Imprinting systems and processes

Abstract

The present invention relates to a system and process for imprinting, particularly nanoimprinting. The system comprises a combination of a roller configured to roll at least one flexible stamp on at least one substrate to be imprinted, a stage configured to support at least one carrier and / or at least one substrate during imprinting, and a carrier configured to transport at least one substrate to be imprinted.

Description

Technical Field

[0001] The present invention relates to an imprinting system, particularly a nanoimprinting system. The present invention also relates to an imprinting process, particularly a nanoimprinting process.

Background Art

[0002] Imprinting, particularly nanoimprinting, requires very precise alignment between the stamp used for imprinting and the substrate to be imprinted. However, since it is a relatively small structure ranging from, for example, 500 micrometers to 25 nanometers, a high level of accuracy is required for alignment. Usually, the substrate to be imprinted is aligned with the stage on which the substrate is placed during the imprinting process. The stage may be provided with alignment markers, and / or a receiving space for receiving the substrate, and / or a contact portion for assisting in aligning the substrate. Known systems have the drawbacks of taking a considerable amount of time for the alignment step and being sensitive to alignment errors and substrate damage.

Summary of the Invention

[0003] Therefore, an object of the present invention is to provide an imprinting system and process with improved alignment required for imprinting, particularly nanoimprinting.

[0004] For this purpose, the present invention is an imprinting system, particularly for nanoimprinting, comprising at least one roller configured to apply pressure to at least one substantially flexible stamp and / or at least one substrate to be imprinted, at least one carrier configured to convey at least one substrate to be imprinted, In particular, at least one stage configured to support at least one carrier and / or at least one substrate during imprinting, Equipped with, At least one roller and at least one stage are displaceable relative to each other in the imprinting direction, particularly to facilitate imprinting. At least one carrier and at least one stage are displaceable from each other between at least the adjustment configuration and the imprinting configuration. The adjustment configuration is such that the carrier and the stage are displaceable from each other in at least one direction different from the imprinting direction, in particular so that at least one substrate can be aligned with the stage and / or carrier. The imprinting configuration is such that at least one carrier is positioned (directly) on the stage and / or at least one carrier is engaged with the stage, in particular, so that at least one substrate provided on the carrier and / or stage is imprinted. We provide the system.

[0005] The system according to the present invention relates in particular to a roll-to-plate imprinting process. The system according to the present invention has several advantages. In particular, it is a combination of at least one carrier configured to transport at least one substrate to be imprinted and at least one stage configured to support at least one carrier and / or at least one substrate during imprinting, and the carrier and stage are displaceable from each other, thereby facilitating substrate alignment in a relatively simple and effective manner. The system according to the present invention enables a more efficient system that can reduce the time required for alignment. Accurate alignment of the substrate with respect to both the stage and the (flexible) stamp is crucial to facilitate a proper imprinting process and / or to improve the reproducibility of the resulting imprint. The combination of the stage and carrier essentially provides a two-layer surface that enables accurate alignment of the substrate with respect to the stage and / or the flexible stamp. Furthermore, the carrier makes it possible to minimize direct contact with the substrate, particularly during loading the substrate into the system, during alignment of the substrate within the system, and / or during unloading the imprinted substrate from the system. Typically, in prior art systems, the substrate, particularly its edges, needs to be touched, for example, via a clamp, for the (un)loading and / or alignment steps. However, touching the substrate, even in an inactive area, can adversely affect the quality of the final product. The system according to the present invention makes it possible to load, unload, and align the substrate without touching its edges. This reduces deformation and defects of the substrate caused by handling.

[0006] At least one carrier is configured to transport at least one substrate to be imprinted, and preferably has the function of providing a stable base on which the substrate is placed. At least one carrier typically has at least one support surface for transporting at least one substrate. At least a portion of the carrier, particularly at least a portion of the support surface, may be substantially flat. A further function of the carrier is to allow movement of the substrate in at least one direction for alignment purposes. The carrier further provides easy loading of the substrate into the system and movement of the substrate against rollers and / or a flexible stamp. The function of the carrier can also be described as allowing adjustment of the position of the substrate in at least the y-direction and the Rz-direction. In this case, the direction of imprinting is equal to the x-direction. In this way, the carrier can accurately align the substrate in all directions without touching its edges.

[0007] At least one roller is configured to apply pressure in particular to at least one flexible stamp and / or at least one substrate to be imprinted. For example, at least one roller may be configured to roll at least one flexible stamp over at least one substrate to be imprinted. This configures at least one roller to cooperate with at least one flexible stamp configured for imprinting. A substantially flexible stamp is also called a flexible substrate. Typically, a substantially flexible stamp has a textured area. The texture has dimensions typically ranging from 500 micrometers to 25 nanometers, for example. The flexible stamp is configured in particular for the lithographic transfer process of nanoimprinting. It is also possible that at least one flexible stamp is mounted on at least one roller, and / or that at least one flexible stamp is provided on top of at least one roller. The roller may be at least partially covered, for example, with at least one flexible stamp.

[0008] At least one stage is configured to support at least one carrier and / or at least one substrate, particularly during imprinting. Support by the stage may be direct and / or indirect. Typically, during imprinting, when the carrier is located between the substrate and the stage, the substrate is supported by the stage. At least a portion of the stage is preferably substantially flat. In particular, the portion of the carrier on which the substrate is placed during imprinting is substantially flat. At least one stage is preferably substantially rigid. Rigidity of the stage is desirable to ensure stable support during the imprinting process. For example, the stage can also be said to be morphologically stable.

[0009] At least one carrier and at least one stage may be positioned at a distance from each other in the adjustment configuration. At least one carrier and at least one stage are displaceable from each other between at least one adjustment configuration and at least one imprinting configuration. The adjustment configuration is a particularly dynamic position, and the carrier and stage are displaceable from each other in at least one direction different from the imprinting direction, in particular so that at least one substrate provided on the carrier can be aligned with respect to the stage. In the adjustment configuration, it is also conceivable that the carrier and stage are displaceable from each other in the imprinting direction and at least one further direction. Depending on the desired alignment configuration, there may be several different configurations between the carrier and the stage in the adjustment configuration. The imprinting configuration is a substantially static position or configuration from respect to each other, in particular in terms of mutual alignment, and the carrier is positioned directly on the stage, in particular so that a substrate provided on the carrier is imprinted. During imprinting, the stage, including the carrier and substrate, is displaced from each other with respect to at least one roller.

[0010] At least one roller and at least one stage are displaceable relative to each other in the imprinting direction, particularly to facilitate imprinting. Typically, at least one roller and at least one stage are also displaceable relative to each other. For example, at least one roller and / or at least one stage may be displaceable in the vertical direction. It is assumed that the relative distance between at least one roller and at least one stage is adjustable. It is also possible that the relative distance between at least one roller and at least one carrier is adjustable, and / or the relative distance between at least one carrier and at least one stage is adjustable. In this way, the imprinting process can be further optimized.

[0011] Furthermore, in at least one adjustment configuration, at least one carrier and at least one stage may be displaceable relative to each other in at least one direction, preferably multiple directions, different from the imprinting direction, within a plane substantially parallel to the plane formed by the stage and / or carrier. In this way, alignment of the carrier and the substrate provided thereon with respect to the stage can be effectively achieved. The carrier and the stage are, for example, adjustable by at least 90 degrees, preferably at least 180 degrees, and more preferably 360 degrees, within the plane.

[0012] The system may include at least one first actuator for adjusting the relative positions of at least one roller and at least one stage. Thus, at least one roller and at least one stage are displaceable from each other by at least one first actuator. The system, in particular the actuator, may further include at least one drive unit. The first actuator may be configured to adjust the relative distance between the stage and the roller, and / or the relative displacement in the imprinting direction, to facilitate imprinting.

[0013] The system may include at least one second actuator for adjusting the relative position of at least one carrier and at least one stage. The system may include, for example, at least one second actuator for adjusting the position of at least one carrier relative to at least one stage. Adjustment of the position of at least one carrier relative to at least one stage by at least one second actuator is possible, in particular in adjustment configurations. The first actuator and the second actuator (if applicable) are preferably controllable independently. At least one second actuator may be configured to adjust the position of at least one carrier relative to at least one stage between adjustment configurations and imprinting configurations, and / or to adjust at least one carrier relative to at least one stage to an aligned configuration in adjustment configurations. At least one second actuator may also be configured, in particular in adjustment configurations, to displace at least one carrier relative to at least one stage in at least one direction different from the imprinting direction.

[0014] At least one first actuator and / or at least one second actuator may be, for example, a DC motor, a stepping motor, a servo motor, a voice coil actuator, or a linear actuator. Depending on the selected actuator, a transmission mechanism such as a gearbox, planetary gearbox, spindle, rocker mechanism, or eccentric wheel can be used to achieve the required resolution.

[0015] The system may include at least one control unit for controlling the mutual displacement between at least one roller and at least one stage, and / or between at least one carrier and at least one stage. The at least one control unit may be configured, for example, to control the mutual displacement between at least one stage and at least one carrier between a tuned configuration and an imprinting configuration. The at least one control unit may also be configured to control the alignment of the carrier with respect to the stage in the tuned configuration.

[0016] In a preferred embodiment, at least a portion of at least one carrier is positioned substantially between at least one roller and at least one stage, at least in the imprinting configuration. It is also conceivable that at least a portion of at least one carrier is positioned substantially between at least one roller and at least one stage, in both the imprinting and adjustment configurations. This is beneficial for the alignment process.

[0017] In a more preferred embodiment, at least a portion of at least one carrier substantially surrounds at least a portion of at least one stage, particularly in the imprinting configuration. For example, at least one carrier may substantially surround at least a portion of at least one stage along the imprinting direction. At least a portion of at least one carrier may substantially surround at least a portion of at least one stage in both the imprinting and adjustment configurations. In a more preferred embodiment, at least one carrier comprises at least one belt, particularly an endless belt. The use of at least one belt offers several advantages. The (endless) belt allows for easy alignment of the carrier and the substrate to be imprinted in the adjustment configuration. Furthermore, the belt allows the system according to the present invention to load, unload, and align the substrate in an effective manner without touching the edges of the substrate. The substrate is provided on the belt in a simple manner, and subsequent displacement of the substrate can be achieved by the movement of the belt. At least one endless belt preferably surrounds at least one stage. In a preferred embodiment, at least one endless belt surrounds at least one stage such that the belt direction of the endless belt is substantially equal to or opposite to the imprinting direction. Thus, both the belt direction and the imprinting direction can be x-directions. The belt direction is interpreted as the direction of movement of the belt. If the system comprises a carrier with an endless belt, the endless belt may cooperate with at least two rollers, particularly guide rollers. At least one roller may be a drive roller. For example, the endless belt may be mounted around at least two rollers spaced apart from each other. Alternatively, at least one carrier may comprise at least two guide rollers and at least one endless belt positioned on the guide rollers. The system may further comprise at least one housing.At least a portion of the housing is connected to or connectable to at least two guide rollers. The housing may be connected to or connectable to at least one carrier, in particular at least one endless belt, and / or at least one stage. This embodiment can provide stable coordination between the carrier and the stage. The at least one carrier, in particular at least one endless belt, and / or at least one stage may be displaceably connected to at least one housing, for example by utilizing at least one spring and / or at least one piston. The system may include at least one further actuator for driving the belt. The housing may be connected to at least two guide rollers of at least one endless belt via at least one actuator, preferably at least two actuators. At least one actuator is preferably a voice coil actuator.

[0018] At least one carrier and / or at least one substrate provided on at least one carrier may be coupled to at least one stage by air conditioning, for example, via vacuum or partial vacuum. In a more preferred embodiment, at least a portion of the at least one carrier is air permeable. Such embodiments can further improve the efficiency and alignment accuracy of the overall imprinting process. For example, the fixation of at least one substrate on the carrier may be achieved by airflow and / or the carrier may be displaced toward the stage by airflow. Alternatively, the fixation of at least one substrate on the carrier may be achieved by (partial) vacuum and / or the carrier may be displaced toward the stage by (partial) vacuum. At least one carrier may have, for example, a plurality of air pockets configured to transport the substrate. In a more preferred embodiment, at least a portion of the at least one carrier has a porous structure. At least a portion of the porous structure is preferably air permeable. Preferably, at least a portion of the at least one carrier has a homogeneous structure. In particular, the region where the substrate is placed during imprinting is substantially homogeneous. Differences in the structure and / or texture of the carriers can negatively impact the overall imprinting process because the substrate is placed on the carrier during imprinting. At least a portion of at least one carrier may have a web structure and / or mesh structure. For example, at least a portion of at least one carrier may have a mesh, raster, matrix, porous structure, and / or woven structure. That is, at least a portion of at least one carrier may have a structure that is at least partially open. For example, at least one carrier may have notches, grooves, and / or through holes. Such air-permeable structures are beneficial for enabling vacuum fixation of at least one substrate on the carrier. Preferably, at least one carrier is substantially uniform in terms of optical and / or mechanical properties.Preferably, at least one carrier is uniform in terms of structure, color, transparency, density, thickness, and / or flexibility.

[0019] Preferably, at least one carrier is relatively thin. This makes the carrier flexible and easy to handle. Preferably, at least one carrier has a thickness less than the thickness of at least one stage. It is also possible that at least a portion of at least one carrier is air-impermeable. For example, at least a portion of the carrier surrounding the portion configured to carry at least one substrate to be imprinted may be air-impermeable. At least one carrier may include, for example, at least one metal and / or at least one polymer. At least one carrier may include, for example, a metal foil, for example, an aluminum foil. Further non-limiting examples that may be included in the carrier are textiles, fiber-reinforced materials, and / or woven or nonwoven materials.

[0020] Furthermore, at least a portion of the carrier may be substantially rigid. For example, the carrier may support the substrate during imprinting. At least one carrier may have a thickness greater than the thickness of at least one stage. In such embodiments, at least one stage may be substantially flexible.

[0021] Preferably, at least one stage is substantially uniform in terms of flatness, surface roughness, and / or local stiffness. The at least one stage may include, for example, at least one mineral and / or ceramic material. Further non-limiting examples of materials that may constitute the at least one stage include granite and metal alloys (preferably aluminum or stainless steel). It is also conceivable that at least a portion of the stage includes a conductive material. The width and / or length of the at least one stage is preferably at least equal to, and preferably greater than, the width and / or length of the substrate to be imprinted. The stage is preferably configured to substantially completely support the substrate. The width and / or length of the at least one carrier is preferably at least equal to, and preferably greater than, the width and / or length of the at least one substrate to be imprinted. It is also conceivable that the width and / or length of the at least one stage is at least equal to, and preferably greater than, the width and / or length of the carrier. Preferably, the width and / or length of the at least one carrier is at least equal to, and preferably greater than, the width and / or length of the substrate to be imprinted.

[0022] In a preferred embodiment, at least one stage comprises at least one air passage. The at least one air passage is configured in particular for supplying and / or taking in air. It is also conceivable that at least one stage comprises multiple air passages. The use of at least one air passage can provide substantially frictionless movement of carriers relative to the stage, particularly by (compressed) air supplied to the air passage. Thus, it is conceivable that mutual displacement between at least one carrier and at least one stage, displacing from a tuned configuration to an imprinting configuration, is achieved by air supplied to at least one air passage. Furthermore, the tuned position of carriers relative to the stage can be facilitated and / or supported by air supplied to at least one air passage. For example, a vacuum, partial vacuum, or pressure below atmospheric pressure may be applied to the air passage so that a carrier, for example a belt carrier, is (temporarily) fixed to the stage. Any further medium may be applied to the air passage instead of or in addition to air.

[0023] The system according to the present invention may include at least one pneumatic regulator configured to provide airflow between at least one stage and at least one carrier. The at least one pneumatic regulator may be configured, for example, to provide overpressure, negative pressure, partial vacuum, and / or vacuum between at least one stage and at least one carrier. The at least one pneumatic regulator may also provide airflow to at least one air passage of the stage, where applicable. By increasing the pressure between the carrier and the stage, they can float with very little friction between them. This is desirable when adjusting the relative positions of the carrier and the stage, i.e., when aligning a substrate. Once the desired position of the substrate is achieved, the air pressure can be reduced, preferably to less than 1 atmosphere, to increase friction and so that the carrier, stage, and substrate placed on the carrier are also substantially fixed during imprinting. In addition to friction between the carrier and the stage, it is desirable that the air pressure between the carrier and the substrate also be reduced. This can suppress undesirable displacement of the substrate placed on the carrier. Conventional solutions rely solely on gravity. To reduce the air pressure between the carrier and the substrate, it is beneficial to allow air to pass through the carrier, using the same tools simultaneously that are used to reduce the air pressure between the carrier and the stage.

[0024] In any embodiment, the system may include a heater for heating and / or cooling at least a portion of the roller, particularly a heater for heating and / or cooling at least a portion of a flexible stamp. Heating and / or cooling at least a portion of the roller can further optimize the imprinting process.

[0025] In a preferred embodiment, the system comprises at least two rollers configured to roll on at least one substrate on which at least one substantially flexible stamp is imprinted. The system may comprise, for example, a plurality of rollers according to the invention. It is also conceivable that at least one roller is a peeling roller and / or a separating roller for separating and / or peeling at least one flexible stamp from the substrate.

[0026] The system may comprise at least one housing. At least one roller and at least one stage may be housed within the housing and / or attached to the housing. Such a housing is also called a frame. The use of the housing can actively contribute to the ease of alignment of at least one stage with respect to at least one roller. For example, it is conceivable that the housing restricts the mutual displacement of the roller and the stage in a direction different from the imprinting direction. For example, it is conceivable that the housing allows the mutual displacement of the roller and the stage in the imprinting direction, or in the x-direction and the vertical direction (Rz-direction), but restricts the mutual displacement in the y-direction.

[0027] The system may optionally include at least one substantially flexible stamp configured for imprinting, particularly nanoimprinting. The substantially flexible stamp preferably includes at least one texture region. The substantially flexible stamp is particularly arranged within the system such that, at least in the imprinting configuration, at least one carrier, particularly at least one substrate provided thereon, and the texture region of the substantially flexible stamp are substantially aligned. The at least one substantially flexible stamp is preferably substantially transparent and / or translucent. This is beneficial, for example, for the curing and / or ease of curing of the resin applied in the imprinting process. The system may optionally include at least one applicator for applying at least one resin, preferably a UV-curable resin, to at least one substrate and / or at least one flexible stamp.

[0028] The system may, for example, include at least one vision inspection device such as at least one camera. The at least one vision inspection device may be configured to determine the position of at least one substrate to be imprinted. It is also conceivable that the at least one vision inspection device is configured to determine the position of at least one carrier and / or at least one stage. At least one control unit may be configured to control the mutual displacement between at least one carrier and at least one stage, and / or the mutual displacement between at least one stage and at least one roller, based on the data obtained via the vision inspection means.

[0029] The at least one substrate to be imprinted is, for example, a glass substrate, a silicon wafer, a metal substrate, a polymer substrate, or a combination thereof. The at least one substrate is, in particular, a plate-shaped substrate. The substrate may optionally have a relief pattern. The system according to the present invention may include at least one supply unit for supplying at least one substrate onto at least one carrier. This allows for further optimization of the process. The at least one supply unit is configured, for example, to slide at least one substrate onto at least one carrier. The at least one supply unit may include, for example, at least one pusher element. Optionally, the system may further include at least one curing device, such as at least one UV curing device. The curing device may be configured to cure the imprinted substrate during and / or after imprinting.

[0030] In yet another embodiment, the system, in particular at least one carrier and / or at least one stage, may include at least one removable mock substrate. Preferably, the at least one mock substrate is positioned adjacent to the substrate to be imprinted, in particular to locally equalize with the height of the substrate being imprinted. This further optimizes the imprinting process and can suppress the formation of irregularities, particularly at the edges of the substrate. The rollers can provide more uniform pressure across the entire substrate. The at least one mock substrate may be made of the same material as the substrate to be imprinted. Preferably, the at least one mock substrate has a thickness substantially equal to the thickness of the substrate to be imprinted. The at least one mock substrate is also called a dummy substrate or compensating substrate aid. The system may also include a plurality of removable mock substrates. The at least one mock substrate may be positioned above and / or below at least one carrier.

[0031] Furthermore, the present invention relates to an imprinting process, particularly a nanoimprinting process. The present invention provides at least one system, The steps include providing at least one substrate to be imprinted on at least one carrier, The steps include: configuring at least one carrier and at least one stage in a coordinated configuration, and aligning the relative positions of at least one carrier and at least one stage such that the substrate is substantially aligned with at least one stage and / or at least one stamp; The steps include: configuring at least one carrier and at least one stage in an imprinting configuration, such that at least one carrier engages with and / or is positioned on at least one stage, so that a substrate provided on at least one carrier is imprinted; Includes.

[0032] The process according to the present invention has similar advantages to those described for the system according to the present invention. The imprinting process according to the present invention is more efficient with respect to alignment and has a lower risk of substrate damage. For example, the alignment step may be applied so that the substrate is substantially aligned with at least one roller and / or at least one substantially flexible stamp. This can positively contribute to the overall imprinting process, imprinting quality, and repeatability. The process may further include a step of imprinting the substrate by rolling at least one substantially flexible stamp over the substrate. The process may further include a step in which the pressure between the carrier and the stage is increased during the alignment step, and / or a step in which the pressure between the carrier and the stage is decreased during the imprinting step. For example, the fixation of at least one substrate on the carrier may be achieved by (partial) vacuum, and / or the carrier may be displaced toward the stage by (partial) vacuum. The process may include a step of removing the imprinted substrate from the system. Furthermore, the present invention relates to an imprinting process, particularly a nanoimprinting process, and more particularly to a system according to the present invention, in which the alignment of at least one substrate to be imprinted is performed by adjusting the position of at least one carrier on which the substrate to be imprinted is placed.

[0033] The present invention is further clarified by the following non-limiting clauses.

[0034] 1. A system for imprinting, particularly nanoimprinting, A stamp having at least one flexibility and / or at least one roller configured to apply pressure to at least one substrate to be imprinted, A carrier configured to transport at least one substrate to be imprinted, A stage configured to support at least one carrier and / or at least one substrate during imprinting, Equipped with, At least one roller and at least one stage are displaceable relative to each other in the imprinting direction, particularly to facilitate imprinting. At least one carrier and at least one stage are displaceable from each other between at least the adjustment configuration and the imprinting configuration. The adjustment configuration is such that the carrier and the stage are displaceable from each other in at least one direction different from the imprinting direction, so that at least one substrate provided on the carrier can be aligned with the stage. The imprinting configuration is a system in which at least one carrier engages with at least one stage so that at least one substrate provided on the carrier is imprinted.

[0035] 2. The system according to Clause 1, wherein the distance between at least one roller and at least one stage is adjustable.

[0036] 3. In at least the adjustment configuration, the carrier and the stage are displaceable from each other in multiple directions within a plane substantially parallel to the plane formed by the stage and / or the carrier, and at least one direction is different from the imprinting direction, as described in any of the preceding clauses.

[0037] 4. The system described in any of the preceding clauses, wherein the distance between at least one roller and at least one carrier is adjustable, and / or the distance between at least one carrier and at least one stage is adjustable.

[0038] 5. The system described in any of the preceding clauses, comprising at least one first actuator for adjusting the relative positions of at least one roller and at least one stage.

[0039] 6. The system described in any of the preceding clauses, comprising at least one second actuator for adjusting the position of at least one carrier relative to at least one stage.

[0040] 7. A system as described in any of the preceding clauses, wherein at least a portion of at least one carrier is substantially positioned between at least one roller and at least one stage in at least an imprinting configuration.

[0041] 8. At least one carrier, at least a portion of which substantially encloses at least one stage, as described in any of the preceding clauses.

[0042] 9. At least one carrier is a system described in any of the preceding clauses, comprising at least one belt, in particular an endless belt.

[0043] 10. The system according to Clause 9, wherein at least one endless belt surrounds at least one stage such that the belt direction of the endless belt is substantially equal to or opposite to the imprinting direction.

[0044] 11. At least one carrier, at least a portion thereof, is air permeable, as described in any of the preceding clauses.

[0045] 12. A system as described in any of the preceding clauses, wherein at least a portion of at least one carrier has a porous structure.

[0046] 13. A system according to any of the preceding clauses, wherein at least a portion of at least one carrier comprises a mesh, raster, matrix, porous structure, and / or woven structure.

[0047] 14. A system described in any of the preceding clauses in which at least one carrier is air-impermeable, or at least a portion thereof.

[0048] 15. The system described in any of the preceding clauses, comprising at least one pneumatic regulator configured to provide airflow between at least one stage and at least one carrier.

[0049] 16. The system according to any of the preceding clauses, wherein at least one stage comprises at least one air passage for supplying and / or taking in air.

[0050] 17. The system described in any of the preceding clauses, comprising at least one heater for heating and / or cooling at least a portion of the roller.

[0051] 18. The system according to any of the preceding clauses, comprising at least two rollers configured to roll at least one substantially flexible stamp on at least one substrate onto which an imprinted stamp is to be placed.

[0052] 19. A system according to any of the preceding clauses, comprising at least one housing, wherein at least one roller and at least one stage are housed within and / or mounted within the housing.

[0053] 20. A system according to any of the preceding clauses, comprising at least one substantially flexible stamp configured for imprinting, particularly nanoimprinting.

[0054] 21. The system according to Clause 20, wherein at least one substantially flexible stamp comprises at least one texture area.

[0055] 22. A system as described in any of the preceding clauses, comprising at least one visual inspection device.

[0056] 23. The system described in any of the preceding clauses, comprising at least one supply unit for supplying at least one substrate on at least one carrier.

[0057] 24. Imprinting, particularly nanoimprinting processes, A step of providing at least one system according to any of the prior claims, The steps include providing at least one substrate to be imprinted on at least one carrier, The steps include: configuring at least one carrier and at least one stage in a coordinated configuration, and aligning the relative positions of at least one carrier and at least one stage so that the substrate is substantially aligned with at least one stage and / or at least one flexible stamp; The steps include: configuring at least one carrier and at least one stage in an imprinting configuration, and having at least one carrier engage with at least one stage so that a substrate provided on at least one carrier is imprinted; A process that includes this.

[0058] 25. The process according to Clause 24, further comprising a substrate imprinting step of rolling at least one substantially flexible stamp over the substrate.

[0059] 26. The process described in Clause 24 or 25, wherein the pressure between the carrier and the stage is increased during the alignment step and / or decreased during the imprinting step. [Brief explanation of the drawing]

[0060] The present invention is further illustrated by non-limiting exemplary embodiments shown in the following drawings. [Figure 1a] This is a schematic diagram of an example of the system according to the present invention. [Figure 1b] This is a schematic diagram of an example of the system according to the present invention. [Figure 2a] This figure shows a second embodiment of the system according to the present invention. [Figure 2b] This figure shows a second embodiment of the system according to the present invention. [Figure 2c] This figure shows a second embodiment of the system according to the present invention. [Figure 3a] This figure shows a third embodiment of the system according to the present invention. [Figure 3b] This figure shows a third embodiment of the system according to the present invention. [Figure 4a] This figure shows a fourth embodiment of the system according to the present invention. [Figure 4b] This figure shows a fourth embodiment of the system according to the present invention. [Modes for carrying out the invention]

[0061] In these drawings, similar reference numbers correspond to similar or equivalent elements or features.

[0062] Figures 1a and 1b are schematic diagrams of a system 100 according to the present invention. Figure 1a shows a side cross-sectional view of the system 100, and Figure 1b shows a top view. The system 100 is configured for imprinting, particularly nanoimprinting. The system 100 comprises a roller 101 configured to roll at least one flexible stamp 102 on a substrate 105 to be imprinted, a carrier 103 for transporting the substrate 105, and a stage 104. The stage 104 is configured to support the carrier 103 and the substrate 105 during imprinting. In the illustrated embodiment, the system 100 comprises a housing 106. The roller 101 is mounted on the housing 106. The stage 104 is movably mounted on the housing 106. The roller 101 and / or the stage 104 are displaceable in the x-direction or the inverse imprinting direction in the illustrated configuration. The carrier 103 and the stage 104 are displaceable from each other at least between the adjustment configuration and the imprinting configuration. In the adjustment configuration, the carrier 103 and the stage 104 are preferably positioned at a distance from each other and are displaceable from each other in at least one direction different from the imprinting direction so that the substrate 105 provided on the carrier 103 can be aligned with the stage 104 and / or the flexible stamp 102. In the imprinting configuration, the carrier 103 engages with the stage 104, and is in particular positioned directly on the stage 104, so that the substrate 105 provided on the carrier 103 is imprinted. Figure 1a shows the system in the adjustment configuration, where the carrier 103 and the stage 104 are positioned at a distance from each other in the z direction. The system 100 further includes a first actuator 107 for adjusting the relative position of the roller 101 and at least one stage 104. The system 100 also includes a second actuator 108 for adjusting the position of the carrier 103 relative to the stage 104.

[0063] Figures 2a, 2b, and 2c show a second embodiment of the system 200 according to the present invention. Figure 2a shows a schematic side view of the system 200, and Figures 2b and 2c show a partial top view of the system 200. The system 200 includes a roller 201 configured to roll at least one substantially flexible stamp 202 on a substrate 205 to be imprinted. The flexible stamp 202 may be wrapped around the roller. Alternatively, the flexible stamp may be an integrated part of the roller (i.e., a texture roller). The substantially flexible stamp 202 includes a texture area. The system 200 further includes a carrier 203 and a stage 204. In the illustrated embodiment, the system 200 includes a housing 206. In the illustrated embodiment, the carrier 203 includes an endless belt 203. The endless belt 203 cooperates with two guide rollers 209. The endless belt 203 is essentially mounted around guide rollers 209 that are spaced apart from each other. In the illustrated embodiment, a portion of the housing 206 is attached to the guide rollers 209 of the carrier 203 and to the stage 204. The housing 206 is connected to at least two guide rollers 209 of at least one endless belt 203, particularly via at least two actuators 213, in particular a voice coil actuator 213. The guide rollers 209 may also be drive rollers for driving the endless belt 203. Figures 2b and 2c show that alignment of the substrate 205 with respect to the stage 204 can be achieved by adjusting the position of the carrier 203, particularly the endless belt 203, with respect to the stage 204. It can be seen that this configuration allows for the relative displacement of the carrier 203 with respect to the stage 204 in a direction different from the imprinting direction (x direction) (y direction). Figure 2b shows an initial configuration, and Figure 2c shows the precise alignment of the substrate 205 with respect to the stage 204 and / or a flexible stamp.The system 200 is configured in particular so that the carrier 203 can perform tilting and / or partial rotational motion relative to the stage 204. The carrier 203 substantially surrounds the stage 204. A portion of the carrier 203 is substantially positioned between the rollers 201 and the stage 204. The system 200 may further optionally include at least one visual inspection device 210 and / or at least one supply unit 211 for supplying at least one substrate 205 onto at least one carrier 203.

[0064] Figures 3a and 3b show a third embodiment of the system 300 according to the present invention. Figure 3a shows a schematic side view of the system 300, and Figure 3b shows a detailed view of a part thereof. The system 300 includes a roller 301 configured to roll at least one substantially flexible stamp 302 on a substrate 305 to be imprinted. The system 300 further includes a carrier 303 and a stage 304. The carrier 303 includes an endless belt 303 received on a guide roller 309. The system 300 also includes a second actuator 308 for adjusting the position of the carrier 303 relative to the stage 304. A portion of the carrier 303 is air permeable. At least a portion of the carrier 303 has a porous structure. Figure 3b shows that a portion of the carrier 303 under the substrate 305 has an opening through which air can pass. A further portion of the carrier 303 is air impermeable. The stage 304 includes an air passage 312 for supplying and / or taking in air. This may be, for example, compressed air and / or a (partial) vacuum. System 300 allows, in particular, that the pressure between the carrier 303 and the stage 304 be increased during the alignment step and / or decreased during the imprinting step.

[0065] Figures 4a and 4b show two embodiments of a fourth embodiment of the system 400 according to the present invention. The system 400 includes a removable mock substrate 440. Figure 4a shows an embodiment in which the carrier 403 includes the removable mock substrate 440. Figure 4b shows an embodiment in which the stage 404 includes the removable mock substrate 440. The mock substrate 440 is positioned adjacent to the substrate 405 to be imprinted. In the area where the mock substrate 440 is present, it can be seen that the mock substrate 440 results in the upper surface height of the carrier 403 locally matching the upper surface height of the substrate 405 to be imprinted. In this case, the roller 401 can apply more uniform pressure to the substrate 405 to be imprinted.

[0066] The present invention is not limited to the exemplary embodiments illustrated and described herein, and countless modifications are possible within the framework of the appended claims, which will be obvious to those skilled in the art. In this case, it is conceivable that different inventive concepts and / or technical means of the above modified embodiments can be combined in whole or in part without departing from the spirit of the invention described in the appended claims.

[0067] As used in this patent document, the verb "comprise" and its conjugations are understood to include not only "to include," but also "to contain," "to substantially contain," "to be formed by," and their conjugations.

Claims

1. A system for imprinting, particularly for nanoimprinting, A stamp having at least one flexibility and / or at least one roller configured to apply pressure to at least one substrate to be imprinted, A carrier configured to transport at least one substrate to be imprinted, A stage configured to support at least one carrier and / or at least one substrate during imprinting, Equipped with, At least one roller and at least one stage are displaceable relative to each other in the imprinting direction, in particular to facilitate imprinting. At least one carrier and at least one stage are displaceable from each other between at least the adjustment configuration and the imprinting configuration. The adjustment configuration is such that the carrier and the stage are displaceable from each other in at least one direction different from the imprinting direction, so that at least one substrate provided on the carrier can be aligned with the stage. The imprinting configuration is such that at least one carrier engages with at least one stage so that at least one substrate provided on the carrier is imprinted. At least one carrier shall have at least one endless belt, At least a portion of the endless belt surrounds at least a portion of at least one stage in at least an imprinting configuration. system.

2. The system according to claim 1, wherein the distance between at least one roller and at least one stage is adjustable.

3. The system according to any of the preceding claims, in at least the adjustment configuration, wherein the carrier and the stage are displaceable from each other in multiple directions in a plane substantially parallel to the plane formed by the stage and / or the carrier, and at least one of the directions is different from the imprinting direction.

4. The system according to any of the preceding claims, wherein the distance between at least one roller and at least one carrier is adjustable, and / or the distance between at least one carrier and at least one stage is adjustable.

5. The system according to any of the preceding claims, comprising at least one first actuator for adjusting the relative position of at least one roller and at least one stage.

6. The system according to any of the preceding claims, further comprising at least one second actuator for adjusting the position of at least one carrier relative to at least one stage.

7. The system according to any of the preceding claims, wherein at least a portion of at least one carrier is positioned substantially between at least one roller and at least one stage in at least an imprinting configuration.

8. A system according to any of the preceding claims, wherein at least a portion of at least one carrier substantially surrounds at least a portion of at least one stage.

9. The system according to any of the preceding claims, wherein at least one endless belt is basically mounted around at least two guide rollers that are spaced apart from each other.

10. The system according to any of the preceding claims, wherein at least one endless belt surrounds at least one stage such that the belt direction of the endless belt is substantially equal to or opposite to the imprinting direction.

11. The system according to any of the preceding claims, wherein at least a portion of at least one carrier is air permeable.

12. At least one carrier, at least a portion of it, has a porous structure. The system described in any of the preceding claims.

13. The system according to any of the preceding claims, wherein at least a portion of at least one carrier comprises a mesh, raster, matrix, porous structure, and / or woven structure.

14. The system according to any of the preceding claims, wherein at least a portion of at least one carrier is air-impermeable.

15. The system according to any of the preceding claims, comprising at least one pneumatic regulator configured to provide airflow between at least one stage and at least one carrier.

16. The system according to any of the preceding claims, wherein at least one stage comprises at least one air passage for supplying and / or taking in air.

17. The system according to any of the preceding claims, comprising at least one heater for heating and / or cooling at least a portion of the roller.

18. The system according to any of the preceding claims, comprising at least two rollers configured to roll at least one substantially flexible stamp on at least one substrate onto which it is imprinted.

19. The system according to any of the preceding claims, comprising at least one housing, wherein at least one roller and at least one stage are housed within and / or mounted within the housing.

20. A system according to any of the prior claims, comprising at least one substantially flexible stamp configured for imprinting, particularly nanoimprinting.

21. The system according to claim 20, wherein at least one substantially flexible stamp comprises at least one texture region.

22. The system according to any of the preceding claims, comprising at least one visual inspection device.

23. The system according to any of the preceding claims, comprising at least one supply unit for supplying at least one substrate on at least one carrier.

24. Processes for imprinting, particularly nanoimprinting, A step of providing at least one system according to any of the prior claims, The steps include providing at least one substrate to be imprinted on at least one carrier, The steps include: configuring at least one carrier and at least one stage in a coordinated configuration, and aligning the relative positions of at least one carrier and at least one stage so that the substrate is substantially aligned with at least one stage and / or at least one flexible stamp; The steps include: configuring at least one carrier and at least one stage in an imprinting configuration, and having at least one carrier engage with at least one stage so that a substrate provided on at least one carrier is imprinted; A process that includes this.

25. The process according to claim 24, further comprising a substrate imprinting step of rolling at least one substantially flexible stamp over a substrate.

26. The process according to claim 24 or 25, wherein the pressure between the carrier and the stage is increased during the alignment step, and / or the pressure between the carrier and the stage is decreased during the imprinting step.

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