Armature for linear motor, linear motor, positioning device, processing device, device manufacturing method

Abstract

The present invention provides an armature for a linear motor that can prevent non-insulating refrigerants from entering the coil section while keeping the thickness down. [Solution] The armature 2 for the linear motor comprises a coil section 10 having at least one coil through which a drive current is passed and which exerts linear power on a magnetic circuit, and a non-insulating refrigerant-resistant film 5 covering the outer surface of the coil section 10 and preventing the ingress of a non-insulating refrigerant into the coil section 10. The non-insulating refrigerant-resistant film 5 is bag-shaped and covers the outer surface of the coil section 10, and the ingress of the non-insulating refrigerant through the ingress 51 is prevented by sealing the ingress 51 of the bag. The ingress 51 of the bag-shaped non-insulating refrigerant-resistant film 5 is sealed by heat.

Description

Technical Field

[0001] The present disclosure relates to an armature for a linear motor and the like.

Background Art

[0002] Patent Document 1 discloses that, as a coil body for a linear motor, the surface of a coil is covered with a sealing member made of a silicone resin having high waterproof performance so that cooling water "never comes into contact with a conductor (coil)".

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] As shown in Table 1 in Patent Document 1, the minimum film thickness of a sealing resin material capable of achieving a desired infinite insulation resistance or the like is 0.11 mm to 0.51 mm (that is, about 100 μm to 500 μm), which is too thick for an ultra-precision linear motor such as a semiconductor manufacturing apparatus that often requires a design at the level of several μm to several tens of μm.

[0005] The present disclosure has been made in view of such circumstances, and an object thereof is to provide an armature for a linear motor or the like that can prevent the intrusion of a non-insulating refrigerant into a coil portion while suppressing the thickness.

Means for Solving the Problems

[0006] To solve the above problems, an armature for a linear motor according to an aspect of the present disclosure includes a coil portion including at least one coil through which a drive current flows to exert a linear force on a magnetic circuit, and a non-insulating refrigerant resistant film that covers an outer peripheral surface of the coil portion and prevents the intrusion of a non-insulating refrigerant into the coil portion.

[0007] According to this embodiment, a non-insulating refrigerant film covering the outer surface of the coil can prevent the intrusion of non-insulating refrigerant into the coil while keeping the thickness down.

[0008] Another aspect of the present disclosure is a linear motor. This linear motor comprises a stator having a magnetic circuit and an armature, and a movable element having the other of the magnetic circuit and an armature, and being movably mounted relative to the stator, wherein the armature comprises a coil section having at least one coil through which a drive current is passed and which exerts linear power on the magnetic circuit, and a non-insulating refrigerant film covering the outer surface of the coil section and preventing the ingress of a non-insulating refrigerant into the coil section.

[0009] Another aspect of the present disclosure is a positioning device, which positions a table that is linearly driven by the linear motor described above.

[0010] Another aspect of the present disclosure is a processing apparatus, which processes an object placed on a table positioned by the positioning device described above.

[0011] Another aspect of this disclosure is a device manufacturing method, which manufactures a device through processing of a workpiece by the processing apparatus described above.

[0012] Furthermore, any combination of the above components, as well as any representations thereof converted into methods, apparatus, systems, recording media, computer programs, etc., are also included in this disclosure. [Effects of the Invention]

[0013] According to this disclosure, it is possible to prevent non-insulating refrigerants from entering the coil portion while keeping the thickness down. [Brief explanation of the drawing]

[0014] [Figure 1] This is a schematic plan view showing the stage equipment. [Figure 2] This is a schematic cross-sectional view of the armature of a linear motor, taken in a cross-section perpendicular to the driving direction. [Figure 3] This is a schematic perspective view showing a coil array formed by saddle-shaped coils. [Figure 4] A schematic diagram shows the first example of sealing the entrance of a bag-shaped, non-insulating refrigerant film. [Figure 5] A schematic diagram shows a second example of sealing the entrance of a bag-shaped, non-insulating refrigerant film. [Figure 6] A schematic example is shown where the crimping tool also serves as a holder for the coil and / or the entire armature. [Modes for carrying out the invention]

[0015] The following describes in detail the forms (hereinafter also referred to as embodiments) for carrying out this disclosure, with reference to the drawings. In the description and / or drawings, identical or equivalent components, members, processes, etc., are denoted by the same reference numerals, and redundant descriptions are omitted. The scale and shape of the illustrated parts are set for convenience in order to simplify the description and are not to be interpreted restrictively unless otherwise specified. The embodiments are illustrative and do not limit the scope of this disclosure in any way. Not all features or combinations thereof presented in the embodiments are necessarily essential to this disclosure. For convenience, embodiments are presented by breaking them down into components for each function and / or group of functions that realize them. However, one component in an embodiment may actually be realized by a combination of multiple components as separate entities, and multiple components in an embodiment may actually be realized by a single component as a whole. Furthermore, multiple embodiments and modifications may be disclosed in parallel, and any components of each embodiment and / or modification may be combined in any manner as long as they do not interfere with each other's functions.

[0016] FIG. 1 is a plan view schematically showing a stator for a linear motor (hereinafter also simply referred to as a stator) according to the present embodiment or a stage device 100 as a positioning device or a driving device to which the linear motor can be applied. The stage device 100 is an XY stage that positions a table as a driven body on which an object to be processed such as a semiconductor wafer is placed in the X-axis direction (the left-right direction in FIG. 1) and the Y-axis direction (the up-down direction in FIG. 1). The stage device 100 includes a pair of Y stages 120 that extend in the Y-axis direction and drive the table in the Y-axis direction, an X stage 130 that is integrated with the table and extends in the X-axis direction and drives the table in the X-axis direction, and a base plate 140. The pair of Y stages 120 are connected to both ends of the X stage 130 in the X-axis direction via sliders 124. The Y stage 120 and the X stage 130 are H-shaped in top view.

[0017] Among the components of the stage device 100, at least the table, the Y stage 120, and the X stage 130 may be housed in a vacuum chamber in which the inside is kept in a vacuum state. In this specification, "vacuum" represents a state of a space filled with a gas having a pressure lower than normal atmospheric pressure. Vacuum is classified according to the pressure region, such as low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), high vacuum (0.1 Pa to 10 -5 Pa), ultra-high vacuum (10 -5 Pa to 10 -8 Pa), extreme high vacuum (10 -8 Pa or less), etc. The stage device 100 according to the present embodiment may be used in a vacuum environment of any of the above classifications. Further, the stage device 100 according to the present embodiment may be used in a non-vacuum environment that does not fall into any of the above classifications.

[0018] Linear motors 2X and 2Y, which will be described later, are provided on the X stage 130 and the Y stage 120, respectively. The magnetic linear power in the X-axis direction or the Y-axis direction generated by each of the linear motors 2X and 2Y linearly drives the table as a driven body in the X-axis direction or the Y-axis direction.

[0019] The linear motor 2X responsible for linear drive in the X-axis direction includes a stator 3 that constitutes a track in the X-axis direction and a mover 20 that is movable in the X-axis direction along the stator 3. A table as a driven body is fixed to the mover 20 and moves integrally. The pair of linear motors 2Y responsible for linear drive in the Y-axis direction includes a stator 3 that constitutes a track in the Y-axis direction and a mover 20 that is movable in the Y-axis direction along the stator 3. A slider 124 is fixed to the mover 20 and moves integrally.

[0020] Here, since the pair of sliders 124 are connected to both ends of the armature 2 of the linear motor 2X, the pair of linear motors 2Y linearly drive the armature 2 of the linear motor 2X in the Y-axis direction together with the pair of sliders 124. And since there is a table on the armature 2 (track) of the linear motor 2X, the pair of linear motors 2Y linearly drive the table in the Y-axis direction.

[0021] As described above, the stage device 100 (positioning device using a linear motor as a power source) according to this embodiment, which can achieve high-precision positioning or driving regardless of whether it is in a vacuum environment or a non-vacuum environment, is suitable for use in positioning or driving a table on which a semiconductor wafer or the like as a workpiece is placed as a driven body in a semiconductor manufacturing device such as an exposure device, an ion implantation device, a heat treatment device, an ashing device, a sputtering device, a dicing device, an inspection device, a cleaning device, or a device manufacturing device such as an FPD (Flat Panel Display) manufacturing device. Note that the processing device to which the stage device 100 according to this embodiment can be applied may be any device that positions an arbitrary workpiece for processing by the stage device 100 or the positioning device, and for example, may be any manufacturing device, any processing device (for example, a machine tool), or any inspection device.

[0022] Figure 2 is a schematic cross-sectional view of the armature 2 of the linear motors 2X and 2Y, respectively, provided on the X-stage 130 and Y-stage 120, with the cross-section perpendicular to the driving direction of the linear motors 2X and 2Y (the direction perpendicular to the plane of the paper in Figure 2). In this embodiment, the armature 2 is provided on the stator 3 (Figure 1), which forms the trajectory in the X-axis and Y-axis directions. Although not shown in this figure, a field or magnetic circuit such as a permanent magnet that magnetically interacts with the armature 2 or coil section 10, which is composed of electromagnets, is provided on the movable element 20. In other words, the linear motors 2X and 2Y according to this embodiment are of the Moving Magnet type, in which the field is provided on the movable element 20. However, the linear motor according to this disclosure may be configured as a Moving Coil type, in which the armature with coils is provided on the movable element and the magnetic circuit such as a permanent magnet is provided on the stator.

[0023] The armature 2 is a long, roughly rectangular plate, and a coil row consisting of multiple coils 4 is formed on one or both of its first surface (for example, the left side in Figure 2) and second surface (for example, the right side in Figure 2). Each coil row comprises multiple coils 4 arranged along the longitudinal direction of the armature 2 (the direction perpendicular to the plane of the paper in Figure 2). For example, if each coil row comprises 12 coils 4 and a three-phase alternating current is applied to each coil row, the 12 coils 4 are divided into 4 sets of three-phase coils. In this way, an integrated coil section 10, in which multiple coils 4 are grouped together, is formed in the armature 2.

[0024] In the armature 2, two parallel coil rows may be provided on two sides of the coil section 10, or, as schematically shown in Figure 2, the coil section 10 may have only one coil row (i.e., a single column). Furthermore, one armature 2 or one coil section 10 may have only one coil 4. In other words, the armature 2 or coil section 10 according to this embodiment may include any number of one or more coils 4.

[0025] A movable element 20 (Figure 1) having a magnetic circuit such as a permanent magnet or a field is positioned opposite the coil rows provided on the first and / or second surfaces of the coil section 10. When a drive current such as a three-phase alternating current is passed through each coil row, linear power is exerted on the magnetic circuit opposite to each coil row and / or on each coil row itself. The direction of this linear power is approximately the same as the arrangement direction of each coil row (i.e., the longitudinal direction of the armature 2), and the field (movable element 20) and the armature 2 (stator 3) move linearly relative to each other in this direction.

[0026] Furthermore, the magnetic circuits or fields in the movable element 20 facing the coil rows on the first and second sides of the coil section 10 may be physically connected to each other or integrally formed so that the magnetic circuits on both sides (i.e., the entire movable element 20) are driven integrally relative to each other by the coil rows on both sides of the coil section 10. In this case, approximately the same drive current may be applied to each coil 4 on the first side of the coil section 10 and each coil 4 on the second side located approximately behind it. Alternatively, if the coil rows on the first and second sides of the coil section 10 are offset from each other along the direction of movement, as in the case of two coil rows formed by saddle-shaped coils as shown in Figure 3, an appropriate drive current corresponding to that arrangement may be applied to each coil row.

[0027] As will be described later, the armature 2 is provided with a cooling mechanism for cooling one or more coils 4 that constitute the coil section 10. This cooling mechanism includes an inlet (not shown) provided at one end in the direction of arrangement of the coils 4 and an outlet (not shown) provided at the other end in the direction of arrangement of the coils 4. Note that the inlet and outlet may be reversed (that is, the direction in which the refrigerant described later flows may be reversed so that the inlet functions as the outlet and the outlet functions as the inlet).

[0028] The inlet is located at a position deviating from the arrangement direction of the coils 4, specifically at the top of the coil 4 at one end of the coil row. In this specification, terms such as "top" and "bottom" are used for convenience to represent the relative positional relationship between the coil row or coil 4 and the inlet, etc., as shown in the drawings, and do not mean top or bottom along the vertical or gravity direction. Unless otherwise specified below, terms such as "up," "down," "left," and "right" refer to the relative direction with respect to the coil row or coil 4 shown in each figure.

[0029] An inlet (not shown) is provided at the top of the inlet for a refrigerant such as cooling water to cool multiple coils 4. The refrigerant flowing in from the inlet flows toward the outlet through a refrigerant flow space SP formed between the outer surface of the coil section 10 and the inner surface of the case 6, as will be described later. Since the refrigerant flows from the inlet to the outlet while touching the outer surface of the coil section 10, each coil 4 provided in the coil section 10 can be efficiently cooled. Within the refrigerant flow space SP, a flow path structure of any shape may be formed to guide the refrigerant from the inlet to the following outlet (not shown) via any path.

[0030] The outlet section, like the inlet section, is located at a position deviating from the direction of the coil 4 arrangement, specifically above the coil 4 at the other end of the coil row. An outlet is provided at the top of the outlet section through which the refrigerant that has flowed in from the inlet and passed through the refrigerant flow space flows out.

[0031] In the example in Figure 2, one or a single row of coils 4 is shown, but as previously described with respect to Figure 3, two or two rows of coils 4 may be present in the same cross-section, arranged in the left-right direction in Figure 2. The coil section 10 comprises at least one such coil 4 and an insulating covering member 41 that covers and insulates the at least one coil 4 around its entire circumference. The insulating covering member 41 is, for example, a molded product or mold formed from an insulating resin material such as epoxy resin.

[0032] As schematically shown in Figure 2, the insulating coating member 41 covers all outer surfaces of each coil 4 and / or coil row. Specifically, if each coil 4 and / or coil row is approximated as a rectangular parallelepiped, the insulating coating member 41 covers substantially all six outer surfaces of each coil 4 and / or coil row, including not only the four outer surfaces on the top, bottom, left, and right sides in Figure 2, but also the two outer surfaces on the front and back sides in Figure 2. Such insulating coating member 41 constitutes the outer surface or outer surface of the coil section 10, and the coil 4 or coil row, which is reinforced from the outside by the insulating coating member 41, is not exposed on the outer surface of the coil section 10. Note that if the non-insulating refrigerant film 5, which will be described later, has sufficient insulating properties, the insulating coating member 41 may be omitted, and the coil 4 or coil row may constitute the outer surface or outer surface of the coil section 10.

[0033] In this embodiment, a non-insulating refrigerant-resistant film 5 is provided to cover the outer circumferential surface of the coil portion 10 (in the example of Figure 2, the outer circumferential surface of the insulating covering member 41) and prevent the intrusion of non-insulating refrigerants into the coil portion 10 (particularly the coil 4). The non-insulating refrigerant-resistant film 5 is a film or wrapping that covers the entire circumference of the coil portion 10. The non-insulating refrigerant-resistant film 5 has resistance to non-insulating refrigerants that can be used in the cooling mechanism described above.

[0034] A non-insulating refrigerant is a refrigerant that does not have insulating properties or is conductive. In this embodiment, water is used as the non-insulating refrigerant, but other non-insulating refrigerants may be used. Conventionally, insulating refrigerants or inert refrigerants have been generally used to avoid risks such as dielectric breakdown if the refrigerant penetrates the coil and / or into the coil. However, the cooling capacity of insulating refrigerants is lower than that of non-insulating refrigerants such as water (for example, about 1 / 3). According to this embodiment, the non-insulating refrigerant-resistant film 5 that covers the entire circumference of the coil 10 prevents the penetration of non-insulating refrigerants such as water, so a non-insulating refrigerant with excellent cooling capacity such as water can be used.

[0035] In this embodiment, where the non-insulating refrigerant is water, the non-insulating refrigerant-resistant film 5 is a water-resistant film. The non-insulating refrigerant-resistant film 5 can be made of any constituent material that has water resistance, but it is preferable to include an ionomer (or ionomer resin) as a constituent material. The ratio (by weight and / or amount of substance) of ionomer to all constituent materials of the non-insulating refrigerant-resistant film 5 is, for example, 50% or more, preferably 70% or more, and more preferably 90% or more. Ionomer is a synthetic resin in which polymers are aggregated using the cohesive force of metal ions, and ethylene-based ionomers, urethane-based ionomers, styrene-based ionomers, ionomer resins using fluorine-based polymers, etc., can be used in this embodiment.

[0036] The thickness of the non-insulating refrigerant-resistant film 5 described above is, for example, 1 μm to 100 μm, preferably 5 μm to 50 μm, and more preferably 10 μm to 30 μm. Since the non-insulating refrigerant-resistant film 5 according to this embodiment is in the form of a film, it can be formed to be significantly thinner than conventional sealing resins (for example, Patent Document 1) (approximately 100 μm to 500 μm). For this reason, the non-insulating refrigerant-resistant film 5 according to this embodiment is also suitable for ultra-precision linear motors such as those used in semiconductor manufacturing equipment, where designs at the level of several μm to tens of μm are often required.

[0037] As schematically shown in Figure 2, the non-insulating refrigerant film 5 covers all of the outer surfaces of the coil section 10. Specifically, if the coil section 10 is approximated as a rectangular parallelepiped, then substantially all of the six outer surfaces of the coil section 10, including not only the four outer surfaces on the top, bottom, left, and right sides in Figure 2, but also the two outer surfaces on the front and back sides in Figure 2, are wrapped by the non-insulating refrigerant film 5. The coil section 10, thus wrapped from the outside by the non-insulating refrigerant film 5, is not exposed to the refrigerant flow space SP, which will be described later.

[0038] Furthermore, if there are outer surfaces or portions of the coil portion 10 that do not face the non-insulating refrigerant and / or the refrigerant flow space SP (for example, if a limited outer surface or portion of the coil portion 10 is directly fixed to the case 6 or other members described later), it is not necessary to wrap those surfaces with the non-insulating refrigerant-resistant film 5. However, in order to improve the cooling efficiency of the coil 4, it is preferable that at least two of the four outer surfaces in the cross-section of Figure 2 (top, bottom, left, and right) face the non-insulating refrigerant and / or the refrigerant flow space SP. For this reason, it is preferable that the non-insulating refrigerant-resistant film 5 according to this embodiment wraps the entirety of at least two of the four outer surfaces in the cross-section of Figure 2, the entirety of at least three of the outer surfaces, and it is even more preferable that it wraps the entirety of all four outer surfaces.

[0039] The wrapping of the coil portion 10 with the non-insulating refrigerant film 5 described above is preferably applied substantially uniformly over approximately the entire length of the coil portion 10. However, at both ends of the coil portion 10, a sealing mechanism for the non-insulating refrigerant film 5 may be provided, as will be described later, so it is acceptable for the uniformity of the wrapping to be disrupted.

[0040] As described above, the entire coil section 10, which is almost entirely wrapped with the non-insulating refrigerant film 5, is housed inside, for example, a metal case 6 or shell. A refrigerant flow space SP is formed between the outer circumferential surface of the coil section 10 covered with the non-insulating refrigerant film 5 and the inner circumferential surface of the case 6, through which a non-insulating refrigerant such as water can flow. This refrigerant flow space SP is in communication with the aforementioned inlet and outlet. Therefore, the non-insulating refrigerant such as water flows into the refrigerant flow space SP through the inlet, flows from the inlet to the outlet within the refrigerant flow space SP, and then flows out of the refrigerant flow space SP through the outlet. While the non-insulating refrigerant such as water flows through the refrigerant flow space SP in this way, each coil 4 in the coil section 10 is cooled.

[0041] As shown in Figures 4 and 5, which are schematic side views in Figure 2, the non-insulating refrigerant film 5 according to this embodiment is bag-shaped and covers substantially the entire outer surface of the coil portion 10. By sealing the inlet 51 of the bag, it prevents the intrusion of non-insulating refrigerants such as water from the refrigerant flow space SP through the inlet 51. In the illustrated example, the inlet 51 of the bag-shaped non-insulating refrigerant film 5 is provided on the left side, which is one end in the driving direction of the coil portion 10, but it may also be provided on the right side, which is the other end in the driving direction of the coil portion 10, or on the upper or lower end of the coil portion 10.

[0042] In the example shown in Figure 4, the inlet 51 of the bag-shaped non-insulating refrigerant film 5 is sealed by heat. Specifically, with the coil section 10 housed inside the bag-shaped non-insulating refrigerant film 5, the internal air or other gases are removed by a vacuum pump (not shown), and then the inlet 51 of the non-insulating refrigerant film 5 is sealed by heat. At the heat-sealed location 52, the ionomer and other constituent materials of the non-insulating refrigerant film 5 are welded together, thereby sealing the inlet 51 airtight and liquid-tight. In this way, it is possible to prevent non-insulating refrigerants such as water and other fluids from entering the coil section 10 from the refrigerant flow space SP through the sealed location 52.

[0043] Furthermore, any excess portion of the bag-shaped non-insulating refrigerant film 5 on the side of the inlet 51 beyond the sealed portion 52 may be cut off after the sealed portion 52 has been formed. Also, by performing a vacuum using a vacuum pump or the like before the sealing portion 52 is formed by heat, the inner circumferential surface of the film-shaped non-insulating refrigerant film 5 can be brought into close contact (or adhere to) the outer circumferential surface of the coil portion 10 (in this embodiment, the outer circumferential surface of the insulating coating member 41). In particular, the ionomer used as the constituent material of the non-insulating refrigerant film 5 has high elasticity and flexibility, as well as excellent crack resistance and abrasion resistance (i.e., high toughness), so there is a low possibility of it tearing during vacuuming, and it has the advantage of being able to deform flexibly to match the outer circumferential surface of the coil portion 10.

[0044] In the example shown in Figure 5, the inlet 51 of the bag-shaped non-insulating refrigerant film 5 is mechanically sealed. Specifically, with the coil section 10 housed inside the bag-shaped non-insulating refrigerant film 5, any gases such as air inside are removed by a vacuum pump (not shown), and then the inlet 51 is clamped from both the front (not shown) and back sides of the page in Figure 5 using a rubber packing 53 and / or a metal clip or crimping tool 54, thereby sealing the inlet 51 airtight and liquidtight with strong mechanical force. In this way, it is possible to prevent non-insulating refrigerants such as water or other fluids from entering the coil section 10 from the refrigerant flow space SP through the sealed inlet 51.

[0045] Similar to the example in Figure 4, by performing a vacuum using a vacuum pump or the like before mechanically closing the inlet 51 with the packing 53 and / or crimping tool 54, the inner circumferential surface of the film-like non-insulating refrigerant film 5 can be brought into close contact (or adhere to) the outer circumferential surface of the coil portion 10 (in this embodiment, the outer circumferential surface of the insulating coating member 41). As schematically shown in Figure 6, the inlet 51 of the bag-shaped non-insulating refrigerant film 5 may be provided, for example, on the upper end side of the coil portion 10, and in this case, the crimping tool 54 may also serve as, for example, a pair of holders 71, 72 capable of gripping the coil portion 10 and / or the entire armature 2 from above. The aforementioned inlet and outlet portions may be integrated into such crimping tool 54 as holders 71, 72.

[0046] The inlet 51 of the bag-shaped non-insulating refrigerant film 5 according to this embodiment may be sealed in a manner different from the examples in Figures 4 and 5. For example, the inlet 51 of the non-insulating refrigerant film 5 may be sealed airtight and liquid-tight with an adhesive.

[0047] The present disclosure has been described above based on embodiments. Various modifications are possible for each component and each combination of processes in the exemplary embodiments, and it will be obvious to those skilled in the art that such modifications are included within the scope of the present disclosure.

[0048] The configuration, operation, and function of each device and method described in the embodiments can be realized by hardware resources or software resources, or by the cooperation of hardware resources and software resources. Hardware resources include, for example, processors, ROMs, RAMs, and various integrated circuits. Software resources include, for example, operating systems and application programs. [Explanation of symbols]

[0049] 2 armature for linear motor, 2X linear motor, 2Y linear motor, 3 stator, 4 coil, 5 non-insulating refrigerant film, 6 case, 10 coil section, 20 movable part, 41 insulating coating member, 51 inlet, 100 stage device, 120 Y stage, 130 X stage.

Claims

1. A coil section comprising at least one coil through which a driving current is passed, exerting linear power on a magnetic circuit, A non-insulating refrigerant-resistant film covers the outer surface of the coil portion and prevents the ingress of non-insulating refrigerant into the coil portion, an armature for a linear motor equipped with the following features.

2. The armature for a linear motor according to claim 1, wherein the non-insulating refrigerant film is in the shape of a bag that covers the outer surface of the coil portion, and the entrance of the bag is sealed to prevent the ingress of the non-insulating refrigerant through the entrance.

3. The armature for a linear motor according to claim 2, wherein the opening of the bag-shaped non-insulating refrigerant film is sealed by heat.

4. The armature for a linear motor according to claim 2, wherein the opening of the bag-shaped non-insulating refrigerant film is mechanically crimped.

5. The case comprises the coil section, A refrigerant flow space is formed between the outer circumferential surface of the coil portion covered by the non-insulating refrigerant film and the inner circumferential surface of the case, through which the non-insulating refrigerant can flow. The armature for a linear motor according to any one of claims 1 to 4.

6. The armature for a linear motor according to any one of claims 1 to 4, wherein the non-insulating refrigerant is water.

7. The armature for a linear motor according to any one of claims 1 to 4, wherein the non-insulating refrigerant film includes an ionomer as a constituent material.

8. The coil portion includes an insulating covering member that insulates at least one of the coils, The non-insulating refrigerant film covers the outer surface of the insulating coating member. The armature for a linear motor according to any one of claims 1 to 4.

9. The armature for a linear motor according to any one of claims 1 to 4, wherein the non-insulating refrigerant film is in close contact with the outer surface of the coil portion.

10. A stator comprising either a magnetic circuit or an armature, A movable element comprising the other of the magnetic circuit and the armature, and movably mounted relative to the stator, A linear motor equipped with, The aforementioned armature is A coil section comprising at least one coil through which a driving current is passed, thereby exerting linear power on the magnetic circuit, A non-insulating refrigerant-resistant film covers the outer surface of the coil portion and prevents the ingress of non-insulating refrigerant into the coil portion, A linear motor equipped with [a specific feature].

11. A positioning device for positioning a table that is linearly driven by a linear motor as described in claim 10.

12. A processing apparatus for processing an object to be processed, which is placed on the table positioned by the positioning device described in claim 11.

13. A device manufacturing method for manufacturing a device through processing of a workpiece using the processing apparatus described in claim 12.

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