Optical element, method for manufacturing an optical element, optical system, spectrometer

Abstract

There was a need for optical components or elements that would be useful in miniaturizing spectroscopic devices. [Solution] An optical element comprising a plurality of optical components made of a solid material that transmits light of a wavelength to be used, arranged adjacent to each other along a first direction, wherein each of the plurality of optical components is provided with a plurality of grooves extending along a second direction intersecting the first direction on a first optical surface into which light of the wavelength to be used is incident, and a plurality of lenses arranged along the second direction on a second optical surface from which light of the wavelength to be used, incident from the first optical surface, is emitted.

Description

Technical Field

[0006] ,

[0001] The present invention relates to optical components or optical elements that can be used in various fields such as astronomical observation and material analysis.

Background Art

[0002] Conventionally, in various fields such as astronomical observation and material analysis, a spectroscopic device that splits light into different wavelengths, receives the light with a detector, and measures the intensity has been used.

[0003] Patent Document 1 proposes an area spectroscopic device including a reflection unit that splits a light beam incident from the object surface side into a plurality of light beams and reflects them to different positions, an imaging mirror, a spectroscopic element such as a diffraction grating, and a detection unit such as an optical sensor.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the area spectroscopic device described in Patent Document 1, by using a reflection unit to split incident light into a plurality of light beams and spectroscopically analyzing each of the split light beams, two-dimensional spatial information and spectral information can be simultaneously observed. The incident light is split into a plurality of light beams by the reflection unit, and the plurality of light beams are repeatedly reflected by the imaging mirror and the spectroscopic element and guided to the optical sensor. However, it is necessary to secure a large optical path space, and there is a problem that the area spectroscopic device tends to be large as a whole. [[ID=4I]]Therefore, there has been a demand for optical components or optical elements useful for miniaturizing the spectroscopic device.

Means for Solving the Problems

[0006] A first aspect of the present invention is an optical element comprising a plurality of optical components made of a solid material that transmits light of a wavelength to be used, arranged adjacent to each other along a first direction, wherein each of the plurality of optical components is provided with a plurality of grooves extending along a second direction intersecting the first direction on a first optical surface into which light of the wavelength to be used is incident, and a plurality of lenses arranged along the second direction on a second optical surface from which light of the wavelength to be used, incident from the first optical surface, is emitted.

[0007] Furthermore, a second aspect of the present invention is a method for manufacturing an optical element, comprising the steps of manufacturing a plurality of optical components and arranging the plurality of optical components adjacent to each other in a line, wherein the step of manufacturing the plurality of optical components comprises, for each of the plurality of optical components, the steps of preparing a substrate made of a solid material that transmits light of a wavelength to be used, forming a plurality of grooves on a first surface of the substrate along the longitudinal direction of the substrate, and forming a plurality of lenses on a second surface opposite to the first surface along the longitudinal direction of the substrate, and in the step of arranging the plurality of optical components, the plurality of optical components are arranged adjacent to each other in a line along the first direction such that the longitudinal direction of each of them intersects with the first direction. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide optical components or optical elements that are useful for miniaturizing spectroscopic devices. [Brief explanation of the drawing]

[0009] [Figure 1] A schematic diagram showing the configuration of a spectroscopic apparatus incorporating the optical elements according to this embodiment. [Figure 2] (a) A schematic perspective view showing the optical function part that performs an optical function in a transmissive optical element. (b) A perspective view showing the shape of a single optical component. [Figure 3] A partially enlarged view illustrating the first optical surface (incident surface). [Figure 4]A plan view of the second optical surface (emission surface) as seen from the direction from which the light beam is emitted. [Figure 5] A schematic diagram showing the arrangement of light beams incident on the light-receiving surface of a light-receiving sensor. [Figure 6] (a) A schematic diagram showing a plan view of the second optical surface (emission surface) of an optical component. (b) A schematic diagram illustrating the trajectory of one scan when a cutting tool scans between LB-LB in Figure 6(a) to create a lens surface. (c) A schematic diagram illustrating the trajectory of one scan when a cutting tool scans between LM-LM in Figure 6(a) to create a lens boundary. [Figure 7] A diagram showing the XZ cross-section of a two-dimensional lens array in an embodiment. [Figure 8] (a) A perspective view showing one example of the shape of an optical component. (b) A perspective view showing another example of the shape of an optical component. [Figure 9] An example of an optical element equipped with components for positioning and fixing multiple optical components. [Figure 10] Another example of an optical element equipped with components for positioning and fixing multiple optical components. [Figure 11] (a) A diagram showing the substrate of the comparative form. (b) A diagram showing the lens manufacturing method of the comparative form. (c) A diagram showing the lens array of the comparative form. [Figure 12] (a) A schematic XZ cross-sectional view showing the path of light passing through an optical element according to the comparative form. (b) A schematic XZ cross-sectional view showing the path of light passing through an optical element according to the embodiment. [Figure 13] (a) A YZ cross-sectional view schematically showing the path of light passing through the optical element according to the comparative form. (b) An XZ cross-sectional view schematically showing the path of light passing through the optical element according to the embodiment. [Modes for carrying out the invention]

[0010] An optical component or optical element, etc., according to an embodiment of the present invention will be described with reference to the drawings. The embodiments shown below are illustrative, and for example, those skilled in the art can modify the detailed configuration as appropriate without departing from the spirit of the present invention.

[0011] In the following descriptions of the embodiments, in the drawings referred to, unless otherwise specified, elements denoted by the same reference numerals shall have the same functions. In the drawings, when there are a plurality of the same elements, the assignment of reference numerals and their descriptions may be omitted.

[0012] Also, for the sake of convenience of illustration and description, the drawings may be schematically represented. Therefore, the shapes, sizes, arrangements, etc. of the elements shown in the drawings may not necessarily be exactly the same as those of the actual objects. Also, the descriptions of "XX or more and YY or less" and "XX to YY" representing numerical ranges mean numerical ranges including the endpoints XX (lower limit) and YY (upper limit) unless otherwise specified. When numerical ranges are described step by step, the upper and lower limits of each numerical range can be arbitrarily combined.

[0013] In the following description, for example, when referring to the X plus direction, it means the same direction as that pointed by the X-axis arrow in the illustrated orthogonal coordinate system, and when referring to the X minus direction, it means the direction opposite by 180 degrees to the direction pointed by the X-axis arrow in the illustrated orthogonal coordinate system. Also, when simply referring to the X direction, it means a direction parallel to the X-axis regardless of the difference from the direction pointed by the X-axis arrow in the illustration. The same applies to directions other than X.

[0014] [Embodiment 1] (Overall Configuration of the Spectroscopic Apparatus) FIG. 1 is a schematic diagram showing the configuration of a spectroscopic apparatus incorporating optical components and optical elements according to the embodiment. The spectroscopic apparatus includes an optical splitting mirror 1, a mirror 2, a transmissive optical element 3, a light receiving sensor 4, and an information processing device 100. The optical system composed of the optical splitting mirror 1, the mirror 2, and the transmissive optical element 3 can also be called a spectroscopic optical system.

[0015] The incident light 5 (observation light) to be observed travels in the +Z direction and enters the optical splitting mirror 1 within the apparatus. The reflecting surface of the optical splitting mirror 1 is configured such that the incident light 5 is split into a plurality of light beams 5a and reflected in different directions. The optical splitting mirror 1 and the mirrors 2 are configured such that each of the light beams 5a reflected in different directions heads towards one of the plurality of mirrors 2 arranged in a dispersed manner. The plurality of mirrors 2 are arranged along a curved surface centered on the optical axis of the incident light 5. The number of divisions by which the optical splitting mirror 1 splits the incident light 5 into light beams 5a is the same as the number of mirrors 2.

[0016] Each of the light beams 5a reflected in different directions by the optical splitting mirror 1 enters one of the plurality of mirrors 2 and is reflected as a light beam 5b by the mirror 2. The reflecting surface of the mirror 2 is concave, and the optical axis of each light beam 5b is parallel to the +Z direction. Each light beam 5b enters the first optical surface 3a (incident surface) provided in the optical element 3.

[0017] Although the transmissive optical element 3 will be described in detail later, a plurality of diffraction gratings DF are provided on the first optical surface 3a (incident surface), and a plurality of convex lenses CL are provided on the second optical surface 3b (exit surface). The light beam 5b incident on each diffraction grating DF is spectroscopically separated according to wavelength and exits as a light beam 5c from one of the convex lenses CL.

[0018] The light beam 5c exiting from the second optical surface 3b (exit surface) is focused on the light receiving surface of the light receiving sensor 4. The light receiving sensor 4 is a two-dimensional imaging device having sensitivity in the wavelength band of the incident light 5 and transmits the measurement result to the information processing device 100. The information processing device 100 is a computer that performs information processing related to surface spectroscopy, and calculates two-dimensional spatial information and spectral information about the incident light 5 based on the measurement result of the light receiving sensor 4. When the light receiving sensor 4 captures a moving image, the information processing device 100 can also acquire the time variation of the two-dimensional spatial information and spectral information.

[0019] (Configuration of the transmissive optical element) Figure 2(a) is a schematic perspective view showing the optical function section of a transmissive optical element 3 that performs optical functions. In addition to the optical function section, the transmissive optical element 3 may also include support sections for positioning and fixing multiple optical components 3c, and fixing sections for mounting the optical element to a spectrometer. Multiple optical components 3c of substantially identical shape are arranged adjacently along the X direction (first direction) in the optical function section. Here, substantially identical shape means that the shape is the same except for manufacturing tolerances.

[0020] Figure 2(b) is a perspective view showing the shape of one optical component 3c. The optical component 3c is made of a solid material that transmits light of the wavelength used (incident light, which is the object of observation), and has a first optical surface 3a (incident surface) to which the light beam 5b is incident, and a second optical surface 3b (exit surface) to which the transmitted light is emitted. In the optical component 3c, the second optical surface 3b (exit surface) may be located on the opposite side of the first optical surface 3a (incident surface).

[0021] Figure 3 is a partially enlarged view illustrating the first optical surface 3a (incident surface) of the optical component 3c. Macroscopically, the first optical surface 3a is an inclined surface such that the normal from the first optical surface 3a is inclined with respect to the optical axis of the incident light beam 5b. Microscopically, as shown in Figure 3, the first optical surface 3a has numerous grooves formed on the inclined surface that extend along the longitudinal direction (Y direction) of the optical component 3c. That is, each optical component 3c is equipped with a diffraction grating DF on its first optical surface 3a, consisting of multiple grooves (for example, V-grooves with a V-shaped cross-section) that extend along the Y direction (second direction) intersecting the X direction (first direction). The light beam 5b incident on each optical component 3c is diffracted in the X direction according to its wavelength by the action of the diffraction grating DF and travels through the optical component 3c toward the second optical surface 3b (exit surface).

[0022] On the second optical surface 3b (emission surface) of each optical component 3c, multiple convex lenses CL are arranged adjacently in a line along the Y direction (second direction) intersecting the X direction (first direction). Figure 4 is a plan view of the second optical surface 3b (emission surface) of the optical element 3, viewed from the Z direction (direction from which the light beam 5b is emitted). In this example, 16 optical components 3c are arranged adjacently along the X direction (first direction). On each optical component 3c, 5 convex lenses CL are arranged adjacently in a line along the Y direction (second direction). Thus, a lens array is formed on the second optical surface 3b (emission surface) of the optical element 3, with 16 × 5 convex lenses CL arranged in a two-dimensional array. Note that the number of optical components 3c is not limited to 16, nor is the number of convex lenses CL per optical component 3c limited to 5. The configuration of the lens array can be appropriately changed depending on the specifications of the spectrometer.

[0023] The light beams 5c emitted from each convex lens CL are focused onto the light-receiving surface of the light-receiving sensor 4, as explained with reference to Figure 1. Figure 5 is a schematic diagram showing the arrangement of the light beams 5c incident from the optical element 3 onto the light-receiving surface of the light-receiving sensor 4. The light-receiving surface of the light-receiving sensor 4 has 16 × 5 regions where the light beams 5c are focused by each of the 16 × 5 convex lenses CL. Within each region, a large number of pixels are arranged in two dimensions, allowing for the imaging of the light image irradiated from the optical element 3.

[0024] Each luminous beam 5c is spectrally separated in the X direction according to its wavelength by the action of the diffraction grating DF. Therefore, within each of the 16 × 5 regions, light with wavelengths λ1 to λ2 is irradiated at different positions in the X direction. As a result, two-dimensional spatial information and spectral information of the incident light 5 (Figure 1), which is the object of observation, can be obtained from the imaging data of the light receiving sensor 4.

[0025] (Manufacturing method for transmissive optical elements) This section describes a method for manufacturing a transmissive optical element 3. First, the method for manufacturing the optical component 3c is described, and then the method for assembling the optical element 3 using multiple optical components 3c is described.

[0026] The material of the optical component 3c can be selected from materials that transmit light in the wavelength range to be observed. For example, calcium fluoride can be used for visible light, and germanium or indium phosphide can be used for infrared light. To suppress disturbance in the optical path of transmitted light within the optical component 3c, it is desirable that the refractive index distribution inside the component be as small as possible, and therefore it is desirable that the optical component 3c be made of a single crystal material.

[0027] In the case of a spectrometer that spectrally analyzes infrared light (for example, with a wavelength of 1 μm or more and 20 μm or less), optical components 3c can be manufactured by performing processing such as cutting on a long plate-shaped substrate cut from a single-crystal material such as germanium or indium phosphide.

[0028] Figure 8(a) is a perspective view showing an example of the shape of an optical component 3c. The optical component 3c comprises an optical function section having a first optical surface 3a (incident surface) and a second optical surface 3b (exit surface), and a fixing section 3H for positioning and fixing when mounted on the optical element 3.

[0029] First, a long, plate-shaped substrate is machined to form the general shape of the optical component 3c. Then, precise machining is performed to create the diffraction grating DF for the first optical surface 3a (incident surface) and the convex lens CL for the second optical surface 3b (exit surface). The order in which the diffraction grating DF for the first optical surface 3a (incident surface) and the convex lens CL for the second optical surface 3b (exit surface) are manufactured does not matter.

[0030] The process for manufacturing the convex lens CL of the second optical surface 3b (output surface) will now be described. Figure 6(a) is a schematic plan view of the second optical surface 3b (output surface) of the optical component 3c. Five adjacent convex lenses CL are manufactured between the fixing parts 3H located at both ends of a long plate-shaped substrate, along the longitudinal direction of the substrate, by precise cutting.

[0031] When manufacturing the convex lens CL, a cutting tool is brought into contact with the side surface of the base material to make a cut, and cutting is performed while scanning the cutting tool along the short side direction (X direction) of the base material. While changing the position of the cutting tool in the Z direction according to the curvature of the convex lens CL, the scanning in the X direction is performed. When one scan is completed, the cutting tool is separated from the base material and moved in the Y direction to the next scan position. By repeating the cutting while scanning and the change of the scan position in this way, five convex lenses CL are manufactured on the second optical surface 3b (exit surface).

[0032] FIG. 6(b) is a schematic diagram illustrating the trajectory of one scan in the optical surface manufacturing process in which the cutting tool 10 scans between LB-LB in FIG. 6(a) to manufacture the lens surface of the convex lens CL. FIG. 6(c) is a schematic diagram illustrating the trajectory of one scan in the boundary portion manufacturing process in which the cutting tool 10 scans between LM-LM in FIG. 6(a) to manufacture the lens boundary portion of the adjacent convex lens CL.

[0033] Let the moving speed (scanning speed) of the cutting tool 10 when manufacturing the lens surface be VS1 [mm / s], and the moving speed (scanning speed) of the cutting tool 10 when manufacturing the lens boundary portion be VS2 [mm / s]. Although it is possible to set VS1 = VS2, it is preferable to set VS1 < VS2.

[0034] When the moving speed (scanning speed) of the cutting tool 10 is increased, the surface roughness of the machined base material becomes larger. Therefore, by setting VS1 < VS2, the surface roughness of the boundary portion can be made larger than the surface roughness of the lens surface. The optical effect thereof will be described later. Furthermore, if VS1 < VS2, there is also an effect that the manufacturing time of the optical component 3c can be shortened compared to the case where the entire first optical surface 3a (entrance surface) is manufactured at VS1.

[0035] The multiple optical components 3c fabricated in this manner are arranged adjacently along the X direction (first direction), as schematically shown in Figure 7 with the second optical surface 3b (emission surface) side facing outwards. As described above, since the scanning of the cutting tool 10 between LB-LB is performed at a low speed, when viewing the XZ cross-section in the two-dimensional lens array, the convex lenses CL have extremely high shape accuracy, including the boundaries between the lenses.

[0036] Here, we will explain the advantages of this embodiment by presenting a comparative form. In this embodiment, an optical element 3 is constructed by arranging multiple optical components 3c, but in the comparative form, an optical element 3X is manufactured by cutting a single substrate. Figures 11(a) to 11(c) are schematic diagrams showing the process of manufacturing a lens array in which convex lenses are arranged in two dimensions on the incident surface of the optical element 3X according to the comparative form.

[0037] In the comparative configuration, first, as shown in Figure 11(a), a substrate (e.g., a single crystal) of sufficient size to fabricate the entire optical element 3X is prepared.

[0038] Next, as shown in Figure 11(b), the cutting tool 10 is brought into contact with the substrate and cut in the Z-minus direction, and the cutting tool is scanned along the X direction to create the lens surface of the convex lens CL. The boundaries between adjacent convex lenses in the Y direction are also created by scanning the cutting tool at the same scanning speed as the lens surface.

[0039] By repeating this process, a lens array in which convex lenses CL are arranged in a two-dimensional pattern is fabricated on the output side of the optical element 3X, as shown in Figure 11(c). In particular, when using a single crystal substrate, chipping and cracking are likely to occur during machining. In the comparative configuration, even if chipping or cracking occurs locally, a substrate the size of the entire optical element 3X is wasted, which is disadvantageous in terms of material usage rate and yield. In the embodiment, even if chipping or cracking occurs during machining, only that optical component needs to be discarded, which is advantageous in terms of material usage rate and yield.

[0040] In the comparative configuration, a recess CV reflecting the tip shape of the cutting tool 10 is formed at the boundary between adjacent convex lenses CL in the X direction, causing the edge of the convex lens CL to deviate from its original lens surface shape.

[0041] Figure 12(a) is an XZ cross-sectional view schematically showing the path of light passing through the optical element 3X in the comparative configuration. In the X direction, recesses CV, which differ from the original lens surface shape, are formed at the edges of each adjacent convex lens CL. As illustrated in Figure 12(a), the light beam 5c emitted from these recesses CVs travels along a different optical path than the original, and can generate noise light that does not correctly reflect the two-dimensional spatial and spectral information of the incident light 5 (Figure 1) that is the object of observation.

[0042] Figure 12(b) is an XZ cross-sectional view schematically showing the path of light passing through the optical element 3 according to the embodiment. As explained with reference to Figure 6(b), in this embodiment, when manufacturing the convex lens CL, the cutting tool is brought into contact with the side surface of the substrate and cut, and the cutting tool is scanned along the short direction (X direction) of the substrate while cutting. As a result, the original lens surface shape is formed with high precision up to the edge of the lens for each of the convex lenses CL adjacent to each other in the X direction. As a result, as illustrated in Figure 12(b), the emitted light beam 5c can travel along its original optical path. According to this embodiment, light that reflects two-dimensional spatial information and spectral information about the incident light 5 (Figure 1), which is the object to be observed, can be guided to the light-receiving surface of the light-receiving sensor 4.

[0043] Figure 13(a) is a YZ cross-sectional view schematically showing the path of light passing through the optical element 3X in the comparative configuration. In the Y direction, recesses CV, which differ from the original lens surface shape, are formed at the edges of adjacent convex lenses CL. The recesses CV are formed by moving a cutting tool at the same scanning speed as the lens surface, and because the surface roughness is small, the light transmittance is high. As illustrated in Figure 13(a), the light beam 5c emitted from the recesses CV travels along an optical path different from the original lens surface shape, and can therefore generate noise light that does not reflect the two-dimensional spatial information of the incident light 5 (Figure 1) that is the object of observation.

[0044] FIG. 13(b) is an XZ cross-sectional view schematically showing the path of light transmitted through the optical element 3 according to the embodiment. As described with reference to FIG. 6(c), in a preferred embodiment, the moving speed (scanning speed) of the cutting tool 10 when producing the lens boundary portion is set to VS1 < VS2, and the surface roughness of the boundary portion is made larger than the surface roughness of the lens surface, so as to form a light scattering portion at the boundary portion. In the lens boundary portion (light scattering portion) with a large surface roughness, the emitted light is scattered at a wide angle, so that noise light with a high intensity does not locally enter a specific position (pixel) on the light receiving surface of the light receiving sensor 4. Thus, the generation of noise light that does not reflect the two-dimensional spatial information about the incident light 5 (FIG. 1) to be observed is suppressed.

[0045] Here, returning to the description of the manufacturing method of the transmissive optical element, the process of manufacturing the optical element 3 using a plurality of optical components 3c will be described. For example, an adhesive is applied to each side surface of the optical component 3c shown in FIG. 2(b), and the optical component 3c is arranged along the X direction using a positioning jig (not shown) to solidify the adhesive, and the optical element can be manufactured by integrating them as shown in FIG. 2(a).

[0046] Also, the optical element may be configured to include components for positioning and fixing a plurality of optical components. For example, as shown in FIG. 9, the optical component 3c shown in FIG. 8(a) may be positioned and fixed using a frame body 6 (supporting member) provided with an opening and an L-shaped component 7 (positioning reference) fixed to the frame body 6. The fixing portions 3H of the optical components 3c may be arranged while being abutted against the L-shaped component 7 serving as the positioning reference, and the optical components 3c may be fixed to the frame body 6 using an adhesive.

[0047] Furthermore, the optical component 3c does not necessarily have to be fixed with adhesive; it may be positioned and fixed using a flexible material such as an elastic member. For example, as shown in Figure 10, the optical component 3c shown in Figure 8(b) may be positioned and fixed using a holder 8 with an opening, a frame-shaped lid 8A, and an elastic rubber member 9. The optical component 3c is stored in the holder 8 while being pressed in the X-minus direction via the sheet-shaped rubber member 9. The frame-shaped lid 8A then presses the notch portion 3J (Figure 8(b)) of the optical component 3c in the Z-plus direction via the long rubber member 9, thereby positioning and fixing the optical component 3c in the holder 8.

[0048] According to this embodiment, by using an optical element 3 consisting of multiple optical components 3c, it is not necessary to repeatedly perform reflection by the imaging mirror and spectroscopic element as in the conventional method. As a result, the optical path space becomes more compact, as shown in Figure 1, and the surface spectrometer can be miniaturized.

[0049] [Other embodiments] It should be noted that the present invention is not limited to the embodiments described above, and many modifications are possible within the technical concept of the present invention. For example, it is acceptable to implement the invention by combining all or part of the optical components of different shapes described above.

[0050] Figure 3 illustrates a diffraction grating DF formed on an inclined surface, but a diffraction grating DF may also be formed by providing V-grooves on a surface perpendicular to the optical axis of the incident light beam 5b. The apex angle and number of V-grooves constituting the diffraction grating DF can be set according to the wavelength band of the light to be observed.

[0051] Although unwanted light and stray light may be incident on the optical element 3 from a direction inclined with respect to the Z-positive direction, a light-shielding structure may be provided at the boundary between optical components 3c to prevent this from reaching the light-receiving sensor 4. For example, fine irregularities may be created on the side surface that forms the boundary between adjacent optical components 3c (the surface connecting the first optical surface and the second optical surface) by grinding or laser processing to suppress the transmission of unwanted light and stray light that is incident at an oblique angle. Alternatively, a light-shielding material or coating may be provided on the side surface that forms the boundary between adjacent optical components 3c (the surface connecting the first optical surface and the second optical surface). Or, an adhesive containing a material that absorbs unwanted light may be applied to the side surface that forms the boundary between adjacent optical components 3c (the surface connecting the first optical surface and the second optical surface) to bond adjacent optical components 3c together.

[0052] This specification discloses at least the following: [Item 1] An optical element comprising a plurality of optical components made of a solid material that transmits light of a specific wavelength, arranged adjacent to each other along a first direction, Each of the aforementioned plurality of optical components is The first optical surface into which light of the specified wavelength is incident is provided with a plurality of grooves extending along a second direction intersecting the first direction, and the second optical surface from which light of the specified wavelength incident from the first optical surface is emitted is provided with a plurality of lenses arranged along the second direction. An optical element characterized by the following features. [Matter 2] The first optical surface is an inclined surface arranged such that the normal from the first optical surface is inclined with respect to the optical axis of the incident light of the wavelength used, and a diffraction grating consisting of the plurality of grooves is formed on the inclined surface. The optical element described in item 1, characterized by the features described above. [Matter 3] Each of the optical components has a light-scattering portion extending along the first direction and having a surface roughness greater than that of the optical surface of the lens, at the boundary between the lenses of a plurality of lenses arranged along the second direction. An optical element according to item 1 or 2, characterized by the above. [Matter 4] The aforementioned solid material is a single crystal material. An optical element as described in any one of items 1 to 3, characterized by the above. [Matter 5] The solid material is a material containing indium phosphide or germanium. An optical element as described in any one of items 1 to 4, characterized by the features described herein. [Matter 6] The wavelength used is 1 μm or more and 20 μm or less. An optical element according to any one of items 1 to 5, characterized by the features described herein. [Matter 7] A light-shielding structure is provided at the boundary between optical components arranged adjacent to each other along the first direction. An optical element according to any one of items 1 to 6, characterized by the features described herein. [Matter 8] The process of manufacturing multiple optical components, A method for manufacturing an optical element, comprising the step of arranging the plurality of optical components adjacent to each other along a line, The process for manufacturing the plurality of optical components is as follows for each of the plurality of optical components: A step of preparing a substrate made of a solid material that transmits light of the wavelength to be used, The process of forming a plurality of grooves on the first surface of the substrate along the longitudinal direction of the substrate, The process includes the step of forming a plurality of lenses arranged along the longitudinal direction of the substrate on a second surface opposite to the first surface, In the step of arranging the plurality of optical components, the plurality of optical components are arranged adjacent to each other in a line along the first direction such that their respective longitudinal directions intersect with the first direction. A method for manufacturing an optical element, characterized by the following: [Matter 9] The step of forming the plurality of grooves is a step of forming a diffraction grating on the first surface which is inclined with respect to the second surface. A method for manufacturing an optical element as described in item 8. [Matter 10] The step of forming the plurality of lenses includes a step of forming a light scattering portion at the boundary between the plurality of lenses, which extends along the short direction of the solid material and has a surface roughness greater than that of the optical surface of the lens. A method for manufacturing an optical element as described in item 8 or 9. [Matter 11] The process of forming the plurality of lenses is as follows: An optical surface manufacturing step in which the optical surface of the lens is machined by moving a cutting tool along the shorter direction of the second surface, The process includes a boundary fabrication step of cutting the boundary between the lenses while moving a cutting tool along the shorter direction of the second surface, The speed at which the cutting tool is moved in the optical surface manufacturing step is smaller than the speed at which the cutting tool is moved in the boundary manufacturing step. A method for manufacturing an optical element as described in any one of items 8 to 10, characterized by the features described herein. [Matter 12] The aforementioned solid material is a single crystal material. A method for manufacturing an optical element as described in any one of items 8 to 11, characterized by the features described herein. [Matter 13] The solid material is a material containing indium phosphide or germanium. A method for manufacturing an optical element as described in any one of items 8 to 12. [Matter 14] The wavelength used is 1 μm or more and 20 μm or less. A method for manufacturing an optical element as described in any one of items 8 to 13, characterized by the features described herein. [Matter 15] The process further includes forming a light-shielding structure at the boundary between adjacent optical components. A method for manufacturing an optical element as described in any one of items 8 to 14, characterized by the features described herein. [Matter 16] The optical element described in any one of items 1 to 7, A first mirror that splits the observed light into multiple beams and reflects them in different directions, The system comprises a second mirror positioned in each of the optical paths of the multiple light beams reflected by the first mirror, The optical element is positioned in the optical path of the light beam reflected by the second mirror. An optical system characterized by the following features. [Matter 17] The optical system described in item 16, The system includes a light-receiving sensor that receives the light beam transmitted through the optical element, A spectroscopic apparatus characterized by the following features. [Explanation of Symbols]

[0053] 1. Light-splitting mirror / 2. Mirror / 3. Optical element / 3a. First optical surface / 3b. Second optical surface / 3c. Optical component / 3H. Fixing part / 3J. Notch / 4. Light receiving sensor / 5. Incident light / 5a. Light beam / 5b. Light beam / 5c. Light beam / 6. Frame / 7. L-shaped part / 8. Holder / 9. Rubber material / 10. Cutting tool / 100. Information processing device / CL. Convex lens / DF. Diffraction grating

Claims

1. An optical element comprising a plurality of optical components made of a solid material that transmits light of a specific wavelength, arranged adjacent to each other along a first direction, Each of the aforementioned plurality of optical components is The first optical surface into which light of the specified wavelength is incident is provided with a plurality of grooves extending along a second direction intersecting the first direction, and the second optical surface from which light of the specified wavelength incident from the first optical surface is emitted is provided with a plurality of lenses arranged along the second direction. An optical element characterized by the following features.

2. The first optical surface is an inclined surface arranged such that the normal from the first optical surface is inclined with respect to the optical axis of the incident light of the wavelength used, and a diffraction grating consisting of the plurality of grooves is formed on the inclined surface. The optical element according to feature 1.

3. Each of the optical components has a light-scattering portion extending along the first direction at the boundary between the lenses of a plurality of lenses arranged along the second direction, and having a surface roughness greater than that of the optical surface of the lens. The optical element according to feature 1.

4. The aforementioned solid material is a single crystal material. The optical element according to any one of claims 1 to 3.

5. The solid material is a material containing indium phosphide or germanium. The optical element according to any one of claims 1 to 3.

6. The wavelength used is 1 μm or more and 20 μm or less. The optical element according to any one of claims 1 to 3.

7. A light-shielding structure is provided at the boundary between optical components that are arranged adjacent to each other along the first direction. The optical element according to any one of claims 1 to 3.

8. The process of manufacturing multiple optical components, A method for manufacturing an optical element, comprising the step of arranging the plurality of optical components adjacent to each other along a line, The process for manufacturing the plurality of optical components is as follows for each of the plurality of optical components: A step of preparing a substrate made of a solid material that transmits light of the wavelength to be used, The process of forming a plurality of grooves on the first surface of the substrate along the longitudinal direction of the substrate, The process includes the step of forming a plurality of lenses arranged along the longitudinal direction of the substrate on a second surface opposite to the first surface, In the step of arranging the plurality of optical components, the plurality of optical components are arranged adjacent to each other in a line along the first direction such that their respective longitudinal directions intersect with the first direction. A method for manufacturing an optical element, characterized by the following:

9. The step of forming the plurality of grooves is a step of forming a diffraction grating on the first surface which is inclined with respect to the second surface. The method for manufacturing an optical element according to claim 8.

10. The step of forming the plurality of lenses includes a step of forming a light scattering portion at the boundary between the plurality of lenses, which extends along the short direction of the solid material and has a surface roughness greater than that of the optical surface of the lens. The method for manufacturing an optical element according to claim 8.

11. The process of forming the plurality of lenses is as follows: An optical surface manufacturing step in which the optical surface of the lens is machined by moving a cutting tool along the shorter direction of the second surface, The process includes a boundary fabrication step in which a cutting tool is moved along the shorter direction of the second surface while the boundary between the lenses is machined, The speed at which the cutting tool is moved in the optical surface manufacturing step is smaller than the speed at which the cutting tool is moved in the boundary manufacturing step. A method for manufacturing an optical element according to any one of claims 8 to 10.

12. The aforementioned solid material is a single crystal material. A method for manufacturing an optical element according to any one of claims 8 to 10.

13. The solid material is a material containing indium phosphide or germanium. A method for manufacturing an optical element according to any one of claims 8 to 10.

14. The wavelength used is 1 μm or more and 20 μm or less. A method for manufacturing an optical element according to any one of claims 8 to 10.

15. The process further includes forming a light-shielding structure at the boundary between adjacent optical components. A method for manufacturing an optical element according to any one of claims 8 to 10.

16. An optical element according to any one of claims 1 to 3, A first mirror that splits the observed light into multiple beams and reflects them in different directions, The system comprises a second mirror positioned in each of the optical paths of the multiple light beams reflected by the first mirror, The optical element is positioned in the optical path of the light beam reflected by the second mirror. An optical system characterized by the following features.

17. The optical system according to claim 16, The system includes a light-receiving sensor that receives the light beam transmitted through the optical element, A spectroscopic apparatus characterized by the following features.

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