Biochip

Abstract

A biochip for use in detecting biological materials is provided. The semiconductor device includes a substrate (110), semiconductor layers (120, 121, 122, 123), an insulating layer (130), IL1, IL2, metal layers (140, 141, 142, 143), a solution (200, 210, 220), a first protective layer (150, 152, 153) and a second protective layer (160, 161, 162, 163). The semiconductor layer is disposed on the substrate and has a reaction region. The insulating layer is disposed on the semiconductor layer and has a first opening (O1) exposing the reaction region. The metal layer is disposed on the insulating layer (130). The metal layer includes a source electrode (141), a drain electrode (142) and a surrounding wall structure (143). The source electrode and the drain electrode are electrically connected to the semiconductor layer, respectively. The surrounding wall structure has a first opening (O1). The opening surrounds the source electrode and the drain electrode. A first protective layer is disposed on the metal layer and has a second opening O2. A second protective layer is disposed on the first protective layer and has a third opening O3 and a fourth opening O4. The second protective layer includes a first protrusion 161, a second protrusion 162 and a third protrusion 163. The first protrusion is disposed corresponding to the source electrode, the second protrusion is disposed corresponding to the drain electrode, and the third protrusion is disposed corresponding to the surrounding wall structure, surrounding and defining the fourth opening. A solution containing bioprobes 210 is disposed in the opening. In the normal direction of the substrate, the third opening overlaps the second opening and the first opening, and the fourth opening exposes the first protective layer.

Description

[Technical Field]

[0001] The present invention relates to semiconductor chips, and more particularly to biochips. [Background technology]

[0002] In a typical biochip, the space available for accommodating a solution (e.g., a polymer spotting solution or a sample solution) is usually limited by the size of the reaction area, so if a large amount of solution is used or if there is an error in adding the solution, the solution is likely to overflow. Summary of the Invention [Problem to be solved by the invention]

[0003] The present invention provides a biochip that can prevent the problem of overflow of solutions (e.g., polymer spotting solutions or sample solutions), can accommodate larger solution volumes, and can simultaneously detect multiple types of biomaterials without interfering with each other. [Means for solving the problem]

[0004] The biochip of the present invention is used to detect biomaterials and includes a substrate, a semiconductor layer, an insulating layer, a metal layer, a solution, a first protective layer, and a second protective layer. The semiconductor layer is disposed on the substrate and has a reaction region. The insulating layer is disposed on the semiconductor layer and has a first opening exposing the reaction region. The metal layer is disposed on the insulating layer and includes a source electrode, a drain electrode, and a surrounding wall structure. The source electrode and drain electrode are electrically connected to the semiconductor layer, respectively. The surrounding wall structure surrounds the first opening, the source electrode, and the drain electrode. The first protective layer is disposed on the metal layer and has a second opening. The second protective layer is disposed on the first protective layer and has a third opening and a fourth opening. The second protective layer includes a first protrusion, a second protrusion, and a third protrusion. The first protrusion is disposed corresponding to the source electrode. The second protrusion is disposed corresponding to the drain electrode. The third protrusion is disposed corresponding to the surrounding wall structure and surrounds and defines the fourth opening. A solution is placed in the first opening, the second opening, the third opening, and the fourth opening. The solution contains a biological probe, and a portion of the bioprobe can bind to the reaction region of the semiconductor layer. In the normal direction of the substrate, the third opening overlaps the second opening and the first opening. The fourth opening exposes the first protective layer.

[0005] In one embodiment of the present invention, the source electrode, the drain electrode and the shroud structure are in the same layer and are separated from each other, and the source electrode and the drain electrode are electrically insulated from the shroud structure.

[0006] In one embodiment of the present invention, the first protective layer is a hydrophobic material.

[0007] In one embodiment of the present invention, the second protective layer is a hydrophilic material.

[0008] In one embodiment of the present invention, the first protrusion, the second protrusion and the third protrusion are separated from each other.

[0009] In one embodiment of the present invention, the third protrusion completely surrounds the fourth opening.

[0010] In one embodiment of the present invention, the third opening is located between the first protrusion and the second protrusion, and the fourth opening is located between the second protrusion and the third protrusion.

[0011] In one embodiment of the present invention, the fourth opening has a larger dimension than the third opening.

[0012] In one embodiment of the present invention, the solution is brought into contact with the upper surface of the first protective layer exposed through the fourth opening. [Effects of the Invention]

[0013] Based on the above, in one embodiment of the biochip of the present invention, the third protrusion installed above the surrounding wall structure has a shape that completely surrounds the fourth opening, thereby preventing the solution (e.g., polymer spotting solution or sample solution) from overflowing outside the fourth opening, allowing for a larger solution volume to be accommodated, and multiple types of biological materials to be detected simultaneously without interfering with each other.

[0014] In order to make the above features and advantages of the present invention more clearly understandable, the present invention will be described in detail below with reference to the accompanying drawings. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a schematic plan view of a biochip according to an embodiment of the present invention; [Figure 2] FIG. 2 is a three-dimensional schematic diagram of a method for manufacturing the biochip of FIG. 1. [Figure 3] FIG. 2 is a three-dimensional schematic diagram of a method for manufacturing the biochip of FIG. 1. [Figure 4] FIG. 2 is a three-dimensional schematic diagram of a method for manufacturing the biochip of FIG. 1. [Figure 5] FIG. 2 is a three-dimensional schematic diagram of a method for manufacturing the biochip of FIG. 1. [Figure 6] FIG. 2 is a three-dimensional schematic diagram of a method for manufacturing the biochip of FIG. 1. [Figure 7] FIG. 7 is a schematic cross-sectional view of the biochip of FIG. 6 taken along the cross-sectional line II'. [Figure 8]FIG. 7 is a schematic cross-sectional view of the biochip of FIG. 6 taken along the cross-sectional line II-II'. DETAILED DESCRIPTION OF THE INVENTION

[0016] Fig. 1 is a plan view schematic diagram of a biochip according to one embodiment of the present invention. Figs. 2 to 6 are three-dimensional schematic diagrams of a method for manufacturing the biochip of Fig. 1. Fig. 7 is a cross-sectional schematic diagram of the biochip of Fig. 6 taken along line I-I'. Fig. 8 is a cross-sectional schematic diagram of the biochip of Fig. 6 taken along line II-II'. For clarity of the drawings and ease of explanation, the semiconductor layer 120, metal layer 140, and solution 200 in the biochip 10 are omitted from Figs. 5 and 6.

[0017] 1, 6, 7, and 8, the biochip 10 of this embodiment can include at least one detection unit 100 (FIG. 1 illustrates three detection units 100 for illustrative purposes, but is not limited to this). The detection unit 100 includes a substrate 110, an insulating layer IL1, an insulating layer IL2, a semiconductor layer 120, an insulating layer 130, a metal layer 140, a first protective layer 150, and a second protective layer 160. The semiconductor layer 120 is disposed on the substrate 110 and includes a reaction region 121. The insulating layer 130 is disposed on the semiconductor layer 120 and includes a first opening O1 exposing the reaction region 121. The metal layer 140 is disposed on the insulating layer 130 and includes a source electrode 141, a drain electrode 142, and a surrounding wall structure 143. The source electrode 141 and the drain electrode 142 are electrically connected to the semiconductor layer 120, respectively. The surrounding wall structure 143 may surround the first opening O1, the source electrode 141, and the drain electrode 142. The first protective layer 150 is disposed on the metal layer 140 and has a second opening O2. The second protective layer 160 is disposed on the first protective layer 150 and has a third opening O3 and a fourth opening O4. The second protective layer 160 includes a first protrusion 161, a second protrusion 162, and a third protrusion 163. The first protrusion 161 is disposed corresponding to the source electrode 141. The second protrusion 162 is disposed corresponding to the drain electrode 142. The third protrusion 163 is disposed corresponding to the surrounding wall structure 143 and may surround and define the fourth opening O4. In the normal direction Z of the substrate 110, the third opening O3 may overlap the second opening O2 and the first opening O1. The fourth opening O4 can expose a portion of the first protective layer 150.

[0018] The biochip 10 of this embodiment can be used to detect biological materials. The biological materials can be, for example, but are not limited to, microorganisms or biomolecules in a sample solution. The microorganisms can include, for example, bacteria, viruses, or a combination thereof, and the biomolecules can include, for example, but are not limited to, nucleic acids (including deoxyribonucleic acid, ribonucleic acid, or a combination thereof), nucleotides, proteins, carbohydrates, lipids, or a combination thereof.

[0019] A method for manufacturing the biochip 10 of this embodiment will be described below. The method for manufacturing the biochip 10 of this embodiment can include the following steps.

[0020] 2, 7, and 8, a substrate 110 is provided, an insulating layer IL1 is formed on the substrate 110, an insulating layer IL2 is formed on the insulating layer IL1, and a semiconductor layer 120 is formed on the substrate 110 and the insulating layer IL2. In this embodiment, the substrate 110 may be a silicon substrate or a silicon wafer. For example, the substrate 110 may be, but is not limited to, a P-type silicon substrate.

[0021] In this embodiment, the semiconductor layer 120 includes a reaction region 121, a source region 122, and a drain region 123. The reaction region 121 is located between the source region 122 and the drain region 123, and the reaction region 121 may connect the source region 122 and the drain region 123. In this embodiment, the material of the semiconductor layer 120 may include, but is not limited to, polycrystalline silicon or other suitable semiconductor materials. In some embodiments, the reaction region 121 may be considered as a channel in a transistor structure. Therefore, when a threshold voltage of the reaction region 121 (channel) is exceeded, the reaction region 121 (channel) may be turned on, and current from the drain electrode 142 may be transmitted to the source electrode 141 through the reaction region 121 (channel).

[0022] 3, 7, and 8, an insulating layer 130 is formed on the semiconductor layer 120. Specifically, the insulating layer 130 has a first opening O1, an opening 131, and an opening 132. Here, the first opening O1 may expose a portion of the reaction region 121 and a portion of the insulating layer 130, the opening 131 may expose a portion of the source region 122, and the opening 132 may expose a portion of the drain region 123.

[0023] 4, 7, and 8, a metal layer 140 is formed on the insulating layer 130. Specifically, the metal layer 140 may expose a portion of the insulating layer 130. The metal layer 140 includes a source electrode 141, a drain electrode 142, and a surrounding wall structure 143. The source electrode 141 is disposed on the insulating layer 130 and in the opening 131, and the drain electrode 142 is disposed on the insulating layer 130 and in the opening 132. In the normal direction Z of the substrate 110, the source electrode 141 may be disposed corresponding to and overlapping the source region 122, and the drain electrode 142 may be disposed corresponding to and overlapping the drain region 123. The surrounding wall structure 143 may be disposed on the insulating layer 130, and the surrounding wall structure 143 may surround the source electrode 141 and the drain electrode 142. In this embodiment, the source electrode 141, the drain electrode 142, and the surrounding wall structure 143 can be the same layer, the source electrode 141, the drain electrode 142, and the surrounding wall structure 143 can be physically separated from each other, and the source electrode 141 and the drain electrode 142 can be electrically insulated from the surrounding wall structure 143.

[0024] 5, 7, and 8, a first protective layer 150 is formed on the metal layer 140. Specifically, the first protective layer 150 has a second opening O2 and an opening 151, and includes a flat portion 152 and a protruding portion 153. The flat portion 152 may cover the insulating layer 130 exposed by the metal layer 140, and the flat portion 152 may surround and define the second opening O2. The protruding portion 153 may cover the metal layer 140 and completely surround and define the opening 151. In the normal direction Z of the substrate 110, the protruding portion 153 may overlap and correspond to the source electrode 141, the drain electrode 142, and the surrounding wall structure 143, and the second opening O2 may overlap and correspond to the first opening O1, exposing a portion of the reaction region 121.

[0025] In the three-dimensional view of the biochip 10 shown in FIG. 5, the protrusion 153 can be a closed, solid figure, the opening 151 can be connected to the second opening O2, and the dimensions of the opening 151 can be larger than the dimensions of the second opening O2.

[0026] In this embodiment, the material of the first protective layer 150 may be a hydrophobic material, but not a hydrophilic material, such as, but not limited to, silicon nitride (SiN), plasma enhanced silicon nitride (PESIN), oxynitrides (SiON), other suitable hydrophobic materials, or combinations thereof.

[0027] 6, 7, and 8, a second protective layer 160 is formed on the first protective layer 150, and a solution 200 containing bioprobes 210 is applied thereto. Specifically, the second protective layer 160 has a third opening O3 and a fourth opening O4, and includes a first protrusion 161, a second protrusion 162, and a third protrusion 163. In the normal direction Z of the substrate 110, the first protrusion 161 may be disposed over and corresponding to the source electrode 141, the second protrusion 162 may be disposed over and corresponding to the drain electrode 142, and the third protrusion 163 may be disposed over and corresponding to the surrounding wall structure 143. The first protrusion 161, the second protrusion 162, and the third protrusion 163 may be separated from one another. The third protrusion 163 may completely surround and define the fourth opening O4.

[0028] In this embodiment, the third opening O3 is located between the first protrusion 161 and the second protrusion 162, and the fourth opening O4 is located between the second protrusion 162 and the third protrusion 163. In the normal direction Z of the substrate 110, the third opening O3 overlaps the second opening O2 and the first opening O1 and can expose a portion of the reaction region 121. The fourth opening O4 can expose a portion of the first protective layer 150, for example, a portion of the upper surface S1 of the flat portion 152, where the upper surface S1 faces away from the substrate 110.

[0029] In the three-dimensional view of the biochip 10 shown in FIG. 6, the third protrusion 163 can be a closed, complete figure, the fourth opening O4 can be connected to the third opening O3, and the dimensions of the fourth opening O4 can be larger than the dimensions of the third opening O3, the dimensions of the second opening O2, and the dimensions of the first opening O1.

[0030] In this embodiment, the second protective layer 160 may be a hydrophilic material, but not a hydrophobic material. For example, the material of the second protective layer 160 may include, but is not limited to, oxide, silicon oxide (SiO), plasma enhancement silicon oxide (PEOX), low pressure tetraethoxysilane (LPTEOS), plasma enhancement tetraethoxysilane (PETEOS), phosphorus silicon glass (PSG), boron silicon glass (BPSG), spin on glass (SOG), other suitable hydrophilic materials, or combinations thereof.

[0031] 7 and 8, a solution 200 may be placed in the first opening O1, the second opening O2, the third opening O3, the opening 151, and the fourth opening O4. A portion of the solution 200 may contact the reaction region 121 of the semiconductor layer 120, and another portion of the solution 200 may contact a portion of the upper surface S1 of the first protective layer 150 exposed by the fourth opening O4.

[0032] In this embodiment, the solution 200 may contain a bioprobe 210 and a liquid 220. The bioprobe 210 may be attached to the reaction region 121 of the semiconductor layer 120 and used to specifically identify and bind to biomaterials in the sample solution. Specifically, after adding the solution 200 containing the bioprobe 210, one end of the bioprobe 210 may be connected and fixed to the reaction region 121, and the other end of the bioprobe 210 may be used to identify and bind to biomaterials. The bioprobe 210 may be a chemical molecule or a biomolecule. For example, the bioprobe 210 may be, but is not limited to, an antibody, an antigen, a nucleic acid, a carbohydrate, or a combination thereof, as long as the bioprobe 210 can specifically identify and bind to biomaterials. In this embodiment, the solution 200 containing the bioprobe 210 may be, but is not limited to, a polymer spotting solution.

[0033] In this embodiment, the protrusions 153 and the third protrusions 163 disposed on the upper side of the surrounding wall structure 143 completely surround the opening 151 and the fourth opening O4, respectively, and therefore can confine the solution 200 within the opening 151 or the fourth opening O4 and prevent the solution 200 from overflowing outside the fourth opening O4, as shown in Figures 7 and 8. For example, if the solution 200 added to the first opening O1 or the second opening O2 of one of the detection units 100 of the biochip 10 overflows from the second opening O2, the provision of the protrusions 153 and the third protrusions 163 can confine the solution 200 within the opening 151 and the fourth opening O4, respectively, thereby preventing the solution from overflowing and interfering with the detection results of other adjacent detection units 100. Therefore, compared to a general biochip, the biochip 10 of this embodiment can increase the volume of solution 200 that can be accommodated by the biochip 10 by providing the opening 151 and the fourth opening O4, and can also improve the ease of operation and convenience of the biochip 10. In this way, the biochip 10 of this embodiment can simultaneously detect different biomaterials in different detection units 100, without having to worry about the risk of cross-contamination between adjacent detection units due to solution overflow, and can achieve the effect of simultaneously detecting multiple types of biomaterials.

[0034] In this embodiment, the third protrusion 163 of the second protective layer 160 installed above the surrounding wall structure 143 is made of a hydrophilic material, not a hydrophobic material, which can reduce the fluidity of the solution 200 that comes into contact with the third protrusion 163, and further reduce the probability that the solution 200 will overcome the third protrusion 163, thereby further reducing the probability of solution overflow.

[0035] In this embodiment, the fourth opening O4 can expose a portion of the first protective layer 150, and since the first protective layer 150 is a hydrophobic material and not a hydrophilic material, the fluidity of the solution 200 that comes into contact with the first protective layer 150 can be increased here, and the solution 200 here can be quickly flowed into the third opening O3 for detection in the reaction area 121.

[0036] As described above, in one embodiment of the biochip of the present invention, the third protrusion located above the surrounding wall structure completely surrounds the fourth opening, preventing the solution from overflowing outside the fourth opening, allowing for a larger solution volume to be accommodated and preventing interference when detecting multiple types of biomaterials simultaneously. Because the third protrusion is made of a hydrophilic, not hydrophobic, material, the fluidity of the solution coming into contact with the third protrusion can be reduced, further reducing the probability of the solution overflowing the third protrusion and further reducing the probability of the solution overflowing. Because the first protective layer exposed by the fourth opening is made of a hydrophobic, not hydrophilic, material, the fluidity of the solution coming into contact with the first protective layer can be increased, allowing the solution to quickly flow into the third opening for detection.

[0037] Although the present invention has been disclosed by the above embodiments, this does not limit the present invention, and a person having ordinary skill in the art may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be defined by the claims below. [Industrial Applicability]

[0038] The biochip of the present invention can be used to prevent overflow of solutions (e.g., polymer spotting solutions or sample solutions), can be used to accommodate larger solution volumes, and can be used to simultaneously detect multiple types of biomaterials without interfering with each other. [Explanation of symbols]

[0039] 10: Biochip 100:Detection unit 110: Substrate 120: Semiconductor layer 121: Reaction region 122: Source area 123: Drain region 130, IL1, IL2: insulating layer 131, 132, 151: Opening 140: Metal layer 141: Source electrode 142: Drain electrode 143: Enclosure wall structure 150: 1st protective layer 152: Flat part 153:Protrusion 160:Second protective layer 161:First protrusion 162:Second protrusion 163: Third protrusion 200: Solution 210: Bioprobes 220:Liquid O1: First opening O2: 2nd opening O3: Third opening O4: Fourth Aperture S1:Top surface Z: Normal direction

Claims

1. 1. A biochip for use in detecting biological materials, comprising: A substrate; a semiconductor layer disposed on the substrate and having a reaction region; an insulating layer disposed on the semiconductor layer and having a first opening exposing the reaction region; a metal layer disposed on the insulating layer and including a source electrode and a drain electrode electrically connected to the semiconductor layer, respectively, and a surrounding wall structure surrounding the first opening, the source electrode, and the drain electrode; a first protective layer disposed on the metal layer and having a second opening; a second protective layer disposed on the first protective layer, the second protective layer having a third opening and a fourth opening, the second protective layer including: a first protrusion disposed corresponding to the source electrode, a second protrusion disposed corresponding to the drain electrode, and a third protrusion disposed corresponding to the surrounding wall structure, surrounding and defining the fourth opening; a solution disposed in the first opening, the second opening, the third opening, and the fourth opening; the solution contains bioprobes, and a portion of the bioprobes binds to the reaction regions of the semiconductor layer; the third opening overlaps the second opening and the first opening in a normal direction of the substrate, and the fourth opening exposes the first protective layer.

2. 2. The biochip of claim 1, wherein the source electrode, the drain electrode, and the surrounding wall structure are in the same layer and are separated from each other, and the source electrode and the drain electrode are electrically insulated from the surrounding wall structure.

3. The biochip of claim 1 , wherein the first protective layer is a hydrophobic material.

4. The biochip of claim 1 , wherein the second protective layer is a hydrophilic material.

5. The biochip of claim 1 , wherein the first protrusion, the second protrusion, and the third protrusion are separated from each other.

6. The biochip of claim 1 , wherein the third protrusion completely surrounds the fourth opening.

7. The biochip of claim 1 , wherein the third opening is located between the first protrusion and the second protrusion, and the fourth opening is located between the second protrusion and the third protrusion.

8. The biochip of claim 1 , wherein the fourth opening has a dimension greater than the third opening.

9. The biochip of claim 1 , wherein the solution contacts the upper surface of the first protective layer exposed through the fourth opening.

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