Cooling device

Abstract

To provide a cooling device that can improve cooling efficiency. [Solution] The cooling device is a cooling device for a conveying and heating device, comprising a furnace body and a cooling section for cooling the atmosphere inside the furnace body. The cooling section includes a cooling tube and a plurality of fins erected perpendicular to the direction in which the cooling tube extends. The cooling tube is inclined with respect to a plane perpendicular to the direction of gravity.

Description

[Technical Field]

[0001] The present invention relates to a cooling device for a conveying and heating device. [Background technology]

[0002] Reflow apparatuses are equipped with cooling devices for cooling workpieces. The cooling device includes water-cooled pipes with radiators inside the furnace, and a chiller unit circulates cooling water through the water-cooled pipes, thereby cooling the atmospheric gas circulating inside the furnace and cooling the workpieces (see, for example, Patent Document 1). [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Patent No. 3910249 [Overview of the project] [Problems that the invention aims to solve]

[0004] In order to achieve a carbon-neutral society, reducing the power consumption of reflow soldering equipment is becoming increasingly important in assembly lines. One way to reduce the power consumption of reflow soldering equipment is to improve the cooling efficiency of the cooling system installed in the equipment.

[0005] The object of the present invention is to provide a cooling device that can improve cooling efficiency. [Means for solving the problem]

[0006] To solve the above-mentioned problems, the present invention provides: A cooling device for a conveying and heating device, The furnace body and Cooling section to cool the atmosphere inside the reactor body and Equipped with, The cooling section includes a cooling tube and a plurality of fins positioned perpendicular to the direction in which the cooling tube extends. A cooling tube is a cooling device that is inclined with respect to a plane perpendicular to the direction of gravity. [Effects of the Invention]

[0007] According to the present invention, the cooling efficiency of a cooling device can be improved. The effects described herein are not necessarily limited, and any of the effects described herein may be used. Furthermore, the effects illustrated in the following description should not be interpreted as limiting the scope of the present invention. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a schematic diagram showing a reflow apparatus according to one embodiment of the present invention. [Figure 2] Figure 2 is a graph showing an example of a temperature profile during reflow. [Figure 3] Figure 3 is a schematic cross-sectional view showing the configuration of the cooling system. [Figure 4] Figure 4 is a perspective view showing the configuration of the second air outlet panel. [Modes for carrying out the invention]

[0009] Embodiments of the present invention will be described below. The description will be given in the following order. <1. One Embodiment> <2. Variant> The embodiment described below is a preferred example of the present invention and is subject to various technically preferred limitations. However, the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description. In this specification, "up" refers to the direction of gravity D. G It means the opposite direction, and "down" refers to the direction of gravity D. G It means...

[0010] <1. One Embodiment> [Configuration of the reflow apparatus 101] Figure 1 shows a schematic configuration of a reflow apparatus 101 according to an embodiment of the present invention. The reflow apparatus 101 as a conveyance heating apparatus includes a reflow furnace 102, a conveyance chain 103 as a conveyance means for conveying a printed circuit board (hereinafter referred to as "work") W on which surface mount electronic components and solder are mounted on both sides of a heated object, for example, a printed wiring board, in the reflow furnace 102, rotating bodies (idlers, sprockets, etc.) 104a, 104b, 104c, 104d that define a movement path of the conveyance chain 103, and an outer plate 105. In FIG. 1, only one of the two parallel conveyance chains, the conveyance chain 103, is shown.

[0011] The reflow furnace 102 is for heating the work W from above and below and cooling it after heating. The conveyance chain 103 is one of two conveyance chains arranged parallel to the conveyance direction. For example, a roller chain is used as the conveyance chain 103. The outer plate 105 is a case for covering the entire reflow furnace 102.

[0012] After the work W is carried into the reflow furnace 10 from the carry-in port 106, it is conveyed at a predetermined speed in the direction of the arrow (from left to right in FIG. 1) by the conveyance chain 103, and finally taken out from the carry-out port 107. Although not shown, a work carry-in device for carrying in the work W is provided in front of the carry-in port 106, and a work carry-out device for sending the work W to the outside is provided after the carry-out port 107. <000009>

[0013] [[ID=]]Along the conveyance path from the carry-in port 106 to the carry-out port 107, the reflow furnace 102 is sequentially divided into, for example, nine zones Z1 to Z9, and these zones Z1 to Z9 are arranged in an in-line manner. Seven zones Z1 to Z? on the carry-in port 106 side are heating zones, and two zones Z8 and Z9 on the carry-out port 107 side are cooling zones. The number of zones is an example, and other numbers of zones may be arranged.

[0014] The reflow furnace 102 has a furnace body 11. Heating devices 102a are partitioned in each of zones Z1 to Z7 of the furnace body 11. Cooling devices 102b are partitioned in each of zones Z8 and Z9 of the furnace body 11.

[0015] The heating devices 102a in the plurality of zones Z1 to Z7 described above, and the cooling devices 102b in zones Z8 and Z9 control the temperature of the work W according to the temperature profile during reflow. Fig. 2 shows a schematic of an example of the temperature profile. The horizontal axis represents time, and the vertical axis represents the surface temperature of the work W. The first section is the temperature rising section R1 where the temperature rises by heating, the next section is the preheat section R2 at a substantially constant temperature, the next section is the reflow (main heating) section R3, and the last section is the cooling section R4.

[0016] The temperature rising section R1 is a period for heating the work W from room temperature to the preheat section R2 (for example, 150°C to 170°C). The preheat section R2 is a period for performing, for example, isothermal heating, activating the flux, removing the oxide film on the surface of the electrodes and solder powder, and eliminating the uneven heating of the work W. The reflow section R3 (for example, 220°C to 240°C at the peak temperature) is a period when the solder melts and the joining is completed. Even after passing through the preheat section R2, there are temperature rising unevenness, so in the reflow section R3, it is necessary to raise the temperature to a temperature exceeding the melting temperature of the solder. The last cooling section R4 is a period for rapidly cooling the work W and forming the solder composition. In the case of lead-free solder, the temperature in the reflow section R3 is higher (for example, 240°C to 260°C). <00001十2>

[0017] In Fig. 2, curve 1 shows an example of the temperature profile of lead-free solder An example of the temperature profile in the case of Sn-Pb eutectic solder is shown by curve 2. Since the melting point of lead-free solder is higher than that of eutectic solder, the set temperatures in the preheat section R2 and the reflow section R3 of lead-free solder are set higher than those of eutectic solder.

[0018] In the reflow apparatus 101 shown in Figure 1, zones Z1 and Z2 are primarily responsible for controlling the temperature of the heating section R1 in Figure 2. Zones Z3, Z4, and Z5 are primarily responsible for controlling the temperature of the preheating section R2. Zones Z6 and Z7 are responsible for controlling the temperature of the reflow section R3. Zones Z8 and Z9 are responsible for controlling the temperature of the cooling section R4.

[0019] During reflow, the furnace body 11 is filled with an atmospheric gas. The atmospheric gas contains, for example, nitrogen (N2). Inside the heating device 102a, hot air (heated nitrogen gas) is blown onto the workpiece W to heat it. In addition to blowing hot air onto the workpiece W, infrared rays may also be irradiated onto the workpiece W.

[0020] [Configuration of cooling device 102b] Figure 3 is a cross-sectional view of the cooling device 102b cut perpendicular to the conveying direction of the workpiece W. The cooling device 102b comprises a furnace body 11, a blower 12, a housing section 13, two rectifier plates 14, a first discharge panel 15, a second discharge panel 16, a blower guide section 17, a cooling section 18, a blower 19, two first circulation ducts 20, and two second circulation ducts 21.

[0021] In Figure 3, the arrows represent the circulation path of the cold air blown out from the blower 12. The white arrows represent cold air (cold air blown out from the blower 12 and cold air cooled by the cooling unit 18), while the black arrows represent hot air (cold air that has absorbed the heat from the workpiece W).

[0022] A circulation mechanism for circulating cold air within the furnace body 11 is formed by a blower 12, a housing 13, two rectifier plates 14, a first discharge panel 15, a second discharge panel 16, a blower guide section 17, two first circulation ducts 20, and two second circulation ducts 21.

[0023] The furnace body 11 has a box-like shape and is composed of plate-shaped metal layers. The metal layers include, for example, iron or an iron alloy. Examples of iron alloys include stainless steel (SUS) or carbon steel. The outside of the furnace body 11 may be covered with an insulating material (not shown).

[0024] The blower 12 is held on top of the furnace body 11. The blower 12 includes a motor 121 and a rotating blade 122. As the blower 12, for example, a centrifugal fan such as a turbo fan or sirocco fan, or an axial flow blower may be used. The motor 121 drives the rotating blade 122 by command from a control device (not shown). The rotating blade 122 blows out atmospheric gas drawn in from the axis of rotation of the rotating blade 122 (downward) in the radial direction of the rotating blade 122.

[0025] The housing section 13 is held in place on the inner upper surface of the furnace body 11. The housing section 13 houses the rotating blades 122. The housing section 13 has two outlets, and the cold air blown out radially from the rotating blades 122 is blown out from these two outlets toward the rectifier plate 14. Near the housing section 13, there is a flow path (not shown) that guides the cold air blown out from the outlet of the second circulation duct 21 directly below the rotating blades 122.

[0026] The rectifier plates 14 are located below each of the two air outlets of the housing unit 13. The rectifier plates 14 direct the cool air blown out from the air outlets of the housing unit 13 toward the first discharge panel 15 and the intake port of the first circulation duct 20.

[0027] The first discharge panel 15 is installed between the two rectifier plates 14 and the transport path of the workpiece W, so as to cover the upper part of the transport path of the workpiece W. The first discharge panel 15 has a plurality of air vents 15a that penetrate through both sides. Cold air blown out from the rectifier plates 14 is blown out from the plurality of air vents 15a towards the transport path of the workpiece W. As a result, the cold air is blown onto the workpiece W from above, and the workpiece W is cooled. In this specification, the cold air heated by the cooling of the workpiece W may be referred to as hot air. The first discharge panel 15 has a mountain-shaped form with a ridge extending in the direction of transport of the workpiece W in the center, and sloping surfaces on both sides (left and right) of the ridge that descend as they move away from the ridge.

[0028] Figure 4 shows the configuration of the second discharge panel 16. The second discharge panel 16 is installed between the workpiece W transport path and the cooling unit 18 so as to cover the top of the cooling unit 18. The second discharge panel 16 is in the direction of gravity D G It is held within the furnace body 11 so as to be perpendicular to it.

[0029] The second discharge panel 16 includes a plurality of pipes 161 and a flow straightening plate 162. The pipes 161 are cold air discharge sections that blow out cold air flowing in from the first circulation duct 20 upward. The pipes 161 are rectangular pipes with a rectangular cross-section. The plurality of pipes 161 are provided on the side of the flow straightening plate 162 that faces the transport path of the workpiece W. The plurality of pipes 161 are arranged at a predetermined spacing pitch so as to be separated by a predetermined distance in the transport direction of the workpiece W.

[0030] One end of the pipe 161 is connected to a first circulation duct 20 located on one side wall of the furnace body 11. The other end of the pipe 161 is connected to a first circulation duct 20 located on the other side wall of the furnace body 11. The pipe 161 has multiple air outlets 161a that penetrate the inside and outside of the pipe 161 on the side facing the transport path of the workpiece W. Cold air flowing from the first circulation duct 20 into the pipe 161 is blown upward from the multiple air outlets 161a. As a result, cold air is blown onto the workpiece W from below, cooling the workpiece W.

[0031] In a plan view, the rectifier plate 162 has multiple air vents 162a that penetrate both the front and back sides in the portion between adjacent pipes 161. Hot air that has absorbed heat from the workpiece W is blown downward from the multiple air vents 162a. As a result, the hot air is blown onto the cooling unit 18 from above. The hot air blown onto the cooling unit 18 is cooled by the cooling unit 18 and becomes cold air.

[0032] The air blower guide section 17 is held on the lower surface of the second discharge panel 16. The air blower guide section 17 guides the hot air blown out from the second discharge panel 16 toward a predetermined area of ​​the cooling section 18. The air blower guide section 17 is composed of two inclined plates that are inclined so as to narrow in width from the second discharge panel 16 toward the cooling section 18. The two inclined plates have an inverted V shape when viewed from the direction of conveying the workpiece W.

[0033] The cooling unit 18 cools the atmosphere inside the furnace body 11. The cooling unit 18 is held at the bottom of the furnace body 11 so as to face the second blowing panel 16. Hot air heated by the workpiece W is blown onto the cooling unit 18 via the second blowing panel 16 and the air blower guide unit 17. The cooling unit 18 includes a plurality of cooling tubes 181, a plurality of first fins 182a, and a plurality of second fins 182b.

[0034] Multiple cooling pipes 181 are repeatedly arranged at a predetermined spacing in the direction of transport of the workpiece W. The cooling pipes 181 cool the hot air blown from the second outlet panel 16. The cooling pipes 181 are in the direction of gravity D G It is inclined with respect to a plane perpendicular to it (i.e., the conveying surface of the workpiece W). In one embodiment, the cooling tube 181 has the shape of a straight rod. In one embodiment, the cooling tube 181 is a heat pipe.

[0035] The cooling tube 181, which is a heat pipe, has a heat receiving section (evaporation section), an insulating section, and a heat dissipation section (condensation section) in that order from one end to the other. The heat receiving section of the cooling tube 181 is located inside the furnace body 11. The heat dissipation section of the cooling tube 181 is located outside the furnace body 11. The insulating section of the cooling tube 181 penetrates the side wall portion of the furnace body 11. The heat receiving section of the cooling tube 181 cools the hot air by receiving heat from the hot air, converting it into cold air. The heat received from the hot air is transported from the heat receiving section to the heat dissipation section via the insulating section. The heat dissipation section of the cooling tube 181 dissipates the heat transported from the heat receiving section. The pipe body of the cooling tube 181, which is a heat pipe, is made of a metal with good thermal conductivity, such as copper, and a working fluid is sealed inside. The surface of the pipe body may be coated with nickel-chromium plating.

[0036] The first fin 182a is a heat receiving fin that transfers heat received from the hot air to the heat receiving section of the cooling tube 181. In other words, the first fin 182a has the function of enhancing the heat receiving effect of the heat receiving section of the cooling tube 181. The second fin 182b is a heat dissipation fin that takes in heat emitted from the heat dissipation section of the cooling tube 181 and dissipates it into the atmosphere. In other words, the first fin 182a has the function of enhancing the heat dissipation effect of the heat dissipation section of the cooling tube 181. The first fin 182a and the second fin 182b have a plate shape. The first fin 182a and the second fin 182b are made of a metal such as aluminum, which has good thermal conductivity.

[0037] The first fin 182a has multiple openings arranged in the direction of conveying the workpiece W. The heat receiving portion of the cooling tube 181 is fitted into each opening. As a result, the first fin 182a is fixed to the circumferential surface of the heat receiving portion of the cooling tube 181 such that the first fin 182a is perpendicular to the extending direction of the cooling tube 181. Each first fin 182a is shared by multiple cooling tubes 181 arranged in the direction of conveying the workpiece W. The multiple first fins 182a are arranged periodically with a first fin pitch P1 in the extending direction of the cooling tube 181.

[0038] The second fin 182b has multiple openings arranged in the direction of transport of the workpiece W. The heat dissipation portion of the cooling tube 181 is fitted into each opening. As a result, the second fin 182b is fixed to the circumferential surface of the heat dissipation portion of the cooling tube 181 so that the second fin 182b is perpendicular to the extension direction of the cooling tube 181. Each second fin 182b is shared by multiple cooling tubes 181 arranged in the direction of transport of the workpiece W. The multiple second fins 182b are arranged periodically with a second fin pitch P2 in the extension direction of the cooling tube 181.

[0039] If the first fin pitch P1 of the first fin 182a is narrow, the maintainability of the cooling section 18 may decrease. Also, flux may accumulate between adjacent first fins 182a, and the space between adjacent first fins 182a may become filled with flux, which may reduce the cooling performance of the cooling section 18. On the other hand, if the second fin pitch P2 of the second fin 182b is wide, the cooling performance of the cooling section 18 may decrease. Therefore, from the viewpoint of improving the maintainability and cooling performance of the cooling section 18, it is preferable that the first fin pitch P1 of the first fin 182a is wider than the second fin pitch P2 of the second fin 182b.

[0040] From the perspective of improving the maintainability and cooling performance of the cooling unit 18, the lower limit of the ratio (N2 / N1) of the number of second fins 182b per unit length (100 mm) of the cooling pipe 181 to the number of first fins 182a per unit length (100 mm) of the cooling pipe 181 is preferably 3.0 or more, more preferably 3.4 or more. From the perspective of improving the cooling performance of the cooling unit 18, the upper limit of the above ratio (N2 / N1) is preferably 4.0 or less. From the perspective of improving the maintainability of the cooling unit 18, the upper limit of the number of first fins 182a per unit length (100 mm) of the cooling pipe 181 is preferably 12 or less, more preferably 8 or less. From the perspective of improving the cooling performance of the cooling unit 18, the lower limit of the above number N1 is preferably 6 or more. From the perspective of improving the cooling performance of the cooling unit 18, the lower limit of the number of second fins 182b per unit length (100 mm) of the cooling pipe 181 is preferably 28 or more, more preferably 36 or more.

[0041] Gravity direction D G The inclination angle θ1 of the cooling pipe 181 with respect to the plane perpendicular to the gravity direction D is preferably 1° or more and 5° or less, more preferably 1° or more and 3° or less. Gravity direction D G When the inclination angle θ1 of the cooling pipe 181 with respect to the plane perpendicular to the gravity direction D is 5° or less, with respect to the gravity direction D G the inclination angle θ2 of the first fin 182a can be maintained at 5° or less. Thereby, with respect to the gravity direction D G it is possible to suppress the occurrence of pressure loss in the atmosphere gas circulating in the furnace body 11 due to the first fin 182a inclined with respect to the gravity direction D. Therefore, it is possible to suppress a decrease in the circulation performance of the cooling device 102b caused by the inclination of the cooling pipe 181. That is, it is possible to suppress a decrease in the cooling function of the cooling device 102b caused by the inclination of the cooling pipe 181.

[0042] Also, with respect to the gravity direction D GBy maintaining the inclination angle θ2 of the first fin 182a to 5° or less, the amount of impact of the ambient gas (flux-containing ambient gas) against the side surface of the first fin 182a can be suppressed, making it difficult for flux to accumulate on the first fin 182a. Therefore, a decrease in the cooling function of the cooling unit 18 caused by flux accumulation can be suppressed. In addition, an increase in the maintenance frequency of the cooling device 102b can also be suppressed.

[0043] If the inclination angle θ1 of the cooling tube 181 is 1° or more, the decrease in the effect obtained by the inclination of the cooling tube 181 (such as the improvement of the cooling function by the cooling section 18) can be suppressed.

[0044] A recovery container (not shown) may be provided at the bottom of the furnace body 11. In this case, the flux adhering to the cooling section 18 is recovered by falling into the recovery container.

[0045] The blower 19 is located below the heat dissipation section of the cooling pipe 181. The blower 19 blows air onto the heat dissipation section of the cooling pipe 181 and the multiple second fins 182b provided on this section, thereby promoting heat dissipation.

[0046] The first circulation duct 20 draws in the cold air blown out from the rectifier plate 14 and supplies it to the piping 161. The first circulation duct 20 is located inside the second circulation duct 21. The first circulation duct 20 has an intake port at its upper end for drawing in the cold air blown out from the rectifier plate 14. The lower end of the first circulation duct 20 is connected to a plurality of pipes 161.

[0047] The second circulation duct 21 draws in the cooled cold air from the cooling unit 18 and blows it out into the upper part of the internal space of the furnace body 11. The cold air blown out from the upper part of the internal space of the furnace body 11 is guided to directly below the rotating blades 122 by a flow path (not shown). The cold air guided to directly below the rotating blades 122 is drawn up by the rotating blades 122. The second circulation duct 21 is held on the inner side surface of the furnace body 11. The second circulation duct 21 has an intake port at its lower end for drawing in the cooled cold air from the cooling unit 18 and an outlet port at its upper end for blowing the cold air into the upper part of the internal space of the furnace body 11.

[0048] The circulation mechanism of the cooling device 102b having the above configuration is configured to circulate cold air within the furnace body 11 through the following two circulation paths. In the first circulation path, the cold air circulates inside the furnace body 11 in the following order: blower 12 → rectifier plate 14 → first discharge panel 15 → workpiece W transport path → rectifier plate 162 → cooling section 18 → second circulation duct 21 → blower 12. In the second circulation path, the cold air circulates within the furnace body 11 in the following order: blower 12 → rectifier plate 14 → first circulation duct 20 → piping 161 → workpiece W transport path → rectifier plate 162 → cooling section 18 → second circulation duct 21 → blower 12.

[0049] [effect] As described above, according to one embodiment of the present invention, the cooling tube 181 is in the direction of gravity D G It is inclined with respect to a plane perpendicular to it (the conveying surface of the workpiece W). As a result, the length of the cooling tube 181 (specifically, the length of the heat receiving portion of the cooling tube 181) within the internal space of the cooling device 102b having a predetermined volume is such that the cooling tube 181 is in the direction of gravity D G This allows for a longer length compared to the case where it is parallel to the perpendicular plane. Therefore, the cooling effect of the cooling section 18 can be improved. In other words, the cooling efficiency of the cooling device 102b can be improved. Also, the cooling pipe 181 is in the direction of gravity D G Because it is inclined with respect to the vertical surface, the flux adhering to the cooling unit 18 can be easily dropped into the recovery container located below the cooling unit 18.

[0050] Furthermore, according to one embodiment of the present invention, since the cooling method of the cooling device 102b employs an air-cooled type (heat pipe type) using heat pipes in the cooling tubes 181, a water-cooled chiller unit, which is a factor in increasing power consumption, is not required. Therefore, power consumption can be reduced compared to a water-cooled cooling device that requires a water-cooled chiller unit.

[0051] <2. Variant> In one embodiment, an example was described in which the cooling tube 181 is a heat pipe. However, the type of cooling tube 181 is not limited to this example, and the cooling tube 181 may be, for example, a water-cooled pipe. In this case, the multiple fins may be provided only on the portion of the water-cooled pipe that is located inside the cooling device 102b.

[0052] In one embodiment, an example was described in which the cooling tube 181 has a straight rod shape. However, the shape of the cooling tube 181 is not limited to this example, and for example, the cooling tube 181 may be bent in the insulating section between the heat receiving section and the heat dissipation section. In this case, the direction of gravity D G The inclination angle θ1 of the cooling tube 181 relative to a plane perpendicular to it represents the inclination angle θ1 of the heat receiving section. Furthermore, "the first fin 182a is perpendicular to the extension direction of the cooling tube 181" means that the first fin 182a is perpendicular to the extension direction of the heat receiving section of the cooling tube 181. Similarly, "the second fin 182b is perpendicular to the extension direction of the cooling tube 181" means that the second fin 182b is perpendicular to the extension direction of the heat dissipation section of the cooling tube 181.

[0053] In one embodiment, an example was described in which each first fin 182a is shared by a plurality of cooling tubes 181. However, the configuration of the cooling unit 18 is not limited to this example, and for example, each first fin 182a may be provided individually for each cooling tube 181. Similarly, each second fin 182b may be provided individually for each cooling tube 181.

[0054] In one embodiment, an example was described in which a plurality of cooling tubes 181 are repeatedly arranged at a predetermined arrangement pitch in the direction of transport of the workpiece W. However, the arrangement direction of the plurality of cooling tubes 181 is not limited to this example, and for example, the plurality of cooling tubes 181 may be repeatedly arranged at a predetermined arrangement pitch in a direction perpendicular to the direction of transport of the workpiece W.

[0055] In one embodiment, an example was described in which there is one transport path for the workpiece W, but there may be two or more transport paths for the workpiece W. In one embodiment, an example was described in which one cooling unit 18 is provided for one cooling device 102b, but there may be two or more cooling units 18 provided for one cooling device 102b. For example, if there are two transport paths for the workpiece W, two cooling devices 102b may be inserted into the interior from both side walls of the cooling device 102b.

[0056] Although embodiments and modifications thereof of the present invention have been specifically described above, the invention is not limited to the embodiments and modifications thereof, and various modifications based on the technical idea of ​​the present invention are possible. For example, the configurations, methods, processes, shapes, materials, and numerical values ​​given in the embodiments and modifications thereof are merely examples, and different configurations, methods, processes, shapes, materials, and numerical values ​​may be used as needed. Furthermore, the configurations, methods, processes, shapes, materials, and numerical values ​​of the embodiments and modifications thereof can be combined with each other as long as they do not depart from the spirit of the present invention. [Explanation of symbols]

[0057] 11... Furnace body, 12... Blower, 13... Housing section, 14... Rectifier plate, 15... First discharge panel, 15a... Air vent, 16... Second discharge panel, 17... Air guide section, 18... Cooling section, 19... Blower, 20... First circulation duct, 21... Second circulation duct, 101... Reflow unit, 102a... Heating device, 102b... Cooling device, 103... Conveyor chain, 104a, 104b, 104c, 104d... Rotating body, 105...Outer panel, 106...Inlet, 107...Outlet, 161...Piping, 161a...Air vent, 162...Rectifier plate, 162a...Air vent, 181...Cooling pipe, 182a...First fin, 182b...Second fin, P1...First fin pitch, P2...Second fin pitch, R1...Heating section, R2...Preheating section, R3...Reflow (main heating) section, R4...Cooling section, W...Workpiece, Z1~Z9...Zone

Claims

1. A cooling device for a conveying and heating device, The furnace body and A cooling unit for cooling the atmosphere inside the furnace body Equipped with, The cooling section includes a cooling tube and a plurality of fins positioned perpendicular to the direction in which the cooling tube extends. The cooling device is inclined with respect to a plane perpendicular to the direction of gravity.

2. The cooling device according to claim 1, wherein the cooling tube is a heat pipe.

3. The cooling device according to claim 1, wherein the inclination angle of the cooling tube with respect to the plane perpendicular to the direction of gravity is 1° or more and 5° or less.

4. The cooling device according to claim 1, wherein the inclination angle of the cooling tube with respect to the plane perpendicular to the direction of gravity is 1° or more and 3° or less.

5. The cooling tube has a heat receiving section provided inside the furnace body and a heat dissipation section provided outside the furnace body. The plurality of fins include a plurality of first fins provided in the heat receiving section and a plurality of second fins provided in the heat dissipation section. The cooling device according to claim 1, wherein the first fin pitch of the first fin is wider than the second fin pitch of the second fin.

6. The cooling tube has a heat receiving section provided inside the furnace body and a heat dissipation section provided outside the furnace body. The plurality of fins include a plurality of first fins provided in the heat receiving section and a plurality of second fins provided in the heat dissipation section. The number of the first fins N per unit length (100 mm) of the cooling tube １ The number of the second fins N per unit length (100 mm) of the cooling tube. ２ Ratio (N ２ / N １ The cooling device according to claim 1, wherein the value of ) is 3.0 or greater.

7. A blower and Circulation mechanism section and Furthermore, The cooling device according to claim 1, wherein the circulation mechanism is configured to circulate the cold air blown out by the blower within the furnace body in the order of workpiece transport path within the furnace body, the cooling unit, and the blower.

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