Substrate holding device

Abstract

To improve maintainability of a substrate holding device.SOLUTION: A substrate holding device 2 includes a base 3 and a plurality of holders 5 that are attached to the base 3 and hold a substrate. The plurality of holders 5 are arranged in a predetermined arrangement direction, and are detachably attached to the base 3 in parallel with a reference surface R which is a surface intersecting the arrangement direction.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The technology disclosed herein relates to a substrate holding device. [Background technology]

[0002] Conventionally, substrate holding devices for holding substrates have been known. For example, Patent Document 1 discloses a substrate holding device for holding a plurality of substrates. Specifically, the substrate holding device disclosed in Patent Document 1 includes a plurality of holders for holding substrates, and is configured to transport a plurality of substrates. The plurality of holders are attached to the pitch conversion mechanism in a state where they are arranged in the thickness direction of the substrate. At this time, the plurality of holders are attached to the pitch conversion mechanism in order from the holder located at the bottom. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-313865 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the substrate holding device, the holders may be removed from the substrate holding device for maintenance or replacement. However, in the above-mentioned configuration, even when it is desired to remove only some of the holders, it may be necessary to remove holders that do not need to be removed, or the entire substrate holding device may need to be disassembled.

[0005] The technique disclosed herein has been made in view of the above points, and has an object to improve the maintainability of a substrate holding device. [Means for solving the problem]

[0006] The substrate holding device disclosed herein comprises a base and a plurality of holders attached to the base for holding substrates, the plurality of holders being arranged in a predetermined arrangement direction and removably attached to the base parallel to a reference plane, which is a virtual plane that intersects the arrangement direction. Effect of the Invention

[0007] According to the substrate holding device, the maintainability of the substrate holding device can be improved. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic front view of a substrate transport robot. [Diagram 2] FIG. 2 is a side view of the substrate holding device. [Diagram 3] FIG. 3 is a plan view of the substrate holding device. [Figure 4] FIG. 4 is a perspective view of the substrate holding device. [Diagram 5] FIG. 5 is a perspective view of the mounting portion of the odd-numbered holder. [Figure 6] FIG. 6 is a plan view of an even-numbered holder. [Figure 7] 7 is a cross-sectional view of the mounting portion taken along line VII-VII in FIG. [Figure 8] 8 is a cross-sectional view of the mounting portion taken along line VIII-VIII in FIG. [Figure 9] FIG. 9 is a cross-sectional view of the tilt adjustment section. [Figure 10] FIG. 10 is a perspective view of the base. [Figure 11] FIG. 11 is a perspective view of the base with some of the mounting blocks removed. [Figure 12] FIG. 12 is a schematic diagram showing the state of the engaging portion when the intervals between the multiple holding bodies are the first pitch. [Figure 13] FIG. 13 is a schematic diagram showing the state of the engaging portion when the intervals between the multiple holding bodies are the second pitch. [Figure 14]FIG. 14 is a schematic diagram showing a part of the substrate holding device taken along the cross section line VII-VII in FIG. [Figure 15] FIG. 15 is a plan view of the substrate holding device, showing how one holder is attached and detached. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Exemplary embodiments will now be described in detail with reference to the accompanying drawings, in which: FIG 1 is a schematic front view of a substrate transport robot 100;

[0010] The substrate transport robot 100 includes a base 101, a robot arm 102 connected to the base 101, and a substrate holding device 2 connected to the robot arm 102. The substrate transport robot 100 is a device that transports substrates. For example, the substrate transport robot 100 transports substrates between a first accommodation unit 108 and a second accommodation unit 109. For example, the first accommodation unit is a FOUP, and the second accommodation unit is a boat.

[0011] For example, the substrate is a semiconductor wafer or a glass substrate. The semiconductor wafer is, for example, a silicon wafer, a silicon carbide wafer, or a sapphire wafer. The glass substrate is, for example, a glass substrate for a thin display (liquid crystal display or organic electroluminescence display) processed by a semiconductor process.

[0012] The robot arm 102 has a plurality of joints and deforms or moves according to the joints. For example, the robot arm 102 is a horizontal multi-joint arm. The substrate holding device 2 is rotatably connected to the tip of the robot arm 102 around an axis extending in the vertical direction.

[0013] FIG. 2 is a side view of the substrate holding device 2. FIG. 3 is a plan view of the substrate holding device 2. FIG. 4 is a perspective view of the substrate holding device 2. The substrate holding device 2 includes a base 3 and a plurality of holders 5 attached to the base 3 and holding substrates. In the substrate holding device 2, the base 3 is covered with a casing 21. The casing 21 is omitted in FIGS. 3 and 4. Also, part of the holder 5 is omitted in FIG. 4. The substrate holding device 2 includes 12 holders 5 and holds 12 substrates.

[0014] The holders 5 are arranged at intervals in a predetermined arrangement direction. The arrangement direction coincides with the thickness direction of the substrate. For convenience of explanation, the arrangement direction will be described below as the up-down direction. Moreover, a direction perpendicular to the up-down direction is defined as the front-rear direction, and a direction perpendicular to the up-down direction and the front-rear direction is defined as the left-right direction.

[0015] The base 3 has a plurality of side portions 31 facing in a direction perpendicular to the arrangement direction. In this example, the base 3 has a first side portion 31a, a second side portion 31b, a third side portion 31c, and a fourth side portion 31d. The first side portion 31a and the second side portion 31b face in the left-right direction. Specifically, the first side portion 31a faces the right side in the left-right direction, and the second side portion 31b faces the left side in the left-right direction. That is, the first side portion 31a and the second side portion 31b are arranged in opposite directions to each other. The third side portion 31c and the fourth side portion 31d face in the front-rear direction. Specifically, the third side portion 31c faces the front side in the front-rear direction, and the fourth side portion 31d faces the rear side in the front-rear direction. That is, the third side portion 31c and the fourth side portion 31d are arranged in opposite directions to each other. The base 3 is formed in a substantially rectangular parallelepiped shape.

[0016] A holder 5 is attached to the first side portion 31a. A holder 5 is attached to the second side portion 31b. Specifically, the holders 5 are attached to the first side portion 31a and the second side portion 31b alternately in the order in which they are arranged in the arrangement direction. For example, in order from bottom to top, odd-numbered holders 5 are attached to the first side portion 31a, and even-numbered holders 5 are attached to the second side portion 31b. Hereinafter, when each holder 5 is to be distinguished, a capital alphabet is added to the end of the holder 5 in order from the bottom. For example, the bottommost holder 5 is represented as "holder 5A", and the second holder 5 from the bottom is represented as "holder 5B". When each holder 5 is not to be distinguished, it is simply represented as "holder 5".

[0017] The odd-numbered holding bodies 5 have the same basic structure as the even-numbered holding bodies 5. The odd-numbered holding bodies 5 and the even-numbered holding bodies 5 have roughly symmetrical shapes.

[0018] 3, the holder 5 has an attachment portion 51 attached to the base 3, and a holder 61 that holds a substrate. The holder 5 may further have an inclination adjustment portion 7 that adjusts the inclination of the holder 61 relative to the base 3. The attachment portion 51, the holder 61, and the inclination adjustment portion 7 of the odd-numbered holders 5 and the even-numbered holders 5 have the same functions but different shapes or arrangements.

[0019] Fig. 5 is a perspective view of the mounting portion 51 of the odd-numbered holding body 5. Fig. 6 is a plan view of the even-numbered holding body 5. Fig. 7 is a cross-sectional view of the mounting portion 51 taken along line VII-VII in Fig. 3. Fig. 8 is a cross-sectional view of the mounting portion 51 taken along line VIII-VIII in Fig. 3.

[0020] The mounting portion 51 is formed in a plate shape extending in a plane perpendicular to the up-down direction (i.e., in a horizontal plane). The mounting portion 51 has a front-rear portion 51a extending in the front-rear direction and a left-right portion 51b extending in the left-right direction, and is formed in a substantially L-shape in a plan view. In the mounting portion 51 of the odd-numbered holding body 5, as shown in FIG. 5, the left-right portion 51b extends leftward from the front end of the front-rear portion 51a. In the mounting portion 51 of the even-numbered holding body 5, as shown in FIG. 6, the left-right portion 51b extends rightward from the front end of the front-rear portion 51a. The left-right portion 51b is formed thinner than the front-rear portion 51a.

[0021] The mounting portion 51 has a divided structure including a first portion 52 and a second portion 53. The first portion 52 is a portion that is attached to the base 3. The second portion 53 is a portion to which the holding portion 61 is attached. The second portion 53 is attached to the first portion 52 from above.

[0022] 7 and 8, the front-rear portion 51a (specifically, the front-rear portion 51a of the first portion 52) has through holes 55 into which bolts 58 are inserted when the mounting portion 51 is attached to the base 3. The through holes 55 extend in the left-right direction. The through holes 55 are formed in two places in the front-rear portion 51a.

[0023] The left and right portions 51b are provided with two protrusions 56 to which the holders 61 are attached. The left-right distance between the two protrusions 56 of the even-numbered holders 5 is wider than that of the odd-numbered holders 5.

[0024] Next, the configuration of the holding portion 61 will be described with reference to FIGS.

[0025] The holding part 61 has a main body 62 formed in a bifurcated shape, and a holding mechanism 63. Holding by the holding part 61 can be realized in various ways such as gripping, suction, placement, fitting, etc. In this example, the holding part 61 is configured to grip the substrate S.

[0026] The main body 62 is attached to the attachment portion 51. Specifically, the main body 62 is attached to the protruding portion 56. The main body 62 extends in a bifurcated shape from the attachment portion 51 in the roughly front-rear direction. A first claw 64 is fixedly provided on each of two tip portions of the main body 62.

[0027] The holding mechanism 63 has a movable second claw 65, an actuator 66 that drives the second claw 65, and a motion sensor 68 that detects the motion of the second claw 65. The second claw 65 is disposed at an end of the main body 62 that is attached to the mounting portion 51. The actuator 66 and the motion sensor 68 are disposed in the mounting portion 51.

[0028] The actuator 66 is, for example, an air cylinder. Compressed air is supplied to the air cylinder. The air cylinder advances and retreats a rod (not shown) by the compressed air. The second claw 65 is connected to the actuator 66 via a connecting portion 67. When the rod advances, the second claw 65 moves forward in the front-to-rear direction, that is, in a direction approaching the first claw 64. On the other hand, when the rod retreats, the second claw 65 moves backward in the front-to-rear direction, that is, in a direction away from the first claw 64.

[0029] When the second claw 65 is advanced while the substrate S is positioned between the first claw 64 and the second claw 65, the first claw 64 and the second claw 65 engage with the edge of the substrate S. This causes the holding portion 61 to hold the substrate S. When the second claw 65 is retracted from this state, the second claw 65 moves away from the edge of the substrate S. This causes the holding portion 61 to release the substrate S.

[0030] The motion sensor 68 is a contact or non-contact sensor. The motion sensor 68 is, for example, an optical sensor such as a photointerrupter. The motion sensor 68 detects the motion of the rod of the actuator 66 or the second claw 65 by detecting the motion of a detection target 69 that moves integrally with or moves in conjunction with the second claw 65.

[0031] The inclination adjustment unit 7 adjusts the inclination of the holding unit 61 relative to the base 3 by adjusting the inclination of the second portion 53 relative to the first portion 52 of the mounting unit 51. In this example, the holding body 5 has three inclination adjustment units 7. Specifically, the inclination adjustment units 7 are provided at the rear end of the front-rear portion 51a of the mounting unit 51, the front end of the front-rear portion 51a, and the end of the left-right portion 51b opposite to the front-rear portion 51a (the left end in the odd-numbered holding body 5, and the right end in the even-numbered holding body 5). Each inclination adjustment unit 7 adjusts the vertical distance between the first portion 52 and the second portion 53. The vertical distance between the first portion 52 and the second portion 53 is adjusted at three points of the mounting unit 51, thereby adjusting the inclination (i.e., parallelism) of the second portion 53 relative to the first portion 52. The first portion 52 is attached to the base 3, and the holding portion 61 is attached to the second portion 53, so that the inclination of the holding portion 61 with respect to the base 3 is adjusted.

[0032] For example, the inclination adjustment unit 7 is formed of a differential screw. FIG. 9 is a cross-sectional view of the inclination adjustment unit 7. The inclination adjustment unit 7 has a first screw 71 and a second screw 72. The first screw 71 is formed with a male screw 71a and a female screw 71b. The pitch of the male screw 71a and the pitch of the female screw 71b are different from each other. The male screw 71a is formed in the first part 52 and is screwed into the female screw 52a extending in the vertical direction. The second screw 72 is formed with a male screw 72a. The second screw 72 is formed in the second part 53 and is inserted into a through hole 53a extending in the vertical direction. The male screw 72a is screwed into the female screw 71b of the first screw 71. The second screw 72 is prevented from rotating relative to the second part 53.

[0033] The first screw 71 is provided with an annular operation portion 73 that is coaxial with the male thread 71a and the female thread 71b. A part of the operation portion 73 protrudes outward from the first portion 52 and the second portion 53 as shown in Figs. 5 and 6. For example, in a plan view, a part of the operation portion 73 protrudes in a direction parallel to the horizontal plane from an edge of the first portion 52 and an edge of the second portion 53. This allows the user to rotate the first screw 71 by operating the operation portion 73 in a direction parallel to the horizontal plane with the holder 5 attached to the base 3.

[0034] When the first screw 71 rotates, the first screw 71 moves vertically relative to the first portion 52 according to the pitch of the male thread 71a. Meanwhile, the second screw 72 moves vertically relative to the first screw 71 according to the pitch of the female thread 71b. Here, since the pitch of the male thread 71a and the pitch of the female thread 71b are different, the amount of relative movement between the first portion 52 and the first screw 71 and the amount of relative movement between the first screw 71 and the second screw 72 are different from each other. The vertical distance between the first portion 52 and the second portion 53 changes according to the difference in the amount of relative movement.

[0035] By adjusting the vertical distance between the first part 52 and the second part 53 in this manner at three points on the mounting portion 51, the inclination of the second part 53 relative to the first part 52, and ultimately the inclination of the holding part 61 relative to the base 3, is adjusted.

[0036] The mounting portion 51 of the holder 5 configured in this manner is attached to the base 3. Specifically, the odd-numbered holders 5 are attached to the base 3 such that the front and rear portions 51a of the mounting portion 51 are aligned along the first side portion 31a of the base 3. On the first side portion 31a, the front and rear portions 51a of the mounting portion 51 of the odd-numbered holders 5 are attached side by side in the arrangement direction. The even-numbered holders 5 are attached to the base 3 such that the front and rear portions 51a of the mounting portion 51 are aligned along the second side portion 31b of the base 3. On the second side portion 31b, the front and rear portions 51a of the mounting portion 51 of the even-numbered holders 5 are attached side by side in the arrangement direction.

[0037] At this time, in both the odd-numbered holders 5 and the even-numbered holders 5, the left and right portions 51b of the attachment portion 51 are disposed in a position facing the third side portion 31c of the base 3. Therefore, the holders 61 of each holder 5 are disposed side by side with the base 3 in the front-rear direction. In front of the base 3, the left and right portions 51b and holders 61 of all holders 5 are arranged side by side in the arrangement direction, i.e., the up-down direction.

[0038] Next, a detailed description will be given of the configuration of the base 3. Fig. 10 is a perspective view of the base 3. Fig. 11 is a perspective view of the base 3 with some of the mounting blocks 44 removed. Specifically, in Fig. 11, only the first mounting block 44A and the third mounting block 44C from the bottom are attached.

[0039] The base 3 has a pitch adjustment mechanism 4 that adjusts the intervals between the multiple holders 5 in the arrangement direction. The pitch adjustment mechanism 4 adjusts the intervals between the multiple holders 5 to either a first pitch or a second pitch that is larger than the first pitch. The pitch adjustment mechanism 4 has a linear guide 41, a mounting block 44, an engagement portion 45, and an actuator 48 (see FIG. 4).

[0040] The linear guides 41 are provided on the main body 30 of the base 3. Specifically, four linear guides 41 are provided on the first side portion 31a of the base 3, and four linear guides 41 are provided on the second side portion 31b of the base 3. Each linear guide 41 has a sliding block 42 and a rail 43 that guides the sliding block 42 in the arrangement direction of the holder 5, i.e., in the up-down direction. The four linear guides 41 provided on each of the first side portion 31a and the second side portion 31b are aligned at equal intervals in the front-rear direction. Three sliding blocks 42 are provided on one rail 43.

[0041] Each holder 5 is assigned a corresponding sliding block 42, mounting block 44, and engagement portion 45. The correspondence with the holder 5 is indicated by adding the same alphabet to the end of the reference numerals of the sliding block 42, mounting block 44, and engagement portion 45 as the alphabet to the end of the reference numerals of the corresponding holder 5. For example, the sliding block 42A, mounting block 44A, and engagement portion 45A each correspond to the first holder 5A. When the correspondence with the holder 5 is not to be distinguished, they are simply referred to as "sliding block 42," "mounting block 44," and "engagement portion 45."

[0042] The mounting block 44 is a member for mounting the holder 5 to the sliding block 42. The mounting block 44 is mounted to the sliding block 42, and the holder 5 is mounted to the mounting block 44. That is, the holder 5 is indirectly mounted to the sliding block 42 via the mounting block 44.

[0043] Specifically, the first side portion 31a of the base 3 is provided with four linear guides 41, each having three sliding blocks 42, for a total of 12 sliding blocks 42. Two of the sliding blocks 42 of the first side portion 31a are assigned to each of the six odd-numbered holders 5 attached to the first side portion 31a.

[0044] Similarly, the second side portion 31b of the base 3 is provided with four linear guides 41, each having three sliding blocks 42, for a total of 12 sliding blocks 42. Two of the sliding blocks 42 of the second side portion 31b are assigned to each of the six even-numbered holders 5 attached to the second side portion 31b.

[0045] Specifically, in the first side portion 31a, four sliding blocks 42 arranged in the front-rear direction are arranged in three rows in the up-down direction, and 12 sliding blocks 42 are arranged in a matrix. The frontmost row in the front-rear direction is the first row, and the bottommost row in the up-down direction is the first row. The sliding blocks 42A, 42A assigned to the first holding body 5A are arranged in the first and third rows of the first row. The sliding blocks 42C, 42C assigned to the third holding body 5C are arranged in the second and fourth rows of the first row. The sliding blocks 42E, 42E assigned to the fifth holding body 5E are arranged in the first and third rows of the second row. The sliding blocks 42G, 42I, 42K assigned to the seventh, ninth, and eleventh holding bodies 5G, 5I, 5K are arranged in the same manner.

[0046] To the two sliding blocks 42 assigned to each holding body 5, one mounting block 44 is attached.

[0047] Specifically, among the four sliding blocks 42 in the first row, a mounting block 44A is attached to sliding blocks 42A, 42A, and one mounting block 44C is attached to sliding blocks 42C, 42C. The mounting blocks 44A and 44C are aligned in the arrangement direction, and the mounting block 44C is located above the mounting block 44A.

[0048] The same is true for the second and third stages. A mounting block 44E is attached to the sliding blocks 42E, 42E, and a mounting block 44G is attached to the sliding blocks 42G, 42G. The mounting block 44G is located above the mounting block 44E. A mounting block 44I is attached to the sliding blocks 42I, 42I, and a mounting block 44K is attached to the sliding blocks 42K, 42K. The mounting block 44K is located above the mounting block 44I.

[0049] Here, the mounting block 44A and the mounting block 44C have slightly different shapes. The same is true for the mounting blocks 44 in the second and third rows, and the mounting blocks 44 attached to the sliding blocks 42 in the first and third rows have slightly different shapes from the mounting blocks 44 attached to the sliding blocks 42 in the second and fourth rows. Hereinafter, when distinguishing between the two, the mounting blocks 44 attached to the sliding blocks 42 in the first and third rows will be referred to as the "lower mounting blocks 44," and the mounting blocks 44 attached to the sliding blocks 42 in the second and fourth rows will be referred to as the "upper mounting blocks 44." In other words, the mounting blocks 44A, 44E, and 44I are the lower mounting blocks 44, and the mounting blocks 44C, 44G, and 44K are the upper mounting blocks.

[0050] The lower mounting block 44 and the upper mounting block 44 have a common configuration in that the mounting block 44 has a main body 44a extending in the front-rear direction, and two mounting portions 44b that are attached to the two sliding blocks 42.

[0051] The two mounting portions 44b of the lower mounting block 44 are disposed at positions corresponding to the first and third rows of sliding blocks 42, and extend upward from the main body portion 44a. The main body 44a of the upper mounting block 44 is formed with two notches 44c to avoid interference with the two mounting portions 44b of the lower mounting block 44.

[0052] On the other hand, the two mounting portions 44b of the upper mounting block 44 are disposed at positions corresponding to the second and fourth rows of sliding blocks 42, and extend downward from the main body portion 44a. The main body 44a of the lower mounting block 44 is formed with two notches 44c to avoid interference with the two mounting portions 44b of the upper mounting block 44.

[0053] Furthermore, as a common configuration between the lower mounting block 44 and the upper mounting block 44, the main body 44a is formed with a screw hole 44d for mounting the holder 5. The main body 44a is formed with two screw holes 44d aligned in the front-to-rear direction. The screw holes 44d extend parallel to a reference plane R (see FIG. 4), which is an imaginary plane intersecting the arrangement direction, specifically in the left-right direction.

[0054] The same is true for the second side portion 31b. Although not shown, in the second side portion 31b, four sliding blocks arranged in the front-rear direction are arranged in three rows in the vertical direction, and 12 sliding blocks are arranged in a matrix. The first and third rows of the sliding blocks in the first row are assigned the second holding body 5B, and the mounting block 44B is attached to them. The second and fourth rows of the sliding blocks in the first row are assigned the fourth holding body 5D, and the mounting block 44D is attached to them. Similarly, the sixth holding body 5F and the eighth holding body 5H are assigned to the four sliding blocks in the second row, and the mounting blocks 44F and 44H are attached to them. The tenth holding body 5J and the twelfth holding body 5L are assigned to the four sliding blocks in the third row, and the mounting blocks 44J and 44L are attached to them. Mounting blocks 44B, 44F, and 44J are lower mounting blocks 44, and mounting blocks 44D, 44H, and 44L are upper mounting blocks.

[0055] The mounting block 44 configured in this manner is provided with an engagement portion 45. Specifically, the engagement portion 45 is provided at the rear end portion of the mounting block 44. That is, the engagement portion 45 is disposed on the fourth side portion 31d of the base 3. The multiple engagement portions 45 are lined up in the arrangement direction. At this time, the multiple engagement portions 45 are lined up in the arrangement direction in the same order as the corresponding supports 5.

[0056] The engagement portion 45 has a first engagement piece 45a, a second engagement piece 45b, and a third engagement piece 45c that extend in the left-right direction in a cantilever shape. The first engagement piece 45a, the second engagement piece 45b, and the third engagement piece 45c are lined up in the up-down direction in this order from the top.

[0057] In the engagement portion 45 of the mounting block 44 arranged on the first side portion 31a, the first engagement piece 45a, the second engagement piece 45b, and the third engagement piece 45c extend leftward. In other words, the gap between the first engagement piece 45a and the second engagement piece 45b, and the gap between the second engagement piece 45b and the third engagement piece 45c open to the left. On the other hand, in the engagement portion 45 of the mounting block 44 arranged on the second side portion 31b, the first engagement piece 45a, the second engagement piece 45b, and the third engagement piece 45c extend rightward. In other words, the gap between the first engagement piece 45a and the second engagement piece 45b, and the gap between the second engagement piece 45b and the third engagement piece 45c open to the right.

[0058] Incidentally, the twelfth engaging portion 45L does not have a first engaging piece 45a, but has a second engaging piece 45b and a third engaging piece 45c.

[0059] Each engaging portion 45 engages with an adjacent engaging portion 45 in the arrangement direction, i.e., the vertical direction. Specifically, the first engaging piece 45a of the first engaging portion 45A enters into the gap between the second engaging piece 45b and the third engaging piece 45c of the second engaging portion 45B.

[0060] The third engagement piece 45c of the second engagement portion 45B enters into the gap between the first engagement piece 45a and the second engagement piece 45b of the first engagement portion 45A. The first engagement piece 45a of the second engagement portion 45B enters into the gap between the second engagement piece 45b and the third engagement piece 45c of the third engagement portion 45C.

[0061] The third engagement piece 45c of the third engagement portion 45C enters into the gap between the first engagement piece 45a and the second engagement piece 45b of the second engagement portion 45B. The first engagement piece 45a of the third engagement portion 45C enters into the gap between the second engagement piece 45b and the third engagement piece 45c of the fourth engagement portion 45D.

[0062] In this manner, the first engagement piece 45a of each engagement portion 45 enters into the gap between the second engagement piece 45b and the third engagement piece 45c of the adjacent engagement portion 45 above. The third engagement piece 45c of each engagement portion 45 enters into the gap between the first engagement piece 45a and the second engagement piece 45b of the adjacent engagement portion 45 below.

[0063] Since the first engaging portion 45A does not have an adjacent engaging portion 5 below, it only engages with the second engaging portion 45B adjacent thereto above. Moreover, since the twelfth engaging portion 45L does not have an adjacent engaging portion 5 above, it only engages with the eleventh engaging portion 45K adjacent thereto below.

[0064] As shown in Fig. 4, an actuator 48 is connected to the twelfth engagement portion 45L. The actuator 48 drives the twelfth engagement portion 45L in the arrangement direction, i.e., in the up-down direction. The actuator 48 is, for example, an air cylinder. The air cylinder selectively moves the twelfth engagement portion 45L upward or downward by supplying compressed air.

[0065] Fig. 12 is a schematic diagram showing the state of the engaging portion 45 when the interval between the multiple holding bodies 5 is a first pitch. Fig. 13 is a schematic diagram showing the state of the engaging portion 45 when the interval between the multiple holding bodies 5 is a second pitch. Note that Figs. 12 and 13 show the tenth, eleventh and twelfth engaging portions 45J, 45K, 45L.

[0066] When the twelfth engaging portion 45L is positioned at the lowest position by the actuator 48, the second engaging piece 45b of the twelfth engaging portion 45L contacts the first engaging piece 45a of the eleventh engaging portion 45K from above, and presses the eleventh engaging portion 45K downward. As a result, the second engaging piece 45b of the eleventh engaging portion 45K contacts the first engaging piece 45a of the tenth engaging portion 45J from above, and presses the tenth engaging portion 45J downward. In this way, in each of two vertically adjacent engaging portions 45, the second engaging piece 45b of the upper engaging portion 45 contacts the first engaging portion 45a of the lower engaging portion 45. As a result, the intervals between the multiple holding bodies 5 become the first pitch.

[0067] On the other hand, when the twelfth engagement portion 45L is moved upward by the actuator 48, the third engagement piece 45c of the twelfth engagement portion 45L comes into contact with the first engagement piece 45a of the eleventh engagement portion 45K from below, lifting the eleventh engagement portion 45K. As a result, the third engagement piece 45c of the eleventh engagement portion 45K comes into contact with the first engagement piece 45a of the tenth engagement portion 45J from below, lifting the tenth engagement portion 45J. In this way, in each of the two vertically adjacent engagement portions 45, the third engagement piece 45c of the upper engagement portion 45 comes into contact with the first engagement piece 45a of the lower engagement portion 45. As a result, the intervals between the multiple holding bodies 5 become the second pitch.

[0068] Next, the attachment and detachment of the holder 5 in the substrate holding device 2 configured as above will be described. Fig. 14 is a schematic diagram showing a part of the substrate holding device 2 cut along the cross section of line VII-VII in Fig. 3. Fig. 15 is a plan view of the substrate holding device 2 showing how one holder 5 is attached and detached. Figs. 14 and 15 show how the holder 5G is attached and detached.

[0069] Each holder 5 is detachably attached to the base 3 parallel to a reference plane R, which is an imaginary plane intersecting the arrangement direction. In this example, the reference plane R is a plane perpendicular to the arrangement direction, i.e., a horizontal plane. More specifically, as shown in Figs. 7 and 8, the holder 5 is attached to a mounting block 44 provided on the base 3. The holder 5 is attached to the mounting block 44 in the horizontal direction. The holder 5 is fixed to the mounting block 44 (i.e., the base 3) by bolts 58.

[0070] When removing one of the holders 5 from the base 3 in a state where a plurality of holders 5 are attached to the base 3, as shown in Fig. 14, the bolt 58 that fixes the one of the holders 5 to the base 3 is removed, and then the one of the holders 5 is moved in the horizontal direction, so that the one of the holders 5 can be removed from the base 3. When removing one of the holders 5 from the base 3 in a state where a plurality of holders 5 are attached to the base 3, the one of the holders 5 can be attached to the block 3 by moving the one of the holders 5 in the horizontal direction toward the mounting block 44 and bringing it into contact with the mounting block 44, and then attaching the bolt 58.

[0071] Specifically, a plurality of odd-numbered holders 5 are attached to the first side portion 31a of the base 3 in the arrangement direction. For example, the gap G in the arrangement direction between two odd-numbered (e.g., fifth and ninth) holders 5E, 5I located on both sides of an odd-numbered (e.g., seventh) holder 5G in the arrangement direction is larger than the dimension in the arrangement direction of the odd-numbered holder 5G. Therefore, when removing the odd-numbered holder 5G from the base 3, the odd-numbered holder 5G can be moved parallel to the reference plane R perpendicular to the arrangement direction without interfering with the two odd-numbered holders 5E, 5I arranged on both sides in the arrangement direction. Similarly, when attaching the odd-numbered holder 5G to the base 3, the odd-numbered holder 5G can be moved parallel to the reference plane R without interfering with the two odd-numbered holders 5E, 5I arranged on both sides in the arrangement direction. At this time, the movement direction of one odd-numbered holder 5G may be a direction parallel to the reference plane R as shown in FIG. 15, and is not limited to the left-right direction.

[0072] The same applies to the even-numbered holders 5 attached to the second side portion 31 b of the base 3 .

[0073] This relationship holds when the intervals between the plurality of holders 5 are at least the second pitch, and preferably holds when the intervals between the plurality of holders 5 are at least the first pitch.

[0074] Further, the base 3 (specifically, the mounting block 44) has a screw hole 44d into which the bolt 58 is screwed, extending parallel to the reference plane R. More specifically, the base 3 has a pitch adjustment mechanism 4. The holder 5 is fixed to the mounting block 44 of the pitch adjustment mechanism 4 by a bolt 58. The mounting block 44 has a screw hole 44d into which the bolt 58 for mounting the holder 5 is screwed. The screw hole 44d extends parallel to the reference plane R, more specifically in the left-right direction. Furthermore, in a state in which the holder 5 is mounted to the mounting block 44, the bolt 58 can be accessed and operated from a direction parallel to the reference plane R. More specifically, in the side portion 31 of the base 3, between the two holders 5 located on both sides of one holder 5 in the arrangement direction, a gap G is formed through which the one holder 5 can move parallel to the reference plane R. By inserting a tool or the like into this gap G, the bolt 58 can be accessed from a direction parallel to the reference plane R and the bolt 58 can be operated. And, because the screw hole 44d extends in a direction parallel to the reference plane R, the bolt 58 can be fastened and unfastened with a tool inserted in a direction parallel to the reference plane R. As a result, the bolt 58 can be fastened and unfastened without being affected by the two retaining bodies 5 located on both sides in the arrangement direction.

[0075] In this way, the bolts 58 for fixing the holder 5 to the base 3 can be operated in a direction parallel to the reference plane R, and the holder 5 can be removed from or attached to the base 3 by moving the bolts 58 in a direction parallel to the reference plane R. This allows one holder 5 to be attached to or detached from the base 3 while the other holders 5 remain attached to the base 3.

[0076] Moreover, the holding portion 61 is arranged alongside the base 3 in the front-rear direction as a first direction among the directions perpendicular to the arrangement direction, and the mounting portion 51 of the holding body 5 is attached to the first side portion 31a and the second side portion 31b of the multiple side portions 31 that face a direction other than the front-rear direction. Therefore, the operation of the bolt 58 and the operation of attaching and detaching the holding body 5 can be performed without being affected by the holding portion 61. That is, the holding portion 61 is arranged opposite to the third side portion 31c of the base 3. If the holding body 5 is attached to the third side portion 31c, the holding portion 61 gets in the way of the operation of the bolt 58 and the operation of attaching and detaching the holding body 5. On the other hand, the holding portion 61 is not arranged opposite to the first side portion 31a and the second side portion 31b of the base 3, so the operation of the bolt 58 and the operation of attaching and detaching the holding body 5 can be performed without being affected by the holding portion 61.

[0077] As described above, the substrate holding device 2 comprises a base 3 and a plurality of holders 5 attached to the base 3 and holding substrates, the plurality of holders 5 being arranged in a predetermined arrangement direction and removably attached to the base 3 parallel to a reference plane R, which is a virtual plane intersecting the arrangement direction.

[0078] According to this configuration, the holder 5 is detachable from the base 3 parallel to a reference plane R intersecting the arrangement direction. Therefore, when a plurality of holders 5 are attached to the base 3, one holder 5 can be moved parallel to the reference plane R while the other holders 5 remain attached to the base 3, and removed from the base 3. When attaching one holder 5 to the base 3, the one holder 5 can also be attached to the base 3 by moving it parallel to the reference plane R while the other holders 5 remain attached to the base 3. In other words, when attaching or detaching one holder 5, it is not necessary to disassemble the entire substrate holding device 2, and the other holders 5 can be maintained attached to the base 3, and therefore the maintainability of the substrate holding device 2 can be improved.

[0079] In addition, the holder 5 has an attachment portion 51 attached to the base 3 and a holding portion 61 that holds the substrate, the base 3 has a plurality of side portions 31 facing a direction perpendicular to the arrangement direction, the holding portion 61 is arranged alongside the base 3 in a first direction among the directions perpendicular to the arrangement direction, and the attachment portion 51 is attached to a first side portion 31a of the plurality of side portions 31 that faces a direction other than the first direction.

[0080] According to this configuration, the base 3 and the holding portion 61 are aligned in the first direction. Therefore, when the mounting portion 51 is attached to the side portion 31 facing the first direction among the multiple side portions 31, the base 3, the mounting portion 51, and the holding portion 61 are aligned in this order in the first direction. In this case, the holding portion 61 gets in the way when handling the mounting portion 51 to attach and detach the mounting portion 51 to the base 3. For example, when the mounting portion 51 is fastened to the base 3 with a bolt from the first direction, the holding portion 61 gets in the way, making the operation of the bolt 58 complicated. Also, when the mounting portion 51 is attached to the base 3 from the first direction, the presence of the support portion 61 of the other holder 5 makes it difficult to visually recognize the portion of the base 3 to which the mounting portion 51 is attached, making the installation work of the mounting portion 51 complicated.

[0081] In contrast, by attaching the mounting portion 51 to the first side portion 31a among the multiple side portions 31, which faces a direction other than the first direction, the mounting portion 51 can be attached and detached to the base 3 without being affected by the support portion 61.

[0082] Furthermore, the multiple side portions 31 include second side portions 31b facing a direction other than the first direction, and the multiple retaining bodies 5 are attached to the first side portions 31a and the second side portions 31b alternately in the order in which they are arranged in the arrangement direction.

[0083] According to this configuration, there is more space for attaching the holders 5 to each of the first side portion 31a and the second side portion 31b than when all the holders 5 are attached to one side portion 31. As a result, the workability when attaching and detaching the holders 5 to the base 3 can be improved.

[0084] Additionally, the first side portion 31a and the second side portion 31b face in opposite directions to each other.

[0085] According to this configuration, since the first side portion 31a and the second side portion 31b face in opposite directions from each other, the holder 5 can be attached and detached to and from the first side portion 31a and the second side portion 31b from opposite sides of the base 3. This makes it possible to prevent the holder 5 attached to the first side portion 31a and the holder 5 attached to the second side portion 31b from affecting each other's attachment and detachment.

[0086] Specifically, the first side portion 31a and the second side portion 31b face in a direction perpendicular to the first direction.

[0087] According to this configuration, the support portion 61, the holder 5 attached to the first side portion 31a, and the holder 5 attached to the second side portion 31b can be positioned so as to minimize the impact on attachment and detachment of the holder 5.

[0088] The holder 5 is fixed to the base 3 by a bolt 58, and a screw hole 44d formed in the base 3 and into which the bolt 58 is screwed extends parallel to the reference plane R.

[0089] According to this configuration, like the attachment and detachment of the holder 5, the operation of fastening and unlocking the bolt 58 for fixing the holder 5 to the base 3 is also performed in a direction parallel to the reference plane R. When multiple holders 5 are attached to the base 3, a space is ensured in which one holder 5 can be moved parallel to the reference plane R. Therefore, this space can be used to fasten and unlock the bolt 58. As a result, the workability of fastening and unlocking the bolt 58 can be improved.

[0090] Moreover, the holder 5 has an inclination adjustment portion 7 that adjusts the inclination relative to the base 3 .

[0091] According to this configuration, the inclination of the holder 5 relative to the base 3 is adjusted by the inclination adjustment unit 7. The inclination of the holder 5 relative to the base 3 also depends on the mounting state of the holder 5 to the base 3. However, since a plurality of holders 5 aligned in the arrangement direction are mounted on the base 3, it is not easy to adjust the inclination of the holder 5 when mounting the holder 5 to the base 3. By providing the inclination adjustment unit 7, it is possible to adjust the inclination of the holder 5 relative to the base 3 while the holder 5 is mounted on the base 3. In other words, since it is not necessary to strictly control the inclination of the holder 5 relative to the base 3 when mounting the holder 5 to the base 3, the workability of mounting the holder 5 can be improved.

[0092] Furthermore, the tilt adjustment units 7 are provided at a plurality of locations on the holder 5 .

[0093] According to this configuration, the inclination of the holder 5 can be adjusted at a plurality of points of the holder 5. As a result, the ability to adjust the inclination of the holder 5 relative to the base 3 can be improved.

[0094] Moreover, the tilt adjustment unit 7 is disposed at a position where it can be operated in a direction parallel to the reference plane R in a state where the holder 5 is attached to the base 3.

[0095] According to this configuration, the operability of the tilt adjustment unit 7 in a state in which the holder 5 is attached to the base 3 can be improved.

[0096] In addition, the base 3 is provided with a linear guide 41 having a sliding block 42 and a rail 43 that guides the sliding block 42 in the arrangement direction, and the holder 5 is attached to the sliding block 42 and configured so that its position in the arrangement direction can be adjusted.

[0097] According to this configuration, the holders 5 are attached to the base 3 so that their positions in the arrangement direction are adjustable. In other words, the intervals between the multiple holders 5 in the arrangement direction can be adjusted. In this case, the configuration of the base 3 is more complicated than a configuration in which linear guides 41 and the like are not provided. Even with this configuration, the multiple holders 5 are detachably attached to the base 3 parallel to the reference plane R, thereby improving the maintainability of the holders 5.

[0098] Further, a mounting block 44 for mounting the holder 5 is attached to the sliding block 42 , and the holder 5 is attached to the mounting block 44 , thereby being attached to the sliding block 42 .

[0099] According to this configuration, the holder 5 is indirectly attached to the sliding block 42 via the mounting block 44 .

[0100] Other Embodiments As described above, the above embodiment has been described as an example of the technology disclosed in this application. However, the technology in this disclosure is not limited to this, and can be applied to embodiments in which modifications, replacements, additions, omissions, etc. are appropriately performed. In addition, it is also possible to combine the components described in the above embodiment to form a new embodiment. In addition, among the components described in the attached drawings and detailed description, not only components essential for solving the problem but also components that are not essential for solving the problem in order to exemplify the technology may be included. Therefore, the fact that these non-essential components are described in the attached drawings and detailed description should not immediately be taken to mean that these non-essential components are essential.

[0101] For example, the number of holders 5 of the substrate holding device 2 is not limited to 12. The number of holders 5 may be any number as long as it is plural.

[0102] In addition, the intervals between the multiple holders 5 in the arrangement direction may be non-adjustable, that is, fixed. In other words, the pitch adjustment mechanism 4 may be omitted. In that case, the holders 5 are attached to the main body 30 of the base 3.

[0103] In addition, the reference plane R only needs to intersect with the arrangement direction, and does not have to be perpendicular to it. In other words, the holder 5 may be attached to and detached from the base 3 by moving obliquely upward or downward with respect to the vertical direction, which is the arrangement direction.

[0104] The multiple holders 5 are attached to, but not limited to, the first side portion 31a and the second side portion 31b of the base 3. For example, all of the holders 5 may be attached to one side portion 31 of the base 3 (e.g., the first side portion 31a).

[0105] Furthermore, even when multiple holders 5 are attached to multiple side portions 31 of the base 3, they are not limited to being attached to the first side portion 31a and the second side portion 31b, and may be attached to any side portion 31. For example, the multiple holders 5 may be attached to the first side portion 31a and the fourth side portion 31d.

[0106] The number of tilt adjustment parts 7 is not limited to 3. The number of tilt adjustment parts 7 may be 1, 2, or 4 or more. Furthermore, the holder 5 does not have to have any tilt adjustment parts 7.

[0107] The holder 5 is attached to the mounting block 44 of the pitch adjustment mechanism 4, but is not limited to this. For example, the pitch adjustment mechanism 4 may not have the mounting block 44, and the holder 5 may be attached to the sliding block 42. [Explanation of symbols]

[0108] 2 Substrate holding device 3. Bass 31 Side 31a First side 31b Second side 41 Linear guide 42 Sliding block 43 Rail 44 Mounting block 44d screw hole 5 Holder 51 Mounting part 58 Volts 61 Support part 7 Tilt adjustment section R reference plane

Claims

1. With the base, a plurality of holders attached to the base and adapted to hold substrates; the plurality of holders are arranged in a predetermined arrangement direction and are detachably attached to the base in parallel to a reference plane that is a virtual plane intersecting the arrangement direction; the holder has an attachment portion attached to the base and a holding portion that holds a substrate, The base has a plurality of sides facing in a direction perpendicular to the arrangement direction, The holding portion is disposed alongside the base in a first direction among directions perpendicular to the arrangement direction, the plurality of sides include a first side and a second side facing in a direction other than the first direction; the plurality of holders are attached to the first side portion and the second side portion via the attachment portions alternately in an order in which they are arranged in the arrangement direction; the retainer attached to the first side is not attached to the second side, The substrate holding apparatus, wherein the holder attached to the second side is not attached to the first side.

2. 2. The substrate holding device according to claim 1, The substrate holding device, wherein the first side and the second side face opposite each other.

3. 3. The substrate holding device according to claim 2, The substrate holding device, wherein the first side and the second side are oriented in a direction perpendicular to the first direction.

4. 4. The substrate holding device according to claim 1, The holder is fixed to the base by a bolt, A substrate holding device, wherein a screw hole formed in the base and into which the bolt is screwed extends parallel to the reference surface.

5. 5. The substrate holding device according to claim 1, The substrate holding device, wherein the holder has an inclination adjustment portion that adjusts the inclination of the holder relative to the base.

6. 6. The substrate holding device according to claim 5, The tilt adjustment unit is provided at a plurality of positions on a substrate holding device.

7. 7. The substrate holding device according to claim 5, The substrate holding device, wherein the tilt adjustment unit is disposed at a position where it can be operated in a direction parallel to the reference plane when the holding body is attached to the base.

8. 8. The substrate holding device according to claim 1, a linear guide including a sliding block and a rail for guiding the sliding block in the arrangement direction is provided on the base; The holder is attached to the sliding block, and is configured so that its position in the arrangement direction is adjustable.

9. 9. The substrate holding device according to claim 8, A mounting block for mounting the holder is attached to the sliding block, The substrate support device wherein the holder is attached to the mounting block and thereby to the sliding block.

Images