Valve mechanism

Abstract

This valve device is provided with: a first outer layer (Y11); a second outer layer (Y13); and an interlayer (Y12) forming a fluid chamber (Y19). A first flow hole (Y16) enabling communication with the fluid chamber is formed in either the first outer layer or the second outer layer. A second flow hole (Y17, Y171-Y175) enabling communication with the fluid chamber is formed in either the first outer layer or the second outer layer. The interlayer includes: drive parts (Y123, Y124, Y125) that are displaced when their own temperature changes depending on whether there is electrical conduction; a displacement amplification member (Y131) that is urged by the drive parts and also amplifies the displacement of the drive parts when the drive parts are displaced; a movable part (Y127) that receives at a force point (YV1) the displacement that has been amplified by the displacement amplification member and thereby rotates about a fulcrum (Y126); and a valve element (Y128) for adjusting the degree of opening of the second flow hole with respect to the fluid chamber, by being urged from an application point (YV3) of the movable part and moving within the fluid chamber when the movable part rotates.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application is based on Japanese Patent Application No. 2022-065329, filed on April 11, 2022, the contents of which are incorporated herein by reference. [Technical field]

[0002] The present disclosure relates to a valve arrangement. [Background technology]

[0003] Patent Document 1 discloses a MEMS valve having a drive unit that displaces as its temperature changes depending on whether or not electricity is applied, a movable unit that amplifies the displacement of the drive unit using the principle of a lever, and a valve body that moves when the displacement amplified by the movable unit is transmitted to open and close a flow path hole. MEMS is an abbreviation for Micro Electro Mechanical Systems. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] U.S. Patent No. 9505608 Summary of the Invention

[0005] In the MEMS valve described in Patent Document 1, it may be desirable to further increase the opening area when the valve is open, but according to the inventor's study, this may result in a larger size of the MEMS valve, such as by lengthening the moving part. This is true not only for MEMS valves, but also for valve devices in general that use the principle of leverage to move a valve body. The present disclosure aims to increase the opening area when the valve is open while suppressing an increase in size, or to reduce the size while suppressing a decrease in the opening area when the valve is open, in a valve device that amplifies, using the principle of leverage, the displacement of a drive part caused by a temperature change according to the presence or absence of electricity, and transmits it to a valve body.

[0006] According to one aspect of the disclosure, a valve device includes: A first outer layer; and A second outer layer; and an intermediate layer sandwiched between the first outer layer and the second outer layer and forming a fluid chamber through which a fluid flows; a first flow passage hole capable of communicating with the fluid chamber is formed in the first outer layer or the second outer layer; a second flow passage hole capable of communicating with the fluid chamber is formed in the first outer layer or the second outer layer; the intermediate layer includes a drive unit that is displaced by a change in temperature of itself depending on whether or not electricity is applied; a displacement amplifying member that is biased to the driving portion and amplifies the displacement of the driving portion when the driving portion is displaced; a movable part that rotates around a fulcrum part by receiving at a force point the displacement amplified by the displacement amplifying member; and a valve body that adjusts the opening of the second flow passage hole to the fluid chamber by being biased from the point of action of the movable part when the movable part rotates and moving within the fluid chamber.

[0007] In this way, in addition to the movable part utilizing the principle of leverage, the displacement amplifying member amplifies the displacement of the drive part, making it possible to increase the opening area when the valve is open while suppressing an increase in the size of the valve device, or to reduce the size while suppressing a reduction in the opening area when the valve is open.

[0008] The reference symbols in parentheses attached to each component indicate an example of the correspondence between the component and specific components described in the embodiments described below. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is a front view of the microvalve. [Diagram 2] FIG. 2 is a side view of the microvalve. [Diagram 3] FIG. 2 is a parts exploded view of a microvalve. [Figure 4] FIG. 2 is a front view of the microvalve when no current is applied, with the first outer layer omitted. [Diagram 5]FIG. 2 is a front view of an intermediate layer with potential and current depicted. [Figure 6] FIG. 4 is a front view of the intermediate layer when current is applied. [Figure 7] FIG. 1 is a conceptual diagram showing the difference between the conventional method and the two-stage lever method. [Figure 8] FIG. 11 is a front view of the microvalve according to the second embodiment when not energized, with the first outer layer omitted. [Figure 9] FIG. 2 is a front view of an intermediate layer with potential and current depicted. [Figure 10] FIG. 11 is a component exploded view of a microvalve according to a third embodiment. [Figure 11] FIG. 2 is a front view of the microvalve when no current is applied, with the first outer layer omitted. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] (First embodiment) The first embodiment will be described below. As shown in Figs. 1, 2, and 3, the microvalve Y1 is a plate-shaped valve component and is mainly composed of a semiconductor chip. Therefore, the microvalve Y1 can be configured to be small. The plate thickness of the microvalve Y1 is, for example, 2 mm, the length in the longitudinal direction perpendicular to the thickness direction is, for example, 10 mm, and the length in the lateral direction perpendicular to both the longitudinal direction and the thickness direction is, for example, 5 mm, but the size is not limited to these. The flow path configuration of the microvalve Y1 changes when the power supplied to the microvalve Y1 is switched. The microvalve Y1 may be, for example, a valve that opens and closes the flow path of a fluid (for example, gas, liquid) itself, or may be a pilot valve that drives another valve.

[0011] The microvalve Y1 is a MEMS valve including a first outer layer Y11, an intermediate layer Y12, and a second outer layer Y13, all of which are semiconductors. The first outer layer Y11, the intermediate layer Y12, and the second outer layer Y13 are rectangular plate-shaped members each having roughly the same outer shape, and are laminated in the order of the first outer layer Y11, the intermediate layer Y12, and the second outer layer Y13. That is, the intermediate layer Y12 is sandwiched between the first outer layer Y11 and the second outer layer Y13 on both sides. Of the first outer layer Y11, the intermediate layer Y12, and the second outer layer Y13, the second outer layer Y13 is disposed on the side closest to the bottom wall of the valve casing Y2. The structures of the first outer layer Y11, the intermediate layer Y12, and the second outer layer Y13, which will be described later, are formed by a semiconductor manufacturing process such as chemical etching.

[0012] The first outer layer Y11 is an electrode port layer in which a non-conductive oxide film is formed on the surface of a conductive semiconductor member. As shown in FIG. 3, the first outer layer Y11 has two through holes Y14 and Y15 penetrating from the front to the back. The microvalve Y1 side ends of the electrical wiring are inserted into the through holes Y14 and Y15, respectively. As another example, both of the through holes Y14 and Y15 may be formed in the second outer layer Y13, or one may be formed in the first outer layer Y11 and the other may be formed in the second outer layer Y13.

[0013] The second outer layer Y13 is a flow path hole layer in which a non-conductive oxide film is formed on the surface of a conductive semiconductor member. As shown in Figs. 3 and 4, the second outer layer Y13 is formed with a first flow path hole Y16 and a second flow path hole Y17 penetrating from the front to the back. The hydraulic diameter of each of the first flow path hole Y16 and the second flow path hole Y17 is, for example, 0.1 mm or more and 3 mm or less, but is not limited thereto. As another example, both the first flow path hole Y16 and the second flow path hole Y17 may be formed in the first outer layer Y11, or one may be formed in the first outer layer Y11 and the other may be formed in the second outer layer Y13.

[0014] The intermediate layer Y12 is an actuator layer that is a conductive semiconductor material and is sandwiched between the first outer layer Y11 and the second outer layer Y13. The intermediate layer Y12 is in contact with the oxide film of the first outer layer Y11 and the oxide film of the second outer layer Y13, and is therefore electrically non-conductive to both the first outer layer Y11 and the second outer layer Y13. As shown in FIG. 4, the intermediate layer Y12 has a first fixed portion Y121, a second fixed portion Y122, a plurality of first ribs Y123, a plurality of second ribs Y124, a spine Y125, a first fulcrum portion Y126, a movable portion Y127, and a valve body Y128. Furthermore, the intermediate layer Y12 has a displacement amplification member Y131, a second fulcrum portion Y132, a third fixed portion Y133, and a fourth fixed portion Y134.

[0015] The first fixed portion Y121, the second fixed portion Y122, the third fixed portion Y133, and the fourth fixed portion Y134 are members fixed to the first outer layer Y11 and the second outer layer Y13 by adhesion or the like. The first fixed portion Y121 is formed so as to surround the second fixed portion Y122, the first rib Y123, the second rib Y124, the spine Y125, the first fulcrum portion Y126, the movable portion Y127, the valve body Y128, the displacement amplification member Y131, the second fulcrum portion Y132, the third fixed portion Y133, and the fourth fixed portion Y134, separated by slits, in the same fluid chamber Y19. The fluid chamber Y19 is a chamber surrounded by the first fixed portion Y121, the first outer layer Y11, and the second outer layer Y13. The first fixing portion Y121, the first outer layer Y11, and the second outer layer Y13 correspond to a base as a whole. The electrical wiring is for changing the temperature of the first ribs Y123 and the second ribs Y124 to displace them.

[0016] The first fixed portion Y121 is fixed to the first outer layer Y11 and the second outer layer Y13 in such a manner as to prevent the fluid from leaking from the microvalve Y1 through any passage other than the first flow passage hole Y16 and the second flow passage hole Y17 from the fluid chamber Y19. The second fixed portion Y122 is surrounded by the first fixed portion Y121 and is spaced apart from the first fixed portion Y121 and the fourth fixed portion Y134 via a slit.

[0017] The third fixed portion Y133 is surrounded by the first fixed portion Y121 and is disposed away from the first fixed portion Y121, the movable portion Y127, and the first rib Y123 via slits. The third fixed portion Y133 is also separated from the second fixed portion Y122. The third fixed portion Y133 is disposed between the multiple first ribs Y123 and the movable portion Y127.

[0018] The fourth fixed portion Y134 is surrounded by the first fixed portion Y121 and is spaced apart from the first fixed portion Y121, the second fixed portion Y122, the second rib Y124, and the displacement amplifying member Y131 via slits. The fourth fixed portion Y134 is also spaced apart from the third fixed portion Y133. The fourth fixed portion Y134 is located between the multiple second ribs Y124 and the movable portion Y127.

[0019] The multiple first ribs Y123, the multiple second ribs Y124, the spine Y125, the first fulcrum portion Y126, the movable portion Y127, the valve body Y128, and the second fulcrum portion Y132 are not fixed to the first outer layer Y11 and the second outer layer Y13, and are displaceable relative to the first outer layer Y11 and the second outer layer Y13.

[0020] The spine Y125 has a thin and long rod shape extending in the short direction of the rectangular shape of the intermediate layer Y12. Therefore, the spine Y125 extends in a direction intersecting the longitudinal direction of the displacement amplification member Y131 and the longitudinal direction of the movable part Y127. One end of the longitudinal direction of the spine Y125 is connected to the displacement amplification member Y131.

[0021] The multiple first ribs Y123 are disposed on one side of the spine Y125 in a direction perpendicular to the longitudinal direction of the spine Y125. The multiple first ribs Y123 are arranged in the longitudinal direction of the spine Y125, separated by slits. Each of the first ribs Y123 has a long and thin rod shape and is expandable and contractable depending on the temperature.

[0022] Each of the first ribs Y123 is connected to the first fixing part Y121 at one end in the longitudinal direction and to the spine Y125 at the other end. Each of the first ribs Y123 is oblique to the spine Y125 so as to be offset toward the displacement amplification member Y131 in the longitudinal direction of the spine Y125 as it approaches the spine Y125 from the first fixing part Y121 side. The first ribs Y123 extend parallel to each other.

[0023] The second ribs Y124 are disposed on the other side of the spine Y125 in a direction perpendicular to the longitudinal direction of the spine Y125. The second ribs Y124 are arranged in the longitudinal direction of the spine Y125, separated by slits. Each of the second ribs Y124 has a long and thin rod shape and is expandable and contractable depending on the temperature.

[0024] Each second rib Y124 is connected to the second fixing part Y122 at one end in the longitudinal direction and to the spine Y125 at the other end. Each second rib Y124 is oblique to the spine Y125 so as to be offset toward the displacement amplification member Y131 in the longitudinal direction of the spine Y125 as it approaches the spine Y125 from the second fixing part Y122 side. The second ribs Y124 extend parallel to each other.

[0025] The multiple first ribs Y123, the multiple second ribs Y124, and the spine Y125 collectively correspond to the drive unit.

[0026] The second fulcrum part Y132 has a rod shape that extends parallel to and non-perpendicular to the spinal column Y125. One end of the second fulcrum part Y132 is connected to the displacement amplification member Y131, and the other end is connected to the third fixed part Y133. The extension direction of the second fulcrum part Y132 and the longitudinal direction of the displacement amplification member Y131 intersect with each other. The side surface of the second fulcrum part Y132, that is, the end face of the second fulcrum part Y132 in the direction intersecting with the extension direction of the second fulcrum part Y132 faces the slit.

[0027] The displacement amplification member Y131 has a thin and long rod shape extending in a direction intersecting the spine Y125 and the second fulcrum Y132 at about 90°. The displacement amplification member Y131 is expandable and contractible depending on the temperature. Most of the displacement amplification member Y131 extends along the longitudinal direction of the movable part Y127. The end of the displacement amplification member Y131 opposite to the second fulcrum Y132 is bent toward the movable part Y127 and connected to the movable part Y127 at the bent end. The portion of the displacement amplification member Y131 extending along the longitudinal direction of the movable part Y127 may extend linearly, may be gently curved, or may meander and extend along the longitudinal direction of the movable part Y127 as a whole. The portion of the displacement amplification member Y131 extending along the longitudinal direction of the movable part Y127 may be less than 45° with respect to the longitudinal direction of the movable part Y127 as a whole.

[0028] Here, the positional relationship between the second fulcrum Y132, the first force point YV1, and the second force point YV2 will be described. The first force point YV1 is the connection point between the displacement amplification member Y131 and the movable part Y127. The second force point YV2 is the connection point between the spine Y125 and the displacement amplification member Y131.

[0029] The second fulcrum Y132, the second point of force YV2, and the first point of force YV1 are arranged in this order along the longitudinal direction of the displacement amplification member Y131, from the end of the displacement amplification member Y131 on the second fulcrum Y132 side to the end on the movable part Y127 side. Therefore, the distance from the second fulcrum Y132 to the first point of force YV1 is longer than the distance from the second fulcrum Y132 to the second point of force YV2. This relationship holds even if the distance referred to here is a straight-line distance, and also holds even if the distance referred to here is a distance along the longitudinal direction of the displacement amplification member Y131.

[0030] The first fulcrum part Y126 has a rod shape that extends and crosses the movable part Y127. One end of the first fulcrum part Y126 in the extension direction is connected to the movable part Y127. The other end of the first fulcrum part Y126 in the extension direction is connected to the fourth fixed part Y134. The side surface of the first fulcrum part Y126, that is, the end face of the first fulcrum part Y126 in the direction crossing the extension direction of the first fulcrum part Y126 faces the slit.

[0031] The movable part Y127 has a thin and long rod shape extending along the longitudinal direction of the intermediate layer Y12. One end of the movable part Y127 is connected to the first fulcrum Y126. The end of the movable part Y127 opposite to the first fulcrum Y126 side is connected to the valve body Y128. The length along the longitudinal direction of the intermediate layer Y12 from the end of the movable part Y127 on the first fulcrum Y126 side to the end on the valve body Y128 side is 1 / 2 or more of the entire longitudinal length of the intermediate layer Y12. By forming the movable part Y127 long in this way, the leverage action of the movable part Y127 can be increased.

[0032] Here, the positional relationship between the first fulcrum Y126, the first force point YV1, and the action point YV3 will be described. The action point YV3 is a connection point between the movable part Y127 and the valve body Y128. The second force point YV2 is a force point for the movable part Y127 and a action point for the displacement amplification member Y131.

[0033] The first fulcrum Y126, the first point of force YV1, and the point of action YV3 are arranged in this order along the longitudinal direction of the movable part Y127, from the end of the movable part Y127 on the first fulcrum Y126 side to the end of the valve body Y128 side. Therefore, the distance from the first fulcrum Y126 to the point of action YV3 is longer than the distance from the first fulcrum Y126 to the first point of force YV1. This relationship holds even if the distance referred to here is a straight-line distance, and also holds even if the distance referred to here is a distance along the longitudinal direction of the movable part Y127.

[0034] The valve body Y128 has an outer shape that extends in a direction of approximately 90° with respect to the longitudinal direction of the movable part Y127, that is, in the lateral direction of the intermediate layer Y12. This valve body Y128 can move together with the movable part Y127 in the fluid chamber Y19. The valve body Y128 has a frame shape that surrounds a window hole Y120 that penetrates the intermediate layer Y12 from the front to the back. Therefore, the window hole Y120 also moves together with the valve body Y128. The window hole Y120 is a part of the fluid chamber Y19. The valve body Y128 changes the opening degree of the second flow passage hole Y17 with respect to the window hole Y120 by moving as described above. The first flow passage hole Y16 is always in an open state and communicates with the window hole Y120 (i.e., with respect to the fluid chamber Y19).

[0035] In addition, the microvalve Y1 side end of the electrical wiring passing through the through hole Y14 of the first outer layer Y11 shown in Fig. 3 is connected to the first application point Y129 of the first fixed portion Y121 near the portion connected to the multiple first ribs Y123. In addition, the microvalve Y1 side end of the electrical wiring passing through the through hole Y15 of the first outer layer Y11 shown in Fig. 3 is connected to the second application point Y130 of the second fixed portion Y122. These electrical wirings switch between energizing and de-energizing the microvalve Y1.

[0036] Here, the operation of the microvalve Y1 will be described. When the microvalve Y1 is not energized, the intermediate layer Y12 is in the state shown in Fig. 4. At this time, the first flow passage hole Y16 is open (for example, fully open or half open) to the window hole Y120, and the second flow passage hole Y17 is blocked by the valve element Y128 and is fully closed to the window hole Y120. The position of the valve element Y128 at this time is called the non-energized position.

[0037] When the microvalve Y1 starts to be energized, a voltage is applied between the first application point Y129 and the second application point Y130 by the electrical wiring. Here, as an example, a voltage of 12 V is applied to the first application point Y129 and a voltage of 0 V is applied to the second application point Y130, but this is not limiting.

[0038] When a voltage is applied, as shown in FIG. 5, in the intermediate layer Y12, the electric potential of the second fixed portion Y122 becomes 12V, and the electric potential of the first fixed portion Y121 becomes 0V. Therefore, the second fixed portion Y122 is electrically connected to the first fixed portion Y121 via the second ribs Y124 and the first ribs Y123. As a result, a current flows in each of the first ribs Y123 and the second ribs Y124 as shown by the dashed arrows. This current causes the first ribs Y123 and the second ribs Y124 to generate heat. As a result, each of the first ribs Y123 and the second ribs Y124 expands in its longitudinal direction.

[0039] The electric potential of the third fixed part Y133, the fourth fixed part Y134, the movable part Y127, and the valve body Y128 is the same as that of the spine Y125, that is, about 6V, which is half of 12V. No current flows through the displacement amplification member Y131, the movable part Y127, and the valve body Y128. Therefore, the displacement amplification member Y131 does not generate heat due to the passage of electricity, and does not expand due to the heat.

[0040] As a result of such thermal expansion, the multiple first ribs Y123 and the multiple second ribs Y124 bias the spine Y125 toward the second force point YV2. The biased spine Y125 presses the displacement amplification member Y131 at the second force point YV2. As a result, the displacement amplification member Y131 rotates around the second fulcrum part Y132, with the second fulcrum part Y132 as the fulcrum. The end of the displacement amplification member Y131 opposite to the second fulcrum part Y132 also moves in the direction of pressing the movable part Y127 at the first force point YV1.

[0041] In this way, the movable part Y127 biased by the displacement amplification member Y131 at the first force point YV1 rotates around the first fulcrum part Y126. As a result, the valve element Y128 connected to the end of the movable part Y127 opposite to the first fulcrum part Y126 also moves in its longitudinal direction toward the side where the displacement amplification member Y131 presses the movable part Y127. The position of the valve element Y128 after the movement is called the energized position.

[0042] As shown in FIG. 6, when the valve body Y128 is in the energized position, the first flow passage hole Y16 is open (e.g., fully open, half open) to the window hole Y120, and the second flow passage hole Y17 is also open (e.g., fully open, half open) to the valve body Y128 and the first flow passage hole Y16 is open (e.g., fully open, half open) to the window hole Y120.

[0043] Therefore, in this case, the fluid can flow from the outside of the microvalve Y1 through the first flow path hole Y16 into the window hole Y120, and then flow from the window hole Y120 through the second flow path hole Y17 to the outside of the microvalve Y1. The fluid can also flow in the opposite direction. That is, a flow path (not shown) outside the microvalve Y1 that communicates with the first flow path hole Y16 and another flow path (not shown) outside the microvalve Y1 that communicates with the second flow path hole Y17 communicate with each other through the window hole Y120.

[0044] When the microvalve Y1 is energized, the greater the power supplied to the microvalve Y1 via the first application point Y129 and the second application point Y130, the greater the movement of the valve element Y128 relative to the de-energized position. This is because the higher the power supplied to the microvalve Y1, the higher the temperature of the first rib Y123 and the second rib Y124, and the greater the degree of expansion. For example, when the voltages applied to the first application point Y129 and the second application point Y130 are PWM controlled, the greater the duty ratio of the voltage, the greater the movement of the valve element Y128 relative to the de-energized position.

[0045] Furthermore, when the power supply to the microvalve Y1 is stopped, the voltage application from the electrical wiring to the first application point Y129 and the second application point Y130 is stopped. Then, the current stops flowing through the first ribs Y123 and the second ribs Y124, and the temperatures of the first ribs Y123 and the second ribs Y124 decrease. As a result, each of the first ribs Y123 and the second ribs Y124 contracts in its longitudinal direction.

[0046] As a result of such thermal contraction, the first ribs Y123 and the second ribs Y124 bias the spine Y125 in the opposite direction to the second point of force YV2. The biased spine Y125 pulls the displacement amplification member Y131 toward the spine Y125 on the second point of force YV2 side. As a result, the displacement amplification member Y131 rotates around the second fulcrum portion Y132 as a fulcrum. As a result, the end of the displacement amplification member Y131 opposite to the second fulcrum portion Y132 also moves in the direction of pulling the movable part Y127 at the first point of force YV1.

[0047] The movable part Y127 thus biased by the displacement amplifier Y131 at the first force point YV1 rotates around the first fulcrum Y126. As a result, the valve element Y128 connected to the end of the movable part Y127 opposite to the first fulcrum Y126 also moves in the longitudinal direction toward the side where the displacement amplifier Y131 pulls the movable part Y127. As a result of this movement, the valve element Y128 returns to the non-energized position and stops. At this time, communication between a flow path (not shown) outside the microvalve Y1 and communicating with the first flow path hole Y16 and another flow path (not shown) outside the microvalve Y1 and communicating with the second flow path hole Y17 is blocked via the window hole Y120.

[0048] As described above, the movable part Y127 functions as a lever with the first fulcrum part Y126 as a fulcrum, the first force point YV1 as a force point, and the action point YV3 as a force point. As described above, the linear distance from the first fulcrum part Y126 to the action point YV3 is longer than the linear distance from the first fulcrum part Y126 to the first force point YV1 in a plane parallel to the plate surface of the intermediate layer Y12. Therefore, the movement amount of the action point YV3 is larger than the movement amount of the first force point YV1. Therefore, the displacement amount of the displacement amplification member Y131 at the first force point YV1 is amplified by the lever and transmitted to the valve body Y128.

[0049] Furthermore, the displacement amplification member Y131 functions as a lever with the second fulcrum part Y132 as a fulcrum, the second force point YV2 as a force point, and the first force point YV1 as a point of action. As described above, the linear distance from the second fulcrum part Y132 to the first force point YV1 is longer than the linear distance from the second fulcrum part Y132 to the second force point YV2 in a plane parallel to the plate surface of the intermediate layer Y12. Therefore, the movement amount of the first force point YV1 is larger than the movement amount of the second force point YV2. Therefore, the displacement amount of the spine Y125 due to the thermal expansion of the multiple first ribs Y123 and the multiple second ribs Y124 is amplified by the lever and transmitted to the movable part Y127.

[0050] In this way, two levers connected in series, the displacement amplifier Y131 and the movable part Y127, act. That is, the displacement of the spinal column Y125 is amplified by the displacement amplifier Y131, and further amplified by the movable part Y127, and then transmitted to the valve body Y128.

[0051] The microvalve Y1 configured in this manner can be easily miniaturized compared to a solenoid valve and a stepping motor. One of the reasons for this is that the microvalve Y1 is formed of a semiconductor chip as described above. Also, as described above, the use of a lever to amplify the amount of displacement due to thermal expansion also contributes to miniaturization compared to a valve device that uses a solenoid valve or a stepping motor without using such a lever. Also, since the displacement of the multiple first ribs Y123 and the multiple second ribs Y124 occurs due to heat, the noise reduction effect is high.

[0052] In addition, since a lever is used, the amount of displacement due to thermal expansion can be suppressed to be less than the amount of movement of the valve body Y128, so the power consumption for driving the valve body Y128 can be reduced. Also, since the impact sound when the solenoid valve is driven can be eliminated, noise can be reduced.

[0053] Furthermore, when the spine Y125 is displaced, the displacement amplifying member Y131 is biased against the spine Y125 and amplifies the displacement of the spine Y125 and transmits it to the movable part Y127. In this way, in addition to the movable part Y127 that utilizes the principle of leverage, the displacement amplifying member Y131 amplifies the displacement of the spine Y125. Therefore, it is possible to increase the opening area when the microvalve Y1 is open while suppressing an increase in the size of the microvalve Y1, or to reduce the size while suppressing a decrease in the opening area when the microvalve Y1 is open.

[0054] For example, as shown on the left side of Figure 7, compared to the MEMS valve of Patent Document 1, which has only one lever as indicated by the arrow, the valve device on the right side of Figure 7 uses two levers in series as indicated by the arrows, which increases the amplification of the movement of the valve body relative to the displacement of the spine.

[0055] (1) When the spine Y125 is displaced, the spine Y125 biases the displacement amplifier Y131 at the second force point YV2, causing the displacement amplifier Y131 to rotate around the second fulcrum Y132, and the displacement amplifier Y131 biases the movable part Y127 at the first force point YV1. The distance from the second fulcrum Y132 to the first force point YV1 is longer than the distance from the second fulcrum Y132 to the second force point YV2. That is, the displacement amplifier Y131 also acts as a lever in addition to the movable part Y127. This makes it possible to further increase the opening area of ​​the microvalve Y1 when it is opened or reduce its size by utilizing the principle of leverage.

[0056] (2) The displacement amplification member Y131 extends along the longitudinal direction of the movable part Y127. The first point of force YV1 is closer to the first fulcrum Y126 than the second point of force YV2. This allows the location where the displacement amplified by the displacement amplification member Y131 is transmitted to the movable part Y127 (i.e., the first point of force YV1) to be closer to the first fulcrum Y126. This increases the amount of amplification of the displacement by the lever action of the movable part Y127.

[0057] Second embodiment Next, the second embodiment will be described. This embodiment is different from the first embodiment in the structure of the intermediate layer Y12. Specifically, as shown in FIG. 8, the slit that separated the second fixed portion Y122 and the fourth fixed portion Y134 in the first embodiment is eliminated, and the second fixed portion Y122 and the fourth fixed portion Y134 are connected. The other structures are the same as those of the first embodiment.

[0058] The operation of the microvalve Y1 of this embodiment will be described below. When no current is applied to the microvalve Y1, the intermediate layer Y12 is in the state shown in Fig. 8. At this time, the positions of the first ribs Y123, the second ribs Y124, the spine Y125, the displacement amplification member Y131, the movable part Y127, and the valve body Y128 are the same as when no current is applied in the first embodiment.

[0059] When the microvalve Y1 starts to be energized, a voltage is applied between the first application point Y129 and the second application point Y130 by the electrical wiring. Here, as an example, a voltage of 12 V is applied to the first application point Y129 and a voltage of 0 V is applied to the second application point Y130, but this is not limiting.

[0060] When a voltage is applied, as shown in Fig. 9, in the intermediate layer Y12, the electric potential of the second fixed portion Y122 becomes 12V, and the electric potential of the first fixed portion Y121 becomes 0V. As a result, as in the first embodiment, a current flows in each of the first ribs Y123 and the second ribs Y124 as indicated by the dashed arrows. This current causes the first ribs Y123 and the second ribs Y124 to generate heat. As a result, each of the first ribs Y123 and the second ribs Y124 expands in its longitudinal direction.

[0061] In addition, since the second fixed part Y122 and the fourth fixed part Y134 are connected, the potential of the fourth fixed part Y134 also becomes 12V. Therefore, the second fixed part Y122 is electrically connected to the first fixed part Y121 via the fourth fixed part Y134, the first fulcrum part Y126, the movable part Y127, the displacement amplification member Y131, the spine Y125, and the first ribs Y123. Therefore, in the displacement amplification member Y131, a current flows from the first force point YV1 to the spine Y125 as shown by the dashed arrow. This current causes the displacement amplification member Y131 to heat up and expand in its longitudinal direction. The potential of the third fixed part Y133 becomes an intermediate potential higher than 6V and lower than 12V.

[0062] As a result of the expansion of the first ribs Y123 and the second ribs Y124, similarly to the first embodiment, the first ribs Y123 and the second ribs Y124 bias the spine Y125 toward the second force point YV2. The biased spine Y125 presses the displacement amplification member Y131 at the second force point YV2. As a result, the displacement amplification member Y131 rotates about the second fulcrum part Y132, with the second fulcrum part Y132 as the fulcrum. As a result, the end of the displacement amplification member Y131 opposite to the second fulcrum part Y132 also moves in the direction of pressing the movable part Y127 at the first force point YV1.

[0063] In addition, when the displacement amplifying member Y131 is energized and its temperature rises, the longitudinal length of the displacement amplifying member Y131 increases. Therefore, the displacement of the movable part Y127 at the first force point YV1 increases by the increased amount. That is, when the first ribs Y123 and the second ribs Y124 are energized, the displacement amplifying member Y131 is biased against the spine Y125 and is energized, its temperature rises and it expands, thereby further amplifying the displacement of the spine Y125 and transmitting it to the movable part Y127.

[0064] In this manner, the movable part Y127 biased by the displacement amplification member Y131 at the first force point YV1 rotates about the first fulcrum part Y126. As a result, the valve element Y128 connected to the end of the movable part Y127 opposite to the first fulcrum part Y126 also moves in its longitudinal direction toward the side where the displacement amplification member Y131 presses the movable part Y127. When the valve element Y128 is in this energized position, the opening states of the first flow passage hole Y16 and the second flow passage hole Y17 are the same as those in the first embodiment.

[0065] Furthermore, when the power supply to the microvalve Y1 is stopped, the voltage application from the electrical wiring to the first application point Y129 and the second application point Y130 is stopped. Then, the current stops flowing through the first ribs Y123 and the second ribs Y124, and the temperature of the first ribs Y123 and the second ribs Y124 drops. As a result, each of the first ribs Y123 and the second ribs Y124 contracts in its longitudinal direction. At the same time, the current stops flowing through the displacement amplification member Y131, the temperature of the displacement amplification member Y131 drops, and the displacement amplification member Y131 contracts in its longitudinal direction.

[0066] As a result of such thermal contraction, the first ribs Y123 and the second ribs Y124 bias the spine Y125 in the opposite direction to the second force point YV2. The biased spine Y125 pulls the displacement amplification member Y131 toward the spine Y125 at the second force point YV2. As a result, the displacement amplification member Y131 rotates around the second fulcrum Y132. As a result, the end of the displacement amplification member Y131 opposite to the second fulcrum Y132 also moves in the direction of pulling the movable part Y127 at the first force point YV1. At that time, the longitudinal length of the displacement amplification member Y131 is reduced, and the displacement of the movable part Y127 at the first force point YV1 is increased accordingly.

[0067] The movable part Y127 thus biased by the displacement amplifying member Y131 at the first force point YV1 rotates around the first fulcrum Y126. As a result, the valve element Y128 connected to the end of the movable part Y127 opposite to the first fulcrum Y126 also moves in the longitudinal direction toward the side where the displacement amplifying member Y131 pulls the movable part Y127. As a result of this movement, the valve element Y128 returns to a predetermined non-energized position and stops. At this time, as in the first embodiment, communication between a flow path (not shown) outside the microvalve Y1 and communicating with the first flow path hole Y16 and another flow path (not shown) outside the microvalve Y1 and communicating with the second flow path hole Y17 is blocked via the window hole Y120.

[0068] (1) As described above, when the spine Y125 is energized, the displacement amplification member Y131 is biased against the spine Y125 and expands as a result of the temperature rise caused by the energization, thereby amplifying the displacement of the spine Y125. In this manner, the displacement amplification member Y131 not only acts as a lever, but also expands and contracts when energized, thereby amplifying the displacement of the spine Y125. In other words, the displacement of the spine Y125 can be more strongly amplified. Furthermore, in this embodiment, the same effects can be obtained from the same configuration and action as in the first embodiment.

[0069] Third embodiment Next, a third embodiment will be described with reference to Figures 10 and 11. This embodiment is different from the first embodiment in the structures of the intermediate layer Y12 and the second outer layer Y13.

[0070] Specifically, in the second outer layer Y13, the first passage hole Y16 has a rectangular shape extending in the short direction of the second outer layer Y13. Also, in the second outer layer Y13, a plurality of sub-passage holes Y171, Y172, Y173, Y174, and Y175 are provided instead of the single second passage hole Y17 of the first embodiment.

[0071] These sub-channel holes Y171 to Y175 are arranged at positions shifted from the first channel hole Y16 in the longitudinal direction of the second outer layer Y13. The sub-channel holes Y171 to Y175 are aligned in a line in the short direction of the second outer layer Y13. Each of the sub-channel holes Y171 to Y175 has a rectangular shape and extends in the longitudinal direction of the second outer layer Y13. These sub-channel holes Y171 to Y175 collectively constitute the second channel hole.

[0072] Moreover, the structure of the intermediate layer Y12 differs from that of the first embodiment in the following respects: First, the fluid chamber Y19 of this embodiment is formed so as to communicate with the first flow passage hole Y16 and the sub-flow passage holes Y171 to Y175.

[0073] Also, the shape of the valve body Y128 of this embodiment is different from that of the first embodiment. Specifically, the valve body Y128 of this embodiment has a base portion 80, a plurality of sub-valves 81, 82, 83, 84, 85, and eight reinforcing portions 86 that reinforce the sub-valves 81 to 85. The base portion 80, the sub-valves 81 to 85, and the reinforcing portions 86 are integrally formed as a whole, but as another example, they may be formed separately and then joined together.

[0074] In addition, in Fig. 10 and Fig. 11, the number of the sub-valves 81 to 85 is five, but as another example, the number may be two or more and four or less, or six or more. In addition, in the example of Fig. 10 and Fig. 11, the number of the reinforcing portions 86 is eight, but as another example, the number may be seven or less (for example, one or two), or nine or more. In addition, two reinforcing portions 86 connected to each of the adjacent sub-valves among the sub-valves 81 to 85 are provided between the adjacent sub-valves, but the number of reinforcing portions 86 provided between the adjacent sub-valves is not limited to two. In addition, the reinforcing portions 86 may be provided only between some of the adjacent sub-valves among the sub-valves 81 to 85.

[0075] The base portion 80 is a member that is connected to the movable portion Y127 at the point of application YV3 and extends in the short-side direction of the intermediate layer Y12. The sub-valve bodies 81-85 are arranged in a row in the short-side direction of the intermediate layer Y12 with a space therebetween. The longitudinal direction of each of the sub-valve bodies 81-85 extends in the longitudinal direction of the intermediate layer Y12. The longitudinal end of each of the sub-valve bodies 81-85 on the movable portion Y127 side is connected to the base portion 80.

[0076] Further, through holes 81a, 82a, 83a, 84a, 85a are formed in each of the sub-valve bodies 81 to 85, which penetrate the intermediate layer Y12 from one end to the other end in the thickness direction and extend in the longitudinal direction of the intermediate layer Y12. Therefore, the sub-valve bodies 81 to 85 are frames that annularly surround the through holes 81a to 85a, respectively.

[0077] As shown in FIG. 11, the inner periphery of the sub-valve bodies 81 to 85 is formed wider than the outer periphery of the sub-channel holes Y171 to Y175 so that the inner periphery can completely surround the outer periphery of the sub-channel holes Y171 to Y175 from the outside.

[0078] Moreover, each of the sub-valve bodies 81-85 contacts the first outer layer Y11 at one end in the thickness direction of the intermediate layer Y12 and contacts the second outer layer Y13 at the other end, thereby sealing between the through holes 81a-85a and other portions in the fluid chamber Y19.

[0079] Each of the reinforcing portions 86 extends in the short-side direction of the intermediate layer Y12 between any two adjacent sub-valve bodies among the sub-valve bodies 81 to 85 so as to be connected at both ends to the two sub-valve bodies. As another example, one reinforcing portion 86 may be branched into three or more branches and connected to three or more of the sub-valve bodies 81 to 85. These reinforcing portions 86 improve the strength of the entire valve body Y128. Each reinforcing portion 86 is separated from one or both of the first outer layer Y11 and the second outer layer Y13. That is, each reinforcing portion 86 does not function as a seal for the fluid in the fluid chamber Y19.

[0080] The operation of the microvalve Y1 of this embodiment will be described below. When the microvalve Y1 is not energized, the intermediate layer Y12 is in the state shown in FIG. 11. At this time, the first flow passage hole Y16 communicates with the fluid chamber Y19, but the sub-flow passage holes Y171-Y175 are surrounded by the sub-valve bodies 81-85, respectively. Therefore, in the fluid chamber Y19, the sub-flow passage holes Y171-Y175 are blocked from the first flow passage hole Y16 by the sub-valve bodies 81-85. The position of the valve body Y128 at this time is called the non-energized position. In this case, the microvalve Y1 is in a closed state.

[0081] When the microvalve Y1 starts to be energized, a voltage is applied between the first application point Y129 and the second application point Y130 by the electrical wiring. When the voltage is applied, in the intermediate layer Y12, a current flows in each of the first rib Y123 and the second rib Y124, as in the first embodiment. This current causes the first ribs Y123 and the second ribs Y124 to generate heat. As a result, each of the first rib Y123 and the second rib Y124 expands in its longitudinal direction.

[0082] Due to the expansion of the first ribs Y123 and the second ribs Y124, the first ribs Y123 and the second ribs Y124 bias the spine Y125 toward the second force point YV2. The biased spine Y125 presses the displacement amplification member Y131 at the second force point YV2. As a result, the displacement amplification member Y131 rotates around the second fulcrum part Y132, with the second fulcrum part Y132 as the fulcrum. As a result, the end of the displacement amplification member Y131 opposite to the second fulcrum part Y132 also moves in the direction of pressing the movable part Y127 at the first force point YV1.

[0083] As a result, the movable part Y127 rotates about the first fulcrum part Y126, with the first fulcrum part Y126 as the fulcrum. As a result, the entire valve body Y128 rotates about the first fulcrum part Y126 in the longitudinal direction in which the displacement amplification member Y131 presses the movable part Y127.

[0084] As a result, the sub-valve bodies 81-85 also rotate about the first fulcrum Y126. As a result of this rotation, the positions of the through holes 81a-85a change, and the relative positional relationship between the through holes 81a-85a and the sub-channel holes Y171-Y175 changes. Specifically, a part or the whole of the sub-channel holes Y171-Y175 protrudes from the through holes 81a-85a, respectively. As a result, in the fluid chamber Y19, the first channel hole Y16 communicates with the sub-channel holes Y171-Y175.

[0085] The position of the valve element Y128 at this time is called the energized position. In this case, the microvalve Y1 is in an open state. At this time, the fluid flows through the outside of the microvalve Y1, the first flow passage hole Y16, the fluid chamber Y19, the sub-flow passage holes Y171 to Y175, and the outside of the microvalve Y1 in this order or in the reverse order.

[0086] When the amount of current supplied to the sub-channel holes Y171-Y175 changes, the size of the portions of the sub-channel holes Y171-Y175 that protrude from the through-holes 81a-85a changes. Therefore, by changing the amount of current supplied to the sub-channel holes Y171-Y175, the flow rate of the fluid in the microvalve Y1 can be adjusted.

[0087] When the power supply to the microvalve Y1 is stopped, the voltage application from the electric wiring to the first application point Y129 and the second application point Y130 is stopped. Then, the current stops flowing through the first ribs Y123 and the second ribs Y124, and the temperature of the first ribs Y123 and the second ribs Y124 drops. As a result, each of the first ribs Y123 and the second ribs Y124 contracts in its longitudinal direction. As a result of such thermal contraction, the valve body Y128 returns to a predetermined non-powered position and stops in the same manner as in the first embodiment. By such an operation, the sub-valve bodies 81 to 85 move in the fluid chamber Y19 to adjust the opening degree of the sub-channel holes Y171 to Y175 relative to the first channel hole Y16.

[0088] (1) As described above, the reinforcing portion 86 for reinforcing the sub-valve bodies 81 to 85 is connected to multiple of the multiple sub-valve bodies 81 to 85. In this manner, the reinforcing portion 86 increases the strength of the valve body Y128 against the pressure of the fluid flowing into the fluid chamber Y19.

[0089] The modifications to the first embodiment as in this embodiment are also applicable to the second embodiment. Also, in this embodiment, the same effects can be obtained from the same configurations and actions (e.g., the leverage action of the displacement amplifying member Y131) as those in the first and second embodiments.

[0090] (Other embodiments) The present disclosure is not limited to the above-mentioned embodiment, and can be modified as appropriate. Moreover, the above-mentioned embodiments are not unrelated to each other, and can be appropriately combined, except when the combination is clearly impossible. Moreover, in each of the above-mentioned embodiments, the elements constituting the embodiment are not necessarily essential, except when it is specifically stated that they are essential or when it is clearly considered essential in principle. Moreover, in each of the above-mentioned embodiments, when the number, numerical value, amount, range, etc. of the components of the embodiment are mentioned, they are not limited to the specific number, except when it is specifically stated that they are essential or when it is clearly limited to a specific number in principle. In particular, when multiple values ​​are exemplified for a certain amount, it is also possible to adopt a value between the multiple values, except when it is specifically stated otherwise or when it is clearly impossible in principle. Moreover, in each of the above-mentioned embodiments, when referring to the shape, positional relationship, etc. of the components, they are not limited to the shape, positional relationship, etc., except when it is specifically stated or when it is limited to a specific shape, positional relationship, etc. in principle. Moreover, the present disclosure also allows the following modifications and modifications within an equivalent range for each of the above-mentioned embodiments. Note that the following modifications can be independently selected to be applied or not applied to the above-mentioned embodiment. In other words, any combination of the following modifications can be applied to the above embodiment.

[0091] (Variation 1) In the above embodiments, the first ribs Y123, the second ribs Y124, and the displacement amplifying member Y131 generate heat when electricity is applied, and expand as their temperature increases due to the heat generated. However, these members may be made of a shape-memory material whose length changes when the temperature changes.

[0092] (Variation 2) In each of the above-described embodiments, the valve body Y128 moves to change the opening degree of the second passage hole Y17 relative to the window hole Y120, and the opening degree of the first passage hole Y16 relative to the window hole Y120 is maintained at the previous opening degree. However, this is not necessarily required.

[0093] For example, the opening degree of the second passage hole Y17 relative to the window hole Y120 and the opening degree of the first passage hole Y16 relative to the window hole Y120 may both be adjusted in conjunction with each other by moving the valve body Y128.

[0094] (Variation 3) In each of the above embodiments, there are two holes that can communicate with the window hole Y120 from the outside of the microvalve Y1: the first flow path hole Y16 and the second flow path hole Y17. However, there may be a third or subsequent flow path hole that communicates with the window hole Y120 from the outside of the microvalve Y1. The opening degree of the third or subsequent flow path holes may or may not be adjusted by the movement of the valve body Y128.

[0095] (Variation 4) The shape and size of the microvalve Y1 are not limited to those shown in the above embodiment. The microvalve Y1 only needs to have a first flow path hole Y16 and a second flow path hole Y17 that can control an extremely small flow rate and have hydraulic diameters that do not cause clogging of the flow path with minute debris.

[0096] (Variation 5) In the above embodiment, the displacement amplification member Y131 is composed of one lever. However, the displacement amplification member Y131 may be composed of a plurality of levers connected in series.

[0097] (Variation 6) In the above embodiment, a MEMS valve is used as an example of a valve device that amplifies the displacement of a drive unit caused by a temperature change according to the presence or absence of current flow by using the principle of leverage and transmits the amplified displacement to a valve body. However, such a valve device may be a device other than a MEMS valve.

[0098] (Variation 7) In the above second embodiment, the displacement amplifying member Y131 acts as a lever to amplify the displacement of the spine Y125 and transmit it to the movable part Y127, and at the same time, when energized, expands and contracts in the longitudinal direction to amplify the displacement of the spine Y125 and transmit it to the movable part Y127. However, the displacement amplifying member Y131 may not act, but may only expand and contract in the longitudinal direction when energized, to amplify the displacement of the spine Y125 and transmit it to the movable part Y127.

[0099] (Variation 8) In the above embodiment, the first point of force YV1 is closer to the first fulcrum Y126 than the second point of force YV2. However, this does not necessarily have to be the case. In other words, the second point of force YV2 may be closer to the first fulcrum Y126 than the first point of force YV1.

[0100] One such example is that in Fig. 4, the displacement amplifier Y131 is turned upside down around the spine Y125 and the second force point YV2. In this example, the second fulcrum part Y132, which is the center of rotation of the displacement amplifier Y131, is disposed closer to the second fixed part Y122 than the spine Y125, and the first force point YV1, which is the connection point between the displacement amplifier Y131 and the movable part Y127, is disposed closer to the valve body Y128 than the spine Y125.

[0101] In this example, the first fulcrum Y126, the second fulcrum Y132, the second point of force YV2, and the first point of force YV1 are arranged in this order from the second fixed part Y122 toward the valve body Y128, but even in this case, the displacement amplifying member Y131 functions as a lever. Note that in the first and second embodiments, the first fulcrum Y126, the first point of force YV1, the second point of force YV2, and the second fulcrum Y132 are arranged in this order from the second fixed part Y122 toward the valve body Y128.

[0102] (Variation 9) Furthermore, the above-described modified example 8 may be modified so that the second fulcrum Y132, the second point of force YV2, the first fulcrum Y126, and the first point of force YV1 are arranged in this order from the second fixed part Y122 toward the valve body Y128. That is, the position of the first fulcrum Y126 may be shifted closer to the first point of force YV1 compared to modified example 8. In this example, unlike modified example 8, the position of the first fulcrum Y126 can also be set so that the first point of force YV1 is closer to the first fulcrum Y126 than the second point of force YV2.

[0103] Features of the Disclosure [Disclosure 1] A first outer layer (Y11); A second outer layer (Y13); an intermediate layer (Y12) that is sandwiched between the first outer layer and the second outer layer and that forms a fluid chamber (Y19) through which a fluid flows; A first flow passage hole (Y16) capable of communicating with the fluid chamber is formed in the first outer layer or the second outer layer, A second flow passage hole (Y17, Y171 to Y175) capable of communicating with the fluid chamber is formed in the first outer layer or the second outer layer, The intermediate layer includes a driving unit (Y123, Y124, Y125) that is displaced by changing its own temperature depending on whether or not electricity is applied; a displacement amplifying member (Y131) that is biased to the driving portion when the driving portion is displaced and amplifies the displacement of the driving portion; a movable part (Y127) that rotates around a fulcrum part (Y126) by receiving the displacement amplified by the displacement amplifying member at a force point (YV1); and a valve body (Y128) that is biased from a point of action (YV3) of the movable part when the movable part rotates and moves within the fluid chamber, thereby adjusting the opening degree of the second flow passage hole relative to the fluid chamber. [Disclosure 2] The fulcrum portion is a first fulcrum portion, the force point is a first force point, When the driving unit is displaced, the driving unit biases the displacement amplification member at a second force point (YV2) and the displacement amplification member rotates around a second fulcrum portion (Y132), whereby the displacement amplification member biases the movable unit at the first force point, The valve device according to Disclosure 1, wherein a distance from the second fulcrum portion to the first point of force is longer than a distance from the second fulcrum portion to the second point of force. [Disclosure 3] The displacement amplifying member extends along the longitudinal direction of the movable portion, The valve device according to Disclosure 2, wherein the first point of force is located closer to the first fulcrum portion than the second point of force. [Disclosure 4] The valve device according to any one of Disclosures 1 to 3, wherein when the drive section is energized, the displacement amplifying member is biased toward the drive section and is energized to increase its temperature and expand, thereby amplifying the displacement of the drive section. [Disclosure 5] The second flow passage hole has a plurality of sub-flow passage holes (Y171 to Y175), The valve body includes a plurality of sub-valve bodies (81-85) and a reinforcing portion (86) for reinforcing the plurality of sub-valve bodies, the sub-valve bodies adjust the opening degrees of the sub-channel holes relative to the first channel hole by moving within the fluid chamber, The valve device according to any one of Aspects 1 to 4, wherein the reinforcing portion is connected to a plurality of the sub-valve bodies.

Claims

1. A first outer layer (Y11); A second outer layer (Y13); an intermediate layer (Y12) that is sandwiched between the first outer layer and the second outer layer and forms a fluid chamber (Y19) through which a fluid flows; A first flow passage hole (Y16) capable of communicating with the fluid chamber is formed in the first outer layer or the second outer layer, A second flow passage hole (Y17, Y171 to Y175) capable of communicating with the fluid chamber is formed in the first outer layer or the second outer layer, The intermediate layer includes a driving unit (Y123, Y124, Y125) that is displaced by changing its own temperature depending on whether or not electricity is applied; a displacement amplifying member (Y131) that is biased to the driving portion when the driving portion is displaced and amplifies the displacement of the driving portion; a movable part (Y127) that rotates around a fulcrum part (Y126) by receiving the displacement amplified by the displacement amplifying member at a force point (YV1); a valve body (Y128) that is biased from a point of action (YV3) of the movable part when the movable part rotates and moves within the fluid chamber to adjust the opening degree of the second flow path hole relative to the fluid chamber.

2. The fulcrum portion is a first fulcrum portion, the force point is a first force point, When the driving portion is displaced, the driving portion biases the displacement amplification member at a second force point (YV2) and the displacement amplification member rotates around a second fulcrum portion (Y132), whereby the displacement amplification member biases the movable portion at the first force point, The valve device according to claim 1 , wherein a distance from the second fulcrum portion to the first point of force is longer than a distance from the second fulcrum portion to the second point of force.

3. The displacement amplifying member extends along the longitudinal direction of the movable portion, The valve device according to claim 2 , wherein the first point of force is located closer to the first fulcrum portion than the second point of force.

4. 4. The valve device according to claim 1, wherein when the drive portion is energized, the displacement amplifying member is biased toward the drive portion and is energized to increase its temperature and expand, thereby amplifying the displacement of the drive portion.

5. The second flow passage hole has a plurality of sub-flow passage holes (Y171 to Y175), The valve body has a plurality of sub-valve bodies (81 to 85) and a reinforcing portion (86) for reinforcing the plurality of sub-valve bodies, the sub-valve bodies adjust the opening degrees of the sub-channel holes relative to the first channel hole by moving within the fluid chamber, The valve device according to claim 1 , wherein the reinforcing portion is connected to a plurality of the sub-valve bodies.

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