ROBOTIC APPARATUS AND SYSTEM AND METHOD FOR TRANSFERING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING - Patent application

Abstract

An electronic device manufacturing system, robotic apparatus, and related methods are described. The robotic apparatus includes an arm having an inboard end and a outboard end, the inboard end configured to rotate about a shoulder axis, a first forearm at the outboard end of the arm configured for independent rotation relative to the arm about an elbow axis, and a first wrist member at a distal end of the first forearm opposite the elbow axis configured for independent rotation relative to the first forearm about a first wrist axis, the first wrist member including a first end effector and a second end effector. The robotic apparatus includes a second forearm configured for independent rotation relative to the arm about the elbow axis, and and a second wrist member configured for independent rotation relative to the second forearm about a second wrist axis, the second wrist member including a third end effector and a fourth end effector.The robotic device further includes a third forearm configured for independent rotation relative to the arm about an elbow axis, and a third wrist member configured for independent rotation relative to the third forearm about a third wrist axis, the second wrist member including a fifth end effector and a sixth end effector.

Description

[Technical field]

[0001] FIELD OF THE DISCLOSURE This disclosure relates to electronic device manufacturing, and more particularly to an apparatus and method adapted for transferring multiple substrates within an electronic device manufacturing apparatus. [Background technology]

[0002] A conventional electronic device manufacturing system may include processing chambers and load lock chambers, each including a plurality of substrate supports holding a corresponding number of substrates for simultaneous processing. Such processing chambers may be included in a cluster tool, with several chambers and load locks distributed around a transfer chamber. Alternatively, the processing chambers may be included in a linear tool, with the processing chambers and load locks distributed around a rectangular transfer chamber.

[0003] Electronic device manufacturing systems may use robotic devices in a transfer chamber configured to transfer substrates between load locks and processing chambers. The transfer chamber, processing chambers, and load locks may operate under vacuum at certain times. However, in some configurations of electronic device manufacturing systems, transferring substrates between various chambers using robotic devices may be inefficient and may involve multiple movements of the robot arm between the load locks and processing chambers.

[0004] There is a corresponding need for improved robotic equipment, electronic device manufacturing equipment, and more efficient methods of substrate transfer. Summary of the Invention

[0005] Provided herein according to an embodiment is a robotic device comprising: an arm including an inboard end and a outboard end, the inboard end configured to rotate about a shoulder axis; a first forearm at an outboard end of the arm configured for independent rotation relative to the arm about an elbow axis; and a first wrist member at a distal end of the first forearm opposite the elbow axis configured for independent rotation relative to the first forearm about a first wrist axis, the first wrist member including a first end effector and a second end effector. a second forearm configured to rotate independently relative to the second forearm about a second wrist axis, the second wrist member including a third end effector and a fourth end effector; a third forearm configured to rotate independently relative to the arm about an elbow axis; and a third wrist member configured to rotate independently relative to the third forearm about a third wrist axis, the second wrist member including a fifth end effector and a sixth end effector.

[0006] In a further embodiment, provided herein is a robotic device comprising: a first arm including a first inboard end and a first outboard end, the first inboard end configured to rotate about a shoulder axis; a first forearm configured for independent rotation relative to the first arm about a first elbow axis at a outboard end of the first arm; a first wrist member configured for independent rotation relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the first elbow axis, the first wrist member including a first end effector and a second end effector; A robotic device is disclosed that includes a second arm having an end configured to rotate about a shoulder axis; a second forearm configured for independent rotation with respect to the second arm about a second elbow axis; a second wrist member configured for independent rotation with respect to the second forearm about a second wrist axis, the second wrist member including a third end effector and a fourth end effector; a third forearm configured for independent rotation with respect to the first arm about a third elbow axis; and a third wrist member configured for independent rotation with respect to the third forearm about a third wrist axis, the third wrist member including a fifth end effector and a sixth end effector.

[0007] In yet another embodiment, provided herein is an electronic device manufacturing apparatus comprising: a mainframe having a transfer chamber and at least two processing chambers; a first load lock coupled to the mainframe; a second load lock coupled to the mainframe; and a robotic apparatus configured to transfer substrates between the first load lock, the second load lock, and the at least two processing chambers, the robotic apparatus comprising an arm including an inboard end and an outboard end, the inboard end configured to rotate about a shoulder axis; a first forearm at an outboard end of the arm configured for independent rotation relative to the arm about an elbow axis; and a first wrist axis at a distal end of the first forearm opposite the elbow axis, the first wrist axis configured for independent rotation relative to the first forearm about a first wrist axis. An electronic device manufacturing apparatus is disclosed that includes a first wrist member configured for independent rotation with respect to the arm about an elbow axis, the first wrist member including a first end effector and a second end effector; a second forearm configured for independent rotation with respect to the second forearm about the second wrist axis, the second wrist member including a third end effector and a fourth end effector; a third forearm configured for independent rotation with respect to the arm about the elbow axis; and a third wrist member configured for independent rotation with respect to the third forearm about the third wrist axis, the second wrist member including a fifth end effector and a sixth end effector.

[0008] Numerous other features are provided in accordance with the above and other aspects of the present disclosure. Other features and aspects of the present disclosure will become more fully apparent from the following detailed description, the appended claims, and the accompanying drawings. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 illustrates a top view of a substrate processing system including a robotic device according to one or more embodiments. [Figure 2A]FIG. 1 illustrates a top view of a robotic device including two independently controllable forearms, each having an independently rotatable twin wrist member, according to one or more embodiments. [Figure 2B] FIG. 1 illustrates a perspective view of a robotic device including two independently controllable forearms, each having an independently rotatable twin wrist member, according to one or more embodiments. [Figure 2C] FIG. 1 illustrates a side view of a robotic device including two independently controllable forearms, each having an independently rotatable twin wrist member, according to one or more embodiments. [Figure 3A] FIG. 1 illustrates a perspective view of a robotic device including three independently controllable forearms, each having an independently controllable twin wrist member, according to one or more embodiments. [Figure 3B] FIG. 1 illustrates a side view of a robotic device including three independently controllable forearms, each having an independently controllable twin wrist member, according to one or more embodiments. [Figure 3C] 1 illustrates a transmission assembly of a robotic device according to one or more embodiments. [Figure 3D] 1 illustrates a transmission assembly of a robotic device according to one or more embodiments. [Figure 3E] 1 illustrates a transmission assembly of a robotic device according to one or more embodiments. [Figure 4A] FIG. 1 illustrates a perspective view of a robotic device including four independently controllable forearms, each having an independently controllable twin wrist member, according to one or more embodiments. [Figure 4B] FIG. 1 illustrates a side view of a robotic device including four independently controllable forearms, each having an independently controllable twin wrist member, according to one or more embodiments. [Figure 5A] FIG. 1 illustrates a top view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. [Figure 5B]FIG. 1 illustrates a perspective view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. [Figure 5C] FIG. 1 illustrates a side view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. [Figure 5D] FIG. 1 illustrates a bottom perspective view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. [Figure 5E] FIG. 1 illustrates a top view of a robotic device in an extended configuration according to one or more embodiments. [Figure 6A] FIG. 1 illustrates a perspective view of a robotic device including two independently controllable arms, one arm having two independently controllable forearms, one arm having one independently controllable forearm, each forearm having twin wrist members, according to one or more embodiments. [Figure 6B] FIG. 1 illustrates a side view of a robotic device including two independently controllable arms, one arm having two independently controllable forearms, one arm having one independently controllable forearm, each forearm having twin wrist members, according to one or more embodiments. [Figure 6C] FIG. 1 illustrates a bottom perspective view of a robotic device including two independently controllable arms, one arm having two independently controllable forearms, one arm having one independently controllable forearm, each forearm having twin wrist members, according to one or more embodiments. [Figure 7A] FIG. 1 illustrates a perspective view of a robotic device including two independently controllable arms, each having two independently controllable forearms, each having a twin wrist member, according to one or more embodiments. [Figure 7B]FIG. 1 illustrates a side view of a robotic device that includes two independently controllable arms, each having two independently controllable forearms, each having a twin wrist member, according to one or more embodiments. [Figure 7C] FIG. 1 illustrates a bottom perspective view of a robotic device including two independently controllable arms, each having two independently controllable forearms, each having a twin wrist member, according to one or more embodiments. [Figure 8A] FIG. 1 illustrates a top view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. [Figure 8B] FIG. 1 illustrates a perspective view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. [Figure 8C] FIG. 1 illustrates a side view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. [Figure 8D] FIG. 1 illustrates a bottom perspective view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. [Figure 9A] FIG. 1 illustrates a perspective view of a robotic device including two independently controllable arms, one arm having two independently controllable forearms, one arm having one independently controllable forearm, each forearm having twin wrist members, according to one or more embodiments. [Figure 9B] FIG. 1 illustrates a side view of a robotic device that includes two independently controllable arms, one arm having two independently controllable forearms, one arm having one independently controllable forearm, each forearm having a twin wrist member according to one or more embodiments. [Figure 9C] FIG. 1 illustrates a bottom perspective view of a robotic device including two independently controllable arms, one arm having two independently controllable forearms, one arm having one independently controllable forearm, each forearm having twin wrist members, according to one or more embodiments. [Figure 10A] FIG. 1 illustrates a perspective view of a robotic device including two independently controllable arms, each having two independently controllable forearms, each having a twin wrist member, according to one or more embodiments. [Figure 10B] FIG. 1 illustrates a side view of a robotic device that includes two independently controllable arms, each having two independently controllable forearms, each having a twin wrist member, according to one or more embodiments. [Figure 10C] FIG. 1 illustrates a bottom perspective view of a robotic device including two independently controllable arms, each having two independently controllable forearms, each having a twin wrist member, according to one or more embodiments. [Figure 11] 5 is a flowchart illustrating a method of transferring a substrate to or from a processing chamber according to one or more embodiments. [Figure 12] 5 is a flowchart illustrating a method of transferring a substrate to or from a processing chamber according to one or more embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] There is a need for precision and efficiency in transferring substrates between various locations in an electronic device transfer system. However, in some systems, the transfer between various chambers can be a bottleneck that limits efficiency. In steady-state production, it is ideal to run a process 100% of the time for maximum utilization. To optimize efficiency, a robot should be configured to exchange processed and unprocessed substrates in as few cycles as possible. Providing a robotic device that can pick, place, and transfer multiple substrates (e.g., with one or fewer trips to a load lock) within, for example, one or two cycles helps improve efficiency. In a process-limited system, for example, where the process takes one hour, the most efficient sequence is to open the slit valve, unload and reload all substrates, and then close the slit valve to minimize overhead in the substrate transfer process and maximize productivity. For example, a robot with a twin wrist member that includes two end effectors can unload and reload, for example, four or six substrate chambers in one cycle without having to return to the load lock in an embodiment. The robot can be in a "butterfly motion" configuration, where the motion behavior of the robot allows any one blade to extend or retract independently of the other blades. Such a robot can increase processing chamber utilization and process tool productivity. Robots according to embodiments herein can be multi-blade robots optimized for high productivity and multi-substrate processing chambers.

[0011] In conventional electronic device manufacturing systems, a robot does not reload a chamber directly (i.e., in one load / unload cycle). Instead, the robot performs multiple cycles to fully unload a processing chamber of processed substrates, and multiple more cycles to reload the processing chamber with unprocessed substrates. For example, a standard setup is a two-arm robot that includes two end effectors, each capable of holding a substrate. To empty and refill a quad chamber (i.e., including four substrate supports), the robot picks up two processed substrates from the processing chamber, moves to a load lock, places the two processed substrates in the load lock, picks up two unprocessed substrates from the load lock (or from another load lock), returns to the processing chamber, places the two unprocessed substrates in the processing chamber, picks up the remaining two processed substrates from the processing chamber, returns to the load lock, places the two processed substrates in the load lock, picks up the two unprocessed substrates, returns to the processing chamber, and places the two unprocessed substrates in the processing chamber. Or equivalently, each wafer in the chamber can be sequentially replaced with a new wafer retrieved from the load lock during each cycle. In contrast, embodiments described herein provide an electronic device manufacturing system in which the transfer chamber robot has a volume at least larger than the volume of the processing chamber (or the combined processing chamber volume of a set of processing chambers). The embodiments allow a load / unload sequence to be performed within one cycle, dramatically increasing the throughput of the transfer chamber robot.

[0012] The embodiments described herein relate to a system including at least one processing chamber, at least one load lock, and a robotic device (also referred to herein as a robot assembly or simply a robot) for maximizing substrate handling efficiency when transferring substrates between (or through) at least one processing chamber and at least one load lock. At least one processing chamber can be a multi-substrate processing chamber having multiple substrate supports therein and, if present, one or more additional substrate supports in a substrate holding chamber (also known as "via"). The embodiments described herein also relate to a specific transfer chamber robot capable of increasing the throughput of the transfer chamber.

[0013] The at least one processing chamber can be of any suitable shape. For example, the at least one processing chamber can be square, linear (e.g., rectangular), radial, any hybrid combination of these, or any other shape known to one of skill in the art. In an embodiment, the at least one processing chamber is of any suitable shape supported by the kinematics of the robotic device, for example, by a radial SCARA, and includes at least four end effectors on a radial main frame (i.e., transfer chamber) or on a main frame of other shape. For example, as shown in FIG. 1, the transfer chamber can have a square shape with four equally sized sides (also referred to as facets). Alternatively, the transfer chamber can have a rectangular shape with two generally parallel facets having a first length and two generally parallel facets having a second length. The main frame / transfer chamber can have other numbers of sides / facets, such as five sides, six sides, seven sides, eight sides, etc. The sides can be of the same dimensions as each other, or of different dimensions.

[0014] The robotic device is configured to unload and reload (e.g., exchange, retrieve, and place) a substrate in at least one processing chamber within one load / unload cycle (i.e., without returning to a load lock or other station to retrieve and / or place a substrate and then completely exchange the substrate in at least one processing chamber).

[0015] For example, if the multi-substrate processing chamber includes four substrate supports, the robot device in the embodiment may include at least six end effectors. During the transfer, four of the end effectors may hold unprocessed substrates, and two of the end effectors may be empty. During the transfer, the first (empty) end effector and the second (empty) end effector may remove two processed substrates from the first and second substrate supports in the processing chamber. Then, the third and fourth end effectors may place two unprocessed substrates on the first and second substrate supports. The now empty third and fourth end effectors may remove the remaining two processed substrates from the third and fourth substrate supports in the processing chamber. Finally, using the fifth and sixth end effectors, the robot may place two unprocessed substrates on the third and fourth substrate supports. The robot can then move to a load lock and place the four processed substrates into the load lock chamber. In this manner, the robot can exchange four unprocessed substrates for four processed substrates in one cycle. In this manner, the robot can exchange four unprocessed substrates for four processed substrates in one cycle.

[0016] In an embodiment, the system may include at least one multi-substrate processing chamber, the at least one multi-substrate processing chamber including a plurality of substrate supports accessible by a robotic device having a forearm or wrist member with twin end effectors. As used herein, the term "twin end effectors" refers to a single wrist member having two (e.g., identical) end effectors. The substrates may be arranged radially or in a row in the processing chamber, in an embodiment. The twin end effectors are configured to simultaneously remove two substrates from two substrate supports at a time. In one example, the wrist member of the robotic device has a roughly horizontally oriented U-shape, where a first end effector is disposed at a first distal end of the U-shape and a second end effector is disposed at a second distal end of the U-shape. The wrist member may be rigid, and the relative positions of the first end effector and the second end effector may be fixed for each twin wrist member. In an embodiment, the multi-substrate processing chamber may include four substrate supports in a circular configuration or in two rows (e.g., two rows from the opening of the chamber), and the robotic device may include three forearms, each with a twin end effector at its distal end. During substrate transfer, four of the end effectors can hold four unprocessed substrates, and two of the end effectors are empty. The empty twin end effectors can simultaneously remove two processed substrates from two of the substrate supports. The robotic device then rotates to simultaneously place two unprocessed substrates on the two empty substrate supports. The empty end effectors can remove the remaining two processed substrates from the other substrate support. The robotic device can then place the remaining two unprocessed substrates on the empty substrate supports. The exchange of processed and unprocessed substrates is completed within one cycle.

[0017] The systems described herein can include a robotic device having four or more end effectors. An end effector (also referred to as a blade) as used herein means a portion of or an attachment to an arm, forearm, or wrist member configured to hold a substrate. Embodiments of the robotic devices described herein can include two or more arm components, optionally two or more forearm components, optionally two or more wrist components, and multiple end effectors (e.g., at least six) coupled to one or more arm, forearm, or wrist components.

[0018] The systems described herein further include at least one load lock including at least one substrate support. The at least one load lock can be a single substrate load lock or a multi-substrate load lock. In an embodiment, the system can include at least two load locks. One load lock can be designated for loading and the other load lock can be designated for unloading. In an embodiment, both load locks can be configured for loading and unloading. The productivity of the system can be increased by using at least one multi-substrate load lock, where a robotic device having multiple end effectors is configured to simultaneously exchange all substrates between the end effectors and the substrate supports in the multi-substrate load lock. For example, the load lock can include multiple substrate supports, and when all substrate supports are empty, the robotic device can be configured to tilt and place all substrates on the substrate supports simultaneously. In an embodiment, the robotic device is then positioned by an adjacent multi-substrate load lock to simultaneously retrieve unprocessed substrates from the substrate supports in the adjacent load lock.

[0019] Further details and exemplary embodiments illustrating various aspects of the system and robotic device are described with reference to Figures 1-10C herein.

[0020] Referring now to FIG. 1, an exemplary embodiment of an electronic device manufacturing system 100 according to an embodiment of the present disclosure is provided. The electronic device processing system 100 can include a mainframe 101, which includes a transfer chamber 113 and at least two of a plurality of processing chambers 103. The housing of the mainframe 101 includes the transfer chamber 113 therein. The transfer chamber 113 can include a top wall (not shown), a bottom wall (floor) 139, and side walls. In some embodiments, the transfer chamber 113 can be maintained at a vacuum. In the illustrated embodiment, a robotic device 102 as shown in FIGS. 2A-10C is attached to the bottom wall (floor) 139. However, the robotic device 102 could be attached elsewhere, such as to a top wall (not shown, omitted for clarity). As discussed above, the transfer chamber can be of any suitable shape known to those skilled in the art.

[0021] The processing chambers 103 may be adapted to perform any number of processes on a substrate (not shown). The processes may include deposition, oxidation, nitridation, etching, polishing, cleaning, lithography, metrology, etc. Other processes may also be performed. Each processing chamber 103 includes at least one substrate support. 110 All the processing chambers 103 are multi-substrate chambers, each having four substrate supports 110.

[0022] The robotic device 102 can include multiple end effectors (e.g., four, six, or eight as shown) for transferring substrates between the process chamber 103 and the load locks 109A, 109B. In the illustrated embodiment, the robotic device 102 includes an arm 112. The arm 112 includes two forearms 116A (not shown) and 116B that are independently rotatable about the arm 112. Each forearm 116A and 116B includes a respective twin wrist member 118A (not shown) and 118B. As shown, the single twin wrist member 118B can include two wrist limbs, the ends of which are attached with respective end effectors 120C and 120D for transferring two substrates at a time.

[0023] The system 100 further includes load lock apparatuses 109A, 109B configured to interface with a factory interface 117 or other system components and capable of receiving substrates from, for example, a substrate carrier 119 (e.g., a Front Opening Unified Pod (FOUP)) capable of docking with a load port of the factory interface 117. A load / unload robot 121 (shown in phantom) may be used to transfer substrates between the substrate carrier 119 and the load lock apparatuses 109A, 109B. Substrate transfer may occur in any order or direction. The load / unload robot 121 may be similar to the robot apparatus 102 of some embodiments, but may include mechanisms that allow the robot apparatus to move in either lateral direction, as indicated by arrow 123. In one embodiment, the robot apparatus 102 is configured to operate in a vacuum, but the load / unload robot 121 may not be configured to operate in a vacuum. Other suitable robots may be used. As shown, transfer can occur through slit valve 111 and substrates can be removed from or placed into load lock apparatus 109A and 109B.

[0024] Each load lock 109A, 109B includes at least one substrate support 110A, 110B. In an embodiment, the load lock 109A can be configured for the robot 102 to remove unprocessed substrates loaded from the substrate carrier 119 (i.e., entry) and the load lock 109B can be configured for the robot 102 to deposit processed substrates received from the processing chamber 103 (i.e., exit). In an embodiment, each load lock 109A, 109B includes multiple substrate supports, for example the same number of substrate supports as there are processing chambers, i.e., four as shown. The substrate supports can be tilted vertically to allow at least some of the processed substrates held by the end effectors 118A-118F of the robot 102 to be simultaneously removed from or deposited by the robot 102 on the substrate supports 110 in the load locks 109A, 109B.

[0025] In the use case shown in FIG. 1, the robot device 102 is a double twin blade robot that can sequentially unload and reload substrates to and from each of the processing chambers 103. For example, the robot 102 carrying two unprocessed substrates on two of the four end effectors 120A-120B may have two empty end effectors 120C, 120D (for example). The empty end effectors 120C, 120D retrieve two processed substrates from two substrate supports 110 in a first of the processing chambers 103. The robot 102 then rotates the blade and places the two unprocessed substrates on the empty substrate supports in the first processing chamber 103 using the end effectors 120A, 120B (for example). The robot 102 then retrieves the remaining two processed substrates from the remaining two substrate supports 110 using the empty end effectors 120A, 120B. After removing all of the processed substrates, the robot 102 returns to the load lock 109A and replaces the processed substrates with unprocessed substrates, two at a time. For example, the robot 102 can place two processed substrates using the end effectors 120A, 120B, and then use the same end effectors to remove two unprocessed substrates from the two substrate supports in the load lock 109A. The robot 102 can place two processed substrates using the end effectors 120C, 120D onto two substrate supports in the load lock, such that (for example) the two end effectors 120A-120B hold unprocessed substrates and (for example) the two end effectors 120C, 120D are empty. The robot 102 can then proceed to unload / reload the processing chamber 103.

[0026] In some embodiments, for the use case shown in FIG. 1, the robot device 102 may be a triple twin blade robot as described with respect to FIGS. 3A-3B, 6A-6C, 9A-9C, a quadruple twin blade robot as described with respect to FIGS. 4A-4B, 7A-7C, 10A-10C, etc., which can sequentially unload and reload substrates to and from each processing chamber 103. For example, when implemented with a triple twin blade robot, the robot can carry four unprocessed substrates on four of the six end effectors. Two end effectors are empty. The empty end effectors can retrieve two processed substrates from two substrate supports 110 in a first of the processing chambers 103. The robot then rotates the blades and places two unprocessed substrates on the empty substrate supports in the first processing chamber 103. The robot then uses the empty end effector to remove the two remaining processed substrates from the two remaining substrate supports 110. The robotic device then rotates to place two unprocessed substrates on the two empty substrate supports 110. After removing all processed substrates, the robot returns to load lock 109A and replaces the processed substrates with unprocessed substrates, two at a time. The robot 102 can then proceed to unload / reload the processing chamber 103. Using a triple twin-blade robot to exchange substrates in a processing chamber with four substrate supports allows exchange within one cycle, thereby reducing exchange time and increasing throughput.

[0027] FIG. 2A shows a top view of a robotic device including two independently controllable forearms, each having an independently rotatable twin wrist member, according to one or more embodiments. FIG. 2B shows a perspective view of a robotic device including two independently controllable forearms, each having an independently rotatable twin wrist member, according to one or more embodiments. FIG. 2C shows a side view of a robotic device including two independently controllable forearms, each having an independently rotatable twin wrist member, according to one or more embodiments.

[0028] In one embodiment, the robotic apparatus 200 corresponds to the robotic apparatus 102 of Figure 1. In such an embodiment, the robotic apparatus 200 may be configured and adapted, for example, to transfer substrates between various processing chambers 103 and / or to exchange substrates in one or more load lock apparatuses 109A, 109B. In the illustrated embodiment of Figure 1, two load lock apparatuses 109A, 109B are shown. However, the robotic apparatus 200 could be used with one load lock apparatus or with more than two load lock apparatuses.

[0029] The robotic device 200 has an arm 212, which includes an inboard end 212i and an outboard end 212o. The inboard end 212i is configured to rotate about a shoulder axis 222 by an arm drive motor of a drive motor assembly 226. A drive assembly of drive and driven pulleys (e.g., circular or non-circular) and transmission members is included within the arm 212. The drive assembly may be any suitable pulley transmission assembly known to those of skill in the art. The arm 212 may have a center-to-center length L1, where the center of the length L1 is the shoulder axis 222 and the outboard axis 224 (also known as the elbow axis).

[0030] The illustrated robotic device 200 includes two forearms 216A, 216B coupled to the outboard end 212o of the arm 212 opposite the inboard end 212i. Each forearm 216A, 216B has a center-to-center length L2, where the center of the length L2 of the forearms 216A, 216B is an outboard axis 224 (also known as the forearm elbow joint or the forearm elbow axis) and a first wrist axis and a second wrist axis, which respectively correspond to axis 228 (when the robot is in a folded configuration zeroed to a home position). Each forearm 216A, 216B is independently rotatable about a common shaft of the outboard axis 224 through commanded movement of a first drive motor and a second drive motor, respectively. The first drive motor and the second drive motor are commanded by appropriate control signals received from a controller (not shown). The controller may be any suitable processor, memory, electronics, and / or drivers capable of processing control instructions to implement movement of the forearms 216A, 216B.

[0031] Twin, independently rotatable wrist members 218A, 218B, each having two legs with end effectors 220A-220D attached thereto, are coupled to each forearm 216A, 216B via a first wrist shaft and a second wrist shaft, respectively. As shown in the illustrated embodiment of FIGS. 2A-2C, each wrist member 218A, 218B has two end effectors 220A, 220B and 220C, 220D, respectively, in a lateral arrangement that may be referred to as a butterfly configuration. Each wrist member 218A, 218B is independently rotatable about a first wrist axis and a second wrist axis, respectively, through commanded operation of a first drive motor and a second drive motor, respectively. When in a folded, adjusted configuration as shown in the illustrated embodiment of FIGS. 2A-2C, the first wrist axis is aligned with the second wrist axis, represented by axis 228. The first and second drive motors are commanded by suitable control signals received from a controller (not shown). The controller may be any suitable processor, memory, electronics, and / or drivers capable of processing the control commands to effect movement of the wrist members 218A, 218B. The wrist members 218A, 218B are configured to rotate about a nominal center or midpoint located midway between each leg, as indicated by axis 228 shown in the illustrated embodiment.

[0032] The nominal centers 225A, 225B of the end effectors 220A-220D are such that the substrate is nominally positioned at each end effector when nominally placed, as shown. 220A~220DThe end effectors 220A-220D are about to rest on the substrate. Constraint mechanisms constrain the position of the substrate on the end effectors 220A-220D within limits. In the illustrated embodiment, the wrist members 218A, 218B and the end effectors 220A-220D are separate interconnected members. However, it should be understood that in some embodiments, each forearm member and the end effector may be integrally formed to form a single cohesive component. In the illustrated embodiment, the end of each of the forearm members 216A, 216B may include a corresponding orientation adjuster to allow fine adjustment (e.g., tilt and / or tilt adjustment) to each of the end effectors 220A-220D. The orientation adjuster may use a screw or shim to adjust the attitude of the end effector.

[0033] It should be apparent that the first forearm 216A is configured for independent rotation relative to the arm 212 about a common shaft at the outer axis 224. The first forearm 216A is coupled to a first wrist member 218A at a nominal center corresponding to a first wrist axis about which the wrist member 218A rotates. The wrist member 218A has two legs, each of which is coupled to a first end effector 220A and a second end effector 220B. In an embodiment, the wrist member 218A is "U" shaped and includes a first wrist shaft at the first wrist axis located at the bottom center of the "U", a first end effector 220A at a first distal end of one arm of the "U", and a second end effector 220B at a second distal end of the other arm of the "U". The first forearm member 216A is disposed directly below the second forearm member 216B, and correspondingly, the first end effector 220A and the second end effector 220B are disposed directly below the third end effector 220C and the fourth end effector 220D. underSimilarly, the second forearm 216B can be configured for independent rotation relative to the arm 212 about the outer axis 224. The second forearm 216B is coupled to a second wrist member 218B at a nominal center corresponding to a second wrist axis about which the wrist member 218B rotates. The wrist member 218B has two legs, each of which is coupled to a third end effector 220C and a fourth end effector 220D. In an embodiment, the wrist member 218A is "U" shaped and includes a first wrist shaft at a first wrist axis located at the bottom center of the "U", a first end effector 220A at a first distal end of one arm of the "U", and a second end effector 220B at a second distal end of the other arm of the "U".

[0034] As seen in FIGS. 2A-2C, the first end effector 220A and the second end effector 220B, when configured in a folded, current-position adjusted configuration (e.g., vertically stacked configuration), are directly below the third end effector 220C and the fourth end effector 220C, 220D, respectively. This folded, current-position adjusted configuration is a neutral configuration, and the forearms 216A, 216B can be rotated, for example, about + / - 170 degrees from this orientation. As further shown in FIGS. 2A-2C, in the embodiment, the first wrist member 218A is disposed above the first forearm 216A and between the first and second forearm 216A, 216B. The second wrist member 218B is disposed below the second forearm 216B and between the first and second forearm 216A, 216B.

[0035] When a first forearm assembly, comprised of forearm 216A, wrist member 218A, and end effectors 220A, 220B, extends into the processing chamber 103, a second forearm assembly, comprised of forearm 216B, wrist member 218B, and end effectors 220C, 220D, can rotate about shoulder axis 222. Correspondingly, when the second forearm assembly extends into the processing chamber 103, the first forearm assembly can rotate about shoulder axis 222.

[0036] 3A and 3B show a robot 201 with the same configuration as robot 200, but with an additional forearm 216C, wrist member 218C, and attached end effectors 220E, 220F. As shown, each wrist member is generally U-shaped and includes a first wrist shaft located at the bottom center of the U-shape, a first end effector located at a first distal end of the U-shape, and a second end effector located at a second distal end of the U-shape. The wrist members may be rigid, and the relative positions of the first and second end effectors may be fixed for each twin wrist member.

[0037] The robot 201 may correspond to the robot 102 of FIG. 1 and may be suitable for use in a multi-substrate processing chamber 103 having, for example, four substrate supports. As shown in the illustrated embodiment of FIG. 3A and FIG. 3B, the forearm 216C is disposed above the forearm 216B and is rotatable about axis 224 via a common shaft. The wrist member 218C is disposed below the forearm 216C and above the forearm 216B and is rotatable about a third wrist axis corresponding to axis 228 in FIG. 3A and FIG. 3B. As shown in FIG. 3B, the pitch between the wrist members 218B and 218C (e.g., 30 mm or 100 mm spacing) is greater than the pitch between the wrist members 218A and 218B (e.g., 15 mm or 50 mm spacing). In embodiments, the pitch between forearm portions 216A and 216B may be greater than the pitch between forearm portions 216B and 216C. In embodiments, the pitch between forearm portions 216A-216C and the pitch between wrist members 218A-218E may be the same.

[0038] The load locks 109A, 109B may include a plurality of substrate supports in two vertical rows (e.g., two substrate supports on top of two substrate supports). In an embodiment, the vertical spacing between the end effectors 220A, 220B and the end effectors 220C, 220D is equal to a first vertical pitch, and the vertical spacing between the end effectors 220C, 220D and the end effectors 220E, 220F is equal to a second vertical pitch. The first vertical pitch may be (for example) equal to the vertical spacing between the upper and lower load lock supports in the load lock 109A. The second vertical pitch may be equal to the vertical spacing between the upper and lower load lock supports of the second load lock 109B. In an embodiment, the first vertical pitch is smaller than the second vertical pitch, e.g., the second vertical pitch may be about twice the first vertical pitch. In an embodiment, a first load lock may be disposed above a second load lock. The first load lock may be configured to receive end effectors 220A-220D. In an embodiment, the second load lock may be configured to receive end effectors 220A, 220B and end effectors 220E, 220F, or end effectors 220C, 220D and end effectors 220E, 220F. In an embodiment, end effectors 220A, 220B and end effectors 220E, 220F are spaced apart to transfer substrates between upper and lower load lock supports of the second load lock. In an embodiment, end effectors 220C, 220D and end effectors 220E, 220F are spaced apart to move a substrate between an upper load lock support of a first load lock, and end effectors 220A, 220B and end effectors 220C, 220D are spaced apart to move a substrate between a lower load lock support of the first load lock.

[0039] In further embodiments, the spacing between the wrist members 218B and 218C can be an active heating pitch (e.g., 30 mm or 100 mm) and the spacing between the first wrist member 218A and the second wrist member 218B can be a passive cooling pitch (e.g., 15 mm or 50 mm). For example, the batch load lock apparatus can include substrate temperature control capabilities such as active heating, active cooling, or both. The batch load lock apparatus can include capabilities to pre-heat the substrate before transferring it to the processing chamber 103 and can further include capabilities to cool the substrate after it is transferred from the processing chamber back to the factory interface. For example, the robot 201 can be used to simultaneously remove two unprocessed substrates from the heater pedestal by two end effectors, i.e., 220E, 220F, for example, with a pitch of 30 mm or 100 mm. Furthermore, two processed substrates can be placed on two cooling pedestals with a pitch of 15 mm or 50 mm by end effectors 220C, 220D. In an embodiment, the pitch between the wrist members and the pitch between the end effectors can be reversed. For example, the pitch between wrist members 218B and 218C can be smaller than the spacing between wrist members 218A and 218B. In an embodiment, the pitch between each of forearms 216A-216C is the same.

[0040] FIG. 3C illustrates the forearms 216A-216C and wrist members 218A-218C of the robot 201 according to an embodiment of the present specification. 218C3C shows an exemplary embodiment of a drive assembly for rotating the first forearm 216A. As shown in FIG. 3C, the transmission assembly for rotating the first forearm 216A includes a first drive pulley 240A and a first driven pulley 242A. The first drive pulley 240A is disposed at the inboard end 212i of the arm 212, and the first driven pulley 242A is disposed at the outboard end 212o of the arm 212. A pair of belts 244A, 245A wrapped around the first drive pulley 240A and the first driven pulley 242A drives the first driven pulley 242A to rotate around a common shaft 246 with the first forearm 216A attached thereto. The second forearm 216B is coupled to a common shaft 246 and can rotate about the axis 224 and the shaft 246 by a second transmission assembly having a second driving pulley 240B and a second driven pulley 242B. The second driving pulley 240B is disposed at the inboard end 212i of the arm 212, and the second driven pulley 242B is disposed at the outboard end 212o of the arm 212 above the first driving pulley 240A and the first driven pulley 242A. A pair of belts 244B, 245B wrapped around the second driving pulley 240B and the second driven pulley 242B drives the second driven pulley 242B to rotate about the common shaft 246 with the second forearm 216B attached thereto. The third forearm 216C is coupled to a common shaft 246 and includes a third drive pulley 240C and Third The third drive pulley 240C is disposed at the inboard end 212i of the arm 212 and is rotatable about the axis 224 and the shaft 246 by a third transmission assembly having a third driven pulley 242C. C The second drive pulley 240 B and the second driven pulley 242 B A pair of belts 244C, 245C are wrapped around a third driving pulley 240C and a third driven pulley 242C to drive the third driven pulley 242C to rotate about a common shaft 246 with a third forearm 216C attached thereto.

[0041] 3C, the transmission assembly that rotates the first wrist member 218A includes a first drive pulley 247A and a first driven pulley 248A. The first drive pulley 247A is disposed at the outboard end 212o of the arm 212, and the first driven pulley 248A is disposed at the axle 228. A pair of belts 250A, 252A wrapped around the first drive pulley 247A and the first driven pulley 248A transmits the rotational force to the first driven pulley 248A. 248 A rotates about an axis 228 with a first wrist member 218A attached thereto. 248 A is the first driven pulley 248 The second wrist member 218B includes a pair of bearings 254A, 254B for facilitating rotation of the second wrist member 218B. Second Drive pulley 247B and Second The driven pulley 248B is included. Second The drive pulley 247B is disposed at the outer end 212o of the arm 212. Second The driven pulley 248B is disposed at the axis of rotation 228. Second Drive pulley 247B and Second A pair of belts 250B and 252B are wound around the driven pulley 248B. Second Driven pulley 248 Drives B and is attached to itself Second 218B rotates about axis 228. Second Driven pulley 248 B is the Second Driven pulley 248 The third wrist member 218C includes bearings 254C, 254D for facilitating rotation of the third wrist member 218B. Third Drive pulley 247C and Third The driven pulley 248C is included. Third The drive pulley 247C is disposed at the outer end 212o of the arm 212. Third The driven pulley 248C is disposed at the axis of rotation 228. Third Drive pulley 247C and ThirdA pair of belts 250C and 252C are wound around the driven pulley 248C. Third Driven pulley 248 Drives C and is attached to itself Third 218C together with the wrist member 218C about axis 228. Third Driven pulley 248 C is the Third Driven pulley 248 C includes a pair of bearings 254E, 254F for facilitating rotation of C.

[0042] 3D illustrates an alternative embodiment of a robotic transmission assembly 300 in which three forearms 216A-216C and respective wrist members 218A-218C are provided with equal pitch. As shown in the illustrated embodiment, the pitch between the first wrist member 218A and the second wrist member 218B is the same as the pitch between the second wrist member 218B and the third wrist member 218C. The forearms 216A-216C and wrist members 218A-218C are rotated by a pulley drive assembly as described with respect to FIG. 3C.

[0043] Another alternative embodiment of a robotic transmission assembly 301 having three forearms 216A-216C and respective wrist members 218A-218C is shown in FIG. E As shown in the illustrated embodiment, the pitch between the first wrist member 218A and the second wrist member 218B is greater than the pitch between the second wrist member 218B and the third wrist member 218C. The forearms 216A-216C and wrist members 218A-218C are rotated by a pulley drive assembly as described with respect to FIG. 3C.

[0044] 4A and 4B show a robot 202 of the same configuration as robot 201, but with an additional forearm 216D, wrist member 218D, and attached end effectors 220G, 220H. Robot 202 may correspond to robot 102 of FIG. 1 and may be suitable for use in a multi-substrate processing chamber 103 having, for example, four to six substrate supports. As shown in the illustrated embodiment of FIGS. 4A and 4B, a fourth forearm 216D is disposed above the third forearm 216C and is rotatable about axis 224 via a common shaft. A fourth wrist member 218D is disposed below forearm 216D and above the third wrist member 218C and is rotatable about a fourth wrist axis, which in the illustrated embodiment corresponds to axis 228, via a fourth wrist shaft. 4B, the spacing between the third wrist member 218C and the fourth wrist member 218D is less than the spacing between the second wrist member 218B and the third wrist member 218C. Similarly, the spacing between the third forearm 216C and the fourth forearm 216D is greater than the spacing between the second forearm 216B and the third forearm 216C. In an embodiment, the spacing between the first wrist member 218A and the second wrist member 218B is the same as the spacing between the third wrist member 218C and the fourth wrist member 218D. In an embodiment, the spacing between the forearms 216A-216C and the spacing between the wrist members 218A-218C may be the same.

[0045] As described with respect to robot 201 of Figures 3A and 3B, end effectors 220C, 220D and 220G, 220H, as well as end effectors 220A, 220B and 220E, 220F, can have different pitches and can be configured to retrieve heated or cooled substrates. In an embodiment, robot 202 can be configured to retrieve four unprocessed substrates simultaneously from four substrate supports in load lock 109A using end effectors 220A-220D of a first pitch. Alternatively, the robot can retrieve two substrates simultaneously and then move up or down in the Z direction (i.e., up or down) to retrieve two additional substrates through the slit valve. The robot 202 can then move to the processing chamber and remove the processed substrates using the second pitch end effectors 220E-220H, and place four unprocessed substrates onto the empty substrate supports using the end effectors 220A-220D.

[0046] The robot 202 is suitable for use in multi-substrate processing chambers having, for example, two to six substrate supports. In the use case shown in FIG. 1, the quadruple twin blade robot 202 can sequentially unload and reload substrates to and from the illustrated processing chamber 103 having four substrate supports or a processing chamber having six substrate supports (not shown). For example, in the case of a processing chamber having six substrate supports, the robot 202 transports six unprocessed substrates with six of the eight end effectors (220A-220F) (for example) and has two empty end effectors 220G, 220H (for example). The empty end effectors 220G, 220H retrieve two processed substrates from the two substrate supports in the first of the processing chambers. The robot 202 then rotates the blades and places the two unprocessed substrates on the empty substrate supports in the first processing chamber using the end effectors 220A, 220B (for example). Next, using the empty end effectors 220A, 220B, the robot 202 retrieves two additional processed substrates from the two additional substrate supports and places two unprocessed substrates on the empty substrate support using end effectors 220C, 220D. Next, using the empty end effectors 220C, 220D, the robot 202 retrieves two additional processed substrates from the two additional substrate supports and places two unprocessed substrates on the empty substrate support using end effectors 220E, 220F. The robot 202 then returns to the load lock 109A and replaces the processed substrates with unprocessed substrates, two at a time. Using the empty end effectors 220E, 220F (for example), the robot 202 can retrieve two unprocessed substrates from the two substrate supports in the load lock 109A and place two processed substrates on the empty substrate support. The robot 202 can continue to exchange unprocessed substrates for processed substrates, two at a time, until six (for example) end effectors 220A, 220B, 220E-220H are holding unprocessed substrates and two (for example) end effectors 220C, 220D are empty. The robot 202 can then proceed to unload / reload the processing chambers.

[0047] FIG. 5A illustrates a top view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. FIG. 5B illustrates a perspective view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. FIG. 5C illustrates a side view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. FIG. 5D illustrates a bottom perspective view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. FIG. 5E illustrates a top view of a robotic device in an extended configuration, according to one or more embodiments.

[0048] In one embodiment, the robotic apparatus 500 corresponds to the robotic apparatus 102 of Figure 1. In such an embodiment, the robotic apparatus 500 may be configured and adapted, for example, to transfer substrates between various processing chambers 103 and / or to exchange substrates in one or more load lock apparatuses 109A, 109B. In the illustrated embodiment of Figure 1, two load lock apparatuses 109A, 109B are shown. However, the robotic apparatus 500 could be used with one load lock apparatus or with more than two load lock apparatuses.

[0049] The robotic device 500 includes a first arm 512A and a second arm 512B, each of which includes an inboard end 512Ai, 512Bi and an outboard end 512Ao, 512Bo. The inboard ends 512Ai, 512Bi are configured to be rotatable about a shoulder axis 522 by an arm drive motor of a drive motor assembly 526. A drive assembly is included in the arms 512A, 512B, which includes a drive pulley and a driven pulley (e.g., circular or non-circular) and a transmission member. Each arm 512A, 512B can have a center-to-center length L1, where the center of the length L1 is the shoulder axis 522 and the outboard axis 524A, 524B.

[0050] The illustrated robotic device 500 includes two forearms 516A, 516B coupled to the outer ends 512Ao, 512Bo of the arms 512A, 512B opposite the inner ends 512Ai, 512Bi. Each forearm 516A, 516B has a center-to-center length L2, where the center of the length L2 of the forearm 516A, 516B is an outer axis 524A, 524B (also known as the elbow joint of the forearm) and an axis 528 (also known as the wrist axis of each wrist member). Each forearm 516A, 516B can be independently rotated about a shaft at a respective outer axis 524A, 524B by commanded movement of a first forearm drive motor and a second forearm drive motor, respectively. The first drive motor and the second drive motor are commanded by appropriate control signals received from a controller (not shown). The controller may be any suitable processor, memory, electronics, and / or drivers capable of processing control instructions and executing movements of the forearms 516A, 516B.

[0051] Coupled to each forearm 516A, 516B is a twin wrist member 518A, 518B that is independently rotatable, each having two legs with end effectors 520A-D attached thereto. In an embodiment, wrist members 518A, 518B are "U" shaped and include a first wrist shaft at a first wrist axis and a second wrist shaft at a second wrist axis centrally located at the bottom of the "U", a first end effector 520A, 520C at a first distal end of one arm of the "U", and a second end effector 520B, 520D at a second distal end of the other arm of the "U". As shown in the illustrated embodiment of FIGS. 5A-5E, each wrist member 518A, 518B has two end effectors 520A and 520B, 520C and 520D, respectively, in a butterfly configuration. Each wrist member 518A, 518B is independently rotatable about a first wrist axis and a second wrist axis, respectively, via commanded movement of a first drive motor and a second drive motor, respectively. In the illustrated embodiment, the first wrist axis is located below the second wrist axis when the robot 500 is in a folded configuration aligned to a current position. The first and second wrist axes are aligned at axis 528, as shown in FIG. 5B. The first and second wrist drive motors are commanded by appropriate control signals received from a controller (not shown). The controller can be any suitable processor, memory, electronics, and / or drivers capable of processing control commands to effect movement of the wrist members 518A, 518B. The wrist members 518A, 518B are configured to rotate about a nominal center of an axis 528 located midway between each leg.

[0052] The nominal centers 525A, 525B of the end effectors 520A-520D are where the substrate rests on each end effector when nominally placed, as shown. Constraint mechanisms constrain the position of the substrate on the end effectors 520A-520D within limits. In the illustrated embodiment, the wrist members 518A, 518B and the end effectors 520A-520D are separate interconnected members. However, it should be understood that in some embodiments, each forearm member and the end effector may be integrally formed to form a single cohesive component. In the illustrated embodiment, the end of each of the forearm members 516A, 516B may include a corresponding orientation adjuster to allow fine adjustment (e.g., tilt and / or tilt adjustment) for each end effector 520-520D. The orientation adjuster may use a screw or shim to adjust the attitude of the end effector.

[0053] It should be apparent that the first forearm 516A is configured for independent rotation relative to the arm 512A about a shaft at the outer axis 524A. The first forearm 516A is coupled to a first wrist member 518A at a nominal center corresponding to a first wrist axis about which the wrist member 518A rotates. The wrist member 518A has two legs, each of which is coupled to a first end effector 520A and a second end effector 520B. The first forearm member 516A is disposed directly below the second forearm member 516B, such that the first end effector 520A is directly below the third end effector 520C, and the second end effector 520B is directly below the fourth end effector 520D. Similarly, the second forearm 516B is configured for independent rotation relative to the arm 512A about the outer axis 524A. B Arm 512 around BThe second forearm 516B can be configured for independent rotation relative to a second wrist member 518B at a nominal center corresponding to a second wrist axis about which the wrist member 518B rotates. The wrist member 518B has two legs, each of which is coupled to a third end effector 520C and a fourth end effector 520D.

[0054] 5A-5E, when configured in the folded, current adjusted configuration (e.g., vertically stacked configuration) as shown, first end effector 520A and second end effector 520B are directly below third end effector 520C and fourth end effector 520D, respectively. Forearm 516A and forearm 516B are at an angle of approximately 45° about axis 528 when in the current adjusted, current adjusted configuration, and mirror arms 512A and 512B are also at an angle of approximately 45° about axis 522 when in the current adjusted, current adjusted configuration. This folded, current adjusted configuration is a neutral configuration, and forearms 516A, 516B can be rotated, for example, approximately + / - 170 degrees from this orientation. 5A-5E, in an embodiment, the first wrist member 518A is disposed above the first forearm 516A and between the first forearm 516A and the second forearm 516B. The second wrist member 518B is disposed below the second forearm 516B and above the first wrist member 518A.

[0055] In the use case shown in FIG. 1, the robot 500 can sequentially unload and reload substrates to and from the processing chamber 103, or a processing chamber containing two substrates. For example, the robot 500 carrying two unprocessed substrates on two of the four end effectors 520A, 520B may have two empty end effectors 520C, 520D (for example). The empty end effectors 520C, 520D retrieve two processed substrates from the two substrate supports 110 in the first of the processing chambers. The robot 500 then places the two unprocessed substrates on the empty substrate supports in the first processing chamber using the end effectors 520A, 520B (for example). The robot 500 then returns to the load lock 109A and replaces the processed substrates with the unprocessed substrates, two at a time. Using (for example) empty end effectors 520A, 520B, the robot 500 can remove two unprocessed substrates from the two substrate supports in load lock 109A, and place two processed substrates onto the empty substrate supports using end effectors 520C, 520D. The robot 500 can then proceed to unload / reload the processing chamber.

[0056] 6A-6C show a robot 501 with the same configuration as robot 500, but with an additional arm 512C, forearm 516C, wrist member 518C, and attached end effectors 520E, 520F. As shown, each wrist member is generally U-shaped and includes a first wrist shaft located at the bottom center of the U-shape, a first end effector located at a first distal end of the U-shape, and a second end effector located at a second distal end of the U-shape. The wrist members may be rigid, and the relative positions of the first and second end effectors may be fixed for each twin wrist member. Robot 501 may correspond to robot 102 of FIG. 1 and may be suitable for use in a multi-substrate processing chamber 103 having, for example, four substrate supports. As shown in the illustrated embodiment of Figures 6A-6C, the third arm 512C is disposed directly above the first arm 512A, with each arm 512A, 512C having its own transmission assembly that controls the independent rotation of the arm about a common shaft at axis 522. In an embodiment, the first arm 512A and the third arm 512C together are twice the thickness of the second arm 512B. The third forearm 516C is disposed above the first forearm 516A and is rotatable about axis 524A via a common shaft with the forearm 516A. The third wrist member 518C is disposed below and between the forearm 516A and the forearm 516C.

[0057] 6B, the spacing between the second wrist member 518B and the third wrist member 518C (e.g., 30 mm or 100 mm pitch) is greater than the spacing between the first wrist member 518A and the third wrist member 518C (e.g., 15 mm or 50 mm pitch). Similarly, the spacing between the first forearm portion 516A and the third forearm portion 516C is greater than the spacing between the second forearm portion 516B and the third forearm portion 516C. In an embodiment, the spacing between the forearms 516A-516C and the wrist members 518A-518C may be the same.

[0058] In further embodiments, the spacing between the wrist members 518B and 518C can be an active heating pitch (e.g., 30 mm or 100 mm) and the spacing between the wrist members 518A and 518B can be a passive cooling pitch (e.g., 15 mm or 50 mm). For example, the batch load lock apparatus can include substrate temperature control capabilities such as active heating, active cooling, or both. The batch load lock apparatus can include capabilities to pre-heat the substrate before transferring it to the processing chamber 103 and can further include capabilities to cool the substrate after it is transferred from the processing chamber back to the factory interface. For example, the robot 501 can be used to simultaneously remove two unprocessed substrates from the heater pedestal by two end effectors, i.e., 520E, 520F, for example, with a pitch of 30 mm or 100 mm. Furthermore, two processed substrates can be placed on two cooling pedestals with a pitch of 15 mm or 50 mm by end effectors 520C, 520D.

[0059] In further embodiments, the spacing between the second wrist member 518B and the third wrist member 518C can be an active heating pitch (e.g., 30 mm or 100 mm), and the spacing between the first wrist member 518A and the third wrist member 518C can be a passive cooling pitch (e.g., 15 mm or 50 mm). For example, using the robot 501, two unprocessed substrates can be simultaneously removed from the heater pedestal by two end effectors, i.e., 520C, 520D, with a pitch of 30 mm or 100 mm. Furthermore, two processed substrates can be placed on two cooling pedestals by end effectors 520E, 520F, with a pitch of 15 mm or 50 mm.

[0060] In embodiments, the pitch between the wrist members and the pitch between the end effectors may be reversed. For example, the spacing between wrist members 518B and 518C may be less than the spacing between wrist members 518A and 518B. Correspondingly, the spacing between forearms 516B and 516C may be greater than the spacing between forearms 516A and 516B.

[0061] 7A-7C show a robot 502 having the same configuration as the robot 501, but with an additional forearm 516D, wrist member 518D and attached end effectors 520G, 520H. The robot 502 may correspond to the robot 102 of FIG. 1 and may be suitable for use in a multi-substrate processing chamber 103 having four substrates as shown in FIG. 1, or having two to six substrates. As shown in the illustrated embodiment of FIGS. 7A-7C, a fourth forearm 516D is disposed below the second forearm 516B and is rotatable about axis 524B via a common shaft with the second forearm 516B. A fourth wrist member 518D is disposed above the fourth forearm 516D and below the second wrist member 518B. As shown in FIG. 7B, the spacing between the third wrist member 518C and the fourth wrist member 518D is greater than the spacing between the first wrist member 518A and the third wrist member 518C and the spacing between the second wrist member 518B and the fourth wrist member 518D. Similarly, the spacing between the third forearm 516C and the fourth forearm 516D is greater than the spacing between the first forearm 516A and the third forearm 516C and the spacing between the second forearm 516B and the fourth forearm 516D. In an embodiment, the spacing between the first wrist member 518A and the third wrist member 518C is the same as the spacing between the second wrist member 518B and the fourth wrist member 518D. In an embodiment, the spacing between the forearms 516A-516D and the spacing between the wrist members 518A-518D may be the same.

[0062] As described with respect to robot 501 of Figures 6A-6C, end effectors 520A, 520B, 520E, 520F can have a different pitch than end effectors 520C, 520D, 520G, 520H and can be configured to retrieve heated or cooled substrates. In an embodiment, robot 502 can be configured to retrieve four unprocessed substrates simultaneously from four substrate supports in load lock 109A using end effectors 520A, 520B, 520E, 520F at a first pitch. Alternatively, the robot can retrieve two substrates simultaneously through the slit valve and then move up or down in the Z direction (i.e., up or down) to retrieve two additional substrates through the slit valve. The robot 502 can then move to the processing chamber and remove the processed substrates using end effectors 520C, 520D, 520G, 520H at the second pitch, and place four unprocessed substrates onto the empty substrate supports using end effectors 520A-520D.

[0063] The robot 502 is suitable for use in multi-substrate processing chambers having, for example, two to six substrate supports. In the use case shown in FIG. 1, the quadruple twin-blade robot 502 can sequentially unload and reload substrates to and from the illustrated processing chamber 103 having four substrate supports or a processing chamber having six substrate supports (not shown). For example, in a use case where the processing chamber has six substrate supports, the robot 502 transports six unprocessed substrates with six of (for example) eight end effectors (520A, 520B, 520E-520H) and has two empty end effectors (for example) 520C, 520D. The empty end effectors 520C, 520D retrieve two processed substrates from the two substrate supports in the first of the processing chambers. The robot 502 then rotates the blade and places two unprocessed substrates onto an empty substrate support in the first processing chamber using (for example) end effectors 520A, 520B. Then, using the empty end effectors 520A, 520B, the robot 502 picks up two additional processed substrates from the two additional substrate supports and places two unprocessed substrates onto the empty substrate support using end effectors 520E, 520F. Then, using the empty end effectors 520E, 520F, the robot 502 picks up two additional processed substrates from the two additional substrate supports and places two unprocessed substrates onto the empty substrate support using end effectors 520G, 520H. The robot 502 then returns to load lock 109A and replaces the processed substrates with unprocessed substrates, two at a time. Using the empty end effectors 520G, 520H (for example), the robot 502 can pick up two unprocessed substrates from the two substrate supports in load lock 109A and place two processed substrates onto the empty substrate supports. The robot 502 can continue to replace the unprocessed substrates with processed substrates, two at a time, until all six end effectors (for example) 520C-520H are holding unprocessed substrates and two end effectors (for example) 520A, 520B are empty. The robot 502 can then proceed to unload / reload the processing chambers.

[0064] FIG. 8A illustrates a top view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. As shown, each wrist member is generally U-shaped and includes a first wrist shaft disposed at a bottom center of the U-shape, a first end effector disposed at a first distal end of the U-shape, and a second end effector disposed at a second distal end of the U-shape. The wrist members can be rigid, and the relative positions of the first and second end effectors can be fixed for each twin wrist member. FIG. 8B illustrates a perspective view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. 8C shows a side view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments. FIG. 8D shows a bottom perspective view of a robotic device including two independently controllable arms, each having an independently controllable forearm, each having a twin wrist member, according to one or more embodiments.

[0065] In one embodiment, the robotic apparatus 800 corresponds to the robotic apparatus 102 of Figure 1. In such an embodiment, the robotic apparatus 800 may be configured and adapted to transfer substrates between various processing chambers 103 and / or to exchange substrates in one or more load lock apparatuses 109A, 109B. In the illustrated embodiment of Figure 1, two load lock apparatuses 109A, 109B are shown. However, the robotic apparatus 800 could be used with one load lock apparatus or with more than two load lock apparatuses.

[0066] The robotic device 800 includes a first arm 812A and a second arm 812B, each of which includes an inboard end 812Ai, 812Bi and an outboard end 812Ao, 812Bo. The inboard ends 812Ai, 812Bi are configured to be rotatable about a shoulder axis 822 by an arm drive motor of a drive motor assembly 826. A drive assembly is included in the arms 812A, 812B, which includes a drive pulley and a driven pulley (e.g., circular or non-circular) and a transmission member. Each arm 812A, 812B can have a center-to-center length L1, where the center of the length L1 is the shoulder axis 822 and the outboard axis 824A, 824B.

[0067] The illustrated robotic device 800 includes two forearms 816A, 816B coupled to the lateral ends 812Ao, 812Bo of the arms 812A, 812B opposite the medial ends 812Ai, 812Bi. Each forearm 816A, 816B has a center-to-center length L2, where the center of the length L2 is the lateral axis 824A, 824B (also known as the elbow joint of the forearm) and the axis 828A, 828B (also known as the wrist joint). Each forearm 816A, 816B is independently rotatable about a shaft at the respective lateral axis 824A, 824B by commanded movement of the first and second forearm drive motors, respectively. The first and second forearm drive motors are commanded by appropriate control signals received from a controller (not shown). The controller may be any suitable processor, memory, electronics, and / or drivers capable of processing control instructions and executing movements of the forearms 816A, 816B.

[0068] Coupled to each forearm 816A, 816B is a separately rotatable twin wrist member 818A, 818B, each having two legs with end effectors 820A-D attached thereto. As shown in the illustrated embodiment of FIGS. 8A-8D, each wrist member 818A, 818B has two end effectors 820A, 820B and 820C, 820D, respectively, in a butterfly configuration. Each wrist member 818A, 818B is separately rotatable about an axis 828A, 828B via commanded motion of a first drive motor and a second drive motor, respectively. As shown, each forearm 816A, 816B is asymmetrically coupled to a respective wrist member 818A, 818B at a respective axis of rotation 828A, 828B. The first and second wrist drive motors are commanded by suitable control signals received from a controller (not shown). The controller can be any suitable processor, memory, electronics, and / or drivers capable of processing the control commands to effect movement of the wrist members 818A, 818B. The wrist members 818A, 818B are configured to rotate about a nominal center at an axis 828A, 828B located midway between each leg.

[0069] The nominal centers 825A, 825B of the end effectors 820A-820D are where the substrate rests on each end effector when nominally placed, as shown. Constraint mechanisms constrain the position of the substrate on the end effectors 820A-820D within limits. In the illustrated embodiment, the wrist members 818A, 818B and the end effectors 820A-820D are separate interconnected members. However, it should be understood that in some embodiments, each forearm member and the end effector may be integrally formed to construct a single cohesive component. In the illustrated embodiment, the end of each of the forearm members 816A, 816B may include a corresponding orientation adjuster to allow fine adjustment (e.g., tilt and / or tilt adjustment) for each end effector 820A-820D. The orientation adjuster may use a screw or shim to adjust the attitude of the end effector.

[0070] It should be clear that the first forearm 816A is configured for independent rotation relative to the arm 812A about a shaft at the outer axis 824A. The first forearm 816A is coupled to the first wrist member 818A at a nominal center corresponding to the axis 828A about which the wrist member 818A rotates. The wrist member 818A has two legs, each of which is coupled to a first end effector 820A and a second end effector 820B. The first arm 812A may be disposed on the second arm 812B. The first forearm member 816A may be disposed on the first arm 812A. The second forearm 816B may be configured for separate rotation relative to the arm 812B about the outer axis 824B. The second forearm 816B is coupled to the second wrist member 818B at an off-center position corresponding to an axis 828B about which the wrist member 818B rotates. The wrist member 818B has two legs, each of which is coupled to a third end effector 820C and a fourth end effector 820D. The second forearm member 816B may be disposed above the second arm 812B and below the first forearm 816A. The first wrist member 818A and the first and second end effectors 820A and 820B are disposed above the second wrist member 818B and the third and fourth end effectors 820C and 820D.

[0071] As can be seen in FIGS. 8A-8D, the first end effector 820A and the second end effector 820B are directly above the third end effector 820C and the fourth end effector 820D, respectively, when configured in a folded, current adjusted configuration (e.g., vertically stacked configuration) as shown. The forearms 816A, 816B form an acute angle with the arms 812A, 812B about the axes 824A, 824B when in the current adjusted folded configuration. This current adjusted folded configuration is a neutral configuration, and the forearms 816A, 816B can be rotated, for example, about + / - 170 degrees from this orientation. As further shown in FIGS. 8A-8D, in an embodiment, the first wrist member 818A is disposed below the first forearm 816A and above the second wrist member 818B. A second wrist member 818B is disposed over the second forearm 816B.

[0072] In the use case shown in FIG. 1, the robot 800 can sequentially unload and reload substrates to and from the processing chamber 103, or a processing chamber containing two substrates. For example, a robot 800 carrying two unprocessed substrates on two of the four end effectors 820A, 820B may have two empty end effectors 820C, 820D (for example). The empty end effectors 820C, 820D retrieve two processed substrates from two substrate supports 110 in a first of the processing chambers. The robot 800 then places the two unprocessed substrates on the empty substrate supports in the first processing chamber using the end effectors 820A, 820B (for example). The robot 800 then returns to the load lock 109A and replaces the processed substrates with the unprocessed substrates, two at a time. Using (for example) empty end effectors 820A, 820B, the robot 800 can remove two unprocessed substrates from the two substrate supports in load lock 109A, and use end effectors 820C, 820D to place two processed substrates onto the empty substrate supports. The robot 800 can then proceed to unload / reload the processing chamber.

[0073] 9A-9C show a robot 801 of the same configuration as robot 800, but with an additional arm 812C, forearm 816C, wrist member 818C, and attached end effectors 820E, 820F. Robot 801 may correspond to robot 102 of FIG. 1 and may be suitable for use in a multi-substrate processing chamber 103 having, for example, four substrate supports. As shown in the illustrated embodiment of FIGS. 9A-9C, arm 812C is located directly above arm 812B, and each arm 812B, 812C has its own transmission assembly for controlling the independent rotation of the arms about a common shaft of axis 822. In an embodiment, arms 812B and 812C together are twice the thickness of arm 812B. Forearm 816C is located above forearm 816B and is in the same plane or height as forearm 816A. This configuration may be more compact than a configuration in which the forearms are on different planes. The forearm 816C can rotate around the axis 824B via a shaft common to the forearm 816B. The wrist member 818C is disposed on the forearm 816C. As shown in FIG. 9B, the spacing between the wrist member 818B and the wrist member 818C (e.g., a pitch of 30 mm or 65 mm) is larger than the spacing between the wrist member 818A and the wrist member 818C (e.g., a pitch of 15 mm or 32.5 mm). Similarly, the spacing between the forearm 816A and the forearm 816C is larger than the spacing between the forearm 816B and the forearm 816C. In an embodiment, the spacing between the forearms 816A to 816C and the spacing between the wrist members 818A to 818C may be the same.

[0074] In further embodiments, the spacing between the wrist members 818B and 818C can be an active heating pitch (e.g., 30 mm or 65 mm) and the spacing between the first wrist member 818A and the second wrist member 818B can be a passive cooling pitch (e.g., 15 mm or 32.5 mm). For example, the batch load lock apparatus can include substrate temperature control capabilities such as active heating, active cooling, or both. The batch load lock apparatus can include capabilities to pre-heat the substrate before transferring it to the processing chamber 103 and can further include capabilities to cool the substrate after it is transferred from the processing chamber back to the factory interface. For example, the robot 801 can be used to simultaneously remove two unprocessed substrates from the heater pedestal by two end effectors, i.e., 820E, 820F, for example, with a pitch of 30 mm or 65 mm. Furthermore, two processed substrates can be placed on two cooling pedestals with a pitch of 15 mm or 32.5 mm by end effectors 820C, 820D.

[0075] In further embodiments, the spacing between wrist members 818B and 818C can be an active heating pitch (e.g., 30 mm or 65 mm) and the spacing between wrist members 818A and 818B can be a passive cooling pitch (e.g., 15 mm or 32.5 mm). For example, using robot 801, two unprocessed substrates can be simultaneously removed from the heater pedestal by two end effectors, i.e., 820E, 820F, with a pitch of 30 mm or 65 mm. Furthermore, two processed substrates can be placed on two cooling pedestals by end effectors 820C, 820D, with a pitch of 15 mm or 32.5 mm.

[0076] 10A-10C show a robot 802 of the same configuration as robot 801, but with an additional forearm 816D, wrist member 818D and attached end effectors 820G, 820H. Robot 802 may correspond to robot 102 of FIG. 1 and may be suitable for use in a multi-substrate processing chamber 103 having four substrates as shown in FIG. 1, or having two to six substrates. As shown in the illustrated embodiment of FIGS. 10A-10C, forearm 816D is disposed above forearm 816A and is rotatable about axis 824A via a common shaft with forearm 816A. Wrist member 818D is disposed below forearm 816D and above wrist member 818C. 10B, the spacing between wrist member 818C and wrist member 818A is greater than the spacing between wrist member 818C and wrist member 818D and between wrist member 818A and wrist member 818B. Similarly, the spacing between forearm 816A and forearm 816D is the same as the spacing between forearm 816B and forearm 816C. Forearm portions 816A and 816C lie on the same plane, with forearm portion 816D above the plane and forearm portion 816B below the plane.

[0077] As described with respect to robot 801 in Figures 9A-9C, end effectors 820A-820D can have a different pitch than end effectors 820E-820G and can be configured to retrieve heated or cooled substrates. In an embodiment, robot 802 can be configured to retrieve four unprocessed substrates simultaneously from four substrate supports in load lock 109A using end effectors 820A-820D of a first pitch. Alternatively, the robot can retrieve two substrates simultaneously through the slit valve and then move up or down in the Z direction (i.e., up and down) to retrieve two additional substrates through the slit valve. Robot 802 can then move to a processing chamber to retrieve processed substrates using end effectors 820E-820G of a second pitch and place four unprocessed substrates on empty substrate supports using end effectors 820A-820D.

[0078] The robot 802 is suitable for use in multi-substrate processing chambers having, for example, two to six substrate supports. In the use case shown in FIG. 1, the quadruple twin blade robot 802 can sequentially unload and reload substrates to and from the illustrated processing chamber 103 having four substrate supports or a processing chamber having six substrate supports (not shown). For example, in a use case where the processing chamber has six substrate supports, the robot 802 transports six unprocessed substrates with six of (for example) eight end effectors (820A-820F) and has two empty end effectors (for example) 820G, 820H. The empty end effectors 820G, 820H retrieve two processed substrates from the two substrate supports in the first of the processing chambers. The robot 802 then rotates the blade and places the two unprocessed substrates on the empty substrate supports in the first processing chamber using (for example) end effectors 820A, 820B. Next, using the empty end effectors 820A, 820B, the robot 802 retrieves two additional processed substrates from the two additional substrate supports and places two unprocessed substrates on the empty substrate support using end effectors 820C, 820D. Next, using the empty end effectors 820C, 820D, the robot 802 retrieves two additional processed substrates from the two additional substrate supports and places two unprocessed substrates on the empty substrate support using end effectors 820E, 820F. The robot 802 then returns to the load lock 109A and replaces the processed substrates with unprocessed substrates, two at a time. Using the empty end effectors 820E, 820F (for example), the robot 802 can retrieve two unprocessed substrates from the two substrate supports in the load lock 109A and place two processed substrates on the empty substrate support. The robot 802 can continue to exchange unprocessed substrates for processed substrates, two at a time, until six (for example) end effectors 820A, 820B, 820E-820H are holding unprocessed substrates and two (for example) end effectors 820C, 820D are empty. The robot 802 can then proceed to unload / reload the processing chambers.

[0079] 11, a method 1100 of transferring substrates to or from at least one processing chamber having an even number of substrate supports (e.g., at least two), such as in FIG. 1, is described. Method 1100 can be performed using any of the robotic devices described herein. In an embodiment, the robotic device includes four end effectors. Each end effector can be attached to a distal end of a corresponding twin wrist member of the robotic device. In an embodiment, the robotic device has four wrist members, each of which has two blades attached thereto.

[0080] The method 1100 includes, at block 1103, removing (e.g., simultaneously or in parallel) a first substrate on a first end effector and a second substrate on a second end effector from a first substrate support and a second substrate support by a first end effector and a second end effector, respectively, where the first end effector and the second end effector are attached to a robotic device. The method 1100 includes, at block 1105, placing (e.g., simultaneously or in parallel) a third substrate and a fourth substrate on the first substrate support and the second substrate support (respectively) by a third end effector and a fourth end effector, where the third end effector and the fourth end effector are attached to the robotic device.

[0081] The method 1100 includes removing a fifth substrate on the third end effector and a sixth substrate on the fourth substrate support by the third end effector and the fourth end effector (respectively) from the third substrate support and the fourth substrate support in the processing chamber, at block 1107. The method 1100 includes placing a seventh substrate on the third substrate support and placing an eighth substrate on the fourth substrate support by the fifth end effector and the sixth end effector, at block 1109, where the fifth end effector and the sixth end effector are attached to a robotic device.

[0082] As a result of the removal and placement, a third substrate, a fourth substrate, a seventh substrate, and an eighth substrate are placed in the processing chamber, with the first end effector, the second end effector, the third end effector, and the fourth end effector each holding one of the four processed substrates, and the fifth substrate and the sixth end effector being empty. The processed substrates may be removed from the processing chamber and held on the end effectors before being placed in a load lock or other processing chamber. In one embodiment, the first end effector and the second end effector can simultaneously or in parallel place processed substrates in the load lock and remove unprocessed substrates from the load lock, and the fifth end effector and the sixth end effector can simultaneously or in parallel place processed substrates in the load lock and remove unprocessed substrates from the load lock. Method 1100 describes a manufacturing system including multiple substrate supports handled as a unit and with a robot arm having multiple end effectors (e.g., an even number of end effectors). However, in an embodiment, method 1100 may also be performed to handle a processing chamber having six substrate supports, in which case there are eight end effectors (e.g., from a quadruple twin robotic apparatus). In such an embodiment, additional steps would be performed after block 1109 to pick up the ninth processed substrate and the tenth processed substrate, and then place the eleventh unprocessed substrate and the twelfth unprocessed substrate.

[0083] The systems, robotic apparatus, and methods disclosed herein can provide increased throughput and efficiency over electronic device manufacturing systems, robots, and methods known in the art. For example, a known put and get sequence performed by a known robotic apparatus to unload a set of four processed wafers from a quad processing chamber and load four unprocessed wafers into the quad processing chamber is as follows: Dual GET from load lock with first end effector and second end effector (pick up two substrates) (6.8 seconds) Rotate into chamber (5 seconds) Dual get from process chamber with third and fourth end effectors (7.2 seconds) Dual PUT to the processing chamber by the first end effector and the second end effector (place two substrates on two substrate holders (7.2 seconds) The chamber spindle rotates 180 degrees (0 seconds) Rotate to load lock (5 seconds) Dual put to load lock with third and fourth end effectors (6.8 seconds) Dual get from load lock with first end effector and second end effector (6.8 seconds) Rotate into chamber (5.0 seconds) Dual get from process chamber with third and fourth end effectors (7.2 seconds) Dual put with first end effector and second end effector into processing chamber (7.2 seconds) Rotate to load lock (5 seconds) Dual put to load lock with third and fourth end effectors (6.8 seconds) Total time: 76 seconds => 189.47 boards per hour.

[0084] By comparison, a suitable put-and-get sequence performed by the triple twin-yaw robotic apparatus shown in Figures 3A-3C, 6A-6C, and 9A-9C to unload a set of four processed wafers from a quad processing chamber and load four unprocessed wafers into the quad processing chamber is as follows: Dual GET from load lock with first end effector and second end effector (pick up two substrates) (6.8 seconds) Dual GET from load lock with 3rd and 4th end effectors (pick up 2 substrates) (6.8 seconds) Rotate into chamber (5 seconds) Dual get from process chamber with fifth and sixth end effectors (7.2 seconds) Dual put with third and fourth end effectors into processing chamber (7.2 seconds) Dual get from process chamber with third and fourth end effectors (7.2 seconds) Dual put with first end effector and second end effector into processing chamber (7.2 seconds) Rotate to load lock (5 seconds) Dual put with fifth and sixth end effectors into processing chamber (6.8 seconds) Dual put with third and fourth end effectors into processing chamber (6.8 seconds) Total time: 56 seconds => 257.14 boards per hour.

[0085] As shown in this example, by providing a robotic device having at least an even number of end effectors according to embodiments herein, it is possible to eliminate sequence steps that require returning to the load dock. By enabling the robotic device to fully exchange processed and unprocessed substrates within one cycle, the efficiency and substrate throughput of an electronic device processing system can be significantly improved.

[0086] In the above description, only certain exemplary embodiments are disclosed. For example, in certain exemplary embodiments, two stacked end effectors are described. Modifications of the above disclosed apparatus, systems, and methods that fall within the scope of the present disclosure will be readily apparent to those skilled in the art. For example, the embodiments described with reference to two stacked end effectors also apply to three, four, or more stacked end effectors. In addition, the embodiments are not limited to the robots, processing chamber structures, or transfer chamber structures shown and described herein. Correspondingly, although the present disclosure is disclosed in connection with certain exemplary embodiments, it should be understood that other embodiments may fall within the scope of the present disclosure as defined by the following claims.

Claims

1. 1. A robotic device, comprising: an arm including an inboard end and an outboard end, the inboard end configured to rotate about a shoulder axis; a first forearm configured for independent rotation relative to the arm about an elbow axis at the lateral end of the arm; a first wrist member configured for independent rotation relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the elbow axis, the first wrist member including a first end effector and a second end effector, the first wrist member configured to simultaneously manipulate a first plurality of substrates; a second forearm configured for independent rotation relative to the arm about the elbow axis; a second wrist member configured for independent rotation relative to the second forearm about a second wrist axis at a distal end of the second forearm opposite the elbow axis, the second wrist member including a third end effector and a fourth end effector, the second wrist member configured to simultaneously manipulate a second plurality of substrates; a third forearm configured for independent rotation relative to the arm about the elbow axis; a third wrist member configured for independent rotation relative to the third forearm about a third wrist axis at a distal end of the third forearm opposite the elbow axis, the third wrist member including a fifth end effector and a sixth end effector, the third wrist member configured to simultaneously manipulate a third plurality of substrates; A robot device comprising:

2. an arm drive motor configured to cause the independent rotation of the arms; a first forearm drive motor configured to cause the independent rotation of the first forearm; a second forearm drive motor configured to cause the independent rotation of the second forearm; a third forearm drive motor configured to cause the independent rotation of the third forearm; a first wrist drive motor configured to cause the independent rotation of the first wrist members; a second wrist drive motor configured to cause the independent rotation of the second wrist member; a third wrist drive motor configured to cause the independent rotation of the third wrist member; and The robotic device of claim 1 comprising a drive motor assembly including:

3. The drive motor assembly includes: an arm shaft at the shoulder axis; a common forearm shaft at said elbow axis; a first wrist shaft at the first wrist axis; a second wrist shaft at the second wrist axis; and a third wrist shaft at the third wrist axis, the drive motor assembly further comprising: a first drive pulley coupled to the first forearm shaft and configured to cause the independent rotation of the first forearm; a second drive pulley coupled to the second forearm shaft and configured to cause the independent rotation of the second forearm; a third drive pulley coupled to the first wrist shaft and configured to cause the independent rotation of the first wrist members; a fourth drive pulley coupled to the second wrist shaft and configured to cause the independent rotation of the second wrist members; a fifth drive pulley coupled to the third wrist shaft and configured to cause the independent rotation of the third wrist member; The robotic device of claim 2 , further comprising:

4. 2. The robotic device of claim 1, wherein a first spacing between the first wrist member and the second wrist member is less than a second spacing between the second wrist member and the third wrist member.

5. a fourth forearm configured for independent rotation relative to the arm about the elbow axis; 2. The robotic device of claim 1, further comprising: a fourth wrist member configured for independent rotation relative to the fourth forearm about a fourth wrist axis, the fourth wrist member including a seventh end effector and an eighth end effector, the fourth wrist member configured to simultaneously manipulate a fourth plurality of substrates.

6. 6. The robot device of claim 5, wherein when configured in a configuration adjusted to a folded current position, the first forearm, the second forearm, the third forearm, and the fourth forearm are one above the other, when configured in a configuration adjusted to a folded current position, the first end effector, the third end effector, the fifth end effector, and the seventh end effector are one above the other, and when configured in a configuration adjusted to a folded current position, the second end effector, the fourth end effector, the sixth end effector, and the eighth end effector are one above the other.

7. an arm drive motor configured to cause the independent rotation of the arms; a first forearm drive motor configured to cause the independent rotation of the first forearm; a second forearm drive motor configured to cause the independent rotation of the second forearm; a third forearm drive motor configured to cause the independent rotation of the third forearm; a fourth forearm drive motor configured to cause the independent rotation of the fourth forearm; a first wrist drive motor configured to cause the independent rotation of the first wrist members; a second wrist drive motor configured to cause the independent rotation of the second wrist member; a third wrist drive motor configured to cause the independent rotation of the third wrist member; and a fourth wrist drive motor configured to cause the independent rotation of the fourth wrist member; 7. The robotic device of claim 6 comprising a drive motor assembly including:

8. 8. The robotic device of claim 7, wherein the first forearm is coupled to the first wrist member at a first intermediate point of the first wrist member, the second forearm is coupled to the second wrist member at a second intermediate point of the second wrist member, and the third forearm is coupled to the third wrist member at a third intermediate point of the third wrist member.

9. 8. The robotic device of claim 7, wherein the first forearm is coupled to the first wrist member at a location offset from a first midpoint of the first wrist member, the second forearm is coupled to the second wrist member at a location offset from a second midpoint of the second wrist member, and the third forearm is coupled to the third wrist member at a location offset from a third midpoint of the third wrist member.

10. the first wrist member is generally U-shaped and includes a first wrist shaft centrally disposed at a bottom of the U-shape, the first end effector is disposed at a first distal end of the U-shape, and the second end effector is disposed at a second distal end of the U-shape; the second wrist member is generally U-shaped and includes a second wrist shaft centrally disposed at a bottom of the U-shape, the third end effector is disposed at a first distal end of the U-shape, and the fourth end effector is disposed at a second distal end of the U-shape; 2. The robotic device of claim 1, wherein the third wrist member is generally U-shaped and includes a third wrist shaft disposed at a bottom center of the U-shape, the fifth end effector is disposed at a first distal end of the U-shape and the sixth end effector is disposed at a second distal end of the U-shape.

11. 1. A robotic device, comprising: a first arm including a first inboard end and a first outboard end, the first inboard end configured to rotate about a shoulder axis; a first forearm at the lateral end of the first arm, the first forearm configured for independent rotation relative to the first arm about a first elbow axis; a first wrist member configured for independent rotation relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the first elbow axis, the first wrist member including a first end effector and a second end effector, the first wrist member configured to simultaneously manipulate a first plurality of substrates; a second arm including a second inboard end and a second outboard end, the second inboard end configured to rotate about the shoulder axis; a second forearm at the lateral end of the second arm configured for independent rotation relative to the second arm about a second elbow axis; a second wrist member configured for independent rotation relative to the second forearm about a second wrist axis at a distal end of the second forearm opposite the second elbow axis, the second wrist member including a third end effector and a fourth end effector, the second wrist member configured to simultaneously manipulate a second plurality of substrates; a third forearm at the lateral end of the second arm configured for independent rotation relative to the first arm about a third elbow axis; a third wrist member configured for independent rotation relative to the third forearm about a third wrist axis at a distal end of the third forearm opposite the third elbow axis, the third wrist member including a fifth end effector and a sixth end effector, the third wrist member configured to simultaneously manipulate a third plurality of substrates; A robot device comprising:

12. a first arm drive motor configured to cause the independent rotation of the first arms; a second arm drive motor configured to cause the independent rotation of the second arm; and a first forearm drive motor configured to cause the independent rotation of the first forearm; a second forearm drive motor configured to cause the independent rotation of the second forearm; a third forearm drive motor configured to cause the independent rotation of the third forearm; a first wrist drive motor configured to cause the independent rotation of the first wrist members; a second wrist drive motor configured to cause the independent rotation of the second wrist member; a third wrist drive motor configured to cause the independent rotation of the third wrist member; and 12. The robotic device of claim 11 comprising a drive motor assembly including:

13. The drive motor assembly includes: a common arm shaft at said shoulder axis; a first forearm shaft at the first elbow axis; a second forearm shaft at the second elbow axis; a first wrist shaft at the first wrist axis; a second wrist shaft at the second wrist axis; and a third wrist shaft at the third wrist axis, the drive motor assembly further comprising: a first drive pulley coupled to the first forearm shaft and configured to cause the independent rotation of the first forearm; a second drive pulley coupled to the second forearm shaft and configured to cause the independent rotation of the second forearm; a third drive pulley coupled to the third forearm shaft and configured to cause the independent rotation of the third forearm; a fourth drive pulley coupled to the first wrist shaft and configured to cause the independent rotation of the first wrist members; a fifth drive pulley coupled to the second wrist shaft and configured to cause the independent rotation of the second wrist members; a sixth drive pulley coupled to the third wrist shaft and configured to cause the independent rotation of the third wrist member; The robotic device of claim 12 further comprising:

14. A fourth forearm portion at the outer end of the second arm, the fourth forearm portion being configured for rotation about the second elbow axis independently of the second arm; and a fourth wrist member configured for independent rotation relative to the fourth forearm about a fourth wrist axis at a distal end of the fourth forearm opposite the second elbow axis, the fourth wrist member including a seventh end effector and an eighth end effector, the fourth wrist member configured to simultaneously manipulate a fourth plurality of substrates.

15. 15. The robotic device of claim 14, wherein when configured in a folded, present adjusted configuration, the first wrist member, the second wrist member, the third wrist member, and the fourth wrist member are one above the other.

16. 12. The robotic device of claim 11, wherein when configured in a folded, current adjusted configuration, the first arm and the second arm are angled relative to one another and the first forearm and the second forearm are angled relative to one another.

17. The robotic device according to claim 11 , wherein the first forearm and the third forearm are on the same plane.

18. 12. The robotic device of claim 11, wherein the first forearm is coupled to the first wrist member at a first intermediate point of the first wrist member, the second forearm is coupled to the second wrist member at a second intermediate point of the second wrist member, and the third forearm is coupled to the third wrist member at a third intermediate point of the third wrist member.

19. 12. The robotic device of claim 11, wherein the first forearm is coupled to the first wrist member at a location offset from a first midpoint of the first wrist member, the second forearm is coupled to the second wrist member at a location offset from a second midpoint of the second wrist member, and the third forearm is coupled to the third wrist member at a location offset from a third midpoint of the third wrist member.

20. An electronic device manufacturing apparatus comprising: a mainframe having a transfer chamber and at least two processing chambers; a first load lock coupled to the mainframe; a second load lock coupled to the mainframe; a robotic device configured to transfer substrates between the first load lock, the second load lock, and the at least two processing chambers; The robot device comprises: an arm including an inboard end and an outboard end, the inboard end configured to rotate about a shoulder axis; a first forearm configured for independent rotation relative to the arm about an elbow axis at the lateral end of the arm; a first wrist member configured for independent rotation relative to the first forearm about a first wrist axis at a distal end of the first forearm opposite the elbow axis, the first wrist member including a first end effector and a second end effector, the first wrist member configured to simultaneously manipulate a first plurality of substrates; a second forearm configured for independent rotation relative to the arm about the elbow axis; a second wrist member configured for independent rotation relative to the second forearm about a second wrist axis at a distal end of the second forearm opposite the elbow axis, the second wrist member including a third end effector and a fourth end effector, the second wrist member configured to simultaneously manipulate a second plurality of substrates; a third forearm configured for independent rotation relative to the arm about the elbow axis; a third wrist member configured for independent rotation relative to the third forearm about a third wrist axis at a distal end of the third forearm opposite the elbow axis, the third wrist member including a fifth end effector and a sixth end effector, the third wrist member configured to simultaneously manipulate a third plurality of substrates; An electronic device manufacturing apparatus comprising:

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