Jig device for supporting the attachment and detachment of heater units, heater unit attachment and detachment system, and high-pressure annealing device for attaching and detaching heater units.

Abstract

To solve the problems of the conventional technology described above, we present a method that allows the heater unit of a high-pressure annealing device to be raised and lowered below the external chamber while being supported by a jig device, and that allows the heater unit to be attached to or detached from the high-pressure annealing device. [Solution] A jig device is configured to support the attachment and detachment of a heater unit, comprising a heater support plate on which a heater unit is mounted and which supports the heater unit, and a jig support plate which is in contact with and supported by the door of a high-pressure annealing device or the door support arm of a lifting device, wherein the heater unit is mounted and moves up and down through the lifting device.

Description

Technical Field

[0001] The present invention relates to a jig device for supporting attachment and detachment of a heater unit, a heater unit attachment / detachment system, and a high-pressure annealing apparatus with a detachable heater unit. More specifically, the present invention relates to a technique for lifting and lowering a heater unit of a high-pressure annealing apparatus below an external chamber while supporting the heater unit through a jig device, and attaching or separating the heater unit to / from the high-pressure annealing apparatus.

Background Art

[0002] Semiconductors are manufactured through a number of processes. During the ion implantation process, damage occurs at the interface of the wafer due to high collision energy. The annealing process is a process of supplying a process gas while applying a temperature change to the damaged wafer to restore the damage on the wafer surface.

[0003] In recent years, a high-pressure hydrogen annealing process for removing defects on the semiconductor surface through high-pressure hydrogen or deuterium has been applied.

[0004] Such a high-pressure annealing apparatus employs a double-chamber structure including an internal chamber where the annealing process is performed in a high-pressure environment, and an external chamber that maintains a pressure corresponding to the high pressure of the internal chamber and protects the internal chamber.

[0005] In addition, a heater unit surrounding the periphery of the internal chamber is provided for heating by the annealing process in the internal chamber.

[0006] [[ID=**27]] Separation of the heater unit is necessary for maintenance and repair work of the high-pressure annealing apparatus. However, due to the structural limitations of the high-pressure annealing apparatus, the heater unit is separated while opening the upper part of the external chamber and raising the heater unit through the opened upper part of the external chamber.

[0007] Furthermore, when attaching the heater unit to the high-pressure annealing device, the heater unit is attached by lowering it through the open upper part of the external chamber.

[0008] In this type of heater unit attachment / detachment method, a workspace corresponding to the size of the heater unit is required above the external chamber, which presents the problem of the overall size of the high-pressure annealing device becoming considerably larger.

[0009] Furthermore, a separate crane must be provided to raise and lower the heater unit, and there is a problem that if the heater unit comes into contact with the external or internal chamber during the raising and lowering of the heater unit, damage may occur to the high-pressure annealing device.

[0010] Furthermore, precisely controlling the crane that raises and lowers the heater unit is required to mount the heater unit in the correct position between the outer and inner chambers. As a result, stability cannot be guaranteed, and the work speed is long. [Overview of the project] [Problems that the invention aims to solve]

[0011] The present invention aims to solve the problems of the prior art described above, and presents a method for raising and lowering the heater unit of a high-pressure annealing device below the external chamber while supporting it through a jig device, thereby enabling the heater unit to be attached to or detached from the high-pressure annealing device.

[0012] In particular, the upper part of the external chamber is opened for maintenance and repair of the high-pressure annealing device, and the heater unit is raised and lowered through the opened upper part of the external chamber, thereby solving various problems related to the attachment and detachment of the heater unit.

[0013] When applying a method of attaching and detaching the heater unit through the open top of the external chamber, a working space corresponding to the size of the heater unit is required at the top of the external chamber, which aims to solve the problem of the overall size of the high-pressure annealing device becoming considerably larger.

[0014] Furthermore, this invention aims to solve the problem of requiring a separate crane to raise and lower the heater unit, and to solve the problem of damage to the high-pressure annealing device occurring when the heater unit comes into contact with the external or internal chamber during the raising and lowering of the heater unit.

[0015] Furthermore, precisely controlling the crane that raises and lowers the heater unit is required to mount the heater unit in the correct position between the outer and inner chambers, which would otherwise compromise stability and result in a longer working speed.

[0016] The objects of the present invention are not limited to those stated above, and other objects and advantages of the present invention not mentioned can be understood from the following description. [Means for solving the problem]

[0017] To achieve the aforementioned technical objectives, one embodiment of a jig device for supporting the attachment and detachment of a heater unit according to the present invention includes a heater support plate on which the heater unit is placed and which supports the heater unit, and a jig support plate which is supported in contact with the door of a high-pressure annealing device or the door support arm of a lifting device, wherein the heater unit can be raised and lowered via the lifting device after being placed.

[0018] Preferably, the heater support plate may further include a plurality of mounting guide bars that are positioned on the upper surface of the heater support plate, protruding upward, and prevent the heater unit from detaching by supporting it in close contact with the side surface of the lower end of the heater unit while guiding the placement of the heater unit onto the heater support plate.

[0019] As an example, the mounting guide bar described above includes a first mounting guide bar and a second mounting guide bar, and the distance between the first mounting guide bar and the second mounting guide bar can be adjusted so that the lower end of the heater unit is inserted and mounted between the first mounting guide bar and the second mounting guide bar.

[0020] As an example, the heater support plate may be in the form of a plate, and its length in the longitudinal direction may be greater than the diameter of the lower end surface of the heater unit and smaller than the diameter of the door insertion space provided at the lower end of the external chamber.

[0021] As an example, the heater support plate has multiple heater fastening through holes into which multiple heater fastening fasteners are fastened for fixing and attaching the heater unit to the external chamber, excluding the heater fastening through holes that function as alignment holes. The width and length of the terminal fastening through-hole can be adjusted so that it remains open and not blocked.

[0022] As an example, the heater support plate may be disc-shaped, with a diameter larger than the diameter of the heater unit and smaller than the diameter of the door insertion space provided at the lower end of the external chamber.

[0023] As an example, the heater support plate may be provided with multiple fastening work spaces formed such that portions corresponding to multiple heater fastening through holes into which multiple heater fastening fasteners for fixing and attaching the heater unit to the external chamber are recessed inward and open.

[0024] As an example, the heater support plate may further include an alignment pin that protrudes upward from the upper surface and is inserted into an alignment hole provided in the heater unit.

[0025] As an example, it can further include a plurality of heater unit sensing sensors that are arranged at a plurality of positions on the heater support plate in a separated state from each other, and measure the separation distance between the heater unit and the heater support plate or the degree of pressure applied by the heater unit.

[0026] Furthermore, it includes a plurality of jig legs that connect between the heater support plate and the jig support plate, and the height of the jig legs can be adjusted according to the size of the required working space.

[0027] Also, an embodiment of the heater unit attachment / detachment system according to the present invention includes the jig device on which the heater unit of the high-pressure annealing device is placed, and a lifting device that raises and lowers the jig device, and supports the attachment or separation of the heater unit while raising and lowering the heater unit below the external chamber of the high-pressure annealing device while supporting the heater unit with the jig device.

[0028] As an example, the lifting device can raise and lower the door of the high-pressure annealing device.

[0029] As an example, the lifting device includes a door support arm on which the door is placed, raises and lowers the door support arm, and the jig device can be attached to the door support arm from which the door has been removed.

[0030] As an example, the jig device is arranged at a plurality of positions on the heater support plate on which the heater unit is placed in a separated state from each other, and includes a plurality of heater unit sensing sensors that measure the separation distance between the heater unit and the heater support plate or the degree of pressure applied by the heater unit, and can further include a controller that determines the operating state of the jig device or the placement state of the heater unit based on the sensing signals of the plurality of heater unit sensing sensors.

[0031] Furthermore, one embodiment of a detachable high-pressure annealing apparatus for a heater unit according to the present invention provides an internal space for performing a heat treatment process on a workpiece, the internal space being adjusted to a first pressure, an external space being formed as an integrated unit with an open bottom and a closed upper and side portion connected, which houses the internal chamber at a distance from the internal chamber, the external space being adjusted to a second pressure, and an external space being disposed between the internal chamber and the external chamber, and the external chamber The heater unit may include a heater mounting portion that is fastened, the heater mounting portion being selectively fastened to the external chamber via heater fastening means, the heater unit being selectively mounted in the external chamber, and the heater unit being retractable downward out of the open external chamber.

[0032] As an example, the heater mounting portion of the heater unit includes a heater flange protruding outward from the lower end of the heater body, and the heater fastening fastener of the heater fastening means is fastened to the external chamber by passing from the lower surface to the upper surface of the heater flange while the upper surface of the heater flange is in contact with a part of the external chamber, thereby allowing the heater unit to be selectively mounted to the external chamber. [Effects of the Invention]

[0033] According to the present invention, the heater unit of the high-pressure annealing device can be raised and lowered below the external chamber while being supported by a jig device, and the heater unit can be attached to or detached from the high-pressure annealing device. This greatly improves the stability, speed, and ease of maintenance and repair work on the high-pressure annealing device.

[0034] In particular, in this invention, since the heater unit is pulled out below the external chamber using a lifting device that raises and lowers a door, no separate space is required to pull out the heater unit, and the workspace required for maintenance and repair of the high-pressure annealing device can be greatly reduced.

[0035] Furthermore, in this invention, since the heater unit is raised and lowered with a jig device attached to the lifting device that raises and lowers the door, a separate crane device or the like is not required to raise and lower the heater unit.

[0036] The effects of the present invention are not limited to those mentioned above, and other effects not mentioned above can be clearly understood by a person skilled in the art to which the present invention pertains from the following description. [Brief explanation of the drawing]

[0037] [Figure 1] This is a perspective view showing one embodiment of a high-pressure annealing apparatus to which the heater unit attachment / detachment system according to the present invention is applied. [Figure 2] This is a cross-sectional view showing one embodiment of a high-pressure annealing apparatus to which the heater unit attachment / detachment system according to the present invention is applied. [Figure 3] This figure shows one embodiment of the heater unit attachment / detachment system according to the present invention. [Figure 4] This figure shows one embodiment of a jig device for a heater unit attachment / detachment system according to the present invention. [Figure 5] This figure shows the dimensions of a heater support plate and heater unit for one embodiment of the jig device according to the present invention. [Figure 6] This figure shows one embodiment in which the jig device according to the present invention is attached to a door. [Figure 7] This figure shows another embodiment of the jig device for the heater unit attachment / detachment system according to the present invention. [Figure 8] This figure shows the dimensions of the heater support plate and heater unit of the jig device according to the present invention compared to other embodiments. [Figure 9] This figure shows an example of the operation of separating a heater unit in a high-pressure annealing device through the heater unit attachment / detachment system according to the present invention. [Figure 10]This figure shows an example of the operation of separating a heater unit in a high-pressure annealing device through the heater unit attachment / detachment system according to the present invention. [Figure 11] This figure shows an example of the operation of separating a heater unit in a high-pressure annealing device through the heater unit attachment / detachment system according to the present invention. [Modes for carrying out the invention]

[0038] To illustrate the present invention, its operational advantages, and the objectives achieved by implementing the present invention, preferred embodiments of the present invention will be described below with reference to them.

[0039] First, the terms used in this application are solely for the purpose of describing specific embodiments and are not intended to limit the invention. A singular expression may include multiple expressions unless the context clearly indicates otherwise. Furthermore, in this application, terms such as "includes" or "has" are intended to specify the existence of features, figures, stages, operations, components, parts, or combinations thereof described in the specification, and should be understood not to preemptively exclude the existence or possibility of adding one or more other features, figures, stages, operations, components, parts, or combinations thereof.

[0040] When describing the present invention, if it is determined that a specific description of a related known configuration or function may obscure the gist of the invention, such detailed description will be omitted.

[0041] This invention presents a technique for raising and lowering a heater unit of a high-pressure annealing apparatus below an external chamber while supporting it through a jig device, thereby enabling the heater unit to be attached to or detached from the high-pressure annealing apparatus.

[0042] The present invention will be described below with reference to examples relating to the present invention.

[0043] Figure 1 is a perspective view showing one embodiment of a high-pressure annealing apparatus to which the heater unit attachment / detachment system according to the present invention is applied, and Figure 2 is a cross-sectional view showing one embodiment of a high-pressure annealing apparatus to which the heater unit attachment / detachment system according to the present invention is applied.

[0044] A double-chamber structure comprising an inner chamber 50 and an outer chamber 30 may be applied to the high-pressure annealing apparatus 10 to which the present invention is applied.

[0045] The internal chamber 50 can perform the annealing process in a high-pressure environment. For example, the internal chamber 50 may be made of a non-metallic material, preferably quartz. The material of the internal chamber 50 may be changed as appropriate depending on the circumstances.

[0046] The internal chamber 50 may be an integrated chamber with an open bottom and connected upper and side portions. The internal chamber 50 can provide an internal space 51 for performing a heat treatment process on the object to be processed. A door 70 may be selectively fastened to the open bottom of the internal chamber 50, and the internal space 51 of the internal chamber 50 can be sealed by fastening the door 70.

[0047] The object to be processed may be located in the internal space 51 of the internal chamber 50. The object to be processed may be a wafer, which is stacked in multiple layers on a wafer boat (not shown) and located in the internal space 51 of the internal chamber 50.

[0048] A first gas is supplied to the internal space 51 of the internal chamber 50, and a heat treatment process gas may be supplied as the first gas. For example, the first gas can be selected from a variety of heat treatment gases such as hydrogen, deuterium, ammonia, oxygen, chlorine, and nitrogen.

[0049] As the first gas is supplied to the internal chamber 50, the internal space 51 of the internal chamber 50 is filled with the first gas, and as a result, the internal space 51 of the internal chamber 50 rises to a first pressure. This is possible. Here, the first pressure is a pressure higher than atmospheric pressure and can be selectively adjusted within the range of a few atmospheres (atm) to several hundred atmospheres (atm).

[0050] The external chamber 30 may be provided so as to surround the internal chamber 50 while being separated from the internal chamber 50 by a certain distance.

[0051] The external chamber 30 may be made of a metal material, and the material of the external chamber 30 may be changed as appropriate depending on the circumstances. The external chamber 30 may be an integrated chamber with an open bottom and an open upper part and side parts connected. The external chamber 30 may take the form of an integrated dome or cup, in which the upper surface and side walls are connected as one.

[0052] The external chamber 30 can provide an external space 31 that accommodates the internal chamber 50. More specifically, the external space 31 may be the internal space provided by the external chamber 30 excluding the area occupied by the internal chamber 50.

[0053] The external chamber 30 can protect the internal chamber 50 by maintaining the external space 31 at a pressure corresponding to the high pressure in the internal chamber 50. For this purpose, a second gas is supplied to the external space 31 of the external chamber 30, and a protective gas may be supplied as the second gas. As an example, the second gas may be selected from a variety of inert gases such as nitrogen.

[0054] As the second gas is supplied to the external chamber 30, the external space 31 of the external chamber 30 is filled with the second gas, and as a result, the external space 31 of the external chamber 30 may rise to a second pressure. Here, the second pressure can be adjusted to maintain a set stable pressure range compared to the first pressure. The second pressure can be the same as the first pressure, or adjusted to a pressure slightly higher or lower than the first pressure. As an example, the stable pressure range can be set considering the material strength and heat treatment process profile of the internal chamber 50. Preferably, the range of the second pressure can be set considering the pressure changes between the internal chamber 50 and the external chamber 30 and the temperature changes of the internal chamber 50 that the internal chamber 50 can withstand without damage.

[0055] A heater unit 110 may be positioned between the internal chamber 50 and the external chamber 30. More specifically, the heater unit 110 may be positioned outside the internal chamber 50 in the external space 31 of the external chamber 30.

[0056] The heater unit 110 can raise the temperature of the internal space 51 of the internal chamber 50.

[0057] The heater unit 110 may include a heating element (not shown) that generates heat, an insulating element (not shown) that prevents heat loss, and a heater body 111 to which the heating element and insulating element are mounted and supported. For example, the heater body 111 may be formed of a material that does not deform due to heat to cover at least a portion of the internal chamber 50, and a heat coil may be mounted on the heater body 111 as a heating element. For example, the insulating element may be provided on the heater body 111 to cover the remaining portion excluding one side of the heat coil, such that one side of the heat coil faces the internal chamber 50. The structure in which a heat coil is applied as a heating element to the heater unit 110 is one embodiment, and various methods of generating heat other than a heat coil can be applied to the heater unit 110.

[0058] The heater unit 110 is equipped with a heater mounting portion, and the heater mounting portion can be attached to the external chamber 30 via heater fastening means.

[0059] As an example, the heater mounting portion protrudes outward from the lower end of the heater body 111, The heater fastening means may include a heater flange 120 that extends to contact a portion of the external chamber 30, and may include a heater fastening fastener 150 that secures the heater flange 120 to the portion of the external chamber 30.

[0060] As an example, the lower end of the external chamber 30 may be provided with a heater unit fastening hole 35 for mounting the heater unit 110, and the heater flange 120 may be provided with a heater fastening through hole 130 corresponding to the heater unit fastening hole 35 of the external chamber 30.

[0061] Preferably, the lower end of the external chamber 30 may be provided with a plurality of heater unit fastening holes 35 spaced apart from each other along its periphery, and the heater flange 120 may be provided with a plurality of heater fastening through holes 130 spaced apart from each other along its periphery.

[0062] With the lower end of the external chamber 30 and the upper surface of the heater flange 120 of the heater unit 110 in contact, the heater fastening fastener 150 can be fastened through the heater fastening through hole 130 of the heater flange 120 to the heater unit fastening hole 35 of the external chamber 30. The heater unit 110 can be fixed and attached to the external chamber 30 through the heater fastening fastener 150.

[0063] In this embodiment, the case in which fasteners such as rivets and bolts are applied as the heater fastening means is illustrated and explained, but this is just one embodiment, and various fastening methods such as clamps can be applied as the heater fastening means.

[0064] A sealing member is installed between the lower end of the external chamber 30 and the heater flange 120 of the heater unit 110, thereby preventing leakage of the second gas supplied to the external space 31 of the external chamber 30.

[0065] The internal chamber 50 may be placed on an internal chamber support plate 60. For example, the central portion of the internal chamber support plate 60 may be open to correspond to the cross-sectional area of ​​the open lower end of the internal chamber 50.

[0066] As an example, a support plate fastening hole 140 may be provided on the lower surface of the heater flange 120 of the heater unit 110, and a support plate fastening through hole 65 may be provided in the internal chamber support plate 60 corresponding to the support plate fastening hole 140.

[0067] Preferably, the lower surface of the heater flange 120 may be provided with a plurality of support plate fastening holes 140 spaced apart from each other along its periphery, and the internal chamber support plate 60 may be provided with a plurality of support plate fastening through holes 65 spaced apart from each other along its periphery.

[0068] With the lower surface of the heater flange 120 and the upper surface of the internal chamber support plate 60 in contact, the support plate fastening fastener 61 can be fastened through the support plate fastening through hole 65 of the internal chamber support plate 60 to the support plate fastening hole 140 of the heater flange 120. The internal chamber support plate 60 can be fixed and attached to the heater flange 120 of the heater unit 110 through the support plate fastening fastener 61.

[0069] A sealing member may be installed between the internal chamber support plate 60 and the heater flange 120 of the heater unit 110, and the internal chamber 50 and the internal chamber support plate A sealing member may be installed between the heater unit 110 and the internal chamber 50, thereby preventing leakage of the second gas supplied to the internal space 51 of the internal chamber 50. Additionally, a buffer member may be installed between the heater unit 110 and the internal chamber 50 to prevent damage to the internal chamber 50.

[0070] The coupling structure of the internal chamber 50, heater unit 110, and external chamber 30 described above can be modified as appropriate depending on the situation. For example, the internal chamber support plate 60 that supports the internal chamber 50 may be coupled to the external chamber 30.

[0071] The object to be processed can be placed on the door 70. The door 70 moves up and down and is inserted into the door insertion space 40 provided at the lower end of the outer chamber 30, allowing the object to be processed to be positioned in the internal space 51 of the inner chamber 50, and the internal space 51 of the inner chamber 50 to be sealed.

[0072] The lifting device 200 can raise and lower the door 70.

[0073] For example, the lifting device 200 may include a support frame 210, a door support arm 230, a lifting drive mechanism 250, and the like.

[0074] The support frame 210 is positioned vertically and can support the door support arm 230 while guiding its vertical movement.

[0075] The door support arm 230 can move up and down along the support frame 210 while being supported on one side by the support frame 210. A door 70 can be placed on the door support arm 230.

[0076] The lifting drive unit 250 can provide power for raising and lowering the door support arm 230. For example, the support frame 210 may be equipped with a belt, chain, etc., to which the door support arm 230 is connected, and the lifting drive unit 250 can rotate the belt, chain, etc., thereby raising and lowering the door support arm 230. Alternatively, the support frame 210 may be provided with a rail, one side of the door support arm 230 may be connected to the rail, and the lifting drive unit 250 can provide power to raise and lower the door support arm 230 along the rail. In addition, the lifting device 200 can include various configurations for raising and lowering the door support arm 230.

[0077] Figure 3 shows an embodiment of the heater unit attachment / detachment system according to the present invention.

[0078] In this embodiment, the heater unit attachment / detachment system 100 will be described in the case where it is applied to the high-pressure annealing apparatus 10 shown in Figures 1 and 2, but it is not limited to this, and the heater unit attachment / detachment system 100 can be applied to various high-pressure annealing apparatuses 10 in which the lower part of the external chamber 30 is open.

[0079] In the embodiments shown in Figures 1 and 2, the external chamber 30 is illustrated and described as an integrated chamber in which the lower part is open and the upper and side parts, which are not open, are connected. However, the heater unit attachment / detachment system 100 can also be applied when the upper part of the external chamber can be selectively opened while the lower part is open.

[0080] The heater unit attachment / detachment system 100 can either pull out the heater unit 110 from the high-pressure annealing device 10 or attach the heater unit 110 to the high-pressure annealing device 10.

[0081] The heater unit attachment / detachment system 100 may include a jig device 300, a lifting device 200, a controller 500, and the like.

[0082] The jig device 300 is attached to the lifting device 200 and can support the heater unit 110 while being raised and lowered by the lifting device 200. For example, the jig device 300 can sense the placement of the heater unit 110 while guiding its placement.

[0083] The controller 500 can control the lifting device 200 to raise and lower the jig device 300. For example, the controller 500 can receive a placement detection signal for the heater unit 110 from the jig device 300 and determine the placement status of the heater unit 110 on the jig device 300.

[0084] Through this configuration, the heater unit attachment / detachment system 100 can support the heater unit 110 through the jig device 300, raise and lower the jig device 300 with the lifting device 200, and attach or detach the heater unit 110 below the high-pressure annealing device 10.

[0085] In this embodiment, the diagram illustrates and explains the case in which the jig device 300 is attached to the upper surface of the door 70 while the door 70 is attached to the door support arm 230 of the lifting device 200. However, this is just one embodiment, and the jig device 300 may also be attached to the door support arm 230 from which the door 70 has been removed.

[0086] Figure 4 shows an embodiment of the jig device for the heater unit attachment / detachment system according to the present invention, Figure 5 shows the dimensions of the heater support plate and heater unit for an embodiment of the jig device according to the present invention, and Figure 6 shows an embodiment in which the jig device according to the present invention is mounted on a door.

[0087] The jig device 300 may include a heater support plate 310, a jig leg 330, a jig support plate 350, and the like.

[0088] The lower end surface of the heater unit 110 can be placed on the upper surface of the heater support plate 310. For example, the heater flange 120 of the heater unit 110 can be placed on the upper surface of the heater support plate 310.

[0089] The upper surface of the heater support plate 310 may be provided with mounting guide bars 311 and 315.

[0090] The mounting guide bars 311 and 315 guide the heater unit 110 so that its lower end surface can be correctly placed on the heater support plate 310, and by supporting the heater unit 110 in close contact with the side surface of its lower end, they can prevent the heater unit 110 from detaching.

[0091] The mounting guide bars 311 and 315 may include a first mounting guide bar 311 and a second mounting guide bar 315.

[0092] The first mounting guide bar 311 and the second mounting guide bar 315 are positioned spaced apart from each other, and the lower end of the heater unit 110 can be inserted and placed between the first mounting guide bar 311 and the second mounting guide bar 315. The distance between 5 and the lower end can be adjusted to correspond to the size of the lower end of the heater unit 110.

[0093] The mounting guide bars 311 and 315 can have a predetermined height so as to stably support the heater unit 110 mounted on the heater support plate 310.

[0094] As an example, the upper surface of the heater support plate 310 may be provided with multiple mounting guide bars 311, 315.

[0095] Referring to Figure 5, Figure 5(a) shows the lower part of the high-voltage annealing device, Figure 5(b) shows the upper part of the heater support plate, and Figure 5(c) shows a cross-section of the heater support plate.

[0096] The longitudinal length of the heater support plate 310 may be greater than the diameter of the heater flange 120 of the heater unit 110 and less than the diameter of the door insertion space 40 provided at the lower end of the external chamber 30.

[0097] As an example, the heater support plate 310 may be in a plate-like form, with both ends in the longitudinal direction formed in an arc shape corresponding to the cross-sectional shape of the door insertion space 40.

[0098] Preferably, the width of the heater support plate 310 can be adjusted so as not to block the heater fastening through holes 130 provided in the heater flange 120 of the heater unit 110, except for the heater fastening through holes 130a and 130b that function as alignment holes.

[0099] Mounting guide bars 311 and 315 may be provided on both sides of the upper surface of the heater support plate 310 in the longitudinal direction.

[0100] First mounting guide bars 311a, 311b and second mounting guide bars 315a, 315b may be provided on both sides of the heater support plate 310 in the longitudinal direction. The first mounting guide bars 311a, 311b and the second mounting guide bars 315a, 315b may be positioned at a distance D2 from each other, corresponding to the length D1 of the width of the lower end of the heater flange 120. That is, the separation distance D2 between the first mounting guide bars 311a, 311b and the second mounting guide bars 315a, 315b may be the same as or slightly larger than the length D1 of the width of the lower end of the heater flange 120.

[0101] The space between the first mounting guide bars 311a, 311b and the second mounting guide bars 315a, 315b can become mounting spaces 313a, 313b on which the heater flange 120 of the heater unit 110 is mounted.

[0102] Alignment means may be provided on the upper surface of the heater support plate 310. The alignment means may include alignment pins 320. For example, alignment pins 320a and 320b may be provided between the first mounting guide bars 311a and 311b and the second mounting guide bars 315a and 315b on both sides in the longitudinal direction of the heater support plate 310.

[0103] When the heater unit 110 is placed on the heater support plate 310, the alignment pins 320a and 320b are inserted into and fastened into the alignment holes 130a and 130b provided in the heater flange 120 of the heater unit 110, thereby guiding the heater unit 110 to the correct placement position on the heater support plate 310.

[0104] For example, the heater fastening through-hole 130 provided in the heater flange 120 can also function as an alignment hole. Alternatively, the heater flange 120 may be provided with an alignment hole separate from the heater fastening through-hole 130.

[0105] The alignment means may include a light emitter. For example, a light emitter (not shown) may be provided on the alignment pin 320. The light emitter can emit light vertically upward. Preferably, the light emitter can emit light that has color so that the light path can be visually recognized.

[0106] The mounting position of the jig device 300 can be aligned by mounting the jig device 300 so that the light emitted from the light emitter aligns with the alignment holes 130a and 130b provided in the heater flange 120 of the heater unit 110.

[0107] The heater support plate 310 may be equipped with a heater unit sensing sensor 370. The heater unit sensing sensor 370 can sense the state in which the heater unit 110 is placed on the heater support plate 310.

[0108] As an example, heater unit sensing sensors 370a and 370b may be provided between the first mounting guide bars 311a and 311b and the second mounting guide bars 315a and 315b on both sides in the longitudinal direction of the heater support plate 310, respectively.

[0109] As an example, the heater unit sensing sensors 370a and 370b include a pressure sensor that measures the degree of contact pressure and a light sensor that emits light and receives reflected light, and can sense the position of the heater unit 110 placed on the heater support plate 310 relative to the heater flange 120. Multiple heater unit sensing sensors 370a and 370b can sense the distance between the upper surface of the heater support plate 310 and the heater flange 120 of the heater unit 110 or the degree of pressure applied to the heater flange 120 relative to the heater support plate 310.

[0110] The controller 500 can determine the state of placement of the heater unit 110 on the heater support plate 310 based on the sensing signals from multiple heater unit sensing sensors 370a and 370b. If, as a result of comparing the multiple sensing signals, the separation distance is the same or similar within the error range, or the pressure level is the same or similar within the error range, the controller 500 can determine that the heater unit 110 is properly placed on the heater support plate 310. Conversely, if, as a result of comparing the multiple sensing signals, the separation distance or pressure level differs by more than the error range, the controller 500 can determine that the heater unit 110 is improperly placed on the heater support plate 310.

[0111] Furthermore, the controller 500 can provide information on the mounting status of the heater unit 110.

[0112] The jig leg 330 is connected to the lower surface of the heater support plate 310 and can support the heater support plate 310.

[0113] Multiple jig legs 330 may be provided to distribute the load on the heater support plate 310 and provide stable support.

[0114] For example, two ziglegs 330 may be provided on each of the two longitudinal sides of the heater support plate 310. Of course, the number and position of the ziglegs 330 will depend on the circumstances. It may be modified accordingly.

[0115] The height of the jigleg 330 can be adjusted. For example, the jigleg 330 may include a first jigleg 331 and a second jigleg 335. The height of the jigleg 330 can be adjusted by selectively combining the first jigleg 331 and the second jigleg 335. For example, the height of the jigleg 330 can be adjusted according to the size of the required workspace.

[0116] The upper side of the first jig leg 331 may be connected to the first upper fastening bar 333, and the lower side of the first jig leg 331 may be connected to the first lower fastening bar 350.

[0117] As an example, multiple first jig legs 331 can be connected to the first upper fastening bar 333 and the first lower fastening bar 350, spaced apart from each other.

[0118] The upper side of the second jig leg 335 may be connected to the second upper fastening bar 339, and the lower side of the second jig leg 335 may be connected to the second lower fastening bar 337.

[0119] As an example, multiple second jig legs 335 can be connected to the second upper fastening bar 339 and the second lower fastening bar 337, spaced apart from each other.

[0120] When the first jig leg 331 and the second jig leg 335 are joined, the first upper fastening bar 333 and the second lower fastening bar 337 may be connected to each other. The second upper fastening bar 339 of the second jig leg 335 may be connected to the lower surface of the heater support plate 310. The first lower fastening bar 350 of the first jig leg 331 can function as a jig support plate 350. Depending on the situation, a separate jig support plate may be provided, and the first lower fastening bar 350 of the first jig leg 331 may be connected to the jig support plate.

[0121] If only the first jig leg 331 is provided and the second jig leg 335 is not included, the first upper fastening bar 333 can be connected to the lower surface of the heater support plate 310.

[0122] As shown in the embodiment in Figure 6, the jig device 300 can be mounted on the door 70. The jig support plate 350 of the jig device 300 can be mounted on the upper surface of the door 70.

[0123] As an example, a jig mounting groove 75 is provided on the upper surface of the door 70, and a jig support plate 350 can be inserted into the jig mounting groove 75.

[0124] As another example, a jig mounting groove (not shown) may be provided on the door support arm 230, and the jig support plate 350 of the jig device 300 may be inserted into the jig mounting groove of the door support arm 230 from which the door 70 has been removed.

[0125] In this embodiment, the illustration shows that the jig support plate 350 consists of two plates corresponding to the jig legs 330 connected to both sides of the heater support plate 310. However, the number and shape of the jig support plate 350 can be adjusted according to the number and position of the jig legs 330.

[0126] The jig device 300 may be mounted on the upper surface of the door 70 or on the door support arm 230 from which the door 70 has been removed, and the jig device 300 may be raised and lowered by the lifting device 200.

[0127] The jig device according to the present invention can be modified in various ways, but as an example of a modified jig device, Figure 7 shows another embodiment of the jig device for the heater unit attachment / detachment system according to the present invention. 8 shows the dimensions of the heater support plate and heater unit of the jig device according to the present invention for other embodiments.

[0128] When describing the embodiments shown in Figures 7 and 8, any parts that overlap with the description of the jig apparatus embodiment described above will be omitted or described in a simplified manner.

[0129] The jig device 400 may include a heater support plate 410, a jig leg 430, a jig support plate 450, and the like.

[0130] The heater support plate 410 may be formed in a shape corresponding to the shape of the lower end surface of the heater unit 110.

[0131] For example, the heater support plate 410 is disc-shaped, and the diameter of the heater support plate 410 may be larger than the diameter of the heater flange 120 of the heater unit 110 and smaller than the diameter of the door insertion space 40 provided at the lower end of the external chamber 30.

[0132] The heater support plate 410 may have a fastening work space 420 in which the portion corresponding to the multiple heater fastening through holes 130 provided in the heater flange 120 of the heater unit 110 is recessed inward and opened. When the heater unit 110 is placed on the jig device 400 through the fastening work space 420, the heater fastening fasteners 150 fastened to the heater fastening through holes 130 may be exposed without being hidden by the heater support plate 410.

[0133] A space corresponding to the shape of the heater fastening fastener 150 can be formed, preferably a space that facilitates the fastening and detaching operations of the heater fastening fastener 150.

[0134] The upper surface of the heater support plate 410 may be provided with a plurality of mounting guide bars 411, 415 spaced apart from each other along the circumference.

[0135] The mounting guide bars 411 and 415 may include a first mounting guide bar 411 and a second mounting guide bar 415.

[0136] The first mounting guide bar 411 and the second mounting guide bar 415 are positioned spaced apart from each other, and the lower end of the heater unit 110 can be inserted and placed between the first mounting guide bar 411 and the second mounting guide bar 415. The distance between the first mounting guide bar 411 and the second mounting guide bar 415 can be adjusted to correspond to the size of the lower end of the heater unit 110.

[0137] The jig leg 430 can be connected between the heater support plate 410 and the jig support plate 450. One side of the jig leg 430 can be connected to the lower surface of the heater support plate 410, and the other side can be connected to the upper surface of the jig support plate 450.

[0138] Multiple zig legs 430 may be provided spaced apart to distribute and support the load of the heater support plate 410.

[0139] The jig support plate 450 can be attached to the door 70 or the door support arm 230 of the lifting device 200.

[0140] As an example, the jig support plate 450 is connected to the other side of multiple jig legs 430. It can be formed in the shape of a circular ring. The jig support plate 450 can be inserted into a jig mounting groove 75 provided on the upper surface of the door 70, or into a jig mounting groove provided on the door support arm 230.

[0141] Thus, the jig device can be modified into various forms that can stably support the heater unit while bearing the load of the heater unit.

[0142] The operation of the heater unit attachment / detachment system according to the present invention will be described below with reference to an example.

[0143] Figures 9 to 11 show an example of the operation of separating a heater unit in a high-pressure annealing device through the heater unit attachment / detachment system according to the present invention.

[0144] The embodiments shown in Figures 9 to 11 apply the jig devices shown in Figures 4 to 6. Since the operation of the jig devices shown in Figures 7 and 8 can be inferred from these embodiments, a detailed explanation of those embodiments will be omitted.

[0145] This embodiment assumes that the internal chamber 50 has been removed from the high-pressure annealing apparatus 10.

[0146] Figure 9 shows an example in which a jig device 300 is mounted on a door 70 and the jig device 300 is raised via a lifting device 200.

[0147] A jig device 300 can be mounted on the door 70. As described above, a jig support plate 350 can be inserted into the jig mounting groove 75 of the door 70, and the jig device 300 can be mounted.

[0148] The mounting position of the jig device 300 on the door 70 can be adjusted so that the alignment pins 320 of the jig device 300 correspond to the heater fastening fasteners 150 fastened to the heater fastening through holes 130 which function as alignment holes.

[0149] As an example, the mounting position of the jig device 300 can be adjusted so that the light emitted from a light emitter (not shown) of the jig alignment means provided on the alignment pin 320 coincides with the heater fastening through-hole 130 which functions as an alignment hole.

[0150] In this way, once the jig device 300 is adjusted and installed on the door 70, the heater fasteners 150 fastened to the heater fastening through holes 130, which function as alignment holes, can be removed. At this time, in addition to the heater fasteners 150 fastened to the heater fastening through holes 130 that function as alignment holes, the heater fasteners 150 fastened to other heater fastening through holes 130 remain fastened.

[0151] Then, by raising the door 70 via the lifting device 200, the jig device 300 attached to the door 70 can rise toward the door insertion space 40 provided at the lower end of the external chamber 30.

[0152] For example, while raising the jig device 300, the controller 500 can receive sensing signals from multiple heater unit sensing sensors 370 and determine the stability of the operating state based on these signals.

[0153] As an example, multiple heater unit sensing sensors 370 are located in the heater unit 110. By emitting light toward the lower surface and receiving the reflected light, the controller 500 can determine whether the jig device 300 is rising normally toward the heater unit 110 by comparing the sensing signals of each of the multiple heater unit sensing sensors 370.

[0154] If, as a result of comparing multiple sensing signals, the separation distances are the same or similar within the error range, the controller 500 can determine that the jig device 300 is rising normally toward the heater unit 110.

[0155] If, as a result of comparing multiple sensing signals, the separation distance differs by more than the error range, the controller 500 can determine that the jig device 300 is rising abnormally toward the heater unit 110.

[0156] - Furthermore, the controller 500 can provide information about the operating status.

[0157] Figure 10 shows an example in which the jig device 300 is raised and the heater unit 110 is placed on the heater support plate 310 of the jig device 300.

[0158] The jig device 300 is raised via the lifting device 200, and the heater support plate 310 of the jig device 300 can be inserted into a door insertion space 40 provided at the lower end of the external chamber 30. The heater flange 120 of the heater unit 110 can be placed on the upper surface of the heater support plate 310.

[0159] The heater flange 120 of the heater unit 110 can be placed in the space between the first mounting guide bar 311 and the second mounting guide bar 315, which are provided on the upper surface of the heater support plate 310. The heater flange 120 of the heater unit 110 is guided by the first mounting guide bar 311 and the second mounting guide bar 315, and the upper surface of the heater support plate 310 can come into contact with the lower surface of the heater unit 110.

[0160] The alignment pin 320 of the jig device 300 is inserted into and fastened to the alignment hole 130 provided in the heater flange 120 of the heater unit 110, thereby ensuring accuracy in the mounting position of the heater unit 110 on the jig device 300.

[0161] For example, the controller 500 can sense the placement state of the heater unit 110 on the heater support plate 310 through multiple heater unit sensing sensors 370 provided in the jig device 300, and based on this, it can determine the placement state.

[0162] If, based on the comparison of multiple sensing signals, the separation distances are the same or similar within the error range, or the pressure levels are the same or similar within the error range, the controller 500 can determine that the heater unit 110 is properly mounted on the jig device 300. If, based on the comparison of multiple sensing signals, the separation distances or pressure levels differ by more than the error range, the controller 500 can determine that the heater unit 110 is improperly mounted on the jig device 300.

[0163] Furthermore, the controller 500 can provide information on the mounting status of the heater unit 110.

[0164] As shown in Figure 10, with the heater unit 110 mounted and supported on the jig device 300, the remaining heater fastening fasteners 150 fastened to the heater fastening through holes 130 can be removed.

[0165] In particular, as described above, the heater support plate 310 is designed so that the width of the heater support plate 310 is adjusted so that the heater fastening through holes 130 other than the alignment holes 130a and 130b provided in the heater flange 120 of the heater unit 110 are not blocked, and the heater support plate 310 is separated from the door 70 by a sufficient distance through the jig leg 330, so that the heater fastening fasteners 150 fastened to the heater fastening through holes 130 of the heater unit 110 can be easily removed.

[0166] Once all the heater fastening fasteners 150, which are fastened so that the heater unit 110 can be supported by the external chamber 30, are removed, the heater unit 110 is fully mounted and supported on the jig device 300.

[0167] Figure 11 shows an example in which the jig device 300 is lowered and the heater unit 110 placed on the jig device 300 is pulled out from the high-pressure annealing device 10.

[0168] By lowering the door 70 through the lifting device 200 while the heater unit 110 is fully supported by the jig device 300, the heater unit 110 mounted on the jig device 300 can be pulled downward from the door insertion space 40 provided at the lower end of the external chamber 30.

[0169] For example, while lowering the jig device 300, the controller 500 can receive sensing signals from multiple heater unit sensing sensors 370 and determine the stability of the operating state based on these signals.

[0170] For example, multiple heater unit sensing sensors 370 can sense the degree of pressurization by the heater unit 110, and the controller 500 can compare the sensing signals from each of the multiple heater unit sensing sensors 370 to determine whether the jig device 300 on which the heater unit 110 is mounted is descending normally.

[0171] If, as a result of comparing multiple sensing signals, the pressure levels are the same or similar within the error range, the controller 500 can determine that the heater unit 110 is properly placed on the jig device 300 and is descending.

[0172] If, as a result of comparing multiple sensing signals, the degree of pressurization differs by more than the error range, the controller 500 can determine that the heater unit 110 is abnormally placed on the jig device 300 and is descending.

[0173] Furthermore, the controller 500 can provide information about the operating status.

[0174] The lifting device 200 can lower the jig device 300 on which the heater unit 110 is mounted until the entire heater unit 110 is fully extended below the external chamber 30.

[0175] This invention allows the heater unit of a high-pressure annealing device to be raised and lowered below the external chamber while being supported by a jig device, and the heater unit to be attached to or detached from the high-pressure annealing device. As a result, the stability, speed, and ease of maintenance and repair work on the high-pressure annealing device can be greatly improved.

[0176] In particular, in this invention, a lifting device is used to raise and lower the door, and a heater is placed below the external chamber. - Because the unit is pulled out, no separate space is required to pull out the heater unit, significantly reducing the workspace needed for maintenance and repair of the high-pressure annealing device.

[0177] Furthermore, in this invention, since the heater unit is raised and lowered with a jig device attached to the lifting device that raises and lowers the door, a separate crane device or the like is not required to raise and lower the heater unit.

[0178] The above description is merely illustrative of the technical concept of the present invention, and a person with ordinary skill in the art to which the present invention pertains will be able to make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, each embodiment described in the present invention is for illustrative purposes only, not to limit the technical concept of the present invention, and the technical concept of the present invention is not limited by such embodiments. The scope of protection of the present invention must be interpreted in accordance with the following claims, and all technical concepts within an equivalent scope should be interpreted as being included in the scope of rights of the present invention. [Explanation of Symbols]

[0179] 10 High-pressure annealing device 30 External Chamber 50 Internal Chambers 60 Internal Chamber Support Plate 70 doors 100 Heater Unit Removal System 110 Heater Unit 120 Heater flange 200 Lifting device 230 Door support arm 300, 400 jig device 310, 410 Heater support plate 311, 411 First mounting guide bar 315, 415 Second mounting guide bar 320 Alignment Pins 330, 430 Jigleg 350, 450 Jig support plate 370 Heater unit sensing sensor 500 controllers

Claims

1. An internal chamber is provided, which provides an internal space for performing a heat treatment process on the object to be processed, and the internal space is adjusted to a first pressure. An external chamber is formed as a single unit with an open bottom and a closed upper and side portion connected, providing an external space that houses the internal chamber while being separated from the internal chamber, and the external space is adjusted to a second pressure, and A detachable high-pressure annealing apparatus for a heater unit, comprising: a heater mounting portion disposed between the internal chamber and the external chamber and fastened to the external chamber, the heater mounting portion being selectively fastened to the external chamber via heater fastening means, and a heater unit selectively mounted to the external chamber and retractable downward out of the open external chamber.

2. The heater mounting portion of the heater unit is The heater body includes a heater flange that protrudes outward from the lower end. With the upper surface of the heater flange in contact with a portion of the external chamber, the heater fastening fastener of the heater fastening means is fastened to the external chamber, passing through the lower surface and upper surface of the heater flange, and the heater unit is in the external chamber. A detachable high-pressure annealing device for a heater unit according to claim 1, characterized in that it is selectively attached.

3. A high-pressure annealing apparatus according to claim 1, The heater unit of the high-pressure annealing apparatus is mounted on the upper surface, and a jig device is provided that moves up and down below the open outer chamber to support the mounting or detachment of the heater unit. A lifting device for raising and lowering the jig device, A heater unit attachment / detachment system characterized by including the following.

4. The aforementioned high-pressure annealing apparatus is The present invention further includes a door that is selectively fastened to the lower part of the internal chamber to seal the internal space, The lifting device includes a door support arm on which the door is selectively placed, and raises and lowers the door support arm. The jig device is supported in contact with the door or the door support arm from which the door has been removed. A heater unit attachment / detachment system according to claim 3, characterized in that

5. The jig device is The heater unit is placed on the upper surface, and a heater support plate supports the heater unit, A jig support plate that is supported in contact with the door or the door support arm, A heater unit attachment / detachment system according to claim 4, characterized by including the following:

6. The jig device is The heater support plate includes a plurality of heater unit sensing sensors, which are arranged at multiple positions spaced apart from each other, and which measure the separation distance between the heater unit and the heater support plate or the degree of pressure applied by the heater unit. The heater unit attachment / detachment system according to claim 5, further comprising a controller that determines the operating state of the jig device or the mounting state of the heater unit based on sensing signals from a plurality of heater unit sensing sensors.

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