Two-axis stage device applicable to vacuum vessels

By positioning the X-axis and Y-axis motors outside the vacuum chamber and using a bevel gear structure for torque conversion, the two-axis stage device addresses cooling and outgassing issues, ensuring continuous operation and maintaining vacuum quality.

JP3256379UActive Publication Date: 2026-06-26NAKAKA MFG CO LTD
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Patent Information

Application Number
JP2026001348U
Authority / Receiving Office
JP · JP
Patent Type
Utility models
Current Assignee / Owner
Filing Date
2026-04-20
Publication Date
2026-06-26
Estimated Expiration
2036-04-20

AI Technical Summary

Technical Problem

Conventional two-axis stage devices for vacuum processing chambers face challenges with motor cooling in vacuum environments, leading to temperature rise and operational restrictions, and outgassing issues that degrade vacuum quality and contaminate processes.

Method used

The X-axis and Y-axis motors are positioned outside the vacuum chamber, with a drive force transmission unit using a bevel gear structure to convert rotational torque from the X-axis to the Y-axis, allowing the Y-axis actuator to move the workpiece without direct motor connection inside the vacuum.

Benefits of technology

This configuration enables continuous operation and high-duty performance without compromising vacuum integrity, reducing the need for chamber opening and minimizing contamination risks.

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Abstract

The present invention provides a two-axis stage device in which an electric motor that drives the X-axis actuator and an electric motor that drives the Y-axis actuator are fixedly positioned outside the vacuum processing chamber. [Solution] The system includes an X-axis actuator 2 for moving a workpiece in the X-axis direction, a Y-axis actuator 3 mounted on the slider of the X-axis actuator in a direction perpendicular to the X-axis actuator for moving a workpiece in the Y-axis direction, an X-axis electric motor 29 provided outside the vacuum vessel and connected to the screw shaft 21a of the X-axis actuator for driving the X-axis actuator, a Y-axis electric motor 39 provided outside the vacuum vessel and connected to the ball spline shaft 51 for applying rotational torque to the ball spline shaft, a drive force transmission unit slidably mounted on the ball spline shaft for converting the rotational torque transmitted from the ball spline shaft into rotational torque around the Y-axis and transmitting rotational torque to the screw shaft of the Y-axis actuator, and a housing 55 which is a component of the drive force transmission unit and is fixed to the end of the X-axis actuator, and moves along the ball spline shaft to cause the Y-axis actuator to follow the movement of the X-axis actuator in the X-axis direction.
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Citation Information

Patent Citations

  • Biaxial stage for vacuum

    JP2012219992A