Liquid dispensing head, method for manufacturing a liquid dispensing head

Abstract

This product provides a liquid dispensing head in which the components are precisely aligned. [Solution] A liquid dispensing head having a dispensing tip having a dispensing port for dispensing liquid, and a cover member having a first surface having an opening that exposes the dispensing tip and is joined to the dispensing tip via an adhesive, and a second surface which is opposite to the first surface, wherein, when viewed from a direction perpendicular to the second surface, at least a portion of the opening, the edge on the second surface side is located inside the opening more than the edge on the first surface side.

Description

【Technical Field】 【0004】 , , , , , , , , 【0006】 , , , , 【0005】 , , , , , , , 【0001】 The present invention relates to a liquid ejection head. 【Background Art】 【0002】 In the joining of members during the manufacture of a liquid ejection head, particularly the joining of a substrate provided with ejection openings and other members, high-precision alignment is required. In the manufacture of a liquid ejection head, due to restrictions on the part shape and the like, instead of the method of aligning by providing an alignment surface on each member and abutting them, a method of providing a detection unit on each component and aligning by image processing is often used. 【0003】 As a method of providing a detection unit on each component for alignment, for example, there is a method using an alignment mark. In Patent Document 1, a method of providing alignment marks on a liquid chamber partition member and a diaphragm respectively and performing alignment during joining by image processing using a CCD camera has been proposed. 【Prior Art Documents】 【Patent Documents】 【0004】 【Patent Document 1】 Japanese Unexamined Patent Application Publication No. 2003 - 305851 【Summary of the Invention】 【Problems to be Solved by the Invention】 【0005】 In the manufacture of a liquid ejection head, for some members, it may be difficult to provide an alignment mark. For example, in a component exposed on the outermost surface of the liquid ejection head in the direction of liquid ejection from an ejection opening such as a face cover, the outermost surface of the liquid ejection head affects the wiping performance by a blade during cleaning and the like. Therefore, if an alignment mark is provided, it is conceivable that the wiping performance may deteriorate due to its uneven shape. 【0006】 In view of these circumstances, the present invention aims to provide a liquid dispensing head in which components are aligned with high precision, and a method for manufacturing the same. [Means for solving the problem] 【0007】 A liquid dispensing head according to a preferred configuration of the present invention comprises a dispensing tip having a dispensing port for dispensing liquid, and a cover member having a first surface having an opening that exposes the dispensing tip and being joined to the dispensing tip via an adhesive, and a second surface that is opposite to the first surface, wherein, when viewed from a direction perpendicular to the second surface, at least a portion of the opening is located inward of the opening from the edge on the second surface side than from the edge on the first surface side. 【0008】 Furthermore, a method for manufacturing a liquid dispensing head according to a preferred state of the present invention is a method for manufacturing a liquid dispensing head having a dispensing tip having a dispensing port for dispensing liquid, and a cover member having an opening for exposing the dispensing tip and a first surface joined to the dispensing tip via an adhesive, and a second surface which is opposite to the first surface, wherein the liquid dispensing head has a cover member in which, when viewed from a direction perpendicular to the second surface, at least a portion of the opening, the edge on the second surface side is located inside the opening more than the edge on the first surface side, and the method for manufacturing a liquid dispensing head includes an adhesive application step of applying an adhesive to the dispensing tip, an image processing step of imaging the dispensing tip and the edge on the second surface side of at least a portion of the opening of the cover member with a camera positioned perpendicular to the second surface, a position adjustment step of adjusting the position of the cover member relative to the dispensing tip based on the results of the image processing step, and a joining step of curing the adhesive to join the dispensing tip and the cover member. [Effects of the Invention] 【0009】 According to the present invention, it is possible to provide a liquid dispensing head in which components are precisely aligned with each other, and a method for manufacturing the same. [Brief explanation of the drawing] 【0010】 [Figure 1] A perspective view showing an example of a liquid dispensing device. [Figure 2] A perspective view showing an example of a liquid dispensing head. [Figure 3] A perspective view showing an example of a liquid dispensing unit. [Figure 4] An exploded perspective view showing an example of a liquid dispensing unit. [Figure 5] A cross-sectional view showing an example of a dispensing tip. [Figure 6] A plan view showing the discharge tip and cover component. [Figure 7] A diagram showing the flow of the joining process between the discharge tip and the cover member. [Figure 8] A diagram showing the camera arrangement during the image processing step S2. [Figure 9] An enlarged view showing the positional relationship between the discharge tip and the cover member after they have been joined together. [Figure 10] A diagram showing the cross-section of the cover member and the camera arrangement in the embodiment and comparative example. [Figure 11] Images of images captured during the image processing step in the embodiment and comparative example. [Figure 12] A diagram showing part of the molding process for cover components using a punching method. [Figure 13] A diagram showing part of the molding process for cover components by etching. [Figure 14] Cross-sectional view of the discharge tip and cover member after the adhesive has hardened. [Modes for carrying out the invention] 【0011】 Embodiments for implementing the present invention will be described with reference to the drawings. Components having the same function may be given the same reference numerals, and repeated descriptions may be omitted. Hereinafter, an example in which the present invention is applied to a liquid ejection head provided in a liquid ejection device as an inkjet printer will be described. However, the present invention is not limited to the embodiments shown below, and can be changed within the scope that those skilled in the art can conceive, such as other embodiments, additions, modifications, deletions, etc. As long as the functions and effects of the present invention are achieved in any aspect, they are included in the scope of the present invention. 【0012】 Note that the components described below are merely examples, and are not intended to limit the scope of the present invention only to them. The present invention will be described with specific examples using a liquid ejection recording head, but is not limited to these examples, and various modifications and changes are possible within the scope of the gist thereof. 【0013】 1. Configuration of the liquid ejection device 1.1 Outline of the configuration of the liquid ejection device FIG. 1 is a schematic perspective view for explaining a schematic configuration of a liquid ejection device 1000 according to an embodiment of a liquid ejection device to which the present disclosure is applicable. The liquid ejection device 1000 of the present embodiment is a one-pass type capable of forming an image or the like by ejecting liquid onto a medium M by a single movement of the medium M, and ejection ports for ejecting liquid are arranged so as to correspond to the entire width of the medium M. The liquid ejection device 1000 is provided with the liquid ejection head 100 of the present invention, for example, detachably. 【0014】 The medium M is conveyed in the direction of arrow A by the conveyance unit 500, and recording is performed by the liquid ejection head 100. The liquid ejection head 100 is a liquid ejection head disposed on the support member 40 and having a liquid ejection unit 10 with a discharge tip 1 capable of discharging liquid (described later). The liquid ejection head 100 is positioned within the liquid ejection device 1000 by a reference member. In FIG. 1, a liquid ejection device 1000 is shown which is equipped with a total of eight liquid ejection heads 100 (100Ka, 100Kb, 100Ya, 100Yb, 100Ma, 100Mb, 100Ca, 100Cb), two for each of the four colors of black, yellow, magenta, and cyan, each capable of discharging ink of its respective color. 【0015】 In this specification, a direction parallel and opposite to the conveyance direction A of the medium M is the Y direction, the direction from the liquid ejection head 100 toward the medium M is the Z direction, and a direction perpendicular to both the Y direction and the Z direction and perpendicular to the conveyance direction of the medium M is the X direction. 【0016】 1.2 Configuration of the Liquid Ejection Head FIG. 2 shows a perspective view of the liquid ejection head 100, and FIG. 3 shows a perspective view of the liquid ejection unit 10. In the liquid ejection head 100 according to the present embodiment, a plurality of liquid ejection units 10 each having a discharge tip 1 with a discharge port for discharging liquid are fixed on the support member 40. A cover member 2 is provided on a joint surface 111 which is the surface of the liquid ejection unit 10 opposite to the support member 40 of the discharge tip 1 (see FIGS. 3 and 4). The cover member 2 is joined to the joint surface 111 of the discharge tip 1 at a joint surface (first surface) 211. Further, the liquid ejection head 100 has a housing for accommodating an electric substrate or the like. Note that the liquid ejection head to which the present invention is applicable can be implemented in any form including the example of FIG. 2, and other forms are not limited either. 【0017】 1.3 Configuration of the Liquid Ejection Unit Figure 4 shows an exploded perspective view of the liquid discharge unit 10, viewed from the side opposite to the surface (front) on which the discharge port 13 of the discharge tip 1 is located. The liquid discharge unit 10 includes a discharge tip 1, an electrical wiring member (wiring board) 250, a damper board 220 for supplying liquid to the discharge tip 1, and a flow path member 240. The discharge tip 1 includes a discharge port 13 for discharging liquid, a piezoelectric element (see Figure 5) as an actuator for discharging liquid from the discharge port 13, and terminals (not shown) electrically connected to the actuator. The electrical wiring member 250 is connected to the terminals and supplies power to drive the actuator from outside the discharge tip 1 to the pressure generating element of the actuator. The damper board 220 and the flow path member 240 have flow paths for supplying liquid to the discharge port 13 and are arranged adjacent to the discharge tip 1 on the back surface, which is the side opposite to the front surface of the discharge tip 1. The electrical wiring member 250 is connected to the terminals of the discharge tip 1 on the back side of the discharge tip 1, forming an electrical connection. In this embodiment, the liquid discharge unit 10 further includes a cover member 2 for protecting the surface of the discharge tip 1. In this embodiment, as an example, alumina is used for the flow path member 23 and titanium is used for the cover member 2. 【0018】 1.4 Configuration of the liquid dispensing substrate Figure 5 illustrates the discharge tip 1 of this embodiment. Figure 5(a) is a cross-sectional view in the YZ plane. Figure 5(b) is an enlarged view of the area around the discharge port 13 in Figure 5(a). 【0019】 As shown in Figure 5(a), the discharge tip 1 of this embodiment is formed by a laminated structure of multiple substrates. Specifically, the discharge tip 1 has five substrates: a discharge port forming substrate 201, a vibration substrate 202, a liquid supply substrate 203, a flow path forming substrate 204, and a damper substrate 220. The discharge tip 1 is formed by bonding a damper substrate 220 having a damper member 300 between the flow path forming substrate 204 and the liquid supply substrate 203. 【0020】 A more detailed explanation will be given using Figure 5(b). The ejection tip 1 has a pressure chamber 5 that communicates with the ejection port 13. Each ejection port 13 has a pressure chamber 5. In addition, each pressure chamber 5 is equipped with a piezoelectric element 6 on a deformable wall surface made of a vibrating substrate 202. The piezoelectric element 6 pressurizes the liquid in the pressure chamber 5 by deforming the vibrating substrate 202, thereby enabling ink to be ejected from the ejection port 13. 【0021】 The liquid supply substrate 203 has individual supply channels 7 and individual recovery channels 8 that communicate with each pressure chamber 5, corresponding to each pressure chamber 5. Ink is supplied to the pressure chamber 5 from the individual supply channels 7 and discharged from the discharge port 13. In addition, some of the ink can flow from the pressure chamber 5 to the individual recovery channels 8. In other words, in the configuration of this embodiment shown in Figure 5, two individual channels (individual supply channels 7 and individual recovery channels 8) are connected to one pressure chamber 5, and liquids such as ink can circulate inside and outside the pressure chamber 5. 【0022】 Multiple individual supply channels 7 communicate with a first common supply channel 17 formed in the damper substrate 220. Multiple individual recovery channels 8 communicate with a first common recovery channel 18 formed in the damper substrate 220. The wall surface of the first common supply channel 17 facing the individual supply channels 7 is formed by a damper member 300. A damper region 301 is provided at a position facing the individual supply channels 7. The wall surface of the first common recovery channel 18 facing the individual recovery channels 8 is formed by a damper member 300. A damper region 301 is provided at a position facing the individual recovery channels 8. The damper region 301 is the area of ​​the wall surface on which the damper member 300 is formed, and is the area that forms a recessed space provided in the channel forming substrate 204. When pressure fluctuations occur, the damper member 300 can absorb the pressure using the recessed space provided in the channel forming substrate 204. The first common supply channel 17 and the first common recovery channel 18 extend in the longitudinal direction of the discharge tip 1. Furthermore, multiple first common supply channels 17 and first common recovery channels 18 are formed so as to be arranged alternately in the short-side direction of the discharge tip 1. 【0023】 The first common supply channel 17 communicates with the second common supply channel 27 formed on the channel-forming substrate 204. Multiple connecting channels 15 are formed in the second common supply channel 27. Ink is supplied from outside the ejection tip 1 via these connecting channels 15. The first common recovery channel 18 communicates with the second common recovery channel 28 formed on the channel-forming substrate 204. Multiple connecting channels 15 are formed in the second common recovery channel 28. Ink is recovered to the outside of the ejection tip 1 via these connecting channels 15. The second common supply channel 27 and the second common recovery channel 28 extend in the longitudinal direction of the ejection tip 1. Furthermore, multiple second common supply channels 27 and second common recovery channels 28 are formed alternately in the short direction of the ejection tip 1. As shown in Figure 3, the first common supply channel 17 and the second common supply channel 27 together form a common supply channel. Similarly, the first common recovery channel 18 and the second common recovery channel 28 together form a common recovery channel. 【0024】 The discharge port forming substrate 201, vibration substrate 202, liquid supply substrate 203, flow path forming substrate 204, and damper substrate 220 can each be formed from a silicon substrate or the like. While this embodiment describes an example where each is a separate substrate, it is not limited to separate substrates. The damper member 300 is formed from an elastic material, such as a resin material like polyimide or polyamide. Dry etching is one method for forming an opening in the damper member 300. If the damper member is made of a photosensitive resin, it may also be patterned by exposure. 【0025】 Thus, the discharge tip 1 has a first substrate (discharge port forming substrate 201) that forms the discharge port 13, a second substrate (vibration substrate 202) that forms the pressure chamber 5, and a third substrate (liquid supply substrate 203) that forms the individual supply channel 7 and the individual recovery channel 8. It also has a damper member 300 and a fourth substrate (damper substrate 220) that forms the first common supply channel 17 and the first common recovery channel 18, and a fifth substrate (channel forming substrate 204) that forms the second common supply channel 27 and the second common recovery channel 28. The substrates are stacked in the order of the first substrate (discharge port forming substrate 201), the second substrate (vibration substrate 202), the third substrate (liquid supply substrate 203), the fourth substrate (damper substrate 220), and the fifth substrate (channel forming substrate 204). 【0026】 2. Joining of components 2.1 Overview of the Connection Flow In the following, as an example of joining components to which the present invention is applied, the joining of a discharge tip 1 and a cover member 2 will be described. Figure 5 shows the components to be joined in this embodiment, Figure 6(a) shows the discharge tip 1, and Figure 5(b) shows the cover member 2, with the area indicated by the dotted line in each being the joining area 3. The discharge tip 1 has a number of discharge ports 13 arranged in the center of its surface, and liquid is discharged from these discharge ports 13 in a liquid discharge head. The cover member 2 is a rectangular plate-shaped member with an opening 20 with a hole in the center, and when joined, the opening 20 avoids the discharge ports 13, so that the area around the discharge ports can be protected while they are exposed. In the following, the surface to be joined via adhesive 4 between the discharge tip 1 and the cover member 2 will be defined as the XY plane, and the direction in which force is applied during joining, perpendicular to the XY plane, will be defined as the Z direction. 【0027】 Next, we will describe the overview of the joining flow between the discharge tip 1 and the cover member 2. Figure 7 is a diagram showing the flow of the joining process between the discharge tip 1 and the cover member 2. As shown in Figure 7, joining includes an adhesive application process S1, an image processing process S2, a position adjustment process S3, and a joining process S4. First, adhesive 4 is applied to the joining area 3 on the discharge tip 1 (adhesive application process S1). It is desirable to apply an amount of adhesive 4 such that it does not overflow into the opening 20 of the cover member 2 after joining. Next, image processing is performed (image processing process S2). The image processing process will be described later. After that, based on the results of the image processing process, the position of the cover member 2 relative to the discharge tip 1 is adjusted in the XY plane (position adjustment process S3). Subsequently, the discharge tip 1 and the cover member 2 are fixed by heat curing the adhesive 4 while the cover member 2 is aligned with the discharge tip 1 (joining process S4). 【0028】 In the adhesive application step S1, the adhesive 4 may be applied to the cover member 2 instead of the discharge tip 1. Furthermore, the adhesive 4 may be of a curing type other than thermosetting, such as UV curing or moisture curing. 【0029】 2.2 Image Processing Next, the image processing step S2 of the ejection tip 1 and the cover member 2 will be described. Figure 6 shows the detection unit detected by an imaging device such as a camera during image processing, with Figure 6(c) being an enlarged view of the ejection tip 1 and Figure 6(d) being an enlarged view of the cover member 2. 【0030】 First, the discharge tip 1 is provided with alignment marks 12 in a position that does not overlap with the joining area 3 in a plan view. In Figure 6(c), the alignment marks 12 are circular, but they may be any asymmetrical shape, taking into account direction detection. For example, by combining a circle and a rectangle, alignment marks with different patterns can be provided at each of the four corners of the discharge tip 12. In this case, it is possible to prevent the discharge tip from being joined to the cover member 2 in a 180° inverted state. It is also possible to prevent the mixing of discharge tips for liquid discharge heads of different models. Alternatively, the discharge nozzle or the like may be used as a positioning marker instead of the alignment marks. Note that the alignment marks 12 are omitted in Figure 6(a). 【0031】 In the cover member 2, the edge 22 of the opening 20 is used as a detection unit during image processing. In Figure 7, the corner of the edge 22 of the cover member 2 is rounded, but it may also be rectangular or C-shaped. Also, although only the upper left part of each component is shown in Figures 6(c) and (d), since the ejection tip 1 and cover member 2 of this embodiment have symmetrical shapes in the left, right, top, and bottom, similar detection units for image processing exist at the other three corners as well. 【0032】 Figure 8 shows the arrangement of the camera 30 in the image processing step S2. Figure 3(a) shows the cross-section of the ejection chip 1 and the arrangement of the camera 30, and Figure 3(b) shows the cross-section of the cover member 2 and the arrangement of the camera 30. In this embodiment, a camera is used to photograph the detection unit, but the present invention can be suitably applied to imaging devices other than cameras. First, imaging is performed on the ejection chip 1 with the camera 30 positioned in the same direction as the bonding surface 111 of the chip member. In addition, imaging is performed on the cover member 2 with the camera 30 positioned in the opposite direction to the bonding surface 211 of the cover member 2. After that, the images captured by the ejection chip 1 and the cover member 2 are processed to detect the positions of the alignment marks 12 and edges 22, and the coordinates of the ejection chip 1 and the cover member 2 are calculated. In this embodiment, when imaging is performed with the camera 30, the ejection chip 1 and the cover member 2 are mounted on separate stages of the bonding device, and the stage position is adjusted based on the coordinate information obtained from the image during subsequent pickup and mounting of the cover member 2 to the ejection chip. 【0033】 Next, we will describe the relative positions of the alignment mark 12 of the discharge tip 1 and the edge 22 of the cover member 2 on the XY plane after joining. Figure 9 is an enlarged view showing the positional relationship after joining the discharge tip 1 and the cover member 2. In the manufacturing of the liquid discharge head of this embodiment, the alignment mark 12 and the edge 22 are positioned so that the alignment accuracy can be measured and guaranteed after joining. Therefore, as shown in Figure 9, it is desirable that the edges 22 located in the X and Y directions are close to the alignment mark 12. It is desirable that the distance between the edge 22 and the alignment mark 12 on the XY plane be within 1 mm in both the X and Y directions. Also, it is desirable that the shortest distance between the edge 22 and the alignment mark 12 on the XY plane be 1 mm or less. The closer the distance between the edge 22 and the alignment mark 12, the easier it is to measure the relative position. 【0034】 The detection of the edge 22 of the cover member 2 in the image processing step S2 will now be explained. As described above, since the cover member 2 is imaged from the side opposite to the joining surface 211 (the second surface), the detection of the edge 22 is greatly affected by the surrounding shape. This will be explained using Figure 10, which shows the cross-section of the cover member 2 and the camera arrangement. The cover member 2 shown in Figure 10(a) has the cross-sectional shape of this embodiment, and the edge 22, which is the end side opposite to the joining surface 211 side, protrudes. On the other hand, the cover member 2 shown in Figure 10(b) has the cross-sectional shape of the comparative example, and the end side of the surface on the joining surface 211 side protrudes. Furthermore, images of the images captured corresponding to Figures 10(a) and 10(b) are shown in Figures 11(a) and 11(b). 【0035】 First, when the cover member 2 has the shape shown in Figure 10(a), as shown in Figure 11(a), the boundary line of the aperture 20 in the captured image is only a single line, edge 22, thus reducing the risk of false detection in edge detection by image processing. In this way, for the cover member 2, the edge that protrudes more in the XY plane (edge ​​22) should be detected. On the other hand, when the cover member 2 has the shape shown in Figure 10(b), the boundary line of the aperture 20 is detected as two lines in the captured image shown in Figure 11(b). This is because the inner side surface 23 of the cover member 2 faces the camera 30, so in addition to the edge 22 that should be detected, an edge 25 that should not be detected is also captured in the image. Thus, with the shape shown in Figure 10(b), the boundary line of the aperture 20 is two lines in the captured image, so there is a risk of false detection of the edge 25 that should not be detected by image processing. In particular, in the liquid discharge unit of this embodiment, the discharge tip 1 is made of silicon and the cover member 2 is made of titanium, both of which are metals, and their colors in the captured image are very similar, which can make discrimination more difficult. Therefore, the effects of the present invention can be significantly enjoyed. 【0036】 As described above, in the cover member 2 of this embodiment, the end side opposite to the joining surface 211 in the thickness direction protrudes, so that the edge 22 to be detected can be reliably detected. In other words, when the parts to be joined are imaged from above with a camera and processed, the edge 22 will not be captured twice, so the position of the parts can be detected stably and false detections can be prevented. 【0037】 Furthermore, in this embodiment, the cover member 2 located on the outermost surface of the liquid discharge head does not have alignment marks, and the edge 22 is used to align the position during joining. This prevents a decrease in wiping performance, etc., due to the uneven shape of the cover member 2 when cleaning the head surface. 【0038】 2.3 Processing method for cover member 2 In this embodiment, the side surface 23 inside the opening of the cover member 2 is angled, allowing the edge 22 located on the camera 30 side to protrude more than the edge 25 in the XY plane. The manufacturing method of the cover member 2 is described below. The cover member 2 serves to protect the discharge port 13 and is relatively thin. The cover member 2 in this embodiment is made of metal. Any manufacturing method can be used, such as punching, etching, or machining from a sheet material. 【0039】 Figure 12 shows a part of the molding process for the cover member 2 using a punching method. As shown in Figure 12, the blade 400 descends in the Z direction to break the raw material roll 41. As a result, the cover member 2 has a shape in which the lower side of the raw material roll 41 protrudes. By making the surface on which the blade enters the joint surface 211, the cover member 2 of this embodiment can be obtained. The angle of the cut surface with respect to the joint surface 211 can be changed depending on the shape of the cutting blade and the cutting conditions. 【0040】 Figure 13 shows a part of the molding process of the cover member 2 by etching. In the case of etching, as shown in Figure 13, the removal area 51 during cutting has a shape in which the removal width decreases in the thickness direction starting from the processed surface 50. As a result, the surface opposite to the processed surface 50 has a protruding shape. Therefore, by making the surface on the same side as the processed surface 50 the joining surface 211, the cover member 2 of this embodiment can be obtained. In addition, the angle of the side surface 23 with respect to the joining surface 211 can be changed depending on the etching conditions. When molding the cover member 2 by machining, the shape of the inner side surface 23 of the cover member 2 can be arbitrarily controlled. Therefore, by machining so that the end opposite to the joining surface 211 protrudes when machining, the cover member 2 of this embodiment can be obtained. The method of processing the cover member 2 is not limited to the above method, and it can be formed by any method. 【0041】 2.4 Angle between the joint surface and the inner side surface The relative angle θ between the joint surface 211 and the inner side surface 23 of the cover member 2 in this embodiment will be described. In this embodiment, the objective is to make the boundary line of the detected opening 20 a single line in the image captured by the camera 30, so the relative angle θ between the joint surface 211 and the inner side surface 23 of the cover member 2 is greater than 90. Preferably, θ is 95° or more. Furthermore, it is desirable that the relative angle θ be 95° or more. On the other hand, if the relative angle θ is too large, that is, if the tip of the protruding part becomes too sharp, it will not be possible to secure a sufficient area of ​​the joint surface 211, and the original objective of protecting the discharge port will not be achieved. For this reason, it is desirable that the angle θ at which the joint surface 211 and the inner side surface 23 of the cover member 2 intersect is greater than 90° and 150° or less, and more preferably greater than 95° and 150° or less. 【0042】 2.5 Condition of the liquid dispensing head after adhesive curing The configuration of this embodiment also has advantages in terms of preventing adhesive 4 from overflowing after curing. Figure 14 shows a cross-sectional view of the dispensing tip 1 and cover member 2 after the adhesive 4 has cured. As shown in Figure 14, the cover member 2 of this embodiment has a shape in which the inner side surface 23 of the opening 20 is tilted inward (towards the dispensing port). Therefore, even if the adhesive 4 overflows from the bonding area 3 in the XY plane, the overflowing adhesive 4 will remain in the area between the inner side surface 23 and the dispensing tip 1, and it is possible to suppress the adhesive 4 from overflowing inward (towards the dispensing port) beyond the edge 22 of the cover member 2. If the adhesive 4 overflows inward beyond the edge 22, it may adhere to the dispensing port 13 and affect the dispensing performance, so this embodiment is also advantageous from this viewpoint. 【0043】 As described above, according to the present invention, by making the edge shape of the opening 20 of the cover member 2 an inverse tapered shape with the liquid discharge direction being upward, it is possible to suppress false detection of edges during image processing and to achieve high-precision alignment between members. 【0044】 3. Other Embodiments The first surface of the cover member may be directly bonded to the discharge tip via an intermediate member, in addition to being bonded with the adhesive. 【0045】 Alternatively, the discharge tip and the cover member may be joined together on the same surface of a single support member. 【0046】 The disclosures described in the above embodiments include the following liquid dispensing head configuration and manufacturing method. 【0047】 [Configuration 1] A dispensing tip having a dispensing port for dispensing liquid, A liquid dispensing head having a cover member having an opening for exposing the dispensing tip and a first surface joined to the dispensing tip via an adhesive, and a second surface opposite to the first surface, A liquid dispensing head, viewed from a direction perpendicular to the second surface, wherein in at least a portion of the opening, the edge on the second surface side is located inside the opening more than the edge on the first surface side. 【0048】 [Configuration 2] The liquid discharge head according to configuration 1, wherein the side surface of the opening in the cover member has an inverse tapered shape. 【0049】 [Configuration 3] The liquid discharge head according to configuration 2, wherein the angle at which the first surface and the side surface of the opening intersect in the cover member is greater than 95° and less than or equal to 150°. 【0050】 [Structure 4] The cover member is located on the outermost surface of the liquid dispensing head in the direction of liquid discharge from the discharge port, as described in any one of configurations 1 to 3. 【0051】 [Composition 5] The liquid dispensing head according to any one of configurations 1 to 4, wherein both the dispensing tip and the cover member are made of metal. 【0052】 [Composition 6] A liquid dispensing head according to any one of configurations 1 to 5, wherein, when viewed from a direction perpendicular to the second surface, the cover member covers at least a portion of the dispensing tip. 【0053】 [Composition 7] The liquid dispensing head according to any one of configurations 1 to 6, wherein the first surface of the cover member is directly bonded to the dispensing tip via the adhesive. 【0054】 [Structure 8] The liquid dispensing head according to any one of configurations 1 to 6, wherein the first surface of the cover member is directly bonded to the dispensing tip via the adhesive and the intermediate member. 【0055】 [Method 9] A dispensing tip having a dispensing port for dispensing liquid, A method for manufacturing a liquid dispensing head, comprising a cover member having an opening for exposing the dispensing tip and a first surface joined to the dispensing tip via an adhesive, and a second surface opposite to the first surface, The liquid dispensing head has a cover member such that, when viewed from a direction perpendicular to the second surface, at least a portion of the opening has an edge on the second surface side that is located inside the opening more than the edge on the first surface side. An adhesive application step of applying adhesive to the aforementioned discharge tip, Image processing steps include capturing images of the ejection tip and the edge of the cover member on the second surface side of at least a portion of the opening, using a camera positioned perpendicular to the second surface. Based on the results of the image processing step, a position adjustment step is performed to adjust the position of the cover member relative to the ejection tip, A bonding step in which the adhesive is cured to bond the discharge tip and the cover member, A method for manufacturing a liquid dispensing head that includes [a specific component]. 【0056】 [Method 10] The method for manufacturing a liquid dispensing head according to method 9, wherein the side surface of the opening in the cover member has an inverse tapered shape. 【0057】 [Method 11] The method for manufacturing a liquid discharge head according to method 10, wherein the angle at which the first surface and the side surface of the opening intersect in the cover member is greater than 95° and less than or equal to 150°. 【0058】 [Method 12] A method for manufacturing a liquid dispensing head according to any one of methods 9 to 11, wherein the image processing step involves detecting alignment marks on the dispensing tip. 【0059】 [Method 13] In the aforementioned image processing step, A method for manufacturing a liquid dispensing head according to method 12, wherein the alignment mark is detected such that, when viewed from a direction perpendicular to the second surface, the shortest distance to the edge on the second surface side is 1 mm or less. 【0060】 [Method 14] A method for manufacturing a liquid discharge head according to method 12, wherein in the image processing step, the discharge port is detected as the alignment mark. [Examples] 【0061】 The present invention will be described in detail below with reference to specific examples. However, the present invention is not limited to the following examples. 【0062】 (Examples) This embodiment is an example of a method for manufacturing the liquid dispensing head of the embodiment described above. A dispensing tip 1 shown in Figures 2 to 5 was prepared. It has a thickness (size in the Z direction) of 1 mm, a width (size in the Y direction) of 13 mm, and a length (size in the X direction) of 29 mm. A cover member 2 made of titanium with a thickness of 100 μm was prepared, with an outer diameter of 22 mm (size in the Y direction) and 39 mm (size in the X direction), and an opening 20 with a width of 11 mm and a length of 27 mm. The side surface 23 of the opening 20 of the cover member 2 has an edge 22 on the opposite side and protrudes 80 μm in the XY plane from the edge 22 on the joining surface 211 side. θ is approximately 129°. These dispensing tip 1 and cover member 2 were aligned using image processing and joined with a thermosetting adhesive according to the flow shown in Figure 6. After that, the alignment accuracy was measured and found that the deviation of the center position of the dispensing tip 1 and cover member 2 was within 20 μm in both the X and Y directions. 【0063】 (Comparative example) The dimensions of the ejection tip 1 and cover member 2 in the comparative example are the same as in Example 1. However, the side surface 23 of the opening 20 of the cover member 2 has a shape in which the edge 25 on the joining surface 211 side protrudes 80 μm in the XY plane relative to the opposite edge 22. θ is approximately 51°. For these ejection tip 1 and cover member 2, alignment was performed by image processing and bonding with a thermosetting adhesive according to the flow shown in Figure 6. Subsequently, when the alignment accuracy was measured, the amount of displacement of the centers of the ejection tip 1 and cover member 2 was 100 μm in both the XY direction, which was larger than in the example. [Explanation of Symbols] 【0064】 1 Dispensing tip 2 Cover member 3 Joint area 4. Adhesive 12 Alignment Marks 20 aperture 22 Edge 23 Medial side 25 Edge 10 Liquid Dispensing Unit 100 liquid dispensing heads 1000 liquid dispensing device

Claims

[Claim 1] A dispensing tip having a dispensing port for dispensing liquid, A liquid dispensing head having a cover member having an opening for exposing the dispensing tip and a first surface joined to the dispensing tip via an adhesive, and a second surface opposite to the first surface, A liquid dispensing head in which, when viewed from a direction perpendicular to the second surface, at least a portion of the opening, the edge on the second surface side is located inside the opening more than the edge on the first surface side. [Claim 2] The liquid dispensing head according to claim 1, wherein the side surface of the opening in the cover member has an inverse tapered shape. [Claim 3] The liquid dispensing head according to claim 2, wherein the angle at which the first surface and the side surface of the opening intersect in the cover member is greater than 95° and less than or equal to 150°. [Claim 4] The liquid dispensing head according to claim 1, wherein the cover member is located on the outermost surface of the liquid dispensing head in the direction of liquid discharge from the discharge port. [Claim 5] The liquid dispensing head according to claim 1, wherein both the dispensing tip and the cover member are made of metal. [Claim 6] The liquid dispensing head according to claim 1, wherein, when viewed from a direction perpendicular to the second surface, the cover member covers at least a portion of the dispensing tip. [Claim 7] The liquid dispensing head according to claim 1, wherein the first surface of the cover member is directly bonded to the dispensing tip via the adhesive. [Claim 8] The liquid dispensing head according to claim 1, wherein the first surface of the cover member is directly bonded to the dispensing tip via the adhesive and the intermediate member. [Claim 9] A dispensing tip having a dispensing port for dispensing liquid, A method for manufacturing a liquid dispensing head, comprising a cover member having an opening for exposing the dispensing tip and a first surface joined to the dispensing tip via an adhesive, and a second surface opposite to the first surface, The liquid dispensing head has a cover member such that, when viewed from a direction perpendicular to the second surface, at least a portion of the opening has an edge on the second surface side that is located inside the opening more than the edge on the first surface side. An adhesive application step of applying adhesive to the aforementioned discharge tip, Image processing step of capturing images of the ejection tip and the edge of the cover member on the second surface side of at least a portion of the opening, using a camera positioned perpendicular to the second surface. Based on the results of the image processing step, a position adjustment step is performed to adjust the position of the cover member relative to the ejection tip, A bonding step in which the adhesive is cured to bond the discharge tip and the cover member, A method for manufacturing a liquid dispensing head that includes [a specific component]. [Claim 10] The method for manufacturing a liquid discharge head according to claim 9, wherein the side surface of the opening in the cover member has an inverse tapered shape. [Claim 11] The method for manufacturing a liquid discharge head according to claim 10, wherein the angle at which the first surface and the side surface of the opening intersect in the cover member is greater than 95° and less than or equal to 150°. [Claim 12] A method for manufacturing a liquid dispensing head according to claim 9, wherein the image processing step detects the alignment marks of the dispensing tip. [Claim 13] In the aforementioned image processing step, A method for manufacturing a liquid discharge head according to claim 12, wherein, when viewed from a direction perpendicular to the second surface, the alignment mark is detected such that the shortest distance to the edge on the second surface side is 1 mm or less. [Claim 14] A method for manufacturing a liquid discharge head according to claim 12, wherein in the image processing step, the discharge port is detected as the alignment mark.

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