Imprinting systems and processes

Abstract

The present invention relates to an imprinting, particularly nanoimprinting, system comprising: at least one substantially flexible stamp configured for imprinting, particularly nanoimprinting; at least one roller configured to apply pressure to at least one substantially flexible stamp and / or at least one substrate to be imprinted; and at least one stage configured to support at least one substrate during imprinting, wherein the at least one roller and the at least one stage are displaceable from each other at least in the imprinting direction, particularly to facilitate imprinting, and include at least one connector configured to improve alignment before and during imprinting.

Description

Technical Field

[0001] The present invention relates to an imprinting system, particularly a nanoimprinting system. The present invention also relates to an imprinting process, particularly a nanoimprinting process.

Background Art

[0002] Imprinting, particularly nanoimprinting, requires very precise alignment between a stamp used for imprinting and a substrate to be imprinted in certain applications. However, since the structures are relatively small, ranging from, for example, 500 micrometers to 25 nanometers, a high level of accuracy is required for alignment. In a conventional roll-to-plate imprinting process, usually, the substrate to be imprinted is aligned with a stage on which the substrate is placed during the imprinting process. The stage may be provided with alignment markers and / or a receiving space for the substrate. Known systems have the disadvantages of taking a significant amount of time for the alignment process and / or being sensitive to alignment errors and substrate damage.

Summary of the Invention

[0003] Therefore, an object of the present invention is to provide an imprinting system and process with improved alignment required for imprinting, particularly nanoimprinting.

[0004] For this purpose, the present invention is an imprinting system, particularly for nanoimprinting, Preferably, at least one substantially flexible stamp configured for imprinting, particularly nanoimprinting, and At least one substantially flexible stamp and / or at least one roller configured to apply pressure to at least one substrate to be imprinted, A stage configured to support at least one substrate during imprinting, Equipped with, At least one roller and at least one stage are displaceable from each other, at least in the imprinting direction, in particular to facilitate imprinting. In particular, to ensure that the relative position between the flexible stamp and the stage remains constant, the system includes at least one connector attached to or attachable to at least a portion of the substantially flexible stamp and / or at least a portion of the stage, We provide the system.

[0005] The system according to the present invention relates particularly to a roll-to-plate imprinting process. The system has advantages by using at least one connector configured to be attached to at least a portion of a substantially flexible stamp and at least a portion of a stage. By using at least one connector according to the present invention, the flexible stamp and the stage are connected to each other via the connector, and the relative position of the flexible stamp and the stage is substantially constant. By using the connector according to the present invention, alignment between the flexible stamp and the stage before and during imprinting is simplified. This can be explained, at least in part, by limiting the degrees of freedom between the flexible stamp and the stage. Thus, by using the system according to the present invention, a more repeatable process is achieved. As a result, the imprinting process has higher repeatability and produces more consistent and / or uniform products. This is made possible by effectively using at least one connector that connects the flexible stamp and the stage to each other. The improved repeatability can also be explained by the system enabling the substrate to be imprinted to be placed on the stage in the same manner for subsequent imprinting processes. A further advantage of using the connector according to the present invention is improved controllability of the tension applied to the stamp during imprinting. Because the flexible stamp is mounted on a stage, the displacement of the stage, particularly with respect to the roller, also causes the displacement of the flexible stamp. Thus, the flexible stamp also displaces relative to the roller. The system according to the present invention is configured so that the flexible stamp subsequently rolls on the substrate to be imprinted. The displacement of the stage with respect to the roller can be performed, for example, in the opposite direction to the imprinting direction. Furthermore, active displacement of the roller relative to the stage, particularly in the imprinting direction, results in the roller applying pressure to the flexible stamp and / or the substrate to be imprinted.Using at least one connector enables a more accurate and stable imprinting process, improving reproducibility. By utilizing connectors to connect the stage and the flexible stamp, the imprinting process becomes easier in a relatively simple and effective way. The system according to the present invention reduces the time required for alignment, resulting in a more efficient system.

[0006] At least one flexible stamp may be directly and / or indirectly attached to at least one connector. It is beneficial that at least one flexible stamp is detachably connected to the connector. This allows for the replacement of the flexible stamp, for example, when the flexible stamp reaches the end of its lifespan. For example, the flexible stamp may comprise at least one frame, the frame of which may be connected to the connector. Using at least one frame facilitates the replacement of at least one flexible stamp, potentially improving the suitability and / or reproducibility of the imprinting results with the replaced flexible stamp. At least one connector may also be directly and / or indirectly attached to at least one stage. In further possible embodiments, at least one connector or at least a portion of at least one connector may form part of the stage. That is, at least one connector may form an integral part with the stage. This results in a relatively robust and reliable configuration. It is also possible that at least one connector, or at least a portion of at least one connector, may form an (integral) part of the flexible stamp.

[0007] At least one roller and at least one stage are displaceable relative to each other, particularly in the imprinting direction and / or the opposite direction, to facilitate imprinting. Typically, at least one roller and at least one stage are also displaceable relative to each other. For example, at least one roller and / or at least one stage may be displaceable vertically. The relative distance between at least one roller and at least one stage may be adjustable. In a preferred embodiment, at least one stage is displaceable relative to at least one roller. For example, at least one stage may be displaceable in the imprinting direction and / or the opposite direction, particularly to facilitate imprinting.

[0008] At least one roller is configured to apply pressure, in particular, to at least one flexible stamp and / or at least one substrate to be imprinted. Alternatively, at least one roller may be configured to roll at least one flexible stamp on at least one substrate to be imprinted. Thus, at least one roller is typically configured to cooperate with at least one flexible stamp configured for imprinting. A substantially flexible stamp may also be called a flexible substrate. Typically, at least one substantially flexible stamp comprises at least one textured area (pattern area). The textured area may include a texture with dimensions ranging, for example, from 500 micrometers to 25 nanometers. For example, at least the central portion of the flexible stamp may include a textured area. Flexible stamps are configured particularly for nanoimprinting lithography transfer processes. However, at least one flexible stamp may be substantially plain. This is beneficial, for example, when the flexible stamp is applied to the transfer of an object. In a preferred embodiment, at least one substantially flexible stamp comprises at least two opposing edges. For example, at least one flexible stamp may comprise two pairs of opposing edges or side edges. In a beneficial embodiment, at least one substantially flexible stamp comprises at least two substantially linear side edges. Such a configuration allows for easy positioning and / or mounting of the flexible stamp. For example, at least one substantially flexible stamp may be substantially rectangular and / or elongated in shape. Typically, the longitudinal direction of a substantially rectangular or elongated flexible stamp is oriented in the imprinting direction. For example, at least one connector may be attached to a first edge of the substantially flexible stamp.For example, at least one distal end or distal edge of a flexible stamp may be attached to a connector. Preferably, at least one connector has a width at least equal to the width of at least one substantially flexible stamp, particularly the width of at least one edge of the flexible stamp, and at least one substantially flexible stamp is attached to the connector over the entire width of at least one first edge of the substantially flexible stamp. Such embodiments are beneficial for ease of alignment and the ability to control the position of the flexible stamp during the imprinting process. The fact that the flexible stamps are attached to and connected to each other over the entire width of at least one first edge of the flexible stamp on a connector with a width at least equal to the width of the flexible stamp also allows for greater controllability of the tension and / or pressure applied to the flexible stamp during imprinting. In yet another embodiment, the system may comprise at least one or more separate connectors. A single flexible stamp can be connected to a stage via at least two connectors spaced apart from each other.

[0009] A connector connecting at least one flexible stamp to at least one stage may also be called a first connector (primary connector). The system may further include at least one second connector (secondary connector) attached to at least one substantially flexible stamp at a location away from the first connector. Preferably, at least one second connector has a width at least equal to the width of at least one substantially flexible stamp, and at least one substantially flexible stamp is attached to the second connector over the entire width of at least one second edge of the substantially flexible stamp. Preferably, the second edge substantially faces the first edge of the flexible stamp. For example, the first connector may be connected to a first distal edge or distal end of the flexible stamp, and the second connector may be connected to a second distal edge or distal end of the flexible stamp. The second connector may be substantially fixed or displaceable. The second connector may optionally be connected to at least a portion of the stage. For example, the system may comprise at least one frame, which is connected to at least one stage, at least one second connector, and / or at least one roller.

[0010] The system may include at least one first actuator (primary actuator) for adjusting the relative position of at least one roller and at least one stage. Thus, at least one roller and at least one stage may be displaceable from each other by at least one first actuator. The system, in particular the actuator, may further include at least one drive unit. The first actuator may be configured to adjust the relative distance between the stage and the roller, and / or the relative displacement in the imprinting direction to facilitate imprinting.

[0011] In a preferred embodiment of the system according to the present invention, the system comprises at least one carrier (transporter) configured to transport at least one substrate to be imprinted, and at least one stage configured to support at least one carrier and at least one substrate during imprinting. At least one stage may be configured to support at least one carrier and / or at least one substrate during imprinting. The use of a carrier eliminates the need to directly place the substrate to be imprinted on the stage. Preferably, at least a portion of the at least one carrier is substantially located between at least one roller and at least one stage, particularly at least at the imprinting position. Preferably, at least one carrier and at least one stage are displaceable from each other between at least an adjustment position and an imprinting position, wherein the adjustment position is a position in which the carrier and the stage are displaceable from each other in at least one direction different from the imprinting direction, in particular, so that the carrier and the stage are positioned apart from each other and / or so that at least one substrate provided on the carrier can be aligned with the stage, and the imprinting position is a position in which at least one carrier engages with at least one stage and / or is positioned directly on at least one stage, so that at least one substrate provided on the carrier can be imprinted. In a combination of at least one carrier configured to transport at least one substrate to be imprinted and at least one stage configured to support at least one carrier and / or at least one substrate during imprinting, the displaceability of the carrier and the stage from each other allows for substrate alignment to be facilitated in a relatively simple and effective manner. This embodiment can reduce the time required for alignment, improve the accuracy of alignment, and enable a more efficient system. Accurate alignment of the substrate with respect to both the stage and the (flexible) stamp is crucial for facilitating high-quality imprinting.The combination of the stage and carrier essentially provides a two-layer surface, which enables precise alignment of the substrate relative to the stamp. The carrier further minimizes direct contact with the substrate, particularly during loading (into) the system, during alignment of the substrate within the system, and / or during unloading (removal) the imprinted substrate from the system. Typically, in prior art systems, the substrate, especially its edges, needs to be touched, for example, via clamps, for the (un)loading and / or alignment steps. However, touching the substrate, even in an inactive area, can adversely affect the quality of the final product. This embodiment, utilizing at least one carrier, allows for loading, unloading, and alignment of the substrate without touching the edges of the substrate. This minimizes deformation and defects of the substrate due to handling. Where applicable, the at least one carrier is configured to transport at least one substrate to be imprinted, thereby primarily functioning to provide a stable base on which the substrate rests. The at least one carrier typically has at least one support surface for transporting at least one substrate. At least a portion of the carrier, particularly at least a portion of the support surface, may be substantially flat. A further function of the carrier is to allow movement of the substrate in at least one direction for alignment purposes. The carrier further provides easy loading of the substrate into the system and movement of the substrate relative to rollers and / or a flexible stamp. The function of the carrier can also be described as enabling positional adjustment of the substrate in at least the y-direction and the Rz-direction. In this case, the imprinting direction is equal to the X-direction. In this way, the carrier can accurately align the substrate in all directions without touching its edges.

[0012] The system may include at least one second actuator (secondary actuator) for adjusting the position of at least one carrier and / or at least one substrate relative to at least one stage. The system may, for example, include at least one second actuator for adjusting the position of at least one carrier relative to at least one stage. Adjustment of the position of at least one carrier relative to at least one stage by at least one second actuator is possible, in particular at least in the adjustment position. The first actuator and the second actuator (if applicable) are preferably controllable independently. At least one second actuator may be configured to adjust the position of at least one carrier relative to at least one stage between the adjustment position and the imprinting position, and / or to adjust at least one carrier relative to at least one stage to an aligned configuration in the adjustment position. At least one second actuator may also be configured to displace at least one carrier relative to at least one stage in at least one direction different from the imprinting direction, in particular in the adjustment position. At least one first actuator and / or at least one second actuator may be, for example, a DC motor, a stepping motor, a servo motor, a voice coil actuator, or a linear actuator. Depending on the selected actuator, the required resolution can be achieved using a transmission mechanism such as a gearbox, planetary gearbox, spindle, rocker mechanism, or eccentric wheel. At least one first actuator and at least one second actuator are particularly independently controllable.

[0013] The system may also include at least one control unit for controlling the mutual displacement between at least one roller and at least one stage, and / or the mutual displacement between at least one carrier and at least one stage. The at least one control unit may be configured, for example, to control the mutual displacement between at least one stage and at least one carrier between the adjustment position and the imprinting position. Alternatively, the at least one control unit may be configured to control the alignment of the carrier with respect to the stage at the adjustment position.

[0014] In a more preferred embodiment, at least a portion of at least one carrier substantially surrounds at least a portion of at least one stage, particularly at least at the imprinting position. For example, at least one carrier may substantially surround at least a portion of at least one stage along the imprinting direction. At least a portion of at least one carrier may substantially surround at least a portion of at least one stage, both at the imprinting position and the adjustment position. In a more preferred embodiment, at least one carrier comprises at least one belt, in particular an endless belt. The use of at least one belt offers several advantages. The (endless) belt allows for easy alignment of the carrier and the substrate to be imprinted at the adjustment position. Furthermore, the belt allows the system according to the present invention to load, unload, and align the substrate in an effective manner without touching the edges of the substrate. The substrate is provided on the belt in a simple manner, and subsequent displacement of the substrate can be achieved by the belt. At least one endless belt preferably surrounds at least one stage. In a preferred embodiment, at least one endless belt surrounds at least one stage such that the belt direction of the endless belt is substantially equal to or opposite to the imprinting direction. Thus, both the belt direction and the imprinting direction can be in the X direction. The belt direction is interpreted as the direction of movement of the belt. If the system includes a carrier with an endless belt, the endless belt may cooperate with at least two rollers, in particular guide rollers. For example, the endless belt may be mounted around at least two rollers spaced apart from each other. Alternatively, at least one carrier may include at least two rollers and at least one endless belt positioned on the rollers. The system may further include at least one housing. Part of the housing is connected to the (guide) rollers.This system may include at least one additional actuator for driving the belt.

[0015] At least one carrier and / or at least one substrate provided on at least one carrier may be coupled to at least one stage by air conditioning, for example, via a vacuum or partial vacuum. In a more preferred embodiment, at least a portion of the at least one carrier is air permeable. Such embodiments can further improve the efficiency and alignment accuracy of the overall imprinting process. For example, the fixing of at least one substrate on the carrier may be achieved by airflow and / or the carrier may be displaced toward the stage by airflow. The at least one carrier may have, for example, a plurality of air pockets configured to transport the substrate. In a more preferred embodiment, at least a portion of the at least one carrier has a porous structure. At least a portion of the porous structure is preferably air permeable. Preferably, at least a portion of the at least one carrier has a homogeneous structure, and / or homogeneous color, and / or homogeneous light reflectance, and / or homogeneous flatness, and / or homogeneous surface roughness, and / or homogeneous rigidity. In particular, the area on which the substrate is placed should be substantially homogeneous. Differences in the structure, and / or texture, and / or color, and / or light reflectivity of the carriers can negatively impact the overall imprinting process because the substrate is placed on the carrier during imprinting. At least a portion of at least one carrier may have a web structure and / or mesh structure. For example, at least a portion of at least one carrier may have a mesh, raster, matrix, porous structure, and / or woven structure. That is, at least a portion of at least one carrier may have a structure that is at least partially open. For example, at least one carrier may have notches, grooves, and / or through holes. Such permeable structures may be beneficial for enabling vacuum fixation of at least one substrate on the carrier. At least one carrier is preferably substantially uniform in optical and / or mechanical properties. Therefore, at least one carrier is preferably uniform in structure, color, transparency, density, thickness, and / or flexibility.

[0016] Preferably, at least one carrier is relatively thin. This makes the carrier flexible and easy to handle. Preferably, at least one carrier has a thickness less than the thickness of at least one stage. It is also possible that at least a portion of at least one carrier is air-impermeable. For example, at least a portion of the carrier surrounding the portion configured to transport at least one substrate to be imprinted may be air-impermeable.

[0017] Preferably, at least one stage is substantially uniform in terms of flatness, surface roughness, and / or local stiffness. The at least one stage may include, for example, at least one mineral and / or ceramic material. Further non-limiting examples of materials that may constitute the at least one stage include glass, granite, polymers, metal alloys, preferably aluminum or stainless steel. It is also conceivable that at least a portion of the stage includes a conductive material.

[0018] In a preferred embodiment, at least one stage is provided with at least one air passage. The at least one air passage is configured in particular for supplying and / or taking in air. It is also conceivable that at least one stage is provided with multiple air passages. The use of at least one air passage can provide substantially frictionless movement of the carrier relative to the stage, particularly by the (compressed) air supplied to the air passage. Thus, it is conceivable that the mutual displacement of at least one carrier and at least one stage from a tuned position to an imprinting position is achieved by the air supplied to at least one air passage. Furthermore, the tuned position of the carrier relative to the stage can be facilitated and / or supported by the air supplied to at least one air passage. For example, a vacuum, partial vacuum, or pressure below atmospheric pressure may be applied to the air passage so that the carrier, for example a carrier comprising a belt, is (temporarily) fixed to the stage.

[0019] In one embodiment, the substrate to be imprinted may be a flexible sheet, such as a backing sheet for a flexible stamp or a blank (unprocessed) flexible stamp. The flexible stamp included in this system may be a master stamp. The flexible substrate may be used as a flexible stamp after imprinting, or it may be included in this system after the master stamp has been optionally removed from the system.

[0020] In one embodiment, the substrate included in the system may have a texture or pattern before imprinting, or it may be a master substrate. The flexible stamp included in the system may be a stamp without texture or pattern, or a blank stamp. During imprinting, the master texture or pattern on the substrate or master substrate is transferred or imprinted onto a blank flexible stamp, forming a texture or pattern on the flexible stamp. Optionally, the master substrate may be removed from the system, and the substrate to be imprinted may be loaded into the system to form a copy of the master texture or pattern after imprinting. In this way, the resulting imprinted texture or pattern may have improved overlay accuracy with respect to the master substrate, and the accuracy of the copy of the master texture or pattern may be improved.

[0021] The system according to the present invention may include at least one pneumatic regulator configured to provide airflow between at least one stage and at least one carrier. The at least one pneumatic regulator may be configured, for example, to provide overpressure, partial vacuum, and / or vacuum between at least one stage and at least one carrier. The at least one pneumatic regulator may also provide airflow to at least one air passage of the stage, where applicable. By increasing the pressure between the carrier and the stage, they can float with very little friction between them. This is desirable when adjusting the relative positions of the carrier and the stage, i.e., when aligning a substrate. Once the desired position of the substrate is achieved, the air pressure can be reduced, preferably to less than 1 atmosphere, to increase friction and ensure that the carrier, stage, and substrate placed on the carrier are also substantially fixed during imprinting. In addition to friction between the carrier and the stage, it is desirable to be able to reduce the air pressure between the carrier and the substrate. This can suppress undesirable displacement of the substrate placed on the carrier. Conventional solutions rely solely on gravity. To reduce the air pressure between the carrier and the substrate, it is beneficial to allow air to pass through the carrier, using the same tools simultaneously that are used to reduce the air pressure between the carrier and the stage.

[0022] In any embodiment, the system may include heaters and / or coolers for heating and / or cooling at least a portion of the rollers, particularly for heating and / or cooling at least a portion of a flexible stamp, and / or heating and / or cooling at least a portion of the substrate. Heating and / or cooling at least a portion of the rollers can further optimize the imprinting process.

[0023] In a preferred embodiment, the system comprises at least two rollers. At least one roller, preferably each roller, is configured to apply pressure to at least one flexible stamp and / or at least one substrate to be imprinted. Alternatively, at least one roller, or each roller, may be configured to roll at least one substantially flexible stamp on at least one substrate to be imprinted. The system may comprise a plurality of rollers, for example, for imprinting, transfer, and / or peeling purposes.

[0024] The system may include, for example, at least one visual inspection device, such as at least one camera. The at least one visual inspection device may be configured, for example, to determine the position of at least one substrate to be imprinted. Alternatively, the at least one visual inspection device may be configured to determine the position of at least one flexible stamp and / or at least one stage. At least one control unit may be configured to control the relative displacement between at least one roller and at least one stage based on data obtained via the visual inspection means.

[0025] This system preferably includes one or more sensors. For example, it is conceivable that this system includes at least one temperature sensor, a tension sensor, a pressure sensor, a position sensor, and / or a combination thereof. In a preferred embodiment, this system includes at least one tension sensor for monitoring the tension of a substantially flexible stamp. The at least one tension sensor can be configured to measure, for example, the dynamic tension of a flexible stamp during imprinting and / or to adjust the tension of a flexible stamp during imprinting. The at least one sensor may include, for example, a load cell. The at least one load cell can be configured to measure the force and / or tension in a substantially flexible stamp. Measuring and / or controlling the tension in a substantially flexible stamp can further optimize the imprinting process. It is also possible that at least one connector includes at least one sensor and / or that at least one sensor forms part of a connector. Also, when applicable, it is possible that at least one stage and / or at least one carrier includes at least one sensor and / or that at least one sensor forms part of them.

[0026] The at least one connector is preferably configured to cooperate with different types of flexible stamps. The at least one flexible stamp is preferably detachably attached to the connector. For example, it is conceivable that the at least one connector includes at least one clamping element for clamp-connecting at least one flexible stamp. This allows a substantially flexible stamp to be easily attached, and / or removed, and / or exchanged precisely at the same position. On the other hand, the clamping element can provide sufficient strength to hold a flexible stamp in the system during imprinting.

[0027] It is beneficial for at least one connector to be at least partially adjustable. For example, at least one connector may comprise at least one adjustment element configured to adjust the position of at least one substantially flexible stamp relative to at least one stage. Thereby, the imprinting process can be more controlled and / or adapted to the stamp and / or substrate being applied.

[0028] In a further embodiment of the system according to the invention, it is conceivable that the stage is formed by the substrate on which imprinting is performed. That is, it is conceivable that the substrate on which imprinting is performed forms an integral part with the stage. As an example, a part of the substrate can be clamped to the connector.

[0029] In the context of the present invention, imprinting can also be referred to as pattern transfer. That is, the pattern may be transferred from a substantially flexible stamp to the substrate on which imprinting is performed. The substrate on which imprinting is performed can also be referred to as a receiving substrate.

[0030] The present invention also relates to a system for transferring at least one pattern, or texture, and / or at least one object, the system comprising at least one substantially flexible stamp configured to transfer at least one pattern or texture, and / or at least one object, at least one roller configured to apply pressure to at least one substantially flexible stamp and / or at least one receiving substrate, and at least one stage configured to support at least one receiving substrate during transfer. At least one roller and at least one stage are displaceable from each other, at least in the transfer direction, in particular to facilitate the transfer of at least one pattern or texture and / or at least one object to at least one receiving surface. The system comprises at least one connector, which is attached to at least a portion of a substantially flexible stamp and at least a portion of the stage, such that the relative position of the flexible stamp and the stage remains constant.

[0031] This system can be combined with any of the embodiments described in connection with the present invention. The transfer of at least one or more objects enables, for example, the transfer of an object from a donor substrate to a receiving substrate. Non-limiting examples of transferable objects in the context of the present invention include micro-elements, microprocessors, and / or micro-LEDs. The system according to the present invention relates in particular to a transfer process utilizing roll-to-plate transfer.

[0032] The present invention further relates to an assembly for imprinting, particularly nanoimprinting. The assembly is configured to cooperate with at least one flexible stamp, and in particular at least one substantially flexible stamp and / or at least one substrate to be imprinted, and comprises at least one roller configured to apply pressure to the stamp and / or at least one substrate to be imprinted, and at least one stage configured to support at least one substrate during imprinting, wherein the at least one roller and the at least one stage are displaceable from each other, at least in the imprinting direction, particularly to facilitate imprinting, and the system comprises at least one connector configured to be attached to at least a portion of the substantially flexible stamp and / or at least a portion of the stage.

[0033] Furthermore, the present invention relates to an imprinting, particularly nanoimprinting, process utilizing at least one system according to the present invention. The process includes the steps of directly or indirectly providing at least one substrate to be imprinted on at least one stage, and imprinting the substrate by applying pressure to at least one flexible stamp and / or at least one substrate to be imprinted. The process according to the present invention is also directed toward a process for transferring at least one pattern or texture and / or at least one object utilizing at least one system according to the present invention. The process includes the steps of directly or indirectly providing at least one housing substrate on at least one stage, and transferring at least one pattern or texture and / or at least one object onto the housing substrate by applying pressure to at least one flexible stamp and / or at least one housing substrate.

[0034] The process according to the present invention has the same advantages as those described for the system according to the present invention. The process can be used in combination with any of the described embodiments of the system according to the present invention. When at least one carrier is applied, at least one substrate to be imprinted may be placed on the carrier. The process may further include the step of attaching at least one connector to at least a portion of a substantially flexible stamp and / or at least a portion of a stage. In a preferred embodiment, the process includes the step of attaching at least a portion of at least one flexible stamp to at least one connector. The type of flexible stamp applied may depend on the desired imprinting or transfer process. Thus, at least one flexible stamp may be changed or replaced before or after use. The connector may be configured to allow for the replacement of the flexible stamp in an effective, reliable, and efficient manner. The method according to the present invention may (sequentially) include, for example, the steps of: providing at least one substrate to be imprinted on at least one stage; attaching at least one flexible stamp to the stage via at least one connector; and performing at least one imprinting step by applying pressure to at least one flexible stamp and / or at least one substrate to be imprinted via at least one roller. The method may also include the steps of removing the imprinted substrate from the stage, and / or removing the flexible stamp from the connector, and / or replacing the flexible stamp.The process may further include the steps of aligning the relative positions of at least one carrier and at least one stage so that the substrate is substantially aligned with respect to at least one stage, and bringing at least one carrier and at least one stage to an imprinting position where at least one carrier is directly positioned on at least one stage so that the substrate provided on at least one carrier can be imprinted.

[0035] The present invention is further clarified by the following non-limiting clauses.

[0036] 1. A system for imprinting, particularly nanoimprinting, A substantially flexible stamp configured for imprinting, particularly nanoimprinting, At least one substantially flexible stamp and / or at least one roller configured to apply pressure to at least one substrate to be imprinted, A stage configured to support at least one substrate during imprinting, Equipped with, At least one roller and at least one stage are displaceable from each other, at least in the imprinting direction, in particular to facilitate imprinting. A system comprising at least one connector attached to or attachable to at least a portion of a substantially flexible stamp and at least a portion of a stage.

[0037] 2. The system according to Clause 1, wherein at least one substantially flexible stamp comprises at least one texture area.

[0038] 3. The system according to any of the preceding clauses, wherein at least one substantially flexible stamp comprises at least two opposing side edges, preferably at least two substantially straight side edges.

[0039] 4. The system described in any of the preceding clauses, wherein at least one connector is attached to the first edge of a stamp that is substantially flexible.

[0040] 5. The system according to any of the preceding clauses, wherein at least one connector has a width at least equal to the width of at least one substantially flexible stamp, and at least one substantially flexible stamp is attached to the connector over the entire width of at least one first edge of the substantially flexible stamp.

[0041] 6. At least one connector forms part of the stage of the system described in any of the preceding clauses.

[0042] 7. The system according to any of the preceding clauses, comprising at least one second connector attached to at least one substantially flexible stamp, at a location away from a connector connecting at least a portion of the substantially flexible stamp to at least a portion of the stage.

[0043] 8. The system according to Clause 7, wherein at least one second connector has a width at least equal to the width of at least one substantially flexible stamp, and at least one substantially flexible stamp is attached to the second connector over the entire width of at least one second edge of the substantially flexible stamp.

[0044] 9. The system described in any of the preceding clauses, comprising at least one first actuator for adjusting the relative positions of at least one roller and at least one stage.

[0045] 10. The system according to any of the preceding clauses, comprising at least one carrier configured to transport at least one substrate to be imprinted, wherein at least one stage is configured to support at least one carrier and at least one substrate during imprinting, and preferably at least a portion of at least one carrier is substantially located between at least one roller and at least one stage.

[0046] 11. At least one carrier and at least one stage are displaceable from each other between at least an adjustment position and an imprinting position. The adjustment position is a position in which the carrier and the stage are displaceable from each other in at least one direction different from the imprinting direction so that at least one substrate provided on the carrier can be aligned with respect to the stage. The imprinting position is a position where at least one carrier is positioned so that at least one substrate provided on the carrier can be imprinted. The system described in Clause 10.

[0047] 12. The system according to clause 10 or clause 11, comprising at least one second actuator for adjusting the position of at least one carrier relative to at least one stage.

[0048] 13. The system according to any of the preceding clauses, wherein at least one stage comprises at least one air passage for supplying and / or taking in air.

[0049] 14. The system described in any of the preceding clauses, comprising at least one heater for heating and / or cooling at least a portion of the roller.

[0050] 15. A system as described in any of the preceding clauses, comprising at least one visual inspection device.

[0051] 16. The system described in any of the preceding clauses, comprising at least one tension sensor for monitoring the tension of a substantially flexible stamp.

[0052] 17. The system according to any of the preceding clauses, wherein at least one connector comprises at least one clamping element for clamping connection of at least one flexible stamp.

[0053] 18. The system according to any of the preceding clauses, wherein at least one connector comprises at least one adjustment element configured to adjust the position of at least one substantially flexible stamp with respect to at least one stage.

[0054] 19. An imprinting, particularly nanoimprinting, process utilizing at least one system described in any of the preceding clauses, comprising the steps of directly or indirectly providing at least one substrate to be imprinted onto at least one stage, and imprinting the substrate by applying pressure to at least one flexible stamp and / or at least one substrate to be imprinted.

[0055] 20. The process according to Clause 19, comprising the step of attaching at least one connector to at least a portion of a substantially flexible stamp and / or at least a portion of a stage.

[0056] 21. The process according to clause 19 or 20, comprising the step of attaching at least a portion of at least one flexible stamp to at least one connector. [Brief explanation of the drawing]

[0057] [Figure 1a] This figure shows an embodiment of the imprinting system according to the present invention. [Figure 1b] This figure shows an embodiment of the imprinting system according to the present invention. [Modes for carrying out the invention]

[0058] The present invention is further illustrated by non-limiting exemplary embodiments shown in the following drawings.

[0059] Figures 1a and 1b show embodiments of the imprinting system according to the present invention.

[0060] In these drawings, similar reference numbers correspond to similar or equivalent elements or features.

[0061] Figures 1a and 1b show schematic diagrams of an imprinting, particularly nanoimprinting, system 100 according to the present invention. Figure 1a shows a side view, and Figure 1b shows a top view. The system 100 includes a substantially flexible stamp 101 configured for imprinting, particularly nanoimprinting. The system 100 further includes a roller 102 configured to roll the flexible stamp 101 over a substrate 105 to be imprinted, and a stage 103 configured to support the substrate 105 during imprinting. The roller 102 and the stage 103 are displaceable relative to each other in the imprinting direction (x direction) to facilitate imprinting. The system 100 further includes connectors 104 attached to a portion of the flexible stamp 101 and a portion of the stage 103. In the illustrated embodiment, the system 100 further includes a carrier 106 configured to transport the substrate 105 to be imprinted. In the illustrated embodiment, the stage 103 is configured to support the carrier 106 during imprinting. The carrier 106 is substantially positioned between the roller 102 and the stage 103, at least in the imprinting position. The carrier 106 and the stage 103 are displaceable from each other at least between the adjustment position and the imprinting position. The adjustment position is a position in which the carrier 106 and the stage 103 are displaceable from each other in at least one direction different from the imprinting direction, so that the carrier 106 and the stage 103 are positioned apart from each other and the substrate 105 provided on the carrier 106 can be aligned with the stage 103. The imprinting position is a position in which the carrier 106 is positioned directly on the stage 103 so that the substrate 105 provided on the carrier 106 can be imprinted. In the schematic diagram shown, the carrier 106 and the stage 103 are in the adjustment position. The system 100 includes a first actuator 107 for adjusting the relative position of the roller 102 and the stage 103, and a second actuator 108 for adjusting the position of the carrier 106 relative to the stage 103.In the illustrated embodiment, the flexible stamp 101 is substantially rectangular, and the connector 104 is attached to the first edge of the flexible stamp 101. The connector 104 has a width substantially equal to the width of the flexible stamp 101. The flexible stamp 101 is attached to the connector 104 over substantially the entire width of its first edge. Further sides of the flexible stamp 101 are attached to a second connector 109. It is conceivable that the connectors 104,109 each comprise at least one clamping element 113. The (first) connector 104 comprises an adjustment element 110 configured to adjust the position of the flexible stamp 101 relative to the stage 103. The system 100 also comprises sensors 112, in particular a tension sensor 112 for monitoring the tension of the substantially flexible stamp 101.

[0062] The present invention is not limited to the exemplary embodiments illustrated and described herein, and countless modifications are possible within the framework of the appended claims, which will be obvious to those skilled in the art. In this case, it is conceivable that different inventive concepts and / or technical means of the above-described modified embodiments can be combined in whole or in part without departing from the spirit of the invention as described in the appended claims.

[0063] As used in this patent document, the verb "comprise" and its conjugations are understood to include not only "to include," but also "to contain," "to substantially contain," "to be formed by," and their conjugations.

Claims

1. A system for imprinting, particularly for nanoimprinting, A substantially flexible stamp configured for imprinting, particularly nanoimprinting, At least one substantially flexible stamp and / or at least one roller configured to apply pressure to at least one substrate to be imprinted, A carrier configured to transport at least one substrate to be imprinted, A stage configured to support at least one carrier and / or at least one substrate during imprinting, Equipped with, At least one roller and at least one stage are displaceable relative to each other, at least in the imprinting direction, in particular to facilitate imprinting. The system comprises at least one connector attached to or attachable to at least a portion of a substantially flexible stamp and at least a portion of a stage. At least a portion of at least one carrier is substantially located between at least one roller and at least one stage, At least one carrier and at least one stage are displaceable from each other between at least an adjustment position and an imprinting position. The adjustment position is a position in which the carrier and the stage are displaceable from each other in at least one direction different from the imprinting direction, so that at least one substrate provided on the carrier can be aligned with respect to the stage. The imprinting position is a position where at least one carrier is positioned so that at least one substrate provided on the carrier can be imprinted. system.

2. The system according to claim 1, wherein at least one substantially flexible stamp comprises at least one texture region.

3. The system according to any of the preceding claims, wherein at least one substantially flexible stamp comprises at least two opposing side edges, preferably at least two substantially straight side edges.

4. The system according to any of the preceding claims, wherein at least one connector is attached to the first edge of a substantially flexible stamp.

5. The system according to any of the preceding claims, wherein at least one connector has a width at least equal to the width of at least one substantially flexible stamp, and at least one substantially flexible stamp is attached to the connector over the entire width of at least one first edge of the substantially flexible stamp.

6. The system according to any of the preceding claims, wherein at least one connector forms part of the stage.

7. The system according to any of the preceding claims, comprising at least one second connector attached to at least one substantially flexible stamp at a position away from a connector connecting at least a portion of the substantially flexible stamp to at least a portion of the stage.

8. The system according to claim 7, wherein at least one second connector has a width at least equal to the width of at least one substantially flexible stamp, and at least one substantially flexible stamp is attached to the second connector over the entire width of at least one second edge of the substantially flexible stamp.

9. The system according to any of the preceding claims, comprising at least one first actuator for adjusting the relative position of at least one roller and at least one stage.

10. The system according to any of the preceding claims, wherein at least a portion of at least one carrier substantially encloses at least a portion of at least one stage.

11. The system according to any of the preceding claims, wherein at least one carrier comprises at least one belt, in particular an endless belt mounted around at least two guide rollers spaced apart from one another.

12. The system according to any of the preceding claims, further comprising at least one second actuator for adjusting the position of at least one carrier relative to at least one stage.

13. The system according to any of the preceding claims, wherein at least one stage comprises at least one air passage for supplying and / or taking in air.

14. The system according to any of the preceding claims, comprising at least one heater for heating and / or cooling at least a portion of the roller.

15. The system according to any of the preceding claims, comprising at least one visual inspection device.

16. The system according to any of the preceding claims, comprising at least one tension sensor for monitoring the tension of a substantially flexible stamp.

17. The system according to any of the preceding claims, wherein at least one connector comprises at least one clamping element for clamping connection of at least one flexible stamp.

18. The system according to any of the preceding claims, wherein at least one connector comprises at least one adjustment element configured to adjust the position of at least one substantially flexible stamp with respect to at least one stage.

19. An imprinting, particularly nanoimprinting, process utilizing at least one system described in any of the preceding claims, comprising the steps of directly or indirectly providing at least one substrate to be imprinted on at least one stage, and imprinting the substrate by applying pressure to at least one flexible stamp and / or at least one substrate to be imprinted.

20. The process according to claim 19, comprising the step of attaching at least one connector to at least a portion of a substantially flexible stamp and / or at least a portion of a stage.

21. The process according to claim 19 or 20, comprising the step of attaching at least a portion of at least one flexible stamp to at least one connector.

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