electrostatic chuck

JP2026090573APending Publication Date: 2026-06-02TOTO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
TOTO LTD
Filing Date
2026-03-03
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

Existing electrostatic chucks face challenges in maintaining uniformity of in-plane temperature distribution due to the increasing number of power supply terminals and refrigerant flow paths, leading to temperature unevenness.

Method used

The electrostatic chuck design incorporates a ceramic dielectric substrate with a spiral-shaped refrigerant passage, multiple zones, and power supply terminals arranged in annular portions to improve temperature uniformity, with a configuration that suppresses temperature variations caused by terminal positions.

Benefits of technology

This design enhances the uniformity of temperature distribution across the processing surface by optimizing the arrangement of power supply terminals and refrigerant flow, ensuring consistent heating and cooling across the substrate.

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Abstract

The objective is to provide an electrostatic chuck capable of improving the uniformity of the in-plane temperature distribution of the object being processed. [Solution] The electrostatic chuck is provided comprising a base plate including a spiral-shaped passage through which a refrigerant can pass, a first heater element including a plurality of first zones arranged radially and circumferentially, and a plurality of first power supply terminals for supplying power to the plurality of first zones, wherein the plurality of first zones include a first heater line that generates heat and a pair of first power supply units that supply power to the first heater line, the pair of first power supply units is electrically connected to the plurality of first power supply terminals, and the plurality of first power supply terminals include a first annular portion arranged on a first virtual circle and a second annular portion located inside the first annular portion and arranged on a second virtual circle, and the passage, when viewed along the stacking direction, includes a first circumferential portion surrounding the second annular portion between the first annular portion and the second annular portion.
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