Vibration Generator

Abstract

To provide a vibration generator which can prolong its service life and suppress vibration in a direction other than a desired vibration direction.SOLUTION: A vibration generator 101 includes: guide means GM which guides a movable body MB within a body HS so as to be reciprocative; driving means DM which is constituted of a magnetic flux source 5 and a coil 4; an upper side magnetic member 1MU which is arranged on an upper side of the movable body MB as a part of the body HS; and a lower side magnetic member 1MD which is arranged on a lower side of the movable body MB as a part of the body HS. Each of four magnets included in the magnetic flux source 5 is arranged so that an N pole portion and an S pole portion are adjacent to each other in a vertical direction (Z-axis direction). The vibration generator 101 is configured so that a magnitude of magnetic suction force applied between the magnetic flux source 5 and the upper side magnetic member 1MU and a magnitude of magnetic suction force applied between the magnetic flux source 5 and the lower side magnetic member 1MD are different from each other.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a vibration generating device. [Background technology]

[0002] Conventionally, a linear vibration actuator (vibration generator) that supports a movable element (movable body) in a housing so that it can vibrate is known (see Patent Document 1). This vibration generator has a rail member with a guide groove that guides the movable body so that the movable body can move along a desired vibration direction (left and right direction). In addition, in this vibration generator, a plurality of magnets are attached to the movable body. The plurality of magnets are configured so that the magnetization directions of two adjacent magnets are along the vertical direction and are opposite to each other. That is, the two adjacent magnets are arranged so that when the upper side of one magnet is the N pole, the upper side of the other magnet is the S pole. In addition, in this vibration generator, the magnetic attraction force acting between the magnet attached to the movable body and the ceiling wall part of the housing made of a magnetic material and the magnetic attraction force acting between the magnet attached to the movable body and the bottom wall part of the housing are configured to be approximately equal in magnitude. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 151232 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned configuration, the attractive forces on the upper side and the lower side of the movable body cancel each other out, so the movable body is not pressed excessively against either the upper side or the lower side of the rail member (guide groove). Therefore, the above-mentioned configuration can prevent the movable body from being pressed excessively against either the upper side or the lower side of the rail member (guide groove) by applying an attractive force only on either the upper side or the lower side of the movable body, which would cause excessive wear of the contact portion between the movable body and the rail member, and can thus prevent the life of the vibration generator from being shortened.

[0005] However, in the above-described configuration, while the movable body is not pressed excessively toward either the upper or lower side of the rail member (guide groove), there is a risk that it will vibrate vertically in response to slight vibrations of the housing.

[0006] It is therefore desirable to provide a vibration generator that can extend the life of the device and prevent vibration in directions other than the desired vibration direction. [Means for solving the problem]

[0007] A vibration generator according to an embodiment of the present invention includes a fixed body, a movable body accommodated in the fixed body, guide means for guiding the movable body so that the movable body can reciprocate in a left-right direction within the fixed body, a magnetic flux source attached to the movable body, and a magnetic flux source attached to the fixed body. Perpendicular to the left and right A driving means including coils extending in the front-rear direction and arranged in parallel in the left-right direction; In the up-down direction perpendicular to the left-right and front-back directions, an upper magnetic member disposed above the movable body as a part of the fixed body; In the up-down direction perpendicular to the left-right and front-back directions, a lower magnetic member that is arranged below the movable body as a part of the fixed body, the magnetic flux source including one or more magnets, each of the one or more magnets included in the magnetic flux source being arranged such that an N-pole portion and an S-pole portion are adjacent to each other in the vertical direction, the guiding means includes a fixed side end face set along the left-right direction on the fixed body, and a movable side end face set along the left-right direction on the movable body, the fixed side end face includes an upper fixed side end face and a lower fixed side end face, the movable side end face includes an upper movable side end face facing the upper fixed side end face and a lower movable side end face facing the lower fixed side end face, the movable body is sandwiched in the vertical direction between the upper fixed side end face set on a member constituting the fixed body and arranged above the movable body, and the lower fixed side end face set on another member constituting the fixed body and arranged below the movable body,The magnitude of the magnetic attraction force acting between the magnetic flux source and the upper magnetic member and the magnitude of the magnetic attraction force acting between the magnetic flux source and the lower magnetic member are configured to be different from each other. Effect of the Invention

[0008] The vibration generator described above can have a long life and can be prevented from vibrating in a direction other than the desired vibration direction. [Brief description of the drawings]

[0009] [Figure 1A] FIG. 2 is a perspective view of a vibration generating device. [Figure 1B] FIG. 2 is a top view of the vibration generating device. [Diagram 2] FIG. [Diagram 3] FIG. [Figure 4] 13 is a bottom view of the movable body housed inside the side cover. FIG. [Diagram 5] FIG. 2 is a left side view of the vibration generator. [Figure 6] 13 is a perspective view of a lower front ball set, a lower front ball guide, and a lower front rail. FIG. [Figure 7] 13 is a front view of the lower front ball set, the lower front ball guide, and the lower front rail. FIG. [Figure 8] FIG. 2 is a cross-sectional view of the vibration generating device. [Figure 9] FIG. 2 is a perspective view of a vibration generating device. [Figure 10A] FIG. 2 is a perspective view of a coil fixed to a housing. [Figure 10B] FIG. 2 is a top view of a coil fixed to a housing. [Figure 11] FIG. 2 is a cross-sectional view of the cover, the coil, and the magnetic flux source. [Figure 12] FIG. 2 is a top view of the lower cover, the lower coil, and the magnetic flux source. [Figure 13A] FIG. 2 is a cross-sectional view of the vibration generating device. [Figure 13B]FIG. 2 is a cross-sectional view of the vibration generating device. [Figure 14] FIG. 11 is an exploded perspective view of another configuration example of the vibration generator. [Figure 15A] FIG. 11 is a cross-sectional view of another example of the configuration of the vibration generator. [Figure 15B] FIG. 11 is a cross-sectional view of another example of the configuration of the vibration generator. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, a vibration generator 101 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1A is a perspective view of the vibration generator 101, and Fig. 1B is a top view of the vibration generator 101. Fig. 2 is an exploded perspective view of the vibration generator 101.

[0011] X1 in FIG. 1A represents one direction of the X axis constituting the three-dimensional orthogonal coordinate system, and X2 represents the other direction of the X axis. Y1 represents one direction of the Y axis constituting the three-dimensional orthogonal coordinate system, and Y2 represents the other direction of the Y axis. Similarly, Z1 represents one direction of the Z axis constituting the three-dimensional orthogonal coordinate system, and Z2 represents the other direction of the Z axis. In this embodiment, the X1 side of the vibration generator 101 corresponds to the front side (front side) of the vibration generator 101, and the X2 side of the vibration generator 101 corresponds to the rear side (rear side) of the vibration generator 101. The Y1 side of the vibration generator 101 corresponds to the left side of the vibration generator 101, and the Y2 side of the vibration generator 101 corresponds to the right side of the vibration generator 101. The Z1 side of the vibration generator 101 corresponds to the upper side of the vibration generator 101, and the Z2 side of the vibration generator 101 corresponds to the lower side of the vibration generator 101. The same applies to the other figures, and also to the other members constituting the vibration generator 101.

[0012] The vibration device VE has a control unit CTR and a vibration generator 101. The vibration generator 101 has a housing HS as a fixed body, a movable body MB housed in the housing HS, a coil 4 attached to the housing HS, and a guide means GM for guiding the movable body MB so as to be able to reciprocate along the left-right direction within the housing HS. The control unit CTR is connected to an input terminal (not shown) provided on an insulating substrate (not shown) fixed to the housing HS. The dashed line in FIG. 1A shows a schematic diagram of an electrical connection between the control unit CTR and the input terminal provided on the insulating substrate. In this embodiment, the control unit CTR is provided outside the housing HS, but may be provided inside the housing HS.

[0013] The housing HS is an example of a fixed body, and as shown in Fig. 1A, has a substantially rectangular parallelepiped outer shape and is configured so that the areas of the faces (upper and lower faces) parallel to the XY plane are the widest. In this embodiment, the housing HS is made up of a cover 1 and a side cover 2, and is configured so as to completely cover the members housed therein. However, the housing HS may be configured so that a part of the members housed therein is exposed.

[0014] As shown in Fig. 2, the cover 1 includes an upper cover 1U that forms the top surface of the housing HS, and a lower cover 1D that forms the bottom surface of the housing HS. Both the upper cover 1U and the lower cover 1D are flat plate-shaped members. In this embodiment, the upper cover 1U and the lower cover 1D have the same shape and size. That is, the upper cover 1U and the lower cover 1D are configured as the same part.

[0015] The upper cover 1U is formed to be symmetrical from front to back and from left to right. The same is true for the lower cover 1D. The upper cover 1U and the lower cover 1D are disposed to be symmetrical from top to bottom.

[0016] Specifically, the upper cover 1U includes an upper magnetic member 1MU and an upper frame body 1WU. Similarly, the lower cover 1D includes a lower magnetic member 1MD and a lower frame body 1WD. In the following, the upper magnetic member 1MU and the lower magnetic member 1MD are also referred to as magnetic member 1M, and the upper frame body 1WU and the lower frame body 1WD are also referred to as frame body 1W.

[0017] The magnetic member 1M is one of the members constituting the biasing means BM, and is disposed away from the magnetic flux source 5, another member constituting the biasing means BM, so as to be magnetically attracted to the magnetic flux source 5. The biasing means BM is a means for generating a force that moves the movable body MB, which is located at a position displaced from the center of the movable range of the movable body MB, toward the center of the movable range.

[0018] In this embodiment, the magnetic member 1M is fixed to the frame 1W so as not to come into contact with the magnetic flux source 5 constituting the movable body MB and so as to magnetically hold the magnetic flux source 5 at a predetermined position. When the magnetic flux source 5 is displaced from the predetermined position, the magnetic member 1M acts to pull the magnetic flux source 5 back to the predetermined position due to a magnetic attraction force between the magnetic flux source 5 and the magnetic member 1M based on the magnetic force generated by the magnetic flux source 5. The predetermined position is, for example, the position of the magnetic flux source 5 when the movable body MB is located at the center of the movable range.

[0019] The frame 1W is a non-magnetic member for supporting the magnetic member 1M. In this embodiment, the frame 1W is made of austenitic stainless steel. However, the frame 1W may be made of synthetic resin. The magnetic member 1M is bonded to the frame 1W with an adhesive.

[0020] The side cover 2 is formed to constitute the side surface of the housing HS. In this embodiment, the side cover 2 is formed of a non-magnetic material (austenitic stainless steel). However, the side cover 2 may be formed of a synthetic resin. Specifically, the side cover 2 has four side plate portions formed in a flat plate shape. More specifically, the four side plate portions include a first side plate portion 2A1 and a third side plate portion 2A3 that face each other, and a second side plate portion 2A2 and a fourth side plate portion 2A4 that are perpendicular to the first side plate portion 2A1 and the third side plate portion 2A3 and face each other, as shown in FIG. 2.

[0021] The cover 1 is fastened to the side cover 2 by fastening members. Specifically, the fastening members include upper fastening members and lower fastening members. More specifically, the upper fastening members include the first upper male screw 3U1 to the fourth upper male screw 3U4, and the lower fastening members include the first lower male screw 3D1 to the fourth lower male screw 3D4. Hereinafter, for convenience of explanation, the first upper male screw 3U1 to the fourth upper male screw 3U4 are also referred to as upper fastening members 3U, the first lower male screw 3D1 to the fourth lower male screw 3D4 are also referred to as lower fastening members 3D, and the upper fastening members 3U and the lower fastening members 3D are also referred to as fastening members 3.

[0022] In this embodiment, the fastening members 3 are male screws configured to be operable with a Phillips head screwdriver, and configured to engage with female screw holes formed in the four corners of the side cover 2. The female screw holes formed in the four corners of the side cover 2 are formed to penetrate the corners of the side cover 2 along the Z-axis direction, and include a first female screw hole 2T1 to a fourth female screw hole 2T4. The upper cover 1U (upper frame 1WU) is fastened to the side cover 2 by four upper fastening members 3U (first upper male screw 3U1 to fourth upper male screw 3U4). Specifically, the first upper male screw 3U1 is screwed into the upper opening of the first female screw hole 2T1 formed in the right front corner of the side cover 2, the second upper male screw 3U2 is screwed into the upper opening of the second female screw hole 2T2 formed in the left front corner of the side cover 2, the third upper male screw 3U3 is screwed into the upper opening of the third female screw hole 2T3 formed in the left rear corner of the side cover 2, and the fourth upper male screw 3U4 is screwed into the upper opening of the fourth female screw hole 2T4 formed in the right rear corner of the side cover 2. Similarly, the lower cover 1D (lower frame 1WD) is fastened to the side cover 2 by four lower fastening members 3D (the first lower male screw 3D1 to the fourth lower male screw 3D4). Specifically, the first lower male screw 3D1 is screwed into the lower opening of the first female screw hole 2T1 formed in the right front corner of the side cover 2, the second lower male screw 3D2 is screwed into the lower opening of the second female screw hole 2T2 formed in the left front corner of the side cover 2, the third lower male screw 3D3 is screwed into the lower opening of the third female screw hole 2T3 formed in the left rear corner of the side cover 2, and the fourth lower male screw 3D4 is screwed into the lower opening of the fourth female screw hole 2T4 formed in the right rear corner of the side cover 2.

[0023] The coil 4 is a member constituting the driving means DM. In this embodiment, the coil 4 is a wound coil formed by winding a conductive wire whose surface is covered with an insulating material, and is configured to be fixed to the cover 1. For clarity, FIG. 2 omits the detailed winding state of the conductive wire. This is also true for other figures illustrating the coil 4. The coil 4 may be a laminated coil, a thin film coil, or the like. Specifically, the coil 4 includes an upper coil 4U fixed to the lower (Z2 side) surface of the upper cover 1U (upper magnetic member 1MU) and a lower coil 4D fixed to the upper (Z1 side) surface of the lower cover 1D (lower magnetic member 1MD). The upper coil 4U includes a first upper coil 4U1, a second upper coil 4U2, and a third upper coil 4U3 that are juxtaposed along the Y-axis direction and connected in series, and the lower coil 4D includes a first lower coil 4D1, a second lower coil 4D2, and a third lower coil 4D3 that are juxtaposed along the Y-axis direction and connected in series. Note that, hereinafter, the first upper coil 4U1 and the first lower coil 4D1 are also referred to as the left coil 4L, the second upper coil 4U2 and the second lower coil 4D2 are also referred to as the center coil 4C, and the third upper coil 4U3 and the third lower coil 4D3 are also referred to as the right coil 4R.

[0024] The control unit CTR is configured to be able to control the movement of the movable body MB. In this embodiment, the control unit CTR is a device including an electronic circuit and a non-volatile storage device, and is configured to be able to control the direction and magnitude of the current flowing through the coil 4. The control unit CTR may be configured to control the direction and magnitude of the current flowing through the coil 4 in response to a control command from an external device such as a computer, or may be configured to control the direction and magnitude of the current flowing through the coil 4 without receiving a control command from an external device.

[0025] The movable body MB is configured to be able to vibrate the housing HS. In this embodiment, the movable body MB is configured to be able to vibrate the housing HS by reciprocating while being accommodated in the housing HS.

[0026] Here, the details of the movable body MB will be described with reference to Fig. 3 and Fig. 4. Fig. 3 is a diagram showing an example of the configuration of the movable body MB. Specifically, the upper diagram of Fig. 3 is a perspective view of the entire movable body MB, and the lower diagram of Fig. 3 is an exploded perspective view of the movable body MB. Fig. 4 is a bottom view of the movable body MB housed inside the side cover 2.

[0027] The movable body MB is configured to include a magnetic flux source 5 and a magnetic flux source holding member 6. Specifically, the movable body MB is configured to be able to reciprocate (vibrate) with respect to the housing HS along a vibration axis VA (see the upper diagram in FIG. 3) extending in a predetermined direction.

[0028] The magnetic flux source 5 is a member constituting the driving means DM and is configured to generate magnetic flux. In this embodiment, the magnetic flux source 5 is a permanent magnet, and includes a left magnet 5L, a central magnet 5C, and a right magnet 5R. In FIG. 3, for clarity, the permanent magnet as the magnetic flux source 5 is provided with a coarse cross pattern on the N pole portion and a fine cross pattern on the S pole portion. The same is true in other figures.

[0029] The central magnet 5C includes a first central magnet 5C1 and a second central magnet 5C2. The left magnet 5L, the first central magnet 5C1, the second central magnet 5C2, and the right magnet 5R are all permanent magnets magnetized with two poles, and are arranged side by side along the Y-axis direction.

[0030] The magnetic flux source holding member 6 is configured to hold the magnetic flux source 5. In this embodiment, the magnetic flux source holding member 6 is a rectangular frame-shaped member made of a non-magnetic material, and has a main body 6M and a protruding portion 6G as shown in FIG. 2. The protruding portion 6G is integrally formed so as to protrude from the main body 6M in the front-rear direction. The protruding portion 6G includes a rear protruding portion 6GB and a front protruding portion 6GF as shown in the lower diagram of FIG. 5 (the diagram below the block arrow) described later. The dimension M1 of the protruding portion 6G (rear protruding portion 6GB) in the up-down direction is smaller than the dimension M2 of the main body 6M in the up-down direction.

[0031] Specifically, as shown in Fig. 3 and Fig. 4, the magnetic flux source holding member 6 is configured to hold the left magnet 5L, the first central magnet 5C1, the second central magnet 5C2, and the right magnet 5R at approximately equal intervals along the Y-axis direction. The non-magnetic member constituting the magnetic flux source holding member 6 is, for example, a non-magnetic metal. Preferably, a metal with a relatively large specific gravity is used as the non-magnetic metal. This is to increase the vibration force caused by the movable body MB by increasing the weight of the movable body MB. However, the non-magnetic member may be made of a synthetic resin.

[0032] The driving means DM is an example of a vibration force generating unit, and is configured to vibrate the movable body MB along the vibration axis VA. In this embodiment, the driving means DM is composed of a coil 4 and a magnetic flux source 5, and is configured to vibrate the movable body MB (magnetic flux source 5) along the vibration axis VA by utilizing an electromagnetic force acting between the coil 4 and the magnetic flux source 5 according to the direction and magnitude of the current supplied to the coil 4 through the control unit CTR.

[0033] Next, the guide means GM will be described with reference to FIG. 5. FIG. 5 is a left side view of the vibration generator 101. In FIG. 5, for clarity, illustration of members other than the cover 1, the magnetic flux source holding member 6, the ball set 7, the ball guide 8, and the rail 9 is omitted. Specifically, the upper view of FIG. 5 (above the block arrow) is a left side view of the cover 1, the magnetic flux source holding member 6, the ball set 7, the ball guide 8, and the rail 9 in an exploded state. The lower view of FIG. 5 is a left side view of the cover 1, the magnetic flux source holding member 6, the ball set 7, the ball guide 8, and the rail 9 in an assembled state. In the upper and lower views of FIG. 5, for clarity, a fine dot pattern is applied to the upper magnetic member 1MU and the lower magnetic member 1MD, a coarse dot pattern is applied to the rail 9, and an even coarser dot pattern is applied to the magnetic flux source holding member 6.

[0034] The guide means GM is configured to guide the movable body MB so as to be capable of reciprocating along the left-right direction (Y-axis direction) within the housing HS. In this embodiment, the guide means GM includes a ball set 7, a ball guide 8, and a rail 9, as shown in Fig. 2. The guide means GM is configured such that a protruding portion 6G formed on a magnetic flux source holding member 6 constituting the movable body MB is sandwiched between a pair of rails 9 arranged above and below via the ball set 7, and is guided by the pair of rails 9 so as to be freely movable in the left-right direction.

[0035] Specifically, the protrusion 6G formed on the magnetic flux source holding member 6 includes a front protrusion 6GF extending in the Y-axis direction opposite the first side plate portion 2A1 of the side cover 2, and a rear protrusion 6GB extending in the Y-axis direction opposite the third side plate portion 2A3 of the side cover 2.

[0036] The rail 9 is an example of a fixed body, and includes an upper rail 9U arranged between the upper cover 1U and the protruding portion 6G, and a lower rail 9D arranged between the movable body MB and the lower cover 1D, as shown in Fig. 5. The upper rail 9U includes an upper front rail 9UF extending in the Y-axis direction facing the first side plate portion 2A1 of the side cover 2, and an upper rear rail 9UB extending in the Y-axis direction facing the third side plate portion 2A3 of the side cover 2. Similarly, the lower rail 9D includes a lower front rail 9DF extending in the Y-axis direction facing the first side plate portion 2A1 of the side cover 2, and a lower rear rail 9DB extending in the Y-axis direction facing the third side plate portion 2A3 of the side cover 2.

[0037] The ball set 7 is an example of a rolling member, and is composed of a plurality of spherical balls. Specifically, as shown in the upper view of FIG. 5, the ball set 7 includes an upper ball set 7U arranged between the upper rail 9U and the overhanging portion 6G, and a lower ball set 7D arranged between the lower rail 9D and the overhanging portion 6G. The upper ball set 7U includes an upper front ball set 7UF arranged between the upper front rail 9UF and the front overhanging portion 6GF, and an upper rear ball set 7UB arranged between the upper rear rail 9UB and the rear overhanging portion 6GB. Similarly, the lower ball set 7D includes a lower front ball set 7DF arranged between the lower front rail 9DF and the front overhanging portion 6GF, and a lower rear ball set 7DB arranged between the lower rear rail 9DB and the rear overhanging portion 6GB.

[0038] The ball guide 8 is a member for maintaining the intervals between the plurality of balls constituting the ball set 7. The ball guide 8 may be omitted. The ball guide 8 includes an upper ball guide 8U for maintaining the intervals between the plurality of balls constituting the upper ball set 7U, and a lower ball guide 8D for maintaining the intervals between the plurality of balls constituting the lower ball set 7D. The upper ball guide 8U includes an upper front ball guide 8UF for maintaining the intervals between the plurality of balls constituting the upper front ball set 7UF, and an upper rear ball guide 8UB for maintaining the intervals between the plurality of balls constituting the upper rear ball set 7UB. Similarly, the lower ball guide 8D includes a lower front ball guide 8DF for maintaining the intervals between the plurality of balls constituting the lower front ball set 7DF, and a lower rear ball guide 8DB for maintaining the intervals between the plurality of balls constituting the lower rear ball set 7DB.

[0039] Here, the relationship between the ball set 7, the ball guide 8, and the rail 9 will be described with reference to Figs. 6 to 8. Fig. 6 is a perspective view of the lower front ball set 7DF, the lower front ball guide 8DF, and the lower front rail 9DF. Specifically, the upper view of Fig. 6 (above the block arrow) is an exploded perspective view of the lower front ball set 7DF, the lower front ball guide 8DF, and the lower front rail 9DF, and the lower view of Fig. 6 (below the block arrow) is an assembled perspective view of the lower front ball set 7DF, the lower front ball guide 8DF, and the lower front rail 9DF. Fig. 7 is a front view of the lower front ball set 7DF, the lower front ball guide 8DF, and the lower front rail 9DF. Specifically, the upper view of FIG. 7 (above the block arrow) is an exploded front view of the lower front ball set 7DF, the lower front ball guide 8DF, and the lower front rail 9DF, and the lower view of FIG. 7 (below the block arrow) is an assembled front view of the lower front ball set 7DF, the lower front ball guide 8DF, and the lower front rail 9DF. FIG. 8 is a cross-sectional view of the vibration generator 101. Specifically, the upper view of FIG. 8 is a cross-sectional view of the vibration generator 101 in a plane parallel to the XZ plane including the dashed line VIIIA-VIIIA shown in FIG. 1B, as viewed from the Y1 side as indicated by the arrow. The lower view of FIG. 8 is an enlarged view of the range R1 surrounded by the dashed line in the upper view of FIG. 8. Note that the following explanation referring to Figures 6 to 8 relates to the positional relationship between the lower front ball set 7DF, the lower front ball guide 8DF, and the lower front rail 9DF, but it also applies to the positional relationship between the upper front ball set 7UF, the upper front ball guide 8UF, and the upper front rail 9UF, the positional relationship between the upper rear ball set 7UB, the upper rear ball guide 8UB, and the upper rear rail 9UB, and the positional relationship between the lower rear ball set 7DB, the lower rear ball guide 8DB, and the lower rear rail 9DB.

[0040] Specifically, the lower front ball set 7DF includes five balls (first ball 7DF1 to fifth ball 7DF5) as shown in Figures 6 and 7. The five balls (first ball 7DF1 to fifth ball 7DF5) are arranged in five through holes (first through hole HL1 to fifth through hole HL5) formed in the lower front ball guide 8DF.

[0041] The five balls (first ball 7DF1 to fifth ball 7DF5) are disposed between a V-groove 6VDF (see the upper diagrams of Figs. 4 and 5) formed in the lower end surface of the front overhanging portion 6GF of the magnetic flux source holding member 6 and a V-groove 9VDF formed in the upper end surface of the lower front rail 9DF. In this case, the lower end surface of the front overhanging portion 6GF functions as the movable side end surface MS (lower movable side end surface MSD), and the upper end surface of the lower front rail 9DF functions as the fixed side end surface FS (lower fixed side end surface FSD).

[0042] As shown in the upper view of FIG. 7 and the lower view of FIG. 8, the lower front ball guide 8DF is configured so that its thickness HT1 in the Z-axis direction is smaller than the diameter DT2 of each of the first ball 7DF1 to the fifth ball 7DF5. Specifically, as shown in the lower view of FIG. 8, the thickness HT1 of the lower front ball guide 8DF is configured so that it is smaller than the gap GP1 between the lower end surface of the front overhang portion 6GF and the upper end surface of the lower front rail 9DF when the lower front ball set 7DF is sandwiched between the lower end surface of the front overhang portion 6GF and the upper end surface of the lower front rail 9DF. Also, as shown in the lower view of FIG. 8, the diameter DT1 of each of the five through holes (the first through hole HL1 to the fifth through hole HL5) is configured so that it is slightly larger than the diameter DT2 of each of the five balls (the first ball 7DF1 to the fifth ball 7DF5). However, the diameter DT1 of each of the five through holes (first through hole HL1 to fifth through hole HL5) may be configured to be slightly smaller than the diameter DT2 of each of the five balls (first ball 7DF1 to fifth ball 7DF5).

[0043] Each ball constituting the lower front ball set 7DF is sandwiched between the V groove 6VDF and the V groove 9VDF so as to contact the V groove 6VDF at two contact points and to contact the V groove 9VDF at two contact points, as shown in the lower diagram of Fig. 8. The lower diagram of Fig. 8 shows a state in which the third ball 7DF3 contacts the V groove 6VDF at contact points CP1 and CP2, and contacts the V groove 9VDF at contact points CP3 and CP4.

[0044] In this embodiment, the five through holes (first through hole HL1 to fifth through hole HL5) of the lower front ball guide 8DF are spaced apart so that the intervals between any two adjacent balls among the five balls (first ball 7DF1 to fifth ball 7DF5) constituting the lower front ball set 7DF are the same. Specifically, as shown in the lower diagram of Fig. 6 and the lower diagram of Fig. 7, the lower front ball guide 8DF is formed so that the interval CL1 between the first through hole HL1 and the second through hole HL2, the interval CL2 between the second through hole HL2 and the third through hole HL3, the interval CL3 between the third through hole HL3 and the fourth through hole HL4, and the interval CL4 between the fourth through hole HL4 and the fifth through hole HL5 are all equal.

[0045] Next, the guide means GM will be described in detail with reference to FIG. 9. FIG. 9 is a perspective view of the vibration generator 101. In FIG. 9, for clarity, illustration of members other than the cover 1, the magnetic flux source 5, the magnetic flux source holding member 6, the ball set 7, the ball guide 8, and the rail 9 is omitted. Specifically, the upper view of FIG. 9 is a perspective view of the cover 1, the magnetic flux source 5, the magnetic flux source holding member 6, the ball set 7, the ball guide 8, and the rail 9 in an assembled state. The lower view of FIG. 9 is a perspective view of the lower cover 1D, the lower rail 9D, and the magnetic flux source holding member 6 in an assembled state. In the upper view of FIG. 9 and the lower view of FIG. 9, for clarity, a coarse dot pattern is applied to the magnetic flux source holding member 6, and a fine dot pattern is applied to the rail 9.

[0046] The tip (lower end) of the upper front rail 9UF and the tip (upper end) of the lower front rail 9DF are combined so as to face each other across the front protrusion 6GF, as shown in the lower figure of Figure 5, and the tip (lower end) of the upper rear rail 9UB and the tip (upper end) of the lower rear rail 9DB are combined so as to face each other across the rear protrusion 6GB, as shown in the lower figure of Figure 5.

[0047] In this embodiment, as shown in the upper view of FIG. 9, the tip of the upper front rail 9UF is arranged to face the upper end surface of the front overhang portion 6GF with a small gap therebetween, and the tip of the lower front rail 9DF is arranged to face the lower end surface of the front overhang portion 6GF with a small gap therebetween. That is, the front overhang portion 6GF is configured to have substantially the same shape as the space formed between the tip of the upper front rail 9UF and the tip of the lower front rail 9DF. Specifically, the front overhang portion 6GF is formed as one substantially rectangular parallelepiped-shaped protrusion that extends continuously over most of the entire length of the magnetic flux source holding member 6 in the longitudinal direction. However, the front overhang portion 6GF may be a combination of a plurality of protrusions that are intermittently arranged along the longitudinal direction of the magnetic flux source holding member 6. The same applies to the rear overhang portion 6GB. In this embodiment, the magnetic flux source holding member 6 is formed to be symmetrical in the front-rear direction. That is, the front overhang portion 6GF and the rear overhang portion 6GB are formed to have the same shape and the same size, although the front overhang portion 6GF and the rear overhang portion 6GB may have different shapes.

[0048] As described above, the overhanging portion 6G is configured to be movable between the upper rail 9U and the lower rail 9D in the direction indicated by the bidirectional arrow AR1 in each of the upper and lower views of Fig. 9. Specifically, the overhanging portion 6G is configured so that the upper ball set 7U is sandwiched between a V groove 6VU (see V groove 6VUB and V groove 6VUF in the upper view of Fig. 5) formed in its upper end surface which functions as the movable side end surface MS (upper movable side end surface MSU) and a V groove 9VU (V groove 9VUB and V groove 9VUF in the upper view of Fig. 5) formed in the tip end surface (lower end surface) of the upper rail 9U which functions as the fixed side end surface FS (upper fixed side end surface FSU). The protruding portion 6G is configured so that the lower ball set 7D is sandwiched between a V groove 6VD (see V groove 6VDB and V groove 6VDF in the upper diagram of FIG. 5) formed on its lower end surface which functions as the movable side end surface MS (lower movable side end surface MSD) and a V groove 9VD (V groove 9VDB and V groove 9VDF in the upper diagram of FIG. 5) formed on the tip surface (upper end surface) of the lower rail 9D which functions as the fixed side end surface FS (lower fixed side end surface FSD). The protruding portion 6G is configured so that it can reciprocate in the left-right direction (Y-axis direction) while rolling the upper ball set 7U between the V groove 6VU and the V groove 9VU and rolling the lower ball set 7D between the V groove 6VD and the V groove 9VD.

[0049] With this configuration, the magnetic flux source holding member 6 is restricted in its movement in the front-rear and up-down directions, while being allowed to move smoothly in the left-right direction.

[0050] Next, the details of the driving means DM will be described with reference to Figs. 10A, 10B, 11, and 12. Figs. 10A and 10B are detailed views of the coil 4 fixed to the housing HS. Specifically, Fig. 10A is a perspective view of the lower coil 4D fixed to the lower cover 1D. Fig. 10B is a top view of the lower coil 4D fixed to the lower cover 1D. In Figs. 10A and 10B, for clarity, a coarse dot pattern is applied to the lower coil 4D, and a fine dot pattern is applied to the lower magnetic member 1MD and the lower rail 9D. Fig. 11 is a view of a cross section of the vibration generator 101 in a plane parallel to the YZ plane including the dashed line XI-XI shown in Fig. 1B, as viewed from the X1 side as indicated by the arrow. Specifically, the upper part of Fig. 11 is a cross-sectional view of the cover 1, the coil 4, and the magnetic flux source 5 when the movable body MB (magnetic flux source 5) is located at the center of the movable range. The middle part of FIG. 11 is a cross-sectional view of the cover 1, the coil 4, and the magnetic flux source 5 when the movable body MB (magnetic flux source 5) is located at the right end of the movable range. The lower part of FIG. 11 is a cross-sectional view of the cover 1, the coil 4, and the magnetic flux source 5 when the movable body MB (magnetic flux source 5) is located at the left end of the movable range. FIG. 12 is a top view of the magnetic flux source 5 that can move in the left-right direction (Y-axis direction) above the lower coil 4D fixed to the lower cover 1D. Specifically, the upper part of FIG. 12 is a top view of the lower cover 1D, the lower coil 4D, and the magnetic flux source 5 when the movable body MB (magnetic flux source 5) is located at the center of the movable range. The middle part of FIG. 12 is a top view of the lower cover 1D, the lower coil 4D, and the magnetic flux source 5 when the movable body MB (magnetic flux source 5) is located at the right end of the movable range. The lower part of FIG. 12 is a top view of the lower cover 1D, the lower coil 4D, and the magnetic flux source 5 when the movable body MB (magnetic flux source 5) is located at the left end of the movable range.

[0051] The coil 4, which is one of the components of the driving means DM, includes an upper coil 4U fixed to the lower (Z2 side) surface of the upper cover 1U, and a lower coil 4D fixed to the upper (Z1 side) surface of the lower cover 1D, as shown in Figure 2.

[0052] As shown in Figures 10A and 10B, the lower coil 4D includes three coils (a first lower coil 4D1, a second lower coil 4D2, and a third lower coil 4D3) fixed with adhesive to the upper surface (the surface on the Z1 side) of the lower cover 1D. The following description with reference to Figures 10A and 10B relates to the lower coil 4D, but also applies to the upper coil 4U in the same manner. This is because the upper cover 1U and the lower cover 1D have the same shape and size, and the upper coil 4U and the lower coil 4D have the same shape and size.

[0053] Each of the three coils constituting the lower coil 4D is wound so as to surround the lower internal space 1DP as shown in Fig. 10B. Specifically, the first lower coil 4D1 is wound so as to surround the lower-left internal space 1DPL, the second lower coil 4D2 is wound so as to surround the lower-center internal space 1DPC, and the third lower coil 4D3 is wound so as to surround the lower-right internal space 1DPR.

[0054] The first lower coil 4D1 includes a left bundled wire portion 4D1L located on the left side (Y1 side) of the lower-left internal space 1DPL and extending along the lower-left internal space 1DPL, and a right bundled wire portion 4D1R located on the right side (Y2 side) of the lower-left internal space 1DPL and extending along the lower-left internal space 1DPL. The bundled wire portion refers to a portion where the conductive wires constituting the coil 4 extend in the front-rear direction (X-axis direction).

[0055] 10B, for clarity, the left bundled wire portion 4D1L and the right bundled wire portion 4D1R of the first lower coil 4D1 are given a finer dot pattern than the dot pattern given to other parts of the first lower coil 4D1. The same applies to the second lower coil 4D2 and the third lower coil 4D3.

[0056] The second lower coil 4D2 includes a left bundled wire portion 4D2L located on the left side (Y1 side) of the central lower internal space 1DPC and extending along the central lower internal space 1DPC, and a right bundled wire portion 4D2R located on the right side (Y2 side) of the central lower internal space 1DPC and extending along the central lower internal space 1DPC.

[0057] Similarly, the third lower coil 4D3 includes a left bundled wire portion 4D3L located on the left side (Y1 side) of the lower-right internal space 1DPR and extending along the lower-right internal space 1DPR, and a right bundled wire portion 4D3R located on the right side (Y2 side) of the lower-right internal space 1DPR and extending along the lower-right internal space 1DPR.

[0058] The left bundled wire portion 4D1L and the right bundled wire portion 4D1R of the first lower coil 4D1 are portions through which the magnetic flux generated by the magnetic flux source 5 passes, i.e., portions that generate a driving force based on the Lorentz force for moving the movable body MB in the left-right direction. The same is true for the left bundled wire portion 4D2L and the right bundled wire portion 4D2R of the second lower coil 4D2, and the left bundled wire portion 4D3L and the right bundled wire portion 4D3R of the third lower coil 4D3.

[0059] The magnetic flux source 5, which is another component of the driving means DM, is disposed in the space between the upper coil 4U and the lower coil 4D so as to be movable in the left-right direction (Y-axis direction) as shown in Fig. 11. Specifically, the magnetic flux source 5 includes a left magnet 5L, a first central magnet 5C1, a second central magnet 5C2, and a right magnet 5R. The left magnet 5L, the first central magnet 5C1, the second central magnet 5C2, and the right magnet 5R are held at a predetermined interval from each other by a magnetic flux source holding member 6 (not shown in Fig. 11).

[0060] In this embodiment, as shown in the middle of Fig. 11, the left magnet 5L is configured so that its width W1 is approximately the same as the width W2 of the right magnet 5R. The first central magnet 5C1 is configured so that its width W3 is approximately the same as the width W4 of the second central magnet 5C2. The left magnet 5L is configured so that its width W1 is approximately half the width W3 of the first central magnet 5C1.

[0061] In this embodiment, the six coils constituting the coil 4 are configured to have the same shape and size. That is, as shown in the middle and bottom of Fig. 11, the width W5 of the left bundled wire portion 4U1L of the first upper coil 4U1, the width W6 of the right bundled wire portion 4U1R of the first upper coil 4U1, the width W7 of the left bundled wire portion 4U2L of the second upper coil 4U2, the width W8 of the right bundled wire portion 4U2R of the second upper coil 4U2, the width W9 of the left bundled wire portion 4U3L of the third upper coil 4U3, and the width W10 of the right bundled wire portion 4U3R of the third upper coil 4U3. The width W10, the width W11 of the left bundled wire portion 4D1L of the first lower coil 4D1, the width W12 of the right bundled wire portion 4D1R of the first lower coil 4D1, the width W13 of the left bundled wire portion 4D2L of the second lower coil 4D2, the width W14 of the right bundled wire portion 4D2R of the second lower coil 4D2, the width W15 of the left bundled wire portion 4D3L of the third lower coil 4D3, and the width W16 of the right bundled wire portion 4D3R of the third lower coil 4D3 are all the same size.

[0062] The left magnet 5L is configured so that its width W1 is approximately the same as the width W5 of the left bundled wire portion 4U1L of the first upper coil 4U1. The first central magnet 5C1 is configured so that its width W3 is approximately the same as the sum of the width W6 of the right bundled wire portion 4U1R of the first upper coil 4U1 and the width W7 of the left bundled wire portion 4U2L of the second upper coil 4U2.

[0063] When the movable body MB (magnetic flux source 5) is located at the center of the movable range, the left magnet 5L is disposed so that its N-pole portion (upper portion) faces the left bundled wire portion 4U1L of the first upper coil 4U1 and its S-pole portion (lower portion) faces the left bundled wire portion 4D1L of the first lower coil 4D1, as shown in the upper part of Fig. 11. The first central magnet 5C1 is disposed so that its S-pole portion (upper portion) faces each of the right bundled wire portion 4U1R of the first upper coil 4U1 and the left bundled wire portion 4U2L of the second upper coil 4U2, and its N-pole portion (lower portion) faces each of the right bundled wire portion 4D1R of the first lower coil 4D1 and the left bundled wire portion 4D2L of the second lower coil 4D2. The second central magnet 5C2 is disposed so that its N-pole portion (upper portion) faces the right bundled wire portion 4U2R of the second upper coil 4U2 and the left bundled wire portion 4U3L of the third upper coil 4U3, and its S-pole portion (lower portion) faces the right bundled wire portion 4D2R of the second lower coil 4D2 and the left bundled wire portion 4D3L of the third lower coil 4D3. The right magnet 5R is disposed so that its S-pole portion (upper portion) faces the right bundled wire portion 4U3R of the third upper coil 4U3, and its N-pole portion (lower portion) faces the right bundled wire portion 4D3R of the third lower coil 4D3.

[0064] When a current flows through the lower coil 4D as shown by the dashed arrow in the middle of Fig. 12, the movable body MB (magnetic flux source 5) moves to the right (Y2 direction) while being guided by the guiding means GM. Specifically, when a current flows through the first lower coil 4D1 counterclockwise in top view, a current flows through the second lower coil 4D2 clockwise in top view, and a current flows through the third lower coil 4D3 counterclockwise in top view, the movable body MB (magnetic flux source 5) moves to the right (Y2 direction).

[0065] This is because the Lorentz force acts on the charged particles moving within the conductive wire that makes up the lower coil 4D fixed to the lower cover 1D, and the reaction force causes the left magnet 5L, first central magnet 5C1, second central magnet 5C2, and right magnet 5R, which serve as the magnetic flux source 5, to move to the right.

[0066] Similarly, when a current flows through the lower coil 4D as shown by the dashed arrow in the lower part of Fig. 12, the movable body MB (magnetic flux source 5) moves leftward (Y1 direction) while being guided by the guiding means GM. Specifically, when a current flows clockwise in a top view through the first lower coil 4D1, a current flows counterclockwise in a top view through the second lower coil 4D2, and a current flows clockwise in a top view through the third lower coil 4D3, the movable body MB (magnetic flux source 5) moves leftward (Y1 direction).

[0067] In this embodiment, a portion of the right-side magnet 5R protrudes to the right beyond the right end RE of the inner surface (the surface facing the coil 4) of the magnetic member 1M even when the movable body MB (magnetic flux source 5) is located at the center of the movable range as shown in the upper part of Fig. 11. Also, a portion of the left-side magnet 5L protrudes to the left beyond the left end LE of the inner surface (the surface facing the coil 4) of the magnetic member 1M even when the movable body MB (magnetic flux source 5) is located at the center of the movable range as shown in the upper part of Fig. 11.

[0068] Then, when the movable body MB (magnetic flux source 5) moves to the right (Y2 direction), as shown in the middle of FIG. 11, a part of the right magnet 5R protrudes further to the right than the right end RE of the inner surface of the magnetic member 1M. Specifically, a part of the right magnet 5R protrudes further to the right than the right end URE of the inner surface of the upper magnetic member 1MU, and protrudes further to the right than the right end DRE of the inner surface of the lower magnetic member 1MD. Since an attractive force acts between the right magnet 5R and the magnetic member 1M, the part 5Ra of the right magnet 5R protruding to the right of the right end RE of the inner surface of the magnetic member 1M is attracted to the left by the right end RE of the inner surface of the magnetic member 1M. In this state, the right end RE of the inner surface of the magnetic member 1M is the part of the magnetic member 1M that is closest to the part 5Ra. In addition, in the middle of Fig. 11, some of the magnetic field lines (magnetic field lines extending between the portion 5Ra and the right end RE) that represent the magnetic field that generates an attractive force that attracts the right-side magnet 5R to the right end RE of the magnetic member 1M are shown by dotted lines. Also, in the middle of Fig. 11, for clarity, the magnetic field lines that represent other parts of the magnetic field generated by the magnetic flux source 5 are omitted from the illustration.

[0069] Also, when the movable body MB (magnetic flux source 5) moves to the right (Y2 direction), as shown in the middle of FIG. 11, the left end portion of the magnetic member 1M protrudes leftward from the left end of the left magnet 5L. Specifically, the left end portions of the upper magnetic member 1MU and the lower magnetic member 1MD protrude leftward from the left end of the left magnet 5L. Since an attractive force acts between the left magnet 5L and the magnetic member 1M, the portion 1MLa of the magnetic member 1M protruding leftward from the left end of the left magnet 5L attracts the left magnet 5L to the left. In this state, the left end of the left magnet 5L is the portion of the left magnet 5L that is closest to the portion 1MLa of the magnetic member 1M. Note that in the middle of FIG. 11, a part of the magnetic field lines (magnetic field lines extending between the portion 1MLa and the left end of the left magnet 5L) that represent the magnetic field that generates an attractive force that attracts the left magnet 5L to the left end of the magnetic member 1M are shown by dotted lines.

[0070] In this way, the movable body MB (magnetic flux source 5) displaced rightward from the center of the movable range is subjected to a force (attraction force) that tries to pull the movable body MB (magnetic flux source 5) back to the center of the movable range. Then, when the force (electromagnetic force) that tries to move the movable body MB rightward disappears, that is, when the current flowing through the coil 4 disappears, the movable body MB (magnetic flux source 5) displaced rightward from the center of the movable range moves leftward by the force (attraction force) and returns toward the center of the movable range.

[0071] On the other hand, when the movable body MB (magnetic flux source 5) moves leftward (Y1 direction), as shown in the lower part of FIG. 11, a part of the left magnet 5L protrudes further leftward than the left end LE of the inner surface (surface facing the coil 4) of the magnetic member 1M. Specifically, a part of the left magnet 5L protrudes further leftward than the left end ULE of the inner surface of the upper magnetic member 1MU, and protrudes further leftward than the left end DLE of the inner surface of the lower magnetic member 1MD. Since an attractive force acts between the left magnet 5L and the magnetic member 1M, the part 5La of the left magnet 5L protruding leftward than the left end LE of the inner surface of the magnetic member 1M is attracted rightward by the left end LE of the inner surface of the magnetic member 1M. In this state, the left end LE of the inner surface of the magnetic member 1M is the part of the magnetic member 1M that is closest to the part 5La. In addition, in the lower part of Fig. 11, some of the magnetic field lines (magnetic field lines extending between the portion 5La and the left end LE) that represent the magnetic field that generates an attractive force that attracts the left magnet 5L to the left end LE of the magnetic member 1M are shown by dotted lines. In addition, in the lower part of Fig. 11, for clarity, the magnetic field lines that represent other parts of the magnetic field generated by the magnetic flux source 5 are omitted from the illustration.

[0072] Also, when the movable body MB (magnetic flux source 5) moves leftward (Y1 direction), as shown in the lower part of FIG. 11, the right end portion of the magnetic member 1M protrudes to the right of the right end of the right magnet 5R. Specifically, the right end portions of the upper magnetic member 1MU and the lower magnetic member 1MD protrude to the right of the right end of the right magnet 5R. Since an attractive force acts between the right magnet 5R and the magnetic member 1M, the portion 1MRa of the magnetic member 1M that protrudes to the right of the right end of the right magnet 5R attracts the right magnet 5R to the right. In this state, the right end of the right magnet 5R is the portion of the right magnet 5R that is closest to the portion 1MRa of the magnetic member 1M. Note that in the lower part of FIG. 11, a part of the magnetic field lines (magnetic field lines extending between the portion 1MRa and the right end of the right magnet 5R) that represent the magnetic field that generates an attractive force that attracts the right magnet 5R to the right end of the magnetic member 1M are shown by dotted lines.

[0073] In this way, the movable body MB (magnetic flux source 5) displaced leftward from the center of the movable range is subjected to a force (attraction force) that tries to pull the movable body MB (magnetic flux source 5) back to the center of the movable range. Then, when the force (electromagnetic force) that tries to move the movable body MB leftward disappears, that is, when the current flowing through the coil 4 disappears, the movable body MB (magnetic flux source 5) displaced leftward from the center of the movable range moves rightward by the force (attraction force) and returns to the center of the movable range.

[0074] Therefore, when the supply of current to the coil 4 is stopped, the movable body MB, which is located away from the center of the movable range, is returned to the center of the movable range by the attractive force between the magnetic flux source 5 and the magnetic member 1M. In this way, the biasing means BM and the driving means DM can vibrate the movable body MB in the left-right direction.

[0075] As described above, the vibration generator 101 according to the embodiment of the present invention includes a fixed body (housing HS), a movable body MB accommodated in the fixed body (housing HS), a guide means GM for guiding the movable body MB so as to be reciprocable along the left-right direction within the fixed body (housing HS), a magnetic flux generating member (magnetic flux source 5) attached to the movable body MB and generating a magnetic flux along the up-down direction, coils 4 attached to the fixed body (housing HS) and extending along the front-rear direction and arranged in parallel along the left-right direction, and a biasing means BM for generating a force for moving the movable body MB, which is located at a position offset from the center of the movable range of the movable body MB, toward the center of the movable range. The guide means GM includes a fixed side end face FS set on the fixed body (rail 9) along the left-right direction, a movable side end face MS set on the movable body MB along the left-right direction, and a rolling member (ball set 7) held between the fixed side end face FS and the movable side end face MS so as to be rollable. The force generated by the biasing means BM is, for example, a magnetic force.

[0076] 2, the vibration generator 101 includes a housing HS, a movable body MB housed in the housing HS, a guide means GM for guiding the movable body MB reciprocally along the left-right direction (Y-axis direction) within the housing HS, a magnetic flux source 5 attached to the movable body MB and generating a magnetic flux along the up-down direction, coils 4 attached to the housing HS and extending along the front-rear direction and arranged in parallel along the left-right direction, and a magnetic member 1M for generating a magnetic attraction force that moves the movable body MB, which is located at a position offset from the center of the movable range of the movable body MB, toward the center of the movable range. The guide means GM includes a fixed side end face FS set on the rail 9 along the left-right direction, a movable side end face MS set on the protruding portion 6G of the magnetic flux source holding member 6 along the left-right direction, and a ball set 7 rollably sandwiched between the fixed side end face FS and the movable side end face MS.

[0077] In this configuration, the ball set 7 is interposed between the movable body MB (magnetic flux source holding member 6) and the fixed body (rail 9), so that the occurrence of abnormal noise due to the stick-slip phenomenon can be suppressed or prevented. Specifically, in this configuration, the movable body MB (magnetic flux source holding member 6) and the fixed body (rail 9) are prevented from coming into direct contact with each other, so that the occurrence of abnormal noise due to the stick-slip phenomenon caused by friction (the difference between static frictional force and kinetic frictional force) between the movable body MB (magnetic flux source holding member 6) and the fixed body (rail 9) can be prevented.

[0078] 2 can return the movable body MB, which has been moved by electromagnetic force, toward the center of its movable range by utilizing the attractive force between the magnetic flux source 5 and the magnetic member 1M. Therefore, the vibration generator 101 can return the movable body MB, which has been moved by electromagnetic force, toward the center of its movable range without using a spring member such as a coil spring and without attaching a separate magnet for the magnetic spring to the housing HS.

[0079] However, the vibration generator 101 may be configured to use a spring member such as a coil spring, or a magnetic spring, so that the movable body MB moved by electromagnetic force can be returned toward the center of the movable range.

[0080] As shown in Fig. 5, the magnetic flux source holding member 6 as the movable body MB preferably has a main body 6M and a protruding portion 6G which is integrally formed so as to protrude from the main body 6M in the front-rear direction and has a smaller vertical dimension than the main body. In this case, the movable end surface MS is set at least on the lower end surface of the protruding portion 6G, and the ball set 7 as the rolling member abuts against the fixed end surface FS at a position above the lower end surface of the main body 6M. In the example shown in the lower diagram of Fig. 8, the lower end surface BF1 of the front protruding portion 6GF functions as the movable end surface MS (lower movable end surface MSD), and the third ball 7DF3 of the lower front ball set 7DF contacts the fixed end surface FS (upper end surface TF1 of the lower front rail 9DF) at a position above (Z1 side) the lower end surface BF2 of the main body 6M. Specifically, the third ball 7DF3 is in contact with the V-groove 9VDF formed in the upper end surface TF1 of the lower front rail 9DF at contact points CP3 and CP4.

[0081] This configuration prevents the vertical dimensions of the magnetic flux source holding member 6 from becoming too large, while having the effect of stabilizing the posture of the magnetic flux source holding member 6 by clamping the extension portion 6G between the upper rail 9U and the lower rail 9D via the upper ball set 7U (multiple balls arranged on the upper end surface of the extension portion 6G) and the lower ball set 7D (multiple balls arranged on the lower end surface of the extension portion 6G).

[0082] The magnetic flux source 5 as a magnetic flux generating member is preferably attached to a magnetic flux source holding member 6 as a movable body MB, as shown in Fig. 3. The coil 4 is preferably attached to a cover 1 as a fixed body, as shown in Figs. 10A and 10B. The biasing means BM that generates a force to move the movable body MB toward the center of the movable range preferably includes, as components, the magnetic flux source 5 and a magnetic member 1M that is attached to a frame body 1W as a fixed body and is disposed outside the coil 4 (the side opposite to the side where the movable body MB is located), as shown in Fig. 2.

[0083] The guide means GM may include a rail 9 on which a fixed side end surface FS is formed. The fixed body may include a cover 1 to which a magnetic member 1M is attached. The rail 9 and the ball set 7 may be sandwiched between the cover 1 and the movable body MB (magnetic flux source holding member 6) which are attracted to each other by a magnetic attractive force acting between the magnetic flux source 5 and the magnetic member 1M.

[0084] 9, the magnetic flux source 5 is a permanent magnet that is bipolarly magnetized in the vertical direction, and includes a left magnet 5L, a first central magnet 5C1, a second central magnet 5C2, and a right magnet 5R. A magnetic attraction force is generated between the magnetic flux source 5 (the left magnet 5L, the first central magnet 5C1, the second central magnet 5C2, and the right magnet 5R) and the magnetic member 1M (the upper magnetic member 1MU and the lower magnetic member 1MD).

[0085] This configuration allows the magnetic attraction force acting between the magnetic flux source 5 and the magnetic member 1M to act as a mutual attraction force between the magnetic flux source holding member 6 and the frame body 1W, thereby ensuring that the ball set 7 is sandwiched between the protruding portion 6G of the magnetic flux source holding member 6 and the rail 9. Specifically, this configuration allows the magnetic attraction force (upper attractive force) acting between the magnetic flux source 5 and the upper magnetic member 1MU to act as a mutual attraction force between the magnetic flux source holding member 6 and the upper frame body 1WU, thereby ensuring that the upper ball set 7U is sandwiched between the protruding portion 6G and the upper rail 9U. Similarly, this configuration allows the magnetic attraction force (lower attractive force) acting between the magnetic flux source 5 and the lower magnetic member 1MD to act as a mutual attraction force between the magnetic flux source holding member 6 and the lower frame body 1WD, thereby ensuring that the lower ball set 7D is sandwiched between the protruding portion 6G and the lower rail 9D. Furthermore, with this configuration, the rail 9 and ball set 7 are sandwiched between the protruding portion 6G of the magnetic flux source holding member 6 and the frame body 1W and are fastened by magnetic attraction. Therefore, the rail 9 does not need to be adhesively fixed to the frame body 1W using an adhesive. In the above-described embodiment, no adhesive is applied between the frame body 1W and the rail 9. However, the upper rail 9U may be adhesively fixed to the upper frame body 1WU with an adhesive, and the lower rail 9D may be adhesively fixed to the lower frame body 1WD with an adhesive.

[0086] The ball set 7 is preferably composed of a plurality of balls sandwiched between the fixed end surface FS and the movable end surface MS. The plurality of balls are arranged at a predetermined interval. In this embodiment, the ball set 7 includes an upper rear ball set 7UB, an upper front ball set 7UF, a lower rear ball set 7DB, and a lower front ball set 7DF, as shown in FIG. 5. The lower front ball set 7DF is composed of five balls (first ball 7DF1 to fifth ball 7DF5), as shown in FIG. 6 and FIG. 7, and is arranged at equal intervals in the left-right direction (Y-axis direction) by the lower front ball guide 8DF. The same is true for the upper rear ball set 7UB, the upper front ball set 7UF, and the lower rear ball set 7DB. The number of balls constituting each of the upper rear ball set 7UB, the upper front ball set 7UF, the lower rear ball set 7DB, and the lower front ball set 7DF may be four or less, or six or more.

[0087] In this configuration, a plurality of balls are arranged between the upper end surface of the overhanging portion 6G of the magnetic flux source holding member 6 and the lower end surface of the upper rail 9U, and a plurality of balls are arranged between the lower end surface of the overhanging portion 6G and the upper end surface of the lower rail 9D. Therefore, this configuration brings about an effect that the magnetic flux source holding member 6 can be moved in the left-right direction (Y-axis direction) with low friction, compared with a configuration in which one ball is arranged between the upper end surface of the overhanging portion 6G and the lower end surface of the upper rail 9U, or a configuration in which one ball is arranged between the lower end surface of the overhanging portion 6G and the upper end surface of the upper rail 9U. This is because it is possible to prevent the load from concentrating on one ball. In addition, this configuration can prevent the magnetic flux source holding member 6 from tilting by using a plurality of balls arranged at a predetermined interval. However, at least one of the upper rear ball set 7UB, the upper front ball set 7UF, the lower rear ball set 7DB, and the lower front ball set 7DF may be composed of one ball.

[0088] The vibration generating device 101 may be configured such that, when the movable body MB is located at the right end of the movable range as shown in the middle of Figure 11, the left end of the magnetic member 1M is located outside (to the left) of the left end of the magnetic flux source 5 (the left end of the left-side magnet 5L), while the right end of the magnetic member 1M is located inside (to the left) of the right end of the magnetic flux source 5 (the right end of the right-side magnet 5R).

[0089] Conversely, the vibration generating device 101 may be configured so that, when the movable body MB is located at the left end of the movable range as shown in the lower part of Figure 11, the right end of the magnetic member 1M is located outside (to the right) of the right end of the magnetic flux source 5 (the right end of the right-side magnet 5R), while the left end of the magnetic member 1M is located inside (to the right) of the left end of the magnetic flux source 5 (the left end of the left-side magnet 5L).

[0090] In addition, the vibration generating device 101 is configured so that when the movable body MB is located at the center (middle) of the movable range as shown in the upper part of Figure 11, the right end of the magnetic member 1M is located inside (to the left) of the right end of the magnetic flux source 5 (the right end of the right-side magnet 5R), and the left end of the magnetic member 1M is located inside (to the right) of the left end of the magnetic flux source 5 (the left end of the left-side magnet 5L).

[0091] With this configuration, when the movable body MB moves left or right from the center of the movable range, the vibration generating device 101 can urge the movable body MB toward the center of the movable range by the urging means BM, i.e., by the attractive force between the magnetic flux source 5 and the magnetic member 1M.

[0092] The guide means GM may be configured not to apply a center return force to the movable body MB. The center return force is a mechanical elastic force by a mechanical element such as a spring member that returns the movable body MB, which is not located at the center of the movable range, to the center of the movable range. Specifically, as shown in the upper diagram of FIG. 9, the movable body MB (magnetic flux source holding member 6) is supported so as to be movable in the left-right direction by the ball set 7 and the rail 9 constituting the guide means GM, and no mechanical element such as a spring member is connected. This is because, even if a center return force is not applied to the movable body MB by a mechanical element such as a spring member, when the movable body MB moves in the left-right direction from the center of the movable range, the movable body MB is pulled back to the center of the movable range by the biasing means BM, that is, by the attractive force between the magnetic flux source 5 and the magnetic member 1M. In other words, this is because the movable body MB can return to the center of the movable range even if a center return force is not applied by a mechanical element such as a spring member.

[0093] This configuration allows the vibration generator 101 to omit mechanical elements such as a spring member for generating a center return force. However, a mechanical element such as a spring member for applying a center return force may be connected to the movable body MB (magnetic flux source holding member 6).

[0094] 11, the vibration generator 101 is configured such that, when the movable body MB is located at the center of the movable range, the left end of the magnetic member 1M is located inside (to the right) relative to the left end of the magnetic flux source 5, and the right end of the magnetic member 1M is located inside (to the left) relative to the right end of the magnetic flux source 5. However, the vibration generator 101 may be configured such that, when the movable body MB is located at the center of the movable range, the left end of the magnetic member 1M is located at the same level as the left end of the magnetic flux source 5 (left end of the left magnet 5L) or outside (to the left) relative to the left end of the magnetic flux source 5 (left end of the left magnet 5L), and the right end of the magnetic member 1M is located at the same level as the right end of the magnetic flux source 5 (right end of the right magnet 5R) or outside (to the right) relative to the right end of the magnetic flux source 5 (right end of the right magnet 5R).

[0095] In this way, regardless of whether the overall width of the magnetic flux source 5 in the left-right direction, which is the vibration direction, is greater than the overall width of the magnetic member 1M, when the movable body MB moves in the left-right direction from the center of the movable range, the vibration generating device 101 can urge the movable body MB toward the center of the movable range by the attractive force between the magnetic flux source 5 and the magnetic member 1M.

[0096] 2, the coil 4 may include an upper coil 4U arranged above the movable body MB, and a lower coil 4D arranged below the movable body MB. Also, the magnetic member 1M may include an upper magnetic member 1MU arranged above the movable body MB, and a lower magnetic member 1MD arranged below the movable body MB.

[0097] With this configuration, the vibration generator 101 can increase the driving force of the driving means DM while effectively utilizing the space in the housing HS, compared to a configuration in which the coil 4 and the magnetic member 1M are arranged either above or below the movable body MB. However, either one of the upper coil 4U and the lower coil 4D may be omitted. Also, either one of the upper magnetic member 1MU and the lower magnetic member 1MD may be omitted.

[0098] As shown in FIG. 5, the guide means GM may be configured such that the protruding portion 6G is clamped between an upper rail 9U and a lower rail 9D via a ball set 7 and is guided so as to be freely movable in the left-right direction.

[0099] 5, the upper rail 9U may include an upper front rail 9UF arranged in front of the magnetic flux source holding member 6 and an upper rear rail 9UB arranged in the rear of the magnetic flux source holding member 6. The lower rail 9D may include a lower front rail 9DF arranged in front of the magnetic flux source holding member 6 and a lower rear rail 9DB arranged in the rear of the magnetic flux source holding member 6. The overhanging portion 6G of the magnetic flux source holding member 6 may include a front overhanging portion 6GF arranged in front of the main body portion 6M of the magnetic flux source holding member 6 and a rear overhanging portion 6GB arranged in the rear of the main body portion 6M.

[0100] More specifically, the magnetic flux source holding member 6 may have a convex front overhang 6GF formed to protrude forward from the front surface of the main body 6M so as to be fitted into a substantially rectangular parallelepiped space formed between the leading end surface (lower end surface) of the upper front rail 9UF and the leading end surface (upper end surface) of the lower front rail 9DF. The magnetic flux source holding member 6 may also have a convex rear overhang 6GB formed to protrude rearward from the rear surface of the main body 6M so as to be fitted into a substantially rectangular parallelepiped space formed between the leading end surface of the upper rear rail 9UB and the leading end surface of the lower rear rail 9DB.

[0101] In this configuration, the guide means GM can suppress the movement of the protruding portion 6G in any direction other than the left-right direction (Y-axis direction). That is, the guide means GM can suppress the movement of the movable body MB in the front-rear direction (X-axis direction) and the up-down direction (Z-axis direction).

[0102] The housing HS may include a rectangular cylindrical side cover 2. In this case, the housing HS may be configured such that an upper cover 1U is positioned by abutting against an upper end of the side cover 2 from above, and a lower cover 1D is positioned by abutting against a lower end of the side cover 2 from below, as shown in the upper diagram of Fig. 8.

[0103] This configuration allows the desired size of the space formed between the leading end surface (lower end surface) of the upper rear rail 9UB and the leading end surface (upper end surface) of the lower rear rail 9DB to be realized with high precision, and therefore allows the movable body MB to move smoothly in the left-right direction.

[0104] 2, the cover 1 may be fastened to the side cover 2 by fastening members 3. Specifically, the upper cover 1U may be fastened to the upper end portion of the side cover 2 by a first upper male screw 3U1 to a fourth upper male screw 3U4, and the lower cover 1D may be fastened to the lower end portion of the side cover 2 by a first lower male screw 3D1 to a fourth lower male screw 3D4.

[0105] This configuration has the effect of being able to adjust the gap GP2 (see the upper diagram in FIG. 9) between the upper cover 1U and the lower cover 1D. In other words, this configuration has the effect of being able to absorb dimensional errors and assembly errors of the frame 1W, the magnetic flux source holding member 6, the ball set 7, and the rail 9.

[0106] The upper cover 1U and the lower cover 1D may be configured to have the same shape and size. This configuration has the effect of further reducing the number of parts that configure the vibration generator 101.

[0107] Next, the details of the vibration generator 101 will be described with reference to Fig. 13A and Fig. 13B. Fig. 13A is a cross-sectional view of the vibration generator 101 and corresponds to the upper view of Fig. 8. Fig. 13B is another cross-sectional view of the vibration generator 101 and corresponds to the upper part of Fig. 11. Specifically, Fig. 13A shows a cross-section of the vibration generator 101 when a plane including a cutting line XIIIA-XIIIA shown by a dashed line in Fig. 13B is viewed from the Y1 side. Fig. 13B shows a cross-section of the vibration generator 101 when a plane including a cutting line XIIIB-XIIIB shown by a dashed line in Fig. 13A is viewed from the X1 side.

[0108] The vibration generating device 101 is configured so that the magnitude of the magnetic attraction force (upper attraction force) acting between the magnetic flux source 5 and the upper magnetic member 1MU is greater than the magnitude of the magnetic attraction force (lower attraction force) acting between the magnetic flux source 5 and the lower magnetic member 1MD.

[0109] In the illustrated example, the vibration generator 101 is configured so that the magnitude of the upper attractive force is 20 (N), the magnitude of the lower attractive force is 19 (N), and the difference between them is 1 (N). That is, since the lower attractive force is offset by the upper attractive force, the force finally acting on the movable body MB is a force of 1 (N) that attracts the movable body MB to the upper magnetic member 1MU. In other words, the force finally acting on the movable body MB is a force that attracts the movable body MB to the upper magnetic member 1MU and is 1 / 20 the magnitude of the upper attractive force. Hereinafter, the force finally acting on the movable body MB is referred to as a "pressing force" that means a force that presses the movable body MB against the fixed body (rail 9), and the magnitude of the pressing force corresponds to the difference between the upper attractive force and the lower attractive force.

[0110] This configuration has the effect of significantly increasing the driving force based on the Lorentz force for moving the movable body MB in the left-right direction, compared to a configuration in which the magnitude of the upper attractive force is 2 (N), the magnitude of the lower attractive force is 1 (N), and the magnitude of the pressing force is 1 (N). This is because the driving force is larger as the magnetic force generated by the magnetic flux source 5 is larger, that is, as the upper attractive force and the lower attractive force are larger. In the illustrated configuration, if the magnitude of the upper attractive force is 2 (N) and the magnitude of the lower attractive force is 1 (N), the magnitude of the pressing force will be an appropriate value (1 (N)), but the driving force will be insufficient. Therefore, the vibration generator 101 cannot vibrate the movable body MB smoothly. In the illustrated example, the appropriate magnitude of the pressing force is preferably about 1 / 8 to 1 / 40 of the attractive force, more preferably about 1 / 15 to 1 / 25 of the attractive force, and most preferably about 1 / 20 of the attractive force. Specifically, the appropriate pressing force is preferably about 0.5 (N) to 2.5 (N), more preferably about 0.8 (N) to 1.3 (N), and most preferably about 1 (N).

[0111] In addition, this configuration brings about an effect that the movable body MB can be vibrated more reliably than a configuration in which an upper attractive force acts on the movable body MB while a lower attractive force does not act on it. Note that a configuration in which an upper attractive force acts on the movable body MB while a lower attractive force does not act on it is, for example, a configuration in which the lower magnetic member 1MD is omitted. For example, when the magnitude of the upper attractive force is 20 (N), the vibration generator 101 can generate a desired driving force, but the magnitude of the pressing force pressing the movable body MB against the upper rail 9U (upper ball set 7U) becomes excessively large (because it becomes the same as the magnitude of the upper attractive force), and the movement of the movable body MB is hindered due to an increase in friction force. On the other hand, when the magnitude of the upper attractive force is 1 (N), the vibration generator 101 can generate a desired pressing force, but the magnitude of the driving force becomes excessively small (because it becomes the same as the magnitude of the pressing force), and the movable body MB cannot be moved smoothly.

[0112] In consideration of the above-mentioned characteristics, it is desirable that the vibration generator 101 is configured so that the magnitudes of the upper and lower suction forces are each desired, while the pressing force is also desired.

[0113] Therefore, as shown in Fig. 13A, vibration generator 101 is configured so that length LT1 in the Z-axis direction of upper rail 9U (upper rear rail 9UB and upper front rail 9UF) is shorter than length LT2 in the Z-axis direction of lower rail 9D (lower rear rail 9DB and lower front rail 9DF). That is, vibration generator 101 is configured so that distance DS1 between magnetic flux source 5 and upper magnetic member 1MU is shorter than distance DS2 between magnetic flux source 5 and lower magnetic member 1MD, so that the magnitude of the pressing force pressing movable body MB against upper rail 9U (upper ball set 7U) is 1 (N), as shown in Fig. 13B.

[0114] Alternatively, the vibration generator 101 may be configured so that the distance DS5 between the upper end surface of the overhanging portion 6G and the upper end surface of the main body portion 6M is greater than the distance DS6 between the lower end surface of the overhanging portion 6G and the lower end surface of the main body portion 6M, while maintaining the length (height HG) in the Z-axis direction of the main body portion 6M of the magnetic flux source holding member 6. This is to make the distance DS1 between the magnetic flux source 5 and the upper magnetic member 1MU smaller than the distance DS2 between the magnetic flux source 5 and the lower magnetic member 1MD.

[0115] Alternatively, the vibration generator 101 may be configured such that the thickness TK1 (see FIG. 13A) of the upper magnetic member 1MU in the vertical direction is greater than the thickness TK2 (see FIG. 13A) of the lower magnetic member 1MD in the vertical direction. This is to make the upper attractive force greater than the lower attractive force by making the volume of the upper magnetic member 1MU greater than the volume of the lower magnetic member 1MD. Alternatively, this is to make the upper attractive force greater than the lower attractive force by making the distance DS1 between the magnetic flux source 5 and the upper magnetic member 1MU smaller than the distance DS2 between the magnetic flux source 5 and the lower magnetic member 1MD. This configuration may be realized by making the thickness TK1 of the upper magnetic member 1MU thicker, or by making the thickness TK2 of the lower magnetic member 1MD thinner.

[0116] Alternatively, the vibration generating device 101 may be configured to shift the position of the magnetic flux source 5 on the magnetic flux source holding member 6 upward (in the Z1 direction) by a desired distance, so that the magnitudes of the upper and lower attractive forces are each set to a desired magnitude while the pressing force is also set to a desired magnitude.

[0117] Alternatively, the vibration generating device 101 may be configured so that the upper and lower attractive forces are each of the desired magnitude while the pressing force is also of the desired magnitude by making the shape or material, etc., of the upper magnetic member 1MU different from the shape or material, etc. of the lower magnetic member 1MD.

[0118] In the above-mentioned example referring to Figures 13A and 13B, the vibration generating device 101 is configured so that the upper movable side end face MSU, which is the upper end surface of the extension portion 6G, is in close contact with the upper ball set 7U (upper rear ball set 7UB and upper front ball set 7UF), and the upper fixed side end face FSU, which is the tip surface of the upper rail 9U, and also so that the lower movable side end face MSD, which is the lower end surface of the extension portion 6G, is in close contact with the lower ball set 7D (lower rear ball set 7DB and lower front ball set 7DF), and the lower fixed side end face FSD, which is the tip surface of the lower rail 9D integrated with the lower frame body 1WD. However, the vibration generator 101 may be configured such that the upper movable end face MSU, the upper ball set 7U, and the upper fixed end face FSU are in close contact with each other, while the lower movable end face MSD, the lower ball set 7D, and the lower fixed end face FSD are not in close contact with each other, that is, the lower movable end face MSD and the lower ball set 7D face each other with a small gap therebetween. This configuration is realized, for example, by shortening the length LT2 of the lower rail 9D (the lower rear rail 9DB and the lower front rail 9DF) in the Z-axis direction. The above-mentioned gap is created because the magnetic flux source holding member 6 is pressed against the upper fixed end face FSU, which is the tip face of the upper rail 9U, by the upper attractive force.

[0119] 13A and 13B, the vibration generator 101 is configured so that the upper suction force is greater than the lower suction force, but it may be configured so that the upper suction force is smaller than the lower suction force. The various configurations described above that are adopted to make the upper suction force greater than the lower suction force can also be used in the vibration generator 101 configured so that the upper suction force is smaller than the lower suction force.

[0120] Next, with reference to Figs. 14, 15A, and 15B, a vibration generator 101A, which is another configuration example of the vibration generator 101 according to the embodiment of the present invention, will be described. Fig. 14 is an exploded perspective view of the vibration generator 101A, and corresponds to Fig. 2. Fig. 15A is a cross-sectional view of the vibration generator 101A, and corresponds to Fig. 13A. Fig. 15B is another cross-sectional view of the vibration generator 101A, and corresponds to Fig. 13B. Specifically, Fig. 15A shows a cross-section of the vibration generator 101 when a plane including a cutting line XVA-XVA shown by a dashed line in Fig. 15B is viewed from the Y1 side. Fig. 15B shows a cross-section of the vibration generator 101 when a plane including a cutting line XVB-XVB shown by a dashed line in Fig. 15A is viewed from the X1 side.

[0121] The vibration generating device 101A differs from the vibration generating device 101 in that the ball set 7 and ball guide 8 are omitted, the rail 9 is integrated into the frame body 1W, the upper coil 4U includes two coils (a first upper coil 4U1 and a second upper coil 4U2), the lower coil 4D includes two coils (a first lower coil 4D1 and a second lower coil 4D2), and the magnetic flux source holding member 6 holds three magnets (a left magnet 5L, a central magnet 5C, and a right magnet 5R).

[0122] The vibration generator 101A also differs from the vibration generator 101 in that the movable end face MS, which is the end face of the overhanging portion 6G, and the fixed end face FS, which is the tip face of the rail 9, are in direct contact with each other. This is because in the vibration generator 101, the movable end face MS and the fixed end face FS are disposed so as to face each other with the ball set 7 in between (so as not to come into direct contact with each other).

[0123] Specifically, as shown in FIG. 15A, the vibration generating device 101A is configured so that the upper end surface of the extension portion 6G, that is, the upper movable side end surface MSU, is in direct contact with the upper fixed side end surface FSU, that is the tip surface of the upper rail 9U integrated with the upper frame body 1WU, and so that the lower end surface of the extension portion 6G, that is, the lower movable side end surface MSD, is in direct contact with the lower fixed side end surface FSD, that is the tip surface of the lower rail 9D integrated with the lower frame body 1WD.

[0124] Similar to vibration generating device 101, vibration generating device 101A is configured so that the magnitude of the magnetic attraction force (upper attraction force) acting between magnetic flux source 5 and upper magnetic member 1MU is greater than the magnitude of the magnetic attraction force (lower attraction force) acting between magnetic flux source 5 and lower magnetic member 1MD.

[0125] In the illustrated example, the vibration generator 101A is configured so that the magnitude of the upper attractive force is 10 (N), the magnitude of the lower attractive force is 9 (N), and the difference between them is 1 (N). That is, since the lower attractive force is offset by the upper attractive force, the force finally acting on the movable body MB is a force of 1 (N) that attracts the movable body MB to the upper magnetic member 1MU. In other words, the force finally acting on the movable body MB is a force that attracts the movable body MB to the upper magnetic member 1MU and is one-tenth the magnitude of the upper attractive force. Hereinafter, the force finally acting on the movable body MB is referred to as a "pressing force" that means a force that presses the movable body MB against the fixed body (rail 9), and the magnitude of the pressing force corresponds to the difference between the upper attractive force and the lower attractive force.

[0126] This configuration has the effect of significantly increasing the driving force based on the Lorentz force for moving the movable body MB in the left-right direction, compared to a configuration in which the magnitude of the upper attractive force is 2 (N), the magnitude of the lower attractive force is 1 (N), and the magnitude of the pressing force is 1 (N). This is because the driving force is larger the stronger the magnetic force generated by the magnetic flux source 5, that is, the stronger the upper attractive force and the lower attractive force are. Note that in the illustrated configuration, if the magnitude of the upper attractive force is 2 (N) and the magnitude of the lower attractive force is 1 (N), the magnitude of the pressing force will be an appropriate value (1 (N)), but the driving force will be insufficient. Therefore, the vibration generator 101 cannot vibrate the movable body MB smoothly.

[0127] In addition, this configuration brings about an effect that the movable body MB can be vibrated more reliably than a configuration in which an upper attractive force acts on the movable body MB while a lower attractive force does not act on it. Note that a configuration in which an upper attractive force acts on the movable body MB while a lower attractive force does not act on it is, for example, a configuration in which the lower magnetic member 1MD is omitted. For example, when the magnitude of the upper attractive force is 20 (N), the vibration generator 101 can generate a desired driving force, but the magnitude of the pressing force pressing the movable body MB against the upper rail 9U (upper ball set 7U) becomes excessively large (because it becomes the same as the magnitude of the upper attractive force), and the movement of the movable body MB is hindered due to an increase in friction force. On the other hand, when the magnitude of the upper attractive force is 1 (N), the vibration generator 101 can generate a desired pressing force, but the magnitude of the driving force becomes excessively small (because it becomes the same as the magnitude of the pressing force), and the movable body MB cannot be moved smoothly.

[0128] In view of the above-mentioned characteristics, it is desirable that the vibration generator 101A is configured so that the magnitudes of the upper and lower attractive forces are each desired, while the pressing force is also desired.

[0129] 15A, the vibration generator 101A is configured so that the length LT1 in the Z-axis direction of the upper rail 9U (upper rear rail 9UB and upper front rail 9UF) integrated with the upper frame 1WU is shorter than the length LT2 in the Z-axis direction of the lower rail 9D (lower rear rail 9DB and lower front rail 9DF) integrated with the lower frame 1WD. That is, the vibration generator 101A is configured so that the distance DS1 between the magnetic flux source 5 and the upper magnetic member 1MU is shorter than the distance DS2 between the magnetic flux source 5 and the lower magnetic member 1MD, as shown in FIG. 15B, so that the magnitude of the pressing force pressing the movable body MB against the upper rail 9U is 1 (N).

[0130] Alternatively, the vibration generator 101A may be configured so that the distance DS5 between the upper end surface of the overhanging portion 6G and the upper end surface of the main body portion 6M is greater than the distance DS6 between the lower end surface of the overhanging portion 6G and the lower end surface of the main body portion 6M, while maintaining the length (height HG) in the Z-axis direction of the main body portion 6M of the magnetic flux source holding member 6. This is to make the distance DS1 between the magnetic flux source 5 and the upper magnetic member 1MU smaller than the distance DS2 between the magnetic flux source 5 and the lower magnetic member 1MD.

[0131] Alternatively, the vibration generator 101A may be configured so that the thickness TK1 (see FIG. 15A) of the upper magnetic member 1MU in the vertical direction is greater than the thickness TK2 (see FIG. 15A) of the lower magnetic member 1MD in the vertical direction. This is to make the upper attractive force greater than the lower attractive force by making the volume of the upper magnetic member 1MU greater than the volume of the lower magnetic member 1MD. Alternatively, this is to make the upper attractive force greater than the lower attractive force by making the distance DS1 between the magnetic flux source 5 and the upper magnetic member 1MU smaller than the distance DS2 between the magnetic flux source 5 and the lower magnetic member 1MD. This configuration may be realized by making the thickness TK1 of the upper magnetic member 1MU thicker, or by making the thickness TK2 of the lower magnetic member 1MD thinner.

[0132] Alternatively, the vibration generating device 101A may be configured to shift the position of the magnetic flux source 5 on the magnetic flux source holding member 6 upward (in the Z1 direction) by a desired distance, so that the magnitudes of the upper and lower attractive forces are each set to a desired magnitude while the pressing force is also set to a desired magnitude.

[0133] Alternatively, the vibration generating device 101 may be configured so that the upper and lower attractive forces are each of the desired magnitude while the pressing force is also of the desired magnitude by making the shape or material, etc., of the upper magnetic member 1MU different from the shape or material, etc. of the lower magnetic member 1MD.

[0134] 15A and 15B, the vibration generator 101A is configured such that the upper movable end face MSU, which is the upper end face of the overhanging portion 6G, directly contacts the upper fixed end face FSU, which is the tip face of the upper rail 9U integrated with the upper frame 1WU, and the lower movable end face MSD, which is the lower end face of the overhanging portion 6G, directly contacts the lower fixed end face FSD, which is the tip face of the lower rail 9D integrated with the lower frame 1WD. However, the vibration generator 101A may be configured such that the upper movable end face MSU and the upper fixed end face FSU directly contact each other, while the lower movable end face MSD and the lower fixed end face FSD do not contact each other, that is, the lower movable end face MSD and the lower fixed end face FSD face each other with a small gap therebetween. This configuration is realized, for example, by shortening the length LT2 in the Z-axis direction of the lower rail 9D (the lower rear rail 9DB and the lower front rail 9DF). The above-mentioned gap is brought about because the magnetic flux source holding member 6 is pressed against the upper fixed-side end face FSU, which is the tip face of the upper rail 9U, by the upper attractive force.

[0135] 15A and 15B, the vibration generator 101A is configured so that the upper suction force is greater than the lower suction force, but it may be configured so that the upper suction force is smaller than the lower suction force. The various configurations described above that are adopted to make the upper suction force greater than the lower suction force can also be used in the vibration generator 101A configured so that the upper suction force is smaller than the lower suction force.

[0136] As described above, the vibration generators 101 and 101A according to the embodiments of the present invention include a fixed body (housing HS), a movable body MB accommodated in the fixed body (housing HS), a guide means GM for guiding the movable body MB in a reciprocating manner along the left-right direction (Y-axis direction) within the fixed body (housing HS), a magnetic flux source 5 attached to the movable body MB, a driving means DM including coils 4 attached to the fixed body (housing HS) and extending along the front-rear direction (X-axis direction) and arranged in parallel along the left-right direction (Y-axis direction), an upper magnetic member 1MU arranged on the upper side (Z1 side) of the movable body MB as a part of the fixed body (housing HS), and a lower magnetic member 1MD arranged on the lower side (Z2 side) of the movable body MB as a part of the fixed body (housing HS), as shown in Fig. 2 and Fig. 14. The magnetic flux source 5 includes one or more magnets, and each of the one or more magnets included in the magnetic flux source 5 is arranged so that the N-pole portion and the S-pole portion are adjacent to each other in the vertical direction. In the vibration generator 101, as shown in Fig. 3, the magnetic flux source 5 includes four magnets (left magnet 5L, first central magnet 5C1, second central magnet 5C2, and right magnet 5R), and each of the four magnets (left magnet 5L, first central magnet 5C1, second central magnet 5C2, and right magnet 5R) is magnetized with two poles in the vertical direction (Z-axis direction). In the vibration generator 101A, as shown in Fig. 15A, the magnetic flux source 5 includes three magnets (left magnet 5L, central magnet 5C, and right magnet 5R), and each of the three magnets (left magnet 5L, central magnet 5C, and right magnet 5R) is magnetized with two poles in the vertical direction (Z-axis direction). The one or more magnets constituting the magnetic flux source 5 may include a magnet magnetized with two poles in the front-rear direction (X-axis direction) or left-right direction (Y-axis direction) as long as the magnets are arranged so that the N-pole portion and the S-pole portion are adjacent to each other in the vertical direction, or may include a multi-pole magnet such as a four-pole magnet. The vibration generators 101, 101A are configured so that the magnitude of the magnetic attractive force acting between the magnetic flux source 5 and the upper magnetic member 1MU is different from the magnitude of the magnetic attractive force acting between the magnetic flux source 5 and the lower magnetic member 1MD.Typically, the vibration generators 101 and 101A are configured so that the upper contact pressure between the movable body MB and a fixed body (upper ball set 7U or upper rail 9U) above the movable body MB is different from the lower contact pressure between the movable body MB and a fixed body (lower ball set 7D or lower rail 9D) below the movable body MB. For example, the vibration generators 101 and 101A may be configured so that the upper contact pressure is greater than the lower contact pressure. In this case, the lower contact pressure may be zero. In other words, the movable body MB and the fixed body below the movable body MB do not need to be in contact with each other.

[0137] This configuration can extend the life of the vibration generators 101, 101A and prevent the movable body MB from vibrating in a direction other than the desired vibration direction. The vibration generators 101, 101A can extend their life because, for example, a pressing force that is significantly smaller than the attractive force acting between the magnetic flux source 5 and the magnetic member 1M can be realized. In addition, the movable body MB can be prevented from vibrating in a direction other than the desired vibration direction, i.e., in the X-axis direction and the Z-axis direction that are directions other than the Y-axis direction, because, for example, the magnetic flux source holding member 6 can be pressed against either the upper rail 9U or the lower rail 9D.

[0138] In addition, this configuration can press the movable body MB against either the upper rail 9U or the lower rail 9D, thereby improving the positioning accuracy of the movable body MB. For the same reason, this configuration can also suppress vibration of the movable body MB in the vertical direction (Z-axis direction).

[0139] Furthermore, with this configuration, even if there is a large variation in the dimensions of parts such as the rail 9, causing a large gap to form between the movable body MB and the fixed body, the movable body MB can be moved to one side (upper or lower) by magnetic attraction, thereby preventing the movable body MB from wobbling.

[0140] Specifically, the vibration generating devices 101, 101A may be configured so that the distance DS1 between the magnetic flux source 5 and the upper magnetic member 1MU is smaller than the distance DS2 between the magnetic flux source 5 and the lower magnetic member 1MD, as shown in Figures 13B and 15B.

[0141] Alternatively, the vibration generators 101, 101A may be configured so that the vertical thickness TK1 of the upper magnetic member 1MU is greater than the vertical thickness TK2 of the lower magnetic member 1MD, as shown in FIGS. 13A and 15A.

[0142] In the vibration generating device 101, the guide means GM may include, as shown in FIG. 2, a fixed side end face FS set along the left-right direction (Y-axis direction) on the fixed body (housing HS), a movable side end face MS set along the left-right direction (Y-axis direction) on the movable body MB, and a rolling member (ball set 7) sandwiched between the fixed side end face FS and the movable side end face MS so as to be freely rollable.

[0143] This configuration brings about the effect that the movable body MB can be moved more smoothly than when the movable side end surface MS and the fixed side end surface FS are in direct contact with each other, because friction can be reduced.

[0144] In the vibration generator 101A, the guide means GM may include a fixed end face FS set on the fixed body (housing HS) along the left-right direction (Y-axis direction) and a movable end face MS set on the movable body MB along the left-right direction (Y-axis direction) as shown in Fig. 14. The fixed end face FS and the movable end face MS may be in slidable contact with each other.

[0145] This configuration has the advantage of being able to realize a smaller number of parts compared to a configuration in which rolling members are disposed between the movable end surface MS and the fixed end surface FS, because the rolling members are omitted.

[0146] The fixed-side end face FS may include an upper fixed-side end face FSU and a lower fixed-side end face FSD, as shown in Fig. 13A and Fig. 15A, respectively. The movable-side end face MS may include an upper movable-side end face MSU facing the upper fixed-side end face FSU and a lower movable-side end face MSD facing the lower fixed-side end face FSD, as shown in Fig. 13A and Fig. 15A, respectively. In this case, the upper fixed-side end face FSU and the lower fixed-side end face FSD may be arranged such that a first distance DS3 between the upper fixed-side end face FSU and a plane PL1 perpendicular to the vertical direction (Z-axis direction) including the midpoint of the distance between the upper magnetic member 1MU and the lower magnetic member 1MD in the vertical direction is different from a second distance DS4 between the plane PL1 and the lower fixed-side end face FSD, as shown in Fig. 13A and Fig. 15A, respectively. In the example shown in Fig. 13A, the vibration generator 101 is configured so that the first distance DS3 is greater than the second distance DS4. However, the vibration generator 101 may be configured so that the first distance DS3 is smaller than the second distance DS4. Similarly, in the example shown in Fig. 15A, the vibration generator 101A is configured so that the first distance DS3 is larger than the second distance DS4. However, the vibration generator 101A may be configured so that the first distance DS3 is smaller than the second distance DS4.

[0147] As described above, this configuration has the effect of extending the life of the vibration generators 101, 101A and preventing the movable body MB from vibrating in a direction other than the desired vibration direction.

[0148] The preferred embodiments of the present invention have been described above in detail. However, the present invention is not limited to the above-described embodiments. Various modifications or substitutions may be applied to the above-described embodiments without departing from the scope of the present invention. Furthermore, each of the features described with reference to the above-described embodiments may be appropriately combined as long as there is no technical contradiction.

[0149] For example, in the above-described embodiment, the lower cover 1D, the upper cover 1U, and the side cover 2 are formed as separate members independent of each other. However, the side cover 2 may be integrated with the lower cover 1D or the upper cover 1U. For example, the upper cover 1U and the side cover 2 may be integrated and formed as a single part.

[0150] The upper rail 9U and the lower rail 9D may be disposed so as to face the second side plate portion 2A2 and the fourth side plate portion 2A4, respectively. That is, the upper rail 9U and the lower rail 9D may be disposed on the left and right sides of the movable body MB, respectively. In this case, the protruding portion 6G may be formed on the left end and the right end of the movable body MB. For example, the protruding portion 6G may include a left protruding portion protruding leftward from the left end of the magnetic flux source holding member 6, and a right protruding portion protruding rightward from the right end of the magnetic flux source holding member 6. In this case, the guiding means GM may be configured such that the upper rail 9U has an upper right rail and an upper left rail, and the lower rail 9D has a lower right rail and a lower left rail. The left side protrusion is configured to be clamped between the tip surface (lower end surface) of the upper left rail and the tip surface (upper end surface) of the lower left rail via the ball set 7 and guided so as to be movable in the left-right direction, and the right side protrusion is configured to be clamped between the tip surface (lower end surface) of the upper right rail and the tip surface (upper end surface) of the lower right rail via the ball set 7 and guided so as to be movable in the left-right direction.

[0151] In the above embodiment, the rail 9 is provided as a separate member from the cover 1, but it may be integrated with the cover 1.

[0152] In the above embodiment, each of the V groove 6VD, the V groove 6VU, the V groove 9VD, and the V groove 9VU is configured as a single V groove that is continuous along the Y-axis direction, but a plurality of V grooves may be arranged intermittently along the Y-axis direction. In this case, a single ball may be configured to correspond to each of the plurality of intermittently arranged V grooves. In this case, the ball guide 8 may be omitted. Each of the V groove 6VD, the V groove 6VU, the V groove 9VD, and the V groove 9VU may be a groove having another cross-sectional shape, such as a U groove or a rectangular groove.

[0153] In the above embodiment, the five balls (first ball 7DF1 to fifth ball 7DF5) constituting the lower front ball set 7DF are arranged at equal intervals by the lower front ball guide 8DF, as shown in Fig. 6 and Fig. 7. However, the five balls may be arranged at non-equidistant intervals. The same applies to the upper rear ball set 7UB, the upper front ball set 7UF, and the lower rear ball set 7DB. [Explanation of symbols]

[0154] 1 Cover 1D Lower cover 1DP Lower internal space 1DPC Central lower internal space 1DPL Lower left internal space 1DPR Lower right internal space 1M Magnetic member 1MD Lower magnetic member 1MLa, 1MRa Part 1MU Upper magnetic member 1U Upper cover 1W Frame 1WD Lower frame 1WU Upper frame 2 Side cover 2A1 First side plate 2A2 Second side plate 2A3 Third side plate 2A4 Fourth side plate 2T1 First female screw hole 2T2 Second female screw hole 2T3 Third female screw hole 2T4 Fourth female screw hole 3 Fastening member 3D Lower fastening member 3D1 First lower male screw 3D2 Second lower male screw 3D3 Third lower male screw 3D4 Fourth lower male screw 3U Upper fastening member 3U1 First upper male screw 3U2 Second upper male screw 3U3 Third upper male screw 3U4 Fourth upper male screw 4 Coil 4C Central coil 4D Lower coil 4D1 First lower coil 4D1L Left side bundling section 4D1R Right side bundling section 4D2 Second lower coil 4D2L Left side bundling section 4D2R Right side bundling section 4D3 Third lower coil 4D3L...Left wire bundle section 4D3R...Right wire bundle section 4L...Left side coil 4R...Right side coil 4U...Upper coil 4U1...1st upper coil 4U1L...Left wire bundle section 4U1R...Right wire bundle section 4U2...Second upper coil 4U2L...Left wire bundle section 4U2R...Right bundle wire section 4U3...Third upper coil 4U3L...Left wire bundle section 4U3R...Right bundle wire section 5...Magnetic flux source 5C...Center magnet 5C1...First center magnet 5C2...Second center magnet 5L...Left magnet 5La...Part 5R...Right side magnet 5Ra...Part 6...Magnetic flux source holding member 6G...Protrusion part 6GB Rear extension 6GF Front extension 6M Main body 6VD, 6VDB, 6VDF, 6VU, 6VUB, 6VUF V-groove 7 Ball set 7D Lower ball set 7DB Lower rear ball set 7DF Lower front ball set 7DF1 1st ball 7DF2 2nd ball 7DF3 3rd ball7DF4···Fourth ball 7DF5···Fifth ball 7U···Upper ball set 7UB···Upper rear ball set 7UF···Upper front ball set 8···Ball guide 8D···Lower ball guide 8DB···Lower rear ball guide 8DF···Lower front ball guide 8U···Upper ball guide 8UB···Upper rear ball guide 8UF···Upper front ball guide 9···Rail 9D···Lower rail 9DB···Lower rear rail 9DF···Lower front rail 9U···Upper rail 9UB···Upper rear rail 9UF···Upper front rail 9VD, 9VDB, 9VDF, 9VU, 9VUB, 9VUF···V-groove 101, 101A···Vibration generator BF1, BF2...Lower end face BM...Biasing means CP1~CP4...Contact point CTR...Control unit DLE...Left end DM...Drive means DRE...Right end FS...Fixed side end face FSD...Lower fixed side end face FSU...Upper fixed side end face GM...Guiding means HL1...First through hole HL2...Second through hole HL3...Third through hole HL4...Fourth through hole HL5...Fifth through hole HS...Housing LE...Left end MB...Movable body MS...Movable end face MSD...Lower movable end face MSU...Upper movable end face RE...Right end TF1...Upper end face ULE...Left end URE...Right end VA...Vibration axis VE...Vibration device

Claims

1. A fixed body; A movable body accommodated in the fixed body; a guide means for guiding the movable body so that the movable body can reciprocate in the left-right direction within the fixed body; a driving means including a magnetic flux source attached to the movable body and a coil attached to the fixed body, extending along a front-rear direction perpendicular to the left-right direction and arranged in parallel along the left-right direction; an upper magnetic member that is disposed above the movable body as a part of the fixed body in a vertical direction perpendicular to the left-right direction and the front-rear direction; a lower magnetic member that is disposed below the movable body as a part of the fixed body in a vertical direction perpendicular to the left-right direction and the front-rear direction, the magnetic flux source includes one or more magnets, and each of the one or more magnets included in the magnetic flux source is arranged such that an N-pole portion and an S-pole portion are adjacent to each other in the up-down direction, the guide means includes a fixed end surface that is set on the fixed body along the left-right direction, and a movable end surface that is set on the movable body along the left-right direction, The fixed side end surface includes an upper fixed side end surface and a lower fixed side end surface, the movable-side end surface includes an upper movable-side end surface facing the upper fixed-side end surface and a lower movable-side end surface facing the lower fixed-side end surface, the movable body is sandwiched in the vertical direction between the upper fixed-side end surface set on a member constituting the fixed body arranged above the movable body and the lower fixed-side end surface set on another member constituting the fixed body arranged below the movable body, a magnetic attraction force acting between the magnetic flux source and the upper magnetic member and a magnetic attraction force acting between the magnetic flux source and the lower magnetic member are configured to be different from each other. A vibration generating device characterized by:

2. A fixed body, A movable body accommodated in the fixed body; a guide means for guiding the movable body so that the movable body can reciprocate in the left-right direction within the fixed body; a driving means including a magnetic flux source attached to the movable body and a coil attached to the fixed body, extending along a front-rear direction perpendicular to the left-right direction and arranged in parallel along the left-right direction; an upper magnetic member that is disposed above the movable body as a part of the fixed body in a vertical direction perpendicular to the left-right direction and the front-rear direction; a lower magnetic member that is disposed below the movable body as a part of the fixed body in a vertical direction perpendicular to the left-right direction and the front-rear direction, the magnetic flux source includes one or more magnets, and each of the one or more magnets included in the magnetic flux source is arranged such that an N-pole portion and an S-pole portion are adjacent to each other in the up-down direction, the guide means includes a fixed end surface that is set on the fixed body along the left-right direction, and a movable end surface that is set on the movable body along the left-right direction, The fixed side end surface includes an upper fixed side end surface and a lower fixed side end surface, the movable-side end surface includes an upper movable-side end surface facing the upper fixed-side end surface and a lower movable-side end surface facing the lower fixed-side end surface, the upper fixed-side end surface and the lower fixed-side end surface are arranged such that a first distance between the upper fixed-side end surface and a plane perpendicular to the vertical direction including a midpoint of a distance between the upper magnetic member and the lower magnetic member in the vertical direction is different from a second distance between the plane and the lower fixed-side end surface. A vibration generating device characterized by:

3. the distance between the magnetic flux source and the upper magnetic member is less than the distance between the magnetic flux source and the lower magnetic member; The vibration generating device according to claim 1 or 2.

4. The thickness of the upper magnetic member in the vertical direction is greater than the thickness of the lower magnetic member in the vertical direction.

4. The vibration generating device according to claim 1.

5. The fixed end surface and the movable end surface are in slidable contact with each other.

5. The vibration generating device according to claim 1.

6. the guide means includes a fixed-side end surface that is set along the left-right direction on the fixed body, a movable-side end surface that is set along the left-right direction on the movable body, and a rolling member that is rollably sandwiched between the fixed-side end surface and the movable-side end surface, 5. The vibration generating device according to claim 1.

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