Scroll vacuum pumps and scroll vacuum pump systems

Abstract

The present invention relates to a scroll vacuum pump, the scroll vacuum pump comprising a pump system, a drive shaft having an eccentric portion for driving the pump system, and an electric drive motor for the drive shaft, wherein at least two bearing locations are provided, spaced apart from each other along the rotation axis of the drive shaft, for rotatably supporting the drive shaft, all bearing locations are located on the side of the drive motor closer to the eccentric portion of the drive shaft, and / or between the front balance weight and the rear balance weight of the drive shaft.

Description

Technical Field

[0001] The present disclosure relates to improvements in scroll vacuum pumps and improvements in scroll vacuum pump systems comprising a plurality of scroll vacuum pumps with different structures.

Background Art

[0002] Here, a scroll vacuum pump includes a pump system respectively. The pump system includes a fixed spiral component, a fixed pump component and a movable spiral component that interacts with the fixed pump component to perform a pumping action, a drive shaft that rotates about a rotation axis during operation and has an eccentric portion for driving the movable spiral component, and an electric drive motor for the drive shaft.

[0003] Scroll vacuum pumps are basically known from, for example, European Patent Application Publication No. 3153708, European Patent Application Publication No. 3617511, and European Patent Application Publication No. 3647599.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Patent Document 3

[0005] A scroll pump is a positive displacement pump that compresses against atmospheric pressure and can be used especially as a compressor. A scroll vacuum pump can be used to generate a vacuum in a recipient (container) connected to the gas inlet of the scroll vacuum pump.

[0006] Scroll vacuum pumps are also called spiral vacuum pumps or spiral pumping devices. The pumping principle that forms the basis of scroll vacuum pumps is basically known in the background technology, and therefore, only a brief explanation will be given below.

[0007] The pumping system of a scroll vacuum pump has two spiral cylinders, also called spirals, which are engaged internally or fitted internally, for example, Archimedes. In this case, each spiral cylinder includes at least one equidistant spiral wall having a plate-like support provided on the end face of the spiral wall, in this case the outer wall portion of the spiral cylinder, for example, two or three outermost wall portions of the spiral cylinder, may be formed by wall portions that are each at a certain distance in the circumferential direction from the center of the spiral. Even if these wall portions form an arc portion rather than strictly speaking a spiral portion, the wall portions are included in the spiral and referred to as spiral coils in the context of this disclosure.

[0008] In this case, the spiral cylinders are fitted inward and outward so that both spiral cylinders partially enclose a semi-circular or crescent-shaped volume. In this case, one of the two spirals is fixed or stationary within the pump housing, while the other spiral, along with its support, can move along a circular orbit via an eccentric portion of the drive shaft; therefore, this spiral, together with its support, is also referred to as an orbital. Thus, this movable spiral component performs what is known as a centrosymmetric oscillation, which is also called "orbital motion" or "rocking." The semi-circular volume formed between the spiral cylinders gradually moves inward as the movable spiral component orbits within the spiral, and this movement of the volume pushes the process gas to be pumped from the gas inlet located radially outward in the pump system to the gas outlet located radially inward, particularly at the center of the spiral.

[0009] The eccentric drive unit, i.e., the drive shaft having an eccentric portion, is located within the housing of the scroll vacuum pump on the side of the support away from the orbital spiral and is in many cases surrounded by a deformable sleeve, such as a corrugated bellows, which is used on the one hand to seal the drive unit from the suction area and on the other hand as a means of preventing rotation relative to the orbital. This is because, otherwise, i.e., without a means of preventing rotation, the orbital itself could rotate. To ensure this means of preventing rotation, for example, the deformable sleeve may be coupled to the support at a first end, while the second end of the deformable sleeve, opposite to the first end, may be screwed to the bottom of the housing within the housing by a plurality of mounting means.

[0010] The group of structures, including the orbital and the deformable sleeve (e.g., corrugated bellows), can be pre-assembled within the scope of the pump assembly, and thereafter, the group of structures can be inserted into the pump housing as a single unit, after which the aforementioned second end of the deformable sleeve can be screwed to the bottom of the housing using fastening means.

[0011] The following embodiments of the present invention may be combined with each other in any way, as long as they do not contradict each other. These embodiments are the developments described below, including the embodiments defined in the claims and the descriptions in the drawings, and are also referred to as embodiments or examples.

[0012] According to a first aspect of the present invention, at least two bearing locations are provided that are spaced apart from each other along the axis of rotation for rotatably supporting the drive shaft, and all bearing locations are located on the side of the drive motor closer to the eccentric portion, and / or between the front balance weight and the rear balance weight of the drive shaft.

[0013] In other words, the drive motor is located behind the bearing location, meaning there is no longer a bearing location behind the drive motor. This facilitates the assembly and replacement of the drive motor or parts of the drive motor, particularly the motor rotor or the unit including the motor rotor. This concept means that the drive motor, configured as an asynchronous motor, differs from the conventional arrangement where it is positioned between two bearing locations spaced apart along the axis of rotation.

[0014] In some developmental configurations, the eccentric portion may be coupled to the front end of the drive shaft, and the drive motor may be seated at the rear end of the drive shaft.

[0015] In some embodiments, it may be intended that the drive motor is located at least partially, preferably completely, within the pump housing. In this case, in particular, the drive motor is circumferentially surrounded by the pump housing over at least half of its axial length, preferably over its entire axial length.

[0016] In this case, it may be intended that the pump housing is closed at its rear end by a separate motor cover. If the drive motor is not entirely housed within the pump housing, the motor cover has a siding with an axial depth, which is dimensioned to accommodate the rear end of the drive motor protruding axially rearward from the pump housing.

[0017] According to a preferred embodiment of this aspect of the present invention, the electrically driven motor of the scroll vacuum pump may be an asynchronous motor.

[0018] Alternatively, the electric drive motor may be a synchronous motor.

[0019] In particular, the electric drive motor may be configured as an IPM motor (IPM = embedded permanent magnet).

[0020] It is also conceivable that the drive motor is a synchronous reluctance motor.

[0021] According to a second aspect of the present invention, a balance weight is fitted on the end face side to the rear end portion of the drive shaft.

[0022] The advantage of this arrangement of the balance weight is that it is not necessary to provide a structural space for the balance weight at another location. A further advantage is that the balance weight can assume one or more additional functions in addition to the balance adjustment of the rotating system. In particular, the balance weight fitted on the end face side can be used to clamp the rotor of the drive motor.

[0023] The balance weight that rotates during operation generates a turbulent flow of air in the motor space, which thereby also brings about a cooling effect and can at least contribute to the cooling of the drive motor. In this way, the arrangement of the cooling fins on the motor rotor can be omitted, and the structural space in the motor space thus released can be utilized for the balance weight.

[0024] Here, "fitted" does not mean that the balance weight necessarily contacts the drive shaft. The balance weight is located on the rear side of the drive shaft and is coupled to the drive shaft so as to rotate together with the drive shaft during operation.

[0025] The balance weight can be, for example, screwed onto the drive shaft.

[0026] In order to screw the balance weight onto the drive shaft, a central screw may be provided, and the body portion of the central screw coincides with the axis of rotation.

[0027] According to some embodiments, it is conceivable that the circumferential positioning of the balance weight relative to the drive shaft is set by positioning auxiliary means.

[0028] The positioning assist means includes a positioning element positioned radially away from the axis of rotation and a positioning housing for a portion of the positioning element, wherein the positioning element is positioned on the drive shaft and the positioning housing is formed on a balance weight, or vice versa. The positioning element may be configured, for example, in the shape of a pin and may extend parallel to the axis of rotation.

[0029] The positioning element may be insertable into the notch axially during assembly. The notch may be formed within the drive shaft. Alternatively, the notch may be formed on one hand by the drive shaft and on the other by the motor rotor of the drive motor or a radially inward sleeve element that is coupled to the motor rotor of the drive motor in a manner that prevents relative rotation.

[0030] In some developmental forms, the drive motor may include a radially inward motor rotor and a radially outward motor stator, wherein the motor rotor is clamped between a mounting portion and a balance weight fitted to the rear end of the drive shaft.

[0031] According to some embodiments, the drive motor may include a radially inward motor rotor, the motor rotor being fitted onto the drive shaft, particularly in a clearance fit, either directly or by a radially inward sleeve element that is coupled to the motor rotor in a way that prevents relative rotation, and a circumferentially acting shape coupling may be provided between the motor rotor and sleeve element on the one hand and the drive shaft on the other.

[0032] The shape coupling portion may be formed by a positioning element of a positioning assisting means, and the positioning assisting means sets the circumferential position of the balance weight relative to the drive shaft. The positioning element and / or positioning assisting means may be the aforementioned positioning element or positioning assisting means.

[0033] According to some embodiments, the motor rotor of the drive motor may be provided with a radially inward sleeve element, the sleeve element being coupled to the motor rotor so as not to rotate relative to it, and the motor rotor being fitted onto the drive shaft by the sleeve element, particularly in a clearance fit. The sleeve element may be the aforementioned sleeve element.

[0034] According to a third aspect of the present invention, the drive motor includes a radially inward motor rotor and a radially outward motor stator, the motor rotor being provided with a radially inward sleeve element, the sleeve element being coupled to the motor rotor so as not to rotate relative to it, and the motor rotor being fitted onto the drive shaft by the sleeve element, particularly in a clearance fit.

[0035] This sleeve element is, in particular, the aforementioned sleeve element.

[0036] This type of sleeve element allows the inner diameter of the motor rotor to be matched to the outer diameter of the corresponding portion of the drive shaft. This can be advantageous, for example, in systems with multiple scroll vacuum pumps having different motor rotor inner diameters and structures. In particular, this allows the use of a single drive shaft for different motor rotors.

[0037] The sleeve element may be constructed as a single piece or as multiple pieces.

[0038] The motor rotor and the sleeve element may be pressed against each other.

[0039] Furthermore, the sleeve element may be provided with a circumferential shoulder portion, to which the motor rotor may abut. The shoulder portion forms a receiving portion for the motor rotor, and the motor rotor may be sandwiched between the receiving portion and the fastening element. The fastening element may be fitted, for example, to the rear end of the drive shaft at its end face. In particular, the fastening element may be a balance weight, especially the aforementioned balance weight.

[0040] Furthermore, the drive shaft may be provided with a circumferential shoulder portion, upon which a sleeve element may abut. When the sleeve element is tightened during assembly, the shoulder portion of the drive shaft may form a receiving portion for the sleeve element. For example, the sleeve element may be tightened between the receiving portion and a fastening element fitted to the rear end of the drive shaft at its end face. The fastening element may be, for example, a balance weight, particularly the aforementioned balance weight.

[0041] According to a fourth aspect of the present invention relating to a scroll vacuum pump system having multiple scroll vacuum pumps with different structures, the drive shafts of the different scroll vacuum pumps have the same structure.

[0042] This can advantageously reduce the number of different parts, because the same drive shaft can be used for different scroll vacuum pumps.

[0043] For example, scroll vacuum pump systems may differ from one another in terms of the inner diameter of the motor rotor radially inward of the drive motor, and sleeve elements with different wall thicknesses are provided between the drive shaft and the motor rotor, respectively, to accommodate the different inner diameters of the drive shaft.

[0044] In this case, it may be intended that the motor rotors are each coupled to sleeve elements so as not to rotate relative to each other, and are fitted onto the drive shaft by the sleeve elements, particularly in a clearance fit.

[0045] In this case, it may be intended that the motor rotor and the sleeve element are pressed against each other.

[0046] According to a fifth aspect of the present invention, the drive shaft is provided with a front balance weight and a rear balance weight, wherein the front balance weight and the rear balance weight are different from each other in terms of the material from which they are manufactured.

[0047] The concept of using different materials for the balance weights provides an additional variable that can be changed to adapt the balance weights to the specific situation.

[0048] In scroll vacuum pump systems with different structures, for example, the size of the structural space provided for the balance weight may vary based on the size of the pump system. However, this does not necessarily mean that a relatively small structural space requires a relatively small balance mass, because the required balance mass depends on the characteristics of the entire rotating system. In other words, in this type of scroll vacuum pump system, it may be necessary to accommodate a relatively large balance mass in a relatively small structural space in order to meet the balance requirements on a case-by-case basis, while avoiding or at least reducing structural compromises.

[0049] By selecting a higher-density material for one of the balance weights, its mass can be increased without requiring a larger structural space for that balance weight.

[0050] In other words, in a favorable development, it may be intended that the material of one balance weight has a higher density than the material of the other balance weight. In particular, it may be intended that the material with the higher density is that of the front balance weight. This allows pump systems of different sizes to be compensated for by balance weights of different densities, while the dimensions of the rest of the rotating system remain the same.

[0051] In particular, it may be intended that the front balance weight be made from brass and the rear balance weight be made from steel.

[0052] According to a sixth aspect of the present invention relating to a scroll vacuum pump system having a plurality of scroll vacuum pumps with different structures, the scroll vacuum pumps differ with respect to the pump system, the drive shaft is provided with a front balance weight and a rear balance weight, and the scroll vacuum pumps differ from each other with respect to the front balance weight and / or the rear balance weight.

[0053] According to a seventh aspect of the present invention, the drive shaft is provided with at least one balance weight, the balance weight includes a plurality of balance portions that are continuous along a longitudinal axis that extends parallel to the rotation axis of the drive shaft in the assembled state, each balance portion having a partial ring shape and facing toward and surrounding the drive shaft with an opening, the balance portions differ from each other in terms of the width of the opening.

[0054] By using balance weights of different types, the structural space provided can be optimally utilized.

[0055] A balance weight having different balance parts may be a balance weight on the front side of the drive shaft, and the drive shaft may have an additional balance weight on the rear side.

[0056] In some embodiments, the opening width of the balance portion may be intended to increase toward the pump system when assembled.

[0057] Furthermore, in the assembled state, it may be intended that the balance portion is positioned at the height of the eccentric portion of the drive shaft with respect to the rotation axis of the drive shaft.

[0058] Each opening in the balance portion may be defined by a subcircle having a constant radius along the longitudinal axis in a plane perpendicular to the longitudinal axis, and the openings in the balance portions differ from one another in terms of the magnitude of their radii.

[0059] Preferably, the subcircles are arranged non-concentrically.

[0060] The subcircles each occupy angles ranging from 120° to 180°, particularly from 150° to 170°.

[0061] The balance weight may be formed as a single piece. This allows the balance weight to be manufactured from a single material workpiece by machining.

[0062] Furthermore, it can be assumed that at least two balance parts, and in particular the centers of all subcircles of all balance parts, lie in a plane that also contains the angle bisectors of the angles occupied by the subcircles.

[0063] According to an eighth aspect of the present invention, the drive shaft is provided with at least one balance weight, the balance weight includes at least one balance portion, the balance portion, in the assembled state, extends radially outward in a conical shape in a plane perpendicular to the longitudinal axis that extends parallel to the rotation axis of the drive shaft.

[0064] Regarding the mass production of scroll vacuum pumps and the resulting need for numerous corresponding balance weights, the conical shape of the balance weights allows for optimization of materials and costs. The conical shape enables a virtual rose-like arrangement of multiple balance parts around a central axis, which is equivalent to the optimal use of material in a circular, and therefore disc-shaped, workpiece. In short, it allows for a high filling density of balance weights in the workpiece. Thus, the proportion of material not used in the manufacture of balance weights can be minimized.

[0065] The longitudinal axis may coincide with the axis of rotation. In this case, the balance portion may spread out in a V-shape, thus determining an opening angle in the range of 10° to 30°, particularly in the range of 15° to 25°.

[0066] In a projection along the axis of rotation, the contour of the balance portion can be defined by two straight lines extending radially outward in a V-shape, one radially inward arc, and one radially outward arc. The radially inward arc may have a smaller radius than the radially outward arc. A hypothetical circle on which the radially inward arc is located, with its center preferably on the longitudinal axis, may be entirely within the contour of the balance portion. Alternatively or additionally, a hypothetical circle on which the radially outward arc is located may completely encompass the contour of the balance portion.

[0067] This balanced configuration can further increase the yield of materials.

[0068] According to several embodiments, the balance weight includes multiple balance portions that are continuous along a longitudinal axis extending parallel to the rotation axis of the drive shaft in the assembled state, and in projection along the longitudinal axis, the overall contour of the balance weight is formed by the contour of the balance portions that extend radially outward in a conical shape. This makes it possible to achieve that one or more additional balance portions do not impair the material yield.

[0069] At least one additional balancing portion may be provided, which is radially shortened relative to the balancing portion that extends conically outward in the radial direction, and otherwise configured to match and overlap the balancing portion that extends conically outward in the radial direction. This further simplifies the fabrication of the balance weight.

[0070] The balance weight may have a cylindrical portion, the cylindrical portion forming the end face of the balance weight along the longitudinal axis, and its central axis coinciding with the longitudinal axis. In this case, it may be intended that the thickness of the cylindrical portion, measured along the longitudinal axis, be smaller than the thickness of each balance weight.

[0071] The cylindrical portion may be used, for example, to center the balance weight during assembly. In particular, the balance weight may be inserted into the sleeve element by the cylindrical portion, especially in embodiments in which the balance weight is fitted to the rear end of the drive shaft at its end face, and the motor rotor is coupled to the sleeve element so as not to rotate relative to it, and the drive shaft is fitted by the sleeve element.

[0072] The balance weight is fitted onto the rear end of the drive shaft at its end face, with its cylindrical portion.

[0073] The balance weight may have its maximum thickness, measured along the longitudinal axis, on the extension of the drive shaft.

[0074] In particular, it may be intended that the balance weight be formed as a single piece. A one-piece construction further simplifies the manufacturing of the balance weight.

[0075] According to a ninth aspect of the present invention relating to a system comprising multiple scroll vacuum pumps of different structures, each vacuum pump includes a pump housing and an electronics housing, the pump system, drive shaft and drive motor are housed within the pump housing, the electronics housing is a separate component from the pump housing and is particularly detachably coupled to the pump housing, the electronics housing includes a housing portion and electronic equipment, the scroll vacuum pumps differ from each other with respect to the electronic equipment, and the housing portions of different scroll vacuum pumps have the same structure.

[0076] For example, different drive motors may be fitted to scroll vacuum pumps, resulting in different electronic equipment. Different drive motors may require different electronic, electrical, and / or electromechanical components, and / or different numbers of such components.

[0077] The use of one housing component for different electronic equipment is equivalent to a single modular system for different scroll vacuum pumps, which simplifies manufacturing and thus reduces costs.

[0078] The housing portion may be formed as a cast part.

[0079] The fact that different scroll vacuum pump housings have the same structure does not preclude, according to an advantageous development, that different scroll vacuum pump housings may differ from one another in terms of post-processing to accommodate their respective electronic equipment. Post-processing may involve shaping one or more through-holes to match the geometry of connectors or wiring of electronic equipment to be housed in or guided through the walls of the housing. Post-processing may also involve, for example, the complete or partial removal of walls present within the housing by milling, thereby allowing the resulting structural space to be adapted to the specific space requirements of the electronic equipment.

[0080] According to a tenth aspect of the present invention, the drive motor includes a radially inward motor rotor and a radially outward motor stator, the motor rotor having a front end face and a rear end face, and a cooling protrusion projecting axially is provided on only one of the two end faces.

[0081] This represents a departure from conventional configurations characterized by the presence of such cooling protrusions on both end faces of the motor rotor. According to this aspect of the present invention, the presence of cooling protrusions on only one end face advantageously saves axial structural space. To our surprise, it was found that sufficient cooling can be achieved even with cooling protrusions on only one side.

[0082] In some embodiments, it may be intended that at least some of the cooling protrusions be configured and positioned to act as balance weights. In this case, these balance weights may together form a balance weight acting with respect to the axis of rotation. To our surprise, it has been found that both sufficient cooling and balance effects can be achieved by positioning these protrusions on only one side.

[0083] It may be intended that a cooling protrusion is provided on the rear end face of the motor rotor. Therefore, the front end face of a motor rotor without such a protrusion may be positioned further inward than a motor rotor with such a protrusion on its front end face.

[0084] The cooling protrusions may be formed in the shape of ribs or small plates.

[0085] The cooling protrusion may be configured to have at least two different sides that differ in width from each other, such that the wider side faces at least substantially circumferentially and the narrower side faces at least substantially radially. This allows the cooling protrusion to generate relatively strong air movement as a kind of blade, i.e., to provide a relatively large “stirring or agitation effect,” which promotes heat dissipation and thus the cooling effect. The cooling protrusion may be configured to be curved with concave sides that face at least substantially circumferentially, specifically in the direction of rotation of the motor rotor. This can further increase the scraping effect of the cooling protrusion.

[0086] According to an eleventh aspect of the present invention, a fixed spiral component includes a spiral unit having a spiral wall and a spiral bottom, and a support for the spiral unit, wherein the support has an outlet channel formed therein, which leads from an inlet opening formed in the spiral bottom to an outlet of the support, and the support has at least two additional bypass channels formed therein relative to the outlet channel, each of which leads from a bypass opening formed in the spiral bottom to an outlet of the support, and at least one relief valve is disposed in each bypass channel.

[0087] It is commonly known that the pumping system of a scroll vacuum pump is equipped with a bypass channel having one or more relief valves. Overpressure, which occurs in certain pumping applications and results in particularly high pump power consumption, can be avoided in this way.

[0088] Beyond expectations, it was found that further improvements were possible, such as achieving relatively high exhaust velocities with relatively low power consumption, through multiple bypass channels, each having one or more relief valves.

[0089] In some developmental configurations, the intention may be for each bypass channel to lead to an exit channel. In this case, one or more additional exits to the bypass channels are not required.

[0090] Preferably, exactly two bypass channels are provided. It has been found that just two bypass channels are sufficient to obtain a particularly favorable ratio between power consumption and exhaust speed.

[0091] In further embodiments, it may be intended that exactly one relief valve is located in each bypass channel. It has been found that one relief valve per bypass channel is sufficient to obtain a particularly favorable ratio of power consumption to exhaust speed.

[0092] Preferably, the fixed spiral component is constructed as a single piece, and the side of the support closer to the movable spiral component forms the spiral base of the spiral unit.

[0093] In some embodiments, it may be intended that both bypass openings are offset from each other in the circumferential direction, particularly at an angle of less than 180°, preferably at an angle of 90° to 180°.

[0094] Furthermore, it may be intended that both bypass openings are located at different radial positions, or at least substantially the same radial position, with respect to the central axis of the fixed spiral component, which extends parallel to the rotation axis of the drive shaft.

[0095] Furthermore, it may be intended that the inlet opening of the outlet channel is positioned radially further inward than both bypass openings, with respect to the central axis of the fixed spiral component, which extends parallel to the rotation axis of the drive shaft. In particular, the inlet opening of the outlet channel may be positioned at least substantially on the central axis.

[0096] According to a twelfth aspect of the present invention, a fixed spiral component includes a spiral unit having a spiral wall and a spiral bottom, and a support for the spiral unit, wherein the support has an outlet channel formed therein, which leads from an inlet opening formed in the spiral bottom to an outlet of the support, and the support has at least two additional bypass channels formed therein relative to the outlet channel, the bypass channels each leading from a bypass opening formed in the spiral bottom to the outlet channel.

[0097] Because the bypass channel connects to the exit channel, there is no need to provide one or more additional exits to the bypass channel in the support structure.

[0098] The outlet of the support may include a radial outlet opening, and the outlet channel may include a channel portion that extends radially and leads to the radial outlet opening.

[0099] In this case, it may be intended that both bypass channels lead to the radial channel portion, respectively.

[0100] Alternatively, one bypass channel may be intended to lead to a radial channel portion, and the other bypass channel to a further channel portion of an outlet channel that leads from the inlet opening to the radial channel portion.

[0101] In this case, it may be intended that the further channel portion of the exit channel extends parallel to the central axis of the fixed spiral component, which extends parallel to the rotation axis of the drive shaft, and in particular is located on the central axis.

[0102] In some embodiments, it may be intended that each bypass channel is provided with at least one relief valve.

[0103] According to a thirteenth aspect of the present invention, a fixed spiral component includes a spiral unit having a spiral wall and a spiral bottom, and a support for the spiral unit, wherein the support has an outlet channel formed therein, which leads from an inlet opening formed in the spiral bottom to an outlet of the support, and the outlet of the support includes an axial outlet opening.

[0104] Axial outlet openings are particularly advantageous when the outlet is used for another function that requires additional structural space. For example, it may be desirable to incorporate additional equipment, such as a leak detector, into a scroll vacuum pump that must be connected to the outlet of the support. With a conventional radial outlet opening, this additional function requires additional radial structural space that is often not available. In contrast, axial structural space can often be realized without drawbacks. Therefore, additional equipment, such as a leak detector, can be connected to the axial outlet opening of the support without requiring additional radial structural space. This allows for a slimmer scroll vacuum pump configuration.

[0105] Therefore, in some embodiments, it may be intended that a vacuum device can be connected to or is connected to the axial outlet opening, and the vacuum device may be a leak detector in particular.

[0106] The exit channel may include a radially extending channel portion and at least one further channel portion leading from the radially extending channel portion to an axial exit opening.

[0107] In this case, the additional channel portion may extend parallel to the central axis of the fixed spiral component, which extends parallel to the axis of rotation.

[0108] In some embodiments, the support outlet may include a radial outlet opening in addition to an axial outlet opening, and both outlet openings may be selectively closable, so that the support can be operated using a single outlet opening. This allows the scroll vacuum pump to be operated flexibly. Outlet openings that are not needed at any given time may be closed, for example, with a plug. For the insertion and removal of such plugs, through-holes may be formed in peripheral components, such as a hood, through which the outlet opening at any given time or a plug that can close that outlet opening at that time can be accessed.

[0109] The outlet channel may include a radially extending channel portion, which leads to a radial outlet opening, and from a branch point located between the inlet opening and the radial outlet opening of the radial channel portion, a further channel portion leads to an axial outlet opening. In this case, it may be intended that a channel portion originating from a bypass opening formed in the spiral bottom leads to an inlet opening located between the inlet opening and the branch point leading to the axial outlet opening.

[0110] An axial exit opening may be formed in the region radially outward of the support. In particular, when r is the radius of the support, the radial position Ra of the axial exit opening satisfies Ra > 0.5 * r, especially Ra > 0.7 * r, and especially Ra > 0.8 * r.

[0111] According to a fourteenth aspect of the present invention, the movable spiral component includes a spiral unit having a spiral wall, a spiral groove defined by the spiral wall, and a spiral base forming the bottom of the spiral groove, and a support for the spiral unit that interacts with an eccentric portion of the drive shaft, and the fixed spiral component includes a spiral unit having a spiral wall, a spiral groove defined by the spiral wall, and a spiral base forming the bottom of the spiral groove, and a support for the spiral unit. The spiral groove has a groove depth measured along a central axis of the movable spiral component that extends parallel to the rotation axis of the drive shaft from the tip of the spiral wall to the bottom of the spiral, and a groove width measured perpendicular to the central axis, wherein in movable spiral components and / or fixed spiral components, the groove depth to groove width ratio is in the range of 3.7 to 4.2, particularly 3.8 to 4.1, particularly preferably 3.85 to 4.0, and / or the groove depth to groove width ratio is greater than 3.8, particularly greater than 3.85 or less than 4.0.

[0112] The dimensions of these spiral grooves allow the pump system to achieve a relatively high pumping speed.

[0113] Preferably, the groove depth-to-groove width ratio is constant throughout the spiral unit.

[0114] The groove depth may be, for example, 50 mm. Alternatively, the groove depth may be 52 mm. This allows for a higher groove depth-to-groove width ratio, for example, in the range of 4.0 to 4.2, when the groove width is the same.

[0115] According to a 15th aspect of the present invention, a movable spiral component includes a spiral unit having spiral walls, spiral grooves defined by the spiral walls, and a spiral bottom forming the bottom of the spiral groove, and a support for the spiral unit that interacts with an eccentric portion of a drive shaft, and a fixed spiral component includes a spiral unit having spiral walls and a spiral bottom, and a support for the spiral unit, wherein in the movable spiral component and / or fixed spiral component, one or more spiral walls located radially outward have a greater thickness than the spiral walls located further radially inward.

[0116] A greater thickness can provide greater stability to one or more spiral walls located radially outward. This is particularly advantageous when the spiral wall in question is interrupted circumferentially.

[0117] According to some embodiments, the support is provided with a gas inlet in a region located radially outward, in which one or more spiral walls are interrupted circumferentially, and at least one of the circumferentially interrupted spiral walls, preferably each spiral wall, may have a greater thickness.

[0118] In this case, the gas inlet may include, or be formed by, a notch that starts from the outer edge of the support and extends radially inward, preferably in a V-shape.

[0119] According to some embodiments, it may be intended that the spiral walls have greater thickness, or that each spiral wall is located on a single circle.

[0120] Furthermore, it may be intended that multiple, particularly two, radially outward spiral walls having greater thickness are located on a concentric circle and define a parallel pump structure consisting of circular or arc-shaped channels that pump in parallel and are interrupted in the region of a gas inlet formed in the support in the circumferential direction, the channels transition into a helical pump channel, the pump channel being defined by at least one spiral wall having less thickness and extending in a helical manner.

[0121] According to a sixteenth aspect of the present invention, a movable spiral component includes a spiral unit having a spiral wall, a spiral groove defined by the spiral wall, and a spiral bottom forming the bottom of the spiral groove, and a support for the spiral unit that interacts with an eccentric portion of a drive shaft, and a fixed spiral component includes a spiral unit having a spiral wall and a spiral bottom, and a support for the spiral unit, wherein the spiral wall of the movable spiral component and / or the spiral wall of the fixed spiral component are provided with a sealing element at the end away from the spiral bottom, and in at least one spiral wall, the sealing element is guided to the end of the spiral wall that reaches the gas inlet of the pump system.

[0122] For manufacturing reasons, it has been avoided to configure this type of sealing element to extend long enough to guide it to this end of the spiral wall. For example, until now, the end portions of the spiral wall, occupying an angle range of approximately 180°, have remained without sealing elements. Unexpectedly, it has been found that guiding the sealing element to the end of the spiral wall results in a significant improvement in the pumping speed of the scroll vacuum pump.

[0123] In some embodiments, the sealing element may be elongated and extend continuously from an end located radially outward to an end located radially inward.

[0124] It may be intended that the sealing element has a length exceeding 150 cm, particularly about 160 cm.

[0125] The sealing element may be made of a thermoplastic material, particularly PTFE (polytetrafluoroethylene), or may contain such a material.

[0126] Preferably, the sealing elements are received in the grooves of each spiral wall.

[0127] The gas inlet of the pump system may include a notch formed in the support of a movable spiral component. In this case, it may be intended that the notch originates from the outer edge of the support and preferably extends radially inward in a V-shape.

[0128] The present invention will be described below with reference to the drawings as an example. [Brief explanation of the drawing]

[0129] [Figure 1a] An embodiment of the scroll vacuum pump according to the present invention, having a three-phase asynchronous motor, is shown. [Figure 1b] This shows one embodiment of a scroll vacuum pump according to the present invention, having a three-phase asynchronous motor. [Figure 2a] An embodiment of the scroll vacuum pump according to the present invention, having a three-phase asynchronous motor, is shown. [Figure 2b] An embodiment of the scroll vacuum pump according to the present invention, having a three-phase asynchronous motor, is shown. [Figure 3a] An embodiment of a scroll vacuum pump according to the present invention, having an IPM motor, is shown. [Figure 3b] An embodiment of a scroll vacuum pump according to the present invention, having an IPM motor, is shown. [Figure 3c] Figures 3a and 3b show various perspectives illustrating an embodiment of the balance system according to the present invention, in conjunction with the scroll vacuum pump. [Figure 3d] Figures 3a and 3b show various perspectives illustrating an embodiment of the balance system according to the present invention, in conjunction with the scroll vacuum pump. [Figure 3e] Figures 3a and 3b show various perspectives illustrating an embodiment of the balance system according to the present invention, in conjunction with the scroll vacuum pump. [Figure 4] Figures 1a and 1b illustrate an example of a scroll vacuum pump, illustrating one aspect of the present invention that corresponds to motor rotor balancing. [Figure 5a] The electronic housing for a scroll vacuum pump according to the present invention, specifically the electronic housing for a scroll vacuum pump shown in Figures 3a and 3b, is presented. [Figure 5b] The electronic housing for a scroll vacuum pump according to the present invention is shown, specifically the electronic housing for a scroll vacuum pump shown in Figures 1a and 1b or 2a and 2b. [Figure 6a] This document illustrates various embodiments of the spiral component used to fix a scroll vacuum pump according to the present invention. [Figure 6b] This document illustrates various embodiments of the spiral component used to fix a scroll vacuum pump according to the present invention. [Figure 6c] This document illustrates various embodiments of the spiral component used to fix a scroll vacuum pump according to the present invention. [Figure 7a] Figures 6a, 6b, and 6c show an embodiment of a movable spiral component relative to a fixed spiral component. [Figure 7b] Figures 6a, 6b, and 6c show an embodiment of a movable spiral component relative to a fixed spiral component. [Figure 8a] Figures 6a, 6b, and 6c illustrate a pump system having a fixed spiral component and Figures 7a and 7b illustrate a movable spiral component. Diagrams from various viewpoints illustrate this system. [Figure 8b]Figures 6a, 6b, and 6c illustrate a pump system having a fixed spiral component and Figures 7a and 7b illustrate a movable spiral component. Diagrams from various viewpoints illustrate this system. [Figure 8c] Figures 6a, 6b, and 6c illustrate a pump system having a fixed spiral component and Figures 7a and 7b illustrate a movable spiral component. Diagrams from various viewpoints illustrate this system. [Figure 8d] Figures 6a, 6b, and 6c illustrate a pump system having a fixed spiral component and Figures 7a and 7b illustrate a movable spiral component. Diagrams from various viewpoints illustrate this system. [Figure 9] A schematic diagram illustrating the relative arrangement between a fixed spiral component and a movable spiral component in a different state of one embodiment of the scroll vacuum pump according to the present invention is shown. [Figure 10] Figures 2a and 2b or 3a and 3b show various external views of the scroll vacuum pump according to the present invention. [Modes for carrying out the invention]

[0130] The scroll vacuum pumps according to the present invention shown in Figures 1a and 1b, 2a and 2b, and 3a and 3b belong to a scroll vacuum pump system having multiple scroll vacuum pumps of various embodiments. The scroll vacuum pumps in this system differ from each other in several respects, but have the same basic structure as described below.

[0131] Each scroll vacuum pump includes a pump system having a fixed spiral component 11 and a movable spiral component 13, the fixed spiral component 11 and the movable spiral component 13 interact to produce a pumping action during operation. Furthermore, each scroll vacuum pump includes a drive shaft 16 that rotates around a rotation axis 15 during operation, having an eccentric portion 19 for driving the movable spiral component 13. In addition, each scroll vacuum pump is provided with electric drive motors 21, 23. The electric drive motors 21, 23 are used to rotate the drive shaft 17 around the rotation axis 15. The electric drive motors have a radially inward motor rotor 21 and a radially outward motor stator 23.

[0132] In each scroll vacuum pump, the drive shaft 17 is rotatably supported in the pump housing 41 at two bearing locations 25 and 27 that are spaced apart in the axial direction. The front rolling bearing 25 is configured as a fixed bearing, while the rear rolling bearing 27 is configured as a free bearing.

[0133] A unique feature of all scroll vacuum pumps in the system is the cantilever configuration, in which both bearing points 25 and 27 are located on the side of the drive motors 21 and 23 closer to the eccentric portion 19 of the drive shaft 17. Therefore, all bearing points 25 and 27 are located in front of the drive motors 21 and 23 within the pump housing 41. The eccentric portion 19 is integrally coupled to the front end of the drive shaft 17, and the drive motors 21 and 23 are seated at the rear end of the drive shaft 17.

[0134] The drive motors 21 and 23 can be fitted onto the rear end of the drive shaft 17 by this basic structure, thereby facilitating the assembly and replacement of the drive motor or parts of the drive motor.

[0135] In particular, the balancing concept for balancing the rotating system, including the drive shaft 17 and the movable spiral component 13, includes a front balance weight 29 and a rear balance weight 31 attached to the drive shaft 17 using a screw 38 in each of the scroll vacuum pumps disclosed herein. In this case, the front balance weight 29 is positioned in the region of the front end of the drive shaft 17 and the eccentric portion 19, respectively. In the pumps shown in Figures 1a and 1b, the rear balance weight 31 is located in front of the rear bearing location 27, and consequently in front of the drive motor. In the scroll vacuum pumps shown in Figures 2a and 2b and Figures 3a and 3b, according to one embodiment of the scroll vacuum pump, the rear balance weight 31 is formed by a pressure element, which is fitted face-side to the rear end of the drive shaft 17. In the scroll vacuum pump shown in Figures 1a and 1b, a pressure element 87 (Figure 1b) is provided, fitted to the rear end of the drive shaft 17 at the end face side. However, the pressure element 87 is configured rotationally symmetrically and is therefore not used as a balance weight.

[0136] The pressure elements 87 or 31 are respectively connected to the drive shaft 17 by a central screw 83. As a result, the motor rotor 21 is clamped between the rotationally symmetric pressure element 87 or the pressure element 31, which is simultaneously configured as a balance weight, and an opposing bearing, in this case, the opposing bearing is formed by a shoulder portion 17a formed on the drive shaft 17.

[0137] A further unique feature of the scroll vacuum pump system according to the present invention is that the drive shafts 17 of various scroll vacuum pumps have the same structure. Therefore, despite the various motor sizes in the system, only a single drive shaft 17 is required for the system. The drive motors of various embodiments of scroll vacuum pumps differ, in particular, with respect to the inner diameter of the radially inward motor rotor 21. This is illustrated, for example, by comparing Figure 2b and Figure 3b. To adapt the drive shaft 17 of the same structure to the different inner diameters of the motor rotor 21, sleeve elements 33 of varying wall thicknesses are provided, respectively, positioned between the drive shaft 17 and the motor rotor 21. The scroll vacuum pump in Figure 2b has such sleeve elements 33, whereas the scroll vacuum pump in Figure 3b does not. In the scroll vacuum pump with such sleeve elements 33, the sleeve elements 33 are coupled to the corresponding motor rotor 21 so as not to rotate relative to it (i.e., so as to rotate together), and in this case, this coupling between the motor rotor 21 and the sleeve elements 33 is established by applying a pressing force. As a result, the unit consisting of the motor rotor 21 and the sleeve element 33, which are pressed together, can be fitted onto the rear end of the drive shaft 17 during assembly. In this case, there is a clearance between the sleeve element 33 and the drive shaft 17.

[0138] In the aforementioned shoulder portion 17a region, a wave spring is positioned between the sleeve element 33 and the free-side bearing 27.

[0139] A pin-shaped positioning element 85 is used as a positioning assisting means for each pressure element 87 or 31, as a means to prevent rotation when tightening the central screw 83, and as a circumferentially acting shape coupling between the motor rotor 21 or sleeve element 33 and the drive shaft 17. This positioning pin 85 extends parallel to the rotation axis 15 of the drive shaft 17 and is positioned radially away from the rotation axis 15. The positioning pin 85 can be inserted into a notch in the axial direction during assembly. The notch is formed by the drive shaft 17 on one side and the motor rotor 21 or sleeve element 33 which is non-rotatably coupled to the motor rotor 21. In the assembled state, the positioning pin 85 protrudes rearward in the axial direction and is housed in a positioning housing at its rear end. The positioning housing is formed as a blind hole on the side of the pressure element 87 or 31 closer to the rear end of the drive shaft 17.

[0140] The tightening of the motor rotor 21 using the pressure element 87 or 31 is achieved by the pressure element 87 or 31 interacting with the axial rear end of the sleeve element 33 (see Figures 1a and 1b and 2a and 2b) or the motor rotor 21 (see Figures 3a and 3b).

[0141] As an assembly aid when press-fitting the sleeve element 33 into the motor rotor 21, a radial protrusion 101 is provided at the front end of the motor rotor 21 in its assembled state. The protrusion 101 is used as a mark for the assembler and thus indicates the assembly orientation of the motor rotor 21.

[0142] In the scroll vacuum pumps shown in Figures 2a and 2b and 3a and 3b, the drive motor is entirely housed within the pump housing 41; that is, the drive motor is circumferentially surrounded by the pump housing 41 over its entire axial length. At the rear end, the pump housing 41 is closed by a separate motor cover 103. A peculiarity in the scroll vacuum pumps shown in Figures 2a and 2b and 3a and 3b is that the motor cover 103 has the same structure despite the varying sizes of the motors. In the scroll vacuum pumps shown in Figures 3a and 3b, the drive motor is smaller than that of the scroll vacuum pumps shown in Figures 2a and 2b. Therefore, the pump housing 41 has a larger radial thickness in this region. For both pump structural types, a motor cover 103 of the same structure can be screwed to the rear end of the motor housing 41 at the end face.

[0143] A further unique feature is that the motor cover 103 is equipped with laser engraving (not shown). This makes it easier to create various shapes, unlike with printing.

[0144] In the scroll vacuum pump shown in Figures 1a and 1b, the drive motor is not entirely housed within the pump housing 41. The motor cover 103 has a housing space with axial depth. The axial depth is sized such that the rear end of the drive motor, which protrudes axially rearward from the pump housing 41, is housed within this housing space.

[0145] In this scroll vacuum pump, it is further intended that the motor rotor 21 is provided with cooling protrusions 47 that project axially from the rear end face. The unique feature here is that these cooling protrusions 47 are located only on the rear end face of the motor rotor 21, and the front end face of the motor rotor 21 does not have such cooling protrusions. This preferably saves axial structural space. The cooling protrusions 47 are configured to each act as a balance weight.

[0146] This aspect of the present invention will be discussed again elsewhere.

[0147] A pump system having a fixed spiral component 11 and a movable spiral component 13 is located at the front end of the pump housing 41. The fixed spiral component 11, also called the spiral housing, is screwed to the front end of the pump housing 41 at its end face and is surrounded by a hood 105, which is also attached to the pump housing 41, and a fan 95 is built into the hood 105.

[0148] A unique feature of the scroll vacuum pump system is the provision of a set of fans 95, each with different performance characteristics but identical dimensions. In addition to fans 95 supplied with a 24V voltage, fans supplied with, for example, 48V or 230V voltages may also be provided. This increases the system's variability.

[0149] The movable spiral component 13 is coupled to the eccentric portion 19 via a flange bearing 91 configured as a rolling bearing. A washer 93 is positioned between the axially movable spiral component 13 and the eccentric portion 19. A shim 94 is positioned between the circumferential shoulder of the drive shaft 17 and the flange bearing 91 at the transition to the eccentric portion 19. Precise circumferential alignment between the fixed spiral component 11 and the pump housing 41 is ensured by a positioning pin 97.

[0150] In each scroll vacuum pump of the system, the pump housing 41 is supported on a base formed by an electronics housing 43. The electronics housing 43 has a housing portion 43a, which has rubber feet 107 on its underside, which are received in recesses formed on the underside and are in a recessed position.

[0151] The electronic housings 43 of various scroll vacuum pumps differ, in particular, with respect to the housing cover 43b that forms the lower cover of the housing portion 43a. This will be discussed in more detail elsewhere.

[0152] Each electronics housing 43 contains electronic equipment 45. The electronics equipment 45 includes, in particular, electronic, electrical, and electromechanical components used for powering and controlling each scroll vacuum pump. The scroll vacuum pumps of the scroll vacuum pump system according to the present invention differ from one another in terms of the electronics equipment 45.

[0153] A unique feature of the scroll vacuum pump system according to the present invention is that the housing portion 43a of various scroll vacuum pumps have the same structure. Each housing portion 43a is constructed as a cast part. Therefore, even though the electronic equipment 45 varies for each scroll vacuum pump, only a single housing portion 43a is required.

[0154] This modular principle reduces the labor and cost involved in the manufacture of scroll vacuum pumps. The housing portion 43a differs slightly in terms of post-processing for adaptation to each electronic equipment 45. Such post-processing is used, for example, to adapt penetrations to the geometry of connectors or wiring of the electronic equipment 45 that must be housed in the housing portion or penetrate the walls of the housing portion. Furthermore, post-processing involves partially or completely removing the inner walls of each housing portion 43a by milling, thereby adapting the structural space thus provided to the housing portion 43a to the respective spatial requirements of the electronic equipment 45.

[0155] The pump housing 41 is screwed to the electronics housing 43.

[0156] In Figures 1a, 2a, and 3a, the region of the scroll vacuum pump is shown in cross-section BB, with the gas ballast valve located in the lower center. The gas ballast valve 79 is configured differently in each scroll vacuum pump. In the scroll vacuum pumps shown in Figures 1a and 1b, the gas ballast valve 79 is provided with a closing cover 81. In the scroll vacuum pumps shown in Figures 2a and 2b and 3a and 3b, the gas ballast valve 79 each has a rotary knob 82 for adjustment.

[0157] Figures 1a, 2a, and 3a show diagrams of the Kroll vacuum pump with the hood 105 in view. From the drawing in the upper right, the arrangement of the inlet flange 77 and the outlet flange 78 can be seen, respectively.

[0158] The gas to be pumped, via the inlet flange 77, reaches the pump system, which includes both spiral components 11 and 13, and is discharged via the outlet flange 78.

[0159] Both scroll vacuum pumps in Figures 1a and 1b and 2a and 2b are provided with three-phase asynchronous motors 21 and 23, respectively, to drive the drive shaft 17. The two scroll vacuum pumps differ, in particular, in their structural size. The pump systems having spiral components 11 and 13, and the asynchronous motors having rotors 21 and stators 23, have smaller diameters in the scroll vacuum pumps of Figures 1a and 1b than in the scroll vacuum pumps of Figures 2a and 2b. In this case, as already mentioned, both drive shafts 17 have the same structure and therefore the same size. In the region of the sleeve element 33, the diameter of the drive shaft 17 is 24 mm in this embodiment. In this region, sleeve elements 33 are used, as already mentioned, that are appropriately sized and pressed against the motor rotors 21, in order to match the diameter of the drive shaft 17 to the inner diameter of each of the motor rotors 21.

[0160] In the scroll vacuum pumps shown in Figures 3a and 3b, the pump system has a larger diameter than the pump system of the scroll vacuum pumps shown in Figures 1a and 1b. However, a single-phase IPM motor (IPM = embedded permanent magnet) is used as the rotational drive device for the drive shaft 17, rather than an asynchronous motor.

[0161] However, the scroll vacuum pump system according to the present invention is not limited to these electrically driven motors. For example, a synchronous reluctance motor may be provided as a rotary drive device for the drive shaft 17.

[0162] The selection of each drive motor is made in consideration of the desired performance, target energy consumption, customer requirements, and application conditions.

[0163] The modular principle established in accordance with the present invention is particularly advantageous with respect to the variability actually desired, based on its diverse adaptability.

[0164] As already mentioned, the balance system, which balances the rotating system, particularly the drive shaft 17 and the movable spiral component 13 of the pump system, has a front balance weight 29 and a rear balance weight 31, respectively. In the scroll vacuum pump shown in Figures 1a and 1b, the rear balance weight 31 is located in front of the rear bearing location 27. The pressure element 87 that clamps the motor rotor 21 is configured rotationally symmetrically here.

[0165] In the scroll vacuum pumps shown in Figures 2a and 2b and 3a and 3b, the pressure element fitted face-side onto the rear end of the drive shaft 17 simultaneously forms the rear balance weight 31. As mentioned above, in both of these scroll vacuum pumps, since the pump system has a larger diameter, the front balance weight 29 is made from a material with a higher density than the material of the rear balance weight 31, based on the fact that the structural space provided in the region of the eccentric portion 19 of the drive shaft 17 is relatively limited. Therefore, according to one aspect of the present invention, the front balance weight 29 is made from brass and the rear balance weight 31 is made from steel. In contrast, in the scroll vacuum pumps shown in Figures 1a and 1b, the two balance weights 29 and 31 are made from the same material, namely steel.

[0166] As already mentioned at the beginning, the eccentric drive unit, formed by the drive shaft 17 having an eccentric portion 19, is located within the pump housing 41 and is surrounded by a deformable sleeve in the form of a corrugated bellows 89. The corrugated bellows 89 is used, on the one hand, to seal the eccentric drive unit from the suction area of ​​the scroll vacuum pump, and on the other hand, to prevent rotation of the movable spiral component 13. For this purpose, the corrugated bellows 89 is attached to the side of the movable spiral component 13 closer to the drive unit. The rear end of the corrugated bellows 89 is attached to the housing base within the pump housing 41 by screws.

[0167] The balance concept of the scroll vacuum pump according to the present invention will be explained in detail below, specifically using the example of the scroll vacuum pump shown in Figures 3a and 3b. This explanation also applies to the scroll vacuum pump shown in Figures 2a and 2b, and the front balance weight 29 also applies to the scroll vacuum pump shown in Figures 1a and 1b.

[0168] Figure 3c shows, on the left side (cross-section BB of Figure 3b), a view of the rear balance weight 31 in a cross-section perpendicular to the rotation axis 15 of the scroll vacuum pump as shown in Figures 3a and 3b, and on the right side (cross-section AA of Figure 3b), the arrangement of the balance portion of the front balance weight 39 relative to the eccentric portion 19 of the corrugated bellows 89, flange bearing 91, and drive shaft 17.

[0169] The specific configurations of balance weights 31 and 29 will be examined in detail below with reference to Figures 3d and 3e.

[0170] The left side of Figure 3c shows that the rear balance weight expands radially outward in a conical shape. The rear balance weight is screwed to the drive shaft 17 by a central screw 83 and tightens the motor rotor 21 as described above. While maintaining the basic geometry of this rear balance weight 31, it is relatively easy to make it optimally compatible with various drive motors during manufacturing.

[0171] As shown in the drawing on the right, the balance portion of the front balance weight 29, shown in the cross-section, is formed in a partial ring shape, with its inner diameter configured to fit the outer diameter of the flange bearing 91. The structural space provided is thus optimally utilized.

[0172] In the drawing on the lower left, the rear balance weight 31 is shown in a side view. In particular, the hole 39a for the central screw 83 and the blind hole 39b for housing the positioning pin 85 are shown.

[0173] Figure 3d shows the structure of the front balance weight 39, which is constructed as a single piece and, as mentioned above, may be made from different materials, particularly brass on one side and steel on the other, representing materials of different densities.

[0174] The drawing on the right side of Figure 3d is a magnified view of a portion of Figure 3b, showing the arrangement of the front balance weight 29 in the region of the eccentric portion 19 of the drive shaft 17 and the flange bearing 91.

[0175] The balance weight 29 has three balance portions 35, which, in the assembled state, are continuous along the rotation axis 15 of the drive shaft 17. Each balance portion 35 has a partial ring shape, and in the assembled state, each balance portion faces the drive shaft 17 with an opening 37 and surrounds the drive shaft 17.

[0176] The peculiarity lies in the fact that the balance portions 35 differ from one another in terms of the width of their openings 37. This can be seen from both the perspective view in the upper left of Figure 3d and the plan view in the lower left of Figure 3d.

[0177] A further peculiarity of this front balance weight 29 is that the opening 37 of each balance portion 35 is defined by a subcircle having a constant radius along the central axis in a plane E perpendicular to the rotation axis 15 (in the assembled state). A balance portion 35 with radius R1 surrounds a portion 17b of the drive shaft 17 located immediately behind the eccentric portion 19 in the assembled state. An adjacent balance portion 35 with radius R2 surrounds the flange bearing 91. A third balance portion 35 is located in the axial region where the heads of the fixing screws for attaching the flange bearing 91 to the movable spiral component 13 are located. Thus, the radius of this balance portion 35 is significantly larger than the radii R1 and R2 of the other two balance portions.

[0178] The unique features are that the two radii R1 and R2 are not of the same size, and the two subcircles are not concentrically positioned, as can be seen particularly from the drawing on the lower left side of Figure 3d. In the embodiment shown here, R1 = 22 mm and R2 = 28.3 mm are valid, in which case the centers of the two subcircles are offset from each other, but are located within the plane E on which the angle bisectors of the angles formed by the subcircles are located. These angles are 180° each in the embodiment shown here. In this case, the center of the rear balance portion 35 in the assembled state is located on the axis of rotation 15, because this balance portion surrounds the central portion 17b of the drive shaft 17. Therefore, the other center of the subcircle with the larger radius R2 is located outside the opening 37 of the balance portion 35.

[0179] This configuration of the balance weight 29 has the advantage of allowing the center of gravity of the central balance portion 35 surrounding the flange bearing 91 to be placed further radially outward than when the two centers coincide, without increasing the outer diameter. In other words, a higher eccentric mass can be achieved with respect to this central balance portion 35 without increasing the outer dimensions of the balance weight 29.

[0180] This allows for the optimal utilization of the provided structural space, resulting in a sufficiently high level of balance.

[0181] Figure 3e shows, on the left, three views of the rear balance weight 31. These figures specifically illustrate the structure of the rear balance weight 31. The balance weight 31 is constructed as a single piece.

[0182] The balance weight 31 includes two balance portions 39 that extend radially outward in a conical shape. Each balance portion 39 extends in a V-shape, in which case the balance portion 39 determines an opening angle (apex angle) of approximately 20°.

[0183] Furthermore, the balance weight 31 includes a cylindrical portion 40 whose central axis coincides with the rotation axis 15 of the drive shaft 17 when assembled. The thickness of this cylindrical portion 40, measured along the rotation axis 15, is significantly smaller than the thickness of each balance portion 39. As can be seen, for example, in Figure 3b, when assembled, the balance weight 31 faces the rear end of the drive shaft 17 with its cylindrical portion 40. As can be seen from the example of a scroll vacuum pump in Figures 2a and 2b, the balance weight 31 is introduced into the sleeve element 33 with its cylindrical portion 40.

[0184] The balance portion 39, positioned between the cylindrical portion 40 and the outer balance portion 39, is formed to conform to the outer balance portion 39, is aligned to overlap, and is also radially shortened relative to the outer balance portion 39. Thus, both balance portions 39 spread out in a V-shape, i.e., in projection along the axis of rotation 15, the contours of both balance portions 39 are defined by two straight lines that diffuse radially outward in a V-shape. Furthermore, the contours of both balance portions 39 are defined by radially inward arcs. The radially inward arcs have a smaller radius than the respective radially outward arcs that form the radially outward boundary of each contour.

[0185] This configuration of the rear balance weight 31 allows for simple and low-cost manufacturing and easy adaptation to each drive motor. However, adaptation is not always necessary. The rear balance weight 31 may be configured to interact with both the asynchronous motor of the scroll vacuum pump shown in Figures 2a and 2b, i.e., the sleeve element 33 in particular, and the IPM motor of the scroll vacuum pump shown in Figures 3a and 3b.

[0186] In the drawing in Figure 3e, the hole 39a for the central screw 83 and the blind hole 39b for the positioning pin 85 can be further identified.

[0187] Therefore, regarding the manufacturing of the rear balance weight 31, the conical shape allows for minimization of material requirements. On the right side of Figure 3e, for clarity, a manufacturing unit 109 is shown, where multiple balance weights 31 are arranged in a rose-like manner on a single circle. This specifically demonstrates that multiple balance weights 31 can be manufactured by separation from a flat material disk and subsequent individual processing.

[0188] Figure 4 shows the rear end of the scroll vacuum pump as shown in Figures 1a and 1b, with the motor cover 103 removed. This allows us to see the rear end face of the motor rotor 21, which is surrounded by a portion of the motor stator 23.

[0189] As already mentioned elsewhere, the unique feature here is that the motor rotor 21 is provided with cooling protrusions 47 that project axially, exclusively from its rear end face. These cooling protrusions 47 are configured and positioned to act as balance weights. Therefore, the balance design of the scroll vacuum pump shown in Figures 1a and 1b includes not only the front balance weight 91 and the rear balance weight 31 positioned in front of the second bearing location 27, but also, additionally, the balance weights 47 positioned on the rear end face of the motor rotor 21, which are also used for cooling. These balance weights or cooling protrusions 47 are configured in a small plate shape, and each is positioned to face circumferentially with its wider side surface. This allows the cooling protrusions 47 to generate relatively strong air movement as blades during operation, thereby promoting heat dissipation.

[0190] Figure 5a shows the electronics housing 43 of the scroll vacuum pump according to Figures 3a and 3b. The drive motor of this scroll vacuum pump is a single-phase IPM motor with an operating voltage of 24V / DC. In this case, the electronics equipment 45 includes a Sub-D connector, a standby switch, an on / off switch, and a USB port.

[0191] Figure 5b shows the electronics housing 43 of the scroll vacuum pump according to Figures 1a and 1b and Figures 2a and 2b. Each of these scroll vacuum pumps has a three-phase asynchronous motor as its drive motor. These asynchronous motors can be operated at a maximum operating voltage of 480V / AC.

[0192] Three-phase asynchronous motors require a higher protection rating (particularly IP44) than single-phase IPM motors. A lower protection rating (particularly IP40) is sufficient for single-phase IPM motors. These different protection classes result in different designs for sealing the electronic housing 43.

[0193] In the electronics housing 43 for a scroll vacuum pump having a single-phase IPM motor shown in Figure 5a, a housing cover 43b made of, for example, aluminum, without its own seal, is sufficient as a cover. Here, a recessed arrangement is set in the housing portion 43a relative to the housing cover 43b, and in this case, a surface that is recessed inward relative to the lower side of the surrounding outer wall is used as the mounting part for the housing cover 43b, and sealing material is provided for each. Based on the recessed arrangement, the housing cover 43b is not recognizable from the side.

[0194] This is different in the case of the electronic housing 43 for a scroll vacuum pump having a three-phase asynchronous motor. Here, for example, a housing cover 43b made of aluminum is installed on the underside of the housing portion 43a. On the underside, a sealing material is provided, as shown in the recessed mounting surface of the housing portion 43a in Figure 5a, and in this case, the inside of the housing cover 43b is additionally covered entirely with a sealing material made of cellular rubber.

[0195] This enables particularly effective sealing of the electronic housing 43, thereby meeting the requirements for a higher level of protection.

[0196] As already mentioned elsewhere, the electronics housing 43 differs depending on the electronic equipment 45. For example, the electronics housing 43 shown in Figure 5a is provided with terminals for a cold equipment connector 44, to which a power supply unit for supplying voltage to the scroll vacuum pump can be connected. In contrast, the electronics housing 43 shown in Figure 5b is provided with a different power connector 44, such as a Harting-type power connector.

[0197] In addition, the electronics housing 43 shown in Figure 5b differs from the electronics housing 43 shown in Figure 5a in that it lacks a Sub-D connector, standby switch, on / off switch, and USB port. For this reason, the through-holes provided in the housing component 43a are covered with, for example, a sheet. This allows for an IP protection rating to be achieved compared to the electronics housing 43 shown in Figure 5b.

[0198] Figure 6a shows schematic diagrams of the fixed spiral component 11 of the scroll vacuum pump according to the present invention, also called the spiral housing, from various viewpoints. The three upper drawings in Figure 6a are shown enlarged in Figure 6b, and conversely, the three lower drawings in Figure 6a are shown enlarged in Figure 6c.

[0199] Correspondingly, Figure 7a shows schematic diagrams of various drawings of the movable spiral component 13, also called an orbital, relative to the spiral housing 11, as shown in Figures 6a, 6b, and 6c.

[0200] The interaction between the spiral housing 11 and the orbital 13 in the pump system of the scroll vacuum pump according to the present invention, and the arrangement of gas channels in the pump system are shown in Figures 8a, 8b, 8c, and 8d.

[0201] The fixed spiral component 11 includes a spiral unit having spiral walls 49 and a spiral base 51, and a support 53 for the spiral unit. The two radially outward spiral walls 49 are located concentrically and interrupted in the circumferential direction. This forms a parallel pump structure consisting of channels formed by corresponding spiral grooves 50 that perform parallel pumping, the channels transitioning into helical pump channels, which are formed by helically extending spiral grooves 50 and defined by helically extending spiral walls 49.

[0202] Viewed from the radially outer side, the second partially circular spiral wall 49 has a greater thickness WD2 than the spirally extending spiral wall 49 that has a thickness WD1 in the radially further inward extended portion. In this embodiment, WD2 = 3.71 mm and WD1 = 3.47 mm hold true. The stability of the circumferentially interrupted circular spiral wall 49 is increased by this increased thickness WD2.

[0203] Each spiral wall 49 is provided with an elongated sealing element 75, also called a tip seal, at the end facing away from the spiral base 51. The sealing element 75 for the spiral wall 49 located furthest outward in the radial direction is relatively long. This is because the sealing element 75 is guided further inward in the radially extending spiral wall 49, reaching the radially inward end of this spiral wall 49 located in the region of the central axis of the spiral housing 11. The unique feature of this long sealing element 75 is that it is guided radially outward in the partially circular spiral wall 49 to the end 76 of the spiral wall 49, which reaches the gas inlet 67 of the pump system (see Figures 7a and 7b).

[0204] Gas pumped radially outward from radially inward along the spiral groove 50 can reach the channel system of the fixed spiral component 11, which will be described in more detail later, through a central inlet opening 55 and two bypass openings 61a and 63a. These openings 55, 61a and 63a are formed in the spiral bottom 51, respectively. The two bypass openings 61a and 63a are offset from each other in the circumferential direction and lie on the same radius with respect to the central axis of the spiral housing 11.

[0205] These openings 55, 61a, and 63a are aligned with the openings 56a, 61c, and 63c formed on the side of the support 53 away from the spiral unit. These openings 56a, 61c, and 63c are used to house valves, which will be discussed in more detail elsewhere.

[0206] Furthermore, on the side of the support 53 away from this spiral unit, an axial outlet opening 65 is formed radially outward, and the outlet opening 65 can be selectively closed or form an axial gas outlet for the spiral housing 11 and, consequently, for the pumping system of the scroll vacuum pump.

[0207] The aforementioned opening communicates with the channel system of the spiral housing 11 shown in the left and right drawings of Figure 6c.

[0208] The central inlet opening 55 leads to an outlet channel 59, which is configured as a straight hole that opens to the radial outlet 57 of the spiral housing 11. One bypass opening 63a leads directly to this outlet channel 59. Therefore, the channel portion from there to the radial outlet 57 is not only part of the outlet channel 59, but also forms a bypass channel 63 for the gas arriving from the bypass opening 63a.

[0209] Another bypass channel 61 (see drawing on the right in Figure 6c) leads from another bypass opening 61c to an exit channel 59. This bypass channel 61 is part of a straight hole 64 that is machined to produce the bypass channel 61. This hole 64 and the exit channel 69 extend from each other at an angle corresponding to the circumferential angular displacement of the two bypass openings 61c, 63c.

[0210] A further peculiarity of the pump system according to the present invention, evident in both the spiral housing 11 and the orbital 13, lies in the relatively large groove depth NT. In the embodiments shown herein, the groove depth is 50 mm. From this, a relatively large value for the groove depth NT to groove width NB is obtained. When the groove width NB1 = 12.71 mm in the spirally extending spiral groove 50, and when the groove width NB2 = 12.92 mm in the spirally extending spiral groove 50 further outward in a circular manner, a ratio of 3.93 or 3.87 is obtained. A groove depth of 52 mm can be set alternatively. In this case, an even larger groove depth to groove width ratio is obtained.

[0211] The movable spiral component 13 shown in Figures 7a and 7b also comprises a spiral unit having spiral walls 69 and a spiral base 71, and a plate-shaped support 73 for the spiral unit. Both radially outward spiral walls 69 extend along concentric circles and are interrupted in the circumferential direction in the region of the gas inlet 67. The radially inward spiral wall 69 extends in a helical shape. The spiral walls 69 are similarly provided with sealing elements 75 (tip seals) at the ends away from the spiral base 71.

[0212] To enhance the stability of both spiral walls 69, which are positioned radially outward and interrupted circumferentially, these spiral walls 69 are constructed with a thickness WD2 greater than the thickness WD1 of the helical spiral wall 69. In this embodiment, WD2 = 3.71 mm and WD1 = 3.46 mm hold true.

[0213] As can be seen from the drawing on the right side of Figure 7b, the radially outward spiral groove 70 between both partial circular spiral walls 69 has a groove width NB2, while the spirally extending spiral groove 70 defined by the helical spiral walls 69 has a groove width NB1. In this embodiment, NB2 = 12.92 mm and NB1 = 12.58 mm hold true. From this, a relatively large groove depth NT = 50 mm yields a relatively large groove depth-to-groove width ratio, i.e., 3.87 or 3.97. Alternatively, a groove depth of 52 mm may be provided. In this case, an even larger groove depth-to-groove width ratio can be obtained.

[0214] Figure 8a shows schematic diagrams of the scroll vacuum pump system according to Figures 3a and 3b from various viewpoints, including the spiral housing in Figures 6a, 6b and 6c and the orbital in Figures 7a and 7b. The scroll vacuum pump system according to Figures 1a and 1b and Figures 2a and 2b is configured accordingly.

[0215] Figure 8b shows a magnified view of the upper left (section AA) of Figure 8a. Figure 8c shows a magnified view of the upper right (section BB) of Figure 8a. Figure 8d shows a magnified view of the lower right (section CC) of Figure 8a.

[0216] In Figure 8b, the interaction of the internally and externally fitted spiral walls 49, 69, which occupy a partially semi-circular or crescent-shaped volume, can be observed. During operation, when the exhaust valve 56 (see, e.g., Figure 8d) is opened at a sufficiently high pressure, the gas flowing in through the gas inlet 67 (see, e.g., Figure 7b), whose position is only indicated in Figure 8b, goes to the center of the pump system and then to the outlet channel 59 via the inlet opening 55. Through the outlet channel 59, the pumped gas goes to the radial outlet 57 and then to the outlet flange 78 when the axial outlet opening 65 is closed by the plug 66, as shown in Figure 8d.

[0217] As mentioned at the beginning, in an alternative configuration, the radial outlet 57 can be closed and the plug 66 can be removed, thereby forming an axial outlet from the pump system.

[0218] If overpressure occurs in the pump system during operation, the overpressure can be relieved by the relief valves 61b and 63b, thereby preventing excessively high power consumption of the scroll vacuum pump. The uniqueness of this arrangement lies in the fact that each of the multiple, in this case two, bypass channels 61 and 63 is provided with exactly one relief valve 61b or 63b. As a result, the scroll vacuum pump according to the present invention achieves a relatively high pumping speed with relatively low power consumption.

[0219] Figure 9 shows one concept, also known as a conical gap design, and in the scroll vacuum pump according to the present disclosure, this concept can be specifically provided at the point where the spiral wall 49 extending helically from a fixed spiral component interacts with the spiral wall 69 extending helically from a movable spiral component.

[0220] For each of the three states I, II, and III of the scroll vacuum pump, the progress of the movable spiral wall 69 in the pumping direction P relative to the fixed spiral wall 49 is shown in the unfolded diagram. In each case, the upper fixed spiral wall 49 is located further outward radially than the lower fixed spiral wall 49, as indicated by the arrow r (radial direction).

[0221] The numerical values ​​represent the radial distance (in mm) between opposing wall surfaces, i.e., the size of the radial gap between the wall surfaces.

[0222] In state I, the scroll vacuum pump is not operating; that is, the drive shaft is not rotating, and the orbital, and consequently the spiral wall 69 of the orbital, is stopped. The spiral housing and orbital are at ambient temperature.

[0223] The unique feature mentioned here is that, in this initial stage, the movable spiral wall 69 is positioned such that the gap between the movable spiral wall 69 and the fixed spiral wall 49 is conical in the pumping direction P.

[0224] In this case, the trajectory of the movable spiral wall 69 is selected such that, during the operation of the scroll vacuum pump, i.e., during operation, according to state II, the conicity of the gap decreases due to the deformation of the movable spiral wall 69, as can be seen from the value of the gap. Therefore, in state II, the movable spiral wall 69 extends substantially parallel to both fixed spiral walls 49. The deformation of the movable spiral wall 69 occurs as a result of high temperature and orbital motion.

[0225] According to state III, at even higher rotational speeds, for example, a drive shaft rotational speed of 1800 revolutions per minute, the movable spiral wall 69 approaches the radially outward fixed spiral wall 49 due to the effect of centrifugal force, thereby making the radial gap extremely small.

[0226] Figure 10 shows various external views of the scroll vacuum pump as shown in Figures 3a and 3b.

[0227] As already mentioned, the pump housing 41 is seated on the electronics housing 43 and is closed on the motor side by the motor cover 103 and on the opposite side by the hood 105. The outlet flange 78 and the inlet flange 77 are further illustrated.

[0228] The unique feature of this pump housing 41 is that the inlet flange 77, also called the suction flange, is offset from the highest point of the pump housing 41 in this axial position. This reduces the structural height. This is particularly advantageous when an alternative flange, not shown, formed by an angle flange is used.

[0229] Such a staggered arrangement of the inlet flange 77 is also set in the scroll vacuum pump shown in Figures 2a and 2b. [Explanation of Symbols]

[0230] 11 Fixed spiral components, spiral housing 13. Movable spiral parts, orbital 15. Axis of rotation 17 Drive shaft 17a Shoulder 19 Eccentric part 21 Motor Rotor 23 Motor Stator 25 Front bearing location (fixed bearing) 27 Rear bearing location (free-side bearing) 29 Front balance weight 31 Rear balance weight 33 Sleeve Elements 35. Balance part of the front balance weight 36 holes 37. Opening in the balance section 38 screws 39. Balance part of the rear balance weight 39a hole 39b Blind hole 40 Cylindrical section 41 Pump Housing 43 Electronics Housing 43a Housing section 43b Housing Cover 44 connectors 45 Electronics Equipment 47 Cooling protrusion 49 Spiral wall of fixed spiral component 50 spiral grooves 51 Spiral groove 53 Support 55 Inflow opening 56 Exhaust valve 56a aperture 57 Exit 59 Exit Channels 61 Bypass Channel 61a Bypass opening 61b Relief valve 61c aperture 62 stoppers 63 Bypass Channels 63a Bypass opening 63b Relief valve 63c aperture 64 holes 65 Axial exit opening 66 stoppers 67 Gas inlet of pump system 69 Spiral wall of movable spiral parts 70 spiral grooves 71 Spiral bottom 73 Support 75 Seal elements 76 End of spiral wall 77 Inlet flange 78 Outlet flange 79 Gas ballast valve 81 Gas ballast valve closing cover 82 rotary knobs 83. Center screw 85 Positioning elements, positioning pins 87 Pressure elements 89. Wavy bellows 91 Flange bearing 93 Washer 94 Sims 95 Fans 97 Positioning pins 99 Wave Spring 101 Radial intrusion as a marking 103 Motor Cover 105 Food 107 Legs 109 Manufacturing Units NT groove depth NB1 groove width NB2 groove width WD1 Spiral wall thickness WD2 Spiral Wall Thickness E plane P Pumping direction r radial direction

Claims

1. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, At least two bearing points (25, 27) are provided, spaced apart from each other along the axis of rotation (15), for rotatably supporting the drive shaft (17). A scroll vacuum pump in which all bearing locations (25, 27) are located on the side of the drive motor (21, 23) closer to the eccentric portion (19), and / or between the front balance weight (29) and the rear balance weight (31) of the drive shaft (17).

2. The scroll vacuum pump according to claim 1, wherein the eccentric portion (19) is coupled to the front end of the drive shaft (17), and the drive motors (21, 23) are seated at the rear end of the drive shaft (19).

3. The scroll vacuum pump according to claim 1 or 2, wherein the drive motors (21, 23) are at least partially, preferably completely, located within the pump housing (41), and in particular, the drive motors (21, 23) are circumferentially surrounded by the pump housing (41) over at least half of their axial length, preferably over their entire axial length.

4. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and spiral components (13) (13) that interact with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, A scroll vacuum pump in which a balance weight (31) is fitted to the rear end of the drive shaft (17) at the end face side.

5. The scroll vacuum pump according to claim 4, wherein the balance weight (31) is screwed to the drive shaft (17), and in particular, a central screw is provided for screwing the balance weight (31) to the drive shaft (17), the body of which is aligned with the axis of rotation.

6. The positioning of the circumferential balance weight (31) relative to the drive shaft (17) is set by positioning assisting means, in particular the positioning assisting means includes a positioning element (85) arranged radially apart from the rotation axis (15) and a positioning housing portion for a part of the positioning element (85), wherein the positioning element (85) is located on the drive shaft (17) and the positioning housing portion is formed on the balance weight (31), or vice versa, the scroll vacuum pump according to claim 4 or 5.

7. The scroll vacuum pump according to any one of claims 4 to 6, wherein the drive motor (21, 23) includes a radially inward motor rotor (21) and a radially outward motor stator (23), the motor rotor (21) being clamped between a receiving portion and a balance weight (31) fitted onto the rear end of the drive shaft (17).

8. A scroll vacuum pump according to any one of claims 4 to 7, wherein the drive motor includes a radially inward motor rotor (21), the motor rotor (21) is fitted onto a drive shaft (17) in particular a clearance fit, either directly or by a radially inward sleeve element (33) that is coupled to the motor rotor (21) in a way that prevents relative rotation, and a circumferentially acting shape coupling is provided between the motor rotor (21) and the sleeve element (33) on one side and the drive shaft (17) on the other side, the shape coupling being formed by a positioning element (85) of a positioning assisting means, and the circumferential positioning of the balance weight (31) relative to the drive shaft (17) is set by the positioning assisting means.

9. A scroll vacuum pump according to any one of claims 4 to 8, wherein the motor rotor (21) of the drive motor is provided with a radially inward sleeve element (33), the sleeve element (33) is coupled to the motor rotor (21) so as not to rotate relative to it, and the motor rotor (21) is fitted onto the drive shaft (17) by the sleeve element (33), particularly in a clearance fit.

10. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a movable spiral component (13) that interacts with the fixed spiral component (11) to perform a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, A scroll vacuum pump comprising a drive motor (21, 23) including a radially inward motor rotor (21) and a radially outward motor stator (23), wherein the motor rotor (21) is provided with a radially inward sleeve element (33), the sleeve element (33) is coupled to the motor rotor (21) so as not to rotate relative to it, and the motor rotor (21) is fitted onto the drive shaft (17) by the sleeve element (33), particularly in a clearance fit.

11. The scroll vacuum pump according to claim 10, wherein the sleeve element (33) is configured as a one-piece or multi-piece.

12. The scroll vacuum pump according to claim 10 or 11, wherein the motor rotor (21) and the sleeve element (33) are pressed against each other.

13. The scroll vacuum pump according to any one of claims 10 to 12, wherein the sleeve element (33) is provided with a circumferential shoulder portion, the motor rotor (21) abuts against the shoulder portion, the shoulder portion in particular forms a receiving portion for the motor rotor (21), the motor rotor (21) is sandwiched between the receiving portion and the fastening element, the fastening element is fitted to the rear end of the drive shaft (17) on the end face side, and the fastening element is a balance weight.

14. A scroll vacuum pump according to any one of claims 10 to 13, wherein the drive shaft (17) is provided with a circumferential shoulder portion (17a), the shoulder portion (17a) of the drive shaft (17) is in contact with the shoulder portion (17a), and in particular when the sleeve element (33) is tightened during assembly, the shoulder portion (17a) of the drive shaft (17) forms a receiving portion for the sleeve element (33), and in particular the sleeve element (33) is tightened between the receiving portion and a tightening element fitted to the rear end of the drive shaft (17) on the end face side, and in particular the tightening element is a balance weight.

15. In a scroll vacuum pump system having multiple scroll vacuum pumps with different structures, each scroll vacuum pump is: - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component, - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, A scroll vacuum pump system in which the drive shafts (17) of different scroll vacuum pumps have the same structure.

16. The scroll vacuum pump system according to claim 15, wherein the inner diameters of the motor rotors (21) radially inward of the drive motor differ from one another, and sleeve elements (33) having different wall thicknesses are provided between the drive shaft (17) and the motor rotor (21) to accommodate the drive shaft (17) to the different inner diameters.

17. The scroll vacuum pump system according to claim 15 or 16, wherein each motor rotor (21) is coupled to a sleeve element (33) so as not to rotate relative to it, and the sleeve elements (33) are fitted onto the drive shaft (17), particularly in a clearance fit, and in particular, the motor rotor (21) and the sleeve element (33) are pressed against each other.

18. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The drive shaft (17) is equipped with a front balance weight (29) and a rear balance weight (31). A scroll vacuum pump in which the front balance weight (29) and the rear balance weight (31) are different from each other in terms of the material they are manufactured from.

19. The scroll vacuum pump according to claim 18, wherein the material of one balance weight (29) has a higher density than the material of the other balance weight (31), and in particular, the material of the front balance weight has a higher density.

20. The scroll vacuum pump according to claim 18 or 19, wherein the front balance weight is made of brass and the rear balance weight is made of steel.

21. In a scroll vacuum pump system having multiple scroll vacuum pumps with different structures, each scroll vacuum pump is: - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The scroll vacuum pumps differ from each other with respect to the pump system (11, 13), The drive shaft (17) is equipped with a front balance weight (29) and a rear balance weight (31). A scroll vacuum pump system in which the scroll vacuum pump differs from each other with respect to the front balance weight (29) and / or rear balance weight (31).

22. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The drive shaft (17) is provided with at least one balance weight (29), The balance weight (29) includes a plurality of balance portions (35) that are continuous along a longitudinal axis that extends parallel to the rotation axis (15) of the drive shaft (17) in the assembled state, and each balance portion (35) has a partial ring shape and has an opening (37) that faces the drive shaft (17) and surrounds the drive shaft (17). A scroll vacuum pump in which the balance sections (35) differ from each other in terms of the width of the openings (37).

23. The scroll vacuum pump according to claim 22, wherein the balance weight having different balance portions (35) is a front balance weight (29) of the drive shaft (17), and the drive shaft (17) further has a rear balance weight (31).

24. The scroll vacuum pump according to claim 22 or 23, wherein, in the assembled state, the opening width of the balance portion (35) increases toward the pump system, and / or, in the assembled state, the balance portion (35) is positioned at the height of the eccentric portion (19) of the drive shaft (17) with respect to the rotation axis (15) of the drive shaft (17).

25. The scroll vacuum pump according to any one of claims 22 to 24, wherein the opening (37) of each balance portion (35) is defined by a subcircle having a constant radius along the longitudinal axis in a plane perpendicular to the longitudinal axis, and the openings (37) of the balance portions (35) differ from each other in terms of the size of their radii.

26. The scroll vacuum pump according to claim 25, wherein the subcircles are arranged non-concentrically, and / or the subcircles each occupy angles in the range of 120° to 180°, particularly in the range of 150° to 170°.

27. The scroll vacuum pump according to claim 25 or 26, wherein at least two balance parts (35), in particular the centers of all subcircles of all balance parts (35), are located in a plane in which the angle bisectors of the angles occupied by the subcircles are also located.

28. The scroll vacuum pump according to any one of claims 22 to 27, wherein the balance weight (29) is configured as a single piece.

29. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, A scroll vacuum pump comprising a drive shaft (17) provided with at least one balance weight (31), the balance weight (31) including at least one balance portion (39), the balance portion (39) extending in a conical shape radially outward in a plane perpendicular to the longitudinal axis that coincides with the rotation axis (15) of the drive shaft (17) in the assembled state.

30. The scroll vacuum pump according to claim 29, wherein the longitudinal axis coincides with the rotation axis (15), and in particular the balance portion (39) widens in a V-shape, thereby determining an opening angle in the range of 10° to 30°, particularly in the range of 15° to 25°.

31. In a projection along the axis of rotation (15), the contour of the balance portion (39) is defined by two straight lines extending radially outward in a V-shape, one radially inward arc, and one radially outward arc, wherein the radially inward arc has a smaller radius than the radially outward arc, according to claim 29 or 30.

32. The scroll vacuum pump according to any one of claims 29 to 31, wherein the balance weight (31) includes a plurality of balance portions (39) that are continuous along a longitudinal axis extending parallel to the rotation axis (15) of the drive shaft (17) when assembled, and in a projection along the longitudinal axis, the overall contour of the balance weight (31) is formed by the contours of the balance portions (39) that spread out radially outward in a conical shape.

33. A scroll vacuum pump according to any one of claims 29 to 32, wherein at least one further balancing portion (39) is provided, the further balancing portion (39) is radially shortened with respect to a balancing portion (39) that extends radially outward in a conical shape, and otherwise is configured to match and overlap with the balancing portion (39) that extends radially outward in a conical shape.

34. The cylindrical portion according to any one of claims 29 to 33, wherein the balance weight (31) has a cylindrical portion (40) which forms the end face side of the balance weight (31) along the longitudinal axis, and the central axis coincides with the longitudinal axis, and in particular the thickness of the cylindrical portion (40) measured along the longitudinal axis is smaller than the thickness of each balance weight (39).

35. The scroll vacuum pump according to claim 34, wherein the balance weight (31) is fitted to the rear end of the drive shaft (17) at its end face side by its cylindrical portion.

36. The scroll vacuum pump according to any one of claims 29 to 35, wherein the balance weight (31) has its maximum thickness, measured along the longitudinal axis, on the extension of the drive shaft (17).

37. The balance weight (31) is formed in one piece, according to any one of claims 29 to 36, in the scroll vacuum pump.

38. In a scroll vacuum pump system having multiple scroll vacuum pumps with different structures, each scroll vacuum pump is: - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, Each scroll vacuum pump includes a pump housing (41) and an electronics housing (43), the pump system (11, 13), the drive shaft (17), and the drive motors (21, 23) are housed within the pump housing (41), and the electronics housing (43) is a separate component from the pump housing (41) and is particularly detachably coupled to the pump housing. The electronics housing (43) includes a housing portion (43a) and electronics equipment (45), Scroll vacuum pumps differ from one another in terms of their electronic equipment (45), A scroll pump system in which the housing portions (43a) of different scroll vacuum pumps have the same structure.

39. The scroll vacuum pump system according to claim 38, wherein different drive motors are fitted to the scroll vacuum pump, and in particular, different electronic equipment is obtained as a result of different drive motors having different electronic, electrical and / or electromechanical components and / or different numbers of such components.

40. The scroll vacuum pump system according to claim 38 or 39, wherein the housing portion (43a) is each formed as a cast part.

41. A scroll vacuum pump system according to any one of claims 38 to 40, wherein different scroll vacuum pump housing portions (43a) differ from one another with respect to post-processing to adapt to their respective electronic equipment.

42. The scroll vacuum pump system according to claim 41, wherein the post-processing involves conforming one or more through-holes to the geometry of connectors or wiring of electronic equipment to be housed in or guided through the walls of the housing portion, and / or the post-processing involves completely or partially removing walls present within the housing portion by milling.

43. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, A scroll vacuum pump comprising a drive motor (21, 23) including a radially inward motor rotor (21) and a radially outward motor stator (23), wherein the motor rotor (21) has a front end face and a rear end face, and a cooling projection (47) projecting axially is provided on only one of the two end faces.

44. The scroll vacuum pump according to claim 43, wherein at least some of the cooling protrusions (47) each act as balance weights, and in particular, these balance weights are configured and arranged to form a balance weight that acts with respect to the axis of rotation (15).

45. A scroll vacuum pump according to claim 43 or 44, wherein a cooling projection (47) is provided on the rear end face of the motor rotor (21).

46. The cooling protrusion (47) is formed in the shape of a rib or a small plate, as described in any one of claims 43 to 45, for the scroll vacuum pump.

47. The cooling projection (47) has at least two different sides that differ in width from each other, and each cooling projection (47) is arranged such that the wider side faces at least substantially circumferentially and the narrower side faces at least substantially radially, in particular the cooling projection (47) is configured to be curved at least substantially circumferentially, specifically in the direction of rotation of the motor rotor (21), with a concave side.

48. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The fixed spiral component (11) includes a spiral unit having a spiral wall (49) and a spiral bottom (51), and a support (53) for the spiral unit. The support (53) has an outlet channel (59) formed in it, which leads from an inlet opening (55) formed in the spiral bottom (51) to an outlet (57) of the support. A scroll vacuum pump wherein the support (53) has at least two additional bypass channels (61, 63) formed in relation to the outlet channel (59), the bypass channels (61, 63) leading from bypass openings (61a, 63a) formed in the spiral bottom (51) to outlets (57, 65) of the support (53), and at least one relief valve (61b, 63b) is provided in each bypass channel (61, 63).

49. The scroll vacuum pump according to claim 48, wherein exactly two bypass channels (61, 63) are provided.

50. A scroll vacuum pump according to claim 48 or 49, wherein exactly one relief valve (61b, 63b) is provided for each bypass channel (61, 63).

51. A scroll vacuum pump according to any one of claims 48 to 50, wherein a fixed spiral component (11) is formed as a single piece, and the side of the support (53) closer to the movable spiral component (13) forms the spiral bottom (51) of the spiral unit.

52. The scroll vacuum pump according to any one of claims 48 to 51, wherein both bypass openings (61a, 63a) are offset from each other in the circumferential direction, particularly at an angle of less than 180°, preferably at an angle of 90° to 180°.

53. The scroll vacuum pump according to any one of claims 48 to 52, wherein both bypass openings (61a, 63a) are located at different radial positions or at least substantially the same radial position with respect to a central axis of a fixed spiral component (11) that extends parallel to the rotation axis (15) of the drive shaft (17).

54. The inlet opening (55) of the outlet channel (59) is located further inward radially than both bypass openings (61a, 63a) with respect to the central axis of the fixed spiral component (11) that extends parallel to the rotation axis (15) of the drive shaft (17), and in particular the inlet opening (55) of the outlet channel (59) is located at least substantially on the central axis, according to any one of claims 48 to 53.

55. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The fixed spiral component (11) includes a spiral unit having a spiral wall (49) and a spiral base (51), and a support (53) for the spiral unit. The support (53) has an outlet channel (59) formed in it, which leads from an inlet opening (55) formed in the spiral bottom (51) to an outlet (57) of the support (53). A scroll vacuum pump having at least two additional bypass channels (61, 63) formed on the support (53) relative to the outlet channel (59), the bypass channels (61, 63) each leading from bypass openings (61a, 63a) formed in the spiral bottom (51) to the outlet channel (59).

56. The scroll vacuum pump according to claim 55, wherein the outlet (57) of the support (53) includes a radial outlet opening, and the outlet channel (59) includes a channel portion that extends radially and leads to a radial outlet opening.

57. A scroll vacuum pump according to claim 55 or 56, wherein both bypass channels (61, 63) lead to radial channel portions, and / or one bypass channel leads to a radial channel portion, and the other bypass channel leads to a further channel portion of an outlet channel (59) that leads from the inlet opening (55) to the radial channel portion, in particular the further channel portion of the outlet channel (59) that extends parallel to the central axis of a fixed spiral component (11) that extends parallel to the rotation axis (15) of the drive shaft (17), and in particular is located on the central axis.

58. A scroll vacuum pump according to any one of claims 55 to 57, wherein at least one relief valve is provided in each of the bypass channels (61, 63).

59. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The fixed spiral component (11) includes a spiral unit having a spiral wall (49) and a spiral bottom (51), and a support (53) for the spiral unit. The support (53) has an outlet channel (59) formed in it, which leads from an inlet opening (55) formed in the spiral bottom (51) to an outlet (57) of the support. The outlet (57) of the support (53) includes an axial outlet opening (65) of the scroll vacuum pump.

60. A scroll vacuum pump according to claim 59, wherein a vacuum device is connectable to or connected to an axial outlet opening (65), and in particular the vacuum device is a leak detector.

61. The scroll vacuum pump according to claim 59 or 60, wherein the outlet channel (59) includes a radially extending channel portion and at least one further channel portion leading from the radially extending channel portion to an axial outlet opening (65), in particular the further channel portion extending parallel to the central axis of a fixed spiral component (11) that extends parallel to the axis of rotation (15).

62. The scroll vacuum pump according to any one of claims 59 to 61, wherein the outlet (57) of the support (53) includes a radial outlet opening in addition to the axial outlet opening (65), and both outlet openings are selectively closable, so that the support (53) can be operated using a single outlet opening.

63. The scroll vacuum pump according to any one of claims 59 to 62, wherein the outlet channel (59) includes a radially extending channel portion, the radially extending channel portion leading to a radial outlet opening, and from a branch point of the radial channel portion located between the inlet opening (55) and the radial outlet opening, a further channel portion leads to an axial outlet opening (65), and in particular, a channel portion starting from a bypass opening formed in the spiral bottom leads to an inlet location located between the inlet opening (55) and the branch point leading to the axial outlet opening (65).

64. The scroll vacuum pump according to any one of claims 59 to 63, wherein the axial outlet opening (65) is formed in a region radially outward of the support (53), and in particular, when r is the radius of the support (53), the following holds for the radial position Ra of the axial outlet opening (65): Ra > 0.5 * r, in particular Ra > 0.7 * r, and in particular Ra > 0.8 * r.

65. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The movable spiral component (13) includes a spiral unit having a spiral wall (69), a spiral groove (70) defined by the spiral wall (69), and a spiral bottom (71) that forms the bottom of the spiral groove (70), and a support (73) for the spiral unit that interacts with the eccentric portion (19) of the drive shaft (17). The fixed spiral component (11) includes a spiral unit having a spiral wall (49), a spiral groove (50) defined by the spiral wall (49), and a spiral bottom (51) that forms the bottom of the spiral groove (50), and a support (53) for the spiral unit. The spiral groove (70, 50) has a groove depth (NT) measured along the central axis of the spiral component (13, 11) that extends parallel to the rotation axis (15) of the drive shaft (17) from the tip of the spiral wall (69, 49) to the spiral bottom (71, 51), and a groove width (NB) measured perpendicular to the central axis. A scroll vacuum pump in which a movable spiral component (13) and / or a fixed spiral component (11) has a groove depth (NT) to groove width (NB) ratio in the range of 3.7 to 4.2, particularly 3.8 to 4.1, particularly preferably 3.85 to 4.0, and / or a groove depth (NT) to groove width (NB) ratio greater than 3.8, particularly greater than 3.85 or less than 4.

0.

66. The scroll vacuum pump according to claim 65, wherein the groove depth (NT) to groove width (NB) ratio is constant throughout the spiral unit.

67. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The movable spiral component (13) includes a spiral unit having a spiral wall (69), a spiral groove (70) defined by the spiral wall (69), and a spiral bottom (71) that forms the bottom of the spiral groove (70), and a support (73) for the spiral unit that interacts with the eccentric portion (19) of the drive shaft (17). The fixed spiral component (11) includes a spiral unit having a spiral wall (49) and a spiral bottom (51), and a support (53) for the spiral unit. A scroll vacuum pump comprising a movable spiral component (13) and / or a fixed spiral component (11), wherein one or more spiral walls (69, 49) located radially outward have a greater thickness (WD) than the spiral walls (69, 49) located radially inward.

68. The scroll vacuum pump according to claim 67, wherein the support (73) is provided with a gas inlet (67) in a region located radially outward, in which one or more spiral walls (69) are interrupted circumferentially, and at least one of the circumferentially interrupted spiral walls (69) has a greater thickness, and in particular the gas inlet (67) includes or is formed by a notch that starts from the outer edge of the support (73) and extends radially inward in a V-shape.

69. A scroll vacuum pump according to claim 67 or 68, wherein a spiral wall having greater thickness or each spiral wall (69, 49) is located on one circle and / or a plurality of radially outward spiral walls (69) having greater thickness, particularly two spiral walls (69) being located on concentric circles and defining a parallel pump structure consisting of circular or arc-shaped channels that pump in parallel and are interrupted in the region of a gas inlet (67) formed in the support (73), the channels transition into a helical pump channel, the pump channel being defined by at least one spiral wall having less thickness and extending in a helical manner.

70. In a scroll vacuum pump, - A pump system (11, 13) including a fixed spiral component (11) and a spiral component (13) that interacts with the fixed spiral component (11) to produce a pumping action, - A drive shaft (17) that rotates around a rotation axis (15) during operation, having an eccentric portion (19) for driving a movable spiral component (13), - Electric drive motors (21, 23) for the drive shaft (17), Equipped with, The movable spiral component (13) includes a spiral unit having a spiral wall (69), a spiral groove (70) defined by the spiral wall (69), and a spiral bottom (51) that forms the bottom of the spiral groove (70), and a support (73) for the spiral unit that interacts with the eccentric portion (19) of the drive shaft (17). The fixed spiral component (11) includes a spiral unit having a spiral wall (49) and a spiral bottom (51), and a support (53) for the spiral unit. The spiral wall of the movable spiral component (13) and / or the spiral wall of the fixed spiral component are provided with a sealing element (75) at the end facing away from the spiral bottom (51). A scroll vacuum pump in which, in at least one spiral wall, a sealing element (75) is guided to the end of the spiral wall that reaches the gas inlet of the pump system (11, 13).

71. The scroll vacuum pump according to claim 70, wherein the sealing element (75) has an elongated shape and extends continuously from an end located radially outward to an end located radially inward.

72. The scroll vacuum pump according to claim 70 or 71, wherein the sealing element (75) has a length exceeding 150 cm, particularly about 160 cm.

73. The scroll vacuum pump according to any one of claims 70 to 72, wherein the sealing element (75) is made of a thermoplastic material, in particular PTFE (polytetrafluoroethylene), or comprises such a material.

74. The scroll vacuum pump according to any one of claims 70 to 73, wherein the sealing element (75) is received in a groove in each spiral wall.

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