Vibrating pieces, vibrating devices, and oscillators

Abstract

This invention provides a vibrating element made from an AT-cut quartz substrate, which reduces G-sensitivity. [Solution] The vibrating piece 1 is made of an AT-cut quartz plate and comprises a substrate 2 having a first outer edge 21 that intersects with respect to a first direction, the substrate 2 having a first fixing part 4a and a second fixing part 4b fixed to a base, and a slit 31 provided in either the area between the main region 28 and the first fixing part 4a, or between the main region 28 and the second fixing part 4b, when the area where the excitation electrode 3 is located and the area located between the excitation electrode 3 and the first outer edge 21 are defined as the main region 28, and the main region 28 and the area between the main region 28 and the second fixing part 4b, and opening to the front and back surfaces of the substrate 2 and the first outer edge 21.

Description

Technical Field

[0005] , ,

[0001] The present invention relates to a vibrating piece, a vibration device, and an oscillator.

Background Art

[0002] For example, Patent Document 1 discloses a crystal oscillator in which both ends on one side in the length direction of a crystal piece are fixed to the inner bottom surface of a container body by a conductive adhesive, and the other end in the length direction of the crystal piece is fixed by an adhesive. The crystal piece has an auxiliary frame separated from the vibration region by a slit on one side in the length direction. The crystal oscillator described in Patent Document 1 reduces the stress generated due to the difference in expansion coefficient between the container body and the crystal piece by fixing with an adhesive, and maintains the vibration characteristics. On the other hand, in the market, there is a demand for vibration devices with low G sensitivity.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, regarding the G sensitivity, no consideration is given to the crystal piece of Patent Document 1.

Means for Solving the Problems

[0005] <The vibrating piece according to an application example of the present invention comprises a substrate made of an AT-cut quartz plate, having a first outer edge and a second outer edge intersecting with a first direction, and a third outer edge and a fourth outer edge along the first direction, and an excitation electrode provided in the center of the substrate in a plan view, wherein the substrate has a first fixing part provided at a first corner where a virtual line along the first outer edge intersects with the third outer edge and is fixed to a base, a second fixing part provided at a second corner where the virtual line intersects with the fourth outer edge and is fixed to the base, and a slit provided between the main region and the first fixing part, and between the main region and the second fixing part, when the region where the excitation electrode is located and the region located between the excitation electrode and the first outer edge are defined as the main region, and opening to the front and back surfaces of the substrate and the first outer edge.

[0006] A vibration device according to an application example of the present invention comprises a vibrating piece and a base that supports the vibrating piece.

[0007] An oscillator according to an application example of the present invention comprises a vibrating element, an oscillation circuit electrically connected to the vibrating element, and a base in which the vibrating element and the oscillation circuit are housed. [Brief explanation of the drawing]

[0008] [Figure 1] This is a schematic plan view showing the configuration of the vibration device according to the first embodiment. [Figure 2] This is a schematic cross-sectional view of the line A1-A1 in Figure 1. [Figure 3] This is a plan view illustrating the in-plane rotation angle of the vibrating element. [Figure 4] This is a plan view showing the configuration of the vibrating element according to the first embodiment. [Figure 5] This is a cross-sectional view illustrating the forces acting on the vibrating piece. [Figure 6] This is a cross-sectional view illustrating the forces acting on the vibrating piece. [Figure 7] This figure shows the G sensitivity of the vibrating element with respect to L1 / Lx. [Figure 8]This is a plan view showing the configuration of the vibrating element according to the second embodiment. [Figure 9] This figure shows the G sensitivity of the vibrating element with respect to L2 / Lx. [Figure 10] This is a plan view showing the configuration of the vibrating element according to the third embodiment. [Figure 11] This is a plan view showing the configuration of a vibrating element according to a modified example of the third embodiment. [Figure 12] This is a schematic plan view showing the configuration of the oscillator according to the fourth embodiment. [Figure 13] Figure 12 is a schematic cross-sectional view along the line A2-A2. [Modes for carrying out the invention]

[0009] Embodiments of the present invention will be described below with reference to the drawings. In the following drawings, the scale of each layer and component has been altered from that of the actual dimensions in order to make each layer and component recognizable.

[0010] For the sake of explanation, Figures 1-6, 8, and 10-13 illustrate the X-axis, Y'-axis, and Z'-axis as three mutually orthogonal axes. The direction along the X-axis is referred to as the "X-axis direction," the direction along the Y'-axis as the "Y'-axis direction," and the direction along the Z'-axis as the "Z'-axis direction." The tip of the arrow in each axis direction is also called the "+ side," and the base end is called the "- side." The plane parallel to the X-axis and Z'-axis is also called the "XZ' plane." The plan view from the -Y' direction is simply called the "plan view."

[0011] <First Embodiment> A vibration device 100 according to the first embodiment of the present invention will be described with reference to Figures 1 and 2. Figure 1 is a schematic plan view showing the configuration of the vibration device 100 according to the first embodiment. Figure 2 is a schematic cross-sectional view taken along line A1-A1 in Figure 1. Note that Figure 1 shows the device with the cover 90 removed.

[0012] The vibration device 100 is a surface-mounted component in which the vibrating piece 1 is packaged. The vibration device 100 includes a base 80, a vibrating piece 1, and a lid body 90. The base 80 is a flat member that supports the vibrating piece 1, and the lid body 90 is a box-shaped member in which a recess 91 is formed. The package 70 is formed by joining the base 80 and the lid body 90. The vibrating piece 1 is housed in the internal space S of the package 70.

[0013] The base 80 has surfaces 81 and 82 that are in a front-back relationship in the Y' axis direction and parallel to the XZ' plane. The base 80 is substantially rectangular in plan view. The base 80 has two external terminals 83 on the surface 81 on the +Y' side. The base 80 has a pair of electrode pads 84 on the surface 82 on the -Y' side. The pair of electrode pads 84 includes a first electrode pad 85 and a second electrode pad 86. The first electrode pad 85 is electrically connected to one of the external terminals 83. The second electrode pad 86 is electrically connected to the other external terminal 83. The first electrode pad 85 and the second electrode pad 86 are arranged side by side along the Z' axis direction. The constituent material of the base 80 is silicon, but it is not particularly limited and may be, for example, glass or ceramic.

[0014] The lid body 90 is substantially rectangular in plan view and is box-shaped with a recess 91 that opens in the +Y' direction. The opening 92 of the recess 91 of the lid body 90 is joined to the base 80 via a joining member 93, and the recess 91 partitions the internal space S for housing the vibrating piece 1 together with the base 80. Note that the joining of the lid body 90 and the base 80 may be a direct joining without using the joining member 93. Also, the inside of the internal space S is in a decompressed state, preferably a state closer to a vacuum. Thereby, the viscous resistance is reduced and the oscillation characteristics of the vibrating piece 1 are improved. The constituent material of the lid body 90 is silicon, but it is not particularly limited and may be, for example, glass or ceramic.

[0015] The vibrating piece 1 includes a substrate 2, a pair of exciting electrodes 3, a pair of fixing portions 4, and a slit 30.

[0016] The substrate 2 is a plate-shaped body parallel to the XZ' plane formed of quartz, and is an AT-cut quartz plate. The substrate 2 has a first outer edge 21 and a second outer edge 22 along the Z' axis direction, and a third outer edge 23 and a fourth outer edge 24 along the X axis direction. The X axis direction corresponds to the first direction. The substrate 2 is substantially rectangular. In the X axis direction, the first outer edge 21 is located on the +X side, and the second outer edge 22 is located on the -X side. In the Z' axis direction, the third outer edge 23 is located on the +Z' side, and the fourth outer edge 24 is located on the -Z' side.

[0017] The substrate 2 has a first surface 12 and a second surface 13 that are in a front-back relationship in the Y' axis direction. The first surface 12 is the surface on the +Y' side and faces the base 80. The second surface 13 is the surface on the -Y' side and faces the lid 90.

[0018] The in-plane rotation angle Ψ of the vibrating piece 1 in the present embodiment will be described with reference to FIG. 3. FIG. 3 is a plan view for explaining the in-plane rotation angle Ψ of the vibrating piece 1. The in-plane rotation angle Ψ is an angle formed by a virtual line 50 passing through the center of the substrate 2 and parallel to the third outer edge 23 and the fourth outer edge 24 and the X axis in a plan view. Specifically, the in-plane rotation angle Ψ is such that when viewed from the -Y' direction, the virtual line 50 rotates counterclockwise with respect to the X axis.

[0019] In FIGS. 1, FIG. 2, FIG. 4, FIG. 5, and FIG. 6, the in-plane rotation angle Ψ of the vibrating piece 1 is 0°.

[0020] FIG. 4 is a plan view showing the configuration of the vibrating piece 1 according to the first embodiment. A pair of excitation electrodes 3 are provided at the central portion of the substrate 2. The pair of excitation electrodes 3 includes a first excitation electrode 3a disposed on the first surface 12 and a second excitation electrode 3b disposed on the second surface 13. The first excitation electrode 3a and the second excitation electrode 3b overlap each other in a plan view.

[0021] In a plan view, the region where the excitation electrode 3 is located and the region located between the excitation electrode 3 and the first outer edge 21 correspond to the main region 28. The substrate 2 has a slit 30 between the main region 28 and the third outer edge 23. The slit 30 extends along the X-axis direction and opens to the front and back surfaces of the substrate 2 and the first outer edge 21. That is, the slit 30 penetrates the substrate 2 in the thickness direction. Hereafter in this embodiment, the slit 30 will be referred to as the first slit 31.

[0022] In substrate 2, the region between the first slit 31 and the third outer edge 23 is the first arm portion 35. The first arm portion 35 is located on the +Z' side relative to the main region 28. The end of the first slit 31 on the second outer edge 22 side is a closed first crotch portion 33. The region between the first crotch portion 33 and the second outer edge 22 is the first shoulder portion 37. The first shoulder portion 37 connects the main region 28 and the first arm portion 35.

[0023] The first arm 35 has a tip 40 on the +X side. The tip 40 is located on the +X side of the first outer edge 21 in the X-axis direction. That is, the tip 40 is located on the +X side of the imaginary line 51 along the first outer edge 21.

[0024] The pair of fixing parts 4 are fixed to the base 80 (see Figures 1 and 2). The pair of fixing parts 4 are arranged on the first surface 12 of the substrate 2. The pair of fixing parts 4 includes a first fixing part 4a that is electrically connected to the first excitation electrode 3a, and a second fixing part 4b that is electrically connected to the second excitation electrode 3b.

[0025] The first fixing portion 4a is positioned at the tip of the first arm portion 35 in the X-axis direction. That is, the position where the first fixing portion 4a is provided corresponds to the first corner portion 25 where the imaginary line 51 and the third outer edge 23 intersect. The first fixing portion 4a is provided at a position facing the main region 28 via the first slit 31. That is, the first slit 31 is provided between the main region 28 and the first fixing portion 4a.

[0026] The second fixing portion 4b is provided at the second corner 26 where the first outer edge 21 and the fourth outer edge 24 intersect. In other words, the second corner 26 is the region where the imaginary line 51 and the fourth outer edge 24 intersect. The first fixing portion 4a is provided on the +X side of the first outer edge 21 in the X-axis direction. The second fixing portion 4b is provided on the -X side of the first outer edge 21. In other words, the second fixing portion 4b is provided on the second outer edge 22 side of the first fixing portion 4a in the X-axis direction.

[0027] The first fixing part 4a and the second fixing part 4b are aligned in the Z' axis direction. That is, the vibrating piece 1 is fixed to the base 80 at one end in the X axis direction. The vibrating piece 1 is in a so-called cantilevered support state.

[0028] The substrate 2 has lead wires 14 and 15. The first fixed portion 4a is electrically connected to the first excitation electrode 3a by lead wire 14. The second fixed portion 4b is electrically connected to the second excitation electrode 3b by lead wire 15. The lead wire 14 is located on the first surface 12, on the first shoulder portion 37 and the first arm portion 35. The lead wire 15 is located on the second surface 13, between the main region 28 and the fourth outer edge 24.

[0029] The first fixing part 4a and the second fixing part 4b are joined to the first electrode pad 85 and the second electrode pad 86 by a conductive bonding member 16 (see Figures 1 and 2). The fixing part 4 is a connecting electrode that connects to the electrode pad 84. In this way, the vibrating piece 1 is supported by the base 80. When voltage is supplied from the external terminal 83 (see Figure 2), the pair of excitation electrodes 3 apply voltage to the substrate 2 and generate vibration in the vibrating piece 1. The material of the bonding member 16 is not particularly limited and may be Ag paste or Au bump.

[0030] With a vibrating element 1 having such a configuration, the G sensitivity Γ can be reduced. Furthermore, by providing a vibrating element 1 and a base 80 that supports the vibrating element 1, a vibrating device 100 with reduced G sensitivity Γ can be provided.

[0031] One of the contributing factors will be explained using Figures 5 and 6 for comparison. Unlike the vibrating piece 1 in this embodiment, the vibrating piece 10 shown in Figure 5 does not have a slit 30. Figure 5 is a cross-sectional view illustrating the forces acting on the vibrating piece 10. Figure 6 is a cross-sectional view illustrating the forces acting on the vibrating piece 1 in this embodiment. In Figures 5 and 6, the +Y' direction is vertically downward.

[0032] In Figure 5, the +X end of the vibrating piece 10 is fixed to the base 80. On the other hand, the -X end is not fixed to the base 80 and is therefore a so-called free end. The -X end is subjected to a force F1 that attempts to deform it in the +Y' direction due to gravity.

[0033] In this state, if the vibrating piece 10 is subjected to acceleration such as vibration or gravitational acceleration, deformation is likely to occur. When the vibrating piece 10 deforms, its frequency fluctuates. In other words, in such a vibrating piece 10, the G sensitivity Γ is not sufficiently suppressed.

[0034] As shown in Figure 6, in the vibrating piece 1, the -X end is subjected to a force F1 that attempts to deform it in the +Y' direction due to gravity. The vibrating piece 1 has a first slit 31 that is aligned with the X axis and opens to the +X side. Due to the presence of the first slit 31, a force F2 is generated in the vibrating piece 1, starting from the first crotch portion 33 of the first slit 31, that attempts to deform the +X end in the +Y' direction due to gravity. The +X end is the first outer edge 21, and the -X end is the second outer edge 22. In this way, the vibrating piece 1, subjected to forces F1 and F2, becomes less susceptible to deformation even when subjected to acceleration such as vibration. Therefore, the G sensitivity Γ of the vibrating piece 1 is kept low. Thus, even when subjected to acceleration, the frequency fluctuation of the vibrating piece 1 is small.

[0035] The G sensitivity Γ of the vibrating piece 1 changes depending on the balance between forces F1 and F2. It is more preferable that the magnitudes of forces F1 and F2 are approximately the same. The magnitude of force F2 can be adjusted by the position of the first hip portion 33. If the position of the first hip portion 33 is on the -X side, force F2 is large, and if the position of the first hip portion 33 is on the +X side, force F2 is small. In other words, the magnitude of force F2 depends on the length of the first slit 31 in the X-axis direction. Therefore, it is possible to suppress the G sensitivity Γ of the vibrating piece 1 by adjusting the length of the first slit 31.

[0036] Returning to Figure 4, the joining member 16 that joins the first fixing part 4a and the first electrode pad 85 is preferably positioned on the +X side of the dashed line 51 in a plan view. This allows the length of the first arm 35 in the X-axis direction to be increased. As the length of the first arm 35 increases, the distance from the first fixing part 4a to the excitation electrode 3 increases. With this configuration, the strain generated in the vibration device 100 can be absorbed by the first arm 35. The strain generated in the vibration device 100 includes, for example, thermal strain caused by the difference in thermal expansion coefficients between the base 80 and the substrate 2 when the ambient temperature of the vibration device 100 changes, and strain caused by the deformation of the joining member 16 over time. This reduces the frequency change of the vibration device 100.

[0037] Let Lx be the length in the X-axis direction from the first outer edge 21 to the second outer edge 22, and let L1 be the length in the X-axis direction from the first outer edge 21 to the end of the first slit 31 on the second outer edge 22 side. That is, length L1 is the length in the X-axis direction from the first outer edge 21 to the first crotch portion 33. In this case, L1 / Lx is the dimensionless length of the first slit 31.

[0038] The relationship between the length L1 / Lx and the G sensitivity Γ will be described with reference to FIG. 7. FIG. 7 is a diagram showing the G sensitivity Γ with respect to the length L1 / Lx. FIG. 7 shows the simulation results of the vibrating piece 1 with the in-plane rotation angle Ψ being 0°, and also the simulation results of the vibrating piece 1 with the in-plane rotation angle Ψ being 180°. The horizontal axis represents the length L1 / Lx, and the vertical axis represents the G sensitivity Γ. Note that the G sensitivity Γ is the square root of the sum of the squares of the G sensitivity in the X-axis direction, the G sensitivity in the Y' -axis direction, and the G sensitivity in the Z' -axis direction.

[0039] As shown in FIG. 7, when the vibrating piece 1 satisfies the relationship of 0.00 < L1 / Lx ≤ 0.41, the G sensitivity Γ is 0.6 ppb / G or less and is kept small.

[0040] Also, when the vibrating piece 1 satisfies the relationship of 0.00 < L1 / Lx ≤ 0.20, the G sensitivity Γ is 0.4 ppb / G or less and is further kept small.

[0041] The lengths L1 and Lx can be measured using, for example, the measuring microscope of Japanese Industrial Standard JIS B7153:1995. When the end face of the substrate 2 viewed from the Y' -axis direction is inclined with respect to the Y' -axis, the outermost edge of the substrate 2 is measured.

[0042] Although the substrate 2 has been described as being flat, the shape in the plate thickness direction is not particularly limited to this. For example, the region where the excitation electrode 3 is provided may be a forward mesa shape or a reverse mesa shape. Or it may be a convex shape or a bevel shape. Also, in these cases, one surface may be a flat surface and the other surface may be a concave or convex surface.

[0043] Also, although the base 80 has been described as a flat member and the lid 90 has been described as a box-shaped member having a recess 91, it is not particularly limited to this. For example, the base 80 may be replaced with a box-shaped base having a recess, and the lid 90 may be replaced with a flat member as the lid. Also, as a combination, the box-shaped base may be made of ceramic as a constituent material, and the flat lid may be made of metal as a constituent material.

[0044] Furthermore, the shape of the substrate 2 is not limited to a rectangle; for example, it may be square.

[0045] Furthermore, the vibration device 100 is not limited to having a joining member 16 between the fixed part 4 and the electrode pad 84. For example, the fixed part 4 and the electrode pad 84 may be joined by direct metal-to-metal bonding.

[0046] Furthermore, the joining member 16 that joins the first fixing part 4a and the first electrode pad 85 is not limited to being positioned on the +X side of the imaginary line 51 in a plan view. For example, the joining member 16 may be positioned on the -X side of the imaginary line 51 in a plan view, or it may be positioned on the line of the imaginary line 51.

[0047] Furthermore, the tip portion 40 is not limited to being located on the +X side of the virtual line 51 in the X-axis direction. For example, the tip portion 40 may be located on the line of the virtual line 51.

[0048] <Second Embodiment> The vibrating piece 1a according to the second embodiment will be described with reference to Figures 8 and 9. Figure 8 is a plan view showing the configuration of the vibrating piece 1a according to the second embodiment. Figure 9 is a diagram showing the G sensitivity Γ for the vibrating piece 1a with respect to the length L2 / Lx, which will be described later.

[0049] The vibrating piece 1a of the second embodiment includes a substrate 2a, a pair of excitation electrodes 3, a pair of fixing parts 4, and a slit 30. The vibrating piece 1a is the same as the vibrating piece 1 of the first embodiment except for the position of the slit 30.

[0050] The substrate 2a has a slit 30 between the main region 28 and the fourth outer edge 24. Hereafter, in this embodiment, the slit 30 will be referred to as the second slit 32.

[0051] The region of the substrate 2a between the second slit 32 and the fourth outer edge 24 is the second arm portion 36. The second arm portion 36 is located on the -Z' side relative to the main region 28. The end of the second slit 32 on the second outer edge 22 side is the closed second crotch portion 34. The region between the second crotch portion 34 and the second outer edge 22 is the second shoulder portion 38. The second shoulder portion 38 connects the main region 28 and the second arm portion 36.

[0052] The second arm 36 has a tip 40a on the +X side. The tip 40a is located on the +X side of the first outer edge 21 in the X-axis direction. That is, the tip 40a is located on the +X side of the imaginary line 51.

[0053] The first fixing part 4a is provided at the first corner 25a where the first outer edge 21 and the third outer edge 23 intersect. In other words, it is the region where the imaginary line 51 and the third outer edge 23 intersect. The second fixing part 4b is located at the tip of the second arm 36. That is, the position where the second fixing part 4b is provided corresponds to the second corner 26a where the imaginary line 51 and the fourth outer edge 24 intersect. The second fixing part 4b is provided at a position opposite the main region 28 via the second slit 32. That is, the second slit 32 is provided between the main region 28 and the second fixing part 4b. The first fixing part 4a is provided on the -X side of the first outer edge 21. The second fixing part 4b is provided on the +X side of the first outer edge 21 in the X-axis direction. The first fixing part 4a and the second fixing part 4b are aligned in the Z' axis direction.

[0054] Even with a vibrating element 1a having this configuration, the G sensitivity Γ can be reduced.

[0055] Let L2 be the length in the X-axis direction from the first outer edge 21 to the end of the second slit 32 on the second outer edge 22 side. Figure 9 shows the simulation results for vibrating piece 1a with an in-plane rotation angle Ψ of 0°, and also for vibrating piece 1a with an in-plane rotation angle Ψ of 180°. The horizontal axis represents the length L2 / Lx, and the vertical axis represents the G sensitivity Γ.

[0056] As shown in Fig. 9, when the vibrating piece 1a satisfies the relationship of 0.00 < L2 / Lx ≦ 0.41, the G sensitivity Γ is 0.6 ppb / G or less and is suppressed to a small value.

[0057] Also, when the vibrating piece 1a satisfies the relationship of 0.00 < L2 / Lx ≦ 0.14, the G sensitivity Γ is 0.4 ppb / G or less and is further suppressed to a smaller value.

[0058] <Third Embodiment> The vibrating piece 1b according to the third embodiment will be described with reference to Fig. 10. Fig. 10 is a plan view showing the configuration of the vibrating piece 1b according to the third embodiment.

[0059] The vibrating piece 1b of the third embodiment includes a substrate 2b, a pair of excitation electrodes 3, a pair of fixing portions 4, and a slit 30. The vibrating piece 1b is the same as the vibrating piece 1 of the first embodiment except that the position of the tip portion 40b is different.

[0060] The region between the first slit 31 and the third outer edge 23 of the substrate 2b is the first arm portion 35b. The first arm portion 35b is provided on the +Z' side with respect to the main region 28.

[0061] The first arm portion 35b has a tip portion 40b on the +X side. The tip portion 40b is located on the -X side of the first outer edge 21 in the X-axis direction. That is, the tip portion 40b is located on the -X side of the virtual line 51. In other words, the length of the first arm portion 35b in the X-axis direction is shorter than the length Lx. Therefore, the first fixing portion 4a is provided on the second outer edge 22 side of the second fixing portion 4b in the X-axis direction.

[0062] With such a configuration, the vibrating piece 1b can be made small. Therefore, a small vibration device 100 can be provided. Also, regarding the arrangement of the first electrode pad 85 on the base 80, the degree of freedom in design can be improved.

[0063] As mentioned above, the position of the first hip portion 33 in the X-axis direction affects the G sensitivity Γ, and therefore the G sensitivity Γ with respect to length L1 / Lx is as shown in Figure 7. Thus, even with a vibrating piece 1b having this configuration, the G sensitivity Γ can be reduced.

[0064] <Modified form of the third embodiment> A modified example of the third embodiment, specifically the vibrating piece 1c, will be described using Figure 11. Figure 11 is a plan view showing the configuration of the vibrating piece 1c according to the modified example of the third embodiment.

[0065] The modified vibrating piece 1c comprises a substrate 2c, a pair of excitation electrodes 3, a pair of fixing parts 4, and a slit 30. The vibrating piece 1c is the same as the vibrating piece 1b of the third embodiment except for the position of the slit 30.

[0066] The substrate 2c has a slit 30 between the main region 28 and the fourth outer edge 24. Hereafter, in this embodiment, the slit 30 will be referred to as the second slit 32.

[0067] The region of the substrate 2c between the second slit 32 and the fourth outer edge 24 is the second arm portion 36c. The second arm portion 36c is located on the -Z' side relative to the main region 28.

[0068] The second arm portion 36c has a tip portion 40c on the +X side. The tip portion 40c is located on the -X side of the first outer edge 21 in the X-axis direction. That is, the tip portion 40c is located on the -X side of the imaginary line 51. In other words, the length of the second arm portion 36c in the X-axis direction is shorter than the length Lx. Therefore, the second fixing portion 4b is provided on the second outer edge 22 side of the first fixing portion 4a in the X-axis direction.

[0069] This configuration allows for a smaller vibrating element 1c. Therefore, a compact vibrating device 100 can be provided. Furthermore, the design flexibility regarding the arrangement of the second electrode pad 86 on the base 80 can be improved.

[0070] As mentioned above, the position of the second hip portion 34 in the X-axis direction affects the G sensitivity Γ, and therefore the G sensitivity Γ with respect to length L2 / Lx is as shown in Figure 9. Thus, even with a vibrating piece 1c having this configuration, the G sensitivity Γ can be reduced.

[0071] <Fourth Embodiment> Regarding the oscillator 200 according to the fourth embodiment, a crystal oscillator equipped with the aforementioned vibrating element 1 will be used as an example and explained with reference to Figures 12 and 13. Figure 12 is a schematic plan view showing the configuration of the oscillator 200. Figure 13 is a schematic cross-sectional view taken along line A2-A2 in Figure 12. Note that in Figure 12, the lid 202 is removed for the convenience of explaining the internal configuration of the oscillator 200.

[0072] The oscillator 200 includes a base 201, a cover 202, a vibrating element 1, and an oscillation circuit 203.

[0073] The structure of the oscillator 200 is substantially the same as that of the vibration device 100 of the first embodiment, except that the oscillation circuit 203 is provided on the base 201. The oscillation circuit 203 is electrically connected to the excitation electrode 3 provided on the vibrating piece 1, and can excite the vibrating piece 1.

[0074] The oscillator 200 of this embodiment is equipped with a vibrating element 1, which allows for a reduction in G sensitivity Γ. Alternatively, the oscillator 200 may be equipped with vibrating elements 1a to 1c instead of vibrating element 1.

[0075] The above description is based on embodiments of the vibrating pieces 1, 1a to 1c, the vibrating device 100, and the oscillator 200. However, this embodiment is not limited thereto, and the configuration of each part can be replaced with any configuration having a similar function. In addition, other arbitrary components may be added to this embodiment. Furthermore, each embodiment may be combined as appropriate. [Explanation of Symbols]

[0076] 1,1a~1c…Vibrating piece, 2,2a~2c…Substrate, 3…Excitation electrode, 3a…First excitation electrode, 3b…Second excitation electrode, 4…Fixed part, 4a…First fixed part, 4b…Second fixed part, 10…Vibrating piece, 12…First surface, 13…Second surface, 14,15…Lead wiring, 16…Jointing member, 21…First outer edge, 22…Second outer edge, 23…Third outer edge, 24…Fourth outer edge, 25,25a…First corner, 26,26a…Second corner, 28…Main region, 30…Slit, 31…First slit, 32…Second slit, 33…First crotch, 34…Second crotch, 35,3 5b...First arm, 36,36c...Second arm, 37...First shoulder, 38...Second shoulder, 40,40a,40b,40c...Tip, 50,51...Dummy line, 70...Package, 80...Base, 81,82...Surface, 83...External terminal, 84...Electrode pad, 85...First electrode pad, 86...Second electrode pad, 90...Lid, 91...Recess, 92...Opening, 93...Jointing member, 100...Vibration device, 200...Oscillator, 201...Base, 202...Lid, 203...Oscillator circuit, F1,F2...Force, L1,L2...Length, Lx...Length, Γ...G sensitivity

Claims

1. A substrate made of an AT-cut quartz plate, having a first outer edge and a second outer edge that intersect with respect to a first direction, and a third outer edge and a fourth outer edge that are aligned with the first direction, The device comprises an excitation electrode located in the center of the substrate in a plan view, The aforementioned substrate is A first fixing part is provided at the first corner where the imaginary line along the first outer edge intersects with the third outer edge, and is fixed to the base, A second fixing portion is provided at the second corner where the dashed line and the fourth outer edge intersect, and is fixed to the base. When the region where the excitation electrode is located and the region located between the excitation electrode and the first outer edge are defined as the main region, a slit is provided in either the space between the main region and the first fixing portion, or the space between the main region and the second fixing portion, and opens to the front and back surfaces of the substrate and the first outer edge, A vibrating piece characterized by having the following features.

2. The slit is provided between the main region and the first fixing portion, Let Lx be the length in the first direction from the first outer edge to the second outer edge. When L1 is the length in the first direction from the first outer edge to the end of the slit on the second outer edge side, 0.00<L1 / Lx≦0.41 A vibrating piece according to claim 1 that satisfies the relationship.

3. 0.00<L1 / Lx≦0.20 The vibrating piece according to claim 2 that satisfies the relationship.

4. The slit is provided between the main region and the second fixing portion, Let Lx be the length in the first direction from the first outer edge to the second outer edge. When L2 is the length in the first direction from the first outer edge to the end of the slit on the second outer edge side, 0.00<L2 / Lx≦0.41 A vibrating piece according to claim 1 that satisfies the relationship.

5. 0.00<L2 / Lx≦0.14 The vibrating piece according to claim 4 that satisfies the relationship.

6. The slit is provided between the main region and the first fixing portion, The vibrating piece according to claim 1 or 2, wherein the first fixing portion is provided on the second outer edge side of the second fixing portion.

7. The slit is provided between the main region and the second fixing portion, The vibrating piece according to claim 1 or 4, wherein the second fixing portion is provided on the second outer edge side of the first fixing portion.

8. The vibrating piece according to claim 1, A vibrating device comprising: a base that supports the vibrating piece;

9. The vibrating piece according to claim 1, An oscillator circuit electrically connected to the vibrating element, An oscillator comprising the vibrating element and the base in which the oscillation circuit is housed.

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