Coating mechanism and coating device

Abstract

To provide an application mechanism which can ease an impact caused when an application needle contacts with an application surface without increasing manufacturing costs even when a disposable application needle holder and a disposable application needle are used or sterilization treatment is needed to be performed to the application needle holder and the application needle.SOLUTION: An application mechanism applies a liquid material onto an application surface. The application mechanism includes: an application needle holder fixing part; an application needle holder which is detachably attached to the application needle holder fixing part; an application needle held by the application needle holder; and a buffer mechanism. The buffer mechanism is configured to buffer an impact caused when the application needle contacts with the application surface.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a coating device and a coating mechanism. [Background technology]

[0002] The coating mechanism described in JP 2018-20325 A (Patent Document 1) has a coating needle holder fixing part, a coating needle holder, and a coating needle. The coating needle holder is attached to the coating needle holder fixing part. The coating needle is held by the coating needle holder. The coating mechanism described in Patent Document 1 does not have a mechanism for cushioning an impact when the coating needle comes into contact with a coating surface.

[0003] In contrast, the coating mechanism described in JP 2015-112577 A (Patent Document 2) has a coating needle holder, a coating needle fixing plate, and a coating needle. The coating needle holder is attached to a movable base. The coating needle is held by the coating needle fixing plate. A spring and a linear guide are housed in the coating needle holder. The linear guide holds the coating needle so that it is slidable in a direction perpendicular to the coating surface. The spring biases the coating needle toward the coating surface. This cushions the impact when the coating needle comes into contact with the coating surface. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2018-20325 A [Patent Document 2] JP 2015-112577 A Summary of the Invention [Problem to be solved by the invention]

[0005] When the application mechanism described in Patent Document 2 is applied to applications requiring strict control over contamination, such as diagnostic chips for in vitro diagnosis of disease, it may be necessary to make the application needle holder and application needle disposable or to sterilize the application needle holder and application needle.

[0006] In the coating mechanism described in Patent Document 2, a spring and a linear guide are incorporated in the coating needle holder to cushion the impact when the coating needle comes into contact with the coating surface, so if the coating needle holder and the coating needle are made disposable, the manufacturing costs will increase. Also, in the coating mechanism described in Patent Document 2, a linear guide is incorporated in the coating needle holder, and the coating needle is fixed to the coating needle fixing plate with an adhesive, so it is difficult to sterilize the coating needle holder and the coating needle in the coating mechanism described in Patent Document 2.

[0007] The present invention has been made in consideration of the problems of the conventional techniques as described above. More specifically, the present invention provides a coating mechanism and a coating device that can cushion the impact when a coating needle comes into contact with a coating surface without increasing manufacturing costs, even when the coating needle holder and the coating needle are disposable or require sterilization treatment for the coating needle holder and the coating needle. [Means for solving the problem]

[0008] The coating mechanism of the present invention applies a liquid material onto a coating surface. The coating mechanism includes a coating needle holder fixing part, a coating needle holder detachably attached to the coating needle holder fixing part, a coating needle held by the coating needle holder, and a buffer mechanism. The buffer mechanism is configured to be capable of buffering an impact when the coating needle comes into contact with the coating surface.

[0009] In the coating mechanism, the coating mechanism may have a linear guide and an elastic member. The linear guide may hold the coating needle holder fixing part so as to be slidable in a direction perpendicular to the coating surface. The elastic member may bias the coating needle holder fixing part toward the coating surface.

[0010] The coating mechanism may further include a first magnet held by the coating needle holder fixing portion and a second magnet held by the coating needle holder. The coating needle holder may be made of a resin material. The coating needle holder may be detachably attached to the coating needle holder fixing portion by attracting the second magnet to the first magnet.

[0011] The coating mechanism may further include a first magnet attached to the coating needle holder fixing portion and a second magnet held by the coating needle holder. The coating needle holder may be made of a non-magnetic metal material. The coating needle holder may be detachably attached to the coating needle holder fixing portion by attracting the second magnet to the first magnet.

[0012] The coating mechanism of the present invention includes the coating mechanism described above. Effect of the Invention

[0013] According to the coating mechanism and coating device of the present invention, even if the coating needle holder and coating needle are disposable or require sterilization, it is possible to cushion the impact when the coating needle comes into contact with the coating surface without increasing manufacturing costs. [Brief description of the drawings]

[0014] [Figure 1] 2 is a perspective view of the coating mechanism 10 in which the coating needle holder 12, the coating needle 13, and the container 15 are not shown. [Diagram 2] 2 is a side view of the coating mechanism 10 in which the coating needle holder 12, the coating needle 13, and the container 15 are not shown. [Diagram 3] 2 is a perspective view of a coating needle holder 12 and a coating needle 13 of a coating mechanism 10. FIG. [Figure 4] 2 is a side view of a coating needle holder 12 and a coating needle 13 of a coating mechanism 10. FIG. [Diagram 5] FIG. 2 is a perspective view of the coating mechanism 10. [Figure 6]2 is a front view of a coating needle holder 12 and a coating needle 13 of a coating mechanism 10A. FIG. [Figure 7] 2 is a rear view of the coating needle holder 12 and the coating needle 13 of the coating mechanism 10A. FIG. [Figure 8] 2 is a side view of a coating needle holder 12 and a coating needle 13 of a coating mechanism 10A. FIG. [Figure 9] FIG. 1 is a perspective view of a coating apparatus 100. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same or corresponding parts are designated by the same reference numerals, and redundant description will not be repeated.

[0016] (First embodiment) A coating mechanism according to a first embodiment (hereinafter referred to as a "coating mechanism 10") will be described.

[0017] <Configuration of Coating Mechanism 10> Fig. 1 is a perspective view of the coating mechanism 10, omitting illustration of the coating needle holder 12, the coating needle 13, and the container 15. Fig. 2 is a side view of the coating mechanism 10, omitting illustration of the coating needle holder 12, the coating needle 13, and the container 15. As shown in Figs. 1 and 2, the coating mechanism 10 has a drive mechanism 11.

[0018] The drive mechanism 11 includes, for example, a servo motor 111, a cam 112, a bearing 113, a cam connecting plate 114, a movable part 115, a buffer mechanism 116, an application needle holder fixing part 117, and a first magnet 118.

[0019] The servo motor 111 has a rotating shaft 111a. The rotating shaft 111a extends along the Z axis. The Z axis is perpendicular to the coating surface of the substrate SUB. Although not shown, the servo motor 111 is connected to an electrical box 27 described later. The servo motor 111 rotates the rotating shaft 111a around its central axis. The cam 112 has a first surface 112a and a second surface 112b. The first surface 112a faces downward. The second surface 112b faces upward. In other words, the second surface 112b is the opposite surface to the first surface 112a.

[0020] The second surface 112b has a central portion and an outer periphery. The outer periphery of the second surface 112b is located around the central portion of the second surface 112b. The cam 112 is attached to the rotating shaft 111a at the central portion of the second surface 112b. The distance between the second surface 112b and the first surface 112a varies in the circumferential direction (the direction along the circumference centered on the central axis of the rotating shaft 111a). The second surface 112b is the cam surface of the cam 112.

[0021] Bearing 113 is disposed so that its outer circumferential surface contacts the cam surface (second surface 112b) of cam 112. Cam connecting plate 114 is connected to bearing 113 at one end, and is connected to movable part 115 at the other end.

[0022] The buffer mechanism 116 is attached to the movable part 115. The buffer mechanism 116 has, for example, a linear guide 116a and an elastic member 116b. The linear guide 116a is attached to the movable part 115. The application needle holder fixing part 117 is held by the linear guide 116a so as to be slidable in the Z-axis direction.

[0023] The elastic member 116b is, for example, a coil spring. The elastic member 116b biases the application needle holder fixing part 117 toward the application surface of the substrate SUB. More specifically, the elastic member 116b presses the application needle holder fixing part 117 against a stopper 115a provided on the movable part 115. The first magnet 118 is held by the application needle holder fixing part 117.

[0024] Fig. 3 is a perspective view of the coating needle holder 12 and the coating needle 13 of the coating mechanism 10. Fig. 4 is a side view of the coating needle holder 12 and the coating needle 13 of the coating mechanism 10. As shown in Figs. 3 and 4, the coating mechanism 10 further has the coating needle holder 12 and the coating needle 13. The coating needle 13 has a tip end 13a and a base end 13b. The base end 13b is the end opposite the tip end 13a in the longitudinal direction of the coating needle 13. The longitudinal direction of the coating needle 13 is along the Z-axis direction.

[0025] The coating needle 13 is held by the coating needle holder 12. More specifically, the coating needle 13 is held by the coating needle holder 12 by having a base end 13b side embedded in the coating needle holder 12. The coating mechanism 10 further has a second magnet 14.

[0026] The coating needle holder 12 is made of a resin material. The coating needle 13 and the second magnet 14 are held in the coating needle holder 12, for example, by being insert molded together with the resin material constituting the coating needle holder 12. In other words, the coating needle holder 12 does not have a linear guide that holds the coating needle 13 slidably in the Z-axis direction, or an elastic member that urges the coating needle 13 toward the coating surface of the substrate SUB.

[0027] The second magnet 14 is held by the coating needle holder 12. Fig. 5 is a perspective view of the coating mechanism 10. As shown in Fig. 5, the coating needle holder 12 is detachably attached to a coating needle holder fixing portion 117. More specifically, the coating needle holder 12 is detachably attached to the coating needle holder fixing portion 117 by the second magnet 14 being attracted to the first magnet 118.

[0028] The application mechanism 10 further includes a container 15. The container 15 has an upper end 15a and a lower end 15b. The lower end 15b is the end opposite the upper end 15a. The inside of the container 15 is hollow. The container 15 is open at the upper end 15a. The lower end 15b is closed by a bottom wall having a through hole formed therein. The liquid material is stored in the internal space of the container 15. The tip 13a is inserted into the internal space of the container 15 from the opening at the upper end 15a.

[0029] The rotation of the rotary shaft 111a rotates the cam 112. Since the distance between the second surface 112b and the first surface 112a varies, the rotation of the cam 112 varies the position of the bearing 113 in the Z-axis direction.

[0030] As described above, the movable part 115 is connected to the bearing 113 by the cam connecting plate 114, and the coating needle holder fixing part 117 is attached to the movable part 115. In addition, the coating needle holder 12 is attached to the coating needle holder fixing part 117. Therefore, when the position of the bearing 113 in the Z-axis direction changes, the position of the coating needle 13 held by the coating needle holder 12 in the Z-axis direction changes. In this way, the drive mechanism 11 moves the position of the coating needle 13 (tip 13a) in the Z-axis direction.

[0031] The driving mechanism 11 moves the application needle 13 so that the tip 13a protrudes from a through hole formed in the bottom wall closing the lower end 15b of the container 15, whereby the liquid material in the container 15 adheres to the tip 13a.

[0032] <Effects of Coating Mechanism 10> In the coating mechanism 10, the coating needle holder fixing portion 117 is held by the linear guide 116a so as to be slidable in the Z-axis direction, and the elastic member 116b urges the coating needle holder fixing portion 117 toward the coating surface of the substrate SUB. Therefore, when the coating needle 13 comes into contact with the coating surface of the substrate SUB, the coating needle 13 moves along the Z-axis direction away from the coating surface of the substrate SUB, thereby cushioning the impact when the coating needle 13 comes into contact with the coating surface of the substrate SUB.

[0033] Furthermore, in the coating mechanism 10, the coating needle holder 12 is formed from a resin material and does not have a linear guide or elastic member to cushion the impact when the coating needle 13 comes into contact with the coating surface of the substrate SUB, so that even if the coating needle holder 12 and the coating needle 13 are disposable, an increase in manufacturing costs can be suppressed.

[0034] Second embodiment A coating mechanism according to a second embodiment (hereinafter referred to as "coating mechanism 10A") will be described. Here, differences from coating mechanism 10 will be mainly described, and overlapping descriptions will not be repeated.

[0035] The coating mechanism 10A has a drive mechanism 11, a coating needle holder 12, a coating needle 13, a second magnet 14, and a container 15. In this respect, the coating mechanism 10A is common to the coating mechanism 10. However, the coating mechanism 10A differs from the coating mechanism 10 in the detailed configuration of the coating needle holder 12.

[0036] Fig. 6 is a front view of the coating needle holder 12 and the coating needle 13 of the coating mechanism 10A. As shown in Fig. 6, the coating needle 13 is held by the coating needle holder 12 at the base end 13b side. More specifically, the coating needle 13 is held by the coating needle holder 12 by a screw 12a. The coating needle holder 12 is made of a non-magnetic metal material. A specific example of the non-magnetic metal material is aluminum or an aluminum alloy.

[0037] Fig. 7 is a rear view of the coating needle holder 12 and the coating needle 13 of the coating mechanism 10A. Fig. 8 is a side view of the coating needle holder 12 and the coating needle 13 of the coating mechanism 10A. As shown in Figs. 7 and 8, the second magnet 14 is held by the coating needle holder 12. More specifically, the second magnet 14 is held by the coating needle holder 12 by a screw 12b. Note that in the coating mechanism 10A, the coating needle holder 12 does not have a linear guide that holds the coating needle 13 slidably in the Z-axis direction, nor an elastic member that biases the coating needle 13 toward the coating surface of the substrate SUB.

[0038] The coating mechanism 10A has the buffer mechanism 116 like the coating mechanism 10, and is therefore able to buffer the impact when the coating needle 13 comes into contact with the coating surface of the substrate SUB.

[0039] In order to sterilize the coating needle holder 12 and the coating needle 13, it is necessary to hold the coating needle holder 12 and the coating needle 13 in a high-temperature environment. In the coating mechanism 10A, the coating needle 13 is fixed with a screw 12a, so there is no adhesive joint in the coating needle holder 12. Also, in the coating mechanism 10A, the coating needle holder 12 is formed from a heat-resistant metal material. Therefore, in the coating mechanism 10A, the coating needle holder 12 and the coating needle 13 can be reused by sterilizing them in a high-temperature environment, which can suppress an increase in manufacturing costs.

[0040] Third embodiment A coating apparatus according to a third embodiment (hereinafter referred to as "coating apparatus 100") will be described.

[0041] Fig. 9 is a perspective view of the coating device 100. As shown in Fig. 9, the coating device 100 includes a coating mechanism 10, a base plate 21a, a stand 21b, an X-axis stage 22, a Y-axis stage 23, a stage movable plate 24, an adsorption plate 25, a Z-axis stage 26, an electrical box 27, an observation optical system 28, an imaging device 29, and a control device 30.

[0042] An X-axis stage 22 is disposed on the base plate 21a. The X-axis stage 22 has a movable part, and moves the movable part along the X-axis direction. A stand 21b is attached to the base plate 21a. A Y-axis stage 23 is disposed on the movable part of the X-axis stage 22. The Y-axis stage 23 has a movable part, and moves the movable part along the Y-axis direction. The Y-axis is perpendicular to the X-axis.

[0043] A stage movable plate 24 is disposed on the movable part of the Y-axis stage 23. An adsorption plate 25 is disposed on the stage movable plate 24. A substrate SUB is disposed on the adsorption plate 25. The position of the substrate SUB is fixed by being adsorbed to the adsorption plate 25. By moving the movable part of the X-axis stage 22 and the movable part of the Y-axis stage 23, the position of the substrate SUB in the directions along the X-axis and Y-axis is changed.

[0044] The Z-axis stage 26 is attached to the stand 21b. The Z-axis stage 26 has a movable part, and the movable part is moved along the Z-axis. The Z-axis is perpendicular to the X-axis and Y-axis and corresponds to the vertical direction. The Z-axis is also perpendicular to the main surface of the substrate SUB.

[0045] The coating mechanism 10 is attached to a movable part of the Z-axis stage 26. The position of the coating mechanism 10 in the Z-axis direction is changed by moving the movable part of the Z-axis stage 26. The imaging device 29 can observe the substrate SUB via the observation optical system 28. The imaging device 29 is, for example, a CCD (Charge Coupled Device) camera.

[0046] The electrical equipment box 27 is connected to the X-axis stage 22, the Y-axis stage 23, the Z-axis stage 26, and the coating mechanism 10. The electrical equipment box 27 houses electrical components for driving the X-axis stage 22, the Y-axis stage 23, the Z-axis stage 26, and the coating mechanism 10.

[0047] The control device 30 includes, for example, a computer 30a, a monitor 30b, a keyboard 30c, and a mouse 30d.

[0048] The computer 30a is, for example, a personal computer. The computer 30a is connected to the electrical equipment box 27 (more specifically, to each electrical component housed in the electrical equipment box 27) and sends control signals to the electrical equipment box 27 for driving the X-axis stage 22, the Y-axis stage 23, the Z-axis stage 26, and the coating mechanism 10.

[0049] The monitor 30b is connected to the computer 30a. An image captured by the imaging device 29 and an operation screen of the computer 30a are displayed on the monitor 30b. The keyboard 30c and the mouse 30d are connected to the computer 30a. By performing various inputs using the keyboard 30c and the mouse 30d on the operation screen displayed on the monitor 30b, a control signal is sent from the computer 30a to the electrical box 27.

[0050] When applying liquid material onto the substrate SUB, the control device 30 first drives the X-axis stage 22 and the Y-axis stage 23 via the electrical box 27 so that the position to be applied on the substrate SUB is positioned directly below the observation optical system 28.

[0051] Next, the position to be coated on the substrate SUB is observed and confirmed by the observation optical system 28 and the imaging device 29, and the position to be coated on the substrate SUB is determined based on the results of the observation and confirmation. Furthermore, the Z-axis stage 26 and the coating mechanism 10 (drive mechanism 11) are driven based on a coating command input to the control device 30 via the keyboard 30c and the mouse 30d.

[0052] As a result, the tip 13a to which the liquid material is attached protrudes from a through hole formed in the bottom wall closing the lower end 15b of the container 15, and the liquid material comes into contact with the application surface of the substrate SUB, thereby applying the liquid material to the substrate SUB.

[0053] Although the embodiment of the present invention has been described above, the above-mentioned embodiment can be modified in various ways. The scope of the present invention is not limited to the above-mentioned embodiment. The scope of the present invention is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims. [Industrial Applicability]

[0054] The above-described embodiment is particularly advantageously applied to a liquid material application mechanism and application device. [Explanation of symbols]

[0055] 10 Coating mechanism, 10A Coating mechanism, 11 Drive mechanism, 12 Coating needle holder, 12a Screw, 12b Screw, 13 Coating needle, 13a Tip, 13b Base, 14 Second magnet, 15 Container, 15a Upper end, 15b Lower end, 21a Base plate, 21b Frame, 22 X-axis stage, 23 Y-axis stage, 24 Stage movable plate, 25 Adsorption plate, 27 Electrical box, 28 Observation optical system, 29 Imaging device, 30 Control device, 30a Computer, 30b Monitor, 30c Keyboard, 30d Mouse, 100 Coating device, 111 Servo motor, 111a Rotating shaft, 112 Cam, 112a First surface, 112b Second surface, 113 Bearing, 114 Cam connecting plate, 115 Movable part, 115a Stopper, 116 buffer mechanism, 116a linear guide, 116b elastic member, 117 application needle holder fixing portion, 118 first magnet, SUB substrate.

Claims

1. A coating mechanism for coating a liquid material on a coating surface, comprising: A coating needle holder fixing portion; a coating needle holder that is detachably attached to the coating needle holder fixing portion; a coating needle held by the coating needle holder; A buffer mechanism is provided. the buffer mechanism is attached to the needle holder fixing portion outside the needle holder, The buffer mechanism is configured to be capable of buffering an impact generated when the application needle comes into contact with the application surface.

2. The application mechanism includes a linear guide and an elastic member. the application needle holder fixing portion is held by the linear guide so as to be slidable in a direction perpendicular to the application surface, The coating mechanism according to claim 1 , wherein the elastic member biases the coating needle holder fixing portion toward the coating surface.

3. A first magnet held by the application needle holder fixing portion; a second magnet held by the application needle holder, the application needle holder is made of a resin material, 3 . The coating mechanism according to claim 1 , wherein the coating needle holder is detachably attached to the coating needle holder fixing portion by attracting the second magnet to the first magnet. 4 .

4. A first magnet held by the application needle holder fixing portion; a second magnet held by the application needle holder, the application needle holder is made of a non-magnetic metal material, 3 . The coating mechanism according to claim 1 , wherein the coating needle holder is detachably attached to the coating needle holder fixing portion by attracting the second magnet to the first magnet. 4 .

5. A coating device comprising the coating mechanism according to any one of claims 1 to 4.

Images