Gas Bearing Device

Abstract

A gas bearing device according to one embodiment comprises: a housing that is provided around a rotary shaft and forms an annular gap between the housing and the rotary shaft; a top foil that is provided so as to surround the rotary shaft within the annular gap; and a backup foil member that is provided so as to surround the top foil on the outside of the top foil within the annular gap, and is configured to elastically support the top foil. The backup foil member is configured by: a middle side backup foil that is disposed in a middle side region that includes at least a center position in the axial direction of the rotary shaft, and is made up of a plurality of layers of back foils; and end side backup foils that are disposed in end side regions on both sides of the middle side region in the axial direction, and are made up of a single layer or a plurality of layers of backup foils having a number of layers less than that in the middle side region.

Description

[Technical field]

[0001] The present disclosure relates to gas bearing devices. [Background technology]

[0002] In rotating machines such as electric compressors, gas bearings, a type of oil-less bearing, are sometimes used to prevent contamination of the compressed air due to the inclusion of lubricating oil in the compressed air. Gas bearings support the rotating shaft by forming a gas film between the rotating shaft and the bearing surface, but because the lubricant is gas, they have a lower bearing load capacity than oil bearings. Therefore, it is necessary to generate gas film pressure between the rotating shaft and the bearing as efficiently as possible, so the bearing surface is formed of a thin plate (top foil) that can deform in response to the gas film pressure, and the back surface of the top foil is elastically supported by a plate-shaped backup foil.

[0003] The pressure distribution generated on the bearing surface of the gas bearing is such that the central region is higher in the axial direction of the rotating shaft (hereinafter simply referred to as the "axial direction"). As a result, the central region is likely to deform toward the backup foil, while the end regions are likely to warp toward the rotating shaft. This may cause the end regions of the top foil to come into contact with the rotating shaft and become worn or damaged.

[0004] Patent Document 1 discloses a method of making the plate thickness of the end regions of the top foil and backup foil thinner than the plate thickness of the central region in order to prevent the end regions of the top foil in the axial direction from contacting the rotating shaft unevenly in a gas bearing. This reduces the rigidity of the end regions of these foil members and increases the displacement of the end regions of the top foil in the direction away from the rotating shaft due to the air film pressure acting on the bearing surface, thereby ensuring a bearing clearance in the end regions and eliminating wear and damage due to uneven contact. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2005-9556 A Summary of the Invention [Problem to be solved by the invention]

[0006] The means disclosed in Patent Document 1 requires precision machining to adjust the thickness of the top foil and backup foil so that the thickness is different between the axial center region and the axial end region, which poses the problem that machining the top foil and backup foil becomes complicated.

[0007] In view of the above circumstances, an object of the present invention is to provide a simple method for preventing wear and damage to a top foil that does not require complicated processing of the top foil and backup foil. [Means for solving the problem]

[0008] In order to achieve the above-mentioned object, one aspect of the gas bearing device according to the present disclosure comprises a housing arranged around a rotating shaft and forming an annular gap between the housing and the rotating shaft, a top foil arranged in the annular gap to surround the rotating shaft, and a backup foil member arranged in the annular gap to surround the top foil outside the top foil and configured to elastically support the top foil, wherein the backup foil member is composed of a central backup foil made of multiple layers of backup foil arranged in a central region that includes at least a central position in the axial direction of the rotating shaft, and end side backup foils arranged in end regions on both sides of the central region in the axial direction and made of a single layer or multiple layers of backup foil with the number of layers being fewer than in the central region. Effect of the Invention

[0009] According to one aspect of the gas bearing device of the present disclosure, by adjusting the number of backup foils constituting the center backup foil and the end backup foil in the axial direction, the bending rigidity of the center backup foil can be made greater than the bending rigidity of the end backup foil. This makes it possible to suppress deformation of the center top foil due to the air film pressure applied to the bearing surface of the top foil, thereby preventing the end region of the top foil from coming into contact with the rotating shaft and causing wear and damage, and also makes it unnecessary to adjust the thickness of each of the top foil and backup foil, thereby reducing the cost of manufacturing these foil members. [Brief description of the drawings]

[0010] [Figure 1] 3 is a front cross-sectional view (cross-sectional view taken along line CC in FIG. 2) showing the gas bearing device according to the embodiment. [Diagram 2] 2 is a schematic side cross-sectional view taken along line AA in FIG. 1. [Diagram 3] FIG. 2 is a schematic side cross-sectional view taken along line BB in FIG. [Figure 4] 5] FIG. 5 is a front cross-sectional view (cross-sectional view taken along line EE in FIG. 5) showing a gas bearing device according to one embodiment. [Diagram 5] FIG. 5 is a schematic cross-sectional side view taken along line D-D in FIG. 4. [Figure 6] FIG. 2 is a front view of a top foil according to one embodiment in which the top foil is unfolded. [Figure 7] FIG. 7 is a side view in which the top foil shown in FIG. 6 is developed. [Figure 8] FIG. 2 is a rear view of a top foil according to an embodiment of the present invention in which the top foil is unfolded. [Figure 9] 9 is an enlarged cross-sectional front view of a portion of the gas bearing device including the top foil shown in FIG. 8. [Figure 10] 1 is a schematic cross-sectional side view of a gas bearing device according to one embodiment; [Figure 11] 1 is a schematic cross-sectional side view of a gas bearing device according to one embodiment; [Figure 12]FIG. 1 is a schematic cross-sectional side view of a conventional gas bearing device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, some embodiments of the present invention will be described with reference to the accompanying drawings. However, the dimensions, materials, shapes, and relative arrangements of components described in these embodiments or shown in the drawings are merely illustrative examples and are not intended to limit the scope of the present invention. For example, expressions expressing relative or absolute configuration, such as "in a certain direction," "along a certain direction," "parallel," "orthogonal," "center," "concentric," or "coaxial," not only strictly express such a configuration, but also express a state in which there is a relative displacement with a tolerance or an angle or distance to the extent that the same function is obtained. For example, expressions indicating that things are in an equal state, such as "identical," "equal," and "homogeneous," not only indicate a state of strict equality, but also indicate a state in which there is a tolerance or a difference to the extent that the same function is obtained. For example, expressions describing shapes such as a rectangular shape or a cylindrical shape do not only refer to rectangular shapes, cylindrical shapes, etc. in the strict geometric sense, but also refer to shapes that include uneven portions, chamfered portions, etc., to the extent that the same effect is obtained. On the other hand, the expressions "comprise," "include," "have," "includes," or "have" of one element are not exclusive expressions excluding the presence of other elements.

[0012] First and Second Embodiments Fig. 1 is a front cross-sectional view (cross-sectional view taken along line CC in Fig. 2) of a gas bearing device 10 (10A) according to one embodiment, Fig. 2 is a schematic side cross-sectional view taken along line A-A in Fig. 1, and Fig. 3 is a schematic side cross-sectional view taken along line B-B in Fig. 1. Fig. 4 is a front cross-sectional view (cross-sectional view taken along line E-E in Fig. 5) showing a portion of a gas bearing device 10 (10B) according to another embodiment, and Fig. 5 is a schematic side cross-sectional view taken along line D-D in Fig. 4.

[0013] In the gas bearing device 10 (10A, 10B) shown in Figures 1 to 5, a rotating shaft 102 provided in a rotating machine (not shown; for example, an electric compressor, a supercharger, etc.) is accommodated inside a housing 12, and an annular gap S is formed between the outer circumferential surface of the rotating shaft 102 and an inner circumferential surface 12a of the housing 12 provided around the rotating shaft 102. A top foil 20 is provided in the inner region of the annular gap S so as to surround the rotating shaft 102, and a backup foil member 30 is provided outside the top foil 20 so as to surround the top foil 20.

[0014] In the embodiment illustrated in FIGS. 1 and 4, the rotating shaft 102 rotates in the direction of arrow a about a central axis O extending along the axial direction. 1 to 12, the direction of arrow b indicates the axial direction of the rotating shaft 102, and the direction of arrow c indicates the circumferential direction of the rotating shaft 102 (hereinafter, simply referred to as the "circumferential direction").

[0015] As shown in FIG. 1, the top foil 20 includes, in a cross-sectional view, an arc portion 22 extending along the circumferential direction of the rotating shaft 102, and a fixed portion 24 extending from one end of the arc portion 22 along the radially outer side. The arc portion 22 extends over most of the circumferential area, and for example, when the entire circumferential area is taken as 100%, it extends over 75 to 95% of the area. A joint portion (gap) x is formed between one end 22c and the other end 22d of the arc portion 22. The top foil 20 extends along the axial direction of the rotating shaft 102, and is formed in a substantially cylindrical shape except for the joint portion x. An inner peripheral surface 22a of the arc portion 22 forms a bearing surface, and a gas film is formed between the outer peripheral surface of the rotating shaft 102 and the inner peripheral surface 22a of the arc portion 22 to lubricate and support the rotating shaft 102. The fixed portion 24 extends along the radial direction of the rotary shaft 102 , and an end portion 24 a thereof is inserted into a groove portion 16 formed in the inner circumferential surface 12 a of the housing 12 .

[0016] The backup foil member 30 is provided so as to surround the top foil 20 from the outside of the top foil 20, and is configured to elastically support the top foil 20. The top foil 20 deforms in the radial direction of the rotating shaft 102 in response to the pressure acting on the inner circumferential surface 22a of the top foil 20 by a gas film formed between the rotating shaft 102 and the top foil 20, and the backup foil member 30 elastically supports the deforming top foil 20, thereby holding the gas film between the rotating shaft 102 and the top foil 20.

[0017] The backup foil member 30 is composed of a central backup foil 34 constituting a central region Rc including at least a central position Pc in the axial direction of the rotating shaft 102, and end-side backup foils 36 (36a, 36b) constituting end-side regions Re located on both axial sides of the central region Rc. The central position Pc is a position that divides the length from one end to the other end of the backup foil member 30 in half in the axial direction. The central backup foil 34 is composed of two or more layers of plate-shaped backup foils 32 laminated together, and the end-side backup foil 36 is composed of a single-layer backup foil 32 or a multi-layer backup foil 32 with the number of sheets being less than the number of sheets of the multi-layer backup foil 32 constituting the central backup foil 34.

[0018] In one embodiment, the top foil 20 has a thickness of 0.1 to 0.2 mm, and the backup foil 32 has a thickness larger than that of the top foil 20 .

[0019] According to these embodiments, the number of layers of the backup foils 32 in the central backup foil 34 and the end side backup foil 36 is adjusted so that the central backup foil 34 has a larger number of layers, thereby making it possible to make the bending rigidity of the central backup foil 34 larger than that of the end side backup foil 36. This makes it possible to increase the support strength of the central backup foil 34 that supports the top foil 20 in the central region Rc to be greater than the support strength of the end side backup foil 36 that supports the top foil 20 in the end side region Re. This makes it possible to suppress the top foil 20 in the central region Rc from being deformed toward the central backup foil 34 side due to the air film pressure. This makes it possible to suppress deformation of the end side region Re of the top foil 20 toward the rotation shaft 102 side, thereby making it possible to prevent the top foil 20 in the end side region Re from coming into contact with the rotation shaft 102 and being worn or damaged.

[0020] In addition, by adjusting the number of layers of the backup foils 32 constituting the backup foil member 30, the bending rigidity of each region on the central side and end side in the axial direction of the backup foil member 30 can be adjusted, eliminating the need to adjust the plate thickness of each backup foil 32. This makes it easier to process the backup foil 32. Furthermore, when the backup foils 32 are arranged in multiple layers, the bending rigidity of the backup foil member 30 can be efficiently increased by the friction generated between these multiple layers.

[0021] 12 is a schematic side cross-sectional view showing a part of a conventional gas bearing device 100 as a comparative example. In gas bearing device 100, a rotating shaft 102 is accommodated inside a housing 112, and an annular gap S is formed between rotating shaft 102 and an inner circumferential surface 112a of housing 112. Gas bearing device 100 is equipped with a top foil 120 provided to surround rotating shaft 102, and a backup foil member 130 provided on the outside of top foil 120 to surround top foil 120 and bent into a wave shape. Backup foil member 130 is made of a single backup foil with a uniform thickness along the axial direction, and has uniform bending rigidity in the axial direction.

[0022] In the gas bearing device 100, a gas film is formed between the rotating shaft 102 and the top foil 120, and the gas film pressure applied to the top foil 120 from the gas film has a high pressure distribution Pd in ​​the central region in the axial direction. As a result, the central region Rc in the axial direction of the top foil 120 is pressed toward the backup foil member 130, and conversely, the end side region Re is warped toward the rotating shaft 102, as shown by reference symbol 120' in Figure 12. This may cause the end side region Re of the top foil 120 to come into contact with the rotating shaft 102 and become worn or damaged.

[0023] In the embodiment illustrated in FIG. 1, each of the backup foils 32 constituting the backup foil member 30 includes, in a cross-sectional view, an uneven portion 38 extending along the circumferential direction of the rotating shaft 102, and a fixed portion 40 extending from one end of the uneven portion 38 to the radially outer side of the rotating shaft 102, with an end 40a being inserted into the groove portion 16. The uneven portion 38 extends over most of the circumferential area, for example, over 75 to 97% of the entire circumferential area when the entire circumferential area is taken as 100%, and a gap opening portion (gap) y is formed between the end 38a on the uneven portion 38 side and the fixed portion 24 of the top foil 20. Each of the backup foils 32 extends along the axial direction of the rotating shaft 102, and is formed in a substantially cylindrical shape except for the gap y. The end 40a on the fixed portion 40 side of the backup foil 32 is inserted into the groove portion 16.

[0024] In the embodiment shown in Figures 2 and 3, the central backup foil 34 is configured by laminating two layers, an inner backup foil 32a and an outer backup foil 32b arranged on the outside of the inner backup foil 32a with respect to the rotation axis 102, and the backup foils 36 on both end sides are configured by a single layer of backup foil 32 consisting of only the outer backup foil 32b. It should be noted that the number of layers of the backup foils 32 used in the central backup foil 34 and the end side backup foils 36 is not limited to that in the above embodiment. That is, in another embodiment, the end side backup foil 36 is composed of multiple layers of backup foils 32, and the central side backup foil 34 is composed of backup foils 32 with a greater number of layers than the number of layers of the backup foils 32 in the end side backup foil 36.

[0025] In the embodiment shown in Figs. 1 and 4, the uneven portion 38 of each backup foil 32 is bent so that unevenness is repeated along the circumferential direction of the rotating shaft 102. Each uneven portion extends along the axial direction and is bent so as to protrude or recede toward the radial direction of the rotating shaft 102 to form a peak and a valley. In the embodiment shown in Figs. 1 and 4, the peak and valley are formed in a wave shape like a sine curve, but may have another uneven shape. For example, the peak and valley may be rectangular or may have a parabolic shape. The peaks 41 of the unevenness thus formed are arranged to contact the back surface of the top foil 20 and the valleys 42 are arranged to contact the inner peripheral surface 12a of the housing 12, and elastically support the top foil 20.

[0026] In the gas bearing device 10 (10A, 10B) shown in Figures 1 to 5, a groove 16 extending axially is formed in an inner circumferential surface 12a of a housing 12. An end 24a of the top foil 20 on the side of the fixed portion 24 and an end 40a of the backup foil 32 on the side of the fixed portion 40 are each inserted into the groove 16 and fixed to the groove 16. As a means for fixing the ends 24a and 40a to the groove 16, for example, as shown in Figures 1 and 4, a spacer 18 having a shape and dimensions matching the shape and dimensions of the groove 16 is press-fitted into the groove 16 to be fixed. As described above, the ends 24a and 40a of the top foil 20 and the backup foil member 30 are fixed to the groove portion 16, and their axial positions are restricted by a means for restricting axial movement, such as a snap ring (not shown).

[0027] 1 and 4, the end 22d of the top foil 20 and the end 38a of each backup foil 32 are free ends. Therefore, the top foil 20 can deform more freely in response to the gas film pressure received from the gas film formed between the top foil 20 and the rotating shaft 102, and the backup foil member 30 can more flexibly respond to the deformation of the deforming top foil 20 and elastically support it.

[0028] 1 to 3, the outer backup foil 32b is formed from a single backup foil 32 extending from the central region Rc to the end region Re. This simplifies the manufacturing process for the backup foil member 30 and facilitates handling when the backup foil member 30 is disposed in the annular gap S.

[0029] In one embodiment, as shown in Figures 4 and 5, each of the multiple backup foils 32 constituting the central backup foil 34 and each of the backup foils 32 constituting the end backup foils 36 (36a, 36b) are configured separately from each other. That is, in the gas bearing device 10B shown in Figures 4 and 5, of the two layers of backup foils 32 constituting the central backup foil 34, the inner backup foil 32a arranged on the side closer to the rotation shaft 102 is arranged only in the central region Rc. The outer backup foils laminated on the outside of the inner backup foil 32a include the backup foil 32d arranged in the central region Rc and the backup foils 32c and 32e arranged in the both end regions Re, and each of the backup foils 32c, 32d, and 32e is configured separately.

[0030] As described above, each of the backup foils 32 constituting the unevenness-forming portion 38 of the backup foil member 30 is bent so that the unevenness is repeated along the circumferential direction to form the peaks 41 and valleys 42. Furthermore, the pitch of the unevenness of the backup foils 32 constituting the unevenness-forming portion 38 of the central backup foil 34 is formed smaller than the pitch of the unevenness of the backup foils 32 constituting the unevenness-forming portion 38 of the end-side backup foil 36.

[0031] According to this embodiment, the pitch of each of the projections and recesses of the backup foil 32 constituting the projection-and-recess formation portion 38 of the central backup foil 34 is made smaller than the pitch of each of the projections and recesses of the backup foil 32 constituting the projection-and-recess formation portion 38 of the end-side backup foil 36, so that the bending rigidity of the central backup foil 34 can be made larger than the bending rigidity of the end-side backup foil 36, as compared with the embodiment shown in Figs. 1 to 3. This makes it possible to more effectively suppress warping of the end-side region Re of the top foil 20 toward the rotation shaft 102. In addition, since the backup foils 32 constituting the central backup foil 34 and the end-side backup foil 36 are each formed separately, it is easy to process them to form projections and recesses with different pitches.

[0032] 4 and 5, for example, the backup foils 32c and 32e constituting the end-side backup foil 36 and the backup foils 32a and 32d constituting the central-side backup foil 34 do not necessarily have to have the same plate thickness. That is, it is sufficient that the plate thickness of each of the backup foils 32c and 32e constituting the end-side backup foil 36 is less than the total plate thickness of the backup foils 32a and 32d constituting the central-side backup foil 34. This makes it possible to make the bending rigidity of the central-side backup foil 34 greater than the bending rigidity of the end-side backup foil 36, thereby suppressing warping of the end-side region Re of the top foil 20 toward the rotation shaft 102.

[0033] Furthermore, in the embodiment illustrated in Figures 4 and 5, the inner backup foil 32a and the outer backup foil 32d constituting the central backup foil 34 have the same axial length, but the two may have different axial lengths. In addition, in the embodiment shown in Figures 4 and 5, both end faces of the inner backup foil 32a and the outer backup foil 32d are located at the same position in the axial direction, but the both end faces may be located at different positions from each other in the axial direction.

[0034] 5, the backup foils 32c and 32e constituting the end-side backup foil 36 have an uneven shape in which the peaks 41 contact the back surface 22b of the top foil 20 and the valleys 42 contact the inner circumferential surface 12a of the housing 12. In this embodiment as well, the bending rigidity of the central backup foil 34 can be made greater than the bending rigidity of the end-side backup foil 36.

[0035] In one embodiment, each of the backup foils 32 constituting the center backup foil 34 and the end backup foils 36 (36a, 36b) is configured to have the same plate thickness in the axial direction. That is, in the gas bearing device 10A shown in Figures 1 to 3, the backup foils 32a and 32b have the same plate thickness at least along the axial direction, and in the gas bearing device 10B shown in Figures 4 and 5, the backup foils 32a, 32c, 32d and 32e have the same plate thickness at least along the axial direction.

[0036] According to this embodiment, when manufacturing the backup foils 32 constituting the central backup foil 34 and the end backup foils 36, a plate material with a uniform thickness is used, and all of the backup foils 32 can be manufactured by simple processing such as cutting, eliminating the need for thickness adjustment. Therefore, manufacturing of the backup foil member 30 becomes even easier.

[0037] In one embodiment, the central region Rc of the top foil 20 is formed, and the central top foil 26 supported by the central backup foil 34 is configured so that its axial bending rigidity is greater than its circumferential bending rigidity. According to this embodiment, since the bending rigidity in the axial direction of the center-side top foil 26 is greater than the bending rigidity in the circumferential direction, it is possible to suppress deformation of the center-side top foil 26 due to the air film pressure applied to the inner peripheral surface (bearing surface) 22a of the center-side top foil 26. This makes it possible to suppress deformation of the end-side region Re of the top foil 20 warping back toward the rotation shaft 102.

[0038] In another embodiment, the top foil 20 is configured so that the axial bending rigidity is greater than the circumferential bending rigidity not only in the central top foil 26 but also in the end side region Re. This can further increase the axial bending rigidity of the top foil 20, thereby more effectively suppressing warping of the end side region Re toward the rotation shaft 102.

[0039] As a means for making the axial bending rigidity of the top foil 20 greater than the circumferential bending rigidity, for example, the top foil 20 is made of an anisotropic material (for example, CFRP material) whose axial bending rigidity is greater than the circumferential bending rigidity. This makes it unnecessary to perform processing to increase the axial bending rigidity in particular.

[0040] <First modified top foil> 6 and 7 are a front view and a side view in which only the arcuate portion 22 of the top foil 20a according to one embodiment is developed, and the fixed portion 24 is omitted in these drawings. In the top foil 20a according to this embodiment, at least the arc portion 22 constituting the central top foil 26 is formed in an uneven shape having unevenness 23 along the circumferential direction in at least a part of the circumferential direction. In this way, by a simple bending process of forming the arc portion 22 of the central top foil 26 in an uneven shape, it is possible to make the bending rigidity in the axial direction of the central top foil 26 greater than the bending rigidity in the circumferential direction. This allows for a wider range of freedom in the selection of materials constituting the top foil 20a, and allows the use of inexpensive materials, thereby reducing costs.

[0041] 6 and 7, a concave-convex shape is formed in the entire circumferential area of ​​the arc portion 22. This can further increase the bending rigidity of the arc portion 22. 6 and 7, the irregularities 23 are formed not only in the central region Rc but also in the arc portions 22 of the end region Re. This maximizes the bending rigidity of the top foil 20a.

[0042] As shown in Figures 6 and 7, the arc portion 22 of the top foil 20a is arranged in the annular gap S so that the direction of arrow b is the axial direction of the rotating shaft 102, and is arranged in the annular gap S so that the direction of arrow c is the circumferential direction of the rotating shaft 102. In the arc portion 22 of the top foil 20a shown in Figures 6 and 7, each of the projections and recesses 23 extends along the axial direction and protrudes or recedes in the radial direction of the rotation shaft 102 to form peaks and valleys. The shape of the projections and recesses 23 may be rectangular projections and recesses made up of flat surfaces as shown in Figures 6 and 7, or may be projections and recesses of another shape. For example, the projections and recesses may be wavy projections and recesses like a sine curve, or may be projections and recesses like a parabola.

[0043] <Third embodiment> <Second modified top foil> FIG. 8 is a front view showing an expanded rear surface 22b of the arcuate portion 22 of the top foil 20b according to one embodiment, and FIG. 9 is a front cross-sectional view showing an enlarged portion of a gas bearing device 10C including the top foil 20b. In the top foil 20b according to this embodiment, a plurality of rod-shaped members 50 are provided on the back surface 22b (surface facing the central backup foil 34) of the arc portion 22 of the central top foil 26. Each of the plurality of rod-shaped members 50 extends along the axial direction (direction of arrow b) and is arranged discretely along the circumferential direction. In this embodiment, by providing the rod-shaped members 50, the bending rigidity of the central top foil 26 in the axial direction can be increased more than that in the circumferential direction. This makes it possible to effectively suppress deformation of the end side region Re of the top foil 20 in such a way that it warps back toward the rotation shaft 102 side.

[0044] In this embodiment, the rod-shaped member 50 is provided only on the back surface 22b of the arc portion 22 of the central top foil 26, but in another embodiment, the rod-shaped member 50 may be provided over the entire back surface 22b of the arc portion 22 including the central side region Rc and the end side region Re. This can further increase the overall axial bending rigidity of the top foil 20b. The cross section of the bar-shaped member 50 may be, for example, circular or rectangular, or may have some other shape. 8, the rod members 50 are arranged so as to extend substantially parallel to the axial direction (the direction of the arrow b) of the rotating shaft 102, but may be slightly tilted with respect to the axial direction of the rotating shaft 102. For example, they are attached at an inclination of 30° or less with respect to the axial direction.

[0045] 9, the central backup foil 34 is disposed such that the peaks 41 of the uneven portion 38 are in contact with the back surface 22b of the arc portion 22 of the central top foil 26, and the valleys 42 of the central backup foil 34 are in contact with the inner circumferential surface 12a of the housing 12. Then, at circumferential intermediate positions between the peaks 41 (for example, positions that approximately halve the distance between the peaks 41), the rod-shaped members 50 are disposed so as to extend along the axial direction on the back surface 22b of the arc portion 22 of the central top foil 26. According to this embodiment, the rod-shaped members 50 can be disposed on the back surface 22b of the arc portion 22 of the central top foil 26 without interfering with the uneven portion 38 of the central backup foil 34.

[0046] In one embodiment, in the gas bearing device 10C shown in FIG. 8, the multiple rod-shaped members 50 are made of a material having a thermal expansion coefficient smaller than the thermal expansion coefficient of the material making up the arc portion 22 of the central top foil 26. According to this embodiment, since the thermal expansion coefficient of the rod-shaped member 50 is smaller than that of the arc portion 22 of the center-side top foil 26, when a rotating machine (not shown) equipped with the gas bearing device 10C is operated and the temperature of the gas bearing device 10C rises from that when it is not operating (room temperature), the central top foil 26, particularly at its axial end side, undergoes deformation in which it warps back in a direction away from the rotating shaft 102 due to the difference in thermal expansion coefficient between the arc portion 22 of the center-side top foil 26 and the rod-shaped member 50. This suppresses deformation in which the axial end side region Re of the top foil 20b warps back toward the rotating shaft 102, and therefore makes it possible to suppress the end side region Re of the top foil 20b from contacting the rotating shaft 102.

[0047] <First Modification of Backup Foil Member> In one embodiment, each of the backup foils 32 constituting the central backup foil 34 is configured such that at least the uneven portion 38 has a bending stiffness in the axial direction greater than a bending stiffness in the circumferential direction. According to this embodiment, since the bending rigidity of the center-side backup foil 34 in the axial direction is greater than the bending rigidity in the circumferential direction, the support strength of the center-side backup foil 34 that supports the center-side top foil 26 from the outside can be increased. This makes it possible to suppress deformation of the center-side top foil 26 in a direction away from the rotation shaft 102 caused by the air film pressure received by the inner circumferential surface 22a (bearing surface) of the top foil 20. This makes it possible to suppress deformation of the end-side region Re of the top foil 20 warping back toward the rotation shaft 102, thereby making it possible to suppress wear or damage to the end-side region Re of the top foil 20 due to contact with the rotation shaft 102.

[0048] In one embodiment, each of the backup foils 32 constituting the central backup foil 34 is made of an anisotropic material (such as a CFRP material) whose axial bending stiffness is greater than its circumferential bending stiffness at least in the concave-convex portion 38. According to this embodiment, the material constituting the center side backup foil 34 is itself made of an anisotropic material whose axial bending rigidity is greater than its circumferential bending rigidity, eliminating the need for processing to increase the axial bending rigidity of the center side backup foil 34. This allows the backup foil member 30 to be manufactured at low cost.

[0049] <Fourth embodiment> FIG. 10 is a schematic cross-sectional front view of a gas bearing device 10D according to still another embodiment, and is a schematic cross-sectional side view corresponding to FIG. 2 of the gas bearing device 10A. As shown in FIG. 10, the gas bearing device 10D is configured such that, when stationary (when the rotating machine equipped with the gas bearing device 10D is not operating, i.e., at room temperature), a gap Gc between the central top foil 26 supported by the central backup foil 34 of the uneven portion 38 and the rotating shaft 102 is smaller than a gap Ge between the end side top foils 28 (28a, 28b) supported by the end side backup foils 36 (36a, 36b) of the uneven portion 38 and the rotating shaft 102 (Gc <Ge)。

[0050] According to this embodiment, when a rotating machine equipped with the gas bearing device 10D is not operating, the gap Ge between the end-side top foil 28 and the rotating shaft 102 is larger than the gap Gc between the central-side top foil 26 and the rotating shaft 102, so even if the end-side top foil 28 is warped toward the rotating shaft 102 due to deformation of the central-side top foil 26 caused by the air film pressure applied to the central-side top foil 26, the end-side region Re of the top foil 20 can be prevented from coming into contact with the rotating shaft 102.

[0051] The embodiment shown in Figure 10 is an embodiment in which the thickness of the top foil 26 on the central side of the arc portion 22 is made greater than the thickness of the top foils 28 (28a, 28b) on both end sides of the arc portion 22, and the back surface 22b of the top foil 20 is made into a flat surface approximately parallel to the rotation axis 102, so that the central gap Gc is smaller than the end gap Ge. As a means for making the thickness of the central top foil 26 greater than the thickness of the top foils 28 on both ends, for example, the top foil 20 is coated with a coating agent (e.g., a solid lubricant), and the coating thickness is made different between the central top foil 26 and the end side top foil 28, thereby making it possible to adjust the above-mentioned gap.

[0052] As another processing method for making the thickness of the central top foil 26 greater than the thickness of the end-side top foils 28, unevenness such as dimples is formed only on the end-side top foil 28. This makes the average gap between the end-side top foil 28 and the rotating shaft 102 greater than the gap Gc of the central top foil 26. In this case, the roughness of the unevenness is, for example, on the order of 0.01 mm. Also, a shot peening method or the like can be used as a method for forming the unevenness.

[0053] In another embodiment, the top foil 20 may have a uniform thickness throughout the entire axial direction, and the end side top foils 28 (28a, 28b) may have a shape that is warped away from the rotation axis 102 more than the central top foil 26, thereby satisfying the relationship central gap Gc < end gap Ge.

[0054] <Fifth embodiment> FIG. 11 is a front cross-sectional view of gas bearing device 10E according to still another embodiment, and is a schematic side cross-sectional view corresponding to FIG. 2 of gas bearing device 10A. As shown in FIG. 11, the gas bearing device 10E is configured, similarly to the embodiment shown in FIG. 10, so that when stationary, the gap Gc between the central top foil 26 of the arc portion 22 and the rotating shaft 102 is smaller than the gap Ge between the end side top foils 28 (28a, 28b) of the arc portion 22 and the rotating shaft 102 (Gc <Ge)。

[0055] Furthermore, the central top foil 26 is formed by bonding together an inner layer 44 and an outer layer 46 having different thermal expansion coefficients. The inner layer 44 is formed inside the outer layer 46, i.e., closer to the rotation axis 102 than the outer layer 46, and the outer layer 46 is laminated to the inner layer 44 on the side farther from the rotation axis 102 than the inner layer 44. The thermal expansion coefficient of the material constituting the inner layer 44 is smaller than the thermal expansion coefficient of the material constituting the outer layer 46.

[0056] According to this embodiment, when the top foil 20 rises in temperature from room temperature during operation of a rotating machine (not shown) equipped with the gas bearing device 10E, the back surface 22b of the top foil 20 over the entire axial area, including the end side top foils 28 (28a, 28b), of the heated central top foil 26 deforms approximately parallel to the rotating shaft 102, as shown by the two-dot chain line (symbol 28 (28a, 28b)') in Figure 11, due to the difference in thermal expansion coefficients between the inner layer 44 and the outer layer 46. In this way, by making the gap between the rotating shaft 102 and the top foil 20 uniform over the entire axial area, the bearing function of the gas bearing device 10E can be well maintained.

[0057] In the gas bearing device 10E of the above embodiment, only the inner central top foil 26 of the top foil 20 is constructed from two inner layers 44 and outer layers 46 with different thermal expansion coefficients, but in another embodiment, the entire axial area of ​​the top foil 20, including the end side top foils 28 (28a, 28b), may be constructed from an inner layer 44 and an outer layer 46 with different thermal expansion coefficients.

[0058] In the embodiment shown in Figure 11, the thickness of the central top foil 26 is made greater than the thickness of the end side top foil 28, thereby satisfying the relationship of central gap Gc < end side gap Ge, but in another embodiment, the top foil 20 may have a uniform thickness in the axial direction, and the end side top foils 28 (28a, 28b) may have a shape that is warped toward the side away from the rotation axis 102.

[0059] The contents described in each of the above embodiments can be understood, for example, as follows.

[0060] 1) A gas bearing device according to one embodiment includes a housing (12) that is provided around a rotating shaft (102) and that forms an annular gap (S) between the housing (12) and the rotating shaft (102), a top foil (20) that is provided in the annular gap (S) so as to surround the rotating shaft (102), and a backup foil member (30) that is provided in the annular gap (S) outside the top foil (20) so as to surround the top foil (20) and that is configured to elastically support the top foil (20), The backup foil member (30) is composed of a central backup foil (34) made of multiple layers of backup foil (32) and arranged in a central region (Rc) that includes at least the center position (Pc) in the axial direction of the rotating shaft (102), and end side backup foils (36 (36a, 36b)) made of a single layer or multiple layers of backup foil with the number of layers being fewer than that of the central region (Rc) and arranged in end side regions (Re) located on both sides of the central region (Rc) in the axial direction.

[0061] According to this configuration, simply by adjusting the number of backup foils (32) constituting the central backup foil (34) and the end side backup foils (36), the bending rigidity of the central backup foil (34) can be made greater than the bending rigidity of the end side backup foils (36). In addition, since there is no need to adjust the plate thickness of the backup foils (32) constituting the backup foil member (30), processing of the backup foils (32) for manufacturing the backup foil member (30) becomes easier.

[0062] In this way, the support strength of the backup foil member 30 with respect to the top foil 20 in the central region Rc can be increased, which makes it possible to suppress deformation of the central region Rc of the top foil 20 toward the backup foil member 30. Therefore, deformation of the end region Re of the top foil 20 toward the rotating shaft 102 can be suppressed, which makes it possible to suppress wear or damage to the end region Re of the top foil 20 due to contact with the rotating shaft 102. Furthermore, since at least the central backup foil (34) is arranged in multiple layers, the bending rigidity of the central backup foil (34) can be efficiently increased by friction generated between these multiple layers.

[0063] 2) A gas bearing device according to another aspect is the gas bearing device described in 1), wherein each of the center-side backup foils (34) and each of the end-side backup foils (36 (36a, 36b)) are constructed separately from each other and are formed in a concave-convex shape along the circumferential direction of the rotating shaft (102), and the pitch of the concave-convex portions of each of the center-side backup foils (34) is smaller than the pitch of the concave-convex portions of each of the end-side backup foils (36).

[0064] According to this configuration, by making the pitch of the concaves and convexes of the central backup foil 34 smaller than the pitch of the concaves and convexes of the end side backup foils 36, it is possible to make the bending rigidity of the central backup foil 34 greater than the bending rigidity of the end side backup foils 36. In addition, since the central backup foil 34 and the end side backup foils 36 are each configured separately, it is easy to process the respective backup foils to form concaves and convexes with different pitches.

[0065] 3) A gas bearing device according to yet another aspect is the gas bearing device described in 1) or 2), in which each of the center backup foils (34) and each of the end backup foils (36 (36a, 36b)) have the same plate thickness.

[0066] According to this configuration, all of the backup foils (32) constituting the central backup foil (34) and the end backup foils (36) can be easily manufactured using plate material having a uniform thickness by simply performing processing such as cutting.

[0067] 4) A gas bearing device according to yet another aspect is the gas bearing device described in any one of 1) to 3), wherein a central top foil (26) supported by the central backup foil (34) of the top foil (20) has a bending rigidity in the axial direction that is greater than the bending rigidity in the circumferential direction of the rotating shaft.

[0068] According to this configuration, the central top foil (26) has a bending rigidity in the axial direction that is greater than the bending rigidity in the circumferential direction, so that deformation of the central top foil (26) due to the air film pressure acting on the bearing surface (22a) of the central top foil (26) can be suppressed. This makes it possible to suppress deformation of the end side region (Re) of the top foil (20) toward the rotating shaft (102).

[0069] 5) The gas bearing device according to yet another aspect is the gas bearing device described in 4), wherein the central top foil (26) is formed in an uneven shape along the circumferential direction at least in a portion of the circumferential direction.

[0070] According to this configuration, the bending rigidity of the central top foil 26 in the axial direction can be made greater than the bending rigidity in the circumferential direction simply by bending the central top foil 26 to form an uneven shape along the circumferential direction, which increases the freedom of selection of materials for forming the top foil 20. This allows the use of inexpensive materials, thereby reducing costs.

[0071] 6) The gas bearing device according to yet another embodiment is the gas bearing device described in 4) or 5), further comprising a plurality of rod-shaped members (50) provided on the back surface (22b) of the central top foil (26), extending in the axial direction and arranged discretely in the circumferential direction.

[0072] According to this configuration, by providing the rod-shaped member (50) on the back surface (22b) of the central top foil (26), the axial bending rigidity of the central top foil (26) can be increased, so that deformation of the end side region (Re) of the top foil (20) toward the rotation shaft (102) can be effectively suppressed.

[0073] 7) A gas bearing device according to yet another aspect is the gas bearing device described in 6), wherein the thermal expansion coefficient of the multiple rod-shaped members (50) is smaller than the thermal expansion coefficient of the material constituting the central top foil (26).

[0074] According to this configuration, since the thermal expansion coefficient of the rod-shaped member (50) is smaller than that of the central top foil (26), when the temperature of a rotating machine equipped with the gas bearing device (10) rises during operation, the central top foil (26) undergoes deformation in which it warps in a direction away from the rotating shaft (102) due to the difference in thermal expansion coefficient between the central top foil (26) and the rod-shaped member (50). This suppresses deformation in which the end side region (Re) of the top foil (20) warps toward the rotating shaft (102), effectively preventing the end side region (Re) of the top foil (20) from contacting the rotating shaft (102).

[0075] 8) A gas bearing device according to yet another aspect is a gas bearing device described in any one of 1) to 7), wherein each of the central backup foils (34) has a bending stiffness in the axial direction that is greater than the bending stiffness in the circumferential direction of the rotating shaft (102).

[0076] According to this configuration, since the bending rigidity of the central backup foil (34) in the axial direction is greater than the bending rigidity in the circumferential direction, the support strength of the central backup foil (34) that supports the central top foil (26) from the outside can be increased. This makes it possible to suppress deformation of the central top foil (26) due to the air film pressure applied to the central top foil (26), thereby suppressing deformation in which the end side region (Re) of the top foil (20) warps toward the rotating shaft (102). This makes it possible to suppress contact of the end side region (Re) of the top foil (20) with the rotating shaft (102).

[0077] 9) A gas bearing device according to yet another aspect is the gas bearing device described in 8), wherein each of the central backup foils (34) is made of an anisotropic material whose bending stiffness in the axial direction is greater than the bending stiffness in the circumferential direction of the rotating shaft (102).

[0078] According to this configuration, the central backup foil (34) is made of an anisotropic material whose axial bending rigidity is greater than its circumferential bending rigidity. This eliminates the need for processing to increase the axial bending rigidity of the central backup foil (34), thereby reducing costs.

[0079] 10) A gas bearing device according to yet another embodiment is the gas bearing device described in any of 1) to 9), wherein, when stationary, a gap (Gc) between the rotating shaft (102) and a central top foil (26) supported by the central backup foil (34) of the top foil (20) is smaller than a gap (Ge) between the rotating shaft (102) and an end side top foil (28 (28a, 28b)) supported by the end side backup foil (36 (36a, 36b)) of the top foil (20).

[0080] According to this configuration, when the rotating machine equipped with the gas bearing device (10) is not operating, the gap (Ge) between the end-side top foil (28) and the rotating shaft (102) is larger than the gap (Gc) between the central-side top foil (26) and the rotating shaft (102). Therefore, even if the end-side top foil (36) is warped toward the rotating shaft (102) due to deformation of the central-side top foil (26) caused by the air film pressure applied to the central-side top foil (26), the end-side region (Re) of the top foil (20) can be prevented from coming into contact with the rotating shaft (102).

[0081] 11) A gas bearing device according to yet another embodiment is the gas bearing device described in 10), wherein the central top foil (26) is constructed by bonding together two layers (44, 46) having different thermal expansion coefficients, and the thermal expansion coefficient of the material constituting the inner layer (44) of the two layers (44, 46) is smaller than the thermal expansion coefficient of the material constituting the outer layer (46) of the two layers (44, 46).

[0082] According to this configuration, when the gas bearing device (10) heats up during operation of a rotary machine equipped with the gas bearing device (10), the heated center top foil (26) deforms approximately parallel to the rotating shaft (102) over the entire axial region of the top foil (20), including the end side top foil (28), due to the difference in thermal expansion coefficients of the two layers (44, 46). By thus making the gap between the rotating shaft (102) and the top foil (20) uniform over the entire axial region, the bearing function of the gas bearing device (10) can be well maintained. [Explanation of symbols]

[0083] 10 (10A, 10B, 10C, 10D, 10E), 100 Gas bearing device 12, 112 Housing 12a, 112a Inner surface 16 Groove 18 Spacer 20(20a, 20b), 120, 120' Top Foil 22 Arc section 22a Inner surface (bearing surface) 22b Back 22c one end 22d Other end 23 Unevenness 24 Fixed part 24a end 26 Center top foil 28 (28a, 28b) End side top foil 30, 130 Backup foil member 32(32a, 32b, 32c, 32d, 32e) Backup foil 34 Center backup foil 36(36a, 36b) End side backup foil 38 Unevenness forming part 38a end 40 Fixed part 40a End 41 Yamabe 42 Valley 44 Inner layer 46 Outer layer 50 Rod-shaped member 102 Rotation axis Gc Central gap Ge End Gap O center axis PC center position Pd Pressure distribution Rc center area Re end side area S Annular gap x, y gap

Claims

1. a housing provided around a rotating shaft and defining an annular gap between the housing and the rotating shaft; a top foil provided in the annular gap so as to surround the rotating shaft; a backup foil member provided on an outer side of the top foil in the annular gap so as to surround the top foil and configured to elastically support the top foil, The backup foil member is a central backup foil including a plurality of layers of backup foils arranged in a central region including at least a central position in an axial direction of the rotation shaft; and end side backup foils arranged in end side regions located on both sides of the central region in the axial direction, the end side backup foils being made of a single layer or a plurality of layers of the backup foils, the number of layers being less than that of the central region. Gas bearing device.

2. Each of the central backup foils and each of the end backup foils are formed separately from each other and are formed in an uneven shape along the circumferential direction of the rotation shaft, the pitch of each of the projections and recesses of the central backup foil is smaller than the pitch of each of the projections and recesses of the end backup foils; 2. The gas bearing device according to claim 1.

3. Each of the central backup foils and each of the end backup foils have the same plate thickness.

3. A gas bearing device according to claim 1 or 2.

4. a central top foil supported by the central backup foil among the top foils has a bending rigidity in the axial direction that is greater than a bending rigidity in a circumferential direction of the rotation shaft; 4. A gas bearing device according to claim 1.

5. The central top foil is formed in an uneven shape along the circumferential direction in at least a part of the circumferential direction, 5. The gas bearing device according to claim 4.

6. a plurality of rod-shaped members provided on a back surface of the central top foil, extending in the axial direction, and arranged discretely in the circumferential direction; 6. A gas bearing device according to claim 4 or 5.

7. a thermal expansion coefficient of the plurality of rod-shaped members is smaller than a thermal expansion coefficient of a material constituting the central top foil; 7. The gas bearing device according to claim 6.

8. Each of the central backup foils has a bending rigidity in the axial direction that is greater than a bending rigidity in the circumferential direction of the rotation shaft. A gas bearing device according to any one of claims 1 to 7.

9. Each of the central backup foils is made of an anisotropic material having a bending stiffness in the axial direction greater than a bending stiffness in the circumferential direction of the rotation shaft.

9. The gas bearing device according to claim 8.

10. a gap between a central side top foil supported by the central side backup foil of the top foil and the rotation shaft is smaller than a gap between an end side top foil supported by the end side backup foil of the top foil and the rotation shaft when the top foil is stationary; A gas bearing device according to any one of claims 1 to 9.

11. the central top foil is formed by bonding two layers having different thermal expansion coefficients to each other, and the thermal expansion coefficient of the material constituting the inner layer of the two layers is smaller than the thermal expansion coefficient of the material constituting the outer layer of the two layers; 11. The gas bearing device according to claim 10.

Images