set of fourth contacts 10 changes the vertical distance between the adjusting plate 7 and the base 5. The adjusting plate 7 is in close contact with the target plate 2 or the sensor carrier 3, and its height change is directly transmitted to the target plate 2 or the sensor carrier 3, thereby accurately adjusting the initial distance between the sensor element and the target object being measured, so that the distance between the two falls within the effective measurement stroke range of the capacitive sensor. After the target height level is selected, the third contact 9 is in complete contact with the corresponding set of fourth contacts 10, forming a rigid support. With the locking action of the subsequent fastening unit, the adjusted height is kept constant during the measurement process, avoiding displacement drift that affects the measurement accuracy.

[0058] Specifically, such as Figure 8 As shown, multiple sets of the fourth contacts 10 are arranged in a circular array. The multiple sets of fourth contacts 10 are evenly distributed along the circumference. By rotating the adjustment plate 7 relative to the base 5, the fourth contacts 10 of different sets can be aligned and contacted with the third contacts 9 in sequence, realizing continuous and convenient switching of height levels without disassembly or reassembly, greatly simplifying the height adjustment operation. The circular arrangement can make full use of space, integrating multiple sets of fourth contacts 10 of different heights in a limited area, realizing a wide range and multiple height adjustment levels. It can better adapt to the effective measurement stroke requirements of the sensor under different initial installation errors and improve the versatility of the device.

[0059] Example 2:

[0060] Specifically, such as Figures 10-13 As shown, the height adjustment unit includes an adjustment plate 7, a V-groove 11, and ball bearings 12; the adjustment plate 7 is disposed between the base 5 and the target plate 2 or sensor carrier 3, and is in contact with the target plate 2 or sensor carrier 3; at least three ball bearings 12 are provided; multiple sets of V-grooves 11 are provided, each set of V-grooves 11 containing multiple ball bearings 12 corresponding to the number of ball bearings 12; the multiple sets of V-grooves 11 are arranged in a circumferential array, and the depths are different; the ball bearings 12 can be inserted into the V-grooves 11, and one of them is disposed on the base 5, and the other is disposed on the adjustment plate 7.

[0061] refer to Figure 12 At least three ball bearings 12 engage with the corresponding number of V-grooves 11, forming a stable three-point support structure, providing a reliable attitude positioning reference for the adjusting plate 7 and the base 5, and preventing tilting, shaking, or offset; Reference Figure 11 b1, b2, b3, b4, b5, and b6 represent V-grooves 11 of different depths, and as shown... Figure 13 As shown, the depths of b1, b2, b3, b4, b5, and b6 increase sequentially. Multiple sets of V-grooves 11 are distributed in a circumferential array with varying depths. By rotating the adjustment plate 7 relative to the base 5, the ball bearing 12 slides out of the current set of V-grooves 11 and engages with another set of V-grooves 11. The difference in groove depth changes the vertical distance between the adjustment plate 7 and the base 5, thus completing the height level switching. The height change of the adjustment plate 7 is directly transmitted to the target plate 2 or the sensor carrier 3, precisely adjusting the initial distance between the sensor element and the target object, ensuring it falls within the effective measurement stroke range of the capacitive sensor, and adapting to measurement requirements with different initial installation errors. After the ball bearing 12 engages with the V-grooves 11, it forms a mechanical locking constraint, limiting the circumferential rotation and axial movement of the adjustment plate 7. With the help of the fastening unit, it is further locked to ensure a constant height during the measurement process and avoid displacement drift affecting accuracy.

[0062] Compared to Embodiment 1, Embodiment 2 features a design for the ball bearing 12 and the V-groove 11. The ball bearing 12 and the V-groove 11 utilize rolling friction, resulting in less resistance and smoother rotation during gear shifting, eliminating any sense of jamming. The V-groove encloses the ball bearing, providing a larger contact area and more even force distribution. The three-point support offers superior stability, effectively suppressing tilting and wobbling of the adjustment plate. The wear from rolling friction is far less than the wear from point / surface contact between contacts, leading to a longer component lifespan and lower maintenance costs. The ball bearing provides a distinct locking feel when it engages with the V-groove, allowing for intuitive perception of gear shifting and preventing misalignment, thus enhancing adjustment reliability. The circumferential array of V-grooves and the ball bearing structure also maximizes space utilization, better meeting the miniaturization requirements of precision optical measurement.

[0063] Specifically, the diameter of the ball 12 is 3mm-5mm, and the included angle of the V-groove 11 is 90°-120°. The positioning accuracy of the height adjustment unit of the V-groove 11 and the ball 12 is mainly affected by the following four types of key processing errors. The following analysis takes the diameter of the ball 12 of 3mm and 5mm and the included angle of the V-groove 11 of 90° and 120° as examples.

[0064] I. The Influence of V-groove 11 Depth Error, see reference Figure 15 ;

[0065] When the diameter D of the ball 12 is 3mm, the included angle θ of the V-groove 11 is 90°, and the depth h of the V-groove 11 changes to h+Δh, the error caused in the vertical direction is:

[0066] When the diameter D of the ball 12 is 5mm, the included angle θ of the V-groove 11 is 120°, and the depth h of the V-groove 11 changes to h+Δh, the error caused in the vertical direction is:

[0067] II. The Influence of Ball Bearing Diameter Error, Reference Figure 16 ;

[0068] When the diameter D of ball 12 is 3mm, the included angle θ of V-groove 11 is 90°, and the diameter D of ball 12 changes to D+ΔD, the error caused in the vertical direction is:

[0069] When the diameter D of ball 12 is 5mm, the included angle θ of V-groove 11 is 120°, and the diameter D of ball 12 changes to D+ΔD, the error caused in the vertical direction is:

[0070] III. The Influence of V-groove Angle Error (Refer to) Figure 17 ;

[0071] When the diameter D of the ball 12 is 3mm, the included angle θ of the V-groove 11 is 90°, and the angle θ of the V-groove 11 changes to θ±Δθ, the error caused in the vertical direction is:

[0072] When the diameter D of the ball 12 is 5mm, the included angle θ of the V-groove 11 is 120°, and the angle θ of the V-groove 11 changes to θ±Δθ, the error caused in the vertical direction is:

[0073] IV. The Influence of Base Height Machining Error (Reference) Figure 18 ;

[0074] When the diameter D of the ball bearing 12 is 3mm, the included angle θ of the V-groove 11 is 90°, and the height H of the base changes to H+ΔH, the error caused in the vertical direction is:

[0075] When the diameter D of the ball bearing 12 is 5mm, the included angle θ of the V-groove 11 is 120°, and the height H of the base changes to H+ΔH, the error caused in the vertical direction is:

[0076] The four error factors are integrated in conjunction with the current processing errors;

[0077] When the diameter D of ball 12 is 3mm and the included angle θ of V-groove 11 is 90°, the results are shown in the table below:

[0078]

[0079] When the diameter D of ball 12 is 5mm and the included angle θ of V-groove 11 is 120°, the results are shown in the table below:

[0080]

[0081] Therefore, when the diameter D of the ball 12 is 5mm and the included angle θ of the V-groove 11 is 120°, the measurement error caused by the machining error is the smallest. Thus, the diameter of the ball 12 is preferably 5mm and the included angle of the V-groove 11 is preferably 120°.

[0082] Specifically, such as Figure 14 As shown, the V-groove 11 is arranged at an angle. Figure 14 In the middle, 'c' represents the angle between the V-groove 11 and the base 5. The weight or load of the adjusting plate 7 will be transmitted to the inclined surface of the V-groove 11 through the ball 12, generating an upward component force along the inclined surface. This component force will counteract the tendency of the ball 12 to slide towards the lower end of the groove. The ball 12 will be "wedge-tight" by the inclined surface of the groove. The ball 12 can achieve mechanical self-locking in the V-groove 11. The adjusting plate 7 does not need additional limiters to avoid drifting in the horizontal direction and ensure the stability of the adjusting plate 7.

[0083] Specifically, the adjustment plate 7 is rotatably connected to the base 5 and can slide in a direction perpendicular to the lens 1, thereby limiting the degree of freedom of the adjustment plate 7 in the horizontal direction and preventing the adjustment plate 7 from drifting in the horizontal direction.

[0084] Specifically, such as Figure 5 and Figure 10 As shown, the height adjustment unit further includes a first contact 6; the first contact 6 is configured with at least three, and the first contact 6 is fixed to the top of the adjustment plate 7, with its top end abutting against the target plate 2 or sensor carrier 3; the at least three first contacts 6 form a stable three-point support plane on the top of the adjustment plate 7, and uniformly abut against the bottom surface of the target plate 2 or sensor carrier 3, so as to accurately and without tilting the height change of the adjustment plate 7 to the target plate 2 or sensor carrier 3; the contact-type abutment transforms surface contact into multi-point contact, disperses local stress, avoids wear and deformation caused by long-term contact between the adjustment plate 7 and the target plate 2 or sensor carrier 3, and extends the service life of the device; at the same time, if a single contact wears out, it can be replaced individually, resulting in lower maintenance costs.

[0085] Specifically, such as Figure 5 As shown, the fastening unit includes a push rod 13, a pressure plate 14, a screw 16, and a nut 17. The push rod 13 is fixedly installed on the base 5 and is used to apply a horizontal pushing force to the target plate 2 or sensor carrier 3, so that the target plate 2 or sensor carrier 3 is pressed tightly against the base 5. The pressure plate 14 is positioned above the target plate 2 or sensor carrier 3. The screw 16 is fixed to the rooting block 4. The nut 17 is threadedly connected to the screw 16 and is in contact with the top surface of the pressure plate 14. By rotating the nut 17, the pressure plate 14 can apply a downward pushing force to the target plate 2 or sensor carrier 3. After the rooting block 4 is bonded to the lens 1, rotating the nut 17 causes the nut 17 to apply downward pressure to the target plate 2 or sensor carrier 3 through the pressure plate 14, thereby pressing the target plate 2 or sensor carrier 3 against the base 5, and fixing the target plate 2 or sensor carrier 3 relative to the base 5 through pressure.

[0086] Specifically, such as Figure 5 As shown, an elastic element 15 is provided between the nut 17 and the pressure plate 14; the top and bottom surfaces of the elastic element 15 are respectively in contact with the nut 17 and the pressure plate 14; when the nut 17 is rotated, the pressure applied by the nut 17 is transmitted to the pressure plate 14 through the elastic element 15.

[0087] Specifically, such as Figure 6 As shown, a second contact 8 is fixed on the base 5, and the second contact 8 is arranged opposite to the push rod 13; the push rod 13 applies a horizontal pushing force to the target plate 2 toward the second contact 8, so that when the target plate 2 and the base 5 are pressed together, the target plate 2 contacts the second contact 8.

[0088] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0089] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A variable-stroke microscale capacitive measuring instrument for detecting the relative position between two adjacent mirrors (1) in a telescope mirror array, characterized in that: include: The target plate (2) is equipped with the target object to be measured; The sensor carrier (3) is equipped with a sensor element for detecting the position of the target object; The base (5) has two parts, which can fix the target plate (2) and the sensor carrier (3) relative to the two lenses (1) respectively; A height adjustment unit is set on the base (5); the height adjustment unit is configured to adjust the relative height of the target plate (2) and / or the sensor carrier (3) and the lens (1) by rotation, so that the relative distance between the sensing element and the target object being measured is adapted to the measurement stroke of the sensing element, so as to achieve high-precision measurement of the relative position of two adjacent lenses (1).

2. The variable stroke microscale capacitance measuring instrument according to claim 1, characterized in that: The height adjustment unit includes an adjustment plate (7), a third contact (9), and a fourth contact (10). The adjustment plate (7) is disposed between the base (5) and the target plate (2) or the sensor carrier (3), and is in contact with the target plate (2) or the sensor carrier (3); The third contact (9) is configured to be at least three; The fourth contact (10) is provided in multiple groups, and each group of the fourth contact (10) contains multiple fourth contact points (10) corresponding to the number of the third contact points (9); the heights of the multiple groups of the fourth contact points (10) are different; The third contact (9) and the fourth contact (10) are in contact with each other, and one of them is located on the base (5) and the other is located on the adjustment plate (7).

3. The variable stroke microscale capacitance measuring instrument according to claim 2, characterized in that: The multiple sets of the fourth contact points (10) are arranged in a circular array.

4. The variable stroke microscale capacitance measuring instrument according to claim 1, characterized in that: The height adjustment unit includes an adjustment plate (7), a V-groove (11), and a ball bearing (12); The adjustment plate (7) is disposed between the base (5) and the target plate (2) or the sensor carrier (3), and is in contact with the target plate (2) or the sensor carrier (3); The ball bearings (12) are configured to be at least three; The V-groove (11) is provided in multiple sets, and each set of the V-groove (11) contains multiple balls (12) corresponding to the number of balls (12); the multiple sets of V-groove (11) are arranged in a circumferential array and have different depths. The ball (12) can be inserted into the V-groove (11), and one of them is located on the base (5) and the other is located on the adjustment plate (7).

5. A variable-stroke microscale capacitance measuring instrument according to claim 4, characterized in that: The V-groove (11) is arranged at an angle.

6. A variable-stroke microscale capacitance measuring instrument according to claim 4, characterized in that: The adjustment plate (7) is rotatably connected to the base (5) and can slide in a direction perpendicular to the lens (1).

7. A variable-stroke microscale capacitive measuring instrument according to claim 2 or 4, characterized in that: The height adjustment unit also includes a first contact (6); the first contact (6) is configured to be at least three, the first contact (6) is fixed to the top of the adjustment plate (7), and the top end abuts against the target plate (2) or the sensor carrier (3).

8. A variable-stroke microscale capacitive measuring instrument according to claim 1, characterized in that: The base (5) is provided with a fastening unit; the fastening unit includes a rooting block (4), a push rod (13), a pressure plate (14), a screw (16), and a nut (17); the rooting block (4) is fixed to the lens (1) by adhesive; the push rod (13) is fixedly installed on the base (5) and is used to apply a horizontal thrust to the target plate (2) or sensor carrier (3) so that the target plate (2) or sensor carrier (3) is close to the base (5); the pressure plate (14) is set above the target plate (2) or sensor carrier (3); the screw (16) is fixed to the rooting block (4); the nut (17) is threaded to the screw (16) and is in contact with the top surface of the pressure plate (14); by rotating the nut (17), the pressure plate (14) can apply a downward thrust to the target plate (2) or sensor carrier (3).

9. A variable-stroke microscale capacitive measuring instrument according to claim 8, characterized in that: An elastic element (15) is provided between the nut (17) and the pressure plate (14); the top and bottom surfaces of the elastic element (15) are respectively attached to the nut (17) and the pressure plate (14).

10. A variable-stroke microscale capacitive measuring instrument according to claim 8, characterized in that: The base (5) is fixed with a second contact (8), which is arranged opposite to the push rod (13).

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