METHOD FOR MANUFACTURING RESONANT DEVICE AND RESONANT DEVICE

Abstract

According to the present invention, a process for forming a recess constituting a vibration space of a resonator in an object of at least one of an upper lid and a lower lid includes: a first step for etching the object through isotropic etching in a state where the object is covered with a mask having a peripheral edge part formed into a frame-body shape and a stopper forming part extending from the peripheral edge part toward the inside of the peripheral edge part; and a second step for etching the object, which has been etched through the isotropic etching in the first step, through isotropic etching in a state where the object is covered with the mask, and forming a stopper part for restricting collision of the resonator with the bottom surface of the recess, at a position overlapping, in a plan view of the object, the stopper forming part on the bottom surface of the recess.

Description

[Technical field]

[0001] The present invention relates to a method for manufacturing a resonator device, and to a resonator device. [Background technology]

[0002] Conventionally, as a device for realizing a timekeeping function in electronic equipment, a resonator device has been known in which a resonator such as a piezoelectric vibrator is sandwiched between an upper lid and a lower lid, and a vibration space for the resonator is defined by recesses formed in each of the upper lid and the lower lid.

[0003] For example, Patent Document 1 discloses a resonator device in which recesses in each of an upper cover and a lower cover are formed by etching. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 2019-207829 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the conventional technology, when an impact is applied from above to the top cover, the resonator is likely to bend significantly and displace to the point of colliding with the bottom of the recess in the bottom cover, resulting in damage to the resonator.

[0006] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method for manufacturing a resonator device capable of suppressing damage to a resonator, and a resonator device. [Means for solving the problem]

[0007] A manufacturing method for a resonator device according to one aspect of the present invention is a manufacturing method for a resonator device having a resonator and an upper lid and a lower lid disposed opposite each other with the resonator sandwiched therebetween, the manufacturing method including a step of forming a recess forming a vibration space for the resonator in at least one of the objects, the upper lid and the lower lid, the step of forming the recess in the object including a first step of isotropically etching the object while covering the object with a mask having a frame-shaped peripheral portion and a stopper forming portion extending from the peripheral portion toward the inside of the peripheral portion, and a second step of anisotropically etching the object etched by isotropic etching in the first step while covering it with a mask to form a stopper portion that prevents the resonator from colliding with the bottom surface of the recess at a position that overlaps the stopper forming portion on the bottom surface of the recess when viewed in a plane of the object.

[0008] A manufacturing method for a resonator device according to one aspect of the present invention is a manufacturing method for a resonator device having a resonator and an upper lid and a lower lid disposed opposite each other with the resonator sandwiched therebetween, the process of forming a recess forming a vibration space for the resonator in at least one of the objects, the upper lid and the lower lid, includes a first process of isotropically etching the object covered with a mask having a pillar forming portion, and a second process of anisotropically etching the object etched by isotropic etching in the first process while still covered with a mask, to form a pillar portion having a tapered portion that gradually becomes wider toward the bottom surface of the recess at a position that overlaps the pillar forming portion on the bottom surface of the recess in a planar view of the object, the tapered portion restricting collision of the resonator with the bottom surface of the recess.

[0009] A resonator device according to one aspect of the present invention comprises a resonator, and an upper lid and a lower lid arranged opposite each other with the resonator in between, at least one of the upper lid and the lower lid has a recess which forms a vibration space for the resonator, and a stopper portion is formed on the bottom surface of the recess which extends from the inner side surface of the recess and prevents the resonator from colliding with the bottom surface of the recess.

[0010] A resonator device according to one aspect of the present invention comprises a resonator, and an upper lid and a lower lid arranged opposite each other with the resonator therebetween, at least one of the upper lid and the lower lid having a recess that forms a vibration space for the resonator, and a pillar portion is formed on the bottom surface of the recess, the tapered portion gradually becoming wider toward the bottom surface of the recess and having a tapered portion that regulates collision of the resonator with the bottom surface of the recess. Effect of the Invention

[0011] According to the present invention, damage to the resonator can be suppressed. [Brief description of the drawings]

[0012] [Figure 1] 1 is a perspective view illustrating a schematic appearance of a resonator device according to a first embodiment. [Diagram 2] 1 is an exploded perspective view illustrating a schematic structure of a resonator device according to a first embodiment. [Diagram 3] FIG. 2 is a plan view of the resonator according to the first embodiment. [Figure 4] 2 is a cross-sectional view taken along the line AA' in FIG. [Diagram 5] FIG. 2 is a cross-sectional view taken along line BB′ in FIG. [Figure 6A] 5A to 5C are diagrams illustrating a process performed by the resonator device according to the first embodiment. [Figure 6B] 5A to 5C are diagrams illustrating a process performed by the resonator device according to the first embodiment. [Figure 7A] 5A to 5C are diagrams illustrating a process performed by the resonator device according to the first embodiment. [Figure 7B] 5A to 5C are diagrams illustrating a process performed by the resonator device according to the first embodiment. [Figure 8A] 5A to 5C are diagrams illustrating a process performed by the resonator device according to the first embodiment. [Figure 8B] 5A to 5C are diagrams illustrating a process performed by the resonator device according to the first embodiment. [Figure 9A] 5A to 5C are diagrams illustrating a process performed by the resonator device according to the first embodiment. [Figure 9B] 5A to 5C are diagrams illustrating a process performed by the resonator device according to the first embodiment. [Figure 10A] 5A to 5C are diagrams illustrating the operation of the resonance device according to the first embodiment. [Figure 10B] 5A to 5C are diagrams illustrating the operation of the resonance device according to the first embodiment. [Figure 11A] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a second embodiment. [Figure 11B] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a second embodiment. [Figure 12A] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a second embodiment. [Figure 12B] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a second embodiment. [Figure 13A] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a second embodiment. [Figure 13B] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a second embodiment. [Figure 14A] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a second embodiment. [Figure 14B] 11A to 11C are diagrams illustrating a process performed by a resonator device according to a second embodiment. [Figure 15] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a third embodiment. [Figure 16] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a third embodiment. [Figure 17] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a third embodiment. [Figure 18] 13A to 13C are diagrams illustrating a process performed by a resonator device according to a third embodiment. [Figure 19] 13A to 13C are diagrams illustrating the operation of the resonance device according to the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] First Embodiment A first embodiment of the present invention will be described below with reference to the accompanying drawings. Fig. 1 is a perspective view that generally illustrates the appearance of a resonance device 1 according to the first embodiment of the present invention. Fig. 2 is an exploded perspective view that generally illustrates the structure of the resonance device 1 according to the first embodiment of the present invention.

[0014] The resonance device 1 includes a resonator 10, an upper cover 30, and a lower cover 20. The upper cover 30 and the lower cover 20 are provided to face each other with the resonator 10 therebetween. That is, the resonance device 1 is configured by laminating the lower cover 20, the resonator 10, and the upper cover 30 in this order.

[0015] The resonator 10 is sealed by bonding the bottom lid 20 to the resonator 10 and bonding the top lid 30 to the resonator 10. The resonator 10, the bottom lid 20, and the top lid 30 are each formed using a Si substrate. The resonator 10, the bottom lid 20, and the top lid 30 are formed by bonding the Si substrates to each other. The resonator 10 and the bottom lid 20 may be formed using an SOI substrate.

[0016] The resonator 10 is a MEMS resonator manufactured using MEMS technology. In this embodiment, the resonator 10 is formed using a silicon substrate. Each component of the resonance device 1 will be described in detail below.

[0017] (1.Top lid 30) The top cover 30 includes a bottom plate 32 and a side wall 33. The bottom plate 32 is rectangular and is provided along the XY plane. The side wall 33 extends from the peripheral edge of the bottom plate 32 in the Z-axis direction (i.e., the stacking direction of the top cover 30 and the resonator 10). The top cover 30 is provided with a recess 31 formed by the surface of the bottom plate 32 and the inner surface of the side wall 33. The recess 31 is provided on the surface of the top cover 30 facing the resonator 10. The recess 31 forms a part of the vibration space of the resonator 10.

[0018] (2.Lower lid 20) The lower cover 20 includes a bottom plate 22 and a side wall 23. The bottom plate 22 is rectangular and is provided along the XY plane. The side wall 23 extends from the peripheral portion of the bottom plate 22 in the Z-axis direction (i.e., the stacking direction of the bottom cover 20 and the resonator 10). The lower cover 20 includes a recess 21 formed by the surface of the bottom plate 22 and the inner surface of the side wall 23. The recess 21 is provided on the surface of the lower cover 20 facing the resonator 10. The recess 21 forms a part of the vibration space of the resonator 10. The vibration space of the resonator 10 is airtightly sealed by the above-mentioned upper cover 30 and the lower cover 20, so that a vacuum state is maintained. The vibration space of the resonator 10 may be filled with a gas such as an inert gas. The bottom plate 22 of the lower cover 20 includes a stopper portion 40 for restricting the collision of the resonator 10 with the bottom plate 22 of the lower cover 20. The stopper portion 40 protrudes from the bottom plate 22 of the lower cover 20 and extends linearly from the inner surface of the side wall 23 of the lower cover 20 along the X-axis direction. A connecting portion 41 that connects the stopper portion 40 and the side wall 23 of the lower cover 20 is formed on the bottom plate 22 of the lower cover 20. The connecting portion 41 protrudes from the bottom plate 22 of the lower cover 20 and extends linearly along the Y-axis direction between a midpoint in the longitudinal direction of the stopper portion 40 and the side wall 23 of the lower cover 20. The stopper portion 40 is disposed so as to cross the base ends of a plurality of vibrating arms 135 described later in the X-axis direction in a plan view of the lower cover 20. A pillar portion 42 connected to the stopper portion 40 is formed on the bottom plate 22 of the lower cover 20. The pillar portion 42 protrudes from the bottom plate 22 of the lower cover 20 and has a larger area than the stopper portion 40 in a plan view of the lower cover 20. For example, in a plan view of the lower cover 20, the dimension of the pillar portion 42 in a direction intersecting the longitudinal direction of the stopper portion 40 is larger than the dimension of the stopper portion 40 in the same direction.

[0019] (3.Resonator 10) FIG. 3 is a plan view that illustrates a schematic structure of the resonator 10 according to this embodiment.

[0020] As shown in FIG. 3, the resonator 10 includes a vibrating portion 120, a holding portion 140, and a holding arm 150. The vibrating portion 120 has a vibration section 120, a holding section 140, and a holding arm 150.

[0021] (a) Vibration unit 120 The vibration section 120 has a rectangular outline extending along an XY plane in the Cartesian coordinate system shown in FIG. 3. The vibration section 120 is provided inside the holding section 140, and a space is formed between the vibration section 120 and the holding section 140. In the example shown in FIG. 3, the vibration section 120 is a tuning fork type vibrator, and has a base section 130 and four vibration arms 135A, 135B, 135C, and 135D (collectively referred to as "vibration arms 135"). The number of vibration arms is not limited to four, and is set to any number, for example, three or more. In this embodiment, each vibration arm 135 and the base section 130 are integrally formed.

[0022] In a plan view, the base 130 has long sides 131a and 131b in the X-axis direction and short sides 131c and 131d in the Y-axis direction. The long side 131a is one side of a face 131A at the front end of the base 130 (hereinafter also referred to as the "front end 131A"), and the long side 131b is one side of a face 131B at the rear end of the base 130 (hereinafter also referred to as the "rear end 131B"). In the base 130, the front end 131A and the rear end 131B face each other. The front end 131A of the base 130 is connected to the vibrating arm 135, and the rear end 131B of the base 130 is connected to the supporting arm 150.

[0023] The vibrating arms 135 extend in the Y-axis direction and have the same size. The vibrating arms 135 are provided between the base 130 and the holding part 140 in parallel with the Y-axis direction. One end of the vibrating arm 135 is connected to the front end 131A of the base 130 and serves as a fixed end, and the other end is an open end. The vibrating arms 135 are provided in parallel with each other at a predetermined interval in the X-axis direction. The vibrating arms 135 have a width in the X-axis direction of about 50 μm and a length in the Y-axis direction of about 465 μm, for example.

[0024] A protective film 235 is formed on the surface of the vibration part 120 (the surface facing the upper cover 30). A frequency adjustment film 236 is formed on a part of the surface of the protective film 235 on the vibrating arm 135. The protective film 235 and the frequency adjustment film 236 are used to adjust the resonance frequency of the vibration part 120. Note that the protective film 235 does not necessarily have to cover the entire surface of the vibration part 120, but it is preferable to cover the entire surface of the vibration part 120 to protect the underlying electrode film and piezoelectric thin film from damage during frequency adjustment.

[0025] The frequency adjustment film 236 is provided on the upper surface of the protective film 235. The surface of the frequency adjustment film 236 is exposed in an area where the displacement due to vibration in the vibrating part 120 is relatively large. For example, the surface of the frequency adjustment film 236 is exposed at the tip of the vibrating arm 135.

[0026] (b) Holding part 140 The holding portion 140 is formed in a rectangular frame shape along the XY plane. In a plan view, the holding portion 140 is provided so as to surround the outside of the vibration portion 120 along the XY plane. The holding portion 140 only needs to be provided on at least a part of the periphery of the vibration portion 120, and is not limited to a frame-like shape. For example, the holding portion 140 only needs to be provided around the vibration portion 120 to an extent that it can hold the vibration portion 120 and be joined to the upper cover 30 and the lower cover 20.

[0027] The holding portion 140 is integrally formed with frame bodies 140a to 140d in the shape of a rectangular column. The frame body 140a faces the open end of the vibrating arm 135, and the longitudinal direction of the frame body 140a coincides with the X-axis direction. The frame body 140b faces the rear end 131B of the base portion 130, and the longitudinal direction of the frame body 140b coincides with the X-axis direction. The frame body 140c faces the side end (short side 131c) of the base portion 130 and the vibrating arm 135A, and the longitudinal direction of the frame body 140c coincides with the Y-axis direction. One end of the frame body 140c is connected to the frame body 140a, and the other end is connected to the frame body 140b. The frame body 140d faces the side end (short side 131d) of the base portion 130 and the vibrating arm 135D, and the longitudinal direction of the frame body 140d coincides with the Y-axis direction. One end of the frame 140d is connected to the frame 140a, and the other end is connected to the frame 140b.

[0028] (c) Holding arm 150 The holding arm 150 is provided inside the holding portion 140, and connects the rear end 131B of the base 130 and the frame body 140c. The holding arm 150 extends from the center position of the rear end 131B of the base 130 in the X-axis direction toward the frame body 140b (-Y direction). The holding arm 150 is also bent toward the frame body 140c (-X direction) and extends in the same direction. The holding arm 150 is also bent toward the frame body 140a (+Y direction) and extends in the same direction. The holding arm 150 is also bent toward the frame body 140c (-X direction) and connects to the frame body 140c.

[0029] (4. Laminated structure) Next, a description will be given of the laminated structure of the resonator device 1. Fig. 4 is a schematic diagram showing a cross section taken along line AA' in Fig. 1. Fig. 5 is a schematic diagram showing a cross section taken along line BB' in Fig. 1.

[0030] The bottom plate 22 and the side wall 23 of the lower cover 20 are integrally formed from a Si (silicon) wafer S1. The lower cover 20 is joined to the holder 140 of the resonator 10 by the upper surface of the side wall 23. The Si wafer S1 is made of non-degenerate silicon.

[0031] The stopper portion 40 extends along the X-axis direction from the side wall 23 of the bottom cover 20. The stopper portion 40 extends, for example, to the center position in the X-axis direction of the recess 21 of the bottom cover 20, and crosses the vibrating arms 135C and 135D in the X-axis direction.

[0032] The top cover 30 is formed of a Si (silicon) wafer S2 of a predetermined thickness. A side wall 33 of the top cover 30 is bonded to the holding portion 140 of the resonator 10. The front and back surfaces of the top cover 30 facing the resonator 10 are preferably covered with a silicon oxide layer S2'. A joint H is formed between the side wall 33 of the top cover 30 and the holding portion 140. The joint H is formed of a metal film such as an Al (aluminum) film or a Ge (germanium) film. The joint H may be formed of a metal film such as an Au (gold) film or a Sn (tin) film.

[0033] The resonator 1 includes a holder 140, a base 130, a vibrating arm 135, and a holder arm 150 that are integrally formed in the same process. The resonator 1 includes a Si (silicon) substrate F2, a metal layer E1, a piezoelectric thin film F3, a metal layer E2, a protective film 235, and a frequency adjustment film 236 that are laminated in this order.

[0034] The Si substrate F2 is formed of a degenerate n-type Si semiconductor having a thickness of, for example, about 6 μm. The Si substrate F2 may contain P (phosphorus), As (arsenic), Sb (antimony), or the like as an n-type dopant. The resistance value of the degenerate n-type semiconductor used in the Si substrate F2 is, for example, less than 1.6 mΩ·cm, and more preferably 1.2 mΩ·cm or less. A silicon oxide layer F21 is formed on the lower surface of the Si substrate F2. This improves the temperature characteristics of the Si substrate F2.

[0035] The metal layers E1 and E2 are formed using Mo (molybdenum), Al (aluminum) or the like and have a thickness of, for example, about 0.1 to 0.2 μm.

[0036] The metal layer E1 functions as a lower electrode of the vibration part 120. The metal layer E1 also functions as a wiring for connecting the lower electrode to an AC power source provided outside the resonator .

[0037] The metal layer E2 functions as an upper electrode of the vibration part 120. The metal layer E2 also functions as a wiring for connecting the upper electrode to a circuit provided outside the resonator .

[0038] The piezoelectric thin film F3 is a piezoelectric thin film that converts an applied voltage into vibration, and is mainly composed of, for example, a nitride such as AlN (aluminum nitride) or an oxide. The piezoelectric thin film F3 is formed of, for example, ScAlN (scandium aluminum nitride). ScAlN is aluminum nitride in which part of the aluminum is replaced with scandium. The thickness of the piezoelectric thin film F3 is, for example, 1 μm, and may be about 0.2 μm to 2 μm.

[0039] The piezoelectric thin film F3 expands and contracts in the in-plane direction of the XY plane in response to the electric field applied to the piezoelectric thin film F3 by the metal layers E1 and E2. As the piezoelectric thin film F3 expands and contracts, the vibrating arm 135 displaces the open end of the vibrating arm 135 toward the inner surfaces of the lower cover 20 and the upper cover 30, and vibrates in an out-of-plane bending vibration mode.

[0040] The protective film 235 is an insulating layer that protects the metal layer E2. l N and S i Nitride films such as N (silicon nitride) and Ta 2 O 5 (Tantalum pentoxide) and SiO 2 The protective film 235 is formed of an oxide film such as a protective film of the metal layer E2 of the vibrating section 120. The protective film 235 is provided so as to cover the surface of the metal layer E2 of the vibrating section 120 that faces the upper cover 30.

[0041] The frequency adjustment film 236 is a film for adjusting the resonance frequency of the vibrating part 120, and is formed of a metal such as molybdenum, tungsten, gold, platinum, nickel, aluminum, titanium, etc. The frequency adjustment film 236 is provided in an area of ​​the vibrating part 120 where the displacement due to vibration is relatively large. The frequency adjustment film 236 is provided so as to cover the protective film 235 at the tip of the vibrating arm 135, for example.

[0042] Next, a process for forming the stopper portion 40 on the lower cover 20 of the resonance device 1 according to the first embodiment will be described. Note that the same process is also performed when forming a stopper portion on the upper cover 30 of the resonance device 1.

[0043] First, as shown in FIG. 6A, the upper surface of the lower cover 20 is covered with a mask M by applying a resist to the lower cover 20. FIG. 6B shows the shape of the mask M in a plan view in the process shown in FIG. 6A. As shown in FIG. 6B, the mask M has a frame-shaped peripheral portion M1, a stopper forming portion M2 extending from the peripheral portion M1 toward the inside of the peripheral portion M1, a pillar forming portion M3 connected to the stopper forming portion M2 and having a larger area than the stopper forming portion M2 in a plan view of the lower cover 20, and a connecting forming portion M4 connecting between the stopper forming portion M2 and the short side of the peripheral portion M1 of the mask M. The peripheral portion M1 has a rectangular ring shape, and an extension portion M1a is formed on a part of the inner edge of the peripheral portion M1. The extension portion M1a extends from one corner of the peripheral portion M1 to approximately the center position of the long side. The stopper forming portion M2 extends linearly from the inner edge of the extension portion M1a to approximately the center of the short side of the peripheral portion M1. A pillar forming portion M3 is provided at the tip of the stopper forming portion M2. The pillar forming portion M3 has a larger area than the stopper forming portion M2 in a plan view of the bottom cover 20, and extends in a direction along the long side of the peripheral portion M1 so as to move away from the tip of the stopper forming portion M2 toward the peripheral portion M1. In a plan view of the bottom cover 20, the dimension of the pillar forming portion M3 in the width direction intersecting with the longitudinal direction of the stopper forming portion M2 is larger than the dimension of the stopper forming portion M2 in the same direction.

[0044] Next, as shown in FIG. 7A, the lower cover 20 is etched by isotropic etching while the upper surface of the lower cover 20 is covered with a mask M. FIG. 7B is a diagram showing an area of ​​the lower cover 20 that is etched by isotropic etching in the process shown in FIG. 7A. Isotropic etching refers to a phenomenon in which a material exposed to plasma is etched in a radial direction. Therefore, as shown in FIG. 7B, the area of ​​the lower cover 20 that is etched by isotropic etching in the process shown in FIG. 7A is the area of ​​the lower cover 20 excluding a part of the pillar forming portion M3. That is, in the isotropic etching, not only the area of ​​the lower cover 20 that is not covered by the mask M but also the area covered by the mask M is etched from above in a wraparound manner. As a result, a recess with a relatively shallow depth is formed on the upper surface of the lower cover 20. The process shown in FIG. 7A is an example of the first process.

[0045] Next, as shown in FIG. 8A, the lower cover 20 is etched by anisotropic etching while the upper surface of the lower cover 20 is covered with a mask M. FIG. 8B is a diagram showing the area of ​​the lower cover 20 that is etched by anisotropic etching in the process shown in FIG. 8A. Anisotropic etching refers to a phenomenon in which a material exposed to plasma is etched only in a certain direction. Therefore, as shown in FIG. 8B, the area of ​​the lower cover 20 that is etched by anisotropic etching in the process shown in FIG. 8A is the area of ​​the lower cover 20 excluding the pillar forming portion M3, the stopper forming portion M2, and the connection forming portion M4. That is, in the anisotropic etching, etching is performed only on the area not covered by the mask M, and etching is not performed on the area covered by the mask M. 7A, an area of ​​the bottom surface of the lower cover 20 excluding the pillar forming portion M3, the stopper forming portion M2, and the connection forming portion M4 is linearly etched from above to form the pillar portion 42, the stopper portion 40, and the connection portion 41 on the bottom surface of the recess of the lower cover 20. The process shown in FIG. 8A is an example of the second process.

[0046] 9A, the mask M is removed from the upper surface of the bottom cover 20, and then the resonator 10 is laminated on the upper surface of the bottom cover 20. As a result, as shown in FIG. 9B, in the resonator device 1, in a plan view of the bottom cover 20, the stopper portions 40 are disposed below the base ends of the vibrating arms 135C and 135D, and the collision of the vibrating arms 135C and 135D with the bottom surface of the recess 21 of the bottom cover 20 is restricted by the stopper portions 40.

[0047] Next, the operation of the resonance device 1 according to the first embodiment will be described.

[0048] As shown in FIG. 10A, when the vibration of the resonator 10 of the resonator device 1 is stopped, the longitudinal direction of the vibrating arm 135 coincides with the horizontal direction, and a gap is present between the stopper portion 40 formed on the bottom surface of the recess 21 of the lower cover 20 and the vibrating arm 135.

[0049] Here, as shown in FIG. 10B, when an external force is applied to the top cover 30 of the resonator device 1, the impact is transmitted from the top cover 30 to the resonator 10. In this case, although not shown, the holding arm 150 of the resonator 10 is tilted obliquely with respect to the horizontal direction. In particular, in this embodiment, since the holding arm 150 is configured to locally hold the holding portion 140 and the base portion 130, the resonator 10 is likely to be tilted obliquely with respect to the horizontal direction, with the connection portion between the holding arm 150 and the base portion 130 as a fulcrum. Then, as shown in FIG. 10B, the vibrating arm 135 is tilted obliquely with respect to the horizontal direction. In this regard, in this embodiment, the base end of the vibrating arm 135 comes into contact with the stopper portion 40 formed on the bottom surface of the recess 21, thereby restricting the vibrating arm 135 from colliding with the bottom surface of the recess 21. As a result, the vibrating arm 135 is prevented from being significantly displaced and damaged.

[0050] However, particularly when the depth of the recess 21 in the bottom lid 20 is relatively deep, even if an attempt is made to apply resist to the position where the stopper portion 40 is to be formed on the bottom surface of the recess 21 after forming the recess 21 on the top surface of the bottom lid 20, there is a risk that poor resist application, such as liquid pooling or poor coverage, will occur due to the difference in level between the top surface of the bottom lid 20 and the bottom surface of the recess 21.

[0051] In this embodiment, after a resist having a predetermined pattern is applied to the upper surface of the bottom cover 20, two types of etching having different characteristics (isotropic etching and anisotropic etching) are used in stages to form the stopper portion 40. Therefore, even if the recess 21 of the bottom cover 20 is relatively deep, the stopper portion 40 is suitably formed on the bottom surface of the recess 21.

[0052] In the manufacturing method of the resonator device 1 of the first embodiment, the process of forming the recesses 21, 31 that form the vibration space of the resonator 10 in at least one of the objects, the upper lid 30 and the lower lid 20, includes a first process of isotropically etching the object while covering the object with a mask M having a frame-shaped peripheral portion M1 and a stopper forming portion M2 extending from the peripheral portion M1 toward the inside of the peripheral portion M1, and a second process of anisotropically etching the object etched by isotropic etching in the first process while covering it with the mask M to form a stopper portion 40 that prevents the resonator 10 from colliding with the bottom surface of the recesses 21, 31 at a position that overlaps the stopper forming portion M2 on the bottom surface of the recesses 21, 31 in a planar view of the object. Therefore, in the resonator 1, a stopper portion 40 is formed on the bottom surface of the recesses 21, 31 of the object, which extends from the inner side surface of the recesses 21, 31 and prevents the resonator 10 from colliding with the bottom surface of the recesses 21, 31. As a result, even if an external force is applied to the resonator 1, for example, the base end of the vibrating arm 135 comes into contact with the stopper portion 40 formed on the bottom surface of the recesses 21, 31, thereby preventing the vibrating arm 135 from colliding with the bottom surface of the recesses 21, 31. As a result, the vibrating arm 135 is prevented from being significantly displaced and damaged.

[0053] Furthermore, in the manufacturing method of the resonator device 1 of the first embodiment, the stopper portions 40 are formed on the bottom surfaces of the recesses 21, 31 by gradually applying two types of etching with different characteristics while the object is covered with the mask M. Therefore, even if the recesses 21, 31 are relatively deep, the stopper portions 40 can be suitably formed on the bottom surfaces of the recesses 21, 31.

[0054] In the method for manufacturing the resonator device 1 according to the first embodiment, the stopper-forming portion M2 of the mask M is connected to the peripheral portion M1, so that the stopper-forming portion M2 is unlikely to peel off, float, or reattach during etching. This makes it possible to prevent etching defects and contamination of the inside of the resonator device 1 by fragments of the peeled stopper-forming portion M2.

[0055] <Second embodiment> In the second and subsequent embodiments, the description of the matters common to the first and second embodiments will be omitted, and only the differences will be described. In particular, similar effects due to similar configurations will not be mentioned in each embodiment.

[0056] A process for forming the stopper portion 40α on the lower cover 20 of the resonance device 1 according to the second embodiment will be described. Note that, when forming a stopper portion on the upper cover 30 of the resonance device 1, substantially the same process is performed.

[0057] First, as shown in FIG. 11A, a resist is applied to the lower cover 20 to form a mask M α The lower cover 20 is covered with the mask M in the process shown in FIG. α 11B, the stopper forming portion M2α of the mask Mα is in a mesh shape. Also, the connection forming portion M4 is omitted from the mask Mα.

[0058] Next, as shown in Fig. 12A, the bottom lid 20 is etched by isotropic etching while being covered with a mask Mα. Fig. 12B is a diagram showing an area of ​​the bottom lid 20 that is etched by isotropic etching in the process shown in Fig. 12A. As shown in Fig. 12B, the area of ​​the bottom lid 20 that is etched by isotropic etching in the process shown in Fig. 12A is an area of ​​the bottom lid 20 excluding a part of the pillar forming portion M3. The process shown in Fig. 12A is an example of a first process.

[0059] Next, as shown in FIG. 13A, the lower cover 20 is covered with a mask Mα, and the lower cover 20 is etched by anisotropic etching. 13 FIG. 2 is a diagram showing the area of ​​the lower cover 20 that is etched by anisotropic etching in the step shown in A. 13 As shown in Figure B, 13 The area of ​​the lower cover 20 etched by anisotropic etching in the step shown in FIG. 12A is the area of ​​the lower cover 20 excluding the pillar forming portion M3 and the stopper forming portion M2α. As a result, in the step shown in FIG. 12A, the area of ​​the lower cover 20 excluding the pillar forming portion M3 and the stopper forming portion M2α of the bottom surface of the relatively shallow recess formed in the upper surface of the lower cover 20 is linearly etched from above, and the pillar portion 42 and the stopper portion 40α are formed on the bottom surface of the recess of the lower cover 20. The step shown in FIG. 13A is an example of the second step.

[0060] 14A, the mask Mα is removed from the upper surface of the bottom cover 20, and then the resonator 10 is laminated on the upper surface of the bottom cover 20. As a result, as shown in FIG 14B, in the resonator device 1, in a plan view of the bottom cover 20, the stopper portions 40α are disposed below the base ends of the vibrating arms 135C and 135D, and the collision of the vibrating arms 135C and 135D with the bottom surface of the recess 21 of the bottom cover 20 is restricted by the stopper portions 40α.

[0061] In the method for manufacturing the resonator device 1 according to the second embodiment, the stopper formation portion M2α of the mask Mα is in a mesh shape. Therefore, the rigidity of the stopper portion 40α formed on the bottom surface of the recess 21 of the lower cover 20 can be strengthened. α Even if a gap occurs between the mask M and the upper surface of the lower cover 20, α is prevented from breaking.

[0062] <Third embodiment>

[0063] A process for forming a stopper portion on the lower cover 20 of the resonance device 1 according to the third embodiment will be described. Note that, when forming a stopper portion on the upper cover 30 of the resonance device 1, substantially the same process is performed.

[0064] 15, a resist is applied to the upper surface of the lower lid 20, thereby covering the upper surface of the lower lid 20 with a mask Mβ. In this embodiment, a plurality of areas including the central position in the Y-axis direction of the lower lid 20 and both end positions in the Y-axis direction of the lower lid 20 are covered with the mask Mβ.

[0065] Next, as shown in FIG. 16, the lower cover 20 is etched by isotropic etching while the upper surface of the lower cover 20 is covered with a mask Mβ. In this case, the area of ​​the lower cover 20 that is etched by isotropic etching in the process shown in FIG. 16 is an area that is not covered by the mask Mβ. In addition, in the isotropic etching, not only the area of ​​the lower cover 20 that is not covered by the mask Mβ but also the area covered by the mask Mβ is etched from above. As a result, a recess that is relatively shallow and opens upward is formed on the upper surface of the lower cover 20. This recess functions as a tapered portion 43, which will be described later. The process shown in FIG. 16 is an example of the first process.

[0066] Next, as shown in FIG. 17, the lower cover 20 is etched by anisotropic etching while covered with a mask Mβ. The area of ​​the lower cover 20 that is etched by anisotropic etching in the process shown in FIG. 17 is the area of ​​the lower cover 20 excluding the area covered with the mask Mβ. As a result, in the process shown in FIG. 16, the upper surface of the lower cover 20 is linearly etched from above in the area of ​​the lower cover 20 that is not covered with the mask Mβ among the bottom surface of the relatively shallow recess formed in the upper surface of the lower cover 20. Then, in a plan view of the lower cover 20, a pillar portion 42β having a tapered portion 43 that restricts the collision of the resonator 10 with the bottom surface of the recess 21 is formed at a position that overlaps with the pillar forming portion M3β on the bottom surface of the recess 21. The tapered portion 43 gradually becomes wider toward the bottom surface of the recess 21 and functions as a stopper portion. The process shown in FIG. 17 is an example of the second process.

[0067] Next, as shown in FIG. 18, a mask M is applied to the upper surface of the lower cover 20. β After removing the pillar 42β, the resonator 10 is laminated on the upper surface of the lower cover 20. As a result, in the resonance device 1, the tapered portion 43 of the pillar portion 42β is disposed below the base ends of the vibrating arms 135B and 135C in a plan view of the lower cover 20, and the collision of the vibrating arms 135B and 135C with the bottom surface of the recess 21 of the lower cover 20 is restricted by the tapered portion 43.

[0068] Next, the operation of the resonance device 1 according to the third embodiment will be described.

[0069] As shown in FIG. 19, when an external force is applied to the top cover 30 of the resonator device 1, the impact is transmitted from the top cover 30 to the resonator 10. Although not shown, the resonator 10 moves downward with the vibrating arm 135 inclined obliquely to the horizontal direction. In particular, in this embodiment, since the holding arm 150 is configured to locally hold the holding portion 140 and the base portion 130, the vibrating arm 135 is likely to incline obliquely to the horizontal direction with the connection portion between the holding arm 150 and the base portion 130 as a fulcrum. In this regard, as shown in FIG. 19, in this embodiment, the base ends of the vibrating arms 135B and 135C come into contact with the tapered portion 43 formed on the pillar portion 42β, thereby restricting the vibrating arms 135B and 135C from colliding with the bottom surface of the recess 21. As a result, the vibrating arms 135B and 135C are prevented from being significantly displaced and damaged.

[0070] In the manufacturing method of the resonator device 1 of the third embodiment, the process of forming the recesses 21, 31 that form the vibration space of the resonator 10 in at least one of the objects, the upper lid 30 and the lower lid 20, includes a first process of isotropically etching the object covered with a mask Mβ having a pillar forming portion M3β, and a second process of anisotropically etching the object etched by isotropic etching in the first process while covered with the mask Mβ to form a pillar portion 42β having a tapered portion that gradually becomes wider toward the bottom surface of the recesses 21, 31 at a position that overlaps with the pillar forming portion M3β on the bottom surface of the recesses 21, 31 in a planar view of the object, the tapered portion 42β having a tapered portion 43 that regulates collision of the resonator 10 with the bottom surface of the recesses 21, 31. Therefore, even if an external force is applied to the upper cover 30 of the resonator 1 and the resonating arm 135 moves downward at an angle to the horizontal direction, the base end of the resonating arm 135 comes into contact with the tapered portion 43 formed on the pillar portion 42, thereby preventing the resonating arm 135 from colliding with the bottom surface of the recesses 21, 31. As a result, the resonating arm 135 is prevented from being significantly displaced and damaged.

[0071] Furthermore, in the manufacturing method of the resonator device 1 according to the third embodiment, there is no need to form the mask Mβ in a bridge shape, and therefore, breakage of the mask Mβ is suppressed compared to the case where the mask Mβ is formed in a bridge shape.

[0072] Each of the above-described embodiments may be implemented in the following manner.

[0073] In each of the above embodiments, an example has been given of forming masks M, Mα, Mβ by applying resist to at least one of the objects, the upper lid 30 and the lower lid 20, but the method of forming masks M, Mα, Mβ is not limited to this, and for example, a metal mask having a predetermined pattern formed thereon may be used.

[0074] In the first and second embodiments, the stopper portions 40, 40α may be provided on the bottom surface of the recesses 21, 31 of at least one of the objects of the upper lid 30 and the lower lid 20 without providing the pillar portions .

[0075] In the first embodiment, the connecting portion 41 that connects the side wall 23, 33 of at least one of the objects of the upper lid 30 and the lower lid 20 to the stopper portion 40 may be omitted.

[0076] In the above first and second embodiments, the stopper portion 40, 40α does not necessarily need to extend from the side wall 23, 33 of at least one of the objects, the upper lid 30 and the lower lid 20, to approximately the center position in the X-axis direction of the recess 21, 31, but rather needs to be configured to cross the base end of at least a portion of the vibrating arms 135 in a direction intersecting the longitudinal direction of the vibrating arms 135 when viewed in a plane.

[0077] In the above first and second embodiments, the stopper portion 40, 40α does not necessarily have to be positioned at a position overlapping the base end of the vibrating arm 135 when viewed in a plane of at least one of the objects, the upper lid 30 and the lower lid 20, but may be positioned, for example, at a position overlapping the middle or tip portion of the vibrating arm 135 when viewed in a plane of the object.

[0078] The following describes some or all of the embodiments of the present invention and their effects. Note that the present invention is not limited to the following descriptions.

[0079] According to one aspect of the present invention, there is provided a method for manufacturing a resonator device having a resonator and an upper lid and a lower lid disposed opposite each other with the resonator therebetween, the method including a step of forming a recess forming a vibration space for the resonator in at least one of the upper lid and the lower lid, the step of forming the recess in the object including a first step of isotropically etching the object while covering the object with a mask having a frame-shaped peripheral portion and a stopper forming portion extending from the peripheral portion toward the inside of the peripheral portion, and a second step of anisotropically etching the object etched by isotropic etching in the first step while covering it with a mask to form a stopper portion that prevents the resonator from colliding with the bottom surface of the recess at a position that overlaps the stopper forming portion on the bottom surface of the recess when viewed in a plane of the object.

[0080] In one aspect, there is provided a method for manufacturing a resonator device, wherein the mask further has a pillar formation portion that is connected to the stopper formation portion and has an area larger than that of the stopper formation portion in a plan view of the target object.

[0081] In one aspect, a method for manufacturing a resonator device is provided, in which a stopper forming portion extends in one direction from a peripheral portion of a mask, and in a planar view of the object, a dimension of the pillar forming portion in a width direction intersecting with the longitudinal direction of the stopper forming portion is larger than a dimension of the stopper forming portion in the same direction.

[0082] In one aspect, there is provided a method for manufacturing a resonator device, wherein the stopper forming portion has a mesh shape.

[0083] According to one aspect of the present invention, there is provided a method for manufacturing a resonator device having a resonator and an upper lid and a lower lid disposed opposite each other with the resonator therebetween, the method including a first step of isotropically etching the object covered with a mask having a pillar forming portion and a second step of anisotropically etching the object etched by isotropic etching in a state where the object is covered with a mask to form a pillar portion having a tapered portion that gradually becomes wider toward the bottom surface of the recess at a position that overlaps with the pillar forming portion on the bottom surface of the recess in a plan view of the object, the tapered portion restricting collision of the resonator with the bottom surface of the recess.

[0084] According to one aspect of the present invention, there is provided a resonator device comprising a resonator and an upper lid and a lower lid arranged opposite each other with the resonator therebetween, at least one of the upper lid and the lower lid having a recess that forms a vibration space for the resonator, and a stopper portion is formed on the bottom surface of the recess, extending from the inner side surface of the recess and preventing the resonator from colliding with the bottom surface of the recess.

[0085] In one embodiment, there is provided a resonator device, in which a pillar portion is further formed on the bottom surface of the recess, the pillar portion being connected to the stopper portion and having an area larger than that of the stopper portion in a plan view of the upper lid and the lower lid.

[0086] According to one aspect of the present invention, there is provided a resonator device comprising a resonator, and an upper lid and a lower lid arranged opposite each other with the resonator therebetween, at least one of the upper lid and the lower lid having a recess that forms a vibration space for the resonator, and a pillar portion is formed on a bottom surface of the recess, the pillar portion having a tapered portion that gradually becomes wider toward the bottom surface of the recess and that regulates collision of the resonator with the bottom surface of the recess.

[0087] As described above, according to one aspect of the present invention, damage to the resonator can be suppressed.

[0088] The above-described embodiments are intended to facilitate understanding of the present invention, and are not intended to limit the present invention. The present invention may be modified / improved without departing from the spirit thereof, and equivalents are also included in the present invention. That is, those in which a person skilled in the art appropriately changes the design of each embodiment are also included in the scope of the present invention as long as they have the characteristics of the present invention. For example, the elements and their arrangements, materials, conditions, shapes, sizes, etc. of each embodiment are not limited to those exemplified, and can be appropriately changed. In addition, each embodiment is an example, and it goes without saying that partial replacement or combination of the configurations shown in different embodiments is possible, and these are also included in the scope of the present invention as long as they include the characteristics of the present invention. [Explanation of symbols]

[0089] 10 resonator 20 Lower lid 30 Top lid 40 Stopper part 40α Stopper part 41 Connecting part 42 Pillar section 42β Pillar section 43 Tapered section 120 Vibration part 130 base 135A~D Vibrating arm 140 Holding part 140a~d Frame 150 Holding Arm M Mask Mα Mask Mβ Mask M1 Periphery M2 Stopper forming part M2α stopper forming part M3 Pillar forming part M3β pillar forming area M4 connection forming part

Claims

1. 1. A method for manufacturing a resonator device having a resonator and an upper cover and a lower cover disposed opposite each other with the resonator therebetween, comprising the steps of: forming a recess in at least one of the upper and lower covers to define a vibration space for the resonator; The step of forming the recess in the object includes: a first step of etching the object by isotropic etching in a state where the object is covered with a mask having a frame-shaped peripheral portion and a stopper forming portion extending from the peripheral portion toward the inside of the peripheral portion; a second step of etching the object etched by isotropic etching in the first step by anisotropic etching while covering the object with the mask, to form a stopper portion that prevents the resonator from colliding with the bottom surface of the recess at a position that overlaps the stopper forming portion on the bottom surface of the recess in a plan view of the object; Including, A method for manufacturing a resonator device.

2. the mask further includes a pillar forming portion connected to the stopper forming portion and having an area larger than that of the stopper forming portion in a plan view of the object; A method for manufacturing the resonator device according to claim 1 .

3. the stopper forming portion extends in one direction from the peripheral portion of the mask, In a plan view of the object, a dimension of the pillar formation portion in a width direction intersecting a longitudinal direction of the stopper formation portion is larger than a dimension of the stopper formation portion in the same direction. A method for manufacturing the resonator device according to claim 2 .

4. The stopper forming portion has a mesh shape. A method for manufacturing the resonator device according to claim 1 .

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