Method for controlling air conditioning system and humidification unit in clean room

Abstract

To provide an air conditioning system for a clean room and a control method for a humidifier unit, which reduces the power source required for a humidifier and widens the range of conditions for use in humidification. The present invention includes a humidifying unit 36 ​​and a cooling unit 37 disposed on a side surface 32 of a spatial passage C1, and a blower unit 38 disposed on a lower surface or a side surface of the spatial passage C1, The humidification unit 36 ​​includes a humidifier 39 and a motor damper 40, and humidifies the air from the target space S into the spatial passage. The air blowing unit 38 draws air from the target space S into the spatial passage via the humidifying unit 36 ​​and the cooling unit 37, and sends the purified air toward the target space S. The air sent out from the blower unit 38 is configured to head downward in the target space, collide with the floor surface F, flow along the floor surface F, and then rise in the target space S to be drawn into the spatial passage C1.

Description

[Technical field]

[0001] The present invention relates to an air conditioning system and a method for controlling a humidification unit in a clean room. [Background technology]

[0002] In recent industrial clean rooms, progress has been made in localizing the cleaning of areas where products are exposed within production equipment and areas where products are exposed during transport between processes, and clean rooms, which are the production environments in factories, are generally spaces without partitions.

[0003] Fig. 21 shows an example of an air conditioning system in a clean room. The clean room forms an underfloor space 2 below the target space S via a floor surface 1 of a grating floor, and air is supplied to the underfloor space 2 from an outdoor air conditioner 3, while air flows in from the target space S. The clean room also forms a ceiling space 5 above the target space S via a ceiling surface 4, and a fan filter unit (FFU) 6 consisting of a fan and a HEPA filter is arranged on the ceiling surface 4, so that conditioned air is supplied from the ceiling space 5 to the target space S. Furthermore, the clean room forms a return shaft 7 on the side, which communicates the underfloor space 2 and the ceiling space 5, so that air flows from the underfloor space 2 to the ceiling space 5.

[0004] A cooling device 8 and a humidifier 9 are arranged on the return shaft 7. The cooling device 8 is made up of a cooling coil 10 and a flow rate control valve 11, and is adapted to cool the air. The humidifier 9 is equipped with a nozzle 12 that sprays water, a water supply pipe 13 that supplies water to the nozzle 12, and a flow rate control valve 14 installed in the water supply pipe 13, and is adapted to spray water into the air.

[0005] Here, the humidifier 9 can be of the spray type, which sprays water into the air as fine droplets, or the evaporation type, which passes the air through a water-retaining body with water-retaining properties. The example humidifier in Figure 21 uses the spray type, and uses a two-fluid nozzle for the nozzle 12 of the humidifier 9, which mixes two fluids such as air and water to reduce the particle size of the droplets and evaporate as much water as possible. In industrial clean rooms where precise humidity control is required, the spray type humidifier 9 supplies a volume of water that is roughly equivalent to the amount of humidification by high-pressure water spray, and can also precisely control the amount of humidification by time proportional control or air volume proportional control.

[0006] Another example of the spray type humidifier 9, as shown in Figure 22, has a nozzle 16 disposed below the return shaft 15 to humidify the air, and has washer media 17 disposed upstream and downstream of the nozzle 16. The washer media 17 removes harmful substances and at the same time prevents water droplets from mixing into the conditioned air supplied to the clean room.

[0007] On the other hand, as shown in Fig. 23, the evaporation type humidifier 9 combines a water holding body 18 that supplies and holds water by dripping, with a pressurized humidifying fan 20 that blows air against the water holding body 18 to form a humidifying unit 19, and further includes a control device 21 that can control the rotation speed of the humidifying fan 20, and the rotation speed of the humidifying fan 20 is inverter controlled to vary the amount of air passing through the water holding body 18. As a result, energy saving effects are obtained through evaporation cooling compared to the spray type humidifier 9, and the water holding body 18 is always kept wet, and the amount of humidification can be controlled by controlling the amount of air passing through the device.

[0008] Prior art documents related to this type of spray-type humidifier include the following Patent Documents 1 and 2, and prior art documents related to evaporation-type humidifiers include the following Patent Document 3. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Patent No. 4334935 [Patent Document 2] JP 2007-178116 A [Patent Document 3] JP 2020-159653 A Summary of the Invention [Problem to be solved by the invention]

[0010] However, the spray type humidifier 9 has the problem that fine water droplets scatter and may adhere to the equipment and other devices in the target space S, so it must be installed in a large space such as inside a return shaft or under the floor, and there are limitations on where it can be installed. In addition, the spray type humidifier 9 has the problem that it requires a power source to turn the water into fine droplets.

[0011] While there are fewer restrictions on where the evaporative humidifier 9 can be installed, there is a problem in that the installation location requires a power source for the humidifying fan 20 and inverter control. Also, with evaporative humidifier 9, there is a lower limit to the rotation speed (30%, 15Hz) in the inverter control, and when humidification is requested below that limit, the humidifying fan is time-proportional controlled to be turned on and off, which makes the control of the humidifier 9 complicated and limits the range of conditions for use as humidifier. Furthermore, there is a problem in that the humidifying efficiency of evaporative humidifier 9 decreases when the air temperature is low, such as in a ballroom-type clean room.

[0012] In view of the above circumstances, the present invention aims to provide an air conditioning system for a clean room and a control method for a humidification unit that reduces the power source required for the humidifier and widens the range of conditions under which it can be used for humidification. [Means for solving the problem]

[0013] The present invention includes a spatial passage defined by a top surface, a side surface, and a bottom surface of a target space, a humidifying unit and a cooling unit disposed on the side surface of the spatial passage, and a blowing unit disposed on the bottom surface or the side surface of the spatial passage, The humidifying unit includes a humidifier having a water retaining body and a motor damper whose opening degree can be adjusted, and humidifies air from the target space into the space passage; The cooling unit cools air from the target space into the space passage; The air blowing unit draws air from the target space into a spatial passage through the humidifying unit and the cooling unit, and sends the purified air toward the target space; The air drawn into the air passage from the target space passes through the water-retaining body of the humidifier and is humidified by the evaporation of water in the water-retaining body without scattering water droplets; This relates to an air conditioning system for a clean room, characterized in that the air sent out from the blower unit toward the target space heads downward in the target space, collides with the floor surface, flows along the floor surface, and then rises up the target space and is drawn into a spatial passage.

[0014] In the air conditioning system for a clean room of the present invention, the humidification units may be disposed on both side surfaces of the spatial passage so as to sandwich the space therebetween.

[0015] In the air conditioning system for a clean room of the present invention, the humidifying units and the cooling units may be arranged alternately on the sides along the longitudinal direction of the spatial passage.

[0016] In the air conditioning system for a clean room of the present invention, the side surfaces include a side surface on one side located on both sides and a side surface on another side facing a different direction from the side surface on the one side, and the side surface on the one side and the side surface on the other side are configured to surround a spatial passage, The humidifying unit and the cooling unit may be arranged such that one is disposed on a side surface in one direction and the other is disposed on a side surface in the other direction.

[0017] In the air conditioning system for a clean room of the present invention, the humidifier of the humidification unit may be connected to a side surface so as to be positioned outside the spatial passage.

[0018] In the air conditioning system for a clean room according to the present invention, the humidifier of the humidification unit is provided with a distance set between the opening on the target space side and the water retaining body, The distance may be set to an interval that prevents water from splashing and falling downward into the target space when it falls from the water retaining body.

[0019] In the clean room air conditioning system of the present invention, the humidification unit may be configured to adjust the supply of water to the water retaining body and the opening degree of the motor damper, and to non-powerfully humidify the air as it is drawn into the spatial passage.

[0020] The present invention provides a space section that is partitioned by a top surface, a side surface, and a bottom surface of a target space, a humidifying unit that is arranged on the side surface of the space section, a cooling unit that is arranged on the top surface of the space section, and a blowing unit that is arranged on the bottom surface of the space section, the air conditioner being configured to be able to be placed on a floor surface, The humidifying unit includes a humidifier having a water retaining body and a motor damper capable of adjusting the opening degree, and humidifies air from the target space into the space portion; The cooling unit cools air from the target space into the space portion, The air blowing unit draws air from the target space into a space portion via the humidifying unit and the cooling unit, and sends the purified air downward into the target space, The air drawn into the air passage from the target space passes through the water-retaining body of the humidifier and is humidified by the evaporation of water in the water-retaining body without scattering water droplets; This relates to an air conditioning system for a clean room, characterized in that the air sent out from the blower unit toward the target space heads downward in the target space, collides with the floor surface, flows along the floor surface, and then rises up the target space and is drawn into the space portion.

[0021] The air conditioning system for a clean room of the present invention is a method for controlling a humidification unit using the air conditioning system for a clean room, comprising: When humidification is required, the motor damper is opened to 20% or more, and water supply to the water holding body is started. This is a control method for a humidification unit, characterized in that when there is no request for humidification, the opening of the motor damper is set to a range of 5% to 15%, the supply of water to the water-retaining body is stopped, and the water-retaining body is dried as air is drawn from the target space into the space passage.

[0022] In the method for controlling a humidification unit of the present invention, when there is no request for humidification, the opening degree of the motor damper may be set to a range of 5% to 15% after a predetermined time has elapsed, and the opening degree of the motor damper may be maintained. Effect of the Invention

[0023] The clean room air conditioning system and the humidification unit control method of the present invention have the excellent effects of reducing the power source required for the humidifier and widening the range of conditions under which the humidifier can be used. [Brief description of the drawings]

[0024] [Figure 1] 1 is a schematic perspective view showing an example of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Diagram 2] 1 is a schematic plan view showing an example of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Diagram 3] 1 is a schematic plan view showing an example of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention, illustrating a state in which cooled air and humidified air are mixed in a spatial passage. [Figure 4] 1 is a schematic front view showing an example of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Diagram 5] FIG. 2 is a schematic cross-sectional view showing an example of the configuration of a humidification unit used in the practice of the present invention. [Figure 6] 4 is a graph showing a control method for a humidifier unit according to an embodiment of the present invention, which controls proportionally the humidity and the motor damper opening degree. [Figure 7] 5 is a graph showing a control method for a humidification unit according to an embodiment of the present invention, illustrating control of a motor damper opening and an ON / OFF state of a water supply solenoid valve. [Figure 8] FIG. 4 is a flow chart showing an example of a control method for a humidification unit according to an embodiment of the present invention when a humidification request is made. [Figure 9] FIG. 4 is a flow chart showing an example of a method for controlling a humidification unit according to an embodiment of the present invention when humidification is not required. [Figure 10] FIG. 2 is a schematic plan view showing a state in which temperature and humidity are measured at each measurement point in an example of the configuration of a clean room air conditioning system according to an embodiment of the present invention. [Figure 11] 4 is a graph of pattern 1 showing the controllability of a humidification unit in an example of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Figure 12] 11 is a graph of pattern 2 showing the controllability of the humidification unit in an example of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Figure 13] 13 is a graph of pattern 3 showing the controllability of the humidification unit in an example of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Figure 14] 13 is a graph of pattern 4 showing the controllability of the humidification unit in an example of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Figure 15] 1A to 1C are schematic perspective views showing two examples of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Figure 16] 1A to 1C are schematic plan views showing two examples of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention, illustrating a state in which cooled air and humidified air are mixed in a spatial passage. [Figure 17] 1A to 1C are schematic diagrams showing three examples of configurations of air conditioning systems for clean rooms according to embodiments of the present invention. [Figure 18] 1A to 1C are schematic plan views showing three examples of configurations of air conditioning systems for clean rooms according to embodiments of the present invention, illustrating a state in which cooled air and humidified air are mixed in a spatial passage. [Figure 19] 1A to 1C are front views showing four examples of the configuration of an air conditioning system for a clean room according to an embodiment of the present invention. [Figure 20] 1A to 1C are side views showing four examples of configurations of air conditioning systems for clean rooms according to embodiments of the present invention. [Figure 21] FIG. 1 is a schematic diagram showing an example of a conventional air conditioning system for a clean room. [Figure 22]FIG. 11 is a schematic diagram showing another example of a conventional air conditioning system for a clean room. [Figure 23] FIG. 1 is a schematic cross-sectional view showing the configuration of a conventional evaporative humidification unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] A first embodiment of the present invention will now be described with reference to the accompanying drawings.

[0026] 1 to 4 show a first example of a configuration of an air conditioning system for a clean room according to the present invention. Here, the first example corresponds to claims 1 to 3, 5 to 6, and 9 to 10.

[0027] In the present embodiment, a spatial passage C1 is defined above the target space S1 by a top surface 31, a side surface 32, and a bottom surface 33, and the spatial passage C1 is formed with a plurality of passages (two in FIG. 2) extending away from the wall surface 34 of the target space S1 in a plan view, and one passage extending parallel to the wall surface 34 of the target space S1 and located at the tip side of the plurality of passages. Here, the spatial passage C1 may be one passage, three or more passages, or another arrangement may be used.

[0028] A top surface 31 of the spatial passage C1 is connected to a slab surface 35 of the target space S1, a side surface 32 of the spatial passage C1 has plate-like surfaces of a predetermined length on both sides, and a bottom surface 33 of the spatial passage C1 forms the lower ceiling surface of the target space S1.

[0029] A humidifying unit 36 ​​and a cooling unit 37 are arranged on the side surface 32 of the spatial passage C1. The humidifying unit 36 ​​and the cooling unit 37 are arranged on both side surfaces 32 so as to sandwich the space in the spatial passage on both sides. The humidifying unit 36 ​​and the cooling unit 37 are arranged alternately on the side surface 32 along the longitudinal direction of the spatial passage C1, and the cooling units 37 are located on both sides of the humidifying unit 36 ​​with a gap therebetween. Here, the humidifying unit 36 ​​and the cooling unit 37 may be arranged completely symmetrically across the space in the spatial passage, or may be arranged asymmetrically with a shift in the longitudinal direction as shown in FIG. 2. Furthermore, the humidifying unit 36 ​​and the cooling unit 37 may be arranged alternately all along the longitudinal direction of the spatial passage C1, or may be arranged alternately partially as shown in FIG. 2.

[0030] The air blowing units 38 are arranged on the lower surface 33 of the spatial passage C1. The lower surface 33 is formed of ceiling cells arranged in a lattice shape in a plan view, and the air blowing units 38 are installed at appropriate positions in the grids, which are the openings of the lattice of the lower surface 33. Here, the air blowing units 38 may be arranged on the entire surface of the lower surface 33, or may be arranged at predetermined intervals. Also, the grids on which the air blowing units 38 are not arranged may be closed by installing a closing panel. In FIG. 2, the air blowing units 38 are arranged without gaps in the longitudinal direction (extension direction) on the lower surface 33 of the spatial passage C1 extending from the wall surface 34 of the target space S1, and four air blowing units 38 are arranged in the lateral direction.

[0031] The humidifying unit 36 ​​includes an evaporative humidifier 39 and a motor damper 40 adjacent to the humidifier 39. The humidifier 39 is connected to the side surface 32 of the spatial passage C1 via the motor damper 40 so as to be located outside the spatial passage C1, and the motor damper 40 is fixed to the side surface 32 of the spatial passage C1. Here, the humidifier 39 and the motor damper 40 may be disposed in the opposite positions, the humidifier 39 may be fixed to the side surface 32 of the spatial passage C1, and the motor damper 40 may be connected to the side surface 32 of the spatial passage C1 via the humidifier 39 so as to be located outside the spatial passage C1. In addition, the humidifying unit 36 ​​and the motor damper 40 are preferably fixed by hanging them from the ceiling surface, but may be fixed to the side surface 32 of the spatial passage C1 or may be fixed by other fixing means.

[0032] The humidifier 39 has a box-shaped chamber 41 fixed to the motor damper 40 as shown in FIG. 5. The chamber 41 has an opening 42 on the target space side on the opposite side to the motor damper 40, and a drain pan 43 on the bottom. The chamber has a water-retaining body 44 located near the motor damper side. The water-retaining body 44 has a water-retaining material and is supplied with water from the outside through a water supply pipe 45. The drain pan 43 receives water that falls from the water-retaining body 44 and drains it outside the chamber through a drain pipe 46. A water supply solenoid valve 47 is arranged on the water supply pipe 45 and can be opened and closed by a signal from a control unit 48. Here, the humidifier 39 sets a distance L from the opening 42 on the target space side to the water-retaining body 44, and the distance L is set to an interval that prevents water from splashing from the drain pan 43 and falling downward into the target space S1 when it falls from the water-retaining body 44. Here, the distance L is preferably 100 mm to 300 mm, and particularly preferably 250 mm.

[0033] 5, the motor damper 40 has a box-shaped outer frame 49 that passes air from the humidifier side to the spatial passage C1, and is provided with a plurality of blades 50 inside the outer frame, the opening degree of which can be adjusted. An opening degree adjustment motor 51 is connected to the shaft of the blades 50, and the opening degree adjustment motor 51 opens and closes the blades 50 in response to a signal from the control unit 48, thereby adjusting the opening degree of the motor damper 40.

[0034] Here, the humidifying unit 36 ​​does not have a pressurized humidifying fan 20 (see Figure 23) that blows air as in the conventional example, nor does it have inverter control. Instead, it only adjusts the supply of water to the water holding body 44 using the water supply solenoid valve 47, and adjusts the opening of the motor damper 40 by opening and closing the blades 50, thereby non-poweredly humidifying the air.

[0035] The cooling unit 37 includes a dry coil through which a refrigerant flows, and is configured to cool the air flowing from the target space S1 into the spatial passage.

[0036] As shown in FIG. 4, the blower unit 38 is a fan filter unit (FFU) equipped with a fan 52 on the upper side of the housing and a HEPA filter 53 on the lower side, and draws air from the target space S1 into the spatial passage via the humidifier unit 36 ​​or the cooling unit 37, and sends the purified air toward the bottom of the target space S1.

[0037] Equipment a is operating on floor surface F within target space S1. Equipment a is a production device that processes objects (workpieces) such as base material wafers that form semiconductor integrated circuits, substrates for flat panel displays, or containers that can store multiple of these items. A ceiling transport device (not shown) for transporting the workpieces is provided near the ceiling within target space S1.

[0038] In the target space S1, the area where the workpiece may be exposed is set as the high cleanliness area, and the position below the blower unit 38 is set to be the high cleanliness area. To explain the high cleanliness area more specifically, it is a place where the workpiece d is transported by a transport vehicle c running on a transport rail b, the workpiece d in a pod is lowered from the transport vehicle c, and the workpiece d is handed over between the transport vehicle c and the load / unload section (not shown) of the equipment a, that is, the area around the transport rail b in a plan view. The other areas are set as non-high cleanliness areas, and the side surface 32 of the spatial passage C1 is set to be located above the boundary between the high cleanliness area and the non-high cleanliness area.

[0039] A vertical wall 54 extending downward is installed at the lower part of the side surface 32 of the spatial passage C1 so as to be located between the high-purity area and the non-high-purity area. The vertical wall 54 incompletely separates the high-purity area and the non-high-purity area so that the lower parts of both spaces are connected. In addition, the lower end of the vertical wall 54 is located above the equipment a so as not to impede the movement of workers to the side of the equipment a on the floor.

[0040] In the target space S1, as shown in Figure 4, equipment a is positioned so that its front part protrudes slightly into the high cleanliness area below the conveying rail, and the rest of the equipment, including the heat dissipation point, is located within the non-high cleanliness area.

[0041] Here, the target space S1 needs to be kept at a positive pressure to prevent dust from entering, and outdoor air is taken in from the outdoor air conditioner 22, adjusted to an appropriate temperature and humidity, and then supplied to the space under the floor. The outdoor air conditioner 22 is equipped with a pre-filter 23 for purifying the outdoor air, an outdoor air final filter 24, a pre-heating coil 25 for pre-heating the taken-in outdoor air, a cooling coil 26 for cooling the outdoor air downstream of the pre-heating coil 25, a heating coil 27 for heating the outdoor air downstream of the cooling coil 26, and an air supply fan 28 for creating an air flow. In addition, a part of the air in the target space S1 is appropriately exhausted to the outside by the operation of the exhaust fan 30.

[0042] The operation of the first embodiment of the present invention will be described.

[0043] The clean air sent from the spatial passage C1 toward the target space S1 by the fan 52 and HEPA filter 53 of the blower unit 38 becomes a downflow toward the bottom of the target space, forming a highly clean area, as shown in Fig. 4, and heads toward the floor surface F. The air then collides with the floor surface F and flows along the floor surface F to create a corer effect, after which the temperature of the air rises due to the exhaust heat from the equipment a, the air becomes contaminated with generated dust, and becomes an upflow that rises in the target space S1.

[0044] The rising air rises in the non-highly purified area of ​​the target space S1, and about half of the rising air is drawn from the humidifying unit 36 ​​into the spatial passage C1, where it is humidified by the evaporation of water in the water retaining body 44, becoming humidified air. At the same time, about half of the remaining rising air is drawn from the cooling unit 37 into the spatial passage C1, where it is cooled by the dry coil, becoming cooled air. The humidified air and the cooled air are mixed in the spatial passage as shown in Figure 3, and are further mixed by the fan 52 of the blower unit 38 while being purified by the HEPA filter 53, and the clean air is sent out from the spatial passage C1 toward the floor of the target space S1.

[0045] A method for controlling the humidification unit will now be described.

[0046] In the humidification unit 36, the humidity and motor damper opening are controlled by setting the upper limit of the motor damper opening (MD opening) [%] to 100 [%] and the lower limit to 10 [%] as shown in Figure 6, and the humidity set value (humidity SP) is set to the humidity [% RH]. Proportional control is set so that the motor damper opening is narrowed as the humidity increases and widened as the humidity decreases.

[0047] In the humidification unit 36, the motor damper opening and the water supply solenoid valve ON-OFF control are set with the motor damper opening (MD opening) [%] set to 20[%] and 15[%] as shown in Fig. 7, and the water supply solenoid valve 47 is turned ON when the motor damper opening reaches 20[%] due to the opening operation of the motor damper 40, and the water supply solenoid valve 47 is turned OFF when the motor damper opening reaches 15[%] due to the closing operation of the motor damper 40. Also, a delay timer of 60 seconds is set when the water supply is switched from ON to OFF in the control.

[0048] Next, the control flow of the humidification unit 36 ​​is shown. As shown in Fig. 8, when a humidification request is made by a humidity sensor or the like (not shown) in the target space S1 (step S1), the control unit 48 sends an open signal to the opening adjustment motor 51 to start the opening operation of the motor damper 40 (step S2), and the motor damper 40 is opened to 20% or more, preferably up to 20% (step S3). After the opening of the motor damper 40 reaches 20%, the control unit 48 sends an open signal to the water supply solenoid valve 47 of the water supply pipe 45 to open the water supply solenoid valve 47 (step S4), water is supplied to the water holding body 44 to hold water, and the water in the water holding body 44 is evaporated as air passes through, humidifying the air (step S5).

[0049] On the other hand, as shown in Fig. 9, if there is no humidification request by a humidity sensor or the like (not shown) in the target space S1 (step S11), the control unit 48 sends a close signal to the opening adjustment motor 51 to start the closing operation of the motor damper 40 (step S12), closes the motor damper 40, and sets the opening to a range of 5% to 15% (5% to 15%) (step S3). Then, after confirming that the duration of the predetermined opening has elapsed for 60 seconds (step S14) in order to prevent hunting, the control unit 48 sends a close signal to the water supply solenoid valve 47 of the water supply pipe 45 to close the water supply solenoid valve 47 (step S15), stops the supply of water to the water holding body 44, and stops humidification (step S16), and allows the water holding body 44 to dry naturally (step S17). After that, the process proceeds to a determination stage of whether there is a humidification request or whether to maintain the humidification stop (drying the water holding body) in consideration of the opening of the motor damper 40, etc. At this stage, it is determined whether the opening of the motor damper 40 is less than 20% (step S18), and if the opening of the motor damper 40 does not become less than 20% (if the opening of the motor damper 40 is 20% or more), it is determined that "humidification is requested" (step S19), and the control flow for "humidification is requested" shown in Fig. 8 is performed. On the other hand, if the opening of the motor damper 40 becomes less than 20% (if the opening of the motor damper 40 is less than 20%), it is then confirmed whether the opening of the motor damper 40 is 10% (step S20). If the opening of the motor damper 40 reaches 10%, the opening of the motor damper is maintained at 10% (step S21), and then the process returns to the drying stage of the water retention body 44 (step S17), and the determination of whether the opening of the motor damper 40 is 20% or more and humidification is requested, or whether the opening of the motor damper is maintained at 10%, is repeated. On the other hand, if the opening degree of the motor damper 40 has not reached 10%, the process returns to the drying stage of the water holding body 44 (step S17), and the determination is repeated as to whether the opening degree of the motor damper 40 is 20% or more and there is a request for humidification, or whether the opening degree of the motor damper 40 has reached 10% and the opening degree of the motor damper 40 is maintained at 10%.

[0050] Next, we will show the results of checking the controllability of the humidification unit (distribution of humidified air).

[0051] The humidification unit 36 ​​and the cooling unit 37 have different points where air is drawn from the target space S1 into the spatial passage C1, and we confirmed whether the humidified air and non-humidified air (cooled air) in the spatial passage were properly mixed and sent out by the blower unit (FFU) 38 to the target space S1, or whether they were sent out without being mixed. In the measurement method, the humidifier unit 36 ​​was operated with the motor damper 40 fully open and the water supply solenoid valve 47 open, and the temperature and humidity were measured using a temperature and humidity data logger. 10 shows a state in which the humidifying units 36 and the cooling units 37 are arranged alternately, with the cooling units 37 located on both sides of the humidifying unit 36. Also, measurement point (1) is located immediately below the blower unit (FFU) 38 near the outlet of the humidifying unit 36, measurement point (2) is located immediately below the blower unit (FFU) 38 on the vertical wall side, measurement point (3) is located immediately below the blower unit (FFU) 38 near the outlet of the humidifying unit 36, measurement point (4) is located immediately below the blower unit (FFU) 38 on the vertical wall side, and measurement point (5) is located immediately below the blower unit (FFU) 38 on the vertical wall side.

[0052] The measurement results, as shown in Table 1, showed no significant variation in temperature or humidity of the air sent from the fan unit (FFU) 38 to the target space S1, and it was clear that air with appropriate humidity was mixed. [Table 1]

[0053] Next, the controllability of the humidification unit 36 ​​(proportional control of the motor damper 40, and the open / close range of the water supply solenoid valve 47) was confirmed in a number of patterns, and the results are shown below.

[0054] [Pattern 1] (Motor damper 40 stable average opening 10-20%, indoor temperature setting (SP value) 45% → 48%) As shown in Fig. 11, after changing the set value of the indoor humidity (SP value) from 45% to 48%, the motor damper 40 is opened to an opening degree of more than 20%, the water supply solenoid valve 47 is opened to supply water to the water holding body 44, and the humidification operation is started. Then, the set value of the indoor humidity reaches 48%, and the water supply solenoid valve 47 is closed. Meanwhile, slight humidification continues by the air volume due to the minimum opening degree of the motor damper 40 and the water remaining in the water holding body 44 of the humidifier 39, and the temperature change after the water supply is stopped by closing the water supply solenoid valve 47 is gentle. Also, when the water remaining in the water holding body 44 dries out, the humidity decreases and the humidification operation is repeated again. The temperature change also changes within the temperature tolerance range, and the indoor humidity changes within the range of the set value ±2%, confirming good controllability.

[0055] [Pattern 2] (Motor damper 40 stable average opening 15-20%, indoor temperature setting (SP value) 45% → 50-54%) As shown in Fig. 12, the set value (SP value) of the indoor humidity was changed from 45% to 50%, and then gradually changed to 54% to increase the humidity in the target space S1. After the set value of the indoor humidity reached 54%, the motor damper 40 was closed, and the water supply solenoid valve 47 was closed at an opening of 15%. To prevent hunting, a timer was provided to close the water supply solenoid valve 47 after the motor damper 40 was kept at an opening of 15% or less for 60 seconds. However, the motor damper 40 opened before 60 seconds were reached, and the water supply solenoid valve 47 was not closed, resulting in a proportional control. The temperature change also progressed within the temperature tolerance range, and it was confirmed that the indoor humidity had a high degree of controllability of about ±1% of the set value.

[0056] [Pattern 3] (Average stable opening of motor damper 40: 20-30%, indoor temperature setting (SP value): 48% → 55% → 58%) As shown in Fig. 13, after changing the set value (SP value) of the indoor humidity from 48% to 55%, the motor damper 40 was opened and the water supply solenoid valve 47 was opened, the humidity in the target space S1 rose, reached the set value, and the motor damper 40 was stabilized by proportional control. Then, even after changing the set value (SP value) of the indoor humidity from 55% to 58% after the humidity was stabilized, the humidity in the target space S1 similarly rose and the motor damper 40 was stabilized by proportional control. This confirmed the ability of the indoor humidity to follow the setting change. In addition, the temperature change also changed within the temperature tolerance range, and the actual measurement of the indoor humidity changed within the range of the set value ±2%, confirming good controllability.

[0057] [Pattern 4] (The average opening of the motor damper 40 during stable operation is around 50%, and the indoor temperature setting value (SP value) is increased from 54% to 65%). As shown in Fig. 14, after changing the set value (SP value) of the indoor humidity from 54% to 65%, the motor damper 40 and the water supply solenoid valve 47 were opened, the humidity in the target space S1 rose, reached the set value, and the motor damper 40 stabilized by proportional control. In this pattern 4, the temperature change also progressed within the temperature tolerance range, and the actual measurement confirmed high controllability of the indoor humidity at about the set value ±1%.

[0058] Therefore, as shown in [Pattern 1] to [Pattern 4], it is clear that the motor damper 40 can be appropriately proportionally controlled based on the indoor humidity requirement of the target space S1, the amount of air passing through the humidifying unit 36 ​​can be adjusted, and the amount of humidification can be controlled. Furthermore, when there is no indoor humidity requirement of the target space S1 and the humidifier 39 is not used, the opening of the motor damper is minimized, the water supply solenoid valve 47 is closed, and air is passed through the water retention body 44, thereby making it possible to dry the water retention body 44.

[0059] As described above, the first example of the configuration of the air conditioning system for the clean room includes the spatial passage C1 defined by the top surface 31, the side surface 32, and the bottom surface 33 of the target space S1, the humidification unit 36 ​​and the cooling unit 37 disposed on the side surface 32 of the spatial passage C1, and the air blowing unit 38 disposed on the bottom surface 33 of the spatial passage C1. The humidification unit 36 ​​includes a humidifier 39 having a water retaining body 44 and a motor damper 40 whose opening degree can be adjusted, and humidifies and cools the air from the target space S1 into the spatial passage. The unit 37 cools the air from the target space S1 into the spatial passage, and the blower unit 38 draws the air from the target space S1 into the spatial passage through the humidifier unit 36 ​​and the cooling unit 37, and sends the purified air toward the target space S1. The air sent from the blower unit 38 toward the target space S1 is configured to move downward in the target space S1, collide with the floor surface F, flow along the floor surface F, and then rise up the target space S1 and be drawn into the spatial passage C1. In this way, the power source of the spray humidifier, the power of the evaporative fan of the evaporative humidifier, and inverter control, which were previously required, are no longer necessary, and the power source required for the humidifier 39 is reduced, and the air drawn into the spatial passage C1 is humidified, so that the range of use conditions for humidification can be expanded. In addition, the power source required for the humidifier 39 is reduced, so that the initial cost and running cost can be reduced. The humidifier unit 36 ​​can also be arranged in a return shaft with a pressure difference, rather than on the side surface 32 of the spatial passage C1. Furthermore, in the first example, air flows at a higher temperature between the spatial passage C1 and the target space S1 compared to when the air temperature is low, such as in a ballroom-type clean room, so the humidification efficiency of the evaporative humidifier 9 can be improved. Furthermore, in the first example, the air absorbs exhaust heat from the equipment a and is heated, so the humidification efficiency of the evaporative humidifier 9 can be further improved.

[0060] In addition, in the first example of the configuration of the clean room air conditioning system, when the humidification units 36 are arranged on both sides 32 so as to sandwich the space within the spatial passage on both sides, the humidified air and cooled air drawn into the spatial passage are easily mixed by the blower unit 38, thereby effectively reducing the power source required for the humidifier 39 and widening the range of operating conditions for humidification.

[0061] Furthermore, in the first example of the configuration of the clean room air conditioning system, when the humidifying units 36 and the cooling units 37 are arranged alternately on the side surface 32 along the longitudinal direction of the spatial passage C1, the humidified air and cooled air drawn into the spatial passage are mixed extremely easily by the blower unit 38, thereby significantly reducing the power source required for the humidifier 39 and widening the range of operating conditions for humidification.

[0062] Furthermore, in the first example of the configuration of the clean room air conditioning system, when the humidifier 39 of the humidification unit 36 ​​is connected to the side surface 32 so as to be positioned outside the spatial passage C1, the humidification unit 36 ​​can be maintained from the outside compared to when the humidifier 39 is positioned inside the spatial passage or inside the return shaft, thereby expanding the range of usage conditions for humidification and improving ease of maintenance.

[0063] Furthermore, in the first example of the configuration of the clean room air conditioning system, the humidifier 39 of the humidifying unit 36 ​​is set at a distance L from the opening 42 on the target space side to the water retention body 44, and the distance L is set at an interval that prevents water from splashing and falling downward in the target space S1 when it falls from the water retention body 44.Even in an arrangement in which equipment a is located below, the humidifying unit 36 ​​can be used normally without adding any other components, thereby further expanding the range of operating conditions for humidification.

[0064] Furthermore, in the first example of the clean room air conditioning system configuration, if the humidification unit 36 ​​is configured to adjust the supply of water to the water retention body 44 and the opening of the motor damper 40 so as to non-powerfully humidify the air as it is drawn into the spatial passage, this minimizes the power source required for the humidifier 39 and widens the range of conditions under which it can be used for humidification.

[0065] This is a control method for the humidification unit 36 ​​using the air conditioning system of a clean room. When there is a request for humidification, the opening degree of the motor damper 40 is set to 20% or more, and the supply of water to the water holding body 44 is started. When there is no request for humidification, the opening degree of the motor damper 40 is set to a range of 5% to 15%, the supply of water to the water holding body 44 is stopped, and the water holding body 44 is dried as air is drawn from the target space S1 to the space passage C1. In this way, the humidification unit 36 ​​can be operated stably, the power source required for the humidifier 39 can be reduced, and the range of use conditions for humidification can be expanded. In addition, since the water holding body 44 is suitably dried naturally, it is possible to prevent the generation of odors and mold caused by long-term water retention.

[0066] Furthermore, in the control method of the humidification unit 36, if no humidification is required, the opening degree of the motor damper 40 is set to a range of 5% to 15% after a predetermined time has elapsed, and the opening degree of the motor damper is maintained, thereby preventing hunting and enabling the humidification unit 36 ​​to operate more stably, thereby reducing the power source required for the humidifier 39 and expanding the range of operating conditions for humidification.

[0067] A second embodiment of the present invention will now be described with reference to the accompanying drawings. The second embodiment corresponds to claims 1, 4 to 6, 9 to 10.

[0068] 15 and 16 show a second embodiment of the air conditioning system for a clean room according to the present invention, which is a modification of the shape of the spatial passage C1 of the first embodiment and the arrangement of the humidifying unit 36, the cooling unit 37, and the blower unit 38. Also, the same reference numerals as in the first embodiment have the same configuration.

[0069] In the second example, a spatial passage C2 is defined above the target space S by a top surface 31, a side surface 32, and a bottom surface 33, and the side surface 32 consists of a side surface 32a in one direction located on both sides and a side surface 32b in the other direction extending perpendicularly (in a different direction) from the side surface in the one direction, and is configured so that the side surface 32a in one direction and the other side surface 32b surround the spatial passage C2.

[0070] The humidifying unit 36 ​​is disposed on one side of one side 32a, and the cooling unit 37 is disposed on both sides of the other side 32b. The humidifying unit 36 ​​is located at both ends of one side 32a, and the cooling unit 37 is located on the other side 32b so as to be adjacent to the humidifying unit 36 ​​at a right angle. Here, the humidifying unit 36 ​​and the cooling unit 37 may be disposed in reverse, three or more humidifying units 36 may be disposed in succession on one side 32a, or the cooling unit 37 may be disposed on one side 32a and lined up with the humidifying unit 36. Furthermore, a plurality of cooling units 37 may be disposed in succession on the other side 32b, or the humidifying unit 36 ​​may be disposed on the other side 32b and lined up with the cooling unit 37.

[0071] The air blowing unit 38 is disposed on the other side of one side surface 32a so as to face both sides of the humidifying unit 36. A plurality of air blowing units 38 are disposed along the longitudinal direction of the spatial passage C2. Here, the air blowing units 38 may be disposed over the entire surface of the other side of one side surface 32a, or may be disposed at predetermined intervals.

[0072] Here, the humidifying unit 36, the cooling unit 37 and the blower unit 38 have the same structures as in the first example, and further have the same control method.

[0073] The operation of the second embodiment of the present invention will be described.

[0074] The clean air sent laterally from the spatial passage C2 toward the target space S1 by the fan 52 and HEPA filter 53 (see FIG. 4) of the air blowing unit 38 is redirected by the slab surface (ceiling surface) and wall surfaces of the target space so that the air flows downward from the lateral direction of the target space S1. Here, the clean air sent laterally may be redirected by other airflow direction changing plates or airflow direction changing members (not shown) instead of by the slab surface and wall surfaces.

[0075] The clean air that turns downward forms a downflow as shown in Figure 4, forming a highly clean area, and heads toward floor F. The air then collides with floor F, flows along floor F to create a corer effect, and then becomes air containing dust generated by the exhaust heat of equipment a, forming an upflow that rises in target space S.

[0076] The rising air rises in the non-highly purified area of ​​the target space S, and about half of the rising air is drawn from the humidifying unit 36 ​​into the spatial passage C2, where it is humidified by the evaporation of water in the water holding body 44, becoming humidified air. At the same time, about half of the remaining rising air is drawn from the cooling unit 37 into the spatial passage C2, where it is cooled by the dry coil, becoming cooled air. The humidified air and the cooled air are mixed in the spatial passage as shown in Figure 16, and are further mixed by the fan 52 of the blower unit 38 while being purified by the HEPA filter 53 (see Figure 4), and are sent out as clean air from the spatial passage C2 into the target space S.

[0077] The humidification and control by the humidification unit 36 ​​are performed in the same manner as in the first example.

[0078] As described above, the second embodiment of the air conditioning system for a clean room can provide the same effects as the first embodiment.

[0079] In the second example, side surface 32 comprises side surfaces 32a located on both sides in one direction and side surface 32b in the other direction facing in a different direction from side surface 32a in one direction, and is configured so that side surface 32a in one direction and side surface 32b in the other direction surround spatial passage C2. One of humidifying unit 36 ​​and cooling unit 37 is arranged on side surface 32a in one direction and the other on side surface 32b in the other direction, so that humidified air from humidifying unit 36 ​​and cooled air from cooling unit 37 easily mix, reducing the power source required for the humidifier and humidifying the air drawn into the spatial portion, thereby expanding the range of usage conditions for humidification.

[0080] Hereinafter, a third embodiment of the present invention will be described with reference to the accompanying drawings. The third embodiment corresponds to claims 1 to 3, 5 to 6, and 9 to 10.

[0081] 17 and 18 show a third embodiment of the air conditioning system for a clean room according to the present invention, which is obtained by modifying the arrangement of the humidifying unit 36, cooling unit 37, and blower unit 38 from the second embodiment. Also, the same reference numerals as in the first and second embodiments have the same configuration.

[0082] In the third example, a humidifying unit 36 ​​and a cooling unit 37 are arranged on the side surface 32 of the spatial passage C3. The humidifying units 36 and the cooling units 37 are arranged alternately on the side surface 32 along the longitudinal direction of the spatial passage C3, and the cooling units 37 are located on both sides of the humidifying unit 36 ​​with a gap therebetween.

[0083] A blower unit 38 is disposed on the lower surface 33 of the spatial passage C3. The lower surface 33 is formed of ceiling cells arranged in a lattice shape in a plan view, and the blower unit 38 is installed at an appropriate position on a grid, which is an opening of the lattice of the lower surface 33. Here, the blower units 38 may be disposed over the entire surface of the lower surface 33, or may be disposed at a predetermined interval.

[0084] Here, the humidifying unit 36, the cooling unit 37 and the blower unit 38 have the same structures as in the first example, and further have the same control method.

[0085] The operation of the third embodiment of the present invention will be described.

[0086] The clean air sent from the spatial passage C3 toward the target space S1 by the fan 52 and HEPA filter 53 (see FIG. 4) of the air blowing unit 38 becomes a downflow toward the bottom of the target space S1, forming a highly clean area, and heads toward the floor surface F. The air then collides with the floor surface F and flows along the floor surface F to create a corer effect, after which it becomes air containing dust generated by the exhaust heat of the equipment a, and becomes an upflow that rises in the target space S.

[0087] The rising air rises in the non-highly purified area of ​​the target space S, and about half of the rising air is drawn from the humidifying unit 36 ​​into the spatial passage C3, where it is humidified by the evaporation of water in the water retaining body 44, becoming humidified air. At the same time, about half of the remaining rising air is drawn from the cooling unit 37 into the spatial passage C3, where it is cooled by the dry coil, becoming cooled air. The humidified air and the cooled air are mixed in the spatial passage as shown in Figure 18, and are further mixed by the fan 52 of the blower unit 38 while being purified by the HEPA filter 53, and the clean air is sent out from the spatial passage C1 toward the floor of the target space S.

[0088] The humidification and control by the humidification unit 36 ​​are performed in the same manner as in the first example.

[0089] As described above, the third embodiment of the air conditioning system for a clean room can provide the same effects as the first embodiment.

[0090] A fourth embodiment of the present invention will now be described with reference to the accompanying drawings. The fourth embodiment corresponds to claims 8 to 10.

[0091] 19 and 20 show a second embodiment of the air conditioning system for a clean room according to the present invention, in which the same reference numerals as in the first embodiment denote the same parts. The air conditioning system for a clean room in this embodiment also includes an outdoor air conditioner 22 (see FIG. 4) like the first embodiment.

[0092] In this embodiment, a space C4 is defined in the target space S by a top surface 61, a side surface 62, and a bottom surface 63, and the space C4 is provided with a stand frame 64 at its lower portion so that it can be placed on a floor surface F. Here, a plurality of space portions C4 may be provided in the target space S, or a single space portion C4 may be provided. Furthermore, when a plurality of space portions C4 are provided, the arrangement is not particularly limited, but it is preferable that they are arranged in a row.

[0093] A humidifying unit 36 ​​is disposed on a side surface 62 of the space C4. The humidifying units 36 are disposed on both side surfaces 62 so as to sandwich the space in the spatial passage on both sides. A cooling unit 65 is disposed on a top surface 61 of the space C4. A blowing unit 66 is disposed on a bottom surface 63 of the space C4.

[0094] The humidifying unit 36, like the first example, is equipped with an evaporative humidifier 39 and a motor damper 40 adjacent to the humidifier 39, and is adapted to humidify the air. The cooling unit 65 is equipped with a dry coil through which a refrigerant flows, and is adapted to cool the air from the target space S into the spatial passage. The blower unit 66 is a device called a fan filter unit (FFU) or the like, which is equipped with a fan 67 on the upper side of the housing and a HEPA filter 68 on the lower side, and is adapted to draw air from the target space S into the spatial passage through the humidifying unit 36 ​​and the cooling unit 65, and to send the purified air downward into the target space S.

[0095] The operation of the fourth embodiment of the present invention will be described.

[0096] The clean air sent from the space C4 downward into the target space S by the fan 67 and HEPA filter 68 of the blower unit 66 flows down toward the floor F. The air then collides with the floor F and flows along the floor F to create a corer effect, after which it becomes air containing dust generated by the exhaust heat of the equipment a (see Figures 1 and 3), and flows up in the target space S as an upflow.

[0097] The rising air rises in the target space S, and roughly half of the rising air is drawn into the space C4 from the humidifying unit 36 ​​located on the side surface 32 of the space C4, where it is humidified by the water retaining body 44 to become humidified air. At the same time, roughly half of the remaining air is drawn into the space C4 from the cooling unit 65 located on the top surface 31 of the space C4, where it is cooled by the dry coil to become cooled air. In the space passage, the humidified air and the cooled air are mixed by the fan 67 of the blower unit 66 and purified by the HEPA filter 68, and the clean air is sent out from the space C4 toward the floor of the target space S.

[0098] The humidification and control by the humidification unit 36 ​​are performed in the same manner as in the first example.

[0099] As described above, the fourth example of the configuration of the air conditioning system for the clean room includes a space C4 defined by a top surface 61, a side surface 62, and a bottom surface 63 of the target space S, a humidifying unit 36 ​​arranged on the side surface 62 of the space C4, a cooling unit 65 arranged on the top surface 61 of the space C4, and a blower unit 66 arranged on the bottom surface 63 of the space C4, and is configured to be able to be installed on a floor surface F. The humidifying unit 36 ​​includes a humidifier 39 having a water retaining body 44 and a motor damper 40 whose opening degree can be adjusted, and humidifies the target space S. The cooling unit 65 humidifies the air flowing from the target space S into the space passage, the blower unit 66 draws the air in the target space S into the space passage via the humidifier unit 36 ​​and the cooling unit 65, and sends the purified air downward in the target space S. The air sent from the blower unit 66 toward the target space S collides with the floor surface F while moving downward in the target space S, flows along the floor surface F, and then rises in the target space S and is drawn into the space C4. In this way, the power source of the spray humidifier, the power of the evaporative fan of the evaporative humidifier, and inverter control, which were previously required, are no longer necessary, and the power source required for the humidifier 39 is reduced, and the air drawn into the space C4 is humidified, so that the range of use conditions for humidification can be expanded. In addition, the same action and effect as in the first example can be obtained.

[0100] The fourth example of the configuration of the clean room air conditioning system is configured as a free-standing type, which allows for a high degree of freedom in placement and allows for easy rearrangement, thereby ideally widening the range of conditions for use as a humidifier.

[0101] Incidentally, the control method of the air conditioning system and the humidification unit for the clean room of the present invention is not limited to the above-mentioned embodiment, and it goes without saying that various modifications can be made without departing from the spirit and scope of the present invention. [Explanation of symbols]

[0102] 31 Top 32 Side 33 Bottom surface 34 Wall 36 Humidification unit 37 Cooling Unit 38 Blower unit 39 Humidifier 40 Motor Damper 42 Aperture 44 Water Retention Body 47 Water supply solenoid valve 61 Top 62 Side 63 Bottom surface 64 Stand Frame 65 Cooling Unit 66 Blower unit C1 space passage C2 space passage C3 Space Passage C4 Space F Floor L distance S target space

Claims

1. The present invention includes a spatial passage defined by a top surface, a side surface, and a bottom surface of a target space, a humidifying unit and a cooling unit disposed on the side surface of the spatial passage, and a blowing unit disposed on the bottom surface or the side surface of the spatial passage, The humidifying unit includes a humidifier having a water retaining body and a motor damper whose opening degree can be adjusted, and humidifies air from the target space into the space passage; The cooling unit cools air from the target space into the space passage; The air blowing unit draws air from the target space into a spatial passage through the humidifying unit and the cooling unit, and sends the purified air toward the target space; The air drawn into the air passage from the target space passes through the water-retaining body of the humidifier and is humidified by the evaporation of water in the water-retaining body without scattering water droplets; This air conditioning system for a clean room is characterized in that the air sent out from the blower unit toward the target space heads downward in the target space, collides with the floor surface, flows along the floor surface, and then rises up the target space to be drawn into a spatial passage.

2. 2. The air conditioning system for a clean room according to claim 1, wherein the humidification units are disposed on both sides of the spatial passage so as to sandwich the space therebetween.

3. 2. The air conditioning system for a clean room according to claim 1, wherein the humidifying units and the cooling units are alternately arranged on the sides along the longitudinal direction of the spatial passage.

4. The side surfaces include side surfaces in one direction located on both sides and side surfaces in another direction facing in a direction different from the side surfaces in the one direction, and are configured so that the side surfaces in the one direction and the side surfaces in the other direction surround a spatial passage, 2. The air conditioning system for a clean room according to claim 1, wherein one of the humidifying unit and the cooling unit is disposed on one side surface and the other is disposed on the other side surface.

5. 2. The air conditioning system for a clean room according to claim 1, wherein the humidifier of the humidification unit is connected to a side surface so as to be located outside the spatial passage.

6. The humidifier of the humidifying unit sets a distance from an opening on the target space side to a water retaining body, 2. The air conditioning system for a clean room according to claim 1, wherein the distance is set to an interval that prevents water from splashing and falling downward into the target space when it falls from the water retaining body.

7. 2. The air conditioning system for a clean room according to claim 1, wherein the humidification unit adjusts the supply of water to the water retaining body and adjusts the opening degree of the motor damper, and is configured to non-powerfully humidify the air as it is drawn into the spatial passage.

8. The air conditioner is provided with a space section defined by a top surface, a side surface, and a bottom surface of a target space, a humidifying unit arranged on the side surface of the space section, a cooling unit arranged on the top surface of the space section, and a blowing unit arranged on the bottom surface of the space section, and is configured to be able to be placed on a floor surface, The humidifying unit includes a humidifier having a water retaining body and a motor damper capable of adjusting the opening degree, and humidifies air from the target space into the space portion; The cooling unit cools air from the target space into the space portion, The air blowing unit draws air from the target space into a space portion via the humidifying unit and the cooling unit, and sends the purified air downward into the target space, The air drawn into the air passage from the target space passes through the water-retaining body of the humidifier and is humidified by the evaporation of water in the water-retaining body without scattering water droplets; This clean room air conditioning system is characterized in that the air sent out from the blower unit toward the target space heads downward in the target space, collides with the floor surface, flows along the floor surface, and then rises up the target space and is drawn into the space portion.

9. A method for controlling a humidification unit using the air conditioning system for a clean room according to any one of claims 1 to 8, comprising the steps of: When humidification is required, the motor damper is opened to 20% or more, and water supply to the water holding body is started. This control method for a humidification unit is characterized in that, when there is no request for humidification, the opening degree of the motor damper is set within a range of 5% to 15%, the supply of water to the water holding body is stopped, and the water holding body is dried as air is drawn from the target space into the space passage.

10. 10. The method for controlling a humidifier unit according to claim 9, further comprising the steps of: if there is no request for humidification, after a predetermined time has elapsed, setting the opening degree of the motor damper to a range of 5% to 15% and maintaining the opening degree of the motor damper.

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