Device

Abstract

Apply an input device or input / output device that can improve detection accuracy. To provide an input device or input / output device that can increase the degree of visibility. To implement a device or input / output device. [Solution] Multiple conductive layers arranged in a matrix have straight portions in their contours. The two adjacent conductive elements are arranged parallel to the direction along the contour of the display area of ​​the display unit. The linear portions of the layers are arranged so that they face each other. Alternatively, they can be arranged in a matrix pattern. Among the multiple conductive layers, multiple conductive layers are arranged in a line diagonally with respect to the contour of the display area. The layers are electrically connected. Alternatively, a zigzag pattern is used along the contour of the display area. Multiple conductive layers arranged on the surface are electrically connected.

Description

[Technical Field]

[0001] One aspect of the present invention relates to an input device. Another aspect of the present invention relates to a display device. One aspect of the present invention relates to an input / output device. In particular, one aspect of the present invention relates to a touch panel.

[0002] Furthermore, one aspect of the present invention is not limited to the above-mentioned technical field. One aspect of the technical field is semiconductor devices, display devices, light-emitting devices, energy storage devices, and memory devices. Electronic equipment, lighting equipment, input devices, input / output devices, methods for driving them, or the manufacture thereof. Methods can be given as one example. [Background technology]

[0003] In recent years, display devices equipped with input devices such as touch sensors as a means of position input have been put into practical use. Display devices equipped with touch sensors include touch panels or touchscreens. It is called (and below, this will also simply be referred to as "touch panel"). For example, touch panel Mobile information devices equipped with this feature include smartphones and tablet devices.

[0004] In addition, typical display devices include liquid crystal display devices equipped with liquid crystal elements, and organic EL (Earth-emitting diodes). Light-emitting diodes (LEDs) and light-emitting elements (luminescence) A light-emitting device equipped with light-emitting elements such as an Emitting Diode, or an electrophoretic system. Examples include electronic paper displays that use various methods to show information.

[0005] For example, the basic structure of an organic EL element is a layer containing a light-emitting organic compound between a pair of electrodes. It is a device that holds a [component] in place. By applying a voltage to this element, light is emitted from a light-emitting organic compound. Light can be emitted. A display device to which such an organic EL element is applied is a liquid crystal display device. Because it does not require backlights or other light sources that were necessary for placement, it is thin, lightweight, and offers high contrast. Furthermore, it enables the realization of low-power display devices. For example, an example of a display device using organic EL elements. However, this is described in Patent Document 1.

[0006] Furthermore, the touch panel may have, for example, a pressure-sensitive sensor array superimposed on the display panel, A capacitive sensor array is provided, and a fingertip or input pen is placed on the substrate of the sensor array. When you touch it with a stylus, it detects the location of the touch.

[0007] Patent Document 2 describes a method for providing a touch sensor on the display screen of an electroluminescent display device. The configuration of the touch panel has been disclosed. [Prior art documents] [Patent Documents]

[0008] [Patent Document 1] Japanese Patent Publication No. 2002-324673 [Patent Document 2] Japanese Patent Publication No. 2000-172444 [Overview of the project] [Problems that the invention aims to solve]

[0009] To acquire more precise location information of an object touching a touch sensor or touch panel. Therefore, there is a need to increase the sensitivity of touch sensors.

[0010] One aspect of the present invention provides an input device or input / output device capable of improving detection accuracy. One of the challenges is to develop an input device that can increase detection sensitivity, or an input device that can increase detection sensitivity. One object is to provide an output device. Alternatively, one object is to realize a display device with improved visibility, or an input / output device. One object is to realize an input / output device.

[0011] Note that the description of these objects does not prevent the existence of other objects. Note that one aspect of the present invention is not required to solve all of these objects. Note that other objects can be extracted from the descriptions in the specification, drawings, claims, etc.

Means for Solving the Problems

[0012] One aspect of the present invention is a touch panel having first to fourth conductive layers and a display unit. The display unit has a portion whose contour is parallel to the first direction and a portion parallel to a second direction intersecting the first direction. The display unit also has a plurality of display elements. The plurality of display elements are periodically arranged in the first direction and the second direction. The first to fourth conductive layers and the display unit have overlapping portions with each other. Here, the first conductive layer and the second conductive layer are arranged side by side in the first direction, and the third conductive layer and the fourth conductive layer are arranged side by side in the first direction. Also the first conductive layer and the third conductive layer are arranged side by side in the second direction, and the second conductive layer and the fourth conductive layer are arranged side by side in the second direction. Also, the first conductive layer and the fourth conductive layer are electrically connected by a first connection portion, and the second conductive layer and the third conductive layer are electrically connected by a second connection portion. Also, the first connection portion and the second connection portion have a portion intersecting each other.

[0013] Also, in the above, the first to fourth conductive layers have, in a part of the contour in plan view, a first part which is a straight line part parallel to the first direction and a second part which is a straight line part parallel to the second direction. It is preferable that the first conductive layer has a second portion and the second conductive layer The second part of the layer is provided opposite to the first part of the first conductive layer and the third conductive layer The first part is provided opposite to the first part of the second conductive layer and the first part of the fourth conductive layer. It is preferable that this part be provided opposite to the other part.

[0014] Furthermore, in the above, the fifth conductive layer is located on the opposite side of the first conductive layer, with the fourth conductive layer in between. It is preferable to have a conductive layer. Alternatively, the third conductive layer may be on the opposite side from the first conductive layer. It is preferable to have a fifth conductive layer located at the fourth conductive layer and the fifth conductive layer. Preferably, the electrolayer is electrically connected by a third connection point.

[0015] Furthermore, in the above, the first to fourth conductive layers are in the first direction and the second direction, respectively. It is preferable that each has a parallel grid-like shape. In this case, the openings of the grid and the surface It is preferable that the indicator elements are arranged in a way that overlaps each other.

[0016] Furthermore, the above comprises a first substrate and a second substrate, and the first to fourth conductive The layers and display elements are preferably located between the first substrate and the second substrate.

[0017] Furthermore, in the above, either the first connection part or the second connection part and the first to fourth Preferably, the conductive layer is formed on the same plane as the first conductive layer, and the fourth conductive layer. The conductive layer and the first connection portion are formed on the first surface, and the second conductive layer and the third conductive The layer and the second connecting portion are preferably formed on the second surface.

[0018] Furthermore, in the above, the distance between the first conductive layer and the second conductive layer, and the distance between the first conductive layer and the third conductive layer The distance from the conductive layer is preferably 1 μm or more and 10 mm or less.

[0019] Another aspect of the present invention is a touch panel having the above-mentioned touch panel and an FPC. It is a module. Another aspect of the present invention is the above-mentioned touch panel or touch panel module. Joules and a small number of antennas, buttons, batteries, speakers, microphones, or lenses It is an electronic device that possesses at least one component. [Effects of the Invention]

[0020] According to one aspect of the present invention, an input device or input / output device capable of improving detection accuracy. We can provide an input device or input / output device that can increase detection sensitivity. It can be provided. Or, an input / output device with improved visibility can be realized. Or, a new input device Alternatively, they can provide input / output devices.

[0021] Furthermore, the description of these effects does not preclude the existence of other effects. One embodiment does not necessarily have to possess all of these effects. Furthermore, other effects may be considered. This information can be extracted from descriptions such as specifications, drawings, and claims. [Brief explanation of the drawing]

[0022] [Figure 1] An example of a touch panel configuration according to an embodiment. [Figure 2] An example of the configuration of an input device according to an embodiment. [Figure 3] An example of the configuration of an input device according to an embodiment. [Figure 4] An example of the configuration of an input device according to an embodiment. [Figure 5] An example of the configuration of an input device according to an embodiment. [Figure 6] An example of the configuration of an input device according to an embodiment. [Figure 7] An example of the configuration of an input device according to an embodiment. [Figure 8] An example of the configuration of an input device according to an embodiment. [Figure 9] An example of the configuration of an input device according to an embodiment. [Figure 10] An example of a touch panel configuration according to an embodiment. [Figure 11] An example of a touch panel configuration according to an embodiment. [Figure 12] An example of a touch panel configuration according to an embodiment. [Figure 13] An example of a touch panel configuration according to an embodiment. [Figure 14] An example of a touch panel configuration according to an embodiment. [Figure 15] An example of a touch panel configuration according to an embodiment. [Figure 16] An example of a touch panel configuration according to an embodiment. [Figure 17] An example of a touch panel configuration according to an embodiment. [Figure 18] An example of a touch panel configuration according to an embodiment. [Figure 19] An example of a touch panel configuration according to an embodiment. [Figure 20] An example of a touch panel configuration according to an embodiment. [Figure 21] An example of a touch panel configuration according to an embodiment. [Figure 22] An example of a touch panel configuration according to an embodiment. [Figure 23] An example of a touch panel configuration according to an embodiment. [Figure 24] An example of a touch panel configuration according to an embodiment. [Figure 25] An example of a touch panel configuration according to an embodiment. [Figure 26] An example of a touch panel configuration according to an embodiment. [Figure 27]An example of a touch panel configuration according to an embodiment. [Figure 28] An example of a touch panel configuration according to an embodiment. [Figure 29] An example of a touch panel configuration according to an embodiment. [Figure 30] A diagram illustrating the configuration of a film deposition apparatus according to an embodiment. [Figure 31] A block diagram and timing chart diagram of a touch sensor according to an embodiment. [Figure 32] Circuit diagram of a touch sensor according to an embodiment. [Figure 33] A diagram illustrating a pixel equipped with a touch sensor according to an embodiment. [Figure 34] A diagram illustrating the operation of a touch sensor and pixels according to an embodiment. [Figure 35] A diagram showing an example of an electronic device and lighting device according to an embodiment. [Figure 36] A diagram showing an example of an electronic device according to an embodiment. [Figure 37] A diagram showing an example of an electronic device according to an embodiment. [Figure 38] A diagram showing an example of an electronic device according to an embodiment. [Modes for carrying out the invention]

[0023] Embodiments will be described in detail with reference to the drawings. However, the present invention is not limited to the following description. Without departing from the spirit and scope of the present invention, its form and details may be modified in various ways. Those skilled in the art will readily understand what is possible. Therefore, the present invention is as shown in the following embodiments. It should not be interpreted as being limited to the contents described herein.

[0024] In the configuration of the invention described below, the same part or part having a similar function is The same reference numerals are used consistently across different drawings, and explanations of their repetition are omitted. When referring to the function of [this], the hatch pattern is the same, and sometimes no specific symbol is assigned.

[0025] In each figure described herein, the size, layer thickness, or area of ​​each component is as follows: It may be exaggerated for clarity. Therefore, it is not necessarily limited to that scale. stomach.

[0026] In this specification, ordinal numbers such as "the first," "the second," etc., are used to avoid confusion of constituent elements. This is added for the purpose of providing a numerical limit, and is not intended to limit the number of items.

[0027] A transistor is a type of semiconductor device that amplifies current and voltage, and controls conduction or non-conductivity. This enables controlled switching operations. In this specification, the transistor is IGFE. T(Insulated Gate Field Effect Transistor This includes ) and thin-film transistors (TFTs).

[0028] (Embodiment 1) This embodiment provides an example of the configuration of an input device (touch sensor) according to one aspect of the present invention, and the present invention An input / output device (touch panel) comprising an input device and a display device (display panel) in one embodiment. Examples will be explained with reference to the drawings.

[0029] In this specification, etc., a touch panel has the function of displaying (outputting) images, etc. on its display surface. Touch detection is the detection of an object, such as a finger or stylus, touching or coming close to the display surface. It has the function of a sensor. Therefore, a touch panel is one form of an input / output device. .

[0030] Furthermore, in this specification, etc., a display panel is defined as a panel having a function to display images, etc., on its display surface. This is one embodiment of an output device. Furthermore, in this specification, the touch sensor is the object to be detected. It has a detection function and is one form of an input device. Therefore, the display panel ( A configuration having an output device and a touch sensor (input device) can also be called a touch panel. ru.

[0031] Furthermore, in this specification, etc., the substrate of the touch panel may be, for example, FPC (Flexible Printed Circuit). Print Circuit) or TCP (Tape Carrier Pack) A board with connectors such as age attached, or a board with COG (Chip On) A touch panel module is a device on which an IC (integrated circuit) is mounted using methods such as glass. It may be called a touchscreen, or simply a touch panel.

[0032] Similarly, a display panel model is a circuit board on which the above connectors, ICs, etc., are mounted. It is sometimes called a Joule, or simply a display panel. Also, the above connector is attached to the touch sensor board. A device with sensors, ICs, etc. mounted on it is called a touch sensor module, or simply a touch sensor. They may call.

[0033] A capacitive touch sensor applicable to one aspect of the present invention comprises a pair of conductive layers. A capacitance is formed between the pair of conductive layers. When the object to be detected comes into close proximity to the pair of conductive layers, Detection can be performed by utilizing the change in capacitance between a pair of conductive layers. By arranging capacitances formed by a pair of conductive layers in a matrix, positional information can be obtained. You can obtain it.

[0034] Capacitive capacitance methods include surface capacitance and projected capacitance. There are several types of capacitance systems, including self-capacity systems and mutual-capacity systems. When using a mutual-capacity system... This is preferable because it facilitates simultaneous multi-point detection.

[0035] A pair of conductive layers according to one aspect of the present invention has a straight portion in part of the contour in a plan view The two conductive layers are arranged opposite each other so that their respective linear portions are parallel. By using such a configuration, the capacitance formed between the two conductive layers can be increased. Also, When a potential difference is applied between two conductive layers in a region where two conductive layers are facing each other, Because electric field lines have a uniform density distribution, the detection sensitivity varies depending on the location. This can suppress interference. Therefore, it is possible to realize a touch sensor with improved detection accuracy.

[0036] A touch panel according to one aspect of the present invention includes a touch sensor and a display panel (display) that displays an image. The device includes a touch sensor, which is mounted on the display surface side of the display panel.

[0037] Furthermore, in one aspect of the present invention, the pair of conductive layers is a plurality of conductive layers arranged in a matrix. A conductive layer can be applied. The linear portion of the contour of the plurality of conductive layers is the display area of ​​the display unit. It is preferable to arrange them so as to be parallel to the direction along the contour of the area. Furthermore, the edges (contours) of the conductive layer do not diagonally cross the display elements provided on the pixels of the display unit. It can be arranged in this manner. As a result, the scattering of light from pixels at the edges of the conductive layer is suppressed, Visibility improves.

[0038] Here, when we focus on four conductive layers, two vertically and two horizontally, among the multiple conductive layers, the following applies: It is preferable that the configuration be such that the two adjacent conductive layers each have The linear portions are arranged so that they face each other. In addition, two conductive elements are located diagonally opposite each other. The layers are electrically connected by a connector, and the configuration is such that two such connectors intersect. This is preferable. In this way, when we focus on one conductive layer, the four adjacent conductive layers are A large capacity can be formed between the layers. Therefore, detection accuracy can be further improved.

[0039] Among the multiple conductive layers arranged in a matrix, one row is positioned diagonally to the contour of the display area. It is preferable that multiple conductive layers arranged therein are electrically connected. Alternatively, the display unit Multiple conductive layers arranged in a zigzag pattern along the contour are electrically connected. It is preferable.

[0040] Furthermore, the display elements of the display panel and the pair of conductive layers that constitute the touch sensor overlap. It is preferable to provide a configuration that prevents this from happening. In particular, the pair of conductive layers constituting the touch sensor are grid-like. It is preferable that the top surface has a shaped configuration, and that the openings of the grid and the display elements are arranged to overlap. This prevents a decrease in the brightness of the image displayed on the touch panel, improving visibility. This enables the creation of a touch panel. Furthermore, it reduces brightness loss, thus reducing power consumption. can.

[0041] More specifically, the configuration can be as follows:

[0042] [Configuration Example 1] The following diagrams illustrate an example configuration of an input device, an output device, and an input / output device according to one embodiment of the present invention. I will explain by referring to the page.

[0043] [Example of touch panel configuration] Figure 1(A) is a schematic perspective view of a touch panel 100 according to one embodiment of the present invention. (B) is a schematic perspective view of Figure 1(A) unfolded. For clarity, a representative diagram is shown here. Only the essential components are shown. Also, in Figure 1(B), some of the components (substrate 30, substrate 7) are shown. The first-class (1st class) is indicated only by its outline using a dashed line.

[0044] The touch panel 100 has an input device 10 and a display panel 70, and these are stacked together. It's being kicked.

[0045] For example, a capacitive touch sensor can be used as the input device 10. This section describes the application of projected capacitive touch sensors.

[0046] Furthermore, it is not limited to this, but it is also possible to detect the proximity or contact of an object to be detected, such as a finger or stylus. Various sensors can be applied to the input device 10.

[0047] The specific configuration of the input device 10 will be described later.

[0048] The display panel 70 has two substrates, 71 and 72, which are arranged opposite each other. The display unit 81, drive circuit 82, wiring 83, etc. are provided on top. Also on the circuit board 71, A wiring 83 and an electrically connected FPC73 are provided. Also, on the FPC73 This shows an example where IC74 is provided.

[0049] The display unit 81 is an area where an image is displayed and has multiple pixels. Figure 1(B) shows a table A schematic diagram showing an enlarged portion of the display unit 81 is shown. Each pixel is at least one display element 60 It has a transistor and a display element 60. Typical examples of sub-elements 60 include light-emitting elements such as organic EL elements and liquid crystal elements. It is possible.

[0050] The drive circuit 82 controls the pixels of the display unit 81, including the scan line drive circuit and the signal line drive circuit. A driving circuit can be applied. Here, a scan line driving circuit is applied as the driving circuit 82. Let me explain the concept of "combination".

[0051] The wiring 83 has the function of transmitting signals and power to the display unit 81 and the drive circuit 82. The power and frequency are input to wiring 83 from an external source via FPC73 or from IC74.

[0052] The display unit 81 has multiple scan lines (also called gate lines) electrically connected to the drive circuit 82. (Not shown) The scan line has an electrical gate of one transistor that the pixel has. This is the wiring that connects to the sensor. The drive circuit 82 selects multiple pixels that are electrically connected to a single scan line. The selector signal can be sequentially supplied to each scan line.

[0053] The display unit 81 preferably has two or more straight lines in its contour. Figure 1(A)(B ) shows the case where the outline of the display unit 81 is rectangular. Here, the ring of the display unit 81 In a wall, one of the two adjacent sides (the two straight lines that form a corner) is parallel to the other side. The direction is defined as the X direction, and the direction parallel to the other is defined as the Y direction. In Figures 1(A) and 1(B), the ring of the display unit 81. In the enclosure, the longer side is denoted as the X direction, and the shorter side is denoted as the Y direction. The direction is the direction in which the multiple pixels or multiple display elements 60 of the display unit 81 are arranged periodically. Direction, or the direction of extension of wiring (scan lines, signal lines, or capacitance lines) electrically connected to the pixels. This can also be rephrased as a direction parallel to it. Furthermore, the X and Y directions are the substrate 71 or the base The direction may also be parallel to the straight portion of the contour of plate 72.

[0054] If the outline of the display unit 81 is rectangular, the X and Y directions are orthogonal, but they are not necessarily perpendicular. They do not need to intersect, and the angle between them may be less than 90 degrees. For example, the X direction and the Y direction. The angle of the direction is 30 degrees or more and 90 degrees or less, preferably 45 degrees or more and 90 degrees or less, more preferably The angle should be between 60 degrees and 90 degrees, for example. Here, in this specification, two straight lines When indicating the angle formed, the acute angle will be used. That is, the angle formed by the X direction and the Y direction. When the angle is α [degrees] (where α is between 0 and 90), it is the same as when the interior angle is α [degrees] and 18 This includes both cases where the temperature range is 0-α [degrees].

[0055] Furthermore, if the outline of the display unit 81 is a triangle or a polygon with pentagons or more, the display unit 81 The X and Y directions can also be defined as any two adjacent sides of the contour parallel to each other. It is possible. Also, if the contour of the display unit 81 has a curve and does not have two adjacent straight sections, The X and Y directions refer to the arrangement direction of pixels or display elements, or the wiring that electrically connects to the pixels. The direction parallel to the stretching direction, the stretching direction of the straight portion of the contour of the substrate 71 or substrate 72, etc. It can be replaced with "direction".

[0056] In Figures 1(A) and 1(B), the COF (Chip On Film) method is used on the FPC73. This shows an example where the IC74 is implemented. The IC74 is used, for example, for scanning line driving. ICs that function as circuits or signal line driving circuits can be applied. When it includes a circuit that functions as a scan line drive circuit and a signal line drive circuit, or when the scan line drive circuit External circuits are provided to function as roads and signal line drive circuits, and the display panel 7 is connected via the FPC73. In cases where a signal driving 0 is input, for example, the configuration may be made without IC74. IC74 is directly mounted to substrate 71 using the COG (Chip On Glass) method or similar. You may do so.

[0057] [Input device configuration example 1] Figure 2(A) shows a schematic top view of the input device 10. Also shown in Figure 2(A) is the display unit 81. The outline is shown by a dashed line. Figure 2(A) also shows the X and Y directions.

[0058] The input device 10 has multiple electrodes 31, multiple electrodes 32, and multiple wirings 42 on the substrate 30. The substrate 30 is also provided with an FPC 50 that is electrically connected to each of the multiple wirings 42. Figure 2(A) also shows an example where IC51 is provided on FPC50. .

[0059] Electrodes 31 and 32 are arranged in a matrix in the X and Y directions. Electrodes 31 and 32 are arranged alternately in the X and Y directions.

[0060] Diagonal directions to the X and Y directions (i.e., directions that intersect both the X and Y directions) Multiple electrodes 31 arranged in the direction are electrically connected by a connection part 33, which will be described later. Furthermore, multiple electrodes 31 connected via multiple connection parts 33 form a row 11. Multiple columns 11 are arranged in parallel. They are also arranged diagonally with respect to the X and Y directions. The multiple electrodes 32 are each electrically connected by a connection part 34, which will be described later. Furthermore, multiple electrodes 32 connected via multiple connection parts 34 form a row 12, and multiple rows 12 These are arranged in parallel. Here, as shown in Figure 2(A), the row 11 containing the electrode 31 and the Column 12, which contains pole 32, intersects with each other. The part where column 11 and column 12 intersect is called the intersection. Let's set it to 90.

[0061] Each of the multiple rows 11 and multiple rows 12 is electrically connected to the FPC 50 via the wiring 42. To be continued. In the case of projected capacitive type, a drive signal is supplied to one of row 11 and row 12, and the other By detecting the current flowing in one direction, the position of the object to be detected that is in contact with or close to the input device 10 can be determined. Information can be obtained. Examples of applicable driving methods for the input device 10 will be described later.

[0062] Furthermore, the extension directions of column 11 and column 12 intersect with the X and Y directions, respectively. When the X and Y directions are perpendicular, the angle between the extension direction of column 11 and the X direction is 40 degrees or more. It is preferable that the angle is 0 degrees or less, and typically 45 degrees. Similarly, the extension direction and the X direction of row 12 The angle formed by these two elements is preferably between 40 and 50 degrees, and typically 45 degrees. Also, row 1 The angle between the extension direction of row 1 and the extension direction of row 12 is between 85 degrees and 90 degrees, typically 90 degrees. It is preferable that it be a certain degree.

[0063] Here, the number of electrodes 31 included in column 11 may not necessarily be the same in each column 11. Yes. Similarly, the number of electrodes 32 included in column 12 does not necessarily match in each column 12. There is a combination. In the configuration shown in Figure 2(A), there is a row 11 containing six electrodes 31 and a row containing four electrodes 31 This shows an example where row 11 containing no electrodes and row 11 containing two electrodes 31 are mixed. Also, Figure 2(A ) In this case, there is a row 12 containing six electrodes 32, a row 12 containing four electrodes 32, and a row containing two electrodes 32 Column 12 contains a mix of elements.

[0064] The time constants (RC) of columns 11 and 12 differ depending on the number of electrodes 31 and 32. Because it takes a value, there may be differences in the amplitude and width of the output signal. Therefore, the difference in this time constant It is preferable to drive the input device 10 to correct the error. For example, IC51 It is sufficient to have a function to perform corrections. Alternatively, it should be appropriate to correct for this difference in time constants. Connect the capacitance and resistance values ​​to rows 11, 12, or the wiring that electrically connects them. This configuration is also acceptable.

[0065] Figure 2(B) is a schematic diagram of an enlarged view of region P in Figure 2(A). Here, the intersection 90 Two adjacent electrodes 31 (electrode 31a, electrode 31b) and two electrodes 32 (electrode 32a This shows the region including electrode 32b). In the following, electrode 31a and electrode 31b are used together. When explaining the matters that pass through, these will be referred to as electrode 31 without distinction. Similarly, electrodes 32a and 32b will also be referred to as electrode 32 in the explanation.

[0066] Electrodes 31a and 31b are electrically connected by a connector 33. 2a and electrode 32b are electrically connected by connection part 34. Also connected by connection part 33 The connecting portion 34 has portions that overlap each other at the intersection 90. The connecting portion 33 and the connecting portion 34 An insulating layer is provided between them to prevent an electrical short circuit.

[0067] The contours of electrodes 31 and 32 in plan view have a rectangular pattern. Rows 11 and The outline of row 12 in plan view is the pattern of the rectangle (i.e., electrodes 31 and 32). The shapes are connected via connecting portion 33 or connecting portion 34 in directions that intersect the X and Y directions. It has a shape. At this time, as shown in Figure 2(B), one rectangular pattern is a square. Having this allows the pitch at which electrodes 31 are arranged and the pitch at which electrodes 32 are arranged to be at equal intervals. This is preferable. This allows the detection points in the detection area of ​​the input device 10 to be arranged in an equally spaced matrix. They can be arranged in a specific way, improving the accuracy of detecting the location information of the object being detected.

[0068] In Figure 2(B), in row 11, electrode 31a, connection part 33, and electrode 31b are respectively This shows the case where they are formed as a single unit. Similarly, in row 12, the electrode 32a, the connecting part 34, and Each electrode 32b is formed integrally. At this time, at least the intersection portion 90 is formed A portion of row 11 that includes the part that does so is called the connecting portion 33, and at least the portion that constitutes the intersection 90 A portion of row 12 containing the above can be called the connection section 34. In Figure 2(B), for ease of explanation... Therefore, a hypothetical boundary separating electrode 31 and connection part 33 is shown with a dashed line. Also, electrode 32 Similarly, for the connection part 34, a hypothetical boundary separating them is indicated by a dashed line.

[0069] Electrode 31 has a straight portion 21 in part of its contour. Electrode 32 also has a straight portion 21 in part of its contour. The part has a straight portion 22. Electrodes 31 and 32 have a straight portion 21 and a straight portion 22. They are arranged so as to face each other in parallel. With this configuration, electrode 31 and electrode 3 The distance between electrode 2 and electrode 2 becomes constant, and the length of the portion where these two electrodes face each other can be increased. Furthermore, when a potential difference is applied between the two electrodes at the point where the two electrodes are facing each other, Because electric field lines are uniformly distributed in density, differences in detection sensitivity depending on the location are suppressed. It can be controlled. Therefore, it is possible to realize a touch sensor with improved detection accuracy.

[0070] The linear portion 21 of electrode 31 and the linear portion 22 of electrode 32 are in the X direction or It is preferable that it be parallel to the Y direction. For example, the extension direction of the straight portion 21 and the X or Y direction The angle formed with the direction, and the angle formed between the extension direction of the straight portion 22 and the X or Y direction, are less than 0 degrees. The range can be 10 degrees or less above, preferably between 0 and 5 degrees, and typically 0 degrees.

[0071] Furthermore, let D be the distance between electrode 31 and electrode 32. The smaller the distance D, the closer the two electrodes are. Since the capacity can be increased, the detection sensitivity can be improved. The size of the interval D can be, for example, 0 Larger than 10 mm, preferably 1 μm to 5 mm, more preferably 3 μm or larger. The thickness should be 1 mm or less, more preferably 5 μm to 500 μm. Alternatively, the display The pixels or sub-pixels of section 81, or the pitch when the sub-pixels are arranged, or the arrangement of the display elements 60 It is preferable to use an integer multiple of the pitch when this is done.

[0072] As shown in Figure 3, a configuration in which a bridge electrode 35 is applied to the connection portion 33 is also possible. The edge electrode 35 electrically connects the island-shaped electrodes 31a and 31b. The bridge electrode 35 intersects with a part of the connection portion 34. In this way, electrode 31a, electrode 31b, electrode 32a, electrode 32b, and connecting portion 34 can be formed on the same plane, and the distance between electrodes Because it can be made smaller, detection accuracy can be improved. Note that here the connection part 33 is Although the ridge electrode 35 was applied, it may also be applied to the connection part 34. The relative positions of the extension 34 and the substrate 30 are not particularly limited, and either can be positioned on the substrate 30 side.

[0073] [Example of input device configuration 2] The following describes an example of an input device configuration that differs from the above example configuration 1 in its method of connecting electrodes. Note that explanations may be omitted in parts that overlap with the above.

[0074] Figure 4(A) shows a schematic top view of the input device 10 described below, and Figure 4(B) shows Figure 4(A) The following diagrams show enlarged schematics of region Q within the given area.

[0075] As shown in Figure 4(A), the input device 10 has columns 13 and 14. Column 13 is in the X direction. It has multiple electrodes 31 arranged in a zigzag pattern along the Y direction. Row 14 is zigzag along the Y direction It has multiple electrodes 32 arranged in a zigzag pattern. An intersection 9 is located where row 13 and row 14 intersect. A zero is formed.

[0076] Figure 4(B) shows three electrodes 31 (electrode 31a, electrode 31b, Electrode 31c), three electrodes 32 (electrode 32a, electrode 32b, electrode 32a, electrode 32b) that make up one row 14 32c) and its surrounding area are shown.

[0077] Electrode 31c is located on the opposite side from electrode 31a when viewed from electrode 32a. That is, electrode Electrode 32a is positioned between electrode 31a and electrode 31c. Electrode 31b is electrically connected via connector 33. Similarly, electrode 31b and electrode 31 c is electrically connected via the connection part 33.

[0078] Furthermore, electrode 32c is located on the opposite side from electrode 32a when viewed from electrode 31b. Electrode 31b is positioned between electrode 32a and electrode 32c. Electrode 32b is electrically connected via connector 34. Similarly, electrode 32b and electrode 3 2c is electrically connected via connector 34.

[0079] A connecting portion 33 located between electrode 31a and electrode 31b, and between electrode 32a and electrode 32b The connection portion 34 located there intersects with each other, forming an intersection portion 90. On the other hand, electrode 31b A connection part 33 located between electrode 31c and electrode 32b and electrode 32c Each of the sections 34 does not form an intersection 90.

[0080] This configuration makes it possible to make the number of electrodes 31 in each of the multiple rows 13 equal. Similarly, the number of electrodes 32 in each of the multiple rows 14 can be made equal. Therefore, as described above, It is necessary to correct for the difference in time constants, or to add a configuration to correct for the difference in time constants. Because it does not have a component, the drive method and configuration can be simplified.

[0081] In this case, electrodes 31a, 31b, 31c, and the connecting portion 33 are integrated into a single unit. This shows the case where electrodes 32a, 32b, 32c, and the connecting part 34 are integrated. As described above, the bridge electrode 35 is applied to the connection portion 33 or the connection portion 34. That's good too.

[0082] Here, the width of column 13 in the Y direction is 2 times the width of the column in which electrodes 31 and 32 are arranged alternately in the X direction. This corresponds to the width of the column. Similarly, the width of column 14 in the X direction is such that electrodes 31 and 32 alternate in the Y direction. The width will be the width of two columns of the arranged rows. For example, in Figure 4(A), electrodes 31 and 32 alternate in an X shape. There are 10 in the direction and 6 in the Y direction, forming 3 columns 13 and 5 columns 14. This shows the case where the size, spacing, or pitch of electrodes 31 and 32 is reduced. This increases the number of columns 13 and 14, allowing for more detection points, thus improving the positional information of the detected object. This improves the accuracy of information detection.

[0083] Here, as shown in Figure 5(A), in the four electrodes adjacent to the intersection 90, electrode 3 The distance D1 between electrode 1 and electrode 32 is greater than the distance D2 between electrode 31 and electrode 32 in other parts. It can be made smaller. Doing so increases the capacity of column 13 and column 14 that intersect at intersection 90. Furthermore, the capacity between adjacent columns 13 and 14 can be reduced, thus improving detection accuracy. It can be seen.

[0084] At this time, as shown in Figure 5(B), fill the gap where electrodes 31 and 32 are not provided. The dummy electrode 39 may be positioned to allow the electrode 31 and The optical properties (transmittance, reflectance) differ between the portion with electrodes 32 and the portion without them. This can suppress differences (such as the degree of light scattering). Therefore, electrodes 31 and 32 This prevents non-existent areas from being visible to the user. The dummy electrode 39 is an electrode It is preferable that 31 and electrode 32 are electrically insulated. Particularly in the case of dummy electrode 39. If the potential is not supplied and the device is in an electrically floating state, a dummy electrode 39 is provided. This is preferable because it suppresses the decrease in detection sensitivity caused by [the aforementioned factor].

[0085] [Example of sensor electrode configuration] The following describes examples of electrode configurations that can be used for electrodes 31, 32, etc. Here, we will explain the electrodes to which the connection method shown in the above input device configuration example 1 is applied. However, by changing the connection method, it can also be applied to the configuration example 2 of the input device described above. That is the case.

[0086] When the input device 10 is superimposed on the display surface of the display panel 70 to form a touch panel 100. In this case, it is preferable to use a light-transmitting conductive material for electrodes 31 and 32. Electrodes 31 and 32 are made of light-transmitting conductive material, and light from the display panel 70 is directed to electrode 3 When extracting via electrode 1 or electrode 32, the same conductive material must be present between electrode 31 and electrode 32. It is preferable to arrange a conductive film containing a conductive material as a dummy pattern (dummy electrode). As shown above, a portion of the gap between electrode 31 and electrode 32 is filled with a dummy pattern. This further reduces variations in light transmittance. As a result, the luminance of the light transmitted through the input device 10 is reduced. It can reduce the amount of noise.

[0087] Examples of light-transmitting conductive materials include indium oxide, indium tin oxide, and indium Conductive oxides such as zinc oxide, zinc oxide, and zinc oxide with added gallium are used. This can be done. Furthermore, a film containing graphene can also be used. Examples of films containing graphene include... For example, a film containing graphene oxide, which has been formed in a film-like structure, can be reduced to form a new film. For example, methods involving the application of heat can be cited.

[0088] Alternatively, a metal or alloy that is thin enough to be translucent can be used. For example, gold. Silver, platinum, aluminum, magnesium, nickel, tungsten, chromium, molybdenum Iron, cobalt, copper, palladium, tin, zinc, indium, tantalum, or titanium Metals such as the above, or alloys containing the above metals, can be used. Alternatively, the nitrogen of the above metal or alloy can be used. A nitride (for example, titanium nitride) may be used. Alternatively, impurities may be doped into it. Semiconductors such as silicon or germanium that have been imparted conductivity may also be used. A laminated film may be used, which consists of two or more conductive films containing the aforementioned material.

[0089] Furthermore, electrodes 31 and 32 are processed to be so thin that they are not visible to the user, and are conductive A film may also be used. For example, by processing such a conductive film into a grid (mesh) This allows for high conductivity and high visibility of the display device. In this case, the conductive film is 30 nm More than 100 μm or less, preferably 50 nm or more and 50 μm or less, more preferably 50 nm or less It is preferable to have a portion with a width of 20 μm or less. In particular, a pattern of 10 μm or less. A conductive film with width is preferable because it is extremely difficult for the user to see.

[0090] As an example, Figures 6(A) to (D) show a schematic diagram of a magnified portion of electrode 31 or electrode 32. A diagram is shown. Figure 6(A) shows an example using a lattice-shaped conductive film 61. In this case, the conductive film 61 is positioned so as not to overlap with the display elements 60 of the display panel 70. This is preferable because it does not block the light from the display panel 70. In that case, the grid The orientation is the same as the arrangement of the display elements 60, and the grid pitch is the same as the arrangement of the display elements 60. It is preferable to use an integer multiple of the value.

[0091] Figure 6(B) also shows a lattice-shaped conductive film 6 processed to form triangular openings. An example of 2 is shown. With this configuration, the resistance is lower compared to the case shown in Figure 7(A). Resistance can be lowered.

[0092] Furthermore, as shown in Figure 6(C), the conductive film 63 has a pattern shape that does not have periodicity and This configuration may be used when the display section of the display panel 70 is superimposed on it. This can suppress the occurrence of ne.

[0093] Furthermore, conductive nanowires may be used for electrodes 31 and 32. Figure 6(D) shows This shows an example using nanowire 64. When adjacent nanowire 64 come into contact with each other... By distributing at an appropriate density, a two-dimensional network is formed, and to the extreme... This allows it to function as a highly transparent conductive film. For example, if the average diameter is 1 nm or larger. 100nm or less, preferably 5nm to 50nm, more preferably 5nm to 25nm Nanowires of m or less can be used. Examples of nanowire 64 include Ag nanowires and Metal nanowires such as Cu nanowires and Al nanowires, or carbon nanotubes These can be used. For example, in the case of Ag nanowires, the light transmittance is 89% or more, The resistance value can be set to between 40Ω / □ and 100Ω / □.

[0094] Figure 7(A) shows the square electrode patterns of electrodes 31 and 32 shown in Figure 2(B). This shows an example of a case with a grid-like top surface shape. It also clearly illustrates the shape of each electrode. To make it easier to understand, Figure 7(B) shows electrode 32 with a dashed line, and Figure 7(C) shows electrode 31. The diagrams shown are indicated by dashed lines.

[0095] The interval D between electrodes 31 and 32 is equal to an integer multiple of the grid pitch of electrodes 31 and 32. It is preferable to set it so that it becomes difficult. Also, the grid direction of electrodes 31 and 32 is It is preferable to make them parallel to the X and Y directions.

[0096] Figure 7(A), etc., shows an example where the opening of the grid of electrodes 31 and 32 is square. As shown, this is not limited to rectangles, polygons, circles, ellipses, polygons with rounded corners, etc. It can also be made into various shapes.

[0097] Furthermore, the openings of electrodes 31 and 32 and the display element 60 of the display panel 70 It is preferable that they be arranged so that they overlap. Similarly, the connecting parts 33 and 34 are also opened. It is preferable to have a configuration that includes an opening. This allows light from the display element 60 to reach the electrode 31. This prevents obstruction by electrodes 32, etc., and improves the light extraction efficiency. As a result, it is possible to realize an input / output device that has high visibility and low power consumption.

[0098] At this time, electrodes 31 and 32 are connected to the wiring (signal lines, scan lines, Capacitance lines, etc., insulating layer (also called a partition) provided between the display elements 60, transistor, capacitance It is preferable to install them in overlapping with elements such as electrodes 31 and 32. By arranging these elements, a highly sensitive touch panel can be achieved without sacrificing aperture ratio.

[0099] Figure 8(A) shows an example where the bridge electrode 35 is applied. To make the shape of the electrodes easier to understand, Figure 8(B) shows the bridge electrode 35 with a dashed line. Figure 8(C) shows the electrodes 31 and 32, respectively, indicated by dashed lines. The relative positions of the bridge electrode 35 and electrodes 31 and 32 are not particularly limited, and either one is... It may be located on the substrate 30 side.

[0100] Furthermore, electrodes 31 and 32 use patterns that form only the contour in a plan view. It may be there. Figure 9(A) shows the square electrodes 31 and 32 shown in Figure 2(B). This shows a shape where the inside of the pattern has been hollowed out, leaving only the outline. At this time, if the width of electrodes 31 and 32 is so narrow that it is not visible to the user, The above-mentioned light-shielding materials such as metals and alloys may be used as the pole 31 and electrode 32. Figure 9(B) shows a bridge connecting adjacent electrodes 31 (or electrodes 32). This shows an example of a case where pole 35 is present.

[0101] The above is an explanation of the shape of the sensor electrodes.

[0102] [Example of pixel configuration] The following describes the pixel configuration of the display panel 70 of the touch panel 100 according to one aspect of the present invention. Let me explain with an example.

[0103] As described above, the display section 81 of the display panel 70 is provided with multiple pixels. Each pixel has one or more display elements 60. A display panel 70 that displays a full-color image is also provided. In this case, for example, one pixel may have three display elements 60: red (R), green (G), and blue (B). It is preferable to have a configuration in which such a feature is provided. Also, one pixel may have yellow (Y) in addition to the three colors mentioned above. A configuration having a white (W) display element 60 improves color reproduction and reduces power consumption. This is preferable because it can reduce [the amount of noise]. Here, one display element 60 and a corresponding pixel circuit are The configuration is sometimes called a sub-pixel. A sub-pixel is, for example, a display element 60 and a transistor. A configuration having capacity is possible. When a pixel has three display elements 60, This can be configured to include three subpixels.

[0104] Furthermore, when the input device 10 is placed on top of the display panel 70, the power of the input device 10 It is preferable that the pole 31 and electrode 32 are positioned between the display elements 60. By doing so, the light from the display element 60 is not blocked by electrodes 31 and 32. Therefore, the reduction in brightness of the display panel 70 when the input device 10 is installed is substantially eliminated, It can be made extremely small. Therefore, a touch panel with high visibility and reduced power consumption is available. This enables the realization of a flat surface. Also, since electrodes 31 and 32 do not overlap with the display element 60, the electrodes It is not necessary to use relatively high-resistance, light-transmitting conductive materials for electrode 31 and electrode 32. Therefore, It is possible to use low-resistance metal or alloy materials for electrodes 31 and 32, and electrodes 31 and electrodes 32 can be formed to be extremely thin, to the point where it is not visible to the naked eye. Therefore, the electrode 31 and the electrode This also helps to suppress the visibility of the number 32 due to light reflection, resulting in higher visibility. It enables the implementation of a touch panel.

[0105] In the following, the display element 60 of the display panel 70 and the electrode 31 of the input device 10 are described. The positional relationship of electrode 32 will be explained.

[0106] Figure 10 shows the display section 81 of the touch panel 100 as seen from the display surface side, as shown in Figure 1(A). The image shows an enlarged view of the input device 10 superimposed. Here, the display panel 70 has The pixels 40 each exhibit different colors, and there are four display elements 60 (display element 60R, display element 60G, This shows the case where there are display elements 60B and 60Y. When explaining common features of different types of display elements, they will be referred to as "display element 60."

[0107] Figure 10 shows the positional relationship between the electrode 31 and each display element 60. Note that the electrode Although 31 is used as an example, the same applies to electrode 32 (or bridge electrode 35). ru.

[0108] Display element 60R is a display element that emits red light, and display element 60G is a display element that emits green light. It is a child element, and display element 60B is a display element that emits blue light, while display element 60Y emits yellow light. Let it be a display element.

[0109] Multiple pixels 40 are arranged periodically in the X and Y directions. Also, two different colors Two corresponding types of display elements 60 are arranged alternately in the X or Y direction.

[0110] Furthermore, in Figure 10, the electrode 31 has a grid shape with straight sections parallel to the X and Y directions. This indicates the case where...

[0111] One display element 60 has a contour that is parallel to the straight portion of the electrode 31. It is preferable to have this shape so that there is no gap when arranging the display elements 60. This eliminates the problem and increases the aperture ratio. In Figure 10, the display element 60 is a square with rounded corners. While the term "shape" is used, it is not limited to squares, rectangles, polygons, ellipses, circles, or rounded corners. It may also be a polygon or other shape.

[0112] In Figure 10, one of the apertures of electrode 31 contains one pixel 40 (i.e., four display elements). Although a configuration including child 60) has been shown, the electrode 31 may be adjacent to the display element 60. It can take on various forms that are processed to be positioned between them.

[0113] Figure 11(A) shows that one display element 60 is included in the lattice opening of electrode 31. This shows the case where they are arranged in this way. In Figure 11(B), multiple openings in the grid of electrode 31 are shown. This shows the case where 40 pixels are included. In Figure 11(C), the electrodes 31 are striped. This shows the case where the shape is as shown. In Figure 11(D), the grid of electrode 31 is straight This diagram shows a case where the grid pitches in the two intersecting directions are different, and the opening is rectangular. Figures 11(E) and (F) show the case where the electrode 31 has a zigzag shape.

[0114] Furthermore, in Figures 10 and 11, each pixel 40 is provided with four color display elements 60. While this is an example, the configuration is not limited to this and includes three or five or more display elements. That's fine.

[0115] Figure 12(A) shows an example where one pixel 40 has three display elements 60. In Figure 12(A), the same colored display elements 60 are arranged in a line along the Y direction. , forming a striped arrangement. In this way, the display elements 60 of the same color are arranged in one direction. This allows for the creation of different colored light-emitting elements and the formation of color filters. This is preferable because it makes alignment with the lower layers easier.

[0116] In Figure 12(A), the display element 60 has a contour that is aligned with the direction of the grid of the electrode 31 (i.e.) It has a rectangular shape with a straight section along the X or Y direction and rounded corners. This shows an example.

[0117] In Figure 12(A), one display element 60 is included in the lattice opening of electrode 31. This shows the case where they are arranged as shown. In Figure 12(B), the opening of the grid of electrode 31 is 1 This shows the case where the pixels 40 are arranged to include one. Figure 12(C) shows electrode 31 This shows the case where multiple pixels 40 are arranged so that they are included in the openings of the grid. In 12(D), the grid of electrode 31 has a pitch of grids in two orthogonal directions. The diagram shows the case where the opening is rectangular. In Figures 12(E) and 12(F), electrode 31 is These examples show cases where the stripes are parallel to the X or Y direction, respectively.

[0118] Note that in Figures 10 to 12, for the sake of ease of explanation, multiple display elements 60 are shown. The symbols R, G, B, Y, etc. are attached, but this arrangement is just one example, and the arrangement of the display elements 60 The placement method is not limited. R, G, B, and Y are interchangeable. Also, R and G Alternatively, a white display element W may be placed in place of either B or Y.

[0119] Furthermore, in this case, the electrodes 31 etc. have a grid shape, and the electrodes 31 etc. and the display element 60 do not overlap. Although we have described the arrangement in the above way, it is not limited to this. As mentioned above, electrode 31 and Using a translucent material or a material that is so finely thin as to be invisible, the display element When 60 and the electrode 31 are placed on top of each other, even if the electrode 31 does not have a grid shape good.

[0120] The above is an explanation of pixels.

[0121] [Example of cross-sectional configuration] Below, an example of the cross-sectional configuration of the touch panel 100 will be explained with reference to the drawings.

[0122] [Cross-sectional configuration example 1] FIG. 13 is a schematic cross-sectional view of the touch panel 100. In FIG. 13, the regions including the FPC 73, the regions including the drive circuit 82, the regions including the display unit 81, and the regions including the F PC 50 shown in FIGS. 1(A) and (B) are each shown in cross-section. The substrate 71 and the substrate 72 are bonded together by an adhesive layer 151. Also, the substrate 72

[0123] and the substrate 30 are bonded together by an adhesive layer 152. Here, the structure including the substrate 71, the substrate 7 2, and the components sandwiched therebetween corresponds to the display panel 70. Also, the structure including the substrate 30 and the components provided on the substrate 30 corresponds to the input device 10. 〈Display Panel 70〉

[0124] Between the substrate 71 and the substrate 72, a transistor 201, a transistor 202, a trans istor 203, a display element 60, a capacitive element 205, a connection portion 206, a wiring 207, etc. are provided. On the substrate 71, an insulating layer 211, an insulating layer 212, an insulating layer 213, an insulating layer 214, an insulating layer 215, a spacer 216, etc. are provided. A part of the insulating layer 211 functions as a gate insulating layer of each transistor, and another part functions as a dielectric of the capacitive element 205.

[0125] The insulating layer 212, the insulating layer 213, and the insulating layer 214 are provided to cover each transistor, the capacitive element 205, etc. The insulating layer 214 has a function as a planarization layer. Here, the case of having three layers of the insulating layer 212, the insulating layer 213, and the insulating layer 214 as an insulating layer covering the transistor, etc. is shown, but it is not limited to this, and it may be four or more layers, and it may be a single layer or two layers. Also, the insulating layer 214 functioning as a planarization layer is not necessary. ​​​​In that case, it is not necessary to provide it.

[0126] A display element 60 is provided on the insulating layer 214. Here, the display element 60 is described as above This shows an example of applying a top-emission type light-emitting element (organic EL element). The display element 60 emits light toward the second electrode 223. Overlapping with the region, transistor 202, transistor 203, capacitive element 205, and wiring etc. By stacking them, the aperture ratio of the display unit 81 can be increased.

[0127] The display element 60 has an EL layer 222 between the first electrode 221 and the second electrode 223. Furthermore, an optical adjustment layer 224 is provided between the first electrode 221 and the EL layer 222. The insulating layer 215 is provided covering the first electrode 221 and the end of the optical adjustment layer 224. Yes, they are.

[0128] Figure 13 shows a cross-section of one pixel as an example of the display unit 81. Here, the pixel is A transistor 202 for current control, a transistor 203 for switching control, and a capacitance element This shows the case where child 205 is present, and one of the source or drain of transistor 202. On one side, and on the other electrode of the capacitive element 205, insulating layer 212, insulating layer 213 and insulating layer 214 It is electrically connected to the first electrode 221 through an opening provided therein.

[0129] Furthermore, Figure 13 shows an example of a drive circuit 82 in which a transistor 201 is provided. This indicates that.

[0130] In Figure 13, transistors 201 and 202 have a semicircular structure in which a channel is formed. This shows an example of applying a configuration in which the conductive layer is sandwiched between two gate electrodes. Compared to other transistors, the DISTRA can increase the field-effect mobility, and on-electric The flow rate can be increased. As a result, circuits capable of high-speed operation can be created. Furthermore, This reduces the circuit footprint. By using transistors with high on-current, the display... Even if the number of wires increases when the panel is made larger or higher resolution, This reduces signal delay and minimizes variations in display brightness.

[0131] The transistors provided in the drive circuit 82 and the display unit 81 are of the same structure. It can be a transistor, or a combination of transistors with different structures can be used.

[0132] At least one of the insulating layers 212 and 213 covering each transistor is made of water and hydrogen. It is preferable to use a material that does not easily allow impurities such as to diffuse. That is, the insulating layer 212 and The insulating layer 213 can function as a barrier film. This effectively suppresses the diffusion of impurities from the outside into the transistor, resulting in high reliability. It enables the creation of a touch panel.

[0133] The spacer 216 is provided on the insulating layer 215 and adjusts the distance between the substrate 71 and the substrate 72. It has the function of having a gap between the spacer 216 and the light-shielding layer 232. As shown, these may be in contact. Also, here the spacer 216 is on the substrate 71 side. Although the configuration shown is provided in the above location, it can also be provided on the substrate 72 side (for example, on the substrate 71 side of the light-shielding layer 232). Alternatively, a granular spacer may be used instead of spacer 216. As the spacer, materials such as silica can be used, but it is preferable to use an elastic material such as an organic resin or rubber. At this time, the granular spacer may have a shape crushed in the vertical direction. A coloring layer 231, a light shielding layer 232, etc. are provided on the substrate 71 side of the substrate 72. The light shielding layer 232 has an opening and is arranged so that the opening overlaps with the display area of the display element 60. The coloring

[0134] layer 231 is provided so as to overlap with the display element 60. As materials that can be used as the light shielding layer 232, carbon black, metal oxides, composite oxides containing a solid solution of a plurality of metal oxides, etc. can be mentioned. Also, for the light shielding layer 232,

[0135] a laminated film of a film containing the material of the coloring layer 231 can also be used. For example, a material containing acrylic resin is used for the coloring layer 231, and a film containing the material used for the coloring layer that transmits light of a certain color and a film containing the material used for the coloring layer that transmits light of another color are used. A laminated structure can be used. It is preferable to share the materials of the coloring layer 231 and the light shielding layer 232 because the device can be shared and the process can be simplified. For example, as materials that can be used for the coloring layer 231, metal materials, resin materials, resin materials containing pigments or dyes, etc. can be mentioned. In addition, an insulating layer that functions as an overcoat may be provided to cover the coloring layer 231 and the light shielding layer 232.

[0136]

[0137]

[0138] A connection part 206 is provided in a region near the end of the substrate 71. The connection part 206 is electrically connected to the FPC 73 through the connection

[0139] layer 209. In the configuration shown in FIG. 13, the driving circuit A portion of the wiring 207 that is electrically connected to the path 82 and the same conductive film as the first electrode 221 are processed. This shows an example in which a conductive layer formed by laminating is used to construct the connection portion 206. Thus, by stacking two or more conductive layers to form the connection part 206, electrical resistance can be reduced. In addition, it can also increase the mechanical strength of the connection part 206.

[0139] Furthermore, Figure 13 shows an example of processing the same conductive film as the gate electrode of a transistor to form a shape. The wiring is made, and the same conductive film as the source and drain electrodes of the transistor is processed. This shows the cross-sectional structure of the intersection 86 where the formed wiring intersects.

[0140] Here, the same conductive film as the gate electrode of the transistor is processed and formed at the intersection 86. This shows the case where a scan line 87 is provided. Note that scan line 87 is a transistor The wiring may be formed by processing the same conductive film as the source electrode and drain electrode. Other conductive films may be used.

[0141] <Input device 10> Electrodes 31 and 32 are provided on the substrate 72 side of substrate 30. Here, An example is shown where there is a cross electrode 35. As shown in the intersection 86 in Figure 13, the electrode Electrode 31 and electrode 32 are formed on the same plane. Furthermore, an insulating layer covers electrodes 31 and 32. A bridge electrode 35 is provided on 161. The bridge electrode 35 is on the insulating layer 161 Through the provided opening, the two electrodes 31, which are positioned to sandwich the electrode 32, are electrically connected. It continues.

[0142] Furthermore, in the configuration shown in Figure 13, the electrodes 31 are arranged so as not to overlap with the display element 60. This shows an example where the opening of electrode 31 and the display element 60 overlap. Electrode 31 is positioned so as not to overlap with the colored layer 231. It is preferable to arrange them in this manner. Furthermore, the electrode 31 is positioned so as to overlap with the light-shielding layer 232. Preferred. Note that although an example of electrode 31 is shown here, electrodes 32 and bridge electrode 35 are also shown. Similarly, it is preferable that these are arranged so as not to overlap with the display element 60, etc.

[0143] In Figure 13, the electrode 31 consists of insulating layer 212, insulating layer 213, insulating layer 214, insulating layer 2 15. It is installed in stack with spacers 216, etc. Also, the gates that make up transistor 202 It is provided in overlapping with the source electrode, semiconductor layer, gate insulating layer, and a portion of the source electrode or drain electrode. It may be done in this way. Also, of the EL layer 222 and the second electrode 223, the part that is not involved in light emission. They are also provided in overlapping configurations. Furthermore, of the first electrode 221 and the optical adjustment layer 224, It may be provided overlapping with parts that are not involved. Also, the layer that makes up transistor 203 Alternatively, it may be provided in superimposed on layers that constitute the capacitive element 205.

[0144] A connection portion 106 is provided in the region near the edge of the substrate 30. The connection portion 106 is The FPC50 is electrically connected via the subsequent layer 109. In the configuration shown in Figure 13, the wiring A portion of 42 and a conductive layer obtained by processing the same conductive film as the bridge electrode 35 are laminated together. This shows an example of how the connection part 106 is constructed.

[0145] The connecting layer 109 and connecting layer 209 are made of anisotropic conductive film (ACF: Anisotr opic conductive film) and anisotropic conductive paste (ACP: Ani Sotropic Conductive Paste, etc., can be used.

[0146] Here, the substrate 30 is also used as a substrate that is directly touched by a detected object such as a finger or stylus. It is possible to do so. In that case, a protective layer (ceramic coating, etc.) is provided on the substrate 30. The protective layer may be, for example, silicon oxide, aluminum oxide, yttrium oxide, etc. Inorganic insulating materials such as tricarbonate-stabilized zirconia (YSZ) can be used. Tempered glass may be used for the substrate 30. Tempered glass can be strengthened by methods such as ion exchange or air cooling. The material used is one that has undergone physical or chemical treatment, and whose surface has been subjected to compressive stress. This is possible. A touch sensor is placed on one side of the reinforced glass, and the opposite side is used for, for example, electronic devices. By placing it on the outermost surface and using it as a touch surface, the overall thickness of the device can be reduced.

[0147] <About each component> The following sections will explain each of the components listed above.

[0148] The substrate of the touch panel can be made of a material having a flat surface. The substrate that extracts the light from the source is made of a material that transmits the light. For example, glass or quartz. Materials such as ceramics, sapphires, and organic resins can be used.

[0149] By using a thin substrate, it is possible to make the touch panel lighter and thinner. Furthermore, by using a substrate of sufficient thickness to be flexible, a flexible touch panel can be created. This can be achieved.

[0150] Examples of glass include alkali-free glass, barium borosilicate glass, and alumino. Glass or similar materials can be used.

[0151] Materials that are flexible and transparent to visible light include, for example, materials that are flexible to a certain degree. Glass of varying thicknesses, polyethylene terephthalate (PET), polyethylene naphthalate Polyester resins such as (PEN), polyacrylonitrile resin, polyimide resin, polymer Chill methacrylate resin, polycarbonate (PC) resin, polyethersulfone (PE) S) Resins, polyamide resins, cycloolefin resins, polystyrene resins, polyamide resins Examples include plastic resins, polyvinyl chloride resins, and polytetrafluoroethylene (PTFE) resins. It is preferable to use a material with a low coefficient of thermal expansion, for example, a material with a coefficient of thermal expansion of 30 ×10 -6 Polyamide-imide resins, polyimide resins, PET, etc. with a K of 0.1 or less are preferably used. It is possible to have a substrate made of glass fiber impregnated with organic resin, or an inorganic filler made of organic resin. It is also possible to use a substrate that has been mixed with resin to lower its coefficient of thermal expansion. A thin glass may be used. A substrate made of such material is lightweight, so the substrate Touch panels using this technology can also be made lightweight.

[0152] If the above material contains fibrous material, the fibrous material is a high strength organic or inorganic compound. High-strength fibers are used. Specifically, high-strength fibers are fibers with a high tensile modulus or Young's modulus. This refers to polyvinyl alcohol-based fibers, polyester fibers, and poly- Aramid fibers, polyethylene fibers, aramid fibers, poly(p-phenylenebenzobisoxide) Examples include sazole fibers, glass fibers, or carbon fibers. Examples of glass fibers include E-glass. Examples include glass fibers using S glass, D glass, Q glass, etc. These are woven fabrics. Alternatively, it can be used in the form of a nonwoven fabric, and a structure made by impregnating this fiber with resin and hardening the resin is made flexible. It may also be used as a substrate having flexibility. As a substrate having flexibility, it may be made of fibers and resin. Using structures improves reliability against damage caused by bending and localized compression, therefore it is preferable. stomach.

[0153] Alternatively, a thin, flexible material such as glass or metal can be used as the substrate. Alternatively, a composite material in which glass and resin materials are bonded together may be used.

[0154] Furthermore, the substrate on the side from which light is not extracted does not need to be translucent, as mentioned above. In addition to the base plate substrate, metal substrates, ceramic substrates, or semiconductor substrates can also be used. Metal substrates have high thermal conductivity and can easily conduct heat throughout the entire substrate, making them suitable for touch panels. Local temperature rise can be suppressed, which is preferable. To obtain flexibility and bendability, metal The substrate thickness is preferably 10 μm to 200 μm, and 20 μm to 50 μm. It is preferable to do so.

[0155] There are no particular limitations on the materials that make up the metal substrate, but for example, aluminum, copper, and nickel are used. Preferably, metals such as buckle, or alloys such as aluminum alloy or stainless steel are used. It is possible.

[0156] In addition, insulating treatment is performed by oxidizing the surface of the metal substrate or forming an insulating film on the surface. A substrate that has been treated may be used. For example, a coating method such as spin coating or dip coating, or an electric coating method may be used. An insulating film may be formed using methods such as deposition, vapor deposition, or sputtering, or in an oxygen atmosphere. In addition to leaving it exposed to air or heating it, an oxide film can be formed on the surface of the substrate by methods such as anodizing. That's fine.

[0157] A hard coat layer is applied to a flexible substrate to protect the surface of the touch panel from scratches, etc. (Example) For example, a silicon nitride layer, or a layer of material that can distribute pressure (for example, an aramid resin layer). The following may be stacked: (and so on). Furthermore, it suppresses the reduction in the lifespan of the display elements due to moisture, etc. Therefore, a flexible substrate may have a low water permeability insulating layer laminated on it. For example, nitrogen Inorganic insulating materials such as silicon oxide, silicon oxide-nitride, aluminum oxide, and aluminum nitride. You can use it.

[0158] The substrate can also be constructed by stacking multiple layers. In particular, it can be configured to include a glass layer. This improves the barrier properties against water and oxygen, resulting in a more reliable touch panel. ru.

[0159] For example, a substrate is used in which a glass layer, an adhesive layer, and an organic resin layer are laminated from the side closest to the display element. It is possible. The thickness of the glass layer is preferably 20 μm or more and 200 μm or less. The thickness shall be between 25 μm and 100 μm. Glass layers of this thickness are resistant to water and oxygen. It can achieve both high barrier properties and flexibility simultaneously. Furthermore, the thickness of the organic resin layer is 10 μm. The thickness should be 200 μm or less, preferably 20 μm or more and 50 μm or less. Such organic resin By adding a layer, cracks and fractures in the glass layer are suppressed, and mechanical strength is improved. This can be achieved. By applying such a composite material of glass material and organic resin to a substrate, This allows for the creation of an extremely reliable and flexible touch panel.

[0160] A transistor consists of a conductive layer that functions as the gate electrode, a semiconductor layer, and a source electrode. A functional conductive layer, a conductive layer that functions as a drain electrode, and a gate insulating layer that functions as a gate insulating layer. It has an insulating layer. Figure 13 shows the case where a bottom gate structure transistor is applied. They are doing it.

[0161] The structure of the transistors in the touch panel according to one aspect of the present invention is not particularly limited. For example, it can be a staggered transistor or an inverse staggered transistor. Good. Furthermore, it can be either a top-gate or bottom-gate transistor structure. The semiconductor material used in transistors is not particularly limited; for example, oxide semiconductors, silicon Examples include cellulose, germanium, and organic semiconductors.

[0162] The crystallinity of semiconductor materials used in transistors is not particularly limited; amorphous semiconductors are also available. Crystalline semiconductors (microcrystalline semiconductors, polycrystalline semiconductors, single-crystal semiconductors, or semiconductors with a crystalline region in part) Any semiconductor (having a region) may be used. If a semiconductor with crystalline properties is used, This is preferable because it suppresses the degradation of the DISTA characteristics.

[0163] Furthermore, semiconductor materials used in transistors include, for example, elements of Group 14 and compound semiconductors. Silicon or oxide semiconductors can be used as semiconductor layers. Typically, silicon-containing semiconductors... Semiconductors containing gallium arsenide or oxide semiconductors containing indium can be applied.

[0164] In particular, it is preferable to use oxide semiconductors with a larger band gap than silicon. This method uses semiconductor materials with a wider band gap and lower carrier density than silicon. This is preferable because it can reduce the current in the off state of the transistor.

[0165] It is preferable to use an oxide semiconductor with reduced impurities and oxygen deficiencies and a low carrier density. Specifically, less than 8×10 11 / cm 3 Preferably less than 1×10 11 / cm 3 Less than More preferably less than 1×10 10 / cm 3 Less than, and 1×10 -9 / cm 3 The above carrier An oxide semiconductor with a density can be used. Such an oxide semiconductor is called a high-purity intrinsic or Substantially high-purity intrinsic oxide semiconductor. Such an oxide semiconductor has a Low impurity concentration and low density of defect levels. That is, it can be said that it is an oxide semiconductor with stable characteristics.

[0166] For example, as the above oxide semiconductor, it is preferable to contain at least indium (In) or zinc (Zn ). More preferably, it contains an oxide represented by In-M-Zn system oxide (M is a metal such as Al, Ti, Ga, Ge, Y, Zr, Sn, La, Ce or Hf). Including.

[0167] Particularly, as the semiconductor layer, it has a plurality of crystal parts, and the c-axis of the crystal part is perpendicular to the surface to be formed of the semiconductor layer Or is oriented substantially perpendicular to the upper surface of the semiconductor layer, and no grain boundary is observed between adjacent crystal parts It is preferable to use an oxide semiconductor film.

[0168] Since such an oxide semiconductor has no grain boundaries, cracks in the oxide semiconductor film are suppressed due to the Stress when the display panel is curved. Therefore, Such oxide semiconductors are suitable for applications that are flexible and can be bent, such as touch panels. It can be used.

[0169] Furthermore, by using an oxide semiconductor with such crystalline properties as the semiconductor layer, the electrical properties This suppresses fluctuations and enables the creation of highly reliable transistors.

[0170] Furthermore, transistors using oxide semiconductors with a larger band gap than silicon, Due to its low off-current, the charge stored in the capacitor connected in series with the transistor can be stored for a long period of time. It can be held over a long period of time. By applying such transistors to pixels, each display area can be displayed It also becomes possible to stop the drive circuit while maintaining the gradation of the displayed image. As a result, This makes it possible to realize a display device with reduced power consumption.

[0171] Alternatively, silicon is preferred as the semiconductor in which the transistor channel is formed. It is fine. Amorphous silicon may be used as silicon, but crystalline silicon is particularly desirable. It is preferable to use silicon. For example, microcrystalline silicon, polycrystalline silicon, single-crystal silicon It is preferable to use materials such as n. In particular, polycrystalline silicon is suitable for lower temperatures compared to single-crystal silicon. It can be formed using [a specific method] and possesses higher field-effect mobility and higher reliability compared to amorphous silicon. By applying such polycrystalline semiconductors to pixels, the aperture ratio of the pixels can be improved. It is possible. Furthermore, even when the pixels have extremely high resolution, the scanning line drive circuit and the signal line drive circuit The paths can be formed on the same substrate as the pixels, reducing the number of components that make up the electronic device.

[0172] In addition to the gate, source, and drain of transistors, various components that make up a touch panel are also included. Materials that can be used for conductive layers such as wires and electrodes include aluminum, titanium, Chromium, nickel, copper, yttrium, zirconium, molybdenum, silver, tantalum, and Examples include metals such as tungsten, or alloys in which tungsten is the main component. These materials can be used in single-layer or multi-layer structures. For example, silico A single-layer structure of an aluminum film containing , a double-layer structure in which an aluminum film is laminated on a titanium film, A two-layer structure consisting of an aluminum film laminated on a tungsten film, copper-magnesium-aluminium A two-layer structure in which a copper film is laminated on an alloy film, a two-layer structure in which a copper film is laminated on a titanium film, tungsten A two-layer structure in which a copper film is laminated on a titanium film, a titanium film or titanium nitride film, and on top of that, A luminium film or copper film is laminated, and then a titanium film or titanium nitride film is formed on top of it. A three-layer structure consisting of a molybdenum film or molybdenum nitride film, with an aluminum film layered on top of it. Alternatively, a copper film is laminated, and then a molybdenum film or molybdenum nitride film is formed on top of it, creating a three-layer structure. It has a structure, etc. Furthermore, a transparent conductive material containing indium oxide, tin oxide, or zinc oxide is used. This may also be done. Furthermore, using copper containing manganese improves the controllability of the shape through etching. Therefore, it is preferable.

[0173] Furthermore, it can be used for conductive layers such as various wirings and electrodes that make up a touch panel. Examples of translucent materials include indium oxide, indium tin oxide, and indium zinc oxide. Conductive oxides such as zinc oxide, zinc oxide, and zinc oxide with added gallium, or graphene are used. It can be. Or, gold, silver, platinum, aluminum, magnesium, nickel, t Instan, chromium, molybdenum, iron, cobalt, copper, palladium, tin, zinc, indigo By using metallic materials such as um, tantalum, or titanium, or alloy materials containing such metallic materials This can be done. Alternatively, a nitride of the metal material (for example, titanium nitride) may be used. Furthermore, when using metallic materials, alloy materials (or nitrides thereof), the material must be translucent. It only needs to be thinned to a certain extent. Furthermore, the laminated film of the above material can be used as a conductive layer. Example For example, using a multilayer film of a silver-magnesium alloy and indium tin oxide, conductivity This is preferable because it can enhance the effect.

[0174] Examples of insulating materials that can be used for each insulating layer, overcoat, spacer, etc. include In addition to resins such as acrylic and epoxy, and resins containing siloxane bonds, silicon oxide, Inorganic insulating materials such as silicon oxide nitride, silicon nitride, silicon nitride, and aluminum oxide. Materials can also be used.

[0175] Furthermore, it is preferable that the light-emitting element is provided between a pair of insulating films with low water permeability. This prevents impurities such as water from entering the light-emitting elements, thus suppressing a decrease in the reliability of the device. It can be controlled.

[0176] Examples of insulating films with low water permeability include silicon nitride films and silicon nitride oxide films, which contain nitrogen and silicon. Examples include films containing nitrogen and aluminum, such as aluminum nitride films. Silicon oxide films, silicon oxide nitride films, aluminum oxide films, etc., may also be used.

[0177] For example, the amount of water vapor transmitted through a low-permeability insulating film is 1 × 10⁻⁶ -5 [g / (m 2 ·day) ] Preferably 1 × 10 -6 [g / (m 2 ·day)] Below, more preferably 1×1 0 -7 [g / (m 2 (day) More preferably 1 x 10 -8 [g / (m 2 ·d (ay) and below.

[0178] Each adhesive layer can be a photocuring adhesive such as an ultraviolet-curing type, a reaction-curing adhesive, or a thermosetting adhesive. Various types of curing adhesives, such as adhesives and anaerobic adhesives, can be used. Epoxy resin, acrylic resin, silicone resin, phenolic resin, polyimide resin, Mido resin, PVC (polyvinyl chloride) resin, PVB (polyvinyl butyral) resin, Examples include EVA (ethylene vinyl acetate) resin. In particular, moisture-permeable epoxy resins. Materials with low properties are preferred. Two-component resins may also be used. Adhesive sheets, etc. You may also use [this].

[0179] Furthermore, the above resin may contain a desiccant. For example, an alkaline earth metal oxide (acid Using substances that adsorb moisture by chemical adsorption, such as calcium carbonate or barium oxide. It is possible to remove moisture through physical adsorption, such as with zeolite or silica gel. Adsorbent substances may be used. If a desiccant is included, impurities such as moisture may be absorbed into the functional element. This is preferable because it can deter intrusion and improve the reliability of the display panel.

[0180] Furthermore, by mixing fillers or light-scattering materials with a high refractive index into the above resin, a light-emitting element can be created. The light extraction efficiency from these can be improved. For example, titanium dioxide, barium oxide, Zeolite, zirconium, etc., can be used.

[0181] As the light-emitting element, a self-emitting element can be used, and it will light up when current or voltage is applied. This category includes elements whose degree of control is managed. For example, light-emitting diodes (LEDs), organic EL elements, inorganic EL elements, etc., can be used.

[0182] Light-emitting devices include top-emission type, bottom-emission type, and dual-emission type. Either of the above is acceptable. The electrode that extracts light uses a conductive film that transmits visible light. Furthermore, it is preferable to use a conductive film that reflects visible light on the electrode that does not extract light. stomach.

[0183] The EL layer has at least an emissive layer. The EL layer has layers other than the emissive layer, such as hole injection layers. High-performance materials, materials with high hole transport, hole-blocking materials, materials with high electron transport, electron injection This includes substances with high electron transport and hole transport properties, or bipolar substances (substances with high electron transport and hole transport properties), etc. It may have further layers.

[0184] The EL layer can use either low-molecular-weight compounds or high-molecular-weight compounds, and inorganic compounds It may contain materials. Each layer constituting the EL layer is made by a vapor deposition method (including vacuum deposition). It can be formed by methods such as transfer, printing, inkjet, and coating.

[0185] When a voltage higher than the threshold voltage of the light-emitting element is applied between the cathode and anode, the EL layer on the anode side... Holes are injected from the cathode side, and electrons are injected from the cathode side. The injected electrons and holes are in the EL layer. They recombine, and the light-emitting material contained in the EL layer emits light.

[0186] When using a white light-emitting element as the light-emitting element, two or more types of light-emitting elements are used in the EL layer. It is preferable to have a composition that includes substances. For example, the emission of light from two or more light-emitting substances is related to the complementary color White light emission can be obtained by selecting a light-emitting material that acts in conjunction with the light-emitting material. For example, These are light-emitting substances that exhibit light emission in the following colors: R (red), G (green), B (blue), Y (yellow), O (orange), etc. Or, among luminescent materials that exhibit emission containing two or more spectral components of R, G, and B, It is preferable that it contains 2 or more. Also, the spectrum of emission from the light-emitting element is in the visible light region. A light-emitting element having two or more peaks within a wavelength range (e.g., 350 nm to 750 nm) is suitable. It is preferable to use it. Also, the emission spectrum of a material having a peak in the yellow wavelength region is Preferably, the material has spectral components in the green and red wavelength regions.

[0187] More preferably, the EL layer includes an emissive layer containing an emissive material that emits one color, and a layer that emits another color. It is preferable to have a structure in which a light-emitting layer containing a light-emitting material is laminated. For example, the EL layer The multiple light-emitting layers may be stacked in contact with each other, or they may not contain any of the light-emitting materials. They may be layered with a region that does not exist in between. For example, between the fluorescent emitting layer and the phosphorescent emitting layer, The fluorescent or phosphorescent layer comprises the same material (e.g., host material, assist material) Furthermore, the configuration may include a region that does not contain any light-emitting material. This makes it easier to manufacture the offspring and reduces the driving voltage.

[0188] Furthermore, the light-emitting element may be a single element having one EL layer, or it may have multiple EL layers These may be tandem elements stacked with charge generation layers in between.

[0189] Examples of conductive films that transmit visible light include indium oxide, indium tin oxide, and indium It can be formed using zinc oxide, zinc oxide, or zinc oxide with added gallium. Gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, koba Metallic materials such as copper, palladium, or titanium, alloys containing these metallic materials, or These nitrides of metal materials (for example, titanium nitride) are also formed to a degree that allows light to pass through. It can be used by doing so. Furthermore, the laminated film of the above material can be used as a conductive layer. For example, using a multilayer film of a silver-magnesium alloy and ITO can improve conductivity. This is preferable because it allows for this. Alternatively, graphene or the like may be used.

[0190] Conductive films that reflect visible light include, for example, aluminum, gold, platinum, silver, nickel, and tungsten. Metal materials such as stainless steel, chromium, molybdenum, iron, cobalt, copper, or palladium, Alloys containing these metal materials can be used. In addition, the above metal materials and alloys can be treated with ran It may also contain additives such as tungsten, neodymium, or germanium. Additionally, titanium and nickel may be added. Alternatively, an alloy containing neodymium and aluminum (aluminum alloy) may be used. An alloy containing copper, palladium, magnesium, and silver may also be used. An alloy containing silver and copper is Furthermore, it is preferable because it has high heat resistance. By laminating a metal film or metal oxide film, oxidation can be suppressed. Examples of materials for the oxide film include titanium and titanium oxide. Furthermore, the above visible light... A permeable conductive film and a film made of a metallic material may be laminated. For example, silver and indium stinic acid. This involves using multilayer films of oxides, such as multilayer films of silver-magnesium alloys and indium tin oxide. It is possible.

[0191] The electrodes can be formed using methods such as vapor deposition or sputtering. Shapes are formed using ejection methods such as inkjet, printing methods such as screen printing, or plating methods. It is possible.

[0192] The above is a description of each component.

[0193] Below, we will explain an example with some differences in configuration from the above example 1 of cross-sectional configurations, referring to the drawings. In the following, we will omit explanations of parts that overlap with the above and explain the differences. do.

[0194] [Cross-sectional configuration example 2] Figure 14 shows an example of a cross-sectional configuration of the touch panel 100, which differs in some aspects from Figure 13. Yes, they are.

[0195] In Figure 14, transistors 201 and 202 have their second gates and A conductive layer that functions in this way is provided between the insulating layer 213 and the insulating layer 214. This configuration allows for a reduction in the voltage applied to the second gate compared to the configuration shown in Figure 13. Therefore, it is preferable.

[0196] Furthermore, Figure 14 shows an example of a display element 60 formed using a color-shading method. Specifically, an EL layer 222 that emits a different color is formed for each pixel of a different color. Furthermore, outside the light-emitting area of ​​the display element 60, the edge of the EL layer 222 covers the second electrode 223. It has a divided region. The EL layer 222 can be deposited using, for example, a metal mask vapor deposition method or printing. The EL layer 222 can be formed using methods such as inkjet printing.

[0197] Furthermore, Figure 14 does not show the optical adjustment layer 224 or coloring layer 231 exemplified in Figure 13. This provides a good example.

[0198] Figure 14 also shows an example in which a protective film 217 is provided covering the second electrode 223. The protective film 217 acts as a barrier film to prevent impurities such as water from diffusing into the display element 60. It has the function of being. Although not shown here, the protective film 217 is at the edge of the EL layer 222. Alternatively, if provided to cover the end of the second electrode 223, moisture can be more effectively introduced into the display element 60. It can suppress their intrusion.

[0199] As the protective film 217, an organic insulating material or an inorganic insulating material can be used. Using inorganic insulating materials is preferable because it allows for the formation of a thin, highly barrier-oriented protective film. When using inorganic insulating materials for 217, for example, silicon nitride, silicon oxide nitride, and a Aluminum oxide nitride, aluminum nitride, aluminum nitride, aluminum oxide It is preferable to use materials such as humic acid. In particular, aluminum oxide has excellent barrier properties. Therefore, it is preferable. In addition, as a method for forming the protective film 217, sputtering, vapor deposition, C VD (Chemical Vapor Deposition) method, ALD (Atomi Methods such as the Layer Deposition (ALD) method can be used. In particular, the ALD method can be used. Using this method is preferable because it can suppress damage to the display element 60 during film formation. While thermal ALD can also be used as an LD method, PEALD (Plasma Enhancing) is also an option. Using the anced ALD method is preferable because it allows for film formation at low temperatures, such as room temperature.

[0200] Note that the transistor configuration, the display element 60 configuration, and the protective film 217 configuration are illustrated here. These are examples of the structures of transistors, display elements, etc. in each cross-sectional configuration shown in Figure 13 and below. It can be replaced with "to become".

[0201] [Cross-sectional configuration example 3] The touch panel shown in Figure 15 has substrates 111 and 112. 2 is bonded by adhesive layer 152, and substrate 111 and substrate 112 are bonded by adhesive layer 153 It is glued together.

[0202] Electrodes 32, wiring 42, etc. are formed on the substrate 111. Also, electrodes 31 and electrodes 31 and Electrically connected wiring (not shown) and the like are formed on the substrate 112. In Figure 15, The configuration involves placing the FPC 50 on substrate 111, but in areas not shown, the same applies to substrate 112. The FPC is connected in this manner.

[0203] Thus, when two circuit boards are used as the configuration for the input device 10, circuit board 111 and circuit board For 112, it is preferable to use a substrate that is equivalent to or thinner than substrates 71 and 72. In particular, using the above-mentioned flexible material as substrate 111 or substrate 112. This is preferable. This allows the thickness of the touch panel 100 to be reduced.

[0204] Furthermore, as shown in Figure 15, a protective substrate 130 is provided on the substrate 112 via an adhesive layer 154. This is also possible. The side of the protective substrate 130 opposite to the substrate 112 functions as the touch surface. The material for the protective substrate 130 can be the same as that described for the substrate 30 above.

[0205] [Cross-sectional configuration example 4] The touch panel shown in Figure 16 has a substrate 113. A bonding layer is applied between the substrate 113 and the substrate 72. It is bonded with 152.

[0206] One side of the substrate 113 is provided with electrodes 32, wiring 42, etc. On the other side, electrodes 31 and wiring 41 that electrically connects to electrodes 31 are provided. In other words, the electrodes and wiring that constitute the touch sensor are provided on the front and back surfaces of the substrate 113. It has the ability.

[0207] Furthermore, in Figure 16, at the connection point 106a where a portion of the wiring 42 is exposed, FPC50a And in the connection portion 106b where a connection layer 109a is provided and a part of the wiring 41 is exposed, F This shows an example in which PC50b and connecting layer 109b are provided. Note that the connecting part 106a and The extension 106b may or may not overlap with each other in a plan view. They can be positioned slightly off-center.

[0208] [Cross-sectional configuration example 5] The touch panel shown in Figure 17 has a touch sensor on the side of the substrate 72 opposite to the substrate 71 side. The electrodes and other components that make up the bridge are provided. Specifically, a bridge electrode 35 and a bridge are provided on the substrate 72. An insulating layer 161 covers a portion of the ridge electrode 35, and electrodes 31 and 32 are arranged on the insulating layer 161. Lines 42, etc., are provided.

[0209] Also, as shown in Figure 17, even if the protective substrate 130 and the substrate 72 are bonded together with the adhesive layer 152 good.

[0210] This configuration allows the input device 10 and the display panel 70 to share the same circuit board. This allows the touch panel to be made extremely thin.

[0211] [Cross-sectional configuration example 6] Figure 18 shows the configuration of the touch sensor exemplified in Figure 17 and the color-coding method exemplified in Figure 14. A touch panel configuration using a light-emitting element to which the following is applied as a display element 60, and a combination of the following. Figure 18 shows an example where the light-shielding layer 232 is not provided. It is.

[0212] [Cross-sectional configuration example 7] The touch panel shown in Figure 19 has touch sensors on the side of the substrate 72 that faces the substrate 71. Electrodes and the like are provided. Specifically, electrodes 31, electrodes 32, wiring 42, etc. are provided on the substrate 72. An insulating layer 161 covers these, and a bridge electrode 35, etc., is provided on the insulating layer 161. .

[0213] Furthermore, an insulating layer 233 is provided to cover the electrodes and other components that constitute the touch sensor. Furthermore, a colored layer 231, a light-shielding layer 232, etc., are provided on the insulating layer 233.

[0214] This configuration allows the input device 10 and the display panel 70 to share the same circuit board. Therefore, one side of the substrate 72 can be used as the touch surface, thus reducing the thickness of the touch panel 100. It can be made even thinner.

[0215] [Cross-sectional configuration example 8] Figure 20 shows a modified version of the touch panel shown in Figure 19.

[0216] The touch panel shown in Figure 20 uses a substrate 91, adhesive layer 92, substrate 93, instead of substrate 71. It has a laminated structure of an insulating layer 94 and a substrate 191 and an adhesive layer 19 2. It has a laminated structure of a substrate 193 and an insulating layer 194.

[0217] The insulating layer 94 and insulating layer 194 are made of a material that does not easily allow impurities such as water and hydrogen to diffuse. This can be done. With this configuration, substrates 91, 93, 191, and Even if a moisture-permeable material is used for 193, for the display element 60 and each transistor This effectively suppresses the diffusion of impurities from the outside, resulting in a highly reliable touch panel. Cut.

[0218] Substrates 93 and 193 can be made of flexible materials such as resin. It is preferable to use a flexible film or the like for the plate 91 and substrate 191. By using a flexible material for the substrate, a bendable touch panel can be realized. can.

[0219] [Cross-sectional configuration example 9] The touch panel shown in Figure 21 has a shield between the electrodes and other components constituting the touch sensor and the substrate 72. A light-shielding layer 232 is provided. Specifically, a light-shielding layer 232 is provided on the substrate 72, and light-shielding An insulating layer 234 is provided covering layer 232. On the insulating layer 234 are electrodes 31 and electrodes 32, wiring 42, an insulating layer 161 covering them, and bridge electrodes 35 etc on the insulating layer 161 An insulating layer 233 is provided on the bridge electrode 35 and the insulating layer 161. A colored layer 231 is provided on the insulating layer 233.

[0220] The insulating layers 233 and 234 function as planarizing films. 3. The insulating layer 234 may be omitted if it is not needed.

[0221] This configuration allows the electrodes and other components that make up the touch sensor to be positioned on the viewing side. The light-shielding layer 232 prevents external light reflection from the electrodes, etc., and the electrodes, etc., are not visible. This helps to prevent it from getting lost. Therefore, not only is it thinner, but visibility is also further improved. This enables the creation of a touch panel.

[0222] [Cross-sectional configuration example 10] Figure 22 shows a modified version of the touch panel shown in Figure 21.

[0223] The touch panel shown in Figure 22 uses a substrate 91 instead of a substrate 71, an adhesive layer 92, and an insulating layer 9 It has a layered structure of 4. In addition, instead of the substrate 72, it has a substrate 191, an adhesive layer 192, and an insulating layer. It has a layered structure of 194 layers.

[0224] By using flexible materials for substrates 91 and 191, it is possible to bend them. It enables the creation of a touch panel that can be used.

[0225] [Cross-sectional configuration example 11] Figure 23 shows a cross-sectional view of a touch panel when a liquid crystal display device is applied as the display panel 70. This is an example. The touch panel shown in Figure 23 uses a liquid crystal element as the display element 208. It is. Also, the touch panel has polarizing plate 131, polarizing plate 132, and backlight 133. I have it.

[0226] Here, the display element 208 is FFS (Fringe Field Switching). This shows an example of applying a liquid crystal element to which the ng) mode is applied. The display element 208 is an electrode It has electrode 251, electrode 252, and liquid crystal 253. Electrode 251 is insulated on electrode 252. It is provided via layer 254 and has a comb-like shape or a shape with slits. .

[0227] Furthermore, an overcoat 255 is provided to cover the colored layer 231 and the light-shielding layer 232. The overcoat 255 contains pigments such as those found in the colored layer 231 and the light-shielding layer 232, and liquid crystal 25 It has the function of suppressing diffusion to 3.

[0228] Furthermore, in the overcoat 255, insulating layer 254, and electrode 251, etc., liquid crystal 253 An alignment film for controlling the orientation of the liquid crystal 253 may be provided on the surface that comes into contact with it.

[0229] In Figure 23, the polarizing plate 131 is bonded to the substrate 71 by the adhesive layer 157. The backlight 133 is bonded to the polarizing plate 131 by an adhesive layer 158. The plate 132 is located between the substrate 72 and the substrate 30. The polarizing plate 132 is attached to the adhesive layer 155. Therefore, it is bonded to the substrate 72, and also bonded to the substrate 30 (specifically on the substrate 30) by the adhesive layer 156. It is bonded to a portion of the insulating layer 161.

[0230] The above describes liquid crystal elements to which FFS mode is applied, but there are other types as well. A (Vertical Alignment) mode, TN (Twisted Neural) tic) mode, IPS (In-Plane-Switching) mode, ASM (A xially Symmetric aligned Micro-cell) mode, OCB(Optically Compensated Birefringence) Mode, FLC (Ferroelectric Liquid Crystal) mode , AFLC (AntiFerroelectric Liquid Crystal) model Codes and the like can be used.

[0231] Furthermore, liquid crystals include thermotropic liquid crystals, low molecular weight liquid crystals, polymer liquid crystals, and ferroelectric liquid crystals. Antiferroelectric liquid crystal, Polymer Dispersed Liquid Crystal (PDLC) Liquid crystals can be used. Additionally, liquid crystals that display the blue phase can be used. It is preferable to use this method because it eliminates the need for an alignment film and provides a wide viewing angle.

[0232] [Cross-sectional configuration example 12] Figure 24 shows a cross-sectional view of a touch panel when a liquid crystal display device is applied as the display panel 70. This is an example. In the touch panel shown in Figure 24, the polarizing plate 132 is an electrode that constitutes the touch sensor. It is positioned on the visible side of the electrodes, etc. Specifically, it is located on a substrate on which electrodes 31, 32, etc. are formed. 114 is bonded to the substrate 72 by adhesive layer 152, and polarizing plate 132 is bonded to the substrate by adhesive layer 155 It is bonded to plate 114. Also, on the viewing side of polarizing plate 132, there is an adhesive layer 156. A protective substrate 130 is provided, which is bonded to the polarizing plate 132.

[0233] Using a flexible film or the like for the substrate 114 can reduce the thickness of the touch panel. This is preferable because it allows for this.

[0234] [Cross-sectional configuration example 13] Figure 25 shows an example of a cross-sectional configuration of a touch panel when a liquid crystal display device is used as the display panel. The touch panel shown in Figure 25 has electrodes and other components that constitute the touch sensor on the substrate 72. This shows an example formed on the side of 71. Specifically, the electrode 31 is on the substrate 72, and the electrode 32, wiring 42, etc., an insulating layer 161 covering them, and a bridge electrode 35 on the insulating layer 161 The following are provided. In addition, an insulating layer 233 is provided to cover the electrodes and other components that make up the touch sensor. Furthermore, a colored layer 231, a light-shielding layer 232, etc., are provided on the insulating layer 233. .

[0235] Furthermore, a polarizing plate 132 is bonded to the opposite side of the substrate 72 by an adhesive layer 155. Furthermore, the protective substrate 130 is bonded to the polarizing plate 132 by an adhesive layer 156.

[0236] This configuration allows the input device and the display panel to share the same circuit board, and the circuit board Because one side of the 72 can be used as the touch surface, the thickness of the touch panel can be further reduced. can.

[0237] [Cross-sectional configuration example 14] Figure 26 shows an example of a cross-sectional configuration of a touch panel when a liquid crystal display device is used as the display panel. The touch panel shown in Figure 26 has electrodes and other components that constitute the touch sensor on the substrate 72. This shows an example where it is provided on the side opposite to the side of 71. Specifically, the mounting of substrate 72 On the surface opposite to the surface on which the color layer 231 etc. is provided, there is a bridge electrode 35 and a bridge electrode An insulating layer 161 covers a portion of electrode 35, and electrodes 31, electrodes 32, wiring 42, etc. are placed on the insulating layer 161. A polarizing plate 132 is attached to the substrate 72 by an adhesive layer 152. A protective substrate 130 is attached to the polarizing plate 132 by an adhesive layer 156.

[0238] [Differentiation] The following describes an example of a touch panel configuration with a protective coating applied for improved reliability. ru.

[0239] The protective film can be applied to cover the exposed portion of the touch panel. For example, It can be provided to cover the surface and sides of the pair of substrates, as well as exposed sides such as adhesive layers and insulating layers. ru.

[0240] The protective film is preferably made of a material that is impermeable to moisture. For example, oxides, nitrides. Fluorides, sulfides, ternary compounds, metals, or polymers can be used.

[0241] For example, aluminum oxide, hafnium oxide, hafnium silicate, lanthanum oxide, Silicon oxide, strontium titanate, tantalum oxide, titanium oxide, zinc oxide, niobium oxide Zirconium oxide, tin oxide, yttrium oxide, cerium oxide, scandium oxide, Materials containing erbium oxide, vanadium oxide, or indium oxide can be used. ru.

[0242] For example, aluminum nitride, hafnium nitride, silicon nitride, tantalum nitride, titanium nitride, Using materials containing niobium nitride, molybdenum nitride, zirconium nitride, or gallium nitride, etc. It is possible.

[0243] For example, nitrides containing titanium and aluminum, acids containing titanium and aluminum oxides containing aluminum and zinc, sulfides containing manganese and zinc, cerium Sulfides containing erbium and strontium, oxides containing erbium and aluminum, Materials containing oxides including ttrium and zirconium can be used.

[0244] For example, the Atomic Layer Deposition (ALD) method. It is preferable to use a material that can be formed using for the protective film. A dense, crack- and pinhole-free material is preferable. A protective film with reduced defects such as blemishes or uniform thickness is produced using atomic layer deposition. It can be formed in this way. Furthermore, it can reduce damage to the processed material when forming the protective film.

[0245] For example, by forming a protective film using the ALD method, surfaces with complex uneven shapes, and A protective film with uniform thickness and few defects can be formed on the top, sides, and back surfaces of the mesh panel.

[0246] By applying such a protective film to the touch panel, impurities such as moisture can be prevented from entering the touch panel. This can suppress the diffusion of substances from the outside. Therefore, the display elements that make up the touch panel (Organic EL elements, liquid crystal elements, etc.), transistors, or wiring and electrodes, etc. This suppresses the diffusion of particles. As a result, it enables the creation of a touch panel with extremely high reliability. can.

[0247] The following shows an example of a cross-sectional configuration of a touch panel to which such a protective film has been applied.

[0248] [Cross-sectional configuration example 15] Figure 27 is a schematic cross-sectional view of the touch panel illustrated in Figure 20 when the protective film 260 is applied. That is the case.

[0249] The protective film 260 is provided to cover the exposed portion of the touch panel. Specifically, Substrate 191, adhesive layer 192, substrate 193, insulating layer 194, insulating layer 161, insulating layer 233, Adhesive layer 151, insulating layer 215, insulating layer 214, insulating layer 213, insulating layer 212, insulating layer 21 1. Part or all of the exposed surfaces of the insulating layer 94, substrate 93, adhesive layer 92, substrate 91, etc. It is covered and installed.

[0250] Furthermore, as shown in Figure 27, in the connection portion 206, the portion that overlaps with the connection layer 209 is retained It is preferable that the protective film 260 has openings. Similarly, the connecting layer 109 of the connecting portion 106 It is preferable that an opening in the protective film 260 is provided in the overlapping portion. This facilitates the electrical connection between FPC73 and connector 206, and between FPC50 and connector 106. can.

[0251] In other words, a protective film covers the area of ​​the FPC etc. other than the connection part (terminal part) where electrical connections are made. With a configuration that includes 260, the diffusion of impurities from the outside can be effectively suppressed. It is preferable.

[0252] When forming parts such as the connecting part 206 and the connecting part 106, where the protective film 260 is not provided, The protective film 260 may also be formed by physically peeling off a portion of it after it has been formed over the entire surface. This is achieved by applying masking before the protective film 260 is formed, thereby preventing the protective film 260 from being formed. Parts may be formed.

[0253] [Cross-sectional configuration example 16] Figure 28 is a schematic cross-sectional view of the touch panel illustrated in Figure 22 when the protective film 260 is applied. That is the case.

[0254] The protective film 260 is provided to cover the exposed portion of the touch panel. Specifically, Substrate 191, adhesive layer 192, insulating layer 194, insulating layer 234, insulating layer 161, insulating layer 233 Adhesive layer 151, insulating layer 213, insulating layer 212, insulating layer 211, insulating layer 94, adhesive layer 92 It is provided so as to cover part or all of the exposed surface of the substrate 91, etc.

[0255] [Cross-sectional configuration example 17] Figure 29 is a schematic cross-sectional view of the touch panel illustrated in Figure 23 when the protective film 260 is applied. This indicates that.

[0256] In the configuration shown in Figure 29, the display panel 70 to which the liquid crystal element display element 208 is applied is A protective film 260 is provided to cover it. Specifically, the substrate 72, the overcoat 255, Adhesive layer 151, insulating layer 254, insulating layer 214, insulating layer 213, insulating layer 212, insulating layer 21 1. It is provided so as to cover part or all of the exposed surface of the substrate 71, etc.

[0257] Furthermore, adhesive layers 155 and 157 are provided in contact with the protective film 260.

[0258] In this modified example, three cross-sectional configurations are shown, but this is not limited to these; see Figures 13 to 26. The protective film 260 can be applied to any of the cross-sectional configuration examples shown in the illustrations.

[0259] The above is an explanation of the cross-sectional configuration examples.

[0260] [Example of manufacturing method] Here, we will explain a method for manufacturing a flexible touch panel.

[0261] For convenience, here we will refer to the configuration including pixels and circuits, the configuration including optical components such as color filters, and The components that make up the touch sensor, including electrodes and wiring, will be called the element layer. This includes the display element, and in addition to the display element, it also includes wiring that electrically connects to the display element, pixels, and circuits. It may also be equipped with elements such as transistors.

[0262] Furthermore, here we have a support having an insulating surface on which the element layer is formed (for example, the base in Figure 22) The board 91 or substrate 191 will be referred to as a substrate.

[0263] A method for forming an element layer on a substrate having a flexible insulating surface is to directly place the element layer on the substrate. Methods for forming a contact element layer, and after forming an element layer on a rigid support substrate, the element layer and support There are two methods: one involves peeling the element layer off the substrate and transferring it to the substrate.

[0264] If the material constituting the substrate has heat resistance to the heat generated during the device layer formation process, Forming the element layer directly on the substrate is preferable because it simplifies the process. When the element layer is formed with the element fixed to the support substrate, transport within and between devices becomes easier. It is preferable because it makes things easier.

[0265] Furthermore, when using a method in which the element layer is formed on a support substrate and then transferred to a substrate, first the support A release layer and an insulating layer are laminated onto a support base, and an element layer is formed on the insulating layer. Subsequently, a support base The material and element layer are separated and transferred to the substrate. At this time, the interface between the support substrate and the peeled layer, and the peeled layer and the substrate are separated. You should select a material that will cause delamination at the interface of the marginal layer or within the delamination layer.

[0266] For example, a layer containing a high-melting-point metal material such as tungsten as a release layer, and oxidation of the said metal material Layers containing materials are stacked and used, with silicon nitride or silicon oxide nitride as the insulating layer on the release layer. It is preferable to use a layer made by stacking multiple silicon nitride oxides or the like. This is preferable because it increases the degree of freedom in the process of forming the element layer.

[0267] Delamination can be achieved by applying mechanical force, etching the delamination layer, or by using the delamination interface. The peeling may also be performed by dropping a liquid onto a portion of the surface and allowing it to penetrate the entire peeling interface. Alternatively, delamination may be performed by applying heat to the delamination interface, taking advantage of the difference in thermal expansion.

[0268] Furthermore, if peeling is possible at the interface between the support substrate and the insulating layer, a peeling layer may not be necessary. For example, using glass as the support substrate and an organic resin such as polyimide as the insulating layer By locally heating a portion of the organic resin using laser light or the like, a starting point for delamination is formed. Alternatively, delamination may be performed at the interface between the glass and the insulating layer. By placing a metal layer between the edge layers and passing an electric current through the metal layer to heat it, Delamination may be performed at the interface between the metal layer and the insulating layer. Alternatively, a support substrate and an organic resin may be used. A layer of light-absorbing material (metal, semiconductor, insulator, etc.) is placed between the insulating layers, and a laser is applied to this layer. The starting point for peeling may be formed by irradiating with light such as a light source and heating the area locally. In the method described, the insulating layer made of organic resin can be used as a substrate.

[0269] For example, in the configuration shown in Figure 22, the first release layer and the insulating layer 94 are applied sequentially on the first support substrate. After forming the first layer, an upper structure is formed. Separately from this, a second support base After forming a second delamination layer and an insulating layer 194 on the material in sequence, the structure above them is formed. Next, the first support substrate and the second support substrate are bonded together with the adhesive layer 151. Subsequently, the second support substrate and the second peeling layer are peeled off at the interface between the second peeling layer and the insulating layer 194. The delamination layer is removed, and the insulating layer 194 and the substrate 191 are bonded together with the adhesive layer 192. The first support substrate and the first release layer are removed by peeling at the interface between the release layer and the insulating layer 94. The insulating layer 94 and the substrate 91 are then bonded together with the adhesive layer 92. You can go to either side first.

[0270] The above is a description of the method for manufacturing a flexible touch panel.

[0271] Here, we have shown examples where light-emitting elements and liquid crystal elements are used as display elements. One aspect of the present invention is not limited thereto.

[0272] For example, MEMS (Micro Electro Mechanical Systems) A display device using an element such as an m) element or an electron emission element can be used. Display elements using MS include shutter-type MEMS display elements and optical interference type ME Examples include MS display elements. As for electron emission elements, carbon nanotubes are used. This is also acceptable. Alternatively, electronic paper may be used. As for electronic paper, a microencapsulation method is used. , electrophoresis, electrowetting, electronic powder fluid (registered trademark) methods, etc. are applied. The following elements can be used.

[0273] [Example of a film deposition apparatus configuration] The following describes an apparatus capable of forming a thin film constituting a touch panel according to one aspect of the present invention. This will be explained below. The apparatus exemplified below particularly includes protective film 217, protective film 260, and insulating layer 2 12. It can be suitably used for forming films such as insulating layer 213, insulating layer 94, and insulating layer 194.

[0274] [Example configuration of an ALD film deposition system] Figure 30 is a diagram illustrating the ALD (Advanced Film Deposition) apparatus.

[0275] The ALD film deposition apparatus described in this embodiment includes a film deposition chamber 310 and connected to the film deposition chamber 310. It has a control unit 312 and (see Figure 30).

[0276] The control unit 312 is a control device (not shown) that supplies control signals, and the control signals are supplied to it. It is equipped with flow controllers 312a, 312b, and 312c. If high-speed valves are used, they can be used in flow controllers. Specifically, ALD valves, etc. This allows for precise control of the flow rate. Furthermore, it controls the temperature of the flow controller and piping. It has a heating mechanism for 312 hours.

[0277] The flow controller 312a is supplied with a control signal, the first raw material, and an inert gas, and controls It has the function of supplying a first raw material or inert gas based on a signal.

[0278] The flow controller 312b is supplied with a control signal, a second raw material, and an inert gas, and controls It has the function of supplying a second raw material or inert gas based on the signal.

[0279] The flow controller 312c is supplied with a control signal and, based on the control signal, connects to the exhaust device 315. It has a continuing function.

[0280] ≪Raw material supply department≫ The raw material supply unit 311a has the function of supplying the first raw material and is connected to the flow controller 312a. It is being done.

[0281] The raw material supply unit 311b has the function of supplying a second raw material and is connected to the flow controller 312b. It is being done.

[0282] A vaporizer or heating means can be used in the raw material supply section. This allows for the use of solid raw materials. It can generate gaseous raw materials from liquid raw materials.

[0283] Furthermore, the number of raw material supply units is not limited to two; it can have three or more. Furthermore, the flow control unit should be arranged according to the number of raw material supply units.

[0284] ≪Raw materials≫ Various substances can be used as the first raw material.

[0285] For example, volatile organometallic compounds, metal alkoxides, etc., can be used as the first raw material. Cut.

[0286] Various substances that react with the first raw material can be used as the second raw material. For example, Substances that contribute to oxidation reactions, substances that contribute to reduction reactions, substances that contribute to addition reactions, decomposition reactions Substances that contribute to the reaction or substances that contribute to the hydrolysis reaction can be used as the second raw material. ru.

[0287] Furthermore, radicals can be used. For example, raw materials can be supplied to a plasma source, and the plasma These can be used. Specifically, oxygen radicals, nitrogen radicals, etc. can be used. Cut.

[0288] By the way, the second raw material used in combination with the first raw material is prepared at a temperature close to room temperature. A raw material that reacts with the material is preferred. For example, a reaction temperature of room temperature or higher and 200°C or lower is preferred. Raw materials located at a temperature between ℃ and 150℃ are preferred.

[0289] Exhaust System The exhaust device 315 has the function of exhausting and is connected to the flow controller 312c. ...a trap for capturing the discharged raw material is provided between the discharge port 314 and the flow controller 312c. This is also acceptable. In this case, it is preferable to decontaminate the exhaust using decontamination equipment.

[0290] ≪Control Unit≫ The control device provides control signals for controlling the flow controller or the heating mechanism, etc. To supply. For example, in the first step, the first raw material is supplied to the surface of the processed member 300. Then, in the second step, a second raw material is supplied to react with the first raw material. As a result, the first raw material reacts with the second raw material, and the reaction product is deposited on the surface of the processed member 300. Cut.

[0291] The amount of reaction product deposited on the surface of the processed member 300 is determined by the first step and the second step. It can be controlled by repeatedly pressing the button.

[0292] The amount of the first raw material supplied to the processed member 300 is the amount that the surface of the processed member 300 can adsorb. This is limited by the following: For example, a monolayer of the first raw material is formed on the surface of the processed member 300. By selecting conditions and reacting the second raw material with the monolayer of the first raw material that has been formed, A layer containing the reaction product of the first and second raw materials in an extremely uniform manner can be formed.

[0293] As a result, various materials can be applied to the surface of the processed member 300, which has an intricate structure on its surface. It can form a thin film. For example, a film with a thickness of 3 nm to 200 nm can be formed on the processed member 300. It is possible.

[0294] For example, the surface of the processed part 300 may have small holes called pinholes or microcracks. If small cracks or similar structures are formed, the film-forming material will seep into the interior of these cracks. It can form a membrane and fill in pinholes and microcracks.

[0295] The ALD film deposition system has extremely high step coverage for the deposited film. It has the following characteristics. In addition, the surface shape of the processed member 300 has a complex uneven shape. Even in such cases, it has the characteristic of being able to form a homogeneous film on its surface.

[0296] Furthermore, the surplus first or second raw material is removed from the film deposition chamber 310 using the exhaust device 315. It is then discharged. For example, exhaust can be performed while introducing an inert gas such as argon or nitrogen. stomach.

[0297] ≪Film forming chamber≫ The deposition chamber 310 has an inlet 313 through which the first raw material, the second raw material, and the inert gas are supplied. The apparatus also includes a first raw material, a second raw material, and an outlet 314 for discharging an inert gas.

[0298] The film deposition chamber 310 has a support section 31 that has the function of supporting one or more processed members 300. 6, a heating mechanism 317 that has a function to heat the workpiece, and loading of the workpiece 300 and It has a door 318 that has the function of opening and closing the area for removal.

[0299] For example, a resistance heater or an infrared lamp can be used in the heating mechanism 317.

[0300] The heating mechanism 317 is a machine that heats to, for example, 80°C or higher, 100°C or higher, or 150°C or higher. To possess the ability.

[0301] The heating mechanism 317 operates at, for example, room temperature or higher, preferably 50°C or higher, and preferably 150°C or higher. The workpiece 300 is heated to a certain temperature.

[0302] Furthermore, the film deposition chamber 310 is equipped with a pressure regulator and a pressure sensor.

[0303] ≪Support part≫ The support portion 316 supports one or more processed members 300. This allows for a single processing For each process, one or more processed members 300 can be coated with, for example, an insulating film.

[0304] The processed component 300 may include a substrate, a touch panel, a display device, an input device, or F A touch panel or similar device connected to a PC or other module can be used.

[0305] [Examples of membranes] The films that can be fabricated using the ALD film deposition apparatus described in this embodiment will be explained.

[0306] For example, oxides, nitrides, fluorides, sulfides, ternaries, metals, or polymers. It can form a film.

[0307] For example, aluminum oxide, hafnium oxide, aluminum silicate, hafnium silicate Licate, lanthanum oxide, silicon dioxide, strontium titanate, tantalum oxide, titanate Zinc oxide, niobium oxide, zirconium oxide, tin oxide, yttrium oxide, cerium oxide Contains um, scandium oxide, erbium oxide, vanadium oxide, or indium oxide, etc. It can deposit thin films of various materials.

[0308] For example, aluminum nitride, hafnium nitride, silicon nitride, tantalum nitride, titanium nitride, A thin film is formed using a material containing niobium nitride, molybdenum nitride, zirconium nitride, or gallium nitride, etc. can.

[0309] For example, copper, platinum, ruthenium, tungsten, iridium, palladium, iron, cobalt It can form thin films of materials containing t or nickel, etc.

[0310] For example, zinc sulfide, strontium sulfide, calcium sulfide, lead sulfide, calcium fluoride It is possible to form films containing materials such as strontium fluoride or zinc fluoride.

[0311] For example, nitrides containing titanium and aluminum, acids containing titanium and aluminum oxides containing aluminum and zinc, sulfides containing manganese and zinc, cerium Sulfides containing erbium and strontium, oxides containing erbium and aluminum, It is possible to deposit films containing oxides such as ttrium and zirconium.

[0312] ≪Aluminum oxide-containing film≫ For example, a gas obtained by vaporizing a raw material containing an aluminum precursor compound is used as the first raw material. It is possible. Specifically, trimethylaluminum (TMA, chemical formula Al(CH3) 3) or tris(dimethylamide)aluminum, triisobutylaluminum, Minium tris(2,2,6,6-tetramethyl-3,5-heptanedione), etc. It can be used.

[0313] Water vapor (chemical formula H2O) can be used as a second raw material.

[0314] Using an ALD film deposition apparatus, aluminum oxide is obtained from the first and second raw materials described above. It can form a film containing it.

[0315] <<Hafnium oxide-containing film>> For example, a gas obtained by vaporizing a raw material containing a hafnium precursor compound is used as the first raw material. This can be done. Specifically, tetrakis(dimethylamide)hafnium (TDMAH, chemical The formula is Hf[N(CH3)2]4) or tetrakis(ethylmethylamide)hafnium, etc. A raw material containing hafnium amide can be used.

[0316] Ozone can be used as a second raw material.

[0317] Using an ALD film deposition apparatus, a material containing hafnium oxide is obtained from the above-mentioned first and second raw materials. It can form a membrane.

[0318] ≪Tungsten-containing film≫ For example, WF6 gas can be used as the first raw material.

[0319] B2H6 gas or SiH4 gas can be used as a second raw material.

[0320] Using an ALD film deposition apparatus, a tungsten-containing material is obtained from the above-mentioned first and second raw materials. It can form a film.

[0321] This embodiment may be appropriately combined with other embodiments described herein, at least in part. They can be implemented together.

[0322] (Embodiment 2) This embodiment provides an example of an input device or a method for driving an input / output device according to one aspect of the present invention. Then, I will explain by referring to the drawings.

[0323] [Examples of sensor detection methods] Figure 31(A) is a block diagram showing the configuration of a mutual capacitive touch sensor. (A) shows the pulse voltage output circuit 601 and the current detection circuit 602. See Figure 31. In (A), the electrode 621 to which a pulse voltage is applied and the electrode 622 to which the change in current is detected These are shown as six wires each for X1-X6 and Y1-Y6. Also, Figure 31( A) illustrates the capacitance 603 formed by the superposition of electrodes 621 and 622. They are present. Furthermore, electrodes 621 and 622 may be interchangeable in their function.

[0324] The pulse voltage output circuit 601 is used to sequentially apply pulse voltages to the wiring X1-X6. This is a circuit. When a pulse voltage is applied to one of the wires X1-X6, capacitance 603 is formed. An electric field is generated between electrodes 621 and 622. This electric field generated between electrodes is shielded, etc. By using the ability to create a change in capacity of 603, the proximity or contact of the detected object is detected. It can be detected.

[0325] The current sensing circuit 602 detects the current in the Y1-Y6 wiring due to the change in capacitance of capacitor 603. This is a circuit for detecting changes in [the object being detected]. In the wiring of Y1-Y6, proximity to the object being detected, or [the object being detected] The detected current value does not change when there is no contact, but when the object being detected is nearby or in contact with it... When the capacitance decreases, a change in the current value is detected. Note that current detection is performed by integrating multiple times. This can be done using roads or similar means.

[0326] Next, Figure 31(B) shows the input of the mutual capacitive touch sensor shown in Figure 31(A). The timing chart of the output waveform is shown. Figure 31(B) shows the timing of each matrix in one frame period. The system will detect the object to be detected. Also, in Figure 31(B), the case where no object to be detected is detected ( This shows two cases: one where the object to be detected is not touched, and another where the object to be detected is touched. Regarding the wiring of Y1-Y6, the waveforms shown represent the voltage values ​​corresponding to the detected current values. Yes, they are.

[0327] A pulse voltage is applied sequentially to the wiring of X1-X6, and Y1- The waveform changes in the Y6 wiring. If there is no proximity or contact with the detected object, X1-X6 The waveforms of Y1-Y6 change uniformly in response to changes in the voltage of the wiring. Meanwhile, when the object to be detected is nearby... Alternatively, at the point of contact, the current value decreases, and therefore the waveform of the corresponding voltage value also changes. ru.

[0328] In this way, by detecting changes in volume, it is possible to detect the proximity or contact of the object being detected. ru.

[0329] Furthermore, the pulse voltage output circuit 601 and the current detection circuit 602 are integrated into a single IC. It is preferable to implement it in a touch panel or on a circuit board inside the casing of an electronic device. Furthermore, when a touch panel is made flexible, the parasitic capacitance increases in the bent portion. However, there is a risk that the noise will have a significant impact, so it is better to use a device that is less susceptible to noise. It is preferable to use an IC to which a dynamic method is applied. For example, the signal-to-noise ratio (S / N ratio). It is preferable to use an IC to which a driving method that enhances ) is applied.

[0330] Furthermore, in Figure 31(A), only a capacitor 603 is provided at the wiring intersection as a touch sensor. The configuration of a symmetric matrix type touch sensor was shown, but it is equipped with transistors and capacitors. An active-matrix type touch sensor may also be used. Figure 32 shows an active-matrix type This shows an example of a sensor circuit included in a touch sensor.

[0331] The sensor circuit consists of capacitor 603, transistor 611, transistor 612, and transistor It has a transistor 613. When a signal G2 is applied to the gate of transistor 613, the source or A voltage VRES is applied to one of the drains, and the other is connected to one electrode and the transistor with capacitance 603. Electrically connect to the gate of transistor 611. Transistor 611 is either source or drain. One end is electrically connected to either the source or drain of transistor 612, and the other end is connected to a voltage V SS is given. Transistor 612 is given signal G1 at its gate, source or drain The other end of the input is electrically connected to the wiring ML. Voltage VSS is applied to the other electrode of capacitance 603. It can be obtained.

[0332] Next, I will explain the operation of the sensor circuit. First, the signal G2 is transistor 613 When a potential is applied that turns on the transistor, the gate of transistor 611 is connected. A potential corresponding to the voltage VRES is applied to the n. Then, the transistor is used as the signal G2. By applying a potential that turns off 613, the potential at node n is maintained.

[0333] Next, the capacity of capacity 603 changes due to the proximity or contact of a detected object such as a finger. Consequently, the potential at node n changes from VRES.

[0334] The read operation applies a potential to signal G1 that turns on transistor 612. The current flowing through transistor 611, that is, the current flowing through wiring ML, is determined by the potential of do n. It changes. By detecting this current, the proximity or contact of the object being detected can be detected.

[0335] For transistors 611, 612, and 613, the channel is It is preferable to use a transistor in which an oxide semiconductor is applied to the semiconductor layer formed. By applying such a transistor to transistor 613, the potential of node n This can be maintained for a long period of time, and the operation of resupplying VRES to node n (refresh operation) This can reduce the frequency of )

[0336] [Example configuration of an in-cell type touch panel] In the above, the electrodes constituting the touch sensor are placed on a substrate different from the substrate on which the display elements, etc., are provided. The example shown is formed on a board, but a touch sensor can be configured on a substrate on which display elements and the like are provided. The configuration may include one or both of the pair of electrodes.

[0337] The following describes the configuration of a touch panel in which a touch sensor is incorporated into a display unit having multiple pixels. Let's explain an example. Here, a liquid crystal element is applied as the display element provided in the pixel. Here is an example.

[0338] Figure 33(A) shows one of the pixel circuits provided in the display section of the touch panel illustrated in this configuration example. This is an equivalent circuit diagram for the section.

[0339] Each pixel has at least a transistor 3503 and a liquid crystal element 3504. Wiring 3501 is connected to the gate of inverter 3503, and wiring 35 is connected to either the source or the drain. 02 is electrically connected to each other.

[0340] The pixel circuit consists of multiple wires extending in the X direction (for example, wire 3510_1, wire 3510 _2) and a plurality of wires (e.g., wire 3511) extending in the Y direction, which are relative to each other They are arranged intersectingly, and a volume is formed between them.

[0341] Furthermore, among the pixels provided in the pixel circuit, some adjacent pixels are provided together. One electrode of the liquid crystal element is electrically connected, forming a single block. The lock consists of island-shaped blocks (for example, block 3515_1, block 3515_2) and They are classified into two types: a linear block extending in the Y direction (for example, block 3516), and a linear block extending in the Y direction. It is done. Note that Figure 33 shows only a part of the pixel circuit, but in reality there are two types. The blocks are repeatedly arranged in the X and Y directions.

[0342] The wiring 3510_1 (or 3510_2) extending in the X direction is connected to the island-shaped block 351 It is electrically connected to 5_1 (or block 3515_2). Note that X is not shown in the diagram. The wiring 3510_1 extending in the direction is discontinuous along the X direction via a linear block. Multiple island-shaped blocks 3515_1 arranged in the configuration are electrically connected. The existing wiring 3511 is electrically connected to the linear block 3516.

[0343] Figure 33(B) shows multiple wirings 3510 extending in the X direction and multiple wirings extending in the Y direction. This is an equivalent circuit diagram showing the connection configuration of line 3511. Each of the wirings 3510 extending in the X direction An input voltage or common potential can be input to it. Also, each of the wiring 3511 extending in the Y direction Each of these can be connected to the ground potential, or to the wiring 3511 and the detection circuit.

[0344] The operation of the touch panel described above will be explained below using Figures 34(A) and 34(B).

[0345] Here, one frame period is divided into a writing period and a detection period. The writing period is for pixels. This is the period for writing image data to the circuit, and wiring 3501 (gate line, or scan line and The following are selected sequentially. On the other hand, the detection period is the period during which sensing is performed by the touch sensor. Between these points, the wiring 3510 extending in the X direction is sequentially selected, and the input voltage is applied.

[0346] Figure 34(A) is an equivalent circuit diagram during the writing period. During the writing period, the X direction A common potential is input to both the wiring 3510 extending in the direction and the wiring 3511 extending in the Y direction. It can be done.

[0347] Figure 34(B) is an equivalent circuit diagram at a certain point in the detection period. During the detection period, the Y direction Each of the wirings 3511 extending in the direction is electrically connected to the detection circuit. Also, extending in the X direction Of the 3510 wires, the selected one receives the input voltage, while the others do not. A common potential is input.

[0348] Note that the drive methods exemplified here include not only the in-cell method but also the touch panel exemplified above. It can also be applied to the engine and can be used in combination with the method shown in the above example of a driving method.

[0349] In this way, the image writing period and the period during which sensing is performed by the touch sensor are determined independently. It is preferable to install them in an upright position. This prevents touch caused by noise during pixel writing. This can suppress the decrease in sensor sensitivity.

[0350] This embodiment may be appropriately combined with other embodiments described herein, at least in part. They can be implemented together.

[0351] (Embodiment 3) In this embodiment, an electronic device and a lighting device according to one aspect of the present invention will be described with reference to the drawings. I will reveal it.

[0352] An input device, display device, or input / output device according to one aspect of the present invention can be used to connect electronic equipment and lighting equipment. A device can be created. Using an input device, display device, or input / output device according to one embodiment of the present invention, a curve can be made. It has a surface and can be used to manufacture highly reliable electronic devices and lighting devices. In addition, the input of one embodiment of the present invention Using a device, display device, or input / output device, flexible and reliable electronic equipment and lighting A lighting device can be manufactured. Furthermore, using an input device or input / output device according to one embodiment of the present invention, a tap This technology allows for the creation of electronic devices and lighting equipment with improved detection sensitivity and accuracy of sensor-based sensors.

[0353] Examples of electronic devices include television equipment (also known as televisions or television receivers). (e.g., computer monitors, digital cameras, digital video cameras, digital) Photo frames, mobile phones (also called mobile phones or mobile phone devices), portable game consoles, Examples include personal digital assistants, audio playback devices, and large-scale game machines such as pachinko machines.

[0354] Furthermore, if an electronic device or lighting device according to one aspect of the present invention is flexible, it can be used inside houses and buildings. It can also be incorporated along curved surfaces of walls or exterior walls, or the interior or exterior of automobiles. be.

[0355] Furthermore, an electronic device according to one aspect of the present invention may have a secondary battery and contactless power transmission It is preferable to be able to use this to charge the secondary battery.

[0356] Examples of secondary batteries include lithium polymer batteries (lithium-ion batteries) that use a gel-like electrolyte. Lithium-ion secondary batteries such as polymer batteries, lithium-ion batteries, nickel-metal hydride batteries Pond, nickel-cadmium battery, organic radical battery, lead-acid battery, air rechargeable battery, nickel-zinc battery, silver-sulfide battery Lead-acid batteries are one example.

[0357] An electronic device according to one aspect of the present invention may have an antenna. The antenna receives a signal. This allows the display unit to show images, information, etc. Also, electronic devices can use secondary batteries. If it has this feature, the antenna may be used for contactless power transmission.

[0358] Figures 35(A), (B), (C1), (C2), (D), and (E) show the curved display section 70. An example of an electronic device having 00 is shown. The display unit 7000 has a curved display surface. It can display information along a curved display surface. Furthermore, the display unit 7000 is flexible. It's fine if you do that.

[0359] The display unit 7000 is manufactured using a display device or input / output device, etc., according to one embodiment of the present invention. According to one aspect of the present invention, a highly reliable electronic device equipped with a curved display unit is provided. Cut.

[0360] Figure 35(A) shows an example of a mobile phone. The mobile phone 7100 has a casing 7101 and a display Unit 7000, operation button 7103, external connection port 7104, speaker 7105, microphone It has 7106, etc.

[0361] The mobile phone 7100 shown in Figure 35(A) is equipped with a touch sensor on the display unit 7000. All operations, such as making a phone call or typing text, are displayed using your finger or stylus. This can be done by touching part 7000.

[0362] Furthermore, the power can be turned ON or OFF by operating the operation button 7103, and the display unit 7000 You can switch the type of image displayed. For example, from the email composition screen, You can switch to the menu screen.

[0363] Figure 35(B) shows an example of a television system. The television system 7200 consists of a housing 7 The display unit 7000 is incorporated into 201. Here, the stand 7203 connects to the housing 7 This shows the composition that supported 201.

[0364] The operation of the television device 7200 shown in Figure 35(B) is performed using the operating system provided on the housing 7201. This can be done via a switch or a separate remote control unit 7211. Alternatively, the display unit 70 00 may be equipped with a touch sensor, and can be operated by touching the display unit 7000 with a finger, etc. This is also fine. The remote control unit 7211 displays the information output from the remote control unit 7211. It may have a display unit. Operation keys or touch controls provided on the remote control unit 7211. The control panel allows you to operate the channel and volume, and the information is displayed on the display unit 7000. You can manipulate the video.

[0365] The television system 7200 will consist of a receiver, modem, and other components. This allows for the reception of general television broadcasts. Furthermore, it enables wired or wireless reception via a modem. By connecting to a communication network, one-way (sender to receiver) or two-way communication is possible. It is also possible to communicate information (between a sender and a receiver, or between receivers, etc.).

[0366] Figures 35(C1), (C2), (D), and (E) show examples of mobile information terminals. The terminal has a housing 7301 and a display unit 7000. Furthermore, it has operation buttons and an external connection port. It may have a speaker, microphone, antenna, or battery, etc. Display unit 7000 It is equipped with a touch sensor. The mobile information terminal is operated by touching the display 700 with a finger or stylus. This can be done by touching 0.

[0367] Figure 35(C1) is a perspective view of the mobile information terminal 7300, and Figure 35(C2) is a perspective view of the mobile information Figure 35(D) is a top view of terminal 7300. Figure 35(E) is a perspective view of the personal digital assistant 7320.

[0368] The portable information terminal illustrated in this embodiment may be, for example, a telephone, a notebook, or an information viewing device. It has one or more selected functions. Specifically, it can be used as a smartphone. It is possible. The portable information terminal exemplified in this embodiment is, for example, a mobile phone, an electronic mail Types of activities include reading and creating documents, playing music, internet communication, and playing computer games. It can run various applications.

[0369] The personal digital assistant (PDAs) 7300, 7310, and 7320 are capable of displaying text and images. Image information can be displayed on multiple surfaces. For example, as shown in Figures 35(C1) and (D), 3 Two operation buttons 7302 are displayed on one side, and information 7303, indicated by a rectangle, is displayed on the other side. Figures 35(C1) and (C2) show examples where information is displayed on the upper side of a mobile device. Figure 35(D) shows an example where information is displayed on the side of a mobile information terminal. Information may be displayed on the last three or more sides; in Figure 35(E), information 7304 and information 7305 are shown. This shows an example where information 7306 is displayed on different sides.

[0370] For example, notifications from social networking services (SNS) are an example of this type of information. , a display indicating incoming emails or phone calls, the subject or sender name of emails, etc. This includes the date, time, battery level, and antenna signal strength. Alternatively, the information may be displayed. Instead of information, you may display operation buttons, icons, or other elements in the same location.

[0371] For example, a user of the personal digital assistant 7300 would carry the personal digital assistant 7300 in the breast pocket of their clothing. With the device stored, you can check its display (information 7303 in this case).

[0372] Specifically, the phone number or name of the caller of the incoming call is recorded on the mobile information terminal 7300. It will be displayed in a position where it can be observed from above. The user will take the 7300 personal information terminal out of their pocket. Without having to step out, you can check the display and decide whether or not to answer the call.

[0373] Figures 35(F) to (H) show an example of a lighting device having a curved light-emitting section.

[0374] The light-emitting parts of each lighting device shown in Figures 35(F) to (H) are a display device according to one aspect of the present invention. or manufactured using an input / output device, etc. According to one aspect of the present invention, a curved light-emitting part is provided. Furthermore, we can provide highly reliable lighting equipment.

[0375] The lighting device 7400 shown in Figure 35(F) includes a light-emitting section 7402 having a wave-shaped light-emitting surface. Therefore, it is a lighting fixture with a highly aesthetic design.

[0376] The light-emitting section 7412 of the lighting device 7410 shown in Figure 35(G) has two convexly curved parts The light-emitting parts are arranged symmetrically. Therefore, the lighting device 7410 is the central component. It can illuminate in all directions.

[0377] The lighting device 7420 shown in Figure 35(H) includes a concavely curved light-emitting section 7422. Therefore, in order to concentrate the light emitted from the light-emitting unit 7422 onto the front of the lighting device 7420, This is suitable for brightly illuminating a wide area. Furthermore, this shape creates shadows. It has the effect of making it difficult to do.

[0378] Furthermore, the light emission provided by each of the lighting devices 7400, 7410, and 7420 The part may be flexible. The light-emitting part is fixed with a plastic material or a movable frame or other material. Furthermore, the light-emitting surface of the light-emitting part may be configured to be freely curved according to the application.

[0379] Lighting devices 7400, 7410, and 7420 each have an operating switch. It has a base portion 7401 equipped with a component 7403, and a light-emitting portion supported by the base portion 7401.

[0380] Here, we have provided an example of a lighting device in which the light-emitting part is supported by a base, but the light-emitting part The enclosure equipped with this feature can also be fixed to the ceiling or suspended from the ceiling. Because the light surface can be curved, the light-emitting surface can be curved into a concave shape to illuminate a specific area. It can illuminate a specific area, or the light-emitting surface can be curved into a convex shape to brightly illuminate the entire room.

[0381] Figures 36(A1), (A2), (B) to (I) show a flexible display unit 7001. An example of a mobile information terminal is shown.

[0382] The display unit 7001 is manufactured using a display device or input / output device, etc., according to one embodiment of the present invention. For example, a display device that can be bent with a radius of curvature of 0.01 mm or more and 150 mm or less. Alternatively, input / output devices, etc., can be applied. Also, even if the display unit 7001 is equipped with a touch sensor Often, the portable information terminal can be operated by touching the display unit 7001 with a finger or the like. One aspect of the present invention This makes it possible to provide a highly reliable electronic device equipped with a flexible display unit.

[0383] Figure 36(A1) is a perspective view showing an example of a portable information terminal, and Figure 36(A2) is a mobile This is a side view showing an example of an information terminal. The portable information terminal 7500 consists of a housing 7501 and a display unit 7 It includes 001, a drawer member 7502, an operation button 7503, etc.

[0384] The portable information terminal 7500 has a flexible display unit wound in a roll inside the housing 7501. It has 7001.

[0385] Furthermore, the 7500 portable information terminal is capable of receiving video signals via its built-in control unit, and it can receive The generated video can be displayed on the display unit 7001. Furthermore, the portable information terminal 7500 has an internal battery. It is housed there. Furthermore, the 7501 housing has terminals for connecting connectors, allowing for video signals and electrical signals. The system may also be configured to supply power directly from an external source via a wire.

[0386] Additionally, the 7503 control button allows you to turn the power on and off, and switch the displayed image. It is possible to perform the following actions. Note that in Figures 36(A1), (A2), and (B), mobile information terminals This example shows the operation button 7503 placed on the side of the 7500, but it is not limited to this, and mobile information It may be placed on the same side as the display surface of the terminal 7500 (the front side) or on the back side.

[0387] Figure 36(B) shows the display unit 7001 pulled out by the pull-out member 7502. This shows the band information terminal 7500. In this state, video can be displayed on the display unit 7001. Figure 36(A1) shows a state where part of section 7001 is rolled up, and the display section 7001 is pulled out. The portable information terminal 7500 is different from the state shown in Figure 36(B) when pulled out by member 7502. The configuration may also be such that the display is shown. For example, when the state is as shown in Figure 36(A1), the display unit 700 By hiding the rolled-up portion of item 1, the power consumption of the mobile information terminal 7500 is reduced. It can be lowered.

[0388] Furthermore, when the display unit 7001 is pulled out, the display surface of the display unit 7001 becomes flat. To secure it, a reinforcing frame may be provided on the side of the display unit 7001.

[0389] In addition to this configuration, a speaker is installed in the enclosure, and the audio signal received along with the video signal is used. It would also be possible to configure it to output audio.

[0390] Figures 36(C) to (E) show an example of a foldable portable information terminal. Figure 36(C) Now, in the unfolded state, as shown in Figure 36(D), either the unfolded or folded state... In the state in between the two states, Figure 36(E) shows the folded state of the portable information terminal 760. It indicates 0. The 7600 portable information terminal is highly portable when folded, and when unfolded... Therefore, the seamless, wide display area provides excellent readability.

[0391] The display unit 7001 is supported by three housings 7601 connected by hinges 7602. It is. By bending the two housings 7601 via the hinge 7602, portable information The 7600 device can be reversibly transformed from an unfolded state to a folded state.

[0392] Figures 36(F) and (G) show an example of a foldable portable information terminal. Figure 36(F) Now, in the folded state where the display unit 7001 is on the inside, as shown in Figure 36(G), the display unit This shows the 7650 mobile information terminal in a folded state with 7001 on the outside. The terminal 7650 has a display unit 7001 and a non-display unit 7651. When not in use, the display unit 7001 is folded inwards. It can prevent dirt and scratches.

[0393] Figure 36(H) shows an example of a flexible portable information terminal. Portable information terminal 7700 is It has a housing 7701 and a display unit 7001. Furthermore, it has an input means, a button 7703a 7703b, speaker 7704a, 7704b which is an audio output means, external connection port 7 It may also have 705, microphone 7706, etc. Furthermore, the portable information terminal 7700 is flexible A battery 7709 having the following characteristics can be installed. The battery 7709 is, for example, heavy with the display unit 7001. You can also arrange them horizontally.

[0394] The housing 7701, the display unit 7001, and the battery 7709 are flexible. Therefore, To curve the personal digital assistant 7700 into a desired shape, or to twist the personal digital assistant 7700 It is easy to add. For example, the portable information terminal 7700 has a display unit 7001 on the inside or It can be folded so that the outer side faces outwards for use. Alternatively, the 7700 portable information terminal can be rolled up. It can also be used in this state. In this way, the housing 7701 and the display unit 7001 can be freely used. Because it can be deformed, the 7700 mobile information terminal will not be damaged if it is dropped or subjected to unintended external force. Even in that case, it has the advantage of being less prone to damage.

[0395] Furthermore, because the 7700 portable information terminal is lightweight, the top of the 7701 casing can be held with a clip or similar. It can be used by holding it and hanging it, or by fixing the 7701 enclosure to a wall with magnets or the like. It can be used conveniently in a variety of situations.

[0396] Figure 36(I) shows an example of a wristwatch-type personal information terminal. The personal information terminal 7800 is a van. It has a dome 7801, a display unit 7001, input / output terminals 7802, operation buttons 7803, etc. The 7801 has the function of a housing. The portable information terminal 7800 has flexibility. It can be equipped with the battery 7805. The battery 7805 is used, for example, in the display unit 7001 and the van. It may be placed on top of D7801.

[0397] The band 7801, the display unit 7001, and the battery 7805 are flexible. Furthermore, the 7800 portable information terminal can be easily bent into a desired shape.

[0398] The 7803 control button is used for time setting, power on / off, wireless communication on, and more. Various functions such as operation, activation and deactivation of silent mode, and activation and deactivation of power saving mode. It can be made to hold it. For example, the operating system built into the personal digital assistant 7800 The system also allows you to freely configure the function of the control button 7803.

[0399] Furthermore, by touching the icon 7804 displayed on the display unit 7001 with your finger, etc., the application You can start the application.

[0400] Furthermore, the 7800 portable information terminal is capable of performing short-range wireless communication in accordance with communication standards. For example, by communicating with a wireless headset, hands-free calls can be made. It is also possible.

[0401] Furthermore, the personal information terminal 7800 may also have an input / output terminal 7802. If 802 is present, data can be exchanged directly with other information terminals via a connector. This is possible. Furthermore, charging can also be performed via the input / output terminal 7802. Note that this implementation... The charging operation of the portable information terminal exemplified by its form is performed by contactless power transmission without using input / output terminals. You may go.

[0402] Figure 37(A) shows the exterior of the 9700 automobile. Figure 37(B) shows the driver's seat of the 9700 automobile. This shows that the automobile 9700 consists of the body 9701, wheels 9702, dashboard 9703, and It has Ito 9704, etc. A display device or input / output device according to one aspect of the present invention is an automobile 97 It can be used in the display unit 00, etc. For example, the display unit 9710 shown in Figure 37(B) A display device or input / output device according to one aspect of the present invention can be provided in the display unit 9715. .

[0403] Display unit 9710 and display unit 9711 are display devices installed on the windshield of an automobile. or an input / output device. A display device or input / output device according to one aspect of the present invention is a display device, Alternatively, by fabricating the electrodes of the input / output device from a light-transmitting conductive material, This refers to a display device or input / output device that is transparent, allowing the other side to be seen through, or in other words, a see-through state. This is possible. If it is a see-through display device or input / output device, then the automobile 9700 It does not obstruct the driver's view while driving. Therefore, one embodiment of the present invention, a display device, or input The output device can be installed on the windshield of the automobile 9700. When a power device is equipped with a display device or a transistor for driving an input / output device. This includes organic transistors using organic semiconductor materials and transistors using oxide semiconductors. Transistors with light-transmitting properties are preferable.

[0404] The display unit 9712 is a display device or input / output device provided in the pillar portion. For example By displaying images from the imaging means installed on the vehicle body on the display unit 9712, - It can compensate for the obstructed view. The display unit 9713 is a display provided on the dashboard. It is a device or input / output device. For example, an image from an imaging means installed on the vehicle body is displayed on a display unit. By projecting onto the 9713, the view obstructed by the dashboard can be compensated for. By displaying images from imaging devices installed on the outside of the vehicle, blind spots can be compensated for. This can enhance safety. Furthermore, by displaying images that complement the unseen areas... This allows for a more natural and seamless safety check.

[0405] Figure 37(C) shows the interior of a car with bench seats for both the driver and passenger. The display unit 9721 is a display device or input / output device provided in the door section. For example, by displaying images from an imaging device installed on the vehicle body on the display unit 9721, It can compensate for the view obstructed by the door. Also, the display unit 9722 is a display provided on the handle. It is a device or input / output device. The display unit 9723 is located in the center of the seat surface of the bench seat. It is a display device or input / output device. The display device or input / output device is installed on the backrest or other part, and the display device and It can also be used as a seat heater, with the heat generated by the input / output device as the heat source.

[0406] Display unit 9714, display unit 9715, or display unit 9722 displays navigation information, speed The odometer, tachometer, mileage, fuel level, gear status, air conditioning settings, etc. It can provide various other types of information. Furthermore, the display items and layout shown on the display unit can be customized. It can be changed as needed to suit the user's preferences. Note that the above information is displayed on display units 9710 to 9710. 713, display unit 9721, and display unit 9723 can also display. Display unit 9715, display units 9721 to 9723 can also be used as lighting devices. Yes. Also, display units 9710 to 9715 and 9721 to 9723 are It can also be used as a heating device.

[0407] The display unit to which the display device or input / output device according to one aspect of the present invention is applied may be planar. i. In this case, the display device or input / output device according to one aspect of the present invention does not have a curved surface or flexibility. Any configuration is acceptable.

[0408] The portable game console shown in Figure 37(D) consists of a casing 901, a casing 902, a display unit 903, and a display unit. Unit 904, microphone 905, speaker 906, operation key 907, stylus 908 It has the following characteristics.

[0409] The portable game console shown in Figure 37(D) has two display units (display unit 903 and display unit 904). It has. Furthermore, the number of display units in an electronic device according to one aspect of the present invention is not limited to two, but is 1 It may be one or three or more. When an electronic device has multiple display units, at least The other display unit may have a display device or input / output device according to one aspect of the present invention.

[0410] Figure 37(E) shows a notebook personal computer, comprising a casing 921, a display unit 922, It includes a keyboard 923, a pointing device 924, and the like.

[0411] A display device or input / output device according to one aspect of the present invention can be applied to the display unit 922.

[0412] Figure 38(A) shows the external appearance of camera 8000. Camera 8000 consists of housing 8001, front It includes an indicator unit 8002, an operation button 8003, a shutter button 8004, a coupling unit 8005, etc. Additionally, the camera 8000 can be fitted with the lens 8006.

[0413] The coupling section 8005 has electrodes and, in addition to the viewfinder 8100 described later, a strobe device. It can connect to things like this.

[0414] Here, we refer to it as camera 8000, and the lens 8006 can be removed from the housing 8001 and replaced. While a functional configuration was chosen, the lens 8006 and the housing could also be integrated.

[0415] By pressing the shutter button 8004, an image can be taken. Also, the display unit 8002 is It functions as a touch panel, and can also capture images by touching the display unit 8002. It is possible.

[0416] A display device or input / output device according to one aspect of the present invention can be applied to the display unit 8002.

[0417] Figure 38(B) shows an example of the camera 8000 with the viewfinder 8100 attached. They are doing it.

[0418] The viewfinder 8100 has a housing 8101, a display unit 8102, buttons 8103, etc. .

[0419] The housing 8101 has a coupling portion that engages with the coupling portion 8005 of the camera 8000. The viewfinder 8100 can be attached to the camera 8000. Furthermore, the connection point has The device has electrodes, and displays images and other data received from the camera 8000 via these electrodes on the display unit 8102. It can be demonstrated.

[0420] Button 8103 functions as a power button. Button 8103 controls the display. You can switch the display of 8102 on or off.

[0421] A display device or input / output device according to one aspect of the present invention can be applied to the display unit 8102.

[0422] Note that in Figures 38(A) and 38(B), the camera 8000 and the viewfinder 8100 are connected by separate electronics. The device is configured to allow for the attachment and detachment of these components, but the housing 8001 of the camera 8000 is configured with the present invention. A viewfinder may be built in which a display device or input / output device of one form is provided.

[0423] Figure 38(C) shows the external appearance of the head-mounted display 8200.

[0424] The head-mounted display 8200 consists of a mounting part 8201, lenses 8202, and a main body 82 03, it has a display unit 8204, a cable 8205, etc. Also, the mounting part 8201 has It has a built-in 8206 battery.

[0425] Cable 8205 supplies power from battery 8206 to main unit 8203. Main unit 82 03 is equipped with a wireless receiver and displays video information such as received image data on the display unit 8204. It can also detect the movement of the user's eyeballs and eyelids using a camera located on the main unit 8203. By capturing the user's perspective and calculating the coordinates of their viewpoint based on that information, the user's viewpoint is determined. It can be used as an input method.

[0426] Furthermore, the attachment portion 8201 may be provided with multiple electrodes in positions that come into contact with the user. The main unit 8203 detects the current flowing through the electrodes in response to the user's eye movements, It may also have a function to recognize the user's viewpoint. Furthermore, it may detect the current flowing through the electrode. By doing so, it may have a function to monitor the user's pulse. Also, the attachment part 820 1 may have various sensors such as a temperature sensor, a pressure sensor, and an acceleration sensor. The display unit 8204 may also have a function to display the user's biometric information. The unit detects movement and changes the image displayed on the display unit 8204 according to that movement. That's good too.

[0427] A display device or input / output device according to one aspect of the present invention can be applied to the display unit 8204.

[0428] This embodiment may be appropriately combined with other embodiments described herein, at least in part. They can be implemented together. [Explanation of Symbols]

[0429] 10 Input devices 11 columns 12 columns 13 columns 14 columns 21 Straight section 22 Straight section 30 circuit boards 31 electrode 31a electrode 31b Electrode 31c electrode 32 electrodes 32a electrode 32b electrode 32c electrode 33 Connection part 34 Connection part 35 Bridge electrodes 39 Dummy electrodes 40 pixels 41 Wiring 42 Wiring 50 FPC 50a FPC 50b FPC 51 IC 60 display elements 60B display element 60G Display Elements 60R display elements 60Y display buttons 61 Conductive film 62 Conductive film 63 Conductive film 64 nanowires 70 Display Panel 71 circuit boards 72 circuit boards 73 FPC 74 IC 81 Display section 82 Drive Circuit 83 Wiring 86 Intersection 87 scan lines 90 Intersection 91 circuit boards 92 Adhesive layer 93 circuit boards 94 Insulating layer 100 Touch Panels 106 Connection part 106a Connection part 106b Connection 109 Connecting Layer 109a Connecting Layer 109b Connecting Layer 111 circuit board 112 circuit boards 113 circuit boards 114 circuit boards 130 Protective board 131 Polarizing plate 132 Polarizing plate 133 Backlight 151 Adhesive layer 152 Adhesive layer 153 Adhesive layer 154 Adhesive layer 155 Adhesive layer 156 Adhesive layer 157 Adhesive layer 158 Adhesive layer 161 Insulating layer 191 circuit board 192 Adhesive layer 193 circuit boards 194 Insulating layer 201 Transistors 202 transistors 203 Transistors 205 Capacitive element 206 Connection part 207 Wiring 208 display elements 209 Connecting Layer 211 Insulating layer 212 Insulating layer 213 Insulating layer 214 Insulating layer 215 Insulating layer 216 Spacer 217 Protective film 221 Electrode 222 EL layer 223 Electrode 224 Optical adjustment layer 231 Colored layer 232 Light blocking layer 233 Insulating layer 234 Insulating layer 251 Electrode 252 Electrode 253 LCD 254 Insulating layer 255 Overcoat 260 Protective film 300 processed parts 310 Deposition chamber 311a Raw material supply section 311b Raw material supply section 312 Control Unit 312a flow controller 312b flow controller 312c flow controller 312h heating mechanism 313 Inlet 314 Outlet 315 Exhaust system 316 Support part 317 Heating mechanism 318 Door 601 Pulse voltage output circuit 602 Current sensing circuit 603 capacity 611 transistors 612 transistors 613 Transistors 621 Electrode 622 Electrode 901 cabinet 902 cabinet 903 Display section 904 Display section 905 Microphone 906 speaker 907 Operation Keys 908 Stylus 921 cabinet 922 Display section 923 Keyboard 924 Pointing Devices 3501 Wiring 3502 Wiring 3503 Transistor 3504 Liquid crystal element 3510 Wiring 3510_1 Wiring 3510_2 Wiring 3511 Wiring 3515_1 block 3515_2 block 3516 blocks 7000 Display 7001 Display section 7100 Mobile Phone 7101 enclosure 7103 Operation Buttons 7104 External connection port 7105 Speaker 7106 Microphone 7200 Television equipment 7201 enclosure 7203 Stand 7211 Remote Control Unit 7300 Mobile Information Terminal 7301 enclosure 7302 Operation Buttons 7303 Information 7304 Information 7305 Information 7306 Information 7310 Mobile Information Terminal 7320 Mobile Information Terminal 7400 Lighting device 7401 Daibu 7402 Light-emitting part 7403 Operation switch 7410 Lighting device 7412 Light-emitting part 7420 Lighting device 7422 Light-emitting part 7500 Mobile Information Terminals 7501 enclosure 7502 component 7503 Operation Buttons 7600 Mobile Information Terminal 7601 enclosure 7602 Hinge 7650 Mobile Information Terminal 7651 Hidden part 7700 Mobile Information Terminal 7701 enclosure 7703a button 7703b button 7704a speaker 7704b speaker 7705 External connection port 7706 Mike 7709 Battery 7800 Mobile Information Terminal 7801 Band 7802 Input / output terminal 7803 Operation Buttons 7804 Icon 7805 Battery 8000 Camera 8001 enclosure 8002 Display section 8003 Operation Buttons 8004 Shutter button 8005 Joint 8006 Lens 8100 Finder 8101 enclosure 8102 Display section 8103 button 8200 Head-Mounted Display 8201 Mounting part 8202 Lens 8203 Main Unit 8204 Display section 8205 Cable 8206 Battery 9700 automobiles 9701 Car body 9702 Wheel 9703 Dashboard 9704 Light 9710 Display section 9711 Display section 9712 Display section 9713 Display section 9714 Display section 9715 Display section 9721 Display section 9722 Display section 9723 Display section

Claims

[Claim 1] A touch panel having first to fourth conductive layers and a display section, The display unit has a contour that is parallel to a first direction and a contour that is parallel to a second direction intersecting the first direction. The display unit has a plurality of display elements, The plurality of display elements are arranged periodically in the first direction and the second direction. The first to fourth conductive layers and the display portion have overlapping portions. The first conductive layer and the second conductive layer are arranged side by side in the first direction. The third conductive layer and the fourth conductive layer are arranged side by side in the first direction. The first conductive layer and the third conductive layer are arranged side by side in the second direction. The second conductive layer and the fourth conductive layer are arranged side by side in the second direction. The first conductive layer and the fourth conductive layer are electrically connected by the first connection portion. The second conductive layer and the third conductive layer are electrically connected by the second connection portion. The first connection part and the second connection part have portions that intersect each other. Touch panel.

Images