Apparatus and method for controlling the motion of an object in an open-loop and / or closed-loop manner.

Abstract

To achieve high accuracy and low energy consumption and high dynamics, a device for controlling the motion of an object is provided, comprising an electromagnetic actuator (2) configured to move the object, the electromagnetic actuator (2) comprising a stator (3) and a rotor (4) which electromagnetically interacts with the stator (3) to generate motion and is connected to or supports the object; a flexure (7, 12) that guides and / or supports the rotor (4); and at least one sensor (13) for detecting the motion of the rotor (4) and / or the object, wherein the sensor signal of the at least one sensor (13) generated based on the motion of the rotor (4) and / or the object can be used to control the position of the rotor (4) in an open-loop and / or closed-loop manner; and a corresponding method is provided.

Description

Technical Field

[0001] The present invention relates to an apparatus and a method for controlling the movement of an object in an open-loop manner and / or a closed-loop manner.

Background Art

[0002] Such an apparatus for controlling the movement of an object is known, for example, in the form of an actuator-sensor system and can be used in many technical fields for controlling the movement under monitoring. Such an actuator-sensor system requires particularly high dynamics when used in optical applications. For example, in laser processing, a very high-speed actuator is required to guide a laser beam onto a workpiece to be processed at high speed. Also, in metrology, for example, a high-speed actuator is used to scan a surface. Another application area is laser communication, in which communication is performed between moving objects (such as aircraft, satellites, etc.) using lasers. In this case, it is necessary to track the laser beam of the transmitter (which may be moving) to the receiver (which may also be moving) very quickly and reliably.

[0003] For such applications, various electromagnetic actuators based on the principle of Lorentz force or drag force are available. These actuators are used to operate an optical element that can shape or deflect a light beam. For example, a tilt mirror (also known as "fast-steering mirrors (FSM)") is often used for scanning operations. This optical element is usually connected to the rotor of the actuator system and is thus part of the moving mass in this actuator system. Since optical elements are typically made of glass, the mass that needs to be moved for shaping or deflection cannot be ignored. Therefore, the challenge lies in making optical elements such as lenses, mirrors, and prisms operate at extremely high speeds and precisely as intended. For this purpose, voice coil actuators are often used due to their low cost.

[0004] The mass inertia of an object operated by an actuator (typically a rotor and optical elements) is usually determined based on the required optical properties of the optical elements and the stability and manufacturability requirements of the associated mechanism. Here, the actuator is designed to apply the necessary force and dynamics to achieve the desired displacement of an object with the desired dynamics. By using a control unit to close the control loop, the rotor, and therefore the optical elements, can be controlled to operate as intended. In this context, dynamics refers to the bandwidth in the closed-loop operation of an actuator sensor system. The control bandwidth is the frequency range at which interference and errors can be compensated for (-3dB).

[0005] JPEG2026513103000002.jpg42169

[0006] In closed-loop control systems, the fundamental frequency is usually not a problem in control because the control unit is designed based on it. Parasitic resonance harmonics are particularly problematic because they interfere with control by activating other degrees of freedom instead of the desired operation at the fundamental frequency. In this case, interference activation may not be adequately controlled, leading to positive feedback (oscillation) and potentially destabilizing the entire system.

[0007] This means that the open-loop transfer function (i.e., the transfer function for uncontrolled operation) should be smooth in the controlled bandwidth and free from any undesirable parasitic resonances. Here, the actuator sensor system needs to be designed so that the harmonics (parasitic resonances or modes) exclusively exceed the control bandwidth. This makes it possible to achieve linear transfer behavior up to the desired bandwidth (dynamics) of the entire system (-3dB). In highly dynamic systems, such as optical applications, this means that the control bandwidth needs to be high, for example, 1.5 kHz or 2 kHz. Furthermore, for the parasitic mode to exceed the control bandwidth, a very high fundamental frequency, such as 400Hz to 500Hz, is required. A high fundamental frequency can be achieved in two ways according to equation (1): either by increasing the system's stiffness c, or by decreasing the moving mass m (or moment of inertia J). However, reducing the mass or moment of inertia is often impossible because the above requirements of the optical element or mechanism are predetermined. On the other hand, increasing mechanical stiffness means that the actuator needs to apply significantly more energy to control the stiffer system. This means there is a significant energy consumption or power loss on the actuator side.

[0008] The interactions between the components described here are complex. Mechanical components need to be connected to magnetic elements and controlled using electromagnetic actuators to operate optical elements. Here, there is a sensor that forms a closed control loop. [Overview of the Initiative] [Problems that the invention aims to solve]

[0009] The present invention addresses the challenge of designing and developing devices, such as actuator sensor systems and methods, for controlling the motion of objects as described in the opening section, which enable high accuracy, low energy consumption, and high dynamics. [Means for solving the problem]

[0010] The above problems are solved by an apparatus for controlling the movement of an object having the features described in claim 1 and a method for controlling the movement of an object having the features described in claim 17.

[0011] Herein, a device is provided for controlling the motion of an object in an open-loop and / or closed-loop manner, wherein the device comprises an electromagnetic actuator configured to move an object, the actuator having a stator and a rotor that electromagnetically interacts with the stator to generate motion and is connected to or supports an object; a flexure that guides and / or supports the rotor; and at least one sensor for detecting the motion of the rotor and / or the object, wherein the sensor signals of the at least one sensor generated based on the motion of the rotor and / or the object can be used to control the position of the rotor in an open-loop and / or closed-loop manner.

[0012] The method according to claim 17 has the following features: In particular, a method for controlling the motion of an object in an open-loop and / or closed-loop manner using an apparatus for controlling the motion of an object as described in any one of claims 1 to 16, wherein the apparatus is an electromagnetic actuator configured to move an object, comprising a stator and a rotor that electromagnetically interacts with the stator to generate motion and is connected to or supports an object; a flexure that guides and / or supports the rotor; and at least one sensor for detecting the motion of the rotor and / or the object, wherein the sensor signal of at least one sensor generated based on the motion of the rotor and / or the object is used to control the position of the rotor in an open-loop and / or closed-loop manner.

[0013] According to the present invention, it is recognized that the above problems can be solved with surprising ease by a clever combination of mechanical, electrical, and magnetic components within an electromagnetic actuator.

[0014] Furthermore, the flexure can be designed with high rigidity such that parasitic modes exceed the control bandwidth, and the electromagnetic actuator can have negative rigidity such that the fundamental frequency is lowered to increase the energy efficiency of the operation. Furthermore, the flexure can have sufficient rigidity so that the parasitic modes exceed the control bandwidth, and the actuator, with its negative rigidity, lowers the fundamental frequency so that it can operate with high energy efficiency.

[0015] It has also been recognized that, according to the present invention, the high positive stiffness of the mechanical subsystem within the electromagnetic actuator sensor system can be compensated for by the negative stiffness of the electromagnetic subsystem. As already explained, the high positive stiffness of the mechanical subsystem is necessary for parasitic modes to exceed the required control bandwidth. It is recognized that negative stiffness can be generated by using an electromagnetic subsystem, thereby effectively damping the system, and thus achieving low overall stiffness. Therefore, the overall stiffness of the system is composed of the positive stiffness of the mechanical subsystem and the negative stiffness of the electromagnetic subsystem. Surprisingly, on the one hand, the introduction of negative stiffness further reduces the fundamental frequency, but on the other hand, the parasitic modes are not affected or only slightly affected by this and continue to exceed the control bandwidth. Also, since the energy consumption of the actuator decreases due to the decrease in the fundamental frequency, this means that simple and stable control can be achieved with high dynamics and low energy consumption.

[0016] To enable the movement of an object in a specific degree of freedom, the mechanical subsystem includes specific components that enable movement in this degree of freedom and suppress other degrees of freedom. For example, in the case of the tilting movement of one axis, the movement in the tilting direction must be possible, but the movement perpendicular to this or the torsional movement is suppressed. According to the present invention, such a component is configured as a flexure, which enables the movement of the rotor and thus the movement of the object in various predetermined ways according to individual requirements. Generally, the flexure can be a rigid body configured to be elastically deformable within a predetermined operating range. In this way, the flexure can be a flexible member or a combination of a plurality of members that are flexible or movable in a predetermined degree of freedom. Such a flexure can, for example, at least mostly prevent movement in a predetermined direction while enabling movement in another predetermined direction to a desired extent. Thereby, high dynamics with high accuracy and low energy consumption of the device for controlling the movement of the object according to the present invention can be realized.

[0017] Depending on individual requirements and designs, the stator can have at least one coil through which current can flow. Combined with a ferromagnetic material or a corresponding permanent magnet on the rotor, this can exert force on the rotor and use it to move an object. This ensures reliable electromagnetic interaction with the rotor.

[0018] To suitably amplify and guide the magnetic field generated by the coils, at least one of the coils may have a soft magnetic core.

[0019] Furthermore, according to the present invention, the rotor has at least one permanent magnet, depending on the individual requirements and design. Furthermore, by using this permanent magnet, negative stiffness is achieved in the electromagnetic actuator, thereby canceling out the positive mechanical stiffness. As a result, the rotor, and therefore the object, achieves particularly dynamic and energy-saving operation.

[0020] To easily construct a rotor centered on two axes, and thus a two-axis motion device capable of moving an object, the stator has two coils that are offset laterally from each other. In a particularly preferred configuration, two-axis motion offset by 90° relative to each other is achieved by offsetting at least two coils by a 90° angle.

[0021] To generate particularly efficient operation, the stator may have two coils positioned opposite each other. One coil amplifies the force effect of the permanent magnet, while the other coil attenuates it (differential arrangement). This generates force or torque, causing the rotor to displace or tilt particularly efficiently. In a two-axis motion device, two coils, two permanent magnets, and two sensor elements can be used for each direction of motion.

[0022] To ensure stable rotor positioning, the flexure may have a bending member configured as a rod flexure. In this way, the rotor, and therefore the object, can be moved along the bending direction of the flexure member. Because the rotor can be stably positioned along the longitudinal direction of the flexure member, for example, the Z-direction, the longitudinal motion of the rotor can be at least significantly damped or completely prevented.

[0023] In certain embodiments, the flexure can connect the stator and the rotor to each other. The flexure supports the rotor (along with the object) and ensures a strong connection in the z-direction, while the bending member allows movement about at least one axis (inclination axis) perpendicular to the z-direction. Further components are unnecessary, given the simple and compact design required for a device that controls the movement of an object. The stiffness of motion around the tilt axis is defined by the elasticity of the bending member. This elasticity is defined by the elastic modulus and geometric dimensions of the material used in the bending member.

[0024] Furthermore, for the rotor, and therefore for particularly stable placement and reliable positioning of the object, the flexure has a flat flexure. Such flat flexures can serve to prevent or suppress undesirable torsional motion of the rotor around the longitudinal axis (z-axis) of the rod flexure.

[0025] In particularly simple configurations, the flat flexure can be substantially configured as a disc having a flexible arm. Such flat flexures can be positioned in the xy-plane when the longitudinal direction of the bending member or rod flexure is aligned in the Z-direction.

[0026] To position such a flat flexure, an arm can be connected to a ring. Since the ring can be part of the flat flexure, the flat flexure can be configured to be particularly compact. The rings of the flat flexure can be securely connected to the stator. On the other hand, the central region of the flat flexure can be connected to the rotor. This suppresses torsional motion of the rotor around the z-axis, allowing only tilting motion around the x-axis (or, in the case of a two-axis design, also around the y-axis).

[0027] In certain embodiments, depending on the application, the object may have or be an optical element. Such optical elements may be lenses, mirrors, prisms, etc.

[0028] To control the operation of the rotor, the device for controlling the operation of an object according to the present invention includes at least one sensor that detects the operation of the rotor and closes a control loop. The sensor may be a distance sensor, a position sensor, or an angle sensor. In certain embodiments, depending on the application, at least one sensor can be configured as a non-contact sensor operating on a capacitive, inductive, or eddy current measurement principle. Various applications may have different requirements, and the most suitable sensor can be selected in each case.

[0029] As briefly described above, at least one sensor may have at least two sensor elements for independently detecting the motion of a rotor and / or an object in at least two different directions. This makes it possible to apply it in a wide range of fields.

[0030] In a particularly advantageous embodiment, the device for controlling the movement of an object of the present invention may have a control unit for setting a predetermined position of the rotor and / or the object. This ensures high accuracy when acquiring the desired position of the rotor and / or object.

[0031] In another particularly advantageous embodiment, the device for controlling the movement of an object according to the present invention may be configured such that the fundamental frequency in the device is below the control bandwidth and the first parasitic frequency is above the control bandwidth. It is particularly advantageous if the control bandwidth is in the range of above 1 kHz, preferably above 1.5 kHz. This makes it possible to achieve particularly high-speed and precise operation of the rotor.

[0032] The apparatus according to the present invention may be called an actuator sensor system and may be equipped with one or more sensors on a flat substrate.

[0033] In principle, embodiments can have a clever combination of mechanical, magnetic, and electrical components, which together can form an extremely compact, highly dynamic actuator sensor system with low energy consumption for controlling the movement of movable members.

[0034] There are various options for advantageously designing and developing the features of the present invention. For this purpose, please refer, on the one hand, to the attached claims, and on the other hand, to the following description of embodiments of the apparatus according to the present invention based on the drawings. Along with a description of embodiments based on the drawings, embodiments and advanced forms of the present invention will also be described. [Brief explanation of the drawing]

[0035] [Figure 1a] A cross-sectional side view of a device for controlling the movement of an object according to an embodiment of the present invention. [Figure 1b] A cross-sectional side view of a device for controlling the motion of an object according to a further embodiment of the present invention. [Figure 2]A perspective side view of a device for controlling the movement of an object according to a further embodiment of the present invention. [Figure 3] A schematic top view of a flat flexure of a device for controlling the movement of an object according to an embodiment of the present invention. [Figure 4] A Bode plot showing an embodiment of the present invention realized as a two-axis actuator sensor system. [Figure 5] A Bode plot showing an embodiment of the present invention realized as a two-axis actuator sensor system. [Modes for carrying out the invention]

[0036] Embodiments of the present invention will be described below.

[0037] An apparatus for controlling the movement of an object according to an embodiment of the present invention in the form of an actuator sensor system can be composed of an electromagnetic actuator, a sensor, a rod flexure, and a flat flexure.

[0038] In this embodiment, the electromagnetic actuator is comprised of an electromagnetic actuator having a stator and a rotor, the rotor being a movable member. The stator contains coils, and when current flows through these coils, a magnetic field is generated. The rotor has a permanent magnet. The operation is generated by the magnetic interaction between the stator and rotor. The rotor, as a movable component, is guided by a so-called flexure. The rotor also supports optical elements used to shape or deflect light rays. To achieve a closed control loop, this actuator sensor system has a sensor that detects the movement of the rotor. Here, the sensor signal is used in the control system to precisely control the rotor position in an open-loop and / or closed-loop manner.

[0039] <Status Details> In its broadest sense, a stator defines the basic structure of an actuator sensor system, comprising a housing, coils, and components that support the rotor and optical elements. It is advantageous for the coil to have a soft magnetic core, which can be used to amplify and guide the magnetic field.

[0040] <Rotor Details> The rotor may have a permanent magnet on which the Lorentz force of the coil acts. Furthermore, the rotor may be equipped with optical elements.

[0041] <Details of electromagnetic actuators> In a simple case, an electromagnetic actuator comprises a stator having only one coil, either with or without a core, and a rotor having a permanent magnet. Depending on the polarity of the permanent magnet or the direction of the current flowing through the coil, attractive or repulsive forces can be generated. This makes it possible to generate unidirectional movements where the sign changes, such as "forward and backward" or "up and down." It is even more preferable that the stator has two coils and the rotor has two permanent magnets arranged facing each other. This can double the efficiency. Furthermore, the permanent magnets of the rotor, together with the ferromagnetic components of the stator, exert a magnetostatic force on the rotor, thereby generating the desired negative rigidity of the actuator. The ferromagnetic compatible component may be a structural component of the stator, such as the base portion of the housing or the coil mounting portion. It is particularly advantageous if the soft magnetic core of the coil forms a ferromagnetic compatible material.

[0042] <Details of Flexia> Flexia has multiple functions. Firstly, the flexure supports the rotor and therefore needs to possess a certain degree of stability and rigidity. Secondly, the flexure must have sufficient flexibility to allow the rotor to move mechanically. Thirdly, for example, the flexure should prevent undesirable degrees of freedom so that the rotor does not collide with the housing or other components. In a particularly preferred embodiment, the flexure is composed of two parts. For example, a rod flexure having the form of a bent member is firmly connected to a stator on one side. On the other side, a rotor is provided, which is supported by a rod flexure. The z-axis is defined by the rod flexure. By elastically deforming this rod flexure perpendicular to the Z-axis, rotational symmetrical motion is possible in any direction on the xy-plane, i.e., around a 360° circle, unless restricted by other mechanical means.

[0043] A simple example is a single-axis actuator for tilting motion around the y-axis, that is, in the positive or negative direction of the x-axis, which can be used to deflect a light ray precisely within a plane.

[0044] To enable two-axis tilting motion, the actuator sensor system can be further developed, allowing two actuator sensor systems to be combined at an angle, for example, 90°. This makes it possible to move around both the y-axis and the x-axis. This allows the light ray to be deflected in a conical shape across a feasible angular range in two deflection directions. The arrangement of two actuator sensor systems, each featuring a common rod flexure and flat flexure, is particularly advantageous, as the flexure is composed of two parts. In this way, the two-axis actuator sensor system comprises a stator having at least two coils, a rotor having at least two permanent magnets, a common rod flexure and flat flexure, and a sensor having at least two sensor elements for independently detecting motion in two independent directions, the x and y directions. The differential arrangement is particularly advantageous in that two coils, two permanent magnets, and two sensor elements are used in each direction of operation.

[0045] <Explanation> Tilting motion is a controlled movement that approaches a specific position as intended. This does not refer to simple operation in the sense of a bistable system with two end positions, which may be determined by mechanical end stops.

[0046] The rod flexure has extremely high rigidity in the z-direction and supports the rotor against the stator's magnetic force. The rod flexure cancels out the negative stiffness of the magnetic circuit with its positive stiffness. The flexure also includes a flat, disc-shaped flat flexure equipped with flexible arms, which are used to attach the disc to a retaining ring. Flat flexures have very low rigidity in the z-direction, but they prevent rotational or torsional motion around the z-axis, which cannot be prevented by relatively thin rod flexures alone. By combining flat flexures and rod flexures, specific positive stiffness can be precisely set so that the fundamental frequency and especially the harmonics satisfy the desired dynamics of the entire actuator sensor system. Positive stiffness is determined by the suitable design of the rod flexure and flat flexure, such as their geometry, the rod diameter of the rod flexure, the arm length or arm width of the flat flexure, the thickness of the flat flexure, and the materials used. The positive stiffness is canceled out by the negative stiffness of the actuator, thereby effectively damping the system. On the other hand, the crucial point is that the actuator design dampens only the fundamental modes, meaning that only the stiffness in the direction of motion is compensated for, causing only the fundamental resonance to shift downward. Since parasitic resonances remain above the control bandwidth at the high frequencies achieved with this design, this means that simple and stable control can be achieved with high dynamics. The magnetostatic force is particularly advantageous for effective damping when it is designed to compensate for the mechanical forces of the flexure over a wide range of motion, that is, when the damping is effective over the control range of the actuator as broadly as possible. This can be achieved by skillfully arranging permanent magnets in a ferromagnetic material. JPEG2026513103000003.jpg6168 In contrast, the magnetic effect increases as the distance (air gap) decreases. By implementing a structural measure that reduces the air gap as the rotor displacement (tilt) increases, it is possible to achieve nearly constant damping over a wide range of operation.

[0047] <Details of the optical element> This is a mirror that is often attached to the rotor. Using this mirror, the actuator sensor system can deflect light rays as intended. Furthermore, to reduce mass, a reflective layer made of aluminum, silver, or other materials can be directly coated onto the rotor. Alternatively, lenses, prisms, or other optical elements can be attached to the rotor to deflect or shape the light rays.

[0048] <Sensor> In particular, to achieve a compact design, the sensor can be designed as a flat sensor. This allows for a flat design of the actuator sensor system, which is suitable for confined installation conditions and can be used in situations where low mass is required, such as in vehicles and aircraft. One sensor is sufficient to detect the rotor's movement in two directions. On the other hand, it is preferable to use the two sensors in a differential arrangement because this suppresses interference in a known way and generates symmetrical signals. A non-contact distance sensor based on either induction, eddy current measurement principle, or capacitance measurement principle is most suitable. These have a sufficiently high bandwidth to ensure that they do not affect the object being measured, in this case the rotor, and that the electromagnetic actuator can be controlled with high degree of dynamics.

[0049] <Control Details> The actuator sensor system may include a control unit that allows for precise setting of the rotor position. The rotor position is measured by a sensor element, i.e., a control variable, and compared to a set value, i.e., an operating variable. Since there are no parasitic resonances in the system's transfer function, control can be implemented relatively easily. Furthermore, the fundamental frequency changes by less than + / -20Hz, or less than + / -10Hz, across the rotor's tilt range, if the design is particularly favorable. This means, for example, that a standard PID control unit can be used.

[0050] <Further Embodiments> Figure 1a shows a single-axis actuator sensor system 1 with a compact design and particularly high dynamics. The electromagnetic actuator 2 consists of a stator 3 and a rotor 4. The stator 3 includes two coils 5a and 5b, which in this example are designed as coreless air coils. Furthermore, the stator 3 forms the housing 6 of the actuator sensor system 1. A rod flexure 7, which has the form of a bent beam, is durably fixed to the stator 3. The rod flexure 7 is elastically deformable in the region of the reduced diameter portion 8. In this example, tilting motion 9 in the positive and negative directions of the x-axis around the y-axis is shown. The axis system 10 is shown in the upper left. The rotor 4 includes two permanent magnets 11a and 11b, which, together with coils 5a and 5b, generate a dynamic magnetic effect that drives the rotor 4. Attractive and repulsive forces are generated depending on the polarity of the permanent magnets 11a and 11b and the direction of the current flowing through the coils 5a and 5b, thereby tilting the rotor 4 around the y-axis. The damping of the system, that is, the static force effect that realizes the negative stiffness of the magnetic circuit, is achieved by the permanent magnets 11a and 11b and the ferromagnetic structure of the stator 3. The rotor 4 is connected to the stator 3, in this case the housing 6, by a rod flexure 7 and another flat flexure 12. The flat flexure 12 guides the rotor 4 laterally, i.e., in the xy plane, preventing the rotor 4 from colliding with the housing 6. Furthermore, because the flat flexure 12 prevents twisting of the rod flexure 7, only tilting motion 9 in the positive and negative x directions around the y-axis is possible. The actuator sensor system includes a sensor 13 which has the form of an eddy current sensor and is located on a flat substrate.

[0051] Figure 1b shows a single-axis actuator sensor system 1 with particularly high dynamics in the compact design of Figure 1a, wherein the coils 5a and 5b are equipped with ferromagnetic cores 27a and 27b, respectively. The core, on the one hand, amplifies and shapes the magnetic flux of coils 5a and 5b, and on the other hand, functions as a corresponding component for permanent magnets 11a and 11b. The damping of the system, that is, the static force effect that realizes the negative stiffness of the magnetic circuit, is achieved by the ferromagnetic cores 27a and 27b of the permanent magnets 11a and 11b and coils 5a and 5b.

[0052] Figure 2 shows a two-axis actuator sensor system 14. In principle, the two single-axis actuator sensor systems 1 are positioned at a 90° angle to each other, and some components are used in common, so only one is provided. In this corresponding configuration, only one central rod flexure 7, one flat flexure 12, and one rotor 4 are required. The actuator sensor system includes four coils, but only coils 5a, 5b, and 5c are shown in the illustration. It also includes four permanent magnets, but only permanent magnets 11a, 11b, and 11c are shown in the illustration. The sensor 13 includes four coils (not shown) as differentially arranged measuring elements that detect two directions of motion: rotation or swirling around the X or Y axis. A mirror region 15 is attached to the rotor 4, which can be used to deflect light rays in a specific spatial direction.

[0053] Figure 3 shows an example of a flat flexure 12 having a central region 16 connected to the rotor 4. The central region 16 is connected to the outer fixing ring 18 by four arms 17a, 17b, 17c, and 17d. The fixing ring 18 is secured to the stator 3, the housing 6, or another member rigidly connected to the stator by screws (not shown) that pass through the holes 19a, 19b, 19c, and 19d. Arms 17a, 17b, 17c, and 17d are flexible and allow tilting motion around the x or y axis, but prevent rotation around the z axis, i.e., twisting motion.

[0054] Figure 4 shows a Bode plot 20 of the two-axis actuator sensor system 14 according to the present invention, which has high dynamics. Various transfer functions 21 are shown for different controlled inclines 22. Specifically, transfer functions for slopes of -0.1°, -0.3°, -0.6°, -0.9°, -1.1°, and -1.4° are shown. It is important to note that parasitic modes that could interfere with or disrupt dynamic control are above 1.5 kHz, and these are no longer visible in this figure. For control purposes, it is particularly preferable that the range of the fundamental resonance 23, which changes according to the degree of inclination, changes within less than + / -20 Hz. As can be seen in this figure, a change of only + / -10Hz, that is, a change in the range of 87Hz to 94Hz, is particularly preferred.

[0055] Figure 5 shows a Bode plot 20 of a two-axis actuator sensor system 14 according to the present invention, which has particularly high dynamics including a fundamental resonance 23 and a first harmonic 25 at approximately 2 kHz. The control bandwidth 26 of the system is designed to be 1.5 kHz. This satisfies the conditions for stable control by a simple control unit (e.g., a PID control unit). In other words, the fundamental resonance 23 is below the control bandwidth 26 in the frequency range of approximately 80 Hz, while the harmonics, especially the first harmonic 25, are above the control bandwidth at approximately 2.1 kHz.

[0056] Further advantageous embodiments of the apparatus according to the present invention are referred to in the general portion of the specification and the appended claims, in order to avoid repetition.

[0057] Finally, it should be explicitly stated that the exemplary embodiments described above are merely for the purpose of discussing the features described in the claims and do not limit them to these exemplary embodiments. [Explanation of Symbols]

[0058] 1. Actuator sensor system 2. Actuator 3. Stator 4. Rotor 5...coil 6. Housing 7. Rod Flexure 8...Diameter part 9...Tilt operation 10...Axis system 11a,11b,11c...Permanent magnet 12. Flat Flexure 13. Sensor 14. Actuator Sensor System 15. Mirror area 16...center area 17a~17d...arm 18. Fixing ring 19a~19d...hole 20. Bode plot 21. Transfer function 22...Slope [°] 23...Fundamental resonance 24... range 25. First Harmonic 26. Control bandwidth 27a, 27b... Ferromagnetic core

Claims

1. In a device for controlling the motion of an object in an open-loop and / or closed-loop manner, The device for controlling the motion of an object comprises an electromagnetic actuator (2) for moving the object, the electromagnetic actuator (2) comprising a stator (3) and a rotor (4) which is connected to or supports the object by electromagnetic interaction with the stator (3) to generate motion; a flexure (7, 12) for guiding and / or supporting the rotor (4); and at least one sensor (13) for detecting the motion of the rotor (4) and / or the object, wherein the sensor signals of the at least one sensor (13) generated based on the motion of the rotor (4) and / or the object can be used to control the position of the rotor (4) in an open-loop and / or closed-loop manner.

2. The flexures (7, 12) are designed with high rigidity such that the parasitic modes exceed the control bandwidth. The apparatus for controlling the motion of an object according to claim 1, characterized in that the electromagnetic actuator (2) has negative rigidity such that it lowers the fundamental frequency so that the energy efficiency of the motion is increased.

3. An apparatus for controlling the movement of an object according to claim 1 or claim 2, characterized in that the stator (3) has at least one coil (5a, 5b).

4. The apparatus for controlling the movement of an object according to claim 3, characterized in that at least one of the coils (5a, 5b) has a soft magnetic core.

5. An apparatus for controlling the movement of an object according to any one of claims 1 to 4, characterized in that the rotor (4) has at least one permanent magnet (11a, 11b, 11c).

6. The stator (3) has two coils (5a, 5b), An apparatus for controlling the movement of an object according to any one of claims 1 to 5, characterized in that the rotor (4) has two permanent magnets (11a, 11b, 11c) arranged facing each other.

7. An apparatus for controlling the movement of an object according to any one of claims 1 to 6, characterized in that the flexure (7, 12) comprises a bending member configured as a rod flexure (7).

8. An apparatus for controlling the operation of an object according to claim 7, characterized in that the bending member connects the stator (3) and the rotor (4) to each other.

9. An apparatus for controlling the movement of an object according to any one of claims 1 to 8, characterized in that the flexures (7, 12) include a flat flexure (12).

10. The apparatus for controlling the movement of an object according to claim 9, characterized in that the flat flexure (12) is substantially configured as a disc having flexible arms (17a, 17b, 17c, 17d).

11. A device for controlling the movement of an object according to claim 10, characterized in that the arms (17a, 17b, 17c, 17d) are connected to a ring (18).

12. An apparatus for controlling the operation of an object according to any one of claims 1 to 11, characterized in that the object is equipped with or is an optical element.

13. An apparatus for controlling the motion of an object according to any one of claims 1 to 12, characterized in that the at least one sensor (13) has at least two sensor elements for independently detecting the motion of the rotor (4) and / or the object in at least two different directions.

14. An apparatus for controlling the movement of an object according to any one of claims 1 to 13, characterized in that at least one of the sensors (13) is configured as a sensor (13) that operates on the principle of capacitance, induction, or eddy current measurement.

15. An apparatus for controlling the operation of an object according to any one of claims 1 to 14, characterized in that it has a control unit for setting a predetermined position of the rotor (4) and / or the object.

16. The fundamental frequency of the device for controlling the movement of the object is within the range of up to 1 kHz, preferably up to 500 Hz, and ideally up to 100 Hz. An apparatus for controlling the movement of an object according to any one of claims 1 to 15, characterized in that the first parasitic frequency is configured to be above 1.5 kHz.

17. In particular, a method for controlling the movement of an object in an open-loop and / or closed-loop manner using an apparatus for controlling the movement of an object as described in any one of claims 1 to 16, A method for controlling an object, wherein the apparatus is an electromagnetic actuator (2) configured to move the object, the electromagnetic actuator (2) comprising a stator (3) and a rotor (4) which electromagnetically interacts with the stator (3) to generate motion and is connected to or supports the object; a flexure (7, 12) which guides and / or supports the rotor (4); and at least one sensor (13) for detecting the motion of the rotor (4) and / or the object, the sensor signal of the at least one sensor (13) generated based on the motion of the rotor (4) and / or the object is used to control the position of the rotor (4) in an open-loop and / or closed-loop manner.

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