Nanoparticle measurement assembly and nanoparticle measurement system

Abstract

A nanoparticle measurement device is disclosed. A nanoparticle measurement device according to one embodiment of the present invention may include: a flow cell forming a cellular hollow portion in which a liquid sample flows; a cell mount coupled to and supporting the flow cell; a piezoelectric sensor facing the flow cell and connected to the flow cell; and a mount cover located opposite the flow cell with the piezoelectric sensor in between and fixed to the cell mount.

Description

Technical Field

[0001] The present invention relates to a nanoparticle measurement assembly and a nanoparticle measurement system. In particular, the present invention relates to a nanoparticle measurement assembly and a nanoparticle measurement system for measuring shock waves generated from nanoparticles.

Background Art

[0002] Various organic and inorganic chemical substances used in the manufacturing processes of products that require high precision, such as displays and semiconductors, demand chemicals of higher purity than at present in order to prevent a decrease in manufacturing yield. Advanced analytical techniques have been developed and newly applied to confirm the quality of high-purity chemicals. Among them, the importance of particle analysis has been increasing. Even fine particles on the order of 10 nm can affect the yield reduction and high integration of semiconductor manufacturing processes. Therefore, the development of a stable analytical method for quality control is required, and the scalability of the technology must be ensured so that the causes of defects that may occur during the process can be analyzed.

[0003] Generally, a substance that is uniformly dispersed in a liquid in the form of molecules or ions is called a solution. A state in which fine particles having a diameter of about 1 nm to 1000 nm, which are larger than ordinary molecules and ions, are dispersed without aggregation or precipitation in this solution is called a colloidal state, and a substance in this colloidal state is called a colloid.

[0004] The research on fine colloids in a solution has been concentrated on obtaining information on the physicochemical properties of the analyte and improving the detection output of a separation analyzer. Until recently, there has been a size limit of 100 nm for the analysis of colloidal particles, and technological development has been required in that a high-concentration sample is needed to accurately analyze colloidal particles of 100 nm or less.

[0005] Light scattering analysis, which uses the intensity of light scattering to determine particle size, is commonly used as a method for measuring colloidal nanoparticles. However, when measuring fine nanoparticles smaller than 100 nm, even if scattered light is generated, the detection probability drops sharply at low concentrations, making it difficult to obtain reliable results. This imposes a constraint that the particle concentration must be at least a few ppm (parts per million). Larger particles result in greater scattering intensity, while smaller particles have a smaller area for light scattering, resulting in weaker scattered light intensity and making measurement difficult. Therefore, a relatively large number of particles must contribute to scattering, and the sensitivity drops significantly at concentrations below ppm.

[0006] On the other hand, irradiating a liquid sample containing nanoparticles with a laser beam to induce laser-induced breakdown can lead to a shock wave. When detecting the shock wave with a piezoelectric sensor, if the flow cell containing the liquid sample is not in close contact with the piezoelectric sensor, noise other than the shock wave may be detected by the piezoelectric sensor. Therefore, it is necessary to maintain contact between the piezoelectric sensor and the flow cell. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] KR10-2022-0099954 [Overview of the Initiative] [Problems that the invention aims to solve]

[0008] The present invention aims to solve the aforementioned problems and other problems.

[0009] Another objective of the present invention is to provide a nanoparticle measurement assembly and nanoparticle measurement system that effectively measure shock waves.

[0010] Another objective of the present invention is to provide a nanoparticle measurement assembly and nanoparticle measurement system that effectively fixes a flow cell and a piezoelectric sensor. [Means for solving the problem]

[0011] To achieve the aforementioned or other objectives, according to one aspect of the present invention, a nanoparticle measuring device can be provided, comprising: a flow cell forming a cellular hollow portion in which a liquid sample flows; a cell mount coupled to and supporting the flow cell; a piezoelectric sensor facing the flow cell and connected to the flow cell; and a mount cover located opposite the flow cell with the piezoelectric sensor in between, and fixed to the cell mount.

[0012] The mount cover may include a mount cover plate fixed to the cell mount and a mount cover opening formed in the mount cover plate.

[0013] The piezoelectric sensor may include a piezoelectric sensor body connected to the flow cell and facing the flow cell for measuring the vibration of the flow cell, and a piezoelectric sensor cable extending from the piezoelectric sensor body and passing through the opening of the mount cover.

[0014] The mount cover may include a mount cover plate that forms an inner surface of the mount cover plate facing the flow cell and an outer surface of the mount cover plate formed on the opposite side of the inner surface of the mount cover plate.

[0015] The mounting cover plate may be elastic.

[0016] The cell mount may include a cell mount frame located behind the flow cell, a plurality of cell mount legs that form a shape extending forward from the cell mount frame, and a cell mount fixing portion connected to the cell mount legs and located in front of the flow cell.

[0017] The cell mount may further include a cell mount reinforcing portion located opposite the mount cover, with the flow cell in between, and connected to the plurality of cell mount legs.

[0018] The cell mount frame can form a cell mount frame opening, which is an opening facing the rear surface of the flow cell.

[0019] The flow cell may include a front cell window forming a front face and facing the cell mount fixing portion, a rear cell window forming a rear face and facing the cell mount frame, a first cell window facing the piezoelectric sensor, and a second cell window facing the cell mount reinforcement portion.

[0020] The first cell window, the front cell window, the second cell window, and the rear cell window can be connected in sequence.

[0021] The flow cell further includes a cell bottom that forms a lower surface and is connected to the hollow portion of the cell, and a cell top that forms an upper surface and is connected to the hollow portion of the cell, and the plurality of cell mount legs may include a lower leg unit located below the cell bottom and supporting the flow cell, and an upper leg unit that supports the upper end of the flow cell.

[0022] The upper leg unit can include a first upper leg facing the first cell window and positioned above the piezoelectric sensor, and a second upper leg facing the second cell window and positioned on the opposite side of the first upper leg across the flow cell.

[0023] The lower leg unit can include a first lower leg positioned below the first upper leg and contacting and supporting the cell bottom, and a second lower leg positioned below the second upper leg and contacting and supporting the cell bottom.

[0024] The cell mount reinforcement may extend upward from the second lower leg and connect to the second upper leg.

[0025] The cell mount reinforcement can include a front cell mount reinforcement and a rear cell mount reinforcement spaced apart in the front-rear direction.

[0026] The nanoparticle measurement device can further include an inlet portion connected to the cell bottom and supplying the liquid sample to the cell hollow portion, and an outlet portion connected to the cell top and discharging the liquid sample.

[0027] The nanoparticle measurement device can further include an adhesion member positioned between the first cell window and the piezoelectric sensor, with one surface contacting the first cell window and the other surface contacting the piezoelectric sensor.

[0028] The nanoparticle measurement device can further include a fixing member covering the piezoelectric sensor, fixing the piezoelectric sensor to the flow cell, and contacting the mount cover.

[0029] When the fixing of the mount cover plate to the cell mount is released, the inner surface of the mount cover plate may become convex and the outer surface of the mount cover plate may become concave.

[0030] The distance between the first lower leg and the second lower leg may be smaller than the distance between the first upper leg and the second upper leg. [Effects of the Invention]

[0031] The effects of the nanoparticle measurement assembly and nanoparticle measurement system according to the present invention are as follows:

[0032] According to at least one embodiment of the present invention, a nanoparticle measurement assembly and a nanoparticle measurement system for effectively measuring shock waves can be provided.

[0033] According to at least one embodiment of the present invention, a nanoparticle measurement assembly and a nanoparticle measurement system can be provided that effectively fix a flow cell and a piezoelectric sensor.

[0034] Further applications of the present invention will become apparent from the following detailed description. However, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description, it should be understood that the detailed description and specific examples, while illustrating preferred embodiments of the invention, are given only as examples. [Brief explanation of the drawing]

[0035] [Figure 1] Figure 1 is a schematic diagram showing a nanoparticle measurement device and a system including the same according to one embodiment of the present invention. [Figure 2] Figure 2 is an exploded perspective view of a nanoparticle measurement device according to one embodiment of the present invention. [Figure 3] Figure 3 shows a flow cell according to one embodiment of the present invention. [Figure 4] Figure 4 is a cross-sectional view along the line "A1-A2" of the flow cell shown in Figure 3. [Figure 5] Figure 5 is a cross-sectional view of the flow cell shown in Figure 3 along the line "B1-B2". [Figure 6]Figure 6 shows a mounting table according to one embodiment of the present invention. [Figure 7] Figure 7 shows a support mount according to one embodiment of the present invention. [Figure 8] Figure 8 shows the cell mount frame of the cell mount according to the present invention. [Figure 9] Figure 9 shows a cell mount including the cell mount frame and cell mount legs. [Figure 10] Figure 10 is a plan view showing the upper leg unit and the upper cell mount frame bar. [Figure 11] Figure 11 is a plan view showing the lower leg unit and the lower cell mount frame bar. [Figure 12] Figure 12 shows a cell mount including the cell mount reinforcement section. [Figure 13] Figure 13 shows a piezoelectric sensor according to one embodiment of the present invention. [Figure 14] Figure 14 shows a mounting cover according to one embodiment of the present invention. [Figure 15] Figure 15 is a cross-sectional view of the mount cover shown in Figure 14 along the line "C1-C2". [Figure 16] Figure 16 shows a cross-section of a nanoparticle measuring device, including the attachment member, with the mount cover bonded to the cell mount. [Figure 17] Figure 17 shows a cross-section of a nanoparticle measurement device, including the fixation member, with the mount cover bonded to the cell mount. [Modes for carrying out the invention]

[0036] The embodiments disclosed herein will be described in detail below with reference to the accompanying drawings, but regardless of the drawing number, identical or similar components will be denoted by the same reference numeral, and redundant descriptions will be omitted. The suffixes "module" and "part" used in the following description are added or used interchangeably to facilitate the preparation of the specification and do not have any distinguishing meaning or role in themselves. Furthermore, when describing the embodiments disclosed herein, if it is determined that a specific description of the relevant prior art would obscure the gist of the embodiments disclosed herein, such detailed description will be omitted. The accompanying drawings are merely for the purpose of facilitating the understanding of the embodiments disclosed herein, and the technical ideas disclosed herein are not limited by the accompanying drawings. Any modifications, equivalents, or substitutes included in the idea and scope of the present invention should be understood as being included in the present invention.

[0037] Terms including ordinal numbers, such as "1st," "2nd," etc., are used to describe various components, but do not limit those components. The above terms are used solely for the purpose of distinguishing one component from others.

[0038] When one component is referred to as being "connected" or "linked" to another component, it should be understood that it may be directly connected to or linked to the other component, and that there may be other components in between. Conversely, when one component is referred to as being "directly connected" or "linked" to another component, it should be understood that there are no other components in between.

[0039] Unless otherwise specified, singular expressions can include multiple forms.

[0040] In this invention, "includes" or "has," etc., indicates the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and does not preclude the presence or possibility of adding one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0041] In the drawings, the size of the components may be exaggerated or reduced for the sake of explanation. For example, the size and thickness of each component shown in the drawings are arbitrarily shown for the sake of explanation, and the present invention is not necessarily limited to those shown.

[0042] Where a particular embodiment can be embodied in a different way, a specific sequence of steps may be performed differently from the order described. For example, two steps described consecutively may be performed substantially simultaneously, or they may proceed in the reverse order of the description.

[0043] In the following embodiments, the term "connected membranes, regions, components, etc." includes not only cases where membranes, regions, and components are directly connected, but also cases where they are indirectly connected through the interposition of other membranes, regions, and components. For example, in this specification, the term "electrically connected membranes, regions, components, etc." includes not only cases where membranes, regions, and components are directly connected, but also cases where they are indirectly connected through the interposition of other membranes, regions, and components.

[0044] Figure 1 is a schematic diagram showing a nanoparticle measurement device and a system including the same according to one embodiment of the present invention.

[0045] Referring to Figure 1, a nanoparticle measurement system 1 according to one embodiment of the present invention may include a nanoparticle measurement device 10. The nanoparticle measurement device 10 can form a space in which a sample containing nanoparticles flows. The sample containing nanoparticles may be in a liquid state overall.

[0046] For example, the sample may flow into the nanoparticle measuring device 10 from one end and be discharged to the outside of the nanoparticle measuring device 10 from the other end.

[0047] The nanoparticle measurement system 1 may include an optical assembly 20. The optical assembly 20 may include a laser device 21 that generates a laser beam. The laser device 21 can, for example, form a pulsed laser beam.

[0048] A laser beam can be incident on the nanoparticle measuring device 10 while the sample is located inside the device. For example, at least a portion of the pulsed laser beam incident on the nanoparticle measuring device 10 may be transmitted to the sample located inside the device.

[0049] When a sample is supplied with energy from a pulsed laser beam, the sample's state can be converted to a plasma state. A sample in a plasma state can produce shock waves and / or flashes.

[0050] The shock waves and / or flashes generated by the nanoparticle measuring device 10 may vary depending on the properties of the nanoparticles contained in the sample. The properties of the nanoparticles contained in the sample may include at least one of the number and size of the nanoparticles contained in the sample.

[0051] The optical assembly 20 may include a focusing lens 22. At least a portion of the laser beam generated by the laser device 21 can be incident toward the focusing lens 22. At least a portion of the laser beam incident upon the focusing lens 22 can be focused and incident toward the nanoparticle measuring device 10.

[0052] The focus lens 22 can be positioned between the laser device 21 and the nanoparticle measuring device 10. The distance between the focus lens 22 and the nanoparticle measuring device 10 can correspond to the focal length of the focus lens 22. For example, the focal point of the focus lens 22 can be located at the sample flowing in the nanoparticle measuring device 10.

[0053] The optical assembly 20 may include a beam splitter 23. The beam splitter 23 can be positioned between the nanoparticle measuring device 10 and the laser device 21. For example, the beam splitter 23 can be placed between the laser device 21 and the focus lens 22.

[0054] The beam splitter 23 can split the incident light into two. For example, the light incident on the beam splitter 23 can be split into light that passes through the beam splitter 23 and light that is reflected by the beam splitter 23. The oscillating laser beam LB may also be the laser beam incident on the beam splitter 23.

[0055] The optical assembly 20 may include an attenuator 25. The attenuator 25 may be placed between the beam splitter 23 and the laser device 21. The laser beam generated by the laser device 21 can be incident on the attenuator 25. At least a portion of the laser beam incident on the attenuator 25 can pass through the attenuator 25 to form an oscillating laser beam LB.

[0056] The output (power) of the laser beam incident on the attenuator 25 may be greater than the output of the oscillating laser beam LB. In other words, the attenuator 25 can reduce the output of the incident laser beam.

[0057] For example, a portion of the oscillating laser beam LB can pass through the beam splitter 23 and head towards the nanoparticle measurement device 10. The incident laser beam IB may be a portion of the oscillating laser beam LB that passes through the beam splitter 23 and heads towards the nanoparticle measurement device 10. The incident laser beam IB can be focused by entering the focus lens 22 and propagating towards the nanoparticle measurement device 10.

[0058] Another portion of the oscillating laser beam LB can be reflected by the beam splitter 23. For example, the reflected laser beam RB may be the laser beam that is reflected by the beam splitter 23 as another portion of the oscillating laser beam LB.

[0059] The propagation path of the incident laser beam IB may be the same as that of the oscillating laser beam LB. The propagation path of the reflected laser beam RB may be different from that of the oscillating laser beam LB. For example, the propagation path of the reflected laser beam RB may be perpendicular to that of the oscillating laser beam LB.

[0060] The optical assembly 20 may include an energy detector 24. The energy detector 24 may be positioned along the path of the reflected laser beam RB. The energy detector 24 may measure the energy and / or power of the reflected laser beam RB.

[0061] The energy detector 24 can generate a first signal S1. The first signal S1 may contain information about the power of the reflected laser beam RB measured by the energy detector 24.

[0062] The power of the reflected laser beam RB can correspond to the power of the incident laser beam IB. For example, the power of the reflected laser beam RB and the power of the incident laser beam IB can have a positive correlation. Therefore, by measuring the power of the reflected laser beam RB, the power of the incident laser beam IB can be estimated.

[0063] The optical assembly 20 may include a beam stopper 26. The beam stopper 26 may be positioned on the propagation path of the incident laser beam IB. At least a portion of the incident laser beam IB may pass through the nanoparticle measuring device 10 and be incident on the beam stopper 26. The beam stopper 26 can suppress the propagation of the incident laser beam.

[0064] The nanoparticle measurement system 1 may include signal processing assemblies 31, 34, and 35 that measure shock waves and / or flashes generated by the nanoparticle measurement device 10.

[0065] For example, the signal processing assemblies 31, 34, and 35 may include a camera 31 for measuring flashes of light. The camera 31 may include, for example, a CCD camera.

[0066] A microscope 32 can be placed between the camera 31 and the nanoparticle measuring device 10. A filter 33 can be placed between the microscope 32 and the nanoparticle measuring device 10. The filter 33 can allow a specific wavelength band of the flash generated by the nanoparticle measuring device 10 to pass through.

[0067] For example, the signal processing assemblies 31, 34, and 35 may include a piezoelectric sensor 34 for measuring shock waves. The piezoelectric sensor 34 can be in contact with the nanoparticle measuring device 10. The piezoelectric sensor 34 can convert vibrations generated in the nanoparticle measuring device 10 into electrical energy or electric power.

[0068] The electrical energy or power generated by the piezoelectric sensor 34 can be converted into an electrical signal. For example, the piezoelectric sensor 34 can generate a second signal S2. The second signal S2 may contain information about vibrations occurring in the nanoparticle measuring device 10.

[0069] The signal processing assemblies 31, 34, and 35 may include a control unit 35. The control unit 35 can generate signals to control the laser device 21 and / or the camera 31. The control unit 35 can receive and process signals. The signals generated or received by the control unit 35 may be electrical signals.

[0070] Camera 31 can generate a third signal S3. The third signal S3 may contain information about the image acquired by camera 31. For example, the third signal S3 may contain information about the flash generated by the nanoparticle measuring device 10.

[0071] The nanoparticle measurement system 1 may include an input unit 40. The input unit 40 can acquire input from a user or the like. The input acquired by the input unit 40 can be converted into a fourth signal S4. For example, the input unit 40 can generate a fourth signal S4 that contains information about the operation of the nanoparticle measurement system 1.

[0072] The control unit 35 may include a first signal processing unit 36. The first signal processing unit 36 ​​can receive signals. For example, the first signal processing unit 36 ​​can receive input signals S1, S2, S3, and S4. The input signals S1, S2, S3, and S4 may include at least one of the first signal S1, the second signal S2, the third signal S3, and the fourth signal S4.

[0073] The control unit 35 can process input signals S1, S2, S3, and S4 to generate output signals S5 and S6. The output signals S5 and S6 may include at least one of the fifth signal S5 and the sixth signal S6.

[0074] The control unit 35 may include a second signal processing unit 37. The second signal processing unit 37 can transmit signals. For example, the second signal processing unit 37 can transmit a fifth signal S5 to the laser device 21. For example, the second signal processing unit 37 can transmit a sixth signal S6 to the camera 31.

[0075] The fifth signal S5 can be transmitted to the laser device 21. The fifth signal S5 may contain information regarding the operation of the laser device 21. The laser device 21 can receive the fifth signal S5 and operate according to the fifth signal S5.

[0076] For example, information regarding the operation of the laser device 21 may include at least one of the peak power, period, pulse duration, and average power of the laser device 21.

[0077] The sixth signal S6 can be transmitted to the camera 31. The sixth signal S6 may include information regarding the operation of the camera 31. The camera 31 can operate according to the sixth signal S6.

[0078] For example, the camera 31 can operate in sync with the operating cycle of the laser device 21. For instance, when the laser device 21 operates and plasma is generated in the nanoparticle measuring device 10, the camera 31 can capture the flash originating from the plasma. In other words, the operating cycle of the camera 31 may be the same as that of the laser device 21.

[0079] Figure 2 is an exploded perspective view of a nanoparticle measurement device according to one embodiment of the present invention.

[0080] A nanoparticle measurement device 10 according to one embodiment of the present invention may include a flow cell 100. A liquid sample can be flowed inside the flow cell 100.

[0081] The nanoparticle measuring device 10 may include an inlet portion 151 and an outlet portion 152. The inlet portion 151 is connected to one end of the flow cell 100 and can supply a liquid sample into the flow cell 100. The outlet portion 152 is connected to the other end of the flow cell 100 and can discharge the liquid sample flowing inside the flow cell 100 to the outside.

[0082] A nanoparticle measurement device 10 according to one embodiment of the present invention may include a mount table 200. The mount table 200 may include a mount table body 210. The mount table 200 may include a table top surface 220 that forms one side of the mount table body 210.

[0083] A nanoparticle measurement device 10 according to one embodiment of the present invention may include a support mount 300. The support mount 300 can be fixed to a mounting table 200. For example, the support mount 300 can be coupled and fixed to the top surface 220 of the table. A camera 31 can be connected, coupled, or fixed to the mounting table 200. The camera 31 can face the flow cell 100.

[0084] A nanoparticle measurement device 10 according to one embodiment of the present invention may include a cell mount 400. The cell mount 400 may include a cell mount frame 410 which is coupled to and fixed to a support mount 300. The cell mount frame 410 may be formed in the shape of a photo frame. The cell mount frame 410 may be positioned in front of the support mount 300.

[0085] The cell mount 400 may include cell mount legs 420. The cell mount legs 420 may be coupled to or connected to the cell mount frame 410. For example, the cell mount legs 420 may form a shape that extends forward from the cell mount frame 410.

[0086] Multiple cell mount legs 420 may be formed. For example, multiple cell mount legs 420 may be spaced apart from each other. The cell mount 400 can carry flow cells 100.

[0087] The cell mount 400 may include a cell mount fixing portion 440. The cell mount fixing portion 440 may be coupled to or fixed to the cell mount leg 420. For example, a coupling member 450 can connect the cell mount fixing portion 440 and the cell mount leg 420. The coupling member 450 may be, for example, a screw. The cell mount fixing portion 440 may be located in front of the cell mount frame 410.

[0088] The cell mount leg 420 can extend forward from the cell mount frame 410 and form a shape connected to the cell mount fixing part 440. The cell mount fixing part 440 may include at least two bars. The flow cell 100 can be located between the cell mount frame 410 and the cell mount fixing part 440.

[0089] Figure 3 shows a flow cell according to one embodiment of the present invention. Figure 4 is a cross-sectional view of the flow cell shown in Figure 3 along "A1-A2". Figure 5 is a cross-sectional view of the flow cell shown in Figure 3 along "B1-B2".

[0090] Referring to Figures 3 to 5, the flow cell 100 can form a shape that extends from one end and connects to the other. For example, the flow cell 100 may extend upward from the cell bottom 105 and connect to the cell top 106. The cell bottom 105 can form the bottom surface of the flow cell 100. The cell top 106 can form the top surface of the flow cell 100.

[0091] The longitudinal direction of the flow cell 100 may be parallel to the direction from the cell bottom 105 to the cell top 106. The longitudinal direction of the flow cell 100 may also be vertical. The liquid sample can flow through the flow cell 100 in the longitudinal direction of the flow cell 100.

[0092] For example, the flow cell 100 may include a hollow cell portion 107 as an internal hollow section. The hollow cell portion 107 may extend upward from the cell bottom 105 and be connected to the cell top 106. The hollow cell portion 107 may be open downward and upward at the cell bottom 105 and the cell top 106, respectively.

[0093] The flow cell 100 may include multiple sides. Each of the multiple sides may extend upward from the cell bottom 105 and connect to the cell top 106. Each of the multiple sides may be a passage through which energy flows in or out. The multiple sides may be exterior surfaces that are observed from outside the flow cell 100.

[0094] For example, the flow cell 100 may include a front cell window 103. The front cell window 103 can form the front face of the flow cell 100. The front cell window 103 may extend upward from the cell bottom 105 and connect to the cell top 106.

[0095] The incident laser beam IB (see Figure 1) can be incident on the front cell window 103. At least a portion of the incident laser beam IB (see Figure 1) incident on the front cell window 103 can reach the hollow portion 107 of the cell.

[0096] For example, the flow cell 100 may include a rear cell window 104. The rear cell window 104 can form the rear face of the flow cell 100. The rear cell window 104 may extend upward from the cell bottom 105 and connect to the cell top 106.

[0097] At least a portion of the laser beam that reaches the hollow portion 107 of the cell can pass through the rear cell window 104 and proceed to the outside of the flow cell 100. At least a portion of the laser beam discharged from the rear cell window 104 can reach the beam stopper 26 (see Figure 1).

[0098] For example, the flow cell 100 may include a first cell window 101. The first cell window 101 may extend upward from the cell bottom 105 and connect to the cell top 106. The first cell window 101 may extend backward from the first side of the front cell window 103 and connect to the first side of the rear cell window 104.

[0099] The first cell window 101 can come into contact with the piezoelectric sensor 34 (see Figure 1). When plasma is generated in the flow cell 100 and a shock wave is formed, the pressure or vibration of the shock wave can be transmitted to the first cell window 101.

[0100] The piezoelectric sensor 34 (see Figure 1) can be subjected to pressure or vibration from the first cell window 101. Therefore, in order to effectively measure shock waves, the piezoelectric sensor 34 (see Figure 1) needs to be in close contact with the first cell window 101.

[0101] For example, the flow cell 100 may include a second cell window 102. The second cell window 102 may extend upward from the cell bottom 105 and connect to the cell top 106. The second cell window 102 may extend backward from the second side of the front cell window 103 and connect to the second side of the rear cell window 104. The second cell window 102 may be located opposite the first cell window 101.

[0102] When plasma is generated in the flow cell 100 and a flash is produced, at least a portion of the flash can pass through the second cell window 102 and reach the camera 31 (see Figure 1). The camera 31 (see Figure 1) can face the second cell window 102.

[0103] If the longitudinal direction of the flow cell 100 is considered to be the axial direction of the flow cell 100, the first cell window 101, the front cell window 103, the second cell window 102, and the rear cell window 104 can be sequentially connected in the azimuthal direction.

[0104] The first side of the flow cell 100 may be the direction toward or opposite to the first cell window 101. The second side of the flow cell 100 may be the direction toward or opposite to the second cell window 102.

[0105] The width direction of the flow cell 100 may mean the direction between the first and second sides of the flow cell 100. For example, the width direction of the flow cell 100 may be parallel to the direction from the first cell window 101 to the second cell window 102. An observed physical quantity can propagate in the width direction of the flow cell 100. For example, the observed physical quantity may include at least one of oscillation (or pressure) and flash.

[0106] The thickness direction of the flow cell 100 may be parallel to the direction from the front cell window 103 to the rear cell window 104. The incident laser beam IB can penetrate the flow cell 100 in the thickness direction of the flow cell 100.

[0107] At least a portion of the flow cell 100 may be transparent or translucent. The flow cell 100 can maintain its rigidity. For example, the flow cell 100 can be formed from a material containing quartz.

[0108] For example, at least a portion of the front cell window 103 may be transparent or semi-transparent. At least a portion of the incident laser beam IB that enters the front cell window 103 can reach the hollow portion of the cell 107.

[0109] For example, at least a portion of the second cell window 102 may be transparent or semi-transparent. At least a portion of the flash generated in the hollow portion of the cell 107 can pass through the second cell window 102 and reach the camera 31 (see Figure 1).

[0110] Figure 6 shows a mounting table according to one embodiment of the present invention.

[0111] Referring to Figures 1 to 6, the optical assembly 20 and the nanoparticle measurement device 10 can be mounted on the table surface 220 of the mounting table 200. The optical assembly 20 can be positioned on the table surface 220 such that the hollow portion 107 of the flow cell 100 is located in the path of the incident laser beam IB. The mounting table 200 may be, for example, an optical table.

[0112] Figure 7 shows a support mount according to one embodiment of the present invention.

[0113] Referring to Figures 1 to 7, the support mount 300 may include a support mount fixing portion 310. The support mount fixing portion 310 can be formed in the shape of a plate. The support mount fixing portion 310 can be coupled and fixed to the mount table 200. The support mount fixing portion 310 can be fixed to the upper surface 220 of the table.

[0114] The support mount 300 may include a support mount coupling portion 320. The support mount coupling portion 320 may include a support mount coupling portion body 321. The support mount coupling portion body 321 can have a shape that extends upward from the support mount fixing portion 310.

[0115] The support mount fixing portion 310 and the support mount connecting portion body 321 can be formed integrally. For example, the support mount fixing portion 310 and the support mount connecting portion body 321 can be separated by bending a single metal plate.

[0116] The support mount coupling portion 320 may include a support mount coupling portion opening 322. The support mount coupling portion opening 322 can be formed in the support mount coupling portion body 321. The support mount coupling portion opening 322 can connect the front face and rear face of the support mount coupling portion body 321.

[0117] The support mount coupling opening 322 can be located in the path of the incident laser beam IB. For example, the laser beam that has passed through the rear cell window 104 of the flow cell 100 can pass through the support mount coupling opening 322.

[0118] Figure 8 shows the cell mount frame of the cell mount according to the present invention. Figure 9 shows the cell mount including the cell mount frame and cell mount legs.

[0119] Referring to Figures 1 to 9, the width direction of the cell mount 400 may be the same as the width direction of the flow cell 100. The thickness direction of the cell mount 400 may be the same as the thickness direction of the flow cell 100.

[0120] The cell mount frame 410 can be formed in the shape of a photo frame. For example, the cell mount frame 410 may include a lower cell mount frame bar 413. The lower cell mount frame bar 413 can form the lower end of the cell mount frame 410. The lower cell mount frame bar 413 can extend in the width direction of the cell mount 400 or be formed in an extended or elongated shape.

[0121] For example, the cell mount frame 410 may include an upper cell mount frame bar 414. The upper cell mount frame bar 414 can form the upper end of the cell mount frame 410. The upper cell mount frame bar 414 can extend in the width direction of the cell mount 400 or be formed in an extended or elongated shape.

[0122] For example, the cell mount frame 410 may include a first cell mount frame bar 411. The first cell mount frame bar 411 may extend upward from the first side end of the lower cell mount frame bar 413 and connect to the first side end of the upper cell mount frame bar 414. The first cell mount frame bar 411 can form the first side of the cell mount frame 410.

[0123] For example, the cell mount frame 410 may include a second cell mount frame bar 412. The second cell mount frame bar 412 may extend upward from the second side end of the lower cell mount frame bar 413 and connect to the second side end of the upper cell mount frame bar 414. The second cell mount frame bar 412 can form the second side of the cell mount frame 410.

[0124] The first cell mount frame bar 411, the lower cell mount frame bar 413, the second cell mount frame bar 412, and the upper cell mount frame bar 414 can be connected in sequence.

[0125] The cell mount frame 410 may include a cell mount frame opening 415. The cell mount frame opening 415 is an opening formed in the cell mount frame 410 that can connect the front face and rear face of the cell mount frame 410.

[0126] The cell mount frame opening 415 can face the support mount coupling opening 322. For example, the cell mount frame opening 415 can communicate with the support mount coupling opening 322. The cell mount frame opening 415 can be located in the path of the incident laser beam IB. For example, at least a portion of the incident laser beam IB that has passed through the rear cell window 104 can sequentially pass through the cell mount frame opening 415 and the support mount coupling opening 322.

[0127] The cell mount 400 may include a mount leg 420. The mount leg 420 can form a shape that extends forward from the cell mount frame 410. For example, the mount leg 420 can form a shape that extends forward from the corner of the cell mount frame 410.

[0128] A corner of the cell mount frame 410 may mean the point where two adjacent cell mount frame bars 411, 412, 413, and 414 are joined. Cell mount frame bars 411, 412, 413, and 414 may mean at least one of the first cell mount frame bar 411, the second cell mount frame bar 412, the lower cell mount frame bar 413, and the upper cell mount frame bar 414.

[0129] The cell mount leg 420 may include a lower leg unit 421 and an upper leg unit 422. The lower leg unit 421 can form a shape that extends forward from both ends of the lower cell mount frame bar 413. The upper leg unit 422 can form a shape that extends forward from both ends of the upper cell mount frame bar 414.

[0130] The lower leg unit 421 may include a first lower leg 4211 and a second lower leg 4212. The first lower leg 4211 may form a shape that extends forward from the region where the lower cell mount frame bar 413 and the first cell mount frame bar 411 are connected. The second lower leg 4212 may form a shape that extends forward from the region where the lower cell mount frame bar 413 and the second cell mount frame bar 412 are connected.

[0131] The upper leg unit 422 may include a first upper leg 4221 and a second upper leg 4222. The first upper leg 4221 may form a shape that extends forward from the region where the upper cell mount frame bar 414 and the first cell mount frame bar 411 are connected. The second upper leg 4222 may form a shape that extends forward from the region where the upper cell mount frame bar 414 and the second cell mount frame bar 412 are connected.

[0132] Upper legs 4221, 4222 may mean including at least one of a first upper leg 4221 and a second upper leg 4222. Upper legs 4221, 4222 can support the flow cell 100.

[0133] For example, the upper legs 4221 and 4222 can support the first cell window 101 and the second cell window 102. For example, the upper legs 4221 and 4222 can face or touch the first cell window 101 and the second cell window 102.

[0134] Figure 10 is a plan view showing the upper leg unit and the upper cell mount frame bar. Figure 11 is a plan view showing the lower leg unit and the lower cell mount frame bar.

[0135] Referring to Figures 1 to 11, the upper leg unit 422 may include an upper leg gap 4225. The upper leg gap 4225 may represent a gap formed between the first upper leg 4221 and the second upper leg 4222. For example, the upper leg gap 4225 may represent the distance between the first upper leg 4221 and the second upper leg 4222.

[0136] The flow cell 100 can be positioned in the upper leg gap 4225. For example, the flow cell 100 can be positioned between the first upper leg 4221 and the second upper leg 4222. For example, the flow cell 100 can be positioned in the upper leg gap 4225.

[0137] For example, the first upper leg 4221 can face or touch the upper end of the first cell window 101. For example, the second upper leg 4222 can face or touch the upper end of the second cell window 102.

[0138] The lower leg unit 421 may include a lower leg gap 4215. The lower leg gap 4215 may mean a gap formed between a first lower leg 4211 and a second lower leg 4212. For example, the lower leg gap 4215 may mean the distance between the first lower leg 4211 and the second lower leg 4212.

[0139] An inlet portion 151 can be located in the lower leg gap 4215. For example, the inlet portion 151 can be positioned between the first lower leg 4211 and the second lower leg 4212.

[0140] Lower legs 4211, 4212 may mean including at least one of a first lower leg 4211 and a second lower leg 4212. Lower legs 4211, 4212 can support the flow cell 100. For example, lower legs 4211, 4212 can face or touch the cell bottom 105 of the flow cell 100.

[0141] The size of the lower leg gap 4215 may be smaller than the size of the upper leg gap 4225. That is, the distance between the first lower leg 4211 and the second lower leg 4212 may be smaller than the distance between the first upper leg 4221 and the second upper leg 4222.

[0142] Figure 12 shows a cell mount including the cell mount reinforcement section.

[0143] Referring to Figures 1 to 12, the cell mount 400 may include a cell mount reinforcement 430. The cell mount reinforcement 430 can form a shape that extends upward from the second lower leg 4212 and connects to the second upper leg 4222.

[0144] The cell mount reinforcement portion 430 may include, for example, a front cell mount reinforcement portion 431. The front cell mount reinforcement portion 431 can form a shape that extends upward from the front end of the second lower leg 4212 and connects to the front end of the second upper leg 4222.

[0145] The cell mount reinforcement portion 430 may include, for example, a rear cell mount reinforcement portion 432. The rear cell mount reinforcement portion 432 may form a shape that extends upward from the rear end of the second lower leg 4212 and connects to the rear end of the second upper leg 4222.

[0146] At least a portion of the flash generated in the hollow cell portion 107 of the flow cell 100 can penetrate the second cell window 102, pass between the front cell mount reinforcement portion 431 and the rear cell mount reinforcement portion 432, and reach the camera 31.

[0147] Figure 13 shows a piezoelectric sensor according to one embodiment of the present invention.

[0148] Referring to Figures 1 to 13, the piezoelectric sensor 34 may include a piezoelectric sensor body 34a. One side of the piezoelectric sensor body 34a may face or be in contact with the first cell window 101. Pressure or vibration may be applied to the piezoelectric sensor body 34a. The piezoelectric sensor body 34a can convert the applied pressure or vibration into an electrical signal.

[0149] The piezoelectric sensor 34 may include a piezoelectric sensor cable 34b. The piezoelectric sensor cable 34b may be formed as an extension of the piezoelectric sensor body 34a. The piezoelectric sensor cable 34b can be connected to the piezoelectric sensor body 34a. The piezoelectric sensor cable 34b can transmit the electrical signal generated by the piezoelectric sensor body 34a to the control unit 35.

[0150] Figure 14 shows a mount cover according to one embodiment of the present invention. Figure 15 is a cross-sectional view of the mount cover shown in Figure 14 along "C1-C2". Figure 16 shows a cross-section of a nanoparticle measuring device including an attachment member with the mount cover bonded to the cell mount. Figure 17 shows a cross-section of a nanoparticle measuring device including a fixation member with the mount cover bonded to the cell mount. In Figures 16 and 17, for illustrative purposes, some components of the nanoparticle measuring device 10 may be omitted, and the hatching of the flow cell 100 and piezoelectric sensor cable 34b may be omitted.

[0151] Referring to Figures 1 to 17, the mount cover 500 may include a mount cover plate 510. The mount cover plate 510 can form the outer shape of the mount cover 500. For example, the mount cover plate 510 can be formed in the shape of a plate.

[0152] The mount cover plate 510 can be coupled to the cell mount 400. For example, the mount cover plate 510 can be coupled to the mount leg 420. For example, the upper end of the mount cover plate 510 can be coupled to the first upper leg 4221. For example, the lower end of the mount cover plate 510 can be coupled to the first lower leg 4211.

[0153] For example, the mount cover plate 510 can be coupled to the cell mount frame 410. For example, the mount cover plate 510 can be coupled to the cell mount fixing part 440.

[0154] The mounting cover plate 510 can be positioned opposite the first cell window 101, with the piezoelectric sensor 34 in between. In other words, the first cell window 101 can face or touch the piezoelectric sensor body 34a, and the piezoelectric sensor body 34a can be positioned between the mounting cover plate 510 and the first cell window 101.

[0155] With the mount cover plate 510 coupled to the cell mount 400, the mount cover plate 510 can apply pressure to the piezoelectric sensor body 34a. When the mount cover plate 510 applies pressure to the piezoelectric sensor body 34a, the piezoelectric sensor body 34a can be brought into close contact with the flow cell 100.

[0156] In other words, when the mounting cover plate 510 applies pressure to the piezoelectric sensor body 34a, the distance between the piezoelectric sensor body 34a and the flow cell 100 can be maintained at a constant level. This allows the piezoelectric sensor 34 to effectively measure vibrations or pressure in the flow cell 100.

[0157] The mount cover plate 510 can be formed on both sides. For example, the mount cover plate 510 may include an inner surface 511 and an outer surface 512.

[0158] The inner surface 511 of the mount cover plate is one surface formed on the mount cover plate 510 and can face the flow cell 100 or the piezoelectric sensor body 34a. The outer surface 512 of the mount cover plate is the other surface formed on the mount cover plate 510 and can face or face the outside of the nanoparticle measuring device 10.

[0159] The mount cover plate 510 can be elastic. For example, the mount cover plate 510 can be made of a metal plate.

[0160] For example, the mount cover plate 510 can form a curvature before it is attached to the cell mount 400.

[0161] For example, before the mount cover plate 510 is coupled to the cell mount 400, the inner surface 511 of the mount cover plate may be convex toward the flow cell 100 or the piezoelectric sensor body 34a. For example, when the coupling (or fixing) of the mount cover plate 510 to the cell mount 400 is released, the inner surface 511 of the mount cover plate may become convex.

[0162] For example, before the mount cover plate 510 is bonded to the cell mount 400, the outer surface 512 of the mount cover plate may be concave toward the outside of the nanoparticle measuring device 10. For example, when the bond (or fixation) of the mount cover plate 510 to the cell mount 400 is released, the outer surface 512 of the mount cover plate may become concave.

[0163] When the mount cover plate 510 is coupled to the cell mount 400, the curvature of the mount cover plate 510 may change. For example, when the mount cover plate 510 is coupled to the cell mount 400, the mount cover plate 510 may stretch.

[0164] When the mount cover plate 510 is coupled to the cell mount 400, the mount cover plate 510 can apply pressure to the piezoelectric sensor body 34a. For example, when the mount cover plate 510 is coupled to the cell mount 400, the mount cover plate 510 can apply pressure to the piezoelectric sensor body 34a in the direction from the piezoelectric sensor body 34a toward the flow cell 100.

[0165] At least a portion of the pressure applied by the mount cover 500 to the piezoelectric sensor 34 can be transmitted to the flow cell 100. The cell mount reinforcement 430 can contact the second cell window 102. The cell mount reinforcement 430 can prevent the flow cell 100 from moving in the width direction. For example, the cell mount reinforcement 430 can prevent the flow cell 100 from moving to the second side.

[0166] The mount cover 500 may include a mount cover opening 515. The mount cover opening 515 may be an opening formed in the mount cover plate 510. The mount cover opening 515 can connect the inner surface 511 and the outer surface 512 of the mount cover plate.

[0167] The piezoelectric sensor cable 34b extends from the piezoelectric sensor body 34a and can pass through the mounting cover opening 515. The piezoelectric sensor cable 34b is connected to the control unit 35 and can transmit the second signal S2 to the first signal processing unit 36.

[0168] The nanoparticle measuring device 10 may include an adhesive member 600. The adhesive member 600 can be formed in the shape of a sheet. The adhesive member 600 can be placed between the flow cell 100 and the piezoelectric sensor body 34a.

[0169] For example, one surface of the adhesive member 600 can be in contact with the first cell window 101. For example, the other surface of the adhesive member 600 can be in contact with the piezoelectric sensor body 34a.

[0170] For example, multiple adhesive members 600 can be provided. For example, a first adhesive member 600 can be positioned between the piezoelectric sensor body 34a and the first cell window 101. For example, a second adhesive member 600 can be positioned between the piezoelectric sensor body 34a and the mount cover 500.

[0171] The adhesive member 600 can more effectively maintain the distance between the piezoelectric sensor body 34a and the first cell window 101. The adhesive member 600 can be formed from a material including, for example, silicon.

[0172] The nanoparticle measuring device 10 may include a fixing member 700. The fixing member 700 can cover the piezoelectric sensor body 34a. The fixing member 700 can prevent the piezoelectric sensor body 34a from detaching from the flow cell 100. The fixing member 700 may be formed from a material including, for example, epoxy resin.

[0173] The fixing member 700 can be cured after covering the piezoelectric sensor body 34a. After the fixing member 700 covers the piezoelectric sensor body 34a, the mount cover 500 can be coupled to the cell mount 400.

[0174] The adhesive member 600 and the fixing member 700 can enclose the piezoelectric sensor body 34a. For example, one side of the piezoelectric sensor body 34a can face or be in contact with the adhesive member 600, and the other side of the piezoelectric sensor body 34a can face or be in contact with the fixing member 700.

[0175] Any or any of the embodiments of the present invention described above are not mutually exclusive or distinct from one another. Any or any of the embodiments of the present invention described above may be used in combination or in combination with each other.

[0176] It will be apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit and essential features of the invention. The foregoing detailed description should not be construed restrictively in any way, but should be considered illustrative. The scope of the invention should be determined by a reasonable interpretation of the appended claims, and all modifications within the equivalent scope of the invention are included within the scope of the invention.

Claims

1. A flow cell that forms a hollow cell portion inside which a liquid sample flows, A cell mount coupled to the flow cell and supporting the flow cell, A piezoelectric sensor facing the flow cell and connected to the flow cell, A mount cover is located opposite the flow cell, with the piezoelectric sensor in between, and is fixed to the cell mount. Nanoparticle measurement device.

2. The aforementioned mounting cover is A mount cover plate fixed to the aforementioned cell mount, The mount cover plate includes a mount cover opening as an opening formed in the mount cover plate, The nanoparticle measuring device according to claim 1.

3. The aforementioned mounting cover plate is Having elasticity, The nanoparticle measuring device according to claim 2.

4. The piezoelectric sensor is A piezoelectric sensor body is connected to the flow cell and faces the flow cell, and measures the vibration of the flow cell. Includes a piezoelectric sensor cable extending from the piezoelectric sensor body and passing through the mounting cover opening, The nanoparticle measuring device according to claim 2.

5. The aforementioned mounting cover is The mount cover plate includes an inner surface of the mount cover plate facing the flow cell and an outer surface of the mount cover plate formed on the opposite side of the inner surface of the mount cover plate, and is fixed to the cell mount. The nanoparticle measuring device according to claim 1.

6. When the mounting cover plate is released from its fixation to the cell mount, the inner surface of the mounting cover plate becomes convex, and the outer surface of the mounting cover plate becomes concave. The nanoparticle measuring device according to claim 5.

7. The aforementioned cell mount is A cell mount frame located behind the aforementioned flow cell, Multiple cell mount legs that form a shape extending forward from the cell mount frame, Includes a cell mount fixing portion that is coupled to the cell mount leg and located in front of the flow cell, The nanoparticle measuring device according to claim 1.

8. The aforementioned cell mount is It further includes a cell mount reinforcing portion located opposite the mount cover with the flow cell in between, and connected to the plurality of cell mount legs, The nanoparticle measuring device according to claim 7.

9. The aforementioned cell mount frame is A cell mount frame opening is formed as an opening facing the rear surface of the flow cell. The nanoparticle measuring device according to claim 7.

10. The aforementioned flow cell is It forms the front face, and has a front cell window facing the cell mount fixing part, A rear cell window is formed, facing the cell mount frame, A first cell window facing the piezoelectric sensor, Including a second cell window facing the cell mount reinforcement portion, The nanoparticle measuring device according to claim 8.

11. The first cell window, the front cell window, the second cell window, and the rear cell window are, They are connected in sequence, The nanoparticle measuring device according to claim 10.

12. The aforementioned flow cell is A cell bottom that forms the lower surface and is connected to the hollow portion of the cell, It further includes a cell top that forms the upper surface and is connected to the hollow portion of the cell, The aforementioned plurality of cell mount legs are A lower leg unit located below the cell bottom and supporting the flow cell, Includes an upper leg unit that supports the upper end of the flow cell, The nanoparticle measuring device according to claim 10.

13. The aforementioned upper leg unit is A first upper leg facing the first cell window and positioned above the piezoelectric sensor, A second upper leg facing the second cell window and located opposite the first upper leg across the flow cell, The nanoparticle measuring device according to claim 12.

14. The lower leg unit is A first lower leg located below the first upper leg and in contact with and supporting the cell bottom, It includes a second lower leg located below the second upper leg and supporting the cell bottom in contact with it, The nanoparticle measuring device according to claim 13.

15. The distance between the first lower leg and the second lower leg is Smaller than the distance between the first upper leg and the second upper leg, The nanoparticle measuring device according to claim 14.

16. The aforementioned cell mount reinforcement portion is Extending upward from the second lower leg and connecting to the second upper leg, The nanoparticle measuring device according to claim 14.

17. The aforementioned cell mount reinforcement portion is Including front cell mount reinforcement and rear cell mount reinforcement that are separated in the front-rear direction, The nanoparticle measuring device according to claim 16.

18. An inlet section connected to the cell bottom for supplying the liquid sample to the hollow portion of the cell, The cell top further includes an outlet section connected to the cell top for discharging the liquid sample, The nanoparticle measuring device according to claim 12.

19. The present invention further includes an adhesive member located between the first cell window and the piezoelectric sensor, with one surface in contact with the first cell window and the other surface in contact with the piezoelectric sensor. The nanoparticle measuring device according to claim 10.

20. The fixing member further includes a fixing member that covers the piezoelectric sensor, fixes the piezoelectric sensor to the flow cell, and contacts the mount cover. The nanoparticle measuring device according to claim 1.

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