High-resolution defocus-compensated spectrometer

Abstract

This application discloses various embodiments of a high-resolution spectrometer. In one embodiment, the high-resolution spectrometer includes a light source, a housing, at least one adjustment device fixed to the housing, and a photodetector fixed to the adjustment device. At least one dispersive optical element is arranged to optically communicate with the light source and the photodetector, and the dispersive optical element is configured to diffract at least a portion of the incident light signal from the light source as a diffracted light signal propagating toward the photodetector, and the photodetector is configured to measure at least one characteristic of at least one wavelength component of the diffracted light signal. The adjustment device is configured to adjust the position of the photodetector relative to the dispersive optical element to optimize the image width of the wavelength component of the diffracted light signal.

Description

Technical Field

[0001] Cross-references to related applications This application claims priority to U.S. Patent Application No. 18 / 119,018, titled "High-Resolution Defocus Compensation Spectrometer," filed on March 8, 2023, the content of which is incorporated herein by reference.

Background Art

[0002] background Optical spectroscopy is the study of the electromagnetic spectrum (the wavelength composition of light) that results from the interaction of atoms and molecules. Spectrometers and spectrophotometers are used in a variety of applications in the fields of physics, biology, and chemistry. One of the design trade-offs for these devices is between the need for a compact size (i.e., a small "design footprint") and the optimization of the geometry of the device for obtaining high spectral resolution, which generally requires a larger design footprint.

[0003] Conventional spectrometers have been considered useful heretofore, but a plurality of drawbacks have also been pointed out. For example, in a spectrometer having high spectral resolution, the diffraction angles of adjacent wavelengths can be very similar, and thus, in order to spatially separate adjacent wavelengths sufficiently, there is a long distance between the diffraction grating and the image position on the detector. However, in order to separate adjacent wavelengths sufficiently in this way, a generally larger design footprint is required. Also, the design of a typical spectrometer module uses a planar detector, and there are only two wavelengths at which the focus is completely optimized over the entire spectrum, i.e., the wavelengths at which the image width is smallest. Therefore, it is not possible to completely optimize the entire spectrum with respect to focus, and the maximum spectral resolution that can be obtained is not achieved at other wavelengths. From the above viewpoints, there has been a continuing need for a spectrometer that provides high resolution while minimizing the design footprint.

Summary of the Invention

[0004] overview This application discloses various embodiments of an optical instrument. In one embodiment, the optical instrument comprises at least one housing, at least one first adjustment device fixed to the at least one housing, at least one detector fixed to the at least one first adjustment device, and an incident optical axis (A IThe at least one first adjustment device comprises an incident light signal propagating along a ray and at least one dispersive optical element configured to diffract at least a portion of the incident light signal as a diffracted light signal propagating toward the at least one detector, wherein the at least one detector is configured to measure at least one characteristic of the diffracted light signal, and the at least one first adjustment device is configured to change the position of the at least one detector with respect to the at least one dispersive optical element. In various embodiments, the at least one first adjustment device is a linear motion stage having a fixed part fixed to the housing and a movable part fixed to the at least one detector, wherein the movable part of the at least one first adjustment device is driven by at least one actuator selected from the group consisting of piezoelectric actuators, servo motor actuators, stepping motor actuators, and linear motor actuators. The at least one first adjustment device may be configured to change the angular direction of the at least one detector with respect to the at least one dispersive optical element. The at least one first adjustment device is selected from the group consisting of optical mounts, tip tilting platforms, gimbal platforms, goniometers, angle stages, and bending mounts. In various embodiments, the at least one first adjustment device is driven by at least one actuator selected from the group consisting of piezoelectric actuators, servo motor actuators, stepping motor actuators, worm screw drives, and linear motor actuators. In other embodiments, the at least one dispersive optical element is fixed to at least one second adjustment device configured to change the position of the at least one dispersive optical element with respect to at least one of the at least one detector or the incident light signal. In other embodiments, the at least one dispersive optical element is fixed to at least one second adjustment device configured to change the angular direction of the at least one dispersive optical element with respect to at least one detector or the incident light signal.In one embodiment, the at least one dispersive optical element is a holographic grating having a groove profile selected from the group consisting of sinusoidal, trapezoidal, bump, cycloidal, inverse cycloidal, sawtooth, and trapezoidal sawtooth profiles. In another embodiment, the at least one dispersive optical element is a diffraction grating selected from the group consisting of an echelle grating, a replica grating, a dual blaze grating, and a mosaic grating. In one embodiment, the at least one characteristic of the diffracted optical signal is the image width W of at least one wavelength component of the diffracted optical signal. Alternatively, the at least one characteristic of the diffracted optical signal may be the optical power of at least one wavelength component of the diffracted optical signal.

[0005] Furthermore, this application discloses various embodiments of a method for analyzing an incident light signal. In one embodiment, the method includes providing at least one dispersive optical element that operates to reflect the incident light signal as a diffracted light signal; providing at least one detector configured to measure one or more characteristics of the diffracted light signal; providing at least one first adjustment device that operates to change the position of the at least one detector relative to the at least one dispersive optical element; providing at least one controller configured to receive measurement data representing the one or more characteristics of the diffracted light signal from the at least one detector and to instruct the at least one first adjustment device to position the at least one detector relative to the at least one dispersive optical element; and then measuring at least one of the one or more characteristics of the diffracted light signal using the at least one detector, and adjusting the position of the detector relative to the at least one dispersive optical element using the at least one first adjustment device until an optimal value of the one or more characteristics of the diffracted light signal is reached. The characteristics of the diffracted light signal measured by the above method include the optical power of at least one first wavelength component λ1, at least one second wavelength component λ2, at least one third wavelength component λ3, at least one fourth wavelength component λ4, and at least one fifth wavelength component λ5.

[0006] In other embodiments, the method includes at least one dispersive optical element that operates to reflect the incident light signal as a diffracted light signal, and at least one detector configured to measure one or more characteristics of the diffracted light signal, wherein one of the one or more characteristics of the diffracted light signal is one or more wavelength components λ n Image width W n The system includes at least one first adjustment device that operates to change the position of the at least one detector relative to the at least one dispersive optical element, and the image width W of the first wavelength component λ1 from the at least one detector. n The method includes providing at least one controller configured to receive measurement data representing the position of the at least one detector relative to the at least one dispersive optical element and to instruct the at least one first adjustment device to adjust the position of the at least one detector relative to the at least one dispersive optical element. The steps of the method include a control sequence in which, in a first measurement step, the at least one dispersive optical element is positioned at a first position P n Using the at least one detector located at the above position, the first image width W1 of the first wavelength component λ1 is measured, and in the first motion step, the second position P relative to the at least one dispersion optical element is measured using the at least one first adjustment device. n-1 Position the above-mentioned at least one detector, and in the second measurement step, position P with respect to the above-mentioned at least one dispersion optical element n-1Using the at least one detector located at, measure the second image width W2 of the first wavelength component λ1. In a comparison step, in the at least one controller, compare the first image width W1 with the second image width W2 to determine a first change ΔW1 in the image width. If the first change ΔW1 in the image width is positive, in a third motion step, use the at least one first adjustment device to position the at least one detector closer to the at least one dispersive optical element by one increment -ΔP1. If the first change ΔW1 in the image width is negative, in a second motion step, use the at least one first adjustment device to position the at least one detector closer to the at least one dispersive optical element by the same one increment -ΔP1, including performing a control sequence. Repeat as many times as necessary until the minimum image width W min is reached, and then output data representing the minimum image width W min to at least one display. The method further includes repeating the control sequence for a second wavelength component λ2, at least one third wavelength component λ3, at least one fourth wavelength component λ4, and at least one fifth wavelength component λ5 of the diffracted optical signal.

[0007] In other embodiments, the method includes providing at least one dispersive optical element configured to reflect the incident optical signal as a diffracted optical signal, and providing at least one detector configured to measure one or more characteristics of the diffracted optical signal. One of the one or more characteristics of the diffracted optical signal is the image width W n of one or more wavelength components λ nThe present invention includes providing at least one first adjustment device that operates to change the position of the at least one detector relative to the at least one dispersive optical element, providing at least one controller that receives measurement data representing at least one characteristic of the diffracted light signal from the at least one detector, and providing at least one motion controller configured to instruct the at least one first adjustment device to adjust the position of the at least one detector relative to the at least one dispersive optical element. A control sequence is performed, the control sequence in which, in a first measurement step, the at least one dispersive optical element is positioned at a first position P n Using at least one detector located at the above position, the first image width W1 of the first wavelength component λ1 is measured, and in the first data acquisition step, the second image width W n+1 Measurement data representing the first position P is transmitted from the at least one detector to the at least one detector controller, and the measurement data representing the first position P relative to the at least one dispersive optical element is transmitted from the at least one detector to the at least one detector controller. n Detector data representing the above is transmitted to the above at least one motion controller, and in the first motion step, the above at least one first adjustment device is used to determine the second position P relative to the above at least one dispersion optical element. n-1 The above at least one detector is set to the first increment -ΔP n Only the position is determined, and in the second measurement step, the second position P with respect to the at least one dispersed optical element is determined. n-1 Using the above-mentioned at least one detector located at the above position, the second image width W of the first wavelength component λ1 n+1 The second image width W is measured, and in the second data acquisition step, n+1 Measurement data representing the second position P is transmitted from the at least one detector to the at least one detector controller, and the second position P relative to the at least one dispersive optical element is transmitted from the at least one detector to the at least one detector controller. n-1Detector position data representing the above is transmitted to the above at least one motion controller, and in the second motion step, the above at least one first adjustment device is used to move the above at least one detector to the third position P relative to the above at least one dispersion optical element. n-2 The second increment -ΔP n Position only the third position P with respect to the at least one dispersion optical element in the third measurement step. n-2 Using the above-mentioned at least one detector located at the above position, the third image width W of the first wavelength component λ1 n+2 The third image width W is measured, and in the third data acquisition step, the third image width W is measured. n+2 Measurement data representing the at least one detector is transmitted from the at least one detector controller to the at least one detector controller, and the at least one detector's third position P relative to the at least one dispersive optical element n-2 Detector position data representing the image width W is transmitted to at least one motion controller, and in the aggregation step, at least one device controller aggregates the image width data and detector position data from the successive data acquisition steps, and the smallest image width W among the aggregated image width data is found. min Select the above at least one detector and the above smallest image width W min The associated location P min The method further includes positioning the diffracted light signal for a second wavelength component λ2, at least one third wavelength component λ3, at least one fourth wavelength component λ4, and at least one fifth wavelength component λ5. [Brief explanation of the drawing]

[0008] Brief explanation of the drawing Various embodiments of the high-resolution spectrometer are described in more detail with reference to the accompanying drawings.

[0009] [Figure 1] Figures 1 and 2 are schematic optical diagrams illustrating the effects of different positions of the photodetector on a dispersive optical element. [Figure 2] Figures 1 and 2 are schematic optical diagrams illustrating the effects of different positions of the photodetector on a dispersive optical element.

[0010] [Figure 3] Figures 3 and 4 show parts of the optical schematic diagrams of Figures 1 and 2, respectively, and represent the separated wavelength components incident on the photodetector. [Figure 4] Figures 3 and 4 show parts of the optical schematic diagrams of Figures 1 and 2, respectively, and represent the separated wavelength components incident on the photodetector.

[0011] [Figure 5] Figure 5 shows a schematic diagram of an embodiment of a high-resolution spectrometer in which a photodetector is placed at a first position for measuring the first wavelength component of the diffracted light signal.

[0012] [Figure 6] Figure 6 shows a schematic diagram of an embodiment of the high-resolution spectrometer shown in Figure 5, in which a photodetector is placed at a second position for measuring the second wavelength component of the diffracted light signal.

[0013] [Figures 7A-7D] Figures 7A-7D show various diagrams illustrating the changes in the position of the photodetector of the high-resolution spectrometer shown in Figures 5 and 6.

[0014] [Figure 8] Figure 8 shows a plot of image width for three wavelength components measured by the spectrometer embodiments shown in Figures 5 and 6 without defocus compensation.

[0015] [Figure 9] Figure 9 shows a plot of image width for three wavelength components measured by the high-resolution spectrometer embodiment shown in Figures 5 and 6 using defocus compensation.

[0016] [Figure 10]Figure 10 shows graphs of the image width as a function of wavelength for the high-resolution spectrometers shown in Figures 5 and 6, with and without defocus compensation.

[0017] [Figure 11] Figure 11 shows a control sequence diagram for an embodiment of a method for optimizing spectrometer measurements.

[0018] [Figure 12] Figure 12 shows a control sequence diagram for another embodiment of the method for optimizing spectrometer measurements. [Modes for carrying out the invention]

[0019] Detailed explanation The following describes examples of embodiments with reference to the attached drawings. Unless explicitly stated, the sizes, positions, and distances between components, features, and elements in the drawings are not necessarily to scale and may be exaggerated for ease of understanding. Similar numbers throughout the drawings represent similar elements. Therefore, identical or similar numbers may be mentioned by reference to other drawings even if they are not mentioned or described in the corresponding drawings. Furthermore, elements without reference numbers may also be mentioned by reference to other drawings.

[0020] The terms used in this specification are for the sole purpose of describing specific exemplary embodiments and are not intended to be limiting. Unless otherwise specifically defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by those skilled in the art. Where used herein, singular nouns are intended to include plural nouns unless the context explicitly indicates otherwise. The terms “at least one,” “at least,” and “one or more” are intended to include both singular and plural nouns, depending on the context. Furthermore, the terms “equipped with” and / or “equipped with” where used herein identify the presence of a described feature, integer, step, action, element, and / or component, but should be understood not to exclude the presence or addition of one or more other features, integers, steps, actions, elements, components, and / or groups thereof. Unless otherwise specifically indicated, terms such as “first” and “second” are used solely to distinguish elements from one another. For example, one fitting may be called the “first fitting,” and similarly another fitting may be called the “second fitting,” or vice versa.

[0021] Unless otherwise specified, spatially relative terms such as “downward,” “below,” “underside,” “upward,” and “upper side,” “opposite side,” may be used herein to facilitate explanation when describing the relationship between one element or feature and another, as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations in addition to those shown in the figures. For example, an element described as being “downward” or “below” another element or feature would, if the object in the figure were inverted, face “upward” the other element or feature. Thus, the exemplary term “downward” may include both upward and downward orientations. Objects may also be oriented in other ways (e.g., rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein may be interpreted accordingly. A set of reference axes (e.g., X, Y, Z), directions, or coordinates, and rotations around them (e.g., θX, θY, θZ) may be included in the figures to facilitate the reader's understanding of the figures and the specification, but this does not necessarily indicate that a particular feature or element is aligned with or orthogonal to other features or elements.

[0022] Paragraph numbers used herein are for organizational purposes only, unless otherwise specified, and should not be construed as limiting the subject matter discussed. It will be understood that many different forms, embodiments, and combinations are conceivable without departing from the spirit and teachings of this disclosure, and that this disclosure should not be construed as limiting to the examples of embodiments described herein. Rather, these examples and embodiments are provided to fully convey the scope of this disclosure to those skilled in the art, as it is complete and all-encompassing.

[0023] The embodiments described below relate to spectrometers and spectrometers. These separate and measure the spectral components of physical phenomena. Spectrometer is a broad term often used to describe instruments that measure continuous variable quantities of phenomena where the spectral components are somewhat mixed. A spectrometer works by using a dispersion device to separate light into individual wavelengths and measuring the intensity of each wavelength with one or more photosensors or detectors. A spectrometer is an instrument that separates light by wavelength and records this data. A spectrometer typically has a photodetector, a multi-channel photodetector, a photodetector array, a photosensor, or a camera that detects and records the spectrum of light. Spectrometers and spectrometers differ in the method of measurement and the method of displaying the results. The resulting data is presented as a graph showing the intensity of light as a function of wavelength, which is called a spectrum. Operators of spectrometers and spectrometers often test a sample to understand its behavior at a specific wavelength (also referred to herein as the “wavelength of interest”) or multiple wavelengths (also referred to herein as “multiple wavelengths of interest”). Similarly, a particular spectrum or subspectrum may be referred to herein as the “spectrum” or “subspectrum.” Two important properties of a spectrometer are dispersion and angular resolution. Dispersion defines the wavelength range of the spectrum, and spectral resolution defines the size of the smallest spectral feature that can be studied within the spectrum. When an optical grating is used as a dispersion device, dispersion and spectral resolution are determined by the diffraction grating equation mλ=d(sinα+sinβ). Assuming that m is the order of diffraction (integer), α (alpha) is the angle of incidence, and β (beta) is the diffraction angle, and that both α and β are measured relative to the grating normal, this diffraction grating equation determines the angular position of the maximum principal intensity when light of wavelength λ is diffracted from a diffraction grating with groove spacing d. Angular dispersion is defined as the rate of change of the diffraction angle β of the dispersed light with respect to wavelength λ. The spectral resolution of a spectrometer (denoted herein as SR) is the ability to distinguish between two wavelengths separated by Δλ, and is expressed in nanometers or as a dimensionless quantity SR=λ / Δλ.

[0024] To clarify this disclosure, the following positional notation is used: The position of a component, object, or feature is P n It is written as P n An object located at position P is considered to be in a certain position relative to other objects. n-1 An object located at -ΔP can be considered to be at a different (closer) position relative to the same object or feature. For example, as used in the following paragraph, if a detector is at position P2 relative to a dispersion optical element (e.g., a diffraction grating), then the same detector at position P1 relative to the diffraction grating is closer to the diffraction grating. -ΔP n An incremental movement or step, denoted as +ΔP, indicates that components, objects, or features move closer to each other by a certain amount (ΔP). n An incremental movement or step, denoted as such, indicates that components, objects, or features move away from each other by the same amount (ΔP). Therefore, when the detector is moving in the "+P direction" relative to the diffraction grating, the detector is moving away from the diffraction grating, and when the detector is moving in the "-P direction" relative to the diffraction grating, the detector is moving towards the diffraction grating.

[0025] The embodiments described below relate to improving the resolution of a spectrometer or spectrometer by adjusting the position of the photodetector (or the position of the dispersive optical element) from the suboptimal focal point (also referred to herein as “defocused”) position of the individual wavelength components of the diffracted optical signal to the optimal focal point position of those wavelength components at the photodetector relative to the position of the dispersive optical element. Defocusing of individual wavelength components can be caused by various optical aberration effects (e.g., astigmatism, field curvature, etc., or combinations thereof). Since aberration effects generally affect different wavelengths in different ways, the optimal focal point position for the dispersive optical element may differ at different wavelengths. A spectrometer having the ability to compensate for defocusing effects may be described as “defocus-compensated” or having a “defocus compensation function.” Such a defocus compensation function can be turned on (i.e., “enabled”) or off (i.e., “disabled”) by the operator or by the operation of the spectrometer’s controller.

[0026] Figures 1 and 2 show schematic optical diagrams of a spectrometer 10 configured to measure the characteristics of an optical signal from a source 12. In Figure 1, the optical signal 14 propagating from the spectrometer 10 and source 12 is incident on a dispersive optical element 16 (e.g., a diffraction grating 16) and diffracted as a diffracted optical signal 18 at a detector 20 located at position P1 relative to the grating 16. The diffracted optical signal 18 is diffracted at different angles β in the first diffraction. 1,2,3,4This shows separate rays of light with different wavelengths (also referred to herein as "wavelength components") propagating along the grid. When adjacent wavelength components reach the detector 20, they are separated from each other by a change in wavelength Δλ1. For example, the two shorter wavelength components have wavelengths λ1 (e.g., 450 nm) and λ2 (e.g., 480 nm), which may result in a Δλ1 of 30 nanometers. The distance between the incident points of these two wavelength components in the detector plane is shown as D1. In Figure 2, the spectrometer 10 has a detector 20 located at position P2, which is further from the grating 16 than position P1. Because the detector 20 is further from the grating 16, the wavelength components of the diffracted light signal 18, which are separated by the same change in wavelength Δλ1, are spatially separated by a longer distance D2 at the relative incident point on the detector 20.

[0027] Figures 3 and 4 show the detector 20 of the spectrometer 10, which includes a mask 22 in which multiple slits 24, 26, and 28 are positioned in front of the corresponding detector elements 25, 27, and 29 of the detector 20, respectively. Figure 3 shows that the detector 20 is located at a position P1 from the grating 16 shown in Figure 1, and the wavelength separation Δλ1 creates a physical separation of D1, making it possible to detect the wavelength component λ1 (e.g., 450 nm) propagating through the slit 24 to the detector element 25 and the wavelength component λ2 (e.g., 480 nm) propagating through the slit 26 to the detector element 27. Figure 4 shows that the detector 20 is located at a further position P2 from the grating 16 shown in Figure 1, and the wavelength separation Δλ1 creates a physical separation of D2 between the wavelength components λ1 and λ2, making it possible to detect the third wavelength component λ3 (e.g., 465 nm) propagating through the slit 26 to the detector element 27 and the wavelength component λ2 propagating through the slit 28 to the detector element 29. In this way, by placing the detector 20 at a position P2 further away from the grid 16, the resolution of the instrument 10 can be increased.

[0028] Figures 5 and 6 show schematic optical diagrams of an embodiment of an optical instrument 100 (e.g., a high-resolution spectrometer 100) configured to compensate for the defocusing effect of diffracted light in first-order diffraction for each of two wavelength components (λ1 and λ2). In Figures 5 and 6, a coordinate reference is provided, showing the X, Y, and Z axes (or directions) and rotations θX, θY, and θZ around these axes. Generally, "Z direction" refers to movement along the optical axis (e.g., the optical axis of the wavelength component of the diffracted light signal, or optically upstream or downstream along the propagation direction of the wavelength component). In Figure 5, the Z axis is a specific optical axis A O1 The wavelengths are aligned (for example, the wavelength component λ1 propagates along this wavelength). In various embodiments, the spectrometer 100 may have sufficient resolution to measure finely divided wavelength components such as λ1=450.00nm, λ2=450.15nm, λ3=450.45nm, λ4=450.60nm, etc.

[0029] As shown in Figure 5, in the illustrated embodiment, the spectrometer 100 includes at least one housing 102 having at least one internal space 103, at least one inlet port 105 formed within the housing 102, at least one dispersive optical element 108 (also referred to herein as “grille 108”), at least one photosensor or detector 112, and at least one adjustment device 114, all of which are located within the housing 102 or fixed to various parts of the housing 102. The spectrometer 100 further includes an instrument controller 120 (also referred to herein as “controller 120”) having a detector controller 122 electrically connected to the detector 112 via a conduit 118, and a motion controller 124 electrically connected to adjustment devices 114 and 140 via conduits 116 and 142, respectively. At least one display 126 electrically connected to the instrument controller 120 is provided for displaying the measurement results of the spectrometer 100. In various embodiments, the detector 112 may include various slits configured to distinguish the wavelength components being measured. The slits may have widths ranging from 5 microns to 500 microns, but those skilled in the art will understand that the slits may be of any size.

[0030] At least one source 104 is on the incident optical axis A I The incident light signal 106 propagates along the inlet port 105 and is incident on the grating 108 at an incident angle α (alpha) with respect to the grating normal, and is emitted. The grating 108 diffracts the incident light signal 106 as a diffracted light signal 110 having one or more wavelength components. Each wavelength component λ n This is at an angle β with respect to the grid normal. n It propagates toward detector 112, at angle β nThis is determined by the surface morphology of the grating 108 (e.g., groove spacing or groove profile) when the grating 108 is provided as a reflective diffraction grating. For example, a first wavelength component having wavelength λ1 is thought to be diffracted at an angle β1 with respect to the grating normal (for example, based on the surface morphology of the grating 108), and the diffraction optical axis A is as shown in Figure 1. O1 The light propagates along the path to the detector 112. For simplicity, the source 104 is shown as a point source emitting the incident light signal 106. In various embodiments, the source 104 can be any kind of object that emits or reflects multicolor light that can be analyzed by the spectrometer 100. For example, in one embodiment, the sample is such that the light reflected from such a sample (e.g., the incident light signal 106) passes through the inlet port 105 along the incident optical axis A I The biological sample is illuminated by a broadband light source (not shown) so as to propagate along a certain axis. In other embodiments, the source 104 may be a light source such as an LED that emits light at multiple wavelengths. In other embodiments, the source 104 is an optical fiber that optically connects to the sample or light source. The spectrometer 100 may include an aperture or inlet slit (not shown) provided on the inlet port 105 that limits the amount or wavelength of light that can propagate from the source 104 to the grating 108. In the illustrated embodiment, the housing 102 is hermetically sealed except for one or more filters configured to prevent particulate contaminants from entering the housing 102 and into the internal space 103. In other embodiments, the housing 102 is hermetically sealed and a gas (e.g., an inert gas) is introduced into the internal space 103. Those skilled in the art will understand that the housing may be configured in any way to control the environment within the internal space 103.

[0031] The embodiment of the spectrometer 100 described with respect to Figures 5 and 6 measures the wavelength components in first-order diffraction, but those skilled in the art will understand that the spectrometer 100 may also be used to measure wavelength components at higher diffraction orders or at negative diffraction orders. The incident light signal 106 is shown as a divergent beam to show how the dispersive optical element 108 (when provided as a concave grating) focuses each wavelength component of the diffracted light signal 110 (shown as a convergent beam) to the detector 112. In the illustrated embodiment, the grating 108 is a concave holographic grating. Those skilled in the art will understand that the grating 108 may be provided as any type of dispersive element, including diffraction gratings such as engraved gratings, echelle gratings (single-bladed or multi-bladed), mosaic gratings, holographic gratings, and replica gratings made from these. When provided as a holographic grating, the groove profile may be any type of profile, including sinusoidal, trapezoidal, bumpy, cycloidal, inverse-cycloidal, serrated, or trapezoidal-serrated profiles. The dispersion planes of the grating 108 may be flat, convex, concave, or of any shape or in various forms. In some embodiments, the grating planes may be coated, at least partially, with a dielectric material (e.g., a single layer or multiple alternating layers or a combination thereof of a metal oxide such as silicon dioxide (SiO2) or magnesium fluoride (MgF2)) to protect the grating planes in applications where high laser fluence is required on the grating planes. Those skilled in the art will understand that the grating planes may be coated with any kind of material. The dispersion optical element 108 may be provided as a transmission diffraction grating, a prism, or a pair of prisms. In other embodiments, multiple dispersion elements may be used.

[0032] The detector 112 is configured to detect or measure one or more optical properties of the diffracted light signal 110 (including, but not limited to, optical power, optical image width, optical image profile, beam profile, laser fluence, number of photons, wavelength, spectrum, subspectral, multiple spectra or subspectrals, or any combination thereof) or the optical properties of individual wavelength components of the diffracted light signal 110, and to transmit measurement data representing such optical properties to the detector controller 122. In the illustrated embodiment, the detector 112 is provided as a wavelength-independent detector configured to measure the optical power of wavelength components of the diffracted light signal 110 that are focused thereto or propagating thereto. The detector 112 may include a plurality of detector elements (not shown) each configured to measure at least one wavelength component of the diffracted light signal 110. Alternatively, the detector 112 may be provided as a detector array or a photon counter.

[0033] The spectrometer 100 may be configured to operate at various optical powers, wavelength ranges, or a number of wavelength ranges, depending on the type of source 104, dispersive optical element 108, detector 112, or tuning device 114 used. Examples of wavelength ranges include UV (extreme UV, vacuum UV, deep UV, visible, near-infrared, mid-infrared, and far-infrared). The spectrometer 100 may also be reconfigurable by replacing any of the above-mentioned components with others configured to operate at different powers, wavelengths, etc.

[0034] Examples of sensor / detector types that can be incorporated into the spectrometer 100 include photodiodes (PDs), avalanche photodiodes (APDs), phototransistors, photodiode arrays, charge-coupled devices (CCDs), PIN diodes, and CMOS sensors. In the illustrated embodiment, the detector 112 is a silicon (Si) detector having a wavelength response range of approximately 190 nanometers to approximately 1100 nanometers. Detector materials (and their approximate response ranges) that can be used for detector 112 include silicon (Si) VUV detectors (193 nm) and Si RGB color sensors (blue 400-450nm, green 470-600nm, and red 590-720nm), gallium nitride (GaN, 362-375nm), gallium arsenide phosphide (GaAsP, 430-690nm), germanium (Ge, 800-1800nm), indium arsenide (InAs, 1000-3800nm), indium gallium arsenide (InGaAs, 900-1700nm), expanded range InGaAs (900-2500nm), gallium arsenide (GaAs, 900-1700nm), lead sulfide (PbS, 1000-1300nm), telluride Cadmium mercury (HgCdTe, 2000-26000 nm) detectors are examples, but are not limited to these. Along with the types and materials of detectors mentioned above, many variations exist that are tuned to operate at specific wavelengths or wavelength ranges. Those skilled in the art will understand that any of these diverse detectors with any kind of wavelength response range may be used. Detector 112 may be coated with various thin films or nanotexture coatings as required for performance in any of the wavelength ranges mentioned above.

[0035] In various embodiments, the adjustment device 114 is configured to change the orientation of the detector 112 relative to the grating 108 or the diffracted light signal 110 in the X, Y, Z, θX, θY, or θZ directions, rotation, or degrees of freedom. The adjustment device 114 can also perform composite positioning of the detector 112 (for example, simultaneously changing the orientation in the X direction and the θX degree of freedom, or the orientation in the X direction and the Z direction). The center, pivot point, or pivot axis of the rotational degrees of freedom θX, θY, or θZ may partially overlap any of the surfaces of the detector 112. In one embodiment, the adjustment device 114 moves the detector 112 relative to the grating 108 to a first position P n From the second position P n-1 By translating in the direction of P (i.e., optically upstream), or by moving the detector 112 relative to the grating 108 to the first position P n From the second position P n+1 The orientation of the detector 112 may be changed by translating it away from the grating 108 in the +P direction (i.e., optically downstream). The adjustment device 114 can be commanded by the detector controller 122 to move the detector 112 by position increments such as 1 increment -ΔP toward the grating 108, or 1 increment +ΔP toward the grating 108. Since different wavelength components propagate in slightly different directions or along different optical axes, the Z-axis or Z-direction shown in Figures 5 and 6 does not align with all the propagation directions of the wavelength components of the diffracted light signal 110.

[0036] The adjustment device 114 is fixed to the structure of the housing 102, and the detector 112 is fixed to the adjustment device 114. In one embodiment, the adjustment device 114 is configured to change the position of the detector 112 with respect to the grating 108 or with respect to either the wavelength component of the diffracted light signal 110. When the adjustment device 114 is configured in this way, the position can be changed optically upstream (e.g., in the -P direction toward the grating 108) or optically downstream (e.g., in the +P direction toward the grating 108) (e.g., at a given position P toward the grating 108). n(i) The position of the detector 112 is changed by positioning the detector 112 along the optical axis of any wavelength component of the diffracted light signal 110. In the illustrated embodiment, the grating 108 is fixed to an adjustment device 140 configured to change the position or orientation of the grating 108 with respect to at least one of the source 104, the incident light signal 106, or the detector 112. In other embodiments, the grating 108 is fixed to the housing 102 and is therefore not configured to move or adjust.

[0037] During the operation of the spectrometer 100, the motion controller 124 is configured to send commands to the adjustment device 114 to change the position of the detector 112 in response to these commands, and / or to send commands to the adjustment device 140 to change the position of the grating 108 in response to these commands. For example, the adjustment device 114 may be instructed by the motion controller 124 to move the detector 112 by a position increment such as 1 increment -ΔP toward the grating 108, or 1 increment +ΔP toward the grating 108. The adjustment device 114 is configured to send data to the motion controller 124 representing the position (P) of the detector 112 relative to the grating 108, as required for the control of the spectrometer 100. The controller 120 may include any of various processors or computing modules configured to realize the functions of the spectrometer 100. In addition, the structure and function of the detector controller 122 and the motion controller 124 may be located and implemented anywhere within the controller 120, or they may be distributed across the adjustment device 114 and / or the adjustment device 140. Data from the detector 112, adjustment device 114, and adjustment device 140 can be communicated wirelessly to the controller 120, detector controller 122, or motion controller 124. In one embodiment, the spectrometer 100 may be integrated as a spectrometer module into various other instruments (e.g., spectrometers). In one embodiment, the adjustment device 114 or adjustment device 140 may be configured to adjust the position of the detector 112 or the grating 108 in response to temperature changes of the components of the spectrometer 100 (for example, to compensate for the movement of these components due to different thermal expansion coefficients of the components of the spectrometer 100).

[0038] The grating 108 diffracts the incident light signal 106 into multiple wavelength components, but Figure 5 shows the first diffracted optical axis A O1The photo shows only one wavelength component of the diffracted light signal 110 (at a first wavelength of interest λ1) that propagates along the grid normal at a first diffraction angle β1 and focuses on a first incident point on the detector 112 (for example, incident on a detector element (not shown)) when the grid is positioned at position P2 relative to the grid 108. The diffracted light signal 110 at λ1 is focused by the grid 108 into a first image having a first image width W1 on the surface of the detector 112. In this embodiment, the grid 108 is shown as a concave grid that focuses each wavelength component onto the detector 112, but instead, the grid 108 may be provided as a planar grid, and focusing elements (such as lenses) may be placed between the planar grids to focus each wavelength component onto the detector 112. In one embodiment, in order to increase the physical separation of wavelength components while minimizing the design footprint of the spectrometer 100, the diffracted light signal 110 may be routed to one or more mirrors (planar, concave, or convex) configured to reflect the diffracted light signal 110 from the grating 108 to the detector 112.

[0039] Figure 6 shows the same incident light signal 106 propagating from source 104 to grating 108, where grating 108 is the second diffraction optical axis A O2The incident light signal 106 is diffracted as a diffracted light signal 110 (i.e., a wavelength component having wavelength λ2) at a second wavelength of interest λ2, propagating along the grid normal at a second diffraction angle β2 and focusing on a second incident point on the detector 112 (e.g., a detector element (not shown)). For clarity, Figure 6 shows only the second wavelength component λ2 of the diffracted light signal 110. The second wavelength component λ2 is focused on the plane of the detector 112 into a second image having a second image width W2. In this embodiment, due to the effects of various optical aberrations (e.g., astigmatism, field curvature, and defocus), the optimal focal position of the second wavelength component λ2 (i.e., where the second image W2 is smallest) is closer to the grid 108 (position P1) than the optimal focal position of the first wavelength component λ1. If the detector 112 remains at position P2 shown in Figure 5, the second wavelength component λ2 will not be properly focused (i.e., the second image will be defocused and enlarged). To minimize or compensate for the defocusing of the second wavelength component λ2 (and to minimize the second image width W2), the adjustment device 114 incrementally changes the position of the detector 112 by ΔP to position P1 relative to the grating 108 where the image width of the wavelength component λ2 is minimized. The wavelength component λ2 of the diffracted light signal 110 is aligned with the optical axis A at a larger angle β2. O2 As it propagates along the optical axis A, the adjustment device 114 is directed toward the grating 108 in the -P direction (optically upstream) and the detector 112 is on the optical axis A O2 The position of the detector 112 is changed laterally with respect to the -P direction so as to receive the wavelength component λ2 propagating along the direction. Those skilled in the art will understand that the adjustment device 114 may move the detector 112 in various directions to optimize the performance of the spectrometer 100.

[0040] Figures 7A-7D show conceptual diagrams of how the adjustment device 114 adjusts the position of the detector 112 relative to the grating 108 and one or more wavelength components of the diffracted light signal 110 in various directions, along various axes, around various axes, or with different degrees of freedom. Figure 7A shows the detector 112 being rotated by the adjustment device 114 around a rotation point located at the edge of the detector 112. Figure 7B shows the detector 112 being rotated by the adjustment device 114 around a rotation point on the surface of the detector 112. Figures 7C and 7D show the detector 112 aligned with the optical axis A O The optical axis A of the wavelength component measured along the same path O The image shows the detector 112 in a first position and a second position, moved laterally relative to the spectrometer 100. Those skilled in the art will understand that the adjustment device 114 can position the detector 112 in various ways for the desired performance of the spectrometer 100.

[0041] To change the position of the detector 112 relative to the grid 108 (or to change the position of the grid 108 relative to the detector 112), the adjustment device 114 (or adjustment device 140) may be provided as a motion stage having a fixed part and a movable part. The grid 108 is fixed to the movable part, and the movable part is driven by an actuator. For the purposes of this disclosure, the phrase "the detector 112 is fixed to the adjustment device 114" means that the detector 112 is fixed to the movable part of the adjustment device 114 so that the position of the detector 112 can be changed by the adjustment device 114. Exemplary motion stages include, but are not limited to, linear motion stages, screw-driven linear motion stages, manual linear motion stages, vertical stages, vertical positioners, or any combination thereof. These motion stages can be driven by a variety of actuators, including, but not limited to, linear motors, servo motors, stepping motors, electrostrictive actuators, piezoelectric drivers, or any combination thereof. The adjustment device 114 may move the detector in an open-loop or closed-loop manner (for example, based on optical feedback, encoder feedback, or by counting the number of steps (in the case of a stepping motor)). Alternatively, the adjustment device 114 may be a manually driven linear motion stage or other manual linear actuator (by a screw or micrometer).

[0042] In one embodiment, the adjustment device 114 may be configured to change the angular direction of the detector 112 relative to the grid 108 (e.g., pitch, roll, or yaw, or a combination thereof). Similarly, the adjustment device 140 may be configured to change the angular direction of the grid 108 relative to the incident light signal 106 or the detector 112 (e.g., pitch, roll, or yaw, or a combination thereof). If the adjustment devices 114 and / or 140 are configured to change the angular direction of the detector 112 or the grid 108, respectively, the adjustment devices 114 and 140 may be provided as optical mounts, optical rotation mounts, goniometer stages, tip tilt platforms, rotation stages, gimbal optical mounts, hexagons, or any combination thereof. All adjustment devices may be driven by the actuators listed above with respect to linear adjustment devices. In other embodiments, the adjustment devices 114 and 140 may be provided as a plurality of motion stages or optical mounts connected to each other so as to be able to simultaneously adjust the position and angular direction of the detector 112 and / or the grid 108.

[0043] Figures 8 and 9 show illustrative image plane spot diagrams for uncompensated and defocused-compensated spectrometer configurations for three example wavelengths (or wavelength components) of interest (λ1 = 380 nm, λ2 = 730 nm, and λ3 = 1,080 nm). The spot diagrams show the size and shape of the image formed in a particular region and wavelength point (for example, each spot is the result of at least one ray at one of the wavelengths of interest reaching the detector). The region where all the spots are integrated becomes the image size W. In the illustrated embodiment of spectrometer 100, since the detector 112 uses a mask with slits oriented in the Y direction, the image size in the X direction (i.e., "image width") is used to quantify the spectral resolution of spectrometer 100. The illustrated 10 × 10 square grid divides a total width of 300 microns into 10 sections, with each square corresponding to 30 microns. For this reason, the term "image width" is used to indicate the size of the image in the X direction. Those skilled in the art will understand that in another embodiment, the image size in the Y direction may be used.

[0044] Figure 8 shows illustrative image widths for wavelength components λ1, λ2, and λ3 for the spectrometer 100 when the defocus compensation function is not used. For this purpose, the detector 112 is positioned at the first position P4 for all three image width measurements. The image width (W1) for λ1 is approximately 150 microns, the image width (W1) for λ2 is approximately 240 microns, and the image width (W1) for λ3 is approximately 270 microns. Those skilled in the art will understand that any wavelength of interest can be selected for analysis using the spectrometer 100.

[0045] Figure 9 shows illustrative image widths for wavelength components λ1, λ2, and λ3 for the spectrometer 100 described in Figure 8, when the defocus compensation function is used. For the image width measurement at λ1, the detector 112 is moved to a position P3 closer to the grating 108 (e.g., by the adjustment device 114). The image width (W2) obtained for λ1 is approximately 50 microns. For the image width measurement at λ2, the detector 112 is moved to position P2 relative to the grating 108. The image width (W2) obtained for λ2 is approximately 85 microns. For the image width measurement at λ3, the detector 112 is moved to position P1 relative to the grating 108. The image width (W2) obtained for λ3 is approximately 80 microns. Those skilled in the art will understand that any wavelength of interest can be selected for analysis by the spectrometer 100.

[0046] Figure 10 shows a plot of image width (in microns) against wavelength (in microns) for an uncompensated spectrometer design (dashed line) and a defocused spectrometer design (solid line), demonstrating a threefold improvement in image width. The amount of improvement in image width varies for several reasons, including the fact that optical aberrations and defocusing effects can be wavelength-dependent. Those skilled in the art will understand that the defocusing compensation feature of spectrometer 100 allows for improvement of image width by any amount, and that the amount of improvement may not change with respect to wavelength or as a function of wavelength.

[0047] Figure 11 shows steps of an exemplary embodiment of a method for measuring at least one characteristic of a diffracted light signal 110 using the spectrometer 100 described above. This embodiment includes a control sequence 200 that operates to find the minimum image width of the diffracted light signal 110 and the location of the minimum image width at several wavelengths of interest (also referred to herein as “selected wavelengths” or “wavelength components”). As described above, due to the effects of various optical aberrations, the optimal focal positions for different wavelength components of the diffracted light signal 110 are located at different positions along the propagation direction of the diffracted light signal 110 (e.g., optically upstream or downstream). The control sequence 200 is an iterative control loop configured to measure the image width at various incremental positions of the detector 112, monitor the image width data to detect changes in image width, and converge to the minimum image width by reversing the movement of the detector 112 when the image width increases.

[0048] The control sequence 200 begins with the first measurement step 202, and the first position P relative to the photodetector 112 n Using the photodetector 112 located at [location], the first image width W of the first wavelength component having wavelength λ1 of the diffracted light signal 110 is measured. n The next step is the first motion step 204, in which the adjustment device 114 is used to measure the second position P relative to the grid 108. n-1 The photodetector 112 is incremented by 1 -ΔP n Translate it.

[0049] The next step is the second measurement step 206, which involves measuring the second position P relative to the grid 108. n-1 Using the detector 112 located at [location], the second image width W of the first wavelength component of the diffracted light signal 110 is measured. n+1 The next step is to perform calculation step 208, which is done within the controller 120, and the second image width (W n+1 ) from the first image width (W n Subtracting ) results in the first change in image width (ΔW n ) calculate.

[0050] Calculation step 208 is followed by logic step 210, which is the first change in image width (ΔWn Determine whether the first change in image width (ΔW) is negative (image width is decreasing) or positive (image width is increasing). n If the value is negative (the image width is smaller), the next step is the second motion step 212, which is the third position P relative to the grid 108. n-2 Detector 112 is incremented by 1 -ΔP n Translate. First change in image width (ΔW n If the value is positive (the image is getting larger), the next step is the third motion step 214, which is the fourth position P relative to the grid 108. n-3 The detector 112 is moved in an increment of 1 + ΔP (away from the grid 108). n The data is translated by 2. In the third motion step 214, the increment ΔP is halved because the control sequence begins to converge to the minimum image width.

[0051] After the third motion step 214, the measurement step 206, calculation step 208, logic step 210, and motion step 212 (or motion step 214) are repeated until the control sequence 200 converges to a minimum value for the image width W. The minimum value for the image width W is then transmitted to the controller 120. Those skilled in the art will understand that the calculation step and / or logic step may be performed within the controllers 122, 124, or on the detector 112 or adjustment device 114.

[0052] The control sequence 200 described above is one embodiment in which the detector 112 moves linearly (both toward the grid 108, toward the grid 108, or transversely to the grid 108). In other embodiments, the control sequence 200 can be executed by changing the angular direction of the detector 112 (for example, the change in orientation shown in Figures 7A and 7B). In other embodiments, the control sequence 200 described above may be executed by changing the position or angular direction of the grid 108 relative to the detector 112.

[0053] Figure 12 shows steps of an embodiment of a control sequence 300 used to find the minimum image width and the location of the minimum image width of a diffracted light signal 110 at several wavelengths of interest (also referred to herein as “selected wavelengths” or “wavelength components”). This embodiment of the control sequence 300 operates to translate (i.e., scan) the detector 112 (either toward the grid 108, toward the grid 108, or transversely to the grid 108) while acquiring or recording data representing the image width at each of several locations relative to the grid 108 and transmitting this data to the controller 120 for processing and analysis. In one embodiment, after scanning, the controller 120 selects the narrowest image width data, moves the detector 112 to that location, and records the image width data. This control sequence 300 is then repeated for all desired wavelengths or wavelength components.

[0054] The control sequence 300 begins with the first measurement step 302, and the first position P relative to the grid 108. n Using the photodetector 112 located at [location], the first image width W of the diffracted light signal 110 at the wavelength component λ1 (e.g., 450.00 nanometers) is measured. n The first image width W is measured. Subsequently, the data acquisition step 304 is performed, and the detector 112 measures the first image width W. n Measurement data representing the first position P is transmitted to the controller 120, and the adjustment device 114 adjusts the first position P n Measurement data representing this is transmitted to the motion controller 124. The next step is the first motion step 306, in which the adjustment device 114 moves to the second position P relative to the grid 108. n-1 Detector 112 is incremented by 1 -ΔP n Move. Absolute value of the increment |ΔP n | can be selected in a desired or advantageous manner.

[0055] The next step is the second measurement step 308, which involves measuring the second position P relative to the photodetector 112. n-1 Using the photodetector 112 located at the position, the second image width W of the wavelength component λ1 is measured. n+1The second image width W is measured. Subsequently, the data acquisition step 310 is performed, and the detector 112 measures the second image width W. n+1 Measurement data representing the second position P is transmitted to the controller 120, and the adjustment device 114 adjusts the second position P n-1 Measurement data representing this is transmitted to the motion controller 124. The next step is the second motion step 312, in which the adjustment device 114 moves to the third position P relative to the grid 108. n-2 Detector 112 is incremented by 1 -ΔP n Move.

[0056] The next step is the third measurement step 314, which involves position P relative to the photodetector 112. n-2 Using the photodetector 112 located at the specified position, the third image width W of the wavelength component λ1 is measured. n+2 The third data acquisition step 316 is then performed, and the detector 112 measures the third image width W. n+2 Measurement data representing the third position P is transmitted to the controller 120, and the adjustment device 114 adjusts the position P n-2 The measurement data representing this is sent to the motion controller 124.

[0057] The process outlined above describes three measurement steps and two motion steps, but this process may involve numerous measurement and motion steps to collect enough data to reliably find the position of the minimum image width. To do this, iteration step 318 is performed, repeating the measurement and motion steps to collect additional data.

[0058] When each data acquisition step 304, 310, and 316 is performed, sequential position data P is obtained for future processing. n The associated sequential image width data W nAn aggregation step 320 is performed within the instrument controller 120 to store the data. For example, image width data is generated for each movement increment made by the adjustment device 114 to position the detector 112 at a position relative to the grating 108 where the image width of wavelength component λ1 is minimized. After all the data has been aggregated, the controller 120 can process the data to find the position of the detector 112 where the image width is minimized, and then, in a third motion step 322, instructs the adjustment device 114 to move the detector 112 to that position and perform a final measurement step 324 (e.g., optical power or other performance parameters selected by the operator or controller).

[0059] Steps 302 to 324 above are for measuring the selected wavelength λ1 or wavelength component λ1 (e.g., 450.00 nanometers) of the diffracted light signal 110. Subsequently, the control sequence 300 can be repeated as step 326 for other wavelength components λ2 (e.g., 450.15 nanometers), etc. (e.g., as commanded by a system operator operating the controller 120 or spectrometer 100) for a sufficient number of wavelength components to characterize the incident light signal 106 with the desired accuracy. The final result may be a display of light intensity as a function of wavelength (i.e., a spectrometer or spectrometer plot of light power in the spectrum of interest).

[0060] The embodiments described above describe a spectrometer in which the position of its detector can be changed to obtain optical results over a wavelength range. Those skilled in the art will understand that the configuration of the spectrometer described above may be extended to obtain various other performance advantages without departing from the spirit of the above disclosure.

[0061] The foregoing describes embodiments and examples of the present invention and should not be construed as limiting thereto. While several specific embodiments and examples have been described with reference to the drawings, those skilled in the art will readily understand that many improvements are possible to other embodiments in addition to those disclosed, without departing largely from the novel teachings and advantages of the present invention. Accordingly, all such improvements to the subject matter described herein are intended to fall within the scope of the present invention as defined in the claims. For example, those skilled in the art will understand that the subject matter of any sentence or paragraph, example or embodiment can be combined with the subject matter of any part or all of other sentences or paragraphs, examples or embodiments, except in cases where such combinations are mutually exclusive. Accordingly, the scope of the present invention should be determined by the following claims and equivalents of the claims to be included therein.

Claims

1. At least one housing and At least one first adjustment device fixed to the at least one housing, At least one detector fixed to at least one first adjustment device, Incident optical axis (A I A dispersive optical element configured to receive an incident light signal propagating along a certain line and to diffract at least a portion of the incident light signal as a diffracted light signal propagating toward the at least one detector, and The detector comprises, and the at least one detector is configured to measure at least one characteristic of the diffracted light signal. The at least one first adjustment device is configured to change the position of the at least one detector with respect to the at least one dispersive optical element. optical equipment.

2. The optical instrument according to claim 1, wherein the at least one first adjustment device is a linear motion stage having a fixed portion fixed to the housing and a movable portion fixed to the at least one detector, and the movable portion of the at least one first adjustment device is driven by at least one actuator selected from the group consisting of piezoelectric actuators, servo motor actuators, stepping motor actuators, and linear motor actuators.

3. The optical instrument according to claim 1, wherein the at least one first adjustment device is configured to change the angular direction of the at least one detector with respect to the at least one dispersive optical element.

4. The optical instrument according to claim 3, wherein the at least one first adjustment device is selected from the group consisting of an optical mount, an tip tilting platform, a gimbal platform, a goniometer, an angle stage, and a bending mount.

5. The optical device according to claim 4, wherein the at least one first adjustment device is driven by at least one actuator selected from the group consisting of piezoelectric actuators, servo motor actuators, stepping motor actuators, worm screw drives, and linear motor actuators.

6. The optical instrument according to claim 1, wherein the at least one dispersive optical element is fixed to at least one second adjustment device configured to change the position of the at least one dispersive optical element with respect to at least one of the at least one detector or the incident light signal.

7. The optical instrument according to claim 1, wherein the at least one dispersive optical element is fixed to at least one second adjustment device configured to change the angular direction of the at least one dispersive optical element with respect to at least one of the at least one detector or the incident light signal.

8. The optical device according to claim 1, wherein the at least one dispersed optical element is a holographic grating.

9. The optical device according to claim 8, wherein the holographic grating has a groove profile selected from the group consisting of sinusoidal, trapezoidal, bumpy, cycloidal, inverse cycloidal, serrated, and trapezoidal serrated profiles.

10. The optical device according to claim 1, wherein the at least one dispersive optical element is a diffraction grating selected from the group consisting of an echelle grating, a replica grating, a dual blaze grating, and a mosaic grating.

11. The optical instrument according to claim 1, wherein the at least one characteristic of the diffracted light signal is the image width (W) of at least one wavelength component of the diffracted light signal.

12. The optical instrument according to claim 1, wherein the at least one characteristic of the diffracted light signal is wavelength.

13. The optical device according to claim 1, wherein the at least one characteristic of the diffracted light signal is the optical power of at least one wavelength component of the diffracted light signal.

14. A method for analyzing an incident light signal, A dispersive optical element is provided that operates to reflect the incident light signal as a diffracted light signal, The system includes at least one detector configured to measure one or more characteristics of the diffracted light signal, A first adjustment device is provided that operates to change the position of the at least one detector with respect to the at least one dispersive optical element, The system includes at least one controller configured to receive measurement data representing one or more characteristics of the diffracted light signal from the at least one detector, and to instruct the at least one first adjustment device to position the at least one detector relative to the at least one dispersive optical element, Using the at least one detector, at least one of the one or more characteristics of the diffracted light signal is measured. The position of the detector relative to the at least one dispersive optical element is adjusted using the at least one first adjustment device until the optimal value of at least one of the one or more characteristics of the diffracted light signal is reached. A method that includes doing so.

15. One of the one or more characteristics of the diffracted light signal is at least one first wavelength component (λ 1 The method according to claim 14, wherein the light power of the method is the light power of the method.

16. One of the one or more characteristics of the diffracted light signal is at least one second wavelength component (λ 2 The method according to claim 14, wherein the light power of the method is the light power of the method.

17. One of the one or more characteristics of the diffracted light signal is at least one third wavelength component (λ 3 The method according to claim 14, wherein the light power of the method is the light power of the method.

18. One of the one or more characteristics of the diffracted light signal is at least one fourth wavelength component (λ 4 The method according to claim 14, wherein the light power of the method is the light power of the method.

19. One of the one or more characteristics of the diffracted light signal is at least one fifth wavelength component (λ 5 The method according to claim 14, wherein the light power of the method is the light power of the method.

20. A method for analyzing an incident light signal, A dispersive optical element is provided that operates to reflect the incident light signal as a diffracted light signal, At least one detector is provided, configured to measure one or more characteristics of the diffracted light signal, wherein one of the one or more characteristics of the diffracted light signal is one or more wavelength components (λ n Image width (W) n ) and A first adjustment device is provided that operates to change the position of the at least one detector with respect to the at least one dispersive optical element, Receive measurement data representing the image width (W 1 ), of the first wavelength component (λ n ) from the at least one detector, and provide at least one controller configured to command the at least one first adjustment device to adjust the position of the at least one detector with respect to the at least one dispersive optical element. A control sequence, In the first measurement step, the first position (P) of the at least one dispersive optical element n Using the at least one detector located at ), the first wavelength component (λ 1 ) the first image width (W 1 ) measure, In the first motion step, the second position (P) of the at least one dispersion optical element is adjusted using the at least one first adjustment device. n-1 Position the at least one detector in the above location. In the second measurement step, the second position (P) of the at least one dispersive optical element n-1 Using the at least one detector located at ), the first wavelength component (λ 1 The second image width (W 2 ) measure, In the comparison step, in at least one controller, the first image width (W 1 ) the second image width (W 2 The first change in image width (ΔW) compared to ) 1 ) decided, The first change in the image width (ΔW 1 If ) is positive, in the third motion step, the at least one detector is moved closer to the at least one dispersive optical element by an increment of 1 (-ΔP) using the at least one first adjustment device. 1 Position only ) The first change in the image width (ΔW 1 If ) is negative, in the second motion step, the at least one detector is moved closer to the at least one dispersive optical element by the same increment (-ΔP) using the at least one first adjustment device. 1 Position only ) Execute the control sequence, Minimum image width (W min The control sequence is repeated until the condition is reached. The minimum image width (W min Output data representing ) to at least one display. A method that includes doing so.

21. The second wavelength component (λ) of the diffracted light signal 2 The method according to claim 20, further comprising repeating the control sequence for ).

22. The third wavelength component (λ) of the diffracted light signal 3 The method according to claim 20, further comprising repeating the control sequence for ).

23. The fourth wavelength component (λ) of the diffracted light signal 4 The method according to claim 20, further comprising repeating the control sequence for ).

24. The fifth wavelength component (λ) of the diffracted light signal 5 The method according to claim 20, further comprising repeating the control sequence for ).

25. The sixth wavelength component (λ) of the diffracted light signal 6 The method according to claim 20, further comprising repeating the control sequence for ).

26. A method for analyzing an incident light signal, The system includes at least one dispersive optical element that operates to diffract the incident light signal as a diffracted light signal, At least one detector is provided, configured to measure one or more characteristics of the diffracted light signal, wherein one of the one or more characteristics of the diffracted light signal is one or more wavelength components (λ n Image width (W) n ) and A first adjustment device is provided that operates to change the position of the at least one detector with respect to the at least one dispersive optical element, The system includes at least one controller that receives measurement data representing at least one characteristic of the diffracted light signal from the at least one detector, The system includes at least one motion controller configured to instruct the at least one first adjustment device to adjust the position of the at least one detector relative to the at least one dispersive optical element, A control sequence, In the first measurement step, the first position (P) of the at least one dispersive optical element n Using the at least one detector located at ), the first wavelength component (λ 1 ) the first image width (W 1 ) measure, In the first data acquisition step, the second image width (W n+1 Measurement data representing the first position (P) relative to the at least one detector is transmitted from the at least one detector controller to the at least one detector, and the first position (P) relative to the at least one dispersive optical element is transmitted. n ) Detector data representing this is transmitted to at least one motion controller, In the first motion step, using the at least one first adjustment device, The second position (P) relative to the at least one dispersion optical element n-1 ) with at least one detector in the first increment (-ΔP n Position only ) In the second measurement step, the second position (P) of the at least one dispersive optical element n-1 Using the at least one detector located at ), the first wavelength component (λ 1 The second image width (W n+1 ) measure, In the second data acquisition step, the second image width (W n+1 Measurement data representing the second position (P) relative to the at least one detector is transmitted from the at least one detector controller to the at least one detector, and the second position (P) relative to the at least one dispersive optical element is transmitted. n-1 The detector position data representing ) is transmitted to at least one motion controller, In the second motion step, the at least one first adjustment device is used to move the at least one detector to a third position (P) relative to the at least one dispersive optical element. n-2 ) with a second increment (-ΔP n Position only ) In the third measurement step, the third position (P) relative to the at least one dispersive optical element n-2 Using the at least one detector located at ), the first wavelength component (λ 1 The third image width (W n+2 ) measure, In the third data acquisition step, the third image width (W n+2 Measurement data representing the position (P) of the at least one detector is transmitted from the at least one detector controller to the at least one detector controller, and the third position (P) of the at least one detector relative to the at least one dispersive optical element is transmitted from the at least one detector to the at least one detector controller. n-2 The detector position data representing ) is transmitted to at least one motion controller, In the aggregation step, at least one device controller aggregates the image width data and detector position data from the successive data acquisition steps, and determines the smallest image width (W) among the aggregated image width data. min Select ) and The at least one detector has the smallest image width (W min Distance associated with (R min Position it at ) Execute the control sequence A method that includes doing so.

27. The second wavelength component (λ) of the diffracted light signal 2 The method according to claim 26, further comprising repeating the control sequence for )

28. The third wavelength component (λ) of the diffracted light signal 3 The method according to claim 26, further comprising repeating the control sequence for )

29. The fourth wavelength component (λ) of the diffracted light signal 4 The method according to claim 26, further comprising repeating the control sequence for )

30. The fifth wavelength component (λ) of the diffracted light signal 5 The method according to claim 26, further comprising repeating the control sequence for )

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