Pipeline insulation and valve-controlled exhaust system

Abstract

To provide a pipeline heating and valve-controlled exhaust system in which the valve control mechanism not only enhances the overall airflow control capability but also extends the cleaning cycle and maintenance interval, thereby reducing the risk of equipment downtime. [Solution] The front connection module 110 includes a front insulation space and a heating guide element 114 that heats the front insulation space; the elbow guide module 120 includes an elbow insulation space communicating with the front insulation space and a pressure detection unit 124 that detects the gas pressure in the elbow insulation space; the exhaust control module 130 includes a flow path opening 132 communicating with the elbow insulation space and a flow path valve element 134, the flow path valve element 134 shields a part of the flow path opening 132 to define an unshielded area, and when the pressure detection unit 124 detects a change in gas pressure, the flow path valve element 134 moves to adjust the unshielded area of ​​the flow path opening 132.

Description

Technical Field

[0001] The present invention relates to a pipeline heat preservation and valve control type exhaust device, in which the valve adjustment mechanism can not only enhance the overall air flow adjustment ability, but also extend the cleaning cycle and maintenance interval, and suppress the risk of device shutdown.

Background Art

[0002] Generally, most of the exhaust gas generated in the photolithography process of wafers is sent into the tail gas device by the exhaust duct of the negative pressure system for centralized treatment. However, since the photoresist itself contains organic solvents, when a large amount of organic solvents volatilize in the semiconductor process, the gas containing these photoresist components contacts the wall surface of the exhaust duct and cools and condenses, generating sticky crystals in the exhaust duct. Under the conditions of long-term accumulation of concentration, frequent use, such phenomena will rapidly increase the pressure loss of the entire exhaust system, cause abnormal exhaust, and generate gas molecule pollutants in the environment of the wafer production device, thus affecting the yield of wafer production.

[0003] In addition, due to the decrease in the gas flow efficiency, some residues of photoresist and volatile chemicals will cause condensation and crystal deposition in the exhaust passage, further hindering the smooth discharge of gas, and a local high-concentration chemical accumulation area may be formed inside the pipeline. Such accumulation of chemicals not only affects the control of gas flow velocity and flow direction, but may also cause reverse contamination due to reverse flow phenomenon, exposing important process areas to an unexpected chemical contamination environment.

[0004] For example, Patent Document 1 discloses an invention in which a heating member is attached to a pipeline to heat the pipe wall, but the device described in Patent Document 1 does not have a valve member capable of controlling the exhaust flow rate, and only discloses features related to exhaust heat preservation.

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] Patent No. 6529280 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] The objective of this invention is to provide a pipeline heating and valve-controlled exhaust system in which the valve adjustment mechanism not only enhances the overall airflow control capability but also extends the cleaning cycle and maintenance interval, thereby reducing the risk of equipment downtime. [Means for solving the problem]

[0007] The pipeline heating and valve-controlled exhaust system of the present invention includes a front connection module, an elbow guide module, and an exhaust control module, wherein the front connection module includes a front heating space formed inside and a heating guide element, the heating guide element is used to heat the front connection module and the front heating space, the elbow guide module is connected to the front connection module and includes an elbow heating space formed inside and a pressure detection unit, the elbow heating space is in communication with the front heating space and the pressure detection unit is used to detect the gas pressure in the elbow heating space, and the exhaust control module The Joule is detachably connected to one side of the elbow guide module opposite to the front connection module and comprises a flow path opening and a flow path valve element installed on one side of the flow path opening separated from the elbow guide module, wherein the flow path opening communicates with the elbow insulation space and the flow path valve element is positioned vertically corresponding to the flow path opening, the flow path valve element shields a portion of the flow path opening in the vertical direction to define the unshielded area of ​​the flow path opening, and when the pressure detection unit detects a change in the gas pressure, the flow path valve element moves along a horizontal direction perpendicular to the vertical direction to adjust the unshielded area of ​​the flow path opening.

[0008] According to one embodiment of the present invention, the elbow guide module has a joint on one side separated from the front connection module, and the exhaust control module further includes a quick-release airtight member installed above the flow path opening, and the joint of the elbow guide module is used to attach to or detach the quick-release airtight member of the exhaust control module.

[0009] According to one embodiment of the present invention, when chemical crystalline material accumulates in the exhaust control module and the gas pressure decreases, the flow valve element of the exhaust control module moves along the horizontal direction, increasing the unshielded area of ​​the flow opening, thereby increasing the gas pressure and suppressing the accumulation of the chemical crystalline material in the front connection module and the elbow guide module.

[0010] According to one embodiment of the present invention, the front connection module is provided with an external covering heat-insulating element, and the covering heat-insulating element is attached to the surface of the front connection module, thereby maintaining the temperature of the front connection module and suppressing the deposition of the chemical crystalline material on the front connection module.

[0011] According to one embodiment of the present invention, the elbow guide module is provided with an elbow heating member and a flexible heat-insulating element on its exterior, the elbow heating member is attached to the surface of the elbow guide module, and the flexible heat-insulating element covers the elbow heating member, thereby increasing the temperature of the elbow guide module and suppressing the deposition of the chemical crystalline material on the front connection module. [Effects of the Invention]

[0012] The pipeline insulation and valve-controlled exhaust system of this invention, with its structure combining a front connection module, an elbow guide module, and an exhaust control module, can effectively solve the problems of increased pressure loss and chemical deposition caused by conventional gas flow problems. The heating guide element heats the front connection module and the insulation space inside it, maintaining an appropriate temperature during the gas passage process. This reduces condensation and crystallization of photoresist or other gaseous chemicals on the pipe wall, suppressing the formation of deposits. Furthermore, the pressure detection unit in the elbow guide module can monitor changes in gas pressure within the elbow insulation space in real time. When deposits accumulate, increasing flow resistance and causing pressure anomalies, the flow path valve element in the exhaust control module moves horizontally, automatically adjusting the unshielded area of ​​the flow path opening to dynamically compensate for the exhaust flow rate, maintaining exhaust stability and process pressure balance. This valve adjustment mechanism not only enhances the overall airflow control capability but also extends cleaning cycles and maintenance intervals, reducing the risk of equipment downtime. Therefore, it can effectively prevent the accumulation of crystal deposits in the front connection module and elbow guide module, and also features automatic gas flow rate adjustment and pressure compensation capabilities, helping to maintain the cleanliness and stability of the process environment, thereby improving wafer manufacturing yield and equipment operational efficiency. [Brief explanation of the drawing]

[0013] [Figure 1] This is a perspective view showing an embodiment of the present invention: a pipeline heating and valve-controlled exhaust system. [Figure 2] This is a plan view of a pipeline heating and valve-controlled exhaust system illustrating an embodiment of the present invention. [Figure 3] This diagram shows a schematic representation of an embodiment of the present invention, illustrating the integration of a pipeline heating and valve-controlled exhaust system into a process apparatus. [Figure 4] This is an exploded perspective view showing an embodiment of the present invention: a pipeline heating and valve-controlled exhaust system. [Figure 5]It is a schematic diagram showing the operation of a flow path valve element, regarding an embodiment of the present invention. [Figure 6] It is a schematic diagram showing the operation of a flow path valve element, regarding an embodiment of the present invention. [Figure 7] It is a schematic diagram showing a state where an elbow guide module is removed from an exhaust control module, regarding an embodiment of the present invention. [Figure 8] It is a perspective view showing a state where a pipeline heat insulation and valve control type exhaust device is connected to a wafer storage pod, regarding an embodiment of the present invention. [Figure 9] It is a cross-sectional view taken along line 9-9 of FIG. [Figure 10] It is an enlarged view of the main part of FIG. 9. [Figure 11] It is a flowchart showing an operation method of a pipeline heat insulation and valve control type exhaust device according to an embodiment of the present invention.

Embodiments for Carrying out the Invention

[0014] Hereinafter, embodiments of the present invention will be described in detail based on the drawings. It is needless to say that the present invention is not limited to the embodiments described below. It should be emphasized that these drawings are not drawn such that each part is in proportion, but are for the purpose of explanation only. In fact, for the purpose of more clearly explaining, the dimensions of various features can be arbitrarily increased or decreased.

[0015] Also, in each embodiment, the reference numerals and / or characters of the members may overlap. This overlap is used for the purpose of simplicity and clarity, and does not itself specify the relationship between each embodiment and / or arrangement described.

[0016] For example, relative terms in space such as "below...", "under...", "lower part", "above...", "upper part", etc. are used to describe the relationship between one member or feature shown in the figure and another member or feature for the purpose of facilitating description in the text. Relative terms of space may also include the use other than the directions shown in the attached drawings or different directions of the device during operation. The device may be oriented in other ways (90-degree rotation, or other directions), and the relative terms of space used herein may be interpreted accordingly.

[0017] Refer to FIGS. 1 to 6. FIG. 1 is a perspective view of a pipeline heat preservation and valve control type exhaust device, FIG. 2 is a plan view of the pipeline heat preservation and valve control type exhaust device, FIG. 3 is a schematic diagram showing the incorporation of the pipeline heat preservation and valve control type exhaust device into a process device, FIG. 4 is an exploded perspective view of the pipeline heat preservation and valve control type exhaust device, and FIGS. 5 and 6 are schematic diagrams showing the operation of a flow path valve element.

[0018] In FIGS. 1 to 6, the pipeline heat preservation and valve control type exhaust device 100 includes a front connection module 110, an elbow guide module 120, and an exhaust control module 130. The pipeline heat preservation and valve control type exhaust device 100 can be horizontally and vertically extended within the process device 200. For example, one set of exhaust control modules 130 may be connected to three sets of front connection modules 110 and three sets of elbow guide modules 120. [[ID= sixteen]]Such a modular design can be flexibly adjusted according to the actual requirements of the device. This device can be applied to a single process chamber or a multi-chamber process system, and at the same time has high integration ability and convenience for maintenance. By sharing a single exhaust control module 130 with multiple sets of pipeline modules, not only can the complexity of the system design and construction be alleviated, but the gas pressure conditions of each passage can be monitored uniformly, and the efficiency and response agility of the overall exhaust system can be improved.

[0019] The front connection module 110 includes a front heat preservation space 112 formed inside and a heating guide element 114. The heating guide element 114 is used to heat the front connection module 110 and the front heat preservation space 112. The elbow guide module 120 is connected to the front connection module 110, and has an elbow insulation space 122 formed inside it, and is equipped with a pressure detection unit 124. The elbow insulation space 122 and the front insulation space 112 are connected, and the pressure detection unit 124 is used to detect the gas pressure in the elbow insulation space 122.

[0020] The heating guide element 114 of the front connection module 110 may be an electric heating plate, heating wire, or other heat source component with heating function, and can be positioned appropriately inside the housing of the front connection module 110 to provide a stable and uniform heat source. By continuously heating the front connection module 110 and the front heat retention space 112 with the heating guide element 114, the gas temperature can be maintained, preventing condensation or crystallization reactions of gases containing photoresist or chemicals, and effectively suppressing the risk of deposit formation. The front insulation space 112 may be a hollow insulating structure, or its thermal energy retention capacity may be enhanced by combining it with a covering of thermal insulation material.

[0021] The elbow guide module 120 has the function of guiding the flow of gas through its curvature, and the elbow insulation space 122 of the elbow guide module 120 also helps maintain thermal equilibrium during gas flow, preventing loss of gas stability or crystal deposition due to temperature differences at points where the flow curves. The pressure detection unit 124 of the elbow guide module 120 is installed on one side of the elbow guide module 120 and is connected to the control unit and mechanical system to provide real-time pressure feedback information. The monitoring results of the pressure detection unit 124 can be used as the basis for back-end exhaust control, ensuring the operational efficiency and stability of the entire exhaust system.

[0022] The exhaust control module 130 is detachably connected to one side of the elbow guide module 120 opposite to the front connection module 110, and includes a flow path opening 132 and a flow path valve element 134 installed on one side of the flow path opening 132 that is separated from the elbow guide module 120. The flow path opening 132 is connected to the elbow insulation space 122, and a flow path valve element 134 is positioned in the vertical direction D1 corresponding to the flow path opening 132. The flow path valve element 134 shields a portion of the flow path opening 132 in the vertical direction D1, defining the unshielded area of ​​the flow path opening 132. When the pressure detection unit 124 detects a change in gas pressure, the flow path valve element 134 moves along the horizontal direction D2 perpendicular to the vertical direction D1, adjusting the unshielded area of ​​the flow path opening 132.

[0023] When the gas pressure inside the elbow insulation space 122 of the elbow guide module 120 decreases due to the formation of deposits or exhaust blockage, the pressure detection unit 124 detects the pressure anomaly and outputs a corresponding signal, driving the flow valve element 134 to move along the horizontal direction D2, thereby increasing the unshielded area of ​​the flow opening 132, which improves exhaust efficiency and maintains a stable negative pressure environment inside the pipeline. This effectively delays the increase in pressure loss and exhaust anomaly phenomena caused by the deposition of photoresist crystals. For example, the flow path valve element 134 of the exhaust control module 130 can be controlled using various operating methods. For instance, an electric actuator, pneumatic actuator, hydraulic actuator, or solenoid valve can be used as the control means for the flow path valve element 134.

[0024] Refer to Figures 7 through 10. Figure 7 is a schematic diagram showing the elbow guide module 120 removed from the exhaust control module 130, Figure 8 is a perspective view showing the pipeline insulation and valve-controlled exhaust system 100 connected to the wafer storage pod 300, Figure 9 is a cross-sectional view along line 9-9 in Figure 8, and Figure 10 is an enlarged view of the main part of Figure 9.

[0025] In Figures 7 to 10, a joint 126 is provided on one side of the elbow guide module 120 that is separated from the front connection module 110, and the exhaust control module 130 is further equipped with a quick-release airtight member 136 installed above the flow path opening 132, and the joint 126 of the elbow guide module 120 is used to attach to or detach the quick-release airtight member 136 of the exhaust control module 130.

[0026] More specifically, the removable structure of the exhaust control module 130 is advantageous for regular cleaning and maintenance. Even if there is too much sediment inside, the user can quickly remove the exhaust control module 130 from the elbow guide module 120 by simply detaching the joint 126 of the front connection module 110 from the quick-release airtight member 136 of the exhaust control module 130. This eliminates the need to work on the entire device, effectively reducing machine maintenance time and improving the operational efficiency of the production line.

[0027] When chemical crystals accumulate in the exhaust control module 130 and the gas pressure decreases, the flow valve element 134 of the exhaust control module 130 moves along the horizontal direction D2, increasing the unshielded area of ​​the flow opening 132, thereby increasing the gas pressure and suppressing the accumulation of chemical crystals in the front connection module 110 and the elbow guide module 120. This pressure feedback and adjustment mechanism automatically adjusts the unshielded area of ​​the flow path opening 132 based on the actual pressure changes when the exhaust control module 130 is in an embolusing situation of varying degrees, thereby maintaining sufficient gas transport efficiency, suppressing the persistent occurrence of crystallization phenomena, and maintaining exhaust stability and process pressure balance.

[0028] A heat-insulating covering element 111 is installed on the outside of the front connection module 110, and the heat-insulating covering element 111 is attached to the surface of the front connection module 110, thereby maintaining the temperature of the front connection module 110 and suppressing the deposition of chemical crystalline material on the front connection module 110. The covering heat-insulating element 111 is made of a material with a low thermal conductivity coefficient, such as silicone cloth, ceramic fiber blanket, or high-temperature insulating foam, and can be combined with the heating guide element 114 to form a covering heating layer structure, thereby further increasing thermal efficiency. The front connection module 110 and the covering heat-insulating element 111 work together to stably maintain the gas passage at a temperature higher than the crystallization point, thereby suppressing the risk of deposition.

[0029] An elbow heating member 121 and a flexible heat-insulating element 123 are installed on the outside of the elbow guide module 120. The elbow heating member 121 is attached to the surface of the elbow guide module 120, and the flexible heat-insulating element 123 covers the elbow heating member 121, thereby increasing the temperature of the elbow guide module 120 and preventing chemical crystalline material from accumulating on the front connection module 110. The flexible heat-insulating element 123 is flexible, making it easy to cover curved or irregularly shaped pipe surfaces. By working in cooperation with the elbow heating member 121, it maintains sufficient gas guiding function throughout the elbow guide module 120 while simultaneously providing thermal stability and anti-sedimentation capabilities. This ensures smooth operation and stability of the entire exhaust system.

[0030] The front connection module 110 of the pipeline heating and valve-controlled exhaust system 100 is incorporated into the wafer storage pod 300, and wafers 310 are stored inside the wafer storage pod 300. When the pipeline insulation and valve-controlled exhaust system 100 is connected to the intake system for intake, the front insulation space 112 of the front connection module 110 and the elbow insulation space 122 of the elbow guide module 120 are maintained at a suitable operating temperature, and the flow path space of the exhaust control module 130 is also maintained at a suitable operating temperature. This effectively prevents crystallization and condensation of photoresist in low-temperature sections and suppresses the formation of deposits in the vent pipeline.

[0031] Refer to Figure 11. Figure 11 is a flowchart showing the operation method of a pipeline heating and valve-controlled exhaust system. The operation method for the pipeline insulation and valve-controlled exhaust system includes the following steps:

[0032] First, in step S1, the heating guide element of the front connection module heats the front connection module and the front heat retention space defined inside the front connection module. Next, in step S2, the pressure detection unit of the elbow guide module detects the gas pressure in the elbow insulation space defined inside the elbow guide module. Subsequently, the elbow insulation space and the front insulation space are connected. Next, in step S3, the exhaust control module is connected to the elbow insulation space via the flow path opening. The exhaust control module is detachably connected to one side of the elbow guide module opposite to the front connection module and includes a flow path valve element installed on one side of the flow path opening separated from the elbow guide module, the flow path valve element is positioned vertically in correspondence with the flow path opening and the flow path valve element shields a portion of the flow path opening vertically, defining the unshielded area of ​​the flow path opening. Next, in step S4, when the pressure detection unit detects a change in gas pressure, the flow path valve element moves along the horizontal direction perpendicular to the vertical direction to adjust the unshielded area of ​​the flow path opening.

[0033] The above-described process will be explained in detail with reference to Figures 1 to 10. First, the heating guide element 114 of the front connection module 110 heats the front connection module 110 and the front heat retention space 112 defined inside the front connection module 110.

[0034] Next, the pressure detection unit 124 of the elbow guide module 120 detects the gas pressure in the elbow insulation space 122 defined inside the elbow guide module 120. The elbow insulation space 122 and the front insulation space 112 are in communication.

[0035] Next, the exhaust control module 130 is connected to the elbow insulation space 122 via the flow path opening 132. The exhaust control module 130 is detachably connected to one side of the elbow guide module 120 opposite to the front connection module 110, and includes a flow path valve element 134 installed on one side of the flow path opening 132 that is separated from the elbow guide module 120. The flow path valve element 134 is positioned in the vertical direction D1 corresponding to the flow path opening 132, and the flow path valve element 134 shields a portion of the flow path opening 132 in the vertical direction D1, defining the unshielded area of ​​the flow path opening 132. Subsequently, when the pressure detection unit 124 detects a change in gas pressure, the flow path valve element 134 moves along the horizontal direction D2 perpendicular to the vertical direction D1, adjusting the unshielded area of ​​the flow path opening 132.

[0036] In summary, the pipeline insulation and valve-controlled exhaust system 100, by combining the front connection module 110, the elbow guide module 120, and the exhaust control module 130, can effectively solve the problems of increased pressure loss and chemical deposition caused by conventional gas flow deficiencies. The heating guide element 114 heats the front connection module 110 and the front heat retention space 112, maintaining an appropriate temperature during the gas passage process. This reduces condensation and crystallization of photoresist or other gaseous chemicals on the tube wall, suppressing the formation of deposits. Furthermore, the pressure detection unit 124 in the elbow guide module 120 can monitor changes in gas pressure within the elbow insulation space 122 in real time. When sediment accumulates, increasing flow resistance and causing a pressure anomaly, the flow path valve element 134 in the exhaust control module 130 moves along the horizontal direction D2, automatically adjusting the unshielded area of ​​the flow path opening 132 to dynamically compensate for the exhaust flow rate and maintain exhaust stability and process pressure balance. This valve adjustment mechanism not only enhances the overall airflow control capability but also extends cleaning cycles and maintenance intervals, reducing the risk of equipment downtime. Therefore, the pipeline heating and valve-controlled exhaust system 100 of the present invention can not only effectively prevent the accumulation of crystal deposits in the front connection module 110 and the elbow guide module 120, but also has the capability to automatically adjust the gas flow rate and compensate for pressure, which helps maintain the cleanliness and stability of the process environment, thereby improving the yield of wafer manufacturing and the operational efficiency of the equipment.

[0037] The above is a description of embodiments of the present invention, and these do not limit the present invention. Any changes or modifications that do not depart from the scope of the utility model registration claims are included within the scope of the rights of the present invention. [Explanation of Symbols]

[0038] 100 Pipeline Insulation and Valve-Controlled Exhaust System 110 Front Connection Module 111 Covering and heat-insulating elements 112 Front Insulated Space 114 Heating guide element 120 Elbow Guide Module 121 Elbow heating element 122 Elbow Insulated Space 123 Flexible thermal elements 124 Pressure detection unit 126 Joint 130 Exhaust control module 132 Flow channel opening 134 Flow valve element 136 Quick-release airtight component 200 process equipment 300 wafer storage pods 310 wafers D1 vertical direction D2 horizontal direction S1~S4 process

Claims

1. A pipeline insulation and valve-controlled exhaust system, comprising a front connection module, an elbow guide module, and an exhaust control module, The front connection module includes a front heat retention space formed inside and a heating guide element, the heating guide element being used to heat the front connection module and the front heat retention space. The elbow guide module includes an internally formed elbow insulation space and a pressure detection unit, is connected to the front connection module, the elbow insulation space is in communication with the front insulation space, and the pressure detection unit is used to detect the gas pressure within the elbow insulation space. The exhaust control module is detachably connected to one side of the elbow guide module opposite to the front connection module and comprises a flow path opening and a flow path valve element installed on one side of the flow path opening separated from the elbow guide module, the flow path opening communicates with the elbow insulation space, the flow path valve element is positioned vertically in relation to the flow path opening, the flow path valve element shields a portion of the flow path opening in the vertical direction, and when the pressure detection unit detects a change in the gas pressure, the flow path valve element moves along a horizontal direction perpendicular to the vertical direction to adjust the area of ​​the unshielded region of the flow path opening.

2. The pipeline heating and valve-controlled exhaust system according to claim 1, characterized in that the elbow guide module has a joint on one side separated from the front connection module, and the exhaust control module further has a quick-release airtight member installed above the flow path opening, and the joint of the elbow guide module is used to attach to or detach the quick-release airtight member of the exhaust control module.

3. The pipeline heating and valve-controlled exhaust system according to claim 1, characterized in that when the gas pressure decreases, the flow path valve element of the exhaust control module moves along the horizontal direction, increasing the unshielded area of ​​the flow path opening.

4. The pipeline heating and valve-controlled exhaust device according to claim 3, characterized in that the front connection module is provided with an external covering heat-insulating element, and the covering heat-insulating element is attached to the surface of the front connection module.

5. The pipeline heating and valve-controlled exhaust device according to claim 3, characterized in that the elbow guide module is provided externally with an elbow heating member and a flexible heat-insulating element, the elbow heating member is attached to the surface of the elbow guide module, and the flexible heat-insulating element covers the elbow heating member.

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