Fluid transport systems, temperature conditioning systems, lithography equipment, flexible hoses

Abstract

The present invention provides a fluid transport system comprising a first gas silencer, a second gas silencer, and a tubular acoustic damping device having a conduit made of a viscoelastic material, wherein the first gas silencer and the second gas silencer are connected to each other through a fluid line, and the tubular acoustic damping device is provided in the fluid line between the first gas silencer and the second gas silencer such that the conduit of the tubular acoustic damping device becomes part of the fluid line.

Description

Technical Field

[0001] [Cross - reference to Related Applications] This application claims priority to European Application No. 23161851.3 filed on March 14, 2023 and European Application No. 23195432.2 filed on September 5, 2023, the entire contents of which are incorporated herein by reference.

[0002] [Technical Field] The present invention relates to, for example, a fluid transport system for use in a vacuum environment. The present invention further relates to a temperature conditioning system comprising such a fluid transport system, a lithographic apparatus comprising such a temperature conditioning system, and a flexible hose.

Background Art

[0003] A lithographic apparatus is an apparatus configured to apply a desired pattern onto a substrate. A lithographic apparatus may be used, for example, in the manufacture of integrated circuits (ICs). A lithographic apparatus may project a pattern in a patterning device (e.g., a mask) onto a layer of radiation - sensitive material (resist) provided on a substrate.

[0004] To project a pattern onto a substrate, a lithographic apparatus may use electromagnetic radiation. The wavelength of this radiation determines the minimum size of the features that can be formed on the substrate. A lithographic apparatus using extreme ultraviolet (EUV) radiation having a wavelength in the range of 4 - 20 nm (e.g., 6.7 nm or 13.5 nm) may be used, for example, to form smaller features on a substrate than a lithographic apparatus using radiation having a wavelength of 193 nm.

Summary of the Invention

Problems to be Solved by the Invention

[0005] Generally, high throughput is desirable in lithography systems. To increase throughput in EUV lithography systems, the power of the extreme ultraviolet (EUV) radiation should also be increased. One challenge with higher EUV radiation power is that it can heat and deform optical elements such as mirrors in the projection system. This deformation can lead to imaging and overlay errors, generally referred to as lens or mirror heating errors.

[0006] To mitigate and / or reduce such lens or mirror heating errors, optical elements such as mirrors may be directly cooled using a coolant (e.g., water) guided through cooling conduits in each optical element. While this solution substantially improves temperature control of the optical elements, the coolant may introduce acoustic noise into the optical elements due to pressure fluctuations generated from various sources. This acoustic noise may have a significant adverse effect on the performance of the optical elements and, consequently, on the overlay performance. To reduce acoustic noise, pressure fluctuations in the coolant should be contained before reaching the optical elements.

[0007] It has been proposed to reduce pressure fluctuations in the coolant via a gas silencer, also known as a Helmholtz resonator. In such a gas silencer, a gas (e.g., air) is used as a spring for the resonant mass of the coolant. A membrane may be placed in the gas silencer to separate the gas and coolant from each other and to prevent the gas from dissolving into the coolant over time.

[0008] Multiple of these gas silencers may be used in series in a cooling system. However, the installation of gas silencers may generate low-frequency pressure spikes due to the resonant mass of the coolant between two or more gas silencers in the cooling system. These low-frequency pressure spikes may have a negative effect on the positional accuracy of optical elements (especially optical elements whose position is not actively controlled). In addition, acoustic modes (i.e., standing waves) may be generated within the coolant conduits and gas silencers of the cooling system. This may result in undesirable high-frequency pressure spikes in the coolant. These high-frequency pressure spikes may also negatively affect the performance of the optical elements.

[0009] An object of an aspect of the present invention is to provide a fluid transport system configured to damp low-frequency and / or high-frequency pressure spikes in a fluid transported by the fluid transport system. In particular, an object of an aspect of the present invention is to damp low-frequency and / or high-frequency pressure spikes in a temperature-conditioning fluid in a temperature-conditioning system for use under vacuum conditions. [Means for solving the problem]

[0010] According to one aspect of the present invention, a fluid transport system is provided comprising a first gas silencer, a second gas silencer, and a tubular acoustic damping device having a conduit made of a viscoelastic material, wherein the first gas silencer and the second gas silencer are connected to each other through a fluid line, and the tubular acoustic damping device is provided in the fluid line between the first gas silencer and the second gas silencer such that the conduit of the tubular acoustic damping device becomes part of the fluid line.

[0011] According to one aspect of the present invention, a temperature conditioning system for temperature conditioning of an object is provided, comprising such a fluid transport system.

[0012] According to an aspect of the present invention, a lithography apparatus is provided that includes such a temperature conditioning system. The temperature conditioning system may be configured, for example, for temperature conditioning of the optical elements of a projection system (e.g., mirrors), for temperature conditioning of a frame (e.g., force frame or sensor frame), for temperature conditioning of a substrate support (e.g., substrate stage) or patterning device support (e.g., patterning device support), and / or for temperature conditioning of an air mount (e.g., an air mount used to isolate the base frame of a lithography apparatus from the measurement frame).

[0013] According to one aspect of the present invention, a flexible hose is provided, comprising an outer shell made of an airtight material, the outer shell comprising at least two flexible shell sections and at least one rigid shell section positioned between the at least two flexible shell sections. [Brief explanation of the drawing]

[0014] Hereinafter, embodiments of the present invention will be described only by illustration with reference to the following accompanying schematic drawings. Figure 1 shows a lithography system comprising a lithography apparatus and a radiation source. Figure 2 schematically illustrates a temperature conditioning system, particularly a cooling system for optical elements in a lithography apparatus. Figure 3 shows the gas silencer of the cooling system in Figure 2 in more detail. Figure 4 shows a first embodiment of a tubular acoustic damping device. Figure 5 shows a second embodiment of the tubular acoustic damping device. Figure 6 shows the first cross-section AA of the acoustic damping device shown in Figure 5. Figure 7 shows the second cross-section BB of the acoustic damping device shown in Figure 5. Figure 8 shows a third embodiment of the tubular acoustic damping device. Figure 9 shows a fourth embodiment of the tubular acoustic damping device. Figure 10 shows a fifth embodiment of the tubular acoustic damping device. Figures 11A and 11B show a sixth embodiment of tubular acoustic damping. Figure 12 shows a seventh embodiment of a tubular acoustic damping device. Figure 13 shows an eighth embodiment of the tubular acoustic damping device. Figure 14 shows a ninth embodiment of the tubular acoustic damping device. Figure 15 shows a tenth embodiment of a tubular acoustic damping device. Figure 16 shows one embodiment of a flexible hose with additional damping. [Modes for carrying out the invention]

[0015] Figure 1 shows a lithography system comprising a radiation source SO and a lithography apparatus LA. The radiation source SO is configured to generate an EUV radiation beam B and supply the EUV radiation beam B to the lithography apparatus LA. The lithography apparatus LA comprises an illumination system IL, a support structure MT configured to support a patterning device MA (e.g., a mask), a projection system PS, and a substrate table WT configured to support a substrate W.

[0016] The illumination system IL is configured to adjust the EUV radiation beam B before it is incident on the patterning device MA. In addition, the illumination system IL may include a faceted field mirror device 10 and a faceted pupil mirror device 11. Both the faceted field mirror device 10 and the faceted pupil mirror device 11 provide the EUV radiation beam B with a desired cross-sectional shape and a desired intensity distribution. The illumination system IL may include other mirrors or devices in addition to or instead of the faceted field mirror device 10 and the faceted pupil mirror device 11.

[0017] After being adjusted as such, the EUV radiation beam B interacts with the patterning device MA. As a result of this interaction, a patterned EUV radiation beam B’ is generated. The projection system PS is configured to project the patterned EUV radiation beam B’ onto the substrate W. For that purpose, the projection system PS may comprise a plurality of optical elements such as mirrors 13, 14 etc., which are configured to project the patterned EUV radiation beam B’ onto the substrate W held by the substrate table WT. The projection system PS may apply a reduction factor to the patterned EUV radiation beam B’ to form an image having features smaller than the corresponding features on the patterning device MA. For example, a reduction factor of 4 or 8 may be applied. Although the projection system PS is illustrated in FIG. 1 as having only two mirrors 13, 14, the projection system PS may include a different number of mirrors (e.g., six or eight mirrors).

[0018] The substrate W may include a previously formed pattern. In this case, the lithographic apparatus LA aligns the image formed by the patterned EUV radiation beam B’ with the previously formed pattern on the substrate W.

[0019] A relative vacuum, i.e., a small amount of gas (e.g., hydrogen) at a pressure sufficiently lower than atmospheric pressure, may be provided in the radiation source SO, the illumination system IL, and / or the projection system PS.

[0020] The radiation source SO may be a laser-produced plasma (LPP) source, a discharge-produced plasma (DPP) source, a free electron laser (FEL), or any other radiation source capable of generating EUV radiation.

[0021] FIG. 2 schematically shows a cooling system CS for an optical element OE (e.g., a mirror) of a projection system PS of a temperature conditioning system, in particular a lithographic apparatus (e.g., the lithographic apparatus LA of FIG. 1). In practice, the projection system PS may comprise a plurality of optical elements such as a plurality of mirrors, but only one is shown in FIG. 2. In an alternative embodiment, the temperature conditioning system may be used for temperature conditioning of a frame (e.g., a force frame or a sensor frame), for temperature conditioning of a substrate support (e.g., a substrate stage) or a patterning device support (e.g., a patterning device support), and / or for temperature conditioning of an air mount (e.g., an air mount used to isolate a base frame from a measurement frame of a lithographic apparatus). The temperature conditioning may comprise heating and / or cooling of each object.

[0022] The lithographic apparatus comprises a base frame BF that defines a vacuum environment (i.e., a closed space having a pressure sufficiently lower than atmospheric pressure). The base frame BF supports an intermediate frame IMF, and the intermediate frame IMF supports a force frame FF. The optical element OE is supported by the force frame FF. In the embodiment shown, the position of the optical element OE is actively controlled using an actuator ACT disposed between the force frame FF and the optical element OE. The projection system PS may comprise one or more optical elements whose positions are not actively controlled.

[0023] Due to the power of the EUV radiation used in the lithography apparatus, at least some of the optical elements OE of the lithography apparatus need to be cooled. A cooling system CS provides cooling for the optical elements OE by supplying a coolant (e.g., cooling water) to the optical elements OE. The cooling system CS comprises cooling system components (e.g., tanks, pumps, temperature control elements, etc.). Because there is limited space within the closed space defined by the base frame BF, these cooling system components (indicated in this embodiment as a coolant supply unit CSU) are located outside the closed space. The coolant supply unit CSU is positioned to supply the coolant that is supplied to the optical elements OE via a coolant supply conduit CSC. In the optical elements OE, the coolant is guided through the cooling conduit CC. From the optical elements OE, the coolant may be returned to the coolant supply unit CSU via a coolant return conduit CRC. In practice, the components of the coolant supply unit CSU do not need to be located within a single unit (e.g., housing) and may be provided as separate components located in appropriate locations.

[0024] The coolant supply conduit CSC and coolant return conduit CRC are guided through the base frame BF, intermediate frame IMF, and force frame FF to the optical element OE. This creates physical connections between each of these frames BF, IMF, FF, and the optical element OE.

[0025] The frame structure is designed to tolerate more vibration in one frame than in the other. In particular, the base frame BF can experience greater vibration than the force frame FF and the optical element OE. The frames are isolated from each other by vibration damping devices such as air mounts and vibration control connections. However, the physical connections of the coolant supply conduit CSC and coolant return conduit CRC between each frame BF, IMF, FF and optical element OE could potentially introduce undesirable vibrations, for example, from the base frame BF into the force frame FF or the optical element OE. These vibrations could be transmitted not only through the materials and connections of the coolant supply conduit CSC and coolant return conduit CRC, but also as pressure fluctuations in the coolant.

[0026] To reduce the propagation of pressure fluctuations in the coolant in the coolant supply conduit CSC and coolant return conduit CRC, gas silencers GS, also known as Helmholtz resonators, are provided in the coolant supply conduit CSC and coolant return conduit CRC.

[0027] Figure 3 shows such a gas silencer GS in more detail. The gas silencer GS comprises a silencer chamber SCH having a membrane GLM. The chamber portion of the silencer chamber SCH above the membrane GLM contains coolant and is connected by a connecting conduit CON to one of the coolant supply conduit CSC and / or coolant return conduit CRC. The chamber portion of the silencer chamber SCH below the membrane GLM contains gas. The gas (e.g., air) may act as a spring for the resonant mass of the coolant in the coolant supply conduit CSC and / or coolant return conduit CRC, which are connected to the gas silencer GS via the connecting conduit CON.

[0028] While gas silencers GS can effectively reduce pressure fluctuations in the coolant supply conduit CSC and coolant return conduit CRC, the installation of gas silencers GS may generate low-frequency pressure spikes, also known as sloshing, due to the resonant mass of the coolant in the coolant supply conduit CSC and / or coolant return conduit CRC between two or more gas silencers GS. These low-frequency pressure spikes can have a negative effect, particularly on the position of passive optical elements, i.e., optical elements whose position is not actively controlled.

[0029] Furthermore, acoustic modes that cause high-frequency pressure spikes in the coolant may be generated not only in the silencer chamber SCH, but also in the coolant supply conduit CSC and the coolant return conduit CRC. These high-frequency pressure spikes may also have a negative effect on the positional accuracy of the optical element OE, and consequently on the overlay performance of the lithography apparatus LA.

[0030] Furthermore, the membrane GLM separating the gas and coolant in the gas silencer GS may have structural resonances that combine with the compliance of the gas and the hydraulic mass of the coolant, and may form high-frequency pressure spikes in the coolant.

[0031] To suppress low-frequency and high-frequency pressure spikes in the coolant supply conduit CSC and / or coolant return conduit CRC, a tubular acoustic damping device ADD may be provided to the coolant supply conduit CSC and / or coolant return conduit CRC.

[0032] In general, a tubular acoustic damping device may be provided in the fluid line between the first and second gas silencers, comprising a conduit made of a viscoelastic material, to damp low-frequency pressure spikes due to the resonant mass of the fluid in the fluid line between the first and second gas silencers, to damp acoustic modes in the fluid in the fluid line between the first and second gas silencers, and / or to damp acoustic modes in the fluid in the first and / or second gas silencers. The tubular acoustic damping device may also damp high-frequency pressure spikes in the coolant caused by structural resonance of the membrane GLM separating the gas and coolant in the gas silencer GS.

[0033] Figure 4 shows a first embodiment of such a tubular acoustic damping device ADD. The acoustic damping device ADD comprises an inner conduit VIC made of a viscoelastic material. As shown in Figure 4, when the acoustic damping device ADD is supplied to a coolant supply conduit CSC, the inner conduit VIC has a first end connected to the liquid inlet SCI of the first portion of the coolant supply conduit CSC and a second end connected to the liquid outlet SCO of the second portion of the coolant supply conduit CSC. Correspondingly, when the acoustic damping device ADD is supplied to a coolant return conduit CRC, the first end of the inner conduit VIC may be connected to the liquid inlet of the first portion of the coolant return conduit CRC, and the second end may be connected to the liquid outlet of the second portion of the coolant return conduit CRC. In this way, the inner conduit VIC forms a continuous liquid line with the first and second portions, respectively, of the coolant supply conduit CSC or the coolant return conduit CRC.

[0034] The viscoelastic material of the inner conduit VIC comprises at least one of the following: polytetrafluoroethylene, polyurethane, tetrafluoroethylene, hexafluoropropylene, vinylidene fluoride, fluoroelastomer, other elastomer, and in particular, PFAS-free elastomer.

[0035] The acoustic damping device ADD further comprises an outer shell OSH surrounding the inner conduit VIC. The outer shell OSH is made of a relatively rigid, airtight material. Because the outer shell OSH surrounds the inner conduit VIC, it ensures that the inner conduit VIC is not directly exposed, so as not to affect the vacuum environment in the closed space defined by the base frame BF. Thus, the outer shell OSH makes the acoustic damping device ADD suitable for applications in a vacuum environment (i.e., a space with a pressure well below atmospheric pressure). The outer shell OSH can be made of metal (e.g., stainless steel). The outer shell OSH may also be corrugated.

[0036] An annular damping space (ADS) is formed between the inner conduit (VIC) and the outer shell (OSH). This annular damping space (ADS) is used to allow the inner conduit (VIC, in particular, a viscoelastic material) to deform (e.g., move radially) in response to low-frequency pressure spikes and / or high-frequency pressure spikes. The annular damping space (ADS) is filled with a gas such as air, nitrogen, or other suitable gas to allow the deformation of the inner conduit (VIC) to result in a change in the volume of the annular damping space (ADS). The deformation of the viscoelastic material may damp the low-frequency pressure spikes and / or high-frequency pressure spikes.

[0037] In the embodiment shown in Figure 2, one acoustic damping device ADD is provided in the fluid line between two adjacent gas silencers. In an alternative embodiment, two or more acoustic damping devices ADD may be provided in the fluid line between two adjacent gas silencers GS. The fluid transport system may further comprise a series of gas silencers along one or more fluid lines. A tubular acoustic damping device ADD may be provided in one or more fluid lines between adjacent gas silencers such that a conduit made of the viscoelastic material of the tubular acoustic damping device becomes part of one or more fluid lines.

[0038] The number, length, and diameter of the acoustic damping devices (ADDs), and their locations may be selected to provide the desired acoustic damping. The viscoelastic material of the acoustic damping devices (ADDs) may be selected to have sufficient compliance and damping properties, as well as sufficient structural strength.

[0039] Due to the presence of acoustic damping devices (ADDs), acoustic modes may be shifted to higher frequencies as the ADDs generate new reflection points. Appropriate selection of the number, position, and length of the ADDs can shift the frequencies of the acoustic modes outside the frequency range of interest.

[0040] Acoustic damping devices (ADDs) may damp acoustic modes by dispersing their energy and suppressing their peaks. Furthermore, input pressure disturbances higher than a certain frequency (the so-called roll-off frequency) may be suppressed by the presence of the acoustic damping device (ADD) due to destructive interference above this roll-off frequency.

[0041] The change in volume of the annular damping space ADS due to the deformation of the inner conduit VIC is important for the damping function of the acoustic damping device ADD.

[0042] It was discovered that, over time, the annular damping space ADS can become filled with a coolant (e.g., water) due to the penetration of the coolant through the viscoelastic material. The presence of coolant in the annular damping space ADS can result in a substantial loss of the damping effect of the acoustic damping device ADD.

[0043] Figure 5 shows a second embodiment of the acoustic damping device ADD. Figure 6 shows a first cross-section AA of the acoustic damping device ADD, and Figure 7 shows a second cross-section BB of the acoustic damping device ADD.

[0044] The acoustic damping device ADD comprises an inner conduit VIC and an outer shell OSH. The inner conduit VIC is connected between the liquid inlet SCI of the first part of the coolant supply conduit CSC and the liquid outlet SCO of the second part of the coolant supply conduit CSC. The outer shell OSH surrounds the inner conduit VIC to enable the acoustic damping device ADD to be applied in a vacuum environment, such as defined by the base frame BF. Between the outer shell OSH and the inner conduit VIC, an annular damping space ADS is defined, which is used to damp low-frequency pressure spikes and / or high-frequency pressure spikes, as described in relation to this embodiment in Figure 4.

[0045] The outer shell OSH has a main section OMS and a compliance section OCS. The main section OMS substantially corresponds to the outer shell OSH of this embodiment in Figure 4.

[0046] The compliance section OCS comprises a tubular inner wall TIW and a tubular outer wall TOW coaxially surrounding the tubular inner wall TIW. The tubular inner wall TIW and the tubular outer wall TOW of the compliance section OCS define an annular compliance space ACS having an open end connected to the annular damping space ADS and a closed end opposite the open end. The closed end is formed, for example, by an end cap EC.

[0047] The tubular inner wall (TIW), tubular outer wall (TOW), and end cap (EC) of the compliance section (OCS) are made of a hermetically sealed, vacuum-compatible material, such as stainless steel or other metal. The tubular inner wall (TIW) and tubular outer wall (TOW) may also be corrugated.

[0048] The acoustic damping device ADD has a longitudinal axis LAD parallel to the central axis of the outer shell OSH. The compliance section OCS has a volume that can expand in the direction of the longitudinal axis LAD in response to the internal pressure in the annular compliance space ACS. This expandable volume can expand in response to the internal pressure in the annular compliance space ACS by variable spacing between the open and closed ends of the compliance section. For this reason, the tubular inner wall TIW and tubular outer wall TOW are stretchable in the direction of the longitudinal axis LAD to facilitate variable spacing between the open and closed ends.

[0049] The compliance section OCS has a first compliance, and the main section OMS has a second compliance. As a result of the structure of the compliance section OCS, the first compliance is greater than the second compliance. Due to the greater compliance of the compliance section OCS, the acoustic damping device ADD (in particular, the annular compliance space ACS) can adapt its volume in accordance with the internal pressure in the annular compliance space ACS. As the annular damping space ADS is filled with coolant over time, the compliance section OCS still allows the viscoelastic material to move in response to low-frequency and / or high-frequency pressure spikes by utilizing the expandable volume of the compliance section OCS. As a result, the acoustic damping device ADD can effectively damp low-frequency and / or high-frequency pressure spikes even when the annular damping space ADS and the annular compliance space are completely filled with coolant, i.e., independently of the penetration of coolant through the viscoelastic material.

[0050] In one embodiment, a first compliance is selected to provide a rigid structure during normal operating conditions, while a second compliance is selected to allow expansion of the compliance section OCS as a result of increased internal pressure in the compliance section during normal operating conditions.

[0051] Furthermore, the structure of the compliance section OCS has the advantage that the first compliance of the compliance section OCS is generated by expansion in the direction of the longitudinal axis LAD of the expandable volume. As a result, the radial space required for the acoustic damping device ADD is substantially the same as that of the acoustic damping device ADD in Figure 4. This is particularly advantageous in configurations where radial space is limited.

[0052] Figure 8 shows a third embodiment of the acoustic damping device ADD.

[0053] In this third embodiment, the outer shell OSH also comprises a main section OMS and a compliance section OCS, where the first compliance of the compliance section is greater than the second compliance of the main section OMS. The first compliance is obtained by an expandable volume of the annular compliance space ACS.

[0054] To generate a volume expandable radially outward, the tubular outer wall TOW expands and contracts in the direction of the longitudinal axis LAD, and to allow the volume of the annular compliance space ACS to change, the portion of the end cap EC is rotatable around the pivot PIV relative to the radially inward portion of the end cap EC, such that an increase in pressure within the annular compliance space ACS results in a pivot of the radially outward portion of the end cap at the pivot PIV. The pivot PIV may be generated by a relatively flexible portion of the end cap EC.

[0055] The tubular inner wall (TIW) is positioned to provide a closed wall between the viscoelastic material of the inner conduit (VIC) and the liquid outlet (SCO) of the coolant supply conduit (CSC). The tubular inner wall (TIW) may also be stretchable in the direction of the longitudinal axis (LAD) to allow expansion and / or contraction of the viscoelastic material of the inner conduit (VIC) in the direction of the longitudinal axis (LAD), for example, due to its corrugated shape. Thus, this embodiment in Figure 8 allows for both radial and axial movement of the viscoelastic material with respect to the longitudinal axis (LAD). This movement in both the radial and axial directions enhances the damping effect of the viscoelastic material.

[0056] Furthermore, to reduce or prevent the entry of cooling fluid into the annular damping space ADS through the viscoelastic material of the inner conduit VIC, the inner conduit VIC may be coated with a coating layer CLA. The material of the coating layer CLA is selected to reduce or prevent the penetration of cooling fluid through it. The coating layer may be made from, for example, a metal (e.g., aluminum or nickel), a polymer material (e.g., "Parylene-C" or "Soft DLC"), or a combination thereof.

[0057] Instead of using a coating layer CLA that is directly coated onto the outer surface of the viscoelastic material of the inner conduit VIC, an impermeable foil may be placed between the outer shell OSH and the viscoelastic material of the inner conduit VIC in the annular damping space ADS. In such embodiments, the annular damping space ADS may be divided into an inner damping space and an outer damping space by the impermeable foil. The impermeable foil may be made from, for example, a metal (e.g., aluminum or nickel), a polymer material (e.g., "Parylene-C" or "Soft DLC"), or a combination thereof.

[0058] Coating layers and / or impermeable foils for reducing or preventing the entry of cooling fluid into the annular damping space ADS may be applied to any other embodiment of the tubular acoustic damping device ADD, such as those disclosed in Figures 4, 5, and 9.

[0059] Figure 9 shows a fourth embodiment of the tubular acoustic damping device ADD. The tubular acoustic damping device ADD comprises an inner conduit VIC made of a viscoelastic material and an outer shell OSH made of an airtight material. The outer shell OSH comprises a main section OMS and a compliance section OCS. The inner conduit VIC and outer shell OSH define an annular damping space ADS, which is configured to allow the deformation of the viscoelastic material to damp low-frequency pressure spikes and / or high-frequency pressure spikes in the coolant of the cooling system CS.

[0060] The compliance section OCS comprises a tubular inner wall TIW and a tubular outer wall TOW. The tubular inner wall TIW and the tubular outer wall TOW have open ends connected to annular damping space ADS and closed ends opposite the open ends, which are closed by end caps EC. The closed ends are formed, for example, by end caps EC. The tubular inner wall TIW and the tubular outer wall TOW define annular compliance space ACS between them.

[0061] The tubular inner wall (TIW), tubular outer wall (TOW), and end cap (EC) of the compliance section (OCS) are made of airtight, vacuum-compatible materials (e.g., metals such as stainless steel).

[0062] The compliance section OCS has a volume that is expandable in the direction of the longitudinal axis LAD in response to the internal pressure in the annular compliance space ACS. This expandable volume is expandable by the extension of the tubular outer wall TOW in the direction of the longitudinal axis LAD. To allow the extension of the tubular outer wall TOW, the end cap EC is pivotable around a pivot PIV. This pivot PIV may be formed, for example, by a flexible connection between the tubular inner wall TIW and the end cap EC.

[0063] In this embodiment shown in Figure 9, a layer of superabsorbent material SAM is placed in the annular damping space ADS formed between the inner conduit VIC and the outer shell OSH. The volume of water that penetrates the viscoelastic material over many years is relatively small. To prevent the coolant from interfering with the damping performance of the acoustic damping device ADD, it may be sufficient to simply provide a layer of material with a very high coolant absorption capacity.

[0064] The superabsorbent material SAM may be directly coated onto the outer surface of the viscoelastic material of the inner conduit VIC, or it may be a separate layer that is not directly attached to the viscoelastic material of the inner conduit VIC.

[0065] Superabsorbent materials (SAMs) are superabsorbent polymers (SAPs) comprising, for example, water-absorbing hydrophilic homopolymers or copolymers that can absorb and retain a large amount of liquid relative to their own mass. Superabsorbent polymers may comprise, for example, cross-linked polyacrylate and polyacrylamide, cellulose or starch acrylonitrile graft copolymers, or cross-linked maleic anhydride copolymers.

[0066] The superabsorbent material SAM does not need to be arranged as a layer of superabsorbent material SAM, but may be provided in any other suitable form or shape.

[0067] The superabsorbent material SAM for absorbing the coolant in the annular damping space ADS may be applied to any other embodiment of the tubular acoustic damping device ADD, such as those disclosed in Figures 4, 5, and 8.

[0068] The above describes an embodiment of an acoustic damping device ADD comprising an outer shell OSH surrounding an inner conduit VIC. The compliance section OCS is provided with a first compliance greater than the second compliance of the main section OMS of the outer shell OSH. Due to the compliance section, the acoustic damping device ADD can still provide an effective damping effect even when the annular damping space ADS is filled with a coolant (e.g., water) due to the penetration of coolant through the viscoelastic material of the inner conduit VIC.

[0069] As previously mentioned, different viscoelastic materials such as polytetrafluoroethylene, polyurethane, tetrafluoroethylene, hexafluoropropylene, and vinylidene fluoride-containing polymers, fluoroelastomers, and other elastomers, particularly PFAS-free elastomers, may be suitable for use in inner conduits (VICs). To efficiently damp pressure fluctuations, the material requires flexibility. Viscoelastic materials also need to satisfy several further requirements, such as thermal and permeability requirements.

[0070] FKM (fluorocarbon-based fluoroelastomer material) may be particularly suitable as a viscoelastic material for the inner conduit VIC. However, the flexibility of FKM and other suitable materials may result in relatively large deformations under static pressure loads within the inner conduit VIC. As a result, due to the internal pressure in the inner conduit VIC, the outer surface of the inner conduit VIC may come into contact with the inner surface of the outer shell OSH.

[0071] For example, in this embodiment shown in Figure 5, when internal pressure (e.g., internal static pressure) expands the material of the inner conduit VIC, the flat outer surface of the inner conduit VIC may come into contact with the corrugated inner surface of the outer shell OSH. In practice, the corrugations of the outer shell OSH may have, for example, a pitch of 1 mm. This means that the expanded inner conduit VIC has circular contact surfaces with the outer shell OSH spaced 1 mm apart from each other. Contact at circular contact surfaces with a 1 mm pitch may have a substantially negative effect on the damping capacity of the acoustic damping device ADD.

[0072] Figure 10 shows a fifth embodiment of the acoustic damping device ADD. The main structure of this acoustic damping device ADD corresponds to the structure of the damping device ADD in Figure 5. The main difference from the embodiment in Figure 5 is that the outer surface of the inner conduit VIC has a pattern of ring-shaped protrusions RSE. The pattern of ring-shaped protrusions RSE may be formed as a thickened portion of the inner conduit VIC, or the inner conduit VIC may be wavy to generate the ring-shaped protrusions RSE.

[0073] When the inner conduit VIC expands due to high internal pressure (e.g., internal static pressure), the ring-shaped protrusion RSE contacts the inner surface of the outer shell OSH. This contact may prevent further expansion of the inner conduit VIC. At the same time, the ring-shaped recess RSR between the ring-shaped protrusions still allows the inner conduit VIC to suppress pressure fluctuations within it.

[0074] The waveform of the outer shell OSH has, for example, a first pitch of 1 mm. The pattern of the ring-shaped protrusion RSE has a second pitch. The second pitch is larger than the first pitch, for example, at least twice (at least four times, etc.) the first pitch. The second pitch may be, for example, about 5 mm.

[0075] Due to the larger second pitch compared to the first pitch, the contact surface area between the outer surface of the inner conduit VIC and the inner surface of the outer shell OSH is reduced. The second pitch is selected to provide a balance between providing a contact surface between the outer surface of the inner conduit VIC and the inner surface of the outer shell OSH to limit the expansion of the inner conduit VIC, and providing a sufficiently flexible inner conduit VIC to suppress pressure fluctuations.

[0076] Figures 11A and 11B show an alternative embodiment of the inner conduit VIC having a pattern of protrusions and / or recesses to reduce contact between the outer surface of the inner conduit VIC and the inner surface of the outer shell OSH. In this embodiment, the cross-sectional shape of the inner conduit VIC is hexagonal rather than circular. This shape forms a pattern of six longitudinal protrusions LE. The longitudinal protrusions LE may be used as contact surfaces between the inner conduit VIC and the outer shell OSH.

[0077] Figure 11A shows the inner conduit VIC in a non-expanded or slightly expanded state. There is no contact between the inner conduit VIC and the outer shell OSH. Figure 11B shows the inner conduit VIC in an expanded state where the longitudinal protrusions LE are in contact with the inner surface of the outer shell OSH. Due to this contact, further expansion of the inner conduit VIC may be substantially prevented due to high internal pressure. At the same time, the area between two adjacent longitudinal protrusions LE is not in contact with the inner surface of the outer shell, leaving space in the acoustic damping space ADD for the inner conduit VIC to expand and contract in order to suppress pressure fluctuations in the inner conduit VIC.

[0078] In this embodiment shown in Figures 10, 11A, and 11B, a pattern of protrusions and / or recesses on the outer surface of the inner conduit VIC is used to obtain a reduced contact surface between the inner conduit VIC and the outer shell OSH. Due to the pattern of protrusions and / or recesses, a balance can be created between contact between the inner conduit VIC and the outer shell OSH to prevent further expansion of the entire inner conduit VIC, and at the same time, still allowing the inner conduit VIC to expand and contract locally to suppress pressure fluctuations.

[0079] The patterns of the protrusions and / or recesses may be regular or irregular. The protrusions and / or recesses may extend in a combination of both circumferential, longitudinal, or helical shapes.

[0080] In other embodiments, the inner conduit VIC may have a foamy or foamy outer layer configured to allow expansion of the viscoelastic material of the inner conduit VIC and to form an additional damping layer to suppress pressure fluctuations when the outer layer comes into contact with the outer shell OSH. The foamy or foamy outer layer may be continuous (e.g., extruded together with the viscoelastic inner portion of the inner conduit, or formed as a pattern of ring-shaped protrusions, for example, in this embodiment of Figure 10). Examples of foamy or foamy materials are expanded or extruded polymer foams such as polyurethane, polyolefins (e.g., LDPE, PP, PS), and elastomer foams (e.g., EVA, NBR).

[0081] In addition or alternatively, the pattern of protrusions and / or recesses, and / or the foamy / foamy layer may be provided on the inner surface of the outer shell OSH, or by another element, such as a tubular element having a pattern of protrusions and / or openings, that is placed in the acoustic damping space.

[0082] In one embodiment, means for reduced contact between the outer surface of the inner conduit VIC and the inner surface of the outer shell OSH may include one or more limiting elements provided to restrict the expansion of the inner conduit VIC. By providing limiting elements, for example, the expansion of the inner conduit VIC may be locally restricted by ring elements or longitudinal rod elements positioned on or inside the wall of the inner conduit VIC. A series of ring elements positioned on or inside the wall of the inner conduit VIC may, for example, at least partially prevent the expansion of the inner conduit VIC at the ring elements, while the inner conduit VIC may expand freely between two adjacent ring elements. As a result, when the inner conduit VIC with ring-shaped limiting elements is exposed and the pressure inside the inner conduit VIC increases, a pattern of ring-shaped protrusions and recesses is created.

[0083] The convex portion may be used as a contact surface between the inner conduit VIC and the outer shell OSH to limit the expansion of the inner conduit VIC, while the concave portion may still expand and contract locally to suppress fluid pressure fluctuations in the inner conduit VIC. The limiting element may be provided to limit the expansion of the inner conduit VIC so that the inner conduit does not come into contact with the outer shell OSH during normal operation.

[0084] Similarly, limiting elements that extend both longitudinally and circumferentially, such as longitudinal or helical limiting elements, may be used to generate a pattern of convex and concave sections when the inner conduit VIC is expanded.

[0085] In yet another alternative embodiment, means for reduced contact between the outer surface of the inner conduit VIC and the inner surface of the outer shell OSH include a pump device provided to generate a pressure increase in the acoustic damping space ADS. By increasing the pressure in the acoustic damping space ADS, the expansion of the inner conduit VIC may be suppressed, at least partially.

[0086] Figure 12 shows another embodiment of the acoustic damping device ADD, in which the outer shell is corrugated, and the corrugation of the outer shell is staggered such that the inner surface of the outer shell is formed with a repeating pattern of first corrugation 1COR and second corrugation 2COR, and the first corrugation 1COR extends further into the acoustic damping space ADS than the second corrugation 2COR. Because the first corrugation 1COR extends further into the acoustic damping space ADS, these first corrugations 1COR can be used as contact surfaces to limit the maximum expansion of the inner conduit VIC. The pitch between the first corrugations 1COR can be selected such that the first corrugations 1COR can function as contact surfaces by providing patterns of first corrugations 1COR and second corrugations 2COR, while there is space between the first corrugations 1COR to which the second corrugations 2COR are provided for the inner conduit VIC to expand and contract locally in order to suppress pressure fluctuations in the inner conduit VIC.

[0087] Figures 10, 11A, 11B, and 12 show embodiments in which means are provided for reduced contact between the outer surface of the inner conduit VIC and the inner surface of the outer shell OSH when the inner conduit VIC expands due to internal pressure in the inner conduit VIC. These means may be provided in an acoustic damping device ADD having an outer shell without a compliance section OCS (i.e., the outer shell does not have a main section and a compliance section, the compliance section having a first compliance, the main section having a second compliance, and the first compliance being greater than the second compliance).

[0088] These embodiments may generally be described as a tubular acoustic damping device for use in a vacuum environment, comprising an inner conduit made of a viscoelastic material having a first end connected to a liquid inlet and a second end connected to a liquid outlet, and an outer shell made of an airtight material surrounding the inner conduit, wherein an annular damping space is formed between the inner conduit and the outer shell, and the tubular acoustic damping device comprises means for reduced contact between the outer surface of the inner conduit and the inner surface of the outer shell when the inner conduit expands due to internal pressure in the inner conduit.

[0089] By providing means for reduced contact between the outer surface of the inner conduit and the inner surface of the outer shell, the contact surface area and / or the location of this contact, for example, the pitch of repeating contact surfaces, can be controlled. This broadens the possibility of creating a balance between providing a contact surface area between the outer surface of the inner conduit VIC and the inner surface of the outer shell OSH to limit the expansion of the inner conduit VIC, and providing a sufficiently flexible inner conduit VIC to suppress pressure fluctuations. The means for reduced contact between the outer surface of the inner conduit and the inner surface of the outer shell also makes it possible to reduce the total volume of the tubular acoustic damping device by providing an outer shell OSH with a relatively small diameter while providing an inner conduit VIC that is sufficiently flexible to suppress pressure fluctuations.

[0090] Figure 13 shows an example of one embodiment of the acoustic damping device ADD without a compliance section. Corresponding to the acoustic damping device ADD in Figure 10, the outer surface of the inner conduit VIC has a pattern of ring-shaped protrusions RSE.

[0091] Furthermore, in all the embodiments described above, a single inner conduit VIC is provided in the outer shell OSH. In an alternative embodiment, multiple inner conduit VICs may be provided in a single outer shell OSH.

[0092] Figure 14 shows a ninth embodiment of a tubular acoustic damping device ADD for use in a vacuum environment. The tubular acoustic damping device ADD comprises an inner conduit VIC made of a viscoelastic material and an outer shell OSH surrounding the inner conduit VIC. The outer shell is made of metal (e.g., stainless steel). An acoustic damping space ADS is formed between the outer shell OSH and the inner conduit VIC.

[0093] In this embodiment shown in Figure 4, the outer shell OSH is corrugated along its entire length to form a bellows shape. This bellows shape may contribute to the dynamic stiffness of the tubular acoustic damping device ADD, particularly in the higher frequency range. This is generally undesirable.

[0094] To reduce the contribution of the outer shell OSH to dynamic stiffness, this embodiment in Figure 14 includes a central rigid shell section RSS and two flexible shell sections FSS at both ends of the central rigid shell section RSS. The central rigid shell section RSS contributes substantially nothing to the dynamic stiffness of the outer shell OSH compared to the two flexible shell sections FSS. The flexibility of the outer shell OSH is maintained due to the presence of the two flexible shell sections FSS, while at the same time, the adverse effect on the dynamic stiffness of the outer shell OSH is substantially reduced due to the presence of the central rigid shell section RSS.

[0095] In this embodiment shown in Figure 14, the central part of the outer shell OSH is made rigid by providing straight tubular elements STE between the flexible shell sections FSS. The flexible shell sections FSS obtain their relative flexibility from the corrugations provided in the flexible shell sections FSS. Both ends of the straight tubular elements STE may be welded to the corresponding ends of the flexible shell sections FSS. The flexible shell sections FSS may also be tubular elements.

[0096] Figure 15 shows a tenth embodiment of an acoustic damping device ADD, which comprises an outer shell OSH surrounding an inner conduit VIC to form an acoustic damping space ADS. The acoustic damping device ADD comprises a central rigid shell section RSS and two flexible shell sections FSS at both ends of the central rigid shell section RSS. In this embodiment, the central rigid shell section RSS is not obtained by mounting a rigid cylindrical section between the two flexible shell sections FSS, but rather by holding both ends of the intermediate portion of the outer shell OSH in a rigid structure such that both ends of the intermediate portion of the outer shell OSH are held in a fixed position relative to each other in order to form the central rigid shell section RSS.

[0097] The rigid structure comprises two rigid ring elements RRE, where each rigid ring element RRE is fixed (e.g., welded) to one of the ends of the central rigid shell section RSS. The rigid ring elements RRE are connected to each other by a rigid connecting rod RCR. Together, the rigid ring elements RRE and the rigid connecting rod RCR form a rigid structure that holds both ends of the central rigid shell section RSS in a fixed position relative to each other to generate the central portion of the rigid outer shell OSH. The rigid structure may be formed by any other suitable rigid structure that can be connected to the outer shell OSH.

[0098] The rigid structure of the rigid ring element RRE and rigid connecting rod RCR provides rigidity to the central rigid shell section RSS; therefore, the intermediate portion of the outer shell OSH does not need to be a rigid element and may be, for example, corrugated. The rigid structure of the rigid ring element RRE and rigid connecting rod RCR may be mounted on the outer shell OSH of any of the embodiments shown in Figures 4, 5, 8, 9, 10, 12, and 13.

[0099] An additional advantage of the rigid structure is that a single corrugated tubular element can be used as the outer shell OSH. Here, the single corrugated tubular element is used to generate at least two flexible shell sections FSS and at least one rigid shell section RSS between them.

[0100] Figures 14 and 15 show two embodiments of an acoustic damping device ADD having an outer shell OSH with at least two flexible shell sections FSS and at least one rigid shell section RSS positioned between the at least two flexible shell sections FSS. Other embodiments may provide other configurations of the acoustic damping device having one or more flexible shell sections and one or more rigid shell sections. The combination of flexible and rigid shell sections may be selected to obtain a desired balance between providing flexibility and keeping the adverse effect on the dynamic stiffness of the outer shell OSH low.

[0101] Figure 16 shows a flexible hose comprising an outer shell OSH made of an airtight material (e.g., metal). Corresponding to the embodiment in Figure 14, the outer shell comprises a central rigid shell section RSS and two flexible shell sections FSS at both ends of the central rigid shell section RSS. The central rigid shell section RSS is formed by a straight tubular element STE positioned between the two flexible shell sections FSS, which are formed by two corrugated tubular portions of the outer shell OSH. One of the two flexible shell sections FSS is connected to a first connector CON1, and the other of the two flexible shell sections FSS is connected to a second connector CON2.

[0102] In the embodiments shown in Figures 14 and 15, an inner conduit VIC made of a viscoelastic material is provided within the outer shell OSH to generate damping properties. In the embodiment shown in Figure 16, this inner conduit VIC may or may not be present. For example, when the flexible hose in Figure 16 is not used as an acoustic damping device, the inner conduit VIC may be omitted, or the inner conduit may be made of any other suitable material (e.g., a polymer material). Nevertheless, it is still desirable for the flexible hose to provide some damping even without the inner conduit VIC made of a viscoelastic material.

[0103] To generate damping, a first damping device DDE is provided between the straight tubular element STE of the flexible hose and the first connector CON1, and a second damping device DDE is provided between the rigid shell section RSS of the flexible hose and the second connector CON2. Each damping device DDE comprises a damping element DEL, a first damping element holder DEH1, and a second damping element holder DEH2. The first damping element holder DEH1 is rigidly mounted on the respective connectors CON1 and CON2, and the second damping element holder DEH2 is rigidly mounted on the rigid shell section RSS. The damping element DEL is a damping ring that extends around the flexible hose and is held by the first damping element holder DEH1 and the second damping element holder DEH2.

[0104] In this embodiment shown in Figure 16, the damping element DEL is a ring made of a flexible material (e.g., an O-ring made of a rubber elastic material). The first damping element holder DEH1 and the second damping element holder DEH2 each include hooks configured to hold the ring at a location around the circumference of the ring, where the hook of the first damping element holder DEH1 is spaced apart from the hook of the second damping element holder DEH2.

[0105] The hooks of the first damping element holder DEH1 and the second damping element holder DEH2 are mounted on rigid clamping rings that are clamped onto their respective connectors CON1, CON2, and rigid shell section RSS. The connectors CON1, CON2, and rigid shell section RSS may have features such as grooves and / or rims for receiving the clamping rings.

[0106] Other configurations of damping devices may be provided to provide damping between the rigid shell section RSS and the first and second connectors CON1 and CON2.

[0107] (blank)

[0108] The above describes a cooling system for cooling an object using a coolant. Such a cooling system is a temperature conditioning system configured to adjust the temperature of an object by cooling using a temperature conditioning fluid. In other embodiments, the temperature conditioning system may be used to adjust the temperature of an object by heating using a temperature conditioning fluid, or by a combination of heating and cooling. All embodiments described herein may be used for heating (negative cooling), or a combination of heating and cooling. A combination of a gas silencer and an acoustic damping device may be advantageously used to damp low-frequency pressure spikes and / or high-frequency pressure spikes in the temperature conditioning fluid of the temperature conditioning system.

[0109] (blank)

[0110] Embodiments of the present invention may be described by the following items.

[0111] Item 1: An inner conduit made of a viscoelastic material having a first end connected to a liquid inlet and a second end connected to a liquid outlet, The outer shell, made of an airtight material, surrounds the inner conduit. Equipped with, An annular damping space is formed between the inner conduit and the outer shell, The outer shell has a main section and a compliance section, The aforementioned compliance section has a first compliance, and the aforementioned main section has a second compliance. The aforementioned 1st compliance is greater than the aforementioned 2nd compliance. A tubular acoustic damping device for use in vacuum environments.

[0112] Item 2: The tubular acoustic damping device has a vertical axis parallel to the central axis of the outer shell, The first compliance is provided in the direction of the vertical axis, A tubular acoustic damping device as described in item 1.

[0113] Item 3: The tubular acoustic damping device according to item 1 or 2, wherein the compliance section has a volume that can expand in response to the internal pressure in the compliance section.

[0114] Item 4: A tubular acoustic damping device according to any one of items 1 to 3, wherein the compliance section defines an annular compliance space having an open end connected to the annular damping space and a closed end opposite to the open end.

[0115] Item 5: The tubular acoustic damping device according to item 4, wherein the annular compliance space is expandable by variable spacing between the open end and the closed end.

[0116] Item 6: The compliance section comprises a tubular inner wall and a tubular outer wall, The tubular outer wall surrounds the tubular inner wall and is coaxial with the tubular inner wall. The tubular inner wall and the tubular outer wall define the annular compliance space. A tubular acoustic damping device as described in item 4 or 5.

[0117] Item 7: The tubular acoustic damping device according to item 6, wherein the inner tubular wall and the outer tubular wall are corrugated in order to allow extension of the inner tubular wall and the outer tubular wall in a direction parallel to the central axis of the inner tubular wall and the outer tubular wall, respectively.

[0118] Item 8: The tubular acoustic damping device according to any one of items 1 to 6, wherein the viscoelastic material comprises at least one of polytetrafluoroethylene, polyurethane, tetrafluoroethylene, hexafluoropropylene, vinylidene fluoride, terpolymer, or fluoroelastomer.

[0119] Item 9: The outer shell is made of metal, and is a tubular acoustic damping device as described in any of items 1 to 8.

[0120] Item 10: The outer shell is made of stainless steel, and is a tubular acoustic damping device as described in any of items 1 to 9.

[0121] Item 11: The inner conduit is coated with a coating layer, The aforementioned coating layer is made of a metal, a watertight polymer, or a combination thereof. A tubular acoustic damping device as described in any of items 1 through 10.

[0122] Item 12: A tubular acoustic damping device according to any one of items 1 to 11, wherein a superabsorbent material for the coolant is placed in the annular damping space formed between the inner conduit and the outer shell.

[0123] Item 13: The tubular acoustic damping device according to any one of items 1 to 12, wherein the tubular acoustic damping device comprises means for reduced contact between the outer surface of the inner conduit and the inner surface of the outer shell when the inner conduit expands due to internal pressure in the inner conduit.

[0124] Item 14: The tubular acoustic damping device according to item 13, wherein the means for reduced contact between the outer surface of the inner conduit and the inner surface of the outer shell comprises a pattern of protrusions and / or recesses on the outer surface of the inner conduit.

[0125] Item 15: The tubular acoustic damping device according to item 14, wherein the pattern of protrusions and / or recesses comprises protrusions and / or recesses extending in the longitudinal and / or circumferential directions of the inner conduit.

[0126] Item 16: The tubular acoustic damping device according to item 14 or 15, wherein the pattern of convex and / or concave portions comprises alternating ring-shaped convex and / or concave portions.

[0127] Item 17: The aforementioned outer shell is corrugated, The waveform of the outer shell has a first pitch, The alternating ring-shaped protrusions and / or recesses have a second pitch, The second pitch is larger than the first pitch. A tubular acoustic damping device as described in item 16.

[0128] Item 18: The inner conduit has a foamy or foam-like outer layer, as described in item 13, for the tubular acoustic damping device.

[0129] Item 19: The tubular acoustic damping device according to item 13, wherein the means for reduced contact between the outer surface of the inner conduit and the inner surface of the outer shell comprises one or more limiting elements configured to limit the expansion of the inner conduit.

[0130] Item 20: The means for reduced contact between the outer surface of the inner conduit and the inner surface of the outer shell comprises a pump element arranged to generate a pressure increase in the acoustic damping space, as described in item 13.

[0131] Item 21: The outer shell is corrugated, The waveform of the outer shell is staggered so that the inner surface of the outer shell is formed with a repeating pattern of the first and second waveforms. The first waveform extends further into the acoustic damping space than the second waveform. A tubular acoustic damping device as described in any of items 1 through 20.

[0132] Item 22: A tubular acoustic damping device as described in any of items 1 to 21, A first liquid line having a liquid outlet to which the first end of the inner conduit is connected, A second liquid line having a liquid inlet to which the first end of the inner conduit is connected, A fluid transport system for use in a vacuum environment, equipped with the following features.

[0133] Item 23: A cooling system for cooling an object, comprising the fluid transport system described in item 22.

[0134] Item 24: A lithography apparatus comprising a cooling system, such as that described in item 23, for cooling the optical elements of the projection system of the lithography apparatus.

[0135] Item 25: The lithography apparatus according to item 24, wherein the first liquid line is mounted on a first frame, and the liquid line is mounted on a second frame of the lithography apparatus.

[0136] (blank)

[0137] While this text may have provided specific references to the use of lithography equipment in IC manufacturing, it should be understood that the lithography equipment described herein may have other applications. Possible other applications include the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memory, flat panel displays, liquid crystal displays (LCDs), thin-film magnetic heads, and the like.

[0138] While specific references to embodiments of the present invention in the context of lithography apparatus may be made in this text, embodiments of the present invention may be used in other apparatuses. Embodiments of the present invention may constitute part of a mask inspection apparatus, a measuring apparatus, or any apparatus for measuring or processing objects such as wafers (or other substrates) or masks (or other patterning devices). These apparatuses may generally be referred to as lithography tools. Such lithography tools may operate under vacuum conditions or atmospheric (non-vacuum) conditions.

[0139] While specific references to the use of embodiments of the present invention in the context of optical lithography may have been made above, it is understood that the present invention is not limited to optical lithography and may be used in other applications such as imprint lithography, as the context permits.

[0140] Although specific embodiments of the present invention have been described above, it is understood that the present invention may be implemented in ways different from those described. The above description is for illustrative purposes only and is not intended to limit the present invention. Accordingly, it will be apparent to those skilled in the art that the present invention as described may be modified without departing from the scope of the claims presented below.

Claims

1. First gas silencer and, Second gas silencer and, A tubular acoustic damping device having a conduit made of a viscoelastic material, Equipped with, The first gas silencer and the second gas silencer are connected to each other through a fluid via a fluid line. The tubular acoustic damping device is provided in the fluid line between the first gas silencer and the second gas silencer such that the conduit of the tubular acoustic damping device becomes part of the fluid line. Fluid transport system.

2. The tubular acoustic damping device is Low-frequency pressure spikes due to the resonant mass of the fluid in the fluid line between the first silencer and the second silencer, The acoustic modes in the fluid in the fluid line between the first gas silencer and the second gas silencer, The acoustic modes in the fluid in the first gas silencer and / or the second gas silencer, and / or High-frequency pressure spikes in the coolant caused by structural resonance of the membrane separating the gas and coolant in the gas silencer, It is configured to dump, The fluid transport system according to claim 1.

3. The fluid transport system according to claim 1 or 2, wherein the fluid transport system is configured to transport the temperature conditioning liquid of a temperature conditioning system for cooling an object.

4. The fluid transport system according to any one of claims 1 to 3, wherein the first gas silencer and the second gas silencer are Helmholtz resonators.

5. The fluid transport system comprises a series of additional gas silencers along one or more fluid lines, The tubular acoustic damping device is provided in the one or more fluid lines between adjacent further gas silencers such that the conduit made of the viscoelastic material of the tubular acoustic damping device becomes part of the one or more fluid lines. A fluid transport system according to any one of claims 1 to 4.

6. The aforementioned viscoelastic material is Polytetrafluoroethylene, Polyurethane, A terpolymer comprising tetrafluoroethylene, hexafluoropropylene, and vinylidene fluoride. Fluoroelastomer, PFAS-free elastomer, comprising at least one of the following: A fluid transport system according to any one of claims 1 to 5.

7. The fluid transport system according to any one of claims 1 to 6, wherein the fluid transport system is configured for use in a vacuum environment.

8. The tubular acoustic damping device comprises an outer shell made of an airtight material surrounding the conduit, An annular damping space is formed between the conduit and the outer shell. The fluid transport system according to claim 7.

9. The fluid transport system according to claim 8, wherein the outer shell is made of metal, for example, stainless steel.

10. The fluid transport system according to claim 8 or 9, wherein the outer shell is at least partially corrugated.

11. The fluid transport system according to any one of claims 8 to 10, wherein the outer shell comprises at least one flexible shell section and at least one rigid shell section.

12. The fluid transport system according to claim 11, wherein the at least one rigid shell section comprises a rigid tubular element.

13. The fluid transport system according to claim 11, wherein the at least one rigid shell section comprises a tubular element held at both ends by a rigid structure.

14. The fluid transport system according to claim 13, wherein both ends of the tubular element are held by rigid ring elements that are connected to each other by a rigid connecting rod.

15. The at least one flexible shell section comprises a first flexible shell section at one end of the outer shell and a second flexible shell section at the other end of the outer shell. The at least one rigid shell section is positioned between the first flexible shell section and the second flexible shell section. A fluid transport system according to any one of claims 11 to 14.

16. A temperature conditioning system for temperature conditioning an object, comprising the fluid transport system according to any one of claims 1 to 15.

17. A lithography apparatus comprising the temperature conditioning system described in claim 16.

18. It has an outer shell made of airtight material, The outer shell comprises at least two flexible shell sections and at least one rigid shell section positioned between the at least two flexible shell sections. Flexible hose.

19. The flexible hose according to claim 18, wherein the at least one rigid shell section comprises a straight tubular element.

20. The flexible hose according to claim 18, wherein the at least one rigid shell section is formed by holding both ends of the intermediate portion of the outer shell with a rigid structure.

21. The flexible hose according to claim 20, wherein both ends of the intermediate portion of the outer shell are held by rigid ring elements connected to each other by rigid connecting rods.

22. The flexible hose according to any one of claims 18 to 21, wherein the flexible hose comprises an inner conduit surrounded by the outer shell.

23. The inner conduit is made of a viscoelastic material. An annular damping space is formed between the conduit and the outer shell. The flexible hose according to claim 22.

24. A flexible hose according to any one of claims 18 to 23, wherein the fluid transport system is configured for use in a vacuum environment.

25. The flexible hose according to any one of claims 18 to 24, wherein the outer shell is made of metal, for example, stainless steel.

26. The flexible hose according to any one of claims 18 to 25, wherein the outer shell is corrugated to form the at least two flexible shell sections.

27. The at least two flexible shell sections are each connected to a connector, A damping device is provided between each connector and the at least one rigid shell section. A flexible hose according to any one of claims 18 to 26.

28. Each damping device comprises a damping element, a first damping element holder, and a second damping element holder. The first damping element holder is rigidly mounted on each of the connectors, The second damping element holder is rigidly mounted on the at least one rigid shell section, The damping element is a damping ring that extends around the flexible hose and is held by the first damping element holder and the second damping element holder. The flexible hose according to claim 27.

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