Shape measuring instrument and control method thereof

Abstract

To provide a shape measuring device and a control method thereof that can easily detect the cause of an abnormality in shape measurement of an object to be measured.SOLUTION: A shape measuring device includes: a displacement detector that detects displacement of a contactor; a relative movement mechanism that moves the displacement detector relative to an object to be measured and causes the contactor to trace a measured surface of the object to be measured; a position detection sensor that detects the relative position of the displacement detector to the object to be measured; a camera that captures an image of the contactor and outputs the image of the contactor; and a synchronization controller that repeatedly executes three operations, including relative position detection using the position detection sensor, displacement detection using the displacement detector, and imaging using the camera in synchronization with each other while relative movement is being performed by the relative movement mechanism.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a shape measuring instrument that uses a contact to measure the shape of a measurement object, and a control method thereof. [Background technology]

[0002] There is known a surface shape measuring machine (shape measuring machine) that measures the surface shape such as the contour shape and surface roughness of a workpiece (measured object). In such a surface shape measuring machine, a contactor is brought into contact with the workpiece surface and the contactor and the workpiece are moved relatively in the horizontal direction, and the displacement caused by the oscillation of the contactor is detected by a displacement detector while tracing the workpiece surface with the contactor, and the surface shape of the workpiece surface is measured based on the displacement detection signal output from the displacement detector (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-161548 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, when measuring the surface shape of a workpiece using a surface shape measuring instrument, an abnormal waveform may occur in the displacement detection signal output from the displacement detector. In this case, it is difficult to determine whether the abnormal waveform is caused by the actual shape of the workpiece surface or by external environmental factors (such as dust adhering to the workpiece surface).

[0005] Therefore, it is conceivable that the measurement results would be less susceptible to the effects of foreign matter adhering to the workpiece surface by increasing the measuring force of the surface profile measuring instrument (the pressure with which the contactor presses the workpiece). However, increasing the measuring force may result in deformation of the workpiece or damage to the workpiece surface.

[0006] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a shape measuring instrument and a control method thereof that are capable of easily detecting the cause of an abnormality occurring in the shape measurement of a measurement object. [Means for solving the problem]

[0007] A shape measuring machine for achieving the object of the present invention is a shape measuring machine that measures the shape of an object to be measured using a contact that contacts the object to be measured, and is equipped with a displacement detector that detects the displacement of the contact, a relative movement mechanism that moves the displacement detector relatively to the object to be measured so that the contact traces the measured surface of the object to be measured, a position detection sensor that detects the relative position of the displacement detector to the object to be measured, a camera that photographs the contact and outputs the photographed image of the contact, and a synchronization control unit that repeatedly executes three operations, including detection of relative position by the position detection sensor, detection of displacement by the displacement detector, and photographing by the camera, in synchronization with each other while relative movement is being performed by the relative movement mechanism.

[0008] According to this shape measuring instrument, the three operations are repeatedly executed in synchronization with each other, so that the operator can check the captured image acquired at the timing synchronized with each relative position of the displacement detector for each relative position of the displacement detector. In other words, the operator can check the captured image corresponding to any relative position.

[0009] In a form measuring instrument according to another aspect of the present invention, a synchronization control unit outputs a synchronization signal for synchronizing the three operations to the position detection sensor, the displacement detector, and the camera, thereby allowing the above-mentioned three operations to be repeatedly executed in synchronization with each other.

[0010] In a form measuring machine according to another aspect of the present invention, a memory control unit is provided that causes the relative position detected by the position detection sensor, the displacement of the contact detected by the displacement detector, and the captured image captured by the camera to be stored in a memory unit in association with each other each time the three operations are synchronously executed, thereby enabling an operator to check the captured image acquired at a timing synchronized with the relative position for each relative position of the displacement detector.

[0011] A shape measuring instrument according to another aspect of the present invention includes a signal generating unit that generates a displacement detection signal indicating the displacement of the contact for each relative position, a display control unit that displays the displacement detection signal generated by the signal generating unit on a monitor, and an operation unit that accepts a designation operation to designate an arbitrary designated position of the displacement detection signal displayed on the monitor, and the display control unit retrieves from the storage unit a photographed image corresponding to the designated position designated by the designation operation on the operation unit and displays the photographed image on the monitor, thereby allowing an operator to check the photographed image corresponding to the desired designated position.

[0012] In a form measuring instrument according to another aspect of the present invention, a display control unit repeatedly acquires a captured image from a storage unit and displays the captured image on a monitor each time the designated position is changed. This allows an operator to check a captured image corresponding to a desired designated position. In addition, when an abnormal waveform occurs in a displacement detection signal, the operator can check images captured before and after the occurrence of the abnormal waveform, so that the cause of the abnormal waveform can be easily detected.

[0013] In a form measuring instrument according to another aspect of the present invention, a low-pass filter is provided that applies low-pass filtering to the displacement detection signal generated by the signal generating unit, and a display control unit has a superimposed display mode that displays the displacement detection signal before and after the low-pass filtering on a monitor. This makes it possible to more accurately eliminate spurious forms caused by external environmental factors such as foreign matter from the form measurement results, thereby further improving the reliability and accuracy of the measurement results.

[0014] A shape measuring machine according to another aspect of the present invention includes a signal generating unit that generates a displacement detection signal indicating the displacement of the contact for each relative position, an abnormal waveform detecting unit that detects an abnormal waveform in the displacement detection signal generated by the signal generating unit, in which the waveform of the displacement detection signal becomes abnormal, and a first abnormality determining unit that, when a range of relative positions in which the abnormal waveform is detected by the abnormal waveform detecting unit is defined as a first range, determines whether or not there is an abnormality in the shape measurement based on a captured image in a memory unit that corresponds to the first range. This makes it possible to automatically determine whether or not there is an abnormality in the shape measurement.

[0015] In a shape measuring instrument according to another aspect of the present invention, the first abnormality determination unit determines the presence or absence of an abnormality in the shape measurement based on the presence or absence of an image of a foreign object in the captured image, thereby making it possible to automatically determine the presence or absence of an abnormality in the shape measurement.

[0016] In a form measuring instrument according to another aspect of the present invention, a remeasurement control unit is provided that drives a relative movement mechanism to execute a remeasurement in which the measured surface is retraced by a contact, and each time the first anomaly determination unit determines that there is an abnormality, the remeasurement control unit executes the remeasurement, the signal generation unit generates a displacement detection signal, the abnormal waveform detection unit detects an abnormal waveform, and the first anomaly determination unit determines whether there is an abnormality in the form measurement. This allows remeasurement to be executed when an abnormality in the form measurement occurs, and therefore makes it possible to more accurately determine whether the abnormality is caused by the actual form of the measured surface or an external environmental factor (such as a foreign object).

[0017] In a form measuring instrument according to another aspect of the present invention, a notification unit is provided that notifies an operator of warning information when the number of remeasurements exceeds a predetermined fixed number, thereby enabling the operator to recognize the occurrence of an abnormality and promptly identify the cause of the abnormality.

[0018] In a shape measuring machine according to another aspect of the present invention, the memory control unit temporarily stores data including the relative position detected by the position detection sensor, the displacement of the contact detected by the displacement detector, and the image captured by the camera in a buffer memory of the memory unit, and stores data from the data temporarily stored in the buffer memory that is determined to be abnormal by the first abnormality determination unit in the data storage of the memory unit.

[0019] In a form measuring machine according to another aspect of the present invention, a second abnormality determination unit is provided that determines the presence or absence of an abnormality in form measurement for each captured image stored in the storage unit, thereby making it possible to automatically determine the presence or absence of an abnormality in form measurement.

[0020] In a shape measuring instrument according to another aspect of the present invention, the second abnormality determination unit determines the presence or absence of an abnormality in shape measurement for each captured image stored in the storage unit based on the presence or absence of an image of a foreign object in the captured image, thereby making it possible to automatically determine the presence or absence of an abnormality in shape measurement.

[0021] A shape measuring machine according to another aspect of the present invention includes a signal generating unit that generates a displacement detection signal indicating the displacement of the contact for each relative position, and a display control unit that displays the displacement detection signal generated by the signal generating unit on a monitor, the display control unit refers to the storage unit to detect a second range that is a range of relative positions corresponding to the captured image in which the second abnormality determination unit has determined that there is an abnormality, and displays on the monitor a waveform area corresponding to the second range in a identifiable manner among the waveforms of the displacement detection signal displayed on the monitor, thereby making it possible to notify an operator of the position and range of the second range in which an abnormality in shape measurement has occurred.

[0022] In a form measuring instrument according to another aspect of the present invention, a notification unit is provided that notifies an operator of warning information when the second abnormality determination unit determines that an abnormality exists, thereby enabling the operator to recognize the occurrence of an abnormality and promptly check the cause of the abnormality.

[0023] In a shape measuring machine according to another aspect of the present invention, the memory control unit temporarily stores data including the relative position detected by the position detection sensor, the displacement of the contact detected by the displacement detector, and the image captured by the camera in a buffer memory of the memory unit, and stores data from the data temporarily stored in the buffer memory that is determined to be abnormal by the second abnormality determination unit in the data storage of the memory unit.

[0024] In a form measuring instrument according to another aspect of the present invention, the relative movement mechanism moves the displacement detector relatively in the horizontal direction with respect to the measurement object.

[0025] In a shape measuring instrument according to another aspect of the present invention, a relative movement mechanism rotates the measurement object and the displacement detector relatively around a center of rotation while keeping a contactor in contact with the peripheral surface of the cylindrical or cylindrical measurement object.

[0026] A control method for a shape measuring machine for achieving the object of the present invention includes a displacement detector having a contact that contacts the object to be measured, and a relative movement mechanism that moves the displacement detector relatively to the object to be measured so that the contact traces the measured surface of the object to be measured, and the control method for a shape measuring machine that uses the contact to measure the shape of the object to be measured includes a position detection step of detecting the relative position of the displacement detector to the object to be measured, a displacement detection step of detecting the displacement of the contact by the displacement detector, an imaging step of photographing the contact and outputting a photographed image of the contact, and a synchronization control step of repeatedly executing three operations, including detection of relative position in the position detection step, detection of displacement in the displacement detection step, and photographing in the imaging step, in synchronization with each other while relative movement is being performed by the relative movement mechanism. Effect of the Invention

[0027] The present invention can easily detect the cause of an abnormality occurring in the shape measurement of a measurement object. [Brief description of the drawings]

[0028] [Figure 1]1 is a schematic diagram of a surface profile measuring instrument according to a first embodiment; [Diagram 2] FIG. 2 is a block diagram showing a configuration of a control device according to the first embodiment. [Diagram 3] 11 is a schematic diagram of saved data stored in a data storage by a storage control unit. FIG. [Figure 4] 11 is an explanatory diagram for explaining display of a captured image on a monitor in response to a designation operation. FIG. [Diagram 5] 13 is an explanatory diagram for explaining switching of the display of a captured image on a monitor in response to a change operation of a designated position. FIG. [Figure 6] 4 is a flowchart showing a flow of a process for measuring the shape of a surface of a workpiece by a surface shape measuring machine. [Figure 7] 5 is a flowchart showing a flow of display processing of a displacement detection signal and a captured image in the surface shape measuring instrument. [Figure 8] FIG. 11 is a block diagram showing the configuration of a control device of a surface profile measuring machine according to a second embodiment. [Figure 9] 13 is an explanatory diagram for explaining a waveform of a displacement detection signal and a captured image 38 displayed on a monitor in the second embodiment. FIG. [Figure 10] FIG. 11 is a block diagram showing the configuration of a control device of a surface profile measuring machine according to a third embodiment. [Figure 11] 4A to 4C are explanatory diagrams for explaining first to third examples of abnormal waveform detection by the abnormal waveform detection unit. [Figure 12] 11 is an explanatory diagram for explaining a process of determining the presence or absence of an abnormality in the shape measurement of a surface by an abnormality determining unit. FIG. [Figure 13] 13 is an explanatory diagram for explaining notification of warning information by a notification control unit according to a third embodiment. FIG. [Figure 14] 13 is a flowchart showing a flow of a re-measurement process and a warning process performed by the surface profile measuring instrument of the third embodiment. [Figure 15] FIG. 13 is a block diagram showing the configuration of a control device of a surface profile measuring machine according to a fourth embodiment. [Figure 16]13 is an explanatory diagram for explaining a process of determining the presence or absence of an abnormality in shape measurement of a surface by an abnormality determining unit of the fourth embodiment. FIG. [Figure 17] 11 is an explanatory diagram for explaining an example of a displacement detection signal displayed on the monitor when the abnormality determination unit determines that there is an abnormality in the shape measurement of the surface. FIG. [Figure 18] 13 is an explanatory diagram for explaining notification of warning information by a notification control unit according to a fourth embodiment. FIG. [Figure 19] FIG. 1 is a schematic diagram of a roundness measuring machine. [Figure 20] 11 is an explanatory diagram for explaining an effect obtained by photographing a contact with a camera while the turntable and the workpiece are rotating. FIG. [Figure 21] FIG. 11 is a block diagram showing a modified example of the surface profile measuring instrument according to the third embodiment. [Figure 22] FIG. 13 is a block diagram showing a modified example of the surface profile measuring instrument according to the fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0029] [First embodiment] Fig. 1 is a schematic diagram of a surface profile measuring machine 10 of a first embodiment corresponding to the profile measuring machine of the present invention. As shown in Fig. 1, the surface profile measuring machine 10 measures the profile of a surface Wa of a workpiece W, specifically, measures the contour shape or surface roughness. Here, the workpiece W corresponds to the measurement target of the present invention, and the surface Wa corresponds to the measured surface of the present invention. In addition, among the mutually orthogonal XYZ directions in the figure, the XY plane including the XY directions is a plane parallel to the horizontal direction, and the Z direction is an up-down direction perpendicular to the horizontal direction.

[0030] The surface profile measuring instrument 10 includes a flat measuring stage 12, a column 14, a detector moving mechanism 16, a position detection sensor 18, a displacement detector 20, a camera 22, an operation unit 25, a monitor 27, and a control device .

[0031] A workpiece W is set on the upper surface of the measurement table 12, which is parallel to the XY plane. A column 14 extending in the Z direction is provided on the upper surface of the measurement table 12. A detector moving mechanism 16 is attached to this column 14 so as to be freely movable in the Z direction.

[0032] The detector moving mechanism 16 corresponds to the relative movement mechanism of the present invention, and is a known actuator that holds the holder 17 movably in the X direction. By driving the detector moving mechanism 16, the displacement detector 20 (contact 34) can be moved in the X direction relative to the workpiece W. In addition, the detector moving mechanism 16 is provided with a position detection sensor 18.

[0033] The position detection sensor 18 has a linear scale 18a extending in, for example, the X direction (left-right direction), and a read head 18b that reads the linear scale 18a by various methods such as optical or magnetic. The position detection sensor 18 detects the X direction position of a displacement detector 20 (described later), i.e., the relative position of the displacement detector 20 in the X direction with respect to the workpiece W, by detecting the X direction displacement (displacement direction and displacement amount) of the holder 17 moved in the X direction by the detector moving mechanism 16. The position detection sensor 18 outputs an X direction position detection result D1 of the displacement detector 20 to the control device 28. Note that a known detector other than a scale type detector may be used as the position detection sensor 18.

[0034] The holder 17 is provided with a displacement detector 20 and a camera 22. As a result, the displacement detector 20 is held by the detector moving mechanism 16 via the holder 17 so as to be freely movable in the X direction. In addition, the displacement detector 20 is held by the column 14 via the holder 17 and the detector moving mechanism 16 so as to be freely position-adjustable in the Z direction.

[0035] The displacement detector 20 includes a swing fulcrum 30, an arm 32, a contact 34, and a displacement detection sensor 36.

[0036] The swing fulcrum 30 supports an arm 32 so that it can swing freely around a rotation axis (swing axis) parallel to the Y direction.

[0037] The arm 32 is supported to be freely swingable on the swing fulcrum 30, and has an arm tip end 32a extending in one direction in the X direction (the side opposite to the column 14), and an arm base end 32b extending in the other direction in the X direction.

[0038] A contactor 34 (also called a stylus or a measuring probe) is provided on the tip side of the arm tip portion 32a. The contactor 34 comes into contact with the surface Wa. The contactor 34 is displaced in the Z direction as the arm 32 swings around the swing fulcrum 30. Furthermore, the contactor 34 traces (scans) the surface Wa along the X direction as the displacement detector 20 is moved in the X direction by the detector moving mechanism 16.

[0039] The arm base end 32b is biased upward in the Z direction by a biasing member (not shown). As a result, the arm tip end 32a and the contact 34 are biased downward in the Z direction around the swing fulcrum 30. This maintains the contact 34 in contact with the surface Wa.

[0040] The displacement detection sensor 36 may be, for example, a Linear Variable Differential Transformer (LVDT). In this case, the displacement detection sensor 36 includes a core provided at the arm base end 32b and a coil into which the core is inserted, although not shown. The displacement detection sensor 36 detects a displacement (displacement direction and displacement amount) in the Z direction caused by the swing of the arm 32 and the contact 34, and outputs a displacement detection result D2, which is a detection result of this displacement, to the control device 28. Note that a known sensor other than the LVDT (for example, a scale-type sensor) may also be used as the displacement detection sensor 36.

[0041] The camera 22 is provided in the holder 17, and continuously photographs (takes video) the tip of the contact 34, and sequentially outputs photographed images 38 (image data) of the contact 34 to the control device 28. Based on the photographed images 38, it is possible to check whether or not foreign matter 59 (see FIG. 4) such as dust is attached to the surface Wa, and to check the actual shape of the surface Wa.

[0042] The operation unit 25 includes, for example, a keyboard, a mouse, an operation panel, and operation buttons, and receives input of various operations by an operator.

[0043] Various displays such as a known liquid crystal display are used as the monitor 27. The monitor 27 displays a displacement detection signal D3 (see FIG. 2) described below which is the shape measurement result of the surface Wa by the surface shape measuring instrument 10, an image 38 captured by the camera 22, various setting screens, various operation screens, etc.

[0044] The control device 28 includes an arithmetic circuit including various processors and memories. The various processors include a central processing unit (CPU), a graphics processing unit (GPU), an application specific integrated circuit (ASIC), and a programmable logic device (e.g., simple programmable logic devices (SPLD), complex programmable logic devices (CPLD), and field programmable gate arrays (FPGA)). The various functions of the control device 28 may be realized by one processor, or may be realized by multiple processors of the same or different types.

[0045] Fig. 2 is a block diagram showing the configuration of the control device 28 of the first embodiment. As shown in Fig. 2, the above-mentioned detector moving mechanism 16, the position detection sensor 18, the displacement detection sensor 36 of the displacement detector 20, the camera 22, the operation unit 25, the monitor 27, etc. are connected to the control device 28, and the control device 28 controls the overall operation of each part of the surface shape measuring device 10. The control device 28 also synchronizes the detection by the position detection sensor 18, the detection by the displacement detection sensor 36, and the photographing by the camera 22. Furthermore, every time the above-mentioned detection and photographing are performed, the control device 28 associates the X-direction position detection result D1 of the displacement detector 20 detected by the position detection sensor 18, the displacement detection result D2 of the contact 34 detected by the displacement detection sensor 36, and the photographed image 38 photographed by the camera 22, and stores them in the data storage 50.

[0046] The control device 28 includes a drive control unit 40, a synchronization control unit 42, a signal acquisition unit 44, an image acquisition unit 46, a memory control unit 48, a data storage 50, a signal generation unit 52, a low pass filter 54 (LPF), and a display control unit 56.

[0047] The drive control unit 40 controls the driving of the detector moving mechanism 16. In response to input of a measurement start operation to the operation unit 25, the drive control unit 40 drives the detector moving mechanism 16 to move the displacement detector 20 and the like in the X direction. This causes the contact 34 to trace the surface Wa along the X direction, i.e., the shape measurement of the surface Wa is performed.

[0048] The synchronization control unit 42 outputs a synchronization signal CL to the position detection sensor 18, the displacement detection sensor 36, and the camera 22 while the detector moving mechanism 16 is moving the displacement detector 20 in the X direction, i.e., while the surface profile measuring device 10 is measuring the profile of the surface Wa (hereinafter simply referred to as "during surface profile measurement"). This synchronization signal CL is a signal that synchronizes detection by the position detection sensor 18, detection by the displacement detection sensor 36, and photographing by the camera 22, and a clock signal is used, for example. As a result, during the surface profile measurement, three operations including detection of the X direction position of the displacement detector 20 by the position detection sensor 18, detection of the displacement of the contact 34 by the displacement detection sensor 36, and photographing of the contact 34 by the camera 22 (hereinafter simply referred to as "three operations") are repeatedly executed in synchronization with one another by the synchronization signal CL.

[0049] The signal acquiring unit 44 is a connection interface that connects to the position detection sensor 18 and the displacement detection sensor 36. During surface shape measurement, the signal acquiring unit 44 acquires the X-direction position detection result D1 of the displacement detector 20 from the position detection sensor 18 and outputs the X-direction position detection result D1 to the memory control unit 48, and also acquires the displacement detection result D2 of the contact 34 from the displacement detection sensor 36 and outputs the displacement detection result D2 to the memory control unit 48.

[0050] The image acquisition unit 46 is a connection interface that connects to the camera 22. The image acquisition unit 46 repeatedly acquires the captured image 38 from the camera 22 and outputs the captured image 38 to the storage control unit 48 during surface shape measurement.

[0051] Fig. 3 is a schematic diagram of saved data 51 stored in data storage 50 by storage control unit 48. As shown in Fig. 3 and the above-mentioned Fig. 2, data storage 50 corresponds to the storage unit of the present invention, and is any of various known storage media (memory, storage, etc.) capable of permanently (or temporarily) storing data.

[0052] During the surface shape measurement, the storage control unit 48 stores saved data 51 in the data storage 50. This saved data 51 is data in which the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 acquired in three operations synchronized with the synchronization signal CL during the surface shape measurement are associated with each other and continuously stored.

[0053] Specifically, every time one of the three operations is performed in synchronization with the synchronization signal CL, the storage control unit 48 associates the X-direction position detection result D1 and the displacement detection result D2 input from the position detection sensor 18 and the displacement detection sensor 36 via the signal acquisition unit 44 with the captured image 38 input from the camera 22 via the image acquisition unit 46, and stores them in the data storage 50. As a result, every time one of the three operations is performed, the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 are repeatedly stored in the data storage 50 in an associated state.

[0054] 2, the signal generating unit 52 refers to the stored data 51 in the data storage 50 to generate a displacement detection signal D3 indicating the Z-direction displacement of the contact 34 for each X-direction position of the displacement detector 20 (contact 34), i.e., the surface shape of the surface Wa, and outputs this displacement detection signal D3 to the low-pass filter 54. Note that the signal generating unit 52 may generate the displacement detection signal D3 and output it to the low-pass filter 54 by directly and continuously acquiring the X-direction position detection result D1 and the displacement detection result D2 from the signal acquiring unit 44 during the surface shape measurement.

[0055] The low-pass filter 54 performs low-pass filtering on the displacement detection signal D3 output from the signal generating unit 52 based on a preset cutoff value, and removes high-frequency noise from the displacement detection signal D3. The displacement detection signal D3 output from the low-pass filter 54 is input to the display control unit 56.

[0056] The display control unit 56 causes the monitor 27 to display the displacement detection signal D3 input from the low-pass filter 54. Furthermore, in response to a designation operation input to the operation unit 25, which will be described later, the display control unit 56 causes the monitor 27 to display the captured image 38 corresponding to this designation operation.

[0057] Fig. 4 is an explanatory diagram for explaining the display of the photographed image 38 on the monitor 27 in response to a designation operation. As shown by reference symbol 4A in Fig. 4 and the above-described Fig. 2, the operation unit 25 accepts input of a designation operation for designating an arbitrary designated position SP on the waveform of the displacement detection signal D3 displayed on the monitor 27. In this way, for example, when an abnormal waveform ER is included in the waveform of the displacement detection signal D3 on the monitor 27, the operator can designate this abnormal waveform ER as the designated position SP.

[0058] 4, first, the display control unit 56 determines the X-direction position of the displacement detector 20 corresponding to the designated position SP, based on the designation operation of the designated position SP on the operation unit 25. Next, the display control unit 56 refers to the data storage 50 based on the determined X-direction position, and acquires the captured image 38 corresponding to this X-direction position from the stored data 51.

[0059] 4, the display control unit 56 causes the monitor 27 to display the captured image 38 acquired from the stored data 51 in addition to the displacement detection signal D3. This allows the operator to check the captured image 38 corresponding to the designated position SP. The captured image 38 corresponding to the designated position SP here refers to the captured image 38 captured by the camera 22 in synchronization with detection of the X-direction position of the displacement detector 20 corresponding to the designated position SP.

[0060] Furthermore, when the display control unit 56 causes the monitor 27 to display the waveform of the displacement detection signal D3 together with the captured image 38, it causes a cursor Cu indicating the designated position SP to be superimposed on the waveform of the displacement detection signal D3.

[0061] 5 is an explanatory diagram for explaining display switching of the captured image 38 on the monitor 27 in response to a change operation of the designated position SP. As shown by reference numeral 5A in FIG. 5, when a designated position change operation C1 for moving the cursor Cu (designated position SP) in the X direction is input to the operation unit 25, the display control unit 56 re-determines the X direction position of the displacement detector 20 corresponding to the cursor Cu after the movement. Next, as shown by reference numeral 5B in FIG. 5, the display control unit 56 acquires the captured image 38 corresponding to this X direction position from the stored data 51 based on the re-determination result of the X direction position of the displacement detector 20.

[0062] 5, the display control unit 56 updates the display of the photographed image 38 on the monitor 27 based on the photographed image 38 acquired from the stored data 51. Thereafter, each time a designated position change operation C1 of the cursor Cu (designated position SP) is performed, the re-determination of the X-direction position of the displacement detector 20, acquisition of the photographed image 38 from the stored data 51, and display update of the photographed image 38 on the monitor 27 are repeatedly performed. This allows the operator to check the photographed image 38 corresponding to the desired position of the cursor Cu (designated position SP).

[0063] Each time the cursor Cu is moved, a connected image (so-called panoramic image) may be generated by connecting the photographed images 38 before and after the designated position SP indicated by the cursor Cu, and this connected image may be displayed on the monitor 27. Also, instead of simultaneously displaying the photographed image 38 and the displacement detection signal D3 on the monitor 27, one of them may be selectively displayed.

[0064] [Operation of the first embodiment] Fig. 6 is a flow chart showing the flow of the shape measurement process of the surface Wa of the workpiece W by the surface shape measuring machine 10 according to the control method for a shape measuring machine of the present invention. As shown in Fig. 6, the operator sets the workpiece W on the measurement table 12 and brings the tip of the contact 34 into contact with the surface Wa, and then performs a measurement start operation on the operation unit 25. In response to this operation, the drive control unit 40 drives the detector moving mechanism 16 to move the displacement detector 20 in the X direction (step S1). As a result, the surface Wa is traced along the X direction by the contact 34.

[0065] In response to the measurement start operation, the synchronization control unit 42 outputs a synchronization signal CL to the position detection sensor 18, the displacement detection sensor 36, and the camera 22 (step S2, which corresponds to the synchronization control step of the present invention). As a result, three operations including detection of the X-direction position of the displacement detector 20 by the position detection sensor 18 (step S3A), detection of the displacement of the contact 34 by the displacement detection sensor 36 (step S3B), and photographing the contact 34 by the camera 22 (step S3C) are executed synchronously. Note that step S3A corresponds to the position detection step of the present invention, step S3B corresponds to the displacement detection step of the present invention, and step S3C corresponds to the photographing step of the present invention.

[0066] Next, the X-direction position detection result D1 detected by the position detection sensor 18 and the displacement detection result D2 detected by the displacement detection sensor 36 are input to the storage control unit 48 via the signal acquisition unit 44. Also, the captured image 38 captured by the camera 22 is input to the storage control unit 48 via the image acquisition unit 46. Then, as shown in FIG. 3 described above, the storage control unit 48 associates the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 acquired by the three synchronized operations, and stores them in the saved data 51 (step S4).

[0067] Thereafter, the processes from step S2 to step S4 are repeatedly executed until the movement of the displacement detector 20 is completed (step S5). As a result, during the surface shape measurement, the three operations are repeatedly executed in synchronization with one another by the synchronization signal CL, and each time the three operations are executed, the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 are repeatedly stored in the saved data 51 in an associated state.

[0068] Fig. 7 is a flowchart showing the flow of display processing of the displacement detection signal D3 and the captured image 38 in the surface shape measuring instrument 10. As shown in Fig. 7, after completing the shape measurement of the surface Wa, when the operator executes a display operation of the displacement detection signal D3 on the operation unit 25, the signal generating unit 52 generates the displacement detection signal D3 by referring to the stored data 51. This displacement detection signal D3 is subjected to low-pass filtering by the low-pass filter 54, and then input to the display control unit 56. Then, the display control unit 56 causes the monitor 27 to display the displacement detection signal D3 after the low-pass filtering (step S10).

[0069] When the displacement detection signal D3 is displayed on the monitor 27, the operator inputs a designation operation to the operation unit 25 to designate an arbitrary designated position SP (for example, an arbitrary point in the abnormal waveform ER) of the displacement detection signal D3 on the monitor 27 as shown in Fig. 4 (step S11). In response to this operation, the display control unit 56 determines the X-direction position of the displacement detector 20 corresponding to the designated position SP (step S12), and obtains the captured image 38 corresponding to this X-direction position from the stored data 51 (step S13).

[0070] Next, the display control unit 56 displays the displacement detection signal D3 and the photographed image 38 acquired from the stored data 51 on the monitor 27, and also displays the cursor Cu superimposed on the waveform of the displacement detection signal D3 (step S14). In this way, when the operator designates an abnormal waveform ER as a designated position SP, the operator can easily determine whether the abnormal waveform ER is caused by a foreign substance 59 attached to the surface Wa or a scratch on the surface Wa, based on the photographed image 38 corresponding to the designated position SP.

[0071] Next, when the operator executes the operation C1 of changing the designated position of the cursor Cu on the operation unit 25 as shown in Fig. 5, the processes from step S12 to step S14 are repeatedly executed, and the photographed image 38 corresponding to the position of the cursor Cu after the position change (designated position SP) is displayed on the monitor 27 (step S15). This allows the operator to check the photographed images 38 taken before and after the abnormal waveform ER, and therefore the cause of the occurrence of the abnormal waveform ER can be easily detected.

[0072] [Effects of the first embodiment] As described above, in the first embodiment, by repeatedly executing three operations (detecting the X-direction position, detecting the displacement of the contact 34, and photographing the contact 34) in synchronization with one another during surface shape measurement, each time the three operations are executed, the X-direction position detection result D1, the displacement detection result D2, and the photographed image 38 can be associated with each other and stored in the saved data 51. As a result, the operator can check the photographed image 38 that corresponds to a desired position on the waveform of the displacement detection signal D3, and therefore the cause of an abnormality occurring in the shape measurement of the surface Wa can be detected efficiently and easily.

[0073] [Second embodiment] Fig. 8 is a block diagram showing the configuration of the control device 28 of the surface profile measuring machine 10 of the second embodiment. Fig. 9 is an explanatory diagram for explaining the waveform of the displacement detection signal D3 and the captured image 38 displayed on the monitor 27 in the second embodiment. Note that the surface profile measuring machine 10 of the second embodiment has basically the same configuration as the above-mentioned first embodiment except for the method of displaying the displacement detection signal D3 on the monitor 27. Therefore, the same reference numerals are used for components that are the same in function or configuration as the above-mentioned first embodiment, and their description will be omitted.

[0074] The display control unit 56 in the first embodiment displays the displacement detection signal D3 after low-pass filtering by the low-pass filter 54 on the monitor 27. In this case, it is difficult to distinguish a protruding shape (false shape) of the waveform caused by a foreign substance 59 or the like attached to the surface Wa from the waveform of the displacement detection signal D3.

[0075] 8 and 9, the display control unit 56 of the second embodiment has a superimposed display mode for superimposing the displacement detection signal D3 before and after the low-pass filter processing by the low-pass filter 54 on the monitor 27. This makes it possible to easily distinguish the above-mentioned false shape that becomes difficult to distinguish due to the low-pass filter processing.

[0076] 9, by setting a cursor Cu (designated position SP) at a position where a false shape occurs on the waveform of the displacement detection signal D3, a captured image 38 in the vicinity can be displayed on the monitor 27. This makes it possible to identify with higher accuracy the cause of the abnormality in the shape measurement of the surface Wa, thereby improving the reliability of this shape measurement.

[0077] [Third embodiment] 10 is a block diagram showing the configuration of a control device 28 of a surface profile measuring machine 10 according to the third embodiment. The surface profile measuring machine 10 according to the third embodiment determines whether or not there is an abnormality in the profile measurement of the surface Wa based on the displacement detection signal D3, and remeasures the profile of the surface Wa if it determines that there is an abnormality in the profile measurement.

[0078] The surface profile measuring instrument 10 of the third embodiment has basically the same configuration as the above-mentioned embodiments, except that the control device 28 is provided with an abnormal waveform detection unit 60, an abnormality judgment unit 62, a remeasurement control unit 64, and an alarm control unit 66. Therefore, the same reference numerals are used for components that are the same in function or configuration as the above-mentioned embodiments, and their description will be omitted.

[0079] The abnormal waveform detector 60 detects an abnormal waveform ER from the waveform of the displacement detection signal D3 generated by the signal generator 52.

[0080] FIG. 11 is an explanatory diagram for explaining a first to a third example of detection of an abnormal waveform ER by the abnormal waveform detector 60. In FIG.

[0081] 11, in the first example, the abnormal waveform detection unit 60 determines whether or not an abnormal waveform ER has occurred based on the displacement detection signal D3, based on whether the amount of displacement of the contact 34 in the Z direction is greater than a predetermined abnormality determination threshold ET or falls within a normal range NR (within the abnormality determination threshold ET). If the abnormal waveform detection unit 60 determines that an abnormal waveform ER has occurred, it outputs range information 67 (corresponding to the first range of the present invention) indicating the range of the X-direction position of the abnormal waveform ER to the abnormality determination unit 62.

[0082] 11, in the second example, the abnormal waveform detection section 60 determines, based on the displacement detection signal D3, that an abnormal waveform ER has occurred when the amount of displacement of the contact 34 in the Z direction exceeds the abnormality determination threshold ET continuously for a predetermined period of time or more, and outputs range information 67 of the abnormal waveform ER to the abnormality determination section 62. This prevents erroneous detection of the occurrence of an abnormal waveform ER due to noise in the displacement detection signal D3.

[0083] 11, in the third example, the abnormal waveform detection section 60 calculates a moving average line MA of the displacement amount in the Z direction of the contact 34 based on the displacement detection signal D3. Then, when the deviation of the displacement amount from the moving average line MA returns to the original state (within the abnormality determination threshold ET) from a state where it has exceeded the abnormality determination threshold ET, the abnormal waveform detection section 60 determines that an abnormal waveform ER has occurred, and outputs range information 67 of the abnormal waveform ER to the abnormality determination section 62. This makes it possible to distinguish between a drift in the displacement detection signal D3 and the abnormal waveform ER, thereby improving the detection accuracy of the abnormal waveform detection section 60.

[0084] Fig. 12 is an explanatory diagram for explaining the process of determining whether or not there is an abnormality in the shape measurement of the surface Wa by the abnormality determination unit 62. As shown in Fig. 12, the abnormality determination unit 62 corresponds to the first abnormality determination unit of the present invention, and determines whether or not there is an abnormality in the shape measurement of the surface Wa, based on range information 67 of the abnormal waveform ER input from the abnormal waveform detection unit 60, with reference to the stored data 51 (captured image 38).

[0085] Specifically, based on the range information 67 input from the abnormal waveform detection unit 60, the abnormality determination unit 62 acquires the captured image 38 corresponding to the X-direction position (range) of the displacement detector 20 indicated by this range information 67, i.e., the captured image 38 corresponding to the occurrence location of the abnormal waveform ER, from the stored data 51. Then, the abnormality determination unit 62 performs image analysis of the captured image 38 corresponding to the occurrence location of the abnormal waveform ER using a known method (such as a pattern matching method), and determines the presence or absence of an abnormality in the shape measurement of the surface Wa based on whether or not the captured image 38 contains an image of a foreign object 59 or a scratch (not shown).

[0086] 10, when the anomaly determination unit 62 determines that there is an anomaly in the shape measurement, the remeasurement control unit 64 drives the detector moving mechanism 16 via the drive control unit 40 to move the displacement detector 20 in the X direction, thereby executing a remeasurement in which the measurement area of ​​the surface Wa is re-traced along the X direction with the contact 34. As a result, the above-mentioned three operations are repeatedly executed in synchronization with each other as in the above embodiments, and each time the three operations are executed, the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 can be associated with each other and stored in the saved data 51. Note that in this embodiment, the entire measurement area of ​​the surface Wa is remeasured, but it is also possible to remeasure only the location where the abnormal waveform ER occurs in the measurement area based on the range information 67.

[0087] When re-measurement is executed by the re-measurement control unit 64, the generation of the displacement detection signal D3 by the signal generation unit 52, the detection of the abnormal waveform ER by the abnormal waveform detection unit 60, and the judgment by the abnormality judgment unit 62 are repeatedly executed. Thereafter, each time the abnormality judgment unit 62 judges that there is an abnormality in the shape measurement, re-measurement by the re-measurement control unit 64, the generation of the displacement detection signal D3 by the signal generation unit 52, the detection of the abnormal waveform ER by the abnormal waveform detection unit 60, and the judgment by the abnormality judgment unit 62 are repeatedly executed within a certain number of times described later.

[0088] FIG. 13 is an explanatory diagram for explaining the notification of warning information 68 by the notification control unit 66 of the third embodiment. As shown in FIG. 13 and the already described FIG. 10, the notification control unit 66, together with the monitor 27, constitutes the notification unit of the present invention. When the number of times that the remeasurement control unit 64 executes the remeasurement exceeds a predetermined number of times, the notification control unit 66 causes the monitor 27 to display warning information 68 indicating that fact. This makes it possible to notify the operator of the occurrence of an abnormality in the shape measurement of the workpiece W (surface Wa). Note that instead of displaying the warning information 68 on the monitor 27, or in addition to displaying the warning information 68 on the monitor 27, the warning information 68 may be output as sound from a speaker (corresponding to the notification unit) (not shown).

[0089] 14 is a flowchart showing the flow of the re-measurement process and the warning process by the surface profile measuring instrument 10 of the third embodiment. Note that the flow of the profile measurement of the surface Wa of the workpiece W from step S1 to step S5 is similar to that of the first embodiment shown in FIG. 6, and therefore a detailed description thereof will be omitted here.

[0090] When the initial shape measurement of the surface Wa is completed, the signal generating unit 52 generates the displacement detection signal D3 by referring to the stored data 51 (step S21). When the generation of the displacement detection signal D3 is completed, the abnormal waveform detecting unit 60 detects an abnormal waveform ER from the waveform of the displacement detection signal D3 as shown in Fig. 11 above, and when an abnormal waveform ER is included in the displacement detection signal D3, outputs the range information 67 to the abnormality determining unit 62 (step S22).

[0091] Next, the abnormality determination unit 62 acquires the captured image 38 corresponding to the occurrence location of the abnormal waveform ER from the stored data 51 based on the range information 67 input from the abnormal waveform detection unit 60 as shown in Fig. 12 (step S23). Then, the abnormality determination unit 62 determines whether or not the captured image 38 contains an image of a foreign substance 59 or a scratch (not shown) using a known image analysis method, thereby determining whether or not there is an abnormality in the shape measurement of the surface Wa (step S24).

[0092] If the abnormality determination unit 62 determines that there is an abnormality in the shape measurement (YES in step S24, NO in step S25), the remeasurement control unit 64 drives the detector moving mechanism 16 via the drive control unit 40 to remeasure the shape of the surface Wa (step S26). As a result, the above-mentioned three operations are repeatedly performed in synchronization with each other, and each time the three operations are performed, the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 can be stored in the saved data 51 in association with each other.

[0093] When the remeasurement is completed, the processes from step S21 to step S24 are repeatedly executed. If the abnormality determination unit 62 determines that there is an abnormality in the shape measurement and the number of remeasurements is less than the above-mentioned certain number of times, the processes from step S26 and S21 to S24 are repeatedly executed again (YES in step S24, NO in step S25). Thereafter, the above-mentioned processes are repeatedly executed every time the abnormality determination unit 62 determines that there is an abnormality in the shape measurement until the number of remeasurements reaches the certain number of times. Even if a false shape caused by a foreign substance 59 attached to the surface Wa occurs in the displacement detection signal D3, the risk of adopting the false shape as the measurement result is reduced by repeatedly executing remeasurements.

[0094] When the number of remeasurements exceeds a certain number, the notification control unit 66 performs a warning display by displaying warning information 68 indicating that fact on the monitor 27 as shown in Fig. 13 described above (YES in step S25, step S27). This makes it possible to notify the operator of the occurrence of an abnormality in the shape measurement of the surface Wa. As a result, the operator recognizes the occurrence of the abnormality and can promptly check the cause of the abnormality.

[0095] As described above, in the third embodiment, the presence or absence of an abnormality in the shape measurement of the surface Wa is determined based on the waveform of the displacement detection signal D3, and if an abnormality occurs in the shape measurement, re-measurement is performed, making it possible to more accurately determine whether the abnormality is caused by the actual shape of the surface Wa or by an external environmental factor (such as foreign matter 59).

[0096] [Fourth embodiment] 15 is a block diagram showing the configuration of the control device 28 of the surface profile measuring machine 10 of the fourth embodiment. The abnormality determination unit 62 of the third embodiment determines the presence or absence of an abnormality in the profile measurement of the surface Wa based on the displacement detection signal D3, but the abnormality determination unit 62 of the fourth embodiment determines the presence or absence of an abnormality in the profile measurement based on the captured image 38 stored in the saved data 51.

[0097] As shown in FIG. 15, the surface profile measuring instrument 10 of the fourth embodiment has basically the same configuration as the surface profile measuring instrument 10 of the above-described fourth embodiment, so that components that are the same in function or configuration as those of the above-described third embodiment are given the same reference numerals and their description will be omitted.

[0098] FIG. 16 is an explanatory diagram for explaining the process of determining the presence or absence of an abnormality in the shape measurement of the surface Wa by the abnormality determining unit 62 (corresponding to the second abnormality determining unit of the present invention) of the fourth embodiment.

[0099] As shown in FIG. 16 and the above-mentioned FIG. 15, the abnormality determination unit 62 of the fourth embodiment performs image analysis on each captured image 38 stored in the saved data 51 by a known method similar to that of the third embodiment. Specifically, the abnormality determination unit 62 determines the presence or absence of an abnormality in the shape measurement for each captured image 38 in the saved data 51 based on whether or not an image of a foreign body 59 or a scratch (not shown) is included in the captured image 38. As a result, when the abnormality determination unit 62 determines that an abnormality exists in the shape measurement, a remeasurement is performed by the remeasurement control unit 64 as in the fourth embodiment. Note that the entire measured area of ​​the surface Wa may be remeasured, or only the location where the abnormal waveform ER occurs in the measured area may be remeasured based on range information 67A described later.

[0100] Furthermore, when the abnormality determination unit 62 determines that there is an abnormality in the shape measurement of the surface Wa, it generates range information 67A (corresponding to the second range of the present invention) indicating the range of the X-direction position of the displacement detector 20 corresponding to the captured image 38 for which it has been determined that there is an abnormality in the shape measurement, with reference to the stored data 51. Then, the abnormality determination unit 62 outputs the range information 67A to the display control unit 56.

[0101] Furthermore, when the abnormality determination unit 62 determines that there is an abnormality in the shape measurement of the surface Wa, it extracts data of the abnormal waveform ER corresponding to the range information 67A from the displacement detection signal D3 generated by the signal generation unit 52 based on the range information 67A described above. Furthermore, the abnormality determination unit 62 generates abnormality content information 69 indicating the content of the abnormality in the shape measurement (e.g., adhesion of a foreign matter 59, etc.) based on the image analysis result of the captured image 38 determined to have an abnormality in the shape measurement. Then, the abnormality determination unit 62 generates warning information 70 (see FIG. 18 ) including the range information 67A, the data of the abnormal waveform ER, the abnormality content information 69, and the captured image 38 determined to have an abnormality in the shape measurement, and outputs the warning information 70 to the notification control unit 66.

[0102] Fig. 17 is an explanatory diagram for explaining an example of a displacement detection signal D3 displayed on the monitor 27 when the abnormality determination unit 62 determines that there is an abnormality in the shape measurement of the surface Wa. As shown in Fig. 17, the display control unit 56 causes the monitor 27 to display the displacement detection signal D3 when the abnormality determination unit 62 determines that there is an abnormality in the shape measurement.

[0103] At this time, the display control unit 56 displays, for example, in color, the waveform region WR corresponding to the range information 67A in the waveform of the displacement detection signal D3 displayed on the monitor 27 in a identifiable manner based on the range information 67A input from the abnormality determination unit 62. This makes it possible to notify the operator of the position and range of the range information 67A in which an abnormality in the shape measurement occurs. Note that there is no particular limitation on the display mode as long as the waveform region WR is identifiable.

[0104] Fig. 18 is an explanatory diagram for explaining the notification of warning information 70 by the notification control unit 66 of the fourth embodiment. As shown in Fig. 18, when the abnormality determination unit 62 determines that there is an abnormality in the shape measurement of the surface Wa, the notification control unit 66 of the fourth embodiment controls the display control unit 56 to display the warning information 70 on the monitor 27 based on the warning information 70 input from the abnormality determination unit 62. This makes it possible to notify the operator of the occurrence of an abnormality in the shape measurement of the surface Wa, the position (range) and content of the abnormality, the abnormal waveform ER, and the captured image 38 of the location where the abnormality has occurred.

[0105] As described above, in the fourth embodiment, since it is possible to determine the presence or absence of an abnormality in shape measurement based on the photographed image 38 stored in the data storage 50 (saved data 51), the same effects as in the third embodiment can be obtained.

[0106] [Fifth embodiment] Fig. 19 is a schematic diagram of a roundness measuring machine 100 corresponding to the shape measuring machine of the present invention. As shown in Fig. 19, the roundness measuring machine 100 (including a cylindrical shape measuring machine) measures the roundness of a peripheral surface Wb (outer peripheral surface, inner peripheral surface) of a columnar or cylindrical workpiece W using a contact 132. The peripheral surface Wb corresponds to the surface to be measured.

[0107] The roundness measuring machine 100 includes a measuring table 102, a rotating table 104, a motor 106, a rotation angle detection sensor 108, a column 110, a horizontal arm 112, a displacement detector 114, a camera 116, an operation unit 118, a monitor 120, and a control device 122.

[0108] The measurement stage 102 is a support stage (base) that supports each component of the roundness measuring machine 100. A rotating table 104 and a column 110 are provided on the upper surface side of the measurement stage 102. In addition, a motor 106 and a rotation angle detection sensor 108 are provided inside the measurement stage 102.

[0109] A workpiece W is placed on the upper surface of the rotary table 104. The rotary table 104 is provided on the measurement stage 102 so as to be rotatable about a rotation center RC (rotation axis) parallel to the Z direction.

[0110] The motor 106 corresponds to a relative movement mechanism of the present invention, and rotates the turntable 104 about a rotation center RC under the control of a control device 122 described later. By rotating the turntable 104 in this manner, the displacement detector 114 (contact 132) can be moved relatively to the peripheral surface Wb in its circumferential direction (hereinafter simply referred to as the workpiece circumferential direction).

[0111] The rotation angle detection sensor 108 corresponds to a position detection sensor of the present invention, and for example, a rotary encoder is used. The rotation angle detection sensor 108 detects the relative position of the displacement detector 114 in the workpiece circumferential direction with respect to the peripheral surface Wb by detecting the rotation angle of the turntable 104. The rotation angle detection sensor 108 outputs the rotation angle detection result Dθ of the turntable 104 to the control device 122.

[0112] The column 110 is provided on the upper surface of the measurement table 102 at a position shifted in the X direction from the rotary table 104, and has a shape extending in the Z direction. The column 110 holds a horizontal arm 112 via a carriage (not shown) so that the horizontal arm 112 can move freely in the Z and X directions. A displacement detector 114 is attached to the tip of the horizontal arm 112.

[0113] The displacement detector 114 includes an arm 130, a contact 132, and a displacement detection sensor 134. The arm 130 is supported in the displacement detector 114 on a fulcrum parallel to the Y direction so as to be able to freely swing.

[0114] The contactor 132 is provided at the tip of the arm 130 and comes into contact with the circumferential surface Wb. In this embodiment, the contactor 132 is displaced in the X direction as indicated by the arrow AX in the figure when the arm 130 swings. Furthermore, the motor 106 rotates the turntable 104 and the workpiece W relative to the displacement detector 114, so that the contactor 132 traces (scans) the circumferential surface Wb along the circumferential direction of the workpiece.

[0115] The displacement detection sensor 134 is, for example, a linear variable differential transformer or a scale-type sensor similar to the displacement detection sensor 36 in each of the above embodiments, and detects the displacement of the contact 132 in the X direction and outputs the displacement detection result D2 to the control device 122.

[0116] The camera 116 is provided on the horizontal arm 112 and continuously photographs (takes moving images of) the tip of the contact 132 and sequentially outputs the photographed images 38 of the contact 132 to the control device 122.

[0117] The operation unit 118 includes, for example, a keyboard, a mouse, an operation panel, and operation buttons, and receives input of various operations by an operator.

[0118] Various displays such as a known liquid crystal display are used as the monitor 120. The monitor 120 displays a displacement detection signal D3 which is the shape measurement result of the peripheral surface Wb, an image 38 captured by the camera 116, various setting screens, various operation screens, and the like.

[0119] The control device 122 comprehensively controls the operations of each part of the roundness measuring machine 100. This control device 122 has basically the same configuration as the control device 28 in each of the above-mentioned embodiments, and synchronizes three operations including detection by the rotation angle detection sensor 108, detection by the displacement detection sensor 134, and photographing by the camera 116. Furthermore, every time the three mutually synchronized operations are executed, the control device 28 associates the rotation angle detection result Dθ detected by the rotation angle detection sensor 108, the displacement detection result D2 of the contact 132 detected by the displacement detection sensor 134, and the photographed image 38 photographed by the camera 116, and stores them in the data storage 50 (see FIG. 2 ).

[0120] Furthermore, the control device 122 generates a displacement detection signal D3 indicating the displacement in the X direction of the contact 132 for each rotation angle position of the turntable 104, i.e., the surface shape (roundness) of the circumferential surface Wb, and displays it on the monitor 120. Furthermore, when a designation operation is performed on the operation unit 118 to designate an arbitrary designated position SP of the displacement detection signal D3 displayed on the monitor 120, the control device 122 displays the captured image 38 corresponding to this designated position SP on the monitor 120.

[0121] As described above, in the roundness measuring machine 100 of the fifth embodiment, the three operations are repeatedly executed in synchronization with each other, so that the rotation angle detection result Dθ, the displacement detection result D2, and the captured image 38 can be associated with each other and stored in the saved data 51 each time the three operations are executed. As a result, the same effects as those of the above-mentioned embodiments can be obtained. Also, as in the above-mentioned second embodiment, the displacement detection signal D3 before and after the low-pass filter process may be displayed on the monitor 120. Furthermore, as in the above-mentioned third and fourth embodiments, the presence or absence of an abnormality in the shape measurement of the peripheral surface Wb may be determined, and if an abnormality is present, remeasurement, notification, warning display, etc. may be executed.

[0122] FIG. 20 is an explanatory diagram for explaining the effect obtained by photographing the contact 132 with the camera 116 while the turntable 104 and the workpiece W are rotating. As shown in FIG. 20, if a foreign object 59 is attached to the peripheral surface Wb, the image of the foreign object 59 moves along the direction indicated by the arrow AY in each photographed image 38 photographed for each rotation angle of the turntable 104, etc. At this time, the image of the foreign object 59 is focused at the position where it contacts the contact 132, and conversely, blurred at a position shifted in the left-right direction (Y direction) relative to the contact 132. The blur amount of the image of the foreign object 59 is equal at the left-right position based on the contact 132. Therefore, the position (rotation angle) where the contact 132 passes over the foreign object 59 can be determined based on the size (blur amount) of the image of the foreign object 59 in each photographed image 38.

[0123] [Variations] In the above embodiment, the stored data 51 associated with the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 is repeatedly stored in the data storage 50 every time the three operations are performed, but the present invention is not limited to this. For example, the stored data 51 obtained every time the three operations are performed is temporarily stored in a buffer memory (e.g., a ring buffer memory, etc.). Then, only a part of the stored data 51 temporarily stored in the buffer memory (e.g., only the stored data 51 determined to have an abnormality by the abnormality determination unit 62) may be selectively stored in the data storage 50.

[0124] [Variation 1] Fig. 21 is a block diagram showing a modified example of the surface profile measuring instrument according to the third embodiment of the present invention. Fig. 21 shows only those components related to memory control among the components of the surface profile measuring instrument 10, and in the following description, only those related to memory control will be described, and descriptions of other components will be omitted.

[0125] As shown in FIG. 21, the surface profile measuring instrument 10 according to the first modification includes ring buffer memories 200A to 200C.

[0126] Each of the ring buffer memories 200A to 200C corresponds to a buffer memory that is a component of the storage unit of the present invention, and is a storage medium (memory, stage, etc.) capable of storing data in a so-called ring buffer format.

[0127] The ring buffer memories 200A to 200C each include n (n>1) storage areas A1 to An.

[0128] Each time one of the three operations is performed, the signal acquisition unit 44 sequentially stores the X-direction position detection result D1 and the displacement detection result D2 acquired from the position detection sensor 18 and the displacement detection sensor 36, respectively, in the storage areas A1 to An of the ring buffer memories 200A and 200B, respectively.

[0129] The image acquisition unit 46 sequentially stores the captured images 38 acquired from the camera 22 in the storage areas A1 to An of the ring buffer memory 200C each time one of the three operations is executed.

[0130] Then, in the ring buffer memories 200A to 200C, when data (D1, D2, and 38) is stored in the storage area An, the next acquired data (D1, D2, and 38) is stored (overwritten) in the storage area A1.

[0131] In this way, the ring buffer memories 200A to 200C store the latest data for a certain period of time among the data (D1, D2, and 38) obtained each time the three operations are executed.

[0132] The signal generating unit 52 refers to the X-direction position detection results D1 and the displacement detection results D2 temporarily stored in the ring buffer memories 200A and 200B, and generates a displacement detection signal D3 indicating the Z-direction displacement of the contact 34 for each X-direction position of the displacement detector 20 (contact 34), i.e., the surface shape of the surface Wa.

[0133] The abnormal waveform detection section 60 detects an abnormal waveform ER from the waveform of the displacement detection signal D3 generated by the signal generation section 52. When the abnormal waveform detection section 60 determines that an abnormal waveform ER has occurred, it outputs range information 67 (first range) indicating the range of the X-direction position of the abnormal waveform ER to the abnormality determination section 62 (see FIG. 11).

[0134] Based on the range information 67 input from the abnormal waveform detection unit 60, the abnormality determination unit (first abnormality determination unit) 62 acquires from the ring buffer memory 200C the captured image 38 corresponding to the X-direction position (range) of the displacement detector 20 indicated by this range information 67, i.e., the captured image 38 corresponding to the occurrence location of the abnormal waveform ER, and performs image analysis. Then, when the abnormality determination unit 62 determines that there is an abnormality in the shape measurement of the surface Wa, it refers to the ring buffer memories 200A to 200C to generate range information 67 indicating the range of the X-direction position of the displacement detector 20 corresponding to the captured image 38 determined to have an abnormality in the shape measurement, and outputs it to the memory control unit 48.

[0135] The memory control unit 48 stores in the data storage 50 the saved data 51 associated with the X-direction position detection result D1 corresponding to the range information 67, the displacement detection result D2, and the captured image 38, from among the data temporarily stored in the ring buffer memories 200A to 200C.

[0136] According to the first modification, when detecting the cause of an abnormality in the shape measurement of a measurement object, the amount of saved data 51 stored in the data storage 50 can be minimized, thereby making it possible to reduce the cost of the surface shape measuring instrument 10.

[0137] [Variation 2] Fig. 22 is a block diagram showing a modified example of the surface profile measuring instrument according to the fourth embodiment of the present invention. Fig. 22 shows only those components related to memory control among the components of the surface profile measuring instrument 10, and in the following description, only those related to memory control will be described, and descriptions of other components will be omitted.

[0138] 22, the surface profile measuring instrument 10 according to the second modification includes ring buffer memories 200A to 200C, similar to the first modification. The ring buffer memories 200A to 200C temporarily store the X-direction position detection result D1, the displacement detection result D2, and the captured image 38, respectively.

[0139] The abnormality determination unit (second abnormality determination unit) 62 performs image analysis on the captured image 38 temporarily stored in the ring buffer memory 200C. When the abnormality determination unit 62 determines that there is an abnormality in the shape measurement of the surface Wa, the abnormality determination unit 62 refers to the ring buffer memories 200A to 200C, generates range information 67A (second range) indicating the range of the X-direction position of the displacement detector 20 corresponding to the captured image 38 determined to have an abnormality in the shape measurement, and outputs the range information 67A to the memory control unit 48.

[0140] The memory control unit 48 stores in the data storage 50 the saved data 51 associated with the X-direction position detection result D1, the displacement detection result D2, and the captured image 38 corresponding to the range information 67A, from among the data temporarily stored in the ring buffer memories 200A to 200C.

[0141] According to the second modification, when detecting the cause of an abnormality in the shape measurement of a measurement object, the amount of saved data 51 stored in the data storage 50 can be minimized, thereby making it possible to reduce the cost of the surface shape measuring instrument 10.

[0142] [others] In each of the above embodiments, the data storage 50 is built into the control device 28, but the data storage 50 may be provided separately from the surface shape measuring instrument 10 (for example, an external server or database).

[0143] In the above first to fourth embodiments, the displacement detector 20 is moved in the X direction when the surface profile measuring instrument 10 measures the profile of the surface Wa, but the measurement table 12 and the workpiece W may be moved in the X direction. In other words, as long as the displacement detector 20 and the workpiece W can be moved relatively in the X direction, the moving method is not particularly limited. Also, instead of rotating the workpiece W in the fifth embodiment, the displacement detector 114 may be rotated around the rotation center RC.

[0144] In each of the above embodiments, the XY plane is parallel to the horizontal plane, but it may be non-parallel to the horizontal plane.

[0145] In the above first to fourth embodiments, the stationary type surface profile measuring instrument 10 has been taken as an example for explanation, but the present invention can also be applied to a handheld type surface profile measuring instrument 10.

[0146] In each of the above embodiments, the detection by the position detection sensor 18, the detection by the displacement detection sensor 36, and the photographing by the camera 22 are synchronized based on the synchronization signal CL output from the synchronization control unit 42, but any one of the position detection sensor 18, the displacement detection sensor 36, and the camera 22 may function as the synchronization control unit 42. In this case, the operation timing of any one of the position detection sensor 18, the displacement detection sensor 36, and the camera 22 is used as the synchronization signal CL (trigger) to operate the other two.

[0147] In the above embodiments, the surface profile measuring machine 10 and the roundness measuring machine 100 have been used as examples, but the present invention is applicable to various profile measuring machines that use a contactor that comes into contact with the workpiece (object to be measured) to measure the profile of the workpiece or various surfaces to be measured. [Explanation of symbols]

[0148] 10 Surface profile measuring machine 12 Measuring table 14 Column 16 Detector movement mechanism 17 Holder 18 Position detection sensor 18a Linear scale 18b Read head 20 Displacement detector 22 Camera 25 Control section 27 Monitor 28 Control device 30 Swing Support Point 32 Arm 32a Arm tip 32b Arm base end 34 Contact 36 Displacement detection sensor 38 Images 40 Drive control unit 42 Synchronization control section 44 Signal Acquisition Unit 46 Image acquisition unit 48 Memory control unit 50 Data Storage 51 Saved Data 52 Signal Generation Unit 54 Low-pass filter 56 Display control unit 59 Foreign matter 60 Abnormal Waveform Detector 62 Abnormality determination section 64 Remeasurement control section 66 Notification control section 67 Range Information 67A Range Information 68 Warning Information 69 Abnormal content information 70 Warning Information 100 Roundness measuring machine 102 Measuring table 104 Rotating Table 106 Motor 108 Rotation angle detection sensor 110 Column 112 Horizontal Arm 114 Displacement detector 116 Cameras 118 Operation section 120 monitors 122 Control device 130 Arm 132 Contact 134 Displacement detection sensor 200A ring buffer memory 200B ring buffer memory 200C Ring Buffer Memory C1 Change specified position operation CL Sync signal Cu cursor D1 X-direction position detection result D2 Displacement detection result D3 Displacement detection signal Dθ Rotation angle detection result ER abnormal waveform ET Abnormality Judgment Threshold MA moving average line NR Normal range RC Rotation Center SP specified position W work WR waveform area Wa Surface Wb peripheral surface

Claims

1. A shape measuring machine for measuring a shape of a measurement object using a contact that comes into contact with the measurement object, a displacement detector for detecting a displacement of the contact; a relative movement mechanism for moving the displacement detector relative to the object to be measured so as to trace the measured surface of the object to be measured with the contact; a position detection sensor that detects a relative position of the displacement detector with respect to the measurement object; a camera that photographs the contact and outputs a photographed image of the contact; a synchronization control unit that repeatedly executes three operations including the detection of the relative position by the position detection sensor, the detection of the displacement by the displacement detector, and the photographing by the camera in synchronization with each other while the relative movement is being performed by the relative movement mechanism; A shape measuring machine equipped with

2. 2. The shape measuring instrument according to claim 1, wherein the synchronization control unit outputs a synchronization signal for synchronizing the three operations to the position detection sensor, the displacement detector, and the camera.

3. 3. The shape measuring machine according to claim 1, further comprising a memory control unit that causes the relative position detected by the position detection sensor, the displacement of the contact detected by the displacement detector, and the captured image captured by the camera to be stored in a memory unit in association with each other each time the three operations are executed synchronously.

4. a signal generating unit that generates a displacement detection signal indicating a displacement of the contact for each of the relative positions; an abnormal waveform detection unit that detects an abnormal waveform in the displacement detection signal generated by the signal generation unit, the abnormal waveform being an abnormal waveform of the displacement detection signal; a first abnormality determination unit that, when a range of the relative position in which the abnormal waveform is detected by the abnormal waveform detection unit is defined as a first range, determines whether or not there is an abnormality in the shape measurement based on the captured image in the storage unit that corresponds to the first range; and The shape measuring machine according to claim 3 .

5. 5. The shape measuring machine according to claim 4, wherein the first abnormality determination unit determines the presence or absence of an abnormality in the shape measurement based on the presence or absence of an image of a foreign object in the captured image.

6. a re-measurement control unit that drives the relative movement mechanism to execute a re-measurement in which the contact retraces the measurement surface, 6. The shape measuring machine according to claim 4 or 5, wherein each time the first abnormality judgment unit judges that there is an abnormality, the re-measurement control unit executes the re-measurement, the signal generation unit generates the displacement detection signal, the abnormal waveform detection unit detects the abnormal waveform, and the first abnormality judgment unit judges whether there is an abnormality in the shape measurement.

7. 7. The shape measuring instrument according to claim 6, further comprising an alarm unit that issues a warning when the number of remeasurements exceeds a predetermined fixed number.

8. 8. The shape measuring machine according to claim 4, wherein the memory control unit temporarily stores data including the relative position detected by the position detection sensor, the displacement of the contact detected by the displacement detector, and the captured image captured by the camera in a buffer memory of the memory unit, and stores data from the data temporarily stored in the buffer memory that is determined to have an abnormality by the first abnormality determination unit in a data storage of the memory unit.

9. The shape measuring machine according to claim 3 , further comprising a second abnormality determination unit that determines whether or not there is an abnormality in the shape measurement for each of the captured images stored in the memory unit.

10. 10. The shape measuring machine according to claim 9, wherein the second abnormality determination unit determines, for each of the captured images stored in the memory unit, whether or not there is an abnormality in the shape measurement based on the presence or absence of an image of a foreign object in the captured image.

11. a signal generating unit that generates a displacement detection signal indicating a displacement of the contact for each of the relative positions; a display control unit that displays the displacement detection signal generated by the signal generation unit on a monitor; Equipped with 11. The shape measuring machine according to claim 9 or 10, wherein the display control unit detects a second range, which is the range of the relative position corresponding to the captured image in which the second abnormality judgment unit has judged that an abnormality exists, by referring to the memory unit, and causes the monitor to display a waveform area corresponding to the second range in a waveform of the displacement detection signal displayed on the monitor in an identifiable manner.

12. The shape measuring instrument according to claim 9 , further comprising a notification unit that issues warning information when the second abnormality determination unit determines that an abnormality exists.

13. 13. The shape measuring machine according to claim 9, wherein the memory control unit temporarily stores data including the relative position detected by the position detection sensor, the displacement of the contact detected by the displacement detector, and the captured image captured by the camera in a buffer memory of the memory unit, and stores data from the data temporarily stored in the buffer memory that is determined to have an abnormality by the second abnormality determination unit in a data storage of the memory unit.

14. The shape measuring instrument according to claim 1 , wherein the relative movement mechanism moves the displacement detector relatively in a horizontal direction with respect to the measurement object.

15. 14. The shape measuring instrument according to claim 1, wherein the relative movement mechanism rotates the measurement object and the displacement detector relatively around a rotation center while keeping the contactor in contact with a peripheral surface of the measurement object that is cylindrical or cylindrical.

16. A control method for a shape measuring machine comprising: a displacement detector having a contactor that contacts a measurement object; and a relative movement mechanism that moves the displacement detector relatively to the measurement object and traces a measurement surface of the measurement object with the contactor, the control method comprising the steps of: a position detection step of detecting a relative position of the displacement detector with respect to the measurement object; a displacement detection step of detecting a displacement of the contact by the displacement detector; a photographing step of photographing the contact and outputting a photographed image of the contact; a synchronization control step of repeatedly executing three operations including the detection of the relative position in the position detection step, the detection of the displacement in the displacement detection step, and the photographing in the photographing step in synchronization with each other while the relative movement is being performed by the relative movement mechanism; A control method for a shape measuring machine having the above-mentioned features.

Images