Evaporation chamber of an apparatus for evaporating compounds

Abstract

The present specification relates to an evaporation chamber (10), comprising a first cavity (30), a second cavity (50), a first pipe (40) for a liquid inlet connecting the outside of the evaporation chamber to the first cavity (30), a second pipe (60) connecting the first cavity (30) to the second cavity (50), and a third pipe (70) for a vapor outlet connecting the second cavity (50) to the outside of the evaporation chamber, wherein the first pipe (40) and the second pipe (60) open into a first half of the first cavity (30) and the second half of the first cavity (30) is not open.

Description

[Technical Field]

[0001] TECHNICAL FIELD The present disclosure relates generally to a vaporization chamber of an apparatus for vaporizing a compound. [Background technology]

[0002] In the field of chemical processing, which requires the use of vapors of compounds known as reagents, such as chemical vapor deposition (CVD), atomic layer deposition (ALD), and atomic layer etching (ALE) processes, the reagents used, if they are liquid or solid at room temperature and pressure, need to be evaporated.

[0003] For this purpose, evaporation apparatuses are generally used which comprise a device for injecting a carrier gas and a liquid reagent into an evaporation chamber, heating means configured to heat the evaporation chamber to ensure the change of the reagent from its liquid state to its vapor state, and an outlet connector configured to send the reagent vapor to a processing plant that uses the reagent vapor. Summary of the Invention [Problem to be solved by the invention]

[0004] For proper operation of the treatment plant supplied by the evaporation device, it is generally desirable that droplets do not leave the evaporation chamber and reach the treatment plant, thereby ensuring that the flow rate of injected liquid is as high as possible.

[0005] An object of the embodiments is to overcome all or some of the disadvantages of known evaporation devices.

[0006] Another object of an embodiment is to reduce the risk of droplets being dispensed from the outlet of the evaporation chamber.

[0007] Another object of an embodiment is to reduce the phenomenon of fouling of the evaporator. [Means for solving the problem]

[0008] An embodiment provides an evaporation chamber comprising a first cavity, a second cavity, a first pipe for a liquid inlet connecting the outside of the evaporation chamber to the first cavity, a second pipe connecting the first cavity to the second cavity, and a third pipe for a vapor outlet connecting the second cavity to the outside of the evaporation chamber, wherein the first pipe and the second pipe open to a first half of the first cavity and a second half of the first cavity is not open.

[0009] According to an embodiment, the evaporation chamber comprises a trapping element for trapping droplets in the first cavity.

[0010] According to an embodiment, the capture element comprises a porous element, in particular a sintered part.

[0011] According to an embodiment, the capture element has a textured portion on part or all of the surface of the first cavity.

[0012] According to an embodiment, the capture element is arranged opposite the first pipe.

[0013] According to an embodiment, the first cavity has a first central region that is continuous with a first annular region, the first pipe opening into the first central region, and the second pipe opening into the first annular region.

[0014] According to an embodiment, the capture element is arranged in the first central region.

[0015] According to an embodiment, the evaporation chamber comprises a filter in the second cavity.

[0016] According to an embodiment, the second cavity has a second central region continuous with a second annular region, the third pipe opens into the second central region, and the second pipe opens into the second annular region.

[0017] According to an embodiment, the filter is arranged in the second central region.

[0018] According to an embodiment, the evaporation chamber comprises a first part, a second part, and a third part, the first part is attached to the second part, the third part is attached to the second part, the first part includes the first pipe, the second part includes the second pipe, the third part includes the third pipe, the first part defines the first cavity together with the second part, and the second part defines the second cavity together with the third part.

[0019] Embodiments further provide an evaporation apparatus comprising an evaporation chamber as defined above and an injection device for injecting droplets of reagent into the evaporation chamber through the first pipe. [Brief explanation of the drawings]

[0020] The foregoing and other features and advantages will be described in detail in the remainder of this disclosure of particular embodiments, given by way of non-limiting example with reference to the accompanying drawings, in which:

[0021] [Figure 1] 1 is a partially simplified cross-sectional view of an embodiment of an evaporation device. [Figure 2] FIG. 2 is a cross-sectional view taken along plane II-II of FIG. [Figure 3] FIG. 3 is a cross-sectional view taken along plane III-III of FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along plane IV-IV of FIG. [Figure 5] FIG. 10 is a partially simplified cross-sectional view showing a modified example of the evaporation device. [Figure 6] FIG. 10 is a partially simplified cross-sectional view showing another modified example of the evaporation device. [Figure 7] FIG. 10 is a partially simplified cross-sectional view of another embodiment of an evaporation device. [Figure 8] FIG. 8 is a cross-sectional view taken along plane VIII-VIII of FIG. 7. [Figure 9] FIG. 9 is a cross-sectional view taken along plane IX-IX of FIG. 7. [Figure 10] FIG. 8 is a cross-sectional view taken along plane XX in FIG. 7. [Figure 11] FIG. 10 is a partially simplified cross-sectional view of another embodiment of an evaporation device. [Figure 12] FIG. 10 is a partially simplified cross-sectional view of another embodiment of an evaporation device. DETAILED DESCRIPTION OF THE INVENTION

[0022] In the various drawings, like features are designated by like reference numerals. In particular, structural and / or functional features common to various embodiments may have the same reference numerals and may have the same structural, dimensional, and material characteristics. For clarity, only those steps and elements useful for understanding the described embodiments are shown and described in detail.

[0023] In the following description, when reference is made to terms that qualify absolute positions such as "front," "rear," "top," "bottom," "left," "right," or relative positions such as "top," "bottom," "upper," "lower," or terms that qualify orientations such as "horizontal," "vertical," unless otherwise specified, the terms refer to the evaporator device in the orientation of the drawing or in its normal position of use.

[0024] Unless otherwise specified, the terms "about," "approximately," "substantially," and "to the extent of" refer to plus or minus 10%, preferably plus or minus 5%, of the relevant value. Unless otherwise specified, ordinal adjectives such as "first," "second," etc. are used only to distinguish elements from one another. In particular, these adjectives do not limit the described embodiments to any particular order of the elements.

[0025] In the following description, a material that is a good thermal conductor has a thermal conductivity of 1 Wm -1 K-1 Larger, preferably 10Wm -1 K -1 It is a larger material.

[0026] Figure 1 is a partially simplified cross-sectional view of an embodiment of an evaporation device 1. Figures 2, 3 and 4 are cross-sectional views along planes II-II, III-III and IV-IV of Figure 1, respectively.

[0027] According to an embodiment, the evaporation device 1 comprises an evaporation chamber 10 and an injection device 5 for injecting a liquid into the evaporation chamber 10 .

[0028] The evaporation chamber 10 has a body 20 having a bottom wall 21, a side wall 22, and a top wall 23. The body 20 has: a first cavity 30, hereinafter referred to as upper cavity 30, having a bottom wall 31, a side wall 32 and a top wall 33, the side wall 32 connecting the bottom wall 31 to the top wall 33; an access pipe 40 opening at one end in the top wall 33 of the upper cavity 30 and at an opposite end in the top wall 23 of the body 20; a second cavity 50, hereinafter referred to as lower cavity 50, having a bottom wall 51, a side wall 52 and a top wall 53, the side wall 52 connecting the bottom wall 51 to the top wall 53; pipes 60 (two pipes 60 are shown in FIG. 1, and eight pipes 60 are shown in FIGS. 2 to 4 by way of example), each opening at one end 61 into the upper cavity 30 and at an opposite end 62 into the lower cavity 50; and a pipe 70 opening at one end in the bottom wall 51 of the lower cavity 50 and at an opposite end in the bottom wall 21 of the body 20; It further has:

[0029] The injection device 5 has a head 6 arranged in the access pipe 40 through which liquid or dissolved reagents are injected into the upper cavity 30 .

[0030] According to an embodiment, the evaporation chamber 10 has a droplet capture element 80 arranged in the upper cavity 30. According to an embodiment, the distance between the capture element 80 and the orifice of the head 6 through which the liquid reagent is injected into the upper cavity 30 is in the range of 4 cm to 100 cm.

[0031] According to an embodiment, the evaporation chamber 10 has a filter 90 disposed within the lower cavity 50 .

[0032] The evaporation chamber 10 comprises a heating element 100 for heating the body 20. According to an embodiment, the heating element 100 comprises a heating collar that surrounds the body 20 and contacts the side wall 22 of the body 20. According to an embodiment not shown, the heating element 100 comprises a heating resistor that is integrated into the body 20.

[0033] According to an embodiment, the upper cavity 30 is rotationally symmetric about the axis D. The cross section in FIG. 1 includes the axis D. In operation, the axis D is preferably oriented vertically. The access pipe 40 may also be rotationally symmetric about the axis D. In FIG. 1, the upper cavity 30 is a cylinder with a circular base and an axis D. Alternatively, the upper cavity 30 may have a shape other than a cylinder, for example, a frusto-conical shape with an axis D. According to an embodiment, the lower cavity 50 is rotationally symmetric about the axis D. In FIG. 1, the lower cavity 50 is a cylinder with a circular base and an axis D.

[0034] Each pipe 60 opens into the upper cavity 30 in an upper portion thereof, at the top wall 33 of the upper cavity 30 as shown in FIG. 1, or at the upper half of the side wall 32 of the upper cavity 30. Each pipe 60 may have a circular cross section. The number of pipes 60 may be in the range of 1 to 20. According to an embodiment, each pipe 60 has at least one bend 63, preferably at least two bends 63. According to an embodiment, the pipes 60 are evenly distributed around the axis D.

[0035] According to an embodiment, the body 20 is formed from a metal or metal alloy, for example stainless steel.

[0036] The dimensions of the evaporation chamber 10 depend on the intended application. By way of example, the upper cavity 30 may have a volume of 10 cm 3 ~1,000cm 3 The maximum height between the bottom wall 31 of the upper cavity 30 and the top wall 33 of the upper cavity 30 is in the range of 10 mm to 500 mm. The diameter of each pipe 60 is in the range of 1 mm to 20 mm. For example, the volume of the lower cavity 50 is 2 cm 3 ~200cm 3 The maximum height between the bottom wall 51 of the lower cavity 50 and the top wall 53 of the lower cavity 50 is within the range of 4 mm to 250 mm.

[0037] The flow rate of the liquid or solution injected into the evaporation chamber 10 and evaporated is, for example, in the range of 0.1 g / min to 50 g / min. The pure liquid reagent, the liquid dissolved in the organic solvent, or the solid dissolved in the evaporated organic solvent in the evaporation chamber 10 may be, for example, - cyclopentadienyl-type metal-organic compounds of alkaline earth, rare earth or transition metals (metal elements bonded directly to carbon atoms); - transition metal carbonyl-type organometallic compounds, - Post-transition metal alkyl-type metal organic compounds, - inorganic compounds of the amide or imide type (metallic elements directly bonded to non-metallic elements other than carbon) of transition metals, post-transition metals, or metalloids; - inorganic compounds of the β-diketonate type of alkali, alkaline earth, rare earth, transition metal and post-transition metal; inorganic compounds of the alkoxide type of transition metals, post-transition metals or metalloids, and - inorganic compounds of the sulfide or phosphide type of transition metals or post-transition metals is.

[0038] 1, the capture element 80 is an element separate from the body 20 and is housed in the upper cavity 30. The capture element 80 covers at least the bottom wall 31 of the upper cavity 30 and preferably contacts the bottom wall 31 of the upper cavity 30. In the embodiment shown in FIG. 1, the capture element 80 corresponds to a cylindrical element having a circular base with a diameter identical to that of the bottom wall 31 of the upper cavity 30.

[0039] 5 shows a variation of the evaporation device 1 shown in FIG. 1 in which the capture element 80 covers the bottom wall 31 of the upper cavity 30 and also covers a portion of the side wall 32 of the upper cavity 30, preferably in contact with the side wall 32 of the upper cavity 30. The capture element 80 may also cover the entire side wall 32 of the upper cavity 30.

[0040] At least a portion of the capture element 80 faces the head 6 along the direction D. According to an embodiment, the evaporation chamber 10 has an element not shown in FIG. 1 for fixing the capture element 80 to the body 20, such as a ring housed in a groove provided in the side wall 32 of the upper cavity 30. The capture element 80 is made of a material that is a good heat conductor. Furthermore, the capture element 80 is made of a material that is chemically inert with respect to the reagent to be evaporated. The capture element 80 may be made of stainless steel. Furthermore, depending on the reagent, the capture element 80 may also be made of nickel or aluminum.

[0041] The capture element 80 is configured to capture droplets, in particular by absorption and / or adsorption. According to an embodiment, the capture element 80 corresponds to a porous element. By way of example, the capture element 80 has an open porosity in the range of 1,000 micrometers (micropores) to 2 nanometers (ultramicropores). The pores may correspond to spherical, conical, or cylindrical cavities, prisms, slots, or any other geometric shape, interconnected or not (e.g., sintered bodies, fibrous zeolite, alumina, silica gel, or activated carbon structures). The capture element 80 may correspond to a sintered part. The thickness of the capture element 80 is in the range of 0.1 mm to 50 mm. The porosity throughout the thickness of the capture element 80 may be constant or graded. Advantageously, the porosity for contact with the chemical introduced into the upper cavity 30 is greater than the porosity for contact with the surface of the upper cavity 30. According to an embodiment, the capture element 80 has a textured surface to increase the contact surface area with the chemical introduced into the upper cavity 30. For example, the ratio of the actual surface area to the apparent surface area of ​​the capture element 80 is in the range of 1 to 1,000. According to an embodiment, the capture element 80 has a textured surface, which allows droplets introduced into the upper cavity 30 to penetrate the surface profile to promote evaporation of the droplets. The characteristic size of the pattern on the surface of the capture element 80 is in the range of 1 μm to 10 mm. The textured surface may be obtained by sandblasting, machining, electrical discharge machining, micromilling, etching, lithography, or laser texturing.

[0042] FIG. 6 shows a modified example of the evaporation device 1, in which a capture element 80 is integrated into the body 20 and corresponds to a textured portion on at least a portion of the surface of the upper cavity 30, so as to significantly increase the contact surface area with the chemical elements introduced into the upper cavity 30. In FIG. 6, the textured portion 80 is schematically shown on the bottom wall 31 and side wall 32 of the upper cavity 30. The textured portion 80 may also be provided on the top wall 33. For example, the ratio of the actual surface area to the apparent surface area is in the range of 1 to 1,000. According to an embodiment, the textured portion 80 on at least a portion of the surface of the upper cavity 30 allows droplets introduced into the upper cavity 30 to penetrate the surface profile of the upper cavity 30, which promotes the evaporation of the droplets. The characteristic size of the surface pattern of the textured portion 80 on the bottom wall 31, side wall 32, and / or top wall 33 of the upper cavity 30 is in the range of 1 μm to 10 mm. The textured surface may be obtained by sandblasting, machining, electrical discharge machining, micro-milling, etching, lithography, or laser texturing.

[0043] The filter 90 is disposed in the lower cavity 50. The filter 90 may correspond to a cylindrical portion having a circular base with the same diameter as the side wall 52 of the lower cavity 50. The filter 90 may be attached to the side wall 52 of the lower cavity 50. The filter 90 is made of a material that is a good thermal conductor. Furthermore, the filter 90 is made of a material that is chemically inert to the reagents. The filter 90 may be made of stainless steel. Furthermore, depending on the reagent, the filter 90 may further be made of nickel or aluminum. The filter 90 has a filtration threshold in the range of 0.1 μm to 100 μm. The filter 90 may correspond to a sintered part. The thickness of the filter 90 is in the range of 0.1 mm to 50 mm.

[0044] The evaporation chamber 10 may further comprise at least one pressure sensor (not shown), for example located in the outlet pipe 70. The evaporation chamber 10 may further comprise at least one temperature sensor (not shown), for example located in the upper cavity 30.

[0045] The injection device 5 is configured to deliver a controlled amount of reagent to be evaporated in the evaporation chamber 10. The injection device 5 may deliver to the evaporation chamber 10 a mixture of carrier gas and droplets of the reagent in liquid form, or a mixture of carrier gas and a solution containing the reagent in liquid, solid or gaseous form dissolved in solution. In particular, the reagent may be pure, if in liquid form, or may be dissolved in a solvent, whether in liquid or solid form. The injection may be continuous or pulsed.

[0046] During operation, the injection device 5 sprays droplets of reagent into the upper cavity 30, as indicated by arrow F1. The temperature and pressure conditions within the upper cavity 30 cause the droplets to evaporate. The reagent vapor exits the upper cavity 30 (arrow F2), passes through the pipe 60 (arrow F3), the lower cavity 50, and the pipe 70 (arrow F4), and then exits the evaporation chamber 10. The temperature and pressure conditions within the upper cavity 30 depend on the particular reagent being used. For example, the temperature within the upper cavity 30 is in the range of 15°C to 300°C. For example, the pressure within the upper cavity 30 is in the range of 0.1 mbar to 2,000 mbar absolute.

[0047] During operation, the body 20 is heated overall by the heating element 100. Thermal energy supplied by the heating element 100 propagates through the body 20 by thermal conduction. The body 20 transfers the thermal energy to the gas contained in the upper cavity 30, the pipe 60, the lower cavity 50, and the pipe 70. Similarly, the capture element 80 is heated by the body 20, and the filter 90 is heated by the body 20. Conversely, gas flowing through the upper cavity 30, the pipe 60, the lower cavity 50, and the pipe 70 can heat the body 20.

[0048] The role of the capture element 80 is to capture the injected droplets, especially the largest droplets, to prevent them from being transported directly to the outlet of the evaporation chamber 10. Due to the structure of the capture element 80, the capture of droplets by the capture element 80 is achieved by absorption and / or adsorption (physisorption and / or chemisorption). In fact, droplets released onto the capture element 80 do not bounce or burst, but are absorbed and / or adsorbed by the capture element 80. Furthermore, the capture element 80 is heated, so that the captured droplets evaporate. The supply of thermal energy to the capture element 80 is sufficient to compensate for the latent heat of evaporation of the droplets captured by the capture element 80. The capture element 80 is heated by thermal conduction between the body 20 and the capture element 80, and the capture element 80 is preferably in contact with the bottom wall 31 of the upper cavity 30. According to the embodiment, the lower cavity 50 is disposed below the bottom wall 31 of the upper cavity 30, so that the passage of hot evaporated gas through the lower cavity 50 directly below the capture element 80 promotes heating of the portion of the body 20 between the capture element 80 and the lower cavity 50. Furthermore, if the injected solution contains soluble non-volatile contaminants, the capture element 80 serves to retain these contaminants and prevent them from leaking outside the upper cavity 30. The capture element 80 does not function as a filter, since the gas flow does not pass through it.

[0049] When solid reagents with low vapor pressure are injected into a solvent and dissolved, evaporation generally occurs by contact with the hot inner surface of the evaporation chamber 10. By using a capture element 80 opposite the injection point of the head 6, it is possible to increase the exchange surface area of ​​the upper cavity 30, thereby increasing the evaporation rate of these solid reagents adsorbed on the surface of the capture element 80.

[0050] The upper cavity 30 advantageously forms a liquid retention space, particularly when the evaporation device 1 is improperly used under thermodynamic conditions that do not allow the injected liquid stream to fully evaporate and / or cause condensation. The temperature in the upper cavity 30 may be too low, the liquid flow rate may be too high, or the pressure may be too high. The retention space formed by the upper cavity 30 is used to store a portion of the liquid that cannot be evaporated, so that the liquid is not sent directly to the outlet of the evaporation chamber 10.

[0051] The use of evaporation chamber 10 is particularly advantageous when the pressure at the outlet of evaporation chamber 10 is low, typically below 10 kPa absolute. Indeed, at low pressures, the gas flow rate within evaporation chamber 10 is high, and the residence time of the droplets within evaporation chamber 10 is accordingly short. Thus, the droplets have less time to evaporate than if the pressure at the outlet of evaporation chamber 10 were higher. Low pressures also result in larger droplets being emitted because it is more difficult to atomize the liquid into fine droplets under these pressure conditions.

[0052] The bends 63 of each pipe 60 form baffles that can block the progress of droplets that may emerge from the upper cavity 30. The filters 90 block the progress of droplets that may reach the lower cavity 50.

[0053] Advantageously, the upper cavity 30 can reduce the clogging phenomenon of the filter 90, which allows for better control of the evaporation process over time and allows for longer intervals between maintenance operations.

[0054] Figure 7 is a partially simplified cross-sectional view of another embodiment of an evaporation device 110. Figures 8, 9, and 10 are cross-sectional views along planes VIII-VIII, IX-IX, and XX, respectively, of Figure 7.

[0055] The evaporation device 110 shown in FIG. 7 includes all of the elements of the evaporation device 1 shown in FIG. 1, and further includes additional features.

[0056] The upper cavity 30 has a central region 34 that is continuous at its top with an annular region 35 of axis D. Each pipe 60 opens into the annular region 35. The central region 34 forms the bottom wall 31 of the upper cavity 30, against which the capture element 80 is pressed. According to an embodiment, the side wall 32 of the upper cavity 30 has a portion 36 that is substantially perpendicular to axis D and forms the bottom of the annular region 35. An end 61 of each pipe 60 is located at the bottom 36 of the annular region 35.

[0057] The lower cavity 50 has a central region 54 that is continuous with an annular region 55 having an axis D. The central region 54 comprises a bottom wall 51 of the lower cavity 50, and the filter 90 is disposed in the central region 54. Each pipe 60 opens into the annular region 55. According to an embodiment, an end 62 of each pipe 60 is disposed in the top wall 53 of the annular region 55 of the lower cavity 50.

[0058] The top wall 33 of the upper cavity 30 further includes a protruding portion 37 that protrudes toward the bottom wall 31 of the upper cavity 30. Together with the sidewalls 32 of the upper cavity 30, the protruding portion 37 defines an annular channel 38 with the sidewalls 32 of the upper cavity 30 that connects the central region 34 of the upper cavity 30 to the annular region 35 of the upper cavity 30.

[0059] 7-10, the pipe 60 has a cylindrical shape and does not have the bend 63 shown in Fig. 1. However, the annular region 35 of the upper cavity 30 and the annular region 55 of the lower cavity 50 change the flow direction of the gas and thus act as a baffle like the bend 63.

[0060] FIG. 11 is a partially simplified cross-sectional view of another embodiment of an evaporation device 120. The evaporation device 120 shown in FIG. 11 includes all of the elements of the evaporation device 110 shown in FIG. 7. The body 20 is formed of three separate sections: an upper section 24, a central section 25, and a lower section 26. The upper section 24 is attached to the central section 25, e.g., by screwing, and the lower section 26 is attached to the central section 25, e.g., by screwing. O-ring or flat gaskets (not shown) ensure sealing between the upper section 24 and the central section 25, and between the central section 25 and the lower section 26. The upper section 24 includes the access pipe 40 and a portion of the upper wall 33 of the upper cavity 30. The lower section 26 includes the pipe 70, the bottom wall 51 of the lower cavity 50, and most of the side wall 52 of the lower cavity 50. The central part 25 includes, among other things, the pipe 60, the bottom wall 31 of the upper cavity 30, and the top wall 53 of the lower cavity 50. Forming the body 20 from three parts 24, 25, 26 facilitates the formation of a body 20 that can be manufactured by machining. Furthermore, maintenance of the evaporation chamber 10 can be facilitated: access to the upper cavity 30 can be easily achieved by separating the top part 24 and the central part 25, and access to the lower cavity 50 and the pipe can be easily achieved by separating the bottom part 26 and the central part 25.

[0061] FIG. 12 is a partially simplified cross-sectional view of another embodiment of an evaporation apparatus 130. The evaporation apparatus 130 shown in FIG. 12 includes all of the elements of the evaporation apparatus 1 shown in FIG. 1, and further includes an additional pipe 132 that opens at one end into the top wall 33 of the upper cavity 30 and at an opposite end into the top wall 23 of the body 20. The evaporation apparatus 130 includes a tube 133 attached to the evaporation chamber 10 and in communication with the pipe 132. The tube 133 is connected to a purge gas injection and / or pressure measurement device (not shown). The evaporation apparatus 130 advantageously allows for purging of the evaporation chamber 10 with a neutral gas and for residual vapor remaining in the evaporation chamber 10 to be evacuated through a dedicated port, i.e., independent of the port through which the reagent to be evaporated is injected into the evaporation chamber 10. This may be desirable, particularly when the evaporation apparatus 130 is connected to a process plant performing ALD processes.

[0062] Various embodiments and variations have been described. Those skilled in the art will understand that certain features of these various embodiments and variations may be combined, and other variations will occur to those skilled in the art. In particular, the evaporation chamber 10 may include a capture element 80, particularly as shown in FIGS. 1 and 5 , and a surface-textured portion of the evaporation chamber 10, particularly for walls not covered by the capture element 80. Furthermore, in the evaporation chamber 10 shown in FIG. 7 , the upper cavity 30 has an annular region and the lower cavity 50 has an annular region. Alternatively, only the upper cavity 30 may have an annular region and the lower cavity 50 may not have an annular region, or only the lower cavity 50 may have an annular region and the upper cavity 30 may not have an annular region.

[0063] Finally, the actual implementation of the described embodiments and variations is within the skill of those skilled in the art based on the functional representations given above.

[0064] This patent application claims priority from French Patent Application No. 23 / 00518, which is incorporated herein by reference.

Claims

1. An evaporation chamber (10), The vaporizer comprises a first cavity (30), a second cavity (50), a first pipe (40) for a liquid inlet that connects the outside of the evaporation chamber to the first cavity (30), a second pipe (60) that connects the first cavity (30) to the second cavity (50), and a third pipe (70) for a vapor outlet that connects the second cavity (50) to the outside of the evaporation chamber; The evaporation chamber, wherein the first pipe (40) and the second pipe (60) open into a first half of the first cavity (30), and the second half of the first cavity (30) is not open.

2. 2. The evaporation chamber of claim 1, further comprising a capture element (80) for capturing droplets within the first cavity (30).

3. 3. The evaporation chamber according to claim 2, wherein the capture element (80) comprises a porous element, in particular a sintered part.

4. 4. The evaporation chamber of claim 2 or 3, wherein the capture element (80) comprises a textured portion of a surface of the first cavity (30) in part or in whole.

5. The evaporation chamber according to any one of claims 2 to 4, wherein the capture element (80) is arranged opposite the first pipe (40).

6. The first cavity (30) has a first central region (34) contiguous with a first annular region (35); the first pipe (40) opens into the first central region (34); The evaporation chamber according to any one of claims 1 to 5, wherein said second pipe (60) opens into said first annular region (35).

7. The evaporation chamber of claims 2 and 6, wherein the capture element (80) is disposed in the first central region (34).

8. An evaporation chamber according to any one of the preceding claims, comprising a filter (90) in the second cavity (50).

9. The second cavity (50) has a second central region (54) contiguous with a second annular region (55); the third pipe (70) opens into the second central region (54); The evaporation chamber according to any one of the preceding claims, wherein the second pipe (60) opens into the second annular region (55).

10. 10. The evaporation chamber of claims 8 and 9, wherein the filter (90) is located in the second central region (54).

11. It comprises a first portion (24), a second portion (25), and a third portion (26), The first portion (24) is attached to the second portion (25), The third portion (26) is attached to the second portion (25), the first section (24) includes the first pipe (40); the second portion (25) includes the second pipe (60); the third section (26) includes the third pipe (70); The first portion (24) defines the first cavity (30) together with the second portion (25), The evaporation chamber according to any one of claims 1 to 10, wherein the second portion (25) together with the third portion (26) defines the second cavity (50).

12. An evaporation chamber (10) according to any one of claims 1 to 11; an injection device (5) for injecting droplets of reagent into the evaporation chamber (10) through the first pipe (40); an evaporation device (1; 110; 120; 130) comprising:

13. the evaporation chamber having a capture element (80) in the second half of the first cavity (30) for capturing the droplets; 13. The evaporation apparatus of claim 12, wherein the injection device (5) is configured to inject the droplets towards the capture element (80).

14. 14. The evaporation apparatus of claim 13, wherein the distance between the orifice of the injection device (5) through which the droplets are injected into the first cavity (30) and the capture element (80) is in the range of 4 cm to 100 cm.

15. The evaporation apparatus according to any one of claims 12 to 15, wherein the injection device (5) is configured to inject a mixture of carrier gas and the liquid droplets into the first cavity (30).

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