Processing equipment
The processing apparatus addresses wasteful power consumption by enabling a power-saving mode for individual units, optimizing energy use while maintaining processing efficiency.
JP2026091124APending Publication Date: 2026-06-03DISCO CORP
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- DISCO CORP
- Filing Date
- 2024-11-22
- Publication Date
- 2026-06-03
AI Technical Summary
Technical Problem
Existing semiconductor processing apparatuses experience wasteful power consumption due to units being constantly powered during idling operations, despite not requiring continuous operation.
Method used
A processing apparatus that allows for a power-saving mode to be selectively applied to individual units, including low rotation speed or rotation stop modes for spindles, sensor stop modes, dimming or shutdown of displays, and stop modes for ionizers and air curtain nozzles, reducing unnecessary power usage.
Benefits of technology
The implementation of a power-saving mode effectively reduces power consumption by optimizing the operation of individual units, thereby enhancing energy efficiency without compromising processing accuracy.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure 2026091124000001_ABST
Abstract
To provide a processing device capable of reducing power consumption. [Solution] The processing device 1 is a processing device 1 that performs predetermined processing on a workpiece 100, and is characterized in that a power-saving mode that reduces power consumption can be selected for each of the multiple units mounted on the processing device 1 (processing unit 20, blade breakage detection unit 40, blade height detection unit 50, display 65, ionizer 70, air curtain nozzle 75, and water curtain nozzle 80).
Need to check novelty before this filing date? Find Prior Art