Flap valve and seal with improved seal geometry for such valve - Patents.com

Abstract

The present invention relates to a sealing element (10) for a valve closure body of a valve, the sealing element (10) having a mounting region (21) with a mounting body (22) and a sealing region (11) for providing a seal for a valve opening of the valve, the mounting region (21) and the sealing region (11) being joined to each other. The sealing element (10) has a sealing lip (12) and an alignment lip (13) in the sealing region (11), the sealing lip (12) and the alignment lip (13) being aligned with each other at an opening angle (α), the sealing lip (12) being configured to provide a seal for the valve opening of the valve, and the alignment lip (13) being configured to align the sealing region (11) against the sealing surface upon contact with the sealing surface. The mounting body (22) has at least one retention surface (23) on its underside opposite the sealing region (11).

Description

[Technical Field]

[0001] The present invention relates to a special sealing element for a valve, to a valve-closing body equipped with such a sealing element, and in particular to a valve equipped with such a valve-closing body. [Background technology]

[0002] Generally, valves are provided for adjusting the flow rate, in particular the flow rate of a fluid, through the valve. The valve can allow or completely block the flow, in particular over the largest valve opening cross section. Furthermore, certain types of valves offer the possibility of adjusting the flow rate per unit time, i.e., the possibility of adjusting the fluid flow rate.

[0003] Vacuum valves constitute a special category of valves, which are known in various embodiments from the prior art for adjusting the volumetric or mass flow rate and / or for substantially gas-tightly closing a flow path extending through an opening formed in a valve housing, and are used in particular in vacuum chamber systems in the field of IC, semiconductor or substrate manufacturing, which must be carried out in a protective atmosphere and as free as possible from the presence of contaminating particles.

[0004] Such a vacuum chamber system includes, in particular, at least one evacuable vacuum chamber for accommodating semiconductor elements or substrates to be processed or manufactured, the vacuum chamber having at least one vacuum chamber opening through which the semiconductor elements or other substrates can be introduced into and removed from the vacuum chamber, and at least one vacuum pump for evacuating the vacuum chamber. For example, in a manufacturing facility for semiconductor wafers or liquid crystal substrates, sensitive semiconductor elements or liquid crystal elements pass sequentially through several process vacuum chambers, in which the components located therein are processed by a respective processing device. During the processing process inside the process vacuum chambers and during transport from chamber to chamber, the sensitive semiconductor elements or substrates must always be located in a protective atmosphere, in particular an air-free environment.

[0005] For this purpose, on the one hand, peripheral valves are used to open and close gas supply or discharge paths, and on the other hand, transfer valves are used to open and close transfer openings in the vacuum chamber for introducing and discharging components.

[0006] Peripheral valves are used in particular for open-loop or closed-loop control of gas flow between the vacuum chamber and a vacuum pump or further vacuum chamber.

[0007] The process chambers are connected to one another, for example, via transfer passages. The process chambers may be opened by vacuum transfer valves to transfer components from one process chamber to the next, and then gas-tightly closed to perform each manufacturing step. Additionally, a movable transfer chamber is used that can dock with the process chambers and transport semiconductor components to the protective atmosphere between the process chambers.

[0008] Prior art, e.g., U.S. Pat. No. 5,076,205 or U.S. Pat. No. 5,292,393, discloses multi-chamber systems for manufacturing semiconductor components, in particular semiconductor wafers, in which a plurality of process chambers are arranged radially around a central transfer chamber. This central transfer chamber is connected via tunnels to second transfer chambers in which further process chambers are arranged radially, thereby enabling the production of a large number of such processing islands into one continuous semiconductor manufacturing system. A handling system arranged in the transfer chamber transports the semiconductor components from one process chamber to the next via the transfer chamber.

[0009] Furthermore, the process chambers can be chained together, arranging them one after the other, with connecting openings between adjacent process chambers that can be gas-tightly closed by transfer valves. Each process chamber has at least two openings, with the outlet opening of a given process chamber being the inlet opening of the following process chamber in the process chamber chain. Between each pair of process chambers and at the beginning and end of the process chamber chain, a transfer valve is located, each with two valve openings in its valve housing that can be gas-tightly separated from each other.

[0010] The described vacuum chamber systems are used in different areas of semiconductor manufacturing and substrate manufacturing and have proven suitable for the production and processing of small to medium-sized semiconductor components and substrate components. However, new technological fields require increasingly larger integrated semiconductor components and substrates, which necessitates the provision of new production systems. Examples of this are solar panels or display panels, particularly plasma panels and LCD panels, with widths of over 1 meter. To process such large semiconductor components, liquid crystal substrates, or other substrates, correspondingly larger dimensioned process chambers and transfer valves are required.

[0011] In the material science sense, a substrate is generally understood to mean a material to be processed, in particular the surface of which is to be finished or coated. The substrate may be a wafer from the field of semiconductor technology, the base material of a printed circuit board, or any other material, especially in plate or strip form, that is to be processed accordingly by a coating, finishing, or treatment method that must be carried out in a vacuum or process gas environment. Substrates are also understood to mean, for example, glass plates to be coated for flat displays or solar panels with a thickness of more than 0.5 mm and less than 5 mm, or special steel foils or tapes with a thickness of more than 0.05 mm and less than 0.2 mm.

[0012] Such transfer valves for opening and closing process chambers are therefore distinguished by extremely large dimensions, sometimes exceeding 1500 mm in width depending on the process, large sealing lengths, and extremely large opening cross sections. This opening cross section is particularly elongated and slit-shaped, with the width being significantly greater than the height of the opening. These valves are called transfer valves based on the described field of use and the associated dimensions, square valves based on their square opening cross sections, and gate valves, square gates, transfer gate valves, flap valves, flap transfer valves, or rotary feedthroughs based on their functional form.

[0013] U.S. Patent No. 6,416,037 (Geiser) or U.S. Patent No. 6,056,266 (Blecha) describe small-sized transfer valves in the form of vacuum gate valves or gate valves, also known as valve gates or square gates. In the prior art, opening and closing is usually performed in two steps. In a first step, the valve closing body, in particular the closing disk, is moved linearly substantially parallel to the valve seat to cover the opening without contact between the valve closing body and the valve seat in the valve housing. In a second step, the valve closing body is pressed with its closing side against the valve seat in the valve housing, thereby closing the opening gastight.

[0014] Furthermore, smaller gate valves are known in which the closing and sealing process is performed via a single linear movement. Such valves are, for example, transfer valves from VAT Vakuumventile AG (Haag, Switzerland) known under the product designation "MONOVAT Reihe 02 and 03" and configured as square insert valves. The structure and function of such valves are described, for example, in U.S. Pat. No. 4,809,950 (Geiser) and U.S. Pat. No. 4,881,717 (Geiser).

[0015] Such drive techniques have proven suitable in the prior art, but are only limitedly suitable for very large opening cross sections, in particular elongated, slit-like opening cross sections.

[0016] Due to the large sealing lengths resulting from the large opening cross sections, very high demands are placed on the seals, the guides for the valve closing bodies and the drive devices.

[0017] Various sealing devices for this purpose are known in the prior art, for example from US Patent No. 6,629,682 (Duelli). Suitable materials for sealing rings and seals in vacuum valves are, for example, fluororubbers, also called FKM, in particular the fluoroelastomers known under the trade name "Viton", as well as perfluororubbers, abbreviated as FFKM.

[0018] With such large sealing lengths and opening cross sections, there are particular challenges in ensuring tightness over the entire sealing length, even in the event of very large pressure differences, and thus in ensuring a defined pressing force between the valve closing body and the valve seat.

[0019] Maintaining a constant pressing pressure when the pressure difference is large can be problematic, especially when the valve is dimensioned to a large extent. To maintain a constant pressing pressure, a specific transfer valve provides for a particularly robust dimensioning of the valve closing body, its drive device, and its bearing device, so that the valve closing body maintains its target position and does not undergo undesired position changes, even when the force acting on the valve closing body due to the pressure difference is high. From EP 2 355 132 B1, a flap valve is known that provides a solution to this problem, and in this known flap valve, it is possible to provide a pressing force that is as constant as possible along the entire sealing length of the valve seal.

[0020] Due to their robustness and wall thickness, such valves typically have relatively large installation dimensions. This is a drawback, particularly with regard to the space required for installation and for component handling. Reduction of the installation dimensions is considered limited, in part, by the spatial extension of the valve-closing body. Furthermore, to provide the necessary pressing force, prior art valves require correspondingly robust drive mechanisms, which themselves require large wall thicknesses for support. Summary of the Invention [Problem to be solved by the invention]

[0021] SUMMARY OF THE INVENTION The problem underlying the present invention is therefore to provide an improved valve, in particular a vacuum valve, which reduces or avoids the above-mentioned drawbacks. [Means for solving the problem]

[0022] In particular, the problem underlying the present invention is to improve valves, in particular those with an elongated, in particular slit-shaped, first opening, so that tightness can be reliably guaranteed when the seal is pressed against the valve seat, particle generation can be avoided, and the valve offers improved installation dimensions while maintaining substantially unchanged properties.

[0023] A further object of the present invention is to provide an improved valve closure body or an improved sealing element for such a valve, which contributes to solving the problem.

[0024] These objects are achieved by implementing the features set forth in the characterizing part of the independent claims.Alternative or advantageous refinements of the invention can be found in the dependent claims.

[0025] The idea behind the present invention is to provide a valve, in particular a vacuum valve, whose valve housing has two valve openings located opposite each other and a valve closing body with a seal (sealing element) for closing the first of the two openings. In the closed position, the valve closing body covers the first valve opening, with the seal contacting the valve seat of the first valve opening and thus closing the first valve opening (gas-tight). The valve housing is dimensioned so that in the open position, in which the first valve opening is maximally opened, the valve closing body is at least partially located within the opposite second valve opening.

[0026] This constructional feature makes it no longer necessary to position the first and second valve openings so far away from each other that the closing body is completely located between them in the open position, which allows the dimensions of the valve, and in particular the valve housing, to be significantly reduced, in particular the installation width, by at least the length of the closing body that extends into the second valve opening in the open position.

[0027] To achieve further reductions, alternative flap drives have been proposed which, on the one hand, require less space and, on the other hand, can exert a reduced pressing force. For typical vacuum applications, the pressing force that can be generated by this flap drive to press the valve closing body against the valve seat may well be sufficient.

[0028] However, in special vacuum applications, for example where the pressure difference is relatively large, it may be important to place higher demands on the sealing of the system. In this respect, the invention proposes an improved sealing element and an improved valve-closing body provided with such a sealing element, which, when combined with the valve according to the invention, allows for a further improved sealing effect to be obtained.

[0029] The proposed configuration of the sealing element (seal) according to the invention provides reliable alignment of the sealing element, on the one hand, with the valve-closing body and, on the other hand, with the valve seat when the valve is closed. For this purpose, the sealing element has a sealing area with two sealing lips arranged and aligned in a Y-shape. One sealing lip provides the desired sealing action, while the second lip serves to maintain the desired alignment of the sealing area and thus of the sealing lip provided for sealing action with the valve seat, even in the event of non-orthogonal (oblique) contact with the valve seat.

[0030] The second lip, also referred to below as the alignment lip, may have a vent passage, for example a material cutout, in its extension, which allows the intermediate space between the lip and the valve seat to be vented upon contact with the valve seat and prevents unwanted air inclusions from remaining. Such air inclusions would result in an uncontrolled and delayed escape of fluids (e.g., gases) that are undesirable for the processing process, thereby making the process unstable. Therefore, when the sealing element extends around the entire periphery (in the edge region of the valve-closing body), the alignment lip is preferably positioned inward, i.e., toward the valve opening when the valve opening is closed.

[0031] To ensure the desired alignment of the sealing element relative to the valve-closing body, the sealing element has a mounting body whose underside, diametrically facing the sealing area, is flat, thereby providing a seating surface against which the sealing element can be preferably aligned when cooperating with a corresponding surface of the valve-closing body or the valve seat.

[0032] The present invention therefore relates to a sealing element for a valve closure body and / or a valve seat of a valve, in particular a vacuum valve, which has on the one hand an attachment region with an attachment body configured to attach the sealing element to the valve closure body and / or the valve seat, and on the other hand a sealing region for providing a seal for the valve opening of the valve, the attachment region and the sealing region being connected to each other or formed contiguous.

[0033] The sealing element has a sealing lip and an alignment lip at a sealing region, the sealing lip and the alignment lip being aligned relative to one another at an opening angle α. The sealing lip is configured to provide a seal for the valve opening, and the alignment lip is configured to align the sealing region against the sealing surface upon contact with the surface. The mounting body has a retaining surface on its underside opposite the sealing region.

[0034] The term "underside" is generally understood herein to mean the surface of the sealing element that is located opposite the sealing area and that is assigned to the mounting area. However, the surface that faces away from the sealing area does not necessarily have to be understood as the underside. Rather, the underside should be understood as the surface that corresponds to the lower part of the sealing element, in which case the sealing area is assigned to the upper part of the sealing element.

[0035] In one embodiment, the holding surface is oriented in a direction parallel to the lateral axis, which is oriented perpendicular to the pressing direction defined by the opening angle, and in particular the holding surface may be formed flat.

[0036] The holding surface can thus form a flat bottom surface of the sealing element and thus a corresponding resting surface for cooperating with a corresponding counter surface.

[0037] Alternatively, the retaining surfaces may be oriented transversely relative to the lateral axis.

[0038] Furthermore, the sealing element may have one or more further retaining surfaces configured to maintain the desired alignment of the sealing element. In particular, the valve-closing body on which the sealing element is to be placed may have corresponding elements (surfaces) that cooperate with the retaining surfaces when the sealing element is coupled to the closure body. The retaining surfaces may, for example, be arranged at an angle to one another, for example, describing a V-, L- or U-shape, or may be oriented parallel to one another.

[0039] In one embodiment, the mounting body can be relatively thin. In this case, the thickness of the mounting body can be small compared to the extension length of the sealing region in the opposite direction. Such an embodiment can provide for the mounting body's requirement for vulcanization-bonding the sealing element to the valve-closure body or valve seat. In this case, the mounting body is understood to be in particular a section or part of the sealing element that provides for the connection of the sealing element to the support surface (sealing surface) by vulcanization.

[0040] In one embodiment, the relative alignment of the sealing lip and the alignment lip may be Y-shaped.

[0041] In one embodiment, the sealing lip and the alignment lip may form an opening angle α based on a range of 90° to 160°, in particular an angle based on a range of 110° to 150°.

[0042] Such a relative alignment can, in particular, contribute to the sealing lip also contacting the sealing surface when it is in contact with the sealing surface of the valve seat without the sealing lip also contacting this sealing surface, in which case a pivotal application of the sealing region (relative to the mounting region) and therefore of the sealing lip and the alignment lip to the sealing surface can be effected, in particular so that the pressing direction is oriented perpendicular to the sealing surface.

[0043] In particular in this regard, the sealing lip and the alignment lip are preferably configured so that the relative alignment of the lips remains substantially maintained even when one lip merely rotates or pivots, and in particular remains maintained at least as long as there is no pressing of the sealing region against the sealing surface.

[0044] In one embodiment, the mounting body may have a retaining element, which may provide the retaining surface(s), and which is in particular oriented opposite to the pressing direction A and which may in particular be configured as a pin, web, wedge or mandrel.

[0045] In one embodiment, the sealing element has a longitudinally extending portion, which may in particular extend perpendicular to the transverse axis and perpendicular to the pressing direction.

[0046] The sealing element can in particular be designed as a closed sealing element, in particular as a seal extending over the entire circumference, or as a ring (sealing ring) with a corresponding sealing cross-section.

[0047] In one embodiment, the alignment lip has at least one notch, in particular a plurality of notches, which may be configured such that when the sealing area contacts the sealing surface, the intermediate space created between the sealing surface, the sealing lip and the alignment lip can remain accessible through the at least one notch.

[0048] In particular, the at least one cutout may be formed as a notch, a slit, a perforation or a hole.

[0049] The notch can in particular act as a vent passage: when it contacts a corresponding sealing surface (e.g., at the valve seat), the notch allows the intermediate chamber between the lip and the sealing surface to be vented, so that no undesirable air inclusions remain in the intermediate chamber when the valve is closed.

[0050] The notch can also provide ventilation to the intermediate chamber. The lip of the sealing element is typically pinched between the support (valve-closing body) and the counterpart (valve seat) when the chamber is evacuated. This prevents contact between the two bodies. Also, during such pressurization, any fluid can be forced out of the intermediate chamber between the seal and, for example, the valve seat. Therefore, a suction effect can occur when the valve is open, which could cause the sealing element to remain attached to the valve seat. The notch therefore allows ventilation to the intermediate chamber when the valve is open, which prevents the sealing element from being sucked (sucked) to the counterpart (valve seat).

[0051] The profiled seal (sealing element) can be relatively flexible due to its cross section, which makes it possible to significantly reduce the force required to apply the desired pressure.

[0052] The present invention also relates to a valve closing body, in particular a valve disc, for a valve, in particular a vacuum valve, for adjusting a volumetric or mass flow rate and / or opening or closing a valve opening. The valve closing body has a connection side with a coupling configured for connection to a drive unit of the valve. Furthermore, a closing side opposite the connection side is provided with a seal configured to correspond to a sealing surface of a valve seat of the valve. The closing side is therefore located opposite the connection side and faces in the opposite direction.

[0053] The valve closing body has a holding area on the closing side, the seal being configured as a sealing element as described above, and the mounting body of the mounting area being connected to the holding area.

[0054] In one embodiment, the mounting body of the mounting area can be present connected to the holding area by vulcanization, in particular vulcanization-fastened to this holding area.

[0055] In one embodiment, the valve closing body may have a groove on the closing side, the seal being formed as a sealing element as described above, and the mounting body of the mounting region being present in this embodiment in the groove.

[0056] In one embodiment, the groove may be configured to extend over the entire periphery of the edge region of the valve-closing body, i.e., the groove provides a recess on the closing side of the valve-closing body, which recess may extend along a line that should provide the sealing effect of the closing body. This sealing line is preferably adapted to the extent of the sealing surface on the side of the valve seat.

[0057] In one embodiment, the groove may have a groove bottom configured to correspond to the holding surface of the mounting body. The groove bottom may be oriented parallel to the surface of the closing side or transversely. In particular, the groove may have multiple bottoms that correspond to the arrangement of the corresponding holding surfaces of the mounting body.

[0058] The bottom of the groove is understood in particular to mean the lower surface of the groove which lies opposite the groove opening.

[0059] According to one configuration, the groove may have a trapezoidal cross section, with the groove bottom oriented parallel to the surface of the closed side.

[0060] Alternatively, the groove may have a different cross-section that corresponds to the cross-section of the mounting body and may provide a desired positioning and alignment of the mounting body relative to the groove or relative to the valve closure body.

[0061] In one embodiment, the retaining surface of the mounting body may be in contact with the groove bottom surface accordingly, this cooperation providing a desired, particularly permanent, alignment of the seal with respect to the valve-closing body.

[0062] According to one configuration, the groove opening of the groove has a width smaller than the width of the mounting body, and in particular the groove opening may be located opposite the groove bottom surface.

[0063] The present invention accordingly relates to a valve, in particular a vacuum valve, for adjusting a volume or mass flow rate and / or for opening or closing a valve opening, which includes a valve seat having a valve opening defining an opening axis and a first sealing surface extending around the entire circumference of the valve opening, and a valve closing body, in particular a valve disc, for adjusting the volume or mass flow rate and / or for closing the valve opening in a substantially gas-tight manner by means of a second sealing surface corresponding to the first sealing surface.

[0064] The valve further has a drive unit connected to the valve closing body and configured to provide movement of the valve closing body so that the valve closing body can be displaced from an open position in which the valve opening is at least partially open to a closed position in which a seal exists between the first and second sealing surfaces to create gas-tight contact between them, thereby gas-tightly closing the valve opening, and from this closed position to an open position.

[0065] The valve includes a sealing element as described above, which provides a seal.

[0066] The sealing element may be arranged, for example, on the valve seat, on the valve closing body, or on both sides.

[0067] In one embodiment, the valve closure body is configured as described above, and the second sealing surface may provide a retention area, i.e. a groove is provided, the mounting body of the sealing element is present in the groove, and the sealing element provides or realizes the seal.

[0068] In one embodiment, the first sealing surface (at the valve seat) may have a sealing element.

[0069] In one embodiment, the first sealing surface has a corresponding holding area, and the mounting body of the mounting area is connected to the holding area, in particular the mounting body of the mounting area is connected to the holding area by vulcanization, in particular vulcanization-bonded, or the holding area of ​​the first sealing surface may have a groove, and the mounting body of the mounting area may be present in the groove.

[0070] The valve is in particular configured as a vacuum valve, and the valve closing body can be tiltable about a pivot axis to enable opening and closing of the valve.

[0071] The present invention also relates to a valve, particularly a vacuum valve, for adjusting a volumetric or mass flow rate and / or closing a valve opening. The valve includes a valve housing having a first valve opening and an oppositely positioned second valve opening, the first valve opening defining an opening axis extending through the first and second valve openings. The valve includes a valve seat extending around the entire circumference of the first valve opening and having a first sealing surface extending around the entire circumference of the first valve opening. The valve further includes a valve closing body, particularly a valve disc, for adjusting the volumetric or mass flow rate and / or closing the valve opening in a substantially gas-tight manner.

[0072] The valve further has a drive unit connected to the valve closing body, the drive unit being configured to provide a flap movement of the valve closing body about a pivot axis oriented perpendicular to the opening axis so that the valve closing body can be displaced from an open position in which the first valve opening is maximally open to a closed position in which gas-tight contact is formed between the valve closing body and the valve seat, thereby gas-tightly closing the first valve opening, and from this closed position to an open position.

[0073] In the context of the present invention, the maximum opening of the first valve opening is understood to mean in particular the total provided opening cross-section of the valve, which corresponds at least to the cross-section of the first valve opening, the projection of which in particular extends through the first valve opening and also through the second valve opening.

[0074] In the open position, the valve-closing body extends at least partly into the second valve opening, in particular in the passage or flow area defined by said opening.

[0075] In one embodiment, the second valve opening defines a second cross-section that is larger than the first cross-section of the first valve opening, and in particular the first and second cross-sections may be oriented perpendicular to the opening axis. In other words, the second valve opening is larger than the first valve opening. This size ratio may be due in particular to the fact that in the open position, a part of the valve-closing body is located within the second opening, which therefore has to provide additional support space for that part of the valve-closing body.

[0076] In particular, the second valve openings may each have different cross-sectional sizes, for example, the cross-section of the inwardly oriented opening section (toward the first valve opening) being larger than the cross-section of the outwardly oriented opening section, and for this purpose the openings may have, for example, a step, the inner opening section being adapted to receive or support the valve closing body in the open position.

[0077] In one embodiment, the second valve opening has a flow area in the direction of the opening axis provided by the valve housing, in particular the thickness of the housing wall, and the valve closing body may be at least partially present in the flow area in the open position.

[0078] In one embodiment, the first valve opening, the second valve opening, and the valve closing body each have a longitudinal extension length and a lateral extension length, and each lateral extension length may be smaller than each longitudinal extension length. Thus, the first valve opening, the second valve opening, and the valve closing body may be formed as elongated (rectangular) valve components having corresponding cross sections.

[0079] In particular, the longitudinal and lateral extension lengths of the first valve opening may be oriented perpendicular to the opening axis and perpendicular to each other, and the longitudinal and lateral extension lengths of the valve-closing body may be oriented perpendicular to the opening axis and perpendicular to each other in the closed position.

[0080] In one embodiment, the distance between the first valve opening and the second valve opening is smaller than the spatial extension of the valve closing body (in the direction of the lateral extension length) corresponding to the lateral extension length of the valve closing body, and in particular, the distance between the first valve opening and the second valve opening may be determined by an inner wall of the valve housing that defines the valve opening.

[0081] In one embodiment, the longitudinal extension of the first valve opening may be smaller than the longitudinal extension of the valve-closing body and / or the longitudinal extension of the second valve opening may be larger than the longitudinal extension of the valve-closing body, where the longitudinal extension in this specification is understood to be the width of the one or more valve openings and the valve-closing body when the valve is viewed from the front.

[0082] In one embodiment, the valve-closing body may have a connection side with a coupling for connection to a drive unit, which may have an arm that can be pivoted about a pivot axis by the drive unit, and which may be connected to the coupling.

[0083] Of course, the valve-closing body may in particular be configured as described in any one of the above-described embodiments.

[0084] In one embodiment, the first sealing surface, or valve seat, may include a sealing element as described above.

[0085] In one embodiment, the first sealing surface has a holding area and the mounting body of the mounting area is connected to the holding area, in particular the mounting body of the mounting area is connected to the holding area by vulcanization, in particular vulcanization-bonded, or the holding area of ​​the first sealing surface may have a groove and the mounting body of the mounting area is present in the groove.

[0086] Naturally, in principle, an arrangement of such a sealing element on the valve seat can be carried out analogously to the above-described embodiment of the valve-closing body with a sealing element.

[0087] In one embodiment, the valve may comprise a separating device for separating the process atmosphere region from the outer atmosphere region, in particular this relates to the configuration of the valve as a vacuum valve.

[0088] The process atmosphere area is particularly understood to be an area that can be defined by a process chamber. In this area, a process atmosphere, particularly a vacuum, can be generated for processing the substrate. The components provided for this area must be sufficient, for example, in terms of material resistance and increased requirements. Correspondingly, the outer atmosphere area is particularly understood to be an area where normal atmospheric conditions, for example, room air, exist.

[0089] Here, the drive unit may be at least partially, in particular completely, assigned to the outer atmosphere area (for example the motor or the pneumatic device), and the valve-closing body may in particular be assigned to the process atmosphere area.

[0090] The separating device of the valve can be formed, for example, by a bellows, which can be arranged, for example, inside the valve housing or the drive unit.

[0091] A valve known from the prior art, as described in U.S. Pat. No. 6,772,989, for example, has a valve body with two connections, a valve seat located within a flow chamber in a passage connecting the two connections, and an opening located opposite the valve seat. A piston of a pneumatic cylinder system is located in a valve cover that closes the opening. This piston drives a valve disc, which opens and closes the valve seat, via a valve rod. The valve cover is gas-tightly attached to the opening by a bellows plate. Both ends of a bellows surrounding the valve rod are gas-tightly attached to the inner edge surface of the bellows plate and the valve disc. The valve disc has an annular retaining groove on its surface facing the valve seat, in which a sealing ring is located.

[0092] The valve housing is typically made of aluminum or stainless steel, or is internally coated with aluminum or another suitable material, while the valve disc and bellows are often made of steel. The bellows, which can expand and contract along its longitudinal axis within the disc's displacement stroke, airtightly seals the flow chamber from the valve rod and drive. Two types of bellows are commonly used: diaphragm bellows and corrugated bellows. These have the advantage over diaphragm bellows in that they have no welded seams and are easier to clean, but they have a smaller maximum stroke.

[0093] In the following, the valve and sealing element according to the invention will be described in more detail, purely by way of example, on the basis of examples which are shown diagrammatically in the drawings, in which identical elements are provided with identical reference numerals. The described embodiments are generally not drawn to scale and are not to be construed as limiting. [Brief explanation of the drawings]

[0094] [Figure 1] 1 is a cross-sectional view of a first embodiment of a sealing element according to the present invention; [Figure 2] 10 is a three-dimensional view of a further embodiment of a sealing element according to the invention; [Figure 3a] FIG. 10 is a diagram showing an embodiment of a vacuum valve according to the present invention, which is provided with a valve-closing body according to the present invention, which is provided with such a sealing element according to the present invention. [Figure 3b] FIG. 10 is a diagram showing an embodiment of a vacuum valve according to the present invention, which is provided with a valve-closing body according to the present invention, which is provided with such a sealing element according to the present invention. [Figure 3c] FIG. 10 is a diagram showing an embodiment of a vacuum valve according to the present invention, which is provided with a valve-closing body according to the present invention, which is provided with such a sealing element according to the present invention. [Figure 4a] 1 shows an embodiment of a valve according to the present invention in a closed state. [Figure 4b] 1 shows an embodiment of a valve according to the present invention in an open state. DETAILED DESCRIPTION OF THE INVENTION

[0095] 1 shows an embodiment of a sealing element 10 according to the invention mounted in a groove 31 of a valve-closing body 30. The sealing element 10 has a sealing region 11 and a mounting region 21.

[0096] The mounting area 21 has a mounting body 22 configured to mount the sealing element 10 on the valve-closure body 30. For this purpose, the mounting body 22 has an underside with a holding surface 23 arranged and aligned opposite the sealing area. In the illustrated configuration, the holding surface 23 is formed flat. Furthermore, the mounting body 22 presents a defined width in a direction parallel to the transverse axis B.

[0097] The groove 31 of the valve-closing body 30 has a groove bottom 32, which is flat and oriented parallel to the surface of the valve-closing body 30, in particular parallel to a closing surface 34 on the closing side of the valve-closing body 30. The holding surface 23 of the mounting body 22 contacts the groove bottom 32, in particular parallel to the surface. This ensures that the entire sealing element 10 is aligned with the valve-closing body 30 in a defined position. This ensures that the pressing direction A, defined by the configuration of the sealing area 21, has the desired orientation relative to the closing surface 34, in particular in the open position of the valve-closing body.

[0098] The cooperation of both surfaces 23, 32 further effectively prevents tilting or rotation of the sealing element 10.

[0099] The grooves 31 have a trapezoidal cross section as shown in this embodiment.

[0100] The groove opening 33 of the groove 31, opposite the groove bottom 32, has a width that is smaller than the specified width of the mounting body 22. This ensures that the mounting body 22 remains permanently within the groove 31. The width of the groove opening 33 is correspondingly smaller than the width of the groove bottom.

[0101] The mounting area 21 and the sealing area 11 are formed continuously and connected to one another. In particular, the sealing element 10 is formed in one piece. In one embodiment, this configuration allows a defined elasticity between the mounting area 21 and the sealing area 11. This elasticity allows the sealing area 11 to tilt against the valve seat when the valve is closed. This avoids shear forces between the seal and the valve seat and the associated particle generation.

[0102] In the sealing region 11, the sealing element 10 has a sealing lip 12 and an alignment lip 13. The sealing lip 12 and the alignment lip 13 are aligned at an opening angle α relative to each other, which simultaneously defines the Y-shape of the sealing element 10.

[0103] The sealing lip 12 is configured to provide a seal for the valve opening by pressing the sealing lip 12 against a sealing surface of the valve (particularly provided by the valve seat), and the alignment lip 13 is configured to align the sealing region 11 against the sealing surface of the valve at least upon contact with the sealing surface.

[0104] The alignment lip 13 thereby provides a pressing of the sealing element 10 in particular in the pressing direction A. The pressing direction A can be changed corresponding to the inclination of the sealing area 11 relative to the mounting area 21, inclination in this case meaning the joint inclination of the sealing lip 12 and the alignment lip 13 relative to the mounting body. In this case, the opening angle α can remain essentially unchanged.

[0105] 2 shows a further embodiment of a sealing element 10 according to the invention in a three-dimensional view. In the illustrated configuration, the sealing element 10 is formed as a closed sealing element 10, i.e., the sealing element 10 is configured such that, for example, an edge region of a valve-closure body can be completely and uninterruptedly surrounded by the sealing element 10. The sealing element 10 therefore surrounds or encloses the inner surface F. The sealing element 10 is understood in particular to be an annular sealing element 10.

[0106] As a result, the sealing element 10 has a longitudinal extension which, in the illustrated configuration, extends primarily in a direction perpendicular to the transverse axis B and in a direction perpendicular to the pressing direction A.

[0107] The sealing element 10 has a plurality of, in the illustrated configuration, twelve vent notches 14. These notches 14 are provided along the alignment lip 13. Figure 2 shows an enlarged partial view of the sealing element 10 based on the area having such notches 14.

[0108] The alignment lip 13 is oriented towards the inner surface F enclosed by the sealing element 10, while the sealing lip 12 is oriented away from the inner surface F in the opposite direction.

[0109] The notch 14 is configured so that the sealing area with the sealing surface, i.e., the intermediate chamber that is created between the sealing surface, the sealing lip 12, and the alignment lip 13 when the sealing lip 12 and the alignment lip 13 are in contact with each other, can remain accessible from the side of the inner surface F through the notch 14. The inner surface F is typically located in a vacuum area when the valve is closed, i.e., in contact with the sealing surface. This allows the intermediate chamber to be completely vented due to the vacuum that is created.

[0110] The notch 14 is formed in the shape of a half moon in the illustrated embodiment. Alternatively, this notch 14 may be realized in the alignment lip 13 in another shape, for example by a slit or a hole.

[0111] 3a to 3c show an embodiment of a vacuum valve 1 according to the invention, which comprises a valve-closing body 30 according to the invention, which comprises such a sealing element 10 according to the invention.

[0112] The vacuum valve 1 is configured as a vacuum transfer valve 1 and is shown in different open positions.

[0113] The vacuum valve 1 has a rectangular, plate-shaped valve closing body 30 (valve disk) which has a sealing element 10 for gas-tightly closing a valve opening 2. The opening 2 has a cross section corresponding to the valve closing body 30 and is formed in a wall of the valve housing 12. This wall may be, for example, a wall of a vacuum process chamber. The opening 2 is surrounded by a valve seat which itself provides a sealing surface 3 corresponding to the sealing element 10 of the valve closing body 30. The sealing element 10 of the valve closing body 30 extends around the entire circumference of the valve closing body 30. In the closed position S (FIG. 3c), a seal is pressurized between the valve closing body 30 and the sealing surface 3.

[0114] The opening 2 connects a first gas region L located on the left side of the wall 12 to a second gas region R located on the right side of the wall 12. The wall 12 is formed, for example, by a chamber wall of a vacuum chamber. In this case, the vacuum valve 1 is formed by the cooperation of the chamber wall 12 and the valve closing body 30.

[0115] Naturally, the valve seat together with the sealing surface 3 may alternatively be formed as a valve component that is structurally firmly connected to the valve 1 and may for example be arranged, for example screwed, in the chamber opening.

[0116] The valve closing body 30 may be arranged, as shown in the figures, on a displacement arm 5 which, in the illustrated configuration, is, for example, rod-shaped and extends along a geometrical displacement axis V. The displacement arm 5 is mechanically coupled to a drive unit 7, by means of which the closing member 30 can be displaced from an open position O (FIG. 3a) via an intermediate position Z (FIG. 3b) to a closed position S (FIG. 3c) by displacement of the displacement arm 5 by the drive unit 7 in the first gas region L on the left side of the wall 12.

[0117] In the open position O, the valve-closing body 30 is located outside the projected area of ​​the opening 2, completely opening the opening 2, as shown in FIG. 3a.

[0118] The valve closing body 30 can be displaced from the open position O to the intermediate position Z by the drive unit 7 by linearly displacing the valve closing body 30 in the axial direction in a plane parallel to or coaxial with the displacement axis V and parallel to the wall 12.

[0119] In this intermediate position Z (FIG. 3 b ), the sealing element 10 of the valve-closing body 30 is located in a spaced-apart facing position relative to the sealing surface 3 of the valve seat, which surrounds the opening 2 .

[0120] The valve closing body 30 can be displaced from the intermediate position Z to the closed position S by displacement in the direction of the opening axis C defined by the opening 2 (in the illustrated configuration, transverse to the displacement axis V), i.e., for example, perpendicular to the wall 12 and the valve seat (Figure 3c).

[0121] In this closed position S, the valve disc 30 closes the opening 2 in a gas-tight manner, separating the first gas region L from the second gas region R in a gas-tight manner.

[0122] The opening and closing of the vacuum valve is effected by a drive unit 7, which in the illustrated configuration causes, for example, an L-shaped movement of the valve closing body 30 in two mutually perpendicular directions V and C. The illustrated valve is therefore also referred to as an L-valve.

[0123] A transfer valve 1 such as that shown is typically provided for sealing a process volume (vacuum chamber) as well as for loading and unloading the volume. In such use, frequent switching between an open position O and a closed position S is usually involved.

[0124] The valve-closing body 30 has a groove in which the mounting body of the sealing element 10 is disposed, thereby holding the sealing element 10 in the valve-closing body 30. The sealing element has two lips disposed at an angle to each other: an outer sealing lip and an inner alignment lip. The mounting body has a retaining surface, and the groove has a groove bottom surface, and the mounting body and the groove are configured to cooperate to prevent tilting of the sealing element 10 relative to the valve-closing body 30.

[0125] The alignment lip may be formed in accordance with the embodiment shown in FIG. 2 and may have a corresponding notch.

[0126] Figure 4a shows an embodiment of a valve 50 according to the invention in a closed or closed position S, and Figure 4b shows an embodiment of a valve 50 according to the invention in an open or open position O. The valve 50 shown in the figures is configured in particular as a vacuum valve for opening and closing the valve opening and for transporting substrates.

[0127] The valve 50 comprises a valve housing 12 having a first valve opening 2 and an oppositely positioned second valve opening 4, the first valve opening 2 defining an opening axis C that passes through the first valve opening 2 and the second valve opening 4. A valve seat is also provided that extends around the entire circumference of the first valve opening 2 and has a first sealing surface 3 that also extends around the entire circumference of the first valve opening 2. A valve closing body 30, in particular a valve disc, is arranged to close the valve opening 2 in a substantially gas-tight manner.

[0128] That is, the valve 50 has two valve openings, of which in this embodiment only one can be closed by the valve closing body 30. Such a valve is used in particular as a transfer valve as described above, that is, the valve is configured so that in the open state the substrate can be guided linearly through both valve openings.

[0129] Furthermore, the valve-closing body 30 is provided on its connecting side 35 with a coupling for connection to a drive unit. In the illustrated configuration, the drive unit has an arm 42 that can be pivoted by the drive unit about a pivot axis 41, which is connected to the coupling of the valve-closing body 30. The pivot axis can be driven, i.e., rotated, by a pneumatic or mechatronic drive (not shown), for example. The valve can have several such arms, which can be connected to the valve-closing body along their length and can be displaced by being connected together to a common pivot axis (shaft). The pivot axis can pass through the valve housing and be connected to the drive outside the valve housing.

[0130] The drive unit connected to the valve closing body 30 is thereby configured to provide a flapping movement of the valve closing body 30 about a pivot axis 41 oriented perpendicularly to the opening axis C. This flapping movement may be such that the valve closing body 30 can be displaced from an open position O (FIG. 4b), in which the valve opening 2 is maximally opened, to a closed position S (FIG. 4a), in which the sealing element 10 located between the valve closing body 30 and the valve seat 3 brings them into tight contact with each other, thereby closing the valve opening 2 gas-tightly, and from this closed position S to the open position O.

[0131] The valve 50 is configured such that in the open position O, at least a portion of the valve-closing body 30 extends into the second valve opening 4. This allows the valve to be formed with significantly reduced installation dimensions compared to such valves of the prior art, where the valve-closing body is located completely between both valve openings in the open position.

[0132] The valve 50 is particularly designed so that the opening cross-section of the second valve opening 4 in the open position O is, although certainly reduced (compared to the closed position) by the valve closing body 30 engaged in the opening 4, still at least as large as the opening cross-section of the first valve opening 2.

[0133] The second valve opening 4 has a flow area in the direction of the opening axis C provided by the valve housing 12, in particular the thickness d of the housing wall, and the valve closing body 30 is at least partially present in the flow area in the open position O.

[0134] Furthermore, the distance a between the first valve opening 2 and the second valve opening 4 is smaller than the spatial extension of the valve closing body 30, which corresponds to the lateral extension length q of the valve closing body 30. In the illustrated configuration, the distance a between the first valve opening 2 and the second valve opening 4 is determined by the inner wall of the valve housing 12 that defines the valve opening.

[0135] In the illustrated embodiment, the valve 50 has a valve-closing body 30 with a sealing element 10 extending all around with lips arranged in a Y-shape, i.e. with an alignment lip and a sealing lip, as described in connection with Fig. 2. The combination with such a sealing element provides an improved sealing action, in particular due to the pressing forces that are still available due to the adapted special drive concept, in particular due to the pressing forces that are smaller compared to prior art drive devices.

[0136] When pressurized, the sealing lip provides a wider contact surface with the valve seat, and furthermore, the sealing lip has a relatively large tolerance range for maintaining the sealing action, since even in the event of a (small) increase in the distance between the valve-closing body 30 and the valve seat 3, due to, for example, a large pressure difference, contact can still be maintained between the elastic sealing lip and the valve seat.

[0137] Alternatively, the valve-closing body may comprise a typical sealing ring, for example an O-ring, or may comprise a vulcanized sealing material.

[0138] Of course, these illustrated drawings only schematically illustrate possible implementations, and the various approaches may be combined with each other and with prior art devices and methods.

Claims

1. A sealing element (10) for a valve closure body and / or a valve seat of a valve, comprising: a mounting area (21) with a mounting body (22) configured to mount the sealing element (10) on the valve-closing body and / or the valve seat; a sealing area (11) for providing a seal for the valve opening of said valve; It has The attachment area (21) and the sealing area (11) are joined together. In the sealing element (10), the sealing element (10) has a sealing lip (12) and an alignment lip (13) in the sealing area (11), the sealing lip (12) and the alignment lip (13) being aligned at an opening angle (α) relative to each other; the sealing lip (12) is configured to provide a seal for the valve opening of the valve; the alignment lip (13) is configured to align the sealing area (11) against a sealing surface upon contact with the sealing surface; The mounting body (22) has at least one holding surface (23) on the underside opposite the sealing area (11). A sealing element (10) characterized in that

2. The sealing element (10) according to claim 1, characterized in that the sealing lip (12) and the alignment lip (13) form the opening angle (α) based on a range of 90° to 160°.

3. the holding surface (23) is oriented parallel to a lateral axis (B), which is oriented perpendicular to the pressing direction (A) defined by the opening angle (α), in particular the holding surface (23) is flat, or the retaining surface (23) is oriented transversely relative to the transverse axis (B), or The sealing element (10) has at least one further retaining surface 3. The sealing element (10) according to claim 1 or 2, characterized in that it is

4. 4. The sealing element (10) according to claim 1, wherein the mounting body (22) has a retaining element, which provides the retaining surface (23), and in particular the retaining element is oriented in the opposite direction to the pressing direction A, and in particular the retaining element is formed as a pin, web, wedge or mandrel.

5. The sealing element (10) according to any one of claims 1 to 4, characterized in that the sealing element (10) has a longitudinally extending portion, in particular, the longitudinally extending portion extending in a direction perpendicular to the transverse axis (B) and in a direction perpendicular to the pressing direction (A).

6. 6. The sealing element (10) according to claim 5, characterized in that the sealing element (10) is formed as a closed sealing element, in particular as a circumferential seal or as a ring.

7. 7. The sealing element (10) according to claim 1, wherein the alignment lip (13) has at least one notch (14), in particular a plurality of notches, which are configured such that, when the sealing area (11) contacts the sealing surface (3), the intermediate space created between the sealing surface (3), the sealing lip (12) and the alignment lip (13) can remain accessible through the at least one notch (14).

8. 8. The sealing element (10) according to claim 7, characterized in that the at least one recess (14) is formed as a notch or a perforation hole.

9. A valve closing body (30), in particular a valve disc, for a valve (1), in particular a vacuum valve, for adjusting a volumetric or mass flow rate and / or for opening or closing a valve opening (2a, 2b), comprising: a connection side having a coupling adapted to connect to the drive unit (7) of said valve (1); a closing side opposite to the connecting side, with a seal adapted to correspond to the sealing surface (3) of the valve seat; A valve closing body (30) comprising: the valve closing body (30) has a retention area on the closing side, the seal is formed as a sealing element (10) according to any one of claims 1 to 8, The mounting body (22) of the mounting area (21) is connected to the holding area A valve closing body (30).

10. 10. The valve-closing body (30) according to claim 9, characterized in that the mounting body (22) of the mounting area (21) is connected to the holding area by vulcanization, in particular present in a vulcanization-fixed manner.

11. 11. The valve-closing body (30) according to claim 9 or 10, characterized in that the holding area has a groove (31), and the mounting body (22) of the mounting area (21) is located in the groove (31).

12. 12. The valve-closing body (30) according to claim 11, characterized in that the groove (31) is configured to extend over the entire periphery of the edge region of the valve-closing body (30).

13. The valve-closing body (30) according to claim 11 or 12, characterized in that the groove (31) has a groove bottom surface (32) configured to correspond to the holding surface (23) of the mounting body (22).

14. 14. The valve closing body (30) according to claim 13, characterized in that the groove (31) has a trapezoidal cross section and the groove bottom surface (32) is oriented parallel to the surface of the closing side.

15. 15. The valve-closing body (30) according to claim 13 or 14, characterized in that the holding surface (23) of the mounting body (22) is in contact with the groove bottom surface (32).

16. The valve closing body (30) according to any one of claims 11 to 15, characterized in that the groove opening (33) of the groove (31) has a width smaller than the width of the mounting body (22), and in particular, the groove opening (33) is located on the side opposite the groove bottom surface (32).

17. A valve (1, 50), in particular a vacuum valve, for adjusting the volumetric or mass flow rate and / or for opening or closing a valve opening (2), a valve seat having a valve opening (2) defining an opening axis (C) and a first sealing surface (3) extending around the entire circumference of the valve opening (2); a valve closing body (30), in particular a valve disc, for adjusting the volumetric or mass flow rate and / or for closing the valve opening (2) in a substantially gas-tight manner by means of a second sealing surface corresponding to the first sealing surface (3); a drive unit (7) connected to said valve-closing body (30), said valve-closing body (30) comprising: from an open position (O) at least partially opening the valve opening (2), a drive unit (7) configured to provide a movement of the valve closing body (30) such that a seal present between the first and second sealing surfaces creates a gas-tight contact between them, whereby the valve opening (2) can be displaced into a closed position (S) in which it is gas-tightly closed, and from the closed position (S) to the open position (O); A valve (1, 50) comprising: A valve (1, 50) characterized in that the valve comprises a sealing element (10) according to any one of claims 1 to 8, which sealing element (10) provides the seal.

18. The valve (1, 50) according to claim 17, characterized in that the valve closing body (30) is configured as described in any one of claims 9 to 16, and the second sealing surface has the retention area.

19. 18. The valve (1, 50) according to claim 17, characterized in that the first sealing surface comprises the sealing element (10).

20. The valve (1, 50) according to claim 17, characterized in that the first sealing surface has a holding area and the mounting body (22) of the mounting area (21) is connected to the holding area, in particular the mounting body (22) of the mounting area (21) is connected to the holding area by vulcanization, in particular vulcanization-fixed, or the holding area of ​​the first sealing surface has a groove (31) and the mounting body (22) of the mounting area (21) is present in the groove (31).

21. A valve (1, 50), in particular a vacuum valve, for adjusting the volumetric or mass flow rate and / or for opening or closing a first valve opening (2), a valve housing (12) having the first valve opening (2) and an oppositely positioned second valve opening (4), the first valve opening (2) defining an opening axis (C), the opening axis (C) extending through the first valve opening and the second valve opening; a valve seat extending around the entire circumference of the first valve opening (2) and having a first sealing surface (3) extending around the entire circumference of the first valve opening (2); a valve closing body (30), in particular a valve disc, for adjusting the volumetric or mass flow rate and / or for closing the valve opening (2) in a substantially gas-tight manner; a drive unit (7) connected to said valve-closing body (30), said valve-closing body (30) comprising: From an open position (O) in which the first valve opening (2) is fully open, a drive unit (7) configured to provide a flap movement of the valve-closing body (30) about a pivot axis (41) oriented perpendicular to the opening axis, such that a gas-tight contact is established between the valve-closing body (30) and the valve seat (3), whereby the valve-closing body (30) can be displaced to a closed position (S), in which the first valve opening (2) is gas-tightly closed, and from the closed position (S) to the open position (O); A valve (1, 50) comprising: A valve (1, 50) characterized in that in the open position, at least a part of the valve closing body (30) extends into the second valve opening (4).

22. 22. The valve (1, 50) according to claim 21, characterized in that the second valve opening (4) defines a second cross-section that is larger than the first cross-section of the first valve opening (2), in particular the first and second cross-sections being oriented perpendicular to the opening axis (C).

23. 23. A valve (1, 50) according to claim 21 or 22, characterized in that the second valve opening (4) has a flow area in the direction of the opening axis (C) provided by the valve housing (12), in particular by the thickness of the housing wall, and the valve closing body (30) is at least partially present in the flow area in the open position (O).

24. The first valve opening (2), the second valve opening (4), and the valve-closing body (30) each have a longitudinal extension length and a lateral extension length (q), and each of the lateral extension lengths (q) is smaller than each of the longitudinal extension lengths, in particular: the longitudinal extension and the lateral extension (q) of the first valve opening (2) are oriented orthogonally to the opening axis (C) and to each other, and / or The longitudinal extension and the lateral extension (q) of the valve-closing body (30) are oriented perpendicular to the opening axis (C) and perpendicular to each other in the closed position (S). Valve (1, 50) according to any one of claims 21 to 23, characterized in that it

25. 25. The valve (1, 50) according to claim 24, characterized in that the distance (a) between the first valve opening (2) and the second valve opening (4) is smaller than the spatial extension of the valve closing body (30) corresponding to the lateral extension length (q) of the valve closing body (30), in particular, the distance (a) between the first valve opening and the second valve opening is determined by an inner wall of the valve housing that defines the valve opening.

26. the longitudinal extension of the first valve opening (2) is smaller than the longitudinal extension of the valve-closing body (30), and / or The longitudinal extension of the second valve opening (4) is greater than the longitudinal extension of the valve-closing body (30). Valve (1, 50) according to claim 24 or 25, characterized in that

27. the valve-closing body (30) has a connection side (35) with a coupling for connection to the drive unit (7); The drive unit has an arm (42) that can be rotated around the pivot axis (41) by the drive unit, The arm (42) is connected to the coupling 27. Valve (1, 50) according to any one of claims 21 to 26, characterized in that it

28. 28. The valve (1, 50) according to any one of claims 21 to 27, characterized in that the valve closing body (30) is constructed as claimed in any one of claims 9 to 16.

29. Valve (1, 50) according to any one of claims 21 to 28, characterized in that the first sealing surface comprises a sealing element (10) according to any one of claims 1 to 8.

30. The valve (1, 50) according to claim 29, characterized in that the first sealing surface has a holding area and the mounting body (22) of the mounting area (21) is connected to the holding area, in particular the mounting body (22) of the mounting area (21) is connected to the holding area by vulcanization, in particular vulcanization-fixed, or the holding area of ​​the first sealing surface has a groove (31) and the mounting body (22) of the mounting area (21) is present in the groove (31).

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