A cooling device for polycrystalline silicon production

Abstract

The application discloses a cooling device for polycrystalline silicon production and belongs to the technical field of polycrystalline silicon production equipment, which comprises a lower ingot casting furnace slidably arranged on a cooling box, a upper ingot casting furnace detachably arranged on the lower ingot casting furnace, and a circular ring arranged on the lower ingot casting furnace; the cooling device further comprises two groups of lifting mechanisms, multiple groups of temperature equalizing mechanisms, a first water passing support mechanism and a second water passing support mechanism. The motor drives the screw rod to rotate, drives the screw nut, the connecting block, the circular ring and the lower ingot casting furnace to vertically reciprocate along the cooling box, adjusts the lifting displacement of the lower ingot casting furnace in the cooling box, simultaneously provides power sources for the temperature equalizing mechanisms, the first water passing support mechanism and the second water passing support mechanism, synchronously drives multiple mechanisms to link, breaks the mode that each mechanism of the traditional cooling device independently operates, improves the integration degree of the device, and reduces the manufacturing cost and operation energy consumption of the device.

Description

Technical Field

[0001] This invention belongs to the technical field of polysilicon production equipment, and particularly relates to a cooling device for polysilicon production. Background Technology

[0002] Polysilicon, as a core raw material for the photovoltaic and semiconductor industries, has its crystal structure, purity, and yield directly determined by the sophistication of its production process. The cooling process following ingot casting is a crucial step in controlling product quality during polysilicon production. Its cooling efficiency and temperature uniformity directly affect the internal stress distribution and crystal growth consistency of the polysilicon ingot, thus having a cascading impact on subsequent processes such as slicing and doping. With the rapid development of the photovoltaic and semiconductor industries, the market's demands for the quantity and quality of photovoltaic-grade and electronic-grade polysilicon continue to rise, driving the development of polysilicon production equipment towards higher efficiency, integration, and energy conservation. As a core supporting equipment in the ingot casting stage, the technological upgrading of cooling devices has become an important direction for industry research and development.

[0003] Existing water-cooled cooling devices for polysilicon production still have the following shortcomings in practical applications: First, the existing equipment does not have an active temperature equalization mechanism. The cooling water in the cooling box forms a significant temperature gradient due to local heat exchange, resulting in a large difference in the cooling rate of different parts of the polycrystalline silicon ingot. This can easily generate internal stress and crystal cracks, reducing the grade of the finished product. Secondly, the existing equipment's water inlet and outlet structures are mostly fixed pipeline designs, and the cooling water is mostly static or semi-static replacement, which limits the heat exchange efficiency and results in a long cooling cycle, thus restricting production efficiency. Furthermore, the filtration structure design in the water replenishment process is inadequate, and some equipment does not have effective filtration components. Impurities from external water sources can easily enter the cooling box and adhere to the surface of the ingot furnace, reducing heat exchange efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a cooling device for polysilicon production, which solves the technical problems in the prior art where the cooling water in the cooling box forms a significant temperature gradient due to local heat exchange, resulting in large differences in the cooling rate of different parts of the polysilicon ingot. Furthermore, the existing devices mostly have fixed pipeline designs for water inlet and outlet, and the cooling water is mostly static or semi-static, which limits the heat exchange efficiency and results in a long cooling cycle.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A cooling device for polycrystalline silicon production includes a lower ingot furnace slidably mounted on a cooling box, with a ring installed on the lower ingot furnace. The device further includes: two sets of lifting mechanisms, both mounted on the top surface of the cooling box, for driving the ring to move vertically; multiple sets of temperature equalization mechanisms, arranged in a ring array along the circumference of the lower ingot furnace, for stirring the cooling water in the cooling box when the lower ingot furnace moves vertically; a first water-passing support mechanism, mounted on one side of the bottom surface of the cooling box and connected to the interior of the cooling box, for receiving and discharging the compressed cooling water from the cooling box when the lower ingot furnace moves downwards; and a second water-passing support mechanism, mounted on the other side of the bottom surface of the cooling box and connected to the interior of the cooling box, for supplying filtered cooling water into the cooling box when the lower ingot furnace moves upwards.

[0006] Preferably, the temperature equalization mechanism includes: a fixed frame, which is fixedly connected to the lower ingot furnace and the ring, and slidably connected to the cooling box; a drive rod, which is installed in the fixed frame and has an arc-shaped strip installed at its lower end; a hollow rod, which is rotatably connected to the inner bottom surface of the cooling box and slidably connected to the drive rod, and has a drive groove matching the arc-shaped strip on its inner wall; and a plurality of first stirring plates, which are equidistantly installed on the outer surface of the hollow rod.

[0007] Preferably, the temperature equalization mechanism further includes: a first gear, fixedly sleeved on the hollow rod; a vertical rod, rotatably connected to the inner bottom surface of the cooling box, with multiple second stirring plates equidistantly installed on its outer surface; a second gear, fixedly sleeved on the vertical rod, meshing with the first gear; and a sealing cover, fixedly connected to the inner bottom surface of the cooling box, with the first gear and the vertical rod both located inside the sealing cover.

[0008] Preferably, it further includes: two connecting blocks, both fixedly connected to the ring; and two lead screw nuts, respectively fixedly connected to the two connecting blocks.

[0009] Preferably, the lifting mechanism includes: a fixed box, installed on the top surface of the cooling box, with a limit groove on its side; a motor, installed on the top surface of the fixed box; and a lead screw, rotatably connected to the fixed box, with its upper end fixedly connected to the power output shaft of the motor, and passing through the lead screw nut.

[0010] Preferably, the second water supply support mechanism includes: a second support box, fixedly connected to the cooling box, on which a second drain pipe and multiple second inlet pipes are installed, the other end of the second drain pipe extending into the cooling box; a sealing cover, which is inserted into a through groove on the top surface of the second support box, and multiple cleaning brushes are installed on its bottom surface; a guide plate, installed on the bottom surface of the sealing cover; a filter plate, which is slidably connected to the sealing cover, and has a guide groove matching the guide plate; and two connecting frames, both fixedly connected to the filter plate.

[0011] Preferably, the second water-passing support mechanism further includes: a mounting plate fixedly connected to the second support box; two crossbars, each rotatably connected to the mounting plate, one end of each crossbar extending into the second support box and rotatably connected to the second support box; two eccentric wheels, each fixedly connected to one end of each of the two crossbars located inside the second support box, the two eccentric wheels respectively matching two connecting frames; two second bevel gears, each fixedly connected to the two crossbars, each having a first bevel gear meshing with it, the two first bevel gears respectively fixedly connected to the two vertical bars.

[0012] Preferably, the second water-passing support mechanism further includes: a wedge block, which is fixedly connected to the inner wall of the second support box; and two vertical plates, both installed inside the second support box and in contact with the filter plate.

[0013] Preferably, the first water supply support mechanism includes: a first support box, which is fixedly connected to the cooling box; The first liquid inlet pipe is fixedly connected to the first support box and is fixedly connected to and communicates with the cooling box; multiple first liquid outlet pipes are all installed on the first support box.

[0014] Preferably, it further includes a demolding mechanism, which includes: a movable plate that is slidably connected to the bottom surface of the lower ingot furnace through a slot; two bent rods that are fixedly connected to the movable plate, slidably connected to the lower ingot furnace, and slidably connected to the ring; and two locking plates that are rotatably connected to the upper ends of the two bent rods respectively and are engaged with the limiting groove.

[0015] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are: 1. The lifting mechanism in this invention is equipped with a fixed box, a limiting groove, a motor, and a lead screw. The motor drives the lead screw to rotate, and the lead screw nut converts the rotational power into linear power, which drives the connecting block, the ring, and the lower casting furnace to slide vertically back and forth along the cooling box. This allows the lower casting furnace to adjust its lifting displacement within the cooling box. At the same time, it provides a power source for the temperature equalization mechanism, the first water supply support mechanism, and the second water supply support mechanism, synchronously driving multiple mechanisms to work together. This breaks the traditional mode of independent operation of each mechanism in the cooling device, improves the integration level of the device, and significantly reduces the manufacturing cost and operating energy consumption of the device.

[0016] 2. The temperature equalization mechanism in this invention comprises a fixed frame, a drive rod, an arc-shaped strip, a hollow rod, a drive groove, a first stirring plate, a first gear, a vertical rod, a second stirring plate, and a second gear. When the ingot furnace is raised and lowered, driving the drive rod to move synchronously, the arc-shaped strip and the spiral drive groove cooperate to convert linear power into rotational power of the hollow rod. Then, through the meshing of the first and second gears, the vertical rod is driven to rotate, which in turn causes the first and second stirring plates to rotate, thereby stirring the cooling water in the cooling box, improving the uniformity of water temperature, and avoiding excessively high local water temperatures that would affect the cooling effect. Furthermore, the temperature equalization mechanism uses mechanical linkage to transmit the stirring power, eliminating the need for an independent motor to drive the temperature equalization mechanism, further reducing the energy consumption and potential failure points of the device.

[0017] 3. The second water supply support mechanism in this invention comprises a second support box, a second drain pipe, a second inlet pipe, a cleaning brush, a filter plate, a connecting frame, a mounting plate, a crossbar, an eccentric wheel, a second bevel gear, and a first bevel gear. When the casting furnace moves upward, it creates a negative pressure in the cooling box, drawing out the filtered cooling water from the second support box. Simultaneously, external water enters through the second inlet pipe and is filtered by the filter plate. The rotation of the vertical rod drives the filter plate to reciprocate through the first bevel gear, the second bevel gear, and the eccentric wheel, allowing the cleaning brush to clean the filter plate. This not only continuously replenishes the cooling box with clean, low-temperature cooling water but also achieves automatic cleaning of the filter plate through the relative movement of the filter plate and the cleaning brush, ensuring the long-term use of the filtration structure.

[0018] 4. The demolding mechanism in this invention uses a movable plate, a bent rod, and a clamping plate. After the polycrystalline silicon is cooled, the clamping plate is engaged in the limiting groove, and then the lower ingot furnace is moved down by the lifting mechanism. The bent rod remains stationary due to the clamping plate's limitation, and the relative movement between the movable plate and the lower ingot furnace pushes the ingot out, thus achieving automatic demolding of the polycrystalline silicon ingot. Moreover, this demolding step utilizes the existing power of the lifting mechanism to achieve demolding, eliminating the need for separate hydraulic, pneumatic, or other demolding power equipment, further simplifying the device structure and reducing equipment investment. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This invention provides a three-dimensional cooling device for polysilicon production. Figure 1 ; Figure 2 This invention provides a three-dimensional cooling device for polysilicon production. Figure 2 ; Figure 3 This is a schematic diagram of the assembly structure of the cooling box, lower casting furnace, ring and lifting mechanism in this invention; Figure 4 This is a schematic diagram of the internal structure of the cooling box in this invention; Figure 5 This is a schematic diagram of the assembly structure of the lower ingot casting furnace and multiple sets of temperature equalization mechanisms in this invention; Figure 6 This is a perspective view of the temperature equalization mechanism in this invention; Figure 7 In this invention Figure 6 Exploded view; Figure 8 This is a schematic diagram of the assembly structure of the fixed frame, drive rod, and arc-shaped strip in this invention; Figure 9 This is a cross-sectional view of the lower casting furnace in this invention; Figure 10 This is a perspective view of the second water-passing support mechanism in this invention; Figure 11 In this invention Figure 10 Exploded view; Figure 12 This is a schematic diagram of the internal structure of the second support box in this invention; Reference numerals: 100, Cooling box; 101, Lower casting furnace; 102, Ring; 103, Connecting block; 104, Lead screw nut; 105, Upper casting furnace; 110, Lifting mechanism; 111, Fixed box; 112, Limiting groove; 113, Motor; 114, Lead screw; 120, Temperature equalization mechanism; 121, Fixed frame; 122, Drive rod; 1221, Arc-shaped strip; 123, Hollow rod; 1231, Drive groove; 124, First stirring plate; 125, First gear; 126, Vertical rod; 127, Second stirring plate; 128, Second gear; 129, Sealing cover; 130, Demolding mechanism; 131, Movable plate ; 132. Bent rod; 133. Clamping plate; 140. First water supply support mechanism; 141. First support box; 142. First liquid inlet pipe; 143. First liquid outlet pipe; 150. Second water supply support mechanism; 151. Second support box; 1511. Wedge block; 1512. Vertical plate; 152. Second liquid outlet pipe; 153. Second liquid inlet pipe; 154. Sealing cover; 1541. Cleaning brush; 1542. Guide plate; 155. Filter plate; 1551. Guide groove; 1552. Connecting frame; 156. Mounting plate; 157. Crossbar; 1571. Eccentric wheel; 1572. Second bevel gear; 158. First bevel gear. Detailed Implementation

[0021] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0022] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0023] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0024] This invention is described in detail with reference to the accompanying drawings. When detailing the embodiments of this invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not to scale. Furthermore, the accompanying drawings are merely examples and should not be construed as limiting the scope of protection of this invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0025] Furthermore, it should be noted in the description of this invention that the terms "first," "second," or "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] Unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" in this invention should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; similarly, they can refer to mechanical connections, electrical connections, or direct connections, or indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0027] Example 1: As Figures 1 to 12 As shown, a cooling device for polycrystalline silicon production includes a lower ingot furnace 101 slidably mounted on a cooling box 100, an upper ingot furnace 105 detachably mounted on the lower ingot furnace 101, and a ring 102 mounted on the lower ingot furnace 101; wherein, the cooling box 100 is made of stainless steel and has a hollow cavity structure with an open top, and its inner wall is polished to reduce the resistance to cooling water flow; The cooling device for polysilicon production also includes two sets of lifting mechanisms 110, multiple sets of temperature equalization mechanisms 120, a first water-passing support mechanism 140, and a second water-passing support mechanism 150. The two sets of lifting mechanisms 110 are symmetrically installed on both sides of the top surface of the cooling box 100. These mechanisms provide vertical movement power to the ring 102, driving the lower ingot furnace 101 to reciprocate vertically along the cooling box 100. The multiple sets of temperature equalization mechanisms 120 are arranged in a ring array and are all fixedly connected to the outer wall of the lower ingot furnace 101 and the bottom surface of the ring 102. These mechanisms convert linear movement power into rotational power when the lower ingot furnace 101 moves vertically, thus stirring and equalizing the cooling water within the cooling box 100. The first water supply support mechanism 140 is fixedly installed on one side of the bottom surface of the cooling box 100. The first water supply support mechanism 140 is connected to the inside of the cooling box 100. The first water supply support mechanism 140 is used to receive and discharge the cooling water that is compressed and discharged from the cooling box 100 when the lower ingot furnace 101 moves downward. The second water supply support mechanism 150 is fixedly installed on one side of the bottom surface of the cooling box 100. The second water supply support mechanism 150 is connected to both the inside of the cooling box 100 and the external water source. The second water supply support mechanism 150 is used to replenish the filtered cooling water into the cooling box 100 when the lower ingot furnace 101 moves upward driven by the ring 102.

[0028] Specifically, when the lifting mechanism 110 operates and drives the lower ingot furnace 101 to perform vertical lifting motion, it can provide operating power to the temperature equalization mechanism 120 through mechanical linkage, thereby enabling the temperature equalization mechanism 120 to stir and equalize the cooling water in the cooling box 100. When the lower ingot furnace 101 moves downward, the first water supply support mechanism 140 receives and discharges the compressed cooling water from the cooling box 100; when the lower ingot furnace 101 moves upward, the second water supply support mechanism 150 replenishes the cooling box 100 with filtered cooling water. The lifting mechanism 110 drives the lower ingot furnace 101 to move vertically back and forth, allowing water to continuously flow in and out of the cooling box 100, thus better cooling the lower ingot furnace 101 and consequently, better cooling the polycrystalline silicon within it.

[0029] like Figures 4 to 8 As shown, the temperature equalization mechanism 120 includes a fixed frame 121, a drive rod 122, a hollow rod 123, multiple first stirring plates 124, a first gear 125, a vertical rod 126, a second gear 128, and a sealing cover 129.

[0030] The upper end of the fixed frame 121 is fixedly connected to the bottom surface of the ring 102, and the lower end of the fixed frame 121 is fixedly connected to the outer wall of the lower casting furnace 101. The side wall of the fixed frame 121 is slidably connected to the inner wall of the cooling box 100. The drive rod 122 is vertically fixedly installed inside the fixed frame 121, and the lower end of the drive rod 122 has an integrally formed arc strip 1221. The hollow rod 123 is vertically installed inside the cooling box 100. The lower end of the hollow rod 123 is rotatably connected to the inner bottom surface of the cooling box 100 through a bearing. The upper end of the hollow rod 123 is sleeved on the outside of the drive rod 122 and is connected to the drive rod 122. The hollow rod 123 has a sliding connection, and a spiral drive groove 1231 matching the arc-shaped strip 1221 is opened on the inner wall of the cavity. The arc-shaped strip 1221 is engaged in the drive groove 1231. Multiple first stirring plates 124 are fixedly installed at equal intervals along the axial direction of the hollow rod 123 on the outer surface of the hollow rod 123 and are radially distributed along the circumference of the hollow rod 123. A first gear 125 is fixedly sleeved on the lower outer side of the hollow rod 123. A vertical rod 126 is vertically arranged on one side of the hollow rod 123, and the lower end of the vertical rod 126 is rotatably connected to the inner bottom surface of the cooling box 100 through a bearing. Multiple second stirring plates 127 are fixedly installed at equal intervals along the axial direction of the vertical rod 126 on the outer surface of the vertical rod 126 and are radially distributed along the circumference of the vertical rod 126; the second gear 128 is fixedly sleeved on the lower outer side of the vertical rod 126 and meshes with the first gear 125; the bottom surface of the sealing cover 129 is fixedly connected to the inner bottom surface of the cooling box 100, and the first gear 125, the second gear 128 and the lower part of the vertical rod 126 are all located inside the sealing cover 129.

[0031] Specifically, when the lifting mechanism 110 moves the ring 102 and the lower casting furnace 101, it will drive the drive rod 122 to move synchronously. When the drive rod 122 moves vertically, it will drive the hollow rod 123 to rotate through the arc-shaped bar 1221 and the spiral drive groove 1231. When the hollow rod 123 rotates, it will also drive the vertical rod 126 to rotate through the first gear 125 and the second gear 128. When the hollow rod 123 and the vertical rod 126 rotate, they will drive the first stirring plate 124 and the second stirring plate 127 to rotate, thereby stirring and equalizing the temperature of the liquid in the cooling box 100.

[0032] Furthermore, by setting up the sealing cover 129, the gear set can be sealed and protected, preventing the cooling water from contacting the gears and causing corrosion or jamming, thus ensuring the stability of the gear transmission.

[0033] Meanwhile, the temperature equalization mechanism 120 can equalize the temperature of the cooling water in the cooling box 100 without the need for an independent motor 113, which reduces the manufacturing and operating costs of the device.

[0034] like Figure 3 and Figure 4As shown, a cooling device for polysilicon production also includes two connecting blocks 103 and two lead screw nuts 104; both connecting blocks 103 are fixedly connected to a ring 102; and the two lead screw nuts 104 are fixedly connected to the two connecting blocks 103 respectively.

[0035] The lifting mechanism 110 includes a fixed box 111, a motor 113, and a lead screw 114. The fixed box 111 is vertically fixed on the top surface of the cooling box 100. A long strip-shaped limiting groove 112 is provided on the side wall of the fixed box 111 near the connecting block 103 in the vertical direction. The motor 113 is fixedly installed on the top surface of the fixed box 111 through a motor 113 bracket. The power output shaft of the motor 113 extends vertically downward into the interior of the fixed box 111. The lead screw 114 is vertically arranged inside the fixed box 111. The upper end of the lead screw 114 is fixedly connected to the power output shaft of the motor 113 through a coupling. The lower end of the lead screw 114 is rotatably connected to the inner bottom surface of the fixed box 111 through a bearing. The lead screw 114 passes through the lead screw nut 104 and is threadedly engaged with the lead screw nut 104.

[0036] Specifically, when the motor 113 drives the lead screw 114 to rotate, the lead screw 114 will drive the lead screw nut 104 to move vertically, which in turn drives the ring 102 and the lower casting furnace 101 to rise and fall through the connecting block 103.

[0037] like Figures 1-4 and Figures 10-12 As shown, the second water supply support mechanism 150 includes a second support box 151, a sealing cover 154, a guide plate 1542, a filter plate 155, two connecting frames 1552, a mounting plate 156, two crossbars 157, two eccentric wheels 1571, and two second bevel gears 1572.

[0038] The second support box 151 has a hollow cavity structure and is fixedly connected to the cooling box 100. A wedge block 1511 is fixedly installed on the lower part of the inner side wall of the second support box 151. Two vertical plates 1512 are symmetrically fixedly installed inside the second support box 151. One end of the second drain pipe 152 is fixedly connected to the upper part of the side wall of the second support box 151 and is in communication with it. The other end of the second drain pipe 152 is fixedly connected to the cooling box 100 and is in communication with it. A one-way valve is installed on the second drain pipe 152. Multiple second inlet pipes 153 are evenly fixedly installed on the lower part of the other side wall of the second support box 151 and are all in communication with the inside of the second support box 151. The second inlet pipes 153 are connected to an external water source and a one-way valve is installed inside the second inlet pipes 153. The sealing cover 154 is inserted into the through groove on the top surface of the second support box 151. Multiple cleaning brushes 1541 are evenly fixedly installed on the bottom surface of the sealing cover 154, and a guide plate 1542 is fixedly installed at the center of the bottom surface of the sealing cover 154.

[0039] The filter plate 155 is horizontally arranged inside the second support box 151. The outer wall of the filter plate 155 is slidably connected to the inner wall of the second support box 151 and contacts the side walls of the two vertical plates 1512. The filter plate 155 is provided with a long strip guide groove 1551 that matches the guide plate 1542. The guide plate 1542 is snapped into the guide groove 1551. The top surface of the filter plate 155 contacts the bristles of the cleaning brush 1541. Two connecting frames 1552 are also fixedly installed on the filter plate 155. Mounting plate 156 is fixedly mounted on the outer side wall of second support box 151. Two horizontal bars 157 are horizontally symmetrically arranged on mounting plate 156. The horizontal bars 157 are rotatably connected to mounting plate 156 through bearings. One end of the horizontal bar 157 passes through the side wall of second support box 151 and is rotatably connected to second support box 151 through bearings. An eccentric wheel 1571 is fixedly mounted on one end of the horizontal bar 157 that extends into the interior of second support box 151. The eccentric wheel 1571 matches the connecting frame 1552 and contacts the inner wall of connecting frame 1552. Two second bevel gears 1572 are fixedly sleeved on the outer side of the middle part of the two crossbars 157, and two first bevel gears 158 are fixedly sleeved on the outer side of the lower end of the two vertical bars 126, and the two first bevel gears 158 mesh with the second bevel gears 1572.

[0040] Specifically, when the ingot furnace 101 moves upward, the liquid storage space in the cooling box 100 increases, and water is drawn from the second support box 151 through the second drain pipe 152. This allows the second support box 151 to draw external water through multiple second inlet pipes 153. When external water enters the second support box 151 through the second inlet pipes 153, the filter plate 155 filters the water, removing impurities. Meanwhile, when the vertical rod 126 of the temperature equalization mechanism 120 rotates, the meshing of the first bevel gear 158 and the second bevel gear 1572 drives the horizontal rod 157 and the eccentric wheel 1571 to rotate. The rotating eccentric wheel 1571 pushes the connecting frame 1552 to drive the filter plate 155 to move horizontally back and forth along the guide plate 1542, so that the filter plate 155 and the cleaning brush 1541 move relative to each other. The cleaning brush 1541 scrapes away the debris on the filter plate 155 to achieve automatic cleaning. The wedge block 1511 facilitates the collection of debris brushed off by the cleaning brush 1541; the two vertical plates 1512 ensure that the filter plate 155 remains in contact with the vertical plates 1512 during reciprocating horizontal movement, thus preventing water from passing through the gap between the filter plate 155 and the second support box 151.

[0041] like Figures 1 to 4As shown, the first water supply support mechanism 140 includes a first support box 141, a first inlet pipe 142, and multiple first drain pipes 143. The first support box 141 has a hollow cavity structure and is fixedly connected to the cooling box 100. One end of the first inlet pipe 142 is fixedly connected to and communicates with the side wall of the first support box 141, and the other end of the first inlet pipe 142 is fixedly connected to and communicates with the cooling box 100. Multiple first drain pipes 143 are evenly fixedly installed on the bottom surface of the first support box 141, and all multiple first drain pipes 143 are connected to the interior of the first support box 141. A one-way valve is installed inside each of the first drain pipes 143.

[0042] Specifically, when the ingot furnace 101 moves downward, the cooling water in the cooling box 100 is compressed, the pressure increases, and the cooling water is pushed into the first support box 141 through the first inlet pipe 142 and discharged through the first drain pipe 143. The one-way valve on the first drain pipe 143 prevents the discharged cooling water from flowing back, ensuring the one-wayness and effectiveness of the drainage action.

[0043] Working principle: In the initial state, the lower casting furnace 101 is located above the cooling box 100. The cooling box 100 contains an appropriate amount of cooling water. The second liquid inlet pipe 153 of the second water supply support mechanism 150 is connected to the external water source. The first liquid outlet pipe 143 of the first water supply support mechanism 140 is connected to the waste liquid collection device. The clamping plate 133 of the demolding mechanism 130 is in a free rotation state and is not inserted into the limiting groove 112.

[0044] In practical use, by starting the motor 113 of the lifting mechanism 110, the power output shaft of the motor 113 will drive the lead screw 114 to rotate in the fixed box 111. The lead screw 114 is threadedly engaged with the lead screw nut 104, converting the rotational power into the vertical downward movement power of the connecting block 103, causing the connecting block 103 to slide downward along the limiting groove 112, driving the ring 102 and the lower ingot furnace 101 to slide downward along the cooling box 100. When the ingot furnace 101 slides downward, it will compress the water storage space in the cooling box 100, increase the pressure of the cooling water, and then push the cooling water into the first support box 141 through the first inlet pipe 142 of the first water supply support mechanism 140. After the first support box 141 temporarily stores the cooling water, it will discharge the cooling water into the waste liquid collection device through multiple first drain pipes 143. The one-way valve on the first drain pipe 143 prevents the cooling water from flowing back and ensures the effectiveness of the drainage action. When the lower ingot furnace 101 moves to the preset position, the control motor 113 rotates in the opposite direction. The motor 113 drives the lead screw 114 to rotate in the opposite direction. Through the lead screw nut 104 and the connecting block 103, the ring 102 and the lower ingot furnace 101 slide upward along the inner wall of the cooling box 100. As the ingot furnace 101 slides upward, the water storage space in the cooling box 100 increases, creating a negative pressure. This negative pressure is transmitted to the second support box 151 via the second drain pipe 152, pushing the filtered water in the second support box 151 into the cooling box 100 through the second drain pipe 152. The one-way valve on the second drain pipe 152 prevents the cooling water in the cooling box 100 from flowing back. Simultaneously, an external low-temperature water source enters the second support box 151 through the second inlet pipe 153. When the cooling water passes through the filter plate 155, impurities in the water are intercepted by the filter plate 155, thus achieving the filtration of the cooling water. During the operation of the temperature equalization mechanism 120, the vertical rod 126 rotates, driving the first bevel gear 158 at its lower end to rotate, which in turn meshes with and drives the second bevel gear 1572 and the horizontal rod 157 to rotate. The horizontal rod 157 drives the eccentric wheel 1571 at its end to rotate. The rotating eccentric wheel 1571 pushes the connecting frame 1552 to drive the filter plate 155 to move horizontally back and forth along the guide groove 1551 of the guide plate 1542. The filter plate 155 moves relative to the cleaning brush 1541 on the bottom surface of the sealing cover 154. The bristles of the cleaning brush 1541 scrape off the debris attached to the surface of the filter plate 155, realizing the automatic cleaning of the filter plate 155. Then, by controlling the motor 113 to continuously rotate forward and backward, the lower ingot furnace 101 is driven to slide back and forth vertically within the cooling box 100, continuously triggering the stirring of the temperature equalization mechanism 120, the drainage of the first water supply support mechanism 140, and the water replenishment and filtration cleaning of the second water supply support mechanism 150, thereby realizing the dynamic circulation and uniform stirring of cooling water, continuously cooling the polycrystalline silicon ingot in the lower ingot furnace 101 until the temperature of the polycrystalline silicon ingot drops to the preset value.

[0045] Simultaneously, when the ingot furnace 101 moves vertically, it drives the fixed frame 121 and the drive rod 122 to move synchronously. The arc-shaped strip 1221 at the lower end of the drive rod 122 slides in the drive groove 1231 of the hollow rod 123. Since the drive groove 1231 is spiral, the downward movement of the arc-shaped strip 1221 drives the hollow rod 123 to rotate around its own axis. The hollow rod 123 drives the first stirring plate 124 on its outer surface to rotate, stirring the cooling water in the cooling box 100. At the same time, the hollow rod 123 drives the first gear 125 to rotate. The first gear 125 meshes with the second gear 128, driving the second gear 128 and the vertical rod 126 to rotate. The vertical rod 126 drives the second stirring plate 127 on its outer surface to rotate, realizing double-layer stirring and making the cooling water temperature uniform.

[0046] Example 2: As Figure 5 and Figure 9 As shown, while all other parts are the same as in Example 1, the difference between this example and Example 1 is that: A cooling device for polysilicon production further includes a demolding mechanism 130, which includes a movable plate 131, two bent rods 132 and two clamping plates 133.

[0047] The movable plate 131 is slidably connected to the bottom surface of the lower ingot furnace 101 through a slot; two bent rods 132 are symmetrically arranged on both sides of the lower ingot furnace 101, one end of the bent rod 132 is fixedly connected to the movable plate 131, the bent rod 132 is slidably connected to the lower ingot furnace 101, and the bent rod 132 is also slidably connected to the ring 102 and the connecting block 103; two clamping plates 133 are rotatably connected to the upper ends of the two bent rods 132 through rotating shafts, and the clamping plates 133 are adapted to the limiting groove 112 and can be inserted into the limiting groove 112.

[0048] Working principle: In actual use, after the polycrystalline silicon is cooled down, the two sets of lifting mechanisms 110 drive the connecting block 103, the ring 102 and the lower casting furnace 101 to move upward, which in turn drives the clamping plate 133 and the bent rod 132 to move upward. When the clamping plate 133 is aligned with the limiting groove 112, the two motors 113 are turned off, and then the clamping plate 133 is rotated to make it clamp in the limiting groove 112. Then, when the lifting mechanism 110 drives the connecting block 103, the ring 102 and the lower ingot furnace 101 to move downward, the bent rod 132 cannot move with the ring 102 due to the limitation of the clamping plate 133, which in turn prevents the movable plate 131 from moving with the ring 102 and the lower ingot furnace 101. Therefore, when the lower ingot furnace 101 moves downward, the movable plate 131 remains stationary due to the limitation of the clamping plate 133. The relative vertical movement of the two causes the movable plate 131 to push the polycrystalline silicon ingot upward from the lower ingot furnace 101.

[0049] After demolding, manually rotate the clamping plate 133 to release the clamping plate 133 from the limiting groove 112. The bent rod 132 and the movable plate 131 will reset under the action of gravity, waiting for the next cooling operation.

[0050] This demolding mechanism 130 can be linked with the lifting mechanism 110, eliminating the need for additional power sources and auxiliary equipment, thus reducing the manufacturing cost of the device.

[0051] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

[0052] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to specific implementations. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A cooling device for polycrystalline silicon production, comprising a lower ingot furnace slidably mounted on a cooling box, wherein a circular ring is mounted on the lower ingot furnace, characterized in that, Also includes: Both sets of lifting mechanisms are installed on the top surface of the cooling box and are used to drive the ring to move vertically; Multiple temperature equalization mechanisms are arranged in a ring array along the circumference of the lower ingot furnace to stir the cooling water in the cooling box when the lower ingot furnace moves vertically. The first water supply support mechanism is installed on one side of the bottom surface of the cooling box and is connected to the inside of the cooling box. It is used to receive and discharge the cooling water that is compressed and discharged from the cooling box when the lower casting furnace moves downward. The second water supply support mechanism is installed on the other side of the bottom surface of the cooling box and is connected to the inside of the cooling box. It is used to supply filtered cooling water into the cooling box when the lower ingot furnace moves upward.

2. The cooling device for polycrystalline silicon production according to claim 1, characterized in that, The temperature equalization mechanism includes: The fixed frame is fixedly connected to the lower ingot furnace and the ring, and slidably connected to the cooling box; A drive rod is installed inside the fixed frame, and an arc-shaped strip is installed at its lower end; A hollow rod is rotatably connected to the inner bottom surface of the cooling box and slidably connected to the drive rod. A drive groove matching the arc-shaped strip is provided on the inner wall of its cavity. Multiple first stirring plates are equidistantly installed on the outer surface of the hollow rod.

3. The cooling device for polycrystalline silicon production according to claim 2, characterized in that, The temperature equalization mechanism also includes: The first gear is fixedly sleeved on the hollow rod; The vertical rod is rotatably connected to the inner bottom surface of the cooling box, and multiple second stirring plates are equidistantly installed on its outer surface; The second gear is fixedly sleeved on the vertical rod and meshes with the first gear. A sealing cover is fixedly connected to the inner bottom surface of the cooling box, and the first gear and the vertical rod are both located inside the sealing cover.

4. The cooling device for polycrystalline silicon production according to claim 3, characterized in that, Also includes: Both connecting blocks are fixedly connected to the circular ring; Two lead screw nuts are fixedly connected to the two connecting blocks respectively.

5. The cooling device for polycrystalline silicon production according to claim 4, characterized in that, The lifting mechanism includes: A fixed box is installed on the top surface of the cooling box, and a limit groove is provided on its side. The motor is mounted on the top surface of the fixed box; The lead screw is rotatably connected to the fixed box, and its upper end is fixedly connected to the power output shaft of the motor, passing through the lead screw nut.

6. The cooling device for polycrystalline silicon production according to claim 5, characterized in that, The second water supply support mechanism includes: The second support box is fixedly connected to the cooling box, and a second drain pipe and multiple second inlet pipes are installed on it. The other end of the second drain pipe extends into the cooling box. The sealing cover is inserted into a through slot on the top surface of the second support box, and multiple cleaning brushes are installed on its bottom surface. A guide plate is installed on the bottom surface of the sealing cover; The filter plate is slidably connected to the sealing cover, and a guide groove matching the guide plate is provided on it; Both connecting frames are fixedly connected to the filter plate.

7. The cooling device for polycrystalline silicon production according to claim 6, characterized in that, The second water supply support mechanism also includes: The mounting plate is fixedly connected to the second support box; Both crossbars are rotatably connected to the mounting plate, and one end of each crossbar extends into the second support box and is rotatably connected to the second support box. Two eccentric wheels are fixedly connected to one end of each of the two crossbars located inside the second support box, and the two eccentric wheels are respectively matched with two connecting frames; Two second bevel gears are fixedly connected to the two crossbars respectively, and each of them is meshed with a first bevel gear. The two first bevel gears are fixedly connected to the two vertical bars respectively.

8. The cooling device for polycrystalline silicon production according to claim 7, characterized in that, The second water supply support mechanism also includes: The wedge-shaped block is fixedly connected to the inner wall of the second support box; Both vertical plates are installed inside the second support box and are in contact with the filter plate.

9. The cooling device for polycrystalline silicon production according to claim 1, characterized in that, The first water supply support mechanism includes: The first support box is fixedly connected to the cooling box; The first liquid inlet pipe is fixedly connected to the first support box and is fixedly connected to and communicates with the cooling box. Multiple first drain pipes are installed on the first support box.

10. The cooling device for polycrystalline silicon production according to claim 5, characterized in that, It also includes a demolding mechanism, which comprises: The movable plate is slidably connected to the bottom surface of the lower ingot furnace by a slot. Both bent rods are fixedly connected to the movable plate, slidably connected to the lower ingot furnace, and slidably connected to the circular ring; Two clamping plates are rotatably connected to the upper ends of the two bent rods respectively, and are inserted into the limiting grooves.

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