Vacuum pump with aerosolization function and its control method

Abstract

Reduce the period during which the vacuum pump with aerosolization function is not operational. [Solution] A vacuum pump with a detoxification function is provided, comprising a dry pump for vacuuming exhaust gas from a tool, and a detoxification unit for detoxifying the exhaust gas vacuumed by the dry pump, wherein the dry pump has a base, a booster pump positioned on the base and connected to the tool, a first main pump positioned to the side of the base and connected to the booster pump, and a second main pump positioned to the side of the base and connected to the booster pump.

Description

Technical Field

[0006] , , , , , ,

[0001] The present invention relates to a vacuum pump with a pest control function and a control method thereof.

Background Art

[0002] In the manufacturing processes of semiconductor devices, liquid crystal panels, solar cells, etc., process gases are introduced into a tool (process chamber) evacuated to a vacuum, and various processes such as etching and CVD processes are performed. Further, such tools are periodically cleaned by flowing a cleaning gas.

[0003] The exhaust gases of these process gases and cleaning gases contain harmful substances such as silane-based gases (SiH4, TEOS, etc.), halogen-based gases (NF3, ClF3, SF6, CHF3, etc.), PFC gases (CF4, C2F6, etc.), so it is not preferable to directly release them into the atmosphere. Therefore, it is necessary to detoxify these exhaust gases by a pest control system installed on the downstream side of the tool.

[0004] Patent Document 1 discloses a vacuum pump with a pest control function for performing such detoxification.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] An object of the present invention is to provide a device having a plurality of pumps in order to reduce the period during which a vacuum pump with a pest control function cannot operate, reduce the footprint of the entire device, or provide a novel technology different from the invention described in the above prior art document.

Means for Solving the Problems

[0007] As an example, the following solutions are provided.

[0008] [1] A dry pump that vacuums up exhaust gases from the tool, The system includes a detoxification unit that detoxifies exhaust gas evacuated by the dry pump, The aforementioned dry pump is The base and A booster pump is placed on the aforementioned base and connected to the aforementioned tool, A first main pump is positioned to the side of the base and connected to the booster pump, A vacuum pump with aerosolization function, comprising a second main pump positioned to the side of the base and connected to the booster pump.

[0009] [2] The dry pump is a vacuum pump with aerosol function as described in [1], which is positioned above the aerosol section.

[0010] [3] The booster pump is provided with an exhaust port at its lower part. The first main pump is provided with a first air intake port at its top, The second main pump is provided with a second air intake port at its top. The aforementioned dry pump is The first piping section connected to the exhaust port, A second piping section that branches off from the first piping section and is connected to the first air intake port, A vacuum pump with a detoxification function according to [1], comprising a third piping section that branches off from the first piping section and is connected to the second air intake port.

[0011] [4] The first piping section extends vertically from the exhaust port, The aforementioned second piping section is, A first horizontal section extending horizontally from the first piping section, a first vertical portion that extends vertically from the first horizontal portion and is connected to the first intake port the third pipe portion a second horizontal portion that extends horizontally from the first pipe portion a second vertical portion that extends vertically from the second horizontal portion and is connected to the second intake port, the vacuum pump with a pest control function according to [3].

[0012] [5] the booster pump is provided with a first exhaust port on a side portion on the side where the first main pump is arranged, and a second exhaust port is provided on a side portion on the side where the second main pump is arranged the first main pump is provided with a first intake port at its upper part the second main pump is provided with a second intake port at its upper part the dry pump a first pipe portion that connects the first exhaust port and the first intake port a second pipe portion that connects the second exhaust port and the second intake port, the vacuum pump with a pest control function according to [1].

[0013] [6] the first pipe portion a first horizontal portion that extends horizontally from the first exhaust port a first vertical portion that extends vertically from the first horizontal portion and is connected to the first intake port, the second pipe portion a second horizontal portion that extends horizontally from the second exhaust port a second vertical portion that extends vertically from the second horizontal portion and is connected to the second intake port, the vacuum pump with a pest control function according to [5].

[0014] [7] at least a part of the first horizontal portion and the second horizontal portion is composed of a flexible pipe, the vacuum pump according to [4] or [6].

[0015] [8] The first main pump is provided with a first exhaust port at its lower part, The second main pump is provided with a second exhaust port at its lower part, a first pipe extending in an oblique direction and connecting the first exhaust port and the decontamination unit, a second pipe extending in an oblique direction and connecting the second exhaust port and the decontamination unit, and the vacuum pump with decontamination function according to any one of [1] to [5].

[0016] [9] The vacuum pump with decontamination function according to [8], wherein the first pipe and the second pipe have the same shape.

[0017]

[10] A control method for the vacuum pump with decontamination function according to [8] or [9], a first on-off valve is provided between the booster pump and the first main pump, a second on-off valve is provided between the booster pump and the second main pump, When operating the vacuum pump with decontamination function during the non-operation period of the first main pump, the first on-off valve is closed and the second on-off valve is opened, After that, when operating the vacuum pump with decontamination function until the non-operation period of the second main pump, the first on-off valve is closed and the second on-off valve is opened, When operating the vacuum pump with decontamination function during the non-operation period of the second main pump, the first on-off valve is opened and the second on-off valve is closed, After that, when operating the vacuum pump with decontamination function until the non-operation period of the first main pump, the first on-off valve is opened and the second on-off valve is closed. A control method for the vacuum pump with decontamination function.

[0018]

[11] The first main pump is provided with a first exhaust port at its lower part, The second main pump is provided with a second exhaust port at its lower part, A first pipe extending vertically connects the first exhaust port and the abatement unit, A vacuum pump with a detoxification function according to any one of [1] to [7], comprising a second pipe extending diagonally for connecting the second exhaust port and the detoxification unit.

[0019]

[12] A method for controlling a vacuum pump with an abatement function as described in

[11] , A first on-off valve is provided between the booster pump and the first main pump. A second on-off valve is provided between the booster pump and the second main pump. When operating the vacuum pump with abatement function during the non-operation period of the first main pump, the first on-off valve shall be closed and the second on-off valve shall be opened. A control method for a vacuum pump with an abatement function, wherein when the vacuum pump with an abatement function is operated during other periods, the first on-off valve is opened and the second on-off valve is closed.

[0020]

[13] A vacuum pump with aerosolization function according to any one of [1] to

[12] , comprising a housing that covers the booster pump, the first main pump, and the second main pump.

[0021]

[14] A method for controlling a vacuum pump with an abatement function as described in [1], A first on-off valve is provided between the booster pump and the first main pump. A second on-off valve is provided between the booster pump and the second main pump. When operating the vacuum pump with abatement function during the non-operation period of the first main pump, the first on-off valve shall be closed and the second on-off valve shall be opened. A control method for a vacuum pump with aerosolization function, wherein when the vacuum pump with aerosolization function is operated during a period when the second main pump is not in operation, the first on-off valve is opened and the second on-off valve is closed. [Brief explanation of the drawing]

[0022] [Figure 1] A diagram showing the schematic configuration of a vacuum pump with a detoxification function according to one embodiment. [Figure 2A] A diagram showing an example of the arrangement and connection of the booster pump 12 and the main pumps 131 and 132. [Figure 2B] A diagram showing another example of the arrangement and connection of the booster pump 12 and the main pumps 131, 132. [Figure 3] Figure 1 illustrates an example of a control method for a vacuum pump with a detoxification function. [Figure 4] This figure shows a schematic configuration of a vacuum pump with a detoxification function, which is a modified version of Figure 1. [Figure 5] Figure 4 illustrates an example of a control method for a vacuum pump with a detoxification function. [Modes for carrying out the invention]

[0023] Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

[0024] Figure 1 shows a schematic configuration of a vacuum pump with aerosolization function according to one embodiment. The vacuum pump with aerosolization function aerosolizes exhaust gas from a tool (not shown) and comprises a dry pump 1 and an aerosolization unit 2. In this embodiment, the dry pump 1 is positioned directly above the aerosolization unit 2. As an example, the dry pump 1 is placed on a table (mounting platform) 3 that covers the aerosolization unit 2. This reduces the overall footprint of the device compared to placing the dry pump 1 on the floor. In addition, the piping connecting the dry pump 1 and the aerosolization unit 2 can be shortened, thereby reducing piping costs. A detailed explanation follows below.

[0025] The dry pump 1 includes a base 11, a booster pump (BP) 12, and a plurality (two in this embodiment) of main pumps (MP) 131, 132, etc., and evacuates exhaust gas from a tool (not shown) under vacuum. One of the features of this embodiment is the provision of a plurality of main pumps 131, 132.

[0026] The base 11 is placed on the table 3. The booster pump 12 is placed on the base 11. The main pumps 131 and 132 are placed to the side of the base 11. The main pump 131 is connected to the booster pump 12 via an on-off valve 131a, and the main pump 132 is connected to the booster pump 12 via an on-off valve 132a. The opening and closing control of the on-off valves 131a and 132a may be performed manually by the operator or by a control unit (not shown). The arrangement and connection of the booster pump 12 and the main pumps 131 and 132 are arbitrary, but desirable specific examples will be described later. The base 11 consists of legs and a top plate. The booster pump 12 is placed on the top plate of the base 11. The legs of the base 11 are longer than the height of the main pumps 131 and 132. Therefore, even if the booster pump 12 extends beyond the top plate of the base 11, it will not interfere with the main pumps 131 and 132. In other words, when viewed from a vertically upward direction, the booster pump 12 can be positioned so that it partially interferes with each of the main pumps 131 and 132, further reducing the footprint of the dry pump 1.

[0027] The booster pump 12, connected to the tool (not shown), is a high-capacity pump capable of vacuum-evacuating a large flow rate of exhaust gas from the tool. Main pumps 131 and 132, located downstream of the booster pump 12, compress the exhaust gas from the booster pump 12 at each stage to increase the pressure and then evacuate it. This ensures a vacuum level in the tool (not shown). The exhaust gas from the main pumps 131 and 132 is supplied to the abatement unit 2 via pipes 41 and 42 that penetrate the table 3.

[0028] The booster pump 12 and main pumps 131 and 132 that constitute the dry pump 1 may be covered by a housing (not shown). The housing may be formed from a frame and side and top covers (sheet metal) fitted into the frame. An exhaust pipe is provided in the top cover and connected to an exhaust duct. The inside of the housing is under negative pressure, so even if a gas leak occurs inside the housing, it will be exhausted from the exhaust pipe to the exhaust duct. The exhaust duct is equipment installed in a factory (such as a semiconductor device manufacturing plant).

[0029] The exhaust gas detoxification unit 2 includes a combustion unit 21, a tank 22, and a water rinsing tower 23, and detoxifies the exhaust gas. Specifically, the combustion unit 21 burns toxic and flammable gases contained in the exhaust gas by, for example, adding air or oxygen to the exhaust gas and burning it. The exhaust gas after combustion is led to a tank 22 containing water for cooling. Then, in a water rinsing tower 23 filled with resin components, water is sprayed into the exhaust gas to remove water-soluble gases. The detoxified gas is then discharged into the exhaust line of the user's factory.

[0030] If the dry pump 1 has only one main pump, the vacuum pump with aerosolization function cannot be used when that main pump is not in operation due to maintenance or other reasons. In contrast, in this embodiment, since the dry pump 1 has multiple main pumps 131, 132, the vacuum pump with aerosolization function can be used even when one main pump is not in operation by operating the other main pumps.

[0031] As a specific example, when operating the vacuum pump with aerosolization function during the non-operating period of the main pump 131, valve 131a is closed and valve 132a is opened. When operating the vacuum pump with aerosolization function during the non-operating period of the main pump 132, valve 132a is closed and valve 131a is opened. This control of valves 131a and 132a may be performed manually by the operator or automatically by a control unit (not shown). By providing redundancy to the main pump in this way, the period during which the vacuum pump with aerosolization function is unavailable can be shortened.

[0032] This document describes the configuration of the dry pump 1, particularly specific examples of the arrangement and connection of the booster pump 12 and the main pumps 131 and 132.

[0033] Figure 2A shows an example of the arrangement and connection of the booster pump 12 and the main pumps 131 and 132.

[0034] In this example, the booster pump 12 has an exhaust port 12a at its bottom. The main pump 131 has an intake port 131b at its top. The main pump 132 has an intake port 132b at its top. The exhaust port 12a of the booster pump 12 and the intake ports 131b and 132b of the main pumps 131 and 132 are connected by piping provided by the dry pump 1.

[0035] As a specific example, the piping consists of a first piping section 140, a second piping section 141, and a third piping section 142. One end of the first piping section 140 is connected to the exhaust port 12a of the booster pump 12, and preferably extends vertically. The second piping section 141 branches off from the other end of the first piping section 140 and is connected to the intake port 131b of the main pump 131. The third piping section 142 branches off from the other end of the first piping section 140 and is connected to the intake port 132b of the main pump 132.

[0036] Preferably, the second piping section 141 has a horizontal section 141a extending horizontally from the first piping section 140 and a vertical section 141b extending vertically from the horizontal section 141a and connected to the air intake port 131b. Similarly, the third piping section 142 may have a horizontal section 142a extending horizontally from the first piping section 140 and a vertical section 142b extending vertically from the horizontal section 142a and connected to the air intake port 132b.

[0037] It is desirable that the horizontal sections 141a and 142a extend in a straight line below the booster pump 12. Furthermore, by making at least a portion of the horizontal sections 141a and 142a into expandable and contractible flexible piping, vibrations of the booster pump 12 and main pumps 131 and 132 can be absorbed, as can displacements of the main pumps 131 and 132.

[0038] Figure 2B shows another example of the arrangement and connection of the booster pump 12 and the main pumps 131 and 132.

[0039] In this example, the booster pump 12 has an exhaust port 12a on the side where the main pump 131 is located (preferably towards the bottom of the side), and an exhaust port 12b on the side where the main pump 132 is located (preferably towards the bottom of the side). The main pump 131 has an intake port 131b at its top. The main pump 132 has an intake port 132b at its top.

[0040] The exhaust port 12a of the booster pump 12 and the intake port 131b of the main pump 131 are connected by piping 143 of the dry pump 1. In addition, the exhaust port 12b of the booster pump 12 and the intake port 132b of the main pump 132 are connected by piping 144 of the dry pump 1.

[0041] Preferably, the piping 143 consists of a portion extending horizontally from the exhaust port 12a and a portion extending vertically from the intake port 131b. Similarly, the piping 144 may consist of a portion extending horizontally from the exhaust port 12b and a portion extending vertically from the intake port 132b. By making at least a portion of the horizontal portion a flexible pipe that can be extended and retracted, vibrations of the booster pump 12 and the main pumps 131 and 132 can be absorbed, and displacement of the main pumps 131 and 132 can also be absorbed.

[0042] In both Figure 2A and Figure 2B, the intake ports 131b and 132b of the main pumps 131 and 132 are located on the top surface of the housing. In this case, by positioning the booster pump 12 higher than the main pumps 131 and 132, the piping 141 to 144 can be shortened.

[0043] Comparing Figure 2A and Figure 2B, the booster pump 12 in Figure 2A only requires one exhaust port 12a, thus simplifying the structure of the booster pump 12. On the other hand, in the configuration of Figure 2B, the piping does not pass below the booster pump 12, thus reducing the height. Also, since there is no need to branch the piping, the piping structure can be simplified.

[0044] Next, we will explain a specific example of connecting the dry pump 1 and the abatement unit 2. As shown in Figure 1, the main pumps 131 and 132 have exhaust ports at their lower parts. A diagonally extending pipe 41 connects the exhaust port of the main pump 131 to the abatement unit 2. Pipe 41 is equipped with an on / off valve that opens when the main pump 131 is exhausting. Similarly, a diagonally extending pipe 42 connects the exhaust port of the main pump 132 to the abatement unit 2. Pipe 42 is equipped with an on / off valve that opens when the main pump 132 is exhausting. It is desirable that the main pump 131 and pipe 41, and the main pump 132 and pipe 42 be arranged symmetrically.

[0045] Figure 3 illustrates an example of a control method for the vacuum pump with aerosolization function shown in Figure 1. It assumes that the main pumps 131 and 132 have similar performance and are operated equally.

[0046] In this figure, the main pump 131 is initially operating (in Figure 3, actual operation is shown by a solid line). The main pump 132 is in standby mode (pre-operation mode), meaning it is available but not currently running (in Figure 3, standby mode is shown by a dashed line).

[0047] At time t11, when it is time for maintenance of main pump 131, main pump 132 is used in its place. This allows the vacuum pump with aerosolization function to operate using main pump 132 even when main pump 131 is unavailable.

[0048] At time t12, the maintenance period for main pump 131 ends, but in this example, the use of main pump 132 continues. Main pump 131 enters a standby state (pre-operation state).

[0049] At time t13, when it is time for maintenance of main pump 132, main pump 131 is used instead. This allows the vacuum pump with aerosolization function to operate using main pump 131 even when main pump 132 is unavailable.

[0050] At time t14, the maintenance period for main pump 132 ends, but in this example, the use of main pump 131 continues. Main pump 132 enters a standby state (pre-operation state).

[0051] In the above case, the opening and closing of the on-off valves 131a and 132a is controlled when the non-operating period for main pumps 131 and 132 begins, and the main pumps 131 and 132 used are switched. The end of the non-operating period for main pumps 131 and 132 does not trigger the opening and closing control of the on-off valves 131a and 132a.

[0052] Specifically, in Figure 3, when operating the vacuum pump with aerosolization function during the non-operating period of the main pump 131 (for example, from time t11 to t12), the on-off valve 131a is closed and the on-off valve 132a is opened, and the main pump 132 is used.

[0053] Subsequently, when operating the vacuum pump with aerosolization function during the period when the main pump 132 is not in operation (for example, from t12 to t13), the on-off valve 131a is closed and the on-off valve 132a is opened, and the main pump 132 is kept in use.

[0054] When operating the vacuum pump with aerosolization function during the non-operating period of the main pump 132 (for example, from time t13 to t14), the on-off valve 131a is opened and the on-off valve 132a is closed, and the main pump 131 is used.

[0055] Subsequently, when operating the vacuum pump with aerosolization function during the period before the main pump 131 becomes inactive, the on-off valve 131a is opened and the on-off valve 132a is closed, and the main pump 131 is used continuously.

[0056] Another example of the connection between the dry pump 1 and the abatement unit 2 will be explained. Figure 4 shows a schematic configuration of a vacuum pump with aerosolization function, which is a modified example of Figure 1. Note that the configuration of the dry pump 1 may be, for example, as shown in Figure 2A or Figure 2B. As shown in Figure 4, the main pumps 131 and 132 have exhaust ports at their lower parts. A pipe 43 extending vertically connects the exhaust port of the main pump 131 to the aerosolization unit 2. The pipe 43 is equipped with an on-off valve that opens when the main pump 131 is exhausting. In addition, a pipe 44 extending diagonally connects the exhaust port of the main pump 132 to the aerosolization unit 2. The pipe 44 is equipped with an on-off valve that opens when the main pump 132 is exhausting.

[0057] Figure 5 illustrates an example of a control method for the vacuum pump with aerosolization function shown in Figure 4. The main pump 131 is more powerful than the main pump 132, and the intention is to primarily operate the main pump 131, with the main pump 132 operating only as a backup. In the diagram, the main pump 131 is initially operating, while the main pump 132 is in standby mode (pre-operation mode), meaning it is available but not currently running.

[0058] At time t21, when it is time for maintenance of main pump 131, main pump 132 is used in its place. This allows the vacuum pump with aerosolization function to operate using main pump 132 even when main pump 131 is unavailable.

[0059] At time t22, when the maintenance period for main pump 131 ends, the high-performance main pump 131 is used in place of main pump 132. Main pump 132 enters a standby state (backup operation state).

[0060] Thus, in this example, the main pump 131 is used as much as possible, and the main pump 132 is used only during its non-operating periods. In this case, the opening and closing of the on-off valves 131a and 132a are controlled based on the start and end of the non-operating period for the main pump 131, and the main pump 131 and 132 are switched to use. The start and end of the non-operating period for the main pump 132 do not trigger the opening and closing control of the on-off valves 131a and 132a.

[0061] Specifically, in Figure 5, when operating the vacuum pump with aerosolization function during the non-operating period of the main pump 131 (for example, from time t21 to t22), the on-off valve 131a is closed and the on-off valve 132a is opened.

[0062] When operating the vacuum pump with aerosolization function during other periods (for example, until time t21, from time t22 onwards), the on-off valve 131a is opened and the on-off valve 132a is closed.

[0063] Compare the configuration in Figure 1 with the configuration in Figure 3. In the configuration shown in Figure 1, the main pumps 131 and 132 are symmetrical. Therefore, piping 41 and piping 42 can be made to have the same shape, making it easier to procure piping 41 and 42. In addition, it is easier to plan when to perform an overhaul.

[0064] In the configuration shown in Figure 3, the main pump 131 is primarily used. Therefore, the main pump 132, which is used less frequently, can have relatively lower performance, thus reducing its cost. In addition, by arranging the piping 43 for the main pump 131, which is used primarily, vertically, the accumulation of products can be suppressed. Although the piping 44 is arranged diagonally, the accumulation of products is not significant because the main pump 132 is used infrequently.

[0065] As described above, in this embodiment, since the dry pump 1 has multiple main pumps 131, 132, even if one of them is not in operation, the other can be used to reduce the period during which the vacuum pump with abatement function cannot be operated.

[0066] This section describes the functions and effects related to Table 3. Table 3 is equipped with casters 3a at the bottom of its legs. The casters 3a allow Table 3 to be moved by pushing it like a cart. By using the caster 3a stoppers (not shown) at the installation location of Table 3, the table can be prevented from moving.

[0067] By making Table 3 movable, the following problems can be solved. Typically, areas where aerosol treatment equipment and dry pump 1 are installed also have numerous other devices, which may result in insufficient workspace for workers. To place the dry pump 1, which weighs several tens of kilograms or more, onto table 3, a lifter is necessary. However, in places where sufficient workspace cannot be secured, it may not be possible to use a lifter, or using a lifter may compromise the safety of the worker. By using the movable table 3, the dry pump 1 can be placed on the table 3 in advance in an area where workspace can be secured, such as the factory entrance, and then the table 3 can be pushed to move the table 3 and the dry pump to the installation location. Therefore, the worker does not need to use a lifter at the installation location of the dry pump 1. Furthermore, since the table 3 can be used as a trolley, there is no need to prepare a trolley in advance to move the dry pump 1 from the factory entrance to the installation location.

[0068] Furthermore, the top surface of table 3, when viewed from above, has a larger projected area than the housing 24 of the abatement unit 2, thus providing a larger surface area. As a result, even when the dry pump 1 is installed on the top surface of table 3, there is still space remaining on the top surface of table 3. This remaining space can be used by the worker to place their tools (such as screwdrivers), so the presence of table 3 eliminates the need to prepare a separate stand for tools, thereby increasing the worker's work efficiency during the installation of the dry pump 1 and abatement unit 2.

[0069] Based on the above description, those skilled in the art may be able to conceive of additional effects and various modifications of the present invention, but the embodiments of the present invention are not limited to the individual embodiments described above. For example, inventions that take only a part of each embodiment, or inventions that combine multiple embodiments, are naturally conceivable. Various additions, modifications, and partial deletions are possible as long as they do not depart from the conceptual idea and spirit of the present invention derived from the contents of the claims and their equivalents.

[0070] For example, what is described herein as a single device (or component, hereinafter the same) (including what is depicted as a single device in the drawings) may be implemented by multiple devices. Conversely, what is described herein as multiple devices (including what is depicted as multiple devices in the drawings) may be implemented by a single device. Alternatively, some or all of the means or functions that are included in one device may be included in another device.

[0071] Furthermore, not all matters described herein are mandatory requirements. In particular, matters described herein but not included in the claims can be considered optional additional matters.

[0072] It should also be noted that the applicant is only aware of the prior art inventions described in the "Prior Art Documents" section of this specification, and the present invention is not necessarily intended to solve the problems described in those prior art inventions. The problems that the present invention aims to solve should be determined by considering this specification as a whole. For example, if this specification describes that a certain effect is achieved by a particular configuration, it can also be said that the problem that is the inverse of that predetermined effect is solved. However, this does not necessarily mean that such a particular configuration is an essential requirement. [Explanation of Symbols]

[0073] 1. Dry pump 11 Pedestal 12 Booster pumps 12a, 12b Exhaust port 131,132 Main pump 131a, 132a Shut-off valves 131b, 132b Intake port 140-142 Piping section 141a,142a Horizontal part 141b, 142b Vertical section 143,144 Piping 2 Harm abatement department 21 Combustion section 22 tanks 23 Washing tower 3 tables 41-44 Piping

Claims

1. A dry pump that vacuums up exhaust gases from the tool, The system includes a detoxification unit that detoxifies exhaust gas evacuated by the dry pump, The aforementioned dry pump is The base and A booster pump is placed on the aforementioned base and connected to the aforementioned tool, A first main pump is positioned to the side of the base and connected to the booster pump, A vacuum pump with aerosolization function, comprising a second main pump positioned to the side of the base and connected to the booster pump.

2. The dry pump is positioned above the abatement unit, and the vacuum pump with abatement function is as described in claim 1.

3. The booster pump is provided with an exhaust port at its lower part. The first main pump is provided with a first air intake port at its upper part. The second main pump is provided with a second air intake port at its upper part. The aforementioned dry pump is The first piping section connected to the exhaust port, A second piping section that branches off from the first piping section and is connected to the first air intake port, A vacuum pump with a detoxification function according to claim 1, further comprising a third piping section branching off from the first piping section and connected to the second air intake port.

4. The first piping section extends vertically from the exhaust port, The aforementioned second piping section is, A first horizontal section extending horizontally from the first piping section, It has a first vertical portion that extends vertically from the first horizontal portion and is connected to the first air intake port, The aforementioned third piping section is, A second horizontal section extending horizontally from the first piping section, A vacuum pump with a detoxification function according to claim 3, comprising: a second vertical portion extending vertically from the second horizontal portion and connected to the second air intake port.

5. The booster pump is provided with a first exhaust port on the side where the first main pump is located, and a second exhaust port on the side where the second main pump is located. The first main pump is provided with a first air intake port at its upper part. The second main pump is provided with a second air intake port at its upper part. The aforementioned dry pump is A first piping section connecting the first exhaust port and the first intake port, A vacuum pump with a detoxification function according to claim 1, comprising a second piping section connecting the second exhaust port and the second intake port.

6. The first piping section is, A first horizontal section extending horizontally from the first exhaust port, It has a first vertical portion that extends vertically from the first horizontal portion and is connected to the first air intake port, The aforementioned second piping section is, A second horizontal section extending horizontally from the second exhaust port, A vacuum pump with aerosolization function according to claim 5, further comprising: a second vertical section extending vertically from the second horizontal section and connected to the second air intake port.

7. The vacuum pump according to claim 4 or 6, wherein at least a portion of the first horizontal section and the second horizontal section is composed of flexible piping.

8. The first main pump is provided with a first exhaust port at its lower part. The second main pump is provided with a second exhaust port at its lower part. A first pipe extending diagonally connects the first exhaust port and the abatement unit, The vacuum pump with aerosolization function according to claim 1, further comprising a second pipe extending diagonally, connecting the second exhaust port and the aerosolization unit.

9. The vacuum pump with aerosolization function according to claim 8, wherein the first pipe and the second pipe have the same shape.

10. A method for controlling a vacuum pump with a detoxification function according to claim 8 or 9, A first on-off valve is provided between the booster pump and the first main pump. A second on-off valve is provided between the booster pump and the second main pump. When operating the vacuum pump with abatement function during the non-operation period of the first main pump, the first on-off valve shall be closed and the second on-off valve shall be opened. Subsequently, when operating the vacuum pump with abatement function during the period before the second main pump becomes inoperable, the first on-off valve is closed and the second on-off valve is opened. When operating the vacuum pump with abatement function during the non-operation period of the second main pump, the first on-off valve is opened and the second on-off valve is closed. A control method for a vacuum pump with aerosolization function, wherein when operating the vacuum pump with aerosolization function during the period before the first main pump becomes inactive, the first on-off valve is opened and the second on-off valve is closed.

11. The first main pump is provided with a first exhaust port at its lower part. The second main pump is provided with a second exhaust port at its lower part. A first pipe extending vertically connects the first exhaust port and the abatement unit, The vacuum pump with aerosolization function according to claim 1, further comprising a second pipe extending diagonally, connecting the second exhaust port and the aerosolization unit.

12. A method for controlling a vacuum pump with a detoxification function according to claim 11, A first on-off valve is provided between the booster pump and the first main pump. A second on-off valve is provided between the booster pump and the second main pump. When operating the vacuum pump with abatement function during the non-operation period of the first main pump, the first on-off valve shall be closed and the second on-off valve shall be opened. A control method for a vacuum pump with an abatement function, wherein when the vacuum pump with an abatement function is operated during other periods, the first on-off valve is opened and the second on-off valve is closed.

13. The vacuum pump with aerosolization function according to claim 1, comprising a housing that covers the booster pump, the first main pump, and the second main pump.

14. A control method for a vacuum pump with a detoxification function according to claim 1, A first on-off valve is provided between the booster pump and the first main pump. A second on-off valve is provided between the booster pump and the second main pump. When operating the vacuum pump with abatement function during the non-operation period of the first main pump, the first on-off valve shall be closed and the second on-off valve shall be opened. A control method for a vacuum pump with aerosolization function, wherein when the vacuum pump with aerosolization function is operated during a period when the second main pump is not in operation, the first on-off valve is opened and the second on-off valve is closed.

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