Scanning mirror device provided with a light source member

Abstract

To provide a scanning mirror device including a light source member with a simple structure and low bulkiness. 【Solution means】It includes a scanning mirror body 1 having a reflecting surface 111, a plurality of light source members 2 fitted or fixed to the reflecting surface 111, an actuator unit 3 connected to the scanning mirror body 1, and a torsion shaft connected to the scanning mirror body 1. When the actuator unit 3 is actuated, the actuator unit 3 drives the scanning mirror body 1 to generate a torsional motion by the torsion shaft. The light source member 2 generates emitted light, and the emitted light is directly emitted from the scanning mirror body 1.

Description

Technical Field

[0001] The present invention relates to a scanning mirror device, and more particularly to a scanning mirror device provided with a light source member.

Background Art

[0002] Scanning mirrors, particularly MEMS scanning mirrors, have already been widely applied in fields such as projection displays.

[0003] As a specific technique, for example, Non-Patent Document 1 mentions various electrostatically driven MEMS mirrors, electromagnetic driven MEMS mirrors, piezoelectric MEMS mirrors, etc. However, in what is described in Non-Patent Document 1 above, regardless of the driving method, the light sources of the MEMS mirrors are all installed outside the MEMS mirrors, and often additional mirrors for other focusing lenses and changing the optical path need to be combined, resulting in the drawback that the entire device becomes bulky.

Prior Art Documents

Non-Patent Documents

[0004]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] An object of the present invention is to provide a scanning mirror device provided with a light source member having a simple structure and not being bulky.

Means for Solving the Problems

[0006] The scanning mirror device provided with the light source member of the present invention includes a scanning mirror body having a reflecting surface, a plurality of light source members fitted into or fixed to the reflecting surface, an actuator unit connected to the scanning mirror body, and a torsion shaft connected to the scanning mirror body. When the actuator unit is operated, the actuator unit drives the scanning mirror body to generate a torsional motion by the torsion shaft, the light source member generates emitted light, and the emitted light is directly emitted from the scanning mirror body.

[0007] Furthermore, the scanning mirror body includes a reflecting mirror and a sensor unit, the reflecting mirror has the reflecting surface, and the sensor unit detects incident light reflected back from outside the scanning mirror body.

[0008] Furthermore, the sensor unit may include a photodiode and / or a photosensitive coating.

[0009] Furthermore, the reflecting mirror has a shape other than circular.

[0010] Furthermore, the light source member may include a laser and / or a light emitting diode.

[0011] Furthermore, the actuator unit includes a piezoelectric actuator, and an operating spring is connected between the piezoelectric actuator and the scanning mirror body.

[0012] Furthermore, the torsion shaft may be a torsion spring.

Advantages of the Invention

[0013] According to the present invention, the following effects can be achieved. 1. Since the light source member is directly installed on the reflecting surface, there is no need to separately add a lens or a mirror, and the volume can be significantly reduced. 2. Since the light source member is directly installed on the reflecting surface, the reflecting mirror is not limited to a circular shape.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Modes for Carrying Out the Invention

[0015] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It goes without saying that the present invention is not limited to the embodiments described below.

[0016] [Embodiment 1] FIG. 1 and FIG. 2 show Embodiment 1 of the present invention. In Embodiment 1, a scanning mirror device including a light source member includes a scanning mirror body 1, a plurality of light source members 2, an actuator unit 3, and a torsion shaft.

[0017] The scanning mirror body 1 includes a reflecting mirror 11 and a sensor unit, and the reflecting mirror 11 has a reflecting surface 111. Preferably, the reflecting mirror 11 is a plane mirror, and the sensor unit includes a photodiode 12 and a photosensitive coating 13. In the example shown in the figure, a plurality of photodiodes 12 are arranged together with a plurality of photosensitive coatings 13, but in actual implementation, it may be only a single photodiode 12 or a single photosensitive coating 13, etc.

[0018] A plurality of light source members 2 are installed on the reflecting surface 111. Preferably, the light source member 2 is a laser or a light-emitting diode, or a part thereof may be a laser and a part thereof may be a light-emitting diode, and lights of three colors (R, G, B) are arranged in a row respectively, and three rows of light source members 2 are formed. In the figure, the light source member 2 is simply shown as a circular shape without thickness. However, during actual implementation, the light source member 2 may be inserted into the mirror 11 using a heterogeneous integration (heterogeneous chip integration) process, or may be simply fixed on the surface of the mirror 11.

[0019] The actuator unit 3 is connected to the scanning mirror body 1. The actuator unit 3 includes a piezoelectric actuator 31, and a working spring 32 is connected to the piezoelectric actuator 31 and the scanning mirror body 1.

[0020] The torsion shaft is connected to the scanning mirror body 1. Preferably, the torsion shaft is a torsion spring 4.

[0021] After the piezoelectric actuator 31 operates, the piezoelectric actuator 31 drives the scanning mirror body 1 through the working spring 32 to generate a torsional motion by the torsion shaft, and the light source member 2 generates emitted light and directly emits it from the scanning mirror body 1, and a sensor unit such as a photodiode 12 and (or) a photosensitive coating 13 detects the incident light reflected back from outside the scanning mirror body 1.

[0022] More specifically, when the emitted light irradiates an object to be measured (not shown), such as a biological eyeball, an integrated circuit, or a III-V group material, backward scattering light scatters along the original optical path and returns to the reflecting surface 111, is detected by the sensor unit, and calculations are performed by a processing unit (not shown) to know the characteristics of the object to be measured (for example, the position of the eyeball, the lesion of the eyeball, the defective position of the integrated circuit, etc.).

[0023] What needs to be particularly explained here is that the main technical feature of the present invention lies in the fact that the light source member 2 is installed on the reflecting surface 111, which is not an improvement over the existing structures of conventional piezoelectric MEMS mirrors such as the piezoelectric actuator 31, the operating spring 32, and the torsion spring 4. A person skilled in the art can naturally implement a scanning mirror device equipped with the light source member based on the prior art such as the aforementioned papers. Therefore, the description of the above existing structures and the structures and functions inherent in the conventional piezoelectric MEMS mirror will be omitted and only the above simple description will be provided.

[0024] Note that in the drawings, the wiring for supplying power to each member is omitted. Taking the light source member 2 as an example, a person skilled in the art can separate the wiring of the light source member 2 and the wiring of the piezoelectric actuator 31 according to actual needs, wind the wiring of the light source member 2 around the torsion spring 4, the operating spring 32, etc. and connect it to an external power source or battery. Also, the wiring of each light source member 2 is not limited to one.

[0025] [Embodiment 2] Fig. 3 shows Embodiment 2 of the present invention. The difference between this embodiment and Embodiment 1 is as follows, and mainly this point will be explained. The photosensitive coating 13a is arranged in a plurality of rectangular areas in Embodiment 1, but in this embodiment, it covers the entire reflecting surface 111a, significantly increasing the photosensitive area. Since all other structures are the same as or corresponding to those in Embodiment 1, the description will be omitted here.

[0026] [Embodiment 3] Figs. 4 and 5 show Embodiment 3 of the present invention. The difference between this embodiment and Embodiment 1 is as follows. In the part of the light source member 2b, in Embodiment 1, the lights of three colors are arranged in a row respectively, but in this embodiment, the light source member 2b has only one light of each of the three colors and is arranged in a horizontal, vertical, inclined, etc. manner.

[0027] In this embodiment, one light source member 2b is arranged for each of the three types of light, and preferably two sets of the actuator unit 3b and the torsion spring 4b are installed to control the operations in two directions respectively to achieve the scanning of the surface. Since all other structures are the same as or corresponding to those in the first embodiment, the description thereof is omitted here.

[0028] Referring to FIGS. 1 and 2 again, since the light source member 2 is directly installed on the reflecting surface 111, there is no need to additionally provide a lens or a mirror, and the overall volume of the module or the system can be significantly reduced, which is more suitable for the applications with limited space such as the line-of-sight measurement device, the augmented reality device, the virtual reality device, the head-up display, and other wearable devices, and is helpful for reducing the volume of various products.

[0029] The laser beam usually has a circular spot, and most of the conventional mirrors are limited to circular shapes in order to utilize most of the light rays better. However, in the present invention, the light source member 2 is directly installed on the reflecting surface 111, and the shape of the reflecting mirror 11 can be determined based on the dimensions and the arrangement method of the light source member 2 and is not limited to circular.

[0030] The above is the description of the embodiments of the present invention, and the present invention cannot be limited by these. All changes and modifications that do not depart from the scope of the utility model registration claims are included in the scope of rights of the present invention.

Description of Reference Numerals

[0031] 1 Scanning mirror body 11 Reflecting mirror 111, 111a Reflecting surface 12 Photodiode 13, 13a Photosensitive coating 2, 2b Light source member 3, 3b Actuator unit 31 Piezoelectric actuator 32 Actuating spring 4, 4b Torsion spring

Claims

1. A scanning mirror device comprising a light source member, a scanning mirror body having a reflecting surface, a plurality of light source members fitted into or fixed to the reflecting surface, an actuator unit connected to the scanning mirror body, a torsion shaft connected to the scanning mirror body, and when the actuator unit is operated, the actuator unit drives the scanning mirror body to generate a torsional movement by the torsion shaft, the light source member generates emitted light, and the emitted light is directly emitted from the scanning mirror body. A scanning mirror device comprising a light source member, characterized in that.

2. The scanning mirror body includes a reflecting mirror and a sensor unit, the reflecting mirror has the reflecting surface, and the sensor unit detects incident light reflected back from outside the scanning mirror body. The scanning mirror device comprising a light source member according to Claim 1, characterized in that.

3. The sensor unit includes a photodiode and / or a photosensitive coating. The scanning mirror device comprising a light source member according to Claim 2, characterized in that.

4. The reflecting mirror has a shape other than circular. The scanning mirror device comprising a light source member according to Claim 2, characterized in that.

5. The light source member includes a laser and / or a light emitting diode. The scanning mirror device comprising a light source member according to Claim 1, characterized in that.

6. The actuator unit includes a piezoelectric actuator, and an operating spring is connected between the piezoelectric actuator and the scanning mirror body. The scanning mirror device comprising a light source member according to Claim 1, characterized in that.

7. The torsion shaft is a torsion spring. The scanning mirror device comprising a light source member according to Claim 1, characterized in that.

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