Imprinting apparatus, nanoimprint apparatus

Abstract

The application provides an imprinting processing device and a nano-imprint equipment. The imprinting processing device comprises an imprinting module, an imprinting platform, a moving assembly and a positioning assembly. The moving assembly comprises a first driving assembly and a second driving assembly. The first driving assembly is used to drive the imprinting platform to move in a first direction. The second driving assembly is used to drive the imprinting platform to move in a second direction. The positioning assembly comprises an image acquisition element and a controller. The image acquisition element is used to acquire image information of the imprinting module. The controller is used to receive the image information and calculate first position information. The controller is also used to control the moving assembly according to the first position information. The moving assembly can realize large-range movement and small-range accurate positioning. The positioning assembly can meet the positioning requirement of the micron-level error and avoid the complicated operation of the precise optical positioning system. The two cooperate with each other to improve the positioning accuracy of the template of the imprinting module and the workpiece on the imprinting platform.

Description

Technical Field

[0001] This application belongs to the field of embossing manufacturing technology, specifically relating to embossing processing equipment and nanoimprinting equipment. Background Technology

[0002] Nanoimprint lithography is a micro-nano fabrication technology that applies uniform mechanical force between a mask and an imprinting adhesive to tightly bond a template with a nanostructure to the imprinting adhesive. The imprinting adhesive, which is in a liquid or viscous state, gradually fills the micro-nano structures on the template. Then, through appropriate treatment, the imprinting adhesive is cured and the template is separated from the imprinting adhesive, so that the nano-patterns on the template are replicated proportionally onto the imprinting adhesive.

[0003] Nanoimprint lithography often requires the coordinated operation of multiple modules to complete functions such as wafer transport, coating, and imprinting. This involves the issues of imprinting platform movement and template positioning, especially template positioning. Since nanoimprint lithography involves microstructures at the micrometer or even nanometer scale, extremely high positioning accuracy is required; otherwise, inaccurate positioning will affect subsequent processes. However, in related technologies, the positioning accuracy of imprinting equipment for the template and substrate is relatively low. Utility Model Content

[0004] In view of this, the first aspect of this application provides an embossing apparatus, the embossing apparatus comprising:

[0005] The embossing module is used to hold the template and also to process the workpiece.

[0006] An embossing platform is used to hold the workpiece to be processed;

[0007] A movable component is connected to the imprinting platform and disposed on the side of the imprinting platform away from the imprinting module. The movable component includes a first drive group and a second drive group arranged perpendicularly to each other. The first drive group is used to drive the imprinting platform to move along a first direction, and the second drive group is used to drive the imprinting platform to move along a second direction perpendicular to the first direction.

[0008] The positioning component includes a base, an image acquisition unit disposed on the base, and a controller electrically connected to the image acquisition unit. The base is connected to the imprinting platform and disposed on the side of the imprinting platform. The imprinting platform is also used to drive the base to move. The image acquisition unit is used to acquire image information of the imprinting module. The controller is used to receive the image information and calculate first position information, and is also used to control the moving component according to the first position information.

[0009] The first drive group includes a first motor and a first grating measuring device. The first grating measuring device is disposed inside the first motor. The first motor is used to drive the imprinting platform to move along the first direction. The first grating measuring device is used to measure the displacement of the first motor.

[0010] The second drive group includes a second motor and a second grating measuring device. The second grating measuring device is located inside the second motor. The second motor is used to drive the imprinting platform to move along the second direction. The second grating measuring device is used to measure the displacement of the second motor.

[0011] The first drive group further includes a first guide rail and a first slider that are slidably connected. The first motor is driven to connect the first slider, and the first slider is connected to the imprinting platform. The first motor drives the first slider to slide relative to the first guide rail, thereby moving the imprinting platform.

[0012] The second drive group also includes a second guide rail and a second slider that are slidably connected. The first guide rail and the second guide rail are arranged perpendicular to each other. The second motor is driven to connect the second slider. The second slider is connected to the imprinting platform. The second motor drives the second slider to slide relative to the second guide rail, thereby moving the imprinting platform.

[0013] The moving component further includes a plurality of limiting blocks, at least two of the limiting blocks are arranged at intervals along the first direction, the first slider is disposed between the two limiting blocks, and the limiting blocks are used to abut against the first slider;

[0014] And / or, at least two of the limiting blocks are arranged at intervals along the second direction, and the second slider is disposed between the two limiting blocks, the limiting blocks being used to abut against the second slider.

[0015] The image acquisition component and the imprinting platform are arranged in the same direction as the first direction, and the base and the imprinting platform are both located on the side of the second drive group away from the first drive group.

[0016] The positioning component further includes an adjustment bracket, which is located on the side of the base facing the imprinting module. The image acquisition component is drivenly connected to the adjustment bracket and can move relative to the adjustment bracket toward or away from the imprinting module.

[0017] The adjusting bracket includes a third guide rail extending along the arrangement direction from the base to the imprinting module, and a third slider slidably connected to the third guide rail. The image acquisition component is disposed on the third slider, and the third slider can slide relative to the third guide rail to drive the image acquisition component to move.

[0018] The imprinting platform includes a platform body and a third drive group connected to the platform body. The third drive group is used to drive the platform body to move along a third direction, which is perpendicular to the first direction and the second direction. The third direction is the same as the arrangement direction of the moving components to the imprinting module.

[0019] The embossing platform further includes a sensor electrically connected to the controller. The sensor is used to acquire second position information of the platform body. The controller is used to receive the second position information and determine whether the workpiece to be processed placed on the platform body corresponds to the template of the embossing module based on the second position information. The controller is also used to control the third drive group to move the platform body when it is determined that the workpiece to be processed placed on the platform body corresponds to the template of the embossing module.

[0020] A second aspect of this application provides a nanoimprinting apparatus, which includes a loading and unloading device, a dispensing device, and an imprinting processing device as described above. The loading and unloading device is used to provide a workpiece to be processed and to collect the processed workpiece. The dispensing device is used to provide an adhesive. The imprinting processing device is used to process the workpiece.

[0021] The embossing processing apparatus and nanoimprinting equipment provided in this application achieve precise positioning of the embossing platform and embossing module by setting a moving component and a positioning component to cooperate with each other. Specifically, the moving component can drive the embossing platform to move along a first direction or a second direction, which can achieve both large-range movement and small-range precise positioning, satisfying the needs of moving the embossing platform between other processing devices and aligning the template on the embossing module. The positioning component uses image calibration for positioning, which can meet the positioning requirements of micron-level error and avoid the cumbersome operation of precision optical positioning systems, thereby improving the positioning accuracy of the template of the embossing module and the workpiece to be processed on the embossing platform, and thus improving the processing effect of embossing. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the embodiments of this application will be described below.

[0023] Figure 1 This is a schematic diagram of the embossing apparatus provided in one embodiment of this application.

[0024] Figure 2 This is a partial structural schematic diagram of an embossing apparatus provided in one embodiment of this application.

[0025] Figure 3 This is a schematic diagram of the positioning component positioning and imprinting platform provided in one embodiment of this application.

[0026] Figure 4 This is a schematic diagram of the structure of the adjustment bracket provided in one embodiment of this application.

[0027] Labeling description: Imprinting processing device 1, Imprinting module 10, Imprinting platform 20, Moving component 30, First drive group 31, First guide rail 311, First slider 312, Second drive group 32, Second guide rail 321, Second slider 322, Limiting block 33, Positioning component 40, Base 41, Image acquisition component 42, Adjustment bracket 43, Third guide rail 431, Third slider 432. Detailed Implementation

[0028] The following are preferred embodiments of this application. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of this application, and these improvements and modifications are also considered to be within the scope of protection of this application.

[0029] Before introducing the technical solution of this application, let's go over the technical issues in related technologies in detail.

[0030] Nanoimprinting is a micro-nano fabrication technology that applies uniform mechanical force between a template and an imprinting adhesive to tightly bond the template with a nanostructure to the imprinting adhesive. The imprinting adhesive, which is in a liquid or viscous state, gradually fills the micro-nano structures on the template. Then, through appropriate treatment, the imprinting adhesive is cured and the template and imprinting adhesive are separated, so that the nano-patterns on the template are replicated proportionally on the imprinting adhesive.

[0031] Nanoimprinting has the advantages of high efficiency, low cost and high resolution, but its process is relatively complicated. Similar to photolithography, it requires first coating a layer of imprinting adhesive of a few micrometers to a few nanometers on the substrate, called a pattern transfer layer. Then, according to the template structure and the characteristics of the corresponding imprinting adhesive, a specific pressure is applied and held for a period of time. During this period, it is cured by heating or ultraviolet irradiation, and finally demolding completes the entire process.

[0032] In automating the above process, multiple modules often need to work together to complete functions such as wafer transport, coating, and imprinting. This involves the movement of the imprinting platform and the positioning of the template, especially the template positioning. Since nanoimprinting involves microstructures at the micron or even nanometer level, the positioning accuracy is very high. Otherwise, inaccurate positioning will affect the next process, such as overlay.

[0033] The current main equipment solution uses precision moving parts for movement and positioning, and relies on sensors to provide feedback on the actual position. In the first embodiment of the related technology, the locking and unlocking of a wedge slider, in conjunction with a piezoelectric actuator and multiple driving components, achieves both coarse and fine adjustment states, and then feedback is provided by a distance sensor and a laser rangefinder. However, in this solution, the wedge slider may cause mechanical errors, and stepless speed regulation cannot be achieved.

[0034] In the second embodiment of the related technology, the mobile stage is connected to the base through a piezoelectric actuator. The movement of the platform is achieved by the cooperation of piezoelectric actuators around the platform. The actual output is measured by a position sensor. However, this solution only allows for micro-motion and cannot accommodate large-scale movement.

[0035] In the third embodiment of the related technology, a two-stage adjustment of coarse stage and fine stage is set, which are driven by stepper motor and piezoelectric ceramic tube respectively. In terms of feedback, tiny marks are made on the template so that moiré stripes are generated under laser irradiation. The light intensity is then detected by a photodetector, and the positioning is achieved according to the corresponding position based on the light intensity. However, the positioning method of this scheme is relatively cumbersome, as it requires making specific marks on the template and establishing the correspondence between light intensity and position.

[0036] In view of this, in order to solve the above problems, please refer to the following: Figures 1-2 This embodiment provides an embossing processing apparatus 1, which includes an embossing module 10, an embossing platform 20, a moving component 30, and a positioning component 40. The embossing module 10 is used to carry a template and to process a workpiece; the embossing platform 20 is used to carry the workpiece; the moving component 30 is connected to the embossing platform 20 and is located on the side of the embossing platform 20 away from the embossing module 10. The moving component 30 includes a first drive group 31 and a second drive group 32 arranged perpendicularly to each other. The first drive group 31 is used to drive the embossing platform 20 to move along a first direction, and the second drive group 32 is used to drive the embossing platform 20 to move along a second direction perpendicular to the first direction.

[0037] The positioning component 40 includes a base 41, an image acquisition element 42 disposed on the base 41, and a controller electrically connected to the image acquisition element 42. The base 41 is connected to the imprinting platform 20 and disposed on the side of the imprinting platform 20. The imprinting platform 20 is also used to drive the base 41 to move. The image acquisition element 42 is used to acquire image information of the imprinting module 10. The controller is used to receive the image information and calculate first position information, and is also used to control the moving component 30 according to the first position information.

[0038] The imprinting platform 20 is used to hold the workpiece to be processed, which can be a substrate, for example, the bearing surface is used to support the substrate. The workpiece on the bearing surface can bear the imprinting adhesive, which is evenly spread on the workpiece. Then, the template of the imprinting module 10 interacts with the imprinting adhesive on the workpiece to perform imprinting and curing, thereby obtaining the imprinted workpiece. Optionally, the template and the imprinting module 10 are detachably connected. Further optionally, the connection method between the template and the imprinting module 10 can be a threaded connection, an adhesive connection, a snap-fit ​​connection, etc., which is not limited in this embodiment.

[0039] The moving component 30 is used to move the impression platform 20. The extension direction of the first drive group 31 is perpendicular to the arrangement direction of the impression template and the impression platform 20, and the extension direction of the second drive group 32 is perpendicular to the arrangement direction of the impression template and the impression platform 20. The first drive group 31 and the second drive group 32 can also be understood as XY-axis displacement stages. Optionally, the extension direction of the first drive group 31 is the same as the first direction, and the extension direction of the second drive group 32 is the same as the second direction. Optionally, the first drive group 31 and the second drive group 32 are stacked along the arrangement direction of the impression template and the impression platform 20. Optionally, the first drive group 31 is directly connected to the impression platform 20, or indirectly connected to the impression platform 20 through other components. Optionally, the second drive group 32 is directly connected to the impression platform 20, or indirectly connected to the impression platform 20 through other components. The first drive group 31 can drive the imprinting platform 20 to move relative to the imprinting module 10 along a first direction, and the second drive group 32 can drive the imprinting platform 20 to move relative to the imprinting module 10 along a second direction. The first direction is as follows: Figure 2 The middle direction is shown in D1, and the second direction is as follows. Figure 2 As shown in D2, the center direction is as follows.

[0040] The positioning component 40 is used to position the imprinting module 10 and the imprinting platform 20. The base 41 is disposed between the imprinting module 10 and the moving component 30. Optionally, the base 41 is fixedly connected to the imprinting platform 20, or the base 41 is detachably connected to the imprinting platform 20. Further optionally, the connection method between the base 41 and the imprinting platform 20 can be a threaded connection, an adhesive connection, a snap-fit ​​connection, etc., which is not limited in this embodiment. When the moving component 30 moves the imprinting platform 20 relative to the imprinting module 10, the base 41 moves synchronously with the imprinting platform 20.

[0041] Image acquisition device 42 is disposed on the surface of base 41 facing imprint module 10. Optionally, the image acquisition device can be a CCD industrial camera. Optionally, the image acquisition device is fixedly connected to base 41, or the image acquisition device is detachably connected to base 41. Further optionally, the connection method between image acquisition device and base 41 can be threaded connection, adhesive connection, snap-fit ​​connection, etc., which is not limited in this embodiment.

[0042] The controller receives image information, calculates first position information based on the image information, and controls the moving component 30 to operate based on the first position information. The first position information is the position information of the imprinting module 10. Based on the first information, the moving component 30 is controlled to move the imprinting platform 20, adjusting the position of the imprinting platform 20, thereby achieving precise positioning between the imprinting platform 20 and the imprinting module 10.

[0043] In summary, the embossing processing apparatus 1 provided in this embodiment achieves precise positioning of the embossing platform 20 and the embossing module 10 by setting the moving component 30 and the positioning component 40 to cooperate with each other. Specifically, the moving component 30 can drive the embossing platform 20 to move along the first direction or the second direction, which can achieve both large-range movement and small-range precise positioning, satisfying the movement of the embossing platform 20 between other processing devices and the alignment of the template on the embossing module 10. The positioning component 40 uses image calibration for positioning, which can meet the positioning requirements of micron-level error and avoid the cumbersome operation of precision optical positioning systems, thereby improving the positioning accuracy of the template of the embossing module 10 and the workpiece to be processed on the embossing platform 20, and thus improving the processing effect of embossing.

[0044] In one embodiment, the first drive group 31 includes a first motor and a first grating measuring device. The first grating measuring device is disposed inside the first motor. The first motor is used to drive the imprinting platform 20 to move along the first direction. The first grating measuring device is used to measure the displacement of the first motor.

[0045] The second drive group 32 includes a second motor and a second grating measuring device. The second grating measuring device is disposed inside the second motor. The second motor is used to drive the imprinting platform 20 to move along the second direction. The second grating measuring device is used to measure the displacement of the second motor.

[0046] The first and second motors serve as drive sources. The first and second grating measuring devices consist of a grating ruler with periodic stripes and a reading head. Through optical interference or photoelectric sensing principles, they convert optical signals into electrical signals, enabling high-precision displacement measurement. Optionally, the first motor is directly connected to the imprinting platform 20, or indirectly connected to it through other components. Optionally, the second motor is directly connected to the imprinting platform 20, or indirectly connected to it through other components.

[0047] Optionally, the first motor includes a first housing with a first cavity for accommodating a first grating measuring device. The first motor also includes a first mechanism and a first transmission component connected by a drive connection. The first cavity may also accommodate the first mechanism and the first transmission component, etc. Optionally, the second motor includes a second housing with a second cavity for accommodating a second grating measuring device. The second motor also includes a second mechanism and a second transmission component connected by a drive connection. The second cavity may also accommodate the second mechanism and the second transmission component, etc.

[0048] The first grating measuring device is located inside the first motor, and the second grating measuring device is located inside the second motor. This not only helps to improve the measurement accuracy of the first grating measuring device and the second grating measuring device, thereby improving the movement accuracy of the moving component 30, but also helps to protect the first grating measuring device and the second grating measuring device, thereby improving the reliability of the moving component 30.

[0049] Therefore, by setting a first grating measuring device and a first motor, and a second grating measuring device and a second motor, this embodiment can achieve both large-range movement and small-range precise positioning, satisfying the movement of the imprinting platform 20 between other processing devices and the alignment of the template on the imprinting module 10, thereby improving the positioning accuracy of the template of the imprinting module 10 and the workpiece to be processed on the imprinting platform 20, and thus improving the processing effect of imprinting.

[0050] Please refer to this as well. Figures 1-2 In one embodiment, the first drive group 31 further includes a first guide rail 311 and a first slider 312 that are slidably connected. The first motor is driven to the first slider 312, and the first slider 312 is connected to the imprinting platform 20. The first motor drives the first slider 312 to slide relative to the first guide rail 311, thereby moving the imprinting platform 20.

[0051] The second drive group 32 further includes a second guide rail 321 and a second slider 322 that are slidably connected. The first guide rail 311 and the second guide rail 321 are arranged perpendicular to each other. The second motor is driven to connect the second slider 322. The second slider 322 is connected to the imprinting platform 20. The second motor drives the second slider 322 to slide relative to the second guide rail 321, thereby moving the imprinting platform 20.

[0052] The first guide rail 311 extends perpendicularly to the arrangement direction of the impression template and the impression platform 20, and the second guide rail 321 extends perpendicularly to the arrangement direction of the impression template and the impression platform 20. Optionally, the first guide rail 311 extends along a first direction, and the second guide rail 321 extends along a second direction. Optionally, the first guide rail 311 and the second guide rail 321 are stacked along the arrangement direction of the impression template and the impression platform 20. Optionally, the first slider 312 is sleeved on the first guide rail 311, or at least a portion of the first slider 312 is embedded in the first guide rail 311. Optionally, the second slider 322 is sleeved on the second guide rail 321, or at least a portion of the second slider 322 is embedded in the second guide rail 321.

[0053] Optionally, the imprinting platform 20 is located on the side of the first slider 312 facing the imprinting module 10, and the imprinting platform 20 is located on the side of the second slider 322 facing the imprinting module 10. Optionally, the first slider 312 is directly connected to the imprinting platform 20, or indirectly connected to the imprinting platform 20 through other components. Optionally, the second slider 322 is directly connected to the imprinting platform 20, or indirectly connected to the imprinting platform 20 through other components. Optionally, the imprinting platform 20 is fixedly connected to the first slider 312, or the imprinting platform 20 is detachably connected to the first slider 312. Further optionally, the connection method between the imprinting platform 20 and the first slider 312 can be a threaded connection, an adhesive connection, a snap-fit ​​connection, etc., which is not limited in this embodiment. Optionally, the imprinting platform 20 is fixedly connected to the second slider 322, or the imprinting platform 20 is detachably connected to the second slider 322. Alternatively, the connection between the imprinting platform 20 and the second slider 322 can be a threaded connection, an adhesive connection, a snap-fit ​​connection, etc., and this embodiment does not limit this.

[0054] Specifically, the first motor drives the first slider 312 to slide relative to the first guide rail 311, thereby causing the first slider 312 to move the imprinting platform 20 along the first direction. The second motor drives the second slider 322 to slide relative to the second guide rail 321, thereby causing the second slider 322 to move the imprinting platform 20 along the second direction.

[0055] Therefore, by setting the first guide rail 311 and the first slider 312, and the second guide rail 321 and the second slider 322, this embodiment enables the first motor and the second motor to drive the imprinting platform 20 to move smoothly, thereby improving the reliability of the moving component 30.

[0056] Please refer to this as well. Figures 1-2 In one embodiment, the moving component 30 further includes a plurality of limiting blocks 33, at least two of the limiting blocks 33 being arranged at intervals along the first direction, and the first slider 312 being disposed between the two limiting blocks 33, the limiting blocks 33 being used to abut against the first slider 312.

[0057] And / or, at least two of the limiting blocks 33 are arranged at intervals along the second direction, and the second slider 322 is disposed between the two limiting blocks 33, and the limiting blocks 33 are used to abut against the second slider 322.

[0058] The first slider 312 can move between two limiting blocks 33, and the limiting blocks 33 can abut against the first slider 312 to limit the range of movement of the first slider 312. Optionally, the two limiting blocks 33 are provided on the first guide rail 311. For example, one limiting block 33 is provided at one end of the first guide rail 311, and the other limiting block 33 is provided at the other end of the first guide rail 311.

[0059] The second slider 322 can move between two limiting blocks 33, and the limiting blocks 33 can abut against the second slider 322 to limit the range of movement of the second slider 322. Optionally, the two limiting blocks 33 are provided on the second guide rail 321. For example, one limiting block 33 is provided at one end of the second guide rail 321, and the other limiting block 33 is provided at the other end of the second guide rail 321.

[0060] Therefore, this embodiment sets a limiting block 33 to limit the movement range of the first slider 312 and the second slider 322, thereby preventing the imprinting platform 20 from moving too far beyond the preset path and improving the reliability of the moving component 30.

[0061] Please refer to this as well. Figures 1-2 In one embodiment, the image acquisition unit 42 and the imprinting platform 20 are arranged in the same direction as the first direction, and the base 41 and the imprinting platform 20 are both located on the side of the second drive group 32 away from the first drive group 31.

[0062] Optionally, the arrangement direction of the image acquisition component 42 and the imprinting platform 20 is the same as the extension direction of the first guide rail 311 in the moving assembly 30. Optionally, the base 41 extends along the first direction. By limiting the arrangement of the image acquisition component 42 and the imprinting platform 20 along the first direction, this embodiment makes it easier for the image acquisition component 42 to acquire image information from the imprinting module 10, reduces the difficulty for the controller to calculate the first position information, improves the positioning accuracy of the template of the imprinting module 10 and the workpiece to be processed on the imprinting platform 20, and improves the processing effect of the imprinting process.

[0063] The second drive group 32 is closer to the base 41 and the imprinting platform 20 than the first drive group 31. For example, the first drive group 31 is located at the bottom, the second drive group 32 is located on the upper surface of the first drive group 31, the imprinting platform 20 is located on the upper surface of the second drive group 32, and the base 41 is connected to the imprinting platform 20, with the base 41 located above the second drive group 32. This embodiment, by limiting the positions of the base 41, the imprinting platform 20, the first drive group 31, and the second drive group 32, can avoid mutual interference between the base 41, the imprinting platform 20, the first drive group 31, and the second drive group 32, and can also reduce the space occupied by the first drive group 31 and the second drive group 32, optimize the structure, and improve the integration of the imprinting processing apparatus 1.

[0064] Please refer to this as well. Figures 1-4 In one embodiment, the positioning component 40 further includes an adjustment bracket 43, which is disposed on the side of the base 41 facing the imprinting module 10. The image acquisition component 42 is tractively connected to the adjustment bracket 43 and is capable of moving relative to the adjustment bracket 43 toward or away from the imprinting module 10.

[0065] Optionally, the adjusting bracket 43 extends toward the imprinting module 10. Optionally, the adjusting bracket 43 is fixedly connected to the base 41, or the adjusting bracket 43 is detachably connected to the base 41. Further optionally, the connection method between the adjusting bracket 43 and the base 41 can be a threaded connection, an adhesive connection, a snap-fit ​​connection, etc., and this embodiment is not limited in this respect.

[0066] Image acquisition component 42 is movable relative to adjustment bracket 43. Optionally, image acquisition component 42 is slidably connected to condition bracket, or image acquisition component 42 is rotatably connected to condition bracket.

[0067] Therefore, in this embodiment, by connecting the image acquisition component 42 to the adjustment bracket 43, the position of the image acquisition component 42 can be flexibly adjusted up and down to meet the focal length range requirements of the image acquisition component 42, thereby improving the image accuracy of the image acquisition component 42 in acquiring image information, thus improving the positioning accuracy of the template of the imprinting module 10 and the workpiece to be processed on the imprinting platform 20, and further improving the processing effect of the imprinting process.

[0068] Please refer to this as well. Figures 1-4 In one embodiment, the adjustment bracket 43 includes a third guide rail 431 extending along the arrangement direction from the base 41 to the imprinting module 10, and a third slider 432 slidably connected to the third guide rail 431. The image acquisition member 42 is disposed on the third slider 432, and the third slider 432 can slide relative to the third guide rail 431 to drive the image acquisition member 42 to move.

[0069] Optionally, the arrangement direction of the impression template and the impression platform 20 is the same as the extension direction of the third guide rail 431. Optionally, the extension direction of the third guide rail 431 is perpendicular to the first direction and the second direction. Optionally, the third slider 432 is sleeved on the third guide rail 431, or at least a portion of the third slider 432 is embedded in the third guide rail 431.

[0070] Optionally, the image acquisition component 42 is disposed on the side of the third slider 432, or the image acquisition component 42 is disposed on the surface of the third slider 432 facing the imprinting module 10. Optionally, the third slider 432 is directly connected to the image acquisition component 42, or indirectly connected to the image acquisition component 42 through other components. Optionally, the image acquisition component 42 is fixedly connected to the third slider 432, or the image acquisition component 42 is detachably connected to the third slider 432. Further optionally, the connection method between the image acquisition component 42 and the third slider 432 can be a threaded connection, an adhesive connection, a snap-fit ​​connection, etc., and this embodiment does not limit this.

[0071] Specifically, the user can manually adjust the position of the image acquisition component 42, or use a motor to automatically adjust the position of the image acquisition component 42.

[0072] Therefore, by setting the third guide rail 431 and the third slider 432, the position of the image acquisition element 42 can be smoothly adjusted to meet the focal length range requirements of the image acquisition element 42 and improve the image accuracy of the image acquisition element 42 in acquiring image information.

[0073] Please refer to this as well. Figures 1-4 In one embodiment, the imprinting platform 20 includes a platform body and a third drive group connected to the platform body. The third drive group is used to drive the platform body to move along a third direction, which is perpendicular to the first direction and the second direction. The third direction is the same as the arrangement direction of the moving component 30 to the imprinting module 10.

[0074] The platform body is used to carry the workpiece to be processed. The third drive group is used to drive the platform body to move towards or away from the imprinting module 10. Optionally, the third drive group drives the platform body to move vertically, for example, the third drive group drives the platform body to move up and down. Optionally, the third drive group is directly connected to the platform body, or the third drive group is indirectly connected to the platform body through other transmission components. Optionally, the third drive group includes an electric cylinder. (The third direction is as follows...) Figure 1 Shown in the middle direction is D3.

[0075] Therefore, this embodiment sets up a third drive group to adjust the position of the platform body relative to the imprinting module 10. The third drive group can cooperate with the first drive group and the second drive group 32 to achieve both large-range movement and small-range precise positioning, thus satisfying the movement of the imprinting platform 20 between other processing devices and the alignment of the template on the imprinting module 10.

[0076] In one embodiment, the imprinting platform 20 further includes a sensor electrically connected to the controller. The sensor is used to acquire second position information of the platform body. The controller is used to receive the second position information and determine, based on the second position information, whether the workpiece to be processed placed on the platform body corresponds to the template of the imprinting module 10. The controller is also used to control the third drive group to move the platform body when it is determined that the workpiece to be processed placed on the platform body corresponds to the template of the imprinting module 10.

[0077] Optionally, the sensor can be a photoelectric sensor. Optionally, the sensor is located on the imprinting platform 20, or on the imprinting module 10, or on the moving component 30, or on the positioning component 40.

[0078] Specifically, when the controller receives the second position information and determines that the workpiece to be processed on the platform body corresponds to the template of the imprinting module 10 based on the second position information, it can control the third drive group to drive the workpiece to move up and down, so that the template of the imprinting module 10 and the imprinting adhesive on the workpiece can cooperate to imprint and cure, thereby obtaining the workpiece to be processed after imprinting.

[0079] Therefore, by setting up sensors in cooperation with the controller, this embodiment can perform imprinting and curing when the workpiece to be processed on the platform body corresponds to the template of the imprinting module 10. The operation is convenient and precise, thereby improving the processing effect of imprinting.

[0080] This application also provides a nanoimprinting device, which includes a loading and unloading device, a dispensing device, and an imprinting processing device as described above. The loading and unloading device is used to provide the workpiece to be processed and to collect the processed workpiece. The dispensing device is used to provide the adhesive. The imprinting processing device is used to process the workpiece.

[0081] The nanoimprinting equipment provided in this application, by adopting the imprinting processing device provided above, achieves precise positioning of the imprinting platform and the imprinting module through the cooperation of a moving component and a positioning component. Specifically, the moving component can drive the imprinting platform to move along a first direction or a second direction, which can achieve both large-range movement and small-range precise positioning, satisfying the needs of moving the imprinting platform between other processing devices and aligning the template on the imprinting module. The positioning component uses image calibration for positioning, which can meet the positioning requirements of micron-level error and avoid the cumbersome operation of precision optical positioning systems, thereby improving the positioning accuracy of the template of the imprinting module and the workpiece to be processed on the imprinting platform, and thus improving the processing effect of the imprinting process.

[0082] The following is a detailed introduction to the operation of the nanoimprint equipment:

[0083] In the initial state, the first and second drive groups move the imprinting platform below the loading and unloading device to receive the workpiece. The imprinting platform then activates its vacuum pump, using suction cups to firmly hold the workpiece in place. Next, the first and second drive groups move to the next dispensing device, dripping the imprinting adhesive onto the workpiece and completing the uniform dispensing process. The positioning accuracy required for these two processes is not high; therefore, only initial alignment during assembly is needed, and either the first or second drive group can be used to move the imprinting platform independently.

[0084] Next, in the embossing process, which requires precise alignment between the template and the workpiece, the first drive group needs to be moved to the ideal position of the embossing module so that the image acquisition unit can capture the image of the embossing template. However, due to template clamping errors, there is a certain offset between the center of the image acquisition unit and the center of the template. At this point, the coordinate error between the two can be calculated using an image algorithm, and then the coordinate information is transmitted to the controller. The controller controls the second drive group to move the corresponding distance to complete the template alignment. Then, embossing curing and demolding can be performed.

[0085] After the nano-pattern is replicated, the first and second drive groups move the imprinting platform below the loading and unloading device again, return it to the loading and unloading device to send back the finished product, thus completing the complete nano-imprinting process and starting the next cycle.

[0086] Unless otherwise stated or in case of conflict, the terms or phrases used in this application shall have the following meanings:

[0087] In this application, terms such as "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature.

[0088] In this application, "one or more" refers to any one, any two, or any two or more of the listed items. "Several" refers to any two or more.

[0089] In this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0090] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part. They can refer to a mechanical connection or an electrical connection. They can refer to a direct connection or an indirect connection through an intermediate medium, or the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0091] In this application, the terms "embodiment" and "implementation" mean that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this application. The appearance of these phrases in various locations throughout the specification does not necessarily refer to the same embodiment, nor are they independent or alternative embodiments mutually exclusive with other embodiments. Those skilled in the art will understand, explicitly and implicitly, that the embodiments described in this application can be combined with other embodiments. Furthermore, it should be understood that the features, structures, or characteristics described in the various embodiments of this application can be arbitrarily combined to form another embodiment that does not depart from the spirit and scope of the technical solution of this application, provided there is no contradiction between them.

[0092] The above description represents some embodiments of this application. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this application, and these improvements and modifications are also considered to be within the scope of protection of this application.

Claims

1. An embossing processing apparatus, characterized in that, The embossing processing apparatus includes: The embossing module is used to hold the template and also to process the workpiece. An embossing platform is used to hold the workpiece to be processed; A movable component is connected to the imprinting platform and disposed on the side of the imprinting platform away from the imprinting module. The movable component includes a first drive group and a second drive group arranged perpendicularly to each other. The first drive group is used to drive the imprinting platform to move along a first direction, and the second drive group is used to drive the imprinting platform to move along a second direction perpendicular to the first direction. The positioning component includes a base, an image acquisition unit disposed on the base, and a controller electrically connected to the image acquisition unit. The base is connected to the imprinting platform and disposed on the side of the imprinting platform. The imprinting platform is also used to drive the base to move. The image acquisition unit is used to acquire image information of the imprinting module. The controller is used to receive the image information and calculate first position information, and is also used to control the moving component according to the first position information.

2. The embossing processing apparatus as described in claim 1, characterized in that, The first drive group includes a first motor and a first grating measuring device. The first grating measuring device is disposed inside the first motor. The first motor is used to drive the imprinting platform to move along the first direction. The first grating measuring device is used to measure the displacement of the first motor. The second drive group includes a second motor and a second grating measuring device. The second grating measuring device is located inside the second motor. The second motor is used to drive the imprinting platform to move along the second direction. The second grating measuring device is used to measure the displacement of the second motor.

3. The embossing processing apparatus as described in claim 2, characterized in that, The first drive group further includes a first guide rail and a first slider that are slidably connected. The first motor is driven to connect the first slider, and the first slider is connected to the imprinting platform. The first motor drives the first slider to slide relative to the first guide rail, thereby moving the imprinting platform. The second drive group also includes a second guide rail and a second slider that are slidably connected. The first guide rail and the second guide rail are arranged perpendicular to each other. The second motor is driven to connect the second slider. The second slider is connected to the imprinting platform. The second motor drives the second slider to slide relative to the second guide rail, thereby moving the imprinting platform.

4. The embossing apparatus as described in claim 3, characterized in that, The moving component further includes a plurality of limiting blocks, at least two of the limiting blocks are arranged at intervals along the first direction, the first slider is disposed between the two limiting blocks, and the limiting blocks are used to abut against the first slider; And / or, at least two of the limiting blocks are arranged at intervals along the second direction, and the second slider is disposed between the two limiting blocks, the limiting blocks being used to abut against the second slider.

5. The embossing apparatus as described in claim 1, characterized in that, The image acquisition component and the imprinting platform are arranged in the same direction as the first direction, and the base and the imprinting platform are both located on the side of the second drive group away from the first drive group.

6. The embossing apparatus as described in claim 1, characterized in that, The positioning component further includes an adjustment bracket, which is located on the side of the base facing the imprinting module. The image acquisition component is drivenly connected to the adjustment bracket and can move relative to the adjustment bracket toward or away from the imprinting module.

7. The embossing apparatus as described in claim 6, characterized in that, The adjustment bracket includes a third guide rail extending along the arrangement direction from the base to the imprinting module, and a third slider slidably connected to the third guide rail. The image acquisition component is disposed on the third slider, and the third slider can slide relative to the third guide rail to drive the image acquisition component to move.

8. The embossing apparatus as described in claim 1, characterized in that, The imprinting platform includes a platform body and a third drive group connected to the platform body. The third drive group is used to drive the platform body to move along a third direction, which is perpendicular to the first direction and the second direction. The third direction is the same as the arrangement direction of the moving component to the imprinting module.

9. The embossing apparatus as described in claim 8, characterized in that, The embossing platform also includes a sensor electrically connected to the controller. The sensor is used to acquire second position information of the platform body. The controller is used to receive the second position information and determine whether the workpiece to be processed placed on the platform body corresponds to the template of the embossing module based on the second position information. The controller is also used to control the third drive group to move the platform body when it is determined that the workpiece to be processed placed on the platform body corresponds to the template of the embossing module.

10. A nanoimprinting device, characterized in that, The nanoimprinting equipment includes a loading and unloading device, a dispensing device, and an imprinting processing device as described in any one of claims 1-9. The loading and unloading device is used to provide the workpiece to be processed and to collect the processed workpiece. The dispensing device is used to provide the adhesive. The imprinting processing device is used to process the workpiece.

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