Acoustic package structure and cover structure

Abstract

To provide an improved acoustic package structure.SOLUTION: An acoustic package structure includes a substrate, a cover structure and an acoustic chip. The cover structure is arranged on the substrate, and has a plurality of first openings. The acoustic chip is arranged between the substrate and the cover structure, and includes a film.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present application relates to an acoustic packaging and covering structure, and more particularly to an acoustic packaging and covering structure having high protection effect and low acoustic resistance. [Background technology]

[0002] Acoustic components such as acoustic MEMS (microelectromechanical systems) structures have been rapidly developed in recent years due to their small size allowing for a wide range of applications in various electronic devices. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2020 / 0100033 [Patent Document 2] U.S. Pat. No. 1,135,0217 [Patent Document 3] US Patent Application Publication No. 2013 / 0018218 [Patent Document 4] US Patent Application Publication No. 2014 / 0121449 [Patent Document 5] US Patent Application Publication No. 2014 / 0121450

[0004] However, acoustic components need to be protected due to their small size and fragile structure, so it is necessary to provide a packaging structure to protect the acoustic components. Summary of the Invention

[0005] Therefore, the main object of the present invention is to provide an acoustic package structure including a cover structure having a plurality of first openings, which can improve the protective effect for the acoustic chip and reduce the acoustic resistance of the cover structure. The present invention also provides a related cover structure.

[0006] One embodiment of the present invention provides an acoustic packaging structure including a substrate, a cover structure, and an acoustic chip. The cover structure is disposed on the substrate and has a plurality of first openings. The acoustic chip is disposed between the substrate and the cover structure, and the acoustic chip includes a membrane.

[0007] Another embodiment of the present invention provides a cover structure disposed or to be disposed on a substrate of an acoustic packaging structure, the cover structure including a plurality of first openings formed therein.

[0008] These and other objectives of the present invention will no doubt become obvious to those of ordinary skill in the art after reading the following detailed description of the preferred embodiment that is illustrated in the various figures and drawings. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic diagram showing an acoustic package structure according to one embodiment of the present invention. [Diagram 2] FIG. 2 is a schematic diagram of a cross-sectional view showing an acoustic package structure according to one embodiment of the present invention. [Diagram 3] FIG. 3 is a schematic diagram illustrating two frequency responses of a membrane of an acoustic chip in an acoustic packaging structure according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] In order to allow those skilled in the art to better understand the present invention, the preferred embodiments and typical materials or range parameters of the main components are described in detail below. These preferred embodiments of the present invention are illustrated in the accompanying drawings using numbered elements to describe in detail the contents and effects to be realized. It should be noted that the drawings are simplified schematic diagrams, and the materials and parameter ranges of the main components are illustrated based on the current technology, so that only the components and combinations related to the present invention are shown, providing a clearer description of the basic structure, implementation or operation method of the present invention. The components may be more complicated in reality, and the parameter ranges or materials used may evolve according to the progress of technology in the future. In addition, for ease of explanation, the components shown in the drawings may not represent the actual number, shape and size, and the details may be adjusted according to design requirements.

[0011] In the following description and claims, the terms "including", "including" and "having" are used in an open-ended sense and should therefore be interpreted to mean "including but not limited to. " Thus, when the terms "including", "including" and / or "having" are used in describing the invention, they indicate the presence of the corresponding features, regions, steps, operations and / or components, but are not limited to the presence of one or more of the corresponding features, regions, steps, operations and / or components.

[0012] In the following description and claims, when a component or layer is referred to as being "connected" to another component or layer, it may be directly connected to that other component or layer, or there may be intervening components or layers. In contrast, when a component is referred to as being "directly connected" to another component or layer, there are no intervening components or layers.

[0013] In the following description and claims, when "component A1 is formed by / from B1," it means that B1 is present in or used in the formation of component A1, and does not exclude the presence and use of one or more other features, regions, steps, operations and / or components in the formation of component A1.

[0014] In the following description and claims, the term "substantially" generally means that there may be or may not be a small deviation. For example, the terms "substantially parallel" and "substantially along" mean that the angle between two components is equal to or less than a certain angle threshold, such as 10 degrees, 5 degrees, 3 degrees, or 1 degree. For example, the term "substantially aligned" means that the deviation between two components is equal to or less than a certain difference threshold, such as 2 μm or 1 μm. For example, the term "substantially the same" means that the deviation is, for example, within 10% of a given value or range, or within 5%, 3%, 2%, 1%, or 0.5% of a given value or range.

[0015] In the following description and claims, the term "horizontal" generally means a direction parallel to a horizontal plane, the term "horizontal plane" means a plane parallel to directions X and Y in the drawings (i.e., directions X and Y of the present invention may be considered as horizontal directions), and the term "vertical" generally means a direction parallel to direction Z and perpendicular to the horizontal direction in the drawings, directions X, Y and Z being perpendicular to each other. In the following description and claims, the term "top view" generally means a viewing result seen along one vertical direction, and the term "cross-section" generally means a viewing result seen along a horizontal direction, a structure cut vertically.

[0016] Terms such as first, second, third, etc. may be used to describe various components, but such components are not limited by the terms. The terms are used in this specification only to distinguish one component from another, and if not described in this specification, the terms do not relate to the order of manufacture. The terms first, second, third, etc. may be used with respect to the order in which the elements are claimed, although the claims may not use the same terms. Thus, in the following description, the first component may be the second component in the claims.

[0017] It should be noted that the technical features in the different embodiments described below can be substituted, recombined or mixed with each other to form other embodiments without departing from the spirit of the present invention.

[0018] 1 and 2, FIG. 1 is a schematic diagram showing an acoustic package structure according to an embodiment of the present invention, and FIG. 2 is a schematic diagram of a cross-sectional view showing an acoustic package structure according to an embodiment of the present invention. As shown in FIG. 1 and FIG. 2, the acoustic package structure 100 includes an acoustic chip 120. The acoustic chip 120 may be associated with acoustic waves (e.g., the acoustic chip 120 may generate or receive acoustic waves, or the acoustic chip 120 may be a path through which acoustic waves pass) and / or the acoustic chip 120 may enhance the experience of a user using an acoustic device including the acoustic chip 120, and the acoustic waves may be sonic or ultrasonic. The acoustic chip 120 may be controlled by a signal or generate a signal according to the acoustic wave, and the signal may be an electrical signal or other suitable type of signal.

[0019] In some embodiments, the acoustic chip 120 may include an acoustic transducer configured to perform acoustic transduction, which may convert a signal (e.g., an electrical signal) into an acoustic wave or convert an acoustic wave into another suitable type of signal (e.g., an electrical signal). For example, the acoustic transducer may be, but is not limited to, a sound generating component, a speaker, a microspeaker, or other suitable device to convert an electrical signal into an acoustic wave. For example, the acoustic transducer may be, but is not limited to, an acoustic measuring device, a sound pressure sensing device, a microphone, or other suitable device to convert an acoustic wave into an electrical signal.

[0020] In some embodiments, the acoustic chip 120 may be controlled by an electrical signal. For example, the acoustic chip 120 may include a vent device, and the size of the vent opening of the vent device may be controlled by an electrical signal. For example, the vent device may be configured to suppress the occlusion effect during operation of the acoustic device (e.g., in-ear earphones, on-ear earphones, or over-ear headphones, etc.). The occlusion effect occurs when the volume of the ear canal is sealed, causing the user (i.e., listener) to perceive a large sound pressure. In some cases, when a user performs certain actions that cause bone-conducted sound (e.g., walking, jogging, talking, eating, touching an acoustic transducer, etc.), the occlusion effect occurs while using the acoustic device filled in the ear canal, and the occlusion effect causes the user to hear an occlusion noise, thereby reducing the user's hearing quality. Thus, the presence of the vent device suppresses the occlusion effect, as the volume of the ear canal is not sealed when the vent opening of the vent device is open, thereby enhancing the performance of the acoustic device and the experience of the user of the acoustic device.

[0021] In some embodiments, acoustic chip 120 may be, but is not limited to, a MEMS (microelectromechanical system) chip, i.e., the above-mentioned components in acoustic chip 120 (e.g., acoustic transducer, vent device, or other suitable components related to acoustics) may be, but is not limited to, MEMS structures formed by semiconductor processes.

[0022] In the following, for example, the acoustic chip 120 may include, but is not limited to, an acoustic transducer configured to convert electrical signals into acoustic waves (i.e., the acoustic chip 120 may perform acoustic transduction to generate acoustic waves).

[0023] 2, the acoustic chip 120 includes an anchor structure 126 and a membrane 122 secured by the anchor structure 126. The membrane 122 and the anchor structure 126 may be made of any suitable material. For example, the membrane 122 and the anchor structure 126 may individually include, but are not limited to, silicon (e.g., monocrystalline silicon or polycrystalline silicon), silicon compounds (e.g., silicon carbide, silicon oxide), germanium, germanium compounds, gallium, gallium compounds (e.g., gallium nitride or gallium arsenide), or combinations thereof. In some embodiments, the membrane 122 and the anchor structure 126 may have the same material.

[0024] Since the acoustic chip 120 includes, for example, an acoustic transducer, the membrane 122 belongs to the acoustic transducer and can be actuated to perform acoustic transduction to generate acoustic waves.

[0025] In operation of the acoustic tip 120, the membrane 122 may be actuated to move and the anchor structure 126 may be fixed. That is, the anchor structure 126 may be a fixed end (or edge) relative to the membrane 122 during operation of the acoustic tip 120. In some embodiments, the membrane 122 may be moved up and down, without being limited thereto. In the present invention, the terms "moving up" and "moving down" refer to the membrane 122 moving substantially along the direction Z.

[0026] The membrane 122 can be designed based on requirements. In Fig. 2, the membrane 122 has multiple flaps 122f separated by at least one slit SL, and the flaps 122f can be actuated to move in the direction Z. For example, but not limited to, in the membrane 122 shown in Fig. 2, two flaps 122f can be separated by one slit SL.

[0027] The frequency range of the acoustic waves generated by each acoustic chip 120 may be designed based on requirements. For example, one embodiment of the acoustic chip 120 may generate acoustic waves in a frequency range covering the human audible frequency range (e.g., 20Hz to 20kHz), but is not limited thereto. Another embodiment of the acoustic chip 120 may generate acoustic waves with a frequency higher than a specific frequency, such as, but is not limited to, the acoustic chip 120 may be a high frequency acoustic unit (tweeter). For example, another embodiment of the acoustic chip 120 may generate acoustic waves with a frequency lower than a specific frequency, such as, but is not limited to, the acoustic chip 120 may be a low frequency acoustic unit (woofer). It should be noted that the specific frequency may be, but is not limited to, a value in the range of 800Hz to 4kHz (e.g., 1.44kHz). Details of the high frequency sound unit and the low frequency sound unit are not described here for brevity, so please refer to U.S. Application No. 17 / 153849 filed by the applicant.

[0028] The number of acoustic chips 120 can be designed based on requirements. For example, in Fig. 2, the acoustic package structure 100 has, but is not limited to, two acoustic chips 120, and the frequency ranges of the acoustic waves generated by the two acoustic chips 120 can be the same or different.

[0029] The acoustic chip 120 may include any suitable components. As shown in FIG. 2, the acoustic chip 120 may include an actuator 124 configured to actuate the membrane 122 to cause the membrane 122 to generate acoustic waves. For example, but not limited to, the actuator 124 may be disposed on the membrane 122.

[0030] The membrane 122 may be actuated by any suitable actuation method. In the present invention, the actuator 124 has a monotonic electromechanical transduction function for the movement of the membrane 122 along a direction (e.g., direction Z). In some embodiments, the actuator 124 may include, but is not limited to, a piezoelectric actuator, an electrostatic actuator, a nanoscale electrostatic drive (NED) actuator, an electromagnetic actuator, or other suitable actuator. For example, in one embodiment, the actuator 124 may include a piezoelectric actuator, which may include two electrodes and a piezoelectric material layer (e.g., lead zirconate titanate, PZT) disposed between the electrodes, which may actuate the membrane 122 based on, but is not limited to, a drive signal received by the electrodes (e.g., a drive voltage difference between the two electrodes and / or a drive voltage). For example, in another embodiment, the actuator 124 may include an electromagnetic actuator (such as a planar coil), which may actuate the membrane 122 based on, but is not limited to, a drive signal (e.g., a drive current) and a magnetic field received (i.e., the membrane 122 may be actuated by an electromagnetic force). For example, in yet another embodiment, the actuator 124 may include an electrostatic actuator (such as a conductive plate) or an NED actuator, which may actuate the membrane 122 based on, but is not limited to, a received drive signal (e.g., a drive voltage) and an electrostatic field (i.e., the membrane 122 may be actuated by electrostatic forces).

[0031] As shown in Figures 1 and 2, the acoustic packaging structure 100 includes a substrate 110 and a cover structure 130 disposed on the substrate 110, and the acoustic chip 120 is disposed between the substrate 110 and the cover structure 130. In Figure 2, a first cavity CB1 exists between the cover structure 130 and the acoustic chip 120, and a second cavity CB2 exists between the substrate 110 and the acoustic chip 120. For example, since the acoustic packaging structure 100 includes two acoustic chips 120 in Figure 2, the acoustic packaging structure 100 has a first cavity CB1 and a second cavity CB2, and the first cavity CB1 exists between the cover structure 130 and the two acoustic chips 120, one of the second cavities CB2 exists between the substrate 110 and one acoustic chip 120, and the other of the second cavities CB2 exists between the substrate 110 and the other acoustic chip 120.

[0032] The substrate 110 can be designed based on requirements. In some embodiments, the substrate 110 can be rigid or flexible, and the substrate 110 can include silicon, germanium, glass, plastic, quartz, sapphire, metal, polymer (e.g., polyimide (PI), polyethylene terephthalate (PET)), any other suitable material, or a combination thereof. By way of example, the substrate 110 can be, but is not limited to, a circuit board including a laminate (e.g., copper clad laminate, CCL), a land grid array (LGA) substrate, or any other suitable substrate including a conductive material. As shown in FIG. 1 and FIG. 2, the normal direction of the substrate 110 can be, but is not limited to, parallel to the Z direction.

[0033] The cover structure 130 can be designed based on requirements. In the present invention, the cover structure 130 can be a single structure (as shown in FIG. 2) or can be composed of multiple sub-structures (e.g., the cover structure 130 can be composed of multiple boards). The cover structure 130 can include any suitable material, such as, but not limited to, metal, glass, silicon, germanium, plastic, polymer, or combinations thereof.

[0034] 1 and 2, the cover structure 130 may include a top portion 132 and at least one sidewall portion 134 connected to the top portion 132 such that a cross-sectional view of the cover structure 130 may be U-shaped (e.g., FIG. 2). In FIGS. 1 and 2, the normal direction of the top portion 132 may be parallel to the direction Z, and the normal direction of the sidewall portion 134 may be perpendicular to the direction Z, without being limited thereto.

[0035] The acoustic package structure 100 includes at least one opening such that the first cavity CB1 and / or the second cavity CB2 are connected to the outside of the acoustic package structure 100. As shown in Figures 1 and 2, the cover structure 130 has a plurality of first openings 130a connected to the first cavity CB1 such that an acoustic wave associated with the membrane 122 of the acoustic chip 120 passes through the first openings 130a of the cover structure 130.

[0036] In the present invention, the first openings 130a may be formed in the top portion 132 and / or the sidewall portion 134 of the cover structure 130. For example, as shown in Figures 1 and 2, the top portion 132 may have, but is not limited to, all of the first openings 130a.

[0037] In the present invention, the first openings 130a can be designed based on requirements. For example, but not limited to, the first openings 130a can be arranged in a plurality of columns extending along a direction X and / or a plurality of rows extending along a direction Y. For example, but not limited to, the first openings 130a can be arranged in an array. For example, the top view pattern of the first openings 130a can be a hexagon, a circle, or other suitable shape.

[0038] In some embodiments, one of the first openings 130a may correspond to the area of ​​the acoustic package structure 100 that has the greatest acoustic effect. For example, but not limited to, this area may generate the acoustic waves with the highest sound pressure level (SPL) or have the highest sensitivity to acoustic waves or have the largest airflow passing through this area. In one embodiment, as shown in Figures 1 and 2, one of the first openings 130a may be located at, but not limited to, the center of the cover structure 130 in top view. In another embodiment (not shown), one of the first openings 130a may be located at, but not limited to, the center of the membrane 122 in the normal direction (i.e., direction Z) of the substrate 110.

[0039] In the present invention, the size of the first opening 130a can be designed based on requirements. In some embodiments, the first opening 130a is small or significantly small. In some embodiments, the size of the first opening 130a can be, but is not limited to, less than 10%, 5%, 3% or 1% of the upper portion 132 of the cover structure 130.

[0040] In the present invention, since the cover structure 130 has a plurality of first openings 130a, the cover structure 130 of the present invention can provide a higher physical protection effect for the acoustic chip 120 than a conventional cover structure having one large opening (e.g., the size of the conventional large opening is larger than the upper half of the conventional cover structure, and the first opening 130a of the present invention is much smaller than the conventional large opening). For example, the cover structure 130 of the present invention can protect the acoustic chip 120 during the subsequent use of the acoustic packaging structure 100 (e.g., the operation of the acoustic chip 120, the process of placing the acoustic packaging structure 100 in an acoustic device, and / or other suitable applications), thereby increasing the yield rate of the acoustic packaging structure 100 and the yield rate of the acoustic device. Furthermore, external objects (e.g., dust, particles, sharp objects, etc.) are less likely to enter the acoustic packaging structure 100 due to the presence of the cover structure 130 having a plurality of first openings 130a.

[0041] Furthermore, the acoustic resistance of the cover structure 130 is related to the total area of ​​the first openings 130a (i.e., the larger the total area of ​​the first openings 130a, the smaller the acoustic resistance). Therefore, the acoustic resistance of the cover structure 130 can be reduced by increasing the number of the first openings 130a and / or by increasing the size of the first openings 130a. As a result, the cover structure 130 can provide high protection effect and low acoustic resistance for the acoustic chip 120.

[0042] As shown in Fig. 2, the substrate 110 has at least one second opening 110a. In Fig. 2, the second opening 110a can be connected to one second cavity CB2. For example, but not limited to, the substrate 110 has two second openings 110a connected to two second cavities CB2, respectively.

[0043] Referring to FIG. 3, FIG. 3 is a schematic diagram showing two frequency responses of the membrane of the acoustic chip in the acoustic packaging structure according to an embodiment of the present invention. In FIG. 3, the first frequency response is the frequency response of the membrane 122 of the acoustic chip 120 in the first acoustic packaging structure, and the second frequency response is the frequency response of the membrane 122 of the acoustic chip 120 in the second acoustic packaging structure, and the total area of ​​the first opening 130a of the first cover structure of the first acoustic packaging structure is larger than the total area of ​​the first opening 130a of the second cover structure of the second acoustic packaging structure. For example, in FIG. 3, the ratio of the total area of ​​the first opening 130a of the first acoustic packaging structure to the total area of ​​the first opening 130a of the second acoustic packaging structure can be in the range of 150 to 170, but is not limited thereto.

[0044] As shown in Figure 3, in the first frequency response, the minimum resonant peak P1 of the membrane 122 of the first acoustic packaging structure occurs at a first frequency RF1 (i.e., the first frequency RF1 is the minimum resonant frequency of the membrane 122 in the first acoustic packaging structure) and has a first peak value (i.e., SPL). As shown in Figure 3, in the second frequency response, the minimum resonant peak P2 of the membrane 122 of the second acoustic packaging structure occurs at a second frequency RF2 (i.e., the second frequency RF2 is the minimum resonant frequency of the membrane 122 in the second acoustic packaging structure) and has a second peak value (i.e., SPL).

[0045] In FIG. 3, the first frequency RF1 is greater than the second frequency RF2, and the first peak value is greater than the second peak value. That is, in the acoustic package structure 100, as the total area of ​​the first opening 130a decreases, the minimum resonant frequency of the membrane 122 and the peak value of the minimum resonant peak of the membrane 122 decrease. In some embodiments, the difference between the first frequency RF1 and the second frequency RF2 may be equal to or greater than 1000 Hz, 2000 Hz, 5000 Hz, or other suitable values. For example, in FIG. 3, the difference between the first frequency RF1 and the second frequency RF2 may be, but is not limited to, about 6000 Hz. Therefore, in the acoustic package structure 100, the minimum resonant frequency of the membrane 122 and the peak value of the minimum resonant peak of the membrane 122 may be changed by adjusting the total area of ​​the first opening 130a.

[0046] In some embodiments, in the first acoustic packaging structure, the total area of ​​the first opening 130a can be greater than, equal to, or similar to the total area of ​​the membrane 122 of the acoustic chip 120. Thus, the minimum resonance frequency and the peak value of the minimum resonance peak of the membrane 122 of the acoustic chip 120 before being placed in the acoustic packaging structure 100 can be equal to or similar to the first frequency RF1 and the first peak value in the first frequency response, respectively. Thus, in some embodiments, the minimum resonance frequency of the membrane 122 of the acoustic chip 120 before being placed in the acoustic packaging structure 100 can be greater than the minimum resonance frequency of the membrane 122 of the acoustic chip 120 after being placed in the acoustic packaging structure 100 (for example, this difference can be greater than or equal to 1000Hz, 2000Hz, 5000Hz, or other suitable value based on the total area of ​​the first opening 130a of the cover structure 130). In some embodiments, the peak value of the minimum resonant peak of the membrane 122 of the acoustic chip 120 before being placed in the acoustic packaging structure 100 may be greater than the peak value of the minimum resonant peak of the membrane 122 of the acoustic chip 120 after being placed in the acoustic packaging structure 100 (e.g., this difference is related to the total area of ​​the first opening 130a of the cover structure 130).

[0047] In summary, since the cover structure of the present invention has a plurality of first openings, the cover structure provides high protection effect and low acoustic resistance for the acoustic chip, and the minimum resonance frequency and the peak value of the minimum resonance peak of the membrane of the acoustic chip in the acoustic packaging structure can be adjusted according to requirements.

[0048] Those skilled in the art will readily appreciate that numerous modifications and variations of the apparatus and methods may be made while retaining the teachings of the present invention. Accordingly, the above disclosure should be construed as limited only by the content and scope of the appended claims.

Claims

1. 1. An acoustic package structure, comprising: A substrate; a cover structure disposed over the substrate, the cover structure having a plurality of first openings; an acoustic chip disposed between the substrate and the cover structure, the acoustic chip including a membrane; Including, a first frequency response of a membrane of the acoustic chip prior to being disposed in the acoustic packaging structure, the first frequency being a minimum resonant frequency of the membrane; a second frequency response of the membrane of the acoustic chip after being disposed in the acoustic packaging structure, the second frequency being a minimum resonant frequency of the membrane; a first peak value in a first frequency response of a membrane of the acoustic chip prior to placement in the acoustic packaging structure, the first peak value being a peak value of a minimum resonant peak of the membrane; a second peak value in a second frequency response of the membrane of the acoustic chip after placement in the acoustic packaging structure is a peak value of a minimum resonant peak of the membrane; the first frequency is greater than the second frequency and the first peak value is greater than the second peak value; The minimum resonance frequency and the peak value of the minimum resonance peak of the membrane become smaller as the total area of ​​the first opening becomes smaller. Acoustic package structure.

2. 2. The acoustic package structure of claim 1, wherein the difference between said first frequency and said second frequency is 1000 Hz or greater.

3. The acoustic package structure of claim 1 , wherein one of said plurality of first openings is located at a center of said cover structure when viewed from above.

4. The acoustic package structure of claim 1 , wherein one of the plurality of first openings corresponds to a center of the membrane in a normal direction of the substrate.

5. The acoustic package structure of claim 1 , wherein a top view pattern of one of said plurality of first openings is a hexagon or a circle.

6. The acoustic package structure of claim 1 , wherein said cover structure includes a top portion and at least one sidewall portion connected to said top portion, said top portion having said first plurality of openings.

7. The acoustic packaging structure of claim 1 , wherein acoustic waves associated with a membrane of said acoustic chip pass through a plurality of first openings in said cover structure.

8. The acoustic package structure of claim 1 , wherein the membrane is configured to provide acoustic transduction.

9. The acoustic package structure of claim 8 , wherein said membrane generates acoustic waves.

10. The acoustic package structure of claim 1 , wherein said acoustic chip is a MEMS chip.

11. A cover structure disposed on a substrate of an acoustic package structure, the cover structure comprising: a plurality of first openings formed in the cover structure; The acoustic package structure includes an acoustic chip disposed on the substrate, the acoustic chip including a membrane; a first frequency response of a membrane of the acoustic chip prior to being disposed in the acoustic packaging structure, the first frequency being a minimum resonant frequency of the membrane; a second frequency response of the membrane of the acoustic chip after being disposed in the acoustic packaging structure, the second frequency being a minimum resonant frequency of the membrane; In a first frequency response of a membrane of the acoustic chip prior to placement in the acoustic packaging structure, a first peak value is a peak value of a minimum resonant peak of the membrane; a second peak value in a second frequency response of the membrane of the acoustic chip after placement in the acoustic packaging structure is a peak value of a minimum resonant peak of the membrane; the first frequency is greater than the second frequency and the first peak value is greater than the second peak value; A cover structure, wherein the minimum resonant frequency and the peak value of the minimum resonant peak of the membrane become smaller as the total area of ​​the first opening becomes smaller.

12. The cover structure of claim 11 , wherein the acoustic chip is a MEMS chip.

13. A cover structure as described in claim 11, wherein one of the plurality of first openings corresponds to a center of the film in a normal direction of the substrate.

14. The cover structure of claim 11 , wherein one of the plurality of first openings is located at a center of the cover structure when viewed from above.

15. The cover structure of claim 11 , wherein the top view pattern of one of the first plurality of openings is a hexagon or a circle.

16. The cover structure of claim 11 , wherein the cover structure includes a top portion and at least one sidewall portion connected to the top portion, the top portion having the first plurality of openings.

17. The cover structure of claim 11 , wherein acoustic waves associated with a membrane of an acoustic tip pass through a plurality of first openings in the cover structure.

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