Gate valve unit for hermetically sealing the opening of a vacuum vessel
The gate valve unit design addresses wear and particle issues by eliminating the carrier plate and using guide shafts and rollers for low-friction movement, enhancing reliability and reducing weight.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Utility models
- Current Assignee / Owner
- NAKAKA MFG CO LTD
- Filing Date
- 2026-05-11
- Publication Date
- 2026-07-09
AI Technical Summary
Conventional gate valve units for vacuum vessels suffer from wear and particle generation due to sliding contact between the push block and stopper, and are heavy due to the presence of a large carrier plate.
A gate valve unit design that eliminates the carrier plate and incorporates a valve body connected to a rod of a linear actuator, with guide shafts and ball bushes for low-friction movement, and guide rollers on both sides of the valve body to guide its movement, along with a stopper to limit descent.
Reduces the number of parts and weight, minimizing wear and particle generation, thereby improving reliability in semiconductor manufacturing equipment.
Smart Images
Figure 0003256506000001_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a gate valve unit for airtightly closing an opening of a vacuum container, and more particularly to a gate valve unit for airtightly closing an opening of a vacuum container with a reduced number of components and weight reduction.
Background Art
[0002] FIG. 1 shows the structure of a gate valve unit used in a vacuum atmosphere such as a conventional semiconductor manufacturing apparatus. FIG. 1(a) is a front view of a state (open state) in which a valve body 20 connected via a carrier plate 25 and a link mechanism 30 constituting the gate valve unit 1 is upward and an opening 11 is not closed by the valve body 20. FIG. 1(b) is a view taken along the line A-A of the gate valve of the gate valve unit 1 shown in FIG. 1(a) in the open state, and FIG. 1(c) is a view taken along the line B-B of the gate valve in the open state. The gate valve unit 1 moves a carrier plate 25 connected via an adapter 43 to the end of a rod by expanding and contracting a rod (not shown in FIG. 1) connected to a linear actuator 41, thereby raising and lowering the carrier plate 25 to open and close an opening 11 of a vacuum container 10. The carrier plate 25 is connected via a link mechanism 30, and the two move up and down integrally.
[0003] FIG. 1(d) is a view taken along the line B-B of the gate valve of the gate valve unit 1 in the closed state. As shown in FIG. 1(d), at the end of the closing operation of the opening 11, a push block 21 fixed to the valve body 20 abuts against a stopper block 15, and the link mechanism 30 rotates slightly to press the valve body 20 against the opening 11 of the vacuum container 10 for sealing.
[0004] Guide mechanisms are provided on both sides of the carrier plate 25 to move the valve body 20 linearly and stably in the vertical direction. This guide mechanism consists of a guide shaft 51 fixed at both ends by guide shaft holders A53 and B54, and a linear guide bearing 52 that slides on the guide shaft 51 with low friction. The carrier plate 25 is connected to the linear guide bearing 52 mounted on the guide shaft 51 and moves up and down as the linear guide bearing 52 slides.
[0005] In this conventional gate valve unit structure, the carrier plate 25, to which the valve body 20 is connected via a link mechanism 30, is raised and lowered by a linear actuator 41. When closing the opening 11, the carrier plate 25 is lowered, causing the push block 21 connected to the valve body 20 to come into contact with the stopper block 15. The resulting pressure presses the valve body 20 against the opening 11 via the link mechanism 30, compressing the O-ring and creating a sealed state.
[0006] However, because the carrier plate 25 is a large and heavy object, when the valve body 20, which is connected to it by the link mechanism 30, closes the opening 11 of the vacuum container 10, problems arise such as wear due to sliding contact and the generation of particles at the contact point between the push block 21 and the stopper block 15. [Overview of the project] [Problems that the invention aims to solve]
[0007] Therefore, in view of the above points, the objective of this invention is to provide a gate valve unit for a vacuum vessel that reduces the number of parts and weight by eliminating the carrier plate, which was conventionally essential, and also suppresses wear and particle generation caused by sliding contact between the push block and the stopper, which was a significant problem when applied to semiconductor manufacturing equipment. [Means for solving the problem]
[0008] To solve the above problems, the present invention provides a gate valve unit comprising a valve body connected to a rod of a linear actuator, wherein the valve body hermetically closes the opening of a vacuum vessel, A first link mechanism connecting the rod and the valve body, A second link mechanism is provided on the upper and lower sides of the valve body in the vertical direction, with one end fixed to the outer surface of the vacuum container and the other end rotatably holding a holder disposed on both sides of the valve body in the vertical direction, A guide shaft whose ends are supported by the aforementioned holder, A ball bush is mounted on the guide shaft and connected to both the upper and lower ends of the valve body to guide the valve body up and down along the guide shaft with low friction, Displaced between the second link mechanism and the valve body, fixed to the outer surface of the vacuum container, and provided on both sides of the lower half of the valve body, The second guide rail is located outside the first guide rail and inside the second link mechanism, fixed to the outer surface of the vacuum vessel, and provided on both sides of the upper half of the valve body. A first roller that travels along the first guide rail and is connected to the lower part on both vertical sides of the valve body, A second roller that travels along the second guide rail and is connected to the upper parts on both vertical sides of the valve body, The gate valve unit is characterized by comprising a stopper mounted on the lower end of the guide shaft, which limits the amount of descent of the ball bush by the drive of the linear actuator to a predetermined range. [Effects of the Invention]
[0009] As described above, the present invention provides a gate valve unit for a vacuum vessel in which the number of parts and weight are reduced by eliminating the carrier plate that was previously essential, and also suppresses wear and particle generation caused by sliding contact between the push block and stopper, which was a significant problem when applied to semiconductor manufacturing equipment. [Brief explanation of the drawing]
[0010] [Figure 1(a)] This is a front view of a conventional gate valve unit 1 in the gate-open state. [Figure 1(b)] This is a view of the gate valve unit 1 in the gate-open state, as indicated by arrow AA. [Figure 1(c)] This is a view of the gate valve unit 1 in the gate-open state, as seen from arrow BB. [Figure 1(d)] This is a view of the conventional gate valve unit 1 in the gate-closed state, as seen from arrow BB. [Figure 2(a)] This is a front view of the gate valve unit 2 according to an embodiment of the present invention in the gate-open state. [Figure 2(b)] This is a view taken along the arrow AA shown in Figure 2(a) of the gate valve unit 2 according to an embodiment of the present invention, with the gate in the open position. [Figure 2(c)] This is a view of the gate valve unit 2 according to an embodiment of the present invention, as seen from the BB arrow shown in Figure 2(a). [Figure 2(d)] Figure 2(c) shows a view of the gate valve unit 2 according to an embodiment of the present invention, taken via the CC arrow (cross-sectional view). [Figure 2(e)] This is a view of the gate valve unit 2 according to an embodiment of the present invention, as seen by the arrow DD in the gate-open state, as shown in Figure 2(d). [Figure 2(f)] This is a view taken along the JJ arrow in Figure 2(a) of the gate valve unit 2 according to an embodiment of the present invention, with the gate in the open position. [Figure 3(a)] This is a front view of the gate valve unit 2 according to an embodiment of the present invention in the gate-closed state. [Figure 3(b)] This is a view from the direction of arrow AA shown in Figure 3(a) of the gate valve unit 2 according to an embodiment of the present invention in the gate closed state. [Figure 3(c)] This is a view of the gate valve unit 2 according to an embodiment of the present invention, as seen from the BB arrow shown in Figure 3(a). [Figure 3(d)] Figure 3(c) shows a view of the gate valve unit 2 according to an embodiment of the present invention, taken via the CC arrow (cross-sectional view). [Figure 3(e)]It is a D-D arrow view shown in FIG. 3(d) in the gate closed state of the gate valve unit 2 according to the embodiment of the present invention. [Figure 3(f)] It is a J-J arrow view shown in FIG. 3(a) in the gate closed state of the gate valve unit ② according to the embodiment of the present invention.
Embodiments for Carrying Out the Invention
[0011] Hereinafter, embodiments of the gate valve unit of the vacuum vessel according to the present invention will be described based on the drawings. The drawings schematically show the gate valve unit of the vacuum vessel, and the dimensions and dimensional ratios on the drawings do not necessarily match the actual dimensions and dimensional ratios. Also, unless otherwise specified, duplicate explanations will be omitted as appropriate, and the same members may be given the same reference numerals.
[0012] FIG. 2(a) is a front view of the gate valve unit 2 in the gate open state according to the embodiment of the present invention, FIG. 2(b) is a view of the gate valve unit according to the embodiment of the present invention as viewed from A-A, and FIG. 2(c) is a view of the gate valve unit according to the embodiment of the present invention as viewed from B-B. Comparing the configuration of the conventional gate valve unit 1 and the gate valve unit 2 according to the embodiment of the present invention, first, the gate valve unit 2 according to the embodiment of the present invention is different in that the valve body 120 is connected to the rod of the linear actuator 41 via the link mechanism 135 as shown in FIGS. 2(a) and 2(c), and there is no carrier plate.
[0013] Also, in the gate valve unit 2 according to the embodiment of the present invention, as shown in FIGS. 2(a) and 2(b), the linear guide stator holder 150 is connected and supported by the link mechanism 130 attached to the vacuum vessel 110. A link stopper 156 for restricting the rotation angle of the link mechanism 130 to a predetermined range is provided in the vicinity of the link mechanism 130. The guide roller 125A shown in FIG. 2(b) is a wheel that travels on the guide rail 115A described later, and the guide roller 125B is a wheel that travels on the guide rail 115B described later.
[0014] As shown in Figure 2(c), the guide shaft 151, held by the linear guide stator holder 150, is fitted with ball bush bearings 152A and 152B. These bearings hold the valve body 120 and guide its movement up and down along the guide shaft 151. The ball bush bearing 152B contacts the slide stopper 155, which prevents the valve body 20 from descending any further.
[0015] Figure 2(d) is a view of the gate valve unit 2 according to an embodiment of the present invention, taken via the CC arrow (cross-sectional view) shown in Figure 2(c), with the gate in the open position. As shown in Figure 2(d), guide rails 115A are provided on both sides of the upper part of the vacuum vessel 110, and guide rollers 125A that run on the guide rails 115A are shown. Guide rails 115B are also provided on both sides of the lower part of the vacuum vessel 110, and guide rollers 125B that run on the guide rails 115B are shown. The guide rails 115B are positioned inward (closer to the valve body 20) than the guide rails 115A. The axles of the guide rails 115A and 115B are connected to the valve body 20, guiding the smooth up and down movement of the valve body 20.
[0016] Figure 2(e) is a view of the gate valve unit 2 according to an embodiment of the present invention, in the gate-open state, as shown by the arrow DD in Figure 2(d). Guide roller 125A, which travels on guide roller 115A arranged in the vacuum container 110, has its axle connected to the valve body 120, and guide roller 125B, which travels on guide roller 115B, has its axle connected to the valve body 120.
[0017] Figure 2(f) is a view of the gate valve unit 2 according to an embodiment of the present invention, in the gate-open state, as seen from the JJ arrow in Figure 2(a). A valve body 120 connected to a link mechanism 135 connected to a linear actuator 141 is shown on the outer surface of the vacuum vessel 110. Guide rollers 125A and 125B are provided on both sides of the valve body 120, with guide roller 125A on guide rail 115A and guide roller B on guide rail 115B. One end of the link mechanism 130 is fixed to the vacuum vessel 110, and the other end is connected to a linear guide stator holder 150, which is rotatably held by the two link mechanisms 130. A link stopper 156 is shown to prevent the link mechanism 130 from rotating beyond a predetermined limit.
[0018] Figure 3(a) is a front view of the gate valve unit 2 according to an embodiment of the present invention in the gate closed state, Figure 3(b) is a view of the gate valve unit 2 according to an embodiment of the present invention in the gate closed state as shown by arrow AA in Figure 3(a), and Figure 3(c) is a view of the gate valve unit 2 according to an embodiment of the present invention in the gate closed state as shown by arrow BB in Figure 3(a). Driven by the linear actuator 141, the valve body 120 is guided by ball bush bearings 152A and 152B mounted on the guide shaft 151, and descends with low friction until it contacts the slide stopper 155, thereby airtightly closing the opening 111.
[0019] As shown in Figures 3(b) and 3(c), when the ball bush bearing 152B contacts the slide stopper 155, the link mechanism 130 rotates clockwise, and in conjunction with this, the link mechanism 135 rotates clockwise, causing the valve body 120 to press against the opening 111 or the O-ring disposed on the valve body 120, thereby airtightly closing the opening 111.
[0020] Figure 3(d) is a view of the gate valve unit 2 according to an embodiment of the present invention, taken via the CC arrow (cross-sectional view) shown in Figure 3(c), with the gate closed. As shown in Figure 3(d), the guide roller 125A travels along the guide rails 115A provided on both sides of the upper part of the vacuum vessel 110, descending to a predetermined position. The guide roller 125A also travels along the guide rails 115B provided on both sides of the lower part of the vacuum vessel 110, descending to a predetermined position. As described above, the guide rollers 125A and 125B are connected to the valve body 120, guiding the smooth descent of the valve body 120.
[0021] Figure 3(e) is a view of the gate valve unit 2 according to an embodiment of the present invention, in the gate-closed state, as shown by the arrow DD in Figure 3(d). Guide roller 125A stops at the end of guide rail 115A, and guide roller 125B stops at the end of guide rail 115B, but drop-side steps are provided at the ends of guide rails 115A and 115B. When guide rollers 125A and 125B fall onto these drop-side steps, the valve body 120 comes into contact with the opening 111 of the vacuum container 110.
[0022] Figure 3(f) is a view of the gate valve unit 2 according to an embodiment of the present invention, in the gate-closed state, as seen from the JJ arrow in Figure 3(a). When the valve body 120 falls onto the drop-side step provided on the guide rail 115A and the guide rail 115B, the ball bush bearing 152B connected to the valve body 120 comes into contact with the slide stopper 155, and the valve body 120 does not descend any further (stops). As a result, the driving force of the linear actuator 41 rotates the link mechanism 135 clockwise, and in conjunction with this, the link mechanism 130 rotates similarly. This causes the valve body 120 to press against the opening 111 or the O-ring disposed on the valve body 120, and airtightly closes the opening 111. "
[0023] [Explanation of Symbols]
[0024] 1. Conventional gate valve unit 2. Gate valve unit of the present invention 10 Vacuum container 11 Opening 15 Stopper Block 20 valve body 21 Push Block 22 O-rings 25 Carrier Plate 30 Link mechanism 41 Linear Actuator 42 Linear Actuator Rods 43 Adapters 45 Top Plate 50 Guide shaft fixing plate 51 Guide axis 52 Linear guide bearings 53 Guide shaft holder A 54 Guide shaft holder B 55 Fixing bolts 110 Vacuum container 111 Opening 115A Guide Rail (for 125A Guide Roller) 115B Guide Rail (for Guide Roller 125B) 120 valve body 125A Guide roller (runs on guide rail 115A) 125B Guide roller (runs on guide rail 115B) 130 Link mechanism (between vacuum vessel and linear guide stator holder) 135 Link mechanism (between actuator rod and valve body) 141 Linear Actuator 150 Linear Guide Stator Holder 151 Guide axis 152A Ball bushing bearing (non-contact side of stopper) 152B Ball bushing bearing (stopper contact side) 155 Slide Stopper 156 Link Stopper
Claims
1. A gate valve unit comprising a valve body connected to a rod of a linear actuator, wherein the valve body hermetically closes the opening of a vacuum vessel, A first link mechanism connecting the rod and the valve body, A second link mechanism is provided on the upper and lower sides of the valve body in the vertical direction, with one end fixed to the outer surface of the vacuum container and the other end rotatably holding a holder disposed on both sides of the valve body in the vertical direction, A guide shaft whose ends are supported by the aforementioned holder, A ball bush is mounted on the guide shaft and connected to both the upper and lower ends of the valve body to guide the valve body up and down along the guide shaft with low friction, Displaced between the second link mechanism and the valve body, fixed to the outer surface of the vacuum container, and provided on both sides of the lower half of the valve body, The second guide rail is located outside the first guide rail and inside the second link mechanism, fixed to the outer surface of the vacuum vessel, and provided on both sides of the upper half of the valve body. A first roller that travels along the first guide rail and is connected to the lower part of both vertical sides of the valve body, A second roller that travels along the second guide rail and is connected to the upper parts on both vertical sides of the valve body, A gate valve unit characterized by comprising a stopper mounted on the lower end of the guide shaft, which limits the amount of descent of the ball bush by the drive of the linear actuator to a predetermined range.
2. A drop-side step is formed at the end of the first guide rail and the second guide rail, respectively, and when the first roller and the second roller are driven by the linear actuator and fall onto the drop-side step, the valve body comes into contact with the opening. The gate valve unit according to claim 1, characterized in that the second link mechanism rotates in conjunction with the rotation of the first link mechanism, and the valve body presses against the opening or an O-ring disposed on the valve body to airtightly close the opening.