Safe separation device for silicon carbide crystals

Abstract

The utility model discloses a safe silicon carbide crystal separating device, which relates to the technical field of silicon carbide crystal processing and comprises a rubber pad, supporting seats are fixedly connected to the left side and the right side of the rubber pad, and supporting plates are fixedly connected to the upper surfaces of the supporting seats. According to the safe separation device for the silicon carbide crystal, the sucker is arranged to adsorb the crystal, and the sleeve is used for transmitting knocking force, so that the traditional separation mode that the crystal is grasped by hands and the bottom support is directly knocked by a hammer is changed, and the sucker is firstly adsorbed on the upper surface of the crystal; the sleeve is sleeved on the connecting rod, the lower edge of the sleeve is abutted against the upper surface of the bottom support, the upper edge of the sleeve is knocked, and knocking force is transmitted to the bottom support by the sleeve, so that the crystal is separated from the bottom support, and a hammer is prevented from being in direct contact with the crystal; the risks that the crystal is damaged due to the fact that the crystal is hit by an iron hammer and operators are hurt due to the fact that the iron hammer hit the crystal are greatly reduced, the safety of the operation process is remarkably improved, and the safety of the operators and the crystal is effectively guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide crystal processing technology, and in particular to a safe separation device for silicon carbide crystals. Background Technology

[0002] Silicon carbide (SiC) crystal is a compound semiconductor crystal formed by covalent bonds between silicon and carbon elements, belonging to the third generation of wide-bandgap semiconductor materials. After SiC crystal growth, the crystal is usually bonded to a graphite substrate, requiring separation before weighing, measurement, and subsequent processing. A SiC crystal separation device is a specialized piece of equipment designed for the complete and efficient separation of SiC crystals from the graphite substrate, playing a crucial role in SiC single crystal preparation and semiconductor device manufacturing.

[0003] The current separation method is rather crude. Operators typically manually grasp the crystal and then use a hammer to strike the graphite base, using inertia to separate the crystal from the base. This method lacks necessary safety measures; during the process, the hammer can easily hit the crystal, causing damage, and may even injure the operator, posing a significant safety hazard. Utility Model Content

[0004] This invention provides a safe separation device for silicon carbide crystals to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0006] A silicon carbide crystal safety separation device includes a rubber pad, with support seats fixedly connected to both sides of the rubber pad. A support plate is fixedly connected to the upper surface of the support seats. A horizontal plate is slidably connected to the upper part of the two support plates facing each other. A spherical connecting rod is rotatably connected to the middle of the horizontal plate. A connecting rod is threaded to the outer circumference of the lower part of the spherical connecting rod. A stop plate is slidably connected to the middle of the connecting rod. Four mounting mechanisms arranged in a ring are movably connected to the middle of the stop plate.

[0007] The installation mechanism includes a locking block 1, which is slidably connected to the middle of the stop plate. Each of the four locking blocks 1 is fixedly connected to a limiting plate 1 on its opposite side. The upper surfaces of the limiting plate 1 and the locking block 1 are fixedly connected to a lever block. The upper part of the lever block is provided with a groove. Two compression springs 1 are fixedly connected to the middle of the side of the limiting plate 1 away from the locking block 1.

[0008] Preferably, the outer periphery of the middle part of the connecting rod has four slots arranged in a ring, and the outer periphery of the four locking blocks on opposite sides is slidably connected to the four slots. The middle part of the limiting plate is slidably connected to two limiting rods, and the limiting rods are fixedly connected to the inside of the stop plate.

[0009] Preferably, a rotating wheel is fixedly connected to the upper part of the spherical connecting rod, a ring is slidably connected to the lower part of the outer periphery of the connecting rod, a suction cup is fixedly connected to the lower surface of the ring, and a disassembly mechanism is movably connected to the lower part of the connecting rod.

[0010] Preferably, the disassembly mechanism includes two locking blocks, which are slidably connected to the front and rear sides of the lower part of the connecting rod, respectively. A limiting plate is fixedly connected to one side of each locking block, and a limiting rod is slidably connected to the left and right sides of each limiting plate. Two compression springs are fixedly connected to one side of each limiting plate.

[0011] Preferably, positioning blocks are fixedly connected to both the left and right sides of the inner cavity of the ring, and positioning grooves are opened on both the left and right sides of the lower part of the connecting rod, with the positioning blocks slidably connected inside the positioning grooves.

[0012] Preferably, a base is abutted against the middle of the upper surface of the rubber pad, a crystal is adhered to the upper surface of the base, the lower surface of the suction cup is adsorbed onto the upper surface of the crystal, and a sleeve is abutted against the upper surface of the base.

[0013] Preferably, an electric push rod is fixedly connected to the upper part of the support plate, and the left and right sides of the upper surface of the horizontal plate are respectively fixedly connected to the output ends of the two electric push rods. Baffles are fixedly connected to both the left and right ends of the horizontal plate.

[0014] Due to the adoption of the above technical solution, the technological progress achieved by this utility model compared to the prior art is as follows:

[0015] 1. This utility model provides a safe separation device for silicon carbide crystals. By setting up a suction cup to adsorb the crystal and using a sleeve to transmit the striking force, it changes the traditional separation method of holding the crystal by hand and directly striking the base with a hammer. First, the suction cup is adsorbed on the upper surface of the crystal. Then, the sleeve is put on the connecting rod and its lower edge abuts against the upper surface of the base. Then, by striking the upper edge of the sleeve, the striking force is transmitted to the base through the sleeve, so that the crystal is separated from the base. This avoids the hammer directly contacting the crystal, greatly reduces the risk of the crystal being damaged by the hammer and the operator being injured by the hammer, significantly improves the safety of the operation process, and effectively protects the safety of personnel and crystals.

[0016] 2. This utility model provides a safe silicon carbide crystal separation device. Through the cooperation of an installation mechanism and a disassembly mechanism, during installation, the components are securely fixed using the cooperation of the locking blocks and slots, as well as the elastic force of the springs. During disassembly, the spring force can be overcome with simple operations, enabling rapid separation of the components. This allows for the rapid installation and disassembly of key components such as the stop plate, ring sleeve, and suction cup, improving the assembly efficiency of the device and facilitating subsequent maintenance, cleaning, and component replacement. Furthermore, due to the detachable nature of the components, the device can adapt to the separation requirements of crystals of different sizes or types, enhancing its versatility and practicality, and reducing operating costs. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0018] Figure 2 This is a schematic cross-sectional view of the sleeve structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the suction cup structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the disassembly mechanism of this utility model;

[0021] Figure 5 This is a schematic diagram of the installation mechanism of this utility model.

[0022] In the diagram: 1. Rubber pad; 2. Support base; 3. Support plate; 4. Horizontal plate; 5. Spherical connecting rod; 6. Connecting rod; 7. Installation mechanism; 71. Pulley; 72. Locking block one; 73. Limiting plate one; 74. Limiting rod one; 75. Compression spring one; 76. Slot; 8. Cut-off plate; 9. Disassembly mechanism; 91. Locking block two; 92. Limiting plate two; 93. Limiting rod two; 94. Compression spring two; 95. Positioning block; 96. Positioning groove; 10. Ring sleeve; 11. Suction cup; 12. Base support; 13. Sleeve; 14. Rotary wheel; 15. Electric push rod; 16. Baffle. Detailed Implementation

[0023] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0024] like Figures 1-5As shown, a silicon carbide crystal safety separation device includes a rubber pad 1, with support seats 2 fixedly connected to both the left and right sides of the rubber pad 1. A support plate 3 is fixedly connected to the upper surface of the support seat 2. A horizontal plate 4 is slidably connected to the upper part of the two support plates 3 facing each other. A spherical connecting rod 5 is rotatably connected to the middle of the horizontal plate 4. A connecting rod 6 is threaded to the outer circumference of the lower part of the spherical connecting rod 5. A stop plate 8 is slidably connected to the middle of the connecting rod 6. Four installation mechanisms 7 arranged in a ring are movably connected to the middle of the stop plate 8.

[0025] The mounting mechanism 7 includes a locking block 72, which is slidably connected to the middle of the stop plate 8. Each of the four locking blocks 72 is fixedly connected to a limiting plate 73 on the opposite side. The upper surfaces of the limiting plate 73 and the locking blocks 72 are fixedly connected to a lever 71. The upper part of the lever 71 is provided with a groove. Two compression springs 75 are fixedly connected to the middle of the side of the limiting plate 73 away from the locking blocks 72.

[0026] It should be noted that the rubber pad 1 serves as the bottom buffer layer of the device, absorbing vibrations and impacts that may occur during the separation process, preventing damage to the device or workbench surface. Simultaneously, the softness of the rubber pad 1 prevents the device from slipping during operation, improving stability. The support base 2 provides a stable support foundation for the support plate 3, ensuring the rigidity and stability of the overall device structure. The support plate 3 serves as the support and guide structure for the horizontal plate 4, ensuring the stability and verticality of the horizontal plate 4 during its vertical movement. The horizontal plate 4 serves as the support platform for the spherical connecting rod 5 and the connecting rod 6. The spherical connecting rod 5 serves as the connector between the horizontal plate 4 and the connecting rod 6. The connecting rod 6 serves as the support structure for the suction cup 11 and the disassembly mechanism 9. The stop plate 8 serves as the support platform for the installation mechanism 7, and through the engagement of the locking block 72 with the slot 76 of the connecting rod 6, the stop plate 8 is fixed and positioned on the connecting rod 6.

[0027] The locking block 72 engages with the slot 76 of the connecting rod 6 to secure the stop plate 8. The limiting plate 73 restricts the movement range of the locking block 72, preventing it from dislodging from the slot 76. The toggle block 71 facilitates manual operation of the locking block 72, enabling the installation and removal of the stop plate 8. The compression spring 75 provides elastic force, ensuring that the locking block 72 remains tightly engaged with the slot 76 when no external force is applied.

[0028] like Figure 4 As shown, four slots 76 arranged in a ring are provided on the outer periphery of the middle part of the connecting rod 6. The outer periphery of the four locking blocks 72 on opposite sides are slidably connected to the four slots 76. Two limiting rods 74 are slidably connected to the middle part of the limiting plate 73. The limiting rods 74 are fixedly connected to the inside of the stop plate 8.

[0029] It should be noted that the slot 76 cooperates with the locking block 72 to install the stop plate 8 in the middle of the connecting rod 6. The limiting rod 74 restricts the movement trajectory of the limiting plate 73, ensuring the stable movement of the locking block 72.

[0030] like Figure 2 As shown, a rotating wheel 14 is fixedly connected to the upper part of the spherical connecting rod 5, a ring sleeve 10 is slidably connected to the lower part of the outer periphery of the connecting rod 6, a suction cup 11 is fixedly connected to the lower surface of the ring sleeve 10, and a disassembly mechanism 9 is movably connected to the lower part of the connecting rod 6.

[0031] It should be noted that the rotating wheel 14 facilitates the rotation of the spherical connecting rod 5, thereby enabling the upper threaded connection between the spherical connecting rod 5 and the connecting rod 6. The ring sleeve 10 serves as a support and positioning structure for the suction cup 11. The suction cup 11 adheres tightly to the crystal surface through vacuum adsorption, achieving the fixation and separation of the crystal. The suction cup 11 is made of flexible material to adapt to the unevenness of the crystal surface and improve the adsorption effect.

[0032] like Figure 4 As shown, the disassembly mechanism 9 includes two locking blocks 91, which are slidably connected to the front and rear sides of the lower part of the connecting rod 6. Each of the two locking blocks 91 is fixedly connected to a limiting plate 92 on one side. Each of the limiting plates 92 is slidably connected to a limiting rod 93 on the left and right sides. Each of the two limiting plates 92 is fixedly connected to two compression springs 94 distributed on the left and right sides.

[0033] It should be noted that the disassembly mechanism 9 is used to easily remove the ring 10 and suction cup 11 from the connecting rod 6 after separation, facilitating replacement or maintenance. The locking block 91 engages with the middle of the ring 10 to connect and fix the connecting rod 6 and suction cup 11. The limiting plate 92 restricts the movement range of the locking block 91. The compression spring 94 provides elastic force, ensuring that the locking block 91 remains tightly engaged with the connecting rod 6 when no external force is applied. The disassembly mechanism 9 is a quick-release structure, allowing for rapid disassembly and installation of the connecting rod 6 and suction cup 11 through simple operation.

[0034] like Figure 3 As shown, positioning blocks 95 are fixedly connected to both sides of the inner cavity of the ring sleeve 10, and positioning grooves 96 are opened on both sides of the lower part of the connecting rod 6, with the positioning blocks 95 slidably connected inside the positioning grooves 96.

[0035] It should be noted that the positioning block 95 cooperates with the positioning groove 96 of the connecting rod 6 to ensure the correct position of the suction cup 11 on the connecting rod 6.

[0036] like Figure 2As shown, the middle of the upper surface of the rubber pad 1 is abutted against the base 12, the upper surface of the base 12 is adhered with crystals, the lower surface of the suction cup 11 is adsorbed onto the upper surface of the crystals, and the upper surface of the base 12 is abutted against the sleeve 13.

[0037] It should be noted that the surface of the base 12 is bonded with grown silicon carbide crystals, and the sleeve 13 is used to transmit the striking force. The crystals are separated from the base 12 by striking the upper edge of the sleeve 13.

[0038] like Figure 2 As shown, an electric push rod 15 is fixedly connected to the upper part of the support plate 3, and the left and right sides of the upper surface of the horizontal plate 4 are respectively fixedly connected to the output ends of the two electric push rods 15. Baffles 16 are fixedly connected to both the left and right ends of the horizontal plate 4.

[0039] It should be noted that the electric push rod 15 is used to raise and lower the horizontal plate 4 and the connecting rod 6, so that the base 12 is away from the rubber pad and suspended in the air. The baffle 16 prevents the horizontal plate 4 from shifting or falling off during movement.

[0040] The working principle of this utility model is as follows: First, place the base 12 with silicon carbide crystals on the rubber pad 1, and press the suction cup 11 to make it adhere to the upper surface of the crystals; then, move the lever 71 to overcome the elastic force of the compression spring 75 and move the locking block 72 outward, so that the stop plate 8 is fitted into the connecting rod 6 and the locking block 72 is aligned with the slot 76. Then, release the lever 71, and the locking block 72 is locked into the slot 76 under the elastic force of the compression spring 75 to fix the stop plate 8; then, put the sleeve 13 on the connecting rod 6 from above so that its lower edge abuts against the upper surface of the base 12; then, start the electric push rod 15 to drive the horizontal plate 4. The connecting rod 6 rises, allowing the base 12 to leave the rubber pad 1 and suspend in the air, with the baffle 16 ensuring stability. Then, the upper edge of the sleeve 13 is struck with a hammer, and the striking force is transmitted to the base 12 through the sleeve 13. Because the crystal is firmly adsorbed by the suction cup 11, the base 12 vibrates and inertia due to the striking force, causing the bonding surface between the crystal and the base 12 to break and achieve safe separation. After separation, the stop plate 8 is removed by moving the lever 71, and the second locking block 91 in the disassembly mechanism 9 is pushed to overcome the elastic force of the compression spring 94 and disengage it from the connecting rod 6. The suction cup 11 is then removed, and finally the device is cleaned and maintained for future use.

[0041] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A safe separation device for silicon carbide crystals, comprising a rubber pad (1), characterized in that: The rubber pad (1) is fixedly connected to the left and right sides with support seats (2), and the upper surface of the support seats (2) is fixedly connected to the support plate (3). The upper part of the two support plates (3) facing each other is slidably connected to the horizontal plate (4). The middle part of the horizontal plate (4) is rotatably connected to the ball connecting rod (5). The lower part of the ball connecting rod (5) is threadedly connected to the connecting rod (6). The middle part of the connecting rod (6) is slidably connected to the stop plate (8). The middle part of the stop plate (8) is movably connected to four installation mechanisms (7) arranged in a ring. The installation mechanism (7) includes a locking block (72), which is slidably connected to the middle of the stop plate (8). Each of the four locking blocks (72) is fixedly connected to a limiting plate (73) on the opposite side. The upper surfaces of the limiting plate (73) and the locking blocks (72) are fixedly connected to a lever (71). The upper part of the lever (71) is provided with a groove. Two compression springs (75) are fixedly connected to the middle of the side of the limiting plate (73) away from the locking blocks (72).

2. The silicon carbide crystal safety separation device according to claim 1, characterized in that: The outer periphery of the middle part of the connecting rod (6) is provided with four slots (76) arranged in a ring. The outer periphery of the four locking blocks (72) on opposite sides is slidably connected to the four slots (76). The middle part of the limiting plate (73) is slidably connected with two limiting rods (74). The limiting rods (74) are fixedly connected to the inside of the stop plate (8).

3. The silicon carbide crystal safety separation device according to claim 1, characterized in that: The upper part of the spherical connecting rod (5) is fixedly connected to a rotating wheel (14), the lower part of the outer periphery of the connecting rod (6) is slidably connected to a ring sleeve (10), the lower surface of the ring sleeve (10) is fixedly connected to a suction cup (11), and the lower part of the connecting rod (6) is movably connected to a disassembly mechanism (9).

4. The silicon carbide crystal safety separation device according to claim 3, characterized in that: The disassembly mechanism (9) includes two locking blocks (91), which are slidably connected to the front and rear sides of the lower part of the connecting rod (6). Limiting plates (92) are fixedly connected to the opposite side of the two locking blocks (91). Limiting rods (93) are slidably connected to the left and right sides of the limiting plates (92). Two compression springs (94) are fixedly connected to the opposite side of the two limiting plates (92).

5. The silicon carbide crystal safety separation device according to claim 4, characterized in that: Positioning blocks (95) are fixedly connected to both sides of the inner cavity of the ring sleeve (10), and positioning grooves (96) are opened on both sides of the lower part of the connecting rod (6). The positioning blocks (95) are slidably connected inside the positioning grooves (96).

6. The silicon carbide crystal safety separation device according to claim 3, characterized in that: The middle of the upper surface of the rubber pad (1) is abutted by a base (12), the upper surface of the base (12) is adhered with crystals, the lower surface of the suction cup (11) is adsorbed onto the upper surface of the crystals, and the upper surface of the base (12) is abutted by a sleeve (13).

7. The silicon carbide crystal safety separation device according to claim 1, characterized in that: An electric push rod (15) is fixedly connected to the upper part of the support plate (3), and the left and right sides of the upper surface of the horizontal plate (4) are respectively fixedly connected to the output ends of the two electric push rods (15). Both the left and right ends of the horizontal plate (4) are fixedly connected to baffles (16).

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